Evaporation coating device

Abstract

The invention relates to the technical field of light guide plate coating, and discloses an evaporation coating device which comprises a machine body. The target material hanging frame is mounted in the middle of the interior of the machine body; the rotating seat is rotationally mounted in the machine body; the driving mechanism drives the rotating seat to rotate and circumferentially move around the target material hanging frame; the supporting plate is rotationally installed on the rotating base through a first rotating shaft, and the rotating center line of the supporting plate on the rotating base is perpendicular to the rotating center line of autorotation of the rotating base; the fixing piece is installed on the rotating seat and controls the first rotating shaft to rotate, so that the supporting plate is kept vertically arranged or horizontally arranged; the baffle is vertically installed on the supporting plate, when the supporting plate is vertically arranged, one side of each light guide plate is attached to the supporting plate, the baffle leaves the machine body along with rotation of the supporting plate, and when the baffle is in a horizontal state, the light guide plates are arranged and placed on the baffle; and the pressing plate is detachably mounted on the baffle plate, is matched with the supporting plate and is used for clamping the light guide plate. The light guide plate can be aligned while being installed.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of light guide plate coating, in particular to an evaporation coating device. BACKGROUND

[0002] The core function of a light guide plate is to convert a 'linear light source' emitted by a side LED into a'surface light source', but when not coated, light is prone to total reflection inside or escape from a non-light-emitting surface, resulting in insufficient brightness and poor uniformity. Physical vapor deposition can be used for coating, and the core principle is to deposit target material atoms / molecules onto the surface of the light guide plate through physical methods such as evaporation and sputtering in a vacuum environment to form a thin film, which is generally achieved by an evaporation coating device.

[0003] The existing evaporation coating device, as described in the invention with the application number CN202511092828.9, uses a clamping assembly to clamp the stacked light guide plates when the mounting mechanism fixes the light guide plates, thereby increasing the number of light guide plates coated at a time. The design of the side frame can quickly position and fix the light guide plates through the cooperation of the rotating side and the limiting side, thereby improving the alignment of the light guide plates during stacking.

[0004] The light guide plates need to be stacked first, and one side of the light guide plates is first attached to a vertical surface. Then, the light guide plates are aligned by the side frame. During alignment, a gap may be formed between the light guide plates and the vertical surface, and the light guide plates need to be observed and adjusted again. SUMMARY

[0005] In order to improve the above situation, the application provides an evaporation coating device.

[0006] The application provides an evaporation coating device, which adopts the following technical scheme: An evaporation coating device, comprising: a machine body; a target material hanger installed at a central position inside the machine body; a rotating seat rotatably installed in the machine body; a driving mechanism for driving the rotating seat to rotate and move circumferentially around the target material hanger; a support plate rotatably installed on the rotating seat through a first rotating shaft, wherein the rotating center line of the support plate on the rotating seat is perpendicular to the rotating center line of the rotating seat; a fixing member installed on the rotating seat for controlling the rotation of the first rotating shaft, so that the support plate is kept vertically arranged or horizontally arranged; a baffle plate vertically installed on the support plate, wherein one side of the light guide plate is attached to the support plate when the support plate is vertically arranged, and the baffle plate moves away from the machine body along with the rotation of the support plate; and A pressing plate is detachably mounted on the baffle plate and cooperates with the supporting plate to clamp the light guide plate.

[0007] By adopting the above technical scheme, the supporting plate is kept vertical by operating the fixing member, the baffle plate is horizontally synchronized with the supporting plate, the light guide plates are neatly arranged on the baffle plate, the light guide plates are naturally attached to the horizontal baffle plate under the action of their own gravity, the adjacent light guide plates are adjusted by hand, the light guide plates can be quickly aligned, the pressing plate is installed to make the pressing plate and the supporting plate cooperate to clamp the light guide plate, after the fixing of the light guide plate is completed, the supporting plate is turned to a horizontal state by rotating the first rotating shaft, the baffle plate is turned back into the machine body along with the supporting plate, and the light guide plates are in a vertical stacked state, the driving mechanism is started to drive the rotating seat to simultaneously perform self-rotation and circumferential movement around the target material hanger, and drive the light guide plates to rotate, except for the side covered by the baffle plate, it is ensured that the other side surfaces are uniformly coated, the light guide plates uniformly receive evaporated target material atoms around the target material, local coating thickness is avoided, after the coating is completed, the driving mechanism is stopped, the supporting plate is turned back to vertical by operating the fixing member, the baffle plate is away from the machine body along with the supporting plate, and the light guide plates can be taken out by detaching the pressing plate, which is convenient to operate.

