Flexure with varying thickness for magnetic memory device

Abstract

The invention relates to a flexure with varying thickness for a magnetic storage device. Examples of the present disclosure include a head gimbal assembly for a magnetic storage device. The head gimbal assembly includes a load beam, a read-write head, and an actuator configured to move the read-write head. The head gimbal assembly includes a flexure attached to the actuator. The flexure includes: an actuator side, the actuator side facing the actuator; and a recess formed in the actuator side and at least partially overlapping the actuator along a virtual plane that is substantially perpendicular to a length of the load beam.

Description

Technical Field

[0001] This disclosure relates generally to magnetic storage devices, and more specifically to flexural members with varying thicknesses for use in magnetic storage devices. Background Technology

[0002] Magnetic storage devices such as hard disk drives (“HDDs”) are widely used to store digital data or electronic information for enterprise data processing systems, computer workstations, portable computing devices, digital audio players, digital video players, and more. Typically, an HDD includes read / write heads that facilitate data storage on the disk. Each read / write head is supported on a suspension assembly. Some HDDs include suspension assemblies with flexures. Summary of the Invention

[0003] There is a need for a magnetic storage device and a method of manufacturing it that helps reduce flexure-actuator contact. The subject matter of this application is developed in response to the current state of magnetic storage devices, and specifically to problems and needs in the art (such as those discussed above) that are not fully addressed by currently available magnetic storage devices. Therefore, the examples of this disclosure overcome at least some of the disadvantages of the prior art.

[0004] Below is a non-exhaustive list of examples of the topics disclosed in this article, which may or may not be required to be protected.

[0005] This document discloses a head gimbal assembly for a magnetic storage device. The head gimbal assembly includes a load beam, a read / write head, an actuator, and a flexure member. The actuator is configured to move the read / write head, and the flexure member is attached to the actuator. The flexure member includes an actuator side facing the actuator. The flexure member also includes a recess formed in the actuator side and at least partially overlapping the actuator along a virtual plane substantially perpendicular to the length of the load beam. The foregoing subject matter of this paragraph characterizes Example 1 of this disclosure.

[0006] The head gimbal assembly also includes an adhesive disposed at a location within the recess between the actuator and the flexure, such that the adhesive partially fills the recess. The adhesive is made of a conductive material. The foregoing subject matter of this paragraph characterizes Example 2 of this disclosure, wherein Example 2 also includes the subject matter according to Example 1 described above.

[0007] The ratio between the thickness of the non-recessed portion of the flexure immediately adjacent to the recess and the thickness of the recessed portion of the flexure defined by the recess is between 1.2 and 5.0 and includes the extreme values. The foregoing subject matter of this paragraph characterizes Example 3 of this disclosure, wherein Example 3 also includes the subject matter according to any one of Examples 1 to 2 above.

[0008] The flexural member includes: a first flexural layer made of a first material; and a second flexural layer made of a second material different from the first material. The recess is formed in the second flexural layer. The flexural member is attached to the load beam such that the first flexural layer is inserted between the load beam and the second flexural layer. The foregoing subject matter of this paragraph characterizes Example 4 of this disclosure, wherein Example 4 also includes subject matter according to any one of Examples 1 to 3 above.

[0009] The first flexural layer defines the substrate of the flexure, and the second flexural layer is made of a polyimide material applied to the substrate of the flexure. The foregoing subject matter of this paragraph characterizes Example 5 of this disclosure, wherein Example 5 also includes the subject matter according to Example 4 described above.

[0010] The head gimbal assembly also includes an adhesive that is inserted between the actuator and the third flexure layer of the flexure and contacts the second and third flexure layers. The foregoing subject matter of this paragraph characterizes Example 6 of this disclosure, wherein Example 6 also includes subject matter according to any one of Examples 4 to 5 above.

[0011] The first flexural layer, the second flexural layer, and the third flexural layer are arranged in a stacked manner in a first direction substantially parallel to the depth of the recess. The foregoing subject matter of this paragraph characterizes Example 7 of this disclosure, wherein Example 7 also includes subject matter according to any one of Examples 4 to 6 above.

[0012] The actuator side includes a surface of the second flexural layer that is substantially perpendicular to the first direction. The foregoing subject matter of this paragraph characterizes Example 8 of this disclosure, wherein Example 8 also includes the subject matter according to Example 7 described above.

[0013] The second flexural layer does not contact the actuator. The foregoing subject matter of this paragraph characterizes Example 9 of this disclosure, wherein Example 9 also includes subject matter according to any one of Examples 4 to 8 above.

[0014] The second flexural layer is made of a photosensitive dielectric material. The foregoing subject matter of this paragraph characterizes Example 10 of this disclosure, wherein Example 10 also includes the subject matter according to any one of Examples 4 to 9 above.

[0015] The flexural element further includes: a recessed portion defining the recess; and a non-recessed portion adjacent to the recessed portion and at least partially overlapping the actuator along the virtual plane. The foregoing subject matter of this paragraph characterizes Example 11 of this disclosure, wherein Example 11 also includes subject matter according to any one of Examples 1 to 10 above.

[0016] The actuator includes a first actuator. The head gimbal assembly also includes a second actuator. The recess is a first recess. The flexure also includes a second recess formed in the actuator side and at least partially overlapping the second actuator along the virtual plane. The foregoing subject matter of this paragraph characterizes Example 12 of this disclosure, wherein Example 12 also includes subject matter according to any one of Examples 1 to 11 above.

[0017] The maximum width of the actuator is less than the maximum width of the recess. The foregoing subject matter of this paragraph characterizes Example 13 of this disclosure, wherein Example 13 also includes the subject matter according to Examples 1 to 12 described above.

[0018] The flexural element includes: a recessed portion defining the recess; and a non-recessed portion adjacent to the recess. The actuator does not overlap with the non-recessed portion in a virtual plane. The foregoing subject matter of this paragraph characterizes Example 14 of this disclosure, wherein Example 14 also includes the subject matter according to Examples 1 to 13 described above.

