Method and apparatus for traffic balancing

Abstract

Various embodiments of the present technology may provide a vessel coupled to a first reaction chamber and a second reaction chamber via a first gas line and a second gas line, respectively. Each gas line may include a variable feature, wherein each flexible feature is configured to vary flow kinetics of gas flowing through the gas line.

Description

TECHNICAL FIELD

[0001] The present disclosure relates generally to methods and apparatus for flow balancing. More specifically, the present disclosure relates to balancing gas flow from a vessel to a first reaction chamber and a second reaction chamber. BACKGROUND

[0002] Some semiconductor manufacturing systems have multiple reaction chambers coupled to a single chemical source via multiple gas lines. Flow dynamics in each gas line can vary, which results in process mismatch between the various reaction chambers. SUMMARY

[0003] Various embodiments of the present technology can provide a vessel coupled to a first reaction chamber and a second reaction chamber via a first gas line and a second gas line, respectively. Each gas line can include a variable feature, where each flexible feature is configured to vary flow dynamics of a gas flowing through the gas line.

[0004] According to one aspect, an apparatus includes a vessel, a first reaction chamber fluidically coupled to the vessel via a first gas line, where the first gas line includes a first feature formed of a material that allows the first feature to have a varying size, and a second reaction chamber fluidically coupled to the vessel via a second gas line, where the second gas line includes a second feature formed of a material that allows the first feature to have a varying size.

[0005] In one embodiment, each of the first feature and the second feature includes a restrictor formed of a metallic material having an aperture with a diameter, where the diameter of the aperture varies as a function of temperature.

[0006] In one embodiment, the apparatus further includes a first heating element disposed proximate the first feature and a second heating element disposed proximate the second feature.

[0007] In one embodiment, the apparatus further includes a controller in communication with the first heating element and the second heating element, where the controller is configured to operate the first heating element independently of the second heating element.

[0008] In one embodiment, where each of the first feature and the second feature includes a tube section having at least one of a compressible and expandable length and a compressible and expandable diameter.

[0009] In another aspect, an apparatus includes a vessel, a first reaction chamber fluidically coupled to the vessel via a first gas line, where the first gas line includes a first flexible membrane coupled to a first end of a tube, and a second reaction chamber fluidically coupled to the vessel via a second gas line, where the second gas line includes a second flexible membrane coupled to a second end of the tube.

[0010] In one embodiment, the tube includes an incompressible fluid within an interior volume of the tube.

[0011] In one embodiment, the first flexible membrane is disposed within a sidewall of the first gas line and the second flexible membrane is disposed within a sidewall of the second gas line.

[0012] In one embodiment, the apparatus further includes a first valve in-line with the first gas line; and a second valve in-line with the second gas line.

[0013] In one embodiment, the first valve and the second valve are disposed upstream of the first flexible membrane and the second flexible membrane.

[0014] In yet another aspect, an apparatus includes: a vessel; a first reaction chamber fluidly coupled to the vessel via a first gas line; a second reaction chamber fluidly coupled to the vessel via a second gas line; a first variable feature disposed within the first gas line; and a second variable feature disposed within the second gas line; wherein each of the first flexible feature and the second flexible feature is configured to alter flow dynamics of a gas flowing through the respective gas line.

[0015] In one embodiment, the apparatus further includes a first pressure sensor disposed between the first variable feature and the first reaction chamber; and a second pressure sensor disposed between the second variable feature and the second reaction chamber.

[0016] In one embodiment, the first variable feature includes a first flexible membrane disposed within a sidewall of the first gas line and the second variable feature includes a second flexible membrane disposed within a sidewall of the second gas line.

[0017] In one embodiment, the apparatus further includes a tube including a first end coupled to the first flexible membrane and a second end coupled to the second flexible membrane.

[0018] In one embodiment, the tube includes an incompressible fluid within an interior volume of the tube.

[0019] In one embodiment, the apparatus further includes a first valve in-line with the first gas line; and a second valve in-line with the second gas line, wherein the first valve and the second valve are disposed upstream of the first flexible membrane and the second flexible membrane.

[0020] In one embodiment, each of the first variable feature and the second variable feature includes a conduit portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

[0021] In one embodiment, each of the first variable feature and the second variable feature includes a restrictor formed of a metallic material having an aperture with a diameter, wherein the diameter of the aperture varies as a function of temperature.

[0022] In one embodiment, the apparatus further comprises a first heating element disposed proximate the first variable feature and a second heating element disposed proximate the second variable feature.

