Three-axis integrated precision motion platform

Abstract

The invention discloses a three-axis integrated precision motion platform which comprises a bottom plate, an X-axis adjusting assembly is arranged at the top of the bottom plate, a middle plate is arranged on the X-axis adjusting assembly, a Y-axis adjusting assembly is arranged on the middle plate, an upper plate is arranged on the Y-axis adjusting assembly, and a guide assembly used for supporting and guiding the middle plate is arranged on the bottom plate. An adjusting mechanism used for adjusting the position of the square frame is arranged in the concave frame, a supporting frame is fixedly arranged in the square frame, and a supporting wheel is rotationally arranged in the supporting frame through a shaft. The adverse effect of overload on the motion precision of the platform is effectively avoided, after the supporting wheels are attached to the strip-shaped grooves, the X-axis adjusting assembly operates normally, the upper limit of the bearing capacity of the platform can be remarkably improved, the overall stress state can be optimized, the contact stress can be reduced, and the motion stability of the platform can be guaranteed.

Description

Technical Field

[0001] This invention relates to the field of precision manufacturing and testing technology, specifically a three-axis integrated precision motion platform. Background Technology

[0002] Precision motion platforms are key devices for achieving micron- and even nanometer-level positioning. Currently, most XY-Theta three-degree-of-freedom motion platforms adopt a series stacked structure. The X-axis is a long-stroke precision linear module responsible for carrying the Y-axis and Theta axis along the X direction. The Y-axis is an independent linear module with a movement direction perpendicular to the X-axis, carrying the Theta axis along the Y direction. The Theta axis is an independent rotary platform, mounted on the Y-axis slider and located at the top of the stacked structure. It consists of a turntable body, bearings, drive source, and angle encoder. The components are arranged in a layer-by-layer stacked layout from bottom to top using X-axis, Y-axis, and Theta axis rotary tables. Mechanically, they are rigidly connected by mounting base plates and connectors. In terms of control, a multi-axis motion controller works in conjunction with independent drives to achieve complex positioning.

[0003] Chinese patent CN118204789A discloses a five-axis motion platform, including an X-axis slide; a Y-axis slide connected to a slide base of the X-axis slide; a Z-axis base connected to the slide base of the Y-axis slide; a Z-axis slide slidably connected to the Z-axis base; a Z-axis motor mounted on the Z-axis base, with its output shaft parallel to either the X or Y direction; a Z-axis guide seat movably mounted on the Z-axis base, connected to the output shaft of the Z-axis motor, and movably connected to the Z-axis slide; the Z-axis guide seat has a displacement guide surface that abuts against the Z-axis slide, with different positions of the displacement guide surface at different distances from the output shaft of the Z-axis motor; an X-axis rotary table connected to the Z-axis slide; and a Y-axis rotary table connected to a rotating base of the X-axis rotary table. This application achieves both a more compact structure for the motion platform and the ability to maintain high-precision adjustment of the motion platform even after prolonged use.

[0004] Existing three-axis integrated precision motion platforms mostly adopt a stacked hierarchical layout, with power and support modules assembled from top to bottom. The bottom adjustment module, as the core load-bearing component, must not only drive its own linear motion but also bear the weight of the Y and Z axis modules above, as well as the combined load of the end effector and the workpiece. When the load exceeds its rated threshold, or under heavy-load conditions such as heavy workpiece handling or high-torque machining, key components of the bottom module, such as the guide rails and base, will experience compressive and shear stresses far exceeding design values. This can lead to micro-deformation of the guide rails and warping of the base, disrupting the precision fit clearance of the kinematic pairs and causing drift in positioning and repeatability accuracy. Simultaneously, the increased contact stress between the guide rails and sliders increases motion resistance, making it more prone to creeping at low speeds, resulting in nonlinear deviations in the motion trajectory and ultimately affecting the overall coordinated motion accuracy of the three-axis platform. Therefore, it is necessary to develop a three-axis integrated precision motion platform to solve these problems. Summary of the Invention

[0005] The purpose of this invention is to provide a three-axis integrated precision motion platform to solve the problems mentioned in the background art.

[0006] A three-axis integrated precision motion platform includes a base plate, an X-axis adjustment assembly is provided on the top of the base plate, a middle plate is provided on the X-axis adjustment assembly, a Y-axis adjustment assembly is provided on the middle plate, an upper plate is provided on the Y-axis adjustment assembly, and a Theta axis adjustment assembly is provided inside the upper plate.

[0007] The base plate is provided with a guide component for supporting and guiding the middle plate. The base plate has symmetrically arranged strip grooves inside. A load-bearing plate is fixedly installed at the bottom of the middle plate. The load-bearing plate has an array of concave frames corresponding to the strip grooves inside. A square frame is inserted inside the concave frame. An adjustment mechanism for adjusting the position of the square frame is provided inside the concave frame. A support frame is fixedly installed inside the square frame. A support wheel is rotatably installed inside the support frame via a shaft. A conductive component is installed on the support wheel.

[0008] The base plate is equipped with a power distribution module and a magnetic levitation component for assisting the movement of the middle plate.

[0009] Preferably, the X-axis adjustment assembly includes a lower axis guide rail and a lower axis linear motor module. The lower axis guide rail is symmetrically arranged on the base plate and is slidably connected to the middle plate. The lower axis linear motor module is arranged on the base plate and the mover of the lower axis linear motor module is fixedly connected to the middle plate.

[0010] The Y-axis adjustment assembly includes an upper axis guide rail and an upper axis linear motor module. The upper axis guide rail is symmetrically arranged on the middle plate, and the middle plate is engaged with the upper plate. The upper axis linear motor module is arranged on the top of the middle plate, and the mover of the upper axis linear motor module is fixedly connected to the upper plate.

[0011] The Theta axis adjustment assembly includes a mounting plate, a stage, a base, a bearing module, a bearing housing, and a stator coil. The mounting plate is fixedly installed inside the upper plate, and the base is fixedly installed at the bottom of the mounting plate. The bearing module is installed inside the base, and the bearing housing is connected to the outer ring of the bearing module. The bottom of the stage is fixedly connected to the top of the bearing housing. The stator coil is installed inside the base and is located on one side of the bearing housing. The bearing housing is a magnetic sheet integrated structure.

