Optical switch device

Abstract

The invention relates to an optical switch device which comprises an optical fiber array unit arranged along an optical path, an MEMS micromirror array is arranged on one side of the optical fiber array unit, a reflecting part is arranged on one side of the MEMS micromirror array, the reflecting part and the optical fiber array unit are distributed on the two opposite sides of the MEMS micromirror array, the reflecting part is provided with a first reflecting surface and a second reflecting surface, and the first reflecting surface and the second reflecting surface are opposite to each other. The first reflecting surface is perpendicular to the second reflecting surface; signal light emitted by the optical fiber array unit enters the MEMS micro-mirror array and then is reflected to the first reflecting surface through the MEMS micro-mirror array, and reflected light entering the first reflecting surface is reflected to the second reflecting surface, then is reflected back to the MEMS micro-mirror array in a mirror image mode and is reflected back to the optical fiber array unit through the MEMS micro-mirror array. By making full use of the size perpendicular to the light path direction, the size of the whole light path is effectively compressed, multiple FAU-MEMS combinations do not need to be arranged, and the adjustment difficulty and the wiring design scheme difficulty can be greatly reduced.

Description

Technical Field

[0001] This application relates to the field of optical switching technology, specifically to an optical switching device. Background Technology

[0002] Currently, microelectromechanical systems (MEMS) micromirror arrays are widely used in optical switching devices. By controlling the micromirrors with voltage to rotate to the target direction, the light emitted from the input optical fiber is guided into the target optical fiber at the output end. Compared with traditional optical-electrical-optical switches, optical switches (OCS) fabricated in this way have the advantages of low power consumption and good security.

[0003] In related technologies, current commercially available optical switching devices mainly utilize two MEMS chips: one aligned with the input fiber array (FAU) and the other aligned with the output fiber array. Optical switching is achieved by adjusting the deflection angle of the micromirrors at the corresponding ports of the two MEMS chips. However, this approach introduces several problems. Multiple FAU-MEMS combinations increase the difficulty of adjustment. Furthermore, to achieve switching, different FAU and MEMS combinations are typically not spatially connected and have different spatial angles, making subsequent wiring design even more challenging.

[0004] Therefore, it is necessary to design a new optical switching device to overcome the above problems. Summary of the Invention

[0005] This application provides an optical switching device that can solve the technical problems of difficult adjustment and complicated wiring design in related technologies.

[0006] In a first aspect, embodiments of this application provide an optical switching device, comprising: an optical fiber array unit disposed along an optical path, a MEMS micromirror array disposed on one side of the optical fiber array unit, and a reflector disposed on one side of the MEMS micromirror array, the reflector and the optical fiber array unit being distributed on opposite sides of the MEMS micromirror array, the reflector being provided with a first reflective surface and a second reflective surface, the first reflective surface and the second reflective surface being perpendicular to each other; signal light emitted from the optical fiber array unit is incident on the MEMS micromirror array and reflected by the MEMS micromirror array to the first reflective surface, the reflected light incident on the first reflective surface is then reflected to the second reflective surface and reflected back to the MEMS micromirror array in a mirror manner, and then reflected back to the optical fiber array unit by the MEMS micromirror array.

[0007] In conjunction with the first aspect, in one embodiment, the reflector is a right-angle prism having the first reflecting surface and the second reflecting surface; or the reflector is a roof prism or a Dove prism.

[0008] In conjunction with the first aspect, in one embodiment, the reflector includes a first reflector and a second reflector, the first reflector and the second reflector being perpendicular to each other, and the first reflector having a first reflective surface and the second reflector having a second reflective surface.

[0009] In conjunction with the first aspect, in one embodiment, the MEMS micromirror array has a light emitting portion and a light receiving portion, the light emitting portion and the light receiving portion being distributed along the spacing direction between the fiber array unit and the reflector.

[0010] In conjunction with the first aspect, in one embodiment, the MEMS micromirror array has a light emitting portion and a light receiving portion, the light emitting portion and the light receiving portion being distributed along a direction perpendicular to the spacing between the fiber array unit and the reflector.