[0023] In one embodiment, the apparatus further comprises a controller in communication with the first heating element and the second heating element, wherein the controller is configured to operate the first heating element independently of the second heating element. BRIEF DESCRIPTION OF DRAWINGS

[0024] A more complete understanding of the present technology can be obtained by reference to the following detailed description when considered in connection with the following remarks and the attached drawings. Like reference numbers in the various drawings indicate like elements and steps.

[0025] Figure 1 A system according to an embodiment of the present technology is representatively shown;

[0026] Figure 2 is a partial view of a system according to an embodiment of the present technology;

[0027] Figure 3 is a partial view of a system according to an embodiment of the present technology;

[0028] Figure 4 is a partial view of a system according to an embodiment of the present technology; and

[0029] Figure 5 is a partial view of a system according to an embodiment of the present technology. DETAILED DESCRIPTION

[0030] The present technology can be described in terms of functional block components and various processing steps. Such functional blocks can be realized by any number of components configured to perform specified functions and achieve various results. For example, the present technology can employ various gas lines, valves, controllers, reaction chambers, vessels, and pedestals.

[0031] Referring to Figure 1 , the example system 100 can include a first reaction chamber 110(a) and a second reaction chamber 110(b), where each reactor is configured to perform processing on a subject to be processed, such as a substrate (e.g., a wafer). For example, each reaction chamber 110(a), 110(b) can be configured to perform heating, deposition, etching, polishing, ion implantation, and / or other processing on the subject to be processed. In some embodiments, the reaction chambers 110(a), 110(b) can be configured to perform a movement function, a vacuum sealing function, and an exhaust function. In some embodiments, the reaction chambers 110(a), 110(b) can perform various semiconductor manufacturing processes, such as an atomic layer deposition (ALD) process or a chemical vapor deposition (CVD) process.

[0032] In various embodiments, system 100 may further include a substrate mounting unit (not shown) disposed within the reaction chamber. The substrate mounting unit may include a base for supporting a substrate and a heater for heating the substrate supported by the base. The heater may be embedded within the base. The substrate mounting unit may further include a base to support the base. For loading / unloading of the substrate, the substrate mounting unit may be configured to be vertically movable (up and down) by connection to a drive unit (not shown).

[0033] In various embodiments, system 100 may further include a gas distribution system for delivering vapor to reaction chambers 110(a), 110(b). In an exemplary embodiment, the gas distribution system may include multiple gas lines, such as a first gas line 135(a) and a second gas line 135(b). The first gas line 135(a) and the second gas line 135(b) may be connected to a main gas line 160. Furthermore, the first gas line 135(a) may be directly connected to the first reaction chamber 110(a) and the second gas line 135(b) may be connected to the second reaction chamber 110(b).

[0034] In various embodiments, system 100 may further include container 105 configured to contain chemicals (i.e., precursors). Container 105 may be configured to contain solid or liquid chemicals and may be further configured to convert the solid or liquid into vapor. Container 105 may be coupled to a gas distribution system to allow vapor to flow from container 105 to reaction chambers 110(a), 110(b). In an exemplary embodiment, the gas distribution system is configured to allow vapor to flow equally into the first and second reaction chambers 110(a), 110(b). For example, a main gas line 160 may be directly coupled to container 105 to supply vapor to reaction chambers 110(a), 110(b) via a first gas line 135(a) and a second gas line 135(b), respectively.

[0035] In various embodiments, system 100 may further include multiple variable features, such as a first variable feature 115(a) and a second variable feature 115(b). The variable features may be configured to alter the flow dynamics of vapor / gas flowing through the gas distribution system. For example, in various embodiments, the first variable feature 115(a) and the second variable feature 115(b) may be respectively disposed within a first gas line 135(a) and a second gas line 135(b).

[0036] In one embodiment, and referring to Figure 2The first variable feature 115(a) may include a first flexible membrane 205(a) disposed within the sidewall of the first gas line 135(a), and the second variable feature 115(b) may include a second flexible membrane 205(b) disposed within the sidewall of the second gas line 135(b). In this embodiment, the system 100 may further include a pipe 200, which includes a first end 210 connected to the first flexible membrane 205(a) and a second end 215 connected to the second flexible membrane 205(b). The pipe 200 may contain an incompressible fluid (i.e., a fluid whose volume or density does not change with pressure), water, oil, hydraulic fluid, etc., within its internal volume.

