Single crystal silicon rod grinding device

Abstract

The invention relates to the technical field of silicon rod machining, and discloses a silicon single crystal rod grinding device which comprises a machine base. The grinding mechanism is arranged at one end of the top surface of the machine base and is used for grinding the silicon rod; the feeding mechanism is located on the side face of the machine base and used for conveying silicon rods to the grinding mechanism. The grinding mechanism comprises a guide wheel, a grinding wheel and a carrier roller, the guide wheel and the grinding wheel respectively rotate along own axes and are oppositely arranged on the machine base, and the carrier roller is arranged between the guide wheel and the grinding wheel and floats on the machine base. According to the silicon single crystal rod grinding device, the feeding mechanism is used for conveying the silicon rod to the grinding mechanism, when the silicon rod passes through the grinding mechanism in the axial direction, the guide wheel drives the silicon rod to rotate, the carrier roller jacks up the silicon rod, the grinding wheel grinds the outer circumferential face of the silicon rod, a clamp is not needed when the silicon rod is ground, continuous operation can be conducted, and the grinding efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of silicon rod processing technology, and more specifically, to a single-crystal silicon rod grinding apparatus. Background Technology

[0002] Monocrystalline silicon rods are primarily used in semiconductor manufacturing, solar cells, and optoelectronic devices. They are the fundamental material for producing integrated circuits, transistors, and other semiconductor devices. Monocrystalline silicon rods grown using the Czochralski or floating zone methods exhibit high uniformity and purity, making them suitable for manufacturing core electronic components such as computer chips and communication equipment. Monocrystalline silicon rods are also the main raw material for monocrystalline silicon solar cells. By slicing them into thin sheets and undergoing photoelectric conversion treatment, a photoelectric conversion efficiency of approximately 15% can be achieved. Despite their higher cost, their mature technology and stable performance make them the preferred material for high-efficiency solar cells. Monocrystalline silicon rods can also be used to manufacture optical fibers, lasers, LEDs, and other devices due to their high transparency and conductivity.

[0003] Monocrystalline silicon rods are typically produced using the Czochralski method. During the production process, temperature variations in the quartz crucible and fluctuations in the pulling speed can lead to suboptimal diameter, roundness, and surface finish of the monocrystalline silicon rods. After production, the monocrystalline silicon rods require external cylindrical machining to improve their roundness and surface finish. This machining also helps to eliminate oxide layers and microcracks on the surface of the monocrystalline silicon rods, thereby improving their overall quality.

[0004] Patent document CN217096947U discloses a single-crystal silicon rod grinding device, including a table with four supporting feet fixed to the four corners of the lower surface of the table. An L-shaped support plate is fixed to one side of the upper surface of the table, and a trapezoidal opening is provided in the middle of the table. This invention includes a tabletop, an L-shaped support plate, support rollers, a hydraulic cylinder, a grinding structure, an electric push-pull rod, a second motor, a first rubber head, and a second rubber head. The single-crystal silicon rod is placed on the surfaces of the two support rollers. Then, the extension of the electric push-pull rod drives the first rubber head to squeeze and position the silicon rod, facilitating the rotation of the silicon rod by the second motor. The hydraulic cylinder then drives the grinding structure to descend, and the first motor drives the grinding rollers to grind the silicon rod into a round shape. This device positions and fixes the silicon rod from both sides during grinding, reducing the clamping area at both ends of the silicon rod, allowing the surface of the silicon rod to be completely ground, thereby reducing the cutting dimensions at both ends and saving materials.

[0005] Existing single-crystal silicon rod grinding equipment requires clamping the silicon rod at both ends during grinding. Each silicon rod needs to be installed and removed from the fixture before and after grinding, which wastes time, has low grinding efficiency, and cannot perform continuous grinding operations.

