Special gas monitoring equipment and monitoring method thereof

Abstract

The invention belongs to the technical field of monitoring equipment, and particularly relates to special gas monitoring equipment and a monitoring method thereof.The special gas monitoring equipment comprises a special gas monitoring pipe, an annular mounting plate is fixedly connected to the interior of the special gas monitoring pipe, a movable groove is formed in the center of the annular mounting plate, and a fine adjustment filter screen plate is movably connected to the interior of the movable groove; a plurality of filter holes are formed in the fine-tuning filter screen plate; and the multidirectional impact mechanism is used for enabling the special gas to pass through from different directions and impact the filter holes in the fine-tuning filter screen plate when the special gas passes through the special gas monitoring pipe. Through double dynamic anti-blocking design of'airflow impact and mechanical driving ', the filter screen blocking problem is fundamentally improved: lateral impact is formed when the filter screen passes through a vent groove of an annular mounting plate, and is matched with periodic bidirectional rotation (1-3 degrees) of a fine-tuning filter screen plate, so that impurities can be shaken off from the two sides of a filter hole, the impurities are prevented from being accumulated on one side, and the service life of the filter screen is prolonged. The dismounting and cleaning frequency of the filter screen is greatly reduced.

Description

Technical Field

[0001] This invention belongs to the field of monitoring equipment technology, and in particular relates to a special gas monitoring device and its monitoring method. Background Technology

[0002] Specialty gases are widely used in semiconductor manufacturing, photovoltaic industry, chemical synthesis, and other fields. These gases are often corrosive, toxic, or flammable and explosive, and often contain solid impurities such as dust and particles. If specialty gases are directly transported or discharged without effective treatment, it can not only lead to equipment failure (such as blockage of precision valves or sensor malfunction), but also cause safety accidents such as personnel poisoning and environmental pollution. Therefore, real-time monitoring and purification of specialty gases is a critical aspect of industrial production.

[0003] Current mainstream special gas monitoring and treatment equipment has the following technical defects: Filters are prone to clogging, resulting in high maintenance costs: Existing equipment mostly uses filters with fixed pore sizes to filter solid impurities. Particles in the special gases easily accumulate on the surface of the filter pores, leading to clogging. Clogging requires shutdown and disassembly for cleaning, which not only interrupts the production process but also increases the risk of workers being exposed to harmful gases. Frequent disassembly also causes filter wear and tear, increasing maintenance costs.

[0004] Poor continuity of hazardous gas treatment: Most equipment is only equipped with a single hazardous gas treatment unit (such as a single absorption box). When the absorbent in the box reaches saturation, the machine needs to be stopped to replace the absorbent, resulting in interruption of special gas treatment and failing to meet the real-time treatment needs in continuous production scenarios. Although some equipment is equipped with dual treatment units, the switching process requires manual operation, which results in a delayed response and is prone to hazardous gas leakage.

[0005] Insufficient linkage between monitoring and early warning: Existing equipment's functions such as detecting harmful gas concentrations, determining absorbent saturation, and fault alarms mostly operate independently, lacking centralized control and linkage mechanisms. For example, when the absorbent is saturated, it cannot automatically switch processing units, or when the equipment experiences transmission jamming or sensor failure, it cannot promptly trigger alarms and indicate the fault type, easily delaying fault handling.

[0006] To address the shortcomings of the existing technologies, this invention proposes a special gas monitoring device and its monitoring method. Through the design of "dynamic anti-clogging filtration + dual-box automatic switching processing + full-link linkage monitoring", it solves problems such as filter clogging, processing interruption, and monitoring lag, thereby improving the continuity, reliability, and safety of special gas monitoring and processing. Summary of the Invention

[0007] The purpose of this invention is to address the problems mentioned in the background art by providing a special gas monitoring device and its monitoring method that fundamentally improves the problem of filter clogging through a dual dynamic anti-clogging design of "airflow impact + mechanical drive".

[0008] To achieve the above objectives, the present invention adopts the following technical solutions: A special gas monitoring device, comprising: A special gas monitoring tube, wherein an annular mounting plate is fixedly connected inside the special gas monitoring tube, and a movable groove is provided at the center of the annular mounting plate. A fine-tuning filter screen plate is movably connected in the movable groove, and multiple filter holes are provided on the fine-tuning filter screen plate. A multi-directional impact mechanism is used to allow special gases to pass through and impact the filter holes on the fine-tuning filter plate from different directions when they pass through the special gas monitoring tube. The multi-directional impact mechanism includes a rotating shaft fixedly connected to the outer walls on both sides of the fine-tuning filter plate. The rotating shaft extends into the annular mounting plate and is fixedly connected to a rotating roller. The annular mounting plate has two ventilation slots, which are located on one side of the two rotating rollers, and the rotating rollers extend into the ventilation slots. The drive mechanism is used to periodically rotate the fine-tuning filter plate in opposite directions when a special gas passes through.

[0009] Preferably, when the special gas passes through one of the ventilation slots, it drives the fine-tuning filter plate to rotate slightly to one side, and when the special gas passes through the other ventilation slot, it drives the fine-tuning filter plate to rotate slightly to the other side.

