Jig for hub-free electroplating packaging knife and manufacturing method

Abstract

The invention discloses a hub-free electroplating packaging knife jig and a manufacturing method, the hub-free electroplating packaging knife jig is provided with a special electroplating clamp and a laser cutting positioning tool, a base body is of a columnar trapezoidal structure with an inner conical hole, a center positioning shaft of the special electroplating clamp and the inner conical hole form an inner cone and an outer cone matched with the inner conical hole, and a first reference positioning conical surface is formed; according to the laser cutting positioning tool, a second reference positioning conical surface is arranged at the top end of a pressing piece in a protruding mode, the second reference positioning conical surface and a first reference positioning conical surface are arranged equivalently, a uniform basic positioning reference is adopted, and a base body is placed into a special electroplating clamp and then placed into an electroplating solution of a suspended abrasive to be electroplated; an electroplated part is obtained and then installed on a laser cutting positioning tool, the hub-free packaging cutter is obtained through laser cutting, the laser cutting positioning tool is provided with an equally-arranged outer cone boss, the problems of repeated positioning precision and blade movement in the laser cutting process are effectively solved, the concentricity reaches within 5 micrometers, and the machining precision is greatly improved. And the position of the scribing knife during cutting is consistent with that during electroplating.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor chips, and particularly relates to a tool for electroplating hub-free packaging knife and a manufacturing method. BACKGROUND

[0002] The electroplated hub-free packaging knife is a key tool in the process of semiconductor chip packaging, and is mainly used in wafer cutting, scribing and packaging forming processes. Compared with the traditional hub design, the hub-free structure cancels the center support structure and adopts a full annular design, which has significant advantages in high-speed rotation stability, heat dissipation performance and material utilization. The current processing process is electroplating-outer circle grinding-removing the composite plating layer-line cutting the inner hole. There is a repeated clamping problem in the process of machining the outer circle and the inner hole, which causes the concentricity of the inner hole and the outer circle to be 0.03-0.06mm. After installation, the eccentricity and dynamic balance are different, which affects the stability during high-speed rotation.

[0003] The invention disclosed in publication number CN120056284A discloses a hub-type scribing knife and a preparation method thereof. The technical scheme of the hub-type scribing knife includes a base body and a composite plating layer. The base body is provided with a cooling channel. The inner side of the base body is provided with two liquid inlet holes. The outer side of the base body is provided with a plurality of liquid outlet holes. The liquid inlet holes and the liquid outlet holes are in communication with the cooling channel. The side surface of the base body forms an inclined surface. The side of the base body away from the inclined surface is provided with a flat surface. The composite plating layer is arranged on the flat surface. The preparation method includes the following steps: S1, preparing an installation body embryo and a knife body embryo; S2, processing the installation body embryo and the knife body embryo; S3, welding the installation body embryo and the knife body embryo to obtain a scribing knife embryo; S4, processing the liquid outlet holes and the mounting groove of the scribing knife embryo to obtain the base body; S5, pre-plating the base body; S6, electroplating the base body; S7, polishing, sharpening, alkali etching and chemical polishing the base body. The invention mainly focuses on the overall manufacturing of the scribing knife, and does not involve the concentricity during clamping.

[0004] Therefore, it is necessary to develop a hub-free electroplated packaging knife jig to solve the problem of poor concentricity of existing products. SUMMARY

[0005] The purpose of the present application is to solve the problem of poor concentricity of existing products by providing a tool for electroplating hub-free packaging knife and a manufacturing method.

[0006] To solve the above technical problems, the technical scheme adopted by the present application is: A tool for electroplating hub-free packaging knife, comprising a base body, a special electroplating fixture and a laser cutting positioning tool, and the base body is a columnar trapezoidal structure with an inner tapered hole in the center, and an auxiliary counterbore is also provided on the outer side of the inner tapered hole; The special electroplating fixture includes a protruding central positioning shaft and mounting grooves on both sides of the central positioning shaft. The central positioning shaft and the inner conical hole form a matching inner and outer cone. The outer end face of the central positioning shaft is set as the first reference positioning cone surface, and the core of the central positioning shaft also has a threaded hole. The laser cutting positioning fixture includes a fixture body, a U-shaped electromagnetic adsorption unit arranged on the fixture body, and a clamping member pressed on the inner side of the U-shaped electromagnetic adsorption unit. The top of the clamping member is provided with a second reference positioning cone surface that is equivalent to the first reference positioning cone surface, and the core of the clamping member is provided with a wire hole for fixed connection with the substrate.