[0037] In another embodiment, and referring to Figure 3 The first variable feature 115(a) may include a first limiter 300(a), and the second variable feature 115(b) may include a second limiter 300(b). The first limiter 300(a) and the second limiter 300(b) may be formed of a thermally expandable metallic material, such as stainless steel or a metal alloy (e.g., Hastelloy). Each limiter 300(a), 300(b) may include a corresponding hole, such as a first hole 310(a) and a second hole 310(b), each hole having a diameter. This embodiment may also include heating elements, such as a first heating element 305(a) disposed on and / or adjacent to the first limiter 300(a) and a second heating element 305(b) disposed on and / or adjacent to the second limiter 300(b). The first heating element 305(a) and the second heating element 305(b) may include any suitable heating device, such as a resistance heating element, a heating coil, etc. When heated, the first limiter 300(a) and the second limiter 300(b) can expand, thereby expanding the diameter of the corresponding holes 310(a) and 310(b).

[0038] In another embodiment, and referring to Figure 4Each variable feature 115(a), 115(b) may include a pipe section having a compressible and / or expandable length. The pipe section may also have a compressible and / or expandable diameter. For example, the first variable feature 115(a) may include a first pipe segment 400(a) formed of an elastic material or other material that allows expansion and contraction. For example, the first pipe segment 400(a) may include plastic (e.g., polyethylene), metal mesh, etc. The first pipe segment 400(a) may also include a first helical spring 415(a) disposed on the outer surface of the first pipe segment 400(a), embedded within the first pipe segment 400(a), or disposed on the inner surface of the first pipe segment 400(a). Similarly, the second variable feature 115(a) may include a second pipe segment 400(b) formed of an elastic material or other material that allows expansion and contraction. For example, the second pipe segment 400(b) may include plastic (e.g., polyethylene), metal mesh, etc. The second pipe section 400(b) may also include a second helical spring 415(b), which is disposed on the outer surface of the second pipe section 400(b), embedded in the second pipe section 400(b), or disposed on the inner surface of the second pipe section 400(b).

[0039] In this embodiment, system 100 may further include clamping devices to provide compressive force on the helical spring. For example, system 100 may include a first clamping device 405(a) disposed on or adjacent to the end of the first pipe segment 400(a) to reduce the length of the first pipe segment 400(a). System 100 may also include a second clamping device 405(b) disposed on or adjacent to the end of the second pipe segment 400(b) to reduce the length of the second pipe segment 400(b).

[0040] Similarly, and refer to Figure 5 The first variable feature 115(a) may include a first bladder 500(a) which can be contracted and expanded using an attached first actuator 505(a). The second variable feature 115(b) may include a second bladder 500(b) which can be contracted and expanded using an attached second actuator 505(b). The first and second bladders may be formed of a plastic material. The actuator may include any suitable type of actuator capable of compressing the bladders.

[0041] In various embodiments, and referring back to the reference Figure 1 The system 100 may also include multiple valves, such as a first valve 120(a) and a second valve 120(b). The first valve 120(a) may be connected to a first gas line 135(a) and is located upstream of the first variable feature 115(a). The second valve 120(b) may be connected to a second gas line 135(b) and is located upstream of the second variable feature 115(b).

[0042] In various embodiments, system 100 may also include multiple sensors to measure the pressure and / or flow parameters (e.g., conductivity) of the gas passing through the gas lines. For example, the multiple sensors may include pressure sensors, flow meters, etc. In an exemplary embodiment, system 100 may include a first sensor 125(a) disposed between the first variable feature 115(a) and the first reaction chamber 110(a) to measure the pressure and / or conductivity of the gas in the first gas line 135(a). System 100 may further include a second sensor 125(b) disposed between the second variable feature 115(b) and the second reaction chamber 110(b) to measure the pressure and / or conductivity of the gas in the second gas line 135(b). In addition, the system 100 may include a third sensor 150 disposed between the container 105 and the first variable feature 115(a) and the second variable feature 115(b) to measure the pressure and / or conductivity of the gas / vapor in the main gas line 160 before entering the first gas line 135(a) and the second gas line 135(b).

[0043] In various embodiments, system 100 may further include a controller 155 configured to receive and transmit signals. For example, controller 155 may receive output signals from a first sensor 125(a), a second sensor 125(b), and / or a third sensor 150, wherein the output signals indicate the measured pressure or conductivity of the respective sensor. In various embodiments, controller 155 may transmit control signals to a first variable feature 115(a) and a second variable feature 115(b). For example, controller 155 may transmit control signals to a first heating element 305(a) and a second heating element 305(b) to operate the heating elements independently of each other. In another example, controller 155 may send control signals to each of the first clamping device 405(a) and the second clamping device 405(b) to retract the corresponding helical springs 415(a), 415(b), thereby reducing the length of the first tube segment 400(a) and the second tube segment 400(b).