[0012] Preferably, the guide assembly includes a guide rail, a limiting groove, a concave groove, and rolling bearings. The guide rail is fixedly mounted on the base plate, the limiting grooves are symmetrically arranged on the guide rail, the concave grooves are engaged on the guide rail, and the top of the concave grooves is fixedly connected to the load-bearing plate. The rolling bearing array is arranged inside the limiting groove, and the inner ring of the rolling bearing is fixedly connected to the inner wall of the concave groove through a shaft.

[0013] Preferably, the base plate has an installation groove inside, and the installation groove is connected to a corresponding strip groove. A conductive plate is fixedly installed inside the installation groove, and the conductive plate is electrically connected to the power distribution module.

[0014] Preferably, the magnetic levitation assembly includes a first mounting plate, a permanent magnet block, a second mounting plate, and an electromagnet. The first mounting plate is symmetrically mounted on the base plate and is located on one side of the limiting groove. The permanent magnet block is fixedly mounted on the first mounting plate. The second mounting plate, corresponding to the first mounting plate, is fixedly mounted on the bottom of the load-bearing plate. The electromagnet array is mounted on the second mounting plate, and the electromagnet is located directly above the permanent magnet block.

[0015] Preferably, the adjustment mechanism includes a threaded cylinder, a threaded rod, a servo motor, and a limiting component. The threaded cylinder is fixedly disposed at the bottom of the square frame. The outer surface of the threaded rod is threadedly connected to the inside of the threaded cylinder. The servo motor is fixedly disposed inside the concave frame, and the output end of the servo motor is fixedly connected to the end of the threaded rod. The limiting component for guiding and limiting the square frame is disposed inside the concave frame.

[0016] Preferably, the limiting component includes a slot, a guide hole, a limiting shaft, a storage slot, an electric push rod, and a locking block. The slot array is arranged on the side of the square frame, the guide holes are symmetrically arranged inside the square frame, the limiting shaft passes through the guide hole and one end of the limiting shaft is fixedly connected to the inner wall of the concave frame, the storage slots are symmetrically arranged on the side of the concave frame and are connected to the inside of the concave frame, the electric push rod is fixedly arranged on the side of the storage slot and the telescopic end of the electric push rod extends into the inside of the storage slot, the locking block passes through the inside of the storage slot and the telescopic end of the electric push rod is fixedly connected to the side of the locking block, and one end of the locking block extends into the corresponding slot.

[0017] Preferably, the conductive component includes a conductive cylinder and a conductive ring. The conductive cylinder is fixedly disposed inside the support frame, and the conductive ring is fixedly surrounding the support wheel. One side of the conductive ring is in contact with a corresponding conductive plate. The conductive cylinder is electrically connected to the conductive ring and to a corresponding electromagnet.

[0018] Preferably, racks are symmetrically arranged on the base plate, frames are symmetrically embedded inside the middle plate, air inlets are provided at the top of the frames, and filters are provided inside the air inlets. Rollers are rotatably arranged inside the frames, control modules are embedded in the center of the rollers, and the rollers are located directly above the corresponding racks. Sliding grooves are arranged around the inside of the rollers, electric telescopic rods are fixedly arranged inside the sliding grooves, limit blocks are embedded inside the sliding grooves, and the telescopic end of the electric telescopic rods is fixedly connected to the limit blocks. A connecting shaft is fixedly connected to the center of the rollers. A fan is fixedly arranged inside the frames, and the end of the connecting shaft is fixedly connected to the impeller inside the fan. A drive wheel is fixedly arranged on the connecting shaft. A driven shaft is rotatably arranged inside the frames, and one end of the driven shaft extends out of the frames. A knob is fixedly arranged at the end of the driven shaft. A driven wheel is fixedly arranged on the driven shaft, and the driven wheel is connected to the drive wheel via a belt drive. A first bevel gear is fixedly arranged at the end of the driven shaft.

[0019] The middle plate has symmetrically arranged storage slots inside. A limit frame is fixedly installed inside the storage slot. A square plate is installed inside the limit frame and engages with the inside of the limit frame. A threaded sleeve is fixedly installed inside the square plate. A drive screw is threadedly connected inside the threaded sleeve, and one end of the drive screw extends into the frame. A second bevel gear is fixedly installed at the end of the drive screw, and two symmetrically arranged second bevel gears mesh with a first bevel gear. A piston block is installed inside the storage slot, and the end of the square plate is fixedly connected to the piston block. A telescopic hose is installed at the end of the storage slot.

[0020] Preferably, both the lower shaft guide rail and the upper shaft guide rail are provided with air ducts, and the air ducts are connected to the output end of the fan through air supply pipes. Air jet holes are arrayed on the air ducts. Both the lower shaft guide rail and the upper shaft guide rail are provided with drain heads, and the drain heads are connected to telescopic hoses.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] 1. The three-axis integrated precision motion platform of this invention, through the coordinated cooperation of support wheels, strip grooves, and threaded cylinders, can adapt and adjust the support strength according to the load size, effectively avoiding the adverse effects of overload on the platform's motion accuracy. A servo motor drives the threaded rod to rotate, and the position of the square frame is precisely adjusted by the transmission action of the threaded cylinder, causing the support wheels to move to a preset point. The support wheels are embedded in the strip groove and tightly fitted to the groove body. After the support wheels and strip groove are fully fitted, the X-axis adjustment component operates normally. This not only significantly increases the platform's load-bearing capacity but also optimizes the overall stress state and reduces the contact stress between the guide rail and the slider. Furthermore, different numbers of support wheels can be flexibly used to provide targeted support to key stress points according to the load distribution, fundamentally avoiding the risk of deformation of the guide rail and base, ultimately ensuring high precision and stability of the platform's motion adjustment.

[0023] 2. The three-axis integrated precision motion platform of this invention achieves magnetic levitation-assisted load force offsetting through the cooperation of electromagnets and permanent magnets, ensuring motion accuracy. After the conductive ring contacts the conductive plate and conducts electricity, current flows to the electromagnet to drive its operation. The magnetic force generated by the electromagnet cooperates with the permanent magnet to offset part of the gravity through the magnetic levitation effect, thereby reducing the load on the support wheels. The number of working electromagnets can be adjusted accordingly. When the three-axis integrated precision motion platform is lightly loaded, the number of working electromagnets is reduced to reduce energy consumption, while the number of working electromagnets is increased when the platform is heavily loaded to ensure that the levitation force is sufficient to offset more gravity and improve adjustment flexibility. This structure can effectively eliminate mechanical friction, improve motion performance, and bear most of the weight of the platform and workpiece, significantly reducing the force on the X-axis adjustment components, reducing the platform's inertial load, accelerating acceleration and deceleration response, and further improving dynamic positioning accuracy.