[0007] The U-shaped electromagnetic adsorption unit includes a U-shaped hole opened on the tooling body and a U-shaped electromagnet disposed in the U-shaped hole, with both ends of the U-shaped electromagnet protruding. During assembly, the two ends of the U-shaped electromagnet are inserted into the auxiliary countersunk holes of the base.

[0008] The mounting groove of the special electroplating fixture is higher than the base body, and a contour sealing gasket matching the boundary of the base body is provided in the groove.

[0009] The U-shaped electromagnet includes a phosphated iron core and a coil wrapped around it, and the U-shaped hole is fixed together by vacuum epoxy resin potting.

[0010] During installation, a sealing gasket is also installed between the substrate and the laser cutting positioning fixture.

[0011] The clamping component is connected to the fixture body via a clamping nut.

[0012] The tooling body also has lead wire holes on both sides of its top.

[0013] A method for manufacturing a hubless electroplating encapsulation tool fixture includes the following steps: (1) Making hubless grinding wheels: Prepare electroplating solution according to conventional electroplating solution formula, use special electroplating fixture to suspend and sand the substrate, and take out the substrate with composite coating after the coating thickness reaches the target value. (2) Place the substrate with composite coating on the laser cutting positioning fixture, fix it by tightening the nut, and adjust the thickness of the sealing gasket so that the bottom of the substrate with the auxiliary countersunk hole fits seamlessly with the U-shaped electromagnet; (3) Adjust the current of the U-shaped electromagnet and the parameters of the laser cutting machine to complete the cutting and remove the finished product; (4) Use a contour detector to test the concentricity of the finished product obtained in step (3).

[0014] The beneficial effects of this invention are: (1) This invention discloses a jig for a hubless electroplating encapsulation tool and its manufacturing method. By optimizing the substrate structure, a special electroplating fixture and a laser cutting positioning fixture are set. The substrate is a columnar trapezoidal structure with an inner conical hole. The special electroplating fixture includes a central positioning shaft and mounting grooves on both sides of the central positioning shaft. The central positioning shaft and the inner conical hole form matching inner and outer cones. The outer end face of the central positioning shaft is set as a first reference positioning cone surface. The laser cutting positioning fixture has a second reference positioning cone surface protruding from the top of the clamping part. The second reference positioning cone surface is aligned with the first reference positioning cone surface. The reference positioning cone surface is set equally, and a unified basic positioning reference is adopted. After the substrate is put into the electroplating fixture, it is placed in the electroplating solution of suspended abrasive for electroplating. After obtaining the electroplated part, it is installed on the special laser cutting positioning fixture, and the hubless encapsulation knife is obtained by laser cutting. The substrate is designed with an inner cone hole and an auxiliary countersunk hole. The special laser cutting positioning fixture is composed of an equally set outer cone boss and an electromagnet, which effectively solves the problems of repeatability positioning accuracy and blade movement during laser cutting, so that the concentricity reaches within 5um, ensuring that the position of the dicing blade is consistent with that during electroplating.

[0015] (2) Extremely high product precision: By designing specialized electromagnetic clamps for machining outer diameters and inner holes on laser cutting equipment, secondary clamping errors are eliminated, reducing concentricity from approximately 0.05mm to approximately 0.003mm. This also reduces production processes and shortens overall product production time.

[0016] (3) High stability of the production process: Integrated electromagnetic adsorption provides active normal clamping force, effectively suppressing interlayer separation and vibration caused by blowing or water flow impact, which cannot be achieved by pure mechanical support.

[0017] (4) Collaborative innovation: This invention organically integrates unified benchmark positioning with active electromagnetic adsorption stability, while utilizing the characteristic of laser cutting machines that can clamp and cut concentric circles in one go, forming an integrated solution that produces a synergistic effect of "1+1>2". Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the product of the present invention; Figure 2 This is a process flow diagram of the present invention; Figure 3 This is a schematic diagram of the matrix structure; Figure 4 This is a cross-sectional view of the base material; Figure 5 This is an assembly diagram during electroplating; Figure 6 This is a structural schematic diagram of a laser cutting positioning fixture; Figure 7 This is a cross-sectional view of the laser cutting positioning fixture; Figure 8 This is a schematic diagram of the installation and positioning of the present invention. Detailed Implementation

[0019] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0020] This invention provides a jig for hubless electroplating encapsulation and a manufacturing method thereof, such as Figures 1 to 8 As shown.