[0006] Therefore, it is necessary to propose a single-crystal silicon rod grinding device to solve the problems existing in the prior art. Summary of the Invention

[0007] The summary section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. The summary section of this invention is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0008] To address the above problems, the present invention provides a single-crystal silicon rod grinding apparatus, comprising: Base; The grinding mechanism, located at one end of the top surface of the machine base, is used to grind the silicon rod; The feeding mechanism, located on the side of the machine base, is used to feed silicon rods to the grinding mechanism; The grinding mechanism includes a guide wheel, a grinding wheel, and a support roller. The guide wheel and the grinding wheel rotate along their own axes and are arranged relative to each other on the machine base. The support roller is located between the guide wheel and the grinding wheel and is floating on the machine base.

[0009] Preferably, a guide rail is provided on the top surface of the machine base, and a guide wheel seat and a grinding wheel seat are slidably arranged on the guide rail. The guide wheel is rotatably mounted on the guide wheel seat, and the grinding wheel is rotatably mounted on the grinding wheel seat. L-shaped fixed seats are arranged opposite each other on the front and rear side walls of the machine base. The first electric cylinder is installed on the fixed seat, and the power output shaft of the first electric cylinder is connected to the guide wheel seat and the grinding wheel seat respectively.

[0010] Preferably, a floating cavity is provided inside the machine base, and a floating cylinder is provided on the bottom surface of the floating cavity; The idler roller includes an idler frame and a roller shaft. The roller shaft is rotatably mounted on the top surface of the idler frame, and the lower end of the idler frame passes through the top surface of the machine base and enters the floating chamber to connect with the piston of the floating cylinder.

[0011] Preferably, the feeding mechanism includes a hopper and a lifting unit. The lifting unit lifts the silicon rod in the hopper to a position between the guide wheel, the grinding wheel and the roller, and pushes the silicon rod to move axially between the guide wheel, the grinding wheel and the roller to complete the grinding.

[0012] Preferably, the hopper includes a base, a drive wheel, a transmission wheel, a driven wheel, and a conveyor belt. The drive wheel and the driven wheel are disposed opposite to each other on the inner wall of the base near the lifting unit. The drive wheel and the driven wheel are coaxially arranged. The transmission wheel is rotatably disposed on the inner wall of the base away from the lifting unit. The transmission wheel is parallel to the drive wheel and the driven wheel. The drive wheel and driven wheel are connected to the transmission wheel via conveyor belts.

[0013] Preferably, the conveyor belt includes a belt body and conveyor blocks spaced apart on the belt body. V-shaped grooves are formed on the upper surface of the conveyor blocks, and the conveyor blocks on the two conveyor belts are arranged opposite to each other.

[0014] Preferably, the lifting unit includes a support frame, a lifting plate is slidably disposed on the side of the support frame near the hopper, and two lifting blocks are spaced apart on the side of the lifting plate away from the support frame. The lifting blocks are L-shaped, and the upper surface of the horizontal bar of the lifting block is inclined downward along the direction close to the vertical bar.

[0015] Preferably, a first rack is provided on the side of the lifting plate away from the lifting block, a second rack is fixedly provided on the bracket, a slider is vertically slidably provided on the bracket, and a gear is rotatably provided on the slider, with the gear meshing with the first rack and the second rack respectively.

[0016] Preferably, a second electric cylinder is installed at the top of the bracket, and the slider is connected to the power output shaft of the second electric cylinder.

[0017] Preferably, a linkage component is provided between the hopper and the lifting unit. The linkage component includes a connecting block fixedly installed on the end face of the lifting plate near the drive wheel. A limiting groove is opened on the connecting block. A rotating shaft is fixedly installed on the bottom surface of the limiting groove. A pawl is rotatably installed on the rotating shaft. A spring plate is fixedly installed on the side wall inside the pawl of the limiting groove. A ratchet is connected to the drive wheel on the outer wall of the base, and the pawl is engaged with the ratchet.

[0018] Compared with the prior art, the present invention has at least the following beneficial effects: The single-crystal silicon rod grinding device of the present invention has a feeding mechanism for feeding silicon rods to a grinding mechanism. When the silicon rod passes through the grinding mechanism along the axial direction, the guide wheel drives the silicon rod to rotate, the support roller lifts the silicon rod, and the grinding wheel grinds the outer circumferential surface of the silicon rod. The silicon rod does not need a clamp during grinding and can be operated continuously, which improves the grinding efficiency.

