Offline adjusting device and method for adjusting light spot position offset

Abstract

The invention discloses an off-line adjusting device and method for light spot position offset adjustment, and belongs to the technical field of optical precision adjustment. The device comprises a single-beam light-emitting direction adjusting device, a single-beam light-emitting position adjusting device and a multi-beam angle adjusting device which can be formed on the same off-line platform by configuring different detection units. The method comprises the following steps of: calibrating a light source by using the devices in sequence, and constructing an ideal light source assembly with accurate direction, accurate position and multi-beam parallelism; the whole device is installed to a complete machine system to serve as an absolute reference, and a complete machine optical element is adjusted to make a light spot reach a preset position; and finally, replacing with a customized light source and carrying out fine adjustment by taking the calibrated optical element as a reference. According to the method, decoupling of light source calibration and optical element calibration is achieved through the process of establishing the benchmark offline, transmitting the benchmark through the whole machine and customizing light source adaptation, the installation and adjustment precision, efficiency and repeatability are remarkably improved, and dependence on operation experience is reduced.

Description

Technical Field

[0001] This invention relates to the field of optical precision assembly and adjustment technology, specifically to a method for adjusting the position offset of light spots in a coordinated manner with multiple fiber collimators and mirrors, which is suitable for high-precision calibration of the position, spacing and collimation of multiple light spots. Background Technology

[0002] To achieve precise mask writing, the laser beam of a lithography machine requires a complex optical path design, one of which is to design an illumination pupil pattern. This involves dividing the beam into an n×n array of light spots and controlling the optical path to illuminate each micromirror on the MMA. By controlling the angle of the micromirrors, the beam is reflected to the exit surface to form the pupil image. To ensure the beam's angle is precise before and after reflection, and that the beam reaches a predetermined position, an optical angle monitoring system is required. This system typically includes: a multi-beam light source (customized VCSEL array), an optical imaging lens group, optical adjustment components, and a receiving device. Patent CN116068863A, "A Pupil Monitoring System," details the use of an MMA (micromirror array) and a parallel light source as the light source for the pupil monitoring system. By using a first and second micromirror array in conjunction with a beam absorption device and a spot position monitoring device, the deflection state of the micromirrors is controlled to monitor the spot position, avoiding reliance on customized VCSEL arrays and microlens arrays. However, this system places high demands on optical alignment. In high-precision optical systems, each additional adjustable optical component increases the difficulty of establishing a reference standard. Therefore, there are two solutions for calibrating such high-precision measurement optical systems: one is to reduce the number of adjustable optical components, which is difficult to achieve for complex optical systems such as lithography machines; the other is to design a reasonable alignment method, establish an "ideal reference," and formulate the correct operational logic sequence.

[0003] Traditional assembly and adjustment methods have the following technical difficulties: 1. The light source and adjustment components are strongly coupled. Adjusting optical components not only affects the overall position (eccentricity), but some optical adjustment components also affect the overall magnification and distortion of the system imaging. During the debugging process, adjusting one parameter will affect another parameter, resulting in repeated debugging, low efficiency, and heavy reliance on the operator's experience; 2. Lack of a reference. Debugging is usually carried out directly on the whole machine without a pre-calibrated "ideal component" as a reference. This makes it necessary to find the relatively accurate position of multiple free components during the adjustment process, resulting in low adjustment efficiency and requiring a long time for repeated exploration. If a reference is set in advance and then the process is carried out step by step, the debugging process will be more logical and it will be easier to find the problem.

[0004] Therefore, there is an urgent need in the field for an apparatus and method that can separate light source calibration from optical adjustment element calibration, provide a high-precision offline reference, and improve assembly and adjustment accuracy and efficiency. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of existing spot position adjustment technologies, such as strong coupling between the light source and optical components, lack of a unified benchmark, and repetitive debugging processes that rely on experience. It provides an offline adjustment device and method for adjusting spot position offset. This method uses an offline detection device to pre-adjust the light source as the benchmark for overall system debugging. After installation, the optical adjustment components can be adjusted according to this benchmark to achieve the required performance parameters. This improves the accuracy, efficiency, and repeatability of the adjustment process while reducing reliance on operators.

