Mechanical bending adjustment mechanism for horizontal focusing mirror

Abstract

This invention discloses a mechanical bending adjustment mechanism for a horizontal focusing mirror, comprising a bending mechanism, a base plate, a pitch fine-tuning mechanism, and vacuum wiring terminals. The bending mechanism features a mirror mount and a Twist adjustment mirror mount coaxially aligned along the plane mirror base, coupled with four sets of symmetrically arranged bending constraint hinges to achieve precise bending and compensation for mirror torsional errors. The pitch fine-tuning mechanism employs an eccentrically designed pitch adjustment hinge to compensate for the center of gravity offset of the bending mechanism, and works with a linear driver and grating encoder to achieve high-precision attitude detection and closed-loop adjustment. The vacuum wiring terminals enable sealed wiring in ultra-high vacuum environments. This invention achieves high-precision bending, precise compensation for torsional errors, and precise pitch adjustment. Its modular design supports offline debugging, is adaptable to ultra-high vacuum environments, and is suitable for large scientific facilities such as synchrotron radiation sources, semiconductor lithography, and other fields.

Description

Technical Field

[0001] This invention relates to the field of optical precision mechanical adjustment technology, specifically a mechanical bending adjustment mechanism for a horizontal focusing lens. Background Technology

[0002] As the core component of the synchrotron beamline rear focusing mirror system, the horizontal focusing mirror's surface accuracy, attitude adjustment accuracy, and operational stability directly determine the imaging quality and operational reliability of the entire optical system.

[0003] Current mechanical bending adjustment mechanisms for horizontal focusing mirrors generally exhibit the following key technical defects in practical applications: First, uneven bending torque transmission. The bending constraint components of existing mechanisms lack precise center positioning design, leading to force imbalance on the mirror body during bending and significant surface accuracy errors, failing to meet the stringent requirements for nanometer-level surface accuracy in scenarios such as fourth-generation synchrotron radiation sources. Second, lack of torsional error compensation. Assembly tolerances and operational vibrations easily cause torsional errors in the mirror body, and existing mechanisms lack targeted adjustment structures, which directly deteriorate the beam focusing effect. Third, center of gravity offset interferes with adjustment stability. The centers of gravity of the bending mechanism and the attitude adjustment mechanism do not coincide, easily generating additional tilt errors during pitch adjustment, reducing adjustment accuracy. Fourth, low modularity. The overall integration of the mechanism is high, making offline debugging and rapid assembly and disassembly impossible, resulting in long on-site installation and debugging cycles and high maintenance costs. Fifth, insufficient attitude detection accuracy. The resolution of existing detection components is generally only at the 100 nrad level, unable to achieve high-precision closed-loop control of pitch adjustment.

[0004] The aforementioned technical problems, when combined, severely limit the application efficiency of horizontal focusing lenses in synchrotron beamline rear focusing lens systems. Therefore, the development of a mechanical bending adjustment mechanism that combines high-precision bending, torsional error compensation, center of gravity balance, modular design, and accurate detection functions has become an urgent need in this field. Summary of the Invention

[0005] The purpose of this invention is to provide a precision adjustment mechanism for a reflector that overcomes the defects in the prior art and features high bending surface accuracy, precise compensation for torsional errors, high stability, support for offline debugging and modular design, and accurate pitch adjustment detection.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] This invention proposes a mechanical bending adjustment mechanism for a horizontal focusing lens, comprising a bending mechanism, a base plate, a pitch fine-tuning mechanism, and a vacuum hub terminal. The vacuum hub terminal is fixed to the base plate by bolts and provides a vacuum-sealed signal and power hub for all electrical components within the mechanism. The bending mechanism includes a bending mechanism base, a lens mount, a bending constraint hinge, a Twist adjustment lens mount, a U-shaped pressure block, and a plane mirror base. The pitch fine-tuning mechanism includes an eccentrically designed pitch adjustment hinge, a grating ruler, a grating encoder, and an encoder mounting base.

[0008] The inner ring of the Pitch adjustment hinge is fixed to the base plate, and the base of the bending mechanism is detachably fixed to the outer ring of the Pitch adjustment hinge; the bending constraint hinge is set above the base of the bending mechanism, one end of which is fixed to the base of the bending mechanism, and the other end of which is connected to the mirror base or the Twist adjustment mirror base to transmit bending torque.

[0009] The clamping end of the Twist adjustment mirror mount is fixed to the plane mirror base by a U-shaped pressure block to compensate for the torsional error of the mirror body; the grating ruler is pasted on the outer ring of the Pitch adjustment hinge; the grating encoder is fixed to the base plate by an encoder mounting base and cooperates with the grating ruler to detect the Pitch adjustment angle; the root mean square value of the shape error after the plane mirror base is bent is required to be ≤200 nrad (rms) and the minimum step size of the Pitch adjustment is ≤100 nrad. Preferably, the mirror mount is installed on the base of the bending mechanism at the end away from the Twist adjustment mirror mount, and is symmetrically arranged with the Twist adjustment mirror mount along the length direction of the plane mirror base axis; four sets of bending constraint hinges are provided and are symmetrically arranged, two sets of bending constraint hinges are distributed vertically and connect the bending mechanism base and the upper mirror mount, and the other two sets of bending constraint hinges are distributed vertically and connect the bending mechanism base and the Twist adjustment mirror mount; one end of all bending constraint hinges is fixed to the bending mechanism base, the other end of the two sets of bending constraint hinges distributed at the mirror mount is connected to the mirror mount, and the other end of the two sets of bending constraint hinges distributed at the Twist adjustment mirror mount is connected to the Twist adjustment mirror mount; the coplanar error of the clamping ends of the mirror mount (102) and the Twist adjustment mirror mount (108) is required to be ≤0.01mm.

[0010] Preferably, the bending mechanism is a modular structure, further comprising auxiliary support plates and handles. Two auxiliary support plates are provided and respectively installed on both sides of the bending mechanism base and fixed to the base. These auxiliary support plates are used to support the bending mechanism during offline debugging, preventing interference between the moving parts and the testing platform. Two handles are provided and respectively fixed to the two auxiliary support plates. The bending mechanism base has three recessed through holes that correspond to the three protruding threaded holes on the outer ring of the Pitch adjustment hinge. With the auxiliary support plates and handles added, the bending mechanism can be used as an independent module for offline debugging and optical testing, and can be quickly attached and detached from the Pitch adjustment hinge using three screws.

[0011] Preferably, the four corners of the plane mirror base away from the optical area are provided with four ear-shaped protrusions, and the clamping ends of the mirror base and the Twist adjustment mirror base are provided with U-shaped grooves. Four U-shaped pressure blocks are provided, which clamp the four ear-shaped protrusions of the plane mirror base into the U-shaped grooves of the mirror base and the Twist adjustment mirror base respectively, so as to realize the mechanical clamping and fixing of the plane mirror base.

[0012] Preferably, each of the bending constraint hinges is provided with a moving end, a flexible connecting rod, and a hinge fixed end. Five flexible connecting rods are provided and are evenly radially connected between the moving end and the hinge fixed end. Both ends of the flexible connecting rods are provided with straight round notches at the connection points with the moving end and the hinge fixed end, respectively. The intersection of the extended axes of all the flexible connecting rods forms a rotation center, and the rotation center coincides with the neutral layer of the plane mirror substrate.