[0019] This document also discloses a magnetic storage system including a head gimbal assembly and a plurality of disks. The head gimbal assembly includes a read / write head and a suspension assembly. The suspension assembly includes: a base plate; a load beam attached to the base plate; an actuator configured to move the read / write head toward a disk among the plurality of disks; and a flexure attached to the actuator. The flexure attached to the actuator includes: an actuator side facing the actuator; and a recess formed in the actuator side and at least partially overlapping the actuator along a virtual plane substantially perpendicular to the length of the load beam. The foregoing subject matter of this paragraph characterizes Example 15 of this disclosure.

[0020] The magnetic storage system also includes a slider attached to a slider side of the flexure, the slider side being opposite to the actuator side. The slider includes a read / write head configured to perform at least one of the following: reading data from at least one of the plurality of disks; or writing data to at least one of the plurality of disks. The foregoing subject matter of this paragraph characterizes Example 16 of this disclosure, wherein Example 16 further includes the aforementioned Example 15.

[0021] The load beam also includes a distal end portion, a proximal end portion, and a hinge that is inserted between the distal end portion and the proximal end portion. The proximal end portion is attached to the base plate. The flexure is attached to the load beam such that the actuator is positioned above the distal end portion of the load beam. The foregoing subject matter of this paragraph characterizes Example 17 of this disclosure, wherein Example 17 further includes Examples 15 to 16 described above.

[0022] This document also discloses a method for manufacturing a head gimbal assembly for a magnetic storage device. The method includes attaching an actuator to a member for at least partially embedding the actuator on the actuator side of a flexure. The actuator is configured to move a read / write head attached to the flexure. The actuator side of the flexure faces the actuator, and the member for at least partially embedding the actuator at least partially overlaps with the actuator along a virtual plane substantially perpendicular to the length of a load beam attached to the flexure. The foregoing subject matter of this paragraph characterizes Example 18 of this disclosure.

[0023] The member for at least partially embedding the actuator includes a recess formed in the actuator side. The method further includes forming the recess by removing material from the polyimide layer of the flexure. The foregoing subject matter of this paragraph characterizes Example 19 of this disclosure, wherein Example 19 also includes the subject matter according to Example 18 described above.

[0024] The polyimide layer includes a first polyimide layer, and the method further includes attaching a slider having the read / write head to an additional polyimide layer of the flexure on the slider side of the flexure opposite to the actuator side. The foregoing subject matter of this paragraph characterizes Example 20 of this disclosure, wherein Example 20 also includes the subject matter according to any one of Examples 18 to 19 above.

[0025] The features, structures, advantages, and / or characteristics described in this disclosure may be combined in any suitable manner in one or more examples and / or specific embodiments. Numerous specific details are provided in the following description to give a comprehensive understanding of the examples of the subject matter of this disclosure. Those skilled in the art will recognize that the subject matter of this disclosure may be practiced without one or more of the specific features, details, components, materials, and / or methods of a particular example or specific embodiment. In other instances, additional features and advantages that may not be present in all examples or specific embodiments may be recognized in some examples and / or specific embodiments. Furthermore, in some instances, well-known structures, materials, or operations have not been shown or described in detail to avoid obscuring aspects of the subject matter of this disclosure. These features and advantages of the subject matter of this disclosure will become more apparent from the following description and the appended claims, or may be learned by practice of the subject matter set forth below. Attached Figure Description

[0026] To facilitate understanding of the advantages of this disclosure, a more specific description of the disclosure briefly described above will be provided with reference to specific examples shown in the accompanying drawings. It should be understood that these drawings depict only typical examples of this disclosure and should not be considered as limiting its scope. The subject matter of this application will be described and explained with additional specificity and detail by using the drawings, in which:

[0027] Figure 1This is a schematic perspective view of a magnetic storage device according to one or more examples of this disclosure;

[0028] Figure 2A This is a lower view of a head gimbal assembly of a magnetic storage device according to one or more examples of this disclosure, and a detailed view of the actuator of the head gimbal assembly;

[0029] Figure 2B It is based on one or more examples of this disclosure along Figure 2A A sectional side front view of the magnetic head gimbal assembly of a magnetic storage device, taken from plane AA;

[0030] Figure 2C It is based on one or more examples of this disclosure along Figure 2A Another sectional side front view of the magnetic head gimbal assembly of a magnetic storage device, taken from a plane BB section;

[0031] Figure 2D It is based on one or more examples of this disclosure along Figure 2A A perspective view of the cutout of the magnetic head gimbal assembly of a magnetic storage device, taken from plane AA;

[0032] Figure 3A It is based on one or more examples of this disclosure along Figure 2A A cross-sectional side front view of a magnetic storage device with a flexible head gimbal assembly, taken from plane AA, the flexible part having a recess offset from the actuator;

[0033] Figure 3B It is based on one or more examples of this disclosure along Figure 2A Another cross-sectional side front view of the magnetic head gimbal assembly of a magnetic storage device with a flexure having a recess offset from the actuator, taken from a plane BB.

[0034] Figure 3C It is based on one or more examples of this disclosure along Figure 2A A perspective view of the cutout of the magnetic head gimbal assembly of a magnetic storage device, taken from a plane AA; and

[0035] Figure 4 This is a flowchart of a method for manufacturing a magnetic head gimbal assembly of a magnetic storage device according to one or more examples of this disclosure. Detailed Implementation

[0036] Throughout this specification, the terms "an example," "example," or similar language mean that a particular feature, structure, or characteristic described in connection with that example is included in at least one example of this disclosure. The phrases "in an example," "in a sample," and similar language appearing throughout this specification may, but not necessarily all, refer to the same example. Similarly, the term "implementation" is used to mean an implementation having a particular feature, structure, or characteristic described in connection with one or more examples of this disclosure. However, unless there is an explicit relevance indicating otherwise, an implementation may be associated with one or more examples.