[0008] Optionally, the side wall of the baffle plate is detachably mounted with a side plate, and the included angle between the side plate and the baffle plate is a right angle.

[0009] By adopting the above technical scheme, the light guide plate is placed on the baffle plate, the two adjacent side walls of the light guide plate are attached to the inner sides (right angle reference surfaces) of the baffle plate and the side plate respectively, the precise alignment of the light guide plate is directly completed, no additional adjustment is needed, the pressing plate and the supporting plate cooperate to clamp the light guide plate, and then the side plate is removed.

[0010] Optionally, the supporting plate is fixedly connected with a second rotating shaft, the first rotating shaft is fixedly connected with a connecting block, the second rotating shaft is rotationally connected with the connecting block, and a supporting rod is installed on the side plate, when the baffle plate is in a horizontal state, the second rotating shaft and the first rotating shaft are relatively rotated to drive the supporting rod to abut against the inner bottom surface of the machine body.

[0011] By adopting the above technical scheme, the light guide plate can be directly attached between the side plate and the baffle plate under the action of its own gravity, the light guide plate is directly aligned during installation, the supporting rod abuts against the machine body to form double supports of the fixing member and the supporting rod.

[0012] Optionally, the supporting plate is detachably mounted with an additional plate, the additional plate and the baffle plate are arranged in parallel, the distance between the additional plate and the baffle plate is greater than the width of the light guide plate, the second rotating shaft is driven to rotate to make the additional plate be located below, the baffle plate is provided with a reinforcing plate, the reinforcing plate corresponds to the light guide plate one by one, the adjacent two reinforcing plates abut against each other, the reinforcing plate contacts with the side wall of the corresponding light guide plate, and the reinforcing plate is clamped by the pressing plate and the supporting plate.

[0013] By adopting the above technical solution, the light guide plate is first installed on the baffle, and the support plate is rotated after clamping. Then, after installing the additional plate so that it is below, the pressure plate can be released so that the light guide plate is aligned and abuts against the additional plate. The reinforcing plate is then installed and contacts the light guide plate. The reinforcing plate is clamped and fixed by the pressure plate just like the light guide plate. The insertion of the reinforcing plate can accommodate light guide plates of different widths. If the light guide plate is only different in width, the reinforcing plate can also compensate for the shorter width of the light guide plate, so that the light incident surface of the light guide plate can be blocked, playing the same role as the baffle.

[0014] Optionally, when two adjacent light guide plates have the same length but different widths, after the arranged light guide plates are clamped between the support plate and the pressure plate, the support plate is rotated so that the additional plate is below the baffle. Then, the pressure plate is released so that the side of the light guide plate that needs to be coated abuts against the additional plate. The reinforcing plate is slid so that it abuts against the corresponding sidewall of the light guide plate and the plane of the adjacent light guide plate.

[0015] By adopting the above technical solution, multiple light guide plates of the same length but different widths are selected. Each reinforcing plate is slid along the length of the baffle so that the inner side of the reinforcing plate is respectively attached to the side wall of the corresponding light guide plate. At the same time, it is ensured that the outer side of the reinforcing plate is attached to the plane of the adjacent light guide plate. The pressure plate is then tightened so that the pressure plate and the support plate cooperate to press the reinforcing plate and the light guide plate. The installation of the reinforcing plate increases the contact with the parts of the light guide plate that do not need to be coated.

[0016] Optionally, the baffle includes two movable parts and a fixed part, the fixed part is clamped between the two movable parts, the pressure plate is mounted on the fixed part, the side plate is inserted and mounted on one of the movable parts, the support plate is equipped with a driving component that drives the two movable parts to move closer or further apart, the reinforcing plate passes through the two movable parts and is in contact with the two movable parts, the fixed part is replaced according to the length of the light guide plate, and the fixed part is in contact with the reinforcing plate.

