A height-adjustable top pin member and wafer processing apparatus

Abstract

This invention relates to the field of wafer processing equipment technology, and more particularly to a height-adjustable ejector pin assembly and wafer processing equipment, comprising a fixed bracket, a threaded rod, an ejector pin body, an ejector pin sleeve, and an adjusting component; the ejector pin sleeve has a recessed mounting groove from top to bottom; the adjusting component is rotatably disposed at the open end of the mounting groove; the ejector pin body is axially movable within the mounting groove, with the top of the ejector pin body penetrating the adjusting component and connected to the adjusting component via a threaded pair; the fixed bracket is disposed on the inner wall of the process cavity, and the fixed bracket has a threaded hole penetrating along the axial direction of the process cavity; the threaded rod is fixedly disposed at the bottom of the ejector pin sleeve and threadedly inserted into the threaded hole; this invention, through the cooperation of the ejector pin sleeve, the fixed bracket, and the threaded rod, avoids the direct application of tightening force to the ejector pin body during tightening, significantly reducing the risk of fracture of the brittle ejector pin body, thereby improving the reliability and service life of the ejector pin assembly.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a height-adjustable ejector pin component and wafer processing equipment. Background Technology

[0002] In semiconductor wafer fabrication, wafers need to be lifted from electrostatic chucks or heated bases by ejector pins for transfer by robotic arms. Traditional ejector pins are typically fixed by being screwed into the base with fine threads, and their height is determined after installation. When a group of ejector pins on the same base are not at the same horizontal level due to installation or wear, on-site adjustment is not possible. The only solution is to replace them with ejector pins that meet the preset target height, which not only increases the complexity of maintenance but also results in significant material waste. Summary of the Invention

[0003] This invention relates to a height-adjustable ejector pin assembly and wafer processing equipment. The purpose is to avoid the direct application of tightening force to the ejector pin body during the tightening process by using the cooperation of the ejector pin sleeve, the fixed bracket and the threaded rod, which significantly reduces the risk of fracture of the brittle ejector pin body, thereby improving the reliability and service life of the ejector pin assembly.

[0004] To achieve the above objectives, the present invention provides a height-adjustable ejector pin component, including a fixed bracket, a threaded rod, an ejector pin body, an ejector pin sleeve, and an adjusting component;

[0005] The ejector sleeve has a recessed mounting groove from top to bottom; the adjusting member is rotatably disposed at the open end of the mounting groove; the ejector body is axially movable in the mounting groove, the top of the ejector body passes through the adjusting member and is connected to the adjusting member through a threaded pair, so that when the adjusting member is screwed, the ejector body moves up and down relative to the ejector sleeve to adjust the height of the ejector body.

[0006] The fixed bracket is disposed on the inner wall of the process cavity, and the fixed bracket is provided with a threaded hole that extends through the axial direction of the process cavity;

[0007] The threaded rod is fixedly disposed at the bottom of the ejector sleeve and threadedly inserted into the threaded hole to fix the ejector body on the fixed bracket.

[0008] Optional components also include anti-rotation parts, elastic elements, and mounting bases;

[0009] The anti-rotation component is sleeved on the ejector pin sleeve body;

[0010] The fixing seat is located on the top of the fixing bracket;

[0011] The elastic element is coaxially sleeved on the ejector pin sleeve, and one end of the elastic element is fixedly connected to the top of the fixed base, while the other end is connected to the bottom of the anti-rotation element. The elastic element is in a compressed state so that the anti-rotation element forms an axial upward resisting force on the adjusting element through the elastic force of the elastic element, thereby increasing the friction between the anti-rotation element and the adjusting element and preventing the adjusting element from resetting and rotating.

[0012] Optionally, the adjusting member and the anti-rotation member are respectively provided with mutually engaging anti-rotation structures on their axially opposite end faces; the anti-rotation structure includes a plurality of anti-rotation protrusions provided on either the adjusting member or the anti-rotation member, and a plurality of anti-rotation recesses provided on the other of the adjusting member or the anti-rotation member for the anti-rotation protrusions to be inserted; through the engagement of the anti-rotation protrusions and anti-rotation recesses, the adjusting member is restricted from resetting and rotating relative to the anti-rotation member when the adjusting member is finished being turned.