[0013] Preferably, the Twist adjustment mirror base includes a mirror base clamping end, a four-bar flexible adjustment hinge, and a mirror base fixing end; the bending mechanism further includes a screw support arm and a Twist adjustment arm; one end of the four-bar flexible adjustment hinge is fixedly connected to the mirror base fixing end, and the other end is fixedly connected to the mirror base clamping end, and the rotation center of the four-bar flexible adjustment hinge coincides with the neutral layer of the plane mirror substrate; the bending constraint hinges distributed on both sides of the Twist adjustment mirror base have one end fixed to the base of the bending mechanism, and the other end connected to the mirror base fixing end of the Twist adjustment mirror base; the U-shaped groove is provided on the mirror base clamping end of the Twist adjustment mirror base, and the ear-shaped protrusion of the plane mirror substrate is clamped and fixed in the U-shaped groove of the mirror base clamping end by a U-shaped pressure block; The Twist adjustment arm passes through the fixed end of the lens mount and is fixedly installed on the outer wall of the lens mount clamping end. Two screw supports are provided and are respectively installed on the outer walls of the fixed end of the lens mount on the upper and lower sides of the Twist adjustment arm. Each screw support is threaded with a Twist adjustment screw, and the end of the Twist adjustment screw abuts against the end of the Twist adjustment arm. By turning the Twist adjustment screw, the Twist adjustment arm can be pushed, causing the lens mount clamping end to rotate around the rotation center of the four-bar flexible adjustment hinge, thereby realizing compensation for lens torsional error. The minimum adjustment step of the Twist adjustment screw is ≤0.54μm, which can realize a Twist adjustment of 8μrad for the lens, with an adjustment range of ±3mrad.

[0014] Preferably, the bending mechanism further includes a linear actuator, a flexible coupling, a force sensor, and bending arms. Two bending arms are provided, arranged opposite each other along the length of the plane mirror base. One bending arm is fixedly installed at the bottom of the mirror base, and the other bending arm is fixedly installed at the bottom of the fixed end of the Twist adjusting mirror base. Two linear actuators are provided, each fixed to both ends of the bending mechanism base by bolts via actuator blocks. The output end of each linear actuator is coaxially aligned with the corresponding bending arm. The output ends of both linear actuators are connected to the two bending arms respectively via flexible couplings. Two force sensors are provided, connected in series between the two flexible couplings and the bending arms, for real-time detection of the bending force.

[0015] Preferably, the Pitch adjusting hinge further comprises three flexible spoke structures of different radii: a first flexible spoke structure, a second flexible spoke structure, and a third flexible spoke structure. Each of these three structures connects the outer and inner rings of the hinge. The intersection of the pointing directions of all the flexible spoke structures forms a rotation center three. This rotation center three coincides with the center point of the arc direction of the optical surface of the plane mirror base. The rotation center three deviates from the center of gravity of the Pitch adjusting hinge itself by a distance opposite to the center of gravity offset direction of the bending mechanism, thus compensating for the center of gravity offset of the bending mechanism.

[0016] Preferably, the Pitch fine-tuning mechanism further includes a second linear driver, a second driver pressure block, and a flexible decoupling coupling; the second linear driver is fixed to the base plate by the second driver pressure block, and the output end of the second linear driver is connected to the outer ring of the Pitch adjustment hinge through the flexible decoupling coupling; the flexible decoupling coupling includes two threaded connecting ends and two plate-shaped flexible hinges, having three degrees of freedom: Ty, Rx, and Rz.

[0017] Preferably, the outer ring of the Pitch adjustment hinge has an arc structure concentric with the rotation center, the grating ruler is attached to the arc structure and pressed and fixed by a pressure block; the grating encoder is attached to the grating ruler and is used to detect the rotation angle of the outer ring of the Pitch adjustment hinge in real time.

[0018] The beneficial effects of this invention are as follows:

[0019] (1) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention transmits bending torque evenly, effectively improves the bending surface accuracy of the plane mirror substrate, and meets the requirement of 200 nrad surface error root mean square value of the synchrotron radiation bending focusing lens.

[0020] (2) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention can accurately compensate for the torsional error of the lens body by adjusting the lens mount by Twist, so as to ensure the accurate working posture of the lens body;

[0021] (3) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention adopts an eccentric design through the Pitch adjustment hinge to compensate for the center of gravity offset of the bending mechanism and improve the stability and accuracy of the Pitch adjustment process;

[0022] (4) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention has a modular design, which can realize offline debugging and quick installation and removal, greatly improving the efficiency of installation, debugging and maintenance;

[0023] (5) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention achieves high-precision detection of the pitch adjustment angle by cooperating with the grating ruler and the grating encoder, providing accurate feedback for closed-loop control and ensuring the pitch adjustment accuracy;

[0024] (6) The mechanical bending adjustment mechanism of the horizontal focusing lens of the present invention realizes the sealed centralized transmission of electrical signals and power in an ultra-high vacuum environment through a vacuum hub terminal, which is suitable for vacuum working scenarios and avoids vacuum leakage and messy wires. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 This is a schematic diagram of the bending mechanism of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the plane mirror substrate of the present invention;

[0028] Figure 4 This is a top view of the bending constraint hinge of the present invention;

[0029] Figure 5 This is a schematic diagram illustrating the principle of the bending mechanism of the present invention for bending the plane mirror substrate;

[0030] Figure 6 This is a schematic diagram of the driving structure of the bending mechanism of the present invention;

[0031] Figure 7 This is a schematic diagram of the Twist adjustment of the bending mechanism of the present invention;

[0032] Figure 8 This is a schematic diagram of the Pitch fine-tuning mechanism of the present invention;

[0033] Figure 9 This is a top view of the structure of the Pitch fine-tuning mechanism of the present invention;

[0034] Figure 10 This is a schematic diagram of the flexible decoupling coupling of the present invention;

[0035] Figure 11 This is a schematic diagram illustrating the installation / removal of the bending mechanism and the pitch fine-tuning mechanism of the present invention;

[0036] Figure 12 The diagram shows the structure of threaded blade hinge structure one, threaded blade hinge structure two, and threaded blade hinge structure three of the present invention.