[0024] 3. The three-axis integrated precision motion platform of the present invention uses a fan and air ducts to facilitate the removal of impurities inside the upper and lower axis guide rails, ensuring that the tracks are in a clean state and preventing the adsorption and accumulation of impurities. This ensures the positioning accuracy and motion stability of the three-axis integrated precision motion platform. The fan compresses air, generating airflow. Through the air jet holes, the airflow flows into the lower and upper axis guide rails, removing impurities inside them. By maintaining the cleanliness of the track surface, the interference of impurity adsorption on motion accuracy is avoided, ensuring the high-precision operation of the three-axis integrated precision motion platform.

[0025] 4. The three-axis integrated precision motion platform of the present invention facilitates the automatic addition of lubricating fluid to the upper and lower axis guide rails through the provided storage tank and drain head, ensuring the positioning accuracy and motion stability of the three-axis integrated precision motion platform. The movement of the piston block pushes the lubricating fluid in the storage tank, and the lubricating fluid flows through the telescopic hose into the drain head, allowing the lubricating fluid to enter the lower and upper axis guide rails. When the slider moves, it comes into contact with the lubricating fluid, carrying the lubricating fluid with it, so that the lubricating fluid is evenly coated inside the lower and upper axis guide rails, effectively reducing friction and ensuring the high-precision operation of the three-axis integrated precision motion platform. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the front view of the three-axis integrated precision motion platform of the present invention;

[0027] Figure 2 This is a schematic diagram of the upper plate structure of the present invention;

[0028] Figure 3 This is a schematic diagram of the base and bearing seat structure of the present invention;

[0029] Figure 4 This is a schematic diagram of the three-dimensional structure of the base plate of the present invention;

[0030] Figure 5 This is a schematic diagram of the load-bearing plate structure of the present invention;

[0031] Figure 6 This is a three-dimensional structural diagram of the electromagnet and mounting plate No. 2 of the present invention;

[0032] Figure 7 For the present invention Figure 5 Enlarged structural diagram of A in the middle;

[0033] Figure 8 This is a schematic diagram of the support wheel of the present invention;

[0034] Figure 9 This is a schematic diagram of the three-dimensional structure of the concave frame of the present invention;

[0035] Figure 10 This is a three-dimensional structural diagram of the square frame of the present invention;

[0036] Figure 11 This is a schematic diagram of the storage slot and card block structure of the present invention;

[0037] Figure 12 This is a schematic diagram of the framework structure of the present invention;

[0038] Figure 13 For the present invention Figure 1 Enlarged schematic diagram of the B-structure;

[0039] Figure 14 This is a schematic diagram of the storage tank structure of the present invention.

[0040] In the diagram: 1. Base plate; 2. Lower shaft guide rail; 3. Lower shaft linear motor module; 4. Middle plate; 5. Upper shaft linear motor module; 6. Upper shaft guide rail; 7. Upper plate; 8. Mounting plate; 9. Stage; 10. Base; 11. Bearing module; 12. Bearing seat; 13. Stator coil; 14. Guide rail; 15. Limiting groove; 16. Load-bearing plate; 17. Concave groove; 18. Strip groove; 19. Mounting groove; 20. Conductive plate; 21. Mounting plate number one; 22. Permanent magnet; 23. Mounting plate number two; 24. Electromagnet; 25. Concave frame; 26. Square frame; 27. Slot; 28. Guide hole; 29. ​​Limiting shaft; 30. Threaded cylinder; 31. Threaded rod; 32. Servo motor; 33. Storage slot; 34. 35. Electric push rod; 36. Locking block; 37. Support frame; 38. Conductive cylinder; 39. Support wheel; 40. Conductive ring; 41. Rolling bearing; 42. Power distribution module; 43. Rack; 44. Frame; 45. Air inlet; 46. Roller; 47. Control module; 48. Sliding groove; 49. Electric telescopic rod; 50. Limiting block; 51. Connecting shaft; 52. Fan; 53. Drive wheel; 54. Driven shaft; 55. Knob; 56. Driven wheel; 57. First bevel gear; 58. Second bevel gear; 59. Piston block; 60. Storage tank; 61. Limiting frame; 62. Square plate; 63. Threaded sleeve; 64. Drive screw; 65. Telescopic hose; 66. Air duct; 67. Jet nozzle; 68. Drain head. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] Please see Figure 1-14 The present invention provides a technical solution: a three-axis integrated precision motion platform, including a base plate 1, an X-axis adjustment component is provided on the top of the base plate 1, a middle plate 4 is provided on the X-axis adjustment component, a Y-axis adjustment component is provided on the middle plate 4, an upper plate 7 is provided on the Y-axis adjustment component, and a Theta axis adjustment component is provided inside the upper plate 7.

[0043] The base plate 1 is provided with a guide assembly for supporting and guiding the middle plate 4. The base plate 1 has symmetrically arranged strip grooves 18 inside. The bottom of the middle plate 4 is fixedly provided with a load-bearing plate 16. The load-bearing plate 16 has an array of concave frames 25 corresponding to the strip grooves 18 inside. The concave frames 25 have a square frame 26 passing through them. The concave frames 25 have an adjustment mechanism for adjusting the position of the square frame 26 inside. The square frame 26 has a support frame 36 fixedly provided inside. The support frame 36 has a support wheel 38 rotatably arranged through a shaft inside. The support wheel 38 is provided with a conductive component.

[0044] The base plate 1 is equipped with a power distribution module 41, and the base plate 1 is equipped with a magnetic levitation component for assisting the movement of the middle plate 4.

