Demisting device for cyclic cleaning of electronic grade hydrochloric acid and cleaning method

Abstract

The invention discloses a demisting device for circulating cleaning of electronic-grade hydrochloric acid and a cleaning method. The demisting device comprises a demisting tank; two groups of guide pipelines; a plurality of groups of demisting plates; the plurality of groups of demisting plates are respectively arranged in the demisting tank; a driving lifting assembly; the driving lifting assembly is arranged on the first shell; the terminal end of the driving lifting assembly is arranged in the fourth shell. The demisting device has the beneficial effects that the first shell, the second shell, the third shell and the fourth shell which are sequentially arranged from top to bottom of the demisting tank form a closed demisting space with definite function division, and the circulating path and the contact time of electronic-grade hydrochloric acid mist in the demisting tank are prolonged in cooperation with the distributed layout of the multiple groups of demisting plates; liquid drops in the mist are fully condensed and separated, the demisting thoroughness is obviously improved, the residual quantity of impurities in the mist is effectively reduced, and the strict requirements of electronic grade hydrochloric acid production on high purity and low impurities are met.

Description

Technical Field

[0001] This invention relates to a demisting device and cleaning method for circulating cleaning of electronic-grade hydrochloric acid. Background Technology

[0002] Electronic-grade hydrochloric acid is a key material in high-end electronics industries such as semiconductor manufacturing and electronic component processing. Its purity directly affects the performance and reliability of end products. Therefore, the industry imposes extremely stringent requirements on impurity control and purity assurance during the production process of electronic-grade hydrochloric acid. In the preparation and circulating cleaning process of electronic-grade hydrochloric acid, mist containing hydrochloric acid droplets is inevitably generated. These droplets may carry trace impurities, and if not effectively separated and removed, they can lead to a decrease in the purity of the hydrochloric acid product, resulting in serious problems such as corrosion and performance degradation of electronic components. Therefore, efficient demisting is one of the core critical steps in the production process of electronic-grade hydrochloric acid.

[0003] Currently, most electronic-grade hydrochloric acid demisting devices commonly used in the industry adopt a single-shell structure with a fixed demisting plate design, which has the following prominent problems: 1. Insufficient demisting efficiency and thoroughness: Traditional demisting plates have poor dispersion, short flow path of mist in the demisting device, and limited contact time between mist droplets and demisting plates, resulting in insufficient condensation and separation of droplets. The trace droplets and impurities remaining in the mist are difficult to meet the stringent standards of electronic grade hydrochloric acid for high purity and low impurities. 2. Difficulty in cleaning and maintaining the demister plate: After long-term use, the surface of the demister plate is prone to the adhesion of condensed hydrochloric acid droplets and impurities, resulting in scaling. Existing cleaning methods are mostly simple soaking or high-pressure rinsing, which cannot cover all contact surfaces of the demister plate and cannot simultaneously clean the adhering contaminants on the inner wall of the demister tank. This leads to incomplete cleaning, which in turn causes a continuous decline in demister efficiency, requiring frequent shutdowns for manual cleaning. This not only increases maintenance costs but also seriously affects production continuity. In view of this, the present invention proposes a demisting device and cleaning method for circulating cleaning of electronic grade hydrochloric acid, so as to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a demisting device and cleaning method for circulating cleaning of electronic-grade hydrochloric acid, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A demisting device for circulating cleaning of electronic-grade hydrochloric acid, comprising: A demister canister; the demister canister is provided with a first housing, a second housing, a third housing, and a fourth housing in sequence from top to bottom; Two sets of guide pipes; the two sets of guide pipes are symmetrically arranged on the first housing; the bottom end of the guide pipes is located in the fourth housing; Multiple sets of demister plates; the multiple sets of demister plates are respectively installed in the demister can; A driving lifting assembly; the driving lifting assembly is disposed on a first housing; the terminal of the driving lifting assembly is disposed in a fourth housing; The guide pipe is raised along the axis of the guide pipe, which drives multiple sets of demister plates to rise and contact with the drive lifting assembly; The drive lifting assembly operates to raise and lower multiple sets of defogging plates to complete the cleaning process.

[0006] As an improvement to the above technical solution, a housing mounting truncated cone is provided on the first housing, a first discharge pipe communicating with the first housing is provided on the housing mounting truncated cone, a second discharge pipe communicating with the inner cavity is provided on the first discharge pipe, and the axis of the first discharge pipe is perpendicular to the axis of the second discharge pipe. The outer wall of the second housing is provided with a pressure relief pipe that communicates with the inner cavity, which is used to relieve pressure in the demister can. Multiple sets of support plates are provided on the outer side wall of the third housing to provide overall support for the demister can. The outer wall of the fourth housing is provided with a feed pipe that communicates with the inner cavity, which is used to guide the mist into the demister. The bottom end face of the fourth housing is provided with a drain pipe that connects to the inner cavity, which is used to drain the condensate liquid from the demister plate and the cleaning liquid.

[0007] As an improvement to the above technical solution, two sets of sliding pipes are symmetrically arranged on the first housing, and the two sets of guide pipes are respectively arranged in the two sets of sliding pipes. The guide pipe is provided with a sliding part and a cleaning part. The sliding part is located in the inner cavity of the first housing and is slidably and sealingly connected to the sliding pipe. The cleaning part is located between the second housing, the third housing and the fourth housing.