[0037] refer to Figure 1 According to one example, the magnetic storage device 100 is depicted as a hard disk drive (HDD). However, in other examples, the magnetic storage device 100 may be any of a variety of magnetic storage devices without departing from the spirit of the subject matter of this disclosure. The magnetic storage device 100 includes a housing 102 that seals or encloses an internal cavity 114 defined within the housing. The housing 102 includes a base 130 and a cover 132 (shown in dashed lines to avoid obscuring internal features of the magnetic storage device 100 within the internal cavity 114 of the housing 102). The cover 132 is coupled to the base 130 to enclose the internal cavity 114, thereby isolating it from the environment outside the housing 102. In some embodiments, a seal or gasket is positioned between the base 130 and the cover 132 to facilitate a seal between the base 130 and the cover 132. In some examples, the base 130 is made of a metallic material, such as stainless steel.

[0038] The magnetic storage device 100 includes various features located within an internal cavity 114 of the housing 102. In some examples, the magnetic storage device 100 includes a tray 103, a disk 115, a spindle motor 121, and a voice coil motor (VCM) 125 within the internal cavity 114. (See reference) Figure 1 and Figure 2A The bracket 103 includes a head stack assembly 107, which includes a plurality of bracket arms 105 and at least one head gimbal assembly 109 (e.g., a suspension), the at least one head gimbal assembly being coupled to the distal end of each of the plurality of bracket arms 105. Each head gimbal assembly 109 includes a suspension assembly 135 and a slider 142. The slider 142 includes at least one read / write head coupled to (e.g., embedded in) a housing of the slider 142. Although Figure 1The magnetic storage device 100 is shown as having five carriage arms 105 and four disks 115, but in other examples, the magnetic storage device 100 may have fewer or more than five carriage arms 105 or fewer or more than four disks 115. In one example, each carriage arm 105 has a head gimbal assembly 109 on each side facing the disk 115 (e.g., each of the bottom carriage arm and the top carriage arm 105 may have one head gimbal assembly 109, and each of the intermediate carriage arms 105 between the bottom carriage arm and the top carriage arm 105 may have two head gimbal assemblies 109). Similarly, although the magnetic storage device 100 is shown as having one spindle motor 121 and one VCM 125, in other examples, the magnetic storage device 100 may have any number of spindle motors 121 and VCMs 125.

[0039] A spindle motor 121 is coupled to a base 130. Typically, the spindle motor 121 includes a stationary portion immovably fixed relative to the base 130 and a spindle rotatable relative to both the stationary portion and the base 130. Therefore, the spindle of the spindle motor 121 can be considered part of the spindle motor or integrated with it. Typically, the spindle motor 121 is operable to rotate the spindle relative to the base 130. A disc 115 or platter is rotatably fixed to the spindle of the spindle motor 121 via a corresponding hub 122, which is rotatably fixed to both the disc 115 and the spindle. When the spindle of the spindle motor 121 rotates, the disc 115 rotates accordingly. In this way, the spindle of the spindle motor 121 defines the axis of rotation for each disc 115. The spindle motor 121 can be operatively controlled to rotate the disc 115 at a controlled rate and controlled amount in the rotation direction 190.

[0040] Each disk in disk 115 can be any magnetic recording medium of various types. Typically, in one example, each disk 115 includes a substrate and a magnetic material applied directly or indirectly to the substrate. For example, the magnetic material of disk 115 can be a conventional granular magnetic recording disk or wafer with magnetic layers, each bit having multiple magnetic grains. In granular magnetic media, all bits are coplanar, and the surface 116 of the disk is substantially smooth and continuous. In one example, each bit has a magnetic dipole moment, which can have an in-plane (longitudinal) orientation or an out-of-plane (perpendicular) orientation.

[0041] When disk 115 rotates in read / write mode, VCM 125 electromagnetically engages the voice coil of carriage arm 105, causing carriage arm 105 and the head gimbal assembly 109 coupled to carriage arm 105 to rotate relative to disk 115 in a rotational direction along a plane parallel to the read / write surface of disk 115. Carrier arm 105 can rotate to position the read / write head of head gimbal assembly 109 above a designated radial region of the read / write surface 116 of the corresponding disk 115 for read and / or write operations. VCM 125 is fixed to base 130 and engages the voice coil of carriage arm 105, which is rotatably coupled to base 130 via a spindle 127 extending through carriage 103. Typically, spindle 127 defines an axis of rotation about which carriage arm 105 rotates when actuated by VCM 125.

[0042] The bracket arms 105 are immovably fixed to the base of the bracket 103 (e.g., integrally formed as a single piece) and extend away from the base of the bracket in a spaced-apart manner relative to each other. In some embodiments, the bracket arms 105 are equidistant from each other and extend parallel to each other. Corresponding disks in disk 115 are positioned between adjacent bracket arms 105. In idle mode (e.g., when no read / write operations are performed), the VCM 125 is actuated to rotate the bracket arms 105 radially outward relative to disk 115, such that the head gimbal assembly 109 is parked or unloaded onto the ramp support 117 fixed to the base 130.

[0043] refer to Figure 1 , Figure 2B and Figure 3A The read / write head 134, embedded in the slider 142, includes at least one read transducer and at least one write transducer. The read transducer is configured to detect the magnetic properties (e.g., magnetic position mode) of the disk 115 and convert the magnetic properties into an electrical signal. Conversely, the write transducer changes the magnetic properties of the disk 115 in response to the electrical signal. For each head gimbal assembly 109, the electrical signal is transmitted from the read / write head 134 and to the read / write head via electrical traces or lines formed in or connected to the slider 142 and the flexure 140 (see, for example, third layer 131 of 2B to 3B). The electrical traces of the slider 142 and the flexure 140 are electrically interconnected to facilitate the transmission of electrical signals between the read / write head of the magnetic storage device 100 and the flexure connector 104, which communicates with the control module of the magnetic storage device 100 (e.g., see...). Figure 1The control module is configured to process electrical signals and facilitate communication of electrical signals between the magnetic storage device 100 and one or more external computing devices. Typically, the control module includes software, firmware, and / or hardware for controlling the operation of various components of the magnetic storage device 100. The control module may include a printed circuit board on which the hardware is mounted or within. Solder solder joints are used to electrically connect the corresponding electrical contact pads (and corresponding traces) of the slider 142 and the flexor 140.

