基于事件驱动的SECS / GEM设备时序数据管理方法
By adopting an event-driven SECS/GEM device timing data management method, the data traceability problem in multi-device collaborative scenarios is solved, achieving efficient storage and retrieval, improving the optimization efficiency and decision-making capabilities of the production line, reducing costs and risks, and making it suitable for multi-device collaborative management in semiconductor manufacturing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NORTHEASTERN UNIV CHINA
- Filing Date
- 2026-03-05
- Publication Date
- 2026-07-17
AI Technical Summary
The existing SECS/GEM system lacks the ability to record and trace historical data in multi-device collaborative scenarios, making it difficult to meet the needs of tracing and diagnosing production events in semiconductor manufacturing. Furthermore, it lacks event-driven and reasoning capabilities, leading to difficulties in production optimization.
An event-driven SECS/GEM device time-series data management method is adopted. By actively polling and collecting production equipment status data and passively receiving point information, combined with equipment constant ID management, efficient storage and query are achieved, and the correlation analysis of time-series data of multiple devices and event-driven data processing are supported.
It enables efficient storage and retrieval of time-series data from multiple devices, improves production optimization efficiency, reduces labor costs and equipment malfunction risks, enhances decision-making efficiency and data security, supports time-series prediction and anomaly detection, and strengthens the overall efficiency of the production line.
Smart Images
Figure CN121764758B_ABST