[0011] In conjunction with the first aspect, in one embodiment, the MEMS micromirror array includes one or more MEMS micromirror array chips, wherein the light emitting portion and the light receiving portion are located on the same MEMS micromirror array chip, or the light emitting portion and the light receiving portion are located on adjacent but different MEMS micromirror array chips.

[0012] In conjunction with the first aspect, in one embodiment, the optical switch device further includes a monitoring device, which includes a beam splitter, a monitoring light source, and an imaging unit. The beam splitter is located above the MEMS micromirror array, and the monitoring light source is located on one side of the beam splitter for emitting monitoring light to the beam splitter. The monitoring light is emitted through the beam splitter to the MEMS micromirror array, and the imaging unit is used to receive the monitoring light reflected by the MEMS micromirror array.

[0013] In conjunction with the first aspect, in one embodiment, the overall optical path length reflected from the MEMS micromirror array to the imaging screen of the imaging unit is equal to the optical path length from the light emitting portion to the light receiving portion of the MEMS micromirror array.

[0014] In conjunction with the first aspect, in one embodiment, the imaging unit includes an imaging screen, a lens group, and a photosensitive element, wherein the imaging screen, the lens group, and the photosensitive element are sequentially disposed on one side of the beam splitter; the imaging screen is used to receive monitoring light reflected by the MEMS micromirror array and to display the optical image after the monitoring light is scattered on the imaging screen; the lens group is used to proportionally reduce the optical image on the imaging screen, and the photosensitive element is used to detect the image information proportionally reduced by the lens group.

[0015] In conjunction with the first aspect, in one embodiment, the monitoring device further includes a third reflector located above the beam splitter, wherein the monitoring light emitted by the monitoring light source is reflected by the third reflector to the beam splitter.

[0016] In conjunction with the first aspect, in one embodiment, the optical switch device further includes a monitoring device, which includes a fourth reflector, a monitoring light source, and an imaging unit. The fourth reflector is located above the MEMS micromirror array, and the monitoring light source is located on one side of the fourth reflector for emitting monitoring light to the fourth reflector. The monitoring light is transmitted through the fourth reflector to the MEMS micromirror array, and the imaging unit is used to receive the monitoring light reflected by the MEMS micromirror array.

[0017] The beneficial effects of the technical solutions provided in this application include: By setting a MEMS micromirror array on one side of the fiber optic array unit and a reflector on the other side of the MEMS micromirror array, the first and second reflective surfaces on the reflector can shift the signal light reflected by the MEMS micromirror array a certain distance perpendicular to the incident direction and then return it to the MEMS micromirror array in a mirror manner. The light is then reflected back to the fiber optic array unit by the MEMS micromirror array, forming an optical switching path. By making full use of the dimensions perpendicular to the optical path direction, the overall optical path size is effectively compressed. Moreover, this can be achieved with just one set of fiber optic array units, MEMS micromirror array, and reflector, without the need for multiple FAU-MEMS combinations. This greatly reduces the difficulty of adjustment and wiring design, solving the technical problems of high adjustment difficulty and difficult wiring design in related technologies. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of the structure of an optical switching device provided in an embodiment of this application; Figure 2 This is a schematic diagram of another optical switching device provided in an embodiment of this application; Figure 3 This is a schematic diagram of the structure of the optical switch device with a monitoring device provided in the embodiments of this application; Figure 4 Provided for the embodiments of this application Figure 3 A schematic diagram of the distribution of the MEMS micromirror array; Figure 5 A schematic diagram of a structure for incorporating another monitoring device in an optical switching device provided in an embodiment of this application; Figure 6 Provided for the embodiments of this application Figure 5 A schematic diagram of the distribution of the MEMS micromirror array.

[0020] In the picture: 1. Fiber optic array unit; 2. MEMS micromirror array; 21. Light emitting section; 22. Light receiving section; 3. Reflector; 31. First reflecting surface; 32. Second reflecting surface; 4. Monitoring device; 41. Beam splitter prism; 42. Monitoring light source; 43. Imaging unit; 44. Fourth reflecting mirror. Detailed Implementation

[0021] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0022] This application provides an optical switching device that can solve the technical problems of difficult adjustment and complicated wiring design in related technologies.

