Busbar with electronic and mechanical double-switching mechanism for electronic special gas and control method

Abstract

The invention relates to the technical field of busbars, in particular to a busbar with an electronic and mechanical double-switching mechanism for electronic special gas and a control method. An electronic switching valve group and a mechanical switching valve group are arranged and are arranged in parallel; the gas supply unit is communicated with the output main pipe through the electronic switching valve set and the mechanical switching valve set, automatic switching can be achieved through the electronic switching valve set under the normal working condition, and switching of the gas supply unit can still be completed through the mechanical switching valve set under the abnormal condition. The dual-redundancy switching mechanism is favorable for avoiding gas supply interruption caused by failure of a single electronic system, and effectively solves the problem that the existing electronic special gas supply system usually conveys gas to a gas using terminal through a busbar, but the busbar is usually only provided with an electronic switching system, so that the gas supply efficiency is greatly improved. And when abnormal working conditions such as power failure, sensor failure or control circuit failure occur, the standby gas source cannot be switched in time, and gas supply is interrupted.

Description

Technical Field

[0001] This invention relates to the field of bus technology, specifically a bus with a dual electronic and mechanical switching mechanism for electronic special gases and a control method thereof. Background Technology

[0002] Electronic specialty gases are high-purity, high-stability special gases, encompassing various types such as high-purity carbon tetrafluoride and sulfur hexafluoride. They are core basic materials for high-end industries such as semiconductor manufacturing, biomedicine, and aerospace. Electronic specialty gases are widely used in critical processes such as chip etching, device packaging, and precision synthesis, playing a decisive role in product performance and quality. These applications place extremely high demands on the continuity, safety, and purity of the specialty gas supply; any interruption or contamination of the supply can cause significant losses.

[0003] Existing electronic specialty gas supply systems typically deliver gas to the gas-using terminal via manifolds to achieve a continuous and stable gas supply. However, since manifolds are often only equipped with electronic switching systems, they cannot switch to backup gas sources in time when encountering abnormal operating conditions such as power outages, sensor failures, or control circuit failures, resulting in gas supply interruptions. This poses a significant risk of process interruption, product scrapping, or even equipment damage in high-precision applications such as semiconductor manufacturing.

[0004] This invention was proposed in response to the shortcomings of existing technologies. Summary of the Invention

[0005] The existing electronic special gas supply systems mentioned above typically deliver gas to the gas-consuming terminal via manifolds. However, since these manifolds often only have electronic switching systems, they cannot switch to a backup gas source in time during abnormal operating conditions such as power outages, sensor malfunctions, or control circuit failures, leading to gas supply interruptions. The technical solution adopted by this invention to solve this problem is as follows: A manifold with both electronic and mechanical switching mechanisms for electronic specialty gases includes a gas supply unit, an output main pipe, and a switching mechanism. The gas supply unit is used to connect to an external gas cylinder group, and the output main pipe is used to connect to a gas-using terminal. The switching mechanism includes an electronic switching valve group and a mechanical switching valve group, which are arranged in parallel. The gas supply unit is connected to the output main pipe through both the electronic and mechanical switching valve groups. A filter is provided on the output main pipe for purifying the output gas.

[0006] Furthermore, the gas supply unit includes a first gas supply branch and a second gas supply branch corresponding to the first gas supply branch. The first gas supply branch and the second gas supply branch are respectively connected to the output main pipe through the electronic switching valve group. The electronic switching valve group is used to cut off the connection between the first gas supply branch and the output main pipe and connect the second gas supply branch to the output main pipe when the pressure of the first gas supply branch is detected to be lower than a preset threshold; or to cut off the connection between the second gas supply branch and the output main pipe and connect the first gas supply branch to the output main pipe when the pressure of the second gas supply branch is detected to be lower than a preset threshold.

