Material dislocation detection device, detection system and detection method

Abstract

The invention relates to the field of semiconductor processing equipment, provides semiconductor detection equipment, and particularly relates to a material dislocation detection device, system and method. According to the technical scheme, the material containing position, the material detecting position and the material guiding-out position are sequentially arranged in the first direction of the material conveying space, and the transferring assembly reciprocating in the first direction is arranged in the material conveying space; the transferring assembly drives the target material to be transferred from the material placing position to the material detecting position and the material guiding-out position; an optical module is arranged in the material detection position and is used for acquiring a real-time image about the target material in a visual field range; compared with the prior art, transferring and conveying of the materials can be efficiently controlled, and dislocation detection of the materials in the spatial position is achieved through an image processing means.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment, specifically to a semiconductor testing device, and more specifically, to a material misalignment detection apparatus, a testing system, and a testing method. Background Technology

[0002] A material tray is a tool used to hold IC chips or other electronic components. The tray has multiple slots, and a single component is placed within each slot. Because IC chips and electronic components are relatively small, a large number of them are placed in the entire tray. This can result in multiple components existing in a single slot or components tilting within the slot, leading to material damage in subsequent processes.

[0003] Current detection methods use photoelectric sensors or fiber optic sensors, which are limited in scope and cannot accurately determine the various states of materials in complex scenarios. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a material misalignment detection device, detection system, and detection method, which achieves the detection of various stacked material states in complex detection scenarios by employing image acquisition and setting multiple control logics.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows: In a first aspect, a material misalignment detection device is provided, comprising a material transport space enclosed by two side plates and a bottom plate, wherein a material placement position, a material detection position, and a material exit position are sequentially arranged along a first direction of the material transport space; further comprising a transfer component disposed within the material transport space and reciprocating between the material placement position, the material detection position, and the material exit position; the material placement position is provided with at least one placement platform for placing multiple stacked materials, and the placement platform can drive the multiple materials to move along a second direction based on a first power component; a fork assembly is also provided for providing an external component that can intervene in the gap between the target material and other materials, so that the target material is separated from the contact relationship with other materials; the transfer component drives the target material to be transferred from the material placement position to the material detection position and the material exit position; an optical module is provided within the material detection position for acquiring real-time images of the target material within the field of view; the first direction is the direction of extension of the side plates, and the second direction is perpendicular to the first direction.

[0006] In another possible implementation, the first power component includes a connecting rod with one end connected to the bottom of the placement platform and passing through the material transfer space, and the other end of the connecting rod is connected to a power source, which drives the connecting rod to move along the second direction.

[0007] In another possible implementation, the fork assembly includes at least two fork blocks positioned relative to the placement platform, the at least two fork blocks having a target height difference with the placement platform equal to the thickness of a material.

[0008] In another possible implementation, the fork assembly includes two sets of fork blocks arranged opposite to the placement platform, each set of fork blocks having two fork blocks arranged on the same side, and the four opposite fork blocks forming a quadrilateral to create a fork space.

[0009] In another possible implementation, the fork assembly further includes a second power component connected to each of the forks, the second power component driving the forks selectively into the gap between the target material and other materials.

[0010] In another possible implementation, the power source includes a power motor, which is connected to the connecting rod via a slider.

[0011] In another possible implementation, the transfer assembly includes two sets of transfer components and two sets of transfer power components respectively connected to the two sets of transfer components. The two sets of transfer components are respectively disposed in the transfer space and are driven to move along the first direction by the transfer power components.

[0012] In another feasible embodiment, the two sets of transfer components alternately enter the material placement position and the material detection position in sequence, and alternately return to the standard position of the material outlet position in sequence.

[0013] In another possible implementation, protrusions extend inward from both side plates, the protrusions being horizontally positioned with respect to the surface of the transfer component.

[0014] In another possible implementation, the transfer component includes at least one transfer bearing surface, the surface of the protrusion is horizontally disposed with respect to the surface of the transfer bearing surface, and the transfer component is disposed close to the protrusion, wherein the roughness of the transfer bearing surface is greater than that of the surface of the protrusion.