[0044] During operation, and referring to Figures 1-4 The first variable feature 115(a) and the second variable feature 115(b) can alter the flow dynamics of the gas flowing through the first gas line 135(a) and the second gas line 135(b) to maintain the same flow rate / pressure downstream of the first variable feature 115(a) and the second variable feature 115(b), and specifically, the same flow rate / pressure entering the reaction chambers 110(a) and 110(b). For example, in Figure 2In one embodiment, when the flow rate and / or pressure in the first gas line 135(a) and the second gas line 135(b) downstream of the first variable feature 115(a) and the second variable feature 115(b) changes, the pressure on the flexible membrane will change, thereby pushing them in or out and causing a change in flow resistance. The change in flow resistance will eventually reach equilibrium, where both the first gas line 135(a) and the second gas line 135(b) have the same static pressure and therefore the same flow rate.

[0045] exist Figure 3 In this embodiment, controller 155 can transmit signals to the first heating element 305(a) and the second heating element 305(b) to increase the temperature of the first restrictor 300(a) and the second restrictor 300(b). When the restrictor is heated, the diameter of the corresponding orifice 310 increases, thus resulting in an increase in flow through the restrictor. Controller 155 can operate the heating elements independently of each other, such that the orifice diameter of one restrictor is larger than that of the other. The first sensor 125(a) and the second sensor 125(b) can provide continuous or periodic pressure data feedback to controller 155, and controller 155 can dynamically respond to the pressure data to ensure that the pressure / flow rate downstream of the first restrictor 300(a) and the second restrictor 300(b) and entering the reaction chambers 110(a), 110(b) is substantially equal. For example, if the pressure in a gas line is higher, controller 155 can operate the heating element to increase the temperature of one restrictor. Alternatively, controller 155 may increase the temperature of one heating element and decrease the temperature of the other heating element to equalize the pressure in the two gas lines.

[0046] exist Figure 4In this embodiment, the controller 155 can transmit signals to the first clamping device 405(a) and the second clamping device 405(b) to apply forces to the corresponding helical springs 415(a), 415(b), thereby shortening the length of the first pipe segment 400(a) and the second pipe segment 400(b). When the first pipe segment 400(a) and the second pipe segment 400(b) are shortened (or lengthened), the pressure and flow dynamics change, allowing each of the first pipe segment 400(a) and the second pipe segment 400(b) to have different flow or pressure measurements. The controller 155 can operate the first clamping device 405(a) and the second clamping device 405(b) independently of each other, allowing one pipe segment to be shorter than the other. The first sensor 125(a) and the second sensor 125(b) can provide continuous or periodic pressure data feedback to the controller 155, and the controller 155 can dynamically respond to the pressure data to ensure that the pressure / flow rate downstream of the first pipe section 400(a) and the second pipe section 400(b) and entering the reaction chambers 110(a), 110(b) is substantially equal. For example, if the pressure in one gas line is higher, the controller 155 can operate a clamping device to reduce the pressure in that particular gas line by extending that pipe section to equalize the pressure / flow rate in the two gas lines. Alternatively, the controller 155 can increase the pressure / flow rate in one gas line and decrease the pressure / flow rate in the other gas line to equalize the pressure in both.

[0047] In the foregoing description, the present technology has been described with reference to specific exemplary embodiments. The specific embodiments shown and described are illustrative of the present technology and its best mode, and are not intended to limit the scope of the present technology in any way. In fact, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the methods and systems may not be described in detail. Furthermore, the connecting lines shown in the figures are intended to represent exemplary functional relationships and / or steps between various elements. In actual systems, many alternative or additional functional relationships or physical connections may exist.

[0048] The present technology has been described with reference to specific exemplary embodiments. However, various modifications and changes can be made without departing from the scope of the present technology. The specification and drawings are to be regarded in an illustrative rather than restrictive manner, and all such modifications are intended to be included within the scope of the present technology. Therefore, the scope of the present technology should be determined by the general embodiments described and their legal equivalents, and not solely by the specific examples above. For example, unless expressly stated otherwise, the steps described in any method or process embodiment may be performed in any order, and are not limited to the explicit order presented in the specific examples. In addition, the components and / or elements described in any device embodiment may be assembled or otherwise operably configured in various arrangements to produce substantially the same results as the present technology, and are therefore not limited to the specific configurations described in the specific examples.