[0045] The three-axis integrated precision motion platform is connected to an external controller and simultaneously supplies power to the electronic equipment via a power distribution box. When using the three-axis integrated precision motion platform to support and transport workpieces in electronic manufacturing or precision testing, the workpiece is fixed to the Theta axis adjustment assembly by the platform. The X-axis, Y-axis, and Theta axis adjustment assemblies facilitate workpiece position adjustment. After the platform is powered on, the motion controller controls each axis to perform a zero-return operation. The X and Y axes move to the zero point of their respective grating rulers, and the Theta axis rotates to the encoder zero point, establishing a unified coordinate reference for the entire platform (existing technology). The host computer then sends the target pose command (target X, Y coordinates and...) to the target position. The Theta angle is sent to the platform's multi-axis motion controller. Based on the command and preset motion parameters (such as maximum speed and acceleration), the controller smoothly plans the X-axis and Y-axis paths and calculates the precise angle and angular velocity required for the Theta axis rotation. According to the planned trajectory, the motion controller synchronously drives the X-axis and Y-axis adjustment components. The X-axis adjustment component drives the middle plate 4 and its upper Y-axis and Theta axis adjustment components to move along the X-axis. The Y-axis adjustment component drives the upper plate 7 and its Theta axis adjustment component to move along the Y-axis, achieving linear, circular, or complex trajectory motion within a plane. During the motion, the lower and upper axes optically... The encoder provides real-time position feedback, forming a closed-loop control to ensure planar motion accuracy. The movement of the Theta-axis adjustment component can be synchronized with or independent of the planar motion, driving the stator coil 13 to generate a rotating magnetic field that directly acts on the moving magnetic sheet on the bearing housing 12, thereby driving the bearing housing 12 and the stage 9 fixed thereto to rotate to the target angle. The Theta-axis angle encoder measures and feeds back the rotation angle of the stage 9 in real time (existing technology), achieving precise closed-loop control of the rotation angle, and thus realizing the adjustment of the supported workpiece position. By using a recessed and hidden Theta-axis adjustment component, the measurement center of its angle encoder is basically at the same height as the load plane, greatly improving accuracy. Eliminating Abbe offset directly improves the platform's absolute positioning accuracy and repeatability. The integrated stacked structure of the middle plate 4 and the low center of gravity sunken design help improve the platform's stability during high-speed, high-acceleration motion, reduce vibration, and thus improve dynamic response characteristics and trajectory tracking accuracy. In addition, the integrated mechanical layout reduces the cumulative height of the traditional three-layer stack, making the platform more compact and easier to integrate into space-constrained equipment. Moreover, the sunken and hidden layout effectively protects the Theta axis adjustment components, avoiding spatial interference with surrounding equipment above, simplifying overall integration. The enclosed structure also reduces the risk of dust and foreign object contamination, improving long-term operational reliability.

[0046] When the three-axis integrated precision motion platform supports workpiece adjustment, if the load force is too large, the position of the square frame 26 can be adjusted through the movement of the adjustment mechanism. When the square frame 26 moves, the position of the support wheel 38 is adjusted through the support frame 36, so that the support wheel 38 enters the interior of the strip groove 18. After the support wheel 38 contacts the strip groove 18, the upper limit of the load-bearing capacity can be increased, the stress state can be optimized, and the contact stress can be reduced. When the support wheel 38 cooperates with the strip groove 18 to increase the load force, the current will be guided through the conductive component, so that the current enters the magnetic levitation component. When the magnetic levitation component works, it can effectively eliminate mechanical friction, improve motion performance, bear most of the weight of the platform and workpiece, significantly reduce the force on the X-axis adjustment component, and effectively eliminate mechanical friction, which can significantly reduce the inertial load of the platform, make the acceleration and deceleration response faster, and improve the dynamic positioning accuracy.

[0047] Furthermore, the X-axis adjustment assembly includes a lower axis guide rail 2 and a lower axis linear motor module 3. The lower axis guide rail 2 is symmetrically arranged on the base plate 1 and is slidably connected to the middle plate 4. The lower axis linear motor module 3 is arranged on the base plate 1, and its mover is fixedly connected to the middle plate 4. The Y-axis adjustment assembly includes an upper axis guide rail 6 and an upper axis linear motor module 5. The upper axis guide rail 6 is symmetrically arranged on the middle plate 4, and the middle plate 4 engages with the upper plate 7. The upper axis linear motor module 5 is located on the top of the middle plate 4, and its mover is fixedly connected to the middle plate 4. The upper plate 7 is fixedly connected. The Theta axis adjustment assembly includes a mounting plate 8, a stage 9, a base 10, a bearing module 11, a bearing seat 12, and a stator coil 13. The mounting plate 8 is fixedly installed inside the upper plate 7. The base 10 is fixedly installed at the bottom of the mounting plate 8. The bearing module 11 is installed inside the base 10. The bearing seat 12 is connected to the outer ring of the bearing module 11. The bottom of the stage 9 is fixedly connected to the top of the bearing seat 12. The stator coil 13 is installed inside the base 10 and is located on one side of the bearing seat 12. The bearing seat 12 is a magnetic sheet integrated structure.

[0048] The lower axis linear motor module 3 moves in conjunction with the lower axis guide rail 2, which can adjust the position of the middle plate 4. When the middle plate 4 moves, the Y-axis adjustment component, the Theta axis adjustment component, and the supported workpiece will move together along the X-axis. When the Y-axis adjustment component moves, the Theta axis adjustment component and the supported workpiece will move along the Y-axis. When the Theta axis adjustment component moves, it will supply power to the stator coil 13 through the cooperation of the external controller and the power distributor, generating magnetic force. The magnetic force will drive the bearing seat 12 to move. Through the cooperation of the bearing module 11, it will drive the stage 9 to rotate. When the stage 9 moves, it will drive the workpiece to rotate and rotate the workpiece to the target angle.

[0049] Furthermore, the guiding assembly includes a guide rail 14, a limiting groove 15, a concave groove 17, and rolling bearings 40. The guide rail 14 is fixedly mounted on the base plate 1. The limiting grooves 15 are symmetrically arranged on the guide rail 14. The concave grooves 17 are engaged on the guide rail 14, and the top of the concave grooves 17 is fixedly connected to the load-bearing plate 16. The rolling bearings 40 are arranged in an array inside the limiting grooves 15, and the inner rings of the rolling bearings 40 are fixedly connected to the inner wall of the concave grooves 17 via shafts.

[0050] The lower shaft linear motor module 3 moves in conjunction with the lower shaft guide rail 2. When adjusting the position of the middle plate 4, the load-bearing plate 16 will drive the concave groove 17 to move. The concave groove 17 and the guide rail 14 will guide the middle plate 4, making the middle plate 4 move smoothly. At the same time, it will drive the rolling bearing 40 to slide inside the limiting groove 15. The rolling bearing 40 and the limiting groove 15 will assist the middle plate 4 to move smoothly and reduce friction.

[0051] Furthermore, the base plate 1 is provided with an installation groove 19, and the installation groove 19 is connected to the corresponding strip groove 18. A conductive plate 20 is fixedly installed inside the installation groove 19, and the conductive plate 20 is electrically connected to the power distribution module 41.