[0015] In another possible implementation, the transfer component includes a transfer bearing surface and clamping members disposed at both ends of the transfer bearing surface. The surface of the protrusion is horizontally disposed with respect to the surface of the transfer bearing surface, and the transfer component is disposed close to the protrusion. Each clamping member includes a clamping block disposed at the end of the bearing surface. The clamping block is connected to the end of the bearing surface via a connecting shaft. The clamping block is connected to a telescopic rod, and the telescopic rod drives the clamping block to rotate relative to the bearing surface.

[0016] In another possible implementation, the bearing surface has an arc surface at its end, and the clamping block is tangent to the arc surface.

[0017] In another feasible embodiment, the two sets of transfer power components include transfer motors, which are connected to the transfer bearing surface via connectors, and drive the transfer bearing surface to move along a first direction.

[0018] In another possible implementation, the optical module includes an imaging device with an imaging field of view facing the material detection position, and a light source unit that projects an incident light beam onto the material detection position. The light source unit includes a line laser source and a reflector. The line laser source is used to generate a real-time incident light spot on the target material, and the imaging device is used to acquire a real-time image containing the real-time incident light spot and the target material.

[0019] In another possible implementation, the imaging device includes a lens module and an image sensor, with the reflector disposed on the propagation path of the incident light beam; the lens module and the image sensor are disposed on the propagation path of the reflected light beam to acquire the reflected light beam and acquire the real-time image based on the reflected light beam.

[0020] Secondly, a material misalignment detection system is provided, comprising the material misalignment detection device described in any of the above claims, a data processing center connected to the optical module in the material misalignment detection device, and a control center connected to the first power component, the two sets of transfer power components, and the optical module respectively; the control center is used to control the first motion component to move multiple materials along a second direction to a target material height, control the fork assembly to intervene in the gap between the target material and other materials, control the transfer assembly to move from the material outlet position along a first direction to the first target position, move the target material from the target placement position to the material detection position, control the optical module to collect real-time images of the target material at the material placement position, and then continue to move along the first direction to the material outlet position.

[0021] In another feasible approach, controlling the transfer assembly includes alternately controlling two sets of transfer components, specifically including: controlling the first transfer component and / or the second transfer component to move to the first target position, and sequentially controlling the clamping members of the first transfer component and the second transfer component to rotate to form a clamping space, and driving the target material to be transferred from the target placement position to the material detection position.

[0022] In another possible implementation, the control center is also used to control the first transfer component and / or the second transfer component to pass through the material detection station at a constant speed based on a target speed.

[0023] Thirdly, a material misalignment detection method is provided, configured in the data processing center of the aforementioned material misalignment detection system. The method includes: acquiring the real-time position of the incident light spot on a real-time image, comparing whether there is a deviation between the real-time position and a standard position, and determining the misalignment angle based on the deviation.

[0024] The embodiments of the present invention bring the following beneficial effects: The technical solution provided in this application embodiment offers a material misalignment detection device, system, and detection method. It includes a material transport space with a material placement position, a material detection position, and a material exit position sequentially arranged along a first direction. It also includes a transfer component disposed within the material transport space and reciprocating along the first direction. The material placement position has a placement platform capable of holding multiple stacked materials, and a first power component can drive the multiple materials to move along a second direction. A fork assembly is also provided, providing an external component that can intervene in the gap between the target material and other materials, causing the target material to detach from the support relationship with the placement platform. The transfer component moves the target material from the material placement position to the material detection position and the material exit position. The material detection position has an optical module for acquiring a real-time image of the target material within its field of view; acquiring the real-time position of the incident light spot on the real-time image; comparing the real-time position with a standard position to determine the misalignment angle based on the deviation, thereby achieving the detection of material misalignment. Compared with existing technologies, this application can efficiently control the transfer and transportation of materials, and realize the detection of misalignment of materials in spatial position through image processing.

[0025] Other features and advantages of this disclosure will be set forth in the following description, or some features and advantages may be inferred from the description or determined without doubt, or may be learned by practicing the techniques described above.

[0026] To make the above-mentioned objects, features and advantages of this disclosure more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] The system shown in the accompanying drawings will be further described according to exemplary embodiments. These exemplary embodiments will be described in detail with reference to the drawings. These exemplary embodiments are non-limiting exemplary embodiments, wherein example figures represent similar mechanisms in the various views of the drawings.

[0029] Figure 1 A schematic diagram of the tray structure provided in this application.

[0030] Figure 2 This is a schematic diagram of a misalignment detection system provided in this application.