[0021] A jig for electroplating and packaging of hubless blades includes a base 4, a special electroplating fixture 6 and a laser cutting positioning fixture. The base 4 is a columnar trapezoidal structure with an inner conical hole, and an auxiliary countersunk hole is also opened on the outer side of the inner conical hole. The special electroplating fixture includes a central positioning shaft and mounting grooves on both sides of the central positioning shaft. The central positioning shaft and the inner conical hole form a matching inner and outer cone. The outer end face of the central positioning shaft is set as the first reference positioning cone surface 2. The central positioning shaft also has threaded holes. The height of the mounting groove of the special electroplating fixture is higher than that of the base body 4, and a contour sealing gasket 5 matching the boundary of the base body is provided in the groove.

[0022] The laser cutting positioning fixture includes a fixture body 14, a U-shaped electromagnetic adsorption unit arranged on the fixture body 14, and a clamping member 12 pressed on the inner side of the U-shaped electromagnetic adsorption unit. The top of the clamping member 12 is provided with a second reference positioning cone surface 8, and the second reference positioning cone surface 8 is set in the same way as the first reference positioning cone surface 2. Both sides of the top of the fixture body are also provided with lead wire holes 10, and the core of the clamping member 12 is provided with a wire hole for fixed connection with the base 4.

[0023] The U-shaped electromagnetic adsorption unit includes a U-shaped hole through which the tooling body 14 is opened, and a U-shaped electromagnet disposed in the U-shaped hole, with both ends of the U-shaped electromagnet protruding; during assembly, both ends of the U-shaped electromagnet are inserted into the auxiliary countersunk holes of the base 4, and a first sealing gasket 18 is also disposed between the base 4 and the laser cutting positioning tooling.

[0024] The U-shaped electromagnet includes a phosphated iron core 9 and a coil 11 wrapped around it, and the U-shaped hole is encapsulated and fixed as a whole by vacuum epoxy resin 13.

[0025] The clamping component is connected to the base 4 via a clamping nut 16.

[0026] A method for manufacturing a hubless electroplating encapsulation tool fixture includes the following steps: (1) Making hubless grinding wheels: Prepare electroplating solution according to conventional electroplating solution formula, use special electroplating fixture to suspend and sand the substrate, and take out the substrate with composite coating after the coating thickness reaches the target value. (2) Place the substrate with composite coating on the laser cutting positioning fixture, fix it by tightening the nut, and adjust the thickness of the sealing gasket so that the bottom of the substrate with the auxiliary countersunk hole fits seamlessly with the U-shaped electromagnet; (3) Adjust the current of the U-shaped electromagnet and the parameters of the laser cutting machine to complete the cutting and remove the finished product; (4) Use a contour detector to test the concentricity of the finished product obtained in step (3).

[0027] The following detailed description is provided in conjunction with specific embodiments: The substrate used is a disc with a thickness of 4-6 mm, an inner diameter of 5-15 mm, and an outer diameter of 50-120 mm. The outer diameter has a 20-30° bevel, and the inner hole is tapered. Two centrally symmetrical auxiliary countersunk holes, 10-30 mm in diameter and 3.5-5.5 mm deep, are located on the side with the smaller outer diameter. Figure 2 As shown.

[0028] The central positioning shaft of the special electroplating fixture 6 is matched with the inner and outer cones of the inner cone hole of the base 4. The base 4 is fixed into the special electroplating fixture 6 by fitting the boundary contour sealing gasket 5 onto the base and tightening it with the connecting rod 1. The height of the special electroplating fixture 6 is higher than that of the base 4. It is connected to the cathode of the electroplating equipment through the connecting rod 1 for rotational electroplating. The plating solution is a conventional nickel sulfamate electroplating solution. The finished electroplated product ensures that there is no adhesion between the electroplated layer and the base. The electroplating assembly effect diagram is shown below. Figure 3 As shown.

[0029] After the coating thickness reaches the target value, the substrate 17 with composite coating is taken out and placed on the laser cutting positioning fixture, and fixed by the clamping nut 16. In addition, the thickness of the first sealing gasket 18 needs to be adjusted to ensure that the bottom of the substrate 17 with composite coating fits seamlessly with the U-shaped electromagnet.

[0030] The laser cutting positioning fixture includes a stainless steel fixture body 14, a U-shaped electromagnetic adsorption unit, and a clamping component 12. The fixture body 14 is made of 304 stainless steel and precision milled, with an internal groove to accommodate the U-shaped electromagnet. The core of the U-shaped electromagnet is made of electrical pure iron DT4 and is phosphated before being vacuum-encapsulated with epoxy resin 13 to form a robust whole. The coil 11 is wound with enameled wire, and the number of turns and diameter of the coil are matched to the workpiece being processed to ensure that the U-shaped electromagnet has sufficient magnetic force to attract the composite coating and ensure the stability of the composite coating during the cutting process.