[0007] Furthermore, the first gas supply branch and the second gas supply branch are respectively connected to the output main pipe through the mechanical switching valve group. The mechanical switching valve group is used to cut off the connection between the first gas supply branch and the output main pipe and connect the second gas supply branch to the output main pipe when the pressure of the first gas supply branch is lower than the pressure of the second gas supply branch and the pressure difference reaches a preset value; or to cut off the connection between the second gas supply branch and the output main pipe and connect the first gas supply branch to the output main pipe when the pressure of the second gas supply branch is lower than the pressure of the first gas supply branch and the pressure difference reaches a preset value.

[0008] Furthermore, the electronic switching valve assembly includes a pressure sensor, a solenoid valve, and a controller. Pressure sensors are provided on both the first and second air supply branches. The solenoid valve includes a first air inlet for connecting to the first air supply branch, a second air inlet for connecting to the second air supply branch, and an air outlet for connecting to the main output pipe. The controller is electrically connected to the pressure sensor and the solenoid valve respectively to control the switching state of the solenoid valve according to the signal from the pressure sensor.

[0009] Furthermore, the mechanical switching valve assembly includes a mechanical valve body, a diaphragm disposed within the mechanical valve body, a piston fixedly connected to the diaphragm, a valve stem connected to the piston, and a return spring sleeved on the valve stem. The mechanical valve body is provided with a first pressure chamber communicating with the first air supply branch and a second pressure chamber communicating with the second air supply branch. The diaphragm separates the first pressure chamber and the second pressure chamber. The valve stem is movably disposed within the mechanical valve body and is used to switch the communication state between the first air supply branch or the second air supply branch and the output main pipe under the action of the piston.

[0010] Furthermore, a high-pressure shut-off valve and a first pressure-reducing valve are provided on the first gas supply branch, and the high-pressure shut-off valve and the first pressure-reducing valve are arranged sequentially along the airflow direction.

[0011] Furthermore, the first gas supply branch is also equipped with a one-way valve and a safety valve. The one-way valve is located at the inlet end of the high-pressure shut-off valve, and the safety valve is located at the outlet end of the first pressure reducing valve.

[0012] Furthermore, a pressure gauge is provided on the first gas supply branch, the pressure gauge including a high pressure gauge and a low pressure gauge, the high pressure gauge is located on the side near the gas inlet end of the first pressure reducing valve, and the low pressure gauge is located on the side near the gas outlet end of the first pressure reducing valve.

[0013] Furthermore, a second pressure reducing valve is provided between the electronic switching valve group and the output main pipe, and a third pressure reducing valve is provided between the mechanical switching valve group and the output main pipe.

[0014] Furthermore, the present invention also provides a bus control method, comprising the following steps: S1: Initialize the gas supply system, so that both the first gas supply branch and the second gas supply branch are in a standby state, and set the branch pressure monitoring threshold and the branch switching pressure difference threshold. S2: Use pressure sensors to collect real-time pressure data for the first and second gas supply branches respectively; S3: If the pressure of the first gas supply branch is lower than the branch pressure monitoring threshold and the pressure of the second gas supply branch is not lower than the branch pressure monitoring threshold, the electronic switching valve group cuts off the first gas supply branch and opens the second gas supply branch, so that the gas in the second gas supply branch is delivered to the output main pipe; if the pressure of the second gas supply branch is lower than the branch pressure monitoring threshold and the pressure of the first gas supply branch is not lower than the branch pressure monitoring threshold, the electronic switching valve group cuts off the second gas supply branch and opens the first gas supply branch, so that the gas in the first gas supply branch is delivered to the output main pipe. S4: If the electronic switching valve assembly fails, when the pressure of the first gas supply branch is lower than the pressure of the second gas supply branch and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve assembly will cut off the first gas supply branch and open the second gas supply branch, so that the gas in the second gas supply branch is delivered to the output main pipe; when the pressure of the second gas supply branch is lower than the pressure of the first gas supply branch and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve assembly will cut off the second gas supply branch and open the first gas supply branch, so that the gas in the first gas supply branch is delivered to the output main pipe.