[0031] Figure 3 This is a schematic diagram of the material placement location provided in this application.

[0032] Figure 4 This is a schematic diagram of the first state of the forklift assembly provided in this application.

[0033] Figure 5 This is a schematic diagram of the forklift assembly structure provided in this application.

[0034] Figure 6 This is a three-dimensional view of a transfer component structure provided in this application.

[0035] Figure 7 This is a rear view of a transfer component structure provided in this application.

[0036] Figure 8 This is a schematic diagram of the clamping structure of the transfer component provided in this application.

[0037] Figure 9 A schematic diagram of another transfer component structure provided in this application.

[0038] Figure 10 This is a schematic diagram of the optical path of the optical module provided in this application.

[0039] Figure 11 This is a schematic diagram of the material misalignment detection method provided in this application.

[0040] Illustration: 10 - Material misalignment detection system; 20 - Material tray; 100 - Material misalignment detection device; 200 - Control center; 300 - Data processing center; 210 - Material level; 101-Side plate; 102-Bottom plate; 103-Material transfer space; 104-Material placement position; 105-Material detection position; 106-Material discharge position; 110 - Placement platform; 120 - First power unit; 130 - Forklift assembly; 140 - Optical module; 150 - Transfer assembly; 111-Bearing surface; 112-Connecting surface; 121-Connecting rod; 122-Motor; 123-Slider; 131-Fork block body; 132-Fork platform; 133-Fork space; 134-Second power component; 141-Linear laser light source; 142-Reflector; 143-Lens module; 144-Image sensor; 151-Transfer component; 152-Transfer power component; 153-Transfer bearing surface; 154-Railway; 155-Transfer motor; 156-Gear belt conveyor mechanism; 157-Linear slider; 158-Clamping component; 1581-Connecting shaft; 1582-Clamping block; 1583-Telescopic rod. Detailed Implementation

[0041] To better understand the above technical solutions, the technical solutions of this application will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the embodiments of this application and the specific features in the embodiments are detailed descriptions of the technical solutions of this application, rather than limitations on the technical solutions of this application. In the absence of conflict, the embodiments of this application and the technical features in the embodiments can be combined with each other.

[0042] In the detailed description below, numerous specific details are illustrated with examples to provide a comprehensive understanding of the relevant guidance. However, it will be apparent to those skilled in the art that this application can be practiced without these details. In other instances, well-known methods, procedures, systems, components, and / or circuits have been described at a relatively high level without detail to avoid unnecessarily obscuring aspects of this application.

[0043] This application provides a material misalignment detection system for automated optical defect detection on the surface of industrial products, particularly for automated optical inspection of semiconductor products. In this embodiment, semiconductor products mainly refer to IC products awaiting packaging. When inspecting IC products, multiple IC products are typically placed in a tray, which is then used as the basic support unit within the inspection equipment. For details on the tray, please refer to [link to relevant documentation]. Figure 1As shown, the tray 20 has multiple slots 210, each containing an IC product to be inspected. Automated optical inspection refers to checking for defects on the surface of the IC product. Before inspection, because the incoming material tray is typically handled by manufacturing equipment within the overall semiconductor production line, involving numerous and complex processes and equipment, and because IC products are small in size, stacking or incomplete placement of materials may occur. To address this, it is necessary to determine if the materials are misaligned before inspection and to adjust any misaligned materials using appropriate mechanical devices.

[0044] In existing technologies, infrared photoelectric sensors or fiber optic sensors are typically used to detect the above-mentioned situations. However, sensor detection cannot determine the detailed state of the misalignment. Furthermore, material misalignment is often difficult to detect, usually manifesting as slight edge warping, which is difficult to determine using existing technologies.

[0045] Therefore, to solve this technical problem, the material misalignment detection system provided in this application embodiment can achieve rapid misalignment detection of multiple materials in a tray through image processing and by employing multi-nested control logic and multi-cooperative mechanical actuators, reducing the impact of stacking or placement deviations on subsequent detection. Specifically, see [link to relevant documentation]. Figure 2 This is a schematic diagram of the material misalignment detection system 10 provided in the embodiments of this application.