[0023] See Figure 1As shown in the figure, this application provides an optical switching device, which includes: an optical fiber array unit 1 arranged along an optical path, a MEMS micromirror array 2 disposed on one side of the optical fiber array unit 1, and a reflector 3 disposed on one side of the MEMS micromirror array 2. The reflector 3 and the optical fiber array unit 1 are distributed on opposite sides of the MEMS micromirror array 2. The reflector 3 is provided with a first reflective surface 31 and a second reflective surface 32, the first reflective surface 31 and the second reflective surface 32 being perpendicular to each other. The signal light emitted from the optical fiber array unit 1 is incident on the MEMS micromirror array 2 and reflected by the MEMS micromirror array 2 to the first reflective surface 31. The reflected light incident on the first reflective surface 31 is then reflected to the second reflective surface 32 and reflected back to the MEMS micromirror array 2 in a mirror manner, and then reflected back to the optical fiber array unit 1 by the MEMS micromirror array 2.

[0024] It should be understood that in the above embodiments, the fiber array unit 1 is composed of fiber bundles, collimating lenses, and related structural components. Currently, there are two main implementation methods: one is to connect each fiber to a corresponding fiber collimator (a device that combines a collimating lens and an optical fiber), and then use structural components to fix the collimator in the desired position; the other method is to fabricate a micromirror array made of silicon / quartz / special glass material aligned with the desired array position, and then couple the optical fiber to the micromirror array through a microporous quartz substrate and a quartz plate. This fiber array unit 1 can position the beam waist of the emitted fiber at the fiber end face, converting a Gaussian beam with a large divergence angle into a beam waist position at the middle of the working distance. The collimating lens at the working distance position can recouple the beam into the fiber, with an overall loss of approximately 0.2 dB.

[0025] In the above embodiments, the MEMS micromirror array 2 can be composed of one or more MEMS micromirror array chips, characterized in that it has multiple micro mirrors controlled by microelectromechanical devices, and the deflection angle of these micro mirrors can be changed by applying voltage.

[0026] This embodiment sets up a MEMS micromirror array 2 on one side of the fiber array unit 1, and a reflector 3 on one side of the MEMS micromirror array 2. The first reflective surface 31 and the second reflective surface 32 on the reflector 3 can shift the signal light reflected by the MEMS micromirror array 2 a certain distance in the direction perpendicular to the light incident on the first reflective surface 31, and then return it to the MEMS micromirror array 2 in a mirror manner. Then, it is reflected back to the fiber array unit 1 by the MEMS micromirror array 2, forming a path for optical switching. This embodiment makes full use of the size perpendicular to the optical path direction by setting the first reflective surface 31 and the second reflective surface 32, shifting the signal light a certain distance and returning it to the MEMS micromirror array 2 in a mirror manner, which effectively compresses the size of the overall optical path. Moreover, it can be achieved by using a set of fiber array unit 1, MEMS micromirror array 2 and reflector 3, without the need to set up multiple FAU-MEMS combinations. This can greatly reduce the difficulty of adjustment and wiring design, and solve the technical problems of high adjustment difficulty and difficult wiring design in related technologies.

[0027] For the optical path of a single MEMS micromirror array chip, the light input and output positions on the MEMS micromirror array 2 can be projected to coincide on the optical path, effectively reducing the lens deflection angle required for optical path switching. For MEMS micromirror array chips with the same deflection angle and lens size, more ports can be supported. Simultaneously, by setting the reflector 3, the position of the image of the MEMS micromirror array 2 reflected in the optical path is parallel to the original emitted beam of the MEMS micromirror array 2, resulting in a smaller fluctuation range in the working length. This significantly avoids the decrease in collimator coupling efficiency caused by changes in the working length, further reducing insertion loss.

[0028] For the optical path of a multi-MEMS micromirror array chip, by making full use of the dimensions in the direction perpendicular to the original main optical path, the overall size of the optical path is effectively compressed, resulting in a smaller size for the manufactured optical switching device.