[0015] The beneficial effects of this invention are as follows: This invention employs both electronic and mechanical switching valve groups, connected in parallel. The gas supply unit is connected to the output main pipe via both electronic and mechanical switching valve groups. Under normal operating conditions, automatic switching can be achieved using the electronic switching valve groups. In case of power outages, sensor malfunctions, or control circuit failures, the gas supply unit can still switch via the mechanical switching valve groups. This dual-redundancy switching mechanism helps avoid gas supply interruptions caused by the failure of a single electronic system, improving the continuity and reliability of electronic specialty gas supply. It effectively solves the problem that existing electronic specialty gas supply systems typically deliver gas to the user terminal via manifolds, which often only have electronic switching systems. This prevents timely switching to a backup gas source in case of power outages, sensor malfunctions, or control circuit failures, leading to gas supply interruptions.

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the busbar of the present invention; Figure 2 This is a control logic block diagram of the electronic switching valve assembly of the present invention. Detailed Implementation

[0018] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0019] like Figures 1 to 2 The diagram shows a manifold with both electronic and mechanical switching mechanisms for electronic specialty gases. It includes a gas supply unit 1, an output main pipe 2, and a switching mechanism 3. The gas supply unit 1 is connected to an external gas cylinder group, and the output main pipe 2 is connected to a gas-using terminal. The switching mechanism 3 includes an electronic switching valve group 31 and a mechanical switching valve group 32, which are arranged in parallel. The gas supply unit 1 is connected to the output main pipe 2 through both the electronic switching valve group 31 and the mechanical switching valve group 32. A filter 48 is provided on the output main pipe 2 for purifying the output gas. This invention employs both electronic and mechanical switching valve groups, connected in parallel. The gas supply unit is connected to the output main pipe via both electronic and mechanical switching valve groups. Under normal operating conditions, automatic switching can be achieved using the electronic switching valve groups. In case of power outages, sensor malfunctions, or control circuit failures, the gas supply unit can still switch via the mechanical switching valve groups. This dual-redundancy switching mechanism helps avoid gas supply interruptions caused by the failure of a single electronic system, improving the continuity and reliability of electronic specialty gas supply. It effectively solves the problem that existing electronic specialty gas supply systems typically deliver gas to the user terminal via manifolds, which often only have electronic switching systems. This prevents timely switching to a backup gas source in case of power outages, sensor malfunctions, or control circuit failures, leading to gas supply interruptions.

[0020] Furthermore, the electronic switching valve group 31 and the mechanical switching valve group 32 are connected in parallel, forming two independent and non-interfering fluid paths between the gas supply unit 1 and the output main pipe 2. Under normal operating conditions, the electronic switching valve group 31 can achieve intelligent, fast, and monitorable automatic switching based on pressure signals. In the event of electronic system failure (such as power outage, sensor or control circuit failure), the mechanical switching valve group 32 can complete self-sustaining switching driven by differential pressure. The two are connected in parallel in structure, isolated in flow path, and complementary in function, forming a dual redundancy guarantee mechanism, which is beneficial to significantly improve the gas supply continuity and operational safety of the system under high reliability requirements.

[0021] Specifically, the gas supply unit 1 is connected to an external gas cylinder group, and the output main pipe 2 is connected to an external gas terminal. The gas source is switched through the parallel electronic switching valve group 31 and mechanical switching valve group 32. Under normal operating conditions, the electronic switching valve group 31 relies on pressure sensors and controllers to monitor the gas supply pressure in real time. When the pressure of the current gas supply branch is detected to be lower than the preset threshold, it quickly switches to another gas supply branch. It also supports remote monitoring and mode adjustment. In case of power outages, electronic failures, or other abnormalities, the mechanical switching valve group 32 automatically triggers the switching by sensing the pressure difference of each gas supply branch. It can switch the gas supply branch without electricity. The two work independently and complement each other to ensure that the gas is continuously and stably delivered to the gas terminal.

[0022] Furthermore, the output main pipe 2 is equipped with a filter 48, which can perform terminal purification filtration on the electronic specialty gas delivered to the gas-using terminal. It can effectively intercept pipeline impurities, valve group wear particles, trace amounts of condensate and other contaminants that may be generated during gas supply branch switching and multi-stage pressure reduction. This prevents impurities from entering the terminal equipment and causing blockage, wear or process contamination of precision components, thereby ensuring the high purity delivery requirements of the electronic specialty gas. Secondly, the filter 48 can reduce the damage of impurities to the terminal equipment, extend the service life of the equipment, and reduce the frequency of production failures and downtime maintenance caused by impurities.