[0008] As an improvement to the above technical solution, the outer wall of the sliding part is fixedly fitted with a fixing sleeve, and a fixing frame is provided between the two sets of fixing sleeves. Two sets of hydraulic lifting rods are symmetrically arranged on the mounting platform of the housing. The two sets of hydraulic lifting rods are respectively connected to the fixed frame and are used to drive the sliding part to rise and fall in the sliding pipe.

[0009] As an improvement to the above technical solution, a sliding flange is provided at the top of the sliding part, and a supporting circular plate is provided at the bottom of the cleaning part; The sidewall of the cleaning section is provided with a cleaning hole, which is oriented toward the inner wall of the second housing, the third housing and the fourth housing.

[0010] As an improvement to the above technical solution, the drive lifting assembly includes a drive plate, and the drive plate is flange-connected to the first discharge pipe; The drive board is equipped with a servo drive motor and a drive rod, which is connected to the servo drive motor and cooperates with the demister plate.

[0011] As an improvement to the above technical solution, a threaded sleeve is provided at the center of the demister plate; The drive rod is provided with a threaded part, which is threadedly engaged with the threaded sleeve. The drive rod is also provided with a buffer part, which does not contact the threaded sleeve.

[0012] As an improvement to the above technical solution, a transition slope is provided between the threaded portion and the buffer portion, and the diameter of the buffer portion is smaller than the diameter of the threaded portion; A support ring is provided in the fourth housing, and a support rod is provided between the support ring and the inner wall of the fourth housing. The buffer part is rotatably disposed in the support ring.

[0013] As an improvement to the above technical solution, the defogging plate includes a defogging ring, which is in contact with but not connected to the circular inner walls of the first housing, the second housing, the third housing, and the fourth housing. The defogging ring is equipped with multiple sets of baffles to guide the fog to condense into water droplets; The defogger ring is also symmetrically provided with two sets of guide rings, and the two sets of sliding parts are respectively slidably disposed in the two sets of guide rings; The threaded sleeve is located at the axial center of the demister ring; Both sets of guide rings and one set of threaded sleeves are connected to the baffle plate.

[0014] A cleaning method for a demisting device used in the circulating cleaning of electronic-grade hydrochloric acid includes the following steps: Step 1, Defogging process: The mist generated during the production of electronic-grade hydrochloric acid is introduced into the demister through the feed pipe of the fourth shell along the preset direction of the tank wall. The deflection and guiding effect of the baffles in the multiple sets of demister plates prolongs the flow path and collision time of the mist droplets in the demister, causing the mist droplets to condense into water droplets. The condensed water droplets flow down the inner wall of the demister and are discharged through the drain pipe at the center of the bottom end face of the fourth shell. The clean gas after demisting is turned and discharged through the vertical arrangement of the first discharge pipe and the second discharge pipe. Step 2, Pre-cleaning preparation procedures: Close the passages of the feed pipe, the first discharge pipe and the second discharge pipe, completely drain the residual condensed waste water in the demister tank through the drain pipe, and then connect the external cleaning fluid pipeline through the sliding flange at the top of the guide pipe. Introduce the cleaning fluid into the demister tank through the cleaning section and cleaning hole of the guide pipe, and control the height of the cleaning fluid to be no less than the height of the buffer section on the drive rod and no more than the height of the feed pipe. Step 3, Step-by-Step Cleaning Process: include: Step 3.1, single immersion cleaning: The servo drive motor drives the drive rod to rotate, so that the threaded sleeves of multiple sets of demister plates smoothly transition to the buffer section through the transition slope. Multiple sets of demister plates are simultaneously immersed in the cleaning solution, and the wetting effect of the cleaning solution is used to remove the condensed impurities attached to the surface. Step 3.2, Secondary reciprocating lifting and cleaning: Start the two sets of hydraulic lifting rods on the housing mounting platform. Through the fixed frame and fixed sleeve, drive the two sets of guide pipes to lift synchronously along the sliding pipe. The support circular plate at the bottom of the guide pipe pushes multiple sets of demister plates to cooperate with the drive rod. The servo drive motor controls the drive rod to drive the demister plates to reciprocate in the cleaning fluid. At the same time, the cleaning fluid is sprayed into the inner wall of the demister tank through the cleaning hole, and the deep cleaning of the demister plates and the scraping cleaning of the inner wall of the tank are completed simultaneously. Step 3.3, Three-time replacement fluid cleaning: Drain the dirty cleaning fluid from step 3.2 through the drain pipe, repeat the cleaning fluid introduction operation of step 2, and once again use the servo drive motor and hydraulic lifting rod to drive the demister plate to rise and fall, so as to thoroughly remove the stubborn pollutants remaining on the demister plate; Step 4, Precision Reset Process: Close the cleaning fluid inlet passage, start the hydraulic lifting rod to lift the guide pipe, so that the threaded sleeves of multiple sets of demister plates are reset to the threaded part of the drive rod through the transition slope. Through the high-precision speed regulation and positioning function of the servo drive motor, control the multiple sets of demister plates to contact the drive rod at intervals, and lift the demister plates one by one to different preset heights to restore the initial demister layout. After the reset is completed, open the feed pipe, the first discharge pipe and the second discharge pipe to resume the demister process.

