Valve and vacuum system

Abstract

The invention provides a valve and a vacuum system. The valve comprises a valve body, a valve plate, a transmission body and a connecting piece. The valve body comprises a valve port, a shell, a cavity formed by the shell and a first limiting part. The valve port communicates with the cavity, and the first limiting part is arranged on the edge of the valve port; in the opening state, the whole valve plate or part of the valve plate is located in the cavity and makes sliding contact with the first inner wall on the shell. The whole or part of the transmission body is positioned in the cavity and is in sliding contact with the second inner wall on the shell; one end of the connecting piece is rotatably connected with the plate surface of the valve plate, and the other end of the connecting piece is rotatably connected with the plate surface of the transmission body; the transmission body drives the valve plate to be close to or away from the valve port along the plane of the edge; when the valve plate moves to directly face the valve port, the limiting part blocks the movement of the valve plate, and under the condition that the transmission body continues to move, the limiting part is far away from the transmission body and is close to the valve port based on the change of the inclination of the connecting piece. According to the valve, the sealing state of the valve port can be stably kept.

Description

Technical Field

[0001] This application relates to the field of vacuum technology, and more specifically, to a valve and a vacuum system. Background Technology

[0002] Valves are typically key components used to control the flow or interruption of fluids and are widely used in vacuum systems, semiconductor manufacturing, aerospace and other fields.

[0003] Most commonly used valves employ a structure with an adjusting plate support. This adjusting plate is typically a mounting bracket with an adjusting screw or shim. It is used to connect the valve core (or sealing plate) to the drive component (e.g., a cylinder). The valve sets the sealing compression between the valve core and the valve port by adjusting the screw, shim, or movable support to compensate for machining or assembly errors.

[0004] However, the adjusting plate support of this type of valve is susceptible to loosening due to vibration, thermal cycling, or frequent opening and closing, leading to a gradual decrease in sealing compression and affecting the sealing effect. Furthermore, human adjustment errors or long-term wear can also cause some seal failure. Therefore, the sealing effect of this type of valve cannot be guaranteed at present. Summary of the Invention

[0005] The purpose of this application is to provide a valve and a vacuum system that directly connects the transmission body and the valve plate through a connector. When the transmission body is not moving, the connection points between the connector and the transmission body and the valve plate are immovable, thereby enabling the sealing state of the valve port to be maintained relatively stably.

[0006] In a first aspect, this application provides a valve, including a valve body, a valve plate, a transmission body, and a connector; the valve body includes a valve port, a housing, a cavity formed by the housing, and a first limiting portion; the valve port communicates with the cavity, and the first limiting portion is disposed at the edge of the valve port; the valve port has an open state; in the open state, the entirety or part of the valve plate is located within the cavity and slides in contact with a first inner wall on the housing; the entirety or part of the transmission body is located within the cavity and slides in contact with a second inner wall on the housing; wherein the first inner wall and the second inner wall are disposed opposite to each other and are both parallel to the plane where the edge of the valve port is located; one end of the connector is rotatably connected to the surface of the valve plate, and the other end of the connector is rotatably connected to the surface of the transmission body; the transmission body is configured to drive the valve plate closer to or away from the valve port along the plane where the edge is located; wherein, when the valve plate moves to face the valve port, the limiting portion blocks the movement of the valve plate, and when the transmission body continues to move, it moves away from the transmission body and closer to the valve port based on the change in the inclination of the connector.

[0007] The aforementioned valve, based on a connector that directly connects the transmission body and the valve plate, allows the valve plate to move directly opposite the valve port when the transmission body moves it. The translation of the valve plate along a plane parallel to the edge of the valve port is blocked by a limiting part. As the transmission body continues to move, the inclination of the connector changes, increasing the minimum distance between the valve plate and the transmission body's perpendicular surfaces. The valve plate gradually approaches and blocks the valve port, closing it. In this state, with the transmission body stationary, the connections between the connector and both the transmission body and the valve plate are immobile, ensuring a stable seal on the valve port and improving its sealing effect.

[0008] In conjunction with the first aspect, optionally, the transmission valve plate includes a valve plate transmission body and a connecting rod support; the connecting rod support is detachably connected to the valve plate transmission body; and the other end of the connecting member is rotatably connected to the connecting rod support.

[0009] The valve described above has its connecting parts connected via a connecting rod support on the valve plate drive body. The connecting rod support is detachably connected to the valve plate drive body. This ensures that the valve plate compression is not adjustable when the valve port is closed, while facilitating the assembly of the valve plate and the drive body. It also facilitates targeted replacement or repair of parts during maintenance and repair.