[0052] There are two conductive plates 20, which cooperate with the power distribution module 41. The power distribution module 41 increases the positive and negative currents, so that the positive and negative currents flow to the corresponding conductive plates 20 respectively. The support wheels 38 are symmetrically arranged, with two support wheels 38 forming a group, and there are six groups in total. The number of electromagnets 24 corresponds to the number of conductive rings 39. After a group of corresponding conductive rings 39 contacts two corresponding conductive plates 20, the power will flow into the corresponding electromagnets 24, causing the corresponding electromagnets 24 to generate magnetic force. The magnetic force generated by the electromagnets 24 repels the magnetic force of the permanent magnet block 22, which in turn generates a certain pushing force on the load-bearing plate 16. According to different load forces, different numbers of conductive rings 39 are adjusted to contact the conductive plates 20 to provide a dynamically adjustable repulsive force. The combination of the two can effectively counteract the gravity of the middle plate 4.

[0053] When the three-axis integrated precision motion platform is under light load, the number of electromagnets 24 is reduced to lower energy consumption, while under heavy load, the number of electromagnets 24 is increased to ensure that the levitation force is sufficient to counteract gravity and improve flexibility.

[0054] Furthermore, the magnetic levitation assembly includes a first mounting plate 21, a permanent magnet block 22, a second mounting plate 23, and electromagnets 24. The first mounting plate 21 is symmetrically mounted on the base plate 1 and is located on one side of the limiting groove 15. The permanent magnet block 22 is fixedly mounted on the first mounting plate 21. The second mounting plate 23, corresponding to the first mounting plate 21, is fixedly mounted at the bottom of the load-bearing plate 16. The electromagnets 24 are arrayed on the second mounting plate 23 and are located directly above the permanent magnet block 22.

[0055] The base plate 1 provides installation space for the permanent magnet block 22 through the first mounting plate 21, while the load-bearing plate 16 provides installation space for the electromagnet 24 through the second mounting plate 23. The electromagnet 24 corresponds to the permanent magnet block 22. The magnetic force generated by the electromagnet 24, in conjunction with the permanent magnet block 22, can achieve the purpose of magnetic levitation to counteract gravity.

[0056] Furthermore, the adjustment mechanism includes a threaded cylinder 30, a threaded rod 31, a servo motor 32, and a limiting component. The threaded cylinder 30 is fixedly disposed at the bottom of the square frame 26. The outer surface of the threaded rod 31 is threadedly connected to the inside of the threaded cylinder 30. The servo motor 32 is fixedly disposed inside the concave frame 25, and the output end of the servo motor 32 is fixedly connected to the end of the threaded rod 31. The limiting component for guiding and limiting the square frame 26 is disposed inside the concave frame 25.

[0057] When the adjustment mechanism moves, the external controller controls the servo motor 32 to work, which drives the threaded rod 31 to move. When the threaded rod 31 moves, it adjusts the position of the threaded cylinder 30. When the threaded cylinder 30 moves, it adjusts the position of the square frame 26. The position of the square frame 26 can be adjusted through the limit component. When the square frame 26 moves, it can adjust the position of the support wheel 38. After the support wheel 38 moves to the predetermined position, the limit component will position the support wheel 38.

[0058] Furthermore, the limiting component includes a slot 27, a guide hole 28, a limiting shaft 29, a storage slot 33, an electric push rod 34, and a locking block 35. The slots 27 are arrayed on the side of the square frame 26. The guide holes 28 are symmetrically arranged inside the square frame 26. The limiting shaft 29 passes through the guide hole 28, and one end of the limiting shaft 29 is fixedly connected to the inner wall of the concave frame 25. The storage slots 33 are symmetrically arranged on the side of the concave frame 25, and the storage slots 33 are connected to the inside of the concave frame 25. The electric push rod 34 is fixedly arranged on the side of the storage slot 33, and the telescopic end of the electric push rod 34 extends into the storage slot 33. The locking block 35 passes through the storage slot 33, and the telescopic end of the electric push rod 34 is fixedly connected to the side of the locking block 35. One end of the locking block 35 extends into the corresponding slot 27.

[0059] When the position of the square frame 26 is adjusted, the guide hole 28 will move. Through the cooperation of the limit shaft 29, the square frame 26 will be guided, so that the square frame 26 moves smoothly. After the square frame 26 moves to the predetermined position, the electric push rod 34 will be controlled to adjust the position of the locking block 35. After the locking block 35 moves into the slot 27, the position of the square frame 26 will be positioned.

[0060] Furthermore, the conductive component includes a conductive cylinder 37 and a conductive ring 39. The conductive cylinder 37 is fixedly disposed inside the support frame 36, and the conductive ring 39 is fixedly surrounding the support wheel 38. One side of the conductive ring 39 is in contact with the corresponding conductive plate 20. The conductive cylinder 37 is electrically connected to the conductive ring 39, and the conductive cylinder 37 is electrically connected to the corresponding electromagnet 24.

[0061] The conductive cylinder 37 is rotatably connected to the support wheel 38 via a shaft. The conductive ring 39 is electrically connected to the conductive cylinder 37 via a shaft. After the conductive ring 39 contacts the conductive plate 20, the positive and negative poles can flow to the electromagnet 24, thereby driving the electromagnet 24 to work.

[0062] Furthermore, racks 42 are symmetrically arranged on the base plate 1, and frames 43 are symmetrically embedded inside the middle plate 4. An air inlet 44 is provided at the top of the frame 43, and a filter screen is installed inside the air inlet 44. A roller 45 is rotatably mounted inside the frame 43, and a control module 46 is embedded in the center of the roller 45. The roller 45 is located directly above the corresponding rack 42. A sliding groove 47 is arranged around the inside of the roller 45, and an electric telescopic rod 48 is fixedly mounted inside the sliding groove 47. A limit block 49 is embedded inside the sliding groove 47, and the telescopic end of the electric telescopic rod 48 is aligned with the limit block 49. A fixed connection is provided, with a connecting shaft 50 fixedly connected to the center of the roller 45. A fan 51 is fixedly installed inside the frame 43, and the end of the connecting shaft 50 is fixedly connected to the impeller inside the fan 51. A drive wheel 52 is fixedly installed on the connecting shaft 50. A driven shaft 53 is rotatably installed inside the frame 43, and one end of the driven shaft 53 extends out of the frame 43. A knob 54 is fixedly installed at the end of the driven shaft 53. A driven wheel 55 is fixedly installed on the driven shaft 53, and the driven wheel 55 is connected to the drive wheel 52 via a belt drive. A first bevel gear 56 is fixedly installed at the end of the driven shaft 53.