[0044] refer to Figures 2A to 3C In some implementations, the head gimbal assembly 109 also includes an actuator 120 that can be selectively operated to move the read / write head 134. In some examples, the actuator 120 can transmit force to the flexure 140, which can help distribute force to the actuator and enable more precise control of the movement of the read / write head 134.

[0045] Figure 2A This is a lower view of the head gimbal assembly 109 of a magnetic storage device 100 according to one or more examples of this disclosure. As used herein, the term "lower side" refers to any side of the head gimbal assembly 109 facing the read / write surface 116 of the disk 115 (e.g., the lower side of the suspension assembly 135), from which the read / write head 134 reads data and / or writes data to the read / write surface. The head gimbal assembly 109 includes the suspension assembly 135 and the read / write head 134. In some examples of this disclosure, the suspension assembly 135 includes a base plate 192 and a load beam 196 having a distal end portion 133, the lower side of which is shown in FIG. 2. The base plate 192 spans between the distal end portion 133 of the load beam 196 and the bracket arm 105 and connects them together. The load beam 196 is connected to and bends relative to the base plate 192 of the suspension assembly 135 via hinges 141. In some examples, hinges 141 include two hinges on either side of a gap in the load beam 196. Hinges 141 bias the load beam 196 toward the surface 116 of at least one of a plurality of disks 115 such that the read / write head 134 of the distal end portion 133 of the bracket arm 105 can read data from and / or write data to the corresponding disk in the disk 115. In some examples, the read / write head 134 floats above the read / write surface 116 as the disk rotates relative to it.

[0046] In some examples, the load beam 196 is made of a flexible, elastic material, such as a metal. When bent, the hinge 141 acts as a spring to generate a force (referred to herein as “gravimetric load”) to advance the head 134 of the head gimbal assembly 109 toward the surface of the disk 115 in a position such that the flight height between the surface and the read / write head 134 is minimized. This is achieved, for example, by forcing air or another gas (e.g., helium). The gap between the read / write head 134 and the disk 115 may be referred to herein as the “flight height” or “float height”. It is generally preferred to minimize and / or stabilize this gap to maximize the signal quality of the data transmitted between the disk 115 and the read / write head 134. In some examples, the flight height is approximately equal to or less than five nanometers (“nm”). However, the examples in this disclosure are not limited to this.

[0047] The suspension assembly 135 also includes a flexure 140 extending along the underside of the base plate 192 and the load beam 196. The flexure 140 includes an actuator side 123 facing the actuator 120. Direct contact between the actuator 120 and the flexure 140 can lead to increased friction, thereby reducing the overall efficiency of the actuator 120 and potentially causing premature wear and / or failure. Additionally, direct flexure-actuator contact can introduce unwanted vibrations and / or noise, which may interfere with the performance of the actuator 120. Contact forces can also cause deformation and / or damage to the flexure 140. Therefore, reducing direct flexure-actuator contact can help improve performance and / or reduce wear on the actuator 120 and / or the flexure 140.

[0048] Examples of this disclosure include a flexure 140 having a recess 111 in its actuator side 123 facing the actuator 120. The recess 111 at least partially overlaps the actuator 120 along a plane AA to help reduce direct contact between the flexure 140 and the actuator 120. In some examples, the flexure 140 has a reduced thickness at a recessed portion 108. As used herein, a “recessed portion” of a feature refers to any portion of the feature that includes the recess 111. Thus, the recessed portion 108 of the flexure 140 is defined by the recess 111 and is approximately the portion of the flexure 140... Figure 2A The portion within the area indicated by the dashed line.

[0049] like Figures 2B to 2D and Figures 3A to 3CAs shown, in some examples, the flexure 140 is a multi-layer flexure comprising, for example, a first layer 128, a second layer 129, a third layer 131, and / or a fourth layer 136. In some examples, the flexure layers 128, 129, 131, and 136 are arranged in a stacked configuration in a first direction d1. As will be described herein, portions of the respective layers 128, 129, 131, and / or 136 have various thicknesses to minimize flexure-actuator contact. In some examples, the recess 111 of the flexure 140 is a recess 111 in the second layer 129. As used herein, in some examples, the actuator 120 attached to the flexure 140 includes an actuator 120 that is a component of the flexure 140 and is indirectly attached to at least one of the respective layers 128, 129, 131, and / or 136 of the flexure 140.

[0050] In some examples, the first layer 128 is formed directly onto the load beam 196. Similar to the load beam 196, the first layer 128 is typically made of stainless steel or other similar material and is thicker than the other layers of the multilayer flexure 140. In some examples, the first layer 128 is made of a metallic material. For example, in some examples, the first layer 128 is a sheet of stainless steel. According to some examples, the thickness t4 of the first layer 128 is approximately 20 micrometers (“μm”). In some examples, the first layer 128 is attached to the load beam 196 after the multilayer flexure 140 is formed to attach the entire flexure 140 to the load beam. In other words, the first layer 128 is positioned directly adjacent to the load beam 196. Figures 2B to 3B As shown, in some examples, the first layer 128 does not contact the actuator 120. In some examples, the first layer 128 is the substrate of the flexure 140.

[0051] A second layer 129 of the flexural member 140 is formed on (e.g., applied to) the first layer 128. In some examples, the second layer 129 is made of a dielectric and / or photosensitive material, such as liquid polyimide. Figure 2B and Figure 3A As shown, the second layer 129 forms a barrier between the first layer 128 and the third layer 131. This barrier helps to maintain signal quality. The thickness of the second layer 129 is positively correlated with signal quality. (Reference) Figures 3A to 3C In some examples, a portion of the second layer 129 overlaps with the actuator 120 in a plane AA that is substantially perpendicular to the length L1 of the load beam 196. However, as discussed above, it may be beneficial to reduce or avoid contact between the second layer 129 and the flexure 140. Therefore, this disclosure includes a flexure 140 having a recess 111 positioned to help reduce flexure-actuator contact.