[0010] In conjunction with the first aspect, optionally, the valve plate transmission body further includes a retaining ring; the transmission body body is provided with a first recess; the connecting rod support includes a rotatable connection part and a snap-fit ​​part; the first recess accommodates the snap-fit ​​part; the snap-fit ​​part is provided with a first annular groove, and the inner wall of the first recess is provided with a second annular groove; wherein, the plane where the first annular groove is located and the plane where the second annular groove is located are both parallel to the surface of the valve plate; the first annular groove and the second annular groove together accommodate the retaining ring.

[0011] The valve described above achieves a detachable connection between the connecting rod support and the transmission body through the engagement of the retaining ring, the first annular groove on the retaining part, and the second annular groove on the inner wall of the first recess. Furthermore, since the retaining ring is simultaneously accommodated by the first and second annular grooves, the stability of the connection between the connecting rod support and the transmission body is improved, which further limits the shaking of the connecting rod support on the transmission body, thereby further improving the valve's sealing performance.

[0012] In conjunction with the first aspect, optionally, the snap-fit ​​portion has a cut surface; the cut surface is adjacent to the bottom wall of the first annular groove; on the same projection plane parallel to the plate surface of the transmission body, the projection of the cut surface is tangent to the projection of the bottom wall of the first annular groove.

[0013] The valve described above, through its slit design and engagement with the retaining ring, not only improves the assembly stability between the connecting rod support and the transmission body, but also, by operating the retaining ring through the slit, essentially eliminates the fixation between the connecting rod support and the transmission body, making it effortless to separate the connecting rod support and the transmission body, thereby further improving the ease of disassembly of the connecting rod support and the transmission body.

[0014] In conjunction with the first aspect, optionally, the transmission body includes a transmission body body and a first rolling element; the first rolling element is rotatably disposed on the transmission body body; the first rolling element rolls in contact with the second inner wall; wherein the rotation axis of the first rolling element is parallel to the plate surface of the transmission body body.

[0015] The aforementioned valve, by incorporating a first roller on the transmission body, achieves movable contact between the transmission body and the second inner wall. This reduces the resistance to relative movement between the transmission body and the second inner wall, and also guides the movement of the transmission body on the second inner wall, restricting its movement beyond the direction guided by the first rolling element. Ultimately, this improves the accuracy of valve actuation.

[0016] In conjunction with the first aspect, optionally, the transmission body further includes a second rolling element; the second rolling element is rotatably disposed on the transmission body body; the second rolling element rolls in contact with a side wall on the housing; wherein the side wall is located between the first inner wall and the second inner wall; wherein the rotation axis of the second rolling element is perpendicular to the plate surface of the transmission body body.

[0017] The aforementioned valve, by incorporating a second rolling element on the transmission body, allows the transmission body to contact the side wall of the housing via this element. This, in turn, restricts the movement of the transmission body along the direction in which it is arranged. Furthermore, the second rolling element reduces the resistance between the transmission body and the side wall, thereby improving the accuracy of valve actuation.

[0018] In conjunction with the first aspect, optionally, the valve plate includes a valve plate body and a third rolling element; the third rolling element is rotatably disposed on the valve plate body; the valve plate body slides in contact with the first inner wall through the third rolling element; a second recess is provided at the edge of the valve port; wherein the second recess is used to receive the third rolling element; the second recess extends from the edge of the valve port in a direction opposite to the first inner wall; wherein, when the valve plate moves to face the valve port, the third rolling element is received by the second recess, and the second recess blocks the rolling of the third rolling element.

[0019] The aforementioned valve, by incorporating a third roller on the transmission body to achieve movable contact between the valve plate and the first inner wall, reduces the resistance to relative movement between the valve plate and the first inner wall, and also guides the movement of the transmission body on the first inner wall, thereby improving the accuracy of valve actuation. Furthermore, by providing a second recess at the edge of the valve orifice that mates with the third roller, the rolling of the third roller is restricted by receiving the second recess. This achieves translational restriction when the valve plate moves to face the valve orifice without requiring additional materials to install corresponding components as a first limiting part at the valve orifice.

[0020] In conjunction with the first aspect, optionally, the valve plate further includes a second limiting portion; the transmission body includes a third limiting portion; the second limiting portion is located on the plate surface of the valve plate body facing the transmission body; the third limiting portion is located on the plate surface of the transmission body facing the valve plate body; the second limiting portion is configured to abut against the third limiting portion when the straight lines at both ends of the connecting member are perpendicular to the plate surface of the transmission body.

