Compact quadrature coupler and radio frequency module
By using a transmission line stacked interdigital structure and a multi-conductor three-dimensional design, the problems of bandwidth and miniaturization of orthogonal couplers were solved, achieving an 84% increase in relative operating bandwidth and a reduction in size, thus improving device performance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-30
- Publication Date
- 2026-04-10
AI Technical Summary
Existing orthogonal couplers have relatively narrow operating bandwidths, making it difficult to achieve on-chip integration and miniaturization.
The transmission line is stacked with an interdigitated structure, with three transmission layers and four transmission lines in each layer. Interlayer coupling is achieved through the connectors to form a multi-conductor three-dimensional structure. The inductance and capacitance parameters of the transmission lines are controlled by combining the cross-sectional changes and bridging wiring within the line group.
By overcoming the bandwidth bottleneck, the relative operating bandwidth was expanded to 84% while maintaining an extremely compact layout size, significantly improving device performance.
Smart Images
Figure CN121840153A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of coupler technology, and more particularly to a compact orthogonal coupler and a radio frequency module. Background Technology
[0002] Quadrature couplers combine power distribution and phase control functions and are widely used in high-resolution radar, wireless communication equipment, 5G / 6G measurement instruments, and other fields. A quadrature coupler is a four-port passive microwave device whose core function is to distribute the input signal with equal power to two output ports, with a 90° phase difference between the output signals. Furthermore, the quadrature coupler has an isolation terminal for grounding, ideally with no power output. As a core component of critical modules such as mixers and power amplifiers, the performance of the quadrature coupler directly determines the overall system efficiency.
[0003] In related technologies, orthogonal couplers employ a structure with multiple metal transmission lines on the same layer. This structure typically results in a relative operating bandwidth of only around 60%, and due to the characteristics of same-layer wiring, further reduction in layout size is difficult. On-chip integration and miniaturization design of orthogonal couplers have become critical challenges that urgently need to be addressed. Summary of the Invention
[0004] This application provides a compact orthogonal coupler and a radio frequency module to at least partially solve the above-mentioned technical problems.
[0005] To achieve the above objectives, according to a first aspect of this application, a compact orthogonal coupler is provided, comprising: The transmission structure includes a first transmission layer, a second transmission layer, and a third transmission layer stacked along a first direction, wherein the second transmission layer is located between the first transmission layer and the third transmission layer; the transmission structure also includes a first region, a second region, and a connection region located between the first region and the second region, distributed along a plane perpendicular to the first direction. The first transmission layer includes: a first transmission line and a second transmission line located in the first region, and a third transmission line and a fourth transmission line located in the second region; the first transmission line and the second transmission line are arranged along a second direction, the third transmission line and the fourth transmission line are arranged along the second direction, and the second direction is perpendicular to the first direction; The second transmission layer includes: a fifth transmission line and a sixth transmission line located in the first region, and a seventh transmission line and an eighth transmission line located in the second region; the fifth transmission line and the sixth transmission line are arranged along the second direction, and the seventh transmission line and the eighth transmission line are arranged along the second direction; The third transmission layer includes: a ninth transmission line and a tenth transmission line located in the first region, and an eleventh transmission line and a twelfth transmission line located in the second region; the ninth transmission line and the tenth transmission line are arranged along the second direction, and the eleventh transmission line and the twelfth transmission line are arranged along the second direction; A first connection portion is located in the connection area, the first transmission layer and the second transmission layer are coupled through the first connection portion, and the second transmission layer and the third transmission layer are coupled through the first connection portion; The first transmission line, the fourth transmission line, the sixth transmission line, the seventh transmission line, the ninth transmission line, and the twelfth transmission line constitute a first line group; The second transmission line, the third transmission line, the fifth transmission line, the eighth transmission line, the tenth transmission line, and the eleventh transmission line constitute the second line group; The current direction of the first wire group is opposite to that of the second wire group.
[0006] In some embodiments, the first transmission line is parallel to the fifth transmission line, and the fifth transmission line is parallel to the ninth transmission line; The second transmission line is parallel to the sixth transmission line, and the sixth transmission line is parallel to the tenth transmission line; The third transmission line is parallel to the seventh transmission line, and the seventh transmission line is parallel to the eleventh transmission line; The fourth transmission line is parallel to the eighth transmission line, and the eighth transmission line is parallel to the twelfth transmission line.
[0007] In some embodiments, the first transport layer of the first region is connected to the second transport layer of the second region through the first connection portion; The first transmission layer of the second region is connected to the second transmission layer of the first region through the first connection portion; The second transmission layer of the first region is connected to the third transmission layer of the second region through the first connection portion; The second transmission layer of the second region is connected to the third transmission layer of the first region through the first connection part.
[0008] In some embodiments, the first connection portion includes a connection layer, a plurality of first via interconnect structures, and a plurality of second via interconnect structures; The first end of the first transmission line is coupled to the first end of the seventh transmission line through the first via interconnection structure, and the first end of the second transmission line is coupled to the first end of the eighth transmission line through the first via interconnection structure. The first end of the third transmission line is coupled to the first end of the fifth transmission line through the first via interconnection structure, and the first end of the fourth transmission line is coupled to the first end of the sixth transmission line through the first via interconnection structure. The first end of the fifth transmission line is coupled to the first end of the eleventh transmission line through the second via interconnection structure, and the first end of the sixth transmission line is coupled to the first end of the twelfth transmission line through the second via interconnection structure. The first end of the seventh transmission line is coupled to the first end of the ninth transmission line through the second via interconnection structure, and the first end of the eighth transmission line is coupled to the first end of the tenth transmission line through the second via interconnection structure. The first end of the second transmission line is coupled to the first end of the third transmission line through the connection layer; The third end of the second transmission line is coupled to the third end of the eighth transmission line through the first via interconnect structure.
[0009] In some embodiments, the compact orthogonal coupler further includes a port assembly comprising a first port and a second port located in the first region, and a third port and a fourth port located in the second region; The first line group is coupled between the first port and the third port; The second line group is coupled between the second port and the fourth port.
[0010] In some embodiments, the second end of the first transmission line is coupled to the first port; The second end of the second transmission line is coupled to the second port; The second end of the third transmission line is coupled to the fourth port; The second end of the fourth transmission line is coupled to the third port.
[0011] In some embodiments, the compact orthogonal coupler further includes: a second connection portion located in the first region, the second connection portion including a plurality of third via interconnect structures; The second end of the first transmission line is coupled to the second end of the sixth transmission line through the third via interconnection structure; The second port is coupled to the second end of the fifth transmission line through the third via interconnect structure.
[0012] In some embodiments, the compact orthogonal coupler further includes: a third connection portion located in the second region, the third connection portion including a plurality of fourth via interconnect structures; The second end of the third transmission line is coupled to the second end of the eighth transmission line through the fourth via interconnection structure; The third port is coupled to the second end of the seventh transmission line through the fourth via interconnect structure.