[0013] Optionally, the elastic element includes a telescopic rod, a telescopic cylinder, and a telescopic spring. The telescopic rod is fixedly disposed at the bottom of the anti-rotation component, and the telescopic cylinder is fixedly disposed at the top of the fixed base. The telescopic rod is movably disposed inside the telescopic cylinder, and the telescopic spring is wound around the outside of the telescopic rod. The two ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder. By moving the telescopic rod axially within the telescopic cylinder, the anti-rotation component moves axially along the ejector pin sleeve.

[0014] Optionally, the plurality of anti-rotation protrusions are arranged in an array, which consists of several radially arranged, equally spaced, raised annular structures, each of which includes several anti-rotation protrusions arranged circumferentially at equal intervals; the arrangement of the plurality of anti-rotation recesses is consistent with the arrangement of the plurality of anti-rotation protrusions, that is, the plurality of anti-rotation recesses are arranged in an array, which consists of several radially arranged, equally spaced, recessed annular structures, each of which includes several circumferentially arranged anti-rotation recesses.

[0015] Optionally, the threaded pair includes a first helical groove and a second helical groove. The first helical groove is disposed on the circumferential wall of the ejector body and extends axially thereon. The second helical groove is disposed on the inner sidewall of the adjusting member and extends axially thereon. The adjusting member is helically sleeved on the ejector body through the engagement of the second helical groove and the first helical groove.

[0016] Optionally, the ejector pin body further includes a height adjustment adapter, which is coaxially disposed in the mounting groove. One end of the height adjustment adapter is fixedly connected to the bottom of the mounting groove, and the other end is fixedly connected to the bottom of the ejector pin body. The height adjustment adapter adapts to the lifting and lowering movement of the ejector pin body by compression and extension, and constrains the movement of the ejector pin body to only move linearly along the axial direction of the mounting groove.

[0017] Optionally, the height-adjustable ejector pin component further includes an inner collar and an outer cover ring;

[0018] The inner collar is fixedly disposed at the bottom of the adjusting member and movably sleeved on the ejector pin body. The inner collar includes an axial ring segment disposed in the mounting groove and extending along the axial direction of the mounting groove.

[0019] The outer cover ring is fixedly sleeved on the inner side wall of the mounting groove, and the outer cover ring is rotatably sleeved on the outside of the axial ring segment.

[0020] Optionally, a sealing ring is also included, which is fixedly disposed on the inner ring wall of the inner sleeve and movably sleeved on the ejector pin body.

[0021] Optionally, the circumferential outer wall of the adjusting member is provided with a plurality of adjusting grooves extending radially, and the plurality of adjusting grooves are arranged at equal intervals in the circumferential direction.

[0022] To achieve the above objectives, the present invention also provides a wafer processing apparatus, including a process cavity, a wafer carrier stage, and a height-adjustable ejector pin component disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the height-adjustable ejector pin component is movably disposed within the through hole.

[0023] The beneficial effects of this invention are as follows:

[0024] This invention achieves convenient and precise adjustment of the ejector pin height through an innovative design integrating an adjusting component and a threaded pair. Simply turning the adjusting component drives the ejector pin body to move precisely up and down relative to the ejector pin sleeve, allowing operators to fine-tune the ejector pin height on-site without disassembly. This ensures that the tops of multiple ejector pin bodies are coplanar, significantly improving the efficiency of equipment debugging and maintenance, and avoiding material waste caused by ejector pin replacement. Simultaneously, the cooperation of the ejector pin sleeve, fixed bracket, and threaded rod prevents the tightening force from directly acting on the ejector pin body during tightening, significantly reducing the risk of breakage of the brittle ejector pin body, thereby improving the reliability and service life of the ejector pin assembly. Attached Figure Description

[0025] Figure 1This is a schematic diagram of the height-adjustable ejector pin component in an embodiment of the present invention;

[0026] Figure 2 For the present invention Figure 1 A magnified view of the local structure at position A in the embodiment;

[0027] Figure 3 For the present invention Figure 1 An enlarged schematic diagram of the local structure at position B in the embodiment.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Fixed bracket; 101. Threaded hole; 21. Ejector body; 211. First spiral groove; 22. Ejector sleeve; 221. Mounting groove; 23. Adjusting component; 231. Second spiral groove; 3. Threaded rod; 4. Height adjustment adapter; 5. Inner ring; 6. Outer cover ring; 7. Anti-rotation component; 71. Mounting hole; 8. Elastic component; 9. Fixed seat; 10. Anti-rotation protrusion; 11. Anti-rotation recess; 12. Sealing ring. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0031] To address the problems existing in the prior art, embodiments of the present invention provide a height-adjustable ejector pin component, such as... Figure 1 As shown, the height-adjustable ejector pin assembly includes a fixed bracket 1, a threaded rod 3, an ejector pin body 21, an ejector pin sleeve 22, and an adjusting component 23.