[0017] By adopting the above technical solution, the two moving parts can clamp the fixed part and the reinforcing plate, increasing the stability of the reinforcing plate and the light guide plate. It can also adapt to light guide plates of more lengths by adjusting the distance between the two moving parts.

[0018] Optionally, the drive assembly includes a bidirectional screw and two push blocks, the two push blocks and the bidirectional screw are threadedly connected and the threads are in different directions, the two push blocks are respectively fixedly connected to the moving part, and the push blocks slide on the support plate.

[0019] By adopting the above technical solution, it is ensured that the adjustment amount of the two moving parts is consistent, and the fixed part always remains horizontal.

[0020] Optionally, the additional plate is inserted into the support plate.

[0021] By adopting the above technical solution, a slot is opened at a preset position on the support plate. The additional plate is aligned with the slot and inserted directly to complete the installation without the need for additional fixing tools. Moreover, the parallelism between the additional plate and the baffle is guaranteed by the slot reference after insertion.

[0022] In summary, this application includes at least one of the following beneficial effects: 1. By switching the support plate state, the light guide plate can be directly aligned between the baffle and the side plate during installation, and installation and alignment can be performed simultaneously; 2. The installation of the reinforcing plate can not only clamp light guide plates of different widths, but also increase the contact surface with the light guide plate, thereby improving the stability of the light guide plate after it is clamped. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application; Figure 2 This is a schematic diagram illustrating the state of the support plate being vertical or horizontal, as shown in the embodiments of this application; Figure 3 This is a schematic diagram illustrating the overall structure of the fastener as shown in the embodiments of this application; Figure 4 This is a front view illustrating the cooperation between the side panel and the baffle in an embodiment of this application; Figure 5 This is a schematic diagram illustrating the structure of the side plate and baffle in an embodiment of this application; Figure 6 This is a schematic diagram illustrating the structure of the baffle, including a movable part and a fixed part, according to an embodiment of this application. Figure 7 This is a cross-sectional view illustrating the combination of a reinforcing plate and light guide plates of different widths in an embodiment of this application.

[0024] Explanation of reference numerals in the attached drawings: 10, machine body; 20, target hanger; 30, rotating seat; 31, first rotating shaft; 32, connecting block; 40, drive mechanism; 41, driving wheel; 42, driven wheel; 43, gear ring; 50, support plate; 52, pressure plate; 53, threaded sleeve; 54, screw; 55, side plate; 56, support rod; 57, second rotating shaft; 60, fixing component; 61, first gear; 62, second gear; 70, baffle; 71, moving part; 72, fixing part; 80, auxiliary plate; 90, reinforcing plate; 100, drive assembly; 110, bidirectional screw; 120, push block. Detailed Implementation

[0025] The following is in conjunction with the appendix Figure 1 -Appendix Figure 7 This application will be described in further detail.

[0026] This application discloses an evaporation coating apparatus.

[0027] In one embodiment, reference is made to Figure 1 An evaporation coating apparatus includes a body 10, a target holder 20, a rotating base 30, and a drive mechanism 40. The target holder 20 is fixedly installed in the center of the body 10 to provide a target source for coating. The rotating base 30 is rotatably installed inside the body 10, and the drive mechanism 40 is connected to the rotating base 30 for transmission, enabling the rotating base 30 to rotate simultaneously and move circumferentially around the target holder 20. The drive mechanism 40 includes a driving wheel 41, a driven wheel 42, and a gear ring 43. The rotating base 30 is fixedly installed on the driven wheel 42. The driving wheel 41 and the driven wheel 42 mesh, and the driven wheel 42 and the gear ring 43 mesh. The driving wheel 41 is driven to rotate by a motor, and the driving wheel 41 drives the driven wheel 42 to rotate on its own axis and around the gear ring 43. How the drive mechanism 40 enables the rotating base 30 to rotate and revolve is prior art and is only briefly illustrated; this application will not elaborate further.

[0028] Reference Figure 2 and Figure 3 A support plate 50 is rotatably mounted on the rotating seat 30 via the first rotating shaft 31. The rotation center line of the support plate 50 on the rotating seat 30 is perpendicular to the rotation center line of the rotating seat 30. A fixing member 60 for fixing the state of the support plate 50 is also installed on the rotating seat 30. The fixing member 60 can keep the support plate 50 stably vertical or horizontal, providing support for the clamping and coating state switching of the light guide plate.