[0006] The technical solution provided by this invention is as follows: An offline adjustment device for adjusting the position offset of a light spot, characterized in that it includes: Offline debugging platform; Light source adjustment structure; The imaging unit is fixedly connected to the light source adjustment structure. A first detection unit and a second detection unit; The light source adjustment structure, imaging unit, and first and second detection units can be configured into three functional optical path configurations on the offline debugging platform: In the first optical path configuration, a beam generating unit is installed in the light source adjustment structure, and the first detection unit is located behind the optical path of the imaging unit, forming a single beam emission direction adjustment device for calibrating the single beam light output direction to be parallel to the system optical axis; In the second optical path configuration, a beam generating unit is installed in the light source adjustment structure, and the second detection unit is coaxially fixedly connected to the imaging unit, forming a single beam emission position adjustment device for calibrating the imaging position of a single beam at the center of the target surface. In the third optical path configuration, multiple beam generating units are installed in the light source adjustment structure, and a multi-aperture plate is set between the imaging unit and the second detection unit to form a multi-beam angle adjustment device for calibrating the angular parallelism and spatial distribution of multiple beams. The single-beam emission direction adjustment device, the single-beam emission position adjustment device, and the multi-beam angle adjustment device are used in sequence. By reusing the spatial position of the light source adjustment structure determined by the previous configuration in the second optical path configuration and the third optical path configuration, the sequential establishment and accumulation of the reference are realized, and finally the "ideal light source" assembly is formed.

[0007] Furthermore, the first detection unit includes: A plane mirror is positioned in front of the light-emitting direction of the imaging unit, and its reflecting surface is pre-calibrated by an autocollimator to be parallel to the reference plane of the offline debugging platform. An optical signal detector; An optical fiber circulator is used to connect the input optical fiber and the output optical fiber of the beam generating unit to the optical signal detector, so that the light emitted by the beam generating unit is collimated by the imaging unit, reflected by the plane mirror, and then returns along the original path to be received by the optical signal detector.

[0008] Furthermore, the second detection unit is a large target-surface camera, which is coaxially and rigidly connected to the lens barrel of the imaging unit through a cage structure to ensure that the center of the photosensitive target surface of the large target-surface camera coincides with the optical axis of the imaging unit.

[0009] Furthermore, the positional distribution of the multiple light-transmitting holes on the porous aperture plate matches the predetermined spatial arrangement of the multiple beam generating units mounted on the light source adjustment structure and the magnification of the imaging unit; the porous aperture plate is rotatably disposed at the output end of the imaging unit about an axis that coincides with the optical axis of the imaging unit.

[0010] Furthermore, the light source adjustment structure includes mounting holes for mounting one or more beam generating units, an angle fine-tuning mechanism independently set for each mounting hole, and a lateral displacement adjustment mechanism set as a whole.

[0011] Second, the present invention also provides a method for adjusting the spot position offset based on the above-mentioned offline adjustment device, characterized in that it includes the following steps: Offline benchmark construction steps: On the offline debugging platform, the first optical path configuration, the second optical path configuration, and the third optical path configuration are built and used in sequence to calibrate the light source components, forming an "ideal light source" assembly that includes a light source adjustment structure, a beam generation unit, and an imaging unit; Reference transfer and optical element calibration steps: The "ideal light source" assembly is installed as an integral module to the corresponding interface of the whole optical system to be debugged. The light beam with known characteristics emitted by the "ideal light source" assembly is used as the absolute reference. The optical adjustment elements inside the whole optical system are adjusted so that the light spot formed by the light beam on the target plate of the whole optical system reaches the preset position, thereby transferring and solidifying the absolute reference into the optical adjustment elements of the whole optical system. Customized light source adaptation steps: Remove the "ideal light source" assembly from the whole optical system and replace it with the customized light source array finally used by the whole optical system; using the optical adjustment element of the whole optical system after calibration by the reference transfer and optical element calibration steps as the new relative reference, only fine-tune the position and angle of the customized light source array so that the light spot formed by the beam emitted by it on the target plate also reaches the preset position.