[0013] In some embodiments, the compact orthogonal coupler further includes: a fourth connection portion located in the first region, the fourth connection portion including a plurality of fifth via interconnect structures; The second end of the fifth transmission line is coupled to the second end of the tenth transmission line through the fifth via interconnection structure; The second end of the sixth transmission line is coupled to the second end of the ninth transmission line through the fifth via interconnect structure.
[0014] In some embodiments, the compact orthogonal coupler further includes: a fifth connection portion located in the second region, the fifth connection portion including a plurality of sixth via interconnect structures; The second end of the seventh transmission line is coupled to the second end of the twelfth transmission line through the sixth via interconnection structure; The second end of the eighth transmission line is coupled to the second end of the eleventh transmission line through the sixth via interconnect structure.
[0015] In some embodiments, the compact orthogonal coupler further includes: a sixth connection portion located in the connection region and a fourth transmission layer; the sixth connection portion includes a plurality of seventh via interconnect structures; The first end of the ninth transmission line is coupled to the fourth transmission layer through the seventh via interconnect structure; The first end of the twelfth transmission line is coupled to the fourth transmission layer through the seventh via interconnect structure.
[0016] In some embodiments, the compact orthogonal coupler further includes: a fifth transmission layer having a through slot extending along the first direction; The fourth transport layer is located between the fifth transport layer and the third transport layer.
[0017] In some embodiments, the first region, the connecting region, and the second region are arranged along a third direction; the third direction is perpendicular to the first direction and the second direction, respectively.
[0018] In some embodiments, the port component and the first transport layer are configured on the same layer; The first port and the second port are arranged along the second direction, and the third port and the fourth port are arranged along the second direction.
[0019] According to a second aspect of this application, a radio frequency module is provided, including a compact orthogonal coupler as described in any of the above embodiments.
[0020] According to a third aspect of this application, a method for forming a compact orthogonal coupler as described in any of the preceding claims is also provided, comprising: A transmission structure is formed, the transmission structure including a first transmission layer, a second transmission layer and a third transmission layer stacked along a first direction, the second transmission layer being located between the first transmission layer and the third transmission layer; the transmission structure also includes a first region, a second region distributed along a plane perpendicular to the first direction, and a connection region located between the first region and the second region; A first connection portion is formed, and the first transmission layer and the second transmission layer are coupled through the first connection portion, and the second transmission layer and the third transmission layer are coupled through the first connection portion.
[0021] The present application has the following beneficial effects: Based on the compact orthogonal coupler provided in the embodiments of the present application, a transmission line stacked interdigital structure is adopted, and a total of three transmission layers are set, with four transmission lines in each transmission layer. This shortens the size of the orthogonal coupler along the second direction, and while breaking through the bandwidth bottleneck, it maintains an extremely compact layout size, achieving the dual technical effects of expanding bandwidth and reducing size, so as to meet the needs of modern communication technology development.
[0022] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0023] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.
[0024] Figure 1 This is a schematic diagram of the structure of a compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 2 This is a cross-sectional view of a compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 3 This is a side view of a compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 4 yes Figure 1 An enlarged schematic diagram of part A in the middle; Figure 5 yes Figure 1 An enlarged schematic diagram of section C; Figure 6 yes Figure 1 An enlarged schematic diagram of section E in the middle; Figure 7 This is a schematic diagram of the overall structure of the compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 8 This is a schematic diagram of the structure of the first transport layer provided in an exemplary embodiment of this disclosure; Figure 9 This is a schematic diagram of the second connecting portion, the third connecting portion, and the first via interconnection structure provided in an exemplary embodiment of this disclosure; Figure 10 This is a schematic diagram of the structure of the second transport layer provided in an exemplary embodiment of this disclosure; Figure 11 This is a schematic diagram of the fourth connecting part, the fifth connecting part, and the second via interconnection structure provided in an exemplary embodiment of this disclosure; Figure 12 This is a schematic diagram of the structure of the third transport layer provided in an exemplary embodiment of this disclosure; Figure 13 This is a schematic diagram of the structure of the sixth connecting part provided in an exemplary embodiment of this disclosure; Figure 14 This is a schematic diagram of the structure of the fourth transport layer provided in an exemplary embodiment of this disclosure; Figure 15 This is a schematic diagram of the structure of the fifth transport layer provided in an exemplary embodiment of this disclosure; Figure 16 This is a cross-sectional view of a compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 17 This is a diagram showing the balance results of the compact orthogonal coupler provided in the exemplary embodiments of this disclosure; Figure 18 This is a graph showing the scattering parameters of a compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 19 This is a loss result diagram of the compact orthogonal coupler provided in an exemplary embodiment of this disclosure; Figure 20 This is a schematic flowchart of a method for forming a compact orthogonal coupler provided in an exemplary embodiment of this disclosure.
[0025] Explanation of reference numerals in the attached figures: 1-First transmission layer; 11-First transmission line; 12-Second transmission line; 13-Third transmission line; 14-Fourth transmission line; 2-Second transmission layer; 21-Fifth transmission line; 22-Sixth transmission line; 23-Seventh transmission line; 24-Eighth transmission line; 3-Third transmission layer; 31-Ninth transmission line; 32-Tenth transmission line; 33-Eleventh transmission line; 34-Twelfth transmission line; 4-Fourth transmission layer; 5-Fifth transmission layer; 51-Through slot; 61-First area; 62-Second area; 63-Connection area; 7-First connection part; 71-Connection layer; 72-First via interconnect structure; 73-Second via interconnect structure; 81-First wire group; 82-Second wire group; 91-First end; 92-Second end; 93-Third end; 100-Port assembly; 101-First port; 102-Second port; 103-Third port; 104-Fourth port; 201-Second connection part; 202-Third connection part; 203-Fourth connection part; 204-Fifth connection part; 205-Sixth connection part; Z - First direction; Y - Second direction; X - Third direction; R - Resistance. Detailed Implementation
[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.