[0032] In one embodiment, such as Figure 1As shown, the ejector sleeve 22 has a recessed mounting groove 221 extending from the top to the bottom; the adjusting member 23 is rotatably disposed at the open end of the mounting groove 221; the ejector body 21 is axially movable within the mounting groove 221, the top of the ejector body 21 passes through the adjusting member 23 and is connected to the adjusting member 23 via a threaded pair, so that when the adjusting member 23 is screwed on, the ejector body 21 moves up and down relative to the ejector sleeve 22, thereby adjusting the distance between the top of the ejector body 21 and the fixed bracket 1; in this embodiment, by rotatably disposing the adjusting member 23 at the open end of the mounting groove 221 of the ejector sleeve 22 and forming a threaded pair connection with the ejector body 21, the operator only needs to screw on the adjusting member 23 to drive the ejector body 21 to make precise axial up and down movements within the mounting groove 221, thereby achieving convenient and precise micro-adjustment of the height of the ejector body 21. This not only solves the problems of complex maintenance and material waste caused by the non-adjustable height of the traditional fixed ejector pin body 21, but also ensures that the top of the same set of ejector pin bodies 21 can quickly reach a coplanar state, significantly improving the debugging efficiency and operational reliability of the wafer processing equipment.

[0033] In one embodiment, the ejector sleeve 22 is cylindrical in shape, and its axis is coaxial with the axis of the ejector body 21 to provide stable support and guidance. The outer diameter of the ejector sleeve 22 matches the installation space in the process cavity. The bottom is provided with an interface for fixing and connecting the threaded rod 3, and the top open end is used to accommodate the adjusting member 23 and limit its radial displacement, thereby ensuring the axial accuracy and overall structural rigidity of the ejector body 21 during the lifting and lowering process.

[0034] It should be understood that coaxiality can be understood as the central axis of the ejector sleeve 22 coinciding with the central axis of the ejector body 21. The following coaxiality has similar or the same meaning, and will not be elaborated further.

[0035] In one embodiment, the mounting groove 221 is cylindrical in shape, and its axis is coaxial with the axis of the ejector sleeve 22 to accommodate the ejector body 21 and guide it to move linearly up and down along the axial direction; the depth of the mounting groove 221 is greater than the lifting stroke of the ejector body 21, ensuring that the ejector body 21 is always effectively supported and guided during the adjustment process, while providing installation space for the height adjustment adapter 4 or the sealing structure, ensuring the compactness and movement stability of the overall structure.

[0036] In one embodiment, the structure of the adjusting member 23 can be a cylindrical or annular knob with anti-slip knurling on the outer wall, or a tool interface with an internal hexagonal or cross groove on the top; if a cylindrical knob with anti-slip knurling is used, it is convenient for the operator to make fine adjustments by directly turning the tool through the through hole on the electrostatic chuck, so as to achieve smooth lifting and precise positioning of the ejector pin body 21.

[0037] In one embodiment, such as Figure 1 As shown, the fixed bracket 1 is disposed on the inner wall of the process cavity, and the fixed bracket 1 has a threaded hole 101 that extends through the process cavity along its axial direction. The threaded rod 3 is fixedly disposed at the bottom of the ejector sleeve 22 and threadedly inserted into the threaded hole 101 to fix the ejector sleeve 22 on the fixed bracket 1. By independently setting the fixed bracket 1 on the inner wall of the process cavity and utilizing the cooperation between the threaded rod 3 and the threaded hole 101 on the fixed bracket 1, a reliable connection and fixation between the ejector sleeve 22 (and the ejector body 21 and adjusting component 23 integrated therein) and the process cavity is achieved. This design separates the height adjustment function from the overall fixing function, and can securely lock the entire ejector component on the fixed bracket 1 by tightening the threaded rod 3, effectively preventing unexpected changes in ejector height due to vibration and other factors during equipment operation, thereby ensuring the smoothness of the wafer transfer process and the long-term stability of the process. Meanwhile, this fixing method ensures that the force generated when locking the threaded rod 3 is mainly transmitted through the ejector sleeve 22 and the fixing bracket 1, rather than directly acting on the ejector body 21. This effectively avoids deformation, wear or damage to the ejector body 21 caused by excessive locking force or stress concentration, and further ensures the structural integrity and service life of the ejector components.