[0019] The single-crystal silicon rod grinding apparatus of the present invention, other advantages, objectives and features of the present invention will be apparent in part from the following description, and in part will be understood by those skilled in the art through study and practice of the present invention. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of the single-crystal silicon rod grinding device disclosed in this invention; Figure 2 This is a schematic diagram of the grinding mechanism disclosed in this invention; Figure 3 This is a schematic diagram of the feeding mechanism disclosed in this invention; Figure 4 This is a schematic diagram of the structure of the hopper disclosed in this invention; Figure 5This is a schematic diagram of the lifting unit disclosed in this invention; Figure 6 This is a schematic diagram of the side rear view of the lifting unit disclosed in this invention; Figure 7 This is a schematic diagram of the lifting plate disclosed in this invention; Figure 8 This is a schematic diagram of the linkage component disclosed in this invention.

[0021] The components include: 1. Machine base; 2. Grinding mechanism; 3. Feeding mechanism; 4. Guide wheel; 5. Grinding wheel; 6. Idler roller; 7. Guide rail; 8. Guide wheel seat; 9. Grinding wheel seat; 10. Fixed seat; 11. First electric cylinder; 12. Floating chamber; 13. Floating cylinder; 14. Idler roller frame; 15. Roller shaft; 16. Hopper; 17. Lifting unit; 18. Base; 19. Drive wheel; 20. Transmission wheel; 21. Driven wheel; 22. 23. Conveyor belt, 24. Belt body, 25. Conveyor block, 26. V-groove, 27. Support, 28. Lifting plate, 29. Lifting block, 30. Horizontal bar, 31. Longitudinal bar, 32. First rack, 33. Second rack, 34. Slider, 35. Gear, 36. Second electric cylinder, 37. Linkage assembly, 38. Connecting block, 39. Limiting groove, 40. Rotating shaft, 41. Pawl, 42. Spring plate, 43. Ratchet. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments, so that those skilled in the art can implement it based on the description.

[0023] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0024] like Figures 1-8 As shown, the present invention provides a single-crystal silicon rod grinding apparatus, comprising: Base 1; Grinding mechanism 2 is located at one end of the top surface of machine base 1 and is used to grind silicon rods; The feeding mechanism 3 is located on the side of the base 1 and is used to feed silicon rods to the grinding mechanism 2; The grinding mechanism 2 includes a guide wheel 4, a grinding wheel 5, and a support roller 6. The guide wheel 4 and the grinding wheel 5 rotate along their own axes and are arranged relative to each other on the machine base 1. The support roller 6 is located between the guide wheel 4 and the grinding wheel 5 and is floatingly arranged on the machine base 1.

[0025] Furthermore, a guide rail 7 is provided on the top surface of the machine base 1, and a guide wheel seat 8 and a grinding wheel seat 9 are slidably arranged on the guide rail 7. The guide wheel 4 is rotatably arranged on the guide wheel seat 8, and the grinding wheel 5 is rotatably arranged on the grinding wheel seat 9. L-shaped fixed seats 10 are arranged opposite each other on the side walls of the front and rear sides of the machine base 1. A first electric cylinder 11 is arranged on the fixed seat 10. The power output shaft of the first electric cylinder 11 is connected to the guide wheel seat 8 and the grinding wheel seat 9 respectively.

[0026] Furthermore, a floating cavity 12 is provided inside the base 1, and a floating cylinder 13 is provided on the bottom surface of the floating cavity 12; The idler roller 6 includes an idler frame 14 and a roller shaft 15. The roller shaft 15 is rotatably mounted on the top surface of the idler frame 14. The lower end of the idler frame 14 passes through the top surface of the machine base 1 and enters the floating cavity 12 to connect with the piston of the floating cylinder 13.

[0027] Furthermore, the feeding mechanism 3 includes a hopper 16 and a lifting unit 17. The lifting unit 17 lifts the silicon rod in the hopper 16 to a position between the guide wheel 4, the grinding wheel 5 and the support roller 6, and pushes the silicon rod to move axially between the guide wheel 4, the grinding wheel 5 and the support roller 6 to complete the grinding.

