Efficient preparation device for composite DLC coating for aluminum stamping part

Abstract

The invention discloses an efficient preparation device for a composite DLC coating of an aluminum stamping part, and relates to the technical field of DLC coating preparation. According to the technical scheme, the efficient preparation device comprises a vacuum chamber, a bottom shell is fixedly arranged at the bottom of the vacuum chamber, a first motor is installed at the bottom of the bottom shell, the output end of the first motor is fixedly connected with a transmission shaft, and the transmission shaft is fixedly sleeved with a rotating disc; the rotating disc and the transmission shaft are connected with the inner wall of the vacuum chamber through bearings, a placing mechanism is arranged on one side of the rotating disc, and a sputtering mechanism is arranged on one side of the vacuum chamber; the placing mechanism comprises a hydraulic push rod which is fixedly arranged at the bottom of the bottom shell. Through the design of hydraulic push rod and bevel gear transmission, automatic adjustment of workpiece fixing is achieved, when a rotating disc drives a workpiece to revolve, a first gear and a fixed gear ring are meshed to drive a containing column to rotate, it is ensured that all surfaces of the workpiece can receive sputtering ions, the coating thickness deviation is controlled within the range, the product consistency is remarkably improved, and the product quality is improved. And simultaneous machining of multiple workpieces is supported.

Description

Technical Field

[0001] This invention relates to the field of DLC coating preparation technology, and more specifically to a high-efficiency apparatus for preparing composite DLC coatings for aluminum stamping parts. Background Technology

[0002] With the increasing popularity of lightweighting in the automotive and 3C electronics industries, aluminum stamping parts are being used more and more widely due to their advantages of low density and good formability. However, the low surface hardness (HV about 30-50) and poor wear resistance of aluminum make it prone to wear and failure under friction and impact conditions. It is necessary to strengthen its performance through surface coating. Composite DLC coating refers to the doping of metal (such as Cr, Ti, Si, etc.) or non-metallic elements into DLC coating to form "metal-doped DLC". The toughness, bonding strength and other properties of DLC are improved by doping (for example, Cr-DLC can improve the bonding strength between the coating and the aluminum substrate).

[0003] In the existing aluminum stamping process, the workpiece is mostly static or rotated in a single rotation, which can easily lead to uneven coating thickness in some areas and affect product consistency. The target holder of the magnetron sputtering device is mostly designed with a fixed angle, which can only perform directional sputtering on local areas of the workpiece. It is necessary to manually adjust the angle of the target or the position of the workpiece to achieve full coating. The single processing cycle is long. At the same time, the fixed target is prone to local excessive consumption. Summary of the Invention

[0004] Therefore, the present invention provides an efficient apparatus for preparing composite DLC coatings for aluminum stamping parts to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a high-efficiency preparation device for composite DLC coating of aluminum stamping parts, comprising a vacuum chamber, a bottom shell fixedly provided at the bottom of the vacuum chamber, a first motor installed at the bottom of the bottom shell, a drive shaft fixedly connected to the output end of the first motor, a rotating disk fixedly sleeved on the outside of the drive shaft, the rotating disk and the drive shaft being connected to the inner wall of the vacuum chamber by bearings, a placement mechanism provided on one side of the rotating disk, and a sputtering mechanism provided on one side of the vacuum chamber;

[0006] The placement mechanism includes a hydraulic push rod, which is fixedly mounted on the bottom of the base shell. A second motor is fixedly connected to the output end of the hydraulic push rod, and a first disc is fixedly connected to the output end of the second motor. A protruding plate is fixedly mounted on one side of the first disc, a toothed ring is fixedly mounted on one side of the base shell, and multiple placement components are mounted on one side of the rotating disc.

[0007] Preferably, the placement assembly includes a placement column that passes through a rotating disk and is connected to the rotating disk via a bearing. A first gear is fixedly sleeved on the outside of the placement column, and the first gear meshes with a gear ring. A second disk is provided on one side of the placement column, and two convex shafts are fixedly provided on one side of the second disk. A rotating shaft is fixedly provided on the other side of the second disk. The rotating shaft passes through the placement column and is connected to the placement column via a bearing. A side groove is opened on one side of the placement column, and a lead screw is connected to the inside of the side groove via a bearing. A first bevel gear is fixedly sleeved on the outside of the lead screw. A second bevel gear is fixedly connected to one end of the rotating shaft, and the second bevel gear meshes with the first bevel gear. The threads on both sides of the lead screw have opposite directions of rotation. Sliding plates are threadedly sleeved on both sides of the lead screw, and the sliding plates slide inside the side groove. A pad is fixedly provided on one side of the sliding plate.