[0052] In some examples, the third layer 131 is made of copper. In some examples, the copper in the third layer 131 has a high purity, making it less rigid and more flexible. For example, the third layer 131 comprises copper with a purity exceeding ninety-nine percent, a purity similar to that of electronic-grade copper foil. In some examples, the third layer 131 includes portions for one or more signal traces for the flexure 140. In some examples, the flexure 140 includes signal traces (sometimes referred to as “circuit traces”) to conduct signals from the read / write head 134 to other components of the device 100. Although the traces are typically made of copper and / or copper foil, the examples in this disclosure are not limited thereto. For example, in some examples, the traces are made of aluminum, gold, or any combination thereof.

[0053] In some examples, the flexure 140 includes a fourth layer 136 disposed between the traces of the third layer 131 and the slider 142. (See reference) Figure 2B and Figure 3A In some examples, slider 142 is connected to the flexure at the fourth layer 136. In some examples, the fourth layer is made of a material similar to that of the second layer 129. The fourth layer 136 can be made of, for example, a flexible material (such as polyimide). In some examples, the fourth layer 136 is made of an insulating and heat-resistant material.

[0054] refer to Figures 2C to 2D and Figures 3B to 3C In some examples, the flexure 140 is directly and / or indirectly attached to the actuator 120. The flexure 140 includes an actuator side 123 facing the actuator 120 and the load beam 196. The flexure 140 also includes a slider side 126 opposite to the actuator side 123. The slider side 126 faces the slider 142 and, in some examples, is attached to the slider. Thus, in some examples, the slider side 126 faces the read / write surface of the disk 115, from which the corresponding read / write head 134 of the head gimbal assembly 109 reads data and / or writes data to the read / write surface.

[0055] In some examples, the actuator side 123 includes an exposed portion of the second layer 129. The exposed portion includes, for example, a surface of the second layer 129 not covered by the first layer 128. In some examples, the surface of the second layer 129 extends substantially perpendicular to the stacking direction d1 of the flexure 140. A recess 111 is formed in the actuator side 123 facing the actuator 120. The flexure 140 is recessed away from the actuator 120.

[0056] Figure 2B and Figure 3A It is along Figure 2A Two example sectional side front views of the head gimbal assembly 109, taken from plane AA. Plane AA is substantially perpendicular to the length L1 of the load beam 196. (Reference) Figure 2Band Figure 3A In some examples, the recess 111 at least partially overlaps with the actuator 120 along the virtual plane AA. Both the recess 111 and the actuator 120 pass through at least one common plane substantially perpendicular to the virtual plane AA (e.g., Figure 2A (See plane BB shown). In one or more examples, actuator 120 does not overlap with first layer 128 in virtual plane AA. In some examples, recess 111 is formed in second layer 129.

[0057] Return to reference Figure 2A In some examples, the load beam 196 includes a distal end portion 133 and a proximal end portion 119, with a hinge 141 inserted between the distal end portion 133 and the proximal end portion 119. In some examples, a flexure 140 is attached to the load beam 196 such that an actuator 120 is positioned above the distal end portion 133 of the load beam 196. In such examples, a recess 111 of the flexure 140 is also positioned above the distal end portion 133 of the load beam 196. In some examples, the recess 111 and the actuator 120 are confined to the distal end portion 133 and do not include any portion extending on the proximal end portion 119. As shown, the recess 111 helps to facilitate at least partial embedding of the actuator 120 into the flexure 140.

[0058] In one or more examples, the depth d2 of the recess 111 is substantially parallel to the stacking direction d1 of the flexure 140, and this depth is defined as the thickness difference between the recessed portion 108 and the non-recessed portion 124 immediately adjacent to the recessed portion 108. In some examples, the second layer 129 is recessed away from the first layer 128, the actuator 120, and / or the load beam 196. (See reference...) Figure 3B In some examples, the depth d2 of the recess 111 varies along the plane “BB”.

[0059] The thickness t2 of the recessed portion 108 is less than the thickness t1 of the non-recessed portion 124. In some examples, the ratio of the non-recessed thickness t1 to the recessed thickness t2 is between 1.2 and 5, including the extreme values. In some examples, the sum of the depth d2 of the recess and the thickness t2 of the recessed portion 108 is approximately equal to the thickness t1 of the non-recessed portion 124. In some examples, the recessed portion 108 and the non-recessed portion 124 are flush at the slider side 126, but not flush at the actuator side 123.

[0060] Figure 2C It is based on one or more examples of this disclosure along Figure 2A Another sectional side front view of the magnetic head gimbal assembly 109 of the magnetic storage device 100, taken from the plane BB. Figure 3B It is along Figure 2AAnother example of a sectional side front view of the magnetic head universal joint assembly 109, taken from the plane BB.

[0061] refer to Figure 2C and Figure 3B In some examples, the suspension assembly 135 includes an adhesive 101 disposed at a location within the recess 111 between the actuator 120 and the flexure 140. In some examples, the adhesive 101 is made of a conductive material. In some examples, the adhesive 101 establishes an electrical connection between the actuator 120 and the flexure 140, thereby enabling the flexure 140 to receive signals from the actuator 120. In some examples, the adhesive 101 is made of a thermally conductive material.

