Ozone water system with circulation function

Abstract

The invention provides an ozone water system with a circulation function. According to the system, a gas inlet control module is arranged on a gas input pipeline, a liquid inlet control module is arranged on a pure water input pipeline, a liquid outlet control module is arranged on an ozone water output pipeline, and an ozone water concentration detector, a circulation control module and a first jet device are arranged on a circulation pipeline; gas input, pure water input and ozone water output are conveniently controlled according to concentration information of liquid in the liquid storage defoaming barrel, meanwhile, a closed-loop mode of internal circulation of the water pump, the ozone water concentration detector, the circulation control module and the first jet device and the ozone generator is formed, and the needed ozone water concentration can be quickly responded. The ozone water system has an ozone water circulation function, and is high in automation degree, low in use cost and more beneficial to industrial popularization.

Description

Technical Field

[0001] This invention relates to the field of ozone water preparation technology, and more particularly to an ozone water system with a circulation function. Background Technology

[0002] Ozone water has the advantages of strong oxidizing properties and zero pollution emissions, making it widely used in the cleaning process of chip or wafer manufacturing. However, traditional ozone water systems require stable concentration and flow rate, and continuously discharge from the moment they are turned on, resulting in high operating costs and hindering large-scale promotion. Summary of the Invention

[0003] To address the problems of continuous discharge and high operating costs associated with existing ozone water systems, this invention provides an ozone water system with a circulation function.

[0004] This invention discloses an ozone water system with a circulation function, comprising an ozone supply unit, a pure water supply unit, a gas-liquid mixing unit, an ozone water output unit, and a control unit. The ozone supply unit includes a gas input pipeline, an air intake control module, and an ozone generator. The gas input pipeline is connected to the ozone generator. The air intake control module is located on the gas input pipeline. The output terminal of the control unit is electrically connected to the input terminal of the air intake control module and the input terminal of the ozone generator. The pure water supply unit includes a pure water input pipeline and a liquid inlet control module. The liquid inlet control module is located on the pure water input pipeline, and the output terminal of the control unit is electrically connected to the input terminal of the liquid inlet control module. The gas-liquid mixing unit includes a liquid storage defoaming tank and a gas-liquid mixing module. The gas-liquid mixing module includes a circulation pipeline, a first ejector, an ozone water concentration detector, a water pump, and a circulation control module. The unit consists of a circulation pipeline with its inlet and outlet ends connected to a storage defoaming tank. A water pump, ozone concentration detector, circulation control module, and first ejector are sequentially arranged along the liquid flow direction on the circulation pipeline. A pure water input pipeline is connected to the circulation pipeline between the circulation control module and the first ejector. An ozone generator is connected to the first ejector. The output of the ozone concentration detector is electrically connected to the input of the control unit. The output of the control unit is electrically connected to the input of the water pump. The output of the control unit is also electrically connected to the input of the circulation control module. The ozone water output unit includes an ozone water output pipeline and an outlet control module. The outlet control module is located on the ozone water output pipeline and is connected to the circulation pipeline between the circulation control module and the ozone concentration detector. The output of the control unit is electrically connected to the input of the outlet control module.

[0005] Preferably, a first liquid level sensor and a second liquid level sensor are sequentially arranged on the side wall of the liquid storage defoaming tank from bottom to top. The output terminals of the first liquid level sensor and the second liquid level sensor are both electrically connected to the input terminal of the control unit. The inlet terminal of the circulation pipeline is connected to the side wall of the liquid storage defoaming tank at a position below the first liquid level sensor.

[0006] Furthermore, a lower liquid level sensor is provided on the side wall of the liquid storage defoaming tank, located below the first liquid level sensor, and the output end of the lower liquid level sensor is electrically connected to the input end of the control unit.

[0007] Furthermore, an upper liquid level sensor is installed on the side wall of the liquid storage defoaming tank, located above the second liquid level sensor. The output end of the upper liquid level sensor is electrically connected to the input end of the control unit.

[0008] Furthermore, the system also includes an alarm unit, with the output of the control unit electrically connected to the input of the alarm unit.