[0063] The middle plate 4 has symmetrically arranged storage slots 59 inside. A limit frame 60 is fixedly installed inside the storage slots 59. A square plate 61 is installed inside the limit frame 60 and is engaged with the inside of the limit frame 60. A threaded sleeve 62 is fixedly installed inside the square plate 61. A drive screw 63 is threadedly connected inside the threaded sleeve 62 and one end of the drive screw 63 extends into the frame 43. A second bevel gear 57 is fixedly installed at the end of the drive screw 63. The two symmetrically arranged second bevel gears 57 are engaged with a first bevel gear 56. A piston block 58 is installed inside the storage slots 59 and the end of the square plate 61 is fixedly connected to the piston block 58. A telescopic hose 64 is installed at the end of the storage slots 59.

[0064] The electronic equipment inside the roller 45 is electrically connected to an external power source through a rotary joint, and the control module 46 is electrically connected to the electric telescopic rod 48. The movement of the electric telescopic rod 48 can be controlled through the control module 46.

[0065] When the three-axis integrated precision motion platform moves, the lower axis guide rail 2 and the upper axis guide rail 6 cooperate with the slider to guide the corresponding middle plate 4 and upper plate 7, so that the middle plate 4 and upper plate 7 move smoothly. After a long period of movement, in order to avoid impurities inside the lower axis guide rail 2 and the upper axis guide rail 6 affecting the motion accuracy, the movement of the electric telescopic rod 48 will drive the limit block 49 to move. After one end of the limit block 49 moves out of the sliding groove 47, the limit block 49 will mesh with the rack 42. Then, when the middle plate 4 moves, the rack 42 and the limit block 49 will make the roller 45 rotate. When the roller 45 rotates, it will drive the fan 51 to move through the connecting shaft 50. The fan 51 compresses the air and generates wind flow. When the drive wheel 52 rotates, it drives the driven shaft 53 to rotate through the cooperation of the drive wheel 52 and the driven wheel 55. When the driven shaft 53 rotates, it drives the drive screw 63 to move through the cooperation of the first bevel gear 56 and the second bevel gear 57. When the drive screw 63 moves, it guides the square plate 61 through the cooperation of the threaded sleeve 62, so that the square plate 61 moves smoothly. The limit frame 60 guides the square plate 61. When the square plate 61 moves, it drives the piston block 58 to move. The storage tank 59 stores lubricating fluid. The lubricating fluid is located on one side of the piston block 58. When the piston block 58 moves, it pushes the lubricating fluid in the storage tank 59. The lubricating fluid flows through the telescopic hose 64 and flows into the drain head 67.

[0066] When the middle plate 4 moves in the opposite direction, causing the roller 45 to move in the opposite direction, if you do not want the roller 45 to rotate in the opposite direction, you can control the movement of the electric telescopic rod 48. The movement of the electric telescopic rod 48 will cause the limit block 49 to reset and no longer contact the rack 42, so the roller 45 will not rotate. An observation window is provided on the top of the storage tank 59, which allows you to easily observe the level of lubricating fluid inside the storage tank 59. An injection head is provided on the storage tank 59. When you need to adjust the lubricating fluid inside the storage tank 59, when the piston block 58 resets, the limit block 49 resets. The manual drive knob 54 can drive the first bevel gear 56 to rotate in the opposite direction through the driven shaft 53, which in turn can drive the drive screw 63 to rotate in the opposite direction, which in turn can drive the piston block 58 to reset. After the piston block 58 resets, lubricating fluid can be added into the storage tank 59.

[0067] Furthermore, both the lower shaft guide rail 2 and the upper shaft guide rail 6 are provided with air ducts 65, and the air ducts 65 are connected to the output end of the fan 51 through an air supply pipe. Air jet holes 66 are arranged in an array on the air ducts 65. Both the lower shaft guide rail 2 and the upper shaft guide rail 6 are provided with drain heads 67, and the drain heads 67 are connected to the telescopic hose 64.

[0068] After the fan 51 moves and generates airflow into the air duct 65, the airflow will flow into the lower shaft guide rail 2 and the upper shaft guide rail 6 through the air jet hole 66, and remove impurities inside the lower shaft guide rail 2 and the upper shaft guide rail 6. By maintaining the cleanliness of the track surface, the interference of impurity adsorption on the motion accuracy is avoided, and the high-precision operation of the three-axis integrated precision motion platform is guaranteed.

[0069] The lubricant flows through the telescopic hose 64, allowing it to enter the drain head 67 and then into the lower shaft guide rail 2 and the upper shaft guide rail 6. When the slider moves, it comes into contact with the lubricant, carrying it along with the flow of lubricant. This ensures that the lubricant is evenly spread inside the lower shaft guide rail 2 and the upper shaft guide rail 6, effectively reducing friction and ensuring the high-precision operation of the three-axis integrated precision motion platform.