[0062] like Figure 2C and Figure 3B As shown, in some examples, adhesive 101 partially fills recess 111. In some examples, adhesive 101 does not completely fill recess 111. In some examples, adhesive 101 is received by recess 111 and fills less than half of the total volume of recess 111. In some examples, adhesive 101 is inserted at more than one location within recess 111 between actuator 120 and flexure 140. Figure 2C and Figure 3B As shown, in some examples, adhesive 101 is disposed within the recess 111 at two locations. In some examples, adhesive 101 is disposed within the recess 111 at a number of locations, the number being equal to the number of portions of the third layer 131 extending within the recess to the actuator side 123. For example, as... Figure 2C and Figure 3B As shown, the third layer 131 extends to the actuator side 123 and is exposed to the recess 111 in two locations, and the adhesive 101 is disposed in the recess 111 in both of these separate locations.

[0063] In some examples, adhesive 101 directly contacts actuator 120 and extends through a depth d2 of recess 111 to directly contact flexure 140. Adhesive 101 contacts any combination of layers of flexure 140. For example, see reference... Figure 2C and Figure 3B Adhesive 101 contacts the third layer 131 to provide an electrical connection between the actuator 120 and the traces of the third layer 131. In some examples, adhesive 101 contacts only the third layer 131 and does not directly contact any other layer of the flexure (e.g., adhesive 101 does not contact the first layer 128 or the second layer 129). In some examples, the third layer 131 extends through the second layer 129 to the actuator side 123 of the flexure 140 within the recess 111. In some examples, adhesive 101 contacts both the second layer 129 and the third layer 131 within the recess 111.

[0064] In some examples, adhesive 101 is wholly or substantially contained within recess 111. In some examples, the thickness t3 of adhesive 101 does not exceed the depth d2 of recess. In some examples, the thickness t3 of adhesive 101 does not significantly exceed the depth d2 of recess 111. In some examples, the thickness t3 of adhesive is not greater than the sum of recess depth d2 and the thickness t4 of first layer 128. In some examples, the ratio of adhesive thickness t3 to recess depth d2 is not greater than 1.5.

[0065] In some examples, adhesive 101 is made of a stretchable material. Therefore, as used herein, the “thickness” t3 of adhesive 101 refers to the thickness t3 of adhesive 101 when it is received by recess 111 and contacts both actuator 120 and flexure 140 during operation of magnetic storage device 100.

[0066] refer to Figure 2B , Figure 2D , Figure 3A and Figure 3C In some examples, suspension assembly 135 includes more than one recess 111. In some examples, the number of recesses 111 positioned above the distal end portion 133 of load beam 196 is equal to the number of actuators 120 positioned above the distal end portion 133 of load beam 196. In some examples, suspension assembly 135 includes two recesses 111 formed in the same flexure 140 and two actuators 120 positioned above the distal end portion 133 of load beam 196. Although in Figure 2B , Figure 2D , Figure 3A and Figure 3C The illustration shows two recesses 111 and two actuators 120 corresponding to a flexure 140, but the examples of this disclosure are not limited thereto and may include more or fewer recesses 111 and / or actuators 120.

[0067] refer to Figures 2B to 2D In some examples, the flexure 140 does not directly contact the actuator 120. (See reference) Figure 2C In some examples, the flexure 140 indirectly contacts the actuator 120 via adhesive 101 and is suspended above the actuator 120 via adhesive 101. In some examples, the recessed layer (e.g., the second layer 129) does not contact the actuator 120. (See reference...) Figure 2BIn some examples, the maximum width w1 of actuator 120 is less than the maximum width w2 of recess 111. In some examples, actuator 120 is positioned completely above recess 111 in plane AA, and the maximum width w1 of actuator 120 is less than the maximum width w2 of recess 111. In some examples, adhesive 101 and / or another component of suspension assembly 135 provide separation between flexure 140 and actuator 120 in direction d1, such that actuator 120 does not even contact the non-recessed portion 124 of flexure 140. In some examples, actuator 120 is positioned between gaps in first layer 128 so as not to contact first layer 128.

[0068] In some examples, the actuator 120 is positioned substantially centered relative to the corresponding recess 111. (See reference) Figure 2B In some examples, actuator 120 does not overlap with non-recessed portion 124 along plane AA, in which actuator 120 overlaps with recess 111.

[0069] refer to Figures 3A to 3C In other examples, actuator 120 at least partially overlaps with at least one non-recessed portion 124 of flexure 140 in plane AA. In some examples, actuator 120 is offset relative to recess 111 along plane AA. In some examples, even if actuator 120 overlaps with non-recessed portion 124, actuator 120 does not contact flexure 140. In some examples, separation between flexure 140 and actuator 120 is maintained via adhesive 101.

[0070] In some examples, actuator 120 is offset relative to recess 111 in plane AA and overlaps with non-recessed portion 124 of flexure 140. (See reference) Figure 3C In some examples, the actuator 120 is shaped like a rectangular prism. In some examples, a first corner 144a of the actuator 120 overlaps with a non-recessed portion 124 of the flexure 140, while another corner 144b of the actuator 120 does not overlap with the non-recessed portion 124 of the flexure 140. In some examples, corner 144b of the actuator 120 overlaps with a recess 111, while another corner 144a of the actuator 120 does not overlap with the recess. In some examples, although the actuator 120 overlaps with the non-recessed portion 124 of the flexure 140 in plane AA, the actuator 120 still does not directly contact the flexure 140 due to the gap provided by the adhesive 101 inserted between the actuator 120 and the flexure 140. The distance between the flexure 140 and corner 144b is greater than the distance between the flexure 140 and corner 144a.

[0071] Figure 4This is a flowchart of a method 400 for manufacturing a head gimbal assembly 109 of a magnetic storage device 100 according to one or more examples of this disclosure. Specifically, method 400 includes manufacturing a flexure 140 of a suspension assembly 135 of the magnetic storage device 100. Those skilled in the art will understand that this can be achieved using... Figure 4 Any combination of the steps shown and / or described herein.