[0008] Preferably, the sputtering mechanism includes a side housing fixedly disposed on one side of the vacuum chamber. A reciprocating screw is connected to the inside of the side housing via bearings. A toothed plate is sleeved on the outside of the reciprocating screw. The reciprocating screw and the toothed plate are connected via a ball screw pair. A side sliding groove is formed on the inner wall of the side housing, within which the toothed plate slides. A round rod is connected to the inside of the side housing via bearings. A second gear is fixedly sleeved on the outside of the round rod. A connecting plate is fixedly disposed on one side of the second gear. A target holder is fixedly disposed on one side of the connecting plate. Target material is disposed on one side of the target holder. A third bevel gear is fixedly disposed at the bottom of the rotating disk. A fourth bevel gear is provided on one side of the wheel, and the third bevel gear meshes with the fourth bevel gear. A rotating rod is fixedly connected to one side of the fourth bevel gear, and a fifth bevel gear is fixedly connected to one end of the rotating rod. A sixth bevel gear is fixedly sleeved on the outside of the reciprocating screw, and the reciprocating screw meshes with the sixth bevel gear. A support cylinder is fixedly provided on one side of the bottom shell, and a fixed cylinder is fixedly provided on one side of the support cylinder. The fixed cylinder is fixedly connected to the side box. One end of the reciprocating screw is connected to the fixed cylinder through a bearing. The rotating rod passes through the fixed cylinder and is connected to the fixed cylinder through a bearing. The rotating rod passes through the bottom shell and is connected to the bottom shell through a bearing.

[0009] Preferably, an arc-shaped slide rail is fixedly provided inside the side box, and multiple pulleys are connected to both sides of the target base through bearings, with the pulleys slidably connected to the arc-shaped slide rail.

[0010] Preferably, a vacuum pump is provided on one side of the vacuum chamber, and a connecting pipe is fixedly connected to the output end of the vacuum pump, and the connecting pipe is fixedly connected to the vacuum chamber.

[0011] Preferably, a controller and a power module are respectively installed on the surface of the vacuum chamber.

[0012] Preferably, the bottom of the vacuum chamber is fixedly provided with multiple support columns.

[0013] Preferably, the vacuum chamber has a door on one side, the vacuum chamber is connected to the door by a hinge, and an air inlet pipe is installed on the side of the vacuum chamber away from the controller.

[0014] Preferably, a protective shell is fixedly provided at the bottom of the bottom shell.

[0015] Preferably, the side box has a door on one side, and the side box and the door are connected by hinges.

[0016] The embodiments of the present invention have the following beneficial effects:

[0017] 1. The placement mechanism uses a hydraulic push rod and bevel gear transmission design to achieve automated adjustment of workpiece fixation. When the rotating disk drives the workpiece to revolve, the first gear meshes with the fixed gear ring to drive the placement column to rotate, ensuring that all surfaces of the workpiece can receive sputtered ions, and the coating thickness deviation is controlled within the range, significantly improving product consistency. It supports the simultaneous processing of multiple workpieces, achieving efficient and uniform coating of multiple workpieces at the same time. Compared with traditional single-processing devices, it significantly increases the processing capacity per unit time.

[0018] 2. The sputtering mechanism achieves synchronous coordination between the target material oscillation and the workpiece movement through the mechanical linkage of the rotating disk, bevel gears and reciprocating screw. When the rotating disk revolves, the rotating rod is driven to rotate through the third and fourth bevel gears, which in turn drives the reciprocating screw to control the toothed plate to slide up and down. The toothed plate meshes with the second gear to drive the target holder to oscillate along the arc-shaped slide rail, avoiding the blind zone of fixed-angle sputtering. At the same time, the target material can be consumed evenly as the target holder oscillates, improving the utilization rate and shortening the single processing cycle, thus improving the preparation efficiency. Attached Figure Description

[0019] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0020] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0021] Figure 1 This is a front view of the overall structure provided by the present invention;

[0022] Figure 2 A side view of the overall structure provided for this invention;

[0023] Figure 3 A diagram of the interior of the vacuum chamber provided for this invention;

[0024] Figure 4 Cross-sectional view of the vacuum chamber provided for this invention Figure 1 ;

[0025] Figure 5 Cross-sectional view of the vacuum chamber provided for this invention Figure 2 ;

[0026] Figure 6 A perspective view of the sputtering mechanism provided by the present invention;

[0027] Figure 7 A perspective view of the placement mechanism provided by the present invention;

[0028] Figure 8 Provided by the present invention Figure 4 Enlarged view of the structure of section A in the middle.

