Split type residual gas analyzer device

Abstract

The invention provides a split type residual gas analyzer device, which relates to the technical field of mass spectrometry instruments, and comprises an electronic unit, a probe and a compensation and amplification unit, the electronic unit is connected with the probe through a cable; the electronic unit comprises a main control module and a radio frequency module, and the main control module is configured to adjust the frequency of the radio frequency module to realize resonance; the compensation and amplification unit comprises a feedback signal compensation module used for compensating the voltage drop loss of the radio frequency feedback signal; the compensation and amplification unit further comprises a signal primary amplification module used for amplifying signals output by the probe. Wherein a signal output by the probe is amplified by the signal primary amplification module and then is transmitted to the electronic unit through a cable. The split type residual gas analyzer provided by the invention can be effectively applied to radiation-containing fields such as synchrotron radiation light sources and nuclear industry, effectively ensures that the electronic unit is used in a non-radiation or weak-radiation environment, and prolongs the service life of the whole analyzer.

Description

Technical Field

[0001] This invention relates to the field of mass spectrometry analysis instrument technology, specifically to a split-type residual gas analyzer device. Background Technology

[0002] A residual gas analyzer (RGA) is a gas analysis device widely used in scientific research and industry. It can accurately measure and identify various gas components, providing crucial data support for scientific research and industrial production.

[0003] The working principle of a residual gas analyzer is mainly based on mass spectrometry. Specifically, the instrument uses an ion source to ionize gas molecules into charged ions, and then uses a mass analyzer to separate and detect the ions based on their mass-to-charge ratio (m / z).

[0004] Residual gas analyzers have important applications in multiple fields: Semiconductor manufacturing: used to monitor gas composition during production processes, ensuring the purity of the process environment and improving product quality and production efficiency. Aerospace: detecting gas composition in vacuum environments and extreme conditions to ensure the safe operation of aircraft. Environmental monitoring: monitoring harmful gases in the atmosphere, such as carbon dioxide and methane, to assess air quality and the degree of environmental pollution. Industrial safety: monitoring harmful gases generated during production processes, such as hydrogen sulfide, ammonia, and carbon monoxide, to ensure production safety. Large scientific facilities: performing beam diagnostics on particle accelerators, monitoring the gas composition within the accelerator tube to ensure beam stability and acceleration efficiency; real-time monitoring of the accelerator vacuum system status to promptly detect and address gas contamination, ensuring the long-term stable operation of the accelerator.

[0005] High-intensity radiation environments are generated at sites such as large scientific facilities. Semiconductor electronic devices and circuits are easily damaged in ionizing radiation environments, leading to circuit malfunctions and affecting system performance. High-energy particles (such as neutrons, alpha particles, and heavy ions) can collide with atoms, causing them to shift from their lattice positions, resulting in an increase in the recombination rate of minority carriers, thus affecting transistor performance. Charged particles (such as electrons, protons, and gamma rays) can deposit energy in semiconductors or insulating layers, generating free charge carriers. These carriers can drift or diffuse to different locations and be trapped, leading to charge concentration imbalances and parasitic electric fields, which affect device performance through surface conduction.

[0006] Currently, residual gas analyzers suitable for radiation environments employ a method that separates the electronic unit from the probe. The probe operates in a strong radiation environment, while the electronic unit is located in a weak radiation environment. The two are connected by a cable. The existing technology is as follows: Patent document US10600628B1 discloses a method for transmitting and controlling time-varying voltage signals in harsh environments (such as radiation environments), applicable to devices requiring precise RF signal control, such as quadrupole analyzers. RF resonance is achieved by configuring the electrical length of the transmission line; specifically, the transmission line's electrical length is configured to be approximately a positive integer multiple of half the wavelength of the time-varying voltage signal, enabling remote measurement and control of the RF signal voltage. This method has specific requirements for cable length, i.e., specific requirements for the distance between the probe and the electronic unit. The RF feedback signal is located at analysis subsystem 104, in a normal safe area.

[0007] Patent document JPA1988128545 provides a mass analyzer that controls and analyzes samples using a high-frequency RF signal. The main purpose of the patent is to improve the stability and accuracy of the device, especially under high-frequency and high-voltage conditions. High-precision sample analysis is achieved through a combination of a high-frequency oscillator, a high-frequency amplifier, a high-frequency output unit, and an analysis tube. When the distance between the high-frequency oscillator (1) and the high-frequency amplifier (2) is too long, the RF feedback signal attenuates on the long cable, affecting the accuracy of the RF output.