[0021] In the aforementioned valve, when the transmission body drives the valve plate until the connecting member becomes vertical, the transmission body is restricted from further translation relative to the valve plate along the plane containing the valve port edge. At this point, the shortest distance between the valve plate and the valve port is maximized, and consequently, the force exerted by the transmission body frame on the valve plate against the valve port edge is also maximized. If the valve plate continues to move in the same direction, the connecting member will become tilted again, and the distance between the transmission body and the valve plate will decrease. Therefore, by abutting against the second and third limiting parts, the continued movement of the transmission body is restricted, allowing the valve plate to maintain maximum contact with the valve port, thereby further improving the valve's sealing performance.

[0022] In conjunction with the first aspect, optionally, the valve further includes a linear actuator; the linear actuator includes a mounting end and a drive output end; the mounting end is mounted on the valve body, and the drive output end is hinged to the transmission body.

[0023] The valve described above is hinged to the drive output end of the linear drive component, allowing the drive body to swing within a certain angle range at the drive output end. Compared to a rigid connection between the drive output end and the drive body, when the drive body shakes within the housing, the movable connection between the drive body and the drive output end helps to offset the stress generated between the drive body and the drive output end due to the shaking of the drive body.

[0024] Secondly, this application provides a vacuum system, including a vacuum pump, a vacuum chamber, and the valves described above.

[0025] The vacuum system described above has the same beneficial effects as the valve described in the first aspect or any alternative embodiment of the first aspect, and will not be repeated here. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A front view of the valve provided in an embodiment of this application; Figure 2 for Figure 1 Sectional view at CC; Figure 3 for Figure 2 Sectional view at point DD; Figure 4 A perspective view of the valve plate and transmission body in a valve provided in an embodiment of this application; Figure 5 This is a front view of the valve plate and transmission body in a valve provided in an embodiment of this application; Figure 6 for Figure 5 Sectional view at point BB; Figure 7 This is a side view of the valve plate and transmission body in a valve provided in an embodiment of this application; Figure 8 for Figure 5 Sectional view and enlarged view at point AA; Figure 9 A perspective view of the connecting rod support in a valve provided in an embodiment of this application; Figure 10 A front view of the connecting rod support in a valve provided in an embodiment of this application; Figure 11 A top view of the connecting rod support in a valve provided in an embodiment of this application; Figure 12 This is a perspective view of the retaining ring in the valve provided in an embodiment of this application.

[0028] Icons: 100, Valve; 110, Valve body; 111, Valve port; 112, Housing; 113, First limiting part; 120, Valve plate; 121, Valve plate body; 122, Third rolling element; 123, Second limiting part; 124, Connecting rod support; 1241, Rotary connection part; 1242, Snap-fit ​​part; 1243, First annular groove; 1244, Cross-section; 125, Snap ring; 130, Transmission body; 131, Transmission body body; 1311, First recess; 133, First rolling element; 134, Second rolling element; 135, Third limiting part; 140, Connecting element; 150, Linear drive element. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0032] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0033] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," not that the structure must be completely horizontal, but can be slightly tilted.

[0034] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] Please refer to Figure 1 and Figure 2 , Figure 1 This is a front view of the valve 100 provided in the embodiments of this application; Figure 2 yes Figure 1 Cross-sectional view at CC. The valve 100 provided in this application embodiment includes a valve body 110, a valve plate 120, a transmission body 130, and a connecting member 140.

[0036] The valve body 110 includes a valve port 111, a housing 112, a cavity formed by the housing 112, and a first limiting portion 113. Exemplarily, the housing 112 forms the cavity by surrounding it and is rectangular. Two through holes facing each other are formed on the housing 112, serving as the valve port 111. The valve port 111 is typically used for fluid passage. The through holes can be square, rectangular, circular, or other shapes. The cavity should be defined as the portion of the cavity formed by projecting either of the two facing portions of the housing 112 onto a plane parallel to the plane containing any portion of the through holes.

[0037] The valve port 111 communicates with the cavity, and the first limiting part 113 is provided at the edge of the valve port 111. Referring to the example above, by opening through holes facing each other on two opposing surfaces of the housing 112, the valve port 111 formed naturally communicates with the cavity inside the housing 112.

[0038] Valve port 111 has an open state. The closed state is when valve port 111 is not completely blocked by valve plate 120, allowing fluid to pass smoothly through valve port 111. Correspondingly, valve port 111 also has a closed state. The open state is when valve port 111 is completely blocked by valve plate 120, preventing fluid from passing smoothly through valve port 111.

[0039] In the open state, the valve plate 120 is entirely or partially located within the cavity and slides in contact with the first inner wall of the housing 112. If the valve body 110 is large enough that the cavity inside the housing 112 can completely accommodate the valve plate 120, the valve plate 120 can be entirely located within the cavity. If the valve body 110 is not large enough that the cavity inside the housing 112 cannot completely accommodate the valve plate 120, the valve plate 120 is typically partially located within the cavity, with the other part partially obstructing the valve port 111. The sliding contact between the valve plate 120 and the first inner wall of the housing 112 can be achieved by the valve plate 120 directly contacting the first inner wall, and due to the low coefficient of friction between them, relatively smooth relative sliding can be achieved. Alternatively, the valve plate 120 can slide in contact with the first inner wall through sliding or rolling elements provided thereon.