[0012] Furthermore, the offline benchmark construction step specifically includes: Single beam direction calibration sub-step: Build the first optical path configuration, adjust the angle fine-tuning mechanism of the light source adjustment structure to make the signal received by the optical signal detector reach the peak value, thereby determining that the light output direction of the single beam generating unit is parallel to the optical axis of the system, and lock the angle fine-tuning mechanism; Single beam position calibration sub-step: After completing the single beam direction calibration, remove the plane mirror and fiber optic circulator, build the second optical path configuration, and adjust the lateral displacement adjustment mechanism of the light source adjustment structure so that the beam emitted by the single beam generating unit is imaged at the center of the target surface of the large target camera, and lock the lateral displacement adjustment mechanism. Multi-beam angle calibration sub-step: After completing the single-beam position calibration and locking the lateral position of the light source adjustment structure, maintain the connection between the light source adjustment structure and the imaging unit, build the third optical path configuration, install multiple beam generating units and a multi-aperture plate, adjust the angle of each beam generating unit separately and rotate the multi-aperture plate in coordination, and control the position and pitch of the multi-aperture plate as a whole, so that all beams pass through the corresponding light apertures, and observe the relative position of the centroid of each spot and the total gray value of the spot brightness on the large target camera, and calibrate the angular parallelism and spatial distribution of the multi-beams.

[0013] Furthermore, in the multi-beam angle calibration sub-step, observing whether all beams can completely pass through the corresponding light-passing holes on the multi-aperture plate serves as a preliminary basis for judging the parallelism of the multi-beam angles.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: The offline adjustment device method provided by this invention employs three offline devices for light source calibration. The operational logic sequence proceeds from single-beam angle to single-beam position and then to multi-beam angle, creating an "ideal light source" that can serve as a benchmark for overall system debugging. Subsequently, the overall system performance is gradually adjusted to the required level through benchmark transfer. This avoids problems such as operational logic confusion in benchmark-less adjustments during overall system debugging. Disputes regarding various performance indicators can also be traced back to their source based on the operational process, improving the efficiency and rationality of the assembly and adjustment process.

[0015] The cage structure in the multi-beam angle adjustment device can be made movable and used to observe the emission angle, serving as an auxiliary observation method to verify the accuracy of beam direction adjustment. Attached Figure Description

[0016] Figure 1 A schematic diagram of the traditional debugging process for the whole machine. Figure 2 Schematic diagram of a single-beam emission direction adjustment device Figure 3 Schematic diagram of a single-beam emission position adjustment device Figure 4 Schematic diagram of a multi-beam emission direction adjustment device Figure 5 Schematic diagram of the optical component adjustment process for the whole machine. Figure 6 Customized light source adjustment process diagram for overall machine debugging In the diagram: 100 - Custom array light source, 200 - Imaging lens element, 300 - Overall optical debugging element, 400 - Overall optical target plate, 501 - Monitoring lens, 502 - Industrial camera. Detailed Implementation

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0018] This invention provides an offline debugging device for a multi-beam light source, comprising: a single-beam emission direction adjustment device, a single-beam emission position adjustment device, and a multi-beam angle adjustment device.

[0019] This invention provides an offline adjustment device and method for adjusting the position offset of a light spot. The operation sequence is as follows: first, the collimating light source is adjusted in the offline device; then, the light source is installed on the whole machine and the optical adjustment element is adjusted based on it; finally, the collimating light source is replaced with a custom light source array of the whole machine, and the position of the light source array is adjusted according to the optical adjustment element.

[0020] The single-beam emission direction adjustment device includes: a beam generation unit, a light source adjustment structure, an imaging unit, and a detection unit.

[0021] The single-beam emission position adjustment device includes: a beam generation unit, a light source adjustment structure, an imaging unit, and a detection unit.

[0022] The multi-beam emission direction adjustment device includes: a beam generation unit, a light source adjustment structure, an imaging unit, and a detection unit.

[0023] All offline debugging devices are calibrated on an optical platform or a marble platform.

[0024] The beam generating unit is used to generate single or multiple collimated parallel beams.