[0046] The material misalignment detection system includes a material misalignment detection device 100, a data processing center 300, and a control center 200 electrically connected to the material misalignment detection device. Specifically, the material misalignment detection device, i.e., the mechanical actuator, includes two opposing side plates 101 and a base plate 102 connected to the side plates. The space enclosed by the two side plates and the base plate is a material transfer space 103, used for material transfer and for material detection through functional components. This material transfer space includes an input end and an output end. Material is transferred from the input end to the output end, and corresponding material detection functional components are installed within the material transfer space.

[0047] Specifically, a material placement position 104, a material detection position 105, and a material discharge position 106 are sequentially arranged along the first direction of this material transport space. Furthermore, a transfer component 150 that moves back and forth along the first direction is also provided within the material transport space to realize the movement of materials from the material placement position to the material detection position and then to the material discharge position. In this embodiment, the first direction is the material transport direction, i.e., the horizontal direction, during the actual operation of the device.

[0048] Furthermore, the material placement position is used to introduce the materials to be tested by an external mechanism. Here, "material" refers to a tray containing multiple IC products, which is placed at the material placement position by an external process device. In this embodiment, to improve the overall testing speed and the number of tests, the trays placed at the material placement position are multiple stacked trays, which are placed onto the placement platform 110 in the material placement position all at once by the external process device.

[0049] In this embodiment, the placement platform can be driven by the first power component 120 to move multiple trays along the second direction. Furthermore, the second direction is spatially perpendicular to the first direction, which can be understood as a vertical direction during actual operation. Additionally, a forklift assembly 130 is provided in the material placement position to provide an external component that can intervene in the gap between the target material and other materials, supporting the materials other than the target material and detaching the target material from contact with other materials.

[0050] For target materials that have been separated from contact, which are the materials to be tested in a single testing task, they are transported to the material detection position by the material placement displacement via the transfer component, and then transported to the material exit position by the material detection displacement.

[0051] Among them, the material detection position is equipped with an optical module 140, which is used to acquire real-time images of the material within the field of view.

[0052] In this embodiment, the data processing center receives real-time images acquired by the optical module, processes these images to determine if misalignment or stacking occurs in the current material, and determines the placement position of the material in the tray where the anomaly occurred. The control center is electrically connected to the first power unit, the transfer assembly, and the forklift assembly, and is used to move the material along the second and first directions to the corresponding process positions. Specifically, the first power unit is controlled to move the material to the corresponding material placement position, the forklift assembly is controlled to move the target material away from the material placement position, and the transfer assembly is controlled to move to the material detection position and the material exit position.

[0053] Please see Figure 3 Regarding the specific structure of the material placement position, it can be seen that the placement platform 110 is set in the transmission space, including a bearing surface 111 and a connecting surface 112. The bearing surface is used to place the material to be tested, and the connecting surface is connected to the first power component. The placement platform moves accordingly by the movement of the first power component in the second direction.

[0054] The first power component 120 includes a connecting rod 121 connected to the placement platform and a first power source connected to the connecting rod. Specifically, the connecting rod passes through the base plate and extends into the material transfer space to connect with the placement platform. The first power source is located outside the material transfer space and includes a motor 122 and a slider 123 connected to the motor. The connecting rod is connected to the slider via a connecting plate and moves along a second direction under the drive of the slider.

[0055] In this embodiment, the placement platform can move to any position within the permitted travel distance via the aforementioned mechanism. The purpose of this platform's movement is to accommodate stacked materials of varying heights. Specifically, the stacked materials are first transferred as a whole to the placement platform via an external process device, and then each material is transferred to a material detection position and a material exit position via a transfer component. In this embodiment, the transfer of materials from the placement platform is performed via a handover to the transfer component, and the object being transferred is the bottom tray of the stacked materials. Therefore, in order for the transfer component to transfer it independently, the connection between the target material and the other materials needs to be severed.

[0056] In this embodiment, the connection relationship between the target material and other materials is implemented using a forklift assembly. (See also...) Figure 4 and Figure 5 In this embodiment, the fork assembly 130 includes at least two fork blocks 131 disposed opposite to the placement platform and a movable fork platform 132 disposed within the fork blocks. There is a target height difference between the two fork platforms and the placement platform, and the fork assembly is disposed above the placement platform.

