Sheet workpiece conveying device and power device processing equipment

Abstract

The present application belongs to the technical field of power device processing, and discloses a sheet workpiece conveying device and a power device processing equipment. The sheet workpiece conveying device can convey a carrier tape through a carrier tape conveying module, and peel off sheet workpieces adhered to the carrier tape from the carrier tape through a demolding module and place the sheet workpieces on a lower pressing die located at a demolding position. Then, the lower pressing die is driven to slide relative to a lower pressing die fixing seat by a displacement driving assembly, so that the lower pressing die moves to a pressing die position. At this time, the lower pressing die fixing seat and / or the upper pressing die can be driven to move by a pressing die driving assembly, so that the upper pressing die and the lower pressing die located at the pressing die position move close to each other, so as to stamp the sheet workpieces, thereby completing the automatic conveying and stamping of the sheet workpieces.

Description

Technical Field

[0001] This invention relates to the field of power device processing technology, and more particularly to a sheet workpiece conveying device and power device processing equipment. Background Technology

[0002] An Insulated Gate Bipolar Transistor (IGBT) is a composite, fully controllable, voltage-driven power semiconductor device composed of a Bipolar Junction Transistor (BJT) and an Insulated Gate Field-Effect Transistor (MOS). The electrodes of an IGBT are mostly made of copper sheets with a thickness of 0.2~0.3mm. These sheets are first bent into a specific shape to form a copper bridge with leads. In processing the copper bridge, copper foil is first cut into shaped copper sheets using a die-cutting tool, and then the copper sheets are stamped into leads using a forming mold to obtain a three-dimensional copper bridge. However, this process requires manual operation and has a low degree of automation. Summary of the Invention

[0003] According to one aspect of the present invention, a sheet workpiece conveying device is provided to solve the problem that the processing of copper bridges in the prior art requires manual operation and has a low degree of automation.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A sheet workpiece conveying device is used to convey sheet workpieces adhered to a carrier belt. The sheet workpiece conveying device includes a carrier belt conveying module, a demolding module, a shifting module, and a pressing module. The carrier belt conveying module conveys the carrier belt. The pressing module includes a lower pressing die holder, a lower pressing die, an upper pressing die, and a pressing die driving assembly. The lower pressing die is slidable relative to the lower pressing die holder and has a demolding position and a pressing position. The pressing die driving assembly drives the lower pressing die holder and / or the upper pressing die to move, so that the upper pressing die and the lower pressing die located at the pressing position move closer to each other to press the sheet workpiece. The demolding module peels the sheet workpiece adhered to the carrier belt from the carrier belt and places it on the lower pressing die located at the demolding position. The shifting module includes a shifting drive assembly, which drives the lower pressing die to slide relative to the lower pressing die holder.

[0006] As a preferred embodiment of the sheet workpiece conveying device, the pressing mold module further includes an upper pressing mold fixing seat and a pressing mold module base. The upper pressing mold is fixedly disposed on the upper pressing mold fixing seat, the lower pressing mold fixing seat is connected to a first transmission rod, and the upper pressing mold fixing seat is connected to a second transmission rod. The pressing mold module base has a sliding cavity, and both the lower pressing mold fixing seat and the upper pressing mold fixing seat are slidably disposed within the sliding cavity. The pressing mold driving assembly includes a pressing mold driving cylinder disposed on the pressing mold module base and a transmission block connected to the movable end of the pressing mold driving cylinder. The transmission block has a first inclined groove and a second inclined groove. The first transmission rod is slidably disposed within the first inclined groove, and the second transmission rod is slidably disposed within the second inclined groove. The pressing mold driving cylinder can drive the transmission block to move, thereby causing the lower pressing mold fixing seat and the upper pressing mold fixing seat to slide along the sliding cavity.

[0007] As a preferred embodiment of the sheet workpiece conveying device, the shifting module further includes a shifting base fixedly disposed on the pressing die fixing seat and a shifting slide slidably disposed on the shifting base. The pressing die is disposed on the shifting slide. The shifting drive assembly includes a shifting module motor disposed on the shifting base and a lead screw connected to the output shaft of the shifting module motor. The lead screw is threadedly connected to the shifting slide.

[0008] As a preferred embodiment of the sheet workpiece conveying device, the shifting base is fixedly provided with two side fixing seats, each of which is provided with rollers, and the two sides of the shifting slide are respectively in rolling contact with the rollers of the two side fixing seats.

[0009] As a preferred embodiment of the sheet workpiece conveying device, the carrier belt conveying module includes a loading mechanism and a feeding mechanism. The loading mechanism includes a carrier belt reel and a loading drive assembly. The carrier belt can be wound around the carrier belt reel. The loading drive assembly is used to drive the carrier belt reel to rotate so as to unwind the carrier belt. The feeding mechanism includes a feeding drive assembly, which is used to convey the carrier belt unwound from the carrier belt reel.

[0010] As a preferred embodiment of the sheet workpiece conveying device, the feeding mechanism further includes a feeding mechanism base, and the feeding drive assembly includes a feeding drive motor and a feeding transmission gear that is drivenly connected to the output end of the feeding drive motor. The feeding transmission gear is drivenly connected to the carrier belt.

[0011] As a preferred embodiment of the sheet workpiece conveying device, the feeding mechanism further includes a tensioning mechanism, which includes a tensioning mechanism base and a tensioning wheel. The tensioning mechanism base is fixedly disposed on the feeding mechanism base, and the tensioning wheel can slide relative to the tensioning mechanism base. The carrier belt unwound from the carrier belt reel rolls with the tensioning wheel, and the carrier belt reel and the tensioning wheel are respectively located on both sides of the carrier belt.

[0012] As a preferred embodiment of the sheet workpiece conveying device, the tension force on the carrier belt gradually increases as the tensioning wheel gradually moves away from the tensioning mechanism base. The tensioning mechanism also includes an elastic element, which provides an elastic force to move the tensioning wheel away from the tensioning mechanism base.