[0040] In the open state, the transmission body 130 is entirely or partially located within the cavity and slides in contact with the second inner wall of the housing 112. Similar to the previous statement regarding the valve plate 120 being partially or entirely located within the cavity, the transmission body 130 is also partially or entirely located within the cavity, which mainly depends on the size of the cavity within the housing 112.

[0041] In the closed state, theoretically, if the size of the valve plate 120 perfectly matches the size of the valve port 111, the valve plate 120 can be completely located outside the cavity. However, to ensure that the valve plate 120 always slides in contact with the cavity, the valve plate 120 should be partially located inside the cavity. Correspondingly, the positional relationship between the transmission body 130 and the cavity in the closed state is similar.

[0042] The first inner wall and the second inner wall are arranged opposite each other and are both parallel to the plane containing the edge of the valve port 111. That is, as described in the previous example, on the rectangular valve body 110, there are two opposite surfaces that are opened to serve as valve ports 111, and their respective inner walls can serve as the first inner wall and the second inner wall.

[0043] The transmission body 130 can be flat, specifically a solid flat plate or a non-solid plate composed of rods. One end of the connector 140 is rotatably connected to the surface of the valve plate 120, and the other end of the connector 140 is rotatably connected to the surface of the transmission body 130. The connector 140 can be rod-shaped or other shaped components. In different states, the valve plate 120 can be directly opposite the transmission body 130, or it can be offset from being directly opposite. In other words, since the surfaces of the valve plate 120 and the transmission body 130 are connected by the connector 140, the valve plate 120 and the transmission body 130 are almost never coplanar.

[0044] The transmission body 130 is configured to move the valve plate 120 closer to or further away from the valve port 111 along the plane containing its edge. The transmission body 130 can drive the valve plate 120 by receiving driving force from an external driving element, such as a cylinder.

[0045] When the valve plate 120 moves to face the valve port 111, the limiting part blocks the movement of the valve plate 120. As the transmission body 130 continues to move, the limiting part moves away from the transmission body 130 and closer to the valve port 111 based on the change in the inclination of the connecting member 140. The limiting part can be a blocking part provided at the edge of the valve port 111 to block the movement of the valve plate 120. Accordingly, depending on the specific shape of the blocking part, those skilled in the art can determine whether a corresponding fitting structure should be provided on the valve plate 120. For example, if the blocking part is a structure protruding beyond the edge of the valve port 111, then a corresponding fitting structure is not required on the valve plate 120. If the blocking part is a recessed part provided at the edge of the valve port 111, then a corresponding protruding structure can be provided on the valve plate 120 to fit it.

[0046] The specific position of the limiting part is determined by the fact that when the valve plate 120 moves to face the valve port 111, it can block the translation of the valve plate 120 along the plane containing the edge of the valve port 111 through contact. For example, when the valve plate 120 faces the valve port 111, a corresponding protrusion structure is provided on the edge of the valve plate 120 that is aligned with the moving direction of the valve plate 120 towards the valve port 111, corresponding to the edge of the valve port 111.

[0047] During the process of the transmission body 130 driving the valve plate 120 to move closer to the valve port 111, when the valve plate 120 moves to face the valve port 111 and is blocked by the limiting part, the valve plate 120 stops moving along the plane containing the edge of the valve port 111. At this time, the transmission body 130 continues to move in the same direction, based on the movable connection between the valve plate 120 and the transmission body 130 via the connecting member 140. The inclination of the connecting member 140 changes. For example, when the valve plate 120 is not in contact with the limiting part, the connecting member 140 is in an inclined state relative to the valve plate 120. As the transmission body 130 continues to drive, the inclination of the connecting member 140 gradually changes to a state perpendicular to the valve plate 120. Due to the change in the inclination of the connecting member 140, the minimum distance between the valve plate 120 and the transmission body 130 also changes. Combining the previous example, as the connecting member 140 changes from an inclined state to a perpendicular state, the minimum distance between the valve plate 120 and the transmission body 130 gradually increases.

[0048] Since the minimum distance between the valve plate 120 and the support of the transmission body 130 gradually increases, the valve plate 120 will, under the effect of the change in the inclination of the connecting piece 140, move closer to the valve port 111 in a direction approximately perpendicular to its surface, ultimately completely blocking the valve port 111. The valve 100 then enters the closed state at the valve port 111.