[0070] Working Principle: First, the three-axis integrated precision motion platform is connected to an external controller, and the electronic equipment is powered through a power distribution box. When using the three-axis integrated precision motion platform to support and transport workpieces in electronic manufacturing or precision testing, the workpiece is fixed to the Theta axis adjustment assembly by the platform. The X-axis, Y-axis, and Theta axis adjustment assemblies facilitate workpiece position adjustment. After the platform is powered on, the motion controller controls each axis to perform a zero-return operation. The X-axis and Y-axis move to the zero point of their respective grating rulers, and the Theta axis rotates to the encoder zero point, establishing a unified coordinate reference for the entire platform (existing technology). The host computer sends the target pose command to the platform's multi-axis motion controller, which then adjusts the position according to the command and preset motion parameters. Parameters (such as maximum speed and acceleration) are used to smoothly plan the X-axis and Y-axis paths, and the precise angle and angular velocity required for the Theta axis rotation are calculated. Based on the planned trajectory, the motion controller synchronously drives the X-axis and Y-axis adjustment components. The X-axis adjustment component drives the middle plate 4 and its upper Y-axis and Theta axis adjustment components to move along the X-axis. The Y-axis adjustment component drives the upper plate 7 and its Theta axis adjustment component to move along the Y-axis, achieving linear, circular, or complex trajectory motion in the plane. During the motion, the lower and upper axis optical encoders provide real-time position feedback, forming a closed-loop control to ensure planar motion accuracy. The movement of the Theta axis adjustment component can be synchronized with or independent of the planar motion, controlled by the controller. The stator coil 13 drives a rotating magnetic field, which directly acts on the moving magnetic sheet on the bearing housing 12, thereby driving the bearing housing 12 and the stage 9 fixed thereto to rotate to the target angle. The Theta axis angle encoder measures the rotation angle of the stage 9 in real time and provides feedback (existing technology), realizing precise closed-loop control of the rotation angle, and thus achieving adjustment of the supported workpiece position. Through the recessed Theta axis adjustment component, the measurement center of the angle encoder is basically at the same height as the load plane, greatly eliminating Abbe offset and directly improving the absolute positioning accuracy and repeatability of the platform. The integrated stacked structure of the middle plate 4 and the low center of gravity recessed design help improve the stability of the platform during high-speed and high-acceleration motion and reduce vibration. The improved dynamic response characteristics and trajectory tracking accuracy, along with the integrated mechanical layout which reduces the cumulative height of traditional three-layer stacking, make the platform more compact and easier to integrate into space-constrained equipment. Furthermore, the recessed, concealed layout effectively protects the Theta-axis adjustment components, preventing spatial interference with surrounding equipment above and simplifying overall integration. The enclosed structure also reduces the risk of dust and foreign object contamination, improving long-term operational reliability. When the three-axis integrated precision motion platform supports workpiece adjustment, excessive load forces the servo motor 32 to drive the threaded rod 31, which in turn adjusts the position of the threaded cylinder 30. The movement of the threaded cylinder 30, in turn, adjusts the position of the square frame 26. The position of the square frame 26 can be adjusted via the limiting components.When the square frame 26 moves, the position of the support wheel 38 can be adjusted. After the support wheel 38 moves to the predetermined position, the electric push rod 34 is controlled to adjust the position of the locking block 35. After the locking block 35 moves into the slot 27, it will position the square frame 26, so that the support wheel 38 enters the slot 18. After the support wheel 38 contacts the slot 18, the X-axis adjustment component moves, which can increase the upper limit of the load-bearing capacity, optimize the stress state, and reduce the contact stress. When the support wheel 38 cooperates with the slot 18 to increase the load force, the conductive cylinder 37 is rotatably connected to the support wheel 38 through the shaft. After the conductive ring 39 contacts the conductive plate 20, the positive and negative poles can flow to the electromagnet 24, thereby driving the electromagnet 24 to work. The base plate 1 is connected to the first mounting plate 21. The permanent magnet block 22 provides installation space, while the load-bearing plate 16 provides installation space for the electromagnet 24 via the second mounting plate 23. The electromagnet 24 corresponds to the permanent magnet block 22. The magnetic force generated by the electromagnet 24, in conjunction with the permanent magnet block 22, achieves magnetic levitation to counteract gravity. When the three-axis integrated precision motion platform operates under light loads, the number of electromagnets 24 is reduced to lower energy consumption. Under heavy loads, the number of electromagnets 24 is increased to ensure sufficient levitation force to counteract gravity, improving flexibility. This effectively eliminates mechanical friction, enhances motion performance, and allows the platform to bear most of the platform and workpiece weight. It significantly reduces the force on the X-axis adjustment components and effectively eliminates mechanical friction, resulting in a substantial reduction in the platform's inertial load, faster acceleration and deceleration response, and improved dynamic positioning accuracy.

[0071] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

Claims

1. A three-axis integrated precision motion platform, characterized in that: The utility model provides a kind of X-Y-Z three-axis motion control platform, including bottom plate (1), the top of the bottom plate (1) is provided with X-axis adjusting component, the middle plate (4) is provided on the X-axis adjusting component, the Y-axis adjusting component is provided on the middle plate (4), the upper plate (7) is provided on the Y-axis adjusting component, the Theta-axis adjusting component is provided inside the upper plate (7); The bottom plate (1) is provided with a guide assembly for supporting and guiding the middle plate (4), the bottom plate (1) is symmetrically provided with a strip-shaped groove (18) inside, the bottom plate (1) is provided with a load-bearing plate (16) at the bottom, the load-bearing plate (16) is provided with a concave rack (25) corresponding to the strip-shaped groove (18) inside, the concave rack (25) is provided with a square rack (26) inside, the concave rack (25) is provided with an adjusting mechanism for adjusting the position of the square rack (26) inside, the square rack (26) is fixedly provided with a support rack (36) inside, the support rack (36) is rotatably provided with a support wheel (38) inside, and the support wheel (38) is provided with a conductive assembly. The bottom plate (1) is provided with a power distribution module (41) inside, and the bottom plate (1) is provided with a magnetic levitation assembly for assisting the movement of the middle plate (4).

2. The three-axis integrated precision motion platform according to claim 1, wherein: The X-axis adjusting component includes a lower shaft guide rail (2) and a lower shaft linear motor module (3), the lower shaft guide rail (2) is symmetrically arranged on the bottom plate (1), and the lower shaft guide rail (2) is slidably connected with the middle plate (4), and the lower shaft linear motor module (3) is arranged on the bottom plate (1), and the mover of the lower shaft linear motor module (3) is fixedly connected with the middle plate (4); The Y-axis adjusting component includes an upper shaft guide rail (6) and an upper shaft linear motor module (5), the upper shaft guide rail (6) is symmetrically arranged on the middle plate (4), and the middle plate (4) is engaged with the upper plate (7), the upper shaft linear motor module (5) is arranged on the top of the middle plate (4), and the mover of the upper shaft linear motor module (5) is fixedly connected with the upper plate (7); The Theta-axis adjusting component includes a mounting disc (8), a stage (9), a base (10), a bearing module (11), a bearing seat (12) and a stator coil (13), the mounting disc (8) is fixedly arranged inside the upper plate (7), the base (10) is fixedly arranged at the bottom of the mounting disc (8), the bearing module (11) is arranged inside the base (10), the bearing seat (12) is connected with the outer ring of the bearing module (11), the stage (9) is fixedly connected with the top of the bearing seat (12), the stator coil (13) is arranged inside the base (10), and the stator coil (13) is located on one side of the bearing seat (12), and the bearing seat (12) is integrated with a magnetic sheet.