[0029] Reference Figure 3 The fixing component 60 includes a first gear 61 and a second gear 62. The first gear 61 meshes with the second gear 62. The first rotating shaft 31 and the first gear 61 are coaxially and fixedly connected. A motor is fixedly installed on the rotating seat 30 to drive the second gear 62 to rotate. The rotation angle can be set by a program.

[0030] Reference Figure 1 and Figure 2A baffle 70 and a pressure plate 52 are mounted on the support plate 50. The baffle 70 is vertically mounted on the support plate 50, and the included angle between the baffle 70 and the support plate 50 forms a 90° right angle. When the fixing member 60 controls the support plate 50 to be in a horizontal state, the baffle 70 is set vertically. When the fixing member 60 controls the support plate 50 to be in a vertical state, the baffle 70 extends out of the body 10 and is in a horizontal state. The light guide plate naturally adheres to the baffle 70 under its own weight, and the light guide plate itself is relatively light. The pressure plate 52 is mounted on the baffle 70, and a threaded sleeve 53 is mounted on the baffle 70. The threaded sleeve 53 is threadedly connected to a screw 54. One end of the screw 54 is inserted into the pressure plate 52. Rotating the screw 54 causes the screw 54 and the pressure plate 52 to rotate and engage, so that the pressure plate 52 can cooperate with the support plate 50 to stably clamp the light guide plate placed between the baffle 70 and the support plate 50, preventing the light guide plate from shifting during the coating process.

[0031] Reference Figure 4 and Figure 5 To further improve the alignment accuracy of the light guide plate clamping, a side plate 55 is detachably installed on the side of the baffle 70 that contacts the light guide plate. The side plate 55 is inserted into the baffle 70, and the angle between the side plate 55 and the baffle 70 is a right angle, forming an "L"-shaped positioning reference. When the light guide plate is placed on the horizontal baffle 70, the two adjacent sidewalls of the light guide plate can be made to fit against the inner sides of the baffle 70 and the side plate 55 respectively, achieving precise alignment without additional observation and adjustment. After alignment, if it is necessary to avoid the side plate 55 from affecting the coating, it can be removed from the baffle 70.

[0032] Reference Figure 2 Meanwhile, a second rotating shaft 57 is connected to the bottom of the support plate 50, and a connecting block 32 is fixedly connected to the first rotating shaft 31. The second rotating shaft 57 and the connecting block 32 are rotatably connected, and the axes of the first rotating shaft 31 and the second rotating shaft 57 are perpendicular to each other. The support plate 50 can maintain a rotational relationship with the connecting block 32 with the second rotating shaft 57 as the rotation center, and it does not separate from the connecting block 32. In order to prevent the second rotating shaft 57 from rotating at any time, a screw 54 for limiting the rotation of the second rotating shaft 57 is connected to the connecting block 32. When the rotating seat 30 drives the light guide plate to rotate within the body 10, the second rotating shaft 57 is fixed on the connecting block 32.

[0033] Reference Figure 4 and Figure 5 A support rod 56 is fixedly installed on the side plate 55. When the baffle 70 is in a horizontal state to support the weight of the light guide plate, the second rotating shaft 57 can be driven to rotate relative to it, so that the end of the support rod 56 abuts against the bottom surface of the body 10. At this time, both the baffle 70 and the side plate 55 are inclined, and the light guide plate can adhere to the baffle 70 and the side plate 55 under its own weight. Furthermore, the support rod 56 and the fixing member 60 together form a double support for the support plate 50, ensuring clamping stability.

[0034] Reference Figure 6 and Figure 7 In one embodiment, to accommodate different specifications of light guide plates, the device further includes an auxiliary plate 80 and a reinforcing plate 90. The auxiliary plate 80 is installed on the support plate 50 via a plug-in connection, remaining parallel to the baffle 70. The distance between the auxiliary plate 80 and the baffle 70 is greater than the width of the light guide plate. When the light guide plate is clamped between the support plate 50 and the pressure plate 52, the angle of the support plate 50 can be adjusted by rotating the second rotating shaft 57, so that the auxiliary plate 80 is located below the baffle 70. The baffle 70 has holes for the reinforcing plate 90 to pass through. The reinforcing plates 90 are arranged one-to-one with the light guide plates, and adjacent reinforcing plates 90 are fitted together. After insertion, the reinforcing plate 90 can contact the side wall of the corresponding light guide plate. After the pressure plate 52 is installed, the reinforcing plate 90 and the light guide plate are clamped and fixed together by the pressure plate 52 and the support plate 50.