[0049] In the above implementation process, the connecting member 140 directly connects the transmission body 130 and the valve plate 120. When the transmission body 130 moves the valve plate 120 to a position directly opposite the valve port 111, the translation of the valve plate 120 along the plane parallel to the edge of the valve port 111 is blocked by the limiting part. As the transmission body 130 continues to move, the inclination of the connecting member 140 changes, and the minimum distance between the valve plate 120 and the transmission body 130 perpendicular to the plate surface increases. The valve plate 120 gradually approaches the valve port 111 and blocks the valve port 111, causing the valve port 111 to enter the closed state. In this state, with the transmission body 130 stationary, the connection points between the connecting member 140 and the transmission body 130 and the valve plate 120 are immovable, thereby ensuring that the sealing state of the valve port 111 can be maintained relatively stably, which improves the sealing effect of the valve 100.

[0050] Please refer to Figures 3 to 7 , Figure 3 yes Figure 2 Sectional view at point DD; Figure 4 This is a perspective view of the valve plate 120 and the transmission body 130 in the valve 100 provided in the embodiments of this application; Figure 5 This is a front view of the valve plate 120 and the transmission body 130 in the valve 100 provided in the embodiment of this application; Figure 6 yes Figure 5 Sectional view at point BB; Figure 7 This is a side view of the valve plate 120 and the transmission body 130 in the valve 100 provided in this embodiment. In some optional embodiments, the valve plate 120 transmission body 130 includes a valve plate 120 transmission body body 131 and a connecting rod support 124. The connecting rod support 124 is detachably connected to the transmission body body 131. The other end of the connector 140 is rotatably connected to the connecting rod support 124.

[0051] The valve plate 120 transmission body 131 may have a recessed portion adapted to the shape of the valve plate 120 transmission body 131, and the connecting rod support 124 may be installed in the recessed portion. Alternatively, the valve plate 120 transmission body 131 may not have a recessed portion. In this case, the connecting rod support 124 can be directly and detachably connected to the surface of the valve plate 120 transmission body 131. The detachable connection method may be screw connection or snap-fit ​​connection, etc.

[0052] It is worth mentioning that the detachable connection between the valve plate 120 transmission body 131 and the connecting rod support 124 means that the two are usually unable to move relative to each other when connected.

[0053] In the above implementation process, the connecting part 140 is specifically connected through the connecting rod support 124 on the valve plate 120 transmission body 130, and the connecting rod support 124 is detachably connected to the valve plate 120 transmission body 131. On the basis of ensuring that the valve port 111 is in the closed state and the compression of the valve plate 120 is not adjustable, it facilitates the assembly between the valve plate 120 and the transmission body 130, and facilitates the targeted replacement or repair of parts during maintenance and repair.

[0054] Please refer to Figure 8 , Figure 8 yes Figure 5 Cross-sectional view and partial enlarged view at point AA; in some alternative embodiments, the transmission body 130 also includes a retaining ring 125. The retaining ring 125 may be made of an elastic material such as plastic.

[0055] The transmission body 131 is provided with a first recess 1311. The first recess 1311 may be a recess on the transmission body 131 that is adapted to the connecting rod support 124.

[0056] The connecting rod support 124 includes a rotatable connecting portion 1241 and a snap-fit ​​portion 1242. Specifically, the rotatable connecting portion 1241 can be a hinged portion for connection with the connector 140. A first recess 1311 accommodates the snap-fit ​​portion 1242. The shape of the snap-fit ​​portion 1242 can be adapted to fit the first recess 1311.

[0057] The snap-fit ​​portion 1242 is provided with a first annular groove 1243, and the inner wall of the first recess 1311 is provided with a second annular groove. The plane containing both the first and second annular grooves is parallel to the surface of the valve plate 120. The first and second annular grooves together accommodate the retaining ring 125.

[0058] During assembly, the first retaining ring 125 can be first fitted into the first annular groove 1243 on the retaining part 1242, and then the retaining part 1242 and retaining ring 125 can be inserted together into the first recess 1311. After the retaining ring 125 and retaining part 1242 enter the first recess 1311, before reaching the first annular groove 1243, due to the elasticity of the retaining ring 125, the retaining ring 125 can be positioned between the inner wall of the first annular groove 1243 and the first recess 1311 through its own deformation. When the retaining ring 125 reaches the second annular groove, the retaining ring 125 enters the second annular groove and returns to its original shape. In this state, the inner ring portion of the retaining ring 125 is located in the first annular groove 1243, and the outer ring portion is located in the second annular groove.