[0038] In one embodiment, the fixed bracket 1 is provided with a plurality of threaded holes 101, which are arranged through the process cavity along the axial direction and are used to connect with the threaded rods 3 at the bottom of each ejector sleeve 22, thereby realizing the parallel installation and independent fixation of multiple height-adjustable ejector components in the process cavity, ensuring that the height of each ejector body above the wafer carrier can be adjusted uniformly or separately to meet the process requirements of wafer flat support and precise transfer.

[0039] In one embodiment, such as Figure 2 As shown, the threaded pair includes a first helical groove 211 and a second helical groove 231. The first helical groove 211 is located on the circumferential wall of the ejector body 21 and extends axially thereafter. The second helical groove 231 is located on the inner sidewall of the adjusting member 23 and extends axially thereafter. The adjusting member 23 is helically sleeved on the outside of the ejector body 21 through the engagement of the second helical groove 231 and the first helical groove 211. In this embodiment, by respectively opening the first helical groove 211 and the second helical groove 231 on the circumferential wall of the ejector body 21 and the inner sidewall of the adjusting member 23, and making them mesh to form a helical threaded pair, the rotational motion of the adjusting member 23 can be precisely converted into the axial linear lifting motion of the ejector body 21, thereby achieving fine adjustment of the ejector height.

[0040] Of course, in other embodiments, the threaded pair is not limited to the first helical groove 211 and the second helical groove 231. Other standard threaded pair structures such as trapezoidal threads and triangular threads can also be used to realize transmission. As long as the rotational motion of the adjusting member 23 can be reliably converted into the axial linear motion of the ejector body 21 and has the necessary transmission accuracy and self-locking performance, it is within the protection scope of this invention.

[0041] In one embodiment, such as Figure 1 As shown, the ejector body 21 also includes a height adjustment adapter 4, which is coaxially disposed within the mounting groove 221. One end of the height adjustment adapter 4 is fixedly connected to the bottom of the mounting groove 221, and the other end is fixedly connected to the bottom of the ejector body 21. The height adjustment adapter 4 adapts to the lifting and lowering movement of the ejector body 21 by compression and extension, and constrains the movement of the ejector body 21 to linear lifting and lowering only along the axial direction of the mounting groove 221. The coaxial installation of the height adjustment adapter 4 within the mounting groove 221 of the ejector sleeve 22, with its two ends fixedly connected to the bottom of the groove and the bottom of the ejector body 21 respectively, provides precise axial guidance and constraint for the lifting and lowering movement of the ejector body 21. This effectively prevents radial offset or rotation of the ejector body 21 during adjustment or operation, thereby ensuring the linearity, stability, and accuracy of height adjustment, while also enhancing the overall structural rigidity and resistance to eccentric loads of the ejector component.

[0042] In one embodiment, the height adjustment adapter 4 can be in the form of a flexible corrugated tube or an elastic guide post. If a flexible corrugated tube is used, its two ends are fixedly connected to the bottom of the mounting groove 221 and the bottom of the ejector body 21, respectively. Axial guidance and height compensation are achieved through the expansion and contraction deformation of the corrugated structure, while also having a sealing and dustproof function. If an elastic guide post is used, the ejector body 21 is constrained to move only along the axial direction through a precisely fitted bushing structure, ensuring lifting accuracy and resistance to eccentric loads.

[0043] In one embodiment, the number of height adjustment adapters 4 is one, and the one height adjustment adapter 4 is preferably disposed at the bottom of the ejector body 21; of course, in other embodiments, the number of height adjustment adapters 4 can also be several, for example, evenly distributed along the bottom circumference of the ejector body 21, to adapt to more complex motion constraint requirements, thereby further improving the stability and structural adaptability of the lifting and lowering motion of the ejector body 21.

[0044] In one embodiment, several of the height adjustment adapters 4 are connected end to end along the axial direction to achieve multi-level support in the axial direction.

