Arc target with multiple cooling

Abstract

The invention discloses an arc target with multiple cooling, and relates to the technical field of vacuum coating, the arc target with multiple cooling comprises an anode shell, one end of the anode shell is fixedly connected with an insulating shell, the other end of the anode shell is open, and a copper column is arranged on the insulating shell in a penetrating manner; the target seat is located in the anode shell and close to the opening, and the target seat is fixedly connected with one end, located in the anode shell, of the copper column; a cathode target material is mounted on the target seat; the plurality of cooling assemblies are respectively arranged on the inner side of the cathode target material, in the insulating shell, on the outer side of the opening end of the anode shell and on the inner side of the opening end of the anode shell. According to the arc target with the multiple cooling function, sufficient and efficient cooling can be achieved, and the defect of large particles is reduced.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to an arc target with multiple cooling systems. Background Technology

[0002] Vacuum coating technology, with vapor phase deposition as its core, has been widely applied in various fields such as industrial manufacturing and precision machining. It is mainly divided into two categories: physical vapor deposition (PVD) and chemical vapor deposition (CVD). Among them, multi-arc ion plating, as one of the most widely used branches of physical vapor deposition, occupies an important position in the coating treatment of key components such as cutting tools and molds due to its outstanding advantages such as high hardness, high deposition efficiency, and good adhesion to the substrate, providing strong support for improving the performance of related products.

[0003] However, in the actual coating process of multi-arc ion plating, the arc spot area generates extremely high temperatures. This high-temperature environment causes localized melting of the target material and the formation of droplets. These molten droplets are easily sprayed onto the substrate surface to be coated, resulting in large particle defects on the coating surface. These defects severely affect the surface smoothness, density, and performance of the coating, making it difficult for multi-arc ion plating technology to meet the application requirements of high-precision machining, high-density protective coatings, and other fields with stringent coating quality requirements. This greatly limits the further expansion of its application scope.

[0004] From the perspective of current technology, the thermal management systems of multi-arc ion plating targets generally rely on a single type of cooling mechanism. This single cooling method has inherent defects: limited cooling efficiency and insufficient cooling uniformity, making it difficult to quickly and fully dissipate the large amount of heat generated by the target material, and failing to fundamentally solve the problem of molten droplet generation in the target material.

[0005] Therefore, there is an urgent need to design an arc target structure that can achieve sufficient and efficient cooling in order to improve the problem of large particle defects. Summary of the Invention

[0006] The purpose of this invention is to provide an arc target with multiple cooling systems to solve the problems existing in the prior art, thereby achieving sufficient and efficient cooling to reduce large particle defects.

[0007] To achieve the above objectives, the present invention provides the following solution: This invention provides an arc target with multiple cooling systems, comprising: The anode housing has an insulating housing fixedly connected to one end and an open end, with a copper pillar passing through the insulating housing. The target holder is located inside the anode housing near the opening, and the target holder is fixedly connected to one end of the copper pillar inside the anode housing. A cathode target is mounted on the target holder; and Multiple cooling components are respectively located inside the cathode target, inside the insulating shell, outside the opening end of the anode shell, and inside the opening end of the anode shell.

[0008] In one embodiment, the cooling assembly includes a first cooling assembly, a second cooling assembly, a third cooling assembly, and a fourth cooling assembly; the bottom of the first cooling assembly abuts against one end of the copper pillar located inside the anode housing, and the target holder and cathode target are disposed at the top of the first cooling assembly; the second cooling assembly is disposed inside the insulating housing to cool the interior of the anode housing; the third cooling assembly is disposed outside the opening end of the anode housing, and the fourth cooling assembly is disposed inside the opening end of the anode housing.

[0009] In one embodiment, the first cooling assembly includes a main plate, the outer edge of which is fixedly connected to the inner side of the opening end of the anode housing. The main plate has a plurality of cooling channels, a copper plate is fixedly disposed above the cooling channels, and a target seat with an annular structure is disposed on the copper plate. The cathode target is fixedly snapped into the target seat, and the bottom of the cathode target abuts against the copper plate.

[0010] In one embodiment, the insulating shell has a through hole, and the second cooling component is fixedly installed in the through hole of the insulating shell. The second cooling component includes a base, which is installed on the copper pillar and is fixedly connected to the side wall of the through hole of the insulating shell. The base has a plurality of mounting seats that penetrate the base, and a fan is installed in the mounting seat.