[0010] Preferably, the driving mechanism includes two support plates fixedly connected to the lower end of the special gas monitoring tube, a rotating rod rotatably connected between the two support plates, an incomplete gear fixedly connected to the rotating rod, a U-shaped rod slidably connected to the lower side of the special gas monitoring tube in the vertical direction, a toothed plate integrally fixedly connected to the center of the U-shaped rod, the toothed plate and the incomplete gear periodically meshing with each other, and a return spring provided between the toothed plate and the lower wall of the special gas monitoring tube, a pressing plate and a lifting plate fixedly connected to the top two sides of the U-shaped rod respectively, two arc-shaped baffles slidably connected to the annular mounting plate in the circumferential direction, both arc-shaped baffles extending into the annular mounting plate and fixedly connected to arc-shaped blocks, arc-shaped limiting grooves that slide with the two arc-shaped blocks are opened on the annular mounting plate and the side walls of the special gas monitoring tube, and transmission blocks are fixedly connected to the part of the arc-shaped blocks extending outside the arc-shaped limiting grooves.

[0011] Preferably, a drive motor for driving the rotating rod is fixedly connected to one of the support plates.

[0012] Preferably, the two sides of the U-shaped rod have different lengths.

[0013] Preferably, limit rods are fixedly connected to both outer walls of the special gas monitoring tube, and the two ends of the U-shaped rod are respectively slidably connected to the two limit rods.

[0014] Preferably, one of the transmission blocks moves downward when pressed by the pressing plate, and the other transmission block moves upward when lifted by the lifting plate.

[0015] Preferably, the special gas monitoring tube is provided with a processing mechanism on its outer side for absorbing harmful gases in the special gas. The processing mechanism includes processing boxes fixedly connected to both sides of the special gas monitoring tube. The processing boxes are filled with absorbent. Ventilation pipes are fixedly connected to the upper ends of both sides of the special gas monitoring tube, and the two ventilation pipes are respectively connected to the interior of the two processing boxes. Solenoid valves are provided on both ventilation pipes. Drain ports and drain valves are provided at the bottom of both processing boxes. Harmful gas sensors are provided in the special gas monitoring tube at the location of the treated area. A control panel is provided on the outer wall of one of the processing boxes. Buzzer alarms are fixedly connected to the upper ends of both processing boxes.

[0016] Preferably, the control panel has a preset "saturation threshold". When the absorbent in one of the processing boxes is detected to be saturated, the solenoid valve on that side is automatically closed, and a buzzer alarm is triggered at that location. The solenoid valve on the other side is then opened, and the other processing box begins to work.

[0017] A method for monitoring special gases using the aforementioned monitoring equipment includes the following steps: Step 1: Equipment Preprocessing and Parameter Setting Check the status of each component of the special gas monitoring equipment: confirm that the fine-tuning filter screen in the special gas monitoring tube is not stuck and the filter holes are not blocked; check whether the liquid level of the absorbent in the two treatment tanks has reached the preset working liquid level and whether the drain valve is in the closed state; start the equipment self-test through the control panel to verify the operation effectiveness of the harmful gas sensor, solenoid valve, buzzer alarm and drive motor; preset the "saturation threshold" in the control panel and enter the special gas safety concentration threshold to complete the pretreatment.

[0018] Step 2: Special gas introduction and multi-directional impact filtration start-up The special gas to be monitored is connected to the inlet of the special gas monitoring pipe, allowing the gas to flow inside the pipe. Simultaneously, the drive motor in the drive mechanism is activated, causing the rotating rod to rotate. The incomplete gear on the rotating rod periodically meshes with the toothed plate, which in turn drives the U-shaped rod to slide vertically back and forth along the limiting rod. The pressing plates and lifting plates on both sides of the U-shaped rod act on the transmission blocks of the two arc-shaped blocks, causing the arc-shaped baffles to slide along the arc-shaped limiting grooves. Ultimately, this drives the fine-tuning filter screen to rotate periodically in opposite directions at small angles via the rotating shaft and rotating roller. When the special gas passes through the two ventilation slots on the annular mounting plate, it impacts the filter holes of the fine-tuning filter screen from different directions, achieving preliminary filtration of the special gas and filter screen anti-clogging adjustment. Step 3: Treatment and Real-time Monitoring of Hazardous Components in Special Gases Open the solenoid valve corresponding to one of the treatment boxes. After preliminary filtration, some of the harmful gases enter the treatment box through the vent pipe and are adsorbed and treated by the absorbent. The harmful gas sensor located in the post-treatment area inside the special gas monitoring pipe detects the concentration of the special gas in real time and transmits the data to the control panel. The control panel displays the concentration of the special gas and the status of the absorbent in the treatment box in real time (the absorbent saturation is determined by a preset algorithm combined with sensor data), thus completing the dynamic monitoring of the special gas treatment process. Step 4: Absorbent Saturation and Abnormal Situation Handling When the control panel detects that the absorbent in the currently operating treatment chamber has reached the preset "saturation threshold," it automatically closes the solenoid valve corresponding to that treatment chamber and simultaneously triggers the buzzer alarm on the outer wall of that treatment chamber. Simultaneously, it opens the solenoid valve corresponding to the other treatment chamber, allowing the unsaturated absorbent to continue adsorbing harmful components in the special gas, achieving seamless switching of the treatment mechanisms. If the harmful gas sensor detects that the special gas still exceeds the safety threshold after treatment (not due to absorbent saturation, but rather absorbent failure or vent blockage), or if the drive mechanism or fine-tuning filter plate malfunctions, the control panel will trigger two buzzer alarms simultaneously, prompting personnel to stop the machine for maintenance.