[0023] like Figures 1 to 2 The gas supply unit 1 shown includes a first gas supply branch 11 and a second gas supply branch 12 corresponding to the first gas supply branch 11. The first gas supply branch 11 and the second gas supply branch 12 are respectively connected to the output main pipe 2 through the electronic switching valve group 31. The electronic switching valve group 31 is used to cut off the connection between the first gas supply branch 11 and the output main pipe 2 and connect the second gas supply branch 12 to the output main pipe 2 when the pressure of the first gas supply branch 11 is detected to be lower than a preset threshold; or to cut off the connection between the second gas supply branch 12 and the output main pipe 2 and connect the first gas supply branch 11 to the output main pipe 2 when the pressure of the second gas supply branch 12 is detected to be lower than a preset threshold. Furthermore, the first gas supply branch 11 and the second gas supply branch 12 serve as backups for each other. The electronic switching valve group 31 monitors the pressure of the two branches in real time. When the pressure of either gas supply branch is lower than the preset threshold, the gas supply branch can be quickly cut off and the other gas supply branch can be connected. This avoids the situation where the gas supply is interrupted when the gas in a single gas supply branch is exhausted or the pressure is abnormal. This is conducive to adapting to the precision application scenarios of electronic special gases and can effectively prevent production failures or product losses caused by gas supply stagnation, thereby ensuring that the gas-using terminal continuously obtains a stable gas source.

[0024] Furthermore, relying on the automated detection and control logic of the electronic switching valve group 31, the switching of the gas supply branch can be completed without manual intervention. The switching response is fast and the action is precise, avoiding the delay or error caused by manual operation. At the same time, combined with the pressure sensor and controller, it can realize pressure parameter preset, real-time feedback of switching status, support remote monitoring and mode adjustment, which is conducive to adapting to the needs of modern intelligent production management.

[0025] Preferably, the first gas supply branch 11 and the second gas supply branch 12 adopt the same structural configuration, both including a one-way valve 43, a high-pressure shut-off valve 41, and a first pressure reducing valve 42 connected in sequence, and a safety valve 44 is provided at the outlet end of the first pressure reducing valve 42. At the same time, a high-pressure gauge 451 and a low-pressure gauge 452 are configured to monitor the pressure before and after pressure reduction. The two gas supply branches are symmetrically arranged, have the same function, and serve as backups for each other, ensuring that when one gas supply branch is switched or maintained, the other gas supply branch can fully undertake the gas supply task, thereby ensuring the symmetry, reliability and maintainability of the system operation.

[0026] Specifically, the first gas supply branch 11 and the second gas supply branch 12 of the gas supply unit 1 serve as backups for each other, and both are connected to the output main pipe 2 through the electronic switching valve group 31. The electronic switching valve group 31 monitors the gas supply pressure of the two gas supply branches in real time. When the pressure of the first gas supply branch 11 is detected to be lower than the preset threshold, it will automatically cut off its passage to the output main pipe 2 and simultaneously connect the second gas supply branch 12 to the output main pipe 2. Conversely, when the pressure of the second gas supply branch 12 is lower than the preset threshold, the electronic switching valve group 31 will cut off the passage of the branch and connect the first gas supply branch 11, so as to achieve continuous gas supply through automated branch switching.

[0027] Optionally, in some embodiments, the electronic switching valve assembly 31 includes a first pressure sensor, a second pressure sensor, a controller, a first electric ball valve, and a second electric ball valve; the first electric ball valve is connected in series between the first gas supply branch 11 and the output main pipe 2, and the second electric ball valve is connected in series between the second gas supply branch 12 and the output main pipe 2; the two pressure sensors monitor the pressure of their respective gas supply branches and transmit the signals to the controller; the controller outputs a switch command according to preset logic (such as "switching to the second gas supply branch 12 when the pressure of the first gas supply branch 11 is < threshold"), closes the electric ball valve of the current gas supply branch, and simultaneously opens the electric ball valve of the other gas supply branch.