[0025] The light source adjustment structure is used to adjust the light output angle of a single beam generating unit and adjust the displacement deviation of the overall beam generating unit. The beam generating unit needs to be connected and fixed to the imaging unit.

[0026] The imaging unit is used for controlling the light propagation path and is generally designed as a telecentric lens group.

[0027] The first detection unit is used to detect whether the angle of the beam generating unit is accurate. The second detection unit can detect both whether the angle of the beam generation is accurate and the position of the beam emitted by the beam generating unit.

[0028] Before the single-beam emission direction adjustment device is used, the detection unit needs to be calibrated. Generally, the pitch angle of the plane mirror is calibrated using an autocollimator.

[0029] The light output direction is controlled by adjusting the light source adjustment structure in the single beam emission direction adjustment device. After passing through the imaging lens group and the plane mirror calibrated by the self-collimator, the beam returns to the imaging lens group and the beam collimator. After passing through the beam circulator, it is input to the photodetector or spectrometer. The signal peak fluctuation is observed to determine whether the light direction has been adjusted and collimated.

[0030] Remove the fiber circulator from the beam generation unit, directly connect the single-mode fiber light source and the fiber collimator, and replace detector unit one with detector unit two. That is, use a cage structure to connect and fix the imaging lens group and the outer frame of the camera target surface. The purpose is to make the center of the camera target surface coincide with the center of the optical axis.

[0031] Turn on the camera and use the light source adjustment structure to adjust the single collimated beam emitted by the beam generating unit to the center of the camera target surface. Observe the position of the centroid of the light spot on the camera target surface to determine whether the position of the light spot is correct.

[0032] Increase the number of fiber collimators on the light source adjustment structure (a light source needs to be connected, and a fiber coupler can be used). Add an aperture plate at the rear of the imaging lens group. Since the eccentricity of the light source adjustment structure has been adjusted to the correct position, only the angle of the fiber collimator needs to be adjusted. At the same time, the angle of the aperture plate needs to be rotated so that all beams can pass through the aperture plate.

[0033] The number of fiber collimators is distributed as far away from the central field of view as possible, the layout is kept symmetrical, and the distribution has a large field of view.

[0034] Observe the relative distance between the centroids of multiple light spots in the camera to determine whether the beam position is correct. This step can be used as a quantitative verification, and the position of the light spots can be fine-tuned based on the quantitative data.

[0035] The beam generating unit, light source adjustment structure, and imaging lens assembly in the offline device are moved to the main unit and used as an optical reference to adjust the optical elements in the main unit, so that the beam is adjusted to the position set by the main unit. No further adjustment of any component in the offline device is required.

[0036] Remove the beam generating unit and light source adjustment structure from the offline device, and install the custom light source required for the whole machine. The custom light source is usually equipped with adjustment fixtures. Using the optical components inside the already debugged whole machine as a reference, adjust the position and pitch deviation of the custom light source.

[0037] Figure 1 This is a schematic diagram of the traditional debugging process for the entire system. The traditional debugging method involves adjusting the relative relationship between the custom array light source 100 and the optical debugging components 300. This can be determined by observing the specific position of the light spot on the optical target plate 400. Generally, 300 is adjusted first to control the imaging magnification. After adjusting the magnification, the eccentricity, rotation, and pitch of the custom array light source 100 are adjusted to precisely control the position and brightness of the light spot. However, during the overall system debugging process, both the custom array light source 100 and the optical debugging components 300 can control the position of the light spot. If the custom array light source array is misaligned, and the optical debugging components try to compensate for this, neither position will be ideal. This will lead to reduced illumination and excessively high or low imaging magnification in the overall system's optical performance, requiring repeated attempts.

[0038] Therefore, the focus of the adjustment is to establish a benchmark between the custom array light source 100 and the overall optical debugging components 300. The two will now be debugged and tested offline separately. Before performing overall debugging, the custom array light source 100 and the imaging lens group 200 need to be removed and transferred to the offline testing platform. The offline testing platform must be flat; it is best to operate on an optical platform or a marble platform.

[0039] Example 1: Offline Benchmark Construction Phase First, an offline calibration system is built on a highly flat optical or marble platform. This platform serves as the physical basis for all offline calibration operations.