[0027] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0028] This application provides a compact orthogonal coupler, which defines a first direction Z, a second direction Y, and a third direction X that are mutually perpendicular to each other. See also... Figure 1 and Figure 3 Compact orthogonal couplers include: The transmission structure includes a first transmission layer 1, a second transmission layer 2, and a third transmission layer 3 stacked along a first direction Z, with the second transmission layer 2 located between the first transmission layer 1 and the third transmission layer 3; the transmission structure also includes a first region 61, a second region 62 distributed along a plane perpendicular to the first direction Z, and a connection region 63 located between the first region 61 and the second region 62. The first transmission layer 1 includes: a first transmission line 11 and a second transmission line 12 located in the first region 61, and a third transmission line 13 and a fourth transmission line 14 located in the second region 62; the first transmission line 11 and the second transmission line 12 are arranged along the second direction Y, the third transmission line 13 and the fourth transmission line 14 are arranged along the second direction Y, and the second direction Y is perpendicular to the first direction Z. The second transmission layer 2 includes: a fifth transmission line 21 and a sixth transmission line 22 located in the first region 61, and a seventh transmission line 23 and an eighth transmission line 24 located in the second region 62; the fifth transmission line 21 and the sixth transmission line 22 are arranged along the second direction Y, and the seventh transmission line 23 and the eighth transmission line 24 are arranged along the second direction Y. The third transmission layer 3 includes: a ninth transmission line 31 and a tenth transmission line 32 located in the first region 61, and an eleventh transmission line 33 and a twelfth transmission line 34 located in the second region 62; the ninth transmission line 31 and the tenth transmission line 32 are arranged along the second direction Y, and the eleventh transmission line 33 and the twelfth transmission line 34 are arranged along the second direction Y. The first connection part 7 is located in the connection area 63. The first transmission layer 1 and the second transmission layer 2 are coupled through the first connection part 7. The second transmission layer 2 and the third transmission layer 3 are coupled through the first connection part 7. The first transmission line 11, the fourth transmission line 14, the sixth transmission line 22, the seventh transmission line 23, the ninth transmission line 31, and the twelfth transmission line 34 constitute the first line group 81; The second transmission line 12, the third transmission line 13, the fifth transmission line 21, the eighth transmission line 24, the tenth transmission line 32, and the eleventh transmission line 33 constitute the second line group 82; The current directions of the first wire group 81 and the second wire group 82 are opposite.
[0029] Specifically, see Figure 2 As shown, Figure 2 The diagram shows a cross-sectional view at the first region 61. The current directions of the first line group 81 and the second line group 82 are opposite. That is to say, in the same transmission layer, the current directions of two adjacent transmission lines are opposite, and the current directions of two transmission lines stacked along the first direction Z are opposite. Figure 2 The "·" and "×" symbols in the text indicate that the current flows out and into the source, respectively.
[0030] In some embodiments, the first line group 81 is also referred to as a "straight-through transmission line group", and the second line group 82 is also referred to as a "coupled transmission line group".
[0031] Through the above embodiments, a stacked interdigitated transmission line structure is adopted, with a total of three transmission layers and four transmission lines in each layer. This shortens the size of the compact orthogonal coupler along the second direction Y, breaking through the bandwidth bottleneck while maintaining an extremely compact layout size (achieving a 50% reduction in the overall size of the transmission layers). This achieves the technical effect of expanding bandwidth and reducing size, meeting the needs of modern communication technology development. Furthermore, by introducing two sets of three-wire multi-conductor three-dimensional structures in each cross-section, and combining the cross-sectional changes and bridging wiring within the line groups, the compact orthogonal coupler achieves precise control over the equivalent inductance, capacitance parameters, and frequency characteristics of the transmission lines. This significantly improves the dispersion characteristics of odd and even modes, expands the effective operating bandwidth of the compact orthogonal coupler to 84%, and significantly improves device performance.
[0032] The compact orthogonal coupler will now be described in detail with reference to the accompanying drawings. For ease of understanding, in the following embodiments, the space containing the first transmission layer 1 is referred to as the upper layer, the space containing the second transmission layer 2 is referred to as the middle layer, and the space containing the third transmission layer 3 is referred to as the lower layer.
[0033] In some embodiments, the left side region of the compact orthogonal coupler is designated as the first region 61, the right side region of the compact orthogonal coupler is designated as the second region 62, and the central region is designated as the connection region 63. A first connection portion 7 is provided in the connection region 63.
[0034] In some embodiments, see Figure 3 As shown, the first transmission layer 1 and the second transmission layer 2 are coupled through the first connection part 7, and the second transmission layer 2 and the third transmission layer 3 are coupled through the first connection part 7.
[0035] In some embodiments, see Figure 8 , Figure 10 , Figure 12As shown, the first transmission line 11 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The second transmission line 12 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The fifth transmission line 21 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The sixth transmission line 22 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The ninth transmission line 31 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The tenth transmission line 32 has a first end 91 (located in connection area 63) and a second end 92 (located in first area 61). The third transmission line 13 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The fourth transmission line 14 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The seventh transmission line 23 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The eighth transmission line 24 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The eleventh transmission line 33 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The twelfth transmission line 34 has a first end 91 (located in connection area 63) and a second end 92 (located in second area 62). The second transmission line 12 also has a third end 93 (located in connection area 63), and the first end 91 and the third end 93 of the second transmission line 12 are located on the same side and coupled. The eighth transmission line 24 also has a third end 93 (located in connection area 63), and the first end 91 and the third end 93 of the eighth transmission line 24 are located on the same side and coupled.
[0036] In some embodiments, see Figure 1 As shown, the first transmission line 11 is parallel to the fifth transmission line 21, and the fifth transmission line 21 is parallel to the ninth transmission line 31; the second transmission line 12 is parallel to the sixth transmission line 22, and the sixth transmission line 22 is parallel to the tenth transmission line 32; the third transmission line 13 is parallel to the seventh transmission line 23, and the seventh transmission line 23 is parallel to the eleventh transmission line 33; the fourth transmission line 14 is parallel to the eighth transmission line 24, and the eighth transmission line 24 is parallel to the twelfth transmission line 34.
[0037] In some embodiments, the projections of the fifth transmission line 21 along the first direction Z and the ninth transmission line 31 along the first direction Z at least partially overlap. The projections of the sixth transmission line 22 along the first direction Z and the tenth transmission line 32 along the first direction Z at least partially overlap. The projections of the seventh transmission line 23 along the first direction Z and the eleventh transmission line 33 along the first direction Z at least partially overlap. The projections of the eighth transmission line 24 along the first direction Z and the twelfth transmission line 34 along the first direction Z at least partially overlap.
[0038] It should be noted that, Figures 15 to 8 The corresponding structures are stacked and arranged along the first direction Z (from bottom to top).