[0029] Further, in one embodiment, the reflector 3 is a right-angle prism, which has a first reflecting surface 31 and a second reflecting surface 32. In some optional embodiments, the reflector 3 can also be a roof prism or a Dove prism, such as a hollow roof prism. Roof prisms or Dove prisms also have the aforementioned first reflecting surface 31 and second reflecting surface 32 and perform corresponding functions, which will not be elaborated further here.

[0030] Furthermore, in some embodiments, the reflector 3 includes a first reflector and a second reflector, the first reflector and the second reflector being perpendicular to each other, and the first reflector having a first reflective surface 31 and the second reflector having a second reflective surface 32.

[0031] In this embodiment, the reflector 3 can be a right-angle prism, a set of 90-degree reflectors, or other structures, as long as the reflector 3 has two mutually perpendicular reflective surfaces. Figure 1 and Figure 2 (As shown). One of the reflective surfaces can receive the light beam reflected from the MEMS micromirror array 2, and the other reflective surface can reflect the reflected light beam back to the MEMS micromirror array 2.

[0032] Furthermore, in one embodiment, the MEMS micromirror array 2 has a light emitting portion 21 and a light receiving portion 22, the light emitting portion 21 and the light receiving portion 22 being distributed along the spacing direction between the fiber array unit 1 and the reflector 3. See also Figure 5 As shown, for ease of description, the following coordinate system is established for the entire optical switch device: the normal direction of the MEMS micromirror array 2 is the y-axis, and the direction of the outgoing fiber of the fiber array unit 1, together with the y-axis, forms the xy plane. On this plane, the direction perpendicular to the y-axis is defined as the x-axis, and the direction perpendicular to the xy plane is defined as the z-axis. Changes in the x-direction are called left-right, changes in the y-direction are called up-down, and changes in the z-direction are called front-back.

[0033] See Figure 6 As shown, in this embodiment, the light emitting part 21 and the light receiving part 22 of the MEMS micromirror array 2 are arranged along the x-axis. In this optical path, the left side of the MEMS micromirror array 2 is the light emitting part 21, and the right side is the light receiving part 22. The light beam is emitted from the fiber array unit 1, reflected by the light emitting part 21 of the MEMS micromirror array 2 into the reflector 3, and then reflected to the light receiving part 22 of the MEMS micromirror array 2. The light receiving part 22 then reflects the light back into the fiber array unit 1. Compared with the traditional Z-shaped optical path, this optical path not only reduces the spatial size, but also provides space for the addition of subsequent monitoring optical paths.

[0034] Furthermore, in some optional embodiments, the MEMS micromirror array 2 has a light emitting portion 21 and a light receiving portion 22, wherein the light emitting portion 21 and the light receiving portion 22 are distributed along a direction perpendicular to the spacing between the fiber array unit 1 and the reflector 3. See also Figure 3 and Figure 4As shown, in this embodiment, the light emitting portion 21 and the light receiving portion 22 of the MEMS micromirror array 2 are arranged along the z-axis. In this optical path, the front side of the MEMS micromirror array 2 is the light emitting portion 21, and the rear side is the light receiving portion 22. The light beam is emitted from the fiber array unit 1, reflected by the light emitting portion 21 of the MEMS micromirror array 2 into the reflector 3, and then reflected to the light receiving portion 22 of the MEMS micromirror array 2, and then reflected back to the fiber array unit 1 by the light receiving portion 22. Compared with the above-mentioned arrangement of the light emitting portion 21 and the light receiving portion 22 along the x-axis, this optical path has lower requirements for the range through which the monitoring beam can pass.

[0035] Furthermore, in one embodiment, the MEMS micromirror array 2 may include one or more MEMS micromirror array chips. The light emitting portion 21 and the light receiving portion 22 may be located on the same MEMS micromirror array chip, or the light emitting portion 21 and the light receiving portion 22 may be located on adjacent but different MEMS micromirror array chips. That is, the light emitting portion 21 and the light receiving portion 22 may be composed of a single MEMS micromirror array chip, or they may be composed of adjacent but different MEMS micromirror array chips.