[0028] Furthermore, the hopper 16 includes a base 18, a drive wheel 19, a transmission wheel 20, a driven wheel 21, and a conveyor belt 22. The drive wheel 19 and the driven wheel 21 are disposed opposite to each other on the inner wall of the base 18 near the end of the lifting unit 17. The drive wheel 19 and the driven wheel 21 are coaxially disposed. The transmission wheel 20 is rotatably disposed on the inner wall of the base 18 away from the lifting unit 17. The transmission wheel 20 is parallel to the drive wheel 19 and the driven wheel 21. The drive wheel 19 and the driven wheel 21 are respectively connected to the transmission wheel 20 via the conveyor belt 22.

[0029] Furthermore, the conveyor belt 22 includes a belt body 23 and conveyor blocks 24 spaced apart on the belt body 23. A V-groove 25 is formed on the upper surface of the conveyor block 24, and the conveyor blocks 24 on the two conveyor belts 22 are arranged opposite to each other.

[0030] Furthermore, the lifting unit 17 includes a support 26, a lifting plate 27 is slidably arranged on the side of the support 26 near the hopper 16, and two lifting blocks 28 are spaced apart on the side of the lifting plate 27 away from the support 26. The lifting blocks 28 are L-shaped, and the upper surface of the horizontal bar 29 of the lifting block 28 is inclined downward along the direction close to the longitudinal bar 30.

[0031] Furthermore, a first rack 31 is provided on the side of the lifting plate 27 away from the lifting block 28, a second rack 32 is fixedly provided on the bracket 26, a slider 33 is vertically slidably provided on the bracket 26, and a gear 34 is rotatably provided on the slider 33. The gear 34 is respectively meshed with the first rack 31 and the second rack 32.

[0032] Furthermore, a second electric cylinder 35 is provided on the top of the bracket 26, and the slider 33 is connected to the power output shaft of the second electric cylinder 35.

[0033] Furthermore, a linkage component 36 is provided between the hopper 16 and the lifting unit 17. The linkage component 36 includes a connecting block 37 fixedly disposed on the end face of the lifting plate 27 near the drive wheel 19. A limiting groove 38 is provided on the connecting block 37. A rotating shaft 39 is fixedly disposed on the bottom surface of the limiting groove 38. A pawl 40 is rotatably disposed on the rotating shaft 39. A spring sheet 41 is fixedly disposed on the side wall inside the pawl 40 in the limiting groove 38. A ratchet 42 is connected to the drive wheel 19 on the outer wall of the base 18, and a pawl 40 is engaged with the ratchet 42.

[0034] The working principle of the above technical solution: A single-crystal silicon rod grinding apparatus, comprising: The base 1 serves to support the grinding mechanism 2, and the feeding mechanism 3 is located on the side of the end of the base where the grinding mechanism 2 is installed. Grinding mechanism 2 is located at one end of the top surface of machine base 1 and is used to grind silicon rods; The feeding mechanism 3 is located on the side of the base 1 and is used to feed silicon rods to the grinding mechanism 2; The grinding mechanism 2 includes a guide wheel 4, a grinding wheel 5, and a support roller 6. The guide wheel 4 and the grinding wheel 5 rotate along their own axes and are arranged relative to each other on the machine base 1. The support roller 6 is arranged between the guide wheel 4 and the grinding wheel 5 and is floating on the machine base 1. The feeding mechanism 3 feeds the silicon rod into the grinding mechanism 2. The support roller 6 supports the silicon rod from below. The guide wheel 4 drives the silicon rod to rotate at a low speed. The high-speed rotating grinding wheel 5 grinds the circumferential surface of the silicon rod. The three structures, guide wheel 4, grinding wheel 5, and support roller 6, are in contact with the silicon rod to form a stable support system. Using the support roller 6 to support the silicon rod can reduce friction with the circumferential surface of the silicon rod, making the silicon rod rotate more smoothly and preventing the silicon rod from jumping, which would affect the grinding quality.