[0009] Preferably, the ozone supply unit also includes an ozone intake control module and an ozone gas input pipeline. The ozone generator is connected to the first ejector through the ozone gas input pipeline. The ozone intake control module is located on the ozone gas input pipeline, and the output terminal of the control unit is electrically connected to the input terminal of the ozone intake control module.

[0010] Furthermore, the ozone water system also includes an exhaust gas treatment unit, which includes an exhaust gas output pipeline and an ozone destroyer. One end of the exhaust gas output pipeline is connected to the top of the liquid storage defoaming tank, and the other end of the exhaust gas output pipeline is connected to the ozone destroyer. The output end of the control unit is electrically connected to the input end of the ozone destroyer.

[0011] Furthermore, the system also includes a gas bypass unit, which includes a gas bypass pipeline and a gas bypass control module. The inlet end of the gas bypass pipeline is connected to the ozone gas input pipeline at the position between the ozone generator and the ozone inlet control module. The outlet end of the gas bypass pipeline is connected to the exhaust gas output pipeline. The gas bypass control module is located on the gas bypass pipeline, and the output end of the control unit is electrically connected to the input end of the gas bypass control module.

[0012] Preferably, the liquid storage defoaming tank is equipped with a stirring device.

[0013] Compared with existing technologies, the ozone water system with circulation function of the present invention, by setting an inlet control module on the gas input pipeline, a liquid inlet control module on the pure water input pipeline, a liquid outlet control module on the ozone water output pipeline, and an ozone water concentration detector, circulation control module, and a first ejector on the circulation pipeline, facilitates the control of gas input, pure water input, and ozone water output based on the concentration information of the liquid in the storage defoaming tank. Simultaneously, it forms a closed-loop mode between the water pump, ozone water concentration detector, circulation control module, first ejector internal circulation, and ozone generator, enabling rapid response to the required ozone water concentration. This ozone water system has ozone water circulation function, a high degree of automation, low operating costs, and is more conducive to industrial promotion. Attached Figure Description

[0014] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of an ozone water system with a circulation function according to an embodiment of the present invention. Detailed Implementation

[0016] To provide a further understanding of the purpose, structure, features, and functions of the present invention, detailed descriptions are provided below with reference to specific embodiments.

[0017] In the description of this invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0018] Please see Figure 1 The present invention discloses an ozone water system with a circulation function, comprising an ozone supply unit 10, a pure water supply unit 20, a gas-liquid mixing unit 30, an ozone water output unit 40, and a control unit (not shown in the figure). The ozone supply unit 10 is connected to the gas-liquid mixing unit 30 to supply ozone to the gas-liquid mixing unit 30, the pure water supply unit 20 is connected to the gas-liquid mixing unit 30 to supply raw material liquid to the gas-liquid mixing unit 30, and the ozone water output unit 40 is connected to the gas-liquid mixing unit 30 to output ozone water.

[0019] The ozone supply unit 10 includes a gas input pipeline 11, an air intake control module 12, and an ozone generator 13. The gas input pipeline 11 is connected to the ozone generator 13. The air intake control module 12 is installed on the gas input pipeline 11 to control whether gas can flow into the ozone generator 13 through the gas input pipeline 11. The ozone generator 13 is connected to the gas-liquid mixing unit 30 to supply ozone to the gas-liquid mixing unit 30. The output terminal of the control unit is electrically connected to the input terminal of the air intake control module 12 to control the control state of the air intake control module 12. The output terminal of the control unit is electrically connected to the input terminal of the ozone generator 13 to control the working state of the ozone generator 13.

[0020] The pure water supply unit 20 includes a pure water inlet pipe 21 and a liquid inlet control module 22. The pure water inlet pipe 21 is connected to the gas-liquid mixing unit 30 to supply raw material liquid to the gas-liquid mixing unit 30. The liquid inlet control module 22 is installed on the pure water inlet pipe 21 to control whether the raw material liquid can flow into the gas-liquid mixing unit 30 through the pure water inlet pipe 21. The output terminal of the control unit is electrically connected to the input terminal of the liquid inlet control module 22 to control the control state of the liquid inlet control module 22.