[0011] In one embodiment, the third cooling assembly includes a ring-shaped mounting plate with a cooling channel inside. One end of the cooling channel has a water inlet, and the other end has a water outlet. The water inlet and the water outlet are connected to a refrigeration device. The mounting plate is fixedly attached to the outside of the opening end of the anode housing.

[0012] In one embodiment, the fourth cooling component includes a cooling copper tube, a cooling groove is provided inside the open end of the anode housing, the cooling copper tube is embedded in the cooling groove, and refrigeration equipment is connected to both ends of the cooling copper tube.

[0013] In one embodiment, a magnet assembly is further included, which is sleeved on the copper pillar and located inside the anode housing.

[0014] In one embodiment, the target holder is provided with a plurality of circumferentially arranged limiting grooves, and the outer edge of the cathode target can be engaged in the corresponding limiting groove.

[0015] In one embodiment, the copper pillar is a hollow tubular structure.

[0016] In one embodiment, the inner wall of the opening end of the anode housing is provided with a horizontally inwardly extending flange; the third cooling component is provided on the outer side of the flange, and the fourth cooling component is provided on the inner side of the flange; the outer edge of the main body plate is fixedly connected to the inner side of the flange.

[0017] The present invention achieves the following technical effects compared to the prior art: This invention features four cooling components that operate simultaneously. The first cooling component directly cools the cathode target. The second cooling component is an air-cooled component that exhausts residual hot air from the cavity of the anode shell on the back of the cathode target. The third and fourth cooling components are anode cooling components that focus on cooling areas around the target that are prone to heat accumulation. The synergistic effect of multiple cooling components significantly improves the cooling effect, effectively cooling the target during the coating process, thereby reducing the generation of large particles and improving the problem of large particle defects in multi-arc ion plating. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a cross-sectional view of an arc target with multiple cooling systems in one or more embodiments of the present invention; Figure 2 This is a schematic diagram of the appearance of an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 3 This is a schematic diagram of the first cooling component of an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 4 This is a schematic diagram of the cooling water channel arrangement inside the first cooling assembly of an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 5 This is a cross-sectional view of a copper column with a multi-cooled arc target in one or more embodiments of the present invention. Figure 6 This is a schematic diagram of a second cooling component for an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 7 This is a schematic diagram of a third cooling component for an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 8This is a schematic diagram of the fourth cooling component of an arc target with multiple cooling systems in one or more embodiments of the present invention. Figure 9 This is a schematic diagram of the installation location of the fourth cooling component of an arc target with multiple cooling systems in one or more embodiments of the present invention.

[0020] In the diagram: 1-Cathode target, 2-Anode shell, 3-Target holder, 4-Arc limiting ring mounting base, 5-First cooling assembly, 501-Main plate, 502-Limiting groove, 503-Copper plate, 504-Sealing groove, 505-Cooling water channel, 6-Second cooling assembly, 601-Base, 602-Mounting base, 603-Fan, 7-Third cooling assembly, 701-Inlet, 702-Outlet, 8-Fourth cooling assembly, 801-Cooling copper pipe, 9-Magnet assembly, 10-Insulating shell, 11-Copper pillar. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] The purpose of this invention is to provide an arc target with multiple cooling systems to solve the problems existing in the prior art, thereby achieving sufficient and efficient cooling to reduce large particle defects.

[0023] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Existing thermal management systems for multi-arc ion plating targets generally rely on a single type of cooling mechanism. This singular cooling method has inherent drawbacks: limited cooling efficiency and insufficient cooling uniformity, making it difficult to quickly and adequately dissipate the large amount of heat generated by the target material. It also fails to fundamentally solve the problem of molten droplet generation from the target material, which is easily sprayed onto the substrate surface to be coated, resulting in large particle defects on the coating surface. To address this issue, this invention provides an arc target with multiple cooling mechanisms, as described above. Figures 1-9As shown, the device includes an anode shell 2, a target holder 3, a cathode target 1, and multiple cooling components. An insulating shell 10 is fixedly connected to one end of the anode shell 2, and the other end is open. A copper pillar 11 is inserted through the insulating shell 10, and a magnet assembly 9 is fitted on the copper pillar 11. The magnet assembly 9 is located inside the anode shell 2 and on the back side of the cathode target 1. The target holder 3 is located inside the anode shell 2 near the opening, and the target holder 3 is fixedly connected to the end of the copper pillar 11 inside the anode shell 2. The cathode target 1 is mounted on the target holder 3, and an arc-limiting ring mounting seat 4 is provided on the side of the cathode target 1 near the opening end of the anode shell 2. Multiple cooling components are respectively located inside the cathode target 1, inside the insulating shell 10, outside the opening end of the anode shell 2, and inside the opening end of the anode shell 2. The present invention has multiple cooling components that work simultaneously, which can directly cool the cathode target 1, expel residual hot air from the cavity of the anode shell 2 on the back of the cathode target 1, and focus on cooling the parts around the target that are prone to heat accumulation. The synergistic effect of multiple cooling components can significantly improve the cooling effect, effectively and fully cool the target during the coating process, thereby reducing the generation of large particles and improving the problem of large particle defects in multi-arc ion plating.