[0031] The U-shaped electromagnet is fixed on the tooling body 14 by the clamping member 12. The clamping member 12 has a raised second reference positioning cone surface 8 in the middle that matches the cone hole in the base. The wire hole in the middle of the cone shaft of the clamping member is used to fix the base 17 with composite coating. The clamping member 12 is connected to the tooling body 14 by the clamping nut 16.

[0032] Subsequently, by adjusting the energizing current of the U-shaped electromagnet and the parameters of the laser cutting machine, concentric circle cutting is completed. The laser cutting power and cutting speed are related to the thickness of the electroplated composite coating being cut. The magnitude of the electromagnetic force is related to the air cooling force of the laser or the water flow pressure of the water-guided cooling system.

[0033] Turn off the electromagnet, remove the base from the tooling body 14, remove the product, and check the concentricity. Example 1

[0034] Finished product parameters: Inner diameter φ40mm, outer diameter φ54.2mm, composite coating thickness 0.05mm. Matrix material: aluminum (1) Fabrication of hubless grinding wheels Prepare the electroplating solution according to the conventional electroplating solution formula, and suspend it with sand using a special electroplating fixture. After the coating thickness reaches the target value, remove the substrate and transfer it to the laser cutting positioning fixture. Fix it by tightening the nut and adjust the thickness of the sealing gasket so that the bottom of the substrate of the auxiliary countersunk hole fits seamlessly with the U-shaped electromagnet. Adjust the current to keep the ampere-turns (total number of turns of the coil multiplied by the current passing through) around 400AT, adjust the laser cutting machine parameters, complete the cutting, and remove the finished product.

[0035] (2) Concentricity detection The concentricity of the finished product was measured using a contour detector and found to be between 0.003 mm and 0.005 mm. Example 2

[0036] Finished product parameters: inner hole φ40mm, outer diameter φ54.2mm, composite coating thickness 0.05mm, 32 evenly distributed grooves 0.5mm wide and 1mm deep.

[0037] Matrix material: aluminum (1) Fabrication of hubless toothed grinding wheels Prepare the electroplating solution according to the conventional electroplating solution formula, and suspend it with sand using a special electroplating fixture. After the coating thickness reaches the target value, remove the substrate and transfer it to the laser cutting positioning fixture. Fix it by tightening the nut and adjust the thickness of the sealing gasket so that the bottom of the substrate of the auxiliary countersunk hole fits seamlessly with the U-shaped electromagnet. Adjust the current to keep the ampere-turns (total number of turns of the coil multiplied by the current passing through) around 400AT, adjust the laser cutting machine parameters, complete the cutting, and remove the finished product.

[0038] (2) Concentricity detection The concentricity of the finished product was measured using a contour detector and found to be between 0.002 mm and 0.005 mm.

[0039] This invention discloses a jig and manufacturing method for a hubless electroplating encapsulation tool, which optimizes the production process route. The process flow is changed from electroplating-grinding the outer diameter-removing the ring-wire cutting to electroplating-laser cutting-removing the ring. The laser cutting positioning fixture includes a high-precision reference positioning seat, and the stability of the laser cutting process is ensured by adding a positioning cone hole and a special magnetic clamp.

[0040] Meanwhile, the aluminum substrate structure was optimized, and a unified basic positioning benchmark was adopted. The special electroplating fixture and the laser cutting positioning fixture adopted a unified basic positioning benchmark. The special electroplating fixture was equipped with a first benchmark positioning surface with a precision conical surface, and the laser cutting positioning fixture was equipped with a second benchmark positioning surface that precisely matched it. Through the unified basic positioning benchmark, the position of the dicing blade during cutting was ensured to be consistent with that during electroplating. Since there is no bonding force between the nickel-based composite coating and the substrate, auxiliary countersunk holes were added to the aluminum substrate to ensure the stability of the nickel layer during cutting, so as to achieve the purpose of adsorbing and fixing the nickel-based composite coating through the aluminum layer.

[0041] The integrated electromagnetic adsorption and stabilization module, with an electromagnetic adsorption unit integrated within the laser cutting positioning fixture, consists of a U-shaped electromagnet to ensure the presence of adsorption force. When the substrate to be cut is placed on the fixture, the electromagnet is activated, and the strong magnetic force generated will penetrate the non-magnetic substrate and directly adsorb the composite coating (ferromagnetic material) on its surface, thereby pressing the nickel layer tightly onto the substrate from the normal direction, preventing it from separating or vibrating under the impact of the cutting water flow.