[0019] Step 5: Monitoring Ends and Equipment Maintenance After the special gas monitoring task is completed, close the special gas inlet and stop the drive motor; open the drain valve of the saturated treatment tank to drain the exhausted absorbent through the drain port, clean the treatment tank, refill with new absorbent, and close the drain valve; remove the fine-tuning filter screen from the special gas monitoring tube, clean the impurities in the filter holes, and reset it; clear the historical monitoring data through the control panel, turn off the main power supply of the equipment, and complete this special gas monitoring and equipment maintenance. Compared with existing technologies, the advantages of Bente gas monitoring equipment and its monitoring methods are: 1. This invention achieves a fundamental improvement in the problem of filter clogging through a dual dynamic anti-clogging design of "airflow impact + mechanical drive": On the one hand, when the special gas passes through the ventilation groove of the annular mounting plate, it forms a lateral impact. Combined with the periodic bidirectional rotation (1-3° angle) of the fine-tuning filter screen, impurities can be "shaken off" from both sides of the filter holes, avoiding the accumulation of impurities on one side and reducing the filter screen clogging rate by more than 80%. On the other hand, the drive mechanism simplifies the transmission through incomplete gears and U-shaped rods, driving the filter screen to rotate stably. It can achieve continuous anti-clogging without manual intervention, greatly reducing the frequency of filter screen disassembly and cleaning (traditional equipment requires cleaning 2-3 times a week, while this equipment can extend it to once a month). This not only ensures the continuity of the production process, but also reduces the chance of workers being exposed to harmful gases, thus reducing the safety risks of operation and maintenance. At the same time, the wear-resistant coating on the edge of the filter screen and the reserved gap design reduce filter screen wear, extend its service life by 30%-50%, and reduce the cost of consumable replacement.

[0020] 2. The automatic switching design of the dual treatment boxes in this invention achieves "seamless connection" in the treatment of harmful gases: The two treatment chambers are linked to the control panel via solenoid valves. When the absorbent in one of the treatment chambers reaches the preset "saturation threshold", the control panel can automatically close the solenoid valve on that side and open the solenoid valve on the other side within 2 seconds, ensuring that the special gas is always in a purified state without any interruption in the treatment process. The saturation treatment tank triggers a buzzer alarm (sound + light) to provide real-time reminders for replacement, allowing staff to perform timely maintenance without constant supervision and avoiding delays caused by manual switching. At the same time, the design of the vent pipe outlet being submerged in the absorbent liquid further eliminates the risk of direct leakage of untreated harmful gases. The special gas purification efficiency is stably maintained at over 95%, meeting the high requirements of industrial production for continuous treatment.

[0021] 3. This invention constructs a closed-loop management system of "real-time monitoring - automatic judgment - anomaly response" through the end-to-end linkage design of the control panel: The control panel can display key data such as the concentration of special gas, absorbent saturation, and motor operating parameters in real time, making the treatment process visible and eliminating the need for staff to check the status of each component one by one. In response to various abnormalities such as "absorbent saturation, excessive concentration, and transmission jamming", the equipment can automatically trigger corresponding actions such as "switching the treatment box, dual alarms, and shutdown protection", and can also mark the fault type on the display screen (such as "ventilation pipe blockage" and "mesh plate jamming"), avoiding blind troubleshooting by staff and improving fault handling efficiency by more than 60%. The hazardous gas sensor (detection accuracy 0.1ppm) and the preset function of safe concentration threshold can intercept the risk of excessive special gases in real time. Compared with the traditional equipment's "post-event alarm", this invention realizes "pre-event prevention + in-event intervention", which greatly improves the safety of special gas handling. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 yes Figure 1 Enlarged view of point A in the middle; Figure 3 This is a three-dimensional structural schematic diagram of the present invention from another angle; Figure 4 yes Figure 3 Enlarged view of point B in the middle; Figure 5 This is a partial structural diagram of the annular mounting plate in this invention.

[0023] In the picture: 1. Special gas monitoring pipe; 11. Annular mounting plate; 12. Movable groove; 13. Fine-tuning filter screen; 14. Filter holes; 2. Multi-directional impact mechanism; 21. Rotating shaft; 22. Rotating roller; 23. Ventilation groove; 3. Drive mechanism; 31. Support plate; 32. Rotating rod; 33. Incomplete gear; 34. U-shaped rod; 35. Tooth plate; 36. Return spring; 37. Pressing plate; 38. Lifting plate; 39. Arc-shaped baffle; 310. Arc-shaped block; 311. Arc-shaped limiting groove; 312. Transmission block; 4. Drive motor; 5. Limit rod; 6. Processing mechanism; 61. Processing box; 62. Vent pipe; 63. Solenoid valve; 64. Control panel; 65. Buzzer alarm. Detailed Implementation

[0024] The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0025] Example: Refer to Figures 1 to 5 A special gas monitoring device, comprising: Special gas monitoring pipe 1, with an annular mounting plate 11 fixedly connected inside the special gas monitoring pipe 1, a movable groove 12 is opened at the center of the annular mounting plate 11, a fine-tuning filter plate 13 is movably connected in the movable groove 12, and multiple filter holes 14 are opened on the fine-tuning filter plate 13. The annular mounting plate 11, which is fixedly connected inside the tube, serves two purposes: firstly, to stably support the fine-tuning filter plate 13, and secondly, to provide rotation space for the fine-tuning filter plate 13 through the movable groove 12. The inner wall of the movable groove 12 is provided with a wear-resistant coating (such as polytetrafluoroethylene) to reduce frictional loss when the fine-tuning filter plate 13 rotates.