[0015] Compared with the prior art, the beneficial effects of the present invention are: The first, second, third, and fourth shells arranged sequentially from top to bottom in the demister can form a sealed demister space with clearly defined functional zones. Combined with the distributed layout of multiple sets of demister plates, the flow path and contact time of electronic-grade hydrochloric acid mist in the demister can are extended, which promotes the full condensation and separation of droplets in the mist, significantly improves the thoroughness of demistering, effectively reduces the amount of impurities remaining in the mist, and meets the stringent requirements of high purity and low impurities in the production of electronic-grade hydrochloric acid. By employing a stepped cleaning process consisting of one soaking cleaning, two reciprocating lifting cleaning, and three replacement fluid lifting cleaning, combined with an integrated design of the guide pipe that serves as both a cleaning fluid inlet and a guide for the demister plates, the cleaning fluid can be precisely applied to each contact surface of multiple sets of demister plates. This effectively removes condensed impurities and residual pollutants adhering to the demister plates, avoiding the problems of incomplete cleaning and scale buildup on the demister plates that lead to reduced demisting efficiency in traditional cleaning methods, and ensuring the long-term stable demisting performance of the demister plates. Through the coordinated cooperation of two sets of symmetrically arranged guide pipes and the drive lifting component 30, the guide pipes can be lifted along their own axis to accurately drive multiple sets of demisting plates to make contact with the drive lifting component. The drive lifting component drives the demisting plates to complete reciprocating lifting and cleaning through the transmission structure. At the same time, during the reset phase, the spaced contact design drives multiple sets of demisting plates to be lifted to different preset heights, so as to achieve accurate reset of the initial demisting layout of the demisting plates, avoid the demisting path disorder caused by reset deviation, and ensure the operational stability and demisting effect consistency of the demisting device after reset. During the lifting and lowering process, the demister plate forms a contact-type relative movement with the inner wall of the demister tank. On the one hand, it can simultaneously scrape and clean the condensed impurities and residual pollutants attached to the inner wall of the tank, avoiding cross-contamination of the media or reduction of the demister space caused by scaling on the inner wall. This eliminates the tedious process of manually cleaning the inner wall of the tank periodically, significantly reducing equipment maintenance costs and downtime. On the other hand, the contact action forms a circumferential limiting guide, which, together with two sets of symmetrically arranged guide pipes, forms a double guide support, effectively suppressing circumferential swaying and offset during the lifting and lowering process of the demister plate. This further improves the smoothness of the lifting and lowering action of the demister plate and the accuracy of the reset positioning, ensuring the continuous and stable operation of the demister and cleaning processes. This meets the stringent requirements for equipment cleanliness and operational stability in the production of electronic-grade hydrochloric acid. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the structure of the first housing of the present invention; Figure 3 For the present invention Figure 1 A magnified structural diagram at point A in the diagram; Figure 4 This is a side view of the present invention; Figure 5 For the present invention Figure 4 Sectional view of BB; Figure 6 For the present invention Figure 5 Enlarged structural diagram at point C; Figure 7 For the present invention Figure 5 Enlarged structural diagram at point D; Figure 8 This is a schematic diagram of the structure of the drive rod of the present invention; Figure 9 For the present invention Figure 8 Enlarged structural diagram at point E in the diagram; Figure 10 This is a schematic diagram of the sliding part of the present invention; Figure 11 This is a schematic diagram of the cleaning section of the present invention; Figure 12 This is a schematic diagram of the structure of the defogging plate of the present invention.

[0017] In the diagram: 10. Demisting tank; 11. First housing; 111. Sliding pipe; 112. Housing mounting truncated cone; 113. First discharge pipe; 114. Second discharge pipe; 12. Second housing; 121. Pressure relief pipe; 13. Third housing; 131. Support plate; 14. Fourth housing; 141. Feed pipe; 142. Drain pipe; 20. Guide pipe; 21. Hydraulic lifting rod; 22. Fixing sleeve; 23. Fixing Frame; 24. Sliding part; 25. Sliding flange; 26. Supporting circular plate; 27. Cleaning part; 28. Cleaning hole; 30. Drive lifting assembly; 31. Servo drive motor; 32. Drive plate; 33. Drive rod; 331. Threaded part; 332. Transition slope; 333. Buffer part; 40. Demister plate; 41. Threaded sleeve; 42. Baffle plate; 43. Demister ring; 44. Guide ring; 50. Support ring; 51. Support rod. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Example: like Figure 1-12 As shown, this embodiment proposes a demisting device for circulating cleaning of electronic-grade hydrochloric acid, comprising: Demister 10; the demister 10 is provided with a first housing 11, a second housing 12, a third housing 13 and a fourth housing 14 arranged from top to bottom; Two sets of guide pipes 20; the two sets of guide pipes 20 are symmetrically arranged on the first housing 11; the bottom end of the guide pipes 20 is disposed in the fourth housing 14; Multiple sets of demister plates 40; the multiple sets of demister plates 40 are respectively disposed in the demister canister 10; A drive lifting assembly 30 is provided; the drive lifting assembly 30 is disposed on the first housing 11; the terminal of the drive lifting assembly 30 is disposed in the fourth housing 14. The guide pipe 20 is raised along the axis of the guide pipe 20, which drives multiple sets of demisting plates 40 to be raised and in contact with the drive lifting assembly 30. The drive lifting assembly 30 operates to lift and lower multiple sets of demisting plates 40 to complete the cleaning process.