[0040] 1. Single-beam emission direction calibration: Figure 2 This is a schematic diagram of a single-beam emission position adjustment device, as shown below. Figure 2As shown, the custom light source 100 and the imaging lens assembly 200 are separated. The single-mode fiber light source 101, fiber collimator 103, and photodetector 104 are connected through a fiber optic circulator. Then, the fiber collimator 103 is installed into the light source adjustment structure assembly 102. The light source adjustment structure assembly 102 and the imaging lens assembly 200 are connected, and the imaging lens assembly 200 is fixed to the marble platform 702 by the fixing member 704 and the support member 703.

[0041] The reflector 701 is placed in front of the light-emitting direction of the imaging mirror group 200, and its surface is precisely calibrated in advance using an autocollimator to ensure that its reflective surface is parallel to the platform reference plane.

[0042] When installing the fiber collimator 103 into the hole on the light source adjustment structure assembly 102, the angle of the fiber collimator 103 is adjusted by using two set screws on the side of the hole. The height of the support 703 is adjusted so that the light beam can hit the reflector 701. The single-mode fiber light source 101 is turned on, and the signal change of the photodetector 104 is observed. When the signal amplitude reaches its maximum, the two set screws are fixed. At this time, the light direction has been adjusted to coincide with the optical axis, and the light emission angle has been adjusted.

[0043] 2. Single-beam emission position calibration: Figure 3 This is a schematic diagram of a multi-beam emission direction adjustment device. The single-mode fiber light source 101 and the fiber collimator 103 are directly connected. The fiber circulator 102 is removed, and the reflector 701 is replaced with a large target camera 706. The reflector 706 is then connected and fixed to the fixing part 704 of the imaging lens group 200 using a cage-type structure plug 705 to ensure that the optical axis of the imaging optical path can pass through the center of the camera target surface.

[0044] Adjust the XY offset of the light source adjustment structure 102 by adjusting the set screw, and adjust the collimated beam to the center of the camera target surface. This can be determined by pixel positioning through the camera's built-in software. After the adjustment is completed, fix the set screw.

[0045] 3. Multi-beam emission angle calibration: Figure 4 The diagram shows the adjustment process of the optical components during the overall debugging of the machine. Multiple fiber optic collimators 103 are inserted into the light source adjustment structure 102 and connected to the light source. Here, multiple light sources can be achieved using 1×N fiber optic couplers. Except for the central fiber optic collimator, the other fiber optic collimators can be arranged according to the required field of view.

[0046] Install a perforated aperture plate 106 at the light outlet of the imaging lens group 200. The position of the holes in the aperture plate should be consistent with the magnification and the position of each field of view of the front light source adjustment structure 201.

[0047] When the single-mode fiber optic light source 101 is turned on, the off-center position of the aperture plate 106 is controlled to allow the beam to pass through the central field of view, and then similarly... Figure 2 The operation involves adjusting the output direction of each fiber collimator 103 to be parallel to the optical axis, while rotating the multi-aperture plate 106 to allow each collimated beam to be emitted and enter the large target camera.

[0048] The perforated aperture plate 106 can be designed to be held in place by two pressure rings, or a special tooling can be designed. When pre-installing, ensure the initial position is roughly correct; subsequent fine adjustments can be made. After debugging, the perforated aperture plate 106 needs to be removed.

[0049] Observe on the large target camera 706 whether the distance between the centroid positions of the light spots in each field of view is the same. If the light beams in each field of view can pass through the multi-aperture plate 106 correctly, then the deviation of the centroid position of the light spot is within a reasonable range.

[0050] The offline light source debugging has been completed and can be moved to the main unit for use as an "ideal light source" and as a benchmark for the overall debugging of the unit.

[0051] Example 2: Overall Machine Debugging and Reference Transfer Stage Figure 5 The diagram illustrates the adjustment process of optical components during the overall system debugging. Loosen the imaging lens assembly fixing piece 704 and move the single-mode fiber light source 101, fiber collimator 103, light source adjustment structure 102, and imaging lens assembly 200 onto the system as a reference for overall system debugging.