[0013] As a preferred embodiment of the sheet workpiece conveying device, the tensioning mechanism further includes a tensioning wheel mounting plate, the tensioning wheel being rotatably mounted on the tensioning wheel mounting plate, the tensioning wheel mounting plate being slidably engaged with the tensioning mechanism base, one of the tensioning wheel mounting plate and the tensioning mechanism base being provided with a sensing plate, and the other being provided with a position sensor, the position sensor being able to obtain its relative position with the sensing plate.

[0014] As a preferred embodiment of the sheet workpiece conveying device, the carrier belt has multiple connecting holes, which are spaced apart along the extension direction of the carrier belt. The feeding mechanism further includes a feeding base plate with through holes. The feeding drive assembly includes a feeding motor and a conveying wheel that is driven to the output end of the feeding motor. The outer peripheral wall of the conveying wheel is provided with a plurality of conveying teeth. At least a portion of the conveying wheel passes through the through holes, and the conveying teeth can be inserted into the connecting holes.

[0015] As a preferred embodiment of the sheet workpiece conveying device, the demolding module includes a peeling blade and a pressure plate. A first conveying channel for the carrier belt to pass through is formed between the feeding base plate and the pressure plate. A second conveying channel for the carrier belt to pass through is formed between the pressure plate and the peeling blade. The second conveying channel is located downstream of the first conveying channel. The first conveying channel is configured to allow the carrier belt and the sheet workpiece adhered to the carrier belt to pass through. The second conveying channel is configured to allow only the carrier belt to pass through.

[0016] As a preferred embodiment of the sheet workpiece conveying device, the first conveying channel and the second conveying channel are arranged at an angle, and the angle does not exceed 90°.

[0017] As a preferred embodiment of the sheet workpiece conveying device, it further includes a film stretching module. Along the conveying direction of the carrier belt, the film stretching module is located downstream of the demolding module. The film stretching module includes a film stretching module base, a drive roller, a driven roller, and a drive roller drive assembly. The drive roller and the driven roller are both rotatably mounted on the film stretching module base. A gap is formed between the drive roller and the driven roller for the carrier belt to pass through. The drive roller drive assembly is used to drive the drive roller to rotate, thereby driving the carrier belt to move.

[0018] As a preferred embodiment of the sheet workpiece conveying device, the film stretching module base includes a first base and a second base movably connected to the first base. The driving roller is disposed on the first base, and the driven roller is disposed on the second base. The film stretching module also includes a locking member, which is used to lock or unlock the position of the second base relative to the first base.

[0019] As a preferred embodiment of the sheet workpiece conveying device, the active roller drive assembly includes a film-pulling motor and a film-pulling transmission gear that is driven to the output end of the film-pulling motor, and the film-pulling transmission gear is driven to the active roller.

[0020] As a preferred embodiment of the sheet workpiece conveying device, it further includes a film taking-up module. Along the conveying direction of the carrier belt, the film taking-up module is located downstream of the film stretching module. The film taking-up module includes a film taking-up base plate, a film taking-up spindle rotatably disposed on the film taking-up base plate, and a film taking-up drive assembly for driving the film taking-up spindle to rotate relative to the film taking-up base plate. The film taking-up spindle is used to wind up the carrier belt.

[0021] As a preferred embodiment of the sheet workpiece conveying device, the film taking drive assembly includes a film taking motor disposed on the film taking base plate and a film taking drive gear that is drivenly connected to the output end of the film taking motor. The film taking drive gear is drivenly connected to the film taking main shaft.

[0022] According to another aspect of the present invention, a power device processing apparatus is provided, including the above-described sheet workpiece conveying device, wherein the pressing die is slidable relative to the pressing die fixing seat and sequentially has a demolding position, a pressing position, and a loading position; the power device processing apparatus further includes a bonding device for bonding the sheet workpiece supported by the pressing die at the loading position to a power device substrate.

[0023] The beneficial effects of this invention are:

[0024] This invention provides a sheet workpiece conveying device for conveying sheet workpieces adhered to a carrier belt. The sheet workpiece conveying device includes a carrier belt conveying module, a demolding module, a shifting module, and a pressing module. The carrier belt conveying module is used to convey the carrier belt. The pressing module includes a lower pressing die fixing seat, a lower pressing die, an upper pressing die, and a pressing die driving assembly. The lower pressing die can slide relative to the lower pressing die fixing seat and has a demolding position and a pressing position. The pressing die driving assembly can drive the lower pressing die fixing seat and / or the upper pressing die to move so that the upper pressing die and the lower pressing die located at the pressing position move closer to each other to press the sheet workpiece. The demolding module is used to peel the sheet workpiece adhered to the carrier belt from the carrier belt and place it on the lower pressing die located at the demolding position. The shifting module includes a shifting drive assembly for driving the lower pressing die to slide relative to the lower pressing die fixing seat. This sheet workpiece conveying device can convey a carrier belt through a carrier belt conveying module, and peel the sheet workpieces adhered to the carrier belt from the carrier belt through a demolding module, and place them on the lower die located at the demolding position. Then, the lower die is driven to slide relative to the lower die fixing seat through a displacement drive component, so that it moves to the pressing die position. At this time, the lower die fixing seat and / or the upper die can be driven to move through the pressing die drive component, so that the upper die and the lower die located at the pressing die position move closer to each other to stamp the sheet workpiece, thereby completing the automated conveying and stamping of the sheet workpiece.