[0020] In this embodiment, during the demisting process in the production of electronic-grade hydrochloric acid, the mist is introduced into the demisting tank 10, and the mist is demisted by multiple sets of demisting plates 40. When the demisting plates 40 need to be cleaned, the waste water condensed from the previous demisting is first discharged, and then the cleaning fluid is introduced into the demisting tank 10 through the guide pipe 20 until multiple sets of cleaning fluid are stored in the fourth housing 14. Then, the lifting component 30 is driven to lower the multiple sets of demisting plates 40 until the multiple sets of demisting plates 40 come into contact with the cleaning fluid in the fourth housing 14, thus completing one cleaning process. Then the guide pipe 20 is lifted along the axis of the guide pipe 20, which drives multiple sets of demisting plates 40 to cooperate with the drive lifting assembly 30, so that the multiple sets of demisting plates 40 reciprocate in the fourth housing 14 to complete the secondary cleaning process. After the multiple sets of demister plates 40 have completed the secondary cleaning, the cleaning fluid in the fourth housing 14 is drained and re-injected, and the multiple sets of demister plates 40 are raised and lowered again to complete the third cleaning. After the multiple sets of demister plates 40 have completed three cleaning cycles, the guide pipe 20 is raised, which causes the multiple sets of demister plates 40 to make intermittent contact with the drive lifting assembly 30. The drive lifting assembly 30 then lifts the multiple sets of demister plates 40 to different heights, thus completing the reset process of the multiple sets of demister plates 40. The first shell 11, the second shell 12, the third shell 13 and the fourth shell 14 arranged sequentially from top to bottom in the demister 10 form a closed and functionally distinct demister space. With the distributed layout of multiple sets of demister plates 40, the flow path and contact time of electronic-grade hydrochloric acid mist in the demister 10 are extended, which promotes the full condensation and separation of droplets in the mist, significantly improves the thoroughness of demistering, effectively reduces the amount of impurities in the mist, and meets the stringent requirements of high purity and low impurities in the production of electronic-grade hydrochloric acid. By employing a stepped cleaning process consisting of one soaking cleaning, two reciprocating lifting cleaning, and three replacement fluid lifting cleaning, combined with the integrated design of the guide pipe 20 which serves as both a cleaning fluid inlet and a guide for the demister plate 40, the cleaning fluid can be precisely applied to each contact surface of multiple sets of demister plates 40. This effectively removes condensed impurities and residual pollutants adhering to the demister plates 40, avoiding the problems of incomplete cleaning and scale buildup on the demister plates 40 that lead to reduced demisting efficiency in traditional cleaning methods, and ensuring the long-term stable demisting performance of the demister plates 40. Through the coordinated cooperation of two sets of symmetrically arranged guide pipes 20 and drive lifting components 30, the guide pipes 20 can be lifted along their own axis to accurately drive multiple sets of demisting plates 40 to make contact with the drive lifting components 30. The drive lifting components 30 drive the demisting plates 40 to complete reciprocating lifting and cleaning through the transmission structure. At the same time, during the reset phase, the multiple sets of demisting plates 40 are driven to be raised to different preset heights through the interval contact design, so as to achieve accurate reset of the initial demisting layout of the demisting plates 40, avoid the demisting path disorder caused by reset deviation, and ensure the operational stability and demisting effect consistency of the demisting device after reset. During the lifting and lowering process, the demister plate 40 forms a contact-type relative movement with the inner wall of the demister tank 10. On the one hand, it can simultaneously scrape and clean the condensed impurities and residual pollutants attached to the inner wall of the tank, avoiding cross-contamination of the media or reduction of the demister space caused by scaling on the inner wall. This eliminates the tedious process of manually cleaning the inner wall of the tank periodically, significantly reducing equipment maintenance costs and downtime. On the other hand, the contact cooperation forms a circumferential limiting guide, which, together with the two sets of symmetrically arranged guide pipes 20, forms a double guide support, effectively suppressing circumferential swaying and offset during the lifting and lowering process of the demister plate 40. This further improves the smoothness of the lifting and lowering action of the demister plate 40 and the accuracy of the reset positioning, ensuring the continuous and stable operation of the demister and cleaning processes. This meets the stringent requirements for equipment cleanliness and operational stability in the production of electronic-grade hydrochloric acid.

[0021] Specifically, the first housing 11 is provided with a housing mounting frustum 112, the housing mounting frustum 112 is provided with a first discharge pipe 113 communicating with the first housing 11, the first discharge pipe 113 is provided with a second discharge pipe 114 communicating with the inner cavity, and the axis of the first discharge pipe 113 is perpendicular to the axis of the second discharge pipe 114. The outer wall of the second housing 12 is provided with a pressure relief pipe 121 that communicates with the inner cavity, which is used to perform pressure relief treatment on the demister 10; Multiple sets of support plates 131 are provided on the outer side wall of the third housing 13 for overall support of the demister 10; The outer wall of the fourth housing 14 is provided with a feed pipe 141 that communicates with the inner cavity, which is used to guide the mist into the demister 10. The bottom end face of the fourth housing 14 is provided with a drain pipe 142 that communicates with the inner cavity, which is used to drain the condensate liquid and cleaning liquid from the demister plate 40.

[0022] In this case, the first housing 11, the second housing 12, the third housing 13, and the fourth housing 14 are connected by flanges.

[0023] In this embodiment, the first housing 11 is precisely positioned and assembled with other components through the housing mounting frustum 112, ensuring the coaxiality and sealing performance of the first discharge pipe 113 and the first housing 11, and preventing gas leakage or external pollution intrusion; the feed pipe 141 on the outer wall of the fourth housing 14 can guide the mist to enter the demister 10 smoothly along the preset direction of the tank wall, avoiding the mist from directly hitting the demister plate 40 and causing condensed droplets to splash, extending the flow path of the mist in the tank, providing conditions for the full demisting of multiple sets of demister plates 40, and improving the demisting efficiency.