[0021] The gas-liquid mixing unit 30 includes a liquid storage defoaming tank 31 and a gas-liquid mixing module 32. The gas-liquid mixing module 32 includes a circulation pipeline 321, a first ejector 322, an ozone water concentration detector 323, a water pump 324, and a circulation control module 325. The inlet and outlet ends of the circulation pipeline 321 are connected to the liquid storage defoaming tank 31. The water pump 324, the ozone water concentration detector 323, the circulation control module 325, and the first ejector 322 are sequentially arranged on the circulation pipeline 321 along the liquid flow direction to ensure the accuracy of the mixed liquid concentration detected by the ozone water concentration detector 323 in the liquid storage defoaming tank 31. The pure water input pipeline 21 is located on the circulation pipeline 321 and is connected to the circulation control module 325. The positional connection between module 325 and the first ejector 322 enables the supply of raw material liquid to the first ejector 322. The ozone generator 13 is connected to the first ejector 322 to ensure thorough gas-liquid mixing, thereby enabling rapid response to the required ozone water concentration. The output of the ozone water concentration detector 323 is electrically connected to the input of the control unit to transmit mixed liquid concentration information to the control unit. The output of the control unit is electrically connected to the input of the water pump 324 to control the working state of the water pump 324. The output of the control unit is electrically connected to the input of the circulation control module 325 to control the control state of the circulation control module 325, thereby controlling whether ozone water flows to the first ejector 322.

[0022] The ozone water output unit 40 includes an ozone water output pipeline 41 and an output control module 42. The output control module 42 is installed on the ozone water output pipeline 41 to control whether ozone water can flow out through the ozone water output pipeline 41. The ozone water output pipeline 41 is connected to the circulation pipeline 321 at the position between the circulation control module 325 and the ozone water concentration detector 323 to ensure that the concentration of ozone water output through the ozone water output pipeline 41 meets the requirements. The output terminal of the control unit is electrically connected to the input terminal of the output control module 42 to control the control state of the output control module 42.

[0023] When the control unit receives a signal from an external machine requesting ozone water, including the target concentration and target flow rate of the required ozone water, the control unit controls the water pump 324 to operate, allowing the liquid in the storage defoaming tank 31 to flow through the ozone water concentration detector 323. The ozone water concentration detector 323 acquires the liquid concentration information and transmits it to the control unit. If the control unit receives the liquid concentration transmitted from the ozone water concentration detector 323, which equals the target concentration, the control unit controls the air intake control module 12 to prevent gas from entering through the gas input pipe 11. Ozone generator 13, thus unable to produce ozone gas, the control unit controls the liquid inlet control module 22 to prevent the raw material liquid from flowing to the ejector 322 via the pure water inlet pipe 21, the control unit controls the circulation control module 325 to prevent the liquid in the circulation pipe 321 from flowing to the first ejector 322, and the control unit controls the liquid outlet control module 42 to output ozone water at the target flow rate through the ozone water outlet pipe 41; if the control unit receives a liquid concentration less than the target concentration from the ozone water concentration detector 323, the control unit controls the liquid inlet control module 22 to prevent the raw material liquid from flowing to the first ejector 322. The liquid cannot flow to the ejector 322 via the pure water inlet pipe 21. The control unit controls the circulation control module 325 to allow the liquid in the circulation pipe 321 to flow to the first ejector 322. The control unit controls the air intake control module 12 to allow gas to enter the ozone generator 13 via the gas inlet pipe 11 to generate ozone gas. The ozone gas enters the first ejector 322 and mixes with the liquid. The control unit controls the liquid outlet control module 42 to prevent the ozone water outlet pipe 41 from outputting ozone water. If the control unit receives a liquid concentration greater than that from the ozone water concentration detector 323... The control unit controls the air intake control module 12 to prevent gas from entering the ozone generator 13 through the gas input pipe 11, thus preventing the generation of ozone gas. The control unit controls the circulation control module 325 to allow the liquid in the circulation pipe 321 to flow to the first ejector 322. The control unit controls the liquid inlet control module 22 to allow the raw material liquid to flow to the ejector 322 through the pure water input pipe 21. The raw material liquid mixes with the mixed liquid entering the circulation pipe 321. The control unit controls the liquid outlet control module 42 to prevent the ozone water outlet pipe 41 from outputting ozone water.