[0039] In some embodiments, see Figure 5 , Figure 8 , Figure 9 and Figure 10 As shown, the first connection portion 7 includes a connection layer 71, a plurality of first via interconnect structures 72, and a plurality of second via interconnect structures 73; the first end 91 of the first transmission line 11 is coupled to the first end 91 of the seventh transmission line 23 through the first via interconnect structure 72, the first end 91 of the second transmission line 12 is coupled to the first end 91 of the eighth transmission line 24 through the first via interconnect structure 72; the first end 91 of the third transmission line 13 is coupled to the first end 91 of the fifth transmission line 21 through the first via interconnect structure 72, the first end 91 of the fourth transmission line 14 is coupled to the first end 91 of the sixth transmission line 22 through the first via interconnect structure 72; the first end 91 of the fifth transmission line 21 ... seventh transmission line 23 through the first via interconnect structure 72, and the first end 91 of the fourth transmission line 14 is coupled to the first end 91 of the sixth transmission line 22 through the first via interconnect structure 72; the first end 91 of the fifth transmission line 21 is coupled to the first end 91 of the seventh transmission line 23 through the first via interconnect structure 72, and the first end 91 of the sixth transmission line 22 through the first via interconnect structure 73, and the first end 91 of the fifth transmission line 23 is coupled to the first end 91 of the seventh transmission line 23 through the first via interconnect structure 72, and the first end 91 of the sixth transmission line 23 is coupled to the first end 91 of the eighth transmission line 24 through the first via interconnect structure 72, and the first end 91 of the fifth transmission line 23 is coupled to the first end 91 of the seventh transmission line 23 through The via interconnect structure 73 is coupled to the first end 91 of the eleventh transmission line 33; the first end 91 of the sixth transmission line 22 is coupled to the first end 91 of the twelfth transmission line 34 through the second via interconnect structure 73; the first end 91 of the seventh transmission line 23 is coupled to the first end 91 of the ninth transmission line 31 through the second via interconnect structure 73; the first end 91 of the eighth transmission line 24 is coupled to the first end 91 of the tenth transmission line 32 through the second via interconnect structure 73; the first end 91 of the second transmission line 12 is coupled to the first end 91 of the third transmission line 13 through the connection layer 71; and the third end 93 of the second transmission line 12 is coupled to the third end 93 of the eighth transmission line 24 through the first via interconnect structure 72.
[0040] The first connection portion 7 forms a "symmetrical center bridging structure" in the connection area 63. The first transmission layer 1 of the first area 61 is connected to the second transmission layer 2 of the second area 62 through the first connection portion 7 (specifically, through the first via interconnect structure 72). The first transmission layer 1 of the second area 62 is connected to the second transmission layer 2 of the first area 61 through the first connection portion 7 (specifically, through the first via interconnect structure 72). The second transmission layer 2 of the first area 61 is connected to the third transmission layer 3 of the second area 62 through the first connection portion 7 (specifically, through the second via interconnect structure 73). The second transmission layer 2 of the second area 62 is connected to the third transmission layer 3 of the first area 61 through the first connection portion 7 (specifically, through the second via interconnect structure 73). The left and right parts of the compact orthogonal coupler are symmetrically structured, and the stacked structure of multiple transmission lines achieves switching through the "symmetrical center bridging structure". Taking the first transmission line 11, the seventh transmission line 23, and the ninth transmission line 31 as examples, the first transmission line 11 is located on the upper layer of the left side (first region 61) and is connected to the seventh transmission line 23 located in the middle layer of the right side (second region 62) through the first via interconnection structure 72. The seventh transmission line 23 is then connected to the ninth transmission line 31 located in the lower layer of the left side (first region 61) through the second via interconnection structure 73. The first transmission line 11, the seventh transmission line 23, and the ninth transmission line 31 all belong to the first line group 81. That is to say, in the same line group, two transmission lines located on opposite sides of the first connection part 7 and connected through the first via interconnection structure 72 (or the second via interconnection structure 73) are located in different transmission layers.
[0041] Table 1 shows the arrangement of transmission lines in the first transmission layer 1, where transmission lines belonging to the first line group 81 and the second line group 82 are arranged alternately. Table 2 shows the arrangement of transmission lines in the second transmission layer 2, where transmission lines belonging to the first line group 81 and the second line group 82 are arranged alternately. Table 3 shows the arrangement of transmission lines in the third transmission layer 3, where transmission lines belonging to the first line group 81 and the second line group 82 are arranged alternately.
[0042] Table 1
[0043] Table 2
[0044] Table 3
[0045] In some embodiments, the first transmission line 11 and the seventh transmission line 23 exhibit physical symmetry along the first connection portion 7. The second transmission line 12 and the eighth transmission line 24 exhibit physical symmetry along the first connection portion 7. The third transmission line 13 and the fifth transmission line 21 exhibit physical symmetry along the first connection portion 7. The fourth transmission line 14 and the sixth transmission line 22 exhibit physical symmetry along the first connection portion 7. The fifth transmission line 21 and the eleventh transmission line 33 exhibit physical symmetry along the first connection portion 7. The sixth transmission line 22 and the twelfth transmission line 34 exhibit physical symmetry along the first connection portion 7. The seventh transmission line 23 and the ninth transmission line 31 exhibit physical symmetry along the first connection portion 7. The eighth transmission line 24 and the tenth transmission line 32 exhibit physical symmetry along the first connection portion 7. Furthermore, the two transmission lines exhibiting physical symmetry are reciprocal in their physical structure.
[0046] In some embodiments, the portion of the second transmission line 12 located in the connection region 63 includes both a first end 91 and a third end 93, and the portion of the eighth transmission line 24 located in the connection region 63 also includes both a first end 91 and a third end 93. This expands the number of ports and can improve the coupling capacitance between the first transmission layer 1 and the second transmission layer 2. In other embodiments, the portion of the second transmission line 12 located in the connection region 63 may include only the first end 91, and the portion of the eighth transmission line 24 located in the connection region 63 may include only the first end 91.
[0047] In some embodiments, see Figure 1 As shown, the compact orthogonal coupler also includes a port assembly 100, which includes: a first port 101 and a second port 102 located in the first region 61, and a third port 103 and a fourth port 104 located in the second region 62; a first wire group 81 is coupled between the first port 101 and the third port 103; and a second wire group 82 is coupled between the second port 102 and the fourth port 104.
[0048] In some embodiments, the first port 101 is also called a combining port, the second port 102 is also called a coupling port, the third port 103 is also called a through port, and the fourth port 104 is also called an isolation port. When the first port 101 is used as an RF input port, the second port 102 and the third port 103 are RF output ports. Conversely, when the first port 101 is used as an RF output port, the second port 102 and the third port 103 are RF input ports. See also... Figure 1 As shown, the fourth port 104 is grounded through a 50-ohm resistor R.
[0049] For example, if the first port 101 is used as an RF input port and receives a 0° input signal, then the third port 103 will output a signal orthogonal to the input signal (-90°), and the second port 102 will output a signal in phase with the input signal, which is also a 0° output signal. In this application, the output signals of the second port 102 and the third port 103 have a 90° phase difference.
[0050] Port 4 (104) ideally has no power output. It is practically used to absorb reflected signals or as a matching load to prevent signal leakage to other ports. Connecting a matching load ensures high isolation between ports.