[0026] The multi-directional impact mechanism 2 is used to allow special gas to pass through and impact the filter holes 14 on the fine-tuning filter plate 13 from different directions when the special gas passes through the special gas monitoring pipe 1. The multi-directional impact mechanism 2 includes a rotating shaft 21 fixedly connected to the outer walls on both sides of the fine-tuning filter plate 13. The rotating shaft 21 extends into the annular mounting plate 11 and is fixedly connected to a rotating roller 22. Two ventilation grooves 23 are opened on the annular mounting plate 11. The two ventilation grooves 23 are respectively located on one side of the two rotating rollers 22, and the rotating rollers 22 extend into the ventilation grooves 23. Specifically, when the special gas passes through one of the ventilation slots 23, it drives the fine-tuning filter plate 13 to rotate slightly to one side, and when the special gas passes through the other ventilation slot 23, it drives the fine-tuning filter plate 13 to rotate slightly to the other side.

[0027] The core objective of the multi-directional impact mechanism 2 is to solve the problem of easy clogging of traditional fixed filters by using the multi-directional impact of special gas and the bidirectional rotation of the fine-tuning filter plate 13. Its structural design and functional coordination are as follows: Component mating relationship: The rotating shaft 21 fixed on both sides of the fine-tuning filter screen 13 is fitted with the rotating hole inside the annular mounting plate 11 with clearance. The rotating roller 22 (made of wear-resistant ceramic) fixed at the end of the rotating shaft 21 extends into the ventilation groove 23 and can roll along the inner wall of the ventilation groove 23, which greatly reduces the frictional resistance when the rotating shaft 21 rotates and ensures smooth rotation of the screen.

[0028] The design logic of the ventilation slots 23: Two ventilation slots 23 are symmetrically opened on both sides of the annular mounting plate 11 (with an included angle of 180°). The slot openings are oriented at an angle of 30-45° to the main flow direction of the special gas. This ensures that after the special gas enters the special gas monitoring pipe 1, part of the airflow passes through the filter holes 14 along the main flow direction, while the other part of the airflow forms a lateral impact force when passing through the ventilation slots 23. When the special gas passes through the left ventilation slot 23, the airflow impacts the rotating roller 22, causing the fine-tuning filter screen 13 to rotate slightly clockwise (angle range 1-3°); when passing through the right ventilation slot 23, it causes the screen to rotate slightly counterclockwise. The bidirectional rotation can prevent impurities from accumulating only on one side of the filter holes 14, achieving "dynamic anti-clogging".

[0029] Enhanced anti-clogging effect: The width of the ventilation groove 23 is matched with the diameter of the rotating roller 22 (gap 0.2-0.3mm), which ensures that the airflow can effectively impact the rotating roller 22, and prevents solid impurities from passing through the ventilation groove 23 and wrapping around the filter screen, thus ensuring the integrity of filtration.

[0030] The drive mechanism 3 is used to periodically rotate the fine-tuning filter plate 13 in opposite directions when a special gas passes through. The drive mechanism 3 includes two support plates 31 fixedly connected to the lower end of the special gas monitoring pipe 1. A rotating rod 32 is rotatably connected between the two support plates 31. An incomplete gear 33 is fixedly connected to the rotating rod 32. A U-shaped rod 34 is slidably connected to the lower side of the special gas monitoring pipe 1 in the vertical direction. A toothed plate 35 is integrally fixedly connected to the center of the U-shaped rod 34. The toothed plate 35 and the incomplete gear 33 periodically mesh with each other, and the toothed plate 35 and the special gas... A reset spring 36 is provided between the lower walls of the monitoring tube 1. A pressing plate 37 and a lifting plate 38 are fixedly connected to the top of both sides of the U-shaped rod 34, respectively. Two arc-shaped baffles 39 are slidably connected to the annular mounting plate 11 along the circumferential direction. Both arc-shaped baffles 39 extend into the annular mounting plate 11 and are fixedly connected to arc-shaped blocks 310. Arc-shaped limiting grooves 311 that slide with the two arc-shaped blocks 310 are opened on both sides of the annular mounting plate 11 and the special gas monitoring tube 1. A transmission block 312 is fixedly connected to the part of the arc-shaped block 310 that extends outside the arc-shaped limiting groove 311.

[0031] Specifically, a drive motor 4 for driving the rotating rod 32 is fixedly connected to one of the support plates 31.

[0032] Specifically, the lengths of the two sides of the U-shaped rod 34 are different.

[0033] Specifically, limit rods 5 are fixedly connected to both outer walls of the special gas monitoring pipe 1, and the two ends of the U-shaped rod 34 are respectively slidably connected to the two limit rods 5.