[0049] The benefits, other advantages, and solutions to problems have been described above with respect to specific embodiments. However, any benefit, advantage, solution to a problem, or element that may cause any particular benefit, advantage, or solution to occur or become more significant should not be construed as a critical, essential, or necessary feature or component.

[0050] The term "comprising" or any variation thereof is intended to refer to non-exclusive inclusion, such that a process, method, article, composition, or apparatus that includes a list of elements includes not only those elements listed, but also other elements not expressly listed or inherent to such process, method, article, composition, or apparatus. Other combinations and / or modifications of the above-described structures, arrangements, applications, proportions, elements, materials, or components used in the practice of this art, except those specifically described, may vary or otherwise be particularly suited to particular environments, manufacturing specifications, design parameters, or other operational requirements without departing from its general principles.

[0051] The present technology has been described above with reference to exemplary embodiments. However, changes and modifications may be made to the exemplary embodiments without departing from the scope of the present technology. These and other changes or modifications are intended to be included within the scope of the present technology, as set forth in the appended claims.

Claims

1. An apparatus comprising: a vessel; a first reaction chamber fluidly coupled to the vessel via a first gas line, wherein the first gas line includes a first feature formed from a material that allows the first feature to have a varying size; and a second reaction chamber fluidly coupled to the vessel via a second gas line, wherein the second gas line includes a second feature formed from a material that allows the first feature to have a varying size.

2. The apparatus of claim 1, wherein, Each of the first feature and the second feature includes a restrictor formed from a metallic material, the restrictor having an aperture with a diameter, wherein the diameter of the aperture varies as a function of temperature.

3. The apparatus of claim 1, further comprising a first heating element disposed proximate the first feature and a second heating element disposed proximate the second feature.

4. The apparatus of claim 3, further comprising a controller in communication with the first heating element and the second heating element, wherein the controller is configured to operate the first heating element independently of the second heating element.

5. The apparatus of claim 1, wherein, Each of the first feature and the second feature includes a conduit portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

6. An apparatus comprising: a vessel; a first reaction chamber fluidly coupled to the vessel via a first gas line, wherein the first gas line includes a first flexible membrane coupled to a first end of a tube; and a second reaction chamber fluidly coupled to the vessel via a second gas line, wherein the second gas line includes a second flexible membrane coupled to a second end of the tube.

7. The apparatus of claim 6, wherein, The tube includes an incompressible fluid within an interior volume of the tube.

8. The apparatus of claim 6, wherein, The first flexible membrane is disposed within a sidewall of the first gas line and the second flexible membrane is disposed within a sidewall of the second gas line.

9. The apparatus of claim 6, further comprising: a first valve in-line with the first gas line; and a second valve in-line with the second gas line.

10. The apparatus of claim 9, wherein, The first valve and the second valve are disposed upstream of the first flexible membrane and the second flexible membrane.

11. An apparatus comprising: a vessel; a first reaction chamber fluidly coupled to the vessel via a first gas line; a second reaction chamber fluidly coupled to the vessel via a second gas line; a first variable feature disposed within the first gas line; and a second variable feature disposed within the second gas line; wherein each of the first flexible feature and the second flexible feature is configured to vary a flow dynamics of a gas flowing through the respective gas line.

12. The apparatus of claim 11, further comprising: a first pressure sensor disposed between the first variable feature and the first reaction chamber; and a second pressure sensor disposed between the second variable feature and the second reaction chamber.

13. The apparatus of claim 11, wherein, The first variable feature includes a first flexible membrane disposed within a sidewall of the first gas line and the second variable feature includes a second flexible membrane disposed within a sidewall of the second gas line.

14. The apparatus of claim 13, further comprising a tube including a first end coupled to the first flexible membrane and a second end coupled to the second flexible membrane.

15. The apparatus of claim 14, wherein, The tube includes an incompressible fluid within an interior volume of the tube.

16. The apparatus of claim 14, further comprising: a first valve in-line with the first gas line; and a second valve in-line with the second gas line, wherein the first and second valves are disposed upstream of the first and second flexible membranes.

17. The apparatus of claim 11, wherein, Each of the first and second variable features includes a conduit portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

18. The apparatus of claim 11, wherein, Each of the first and second variable features includes a restrictor formed of a metallic material, the restrictor having an aperture with a diameter, wherein the diameter of the aperture varies as a function of temperature.

19. The apparatus of claim 18, further comprising a first heating element disposed proximate the first variable feature and a second heating element disposed proximate the second variable feature.

20. The apparatus of claim 19, further comprising a controller in communication with the first and second heating elements, wherein the controller is configured to operate the first heating element independently of the second heating element.

Images