[0035] The single-crystal silicon rod grinding device can be equipped with a spray mechanism to spray coolant onto the grinding position of the silicon rod during grinding, thereby cooling the silicon rod. While cooling, the coolant can also remove the debris generated during the grinding process, preventing the debris from sticking to the guide roller 4 and affecting the grinding quality.

[0036] The center lines of the guide wheel 4 and the grinding wheel 5 are set parallel to each other, so that the height of the center lines of the guide wheel 4 and the grinding wheel 5 can be set to be the same. When the silicon rod enters between the guide wheel 4, the grinding wheel 5 and the support roller 6, the center line of the silicon rod is parallel to the center lines of the guide wheel 4 and the grinding wheel 5. The height of the center line of the silicon rod can be slightly higher than the height of the center lines of the guide wheel 4 and the grinding wheel 5.

[0037] The above technical solution grinds silicon rods without clamping them, drilling center holes at both ends, or using clamping. It enables automated continuous production with high efficiency. The ground silicon rods achieve high roundness and coaxiality with high processing precision.

[0038] A guide rail 7 is provided on the top surface of the machine base 1. A guide wheel seat 8 and a grinding wheel seat 9 are slidably arranged on the guide rail 7. The guide wheel 4 is rotatably arranged on the guide wheel seat 8, and the grinding wheel 5 is rotatably arranged on the grinding wheel seat 9.

[0039] L-shaped fixed seats 10 are arranged opposite each other on the side walls of the front and rear sides of the machine base 1. A first electric cylinder 11 is arranged on the fixed seat 10. The power output shaft of the first electric cylinder 11 is connected to the guide wheel seat 8 and the grinding wheel seat 9 respectively. A floating cavity 12 is opened in the machine base 1. A floating cylinder 13 is arranged on the bottom surface of the floating cavity 12. The roller 6 includes a roller frame 14 and a roller shaft 15. The roller shaft 15 is rotatably arranged on the top surface of the roller frame 14. The lower end of the roller frame 14 passes through the top surface of the machine base 1 and enters the floating cavity 12 to connect with the piston of the floating cylinder 13.

[0040] The first electric cylinder 11 can adjust the distance between the guide wheel 4 and the grinding wheel 5 to accommodate the grinding of silicon rods with different outer diameters. When grinding silicon rods with different outer diameters, the height of the support roller 6 is set differently. The height of the support roller can be adjusted by adjusting the extension length of the piston of the floating cylinder. Taking the hydraulic floating cylinder as an example, when grinding silicon rods with larger outer diameters, the hydraulic oil in the hydraulic floating cylinder is reduced, so that the extension length of the piston of the hydraulic floating cylinder is reduced and the height of the support roller 6 is lowered, so that the center line of the silicon rod can be aligned with the grinding mechanism to accommodate the grinding of silicon rods with large outer diameters. The support roller 6 is supported by the floating cylinder 13. The floating cylinder 13 can absorb the vibration during grinding and improve the surface quality of the grinding.

[0041] The guide wheel 4 and the grinding wheel 5 rotate counterclockwise. The speed of the guide wheel can be set to 10-50 rpm. The guide wheel 4 drives the silicon rod to rotate. The speed of the grinding wheel can be set to 1000-3000 rpm to grind the silicon rod.

[0042] The guide wheel 4 can be made of polyurethane. Silicon rods are brittle materials and are most susceptible to impact and stress concentration. The elastic modulus of polyurethane is much lower than that of silicon, which can effectively absorb the small vibrations and impacts generated during grinding, preventing chipping (corner missing) or micro-cracks on the edges of the silicon rod. Moreover, polyurethane has a high coefficient of friction, which can provide better driving force. The polyurethane guide wheel has sufficient friction to stably drive the silicon rod to rotate, preventing slippage, thereby ensuring grinding accuracy and roundness.

[0043] The idler roller 6 can be made of cemented carbide (such as YG8). Cemented carbide has good wear resistance and stability. The rotating setting of the idler roller 6 can reduce friction with the silicon rod.

[0044] Polyurethane has high wear resistance, can withstand friction on the surface of the silicone rod, has a long service life, and reduces replacement frequency and maintenance costs.