[0029] In the diagram: 1. Vacuum chamber; 2. Controller; 3. Power module; 4. Side groove; 5. Sliding plate; 6. Pad; 7. Vacuum pump; 8. Connecting pipe; 9. Support column; 10. Bottom shell; 11. Protective shell; 12. Chamber door; 13. Inlet pipe; 14. Side box; 15. Box door; 16. Support cylinder; 17. Fixed cylinder; 18. Drive shaft; 19. Rotating disk; 20. Target holder; 21. Target material; 22. First motor; 23. Hydraulic push rod; 24. Second motor; 25. First bevel gear; 26. Lead screw; 27. Second bevel gear; 28. Rotating shaft; 29. ​​Placement column; 30. First gear; 31. Gear ring; 32. Third bevel gear; 33. Fourth bevel gear; 34. Rotating rod; 35. Fifth bevel gear; 36. Reciprocating lead screw; 37. Sixth bevel gear; 38. Arc-shaped slide rail; 39. Side slide groove; 40. Round rod; 41. Connecting plate; 42. Gear plate; 43. Second gear; 44. Pulley; 45. First disc; 46. Convex plate; 47. Second disc; 48. Convex shaft. Detailed Implementation

[0030] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] See attached document Figure 1 -Appendix Figure 8The present invention provides an efficient preparation device for composite DLC coating of aluminum stamping parts, including a vacuum chamber 1, a bottom shell 10 fixedly provided at the bottom of the vacuum chamber 1, a first motor 22 installed at the bottom of the bottom shell 10, a transmission shaft 18 fixedly connected to the output end of the first motor 22, a rotating disk 19 fixedly sleeved on the outside of the transmission shaft 18, the rotating disk 19 and the transmission shaft 18 are connected to the inner wall of the vacuum chamber 1 by bearings, a placement mechanism is provided on one side of the rotating disk 19, and a sputtering mechanism is provided on one side of the vacuum chamber 1;

[0032] The placement mechanism includes a hydraulic push rod 23, which is fixedly mounted on the bottom of the base shell 10. A second motor 24 is fixedly connected to the output end of the hydraulic push rod 23, and a first disk 45 is fixedly connected to the output end of the second motor 24. A protruding plate 46 is fixedly mounted on one side of the first disk 45. A gear ring 31 is fixedly mounted on one side of the base shell 10. Multiple placement components are provided on one side of the rotating disk 19. Each placement component includes a placement column 29, which penetrates the rotating disk 19 and is connected to it via a bearing. A first gear 30 is fixedly sleeved on the outside of the placement column 29, meshing with the gear ring 31. A second disk 47 is provided on one side of the placement column 29. Two convex shafts 48 are fixedly provided on one side of the disc 47, and a rotating shaft 28 is fixedly provided on the other side of the second disc 47. The rotating shaft 28 passes through the placement column 29 and is connected to the placement column 29 by a bearing. A side groove 4 is provided on one side of the placement column 29. A lead screw 26 is connected to the inside of the side groove 4 by a bearing. A first bevel gear 25 is fixedly sleeved on the outside of the lead screw 26. A second bevel gear 27 is fixedly connected to one end of the rotating shaft 28. The second bevel gear 27 meshes with the first bevel gear 25. The threads on both sides of the lead screw 26 have opposite directions. Sliding plates 5 are threaded on both sides of the lead screw 26. The sliding plates 5 slide inside the side groove 4. A pad 6 is fixedly provided on one side of the sliding plate 5.