[0035] When adjacent light guide plates to be coated have the same length but different widths, the light guide plates are first clamped between the support plate 50 and the pressure plate 52. Then, the support plate 50 is rotated so that the auxiliary plate 80 is located below the baffle 70. After that, the pressure plate 52 is released, and the side of the light guide plate that needs to be coated will abut against the auxiliary plate 80 under the action of gravity. At this time, the reinforcing plate 90 is slid along the length direction of the baffle 70 so that the reinforcing plate 90 abuts against the side wall of the corresponding light guide plate and fits the plane of the adjacent light guide plate. This achieves precise positioning of light guide plates of different widths, while compensating for the gap of narrow light guide plates and blocking the non-coated light incident surface of the light guide plate over a large area.

[0036] Reference Figure 6 and Figure 7 Furthermore, the baffle 70 consists of two movable parts 71 and a fixed part 72, with the distance between the two movable parts 71 being the hole through which the reinforcing plate 90 passes. The fixed part 72 is clamped between the two movable parts 71, a pressure plate 52 is mounted on the fixed part 72, and a side plate 55 is inserted into the side wall of one of the movable parts 71. A drive assembly 100 for driving the two movable parts 71 is mounted on the support plate 50. The drive assembly 100 includes a bidirectional screw 110 and two push blocks 120. The two push blocks 120 are threadedly connected to the bidirectional screw 110 respectively, and their threads rotate in opposite directions. The end of the push block 120 away from the bidirectional screw 110 is fixedly connected to the movable part 71. At the same time, the push block 120 is slidably mounted on the support plate 50. When the bidirectional screw 110 is rotated, the two push blocks 120 will move closer or further away from each other along the support plate 50, thereby driving the two movable parts 71 to move closer or further away from each other. When the two moving parts 71 approach each other, they can provide auxiliary clamping for the fixed part 72 and the reinforcing plate 90.

[0037] In the illustrations of this embodiment, the light guide plate abuts against the movable part 71, leaving a gap between the narrow light guide plate and the movable part 71, exposing part of the light-incident surface. A plug can be installed to compensate for and fill the gap. Alternatively, the movable part 71 can be adjusted according to the length of the light guide plate so that the light guide plate is completely abutted against the reinforcing plate 90. The reinforcing plate 90, held between the pressure plate 52 and the support plate 50, also provides support.

[0038] Both the fixing part 72 and the reinforcing plate 90 can be customized according to the length of the light guide plate, making them easy to replace and ensuring the stability and alignment of light guide plates of different lengths when clamped.

[0039] The implementation principle of the evaporation coating apparatus in this application is as follows: When the support plate 50 is vertical, one side of the light guide plate is attached to the support plate 50. The baffle 70 moves out of the machine body 10 with the support plate 50 for easy handling. To improve alignment accuracy, a right-angle side plate 55 can be detachably installed on the side wall of the baffle 70 to form an L-shaped reference. The light guide plate can be precisely aligned by attaching it to the baffle 70 and the inner side of the side plate 55. After alignment, the side plate 55 can be removed. After the light guide plate is installed, the pressure plate 52 and the support plate 50 work together to clamp the light guide plate and prevent displacement during coating. For light guide plates of different specifications, an auxiliary plate 80 parallel to the baffle 70 is inserted into the support plate 50. Adjusting the support plate 50 allows the auxiliary plate 80 to be positioned within the baffle. Below 70; the reinforcing plate 90 corresponds to and is attached to the light guide plate one by one, and is inserted and attached to the side wall of the light guide plate. It is clamped together with the light guide plate by the pressure plate 52. If the light guide plates are the same length but different widths, the pressure plate 52 is loosened so that the light guide plate abuts against the auxiliary plate 80 to fix the reference. The reinforcing plate 90 can be slid to adapt to the width, so that the three sides of the light guide plate that need to be coated are completely exposed and the light-incident surface is covered. Rotating the screw 54 can make the moving part 71 move closer or further away at the same time, which not only helps to clamp the fixing part 72 and the reinforcing plate 90, but also adapts to light guide plates of different lengths. The fixing part 72 can be replaced as needed to match the length of the light guide plate.