[0036] Furthermore, in one embodiment, the optical switch device further includes a monitoring device 4, which includes a beam splitter 41, a monitoring light source 42, and an imaging unit 43. The beam splitter 41 is located above the MEMS micromirror array 2, and the monitoring light source 42 is located on one side of the beam splitter 41, for emitting monitoring light to the beam splitter 41. The monitoring light is emitted to the MEMS micromirror array 2 through the beam splitter 41, and the imaging unit 43 is used to receive the monitoring light reflected by the MEMS micromirror array 2.

[0037] In this embodiment, the beam splitter 41 is a commonly used optical device with four light-transmitting planes. When light enters the beam splitter 41 from one plane A, it can disperse the light into two beams of equal power, which exit from the opposite plane B and the other plane C, respectively. When light enters from plane B, it exits from the opposite plane A and the plane D opposite plane C. The beam splitter 41 is placed directly above the MEMS micromirror array 2, and its upper and lower surfaces are light-transmitting planes. The side exit surface when light enters from the upper surface is painted black. The imaging unit 43 and the monitoring light source 42 are placed behind the side exit surface when light enters from the lower surface and the upper surface, respectively. The monitoring light source 42 can be selected as a parallel light source with a wavelength different from the signal light source and which can be reflected by the MEMS micromirror array 2.

[0038] See Figure 3As shown, in one optional configuration, the beam splitter 41 is positioned directly above the MEMS micromirror array 2, and the monitoring light source 42 is positioned directly above the beam splitter 41. The monitoring light source 42 emits parallel light downwards, which is then split by the beam splitter 41 and incident vertically onto the MEMS micromirror array 2. After being reflected by the MEMS micromirror array 2, the light is incident back onto the beam splitter 41 and then enters the imaging unit 43 on the left side. In this embodiment, by setting up the monitoring device 4, the reflection angle of each micromirror in the current MEMS micromirror array 2 can be calculated. Compared with the monitoring schemes in related technologies, this monitoring device 4 does not require the use of expensive dielectric film reflectors, nor does it require increasing the incident angle of the fiber array unit 1 onto the MEMS micromirror array 2. Furthermore, it only requires a slight increase in size in the xy plane and will not affect the overall height of the device.

[0039] Furthermore, in one embodiment, the imaging unit 43 includes an imaging screen, a lens group, and a photosensitive element. The imaging screen, the lens group, and the photosensitive element are sequentially disposed on one side of the beam splitter prism 41. The imaging screen is used to receive monitoring light reflected by the MEMS micromirror array 2 and to display the optical image after the monitoring light is scattered on the imaging screen. The lens group is used to proportionally reduce the optical image on the imaging screen, and the photosensitive element is used to detect the image information proportionally reduced by the lens group.

[0040] In this embodiment, the imaging unit 43 includes an imaging screen, a lens assembly, and photosensitive elements. The imaging screen receives monitoring light reflected by the MEMS micromirror array 2, scatters it, and displays an optical image. The lens assembly then proportionally reduces the optical image, which is detected by the photosensitive elements to acquire the corresponding image information. By analyzing the image information, the reflection angle of each micromirror in the current MEMS micromirror array 2 can be calculated. The imaging screen can be made of optical elements with scattering effects, such as frosted glass or a diffuser; the photosensitive elements can be CMOS, CCD, or other photosensitive elements.

[0041] In the above embodiment, the monitoring light source 42 can be composed of an 850 nm VCSEL laser and a plano-convex lens. The calculated chip size to be covered is 28 mm × 14 mm, the diameter of the circular parallel light spot should be greater than 32 mm, and the laser emission angle is 10°. Therefore, a plano-convex lens with a focal length of 100 mm is selected. The VCSEL laser is placed 100 mm to the side of the principal light spot plane of the principal optical axis of the plano-convex lens. According to calculations, a circular parallel light with a diameter of 34 mm can be obtained, which can completely cover the entire chip.

[0042] In this design, the CCD size corresponding to imaging unit 43 is 5×3 mm. 2With a magnification of 6x, a lens consisting of 5mm and 30mm focal length lenses was used to enable CCD to read the complete chip image on the imaging screen. The imaging screen was made of fused silica with a surface roughness of 600grit. At this roughness, the intensity of scattered light is sufficient and the degree of image deformation caused by roughness is relatively low.