[0052] Furthermore, an optical target plate 400 needs to be placed in the whole machine as an evaluation benchmark. By adjusting the relative positions of various optical components 300 in the whole machine optical system, the light emitted from the "ideal light source" can hit the correct position of the optical target plate 400.

[0053] Furthermore, at this point, the benchmark of the "ideal light source" has been transferred to each optical element 300.

[0054] Furthermore, an observation lens 501 and a camera 502 are set up to detect whether the position of the light spot is hitting the correct position of the optical target plate 400 of the whole machine.

[0055] Furthermore, the "ideal light source" including the light source adjustment structure 102, the light source collimator 103 and the single-mode fiber light source 101 are removed as a whole, and the customized light source 100 (the final light source used in the whole equipment) is installed on the whole equipment. Then, by adjusting the deviation position of the customized light source 100, the light spot can hit the correct position of the optical target plate of the whole equipment.

[0056] Furthermore, by adjusting the pitch angle of the custom light source 100, the aperture pass rate through the imaging lens group 200 can be controlled, thereby adjusting the overall brightness of the light spot hitting the optical target plate 400 of the whole machine.

[0057] Furthermore, adjusting the custom light source 100 is as follows: Figure 6 During the operation shown, the already adjusted optical element 300 is used as a reference for adjustment.

[0058] Figure 6 A schematic diagram of the customized light source adjustment process for overall system debugging is provided. First, an offline debugging phase is performed, including adjusting the emission direction and position of a single beam, followed by adjusting the emission direction of multiple beams to establish a preliminary beam control reference. Next, an ideal light source is installed in the overall system, and a reference transfer process is executed to transfer the reference parameters established in the offline debugging phase to the overall system environment. Subsequently, the optical components in the system are debugged to ensure that the collaborative working state of each optical component in the overall system meets the design requirements. Then, the ideal light source is replaced with a customized light source array, and this customized light source array is debugged to adapt to the specific needs of the actual application scenario. Finally, the debugging process of the entire optical system is completed, and a reference system for the ideal light source is established, providing a reliable basis for subsequent calibration and optimization of the optical system. Therefore, the offline adjustment device method for beam position offset provided in this application achieves precise control of the beam position offset by building an offline test platform to construct an ideal light source for reference transfer.

[0059] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. An off-line adjustment device for spot position offset amount adjustment, characterized by, Comprise: An offline debugging platform; A light source adjusting structure; An imaging unit fixedly connected with the light source adjusting structure; A first detection unit and a second detection unit; The light source adjusting structure, the imaging unit, and the first and second detection units can be built on the offline debugging platform to form three functional optical path configurations: In the first optical path configuration, a light beam generating unit is installed in the light source adjusting structure, and the first detection unit is arranged behind the light path of the imaging unit to form a single-beam light emitting direction adjusting device for calibrating the parallelism between the single-beam light emitting direction and the system optical axis; In the second optical path configuration, a light beam generating unit is installed in the light source adjusting structure, and the second detection unit is coaxially fixedly connected with the imaging unit to form a single-beam light emitting position adjusting device for calibrating the imaging position of the single-beam light on the center of the target surface; In the third optical path configuration, multiple light beam generating units are installed in the light source adjusting structure, and a multi-aperture diaphragm plate is arranged between the imaging unit and the second detection unit to form a multi-beam angle adjusting device for calibrating the angle parallelism and spatial distribution of the multi-beam light; Wherein, the single-beam light emitting direction adjusting device, the single-beam light emitting position adjusting device, and the multi-beam angle adjusting device are used in sequence, and by multiplexing the spatial position of the light source adjusting structure determined in the second optical path configuration and the third optical path configuration, the sequential establishment and accumulation of the reference are realized, and finally the "ideal light source" assembly is formed.

2. The off-line adjustment device for spot position offset amount adjustment according to claim 1, characterized by, The first detection unit comprises: A plane mirror arranged in front of the light emitting direction of the imaging unit, and the reflecting surface thereof is pre-calibrated by a autocollimator to be parallel to the reference surface of the offline debugging platform; A light signal detector; A fiber optic circulator for connecting the input fiber and output fiber of the light beam generating unit with the light signal detector, so that the light emitted by the light beam generating unit returns along the original path after collimation by the imaging unit and reflection by the plane mirror and is received by the light signal detector.