[0045] In one embodiment, such as Figure 1As shown, the height-adjustable ejector pin component further includes an inner sleeve ring 5 and an outer cover ring 6. The inner sleeve ring 5 is fixedly disposed at the bottom of the adjusting member 23 and movably sleeved outside the ejector pin body 21. The inner sleeve ring 5 includes an axial ring segment disposed within the mounting groove 221 and extending axially along the mounting groove 221. The outer cover ring 6 is fixedly sleeved on the inner sidewall of the mounting groove 221 and rotatably sleeved outside the axial ring segment. In this embodiment, the inner sleeve ring 5 is fixed to the bottom of the adjusting member 23 and movably sleeved outside the ejector pin body 21, while its axial ring segment forms a rotational engagement with the outer cover ring 6. This provides stable radial support and axial guidance for the rotational movement of the adjusting member 23, and effectively avoids direct friction between the adjusting member 23 and the ejector pin sleeve 22, reducing the risk of wear. Thus, while ensuring the smoothness and accuracy of the height adjustment of the ejector pin body 21, the stability and service life of the structure are enhanced.

[0046] In one embodiment, the inner ring 5 can be a split structure or an integral structure. The inner ring 5 is a split structure, consisting of an upper ring cover and a lower ring cylinder connected by threads or snaps, facilitating disassembly, maintenance, and replacement. The lower ring cylinder is the axial ring segment, and the upper ring cover, connected to the top of the lower ring cylinder, is located between the bottom of the adjusting member 23 and the top of the ejector pin sleeve 22. The inner ring 5 is an integral structure, integrally machined, possessing higher structural strength and coaxiality, better ensuring the rotational fit accuracy and long-term stability between its axial ring segment and the outer ring 6.

[0047] In one embodiment, such as Figure 1 and Figure 2 As shown, the height-adjustable ejector pin component also includes a sealing ring 12, which is fixedly disposed on the inner ring wall of the inner sleeve 5 and movably sleeved outside the ejector pin body 21. By fixing the sealing ring 12 to the inner ring wall of the inner sleeve 5 and movably sleeved outside the ejector pin body 21, the dynamic gap between the inner sleeve 5 and the ejector pin body 21 can be effectively filled when the ejector pin body 21 is adjusted in height, thereby preventing external dust, particles, or process atmosphere from entering the mounting groove 221.

[0048] In one embodiment, such as Figure 1As shown, the height-adjustable ejector pin component further includes an anti-rotation component 7, an elastic component 8, and a fixing seat 9. The anti-rotation component 7 is sleeved outside the ejector pin sleeve 22, and the anti-rotation component 7 has a through mounting hole 71 along the axial direction of the ejector pin body 21, so that the anti-rotation component 7 can be movably sleeved outside the ejector pin sleeve 22. The fixing seat 9 is located at the top of the fixing bracket 1. The elastic component 8 is coaxially sleeved outside the ejector pin sleeve 22, and one end of the elastic component 8 is fixedly connected to the top of the fixing seat 9, and the other end is connected to the bottom of the anti-rotation component 7. The elastic component 8 is in a compressed state so that the elastic force of the elastic component 8 causes the anti-rotation component 7 to form an axially upward resisting force on the adjusting component 23, thereby increasing the friction between the anti-rotation component 7 and the adjusting component 23 and preventing the adjusting component 23 from resetting and rotating.

[0049] This embodiment uses the elastic force continuously applied by the elastic element 8 to the anti-rotation element 7 to stably press the anti-rotation element 7 against the bottom of the adjusting element 23. The static friction between the contact surfaces of the two effectively prevents the adjusting element 23 from accidentally rotating in the opposite direction (i.e., resetting rotation) when not operated manually. Thus, after the height of the ejector body 21 is adjusted, the position can be automatically locked without additional locking tools or complicated operations, ensuring the long-term stability and reliability of the ejector support height.

[0050] In one embodiment, such as Figure 3 As shown, the adjusting member 23 and the anti-rotation member 7 are respectively provided with mutually engaging anti-rotation structures on their axially opposite end faces; the anti-rotation structure includes a plurality of anti-rotation protrusions 10 provided on either the adjusting member 23 or the anti-rotation member 7, and a plurality of anti-rotation recesses 11 provided on the other of the adjusting member 23 or the anti-rotation member 7 for the anti-rotation protrusions 10 to be inserted; through the engagement of the anti-rotation protrusions 10 and the anti-rotation recesses 11, the adjusting member 23 is restricted from resetting and rotating relative to the anti-rotation member 7 when the adjusting member 23 is finished being turned.