[0072] Method 400 includes step 404 of attaching actuator 120 to a member for receiving actuator 120 on actuator side 123 of flexure 140. In some examples, the member for receiving actuator 120 includes a recess 111. In some examples, the member for receiving actuator 120 is a member for indirectly attaching actuator 120 to flexure 140 (e.g., via adhesive 131). In some examples, method 400 includes attaching actuator 120 to flexure 140 such that actuator side 123 of flexure 140 faces actuator, and the recess 111 formed in actuator side 123 at least partially overlaps with actuator along plane “AA”. In some examples, when load beam 196 is attached to flexure 140, plane AA is substantially perpendicular to length L1 of load beam 196. In some examples, attaching the flexure 140 to the actuator 120 includes attaching the flexure 140 and the actuator 120 via an adhesive 101.

[0073] In some examples, method 400 optionally includes the additional step of forming a recess 111 402 in the actuator side 123 of the flexure 140. In some examples, method 400 includes forming the recess 111 402 prior to attaching the flexure 140 and the actuator 120. In some examples, forming the recess 111 402 includes removing material from the second layer 129 (e.g., removing polyimide material from the flexure 140).

[0074] In some examples, forming the 402 recess 111 includes forming the recess 111 in the second layer 129 via various methods. In some examples, the mask is placed over the second layer 129 after the second layer 129 is formed on the first layer 128. Although the phrase "placed over" is used herein, the examples of this disclosure are not limited thereto. For example, the mask may be formed on the second layer. The mask includes a portion positioned over the desired recessed portion 108 of the flexure 140. This portion of the mask differs from the rest of the mask in terms of translucency. In some examples, the mask is a glass photomask and / or a halftone mask. For example, the portion of the mask positioned over the desired recessed portion 108 is a halftone glass mask, and the rest of the mask is a full glass mask.

[0075] In some examples, the mask is an opaque plate with one or more holes or transparent or translucent portions. Therefore, light can pass through the mask. In some examples, the portion aligned with the desired recessed portion 108 is more translucent than the rest. In some examples, the greater translucency is at least partly attributed to the greater number and / or density of holes and / or transparent portions in the various portions of the mask.

[0076] In some examples, forming the 402 recess 111 includes irradiating light through a mask. The light irradiates both the recessed and non-recessed portions of the mask. In some examples, this is accomplished using a lens. Although some portions of the mask may be more translucent than others, light can still pass through the entire mask. In some examples, the method includes removing the mask from the second layer 129 and etching away or removing residue from the second layer 129 such that the thickness t2 of the recessed portion 108 of the second layer 129 is less than the thickness t1 of the remaining non-recessed portion 124 of the second layer 129. In some examples, forming the 402 recess 111 includes forming a photoresist material on the second layer 129 and etching one or more openings into the photoresist material to expose portions of the second layer 129.

[0077] In some examples, method 400 further includes attaching slider 142 to a fourth layer 136 of flexure 140 on slider side 126 opposite to actuator side 123.

[0078] As used herein, the term "layer" can be used to describe multiple continuous or discontinuous layers. However, the term can also be used to describe multiple portions of a material layer. For example, as... Figures 2B to 2D and Figures 3A to 3C As shown, the second layer 129 comprises multiple portions of different thicknesses, including portions 108 and 124. Portions 108 and 124 may be collectively referred to as "the second layer 129".

[0079] In the above description, certain terms such as “upper,” “lower,” “upper part,” “lower part,” “horizontal,” “vertical,” “left,” “right,” “above,” and “below” may be used. These terms are used where applicable to provide a degree of descriptive clarity when dealing with relative relationships. However, these terms are not intended to imply absolute relationships, positions, and / or orientations. For example, with respect to an object, simply by flipping the object, the “upper” surface can become the “lower” surface. However, it is still the same object. Furthermore, the terms “including,” “comprising,” “having,” and variations thereof mean “including but not limited to,” unless otherwise expressly stated. An enumerated list of items does not imply that any or all of the items are mutually exclusive and / or mutually inclusive, unless otherwise expressly stated. The terms “a,” “an,” and “the” also mean “one or more,” unless otherwise expressly stated. In addition, the term “multiple” can be defined as “at least two.”

[0080] As used herein, a system, apparatus, structure, article, element, component, or hardware "configured to" perform a specified function is actually capable of performing the specified function without any changes, rather than having the potential to perform the specified function only after further modification. In other words, a system, apparatus, structure, article, element, component, or hardware "configured to" perform a specified function is specifically selected, formed, implemented, utilized, programmed, and / or designed for the purpose of performing the specified function. As used herein, "configured to" indicates existing characteristics of the system, apparatus, structure, article, element, component, or hardware that enable the system, apparatus, structure, article, element, component, or hardware to perform the specified function without further modification. For the purposes of this disclosure, a system, apparatus, structure, article, element, component, or hardware described as "configured to" perform a particular function may additionally or alternatively be described as "suitable" to perform that function and / or described as "operating to" perform that function.

[0081] Furthermore, the term "connected" to another element in this specification can include both direct and indirect connections. A direct connection can be defined as one element being connected to another element and forming some contact. An indirect connection can be defined as a connection between two elements that are not in direct contact with each other, but where one or more additional elements are present between the connected elements. Additionally, as used herein, fixing one element to another can include both direct and indirect fixing. Furthermore, as used herein, "adjacent" does not necessarily mean contact. For example, one element may be adjacent to another element but not in contact with it.

[0082] As used herein, the phrase “at least one of…” when used with a list of items means that different combinations of one or more of the listed items may be used, and that only one of the items in the list may be required. The item can be a specific object, thing, or category. In other words, “at least one of…” means that any combination or number of items can be selected from the list, but not all items in the list may be required. For example, “at least one of items A, B, and C” could mean item A; item A and item B; item B; item A, item B, and item C; item C; or item B and item C. In some cases, “at least one of items A, B, and C” could mean, for example, but not limited to, two items A, one item B, and ten items C; four items B and seven items C; or some other suitable combination.

[0083] Unless otherwise specified, the terms “first,” “second,” etc., are used merely as markers in this document and are not intended to impose any order, position, or hierarchy on the items mentioned by these terms. Furthermore, mentioning an item, such as “second,” does not require or exclude the presence of an item, such as “first” or a lower-numbered item, and / or an item, such as “third” or a higher-numbered item.