[0024] Specifically, two sets of sliding pipes 111 are symmetrically arranged on the first housing 11, and the two sets of guide pipes 20 are respectively arranged in the two sets of sliding pipes 111; The guide pipe 20 is provided with a sliding part 24 and a cleaning part 27. The sliding part 24 is disposed in the inner cavity of the first housing 11 and is slidably and sealingly connected to the sliding pipe 111. The cleaning part 27 is disposed between the second housing 12, the third housing 13 and the fourth housing 14.

[0025] In this embodiment, the sliding part 24 of the guide pipe 20 and the sliding pipe 111 on the first housing 11 form a sliding seal connection. On the one hand, it can effectively block the flow of electronic-grade hydrochloric acid mist and cleaning fluid in the demister 10 to the external environment, avoid resource waste or safety hazards caused by mist leakage, and prevent impurities and pollutants in the outside air from entering the tank and contaminating the electronic-grade hydrochloric acid or affecting the demister and cleaning effect. It strictly adapts to the stringent requirements of high cleanliness and low pollution risk for electronic-grade chemical production. On the other hand, the sealing structure adapts synchronously with the lifting and lowering movement of the guide pipe 20 to avoid sealing failure caused by relative movement and ensure the sealing stability of the device during long-term operation. Two sets of sliding pipes 111 are symmetrically arranged on the first housing 11 and correspond one-to-one with two sets of guide pipes 20 to form a double-sided precision guide and limit structure, which can effectively constrain the movement trajectory of the guide pipes 20 and prevent circumferential offset, tilting or shaking during their lifting and lowering, ensuring that the guide pipes 20 lift and lower precisely along their own axis; and through the connection relationship between the guide pipes 20 and the demister plate 40, the coaxiality and synchronicity of the lifting and lowering actions of multiple sets of demister plates 40 are indirectly guaranteed, preventing the demister plate 40 from getting stuck or scratched against the inner wall of the demister tank 10, or problems such as uneven contact of cleaning fluid and disordered demisting path caused by movement offset, which significantly improves the operational stability of the demisting and cleaning process; The guide pipe 20 is designed with a segmented design of sliding part 24 and cleaning part 27. The sliding part 24 focuses on sealing and guiding the sliding pipe 111, while the cleaning part 27 precisely covers the core area of ​​demisting and cleaning where the second housing 12, the third housing 13 and the fourth housing 14 are located. This achieves the integration of guiding positioning and cleaning fluid delivery functions, eliminating the need for additional independent guiding mechanisms and cleaning fluid delivery pipelines. This simplifies the overall structural layout of the device and reduces assembly complexity and manufacturing costs.

[0026] Specifically, a fixing sleeve 22 is fixedly sleeved on the outer wall of the sliding part 24, and a fixing frame 23 is provided between the two sets of fixing sleeves 22; Two sets of hydraulic lifting rods 21 are symmetrically arranged on the housing mounting truncated cone 112. The two sets of hydraulic lifting rods 21 are respectively connected to the fixed frame 23 and are used to drive the sliding part 24 to rise and fall in the sliding pipe 111.

[0027] In this embodiment, a rigid linkage structure for two sets of guide pipes 20 is constructed by the fixed sleeve 22 and the fixed frame 23. In conjunction with two sets of hydraulic lifting rods 21 symmetrically arranged on the housing mounting frustum 112, the driving force is synchronously distributed and evenly transmitted, ensuring that the two sets of guide pipes 20 rise and fall synchronously along the axis of the sliding pipe 111. This avoids the problems of guide pipe 20 offset, tilting or asynchronous movement caused by unilateral drive, thereby ensuring the consistency of the lifting action of multiple sets of demisting plates 40. This provides core power guarantee for the uniformity of the cleaning process and the accuracy of the reset process, and is suitable for the stringent requirements of electronic grade hydrochloric acid production for equipment action accuracy.

[0028] Specifically, a sliding flange 25 is provided at the top of the sliding part 24, and a supporting circular plate 26 is provided at the bottom of the cleaning part 27. The cleaning section 27 has a cleaning hole 28 on its side wall, and the cleaning hole 28 is arranged toward the inner wall of the second housing 12, the third housing 13 and the fourth housing 14.

[0029] In this embodiment, the sliding flange 25 is used to connect to an external pipeline so that the cleaning fluid can be introduced into the demister 10. The support circular plate 26 is used to support the demister plate 40 so as to drive the demister plate 40 to be lifted, so that the demister plate 40 can cooperate with the drive lifting assembly 30. The cleaning hole 28 is used to introduce cleaning fluid into the fourth housing 14 of the demister 10. At the same time, cleaning fluid can also be sprayed onto the inner wall of the demister 10 through the cleaning hole 28 to perform a cleaning process on the demister 10.

[0030] Specifically, the drive lifting assembly 30 includes a drive plate 32, which is flange-connected to the first discharge pipe 113; The drive plate 32 is provided with a servo drive motor 31 and a drive rod 33. The drive rod 33 is connected to the servo drive motor 31 and cooperates with the demisting plate 40.

[0031] Specifically, a threaded sleeve 41 is provided at the center of the demister plate 40; The drive rod 33 is provided with a threaded part 331, which is threadedly engaged with the threaded sleeve 41. The drive rod 33 is also provided with a buffer part 333, which does not contact the threaded sleeve 41.