[0057] Furthermore, in this embodiment, the target height difference is the minimum height difference between the placement platform and the fork assembly when the platform moves to its highest position along the second direction, which is equal to the thickness of one material. This is because the purpose of the fork assembly is to separate the target material from other materials among the multiple stacked materials on the placement platform. The target material refers to the bottommost material in a single detection process. That is, in one detection task, the bottommost material is first separated from the remaining upper layers of material, and the bottommost material is then transported to the material detection position and the material exit position by the transfer assembly. To this end, the placement platform moves the multiple stacked materials along the second direction to a position with the target height difference, and then inserts the fork blocks into the gap between the target material and the remaining materials, lifting the materials other than the target material. This achieves the separation of the target material from the remaining materials and ensures that the target material remains on the placement platform, awaiting reception by the transfer assembly.

[0058] Preferably, in this embodiment, the fork assembly is connected to the second power component 134. The second power component is used to drive the fork blocks into or away from the material transport space, further controlling the contact between the fork blocks and the stacked materials. This can be understood as follows: when the fork is not in operation, it is in a retracted state and does not enter the material transport space. When it is necessary to separate the target material, it extends into the material transport space and inserts into the gap between the target material and other materials, thereby supporting multiple materials other than the target material.

[0059] Preferably, to enable the forklift assembly to more stably support the stacked materials, in this embodiment, the forklift assembly is preferably configured as two sets of fork blocks placed opposite each other on the platform. Each fork block set contains two fork block bodies on the same side, resulting in a total of four fork block bodies forming a quadrilateral structure, which constitutes the forklift space 133. Each fork platform is connected to a corresponding second power unit, and the second power unit is connected to the control center for synchronized movement.

[0060] Furthermore, in this embodiment, the second power component 134 can be a cylinder, motor, or other power component, and its output end is connected to the fork block to realize the telescopic movement of the fork block.

[0061] In summary, the control center in this embodiment is connected to both the first power unit and the second power unit. First, the first power unit moves the placement platform along the second direction to the target material height, where the target material height refers to the position where the upper surface of the fork block body is level with the lower surface of the second-to-last material; this position is a pre-set fixed position. When the platform reaches the material placement position, the second power unit moves the fork block into the gaps between the multiple materials, supporting all materials except the bottommost target material, leaving only the target material on the placement platform.

[0062] In this embodiment, the target material is the tray to be detected, which needs to be moved from the material placement position to the material detection position. This process is implemented using a transfer component in this embodiment.

[0063] Furthermore, the transfer component is used to move the target material from the material placement position to the material detection position, and then from the material detection position to the material exit position, thus completing the overall detection of the stacked material. Therefore, the initial position of the transfer component can be any node in the material transport space, but for the sake of simplicity in the overall structural configuration, the transfer component is generally set at the material exit position in the material transport space, and its movement to the target position is controlled by the control center.

[0064] Specifically, after the forklift assembly separates the target material from multiple other materials, leaving only the target material on the placement platform, the control center controls the transfer assembly to move to the material placement location to receive the target material. The forklift assembly's forking and the transfer assembly's movement to the material placement location can be performed simultaneously or in stages. This can be understood as follows: while the forklift assembly is forking, the control center controls the transfer assembly to move to the material placement location—this process is simultaneous; or, after the forklift assembly completes forking, the control center controls the transfer assembly to move to the material placement location—this process is distributed. In this embodiment, to improve efficiency, a simultaneous approach is adopted.

[0065] In this embodiment, the transfer component is positioned within the transmission space and moves within that space. This can be understood as the transfer component not exceeding the height of the upper surface of the side plate. It is worth noting that since the forks in the forklift assembly are positioned above the side plate, when the placement platform moves to the target material height, its surface is higher than the transfer component. Therefore, when the transfer component transfers materials, it is necessary to control the placement platform to descend along the second direction to a height level with the surface of the transfer component; this height is called the transfer height.

[0066] Among them, see Figure 6 The transfer assembly 150 includes at least one set of transfer components 151 and a transfer power component 152 connected to the transfer components. Specifically, the transfer component includes at least one transfer bearing surface 153 for supporting the target material and moving under the drive of the transfer power component. The transfer power component includes a transfer motor 155, which is connected to the transfer component via a connector and drives the transfer component to move along a first direction within the material transfer space. For details, see [link to relevant documentation]. Figure 7 This is another schematic diagram of the transfer component. As can be seen from this diagram, the connecting part corresponding to the transfer motor 155 in this embodiment is a linear slider 157, which is connected to the transfer motor through a gear belt mechanism 156. It moves linearly under the rotation of the transfer motor and drives the transfer component to move linearly.