[0025] The present invention also provides a power device processing equipment, including the aforementioned sheet workpiece conveying device. In the sheet workpiece conveying device, the lower die can slide relative to the lower die fixing seat and sequentially has a demolding position, a pressing position, and a loading position. The power device processing equipment also includes a bonding device, which is used to bond the sheet workpiece supported by the lower die at the loading position to the power device substrate. The power device processing equipment can automatically convey and press the sheet workpiece through the sheet workpiece conveying device and convey it to the loading position. Subsequently, the bonding device can bond the sheet workpiece supported by the lower die at the loading position to the power device substrate to realize the automatic bonding of the power device substrate and the sheet workpiece, thereby completing the processing of the power device. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the sheet workpiece conveying device in an embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the sheet-like workpiece and carrier belt in an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the first structure of the feeding mechanism in an embodiment of the present invention;

[0029] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0030] Figure 5 This is a schematic diagram of the second structure of the feeding mechanism in an embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram of the feeding mechanism in an embodiment of the present invention;

[0032] Figure 7 This is a schematic diagram of the feeding mechanism and demolding module in an embodiment of the present invention;

[0033] Figure 8 This is a partial structural diagram of the feeding mechanism and the demolding module in an embodiment of the present invention;

[0034] Figure 9 This is a cross-sectional view of the feeding mechanism and the demolding module in an embodiment of the present invention;

[0035] Figure 10 This is a schematic diagram of the structure of the shifting module and the pressing module in an embodiment of the present invention;

[0036] Figure 11 This is a first cross-sectional view of the shifting module and the pressing module in an embodiment of the present invention;

[0037] Figure 12 This is a second cross-sectional view of the shifting module and the pressing module in an embodiment of the present invention;

[0038] Figure 13 This is a schematic diagram of the structure of the film-pulling module in an embodiment of the present invention;

[0039] Figure 14 This is a schematic diagram of the film receiving module in an embodiment of the present invention.

[0040] In the picture:

[0041] 100. Sheet-shaped workpiece; 101. First positioning hole;

[0042] 200, carrier tape; 201, second positioning hole; 202, connecting hole;

[0043] 1. Feeding mechanism; 11. Carrier tape reel; 111. Carrier tape reel shaft; 12. Feeding mechanism base; 13. Feeding drive motor; 14. Feeding transmission gear; 15. Tensioning mechanism base; 151. Slide rail; 16. Tensioning wheel; 161. Tensioning wheel mounting plate; 17. Elastic element; 18. Sensing plate; 19. Position sensor; 191. Sensor mounting block;

[0044] 2. Feeding mechanism; 21. Feeding base plate; 211. Through hole; 212. Groove; 22. Feeding motor; 221. Feeding motor mounting base; 23. Conveying wheel; 231. Conveying tooth;

[0045] 3. Demolding module; 31. Peeling blade; 32. Pressure plate; 33. Pressure plate;

[0046] 4. Shifting module; 41. Shifting base; 42. Shifting slide; 43. Side fixing seat; 44. Lead screw; 45. Shifting module motor seat; 46. Shifting module motor; 47. Roller; 471. Roller mounting shaft;

[0047] 5. Pressing mold module; 51. Lower pressing mold fixing seat; 511. First transmission rod; 52. Lower pressing mold; 53. Upper pressing mold fixing seat; 531. Second transmission rod; 54. Upper pressing mold; 541. Pressing mold crossbeam; 55. Pressing mold module base; 551. Sliding cavity; 56. Pressing mold drive cylinder; 561. Connecting block; 57. Transmission block; 571. First inclined groove; 572. Second inclined groove; 58. Pressing mold cylinder fixing plate;

[0048] 6. Film stretching module; 61. Film stretching module base; 611. First base; 612. Second base; 613. Rotating shaft; 62. Drive roller; 63. Driven roller; 64. Hook; 65. Film stretching motor; 651. Film stretching motor mounting bracket; 66. Film stretching transmission gear;

[0049] 7. Film take-up module; 71. Film take-up base plate; 72. Film take-up spindle; 721. Film take-up spindle seat; 73. Film take-up motor; 731. Film take-up motor mounting base; 74. Film take-up transmission gear;

[0050] 8. Rack. Detailed Implementation

[0051] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0052] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0053] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0054] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0055] An Insulated Gate Bipolar Transistor (IGBT) is a composite, fully controllable, voltage-driven power semiconductor device composed of a Bipolar Junction Transistor (BJT) and an Insulated Gate Field-Effect Transistor (MOS). The electrodes of an IGBT are mostly made of copper sheets with a thickness of 0.2~0.3mm. These sheets are first bent into a specific shape to form a copper bridge with leads. In processing the copper bridge, copper foil is first cut into shaped copper sheets using a die-cutting tool, and then the copper sheets are stamped into leads using a forming mold to obtain a three-dimensional copper bridge. However, this process requires manual operation and has a low degree of automation.

[0056] In response, this embodiment provides a sheet workpiece conveying device to solve the problem that the processing of copper bridges in the prior art requires manual operation and has a low degree of automation, and can be used in the field of power device processing technology.

[0057] Reference Figures 1-14 The sheet workpiece conveying device is used to convey the sheet workpiece 100. In this embodiment, the sheet workpiece 100 is specifically a copper sheet for bonding with the power device substrate. Further, the power device is an IGBT, while in other embodiments, it can be other types of power devices. The sheet workpiece 100 is adhered to the carrier tape 200, and its specific structure can be referred to in the previous patent application number CN202411897091.3.

[0058] Continue to refer to Figures 1-14The sheet workpiece conveying device includes a carrier belt conveying module, a demolding module 3, a shifting module 4, and a pressing module 5. The carrier belt conveying module is used to convey the carrier belt 200. The pressing module 5 includes a lower pressing die fixing seat 51, a lower pressing die 52, an upper pressing die 54, and a pressing die driving assembly. The lower pressing die 52 can slide relative to the lower pressing die fixing seat 51 to have a demolding position and a pressing position. The pressing die driving assembly can drive the lower pressing die fixing seat 51 and / or the upper pressing die 54 to move so that the upper pressing die 54 and the lower pressing die 52 located in the pressing position move closer to each other to press the sheet workpiece 100. The demolding module 3 is used to peel the sheet workpiece 100 adhered to the carrier belt 200 from the carrier belt 200 and place it on the lower pressing die 52 located in the demolding position. The shifting module 4 includes a shifting driving assembly, which is used to drive the lower pressing die 52 to slide relative to the lower pressing die fixing seat 51. The sheet workpiece conveying device can convey the carrier belt 200 through the carrier belt conveying module, and peel the sheet workpiece 100 adhered to the carrier belt 200 from the carrier belt 200 through the demolding module 3, and place it on the lower pressing die 52 located at the demolding position. Then, the lower pressing die 52 is driven to slide relative to the lower pressing die fixing seat 51 through the displacement driving component, so that it moves to the pressing die position. At this time, the lower pressing die fixing seat 51 and / or the upper pressing die 54 can be driven to move through the pressing die driving component, so that the upper pressing die 54 and the lower pressing die 52 located at the pressing die position move closer to each other to stamp the sheet workpiece 100, thereby completing the automated conveying and stamping of the sheet workpiece 100.