[0025] In one embodiment, four cooling components are provided, including a first cooling component 5, a second cooling component 6, a third cooling component 7, and a fourth cooling component 8. The bottom of the first cooling component 5 abuts against one end of the copper pillar 11 located inside the anode housing 2, and the target seat 3 and the cathode target 1 are located at the top of the first cooling component 5. The second cooling component 6 is located inside the insulating housing 10 to cool the inside of the anode housing 2. The third cooling component 7 is located outside the opening of the anode housing 2, and the fourth cooling component 8 is located inside the opening of the anode housing 2. The first cooling component 5 directly cools the cathode target 1, the second cooling component 6 is an air-cooling component that discharges residual hot air from the cavity of the anode housing 2 on the back of the cathode target 1, and the third and fourth cooling components 8 are anode cooling components that focus on cooling the parts around the target that are prone to heat accumulation.

[0026] Specifically, the first cooling assembly 5 includes a main plate 501. The outer edge of the main plate 501 is fixedly connected to the inner side of the opening end of the anode housing 2. The main plate 501 is provided with multiple cooling channels 505. A copper plate 503 is fixedly provided above the cooling channels 505. A ring-shaped target seat 3 is provided on the copper plate 503. The cathode target 1 is fixedly snapped into the target seat 3, and the bottom of the cathode target 1 abuts against the copper plate 503. In this embodiment, the cooling channel 505 is spiral-shaped and is connected to a refrigeration device. Cooling water flows in from the middle and flows out from both sides. This spiral-shaped cooling channel 505 can make the cooling water evenly distributed. The copper plate 503 is the cooling back plate of the cathode target 1. It is fixed to the main plate 501 by welding with the target seat 3. Copper has an extremely high thermal conductivity, so copper plate is selected for copper plate 503. The copper plate is extremely thin, with a thickness of only 1.5mm. It is fixed to the outside of the cooling channel 505 by brazing, so that the entire cooling back plate has good cooling performance. An insulating shell 10 has a through hole, and a second cooling component 6 is fixedly installed in the through hole. The second cooling component 6 includes a base 601, which is installed on the copper pillar 11 and is fixedly connected to the side wall of the through hole of the insulating shell 10. Six mounting seats 602 are provided on the base 601, and a fan 603 is provided in the mounting seat 602. The fan 603 is connected to a motor, which can drive the fan 603 to rotate quickly. The air circulation between the cavity inside the anode shell 2 and the outside is realized through the mounting seats 602, so that the heat in the cavity can be dissipated quickly. By rotating multiple fans 603 at the same time, the residual hot air in the cavity on the back of the cathode target 1 can be discharged more quickly. The third cooling assembly 7 includes a ring-shaped mounting plate with a cooling channel inside. One end of the cooling channel has an inlet 701, and the other end has an outlet 702. Refrigeration equipment is connected to both the inlet and outlet 701. This equipment may include a water tank, a chiller, and a circulating water pump. The circulating water pump delivers chilled water through the inlet 701 to the cooling channel. Water that has heated up after heat exchange returns to the refrigeration equipment through the outlet 702, thus achieving circulating heat dissipation. The mounting plate is fixedly attached to the outside of the opening end of the anode shell 2. The fourth cooling assembly 8 includes a cooling copper pipe 801. A cooling groove is formed inside the opening end of the anode shell 2, and the cooling copper pipe 801 is embedded in the cooling groove. Both ends of the cooling copper pipe 801 are connected to external refrigeration equipment. The third and fourth cooling assemblies 7 and 8 focus on cooling areas around the cathode target 1 where heat easily accumulates. This invention effectively cools the cathode target 1 during the coating process, thereby reducing the generation of large particles and improving the problem of large particle defects in multi-arc ion plating.