[0008] In the aforementioned technologies, the RF feedback signal is generated at the probe and then attenuates after long-distance transmission. Resonance is generated by adjusting the cable length, which affects the distance between the probe and the electronic unit in terms of size, making it unsuitable for practical field use. Summary of the Invention

[0009] To address the shortcomings of existing technologies, the purpose of this invention is to provide a split-type residual gas analyzer device.

[0010] According to the present invention, a split-type residual gas analyzer device includes an electronic unit, a probe, and a compensation and amplification unit; The electronic unit is connected to the probe via a cable; The electronic unit includes a main control module and a radio frequency module, wherein the main control module is configured to adjust the frequency of the radio frequency module to achieve resonance. The compensation and amplification unit includes a feedback signal compensation module, which is used to compensate for the voltage drop loss of the radio frequency feedback signal; The compensation and amplification unit also includes a primary signal amplification module for amplifying the signal output by the probe; The signal output by the probe is amplified by the signal amplification module and then transmitted to the electronic unit via the cable.

[0011] Preferably, the probe is placed in a strong radiation environment for performing gas ionization and mass spectrometry analysis; The electronic unit is located in a weak or non-radiation environment; The compensation and amplification unit is physically located close to the probe to perform local compensation and amplification of the radio frequency feedback signal and detection signal from the probe.

[0012] Preferably, the probe includes an ion source, a quadrupole, and a detector; The ion source is used to ionize gas molecules into ions; the quadrupole is connected to the radio frequency module and is used to filter ions according to their mass-to-charge ratio under the action of a radio frequency field; the detector is used to receive the filtered ions and convert them into electrical signals.

[0013] Preferably, the ion source is an open ion source.

[0014] Preferably, the cable includes: A high-voltage DC cable is used to provide high-voltage DC to the electron multiplier of the probe; A DC cable is used to drive the filament and lens of the ion source; Radio frequency drive cable, used to transmit radio frequency signals to drive the quadrupole; Feedback signal cable, used to transmit radio frequency feedback signals; The signal amplification cable is used to transmit the detection signal after it has been amplified by the primary signal amplification module.

[0015] Preferably, the radio frequency drive cable and the feedback signal cable are double-shielded silver-plated coaxial radio frequency cables; The signal amplification cable is a triaxial shielded cable; The high-voltage DC cable is a polytetrafluoroethylene insulated coaxial shielded cable. The DC cable is a double-shielded DB data connection cable.

[0016] Preferably, the primary signal amplification module integrates a temperature control circuit to keep its operating temperature consistent with that of the secondary signal amplification module in the electronic unit, so as to suppress signal drift caused by temperature difference.

[0017] Preferably, the electronic unit further includes a secondary signal amplification module for amplifying and conditioning the detection signal after it has been amplified by the primary signal amplification module and transmitted through a long cable.

[0018] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention adjusts the output frequency of the RF module in real time through the main control module, dynamically making the system work in a resonant state, thereby ensuring the effective transmission of RF power and relaxing the strict restrictions on cable length.

[0019] 2. By setting up a feedback signal compensation module, the present invention compensates for the voltage drop in real time, ensuring the accuracy of the feedback loop, thereby guaranteeing the amplitude accuracy of the radio frequency signal applied to the quadrupole and improving the stability of the instrument.

[0020] 3. This invention incorporates a primary signal amplification module within the compensation and amplification unit, enabling local amplification of the signal before it exits the probe. This amplifies the signal and converts it into a voltage signal with stronger anti-interference capabilities before transmission via cable, effectively preventing signal loss and electromagnetic interference. Attached Figure Description

[0021] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the split-type residual gas analyzer device of the present invention; Figure 2 The test results of the split-type residual gas analyzer device of the present invention on a hard X-ray free electron laser device are shown. Figure 3 The results of simulated irradiation tests are shown for the split-type residual gas analyzer device of this invention.

[0022] Explanation of reference numerals in the attached figures: Detailed Implementation

[0023] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the scope of protection of the present invention.

[0024] Example 1 like Figure 1 As shown, this embodiment provides a split-type residual gas analyzer device. The device includes an electronic unit 1, a cable 2, a probe 3, and a compensation and amplification unit 4.

[0025] Electronic unit 1 is located in a safe area with weak or no radiation. Internally, it includes a power supply module 5, a main control module 6, an RF module 7, and a secondary signal amplification module 8. The main control module 6, serving as the control core, can be implemented using an FPGA or MCU. It adjusts the output frequency of the RF module 7 using DDS (Direct Digital Synthesis) technology. The secondary signal amplification module 8 is used to further amplify and condition the pre-amplified detection signal.