[0037] In the diagram, 1. Bending mechanism; 101. Bending mechanism base; 101-1. Screw mounting hole one; 101-2. Nail mounting hole two; 102. Mirror base; 103. Bending constraint hinge; 103-1. Moving end; 103-2. Straight round notch; 103-3. Flexible connecting rod; 103-4. Hinge fixed end; 103-5. Rotation center one; 104. Linear actuator one; 105. Actuator pressure block one; 106. Flexible coupling; 106-1. Orthogonal plate-shaped flexible hinge structure one; 106-2. Orthogonal plate-shaped flexible hinge structure two; 106-3. Orthogonal plate-shaped flexible hinge structure three; 106-4. Orthogonal plate-shaped flexible hinge structure four; 107. Force sensor; 108. Twist 108-1. Lens mount clamping end; 108-2. Four-bar flexible adjustment hinge; 108-3. Lens mount fixed end; 108-4. Rotation center two; 109. U-shaped pressure block; 110. Plane mirror base; 110-1. Ear-shaped protrusion; 110-2. Optical area; 111. Auxiliary support plate; 112. Handle; 113. Press-down arm; 114. Screw support arm; 115. Twist adjustment screw; 116. Twist adjustment arm; 2. Base plate; 3. Pitch fine-tuning mechanism; 301. Pitch Adjustable hinge, 301-1, outer ring of hinge, 301-2, hinge structure one with threaded blades, 301-3, flexible spoke structure one, 301-4, flexible spoke structure two, 301-5, hinge structure two with threaded blades, 301-6, hinge structure three with threaded blades, 301-7, fixing screw hole, 301-8, flexible spoke structure three, 301-9, rotation center three, 301-10, inner ring of hinge, 301-11, positioning pin hole, thin plate hinge 301-21, hinge base 301-22, base center hole 301-23, 302, flexible decoupling coupling, 303, driver pressure block two, 304, linear driver two, 305, pressure block, 306, grating ruler, 307, grating encoder, 308, encoder mounting base, 4, vacuum hub terminal. Detailed Implementation

[0038] The present invention will be further described below with reference to the embodiments. It should be noted that these are merely examples and descriptions of the inventive concept. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the inventive concept or exceed the scope defined in the claims, they should all be considered to fall within the protection scope of the present invention.

[0039] Combined with appendix Figure 1-11 The specific embodiments of the present invention are described below:

[0040] Example 1:

[0041] like Figure 1-11 As shown, the mechanical bending adjustment mechanism for a horizontal focusing lens proposed in this invention includes a bending mechanism 1, a base plate 2, a pitch fine-tuning mechanism 3, and a vacuum hub terminal 4.

[0042] The pitch fine-tuning mechanism 3 includes an eccentrically designed pitch adjustment hinge 301, a grating ruler 306, a grating encoder 307, and an encoder mounting base 308. The inner hinge ring 301-10 of the pitch adjustment hinge 301 is fixed to the base plate 2. The grating ruler 306 is attached to the outer hinge ring 301-1 of the pitch adjustment hinge 301. The grating encoder 307 is fixed to the base plate 2 via the encoder mounting base 308 and corresponds to the grating ruler 306 to detect the pitch adjustment angle.

[0043] The pitch adjustment hinge 301 adopts an eccentric design to compensate for the center of gravity offset of the bending mechanism, thereby improving the stability and accuracy of the pitch adjustment process. The grating ruler 306 and the grating encoder 307 work together to achieve high-precision detection of the pitch adjustment angle, providing accurate feedback for closed-loop control and ensuring the accuracy of pitch adjustment.

[0044] The bending mechanism 1 includes a bending mechanism base 101, a mirror mount 102, a bending constraint hinge 103, a Twist adjustment mirror mount 108, a U-shaped pressure block 109, and a plane mirror base 110. The bending mechanism base 101 and the outer hinge ring 301-1 of the Pitch adjustment hinge 301 are detachably fixed. The bending constraint hinge 103 is located above the bending mechanism base 101, with one end fixed to the bending mechanism base 101 and the other end connected to the mirror mount 102 or the Twist adjustment mirror mount 108, for transmitting bending torque. The clamping end of the Twist adjustment mirror mount 108 fixes the plane mirror base 110 through the U-shaped pressure block 109 to compensate for the mirror body torsional error. The plane mirror base 110 has a bending shape accuracy better than 200 nrad (rms) and a minimum Pitch adjustment step size ≤ 100 nrad.

[0045] The modular design of the bending mechanism enables offline debugging and rapid assembly and disassembly, significantly improving installation, debugging, and maintenance efficiency. The Twist adjustment of the mirror mount 108 can accurately compensate for the torsional error of the mirror body, ensuring the precision of the mirror body's working posture. The structural design of the bending mechanism 1 ensures uniform bending torque transmission, effectively improving the bending surface accuracy of the plane mirror substrate 110 and meeting the 200 nrad (rms) accuracy requirement of the synchrotron radiation bending focusing mirror.

[0046] Vacuum hub terminal 4 is fixed to the base plate 2 by bolts and provides vacuum-sealed signal and power hubs for all electrical components within the mechanism. Vacuum hub terminal 4 enables sealed and centralized transmission of electrical signals and power in ultra-high vacuum environments, adapting to vacuum working scenarios and avoiding vacuum leakage and messy wiring problems.

[0047] Example 2:

[0048] like Figure 1-11 As shown, the mechanical bending adjustment mechanism for a horizontal focusing lens of the present invention functions to clamp the plane mirror substrate 110 and apply torque to both ends of the plane mirror substrate, bending the planar optical region 110-2 of the plane mirror substrate 110 into an elliptical cylindrical surface. Its structure includes four core components: a bending mechanism 1, a base plate 2, a pitch fine-tuning mechanism 3, and a vacuum junction box 4. The specific structure, connection relationship, and function of each component are as follows:

[0049] (a) Overall connection relationship of core components.

[0050] like Figure 1 As shown, the base plate 2 is a rigid load-bearing component used to ensure the flatness and stability of the overall installation reference of the mechanism. The pitch fine-tuning mechanism 3 is fixed to the base plate 2 by bolts to achieve the load-bearing fixation of the entire mechanism. The bending mechanism 1 is a modular independent component, which is detachably fixed to the pitch fine-tuning mechanism 3 by bolts. The vacuum hub terminal 4 is fixed to the base plate 2 by bolts, on the side close to the pitch fine-tuning mechanism 3, providing vacuum-sealed signal and power hubs for all electrical components in the mechanism.

[0051] (II) Detailed structure and function of bending mechanism 1.

[0052] like Figure 2 As shown, the bending mechanism 1 is the core module for achieving precise bending and torsional error compensation of the mirror body. It includes a bending mechanism base 101, a mirror base 102, four sets of bending constraint hinges 103, two linear actuators 104, two actuator pressure blocks 105, two flexible couplings 106, two force sensors 107, a Twist adjustment mirror base 108, four U-shaped pressure blocks 109, a plane mirror base 110, two auxiliary support plates 111, two handles 112, two bending arms 113, a screw support arm 114, a Twist adjustment screw 115, and a Twist adjustment arm 116. The specific structure and connection relationship of each component are as follows:

[0053] 1. Structure and layout of bending constraint hinge 103:

[0054] like Figure 2As shown, four sets of bending constraint hinges 103 are arranged symmetrically along the axis of the plane mirror base 110. They are divided into two sets of bending constraint hinges 103 on the mirror base side and two sets of bending constraint hinges 103 on the Twist side. The two sets of bending constraint hinges 103 on the mirror base side and the two sets of bending constraint hinges 103 on the Twist side are distributed vertically and are respectively connected between the bending mechanism base 101 and the mirror base 102, and between the bending mechanism base 101 and the Twist adjustment mirror base 108.