[0067] For further information, please refer to [link / reference]. Figure 6To save system space and reduce integration costs, in this embodiment, the transfer component is positioned on one side instead of centrally located as in the prior art. Specifically, the transfer component is positioned near the inner side of the side plate, and both side plates have protrusions extending into the material transfer space. These two opposing protrusions form the track 154 corresponding to the target material, providing overall support for the target material. Furthermore, the surfaces of the protrusions are horizontally aligned with the transfer bearing surface, and the transfer component is positioned close to the protrusions. The roughness of the transfer bearing surface is greater than that of the protrusion surface, allowing the target material to move along the track constructed by the protrusions, driven by the transfer component.

[0068] For further details, please refer to [link / reference]. Figure 8 To improve the stability of the target material placed on the transfer component, a clamping member 158 is also provided on the transfer component in this embodiment. The clamping member includes a connecting shaft 1581 disposed inside both ends of the transfer bearing surface, and a clamping block 1582 sleeved on the connecting shaft. An arc surface is formed at the end of the transfer bearing surface, and the clamping block is tangent to the arc surface, allowing the clamping block to rotate around the connecting shaft by external force. The rotational stroke of the clamping block includes two target positions: the first target position is a plane at the same horizontal level as the transfer bearing surface, and the second target position is perpendicular to the transfer bearing surface. The two clamping blocks respectively disposed at both ends form a clamping space, allowing the target material placed on the transfer bearing surface to contact and limit the movement of the target material.

[0069] The external force for rotating the clamping block is provided by the telescopic rod 1583. Furthermore, one end of the telescopic rod is connected to the clamping block, and the rotation of the clamping block is achieved through the extension and retraction of the telescopic rod. Furthermore, the extension and retraction of the telescopic rod can be achieved by a cylinder, which will not be elaborated further in this embodiment.

[0070] See Figure 9 In a preferred embodiment, to improve transfer efficiency, the transfer assembly is equipped with two transfer components 151, respectively located on the inner sides of two side plates. The two transfer components alternately enter the material placement position and the material detection position, and then alternately return to the standard position of the material outlet position.

[0071] Specifically, the first transfer component moves from the standard position of the material outlet to the material placement position from the control center, while the second transfer component moves out from the standard position of the material outlet from the control center. When the first transfer component moves the first target material at the material placement position to the material detection position, the second transfer component moves to the material placement position to carry the second target material. When the first transfer component moves the first target material to the material outlet position, the second transfer component moves the second target material to the material detection position, thereby realizing the alternating material transfer and material detection between the first and second transfer components, improving the overall operating efficiency.

[0072] Furthermore, for the target material that moves to the material detection position, the control center controls the optical module to acquire images of the target material and transmits the acquired real-time images to the data processing center, which processes the real-time images to determine whether the target material has a stacking defect.

[0073] Please see Figure 10 The optical module in this embodiment includes an imaging device with its field of view facing the material detection position, and a light source unit that transmits an incident light beam to the material detection position. The imaging device includes a lens module 143 and an image sensor 144, and the light source unit includes a line laser light source 141 and a reflector 142.

[0074] Furthermore, a line laser source is used to generate a line laser beam and form an incident beam; a reflector is positioned in the propagation path of the incident beam of the line laser source to project the line laser source onto the target material to be detected at a specific incident angle, and to generate a reflected beam through the target material. The lens module and image sensor are positioned in the propagation path of the reflected beam to acquire the reflected beam and perform imaging based on the reflected beam.

[0075] The imaging result, i.e., the real-time image, includes the target material and the incident spot formed by the line laser spot on the target material. This incident spot is the feature point used for subsequent material misalignment detection.

[0076] In this embodiment, the field of view of the imaging device is the width of a row of materials in the tray, and the real-time image in a single imaging result is the material of a row in the tray. Therefore, in order to ensure that the imaging corresponds to the layout of the tray, the control center controls the transfer component to pass through the material detection position at a uniform speed at a target speed. The target speed corresponds to the imaging interval of the imaging device, but it is not specifically limited in this embodiment. The speed only needs to be sufficient to acquire images of each row.