[0051] In one specific embodiment, such as Figure 3As shown, the bottom of the adjusting member 23 is provided with a plurality of circumferentially arranged anti-rotation protrusions 10 that protrude outward toward the anti-rotation member 7; the anti-rotation member 7 is provided with a plurality of anti-rotation recesses 11 that are recessed from the top to the bottom. The anti-rotation recesses 11 are adapted to the anti-rotation protrusions 10 so that the anti-rotation protrusions 10 are received and accommodated by the anti-rotation protrusions 10, thereby preventing the adjusting member 23 from resetting and rotating relative to the anti-rotation member 7 when the turning is finished. This embodiment provides circumferentially spaced and outwardly protruding anti-rotation protrusions 10 at the bottom of the adjusting member 23, which interlock with the anti-rotation recesses 11 at the top of the anti-rotation member 7, forming a mechanical interlocking mechanism. When the adjusting member 23 rotates to the target position under the action of external force, the anti-rotation protrusions 10 adaptively embed into the corresponding anti-rotation recesses 11. After the external force is removed, the elastic force of the elastic member 8 causes the anti-rotation member 7 to form an axially upward resisting force on the adjusting member 23, thereby effectively resisting the unexpected rotation of the adjusting member 23 due to vibration or external torque, achieving more reliable position locking, and further improving the long-term stability after the pin height is adjusted.

[0052] In one embodiment, the anti-rotation protrusion 10 and the anti-rotation recess 11 can be in the form of a combination of conical teeth and conical grooves, or in the form of a nested hemispherical protrusion and an arc-shaped groove. The conical tooth structure achieves unidirectional self-locking through the mutual interlocking of the inclined sidewalls, which is suitable for scenarios that need to resist large rotational torque. The hemispherical protrusion, through the flexible fit between the arc surface and the groove, provides sufficient anti-rotation resistance while reducing contact stress and avoiding wear caused by frequent meshing. Both structures can achieve reliable mechanical interlocking through the shape and position adaptation of the protrusion and the groove, effectively preventing the adjustment member 23 from being accidentally reset.

[0053] In one embodiment, the elastic element 8 includes a telescopic rod, a telescopic cylinder, and a telescopic spring. The telescopic rod is fixedly disposed at the bottom of the anti-rotation element 7, and the telescopic cylinder is fixedly disposed at the top of the fixed base 9. The telescopic rod is axially movable inside the telescopic cylinder, and the telescopic spring is wound around the outside of the telescopic rod. The two ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder. By moving the telescopic rod axially in the telescopic cylinder, the anti-rotation element 7 moves axially along the ejector pin sleeve 22. The advantage of this combination of telescopic rod, telescopic cylinder, and telescopic spring is that by forming a precisely fitted guide pair between the telescopic rod and the telescopic cylinder, and by having the telescopic spring provide a continuous elastic preload, it can ensure that the anti-rotation component 7 maintains a stable linear motion trajectory during the axial movement of the ejector sleeve 22, effectively preventing skewing or jamming. At the same time, this structure can evenly transmit the elastic force to the anti-rotation component 7, making it stably press against the bottom of the adjusting component 23. This achieves frictional control for anti-rotation and improves the overall motion accuracy and reliability of the structure through its guiding effect.

[0054] Of course, in other embodiments, the elastic element 8 can also be a disc spring assembly, a wave elastic washer, or a pneumatic damping structure. If a disc spring assembly is used, a stable axial preload and a large deformation stroke can be provided by the series or parallel combination of multiple disc springs to meet the needs of different anti-rotation torques. If a wave elastic washer is used, its compact wave structure can achieve lightweight and rapid-response elastic support. The pneumatic damping structure provides buffering and adaptive elastic force through an adjustable air pressure chamber, which can more smoothly maintain the contact pressure between the anti-rotation element 7 and the adjusting element 23 in a vibration environment.