[0024] When the control unit receives a signal from an external machine indicating that ozone water is not needed, the control unit controls the liquid outlet control module 42 to prevent the ozone water outlet pipeline 41 from outputting ozone water.

[0025] The ozone water system of this embodiment, by setting an air intake control module 12 on the gas input pipeline 11, a liquid inlet control module on the pure water input pipeline, a liquid outlet control module 42 on the ozone water output pipeline 41, and an ozone water concentration detector 323, a circulation control module 325, and a first ejector 322 on the circulation pipeline 321, facilitates the control of gas input, pure water input, and ozone water output based on the concentration information of the liquid in the storage defoaming tank 31. Simultaneously, it forms a closed-loop mode between the water pump 324, the ozone water concentration detector 323, the circulation control module 325, the first ejector 322, and the ozone generator 13, enabling rapid response to the required ozone water concentration. This ozone water system has an ozone water circulation function, a high degree of automation, low operating costs, and is more conducive to industrial promotion.

[0026] In a preferred embodiment, in order to control the liquid level in the defoaming tank 31, a first liquid level sensor 311 and a second liquid level sensor 312 are sequentially arranged on the side wall of the defoaming tank 31 from bottom to top. The output terminals of the first liquid level sensor 311 and the second liquid level sensor 312 are electrically connected to the input terminal of the control unit. The inlet of the circulation pipe 321 is connected to the side wall of the defoaming tank 31 below the first liquid level sensor to ensure that there is always a mixture entering the circulation pipe 321.

[0027] When ozone water needs to be output, if the control unit does not receive the liquid level information transmitted by the first liquid level sensor 311, that is, the liquid level in the storage defoaming tank 31 is below the first liquid level sensor 311, the control unit controls the liquid inlet control module 22 to make the raw material liquid flow to the first ejector 322 through the pure water input pipe 21 to replenish the raw material liquid; if the control unit receives the liquid level information transmitted by the second liquid level sensor 312, that is, the liquid level in the storage defoaming tank 31 reaches the position of the second liquid level sensor 312, the control unit controls the liquid inlet control module 22 to prevent the raw material liquid from flowing to the first ejector 322 through the pure water input pipe 21, so that the liquid level in the storage defoaming tank 31 is maintained between the first liquid level sensor 311 and the second liquid level sensor 312.

[0028] By setting a liquid inlet control module 22 on the pure water inlet pipeline 21 and setting a first liquid level sensor 311 and a second liquid level sensor 312 sequentially from bottom to top on the side wall of the liquid storage defoaming tank 31, it is convenient to control the input of raw material liquid based on the liquid level information in the liquid storage defoaming tank 31.

[0029] In order to monitor the minimum warning liquid level in the liquid storage defoaming tank 31, a lower liquid level sensor 313 is provided on the side wall of the liquid storage defoaming tank 31 below the first liquid level sensor 311. The output terminal of the lower liquid level sensor 313 is connected to the control unit for data transmission.

[0030] In order to monitor the highest warning level in the liquid storage defoaming tank 31, an upper liquid level sensor 314 is provided on the side wall of the liquid storage defoaming tank 31 above the second liquid level sensor 312. The output terminal of the upper liquid level sensor 314 is connected to the control unit for data transmission.

[0031] Both the minimum and maximum warning liquid levels indicate that the system is in an unstable state. In order to promptly alert the staff, the ozone water system also includes an alarm unit (not shown in the figure). The output terminal of the control unit is electrically connected to the input terminal of the alarm unit. When the control unit receives the liquid level information transmitted by the lower liquid level sensor 313 or the upper liquid level sensor 314, the control unit controls the alarm unit to issue sound, light, and electrical alarm information.