[0077] The real-time images acquired by the optical module are transmitted to the data processing center, where material misalignment is detected according to time limits using a detection method configured there. For details, please refer to... Figure 11 The processing steps of the material misalignment detection method corresponding to this embodiment include the following steps: Step S111. Obtain the real-time position of the incident light spot on the real-time image, and compare whether there is a deviation between the real-time position and the standard position.

[0078] In this embodiment, because the field of view of the imaging device is fixed, the movement of the target material at the material detection position is uniform, and the spatial position of the light source unit is fixed, the position of the incident light spot on each row of materials in the target material should be fixed. Based on this, this embodiment uses the change in the position of the incident light spot on the image in real time as a characteristic to determine whether the current target material is misaligned. It can be understood that if the target material is misaligned, the corresponding incident light spot will change position due to the misaligned material.

[0079] Specifically, in this embodiment, a template image with unchanged position is first constructed, where each particle is placed in a standard position in the tray. Based on this standard position and under the same line laser projection conditions, a template image is obtained to indicate the standard position of the incident light spot. Then, this template image is compared with the relative position of the incident light spot in the real-time image to determine whether there is a deviation and the degree of deviation. When the deviation is greater than a threshold, it indicates that the current material has an abnormal misalignment.

[0080] The location of the incident light spot can be determined using existing pixel processing methods, and will not be elaborated upon in this embodiment.

[0081] Step S112. When there is a deviation, determine the incident angle of the real-time incident light spot based on the deviation, and determine the angle difference between the incident angle and the standard incident angle.

[0082] In this embodiment, the incident angle of the real-time incident light spot refers to the angle between the incident light spot and the normal. This can be understood as the change in the angle of the target material relative to the plane when the target material is misaligned, which in turn causes a change in the incident angle of the incident light spot. Since the angular deviation caused by the misalignment of the target material is difficult to determine in an image, this embodiment indirectly characterizes the change in the angle of the target material by determining the angular deviation of the incident angle of the incident light spot, thereby characterizing the degree of misalignment of the target material.

[0083] In this embodiment, the determination of this angle can be handled by the smallest_rectangle2 function corresponding to the halcon operator, and will not be elaborated further in this embodiment.

[0084] In summary, this application provides a material misalignment detection index, detection system, and detection method. A material placement position, a material detection position, and a material exit position are sequentially arranged along a first direction of the material transport space. A transfer component that reciprocates along the first direction is provided within the material transport space. The transfer component transports the target material from the material placement position to the material detection position and the material exit position. An optical module is provided within the material detection position to acquire real-time images of the target material within its field of view. Compared to existing technologies, this application can efficiently control the transfer and transport of materials and detect spatial misalignment of materials through image processing.

[0085] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0086] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A material misalignment detection device, characterized in that, It includes a material transport space enclosed by two side plates and a bottom plate, and a material placement position, a material detection position and a material discharge position are arranged sequentially along a first direction of the material transport space; it also includes a transfer component disposed within the material transport space and reciprocating between the material placement position, the material detection position and the material discharge position; The material placement area is provided with at least one placement platform, which is used to place multiple stacked materials and can drive the multiple materials to move in a second direction based on a first power component; a fork assembly is also provided to provide an external component that can intervene in the gap between the target material and other materials, so that the target material is separated from the contact relationship with other materials. The transfer component moves the target material from the material placement position to the material detection position and the material exit position; An optical module is provided in the material detection position to acquire real-time images of the target material within the field of view; the first direction is the direction in which the side plate extends, and the second direction is perpendicular to the first direction.

2. The material misalignment detection device according to claim 1, characterized in that, The first power component includes a connecting rod with one end connected to the bottom of the placement platform and passing through the material transfer space, and a power source connected to the other end of the connecting rod, which drives the connecting rod to move along the second direction.

3. The material misalignment detection device according to claim 1, characterized in that, The fork assembly includes at least two fork blocks positioned relative to the placement platform, and the at least two fork blocks have a target height difference with the placement platform, the target height difference being the thickness of a material.

4. The material misalignment detection device according to claim 3, characterized in that, The fork assembly includes two sets of fork blocks arranged opposite to the placement platform. Each fork block set has two fork blocks arranged on the same side, and the four opposite fork blocks form a quadrilateral to form a fork space.