[0059] Optionally, the sheet workpiece 100 has a first positioning hole 101, and the pressing mold 52 is provided with a positioning pin 521. After the demolding module 3 peels the sheet workpiece 100 adhered to the carrier belt 200 from the carrier belt 200 and places it on the pressing mold 52 located at the demolding position, the positioning pin 521 is inserted into the first positioning hole 101. Thus, the first positioning hole 101 can be positioned by the positioning pin 521, so as to avoid the sheet workpiece 100 from becoming loose or misaligned during the movement of the pressing mold 52. In addition, during demolding, the sheet workpiece 100 can be peeled off from the carrier belt 200 more conveniently by the insertion and cooperation of the positioning pin 521 with the first positioning hole 101. Optionally, multiple first positioning holes 101 are provided, and multiple positioning pins 521 are provided in the pressing mold 52. After the demolding module 3 peels the sheet workpiece 100 adhered to the carrier belt 200 from the carrier belt 200 and places it on the pressing mold 52 located in the demolding position, the multiple positioning pins 521 are inserted into the multiple first positioning holes 101 one by one.

[0060] Optionally, the carrier belt 200 has a second positioning hole 201, the extension direction of the second positioning hole 201 being consistent with the extension direction of the carrier belt 200. When the sheet workpiece 100 is adhered to the carrier belt 200, the first positioning hole 101 and the second positioning hole 201 are connected, so that when the positioning pin 521 is already inserted into the first positioning hole 101 before the sheet workpiece 100 is peeled off from the carrier belt 200, the positioning pin 521 can be avoided from interfering with the movement of the carrier belt 200.

[0061] Continue to refer to Figures 1-14 The molding module 5 also includes an upper molding die fixing seat 53 and a molding module base 55. The upper molding die 54 is fixedly installed on the upper molding die fixing seat 53. Specifically, the upper molding die fixing seat 53 is also connected to a molding die crossbeam 541. The upper molding die 54 is fixedly installed below the molding die crossbeam 541. In addition, in order to facilitate the installation of the lower molding die 52 and the upper molding die 54, the lower molding die fixing seat 51 is located above the upper molding die fixing seat 53. The lower die fixing seat 51 is connected to the first transmission rod 511, and the upper die fixing seat 53 is connected to the second transmission rod 531; the die module base 55 has a sliding cavity 551, and both the lower die fixing seat 51 and the upper die fixing seat 53 are slidably disposed in the sliding cavity 551; the die driving assembly includes a die driving cylinder 56 disposed on the die module base 55 and a transmission block 57 connected to the movable end of the die driving cylinder 56, wherein the die module base 55 is also fixedly connected to a die cylinder fixing plate 58, the die driving cylinder 56 is mounted on the die cylinder fixing plate 58, and the movable end of the die driving cylinder 56 is provided with a connecting block 561, which is embedded in the interior of the transmission block 57, thereby driving the transmission block 57 to reciprocate. The transmission block 57 has a first inclined groove 571 and a second inclined groove 572. The first transmission rod 511 is slidably disposed in the first inclined groove 571, and the second transmission rod 531 is slidably disposed in the second inclined groove 572. The die driving cylinder 56 can drive the transmission block 57 to move, so as to drive the lower die fixing seat 51 and the upper die fixing seat 53 to slide along the slide cavity 551. The first inclined groove 571 and the second inclined groove 572 extend at an angle to the movement direction of the movable end of the die-driving cylinder 56, and the angle is less than 90°. In addition, along the extension direction of the movable end of the die-driving cylinder 56, the first inclined groove 571 and the second inclined groove 572 gradually approach each other. The extension direction of the sliding cavity 551 is perpendicular to the movement direction of the movable end of the die-driving cylinder 56. Thus, when the movable end of the die-driving cylinder 56 reciprocates, the first transmission rod 511 in the first inclined groove 571 and the second transmission rod 531 in the second inclined groove 572 can slide in the sliding cavity 551, thereby driving the lower die fixing seat 51 and the upper die fixing seat 53 to approach or move away from each other. This allows the lower die 52 and the upper die 54 to approach or move away from each other, thus completing the stamping of the sheet workpiece 100.

[0062] Continue to refer to Figures 1-14 The shifting module 4 also includes a shifting base 41 fixedly disposed on the pressing die fixing seat 51 and a shifting slide 42 slidably disposed on the shifting base 41. The pressing die 52 is disposed on the shifting slide 42. The shifting drive assembly includes a shifting module motor 46 disposed on the shifting base 41 and a lead screw 44 connected to the output shaft of the shifting module motor 46. Specifically, the shifting base 41 is also fixedly disposed on a shifting module motor seat 45. The shifting module motor 46 is fixedly mounted on the shifting module motor seat 45. The lead screw 44 is threadedly connected to the shifting slide 42, so that the shifting module motor 46 can drive the lead screw 44 to rotate, thereby driving the shifting slide 42 to slide relative to the shifting base 41, thereby realizing the sliding of the pressing die 52 relative to the pressing die fixing seat 51.

[0063] Continue to refer to Figures 1-14 The shifting base 41 is fixedly provided with two side fixing seats 43, each of which is equipped with rollers 47. The two sides of the shifting slide 42 are in rolling contact with the rollers 47 of the two side fixing seats 43, thereby limiting the sliding of the shifting slide 42 through the two side fixing seats 43 and preventing its movement from deviating. In addition, by providing rollers 47 and the shifting slide 42 in rolling contact with the rollers 47, the frictional resistance when the shifting slide 42 slides can be reduced. Each of the two side fixing seats 43 is connected to a roller mounting shaft 471, and the two rollers 47 are rotatably mounted on the two roller mounting shafts 471.