[0034] Specifically, one of the transmission blocks 312 moves downward when pressed by the pressing plate 37, and the other transmission block 312 moves upward when lifted by the lifting plate 38.

[0035] The drive mechanism 3 serves as the active power source for the periodic bidirectional rotation of the fine-tuning filter screen 13, achieving precise control through mechanical transmission. The functions and coordination details of each component are as follows: The core of the power transmission (incomplete gear 33 and toothed plate 35): The incomplete gear 33, fixed on the rotating rod 32, has teeth on only 1 / 3 to 1 / 2 of its circumference. Its rotation is driven by the drive motor 4 (the speed can be adjusted via the control panel 64, ranging from 50 to 200 rpm). When the teeth of the incomplete gear 33 mesh with the toothed plate 35, it drives the toothed plate 35 to move downward, compressing the return spring 36 between the toothed plate 35 and the lower wall of the special gas monitoring pipe 1 (the spring stiffness is designed according to the transmission load to ensure stable rebound force); when the toothless area of ​​the incomplete gear 33 rotates to the toothed plate 35, the return spring 36 elastically rebounds, driving the toothed plate 35 to return upward, thereby realizing the vertical reciprocating sliding of the U-shaped rod 34 along the limiting rod 5 (sliding stroke 5-10 mm).

[0036] Structural adaptability of U-shaped rod 34: The two sides of U-shaped rod 34 have different lengths (the rod on the pressing plate 37 side is 2-3cm longer than the rod on the lifting plate 38 side). This design stems from the difference in installation height of the two transmission blocks 312 - the left transmission block 312 is installed at a lower position, requiring the pressing plate 37 with a longer rod to press down; the right transmission block 312 is installed at a higher position, requiring the lifting plate 38 with a shorter rod to lift up, ensuring that both actions can be accurately applied to the transmission block 312, avoiding transmission failure due to height mismatch.

[0037] Limiting and guiding design: Limiting rods 5 (made of hard alloy) are fixed on the outer walls of both sides of the special gas monitoring pipe 1. A sliding hole adapted to the U-shaped rod 34 is opened in the center of the rod, which can limit the U-shaped rod 34 to slide only in the vertical direction, avoid left and right deviation or shaking during the sliding process, and ensure the alignment accuracy of the pressing plate 37, the lifting plate 38 and the transmission block 312.

[0038] The function of the arc-shaped transmission assembly: The arc-shaped baffle 39, which is slidably connected to the annular mounting plate 11, is integrally fixed with the arc-shaped block 310 on its inner side. The arc-shaped block 310 is embedded in the arc-shaped limiting groove 311 opened on the side wall of the annular mounting plate 11 and the special gas monitoring pipe 1 (the arc of the limiting groove matches the rotation angle of the fine-tuning filter screen 13, which is 1-3°). When the left transmission block 312 is pressed down by the pressing plate 37, it drives the arc-shaped baffle 39 and the arc-shaped block 310 to slide down along the arc-shaped limiting groove 311, and drives the fine-tuning filter screen 13 to rotate clockwise through the rotating shaft 21; when the right transmission block 312 is lifted up by the lifting plate 38, it drives the corresponding arc-shaped assembly to slide up, and drives the screen to rotate counterclockwise through the rotating shaft 21, ultimately realizing the periodic bidirectional rotation of the screen.

[0039] A treatment mechanism 6 is provided on the outside of the special gas monitoring pipe 1 for absorbing harmful gases in the special gas. The treatment mechanism 6 includes a treatment box 61 fixedly connected to both sides of the special gas monitoring pipe 1. The treatment box 61 is filled with absorbent. The upper ends of both sides of the special gas monitoring pipe 1 are fixedly connected to the ventilation pipes 62, and the two ventilation pipes 62 are respectively connected to the interior of the two treatment boxes 61. Solenoid valves 63 are provided on both ventilation pipes 62. Drain ports and drain valves are opened at the bottom of both treatment boxes 61. Harmful gas sensors are provided in the special gas monitoring pipe 1 at the position of the treated area. A control panel 64 is provided on the outer wall of one of the treatment boxes 61. Buzzer alarms 65 are fixedly connected to the upper ends of both treatment boxes 61.

[0040] Specifically, the control panel 64 presets a "saturation threshold". When it detects that the absorbent in one of the processing tanks 61 is saturated, it automatically closes the solenoid valve 63 on that side and triggers the buzzer alarm 65 at that location. It then opens the solenoid valve 63 on the other side, and the other processing tank 61 begins to work.

[0041] The treatment unit 6, as the core unit for treating hazardous components of special gases, achieves continuous treatment through "adsorption + monitoring + switching". The functions and linkage mechanisms of each component are as follows: Treatment box 61 and absorbent design: Two treatment boxes 61 are symmetrically fixed on both sides of the special gas monitoring pipe 1. The box is filled with a specific absorbent (e.g., 20%-30% sodium hydroxide solution for treating acidic special gases, 10%-15% sulfuric acid solution for treating alkaline special gases, and activated carbon adsorption liquid for treating organic special gases). The absorbent level must reach the preset working level (the inner wall of the box is marked with a level scale, and the working level is 2 / 3 of the height of the box) to ensure that the outlet of the vent pipe 62 is immersed in the absorbent, so as to achieve full contact adsorption of harmful gases.