[0051] In some embodiments, when the compact quadrature coupler is used as a quadrature signal distributor, the first port 101 is an RF input port, the second port 102 is a coupling output port, and the third port 103 is a through output port. When the compact quadrature coupler is used as a quadrature signal combiner, the first port 101 is a combiner output, the second port 102 is a coupling input port, and the third port 103 is a through input port.
[0052] In some embodiments, see Figure 8 As shown, the second end 92 of the first transmission line 11 is coupled to the first port 101; the second end 92 of the second transmission line 12 is coupled to the second port 102; the second end 92 of the third transmission line 13 is coupled to the fourth port 104; and the second end 92 of the fourth transmission line 14 is coupled to the third port 103.
[0053] In some embodiments, see Figure 4 , Figure 8 , Figure 9 , Figure 10 As shown, the compact orthogonal coupler also includes: a second connection portion 201 located in the first region 61, the second connection portion 201 including a plurality of third via interconnect structures; the second end 92 of the first transmission line 11 is coupled to the second end 92 of the sixth transmission line 22 through the third via interconnect structures; the second port 102 is coupled to the second end 92 of the fifth transmission line 21 through the third via interconnect structures.
[0054] In some embodiments, see Figure 8 , Figure 9 , Figure 10 As shown, the compact orthogonal coupler also includes: a third connection portion 202 located in the second region 62, the third connection portion 202 including a plurality of fourth via interconnect structures; the second end 92 of the third transmission line 13 is coupled to the second end 92 of the eighth transmission line 24 through the fourth via interconnect structures; and the third port 103 is coupled to the second end 92 of the seventh transmission line 23 through the fourth via interconnect structures.
[0055] In some embodiments, see Figure 4 , Figure 10 , Figure 11 , Figure 12 As shown, the compact orthogonal coupler also includes: a fourth connection portion 203 located in the first region 61, the fourth connection portion 203 including a plurality of fifth via interconnect structures; the second end 92 of the fifth transmission line 21 is coupled to the second end 92 of the tenth transmission line 32 through the fifth via interconnect structures; the second end 92 of the sixth transmission line 22 is coupled to the second end 92 of the ninth transmission line 31 through the fifth via interconnect structures.
[0056] In some embodiments, see Figure 6 , Figure 10 , Figure 11 , Figure 12 As shown, the compact orthogonal coupler also includes: a fifth connection portion 204 located in the second region 62, the fifth connection portion 204 including a plurality of sixth via interconnect structures; the second end 92 of the seventh transmission line 23 is coupled to the second end 92 of the twelfth transmission line 34 through the sixth via interconnect structures; and the second end 92 of the eighth transmission line 24 is coupled to the second end 92 of the eleventh transmission line 33 through the sixth via interconnect structures.
[0057] In some embodiments, see Figure 3 , Figure 12 , Figure 13 , Figure 14 As shown, the compact orthogonal coupler also includes: a sixth connection portion 205 located in the connection region 63 and a fourth transmission layer 4; the sixth connection portion 205 includes a plurality of seventh via interconnect structures; the first end 91 of the ninth transmission line 31 is coupled to the fourth transmission layer 4 through the seventh via interconnect structures; the first end 91 of the twelfth transmission line 34 is coupled to the fourth transmission layer 4 through the seventh via interconnect structures.
[0058] In some embodiments, see Figure 3 , Figure 7 , Figure 15 As shown, the compact orthogonal coupler further includes: a fifth transmission layer 5, which has a through slot 51 extending along the first direction Z; and a fourth transmission layer 4 located between the fifth transmission layer 5 and the third transmission layer 3. The fifth transmission layer 5 is also referred to as the "reference ground plane". The first transmission layer 1, the second transmission layer 2, the third transmission layer 3, the fourth transmission layer 4, and the fifth transmission layer 5 are stacked along the first direction Z. The through slot 51 extends through the fifth transmission layer 5 along the first direction Z.
[0059] In some embodiments, the coupling capacitance between the first wire group 81 and the fifth transmission layer 5 is referred to as Cg. The coupling capacitance Cg is determined based on the projection of the first wire group 81 along the first direction Z onto the fifth transmission layer 5. The larger the projected area of the first wire group 81 along the first direction Z onto the fifth transmission layer 5, the larger the coupling capacitance Cg. A larger coupling capacitance Cg results in a smaller coupling degree K for the compact orthogonal coupler. Therefore, the coupling degree K can be adjusted by adjusting the area of the through slot 51. The larger the area of the through slot 51, the smaller the projected area of the first wire group 81 along the first direction Z onto the fifth transmission layer 5.
[0060] In some embodiments, if the size of the fourth transmission layer 4 is relatively small, the fourth transmission layer 4 can be suspended inside the through slot 51 (i.e., the fourth transmission layer 4 and the fifth transmission layer 5 are disposed on the same layer). If the size of the fourth transmission layer 4 is relatively large and cannot be suspended inside the through slot 51, the fourth transmission layer 4 is disposed between the fifth transmission layer 5 and the third transmission layer 3.
[0061] In some embodiments, the first region 61, the connecting region 63, and the second region 62 are arranged along a third direction X; the third direction X is perpendicular to the first direction Z and the second direction Y, respectively.
[0062] In some embodiments, see Figure 1 As shown, the port component 100 and the first transmission layer 1 are arranged on the same layer; the first port 101 and the second port 102 are arranged along the second direction Y, and the third port 103 and the fourth port 104 are arranged along the second direction Y.
[0063] In some embodiments, the first via interconnect structure 72, the second connection portion 201, and the third connection portion 202 are located between the first transmission layer 1 and the second transmission layer 2. The second via interconnect structure 73, the fourth connection portion 203, and the fifth connection portion 204 are located between the second transmission layer 2 and the third transmission layer 3. The sixth connection portion 205 is located between the third transmission layer 3 and the fourth transmission layer 4.
[0064] In some embodiments, the first via interconnect structure 72 includes a cuboid conductor. The second via interconnect structure 73 includes a cuboid conductor. The third via interconnect structure includes a cuboid conductor. The fourth via interconnect structure includes a cuboid conductor. The fifth via interconnect structure includes a cuboid conductor. The sixth via interconnect structure includes a cuboid conductor. The seventh via interconnect structure includes a cuboid conductor.
[0065] Through the above embodiments, the compact orthogonal coupler, by introducing two sets of three-wire multi-conductor three-dimensional structures in each cross-section and combining cross-sectional variations and bridging wiring, achieves precise control over the equivalent inductance, capacitance parameters, and frequency characteristics of the transmission line, thereby significantly improving the dispersion characteristics of odd and even modes, with a size-to-wavelength ratio as low as [insert value here]. This extends the effective operating bandwidth of the compact orthogonal coupler, achieving 84% relative bandwidth in the 14.7 GHz to 36.1 GHz band.