[0045] The feeding mechanism 3 includes a hopper 16 and a lifting unit 17. The lifting unit 17 lifts the silicon rod in the hopper 16 to a position between the guide wheel 4, the grinding wheel 5 and the support roller 6, and pushes the silicon rod to move axially between the guide wheel 4, the grinding wheel 5 and the support roller 6 to complete the grinding.

[0046] The hopper 16 includes a base 18, a drive wheel 19, a transmission wheel 20, a driven wheel 21, and a conveyor belt 22. The drive wheel 19 and the driven wheel 21 are disposed opposite to each other on the inner wall of the base 18 near the end of the lifting unit 17. The drive wheel 19 and the driven wheel 21 are coaxially arranged. The transmission wheel 20 is rotatably disposed on the inner wall of the base 18 away from the lifting unit 17. The transmission wheel 20 is parallel to the drive wheel 19 and the driven wheel 21. The drive wheel 19 and the driven wheel 21 are respectively connected to the transmission wheel 20 via the conveyor belt 22.

[0047] The conveyor belt 22 includes a belt body 23 and conveyor blocks 24 spaced apart on the belt body 23. V-grooves 25 are formed on the upper surface of the conveyor blocks 24, and the conveyor blocks 24 on the two conveyor belts 22 are arranged opposite to each other.

[0048] The silicon rods are placed in the hopper 16 and in the V-grooves 25 of two oppositely arranged conveying blocks 24. The two conveying blocks support the silicon rods at both ends. The lifting unit 17 transports the silicon rods away in sequence. After one silicon rod is transported away, the drive wheel 19 rotates at a certain angle to transport the next silicon rod to the lifting position and then transports it away through the lifting unit 17. During the continuous transportation of the silicon rods, each silicon rod is placed in the V-grooves 25, which not only maintains the stability of the silicon rods but also prevents contact and collision between the silicon rods.

[0049] The lifting unit 17 includes a support 26. A lifting plate 27 is slidably arranged on the side of the support 26 near the hopper 16. Two lifting blocks 28 are spaced apart on the side of the lifting plate 27 away from the support 26. The lifting blocks 28 are L-shaped. The upper surface of the horizontal bar 29 of the lifting block 28 is inclined downward along the direction close to the vertical bar 30. When transporting silicon rods, the lifting plate 27 first descends to the lifting position, and then the drive wheel 19 rotates to transport the silicon rods to the lifting position. After that, the lifting plate 27 moves upward and lifts the silicon rods upward through the lifting blocks 28 to reach the height of the roller.

[0050] The feeding mechanism 3 also includes a pusher rod, which is located on the upper part of the base 18. After the silicon rod reaches the height of the support roller, the pusher rod pushes the silicon rod towards the grinding mechanism 2, allowing the silicon rod to enter the grinding mechanism for grinding. After the silicon rod has completely entered the grinding mechanism, the lifting plate 27 descends to lift the next silicon rod. The pusher rod continues to push the current silicon rod until it passes through the grinding mechanism 2. A discharge mechanism can be set on the base 1 at intervals from the grinding mechanism 2 to transport the ground silicon rod. After pushing the current silicon rod to complete the grinding, the pusher rod returns to its initial position, waiting to push the next silicon rod.

[0051] The lifting plate 27 is moved up and down using the second electric cylinder 35. If the stroke of the lifting plate 27 is large, an electric cylinder with a longer piston rod is required. If the size of the electric cylinder is too large, it will affect the stability and occupy more vertical space. A first rack 31 is set on the side of the lifting plate 27 away from the lifting block 28. A second rack 32 is fixedly set on the bracket 26. Both the first rack 31 and the second rack 32 are set vertically. A slider 33 is vertically slidably set on the bracket 26. A gear 34 is rotatably set on the slider 33. The gear 34 is meshed with the first rack 31 and the second rack 32 respectively. A second electric cylinder 35 is set on the top of the bracket 26. The slider 33 is connected to the power output shaft of the second electric cylinder 35. The second electric cylinder 35 drives the slider 33 to move up and down through the piston rod. The gear 34 meshes with the second rack 32 and rotates. At the same time, the gear 34 pushes the first rack 31 to move. The moving distance of the first rack 31 is twice the moving distance of the piston rod of the second electric cylinder.