[0042] The functions of the vent pipe 62 and the solenoid valve 63 are as follows: The vent pipe 62 (made of polytetrafluoroethylene, which is highly corrosion resistant) at the upper ends of both sides of the special gas monitoring pipe 1 is connected at one end to the "filtered area" of the special gas monitoring pipe 1, and the other end extends to the bottom of the absorbent liquid in the treatment tank 61; the solenoid valve 63 (normally closed type, leak-proof design) on the vent pipe 62 is controlled by the control panel 64 and is used to control the passage of special gas into the treatment tank 61 - during normal operation, only one solenoid valve 63 is opened (as shown on the left), and the right side is used as a backup to avoid interruption of treatment after the absorbent in a single tank is saturated.

[0043] Drainage and maintenance design: A drain port and drain valve (manual / electric control) at the bottom of the treatment tank 61 are used to drain the exhausted absorbent; the electric drain valve can be remotely controlled via control panel 64, reducing the risk of personnel contact with harmful absorbents. A filling port (with a sealing cap) is provided on the top of the treatment tank 61 for easy replenishment of new absorbent.

[0044] Sensing and alarm linkage: A hazardous gas sensor (with a detection accuracy of 0.1 ppm, such as an electrochemical sensor) installed in the "post-treatment area" inside the special gas monitoring tube 1 collects the concentration of hazardous components in the treated special gas in real time and transmits the data to the control panel 64; the control panel 64 presets a "saturation threshold" (e.g., if the concentration detected by the sensor is continuously higher than 80% of the safety threshold for 30 seconds, the absorbent is determined to be saturated). When the absorbent in the left treatment tank 61 is saturated, the control panel 64 immediately closes the left solenoid valve 63, triggers the left buzzer alarm 65 (sound and red light alarm), and at the same time opens the right solenoid valve 63, switching to the right treatment tank 61 to work, achieving "seamless switching" (switching time < 2 seconds). If the sensor detects that the concentration of the special gas after processing exceeds the safety threshold (not due to absorbent saturation, such as absorbent failure or blockage of the vent pipe 62), or if the drive mechanism 3 or the fine-tuning filter plate 13 is stuck (detected by abnormal motor current), the control panel 64 will trigger two buzzer alarms 65 to sound simultaneously and display the fault type on the display screen (such as "vent pipe blockage" or "filter plate stuck"), prompting the staff to stop the machine for maintenance.

[0045] Functional Integration of Control Panel 64: Control panel 64 (with touch screen display) is fixed to the outer wall of the right-side processing box 61 and integrates the following functions: Parameter settings: preset "saturation threshold", "special gas safety concentration threshold", "motor speed", etc.; Real-time monitoring: Displays the concentration of special gas, the status of absorbent (saturation percentage), and motor operating parameters; Historical records: Stores monitoring data for the past 30 days, supporting export and query; Self-test control: Initiate device self-test.

[0046] A method for monitoring special gases using the aforementioned monitoring equipment includes the following steps: Step 1: Equipment Preprocessing and Parameter Setting Check the status of each component of the special gas monitoring equipment: confirm that the fine-tuning filter plate 13 in the special gas monitoring pipe 1 is not stuck and the filter holes 14 are not blocked; check whether the liquid level of the absorbent in the two treatment tanks 61 has reached the preset working liquid level and whether the drain valve is in the closed state; start the equipment self-test through the control panel 64 to verify the operation effectiveness of the harmful gas sensor, solenoid valve 63, buzzer alarm 65, and drive motor 4; preset the "saturation threshold" in the control panel 64 and enter the special gas safety concentration threshold to complete the pretreatment.

[0047] Step 2: Special gas introduction and multi-directional impact filtration start-up The special gas to be monitored is connected to the inlet end of the special gas monitoring pipe 1, allowing the special gas to flow inside the special gas monitoring pipe 1. Simultaneously, the drive motor 4 in the drive mechanism 3 is started, and the drive motor 4 drives the rotating rod 32 to rotate. The incomplete gear 33 on the rotating rod 32 periodically meshes with the toothed plate 35, thereby driving the U-shaped rod 34 to slide vertically back and forth along the limiting rod 5. The pressing plate 37 and the lifting plate 38 on both sides of the U-shaped rod 34 act on the transmission block 312 of the two arc-shaped blocks 310 respectively, causing the arc-shaped baffle 39 to slide along the arc-shaped limiting groove 311, and finally driving the fine-tuning filter screen 13 to rotate periodically in opposite directions at a small angle through the rotating shaft 21 and the rotating roller 22. When the special gas passes through the two ventilation grooves 23 on the annular mounting plate 11, it impacts the filter holes 14 of the fine-tuning filter screen 13 from different directions, realizing the initial filtration of the special gas and the adjustment of the filter screen to prevent clogging. Step 3: Treatment and Real-time Monitoring of Hazardous Components in Special Gases When the solenoid valve 63 corresponding to one of the treatment boxes 61 is opened, after preliminary filtration, some of the harmful gases enter the treatment box 61 through the vent pipe 62 and are adsorbed and treated by the absorbent. The harmful gas sensor located in the post-treatment area in the special gas monitoring pipe 1 detects the concentration of the special gas after treatment in real time and transmits the data to the control panel 64. The control panel 64 displays the concentration of the special gas and the status of the absorbent in the treatment box 61 in real time (the absorbent saturation is determined by a preset algorithm combined with sensor data), thus completing the dynamic monitoring of the special gas treatment process. Step 4: Absorbent Saturation and Abnormal Situation Handling When the control panel 64 detects that the absorbent in the currently operating treatment box 61 has reached the preset "saturation threshold", it automatically closes the solenoid valve 63 corresponding to that treatment box 61 and simultaneously triggers the buzzer alarm 65 on the outer wall of that treatment box 61 to sound an alarm. Simultaneously, it opens the solenoid valve 63 corresponding to the other treatment box 61, allowing the unsaturated absorbent to continue adsorbing the harmful components in the special gas, thus achieving seamless switching of the treatment mechanism 6. If the harmful gas sensor detects that the special gas still exceeds the safety threshold after treatment (not due to absorbent saturation, but such as absorbent failure or blockage of the ventilation pipe 62), or if the drive mechanism 3 or the fine-tuning filter plate 13 malfunctions, the control panel 64 will trigger two buzzer alarms 65 to sound simultaneously, prompting the staff to stop the machine for maintenance.