[0066] Specifically, on-chip couplers in related technologies typically consist of two parallel conductors. Their self-inductance, self-capacitance, mutual inductance, and mutual capacitance per unit length are largely determined by a few geometric parameters. The propagation characteristics of odd and even modes exhibit a fixed dispersion relationship with frequency, causing the phase difference and power distribution of odd and even modes to deteriorate rapidly when deviating from the center frequency, resulting in bandwidth limitations. In this application, both the first line group 81 (straight-through transmission line group) and the second line group 82 (coupled transmission line group) consist of three transmission lines along the first direction Z in their cross-section, distributed in different layers (upper, middle, or lower) and at different lateral positions, forming a six-conductor coupling system. For example, for the first line group 81, there are three transmission lines in the first region 61 (distributed in the upper, middle, and lower layers respectively), and three transmission lines in the second region 62 (distributed in the upper, middle, and lower layers respectively). For the second wire group 82, there are three transmission lines in the first zone 61 (distributed in the upper, middle, and lower layers respectively), and three transmission lines in the second zone 62 (distributed in the upper, middle, and lower layers respectively). The self-inductance, mutual inductance, and self-capacitance and mutual capacitance to ground of each conductor (i.e., transmission line) jointly determine the inductance and capacitance per unit length of the two sets of equivalent conductors between the ports. By adjusting the distribution, lateral misalignment, spacing, and relative position of the transmission lines (in the same wire group) in the upper, middle, and lower layers, as well as their relative positions to the fifth transmission layer 5, a large adjustable range in amplitude and frequency dependence of the self-inductance, self-capacitance, mutual inductance, and mutual capacitance of the two sets of equivalent conductors can be achieved while maintaining approximate port impedance matching. The two sets of equivalent conductors refer to the first wire group 81 and the second wire group 82.
[0067] Based on this, the embodiments of this application arrange a first transmission layer 1, a second transmission layer 2, and a third transmission layer 3, totaling 12 transmission lines, forming a "three-dimensional coupling structure," and change the relative positions between the transmission lines (in the same line group) through the first connecting part 7. The conductor arrangement and three-dimensional coupling environment at each position jointly determine the equivalent inductance, capacitance distribution, and propagation constants of odd and even modes at that frequency. Through joint optimization of the three-wire layout and bridging method at each position, the coupling strength and modal phase evolution can be reasonably allocated in space, making the effective phase difference between odd and even modes change more smoothly with frequency, rather than deviating rapidly from the target value as in uniform coupling lines in related technologies. In other words, this application, through the structural design of "multi-conductor + three-dimensional coupling," transforms the odd-even mode dispersion relationship, which is difficult to change in existing structures, into an engineering quantity that can be continuously adjusted through geometric parameters. This suppresses the frequency sensitivity of odd-even mode phase difference and power distribution within the target frequency band, enabling more stable operation within a wide target frequency band, thus expanding the target frequency band range and extending the operating bandwidth.
[0068] Therefore, this application achieves the dual goals of reducing layout size and ultra-wideband coupling through a multi-layer stacked layout.
[0069] In some embodiments, the materials of the first transmission layer 1, the second transmission layer 2, the third transmission layer 3, the fourth transmission layer 4, and the fifth transmission layer 5 include metal. The materials of the first connecting portion 7, the second connecting portion 201, the third connecting portion 202, the fourth connecting portion 203, the fifth connecting portion 204, and the sixth connecting portion 205 include metal.
[0070] In some embodiments, the portions of the first transmission line extending towards the third party (X) and the seventh transmission line 23 extending towards the third party (X) are axially symmetrical. The portions of the second transmission line extending towards the third party (X) and the eighth transmission line 24 extending towards the third party (X) are axially symmetrical. The portions of the third transmission line extending towards the third party (X) and the fifth transmission line 21 extending towards the third party (X) are axially symmetrical. The portions of the fourth transmission line extending towards the third party (X) and the sixth transmission line 22 extending towards the third party (X) are axially symmetrical. The portions of the fifth transmission line extending towards the third party (X) and the eleventh transmission line 33 extending towards the third party (X) are axially symmetrical. The portions of the sixth transmission line extending towards the third party (X) and the twelfth transmission line 34 extending towards the third party (X) are axially symmetrical. The portions of the seventh transmission line extending towards the third party (X) and the ninth transmission line 31 extending towards the third party (X) are axially symmetrical. The portions of the eighth transmission line extending towards the third party (X) and the tenth transmission line 32 extending towards the third party (X) are axially symmetrical.
[0071] In some embodiments, see Figure 16As shown, the dimension (linewidth) of the first transmission line 11 along the second direction Y is denoted as W, where W = 3µm. The dimensions of the second transmission line 12, the third transmission line 13, the fourth transmission line 14, the fifth transmission line 21, the sixth transmission line 22, the seventh transmission line 23, the eighth transmission line 24, the ninth transmission line 31, the tenth transmission line 32, the eleventh transmission line 33, and the twelfth transmission line 34 along the second direction Y are all equal to W. The distance between the first transmission line 11 and the second transmission line 12 is denoted as S1, where S1 = 3µm. Similarly, the distance between the third transmission line 13 and the fourth transmission line 14 is 3µm. The distance between the fifth transmission line 21 and the sixth transmission line 22 is denoted as S2, where S2 = 2µm. Similarly, the spacing between the seventh transmission line 23 and the eighth transmission line 24 is equal to 2µm. The spacing between the ninth transmission line 31 and the tenth transmission line 32 is denoted as S3, where S3 = 2µm. Similarly, the spacing between the eleventh transmission line 33 and the twelfth transmission line 34 is equal to 2µm. The projection of the edge of the first transmission line 11 along the first direction Z is the first projection, and the projection of the edge of the fifth transmission line 21 along the first direction Z is the second projection. The distance difference between the first projection and the second projection is S4, where S4 = 1µm. The distance difference S4 is due to limitations imposed by the manufacturing process. In some other embodiments, S4 can be less than 1µm or equal to 0. The projection of the edge of the ninth transmission line 31 along the first direction Z is the third projection, and the distance difference between the third projection and the second projection is equal to 0. The distance from the first projection to the edge of the through-slot 51 is denoted as Sg, where Sg = 8.5µm. The projection of the edge of the second transmission line 12 along the first direction Z is the fourth projection, and the distance from the fourth projection to the edge of the through-slot 51 is also Sg. See also Figure 15 As shown, the dimension of the through slot 51 along the second direction Y is denoted as S5, where S5 = Sg × 2 + W × 2 + S1. The dimensions of each transmission layer along the first direction Z, and the spacing of each transmission layer along the first direction Z, are determined by the selected manufacturing process. Through the above embodiments, the compact orthogonal coupler has a compact physical size. The size of the compact orthogonal coupler in the above embodiments is 30µm (dimension along the second direction Y) × 1000µm (dimension along the third direction X). The size of the compact orthogonal coupler is negatively correlated with the operating frequency band; that is, the larger the size, the lower the operating frequency band; the smaller the size, the higher the operating frequency band. In addition, W and Sg are positively correlated with the coupling degree, while the transmission line spacing (S1, S2, S3) is negatively correlated with the coupling degree. By optimizing these dimensional parameters, the desired operating frequency band and coupling degree can be obtained.