[0059] In the above implementation process, the cooperation between the retaining ring 125, the first annular groove 1243 on the retaining part 1242, and the second annular groove on the inner wall of the first recess 1311 achieves a detachable connection between the connecting rod support 124 and the transmission body 131. Furthermore, since the retaining ring 125 is simultaneously accommodated by the first annular groove 1243 and the second annular groove, the stability of the connection between the connecting rod support 124 and the transmission body 131 is improved. In other words, the shaking of the connecting rod support 124 on the transmission body 131 is further restricted, thereby further improving the sealing performance of the valve 100.

[0060] Please refer to Figures 9 to 11 , Figure 9 This is a perspective view of the connecting rod support 124 in the valve 100 provided in the embodiment of this application; Figure 10 This is a front view of the connecting rod support 124 in the valve 100 provided in the embodiment of this application; Figure 11 This is a top view of the connecting rod support 124 in the valve 100 provided in this embodiment. In some optional embodiments, the snap-fit ​​portion 1242 has a cross-section 1244. The cross-section 1244 is adjacent to the bottom wall of the first annular groove 1243. On the same projection plane parallel to the plate surface of the transmission body 130, the projection of the cross-section 1244 is tangent to the projection of the bottom wall of the first annular groove 1243.

[0061] The specific shape and structure of the 125 clasp can be described as follows: Figure 12 As shown, Figure 12 This is a perspective view of the retaining ring 125 in the valve 100 provided in the embodiments of this application.

[0062] During the disassembly of the connecting rod support 124 from the transmission body 131, a tool can be inserted from the cut surface 1244 to clamp the retaining ring 125, and radial pressure can be applied to the retaining ring 125 to cause it to contract. When the retaining ring 125 contracts to a diameter smaller than the inner diameter of the second annular groove, the retaining ring 125 and the connecting rod support 124 can be removed from the first recess 1311. The installation process of the connecting rod support 124 and the transmission body 131 can be the reverse.

[0063] In the above implementation process, by designing the cut surface 1244 and cooperating with the retaining ring 125, the assembly stability between the connecting rod support 124 and the transmission body 131 is improved. After operating the retaining ring 125 through the cut surface 1244, the fixation between the connecting rod support 124 and the transmission body 131 is basically eliminated, so that no effort is required when separating the connecting rod support 124 and the transmission body 131, thereby further improving the ease of disassembly of the connecting rod support 124 and the transmission body 131.

[0064] Please continue to refer to Figures 4 to 7In some alternative embodiments, the transmission body 130 includes a transmission body body 131 and a first rolling element 133. The first rolling element 133 is rotatably disposed on the transmission body body 131. The first rolling element 133 rolls in contact with a second inner wall. The axis of rotation of the first rolling element 133 is parallel to the surface of the transmission body body 131.

[0065] The first rolling element 133 can specifically be a first roller. The first rolling element 133 can be embedded in the plate surface of the transmission body 131 facing the second inner wall. Alternatively, the first rolling element 133 can be connected to the surface of the transmission body 131 through the roller connector 140 by configuring a corresponding roller connector 140.

[0066] In the above implementation process, by setting a first roller on the transmission body 130, movable contact between the transmission body 130 and the second inner wall is achieved. This not only reduces the resistance to relative movement between the transmission body 130 and the second inner wall, but also guides the movement of the transmission body 130 on the second inner wall, restricting the transmission body 130 from moving on the second inner wall outside the direction guided by the first rolling element 133. Ultimately, this improves the accuracy of driving the valve 100.

[0067] Please continue to refer to Figure 4 and Figure 5 In some alternative embodiments, the transmission body 130 includes a transmission body body 131 and a second rolling element 134. The second rolling element 134 may specifically be a second roller.

[0068] The second rolling element 134 is rotatably disposed on the transmission body 131. Specifically, the second rolling element 134 can be disposed on the side of the transmission body 131. Exemplarily, there are two second rolling elements 134, located on two separate sides of the transmission body 131. These two sides are located on opposite sides of the transmission body 131 in the direction of movement. The number of second rolling elements 134 can also be three, four, five, etc. This application embodiment does not impose specific limitations in this regard.

[0069] The second rolling element 134 rolls in contact with the side wall on the housing 112. The side wall is located between the first inner wall and the second inner wall. The axis of rotation of the second rolling element 134 is perpendicular to the plate surface of the transmission body 131.

[0070] In the above implementation process, by providing a second rolling element 134 on the transmission body 131, the transmission body 130 can contact the side wall of the housing 112 through the second rolling element 134, thereby restricting the movement of the transmission body 130 along the direction of the side wall arrangement. Furthermore, the second rolling element 134 also reduces the resistance between the transmission body 130 and the side wall, thus improving the accuracy of driving the valve 100.

[0071] Please continue to refer to Figures 4 to 7 In some alternative embodiments, the valve plate 120 includes a valve plate body 121 and a third rolling element 122. The third rolling element 122 may specifically be a third roller.