[0052] The above technical solution can use a small-stroke electric cylinder to achieve a large stroke of the first rack 31, which can reduce the space required and save costs.

[0053] A linkage component 36 is provided between the hopper 16 and the lifting unit 17. The linkage component 36 includes a connecting block 37 fixedly installed on the end face of the lifting plate 27 near the drive wheel 19. A limiting groove 38 is opened on the connecting block 37. A rotating shaft 39 is fixedly installed on the bottom surface of the limiting groove 38. A pawl 40 is rotatably installed on the rotating shaft 39. A spring plate 41 is fixedly installed on the side wall inside the pawl 40 in the limiting groove 38. A ratchet 42 is connected to the drive wheel 19 on the outer wall of the base 18, and a pawl 40 is engaged with the ratchet 42.

[0054] As the lifting plate 27 moves upward, the pawl 40 moves upward together with it. When it contacts the ratchet 42, the pressure of the ratchet 42 on the pawl 40 causes the pawl 40 to squeeze the spring plate 41, causing the pawl 40 to rotate clockwise. This allows the pawl 40 to slide over the surface of the ratchet 42 without causing the ratchet 42 to rotate. After passing the ratchet 42, the pawl 40 rotates counterclockwise under the elastic force of the spring plate 41 and abuts against the side wall of the limiting groove 38. After the lifting plate 27 has finished transporting the previous silicon rod, it moves downward, and the pawl 40 moves downward from above... When the ratchet 42 contacts, the upper part of the pawl 40 is blocked by the side wall of the limiting groove 38, preventing the pawl 40 from rotating. As a result, the pawl 40 pushes the ratchet 42 to rotate. When the ratchet 42 starts to rotate, the lifting block 28 reaches between the drive wheel 19 and the driven wheel 21. The ratchet 42 continues to rotate, causing the conveying block 24 to move toward the lifting unit 17. When the ratchet 42 stops rotating, the conveying block 24 and the silicon rod placed on it reach the lifting position. At this time, the lifting block 28 is located below the silicon rod, and the lifting plate 27 moves upward to lift the silicon rod located at the lifting position.

[0055] In the above technical solution, the downward movement of the lifting plate 27 drives the drive wheel 19 to rotate, moving the silicon rod in the hopper forward. No additional power is required, which can reduce the cost of the grinding process.

[0056] The beneficial effects of the above technical solution are as follows: The single-crystal silicon rod grinding device of the present invention has a feeding mechanism for feeding silicon rods to a grinding mechanism. When the silicon rod passes through the grinding mechanism along the axial direction, the guide wheel drives the silicon rod to rotate, the support roller lifts the silicon rod, and the grinding wheel grinds the outer circumferential surface of the silicon rod. The silicon rod does not need a clamp during grinding and can be operated continuously, which improves the grinding efficiency.

[0057] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0058] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0059] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. Other modifications can be easily made by those skilled in the art. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.

Claims

1. A single-crystal silicon rod grinding device, characterized in that, include: Base (1); The grinding mechanism (2) is set at one end of the top surface of the base (1) and is used to grind the silicon rod; The feeding mechanism (3) is located on the side of the base (1) and is used to feed silicon rods to the grinding mechanism (2); The grinding mechanism (2) includes a guide wheel (4), a grinding wheel (5) and a support roller (6). The guide wheel (4) and the grinding wheel (5) rotate along their own axes and are respectively arranged relative to each other on the machine base (1). The support roller (6) is located between the guide wheel (4) and the grinding wheel (5) and is floating on the machine base (1).

2. The single-crystal silicon rod grinding apparatus according to claim 1, characterized in that, A guide rail (7) is provided on the top surface of the machine base (1). A guide wheel seat (8) and a grinding wheel seat (9) are slidably provided on the guide rail (7). The guide wheel (4) is rotatably provided on the guide wheel seat (8), and the grinding wheel (5) is rotatably provided on the grinding wheel seat (9). L-shaped fixed seats (10) are arranged opposite each other on the side walls of the front and rear sides of the machine base (1). A first electric cylinder (11) is arranged on the fixed seat (10). The power output shaft of the first electric cylinder (11) is connected to the guide wheel seat (8) and the grinding wheel seat (9) respectively.