[0032] When the control unit receives a liquid concentration from the ozone water concentration detector 323 that equals the target concentration, in order to quickly prevent ozone gas from entering the first ejector 322, the ozone supply unit also includes an ozone intake control module 14 and an ozone gas input pipe 15. The ozone generator 13 is connected to the first ejector 322 through the ozone gas input pipe 15. The ozone intake control module 14 is installed on the ozone gas input pipe 15 to control whether ozone gas can enter the first ejector 322 through the ozone gas input pipe 15. The output terminal of the control unit is electrically connected to the input terminal of the ozone intake control module 14 to control the control state of the ozone intake control module 14.

[0033] When the control unit receives a liquid concentration from the ozone water concentration detector 323 that is equal to or greater than the target concentration, the control unit controls the ozone intake control module 14 to prevent ozone gas from entering the first ejector 322 through the ozone gas input pipe 15; when the control unit receives a liquid concentration from the ozone water concentration detector 323 that is less than the target concentration, the control unit controls the ozone intake control module 14 to allow ozone gas to enter the first ejector 322 through the ozone gas input pipe 15.

[0034] In order to treat undissolved ozone gas and avoid environmental pollution, please continue reading. Figure 1The ozone water system also includes an exhaust gas treatment unit 60, which includes an exhaust gas output pipe 61 and an ozone destroyer 62. One end of the exhaust gas output pipe 61 is connected to the top of the liquid storage defoaming tank 31, and the other end of the exhaust gas output pipe 61 is connected to the ozone destroyer 62. The output end of the control unit is electrically connected to the input end of the ozone destroyer 62 to control the ozone destroyer 62 to work.

[0035] To ensure that the gas pressure in the ozone gas input line 15 remains within a safe range, the system also includes a gas bypass unit 50. The gas bypass unit 50 includes a gas bypass line 51 and a gas bypass control module 52. The inlet end of the gas bypass line 51 is connected to the ozone gas input line 15 at a position between the ozone generator 13 and the ozone intake control module 14. The outlet end of the gas bypass line 51 is connected to the exhaust gas output line 61. The gas bypass control module 52 is installed on the gas bypass line 51 to control whether ozone gas flows through the gas bypass line 51 to the exhaust gas output line 61. The output end of the control unit is electrically connected to the input end of the gas bypass control module 52 to control the control state of the gas bypass control module 52.

[0036] When the control unit receives a liquid concentration from the ozone water concentration detector 323 that is equal to or greater than the target concentration, the control unit controls the gas bypass control module 52 to allow ozone gas to flow through the gas bypass pipe 51 to the exhaust gas output pipe 61; when the control unit receives a liquid concentration from the ozone water concentration detector 323 that is less than the target concentration, the control unit controls the gas bypass control module 52 to prevent ozone gas from flowing through the gas bypass pipe 51 to the exhaust gas output pipe 61.

[0037] Preferably, a stirring device can be installed inside the liquid storage defoaming tank 31 to make the liquid concentration inside the liquid storage defoaming tank 31 more uniform.

[0038] The ozone water system with circulation function of the present invention, by setting an inlet control module on the gas input pipeline, a liquid inlet control module on the pure water input pipeline, a liquid outlet control module on the ozone water output pipeline, and an ozone water concentration detector, circulation control module, and a first ejector on the circulation pipeline, facilitates the control of gas input, pure water input, and ozone water output based on the concentration information of the liquid in the storage defoaming tank. Simultaneously, it forms a closed-loop mode between the water pump, ozone water concentration detector, circulation control module, the internal circulation of the first ejector, and the ozone generator, enabling rapid response to the required ozone water concentration. This ozone water system has ozone water circulation function, a high degree of automation, low operating costs, and is more conducive to industrial promotion.