[0055] like Figure 4 As shown, each set of bending constraint hinges 103 includes a moving end 103-1, a straight circular notch 103-2, five flexible connecting rods 103-3, and a hinge fixed end 103-4. The five flexible connecting rods 103-3 are evenly radially distributed, and their ends are integrally formed with the moving end 103-1 and the hinge fixed end 103-4, respectively. The connection points are either directly formed by wire EDM cutting of the straight circular notches 103-2 on the flexible connecting rods 103-3. The purpose of the straight circular notches 103-2 is to reduce the rigidity at the connecting rod connection points, so that the bending torque only drives the moving end 103-1 to rotate around a preset rotation center. The intersection of the extended axes of all the flexible connecting rods 103-3 forms the rotation center 103-5 (e.g., ...). Figure 4 (As shown by the intersection of the red dashed lines); the over-constraint design ensures that the moving end 103-1 can only rotate around the intersection of the red dashed lines (as shown by...). Figure 4 (As shown by the blue arrow in the middle), and the rotation center 103-5 precisely coincides with the neutral layer of the plane mirror base 110, this design ensures that the mirror body only undergoes pure bending deformation during the bending process, without additional shear deformation, thus guaranteeing surface accuracy. Since the rotation of the moving end 103-1 of the bending constraint hinge 103 relative to the fixed end 103-4 is based on the elastic deformation of its own material, its stress deformation changes linearly, and there is no friction or gap, enabling high-precision movement.

[0056] 2. Positioning and connection of mirror mount 102 and Twist adjustment mirror mount 108:

[0057] like Figure 7As shown, the Twist adjustable lens mount 108 includes a lens mount clamping end 108-1, a four-bar flexible adjustment hinge 108-2, and a lens mount fixing end 108-3. The bending mechanism base 101 is fixed to the hinge fixed ends 103-4 of all bending constraint hinges 103 by bolts; the mirror base 102 is installed at one end of the bending mechanism base 101, and its two sides are fixed to the moving ends 103-1 of the two sets of bending constraint hinges 103 on the mirror base side by bolts; the Twist adjustment mirror base 108 is installed at the other end of the bending mechanism base 101, and its two sides of the mirror base fixed end 108-3 are fixed to the moving ends 103-1 of the two sets of Twist side bending constraint hinges 103 by bolts; the mirror base 102 and the Twist adjustment mirror base 108 are arranged coaxially and centered along the length direction of the plane mirror base 110, and the coplanar error of their clamping ends is ≤0.01mm. This precision requirement can ensure that no additional parasitic force is generated after the plane mirror base 110 is installed, and avoid the generation of off-center torque during the bending process.

[0058] 3. Clamping structure of plane mirror base 110:

[0059] like Figure 3 As shown, the optical region 110-2 of the plane mirror substrate 110 is the core working area for beam focusing, and four ear-shaped protrusions 110-1 are provided at its four corners away from the optical region 110-2. Both the clamping end of the mirror mount 102 and the mirror mount clamping end 108-1 of the Twist adjustment mirror mount 108 are provided with U-shaped grooves that fit the ear-shaped protrusions 110-1. Four U-shaped pressure blocks 109 press the four ear-shaped protrusions 110-1 of the plane mirror substrate 110 into the corresponding U-shaped grooves using bolts, thus achieving mechanical clamping and fixing of the plane mirror substrate 110. During clamping, the clamping force needs to be controlled within the range of 100N. This force range is designed based on the Saint-Venant principle, which ensures the stability of the plane mirror substrate 110 under ultra-high vacuum conditions while preventing surface distortion caused by the transmission of clamping force to the optical region 110-2.

[0060] 4. Twist torsional error compensation structure:

[0061] like Figure 7As shown, the Twist adjustment lens mount 108 is an integrated flexible adjustment structure, including a lens mount clamping end 108-1, a four-bar flexible adjustment hinge 108-2, and a lens mount fixing end 108-3. One end of the four-bar flexible adjustment hinge 108-2 is integrally formed with the lens mount fixing end 108-3, and the other end is integrally formed with the lens mount clamping end 108-1. Its rotation center 108-4 is precisely aligned with the neutral layer of the plane mirror substrate 110. The Twist adjustment arm 116 passes through the lens mount fixing end 108-3 and is fixedly installed on the outer wall of the lens mount clamping end 108-1. Two screw supports 114 are provided and respectively installed on the outer walls of the lens mount fixing end 108-3 on the upper and lower sides of the Twist adjustment arm 116. Each screw support 114 is threaded with a Twist adjustment screw 115, and the end of the Twist adjustment screw 115 abuts against the end of the Twist adjustment arm 116. Twisting the Twist adjustment screw 115 can push the Twist adjustment arm 116, causing the lens mount clamping end 108-1 to rotate around the rotation center 108-4 (e.g., ...). Figure 7 The intersection of the red dashed line and the blue arrow indicate that the rotation causes one end of the plane mirror base 110 to rotate in the opposite direction of the Twist torsional deformation, thereby compensating for the torsional error of the mirror body. The minimum adjustment step of the Twist adjustment screw 115 is ≤0.54μm, which can realize the Twist adjustment of the minimum mirror size of 8μrad, with an adjustment range of ±3mrad.

[0062] 5. Bending drive and force detection structure:

[0063] like Figure 5 , 6 As shown, the two symmetrically installed bending constraint hinges 103 on both sides ensure that the mirror mount 102 has only one degree of freedom of motion, rotating around its constraint rotation center -103-5. Figure 5As shown by the intersection of the red dashed lines, the two bending arms 113 are respectively bolted to the bottom of the mirror base 102 and the bottom of the mirror base fixing end 108-3 of the Twist adjusting mirror base 108, arranged opposite each other along the length of the plane mirror base 110. Two linear actuators 104 are bolted to the bending mechanism base 101 via actuator pressure blocks 105, and the output ends of the linear actuators 104 are coaxially aligned with the corresponding bending arms 113. The output ends of the linear actuators 104 are connected to one end of the force sensor 107 via a flexible coupling 106, and the other end of the force sensor 107 is connected to the bending arm 113. The linear actuator 104 has a stroke range of ±3mm and a minimum drive step of ≤20nm, used to output precise bending driving force. The flexible coupling 106 compensates for the coaxiality deviation between the linear actuator 104 and the bending arm 113, avoiding the transmission of additional torque. Force sensor 107 is used to detect bending driving force in real time and feed it back to the control system to realize closed-loop control of bending force, so as to avoid plastic deformation of mirror body due to overpressure.

[0064] Linear displacement at the output of linear driver 104 Figure 5 (As shown by the green arrow in the middle) The transmission is transmitted to the bending arm 113 through the flexible coupling 106, which drives the mirror mount 102 to rotate around the rotation center 103-5 in a sinusoidal manner (as shown by the green arrow in the middle). Figure 5 (As shown by the blue arrow in the middle). Since the two ends of the plane mirror base 110 are mechanically clamped and fixed to the mirror mount 102 and the Twist adjustment mirror mount 108 respectively, the mirror mount 102 and the Twist adjustment mirror mount 108 at both ends rotate in opposite directions under the push of their respective linear actuators 104, ultimately converting the linear motion of the linear actuators 104 into torque applied to both ends of the plane mirror base 110, thus changing the original planar surface shape ( Figure 5 (Black solid line) bend to an elliptical cylindrical surface (as shown) Figure 5 (As shown by the blue dashed line), mechanical bending is achieved.