3. The single-crystal silicon rod grinding apparatus according to claim 1, characterized in that, A floating cavity (12) is provided inside the base (1), and a floating cylinder (13) is provided on the bottom surface of the floating cavity (12). The idler roller (6) includes an idler frame (14) and a roller shaft (15). The roller shaft (15) is rotatably mounted on the top surface of the idler frame (14). The lower end of the idler frame (14) passes through the top surface of the machine base (1) and enters the floating cavity (12) to connect with the piston of the floating cylinder (13).

4. The single-crystal silicon rod grinding apparatus according to claim 3, characterized in that, The feeding mechanism (3) includes a hopper (16) and a lifting unit (17). The lifting unit (17) lifts the silicon rod in the hopper (16) to a position between the guide wheel (4), the grinding wheel (5) and the roller (6), and pushes the silicon rod to move axially between the guide wheel (4), the grinding wheel (5) and the roller (6) to complete the grinding.

5. The single-crystal silicon rod grinding apparatus according to claim 4, characterized in that, The hopper (16) includes a base (18), a drive wheel (19), a transmission wheel (20), a driven wheel (21), and a conveyor belt (22). The drive wheel (19) and the driven wheel (21) are arranged opposite to each other on the inner wall of the base (18) near the end of the lifting unit (17). The drive wheel (19) and the driven wheel (21) are coaxially arranged. The transmission wheel (20) is rotatably arranged on the inner wall of the base (18) away from the lifting unit (17). The transmission wheel (20) is parallel to the drive wheel (19) and the driven wheel (21). The drive wheel (19) and the driven wheel (21) are connected to the transmission wheel (20) via the conveyor belt (22).

6. The single-crystal silicon rod grinding apparatus according to claim 5, characterized in that, The conveyor belt (22) includes a belt body (23) and conveyor blocks (24) spaced apart on the belt body (23). A V-groove (25) is opened on the upper surface of the conveyor block (24), and the conveyor blocks (24) on the two conveyor belts (22) are arranged opposite to each other.

7. The single-crystal silicon rod grinding apparatus according to claim 6, characterized in that, The lifting unit (17) includes a bracket (26). A lifting plate (27) is slidably arranged on the side of the bracket (26) near the hopper (16). Two lifting blocks (28) are spaced apart on the side of the lifting plate (27) away from the bracket (26). The lifting blocks (28) are L-shaped. The upper surface of the horizontal bar (29) of the lifting block (28) is inclined downward along the direction close to the vertical bar (30).

8. The single-crystal silicon rod grinding apparatus according to claim 7, characterized in that, A first rack (31) is provided on the side of the lifting plate (27) away from the lifting block (28), a second rack (32) is fixedly provided on the bracket (26), a slider (33) is vertically slidably provided on the bracket (26), and a gear (34) is rotatably provided on the slider (33). The gear (34) meshes with the first rack (31) and the second rack (32) respectively.

9. The single-crystal silicon rod grinding apparatus according to claim 8, characterized in that, A second electric cylinder (35) is installed on the top of the bracket (26), and the slider (33) is connected to the power output shaft of the second electric cylinder (35).

10. The single-crystal silicon rod grinding apparatus according to claim 9, characterized in that, A linkage assembly (36) is provided between the hopper (16) and the lifting unit (17). The linkage assembly (36) includes a connecting block (37) fixedly installed on the end face of the lifting plate (27) near the drive wheel (19). A limiting groove (38) is opened on the connecting block (37). A rotating shaft (39) is fixedly installed on the bottom surface of the limiting groove (38). A pawl (40) is rotatably installed on the rotating shaft (39). A spring plate (41) is fixedly installed on the side wall inside the pawl (40) in the limiting groove (38). The outer wall of the base (18) is connected to the drive wheel (19) via a ratchet (42), and the pawl (40) is engaged with the ratchet (42).

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