[0026] The probe 3 is positioned in a high-radiation environment (such as near the vacuum chamber of a synchrotron radiation source) to perform in-situ gas analysis and detection. Internally, it includes an ion source 11, a quadrupole 12, and a detector 13. The ion source 11 is an open-type ion source used to ionize the molecules of the gas to be tested. The quadrupole 12 is used to filter ions based on their mass-to-charge ratio under the influence of a radio frequency electric field. The detector 13 receives the filtered ions and converts them into a weak electrical signal; when the partial pressure of the gas being detected is high, the detector 13 operates in Faraday cup mode. The Faraday cup itself does not have signal gain functionality, resulting in a weak detection signal, with an output signal in the fA (femtoampere) range.

[0027] The compensation and amplification unit 4 is physically located close to the probe 3 and is used to localize the processing of critical signals to overcome the adverse effects of long cable transmission. It integrates a feedback signal compensation module 9 and a primary signal amplification module 10. This unit can be installed as a standalone module near the probe 3, or its circuitry can be integrated into the housing of the probe 3.

[0028] Electronic unit 1, compensation and amplification unit 4, and probe 3 are connected via cable 2. Cable 2 is at least 1 meter long and includes: RF drive cable 16: used to transmit the primary RF signal generated by the RF module 7 in the electronic unit 1 to the probe 3 to drive the quadrupole 12 to work.

[0029] Primary feedback signal cable 17 and secondary feedback signal cable 18: used to form an RF feedback loop. The feedback signal is acquired from the RF circuit of probe 3 and transmitted to the compensation and amplification unit 4 through primary feedback signal cable 17.

[0030] High-voltage DC cable 14: used to provide 900V to 3000V high-voltage DC power to the electron multiplier in probe 3 (when the detector is operating in this mode).

[0031] DC cable 15: used to provide a DC drive voltage of 300V to 300V for the filament and lens of the ion source 11, with a maximum transmission current of 5A.

[0032] Primary signal amplification cable 20 and secondary signal amplification cable 19: used to transmit detection signals. The weak signal output by detector 13 is sent to compensation and amplification unit 4 for amplification through the extremely short primary signal amplification cable 20. The amplified signal is then transmitted over a long distance to electronic unit 1 through secondary signal amplification cable 19.

[0033] The key to this embodiment lies in solving the problems caused by long cables through system design: 1. Due to the relatively long length of the RF drive cable 16, its inherent capacitance and inductance effects can alter the resonance conditions. This embodiment abandons the method of precisely controlling the physical length of the cable to match the resonance point. Instead, the main control module 6 adjusts the output frequency of the RF module 7 in real time to dynamically make the system work in a resonant state, thereby ensuring the effective transmission of RF power and relaxing the strict limitations on cable length.

[0034] 2. When the radio frequency feedback signal is transmitted over a long distance (via the primary feedback signal cable 17 and the secondary feedback signal cable 18), a voltage drop will occur, causing a deviation between the feedback signal received by the electronic unit 1 and the actual value at the probe 3. In this embodiment, a feedback signal compensation module 9 is set in the compensation and amplification unit 4 near the signal source to compensate for this voltage drop in real time, ensuring the accuracy of the feedback loop, and thus ensuring the amplitude accuracy of the radio frequency signal applied to the quadrupole 12.

[0035] 3. The weak fA-level current signal output by detector 13 is highly susceptible to attenuation and interference during long cable transmission. This embodiment addresses this by incorporating a primary signal amplification module 10 within the compensation and amplification unit 4. This module amplifies the signal locally before it exits probe 3, converting it into a voltage signal with stronger anti-interference capabilities before transmission via secondary signal amplification cable 19, effectively preventing signal loss and electromagnetic interference. Furthermore, the primary signal amplification module 10 integrates a temperature control circuit, ensuring its operating temperature matches that of the secondary signal amplification module 8 within the electronic unit 1. This suppresses signal drift caused by environmental temperature differences, guaranteeing measurement stability.

[0036] Example 2 This embodiment demonstrates the practical application test of the aforementioned split-type residual gas analyzer device on a hard X-ray free electron laser device. During the test, probe 3 was installed in the beamline vacuum chamber, where the radiation intensity was ≥50 Sv / h. Electronic unit 1 was placed in a radiation-safe area. The RF drive cable 16, which connects the two, is 15 meters long.