[0065] like Figure 6 As shown, the flexible coupling 106 adopts a split design, with a force sensor connected in series between the two structures to measure the applied bending force in real time. Each structure has two sets of orthogonal sheet-like flexible hinge structures 106-1 and 106-2, which are machined by slow wire EDM. These structures cooperate with another set of orthogonal sheet-like flexible hinge structures 106-3 and 106-4, giving the flexible coupling five degrees of freedom: Tx, Tz, Rx, Ry, and Rz. This allows the coupling to transmit bending force along the y-direction while also compensating for installation position errors between the linear actuator 104 and the bending arm 113, as well as parasitic displacements and rotations during the sinusoidal drive process.

[0066] 6. Modular design related components:

[0067] like Figure 2 As shown, two auxiliary support plates 111 are fixed to both sides of the bending mechanism base 101 by bolts, and two handles 112 are fixed to the two auxiliary support plates 111 by bolts. The function of the auxiliary support plates 111 is to support the bending mechanism 1 during offline debugging, so that the moving parts at the bottom of the mechanism maintain a gap with the detection platform to avoid interference. The handles 112 facilitate the operator to move the modular bending mechanism 1. The bending mechanism base 101 has three grooved through holes, which correspond to the threaded blade hinge structure 1 301-2, threaded blade hinge structure 2 301-5, and threaded blade hinge structure 301-6 installed on the hinge outer ring 301-1 of the Pitch adjustment hinge 301. The bending mechanism 1 and the Pitch fine adjustment mechanism 3 can be quickly installed and removed by three bolts. This modular design allows the bending mechanism 1 to be independently debugged and optically inspected without disassembling and assembling the whole system, which greatly improves the debugging efficiency.

[0068] (III) Detailed structure and function of Pitch fine-tuning mechanism 3.

[0069] like Figure 8 , 9 As shown, the Pitch fine-tuning mechanism 3 is the core module for achieving precise adjustment of the mirror's pitch attitude and center of gravity compensation. It includes a Pitch adjustment hinge 301, a flexible decoupling coupling 302, a second driver pressure block 303, a second linear driver 304, a pressure block 305, a grating ruler 306, a grating encoder 307, and an encoder mounting base 308. The specific structure and connection relationship of each component are as follows:

[0070] 1. Eccentricity compensation structure of Pitch Adjustment Hinge 301:

[0071] The pitch adjustment hinge 301 is an eccentrically designed flexible hinge, comprising an outer hinge ring 301-1, flexible spoke structure one 301-3, flexible spoke structure two 301-4, flexible spoke structure three 301-8, a rotation center three 301-9, and an inner hinge ring 301-10. Flexible spoke structure one 301-3, flexible spoke structure two 301-4, and flexible spoke structure three 301-8 are three rings of integrated spoke structures with different radii, all connected between the outer hinge ring 301-1 and the inner hinge ring 301-10. Each of the three rings of flexible spoke structures consists of several radially distributed spokes, all pointing to the same intersection point and forming the rotation center three 301-9. This rotation center three 301-9 coincides with the center point of the sagittal direction of the optical surface of the plane mirror base 110. Meanwhile, the rotation center 301-9 is offset from the center of gravity of the Pitch adjustment hinge 301 by a distance, and the offset direction is opposite to the offset direction of the center of gravity of the bending mechanism 1. This eccentric design can counteract the influence of the center of gravity offset of the bending mechanism 1, ensuring that the overall center of gravity of the mechanism is stable during the Pitch adjustment process, without any additional tilting error.

[0072] 2. Pitch adjustment driver and decoupling structure:

[0073] Linear actuator 2 304 is bolted to base plate 2 via actuator clamping block 2 303, and its output end is connected to hinge outer ring 301-1 of pitch adjusting hinge 301 via flexible decoupling coupling 302. For example... Figure 10 As shown, the flexible decoupling coupling 302 includes two threaded connecting ends and two plate-shaped flexible hinges, and has three degrees of freedom: Ty (translation perpendicular to the adjustment direction), Rx (rotation about the x-axis), and Rz (rotation about the z-axis). It can compensate for the installation position error between the linear actuator 304 and the Pitch adjustment hinge 301 and the parasitic displacement during sinusoidal driving, and transmit driving force.

[0074] 3. Pitch adjustment angle detection structure:

[0075] The outer ring 301-1 of the pitch adjustment hinge 301 has an arc structure concentric with the rotation center 301-9. A grating ruler 306 is adhered to this arc structure with a special adhesive and then pressed and fixed by a pressure block 305, ensuring that the grating ruler 306 rotates synchronously with the outer ring 301-1. A grating encoder 307 is bolted to the base plate 2 via an encoder mounting base 308. Its detection end is aligned and fitted with the grating ruler 306, used for real-time detection of the rotation angle of the outer ring 301-1. The grating ruler 306 has a resolution of 1nm. Combined with a 250mm radius grating ruler, it enables high-precision detection of the pitch adjustment angle, feeding back to the control system to form a closed-loop adjustment, ensuring that the minimum pitch adjustment step is ≤100nrad.

[0076] like Figure 8 , Figure 9 and Figure 11 As shown, the outer ring 301-1 of the pitch adjustment hinge 301 has three threaded blade hinge holes arranged in a triangle, and threaded blade hinge structure one 301-2, threaded blade hinge structure two 301-5, and threaded blade hinge structure three 301-6 are respectively installed on them, serving as the interface for the bending mechanism 1 to be installed on the pitch adjustment hinge 301. The base 101 of the bending mechanism has three corresponding screw mounting holes, namely screw mounting hole one 101-1, screw mounting hole two 101-2, and screw mounting hole three. Screw mounting hole one 101-1, screw mounting hole two 101-2, and screw mounting hole three correspond to the positions of threaded blade hinge structure one 301-2, threaded blade hinge structure three 301-6, and threaded blade hinge structure two 301-5, respectively, and are all fixed by screws, thereby realizing the fixed installation of the bending mechanism base 101 and the outer ring 301-1 of the pitch adjustment hinge 301.

[0077] like Figure 12 As shown, the threaded blade hinge structure 1 (301-2), threaded blade hinge structure 2 (301-5), and threaded blade hinge structure 3 (301-6) have the same structure, each consisting of a long, thin blade hinge 301-21 and a tubular hinge base 301-22. The hinge base 301-22 is suspended in the center of the threaded blade hinge hole. Two symmetrical thin blade hinges 301-21 are provided, with one end fixed to the outer wall of the hinge base 301-22 and the other end fixedly connected to the wall of the threaded blade hinge hole; screws... The screws installed in mounting holes 101-1, 101-2, and 3 are all screwed into the center hole 301-23 of the hinge base 301-22 of the threaded blade hinge structure 301-2, the threaded blade hinge structure 301-6, and the threaded blade hinge structure 301-5, respectively, by means of threaded engagement. The thin-plate hinge 301-21 can give the tubular hinge base 301-22 the freedom of movement along the u-axis and rotation around the w-axis and its own axis through flexible deformation.