[0032] In this embodiment, the threaded portion 331 of the drive rod 33 and the threaded sleeve 41 at the center of the demister plate 40 form a precise threaded transmission engagement. Combined with the high-precision speed regulation and positioning characteristics of the servo drive motor 31, the lifting stroke and speed of the demister plate 40 can be digitally and precisely controlled. This not only meets the dynamic stroke requirements of reciprocating lifting in the cleaning process, but also achieves precise height positioning of multiple sets of demister plates 40 in the reset process with "intermittent contact". This avoids problems such as disordered demisting path and uneven contact of cleaning fluid caused by lifting offset or positioning error, and strictly adapts to the stringent requirements of electronic-grade hydrochloric acid production for the precision of equipment operation. At the same time, the self-locking characteristic of the threaded transmission allows the demister plate 40 to stay stably at any lifting position, ensuring sufficient contact time between the demister plate 40 and the cleaning fluid during the cleaning process, further improving the cleaning effect. Of course, when the defogging plate 40 is being cleaned, the defogging plate 40 descends, causing the threaded sleeve 41 to transition from the threaded part 331 to the buffer part 333. At this time, the drive rod 33 rotates, and the threaded sleeve 41 does not engage with the threaded part 331, so that the defogging plate 40 can remain in the buffer part 333, so that multiple sets of defogging plates 40 can be placed in the buffer part 333 at the same time for the cleaning process. Of course, the height of the cleaning fluid is higher than the height of the buffer section 333, and the height of the cleaning fluid is lower than the height of the feed pipe 141.

[0033] Specifically, a transition slope 332 is provided between the threaded portion 331 and the buffer portion 333, and the diameter of the buffer portion 333 is smaller than the diameter of the threaded portion 331; A support ring 50 is provided in the fourth housing 14, and a support rod 51 is provided between the support ring 50 and the inner wall of the fourth housing 14. The buffer part 333 is rotatably disposed in the support ring 50.

[0034] Specifically, the defogger plate 40 includes a defogger ring 43, which is in contact with but not connected to the circular inner walls of the first housing 11, the second housing 12, the third housing 13, and the fourth housing 14. The defogging ring 43 is provided with multiple sets of baffles 42 to guide the fog to condense into water droplets; The defogger ring 43 is also symmetrically provided with two sets of guide rings 44, and the two sets of sliding parts 24 are respectively slidably disposed in the two sets of guide rings 44. The threaded sleeve 41 is located at the axial center of the demister ring 43; Both sets of guide rings 44 and one set of threaded sleeves 41 are connected to the baffle plate 42.

[0035] In this embodiment, the demisting ring 43 and the circular inner walls of the first shell 11, the second shell 12, the third shell 13, and the fourth shell 14 are designed to be in contact but not connected. On the one hand, this maximizes the contact coverage between the demisting ring 43 and the mist inside the tank. With the distributed layout of multiple baffles 42 inside the demisting ring 43, the electronic-grade hydrochloric acid mist is guided to form a reversal or turbulent flow, prolonging the flow path and collision time of the mist droplets inside the tank, promoting the rapid condensation of the mist droplets into water droplets, significantly improving the thoroughness of demisting, effectively reducing the risk of purity contamination caused by mist droplet entrainment, and strictly adapting to the stringent requirements for impurity control in the production of electronic-grade hydrochloric acid. On the other hand, during the lifting and lowering of the demisting plate 40, the demisting ring 43 forms a flexible sliding contact with the inner wall of the tank, which can simultaneously scrape the condensed impurities and residual pollutants attached to the inner wall of the tank, realizing the self-cleaning of the inner wall of the tank, avoiding the reduction of demisting space or cross-contamination caused by scale accumulation, saving the tedious process of manual cleaning, and reducing maintenance costs. The integrated arrangement of multiple baffles 42 within the demister ring 43 not only optimizes the fog guiding path but also forms a rigid connection system with the two symmetrically arranged guide rings 44 and the threaded sleeve 41 at the axial position. This significantly improves the overall structural strength of the demister plate 40, enabling it to withstand loads from airflow impact and lifting motion inertia, and preventing problems such as warping, deformation, or detachment of the baffles 42 from occurring in the demister plate 40.