[0033] In this embodiment, the aluminum stamping workpiece is placed between two sliding plates 5 on the placement column 29. The hydraulic push rod 23 is activated, which controls the second motor 24 to move upward. The second motor 24 drives the first disc 45 and the convex plate 46 to move upward, so that the convex plate 46 contacts the second disc 47. The output end of the second motor 24 controls the first disc 45 to rotate, which drives the convex plate 46 to rotate. The convex plate 46 rotates and contacts the two convex shafts 48, thereby pushing the convex shafts 48 to rotate. The convex shafts 48 drive the second disc 47 to rotate, which drives the rotating shaft 28 to rotate. The rotating shaft 28 drives the second bevel gear 27 to rotate, which drives the first bevel gear 25 to rotate. The first bevel gear 25 drives the lead screw 26 to rotate, which drives the sliding plate 5 to move, so that the sliding plates 5 on both sides come together, thereby driving the pad 6 to move and fix the aluminum stamping workpiece.

[0034] To achieve the sputtering objective, this device employs the following technical solution: The sputtering mechanism includes a side housing 14, which is fixedly mounted on one side of the vacuum chamber 1. A reciprocating screw 36 is connected inside the side housing 14 via bearings. A toothed plate 42 is sleeved on the outside of the reciprocating screw 36. The reciprocating screw 36 and the toothed plate 42 are connected via a ball screw pair. A side sliding groove 39 is formed on the inner wall of the side housing 14, and the toothed plate 42 slides within the side sliding groove 39. The inside of the side housing 14 is connected via... A bearing is connected to a round rod 40. A second gear 43 is fixedly sleeved on the outside of the round rod 40. A connecting plate 41 is fixedly mounted on one side of the second gear 43. A target seat 20 is fixedly mounted on one side of the connecting plate 41. Target material 21 is mounted on one side of the target seat 20. A third bevel gear 32 is fixedly mounted at the bottom of the rotating disk 19. A fourth bevel gear 33 is mounted on one side of the third bevel gear 32. The third bevel gear 32 and the fourth bevel gear 33 mesh with each other. A rotating rod 34 is fixedly connected to one side of the fourth bevel gear 33. A fifth bevel gear 35 is fixedly connected to one end of the rotating rod 34. A sixth bevel gear 37 is fixedly sleeved on the outside of the reciprocating screw 36, and the reciprocating screw 36 meshes with the sixth bevel gear 37. A support cylinder 16 is fixedly provided on one side of the bottom shell 10, and a fixed cylinder 17 is fixedly provided on one side of the support cylinder 16. The fixed cylinder 17 is fixedly connected to the side box 14. One end of the reciprocating screw 36 is connected to the fixed cylinder 17 by a bearing. The rotating rod 34 passes through the fixed cylinder 17 and is connected to the fixed cylinder 17 by a shaft. The rotating rod 34 passes through the bottom shell 10 and is connected to the bottom shell 10 via a bearing. An arc-shaped slide rail 38 is fixedly installed inside the side box 14. Multiple pulleys 44 are connected to both sides of the target base 20 via bearings. The pulleys 44 are slidably connected to the arc-shaped slide rail 38. Argon gas is introduced into the vacuum chamber 1 through the air inlet pipe 13. The argon gas is mainly used for plasma cleaning. High-energy argon ions bombard the target material 21, causing the atoms of the target material 21 to separate into a gaseous phase, which is then deposited on the surface of the aluminum stamping part to achieve DLC (Digital Lithography). During coating deposition, the first motor 22 is activated, driving the transmission shaft 18 to rotate. The transmission shaft 18 drives the rotating disk 19 to rotate, which in turn drives the placement assembly and the aluminum stamping workpiece to rotate. Simultaneously, because the gear ring 31 meshes with the first gear 30, the rotation of the placement assembly controls the rotation of the placement column 29 and the fixed aluminum stamping workpiece via the first gear 30. The rotation of the rotating disk 19 drives the third bevel gear 32 to rotate, which in turn drives the fourth bevel gear 33 to rotate. The fourth bevel gear 33 drives the rotating rod 34 to rotate, which in turn drives the fifth bevel gear 35 to rotate. The fifth bevel gear 35 drives the sixth bevel gear 37 to rotate, which in turn drives the reciprocating screw 36 to rotate. The reciprocating screw 36 controls the toothed plate 42 to reciprocate up and down, maintaining mesh with the second gear 43 during the movement. This controls the reciprocating rotation of the second gear 43 and the round rod 40, thereby controlling the reciprocating rotation of the connecting plates 41 and 50.The pulleys 44 on both sides of the target holder 20 slide on the surface of the arc-shaped slide rail 38. The target holder 20 drives the target material 21 to rotate back and forth, thereby continuously oscillating the sputtering angle of the target material 21 and improving the coating efficiency of the aluminum stamping workpiece.