[0084] This article includes illustrative processes Figure 1 Flowcharts are generally presented as logic flowcharts. Therefore, the depicted sequence and labeled steps indicate an example of the proposed method. Other steps and methods that are functionally, logically, or effectively equivalent to one or more steps or portions thereof in the illustrated method can be envisioned. Furthermore, the format and symbols used are provided to explain the logical steps of the method and should be understood not to limit the scope of the method. Although various arrow and line types can be used in flowcharts, they should be understood not to limit the scope of the corresponding method. In practice, some arrows or other connectors can be used only to indicate the logical flow of the method. For example, an arrow may indicate a waiting or monitoring period of unspecified duration between the listed steps of the depicted method. Additionally, the order in which a particular method occurs may or may not strictly adhere to the order of the corresponding steps shown.

[0085] This subject matter may be embodied in other specific forms without departing from its essence or essential characteristics. The examples described are to be considered in all respects merely illustrative and not restrictive. All variations within the meaning and scope of the claims are included within its scope.

Claims

1. A head gimbal assembly for a magnetic storage device, the head gimbal assembly comprising: Load-bearing beam; Read / write head; An actuator configured to move the read / write head; and A flexure member, the flexure member being attached to the actuator and comprising: On the actuator side, the actuator side faces the actuator; and A recess is formed in the actuator side and at least partially overlaps the actuator along a virtual plane that is substantially perpendicular to the length of the load beam.

2. The head gimbal assembly of claim 1, further comprising an adhesive disposed at a location within the recess between the actuator and the flexure such that the adhesive partially fills the recess, wherein the adhesive is made of a conductive material.

3. The head gimbal assembly of claim 1, wherein the ratio between the thickness of the non-recessed portion of the flexure adjacent to the recess and the thickness of the recessed portion of the flexure defined by the recess is between 1.2 and 5.0 and includes end values.

4. The head universal joint assembly according to claim 1, wherein: The flexural element further includes: a first flexural layer made of a first material; and a second flexural layer made of a second material different from the first material; The recess is formed in the second flexural layer; and The flexure is attached to the load beam such that the first flexure layer is inserted between the load beam and the second flexure layer.

5. The head universal joint assembly according to claim 4, wherein: The first flexural layer defines the substrate of the flexural member; and The second flexural layer is made of a polyimide material, which is applied to the substrate of the flexural member.

6. The head gimbal assembly of claim 4, further comprising an adhesive, the adhesive being inserted between the actuator and the third flexure layer of the flexure and contacting the second flexure layer and the third flexure layer.

7. The head gimbal assembly of claim 4, wherein the first flexure layer, the second flexure layer and the third flexure layer are arranged in a stacked manner in a first direction substantially parallel to the depth of the recess.

8. The head gimbal assembly of claim 7, wherein the actuator side includes a surface of the second flexure layer substantially perpendicular to the first direction.

9. The head gimbal assembly of claim 4, wherein the second flexural layer does not contact the actuator.

10. The head gimbal assembly of claim 4, wherein the second flexural layer is made of a photosensitive dielectric material.

11. The head universal joint assembly according to claim 1, wherein the flexure further comprises: A recessed portion, wherein the recessed portion defines the recess; and The non-recessed portion is adjacent to the recessed portion and at least partially overlaps with the actuator along the virtual plane.

12. The head gimbal assembly according to claim 1, wherein: The actuator includes a first actuator; The head gimbal assembly also includes a second actuator; The recess is a first recess; and The flexure further includes a second recess formed in the actuator side and at least partially overlapping the second actuator along the virtual plane.

13. The head gimbal assembly of claim 1, wherein the maximum width of the actuator is less than the maximum width of the recess.

14. The head gimbal assembly according to claim 1, wherein: The flexural member includes: a recessed portion defining the recess; and a non-recessed portion adjacent to the recess; and The actuator does not overlap with the non-recessed portion in the virtual plane.

15. A magnetic storage system, the magnetic storage system comprising: A certain number of discs; and The head gimbal assembly includes: Read / write heads; and Suspension assembly, the suspension assembly comprising: Base plate; A load-bearing beam, which is attached to the base plate; An actuator configured to move the read / write head toward one of the number of disks; and A flexure member, the flexure member being attached to the actuator and comprising: Actuator side, the actuator side faces the actuator; and A recess is formed in the actuator side and at least partially overlaps the actuator along a virtual plane that is substantially perpendicular to the length of the load beam.

16. The magnetic storage system of claim 15, further comprising a slider attached to a slider side of the flexure, the slider side being opposite to the actuator side, wherein the slider includes a read / write head configured to read data from at least one of the plurality of disks; Alternatively, the data may be written to at least one of the stated number of disks.

17. The magnetic storage system according to claim 15, wherein: The load-bearing beam also includes a distal end portion, a proximal end portion, and a hinge, the hinge being inserted between the distal end portion and the proximal end portion; The proximal end portion is attached to the base plate; and The flexure is attached to the load beam such that the actuator is positioned above the distal end portion of the load beam.

18. A method for manufacturing a magnetic head gimbal assembly for a magnetic storage device, the method comprising: An actuator is attached to a member for at least partially embedding the actuator on the actuator side of a flexure, wherein the actuator is configured to move a read / write head attached to the flexure. The actuator side of the flexure faces the actuator, and the member for at least partially embedding in the actuator overlaps at least partially with the actuator along a virtual plane that is substantially perpendicular to the length of the load beam attached to the flexure.

19. The method of claim 18, wherein: The member for at least partially embedding the actuator includes a recess formed in the actuator side; and The method further includes forming the recess by removing material from the polyimide layer of the flexure.

20. The method of claim 19, wherein: The polyimide layer includes a first polyimide layer; and The method further includes attaching a slider having the read / write head to an additional polyimide layer of the flexure on the slider side of the flexure opposite to the actuator side.

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