[0078] To increase the deformation capacity of threaded blade hinge structure 1 301-2, threaded blade hinge structure 2 301-5, and threaded blade hinge structure 301-6, the length of the thin-plate hinge 301-21 can be increased. However, the diameter of the threaded blade hinge hole cannot be too large. Therefore, two elongated grooves can be symmetrically arranged on the hole wall of the threaded blade hinge hole. Then, one end of the thin-plate hinge 301-21 is fixed to the outer wall of the hinge base 301-22, and the other end is fixedly connected to the bottom of the elongated groove.

[0079] The inner hinge ring 301-10 of the pitch adjustment hinge 301 has at least two symmetrical positioning pin holes 301-11, and the base plate 2 has corresponding base plate positioning holes. After the positioning pin holes 301-11 align with the base plate positioning holes, they can be fixed by pins, which facilitates the determination of the relative position of the inner hinge ring 301-10 of the pitch adjustment hinge 301 and the base plate 2. The inner hinge ring 301-10 of the pitch adjustment hinge 301 has several evenly distributed fixing screw holes 301-7, which are fixed to the pre-set mounting holes on the base plate 2 by screws, thereby realizing the fixed installation of the inner hinge ring 301-10 of the pitch adjustment hinge 301 and the base plate 2. First, the positioning pin hole 301-11 on the inner ring 301-10 of the hinge is positioned with the base plate positioning hole on the base plate 2 by means of a pin. Then, the fixing screw hole 301-7 on the inner ring 301-10 of the Pitch adjustment hinge 301 is fixed with the preset mounting hole on the base plate 2 by means of a screw, thereby realizing the positioning and fixed installation of the inner ring 301-10 of the hinge and the base plate 2.

[0080] The mechanical bending adjustment mechanism for a horizontal focusing lens of the present invention has three core stages in its working process: torsional error compensation, bending adjustment (after the mechanism is assembled, the torsional error of the lens body is first detected using a Fizeau interferometer, and then bending adjustment is performed based on the Fizeau interferometer and a long-range surface profile analyzer), and pitch attitude fine-tuning. Vacuum hub terminal 4 provides stable signals and power transmission to all electrical components throughout the process. The working principle and control logic of each stage are as follows:

[0081] 1. Torsional Error Compensation Stage: After assembly or during operation, the surface shape of the plane mirror substrate 110 is detected by a laser interferometer. If a torsional error is found, the control system calculates the amount of turning of the Twist adjusting screw 115 based on the error value. The operator or the electric adjustment mechanism turns the Twist adjusting screw 115, and its end pushes the Twist adjusting arm 116 to drive the mirror base clamping end 108-1 to rotate around the rotation center 108-4 of the four-bar flexible adjustment hinge 108-2. Since the rotation center 108-4 coincides with the neutral layer of the plane mirror substrate 110, no additional surface shape error will be introduced during the rotation. After the adjustment is completed, the surface shape is detected again until the torsional error meets the usage requirements.

[0082] 2. Bending Adjustment Stage: Based on the focusing curvature requirements of the optical system for the horizontal focusing lens, the external control system sends synchronous drive commands to the two linear actuators 104 via the vacuum hub terminal 4. The linear actuators 104 output precise driving force, which is then transmitted to the force sensor 107 after coaxiality deviation is compensated by the flexible coupling 106. The force sensor 107 detects the driving force in real time and feeds it back to the control system via the vacuum hub terminal 4 to ensure that the driving force is stable at the preset value. The driving force is transmitted through the bending arm 113 to the lens mount 102 and the fixed end 108-3 of the Twist adjustment lens mount 108, causing them to rotate synchronously around the rotation center 103-5 of the bending constraint hinge 103. Since the rotation center 103-5 coincides with the neutral layer of the plane mirror substrate 110, the driving force is converted into a uniform bending torque, causing the plane mirror substrate 110 to undergo pure bending deformation, achieving the preset focusing curvature. After bending is completed, the force sensor 107 continuously monitors and feeds back the driving force to ensure that the force value is stable during long-term operation and to avoid deformation rebound.

[0083] 3. Pitch Attitude Fine-tuning Stage: Based on the optical system's requirements for beam focusing direction, the external control system sends a drive command to the linear actuator 304 via the vacuum hub terminal 4. The linear actuator 304 outputs a driving force, which, after being isolated from additional interference by the flexible decoupling coupling 302, is transmitted to the outer ring 301-1 of the pitch adjustment hinge 301, causing the outer ring 301-1 to rotate around the rotation center 301-9. The outer ring 301-1 drives the bending mechanism 1 and the plane mirror base 110 to rotate synchronously, thereby achieving pitch attitude adjustment. During the adjustment process, the grating ruler 306 rotates synchronously with the outer ring 301-1, and the grating encoder 307 detects the rotation angle in real time and feeds it back to the control system via the vacuum hub terminal 4. The control system adjusts the output of the linear actuator 304 according to the feedback value to achieve closed-loop adjustment of the pitch attitude until the preset angle is reached, with an adjustment step size ≤ 100 nrad.

[0084] Through the synergistic cooperation of the above structures, the horizontal focusing mirror mechanical bending adjustment mechanism of the present invention can overcome the defects in the prior art and has the characteristics of high bending surface accuracy, accurate compensation for torsional error, stable center of gravity, support for offline debugging modular design and accurate pitch adjustment detection. The specific performance is as follows: the bending surface accuracy of the plane mirror substrate 110 is ≤200nrad, the minimum step size of pitch adjustment is ≤100nrad, and the Twist adjustment range is ±5mrad, which fully meets the usage requirements of high-end optical systems such as fourth-generation synchrotron radiation sources.

[0085] Example 3:

[0086] like Figure 1-11As shown, the detailed assembly process of the mechanical bending adjustment mechanism for a horizontal focusing lens based on Embodiment 2 is as follows:

[0087] S1. Assembly of vacuum hub terminals:

[0088] Vacuum hub terminal 4 is fixed to the preset position on base plate 2 using four M3 stainless steel bolts.

[0089] Assembly of S2 and Pitch fine-tuning mechanism:

[0090] S21. Secure the inner hinge ring 301-10 of the Pitch adjustment hinge 301 to the preset position of the base plate 2 with screws.

[0091] S22. One end of the flexible decoupling coupling 302 is fixed to the output end of the linear driver 304 by a thread, and the other end is fixed to the connecting ear of the hinge outer ring 301-1 of the pitch adjustment hinge 301 by a thread.

[0092] S23. Adjust the position of the linear driver 2 304 to ensure that the flexible decoupling coupling 302 is free from twisting and deformation; fix the linear driver 2 304 to the base plate 2 with bolts through the driver pressure block 2 303.

[0093] S24. Adhere the grating ruler 306 to the concentric arc structure of the hinge outer ring 301-1 of the Pitch adjustment hinge 301 using optical special adhesive, press and fix for 24 hours to ensure firm adhesion, and then press and fix it with the pressure block 305 to prevent vibration from causing the grating ruler 306 to fall off.

[0094] S25. Fix the grating encoder 307 to the base plate 2 with the encoder mounting bracket 308 bolts, and fine-tune the position of the encoder mounting bracket 308 so that the gap between the detection end of the grating encoder 307 and the grating ruler 306 is controlled at 0.1mm to ensure stable detection signal.