[0035] In the selection of target material 21 for the sputtering mechanism, in order to meet the preparation requirements of composite DLC coating, the target material 21 adopts a combination of metal doped target, chromium target, titanium target and graphite target. Among them, the graphite target provides the carbon element basis of DLC coating, while the metal target introduces the corresponding metal doping elements into the coating. Through this combination, the synergistic effect of metal and carbon in composite DLC coating is achieved, thereby improving the toughness of coating and bonding strength with aluminum substrate.

[0036] During the coating deposition process, the sputtering power parameters are precisely controlled by the controller 2 to control the sputtering rate of different target materials. When it is necessary to prepare a composite DLC coating with a specific composition ratio, the controller 2 can adjust the sputtering power of the corresponding target material to change the deposition ratio of metal elements and carbon elements.

[0037] Meanwhile, because the placement mechanism enables the aluminum stamping part to revolve and rotate, and the sputtering mechanism drives the target material 21 to swing, the metal dopant elements and carbon elements can be uniformly deposited on the surface of the aluminum stamping part, ensuring the uniformity of the composite DLC coating composition. This uniformity further improves the overall performance of the composite DLC coating, ensuring that the wear resistance and service life of the aluminum stamping part under friction and impact conditions are effectively enhanced.

[0038] To achieve the purpose of vacuum, the device adopts the following technical solution: a vacuum pump 7 is provided on one side of the vacuum chamber 1, and a connecting pipe 8 is fixedly connected to the output end of the vacuum pump 7. The connecting pipe 8 is fixedly connected to the vacuum chamber 1. When the vacuum pump 7 is started, the vacuum chamber 1 is drawn into a vacuum through the connecting pipe 8.

[0039] To achieve the control objective, the device employs the following technical solution: a controller 2 and a power module 3 are respectively installed on the surface of the vacuum chamber 1. The controller 2 controls the coating process, and the power module 3 provides the necessary electrical energy to generate plasma and drive the coating deposition process.

[0040] To achieve the purpose of support, the device adopts the following technical solution: multiple support columns 9 are fixedly provided at the bottom of the vacuum chamber 1, and the support columns 9 have the function of supporting the vacuum chamber 1;

[0041] To achieve the purpose of sealing, the device adopts the following technical solution: a door 12 is provided on one side of the vacuum chamber 1, and the vacuum chamber 1 and the door 12 are connected by a hinge. Closing the door 12 seals the vacuum chamber 1. A box door 15 is provided on one side of the side box 14, and the side box 14 and the box door 15 are connected by a hinge. Opening the box door 15 facilitates the replacement of the target material 21.

[0042] In order to achieve the purpose of protection, the device adopts the following technical solution: a protective shell 11 is fixedly provided at the bottom of the bottom shell 10, and the protective shell 11 protects the hydraulic push rod 23 and the first motor 22.

[0043] In order to achieve the purpose of ventilation, the device adopts the following technical solution: an air inlet pipe 13 is installed on the side of the vacuum chamber 1 away from the controller 2, and argon gas is introduced into the vacuum chamber 1 through the air inlet pipe 13.

[0044] The process of using this invention is as follows: Place the pre-treated aluminum stamping part between the two sliding plates 5 on the placement column 29 to ensure that the center of the workpiece is basically aligned with the axis of the placement column 29;

[0045] The controller 2 starts the hydraulic push rod 23, which drives the second motor 24, the first disk 45 and the convex plate 46 to move slowly upward until the convex plate 46 contacts the side of the second disk 47.

[0046] The second motor 24 is started, which drives the first disk 45 and the convex plate 46 to rotate. During the rotation of the convex plate 46, it contacts the two convex shafts 48 on the second disk 47 in turn and pushes them to rotate, thereby driving the rotating shaft 28 and the second bevel gear 27 to rotate. The second bevel gear 27 meshes with the first bevel gear 25 to drive the lead screw 26 to rotate, and contacts the workpiece surface through the pad 6 to fix the workpiece.