[0048] Step 5: Monitoring Ends and Equipment Maintenance After the special gas monitoring task is completed, close the special gas inlet and stop the drive motor 4; open the drain valve of the saturated treatment tank 61, drain the failed absorbent through the drain port, clean the treatment tank 61 and re-inject new absorbent, then close the drain valve; remove the fine-tuning filter screen 13 in the special gas monitoring tube 1, clean the impurities in the filter holes 14 and reset it; clear the historical monitoring data through the control panel 64, turn off the main power supply of the equipment, and complete this special gas monitoring and equipment maintenance.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A special gas monitoring device, characterized by, include: Special gas monitoring tube (1), an annular mounting plate (11) is fixedly connected inside the special gas monitoring tube (1), a movable groove (12) is opened at the center of the annular mounting plate (11), a fine-tuning filter plate (13) is movably connected in the movable groove (12), and multiple filter holes (14) are opened on the fine-tuning filter plate (13). A multi-directional impact mechanism (2) is used to allow special gas to pass through and impact the filter holes (14) on the fine-tuning filter plate (13) from different directions when the special gas passes through the special gas monitoring tube (1). The multi-directional impact mechanism (2) includes a rotating shaft (21) fixedly connected to the outer walls on both sides of the fine-tuning filter plate (13). The rotating shaft (21) extends into the annular mounting plate (11) and is fixedly connected to a rotating roller (22). Two ventilation grooves (23) are opened on the annular mounting plate (11). The two ventilation grooves (23) are respectively located on one side of the two rotating rollers (22), and the rotating rollers (22) extend into the ventilation grooves (23). The drive mechanism (3) is used to periodically rotate the fine-tuning filter plate (13) in opposite directions when a special gas passes through.

2. The apparatus according to claim 1, wherein When the special gas passes through one of the ventilation slots (23), it drives the fine-tuning filter plate (13) to rotate slightly to one side, and when the special gas passes through the other ventilation slot (23), it drives the fine-tuning filter plate (13) to rotate slightly to the other side.

3. The apparatus according to claim 1, wherein The drive mechanism (3) includes two support plates (31) fixedly connected to the lower end of the special gas monitoring tube (1). A rotating rod (32) is rotatably connected between the two support plates (31). An incomplete gear (33) is fixedly connected to the rotating rod (32). A U-shaped rod (34) is slidably connected to the lower side of the special gas monitoring tube (1) in the vertical direction. A toothed plate (35) is integrally fixedly connected to the center of the U-shaped rod (34). The toothed plate (35) and the incomplete gear (33) periodically mesh with each other. A return spring (36) is provided between the toothed plate (35) and the lower wall of the special gas monitoring tube (1). The top two sides of the U-shaped rod (34) are respectively fixedly connected to a pressing plate (37) and a lifting plate (38). Two arc-shaped baffles (39) are slidably connected on the annular mounting plate (11) along the circumferential direction. Both arc-shaped baffles (39) extend into the annular mounting plate (11) and are fixedly connected to arc-shaped blocks (310). Arc-shaped limiting grooves (311) that slide with the two arc-shaped blocks (310) are opened on the side walls of the annular mounting plate (11) and the special gas monitoring pipe (1). A transmission block (312) is fixedly connected to the part of the arc-shaped block (310) that extends outside the arc-shaped limiting groove (311).

4. The apparatus according to claim 3, wherein One of the support plates (31) is fixedly connected to a drive motor (4) for driving the rotating rod (32).

5. The apparatus according to claim 3, wherein The lengths of the two sides of the U-shaped rod (34) are different.

6. The special gas monitoring device according to claim 3, characterized in that, Limiting rods (5) are fixedly connected to both outer walls of the special gas monitoring tube (1), and the two ends of the U-shaped rod (34) are respectively slidably connected to the two limiting rods (5).

7. The special gas monitoring device according to claim 3, characterized in that, One of the transmission blocks (312) moves downward when pressed by the pressing plate (37), and the other transmission block (312) moves upward when lifted by the lifting plate (38).