[0095] S26. Organize the electrical wires of the linear driver 2 304 and the grating encoder 307 to the vacuum hub terminal 4, and check whether the contact is good after connection.

[0096] S3: Modular assembly of the bending mechanism:

[0097] S54. Fix the Twist adjustment arm 116 to the outer wall of the mirror holder end 108-1 of the Twist adjustment mirror holder 108 with bolts, and screw the Twist adjustment screw 115 into the threaded hole of the mirror holder fixing end 108-3 until its end gently abuts against the Twist adjustment arm 116, and mark the initial position.

[0098] S31. Fix the hinge fixing ends 103-4 of the four sets of bending constraint hinges 103 to the preset mounting holes of the bending mechanism base 101 with bolts to ensure that the four sets of bending constraint hinges 103 are arranged symmetrically along the axis of the plane mirror base 110, with a symmetry error ≤0.01mm.

[0099] S32. Fix the mirror base 102 to one end of the bending mechanism base 101 with bolts, so that the two sides of the mirror base 102 are in contact with the moving ends 103-1 of the two sets of mirror base side bending constraint hinges 103, and fix them with bolts after positioning with positioning pins.

[0100] S33. Fix the fixed end 108-3 of the Twist adjustment mirror mount 108 to the other end of the bending mechanism base 101 with bolts, so that both sides of the fixed end 108-3 of the mirror mount are in contact with the moving ends 103-1 of the two sets of Twist side bending constraint hinges 103, and fix them with bolts after positioning; use a coordinate measuring machine to check the coplanarity of the mirror mount 102 and the clamping end of the Twist adjustment mirror mount 108 to ensure ≤0.01mm;

[0101] S34. Fix the two auxiliary support plates 111 to both sides of the bending mechanism base 101 with bolts, and then fix the two handles 112 to the preset positions of the auxiliary support plates 111 with bolts to ensure that the handles 112 are firmly installed and do not loosen after bearing the load.

[0102] S5. Assembly of drive and detection components:

[0103] S51. Fix the two bending arms 113 to the outer side wall of the mirror base 102 and the outer side wall of the mirror base fixing end 108-3 of the Twist adjustment mirror base 108 respectively with bolts to ensure that the force-bearing surface of the bending arm 113 is coaxial with the output end of the linear actuator 104.

[0104] S52. Fix the two linear actuators 104 to both ends of the bending mechanism base 101 by means of the actuator pressure block 105 bolts, and fine-tune the position so that the output end of the linear actuator 104 is aligned with the force surface of the corresponding bending arm 113 without offset.

[0105] S53. Fix one end of the flexible coupling 106 to the output end of the linear driver 104, and fix the other end to one end of the force sensor 107. Fix the other end of the force sensor 107 to the bending arm 113 to ensure a firm connection without loosening.

[0106] S4. Clamping of the plane mirror substrate:

[0107] S41. Clean the ear-shaped protrusion 110-1 of the clean plane mirror base 110 and the U-shaped groove of the mirror base 102 and Twist adjustment mirror base 108 to avoid impurities affecting the clamping accuracy.

[0108] S42. Place the four ear-shaped protrusions 110-1 of the plane mirror base 110 into the U-shaped grooves of the mirror holder 102 and the mirror holder clamping end 108-1 of the Twist adjustment mirror holder 108, and adjust the position to ensure that the optical area 110-2 is unobstructed.

[0109] S43. Place the four U-shaped pressure blocks 109 onto the four ear-shaped protrusions 110-1 respectively, and tighten the fastening bolts with a torque wrench. Control the torque to ensure that the clamping force reaches the preset value (within the range of 100N±10N), thus completing the clamping and fixing of the plane mirror base 110. Use a Fiso interferometer and a long-range surface profile meter to detect and adjust the bending force applied by the drivers at both ends of the bending mechanism to ensure that the final bending mirror surface profile accuracy is ≤200nrad (rms).

[0110] S55. Organize the electrical wires of the linear actuator 104 and the force sensor 107 to the vacuum hub terminal 4, and fix the wires after connection to prevent them from being pulled during movement.

[0111] S6. Overall assembly:

[0112] S61. Align the three grooved through holes of the bending mechanism base 101 with the three protruding threaded holes of the hinge outer ring 301-1 of the Pitch adjustment hinge 301, and tighten them with three screws.

[0113] S62. Organize all electrical wires to ensure they are free of tangles and interference. Check that all connections at the vacuum hub terminal 4 are secure to complete the assembly of the entire mechanism.

[0114] The invention has been described above by way of example in conjunction with the accompanying drawings. Obviously, the specific implementation of the invention is not limited to the above-described manner. Any non-substantial improvement made by adopting the inventive concept and technical solution of the invention, or the direct application of the inventive concept and technical solution to other situations without modification, is within the protection scope of the invention.

Claims

1. A mechanical bending adjustment mechanism for a horizontal focusing lens, characterized in that, It includes a bending mechanism (1), a base plate (2), a pitch fine-tuning mechanism (3), and a vacuum hub terminal (4). The vacuum hub terminal (4) is fixed to the base plate (2) by bolts and provides vacuum-sealed signal and power hubs for all electrical components in the mechanism. The bending mechanism (1) is provided with a bending mechanism base (101), a mirror base (102), a bending constraint hinge (103), a Twist adjustment mirror base (108), a U-shaped pressure block (109), and a plane mirror base (110). The pitch fine adjustment mechanism (3) is provided with an eccentrically designed pitch adjustment hinge (301), a grating ruler (306), a grating encoder (307), and an encoder mounting base (308). The inner ring (301-10) of the Pitch adjustment hinge (301) is fixed to the base plate (2), and the bending mechanism base (101) and the outer ring (301-1) of the Pitch adjustment hinge (301) are detachably fixed; the bending constraint hinge (103) is set above the bending mechanism base (101), one end of which is fixed to the bending mechanism base (101), and the other end of which is connected to the mirror base (102) or the Twist adjustment mirror base (108) for transmitting bending torque; The clamping end of the Twist adjustment mirror mount (108) is fixed to the plane mirror base (110) by a U-shaped pressure block (109) to compensate for the torsional error of the mirror body; the grating ruler (306) is pasted on the hinge outer ring (301-1) of the Pitch adjustment hinge (301); the grating encoder (307) is fixed to the base plate (2) by the encoder mounting base (308) and cooperates with the grating ruler (306) to detect the Pitch adjustment angle; The root mean square value of the shape error after bending of the plane mirror substrate (110) is required to be ≤200 nrad, and the minimum step size of pitch adjustment is ≤100 nrad; The mirror mount (102) is installed on the bending mechanism base (101) at one end away from the Twist adjustment mirror mount (108), and is symmetrically arranged with the Twist adjustment mirror mount (108) along the length direction of the plane mirror base (110) along the axis of the plane mirror base (110); four sets of bending constraint hinges (103) are provided and are arranged symmetrically, two sets of bending constraint hinges (103) are distributed vertically and connect the bending mechanism base (101) and the upper mirror mount (102), and the other two sets of bending constraint hinges (103) are distributed vertically and connect the bending mechanism base (101) and the Twist adjustment mirror mount (108); one end of all bending constraint hinges (103) is fixed to the bending mechanism base (101), and the other end of the two sets of bending constraint hinges (103) distributed at the mirror mount (102) is connected to the mirror mount (102), and distributed at the Twist The other end of the two sets of bending constraint hinges (103) at the adjusting mirror base (108) is connected to the Twist adjusting mirror base (108); the coplanar error between the clamping ends of the mirror base (102) and the Twist adjusting mirror base (108) is required to be ≤0.01mm; Each of the bending constraint hinges (103) is provided with a moving end (103-1), a flexible connecting rod (103-3), and a hinge fixed end (103-4). Five flexible connecting rods (103-3) are provided and are evenly radially connected between the moving end (103-1) and the hinge fixed end (103-4). Both ends of the flexible connecting rod (103-3) are provided with straight circular notches (103-2) at the connection points with the moving end (103-1) and the hinge fixed end (103-4), respectively. The intersection of the extended axes of all the flexible connecting rods (103-3) forms a rotation center (103-5), and the rotation center (103-5) coincides with the neutral layer of the plane mirror substrate (110).

2. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 1, characterized in that, The bending mechanism (1) is a modular structure and is also provided with an auxiliary support plate (111) and a handle (112). There are two auxiliary support plates (111) and they are respectively installed on both sides of the bending mechanism base (101) and fixed to the bending mechanism base (101). The auxiliary support plates (111) are used to support the bending mechanism (1) during offline debugging to avoid interference between the moving parts and the detection platform. There are two handles (112) and they are respectively fixed on the two auxiliary support plates (111). The bending mechanism base (101) is provided with three grooved through holes, which correspond to the three protruding threaded holes on the hinge outer ring (301-1) of the Pitch adjustment hinge (301). After the auxiliary support plate (111) and handle (112) are added, the bending mechanism (1) can be used as an independent module for offline debugging and optical detection. The quick installation and removal of the Pitch adjustment hinge (301) can be achieved by three screws.

3. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 1, characterized in that, The four corners of the plane mirror base (110) away from the optical area (110-2) are provided with four ear-shaped protrusions (110-1). The clamping ends of the mirror base (102) and the Twist adjustment mirror base (108) are provided with U-shaped grooves. The U-shaped pressure block (109) is provided with four of them and clamps the four ear-shaped protrusions (110-1) of the plane mirror base (110) into the U-shaped grooves of the mirror base (102) and the Twist adjustment mirror base (108) respectively, so as to realize the mechanical clamping and fixing of the plane mirror base (110).

4. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 3, characterized in that, The Twist adjustable mirror base (108) includes a mirror base clamping end (108-1), a four-bar flexible adjustment hinge (108-2), and a mirror base fixing end (108-3). The bending mechanism (1) also includes a screw support arm (114) and a Twist adjusting arm (116). One end of the four-bar flexible adjustment hinge (108-2) is fixedly connected to the mirror base fixing end (108-3), and the other end is fixedly connected to the mirror base clamping end (108-1). The rotation center (108-4) of the four-bar flexible adjustment hinge (108-2) coincides with the neutral layer of the plane mirror base (110). The bending constraint hinges (103) on both sides of the adjusting mirror base (108) are fixed at one end to the bending mechanism base (101) and at the other end to the mirror base fixing end (108-3) of the Twist adjusting mirror base (108); the U-shaped groove is set on the mirror base clamping end (108-1) of the Twist adjusting mirror base (108), and the ear-shaped protrusion (110-1) of the plane mirror base (110) is clamped and fixed in the U-shaped groove of the mirror base clamping end (108-1) by the U-shaped pressure block (109); the Twist adjusting arm (116) Two screw arms (114) are provided and are fixedly installed on the outer wall of the lens holder (108-1) on the upper and lower sides of the lens holder (108-3) of the Twist adjustment arm (116). Each screw arm (114) is threaded with a Twist adjustment screw (115), and the end of the Twist adjustment screw (115) abuts against the end of the Twist adjustment arm (116). By turning the Twist adjustment screw (115), the Twist adjustment arm (116) can be pushed, which drives the lens holder (108-1) to rotate around the rotation center (108-4) of the four-bar flexible adjustment hinge (108-2). Rotation achieves compensation for torsional error of the mirror body; the minimum adjustment step of the Twist adjustment screw (115) is ≤0.54μm, which can realize the Twist adjustment of the minimum mirror size of 8μrad, with an adjustment range of ±3mrad.

5. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 1, characterized in that, The bending mechanism (1) is further provided with a linear actuator (104), a flexible coupling (106), a force sensor (107), and bending arms (113); there are two bending arms (113), which are arranged opposite each other along the length of the plane mirror base (110). One bending arm (113) is fixedly installed at the bottom of the mirror base (102), and the other bending arm (113) is fixedly installed at the bottom of the mirror base fixing end (108-3) of the Twist adjustment mirror base (108); there are two linear actuators (104), both of which are fixed to the two ends of the bending mechanism base (101) by actuator pressure block (105) with bolts. The output end of each linear actuator (104) is coaxially aligned with the bending arm (113) on the corresponding side. The output ends of the two linear actuators (104) are respectively connected to the two bending arms (113) by flexible couplings (106); the force sensor (107) Two are provided, both connected in series between the two flexible couplings (106) and the bending arm (113), for real-time detection of bending force.

6. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 1, characterized in that, The pitch adjustment hinge (301) also has three flexible spoke structures of different radii: flexible spoke structure one (301-3), flexible spoke structure two (301-4), and flexible spoke structure three (301-8). Each of these three flexible spoke structures connects the outer hinge ring (301-1) to the inner hinge ring (301-10). The intersection of the pointing directions of all the flexible spoke structures in these three flexible spoke structures forms a rotation center three (301-9). This rotation center three (301-9) coincides with the center point of the sagittal direction of the optical surface of the plane mirror base (110). The distance deviating from the center of gravity of the Pitch adjustment hinge (301) is opposite to the direction of the center of gravity offset of the bending mechanism (1), and is used to compensate for the center of gravity offset of the bending mechanism (1).

7. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 1, characterized in that, The Pitch fine-tuning mechanism (3) is also provided with a second linear driver (304), a second driver pressure block (303), and a flexible decoupling coupling (302); the second linear driver (304) is fixed to the base plate (2) through the second driver pressure block (303), and the output end of the second linear driver (304) is connected to the outer ring (301-1) of the Pitch adjustment hinge (301) through the flexible decoupling coupling (302); the flexible decoupling coupling (302) includes two threaded connection ends and two plate-shaped flexible hinges, which have three degrees of freedom: Ty, Rx, and Rz.

8. The mechanical bending adjustment mechanism for a horizontal focusing lens according to claim 6, characterized in that, The outer ring (301-1) of the Pitch Adjustment Hinge (301) has an arc structure concentric with the rotation center (301-9). The grating ruler (306) is attached to the arc structure and pressed and fixed by the pressure block (305). The grating encoder (307) is attached to the grating ruler (306) and is used to detect the rotation angle of the outer ring (301-1) of the Pitch Adjustment Hinge (301) in real time.

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