[0072] In some embodiments, Figure 17This indicates the balance of the compact quadrature coupler within its operating frequency band. Balance includes amplitude balance (amplitude difference) and phase balance (phase difference). The black arrow indicates the black curve corresponding to the left coordinate axis, and the red arrow indicates the red curve corresponding to the right coordinate axis. Amplitude difference = Amplitude of port 103 at port 3 - Amplitude of port 102 at port 2; Phase difference = Phase of port 102 at port 2 - Phase of port 103 at port 3 - 90°. Within the 14.7 GHz to 36.1 GHz frequency band (84% relative bandwidth), the amplitude difference is less than ±1 dB, and the phase difference is less than ±10°.
[0073] In some embodiments, Figure 18 This diagram illustrates the scattering parameters (return loss and insertion loss) of a compact orthogonal coupler. S11 represents the return loss of port 101, S22 represents the return loss of port 102, S33 represents the return loss of port 103, S44 represents the return loss of port 104, S21 represents the insertion loss between port 101 and port 102, and S31 represents the insertion loss between port 101 and port 103. Within the operating frequency band of 14.7 GHz to 36.1 GHz, the return losses of all four ports (S11, S22, S33, and S44) are all better than 11 dB.
[0074] In some embodiments, Figure 19 This indicates the loss of the compact quadrature coupler. The compact quadrature coupler has low losses, ranging from 1.4 dB to 1.6 dB in the operating frequency band from 14.7 GHz to 36.1 GHz.
[0075] The compact orthogonal coupler provided in this application embodiment can be applied to the following scenarios: (1) IQ Mixer: Applicable to the intermediate frequency quadrature port of an IQ mixer. An IQ mixer (Inphase / Quadrature Mixer) is a core module in wireless communication systems for spectrum shifting and quadrature modulation / demodulation. By decomposing the signal into in-phase (I) and quadrature (Q) paths, it enables complex modulation or direct frequency conversion architectures. In modern communication systems, the IQ mixer is a key component for signal modulation and demodulation. The compact quadrature coupler provided in this application embodiment can significantly improve its performance and ensure high-quality transmission of communication signals.
[0076] (2) Amplifier: In a balanced amplifier, it is used for input signal generation and output signal synthesis. By precisely controlling the transmission and distribution of signals, it can effectively improve the overall performance and stability of the amplifier. In a Doherty power amplifier, it realizes the generation of input quadrature signals. It can also be widely used in the signal processing stage of various amplifier circuits to meet the application scenarios with different power and bandwidth requirements.
[0077] (3) Phase shifter: This can be applied to phase shifters to achieve 90° phase conversion. In systems such as radar and communication that require phase control, phase shifters play a crucial role. The compact orthogonal coupler provided in this application embodiment can provide stable and accurate phase control for these systems, improving the overall performance and reliability of the system.
[0078] This application provides a radio frequency module including a compact orthogonal coupler as described in any of the above embodiments.
[0079] This application provides a method for forming a compact orthogonal coupler as described in any of the above embodiments, see reference. Figure 20 As shown, it includes: S101: Form a transmission structure, the transmission structure including a first transmission layer 1, a second transmission layer 2 and a third transmission layer 3 stacked along the first direction Z, the second transmission layer 2 being located between the first transmission layer 1 and the third transmission layer 3; the transmission structure also includes a first region 61 and a second region 62 distributed along a plane perpendicular to the first direction Z, and a connection region 63 located between the first region 61 and the second region 62. S102: A first connection portion 7 is formed, and the first transmission layer 1 and the second transmission layer 2 are coupled through the first connection portion 7, and the second transmission layer 2 and the third transmission layer 3 are coupled through the first connection portion 7.
[0080] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.
[0081] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.
[0082] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.
Claims
1. A compact orthogonal coupler, characterized in that, include: The transmission structure includes a first transmission layer (1), a second transmission layer (2), and a third transmission layer (3) stacked along a first direction (Z), wherein the second transmission layer (2) is located between the first transmission layer (1) and the third transmission layer (3); the transmission structure also includes a first region (61), a second region (62), and a connection region (63) located between the first region (61) and the second region (62) distributed along a plane perpendicular to the first direction (Z); The first transmission layer (1) includes: a first transmission line (11) and a second transmission line (12) located in the first region (61), and a third transmission line (13) and a fourth transmission line (14) located in the second region (62); the first transmission line (11) and the second transmission line (12) are arranged along the second direction (Y), the third transmission line (13) and the fourth transmission line (14) are arranged along the second direction (Y), and the second direction (Y) is perpendicular to the first direction (Z); The second transmission layer (2) includes: a fifth transmission line (21) and a sixth transmission line (22) located in the first region (61), and a seventh transmission line (23) and an eighth transmission line (24) located in the second region (62); the fifth transmission line (21) and the sixth transmission line (22) are arranged along the second direction (Y), and the seventh transmission line (23) and the eighth transmission line (24) are arranged along the second direction (Y); The third transmission layer (3) includes: a ninth transmission line (31) and a tenth transmission line (32) located in the first region (61), and an eleventh transmission line (33) and a twelfth transmission line (34) located in the second region (62); the ninth transmission line (31) and the tenth transmission line (32) are arranged along the second direction (Y), and the eleventh transmission line (33) and the twelfth transmission line (34) are arranged along the second direction (Y); The first connection part (7) is located in the connection area (63), the first transmission layer (1) and the second transmission layer (2) are coupled through the first connection part (7), and the second transmission layer (2) and the third transmission layer (3) are coupled through the first connection part (7); The first transmission line (11), the fourth transmission line (14), the sixth transmission line (22), the seventh transmission line (23), the ninth transmission line (31), and the twelfth transmission line (34) constitute the first line group (81); The second transmission line (12), the third transmission line (13), the fifth transmission line (21), the eighth transmission line (24), the tenth transmission line (32), and the eleventh transmission line (33) constitute the second line group (82); The current direction of the first wire group (81) is opposite to that of the second wire group (82).
2. The compact orthogonal coupler according to claim 1, characterized in that, The first transmission line (11) is parallel to the fifth transmission line (21), and the fifth transmission line (21) is parallel to the ninth transmission line (31); The second transmission line (12) is parallel to the sixth transmission line (22), and the sixth transmission line (22) is parallel to the tenth transmission line (32); The third transmission line (13) is parallel to the seventh transmission line (23), and the seventh transmission line (23) is parallel to the eleventh transmission line (33); The fourth transmission line (14) is parallel to the eighth transmission line (24), and the eighth transmission line (24) is parallel to the twelfth transmission line (34).