[0037] Test results are as follows Figure 2 As shown. Figure 2 In the image, 'a' represents the background vacuum mass spectrum when the device is not illuminated. Figure 2 Figure b shows the mass spectrum after light transmission. Comparing the two figures, it is clear that the signal intensity of the particle with a mass number (m / z) of 44 increases significantly after light transmission. This result proves that, even with a cable connection as long as 15 meters, the device of this invention can still operate stably and sensitively in an extremely strong radiation environment and effectively detect radiation-induced changes in gas composition.

[0038] Example 3 This embodiment demonstrates the radiation resistance of the core electronic components of the device. Irradiation tests were conducted on the simulated circuit boards of electronic unit 1 and compensation and amplification unit 4. The simulated radiation source was a gamma-ray source with an irradiation dose rate of 100 Gy / h, resulting in a total absorbed dose of 10,000 Gy.

[0039] Test results are as follows Figure 3 As shown. Figure 3 In the image, 'a' represents the mass spectrum of the standard sample measured by the analyzer before irradiation. Figure 3 Figure b shows the mass spectrum after irradiation with 10000 Gy. The comparison shows that the peak positions and relative intensities of the mass spectra in the two tests did not change significantly, indicating that the split design of this invention effectively protects the core electronic unit from radiation damage, ensuring the performance stability and lifespan of the instrument under long-term irradiation conditions.

[0040] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0041] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A split-type residual gas analyzer device, characterized in that, It includes an electronic unit (1), a probe (3), and a compensation and amplification unit (4). The electronic unit (1) is connected to the probe (3) via a cable (2); The electronic unit (1) includes a main control module (6) and a radio frequency module (7), wherein the main control module (6) is configured to adjust the frequency of the radio frequency module (7) to achieve resonance; The compensation and amplification unit (4) includes a feedback signal compensation module (9) for compensating for the voltage drop loss of the radio frequency feedback signal; The compensation and amplification unit (4) also includes a signal amplification module (10) for amplifying the signal output by the probe (3); The signal output by the probe (3) is amplified by the signal amplification module (10) and then transmitted to the electronic unit (1) through the cable (2).

2. The split-type residual gas analyzer device according to claim 1, characterized in that, The probe (3) is placed in a strong radiation environment and is used to perform gas ionization and mass spectrometry analysis; The electronic unit (1) is located in a weak radiation or no radiation environment; The compensation and amplification unit (4) is physically close to the probe (3) to perform local compensation and amplification on the radio frequency feedback signal and detection signal from the probe (3).

3. The split-type residual gas analyzer device according to claim 2, characterized in that, The probe (3) includes an ion source (11), a quadrupole (12), and a detector (13). The ion source (11) is used to ionize gas molecules into ions; the quadrupole (12) is connected to the radio frequency module (7) and is used to filter ions according to the mass-to-charge ratio under the action of the radio frequency field; the detector (13) is used to receive the filtered ions and convert them into electrical signals.

4. The split-type residual gas analyzer device according to claim 3, characterized in that, The ion source (11) is an open ion source.

5. The split-type residual gas analyzer device according to claim 3, characterized in that, The cable (2) includes: A high-voltage DC cable (14) is used to provide high-voltage DC to the electron multiplier of the probe (3); A DC cable (15) is used to drive the filament and lens of the ion source (11); Radio frequency drive cable (16) is used to transmit radio frequency signals that drive the quadrupole (12); Feedback signal cable, used to transmit radio frequency feedback signals; The signal amplification cable is used to transmit the detection signal amplified by the signal amplification module (10).

6. The split-type residual gas analyzer device according to claim 5, characterized in that: The radio frequency drive cable (16) and the feedback signal cable are double-shielded silver-plated coaxial radio frequency cables; The signal amplification cable is a triaxial shielded cable; The high-voltage DC cable (14) is a polytetrafluoroethylene insulated coaxial shielded cable; The DC cable (15) is a double-shielded DB25 data connection cable.

7. The split-type residual gas analyzer device according to claim 1, characterized in that, The primary signal amplification module (10) integrates a temperature control circuit to keep its operating temperature consistent with the operating temperature of the secondary signal amplification module (8) in the electronic unit (1) in order to suppress signal drift caused by temperature difference.

8. The split-type residual gas analyzer device according to claim 7, characterized in that, The electronic unit (1) also includes a signal secondary amplification module (8), which is used to amplify and condition the detection signal after it has been amplified by the signal primary amplification module (10) and transmitted through a long cable.

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