3. The three-axis integrated precision motion platform according to claim 2, wherein: The guide assembly comprises a guide rail (14), a limiting groove (15), a concave groove (17) and a rolling bearing (40), the guide rail (14) is fixedly arranged on the bottom plate (1), the limiting groove (15) is symmetrically arranged on the guide rail (14), the concave groove (17) is clamped on the guide rail (14), and the top of the concave groove (17) is fixedly connected with the bearing plate (16), the rolling bearing (40) is arranged in the limiting groove (15), and the inner ring of the rolling bearing (40) is fixedly connected with the inner wall of the concave groove (17) through a shaft.

4. The three-axis integrated precision motion platform according to claim 3, characterized in that: The bottom plate (1) is internally provided with a mounting groove (19) in communication with a corresponding strip-shaped groove (18), and the mounting groove (19) is internally fixedly provided with a conductive plate (20) electrically connected with a power distribution module (41).

5. The three-axis integrated precision motion platform according to claim 3, wherein: The magnetic suspension assembly comprises a first mounting plate (21), a permanent magnet block (22), a second mounting plate (23) and an electromagnet (24), the first mounting plate (21) is symmetrically mounted on the bottom plate (1), and the first mounting plate (21) is located on one side of the limiting groove (15), the permanent magnet block (22) is fixedly arranged on the first mounting plate (21), the second mounting plate (23) corresponding to the first mounting plate (21) is fixedly arranged at the bottom of the bearing plate (16), and the electromagnet (24) is arranged on the second mounting plate (23) and located directly above the permanent magnet block (22).

6. The three-axis integrated precision motion platform of claim 1, wherein: The adjusting mechanism comprises a threaded cylinder (30), a threaded rod (31), a servo motor (32) and a limiting assembly, the threaded cylinder (30) is fixedly arranged at the bottom of the square frame (26), the outer surface of the threaded rod (31) is threadedly connected with the inner portion of the threaded cylinder (30), the servo motor (32) is fixedly arranged in the concave frame (25), and the output end of the servo motor (32) is fixedly connected with the end portion of the threaded rod (31), and the limiting assembly for guiding and limiting the square frame (26) is arranged in the concave frame (25).

7. The three-axis integrated precision motion platform according to claim 6, wherein: The limiting assembly comprises a clamping groove (27), a guide hole (28), a limiting shaft (29), a receiving groove (33), an electric push rod (34) and a clamping block (35), the clamping groove (27) is arranged on the side surface of the square frame (26), the guide hole (28) is symmetrically arranged in the square frame (26), the limiting shaft (29) is arranged in the guide hole (28), one end of the limiting shaft (29) is fixedly connected with the inner wall of the concave frame (25), the receiving groove (33) is symmetrically arranged on the side surface of the concave frame (25) and in communication with the inner portion of the concave frame (25), the electric push rod (34) is fixedly arranged on the side surface of the receiving groove (33), the telescopic end of the electric push rod (34) extends into the receiving groove (33), the clamping block (35) is arranged in the receiving groove (33), and the telescopic end of the electric push rod (34) is fixedly connected with the side surface of the clamping block (35), and one end of the clamping block (35) extends into the corresponding clamping groove (27).

8. The three-axis integrated precision motion platform according to claim 7, wherein: The conductive assembly includes a conductive cylinder (37) and a conductive ring (39), the conductive cylinder (37) is fixedly arranged inside the support frame (36), the conductive ring (39) is fixedly arranged around the support wheel (38), and the conductive ring (39) is in contact with the corresponding conductive plate (20) on one side, the conductive cylinder (37) is electrically connected with the conductive ring (39), and the conductive cylinder (37) is electrically connected with the corresponding electromagnet (24).

9. The three-axis integrated precision motion platform of claim 2, wherein: The bottom plate (1) is symmetrically provided with a rack (42), the middle plate (4) is symmetrically embedded with a frame (43) inside, the frame (43) is provided with an air inlet hole (44) at the top, and the air inlet hole (44) is provided with a filter screen inside, the frame (43) is rotatably provided with a roller (45) inside, the roller (45) is embedded with a control module (46) at the center position, and the roller (45) is located directly above the corresponding rack (42), the roller (45) is provided with a sliding groove (47) around inside, the sliding groove (47) is fixedly provided with an electric telescopic rod (48) inside, the sliding groove (47) is embedded with a limiting block (49) inside, and the electric telescopic rod (48) is fixedly connected with the limiting block (49) at the telescopic end, the roller (45) is fixedly connected with a connecting shaft (50) at the center position, the frame (43) is fixedly provided with a fan (51) inside, and the connecting shaft (50) is fixedly connected with an impeller inside the fan (51) at the end, the connecting shaft (50) is fixedly provided with a driving wheel (52), the frame (43) is rotatably provided with a driven shaft (53) inside, and the driven shaft (53) extends out of the frame (43) at one end, the driven shaft (53) is fixedly provided with a rotary knob (54) at the end, the driven shaft (53) is fixedly provided with a driven wheel (55), and the driven wheel (55) and the driving wheel (52) are connected through a belt drive, and the driven shaft (53) is fixedly provided with a first bevel gear (56) at the end. The middle plate (4) is symmetrically provided with a storage groove (59) inside, the storage groove (59) is fixedly provided with a limiting frame (60) inside, the limiting frame (60) is provided with a square plate (61) inside, and the square plate (61) is clamped with the limiting frame (60) inside, the square plate (61) is fixedly provided with a threaded sleeve (62) inside, the threaded sleeve (62) is threadedly connected with a drive screw (63) inside, and the drive screw (63) extends into the frame (43) at one end, the drive screw (63) is fixedly provided with a second bevel gear (57) at the end, and the two symmetrically arranged second bevel gears (57) are engaged with the first bevel gear (56), the storage groove (59) is provided with a piston block (58) inside, and the square plate (61) is fixedly connected with the piston block (58) at the end, and the storage groove (59) is provided with a telescopic hose (64) at the end.

10. The three-axis integrated precision motion platform of claim 9, wherein: The lower shaft guide rail (2) and the upper shaft guide rail (6) are internally provided with air grooves (65), the air grooves (65) are connected with the output end of the air blower (51) through air supply pipes, air injection holes (66) are arranged on the air grooves (65), the lower shaft guide rail (2) and the upper shaft guide rail (6) are internally provided with liquid discharge heads (67), and the liquid discharge heads (67) are connected with the flexible hoses (64) in communication.

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