3. The compact orthogonal coupler according to claim 1, characterized in that, The first transmission layer (1) of the first region (61) is connected to the second transmission layer (2) of the second region (62) through the first connection part (7); The first transmission layer (1) of the second region (62) is connected to the second transmission layer (2) of the first region (61) through the first connection part (7); The second transmission layer (2) of the first region (61) is connected to the third transmission layer (3) of the second region (62) through the first connection part (7); The second transmission layer (2) of the second region (62) is connected to the third transmission layer (3) of the first region (61) through the first connection part (7).
4. The compact orthogonal coupler according to claim 3, characterized in that, The first connection portion (7) includes a connection layer (71), a plurality of first via interconnect structures (72), and a plurality of second via interconnect structures (73); The first end (91) of the first transmission line (11) is coupled to the first end (91) of the seventh transmission line (23) through the first via interconnect structure (72), and the first end (91) of the second transmission line (12) is coupled to the first end (91) of the eighth transmission line (24) through the first via interconnect structure (72). The first end (91) of the third transmission line (13) is coupled to the first end (91) of the fifth transmission line (21) through the first via interconnect structure (72), and the first end (91) of the fourth transmission line (14) is coupled to the first end (91) of the sixth transmission line (22) through the first via interconnect structure (72). The first end (91) of the fifth transmission line (21) is coupled to the first end (91) of the eleventh transmission line (33) through the second via interconnect structure (73), and the first end (91) of the sixth transmission line (22) is coupled to the first end (91) of the twelfth transmission line (34) through the second via interconnect structure (73). The first end (91) of the seventh transmission line (23) is coupled to the first end (91) of the ninth transmission line (31) through the second via interconnect structure (73), and the first end (91) of the eighth transmission line (24) is coupled to the first end (91) of the tenth transmission line (32) through the second via interconnect structure (73). The first end (91) of the second transmission line (12) is coupled to the first end (91) of the third transmission line (13) through the connection layer (71); The third end (93) of the second transmission line (12) is coupled to the third end (93) of the eighth transmission line (24) through the first via interconnect structure (72).
5. The compact orthogonal coupler according to claim 1, characterized in that, Also includes: The port component (100) includes: a first port (101) and a second port (102) located in the first region (61), and a third port (103) and a fourth port (104) located in the second region (62); The first line group (81) is coupled between the first port (101) and the third port (103); The second line group (82) is coupled between the second port (102) and the fourth port (104).
6. The compact orthogonal coupler according to claim 5, characterized in that, The second end (92) of the first transmission line (11) is coupled to the first port (101); The second end (92) of the second transmission line (12) is coupled to the second port (102); The second end (92) of the third transmission line (13) is coupled to the fourth port (104); The second end (92) of the fourth transmission line (14) is coupled to the third port (103).
7. The compact orthogonal coupler according to claim 6, characterized in that, Also includes: The second connection portion (201) located in the first region (61) includes a plurality of third via interconnect structures; The second end (92) of the first transmission line (11) is coupled to the second end (92) of the sixth transmission line (22) through the third via interconnection structure; The second port (102) is coupled to the second end (92) of the fifth transmission line (21) through the third via interconnect structure.
8. The compact orthogonal coupler according to claim 7, characterized in that, Also includes: The third connection portion (202) located in the second region (62) includes a plurality of fourth via interconnect structures; The second end (92) of the third transmission line (13) is coupled to the second end (92) of the eighth transmission line (24) through the fourth via interconnection structure; The third port (103) is coupled to the second end (92) of the seventh transmission line (23) through the fourth via interconnect structure.
9. The compact orthogonal coupler according to claim 8, characterized in that, Also includes: The fourth connection portion (203) located in the first region (61) includes a plurality of fifth via interconnect structures; The second end (92) of the fifth transmission line (21) is coupled to the second end (92) of the tenth transmission line (32) through the fifth via interconnection structure; The second end (92) of the sixth transmission line (22) is coupled to the second end (92) of the ninth transmission line (31) through the fifth via interconnect structure.
10. The compact orthogonal coupler according to claim 9, characterized in that, Also includes: The fifth connection portion (204) located in the second region (62) includes a plurality of sixth via interconnect structures; The second end (92) of the seventh transmission line (23) is coupled to the second end (92) of the twelfth transmission line (34) through the sixth via interconnection structure; The second end (92) of the eighth transmission line (24) is coupled to the second end (92) of the eleventh transmission line (33) through the sixth via interconnect structure.
11. The compact orthogonal coupler according to claim 10, characterized in that, Also includes: The sixth connection portion (205) and the fourth transmission layer (4) are located in the connection area (63); the sixth connection portion (205) includes a plurality of seventh via interconnect structures; The first end (91) of the ninth transmission line (31) is coupled to the fourth transmission layer (4) through the seventh via interconnect structure; The first end (91) of the twelfth transmission line (34) is coupled to the fourth transmission layer (4) through the seventh via interconnect structure.
12. The compact orthogonal coupler according to claim 11, characterized in that, Also includes: The fifth transmission layer (5) has a through slot (51) extending along the first direction (Z); The fourth transmission layer (4) is located between the fifth transmission layer (5) and the third transmission layer (3).
13. The compact orthogonal coupler according to claim 1, characterized in that, The first region (61), the connecting region (63), and the second region (62) are arranged along a third direction (X); the third direction (X) is perpendicular to the first direction (Z) and the second direction (Y), respectively.
14. The compact orthogonal coupler according to claim 5, characterized in that, The port component (100) and the first transport layer (1) are configured on the same layer; The first port (101) and the second port (102) are arranged along the second direction (Y), and the third port (103) and the fourth port (104) are arranged along the second direction (Y).
15. A radio frequency module, characterized in that, Including the compact orthogonal coupler as described in any one of claims 1-14.
16. A method for forming a compact orthogonal coupler as described in any one of claims 1 to 14, characterized in that, include: A transmission structure is formed, the transmission structure including a first transmission layer (1), a second transmission layer (2) and a third transmission layer (3) stacked along a first direction (Z), the second transmission layer (2) being located between the first transmission layer (1) and the third transmission layer (3); the transmission structure also includes a first region (61), a second region (62) distributed along a plane perpendicular to the first direction (Z), and a connection region (63) located between the first region (61) and the second region (62); A first connection portion (7) is formed, and the first transmission layer (1) and the second transmission layer (2) are coupled through the first connection portion (7), and the second transmission layer (2) and the third transmission layer (3) are coupled through the first connection portion (7).