[0064] Continue to refer to Figures 1-14 The carrier belt conveying module includes a loading mechanism 1 and a feeding mechanism 2. The loading mechanism 1 includes a carrier belt reel 11 and a loading drive assembly. The carrier belt 200 can be wound around the carrier belt reel 11. The loading drive assembly is used to drive the carrier belt reel 11 to rotate so as to unwind the carrier belt 200. The feeding mechanism 2 includes a feeding drive assembly, which is used to convey the carrier belt 200 unwound from the carrier belt reel 11, thereby completing the unwinding and conveying of the carrier belt 200.

[0065] Continue to refer to Figures 1-14 The feeding mechanism 1 also includes a feeding mechanism base 12, wherein the feeding mechanism base 12 is further connected to a carrier reel shaft 111, and the carrier reel 11 is mounted on the carrier reel shaft 111. The feeding drive assembly includes a feeding drive motor 13 and a feeding drive gear 14 that is driven through the output end of the feeding drive motor 13. The feeding drive gear 14 is driven through the carrier reel 11, so that the feeding drive motor 13 can drive the carrier reel 11 to rotate. In this embodiment, there are two feeding drive gears 14, both of which are helical gears and mesh with each other. One feeding drive gear 14 is driven through the output end of the feeding drive motor 13, and the other feeding drive gear 14 is driven through the carrier reel 11.

[0066] Continue to refer to Figures 1-14 The feeding mechanism 1 also includes a tensioning mechanism, which includes a tensioning mechanism base 15 and a tensioning wheel 16. The tensioning mechanism base 15 is fixedly mounted on the feeding mechanism base 12. The tensioning wheel 16 can slide relative to the tensioning mechanism base 15. The carrier belt 200 unwound from the carrier belt reel 11 rolls with the tensioning wheel 16. The carrier belt reel 11 and the tensioning wheel 16 are located on opposite sides of the carrier belt 200, so the tension force on the carrier belt 200 can be adjusted by adjusting the position of the tensioning wheel 16 relative to the tensioning mechanism base 15.

[0067] Continue to refer to Figures 1-14 As the tensioning pulley 16 gradually moves away from the tensioning mechanism base 15, the tension force on the carrier belt 200 gradually increases. The tensioning mechanism also includes an elastic element 17, which provides an elastic force to move the tensioning pulley 16 away from the tensioning mechanism base 15. Under the action of the elastic element 17, the tensioning pulley 16 always tends to increase the tension force on the carrier belt 200. When the above structure is not affected by external forces, it will increase the tension force on the carrier belt 200. In this embodiment, the elastic element 17 is specifically a compression spring; in other embodiments, the elastic element 17 can also be a tension spring.

[0068] Continue to refer to Figures 1-14 The tensioning mechanism also includes a tensioning wheel mounting plate 161. The tensioning wheel 16 is rotatably mounted on the tensioning wheel mounting plate 161. The tensioning wheel mounting plate 161 is slidably engaged with the tensioning mechanism base 15. Specifically, the tensioning mechanism base 15 has a slide rail 151, and the tensioning wheel mounting plate 161 is slidably engaged with the slide rail 151. One of the tensioning wheel mounting plate 161 and the tensioning mechanism base 15 is provided with a sensing plate 18, and the other is provided with a position sensor 19. The position sensor 19 can obtain its relative position with the sensing plate 18. This arrangement allows the tension force of the tensioning wheel 16 to be obtained through the relative position between the position sensor 19 and the sensing plate 18, thereby adjusting the output speed of the feeding drive motor 13 to adjust the unwinding speed of the carrier belt 200, ensuring that the tension force of the tensioning wheel 16 on the carrier belt 200 remains within a suitable range. This embodiment exemplarily provides a scheme in which the sensing element 18 is disposed on the tensioning wheel mounting plate 161 and the position sensor 19 is disposed on the tensioning mechanism base 15, wherein the tensioning mechanism base 15 is fixedly provided with a sensor mounting block 191 and the position sensor 19 is mounted on the sensor mounting block 191.

[0069] Continue to refer to Figures 1-14The carrier belt 200 has multiple connection holes 202, which are spaced apart along the extension direction of the carrier belt 200. The feeding mechanism 2 also includes a feeding base plate 21, which has through holes 211. The feeding drive assembly includes a feeding motor 22 and a conveying wheel 23 that is driven to the output end of the feeding motor 22. The feeding base plate 21 is also fixedly connected to a feeding motor mounting seat 221, and the feeding motor 22 is mounted on the feeding motor mounting seat 221. Optionally, the feeding base plate 21, the feeding motor mounting seat 221, and the molding module base 55 are fixedly connected in sequence. The outer peripheral wall of the conveyor wheel 23 is provided with a number of conveying teeth 231. At least part of the conveyor wheel 23 passes through the through hole 211, and the conveying teeth 231 can be inserted into the connecting hole 202. Thus, the conveyor wheel 23 can be driven to rotate by the feeding motor 22. The conveyor belt 200 is conveyed by the insertion and cooperation of the conveying teeth 231 and the connecting hole 202. The above conveying method will not cause the carrier belt 200 to slip relative to the conveyor wheel 23, making the conveying process more stable and controllable.

[0070] Continue to refer to Figures 1-14 The demolding module 3 includes a peeling blade 31 and a pressure plate 32. A first conveying channel for the carrier belt 200 to pass through is formed between the feeding base plate 21 and the pressure plate 32. The feeding base plate 21 also has a groove 212, and a through hole 211 is provided in the bottom wall of the groove 212. The pressure plate 32 is disposed in the groove 212, and the two sides of the pressure plate 32 are raised so as to fit against the bottom wall of the groove 212. A groove is formed in the middle part of the bottom of the pressure plate 32 to form the first conveying channel. Optionally, the feeding base plate 21 is also fixedly connected to a pressure plate 33. The pressure plate 33 can abut against the top wall of the pressure plate 32 to limit the pressure plate 32 so that it can be stably installed in the groove 212 of the feeding base plate 21. A second conveying channel is formed between the pressure plate 32 and the peeling blade 31 for the carrier belt 200 to pass through. The second conveying channel is located downstream of the first conveying channel. The first conveying channel is configured to allow the carrier belt 200 and the sheet workpiece 100 adhered to the carrier belt 200 to pass through, while the second conveying channel is configured to allow only the carrier belt 200 to pass through. Thus, after the carrier belt 200 with the sheet workpiece 100 adhered to it passes through the first conveying channel, the carrier belt 200 will continue to be conveyed to the second conveying channel, while the sheet workpiece 100 cannot pass through the second conveying channel and will be peeled off. In addition, in this embodiment, after the carrier belt 200 with the sheet workpiece 100 adhered to it passes through the first conveying channel, the sheet workpiece 100 is conveyed to the top of the lower pressure mold 52 located at the demolding position, and the positioning pin 521 can be inserted and engaged with the first positioning hole 101 of the sheet workpiece 100 to assist the demolding module 3 in peeling the sheet workpiece 100 from the carrier belt 200, and at the same time complete the positioning of the sheet workpiece 100.