3. The off-line adjustment device for spot position offset amount adjustment according to claim 1, characterized by, The second detection unit is a large target surface camera which is coaxially and rigidly connected with the lens barrel of the imaging unit through a cage structure to ensure that the center of the photosensitive target surface of the large target surface camera coincides with the optical axis of the imaging unit.

4. The off-line adjustment device for spot position offset amount adjustment according to claim 1, characterized by, The position distribution of the multiple light transmission holes on the multi-aperture diaphragm plate matches the predetermined spatial arrangement of the multiple light beam generating units installed on the light source adjusting structure and the magnification of the imaging unit; the multi-aperture diaphragm plate can be rotationally arranged at the output end of the imaging unit around an axis coinciding with the optical axis of the imaging unit.

5. The off-line adjustment device for spot position offset amount adjustment according to claim 1, characterized by, The light source adjusting structure comprises mounting holes for mounting single or multiple light beam generating units, and an angle fine adjustment mechanism arranged independently for each mounting hole and a transverse displacement adjusting mechanism arranged integrally.

6. A method of adjusting the amount of spot position shift based on the off-line adjustment device according to any one of claims 1 to 5, characterized in that Comprise the following steps: An offline reference construction step: on the offline debugging platform, the first optical path configuration, the second optical path configuration, and the third optical path configuration are sequentially built and used to calibrate the light source assembly and form the "ideal light source" assembly comprising the light source adjusting structure, the light beam generating unit, and the imaging unit; The reference transmission and optical element calibration step: the "ideal light source" assembly is installed as a whole module to the corresponding interface of the optical system to be debugged, and the light beam emitted by the "ideal light source" assembly with known characteristics is used as an absolute reference. The optical adjustment elements inside the optical system are adjusted so that the light spot formed on the target plate of the optical system reaches the preset position, thereby transmitting and fixing the absolute reference to the optical adjustment elements of the optical system. The customized light source adaptation step: the "ideal light source" assembly is removed from the optical system and replaced by the customized light source array used in the optical system. The position and angle of the customized light source array are fine-tuned based on the optical adjustment elements of the optical system calibrated in the reference transmission and optical element calibration step, so that the light spot formed on the target plate by the light beam emitted by the customized light source array also reaches the preset position.

7. The method of claim 6, wherein, The offline reference construction step specifically includes: Single-beam direction calibration sub-step: the first optical path configuration is built, and the angle fine-tuning mechanism of the light source adjustment structure is adjusted to make the signal received by the light signal detector reach the peak value, thereby determining that the light direction of the single-beam generating unit is parallel to the system optical axis, and the angle fine-tuning mechanism is locked. Single-beam position calibration sub-step: after completing the single-beam direction calibration, the plane mirror and the fiber ring are removed, the second optical path configuration is built, and the transverse displacement adjustment mechanism of the light source adjustment structure is adjusted to make the light beam emitted by the single-beam generating unit form an image at the center of the target surface of the large target surface camera, and the transverse displacement adjustment mechanism is locked. Multi-beam angle calibration sub-step: after completing the single-beam position calibration and locking the transverse position of the light source adjustment structure, the connection state of the light source adjustment structure and the imaging unit is maintained, the third optical path configuration is built, and multiple beam generating units and a multi-aperture diaphragm plate are installed. By adjusting the angle of each beam generating unit and rotating the multi-aperture diaphragm plate and controlling the position and pitch of the multi-aperture diaphragm plate as a whole, all light beams pass through the corresponding light transmission holes, and the relative positions of the light spot centroids and the total value of the light spot brightness gray scale on the large target surface camera are observed to calibrate the angle parallelism and spatial distribution of the multi-beam.

8. The method of claim 6, wherein, In the multi-beam angle calibration sub-step, whether all light beams can completely pass through the corresponding light transmission holes of the multi-aperture diaphragm plate is observed as a preliminary judgment basis for the angle parallelism of the multi-beam.

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