[0027] In one embodiment, the target holder 3 is provided with a plurality of circumferentially arranged limiting grooves 502, and the outer edge of the cathode target 1 can be engaged in the corresponding limiting groove 502; the anode shell 2 is fixedly connected to the vacuum chamber of the coating machine, and one end of the anode shell 2 has a detachable insulating shell 10. When the insulating shell 10 at one end of the anode shell 2 is removed, the first cooling component 5 and the copper pillar 11 can both be placed in the internal cavity of the anode shell 2.

[0028] In one embodiment, the copper pillar 11 is a hollow tubular structure with a light weight; the inner wall of the opening end of the anode housing 2 is provided with a horizontally extending flange; the third cooling component 7 is provided on the outer side of the flange, and the fourth cooling component 8 is provided on the inner side of the flange; the main body plate 501 is provided with uniformly arranged through holes and sealing grooves 504, and a sealing gasket can be provided in the sealing groove 504. The through holes are fixedly and sealed to the inner side of the flange of the anode housing 2 by bolts, thereby realizing the fixing and limiting of the ground cooling component, the third cooling component 7 and the fourth cooling component 8.

[0029] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. An arc target with multiple cooling systems, characterized in that: include: The anode housing has an insulating housing fixedly connected to one end and an open end, with a copper pillar passing through the insulating housing. The target holder is located inside the anode housing near the opening, and the target holder is fixedly connected to one end of the copper pillar inside the anode housing. A cathode target is mounted on the target holder; and Multiple cooling components are respectively located inside the cathode target, inside the insulating shell, outside the opening end of the anode shell, and inside the opening end of the anode shell.

2. The arc target with multiple cooling according to claim 1, characterized in that: The cooling assembly includes a first cooling assembly, a second cooling assembly, a third cooling assembly, and a fourth cooling assembly; the bottom of the first cooling assembly abuts against one end of the copper pillar located inside the anode housing, and the target holder and cathode target are disposed at the top of the first cooling assembly; the second cooling assembly is disposed inside the insulating housing to cool the interior of the anode housing; the third cooling assembly is disposed outside the opening end of the anode housing, and the fourth cooling assembly is disposed inside the opening end of the anode housing.

3. The arc target with multiple cooling according to claim 2, characterized in that: The first cooling assembly includes a main plate, the outer edge of which is fixedly connected to the inner side of the opening end of the anode housing. The main plate has multiple cooling channels, and a copper plate is fixedly mounted above the cooling channels. The copper plate has a ring-shaped target seat, and the cathode target is fixedly snapped into the target seat, with the bottom of the cathode target abutting against the copper plate.

4. The arc target with multiple cooling according to claim 2, characterized in that: The insulating shell has a through hole, and the second cooling component is fixedly installed in the through hole. The second cooling component includes a base, which is installed on the copper pillar and is fixedly connected to the side wall of the through hole of the insulating shell. The base has multiple mounting seats that penetrate the base, and a fan is installed in each mounting seat.

5. The arc target with multiple cooling according to claim 2, characterized in that: The third cooling component includes a ring-shaped mounting plate with a cooling channel inside. One end of the cooling channel has a water inlet, and the other end has a water outlet. The water inlet and the water outlet are connected to a refrigeration device. The mounting plate is fixedly attached to the outside of the opening end of the anode shell.

6. The arc target with multiple cooling according to claim 2, characterized in that: The fourth cooling component includes a cooling copper tube. A cooling groove is provided on the inner side of the open end of the anode shell. The cooling copper tube is embedded in the cooling groove, and refrigeration equipment is connected to both ends of the cooling copper tube.

7. The arc target with multiple cooling according to claim 1, characterized in that: It also includes a magnet assembly, which is sleeved on the copper pillar and located inside the anode housing.

8. The arc target with multiple cooling according to claim 1, characterized in that: The target holder has multiple circumferentially arranged limiting grooves, and the outer edge of the cathode target can be engaged in the corresponding limiting groove.

9. The arc target with multiple cooling according to claim 1, characterized in that: The copper pillar is a hollow tubular structure.

10. The arc target with multiple cooling according to claim 3, characterized in that: The inner wall of the opening end of the anode housing is provided with a horizontally inwardly extending flange; the third cooling component is located on the outer side of the flange, and the fourth cooling component is located on the inner side of the flange; the outer edge of the main body plate is fixedly connected to the inner side of the flange.

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