[0039] The present invention has been described by the above-described embodiments; however, these embodiments are merely examples for implementing the present invention. Furthermore, the technical features involved in the different embodiments of the present invention described above can be combined with each other as long as they do not conflict with each other. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any modifications and refinements made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. An ozone water system with a circulation function, characterized in that, The ozone supply unit, the pure water supply unit, the gas-liquid mixing unit, the ozone water output unit, and the control unit, The ozone supply unit includes a gas input pipeline, an air inlet control module and an ozone generator, the gas input pipeline is connected with the ozone generator, the air inlet control module is arranged on the gas input pipeline, the output end of the control unit is electrically connected with the input end of the air inlet control module, and the output end of the control unit is electrically connected with the input end of the ozone generator. The pure water supply unit includes a pure water input pipeline and a liquid inlet control module, the liquid inlet control module is arranged on the pure water input pipeline, and the output end of the control unit is electrically connected with the input end of the liquid inlet control module. The gas-liquid mixing unit includes a liquid storage and defoaming barrel and a gas-liquid mixing module, the gas-liquid mixing module includes a circulating pipeline, a first jet device, an ozone water concentration detector, a water pump and a circulating control module, the liquid inlet end and the liquid outlet end of the circulating pipeline are connected with the liquid storage and defoaming barrel, the water pump, the ozone water concentration detector, the circulating control module and the first jet device are sequentially arranged on the circulating pipeline along the liquid flow direction, the pure water input pipeline is connected with a position between the circulating control module and the first jet device on the circulating pipeline, the ozone generator is connected with the first jet device, the output end of the ozone water concentration detector is electrically connected with the input end of the control unit, the output end of the control unit is electrically connected with the input end of the water pump, and the output end of the control unit is electrically connected with the input end of the circulating control module. The ozone water output unit includes an ozone water output pipeline and a liquid outlet control module, the liquid outlet control module is arranged on the ozone water output pipeline, the ozone water output pipeline is connected with a position between the circulating control module and the ozone water concentration detector on the circulating pipeline, and the output end of the control unit is electrically connected with the input end of the liquid outlet control module.

2. The ozone water system having a circulation function according to claim 1, wherein, The side wall of the liquid storage and defoaming barrel is sequentially provided with a first liquid level sensor and a second liquid level sensor from bottom to top, the output end of the first liquid level sensor and the output end of the second liquid level sensor are electrically connected with the input end of the control unit, and the liquid inlet end of the circulating pipeline is connected with a position below the first liquid level sensor on the side wall of the liquid storage and defoaming barrel.

3. The ozone water system having a circulation function according to claim 2, wherein, A lower liquid level sensor is arranged at a position below the first liquid level sensor on the side wall of the liquid storage and defoaming barrel, and the output end of the lower liquid level sensor is electrically connected with the input end of the control unit.

4. The ozone water system having a circulation function according to claim 2 or 3, characterized by, An upper liquid level sensor is arranged at a position above the second liquid level sensor on the side wall of the liquid storage and defoaming barrel, and the output end of the upper liquid level sensor is electrically connected with the input end of the control unit.

5. The ozone water system having a circulation function according to claim 4, wherein The alarm unit is further included, and the output end of the control unit is electrically connected with the input end of the alarm unit.

6. The ozone water system having a circulation function according to claim 1, wherein, The ozone supply unit further comprises an ozone gas input pipeline and an ozone gas inlet control module, the ozone generator is connected with the first jet device through the ozone gas input pipeline, and the ozone gas inlet control module is arranged on the ozone gas input pipeline.

7. The ozone water system having a circulation function according to claim 6, wherein The tail gas treatment unit comprises a tail gas output pipeline and an ozone destroyer, one end of the tail gas output pipeline is connected with the top of the liquid storage defoaming barrel, the other end of the tail gas output pipeline is connected with the ozone destroyer, and the output end of the control unit is electrically connected with the input end of the ozone destroyer.

8. The ozone water system having a circulation function according to claim 7, wherein The gas bypass unit comprises a gas bypass pipeline and a gas bypass control module, the gas inlet end of the gas bypass pipeline is connected with a position between the ozone generator and the ozone gas inlet control module on the ozone gas input pipeline, the gas outlet end of the gas bypass pipeline is connected with the tail gas output pipeline, the gas bypass control module is arranged on the gas bypass pipeline, and the output end of the control unit is electrically connected with the input end of the gas bypass control module.

9. The ozone water system having a circulation function according to claim 1, wherein, The liquid storage defoaming barrel is provided with a stirring device.

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