5. The material misalignment detection device according to claim 3 or 4, characterized in that, The fork assembly also includes a second power component connected to each of the forks, the second power component driving the forks to selectively penetrate into the gap between the target material and other materials.

6. The material misalignment detection device according to claim 2, characterized in that, The power source includes a power motor, which is connected to the connecting rod via a slider.

7. The material misalignment detection device according to claim 1, characterized in that, The transfer assembly includes two sets of transfer components and two sets of transfer power components respectively connected to the two sets of transfer components. The two sets of transfer components are respectively arranged in the transmission space and are driven to move along the first direction by the transfer power components.

8. The material misalignment detection device according to claim 7 is characterized in that the two sets of transfer components alternately enter the material placement position and the material detection position in sequence, and alternately return to the standard position of the material outlet position in sequence.

9. The material misalignment detection device according to claim 8, characterized in that, The two side plates have protrusions extending into the transmission space, and the protrusions are horizontally arranged with the surface of the transfer component.

10. The material misalignment detection device according to claim 9, characterized in that, The transfer component includes at least one transfer bearing surface, the surface of the protrusion is horizontally arranged with the surface of the transfer bearing surface, and the transfer component is arranged close to the protrusion. The roughness of the transfer bearing surface is greater than that of the surface of the protrusion.

11. The material misalignment detection device according to claim 9, characterized in that, The transfer component includes a transfer bearing surface and clamping members disposed at both ends of the transfer bearing surface. The surface of the protrusion is horizontally disposed with respect to the surface of the transfer bearing surface, and the transfer component is disposed close to the protrusion. Each clamping member includes a clamping block disposed at the end of the bearing surface. The clamping block is connected to the end of the bearing surface via a connecting shaft. The clamping block is connected to a telescopic rod, and the telescopic rod drives the clamping block to rotate relative to the bearing surface.

12. The material misalignment detection device according to claim 11, characterized in that, The bearing surface has an arc surface at its end, and the clamping block is tangent to the arc surface.

13. The material misalignment detection device according to claim 10 or 11, characterized in that, The two sets of transfer power components include transfer motors, which are connected to the transfer bearing surface through connectors, and drive the transfer bearing surface to move along the first direction.

14. The material misalignment detection device according to claim 1, characterized in that, The optical module includes an imaging device with an imaging field of view facing the material detection position, and a light source unit that projects an incident light beam onto the material detection position. The light source unit includes a line laser source and a reflector. The line laser source is used to generate a real-time incident light spot on the target material, and the imaging device is used to acquire a real-time image containing the real-time incident light spot and the target material.

15. The material misalignment detection device according to claim 14, characterized in that, The imaging device includes a lens module and an image sensor. The reflector is disposed on the propagation path of the incident light beam. The lens module and the image sensor are disposed on the propagation path of the reflected light beam to acquire the reflected light beam and acquire the real-time image based on the reflected light beam.

16. A material misalignment detection system, characterized in that, The device includes the material misalignment detection device according to any one of claims 1-15, and further includes a data processing center connected to the optical module in the material misalignment detection device, and a control center connected to the first power component, the two sets of transfer power components and the optical module respectively; the control center is used to control the first motion component to move multiple materials along a second direction to the target material height, control the fork assembly to intervene in the gap between the target material and other materials, control the transfer assembly to move from the material outlet position along a first direction to the first target position, drive the target material from the target placement position to the material detection position, control the optical module to collect real-time images of the target material on the material placement position, and then continue to move along the first direction to the material outlet position.

17. The material misalignment detection system according to claim 16, characterized in that, Controlling the transfer assembly includes alternately controlling two sets of transfer components, specifically including: controlling the first transfer component and / or the second transfer component to move to the first target position, and sequentially controlling the clamping members of the first transfer component and the second transfer component to rotate to form a clamping space, and driving the target material to be transferred from the target placement position to the material detection position.

18. The material misalignment detection system according to claim 16, characterized in that, The control center is also used to control the first transfer component and / or the second transfer component to pass through the material detection station at a constant speed based on the target speed.

19. A method for detecting material misalignment, characterized in that, In the data processing center of the material misalignment detection system according to any one of claims 16-18, the method includes: acquiring the real-time position of the real-time incident light spot on the real-time image, comparing whether there is a deviation between the real-time position and the standard position, and determining the misalignment angle based on the deviation.

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