[0071] Continue to refer to Figures 1-14The first and second conveying channels are set at an angle, not exceeding 90°. This allows the carrier belt 200, with the sheet-like workpiece 100 adhered to it, to bend after passing through the first conveying channel and continue being conveyed to the second conveying channel. This further prevents interference between the carrier belt 200 and the positioning pin 521 during the peeling process of the sheet-like workpiece 100. Furthermore, the acute angle between the first and second conveying channels increases the degree of bending of the carrier belt 200, further facilitating the peeling of the sheet-like workpiece 100.

[0072] Continue to refer to Figures 1-14 The sheet workpiece conveying device also includes a film stretching module 6. Along the conveying direction of the carrier belt 200, the film stretching module 6 is located downstream of the demolding module 3. The film stretching module 6 includes a film stretching module base 61, a drive roller 62, a driven roller 63, and a drive roller drive assembly. Both the drive roller 62 and the driven roller 63 are rotatably mounted on the film stretching module base 61. A gap is formed between the drive roller 62 and the driven roller 63 for the carrier belt 200 to pass through. The carrier belt 200 sequentially passes through the first conveying channel, the second conveying channel, and the drive roller 62 and driven roller 63. The gap formed between 63 is used by the active roller drive assembly to drive the active roller 62 to rotate, thereby driving the carrier belt 200 to move. This allows the carrier belt 200 to enter the gap after passing through the second conveying channel, so as to continue conveying the carrier belt 200. At the same time, it can drive the carrier belt 200 located in the first and second conveying channels to continue conveying along the preset conveying path. In addition, the rotation speed of the active roller 62 can be adjusted according to the tension force on the carrier belt 200 to adjust the tension force on the carrier belt 200.

[0073] Continue to refer to Figures 1-14 The film stretching module base 61 includes a first base 611 and a second base 612 movably connected to the first base 611. An active roller 62 is disposed on the first base 611, and a driven roller 63 is disposed on the second base 612. The film stretching module 6 also includes a locking member for locking or unlocking the position of the second base 612 relative to the first base 611. Specifically, the first base 611 is located below the second base 612, and the second base 612 is rotatably connected to the first base 611 via a rotating shaft 613. Furthermore, the locking member is specifically a hook 64, which is rotatably connected to one of the first base 611 and the second base 612. When the first base 611 and the second base 612 are connected, the hook 64 can engage with the other of the first base 611 and the second base 612 to fix the first base 611 and the second base 612. This embodiment exemplarily provides a scheme in which the hook 64 is rotatably connected to the second base 612 and can engage with the first base 611.

[0074] As an alternative, the locking element can also be a locking screw, which can pass through one of the first base 611 and the second base 612 and be threadedly connected to the other of the first base 611 and the second base 612, thus achieving the same level of fixation. Optionally, multiple locking screws can be provided to improve the locking effect and prevent the two from loosening.

[0075] Continue to refer to Figures 1-14 The active roller drive assembly includes a film-pulling motor 65 and a film-pulling transmission gear 66 that is driven by the output end of the film-pulling motor 65. Specifically, the first base 611 is also provided with a film-pulling motor mounting base 651. The film-pulling motor 65 is mounted on the film-pulling motor mounting base 651, and the film-pulling transmission gear 66 is driven by the active roller 62, so that the active roller 62 can be driven to rotate by the film-pulling motor 65. In this embodiment, there are two film-pulling transmission gears 66, both of which are helical gears and mesh with each other. One film-pulling transmission gear 66 is driven by the output end of the film-pulling motor 65, and the other film-pulling transmission gear 66 is driven by the active roller 62.

[0076] Continue to refer to Figures 1-14 The sheet workpiece conveying device also includes a film-receiving module 7. Located downstream of the film-stretching module 6 along the conveying direction of the carrier belt 200, the film-receiving module 7 includes a film-receiving base plate 71, a film-receiving spindle 72 rotatably mounted on the film-receiving base plate 71, and a film-receiving drive assembly for driving the film-receiving spindle 72 to rotate relative to the film-receiving base plate 71. The film-receiving spindle 72 is used to wind up the carrier belt 200. The film-receiving base plate 71 is fixedly connected to a film-receiving spindle seat 721, and the film-receiving spindle 72 is rotatably connected to the film-receiving spindle seat 721, thereby enabling the film-receiving spindle 72 to rotate relative to the film-receiving base plate 71. By providing the film-receiving module 7, the carrier belt 200 after the sheet workpiece 100 has been peeled can be wound up, facilitating centralized processing or recycling of the carrier belt 200.

[0077] Continue to refer to Figures 1-14 The film-taking drive assembly includes a film-taking motor 73 mounted on a film-taking base plate 71 and a film-taking transmission gear 74 driven by the output end of the film-taking motor 73. The film-taking base plate 71 is also fixedly connected to a film-taking motor mounting base 731, on which the film-taking motor 73 is mounted. The film-taking transmission gear 74 is driven by a film-taking spindle 72, thereby driving the film-taking spindle 72 to rotate via the film-taking motor 73. In this embodiment, two film-taking transmission gears 74 are provided, both being helical gears that mesh with each other. One film-taking transmission gear 74 is driven by the output end of the film-taking motor 73, and the other film-taking transmission gear 74 is driven by the film-taking spindle 72.