[0055] In one embodiment, a plurality of anti-rotation protrusions 10 are arranged in an array, which is composed of several radially arranged, equally spaced, raised annular structures. Each raised annular structure includes several anti-rotation protrusions 10 arranged circumferentially at equal intervals. The arrangement of the plurality of anti-rotation recesses 11 is adapted to the arrangement of the plurality of anti-rotation protrusions 10. That is, the plurality of anti-rotation recesses 11 are arranged in an array, which is composed of several radially arranged, equally spaced, recessed annular structures. Each recessed annular structure includes several anti-rotation recesses 11 arranged circumferentially at equal intervals.

[0056] In one embodiment, the number of anti-rotation protrusions 10 and anti-rotation recesses 11 can be 6 to 12, and they are evenly and symmetrically distributed around the axis of the ejector pin body 21. This range of numbers can ensure that enough engagement points are provided to achieve reliable anti-rotation while avoiding processing difficulties or stress concentration due to excessively dense structures, thereby achieving the best balance between locking reliability, process feasibility and structural strength.

[0057] In one embodiment, the circumferential outer wall of the adjusting member 23 is provided with a plurality of radially extending adjusting grooves, which are circumferentially evenly spaced. This allows the operator to apply force by inserting a special tool (such as a wrench or adjusting hook) into the adjusting groove through a through hole on an electrostatic chuck. This enables more precise and labor-saving turning of the adjusting member 23 in confined spaces or scenarios requiring greater torque, achieving stable and fine adjustment of the height of the ejector pin body 21. At the same time, the evenly distributed adjusting grooves ensure balanced rotational forces, avoid local stress concentration, and improve the smoothness of the operation and structural durability.

[0058] In one embodiment, the specific number of the adjustment grooves can be 4, 6 or 8, and they are evenly and symmetrically distributed around the circumferential wall of the adjustment member 23. This range of numbers can provide enough tool force application points to ensure ease of operation and torque balance, while avoiding weakening the structural strength of the adjustment member 23 due to too many grooves, thereby achieving the best balance between operability, structural stability and processing feasibility.

[0059] To address the problems existing in the prior art, embodiments of the present invention also provide a wafer processing apparatus, including a process cavity, a wafer carrier stage, and a height-adjustable ejector pin component disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body 21 of the height-adjustable ejector pin component is movably disposed within the through hole. This embodiment integrates the height-adjustable ejector pin component into the process cavity of the wafer processing apparatus, and allows the ejector pin body 21 to movably pass through the through hole of the wafer carrier stage. This enables the ejector pin to accurately lift or place the wafer during its lifting and lowering movement. Simultaneously, the adjustable structure allows for the adjustment of the coplanarity of multiple ejector pin support surfaces, effectively solving the problems of uneven wafer transport and high risk of fragmentation caused by inconsistent heights in traditional fixed ejector pins. This significantly improves the stability of wafer transport and the reliability of the equipment process.

[0060] In one embodiment, the wafer processing equipment can be a plasma etching equipment, a chemical vapor deposition equipment, or a photolithography resist stripping equipment. When applied to an etching equipment, an adjustable pin is used to precisely lift the wafer for transport during the etching process interval. In a deposition equipment, the pin can be adjusted to a specific height to ensure the uniformity of the thermal field of the wafer in the reaction chamber. In a resist stripping equipment, it ensures the smooth lifting and positioning of the wafer during the resist stripping process, thereby meeting the stability requirements of wafer support and transport in different semiconductor process stages.

[0061] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A height adjustable thimble member characterized by, Includes a fixed bracket, a threaded rod, a ejector pin body, an ejector pin sleeve, and an adjusting component; The ejector sleeve has a recessed mounting groove from top to bottom; the adjusting member is rotatably disposed at the open end of the mounting groove; the ejector body is axially movable in the mounting groove, the top of the ejector body passes through the adjusting member and is connected to the adjusting member through a threaded pair, so that when the adjusting member is screwed, the ejector body moves up and down relative to the ejector sleeve to adjust the height of the ejector body. The fixed bracket is disposed on the inner wall of the process cavity, and the fixed bracket is provided with a threaded hole that extends through the axial direction of the process cavity; The threaded rod is fixedly disposed at the bottom of the ejector sleeve and threadedly inserted into the threaded hole to fix the ejector body on the fixed bracket.