[0072] The third rolling element 122 is rotatably disposed on the valve plate body 121. The third rolling element 122 can be embedded within the plate surface of the valve plate body 121 facing the first inner wall. Alternatively, the third rolling element 122 can be connected to the surface of the valve plate body 121 via the roller connector 140 by configuring a corresponding roller connector 140.

[0073] The valve plate body 121 slides in contact with the first inner wall via a third rolling element 122. The axis of rotation of the third rolling element 122 is parallel to the surface of the valve plate body 121.

[0074] A second recess is provided on the edge of the valve port 111. This second recess is used to receive the third rolling element 122. The second recess extends from the edge of the valve port 111 in a direction opposite to the first inner wall. The position of the second recess corresponds to the position of the third rolling element 122 on the valve plate body 121. Specifically, when the valve plate body 121 is facing the valve port 111, if the third rolling element 122 is located at the center of the side of the valve plate body 121, then the second recess can be correspondingly located at the center of the side of the edge of the valve port 111. If the third rolling element 122 is located at the apex corner of the valve plate body 121, then the second recess can also be correspondingly located at the apex corner of the edge of the valve port 111.

[0075] When the valve plate 120 moves to face the valve port 111, the third rolling element 122 is received by the second recess, which blocks the rolling of the third rolling element 122. When the valve plate 120 moves to face the valve port 111, the third rolling element 122 is also basically facing the second recess. As the transmission body 130 continues to drive, based on the change in the inclination of the connecting member 140, the valve plate body 121 gradually moves away from the transmission body 130, and the third rolling element 122 gradually enters the second recess. Inside the second recess, the third rolling element 122 is less likely to roll, thus restricting the movement of the valve plate 120 along the plane containing the edge of the valve port 111.

[0076] In the above implementation process, by providing a third roller on the transmission body 130 to achieve movable contact between the valve plate 120 and the first inner wall, the resistance to relative movement between the valve plate 120 and the first inner wall is reduced, and the transmission body 130 is guided to move on the first inner wall, thereby improving the accuracy of driving the valve 100. Furthermore, by providing a second recess at the edge of the valve port 111 that matches the third roller, the rolling of the third roller is restricted by receiving the second recess. Without requiring additional materials to provide corresponding components at the valve port 111 as the first limiting part 113, translational restriction is achieved when the valve plate 120 moves to face the valve port 111.

[0077] Please refer to Figure 4 and Figure 5 In some alternative embodiments, the valve plate 120 further includes a second limiting portion 123. The transmission body 130 includes a third limiting portion 135.

[0078] The second limiting part 123 is located on the surface of the valve plate body 121 facing the transmission body 130. Specifically, the second limiting part 123 can be a protruding structure provided on the surface of the valve plate body 121. The third limiting part 135 is located on the surface of the transmission body 130 facing the valve plate body 121. Specifically, the third limiting part 135 can be another protruding structure provided on the surface of the valve plate body 121.

[0079] The second limiting part 123 is configured to abut against the third limiting part 135 when the straight lines at both ends of the connector 140 are perpendicular to the plate surface of the transmission body 130.

[0080] In the above implementation process, when the transmission body 130 drives the valve plate 120 to a vertical state until the connecting member 140 becomes vertical, the transmission body 130 is restricted from continuing to translate relative to the valve plate 120 along the plane containing the edge of the valve port 111. At this time, the shortest distance between the valve plate 120 and the valve port 111 is maximized, and consequently, the force exerted by the transmission body 130 on the valve plate 120 against the edge of the valve port 111 is also maximized. If the valve plate 120 continues to move in the same direction, the state of the connecting member 140 will become tilted again, and the distance between the transmission body 130 and the valve plate 120 will decrease. Therefore, through the abutment between the second limiting part 123 and the third limiting part, the continued movement of the transmission body 130 is restricted, allowing the valve plate 120 to maintain maximum tightness against the valve port 111, thereby further improving the sealing performance of the valve 100.

[0081] Please continue to refer to Figures 1 to 3 In some alternative embodiments, valve 100 further includes a linear actuator 150. The linear actuator 150 may specifically be a cylinder.

[0082] The linear drive 150 includes a mounting end and a drive output end. The mounting end is mounted on the valve body 110, and the drive output end is hinged to the transmission body 130. Taking a cylinder as an example, the cylinder body serves as the mounting end and is mounted on the valve body 110. The piston rod of the cylinder serves as the drive output end and is hinged to the transmission body 130. Specifically, the piston rod can be ball-jointed to the transmission body 130, allowing the transmission body 130 to swing within a certain angle range in any direction on the piston rod.