[0078] Continue to refer to Figures 1-14The sheet workpiece conveying device also includes a frame 8, and the aforementioned molding module base 55, feeding mechanism base 12, tensioning mechanism base 15, feeding base plate 21, peeling knife 31, first base 611 and film receiving base plate 71 are all fixedly connected to the frame 8.

[0079] This embodiment also provides a power device processing equipment, including the aforementioned sheet workpiece conveying device. In the sheet workpiece conveying device, the pressing die 52 can slide relative to the pressing die fixing seat 51 and sequentially has a demolding position, a pressing position, and a loading position. The power device processing equipment also includes a bonding device, which is used to bond the sheet workpiece 100 supported by the pressing die 52 at the loading position to the power device substrate. This power device processing equipment can automatically convey and press the sheet workpiece 100 through the sheet workpiece conveying device and convey it to the loading position. Subsequently, the bonding device can bond the sheet workpiece 100 supported by the pressing die 52 at the loading position to the power device substrate, thereby achieving automated bonding between the power device substrate and the sheet workpiece 100, and thus completing the processing of the power device. In this embodiment, the sheet workpiece 100 is specifically a copper sheet for bonding with the power device substrate. Further, the power device is an IGBT, while in other embodiments, it can be other types of power devices.

[0080] Optionally, the power device processing equipment also includes a power device substrate conveying device, which is used to convey the power device substrate to a preset position, and a bonding device is used to bond the sheet workpiece 100 to the power device substrate located at the preset position.

[0081] The sheet workpiece conveying device provided in this embodiment can convey a carrier belt 200 with sheet workpieces 100 attached to it, and then peel the sheet workpieces 100 off the carrier belt 200, realizing the conveying and stamping of the sheet workpieces 100, with a high degree of automation. Specifically, the carrier belt 200 can be unwound by the feeding mechanism 1, and the conveying of the carrier belt 200 can be completed by the feeding mechanism 2. At the same time, the shifting module 4 drives the pressing die 52 to slide relative to the pressing die fixing seat 51 to move it to the demolding position. The carrier belt 200 is conveyed to the position of the lower die 52 by the feeding mechanism 2. The sheet workpiece 100 adhered to the carrier belt 200 is peeled off the carrier belt 200 by the demolding module 3 and placed on the lower die 52 located at the demolding position. Then, the lower die 52 is driven to slide relative to the lower die fixing seat 51 by the shifting module 4 so that it moves to the pressing position. At this time, the lower die 52 and the upper die 54 in the pressing module 5 can be pressed together to realize the stamping process of the sheet workpiece 100.

[0082] After the above operations are completed, the pressing mold 52 can be conveyed to the loading position through the shifting module 4, and the power device substrate can be conveyed to the preset position through the power device substrate conveying device. The sheet workpiece 100 is bonded to the power device substrate located at the preset position through the bonding device, thereby completing the processing of the power device.

[0083] The above description is merely a preferred embodiment of the present invention and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of disclosure in this invention is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-disclosed concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this invention.

Claims

1. A sheet-shaped workpiece conveying device, characterized in that, The sheet-shaped workpiece (100) is used to convey a sheet-shaped workpiece (100) which is adhered to a carrier belt (200). The sheet-shaped workpiece conveying device includes a carrier belt conveying module, a demolding module (3), a shifting module (4), and a pressing module (5). The carrier belt conveying module is used to convey the carrier belt (200). The pressing module (5) includes a lower pressing mold fixing seat (51), a lower pressing mold (52), an upper pressing mold (54), and a pressing mold driving assembly. The lower pressing mold (52) can slide relative to the lower pressing mold fixing seat (51) and has a demolding position and a pressing position. The pressing mold driving assembly can drive the lower pressing mold (54) to the upper pressing mold (55). The die holder (51) and / or the upper die (54) move to bring the upper die (54) closer to the lower die (52) located in the die position to stamp the sheet workpiece (100); the demolding module (3) is used to peel the sheet workpiece (100) adhered to the carrier tape (200) from the carrier tape (200) and place it on the lower die (52) located in the demolding position; the shifting module (4) includes a shifting drive assembly for driving the lower die (52) to slide relative to the lower die holder (51); The molding module (5) further includes an upper molding die fixing seat (53) and a molding module base (55). The upper molding die (54) is fixedly disposed on the upper molding die fixing seat (53). The lower molding die fixing seat (51) is connected to a first transmission rod (511), and the upper molding die fixing seat (53) is connected to a second transmission rod (531). The molding module base (55) has a sliding cavity (551), and both the lower molding die fixing seat (51) and the upper molding die fixing seat (53) are slidably disposed in the sliding cavity (551). The molding drive assembly includes components disposed on the molding module base. (55) A die-driving cylinder (56) and a transmission block (57) connected to the movable end of the die-driving cylinder (56). The transmission block (57) has a first inclined groove (571) and a second inclined groove (572). The first transmission rod (511) is slidably disposed in the first inclined groove (571), and the second transmission rod (531) is slidably disposed in the second inclined groove (572). The die-driving cylinder (56) can drive the transmission block (57) to move, so as to drive the lower die fixing seat (51) and the upper die fixing seat (53) to slide along the slide cavity (551). The carrier belt conveying module includes a loading mechanism (1) and a feeding mechanism (2). The feeding mechanism (2) further includes a feeding base plate (21). The demolding module (3) includes a peeling knife (31) and a pressure plate (32). A first conveying channel for the carrier belt (200) to pass through is formed between the feeding base plate (21) and the pressure plate (32). A second conveying channel for the carrier belt (200) to pass through is formed between the pressure plate (32) and the peeling knife (31). The second conveying channel is located downstream of the first conveying channel. The first conveying channel is configured to allow the carrier belt (200) and the sheet workpiece (100) adhered to the carrier belt (200) to pass through. The second conveying channel is configured to allow only the carrier belt (200) to pass through.