[0043] Further, in one embodiment, the overall optical path length reflected from the MEMS micromirror array 2 to the imaging screen of the imaging unit 43 is equal to the optical path length from the light emitting part 21 to the light receiving part 22 of the MEMS micromirror array 2. In this embodiment, in the monitoring optical path, the overall optical path length reflected from the MEMS micromirror array 2 to the imaging screen is preferably the length from the light emitting part 21 to the light receiving part 22 of the MEMS micromirror array 2. In this case, for the z-direction, the deflection length of the beam in the main optical path is the same as the deflection length in the monitoring optical path; for the x-direction, the beam is deflected at an initial angle of 30° in the main optical path. Assuming the micromirror deflection angle is θ, the beam deflection angle is 2θ, and the optical path is L, then the beam deflection dimension is... The deflection length in the monitoring optical path is As can be seen, the actual beam deflection size in the optical path can be inferred by detecting and monitoring the beam deflection size.

[0044] Furthermore, in some optional embodiments, the monitoring device 4 may also include a third reflector located above the beam splitter 41, wherein the monitoring light emitted by the monitoring light source 42 is reflected by the third reflector to the beam splitter 41. In this embodiment, in the monitoring optical path, by adding another reflector above the beam splitter 41 and allowing the parallel light source to enter from the left or right side, the overall size of the optical path can be further reduced.

[0045] Furthermore, in one embodiment, the optical switch device further includes a monitoring device 4. The monitoring device 4 includes a fourth reflecting mirror 44, a monitoring light source 42, and an imaging unit 43. The fourth reflecting mirror 44 is located above the MEMS micromirror array 2, and the monitoring light source 42 is located to one side of the fourth reflecting mirror 44, for emitting monitoring light towards the fourth reflecting mirror 44. The monitoring light is transmitted through the fourth reflecting mirror 44 to the MEMS micromirror array 2. The imaging unit 43 is used to receive the monitoring light reflected by the MEMS micromirror array 2. See also... Figure 1 and Figure 5As shown, in this embodiment, the beam splitter 41 in the monitoring device 4 can be replaced with a reflector (i.e., the fourth reflector 44). This fourth reflector 44 can transmit substantially all light of the first wavelength and reflect substantially all light of the second wavelength, which is different from the first wavelength. In this embodiment, the monitoring light is emitted by the monitoring light source 42, transmitted through the fourth reflector 44, and incident perpendicularly on the MEMS micromirror array 2. After being reflected by the MEMS micromirror array 2, it is then incident on the imaging unit 43 for imaging. The signal light is emitted from the fiber array unit 1, reflected to the MEMS micromirror array 2, reflected to the first reflecting surface 31, reflected by the second reflecting surface 32, and then returned to the MEMS micromirror array 2. It is then reflected by the MEMS micromirror array 2 to the fourth reflector 44, and finally reflected by the fourth reflector 44 to the fiber array unit 1.

[0046] Furthermore, in one embodiment, another monitoring optical path scheme can be added. The monitoring optical path of the monitoring device 4 includes a dielectric film reflector, a hollow roof prism coated with a dielectric film, a monitoring light source, and an imaging unit. The monitoring light source emits a parallel laser (monitoring light) with a small divergence angle that can cover the entire MEMS micromirror array 2, which reaches the MEMS micromirror array 2 through the dielectric film-coated reflector. The dielectric film on the reflector reflects the signal light completely based on the wavelength difference between the signal light and the monitoring light, but the monitoring light can pass through this dielectric film layer. The hollow roof prism is coated with the same type of dielectric film. After the monitoring light passes through the MEMS micromirror array 2, the actual mirror positions corresponding to the input and output MEMS micromirror array 2 are also on the same plane, and the imaging screen of the imaging unit is placed on this plane.

[0047] The monitoring light source can be composed of a single-mode visible light source and a collimating lens. The imaging unit is configured in the same way as the imaging unit in the aforementioned monitoring optical path.