[0083] In the above implementation process, the drive output end of the linear drive 150 is hinged to the transmission body 130, so that the transmission body 130 can swing within a certain angle range at the drive output end. Compared with the rigid connection between the drive output end and the transmission body 130, when the transmission body 130 shakes to a certain extent in the housing 112, the movable connection between the transmission body 130 and the drive output end can offset the stress generated between the transmission body 130 and the drive output end due to the shaking of the transmission body 130.

[0084] Based on the same concept, embodiments of this application provide a vacuum system, including a vacuum pump, a vacuum chamber, and the valve 100 described above.

[0085] The vacuum chamber may include a chamber housing 112, on which a vacuum valve 100 is provided.

[0086] The above implementation process is the same as that of valve 100 described above, and will not be repeated here.

[0087] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A valve, characterized in that, Includes valve body, valve plate, transmission body and connecting parts; The valve body includes a valve port, a housing, a cavity formed by the housing, and a first limiting part; The valve port is connected to the cavity, and the first limiting part is disposed at the edge of the valve port; The valve port is in an open state; In the open state, the valve plate is entirely or partially located within the cavity and slides in contact with the first inner wall of the housing; the transmission body is entirely or partially located within the cavity and slides in contact with the second inner wall of the housing; wherein the first inner wall and the second inner wall are disposed opposite to each other and are both parallel to the plane containing the edge of the valve port; One end of the connecting member of the transmission body is rotatably connected to the surface of the valve plate, and the other end of the connecting member is rotatably connected to the surface of the transmission body. The transmission body is configured to move the valve plate closer to or away from the valve port along the plane where the edge is located; When the valve plate moves to face the valve port, the limiting part blocks the movement of the valve plate, and when the transmission body continues to move, it moves away from the transmission body and closer to the valve port based on the change in the inclination of the connecting member.

2. The valve according to claim 1, characterized in that, The transmission valve plate includes the transmission valve plate body and the connecting rod support; The connecting rod support is detachably connected to the valve plate transmission body body; The other end of the connector is rotatably connected to the connecting rod support.

3. The valve according to claim 2, characterized in that, The transmission valve plate also includes a retaining ring; The valve plate transmission body has a first recessed portion. The connecting rod support includes a rotatable connection part and a snap-fit ​​part; The first recess accommodates the snap-fit ​​portion; The snap-fit ​​portion is provided with a first annular groove, and the inner wall of the first recess is provided with a second annular groove; wherein, the plane where the first annular groove is located and the plane where the second annular groove is located are both parallel to the surface of the valve plate; The first annular groove and the second annular groove together accommodate the retaining ring.

4. The valve according to claim 3, characterized in that, The snap-fit ​​portion has a cross-section; The cut surface is adjacent to the bottom wall of the first annular groove; On the same projection plane parallel to the plate surface of the transmission body, the projection of the sectional plane is tangent to the projection of the bottom wall of the first annular groove.

5. The valve according to claim 2, characterized in that, The transmission element includes a transmission element body and a first rolling element; The first rolling element is rotatably disposed on the transmission body body; The first rolling element makes rolling contact with the second inner wall; The rotation axis of the first rolling element is parallel to the plate surface of the transmission body.

6. The valve according to claim 2, characterized in that, The transmission body further includes a second rolling element; The second rolling element is rotatably disposed on the transmission body body; The second rolling element rolls into contact with a side wall on the housing; wherein the side wall is located between the first inner wall and the second inner wall; The rotation axis of the second rolling element is perpendicular to the plate surface of the transmission body.

7. The valve according to claim 1, characterized in that, The valve plate includes a valve plate body and a third rolling element; The third rolling element is rotatably disposed on the valve plate body; The valve plate body slides in contact with the first inner wall via the third rolling element; The valve port has a second recessed portion at its edge; wherein the second recessed portion is used to receive the third rolling element; The second recessed portion is recessed from the edge of the valve port in a direction opposite to that of the first inner wall; When the valve plate moves to face the valve port, the third rolling element is received by the second recess, which blocks the rolling of the third rolling element.

8. The valve according to claim 7, characterized in that, The valve plate further includes a second limiting part; the transmission body includes a third limiting part; The second limiting part is located on the plate surface of the valve plate body facing the transmission body; The third limiting part is located on the plate surface of the transmission body facing the valve plate body; The second limiting part is configured to abut against the third limiting part when the straight lines at both ends of the connector are perpendicular to the plate surface of the transmission body.

9. The valve according to any one of claims 1 to 8, characterized in that, The valve also includes a linear actuator; The linear drive includes a mounting end and a drive output end; The mounting end is mounted on the valve body, and the drive output end is hinged to the transmission body.

10. A vacuum system, characterized in that, Includes a vacuum pump, a vacuum chamber, and a valve as described in any one of claims 1 to 9.

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