2. The sheet workpiece conveying device according to claim 1, characterized in that, The shifting module (4) further includes a shifting base (41) fixedly disposed on the pressing mold fixing seat (51) and a shifting slide (42) slidably disposed on the shifting base (41). The pressing mold (52) is disposed on the shifting slide (42). The shifting drive assembly includes a shifting module motor (46) disposed on the shifting base (41) and a lead screw (44) connected to the output shaft of the shifting module motor (46). The lead screw (44) is threadedly connected to the shifting slide (42).

3. The sheet workpiece conveying device according to claim 2, characterized in that, The shifting base (41) is fixedly provided with two side fixing seats (43), and each of the two side fixing seats (43) is provided with a roller (47). The two sides of the shifting slide (42) respectively roll in contact with the rollers (47) of the two side fixing seats (43).

4. The sheet workpiece conveying device according to claim 1, characterized in that, The feeding mechanism (1) includes a carrier reel (11) and a feeding drive assembly. The carrier tape (200) can be wound around the carrier reel (11). The feeding drive assembly is used to drive the carrier reel (11) to rotate so as to unwind the carrier tape (200). The feeding mechanism (2) includes a feeding drive assembly. The feeding drive assembly is used to convey the carrier tape (200) unwound from the carrier reel (11).

5. The sheet workpiece conveying device according to claim 4, characterized in that, The feeding mechanism (1) also includes a feeding mechanism base (12), and the feeding drive assembly includes a feeding drive motor (13) and a feeding transmission gear (14) that is connected to the output end of the feeding drive motor (13). The feeding transmission gear (14) is connected to the carrier tape (11).

6. The sheet workpiece conveying device according to claim 5, characterized in that, The feeding mechanism (1) further includes a tensioning mechanism, which includes a tensioning mechanism base (15) and a tensioning wheel (16). The tensioning mechanism base (15) is fixedly disposed on the feeding mechanism base (12). The tensioning wheel (16) can slide relative to the tensioning mechanism base (15). The carrier belt (200) unwound from the carrier belt reel (11) rolls with the tensioning wheel (16). The carrier belt reel (11) and the tensioning wheel (16) are respectively located on both sides of the carrier belt (200).

7. The sheet workpiece conveying device according to claim 6, characterized in that, As the tensioning wheel (16) gradually moves away from the tensioning mechanism base (15), the tension force on the carrier belt (200) gradually increases. The tensioning mechanism also includes an elastic element (17), which provides an elastic force to move the tensioning wheel (16) away from the tensioning mechanism base (15).

8. The sheet workpiece conveying device according to claim 7, characterized in that, The tensioning mechanism also includes a tensioning wheel mounting plate (161), the tensioning wheel (16) is rotatably mounted on the tensioning wheel mounting plate (161), the tensioning wheel mounting plate (161) is slidably engaged with the tensioning mechanism base (15), one of the tensioning wheel mounting plate (161) and the tensioning mechanism base (15) is provided with a sensing plate (18), and the other is provided with a position sensor (19), the position sensor (19) is able to obtain its relative position with the sensing plate (18).

9. The sheet workpiece conveying device according to claim 4, characterized in that, The carrier belt (200) has a plurality of connecting holes (202), which are spaced apart along the extension direction of the carrier belt (200). The feeding base plate (21) has a through hole (211). The feeding drive assembly includes a feeding motor (22) and a conveying wheel (23) that is driven to the output end of the feeding motor (22). The outer peripheral wall of the conveying wheel (23) is provided with a plurality of conveying teeth (231). At least a portion of the conveying wheel (23) passes through the through hole (211), and the conveying teeth (231) can be inserted into the connecting hole (202).

10. The sheet workpiece conveying device according to claim 1, characterized in that, The first conveying channel and the second conveying channel are set at an angle, and the angle does not exceed 90°.

11. The sheet workpiece conveying device according to any one of claims 1-10, characterized in that, It also includes a film stretching module (6), which is located downstream of the demolding module (3) along the conveying direction of the carrier belt (200). The film stretching module (6) includes a film stretching module base (61), an active roller (62), a driven roller (63), and an active roller drive assembly. The active roller (62) and the driven roller (63) are rotatably disposed on the film stretching module base (61). A gap is formed between the active roller (62) and the driven roller (63) for the carrier belt (200) to pass through. The active roller drive assembly is used to drive the active roller (62) to rotate so as to drive the carrier belt (200) to move.

12. The sheet workpiece conveying device according to claim 11, characterized in that, The film-pulling module base (61) includes a first base (611) and a second base (612) movably connected to the first base (611). The driving roller (62) is disposed on the first base (611), and the driven roller (63) is disposed on the second base (612). The film-pulling module (6) also includes a locking member, which is used to lock or unlock the position of the second base (612) relative to the first base (611).

13. The sheet workpiece conveying device according to claim 11, characterized in that, The active roller drive assembly includes a film-pulling motor (65) and a film-pulling transmission gear (66) that is driven to the output end of the film-pulling motor (65). The film-pulling transmission gear (66) is driven to the active roller (62).

14. The sheet workpiece conveying device according to claim 11, characterized in that, It also includes a film take-up module (7), which is located downstream of the film stretching module (6) along the conveying direction of the carrier belt (200). The film take-up module (7) includes a film take-up base plate (71), a film take-up spindle (72) rotatably disposed on the film take-up base plate (71), and a film take-up drive assembly for driving the film take-up spindle (72) to rotate relative to the film take-up base plate (71). The film take-up spindle (72) is used to wind up the carrier belt (200).

15. The sheet workpiece conveying device according to claim 14, characterized in that, The film-collecting drive assembly includes a film-collecting motor (73) disposed on the film-collecting base plate (71) and a film-collecting transmission gear (74) that is drivenly connected to the output end of the film-collecting motor (73). The film-collecting transmission gear (74) is drivenly connected to the film-collecting main shaft (72).

16. Power device processing equipment, characterized in that, The device includes a sheet workpiece conveying device as described in any one of claims 1-15, wherein the pressing die (52) is slidable relative to the pressing die fixing seat (51) and sequentially has a demolding position, a pressing position and a loading position; the power device processing equipment further includes a bonding device for bonding the sheet workpiece (100) supported by the pressing die (52) at the loading position to the power device substrate.

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