[0047] Start the first motor 22, which drives the rotating disk 19 to rotate through the transmission shaft 18, and rotates the placement assembly of the next unfixed workpiece to directly below the first disk 45;

[0048] Repeat the above single-group workpiece fixing operation until all the placement components on the rotating disk 19 are fixed in place for the aluminum stamping parts;

[0049] Close the door 12 of vacuum chamber 1 and ensure that the sealing strip between the door 12 and vacuum chamber 1 is tightly fitted;

[0050] Start vacuum pump 7 and perform vacuuming in two stages: The first stage is rough vacuuming, where the rough vacuum valve of vacuum pump 7 is opened to reduce the pressure in vacuum chamber 1 to below 10 Pa; the second stage is fine vacuuming, where the rough vacuum valve is closed and the fine vacuum valve is opened to continue evacuating until the vacuum level reaches 5 × 10⁻⁻⁻⁶. 4Below Pa, the controller 2 displays the vacuum level value in real time, and automatically stops the vacuum pump 7 and maintains the vacuum state after the set value is reached;

[0051] Argon gas is introduced into the vacuum chamber through the inlet pipe 13 on one side of the vacuum chamber 1;

[0052] By setting the sputtering power parameters of the target holder 20 through the controller 2, the target material 21 is sputtered under argon ion bombardment, and atomic target particles are deposited on the surface of the aluminum stamping part.

[0053] Start the first motor 22, which drives the rotating disk 19 and all the fixed workpiece placement components to revolve. At the same time, since the first gear 30 outside the placement column 29 meshes with the toothed ring 31 fixed on the bottom shell 10, the placement column 29 is driven to rotate by the reaction force of the toothed ring 31 during the revolution.

[0054] When the rotating disk 19 revolves, the third bevel gear 32 and the fourth bevel gear 33 at its bottom mesh and drive the rotating rod 34 to rotate (the rotating rod 34 passes through the bottom shell 10 and the fixed cylinder 17, and the support cylinder 16 provides auxiliary support to the fixed cylinder 17 to reduce the vibration of the rotating rod 34). The fifth bevel gear 35 at one end of the rotating rod 34 meshes with the sixth bevel gear 37 on the reciprocating screw 36, driving the reciprocating screw 36 to rotate (one end of the reciprocating screw 36 is fixed in the fixed cylinder 17 by a bearing to ensure stable rotation).

[0055] The reciprocating screw 36 and the toothed plate 42 are connected by a ball screw pair. When the reciprocating screw 36 rotates, the toothed plate 42 slides up and down in the side sliding groove 39 on the inner wall of the side box 14. During the sliding process, the toothed plate 42 meshes with the second gear 43 on the round rod 40, which drives the second gear 43, the connecting plate 41 and the target seat 20 to swing around the round rod 40 (the swing trajectory is limited by the arc-shaped slide rail 38 and the pulley 44 to ensure that the target seat 20 moves smoothly). This realizes the dynamic adjustment of the sputtering angle of the target material 21, avoids the blind zone of fixed angle sputtering, and at the same time makes the target material 21 consumed evenly, improving the coating efficiency of the aluminum stamping workpiece.

[0056] The above description is merely a preferred embodiment of the present invention. Any person skilled in the art can modify the present invention or modify it into an equivalent technical solution using the technical solutions described above. Therefore, any simple modifications or equivalent substitutions made based on the technical solutions of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A high-efficiency preparation apparatus for composite DLC coating of aluminum stamping parts, comprising a vacuum chamber (1), characterized in that: The vacuum chamber (1) is fixedly provided with a bottom shell (10), and a first motor (22) is installed at the bottom of the bottom shell (10). The output end of the first motor (22) is fixedly connected to a transmission shaft (18). A rotating disk (19) is fixedly sleeved on the outside of the transmission shaft (18). The rotating disk (19) and the transmission shaft (18) are connected to the inner wall of the vacuum chamber (1) by bearings. A placement mechanism is provided on one side of the rotating disk (19), and a sputtering mechanism is provided on one side of the vacuum chamber (1). The placement mechanism includes a hydraulic push rod (23), which is fixedly mounted on the bottom of the base shell (10). A second motor (24) is fixedly connected to the output end of the hydraulic push rod (23), and a first disc (45) is fixedly connected to the output end of the second motor (24). A protruding plate (46) is fixedly mounted on one side of the first disc (45), and a toothed ring (31) is fixedly mounted on one side of the base shell (10). Multiple placement components are provided on one side of the rotating disk (19).

2. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The placement assembly includes a placement column (29), which passes through a rotating disk (19) and is connected to the rotating disk (19) via a bearing. A first gear (30) is fixedly sleeved on the outside of the placement column (29), and the first gear (30) meshes with a gear ring (31). A second disk (47) is provided on one side of the placement column (29), and two convex shafts (48) are fixedly provided on one side of the second disk (47). A rotating shaft (28) is fixedly provided on the other side of the second disk (47), and the rotating shaft (28) passes through the placement column (29) and is connected to the placement column (29) via a bearing. The placement column (29) has a side groove (4) on one side. A lead screw (26) is connected inside the side groove (4) through a bearing. A first bevel gear (25) is fixedly sleeved on the outside of the lead screw (26). A second bevel gear (27) is fixedly connected to one end of the rotating shaft (28). The second bevel gear (27) meshes with the first bevel gear (25). The threads on both sides of the lead screw (26) have opposite directions. Sliding plates (5) are threaded on both sides of the lead screw (26). The sliding plates (5) slide inside the side groove (4). A pad (6) is fixedly provided on one side of the sliding plate (5).

3. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The sputtering mechanism includes a side housing (14), which is fixedly disposed on one side of the vacuum chamber (1). A reciprocating screw (36) is connected to the inside of the side housing (14) via bearings. A toothed plate (42) is sleeved on the outside of the reciprocating screw (36). The reciprocating screw (36) and the toothed plate (42) are connected by a ball screw pair. A side sliding groove (39) is opened on the inner wall of the side housing (14). The toothed plate (42) slides inside the side sliding groove (39). A round rod (40) is connected to the inside of the side housing (14) via bearings. A second gear (43) is fixedly sleeved on the outside of the round rod (40). A connecting plate (41) is fixedly disposed on one side of the second gear (43). A target holder (20) is fixedly disposed on one side of the connecting plate (41). Target material (21) is disposed on one side of the target holder (20). A third bevel gear (32) is fixedly disposed at the bottom of the rotating disk (19). A fourth bevel gear (33) is provided on one side, and the third bevel gear (32) meshes with the fourth bevel gear (33). A rotating rod (34) is fixedly connected to one side of the fourth bevel gear (33), and a fifth bevel gear (35) is fixedly connected to one end of the rotating rod (34). A sixth bevel gear (37) is fixedly sleeved on the outside of the reciprocating screw (36), and the reciprocating screw (36) meshes with the sixth bevel gear (37). A support cylinder (16) is fixedly provided on one side of the bottom shell (10), and a fixed cylinder (17) is fixedly provided on one side of the support cylinder (16). The fixed cylinder (17) is fixedly connected to the side box (14). One end of the reciprocating screw (36) is connected to the fixed cylinder (17) through a bearing. The rotating rod (34) passes through the fixed cylinder (17) and is connected to the fixed cylinder (17) through a bearing. The rotating rod (34) passes through the bottom shell (10) and is connected to the bottom shell (10) through a bearing.

4. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 3, characterized in that: The side box (14) is fixedly provided with an arc-shaped slide rail (38), and multiple pulleys (44) are connected to both sides of the target base (20) through bearings. The pulleys (44) are slidably connected to the arc-shaped slide rail (38).

5. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: A vacuum pump (7) is provided on one side of the vacuum chamber (1), and a connecting pipe (8) is fixedly connected to the output end of the vacuum pump (7). The connecting pipe (8) is fixedly connected to the vacuum chamber (1).

6. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The vacuum chamber (1) is equipped with a controller (2) and a power module (3) respectively.

7. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The vacuum chamber (1) is fixedly provided with multiple support columns (9) at its bottom.

8. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The vacuum chamber (1) has a door (12) on one side, and the vacuum chamber (1) and the door (12) are connected by a hinge. An air inlet pipe (13) is installed on the side of the vacuum chamber (1) away from the controller (2).

9. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 1, characterized in that: The bottom of the bottom shell (10) is fixedly provided with a protective shell (11).

10. The high-efficiency preparation device for composite DLC coating of aluminum stamping parts according to claim 3, characterized in that: The side box (14) is provided with a door (15) on one side, and the side box (14) and the door (15) are connected by a hinge.

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