[0042] (3) The iron core of the U-shaped electromagnet is phosphated, and the coil is encapsulated with epoxy resin to enhance its sealing and corrosion resistance. The number of U-shaped magnets can be increased as needed. High permeability materials (such as permalloy and electrical pure iron) are needed at the overlapping positions between magnets to guide the leaked magnetic field away and prevent it from interfering with another electromagnet.

[0043] This invention involves placing a substrate into an electroplating fixture and then immersing it in an electroplating solution containing suspended abrasive for electroplating. The resulting electroplated part is then mounted on a dedicated laser cutting positioning fixture, and laser cutting is used to obtain a hubless encapsulation tool. The substrate is designed with an inner conical hole and an auxiliary countersunk hole; the dedicated laser cutting positioning fixture consists of an equally arranged outer conical boss and an electromagnet. Existing technologies suffer from concentricity issues between the inner hole and the outer circle. This invention discloses a hubless electroplating encapsulation tool fixture and its manufacturing method, effectively solving the problems of repeatability positioning accuracy and blade movement during laser cutting, achieving a concentricity within 5µm.

[0044] If this patent uses terms such as "first" and "second" to define components, those skilled in the art should know that the use of "first" and "second" is merely for the convenience of describing the invention and simplifying the description, and the above terms have no special meaning.

[0045] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this invention is defined by the appended claims and their equivalents.

[0046] In the description of this invention, it should be understood that the terms "front", "rear", "left", "right", "center", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only used to facilitate the description of this invention and to simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.

Claims

1. A jig for hubless electroplating and encapsulation tools, characterized in that: It includes a substrate, a special electroplating fixture and a laser cutting positioning tool. The substrate is a columnar trapezoidal structure with an inner conical hole in the center, and an auxiliary countersunk hole is also opened on the outside of the inner conical hole. The special electroplating fixture includes a protruding central positioning shaft and mounting grooves on both sides of the central positioning shaft. The central positioning shaft and the inner conical hole form a matching inner and outer cone. The outer end face of the central positioning shaft is set as the first reference positioning cone surface, and the core of the central positioning shaft also has a threaded hole. The laser cutting positioning fixture includes a fixture body, a U-shaped electromagnetic adsorption unit arranged on the fixture body, and a clamping member pressed on the inner side of the U-shaped electromagnetic adsorption unit. The top of the clamping member is provided with a second reference positioning cone surface that is equivalent to the first reference positioning cone surface, and the core of the clamping member is provided with a wire hole for fixed connection with the substrate.

2. The jig for hubless electroplating and packaging tools according to claim 1, characterized in that: The U-shaped electromagnetic adsorption unit includes a U-shaped hole opened on the tooling body and a U-shaped electromagnet disposed in the U-shaped hole, with both ends of the U-shaped electromagnet protruding. During assembly, the two ends of the U-shaped electromagnet are inserted into the auxiliary countersunk holes of the base.

3. A jig for hubless electroplating and packaging tools according to claim 2, characterized in that: The mounting groove of the special electroplating fixture is higher than the base body, and a contour sealing gasket matching the boundary of the base body is provided in the groove.

4. A jig for hubless electroplating and packaging tools according to claim 2, characterized in that: The U-shaped electromagnet includes a phosphated iron core and a coil wrapped around it, and the U-shaped hole is fixed together by vacuum epoxy resin potting.

5. A jig for hubless electroplating and encapsulation tools according to claim 1, characterized in that: During installation, a sealing gasket is also installed between the substrate and the laser cutting positioning fixture.

6. A jig for hubless electroplating and packaging tools according to claim 1, characterized in that: The clamping component is connected to the fixture body via a clamping nut.

7. A jig for hubless electroplating and packaging tools according to claim 1, characterized in that: The tooling body also has lead wire holes on both sides of its top.

8. A method for manufacturing a hubless electroplating packaging tool fixture according to any one of claims 1 to 7, characterized in that, Includes the following steps: (1) Making hubless grinding wheels: Prepare electroplating solution according to conventional electroplating solution formula, use special electroplating fixture to suspend and sand the substrate, and take out the substrate with composite coating after the coating thickness reaches the target value. (2) Place the substrate with composite coating on the laser cutting positioning fixture, fix it by tightening the nut, and adjust the thickness of the sealing gasket so that the bottom of the substrate with the auxiliary countersunk hole fits seamlessly with the U-shaped electromagnet; (3) Adjust the current of the U-shaped electromagnet and the parameters of the laser cutting machine to complete the cutting and remove the finished product; (4) Use a contour detector to test the concentricity of the finished product obtained in step (3).

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