2. The height adjustable needle member of claim 1, wherein, It also includes anti-rotation components, elastic components, and mounting bases; The anti-rotation component is sleeved on the ejector pin sleeve body; The fixing seat is located on the top of the fixing bracket; The elastic element is coaxially sleeved on the ejector pin sleeve, and one end of the elastic element is fixedly connected to the top of the fixed base, while the other end is connected to the bottom of the anti-rotation element. The elastic element is in a compressed state so that the anti-rotation element forms an axial upward resisting force on the adjusting element through the elastic force of the elastic element, thereby increasing the friction between the anti-rotation element and the adjusting element and preventing the adjusting element from resetting and rotating.

3. The height-adjustable ejector pin component according to claim 2, characterized in that, The adjusting member and the anti-rotation member are respectively provided with mutually engaging anti-rotation structures on their axially opposite end faces; the anti-rotation structure includes a plurality of anti-rotation protrusions provided on either the adjusting member or the anti-rotation member, and a plurality of anti-rotation recesses provided on the other of the adjusting member or the anti-rotation member for the anti-rotation protrusions to be inserted into; by the engagement of the anti-rotation protrusions and anti-rotation recesses, the adjusting member is restricted from resetting and rotating relative to the anti-rotation member when the adjusting member is finished being turned.

4. The height-adjustable ejector pin component according to claim 2, characterized in that, The elastic element includes a telescopic rod, a telescopic cylinder, and a telescopic spring. The telescopic rod is fixedly disposed at the bottom of the anti-rotation component, and the telescopic cylinder is fixedly disposed at the top of the fixed base. The telescopic rod is movably disposed inside the telescopic cylinder, and the telescopic spring is wound around the outside of the telescopic rod. The two ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder. By moving the telescopic rod axially within the telescopic cylinder, the anti-rotation component moves axially along the ejector pin sleeve.

5. The height-adjustable ejector pin component according to claim 3, characterized in that, The plurality of anti-rotation protrusions are arranged in an array, which consists of several radially arranged, equally spaced, raised annular structures. Each of the raised annular structures contains several anti-rotation protrusions arranged circumferentially at equal intervals. The arrangement of the plurality of anti-rotation recesses is adapted to the arrangement of the plurality of anti-rotation protrusions, that is, the plurality of anti-rotation recesses are arranged in an array, which consists of several radially arranged, equally spaced, recessed annular structures. Each of the recessed annular structures contains several anti-rotation recesses arranged circumferentially at equal intervals.

6. The height-adjustable ejector pin component according to claim 1, characterized in that, The threaded pair includes a first helical groove and a second helical groove. The first helical groove is provided on the circumferential wall of the ejector body and extends axially thereon. The second helical groove is provided on the inner sidewall of the adjusting member and extends axially thereon. The adjusting member is helically sleeved on the ejector body through the engagement of the second helical groove and the first helical groove.

7. The height-adjustable ejector pin component according to claim 1, characterized in that, The ejector pin body also includes a height adjustment adapter, which is coaxially disposed in the mounting groove. One end of the height adjustment adapter is fixedly connected to the bottom of the mounting groove, and the other end is fixedly connected to the bottom of the ejector pin body. The height adjustment adapter adapts to the lifting and lowering movement of the ejector pin body by compression and extension, and constrains the movement of the ejector pin body to only move linearly along the axial direction of the mounting groove.

8. The height-adjustable ejector pin component according to claim 1, characterized in that, It also includes an inner ring and an outer ring; The inner collar is fixedly disposed at the bottom of the adjusting member and movably sleeved on the ejector pin body. The inner collar includes an axial ring segment disposed in the mounting groove and extending along the axial direction of the mounting groove. The outer cover ring is fixedly sleeved on the inner side wall of the mounting groove, and the outer cover ring is rotatably sleeved on the outside of the axial ring segment.

9. The height-adjustable ejector pin component according to claim 8, characterized in that, It also includes a sealing ring, which is fixedly disposed on the inner ring wall of the inner sleeve and movably sleeved on the body of the ejector pin.

10. The height-adjustable ejector pin component according to claim 1, characterized in that, The adjusting member has a plurality of adjusting grooves extending radially on its circumferential outer wall, and the plurality of adjusting grooves are arranged at equal intervals in the circumferential direction.

11. A wafer processing apparatus, characterized in that, The device includes a process cavity, a wafer carrier stage, and a height-adjustable ejector pin assembly as described in any one of claims 1 to 10 disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the height-adjustable ejector pin assembly is movably disposed within the through hole.

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