[0048] Compared to the aforementioned monitoring scheme, this approach has the advantage that the projection position of the imaging position on the optical path is consistent with the input and output MEMS micromirror array 2, allowing for a direct assessment of the deviation from the micromirror position.

[0049] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0050] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0051] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. An optical switching device, characterized in that, It includes: An optical fiber array unit (1) is arranged along the optical path. A MEMS micromirror array (2) is provided on one side of the optical fiber array unit (1), and a reflector (3) is provided on one side of the MEMS micromirror array (2). The reflector (3) and the optical fiber array unit (1) are distributed on opposite sides of the MEMS micromirror array (2). The reflector (3) is provided with a first reflective surface (31) and a second reflective surface (32). The first reflective surface (31) and the second reflective surface (32) are perpendicular to each other. The signal light emitted from the fiber array unit (1) is incident on the MEMS micromirror array (2) and then reflected by the MEMS micromirror array (2) to the first reflective surface (31). The reflected light incident on the first reflective surface (31) is then reflected to the second reflective surface (32) and then reflected back to the MEMS micromirror array (2) in a mirror manner, and then reflected back to the fiber array unit (1) by the MEMS micromirror array (2).

2. The optical switching device as described in claim 1, characterized in that, The reflector (3) is a right-angle prism, which has a first reflecting surface (31) and a second reflecting surface (32); or the reflector (3) is a roof prism or a Dowell prism.

3. The optical switching device as described in claim 1, characterized in that, The reflector (3) includes a first reflector and a second reflector, the first reflector and the second reflector are perpendicular to each other, and the first reflector is provided with a first reflective surface (31) and the second reflector is provided with a second reflective surface (32).

4. The optical switching device as described in claim 1, characterized in that, The MEMS micromirror array (2) has a light emitting part (21) and a light receiving part (22), and the light emitting part (21) and the light receiving part (22) are distributed along the spacing direction between the fiber array unit (1) and the reflector (3).

5. The optical switching device as described in claim 1, characterized in that, The MEMS micromirror array (2) has a light emitting part (21) and a light receiving part (22), and the light emitting part (21) and the light receiving part (22) are distributed along the spacing direction perpendicular to the fiber array unit (1) and the reflector (3).

6. The optical switching device as described in claim 4 or 5, characterized in that, The MEMS micromirror array (2) includes one or more MEMS micromirror array chips. The light emitting part (21) and the light receiving part (22) are located in the same MEMS micromirror array chip, or the light emitting part (21) and the light receiving part (22) are located in adjacent different MEMS micromirror array chips.

7. The optical switching device as described in claim 1, characterized in that, The optical switch device also includes a monitoring device (4), which includes a beam splitter (41), a monitoring light source (42), and an imaging unit (43). The beam splitter (41) is located above the MEMS micromirror array (2), and the monitoring light source (42) is located on one side of the beam splitter (41) for emitting monitoring light to the beam splitter (41). The monitoring light is emitted to the MEMS micromirror array (2) through the beam splitter (41), and the imaging unit (43) is used to receive the monitoring light reflected by the MEMS micromirror array (2).

8. The optical switching device as described in claim 7, characterized in that, The overall optical path length reflected from the MEMS micromirror array (2) to the imaging screen of the imaging unit (43) is equal to the optical path length from the light emitting part (21) to the light receiving part (22) of the MEMS micromirror array (2).

9. The optical switching device as described in claim 7, characterized in that, The monitoring device (4) also includes a third reflector, which is located above the beam splitter (41). The monitoring light emitted by the monitoring light source (42) is reflected by the third reflector to the beam splitter (41).

10. The optical switching device as claimed in claim 1, characterized in that, The optical switch device also includes a monitoring device (4), which includes a fourth reflector (44), a monitoring light source (42), and an imaging unit (43). The fourth reflector (44) is located above the MEMS micromirror array (2), and the monitoring light source (42) is located on one side of the fourth reflector (44) for emitting monitoring light to the fourth reflector (44). The monitoring light is transmitted through the fourth reflector (44) to the MEMS micromirror array (2), and the imaging unit (43) is used to receive the monitoring light reflected by the MEMS micromirror array (2).

Images