[0036] A cleaning method for a demisting device used in the circulating cleaning of electronic-grade hydrochloric acid includes the following steps: Step 1, Defogging process: The mist generated during the production of electronic-grade hydrochloric acid is introduced into the demister 10 through the feed pipe 141 of the fourth shell 14 along the preset direction of the tank wall. The deflection and guiding effect of the baffle 42 in the multiple sets of demister plates 40 is used to prolong the flow path and collision time of the mist in the demister 10, so as to promote the condensation of the mist into water droplets. The condensed water droplets flow down the inner wall of the demister 10 and are discharged through the drain pipe 142 at the center of the bottom end face of the fourth shell 14. The clean gas after demisting is turned and discharged through the vertical arrangement of the first discharge pipe 113 and the second discharge pipe 114. Step 2, Pre-cleaning preparation procedures: Close the passages of the feed pipe 141, the first discharge pipe 113 and the second discharge pipe 114, completely drain the residual condensed waste water in the demister 10 through the drain pipe 142, and then connect the external cleaning fluid pipeline through the sliding flange 25 at the top of the guide pipe 20. The cleaning fluid is introduced into the demister 10 through the cleaning section 27 and the cleaning hole 28 of the guide pipe 20, and the height of the cleaning fluid is controlled to be no less than the height of the buffer section 333 on the drive rod 33 and no more than the height of the feed pipe 141. Step 3, Step-by-Step Cleaning Process: include: Step 3.1, one-time soaking and cleaning: the servo drive motor 31 drives the drive rod 33 to rotate, so that the threaded sleeves 41 of multiple sets of demister plates 40 smoothly transition to the buffer part 333 through the transition slope 332. Multiple sets of demister plates 40 are simultaneously soaked in the cleaning solution, and the wetting effect of the cleaning solution is used to remove the condensed impurities attached to the surface. Step 3.2, Secondary reciprocating lifting and cleaning: Start the two sets of hydraulic lifting rods 21 on the housing mounting platform 112. Through the fixed frame 23 and the fixed sleeve 22, drive the two sets of guide pipes 20 to lift synchronously along the sliding pipe 111. The support circular plate 26 at the bottom of the guide pipe 20 pushes multiple sets of demister plates 40 to cooperate with the drive rod 33. The servo drive motor 31 controls the drive rod 33 to drive the demister plates 40 to reciprocate in the cleaning fluid. At the same time, the cleaning fluid is sprayed into the inner wall of the demister tank 10 through the cleaning hole 28, and the deep cleaning of the demister plates 40 and the scraping cleaning of the inner wall of the tank are completed simultaneously. Step 3.3, three-time replacement fluid cleaning: The dirty cleaning fluid in step 3.2 is discharged through the drain pipe 142, and the cleaning fluid import operation in step 2 is repeated. The servo drive motor 31 and the hydraulic lifting rod 21 work together to drive the demister plate 40 to rise and fall, so as to thoroughly remove the stubborn pollutants remaining on the demister plate 40. Step 4, Precision Reset Process: Close the cleaning fluid inlet passage, start the hydraulic lifting rod 21 to drive the guide pipe 20 to rise, so that the threaded sleeves 41 of multiple sets of demister plates 40 are reset to the threaded part 331 of the drive rod 33 via the transition slope 332. Through the high-precision speed regulation and positioning function of the servo drive motor 31, control the multiple sets of demister plates 40 to contact the drive rod 33 at intervals, and lift the demister plates 40 one by one to different preset heights to restore the initial demisting layout. After the reset is completed, open the feed pipe 141, the first discharge pipe 113 and the second discharge pipe 114 to resume the demisting process.

[0037] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A demisting device for circulating cleaning of electronic-grade hydrochloric acid, characterized in that: include: Demister (10); the demister (10) is provided with a first housing (11), a second housing (12), a third housing (13) and a fourth housing (14) from top to bottom. Two sets of guide pipes (20); the two sets of guide pipes (20) are symmetrically arranged on the first housing (11); the bottom end of the guide pipes (20) is arranged in the fourth housing (14); Multiple sets of demister plates (40); the multiple sets of demister plates (40) are respectively installed in the demister canister (10); A drive lifting assembly (30); the drive lifting assembly (30) is disposed on the first housing (11); the terminal of the drive lifting assembly (30) is disposed in the fourth housing (14); The guide pipe (20) is raised along the axis of the guide pipe (20), which drives multiple sets of demisting plates (40) to rise and contact with the drive lifting assembly (30); The drive lifting assembly (30) operates to drive multiple sets of demisting plates (40) to rise and fall to complete the cleaning process.

2. The demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 1, characterized in that: The first housing (11) is provided with a housing mounting frustum (112), the housing mounting frustum (112) is provided with a first discharge pipe (113) communicating with the first housing (11), the first discharge pipe (113) is provided with a second discharge pipe (114) communicating with the inner cavity, and the axis of the first discharge pipe (113) is perpendicular to the axis of the second discharge pipe (114); The outer wall of the second housing (12) is provided with a pressure relief pipe (121) that communicates with the inner cavity, which is used to perform pressure relief treatment on the demister (10); Multiple sets of support plates (131) are provided on the outer side wall of the third housing (13) for overall support of the demister (10); The fourth housing (14) is provided with a feed pipe (141) with an inner cavity connected on the outer wall, which is used to guide the mist into the demister (10); The bottom end face of the fourth housing (14) is provided with a drain pipe (142) that is connected to the inner cavity, which is used to drain the condensate liquid of the demister plate (40) and the cleaning liquid.

3. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 2, characterized in that: Two sets of sliding pipes (111) are symmetrically arranged on the first housing (11), and the two sets of guide pipes (20) are respectively arranged in the two sets of sliding pipes (111); The guide pipe (20) is provided with a sliding part (24) and a cleaning part (27). The sliding part (24) is disposed in the inner cavity of the first housing (11). The sliding part (24) is slidably and sealedly connected to the sliding pipe (111). The cleaning part (27) is disposed between the second housing (12), the third housing (13) and the fourth housing (14).

4. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 3, characterized in that: The outer wall of the sliding part (24) is fixedly fitted with a fixing sleeve (22), and a fixing frame (23) is provided between the two sets of fixing sleeves (22). Two sets of hydraulic lifting rods (21) are symmetrically arranged on the housing mounting truncated cone (112). The two sets of hydraulic lifting rods (21) are respectively connected to the fixed frame (23) and are used to drive the sliding part (24) to rise and fall in the sliding pipe (111).

5. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 4, characterized in that: The top end of the sliding part (24) is provided with a sliding flange (25), and the bottom end of the cleaning part (27) is provided with a supporting circular plate (26). The cleaning section (27) has a cleaning hole (28) on its side wall, and the cleaning hole (28) is arranged toward the inner wall of the second housing (12), the third housing (13) and the fourth housing (14).

6. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 5, characterized in that: The drive lifting assembly (30) includes a drive plate (32), which is flange-connected to the first discharge pipe (113); The drive plate (32) is provided with a servo drive motor (31) and a drive rod (33) is also provided on the drive plate (32). The drive rod (33) is connected to the servo drive motor (31) and cooperates with the demisting plate (40).

7. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 6, characterized in that: A threaded sleeve (41) is provided at the center of the demister plate (40). The drive rod (33) is provided with a threaded part (331), which is threadedly engaged with the threaded sleeve (41). The drive rod (33) is also provided with a buffer part (333), which does not contact the threaded sleeve (41).

8. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 7, characterized in that: A transition slope (332) is provided between the threaded part (331) and the buffer part (333), and the diameter of the buffer part (333) is smaller than the diameter of the threaded part (331); A support ring (50) is provided in the fourth housing (14), and a support rod (51) is provided between the support ring (50) and the inner wall of the fourth housing (14). The buffer part (333) is rotatably disposed in the support ring (50).

9. A demisting device for circulating cleaning of electronic-grade hydrochloric acid according to claim 7, characterized in that: The demister plate (40) includes a demister ring (43), which is in contact with but not connected to the circular inner walls of the first housing (11), the second housing (12), the third housing (13) and the fourth housing (14); The defogging ring (43) is provided with multiple sets of baffles (42) to guide the fog to condense into water droplets; The defogger ring (43) is also symmetrically provided with two sets of guide rings (44), and the two sets of sliding parts (24) are respectively slidably disposed in the two sets of guide rings (44); The threaded sleeve (41) is located at the axial position of the demister ring (43); Both sets of guide rings (44) and one set of threaded sleeves (41) are connected to the baffle plate (42).

10. A cleaning method for a demisting device used for circulating cleaning of electronic-grade hydrochloric acid according to any one of claims 1-9, characterized in that: Includes the following steps: Step 1, Defogging process: The mist generated during the production of electronic-grade hydrochloric acid is introduced into the demister (10) through the feed pipe (141) of the fourth shell (14) along the preset direction of the tank wall. The deflection and guiding effect of the baffles (42) in the multiple sets of demister plates (40) is used to prolong the flow path and collision time of the mist in the demister (10), causing the mist to condense into water droplets. The condensed water droplets flow down the inner wall of the demister (10) and are discharged through the drain pipe (142) at the center of the bottom end face of the fourth shell (14). The clean gas after demisting is turned and discharged through the vertical arrangement of the first discharge pipe (113) and the second discharge pipe (114). Step 2, Pre-cleaning preparation procedures: Close the passage of the feed pipe (141), the first discharge pipe (113) and the second discharge pipe (114), and completely drain the residual condensed waste water in the demister (10) through the drain pipe (142). Then connect the external cleaning fluid pipeline through the sliding flange (25) at the top of the guide pipe (20), and introduce the cleaning fluid into the demister (10) through the cleaning part (27) and cleaning hole (28) of the guide pipe (20). Control the height of the cleaning fluid to be no lower than the height of the buffer part (333) on the drive rod (33) and no higher than the height of the feed pipe (141). Step 3, Step-by-Step Cleaning Process: include: Step 3.1, one-time soaking and cleaning: the servo drive motor (31) drives the drive rod (33) to rotate, so that the threaded sleeve (41) of multiple sets of demister plates (40) smoothly transitions to the buffer section (333) through the transition slope (332). Multiple sets of demister plates (40) are simultaneously soaked in the cleaning solution, and the wetting effect of the cleaning solution is used to remove the condensed impurities attached to the surface. Step 3.2, Secondary reciprocating lifting and cleaning: Start the two sets of hydraulic lifting rods (21) on the housing mounting platform (112), and drive the two sets of guide pipes (20) to rise synchronously along the sliding pipe (111) through the fixed frame (23) and the fixed sleeve (22). The support plate (26) at the bottom of the guide pipe (20) pushes multiple sets of demister plates (40) to cooperate with the drive rod (33). The servo drive motor (31) controls the drive rod (33) to drive the demister plates (40) to reciprocate in the cleaning fluid. At the same time, the cleaning fluid is sprayed into the inner wall of the demister tank (10) through the cleaning hole (28), and the deep cleaning of the demister plates (40) and the scraping cleaning of the inner wall of the tank are completed simultaneously. Step 3.3, three-time replacement fluid cleaning: the dirty cleaning fluid in step 3.2 is discharged through the drain pipe (142), the cleaning fluid import operation in step 2 is repeated, and the demister plate (40) is raised and lowered again through the servo drive motor (31) and the hydraulic lifting rod (21) to thoroughly remove the stubborn pollutants remaining in the demister plate (40); Step 4, Precision Reset Process: Close the cleaning fluid inlet passage, start the hydraulic lifting rod (21) to drive the guide pipe (20) to lift, so that the threaded sleeve (41) of multiple sets of demisting plates (40) is reset to the threaded part (331) of the drive rod (33) through the transition slope (332). Through the high-precision speed regulation and positioning function of the servo drive motor (31), control the multiple sets of demisting plates (40) to contact the drive rod (33) at intervals, and lift the demisting plates (40) one by one to different preset heights, restore the initial demisting layout, and after the reset is completed, open the feed pipe (141), the first discharge pipe (113) and the second discharge pipe (114) to resume the demisting process.

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