8. The special gas monitoring device according to claim 1, characterized in that, The special gas monitoring tube (1) is provided with a processing mechanism (6) on the outside for absorbing harmful gases in the special gas. The processing mechanism (6) includes a processing box (61) fixedly connected to both sides of the special gas monitoring tube (1). The processing box (61) is filled with an absorbent. The upper ends of both sides of the special gas monitoring tube (1) are fixedly connected to a ventilation pipe (62), and the two ventilation pipes (62) are respectively connected to the interior of the two processing boxes (61). The two ventilation pipes (62) are each equipped with a solenoid valve (63). The bottom ends of the two processing boxes (61) are each provided with a drain port and a drain valve. The special gas monitoring tube (1) is provided with a harmful gas sensor at the location of the treated area. One of the processing boxes (61) is provided with a control panel (64) on the outer wall. The upper ends of the two processing boxes (61) are fixedly connected with a buzzer alarm (65).

9. The special gas monitoring device according to claim 8, characterized in that, The control panel (64) presets a "saturation threshold". When the absorbent in one of the processing boxes (61) is detected to be saturated, the solenoid valve (63) on that side is automatically closed, and the buzzer alarm (65) at that location is triggered. The solenoid valve (63) on the other side is opened, and the other processing box (61) starts to work.

10. A method for monitoring a special gas using the monitoring equipment according to any one of claims 1-9, characterized in that, Includes the following steps: Step 1: Equipment Preprocessing and Parameter Setting Check the status of each component of the special gas monitoring equipment: confirm that the fine-tuning filter plate (13) in the special gas monitoring tube (1) is not stuck and the filter hole (14) is not blocked; check whether the liquid level of the absorbent in the two treatment tanks (61) has reached the preset working liquid level and whether the drain valve is in the closed state; start the equipment self-test through the control panel (64) to verify the operation effectiveness of the harmful gas sensor, solenoid valve (63), buzzer alarm (65), and drive motor (4); preset the "saturation threshold" in the control panel (64) and enter the special gas safety concentration threshold to complete the pre-processing; Step 2: Special gas introduction and multi-directional impact filtration start-up Connect the special gas to be monitored to the inlet end of the special gas monitoring pipe (1) so that the special gas flows along the inside of the special gas monitoring pipe (1); The drive motor (4) in the synchronous drive mechanism (3) is started. The drive motor (4) drives the rotating rod (32) to rotate. The incomplete gear (33) on the rotating rod (32) meshes with the toothed plate (35) periodically, thereby driving the U-shaped rod (34) to slide vertically back and forth along the limiting rod (5). The pressing plate (37) and the lifting plate (38) on both sides of the U-shaped rod (34) act on the transmission block (312) of the two arc-shaped blocks (310) respectively, so that the arc-shaped baffle (39) slides along the arc-shaped limiting groove (311), and finally drives the fine-tuning filter screen plate (13) to rotate in opposite directions at small angles periodically through the rotating shaft (21) and the rotating roller (22). When the special gas passes through the two ventilation grooves (23) on the annular mounting plate (11), it impacts the filter holes (14) of the fine-tuning filter screen plate (13) from different directions, realizing the initial filtration of the special gas and the anti-clogging adjustment of the filter screen. Step 3: Treatment and Real-time Monitoring of Hazardous Components in Special Gases Open the solenoid valve (63) corresponding to one of the treatment boxes (61). After the special gas is initially filtered, some of the harmful gas enters the treatment box (61) through the ventilation pipe (62) and is adsorbed and treated by the absorbent. The hazardous gas sensor located in the treated area inside the special gas monitoring tube (1) detects the concentration of the special gas after treatment in real time and transmits the data to the control panel (64); the control panel (64) displays the concentration of the special gas and the status of the absorbent in the treatment box (61) in real time (the absorbent saturation is determined by combining the sensor data with the preset algorithm), thus completing the dynamic monitoring of the special gas treatment process; Step 4: Absorbent Saturation and Abnormal Situation Handling When the control panel (64) detects that the absorbent in the currently working processing box (61) has reached the preset "saturation threshold", it automatically closes the solenoid valve (63) corresponding to the processing box (61) and triggers the buzzer alarm (65) on the outer wall of the processing box (61) to sound an alarm. Simultaneously, it opens the solenoid valve (63) corresponding to another processing box (61) so that the unsaturated absorbent continues to adsorb the harmful components in the special gas, realizing seamless switching of the processing mechanism (6). If the harmful gas sensor detects that the special gas still exceeds the safety threshold after processing (not due to absorbent saturation, such as absorbent failure or blockage of the ventilation pipe (62)), or if the drive mechanism (3) or the fine-tuning filter plate (13) has a jamming fault, the control panel (64) will trigger two buzzer alarms (65) to sound an alarm at the same time, prompting the staff to stop the machine for maintenance. Step 5: End of Monitoring and Equipment Maintenance After the special gas monitoring task is completed, close the special gas inlet and stop the drive motor (4) from running; open the drain valve of the saturated treatment tank (61), drain the failed absorbent through the drain port, clean the treatment tank (61) and re-inject new absorbent, then close the drain valve; remove the fine-tuning filter screen (13) in the special gas monitoring tube (1), clean the impurities in the filter hole (14) and reset it; clear the historical monitoring data through the control panel (64), turn off the main power of the equipment, and complete this special gas monitoring and equipment maintenance.

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