[0040] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An evaporation coating device, characterized by It includes: Machine body (10); Target rack (20), installed in the center of the machine body (10) inside; Rotary seat (30), rotatably mounted in the machine body (10); Driving mechanism (40), driving the rotary seat (30) to rotate and move around the target rack (20) circumferentially; Support plate (50), rotatably mounted on the rotary seat (30) through the first rotating shaft (31), the rotation center line of the support plate (50) on the rotary seat (30) and the rotation center line of the rotary seat (30) are perpendicular; Fixing member (60), installed on the rotary seat (30), controlling the rotation of the first rotating shaft (31), so that the support plate (50) is kept vertical or horizontal arrangement; Baffle (70), vertically installed on the support plate (50), when the support plate (50) is vertically arranged, one side of the light guide plate is attached to the support plate (50), the baffle (70) rotates with the support plate (50), and the baffle (70) is away from the machine body (10), when the baffle (70) is in horizontal state, the light guide plate is arranged on the baffle (70); Pressing plate (52), detachably installed on the baffle (70), cooperating with the support plate (50) for clamping the light guide plate.

2. The evaporation coating device according to claim 1, characterized in that The side wall of the baffle (70) is detachably installed with a side plate (55), and the included angle between the side plate (55) and the baffle (70) is a right angle.

3. The evaporation coating device according to claim 2, characterized in that The support plate (50) is fixedly connected with a second rotating shaft (57), the first rotating shaft (31) is connected with a connecting block (32), the second rotating shaft (57) and the connecting block (32) are rotatably connected, a supporting rod (56) is installed on the side plate (55), when the baffle (70) is in horizontal state, the second rotating shaft (57) and the first rotating shaft (31) are driven to rotate relatively, so that the supporting rod (56) abuts on the inner bottom surface of the machine body (10).

4. The evaporation coating device according to claim 3, characterized in that The support plate (50) is detachably installed with an additional plate (80), the additional plate (80) and the baffle (70) are arranged in parallel, the distance between the additional plate (80) and the baffle (70) is greater than the width of the light guide plate, the second rotating shaft (57) is driven to rotate, so that the additional plate (80) is located below, the baffle (70) is provided with a reinforcing plate (90), the reinforcing plate (90) and the light guide plate one-to-one correspond, the adjacent two reinforcing plates (90) are attached to each other, the reinforcing plate (90) and the corresponding light guide plate side wall contact, the reinforcing plate (90) is clamped by the pressing plate (52) and the support plate (50).

5. The evaporation coating device according to claim 4, characterized in that When the length dimensions of two adjacent light guide plates are same and the width dimensions are different, after the arranged light guide plates are clamped between the support plate (50) and the pressing plate (52), the additional plate (80) is located below the baffle (70) by rotating the support plate (50), the pressing plate (52) is loosened to make the side of the light guide plate needing coating abut on the additional plate (80), and the reinforcing plate (90) is slid to make the reinforcing plate (90) abut on the side wall of the corresponding light guide plate and the plane of the adjacent light guide plate.

6. The evaporation coating device according to claim 5, characterized in that The baffle (70) comprises two moving parts (71) and a fixed part (72), the fixed part (72) is clamped between the two moving parts (71), the pressing plate (52) is installed on the fixed part (72), the side plate (55) is inserted and installed on one of the moving parts (71), the support plate (50) is provided with a driving assembly (100) for driving the two moving parts (71) to move close to or away from each other, the reinforcing plate (90) passes through the two moving parts (71) and is attached to the two moving parts (71), the fixed part (72) is replaced according to the length dimension of the light guide plate, and the fixed part (72) is in contact with the reinforcing plate (90).

7. The evaporation coating device according to claim 6, characterized in that The driving assembly (100) comprises a bidirectional screw (110) and two push blocks (120), the two push blocks (120) are threadedly connected with the bidirectional screw (110) and have different screw rotation directions, the two push blocks (120) are respectively fixedly connected with the moving parts (71), and the push blocks (120) slide on the support plate (50).

8. The evaporation coating device according to claim 4, characterized in that The additional plate (80) is inserted on the support plate (50).

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