[0028] Optionally, in some embodiments, the electronic switching valve assembly 31 includes a first pressure sensor, a second pressure sensor, a controller, and a three-way solenoid valve; the first pressure sensor is installed on the first air supply branch 11 to detect its pressure in real time; the second pressure sensor is installed on the second air supply branch 12 to detect its pressure; the controller is electrically connected to the two pressure sensors and the three-way solenoid valve respectively; the three-way solenoid valve has two air inlets (connected to the first air supply branch 11 and the second air supply branch 12 respectively) and one air outlet (connected to the output main pipe 2); the controller determines whether the pressure of the current air supply branch is lower than a preset threshold based on the pressure sensor signal; if it is lower, it outputs a control signal to drive the three-way solenoid valve to switch the flow path, cut off the low-pressure branch and connect the high-pressure branch, thereby realizing automatic switching.

[0029] Optionally, in some embodiments, the electronic switching valve group 31 consists of a first pressure sensor, a second pressure sensor, a PLC controller, a solenoid valve drive circuit, and a two-position three-way solenoid valve; the pressure sensor inputs an analog signal to the PLC, and the PLC compares the pressure value with a preset threshold through its internal program. If the pressure of the current gas supply branch remains below the threshold for more than a set delay, the PLC outputs a digital signal to the drive circuit to control the solenoid valve to switch; the system supports remote communication (such as RS485 or Ethernet) and can upload switching events, pressure data, and fault alarms.

[0030] like Figures 1 to 2The first gas supply branch 11 and the second gas supply branch 12 shown are respectively connected to the output main pipe 2 through the mechanical switching valve group 32. The mechanical switching valve group 32 is used to cut off the connection between the first gas supply branch 11 and the output main pipe 2 and connect the second gas supply branch 12 to the output main pipe 1 when the pressure of the first gas supply branch 11 is lower than the pressure of the second gas supply branch 12 and the pressure difference reaches a preset value; or to cut off the connection between the second gas supply branch 12 and the output main pipe 2 and connect the first gas supply branch 11 to the output main pipe 2 when the pressure of the second gas supply branch 12 is lower than the pressure of the first gas supply branch 11 and the pressure difference reaches a preset value. Furthermore, the mechanical switching valve assembly 32 does not require electric drive. It automatically triggers switching by sensing the pressure difference between the first gas supply branch 11 and the second gas supply branch 12. When encountering abnormal operating conditions such as power outages or electronic system failures, it can quickly cut off the low-pressure gas supply branch and connect the high-pressure backup gas supply branch, avoiding gas supply stagnation caused by relying solely on electronic switching.

[0031] Furthermore, the mechanical switching valve assembly 32 is based on the pure mechanical action logic of pressure difference, and is not affected by factors such as circuit failure and signal interference. It has a simple structure, low failure rate, and stronger environmental adaptability such as temperature resistance and corrosion resistance. It forms a redundant complement with the electronic switching valve assembly 31, not only retaining the intelligent precision of electronic switching, but also making up for its dependence on electricity through the stability and reliability of mechanical switching, so that the bus can be adapted to complex working conditions.

[0032] Specifically, both the first gas supply branch 11 and the second gas supply branch 12 are connected to the output main pipe 2 through a mechanical switching valve assembly 32. The mechanical switching valve assembly 32 does not require electric drive and relies solely on a purely mechanical structure to sense the pressure difference between the two gas supply branches. When the pressure of the first gas supply branch 11 is lower than that of the second gas supply branch 12 and the pressure difference reaches a preset value, the mechanical switching valve assembly 32 automatically cuts off the passage between the first gas supply branch 11 and the output main pipe 2, and connects the second gas supply branch 12 to the output main pipe 2. Conversely, when the pressure of the second gas supply branch 12 is lower than that of the first gas supply branch 11 and the pressure difference reaches the target, the mechanical switching valve assembly 32 cuts off the second gas supply branch 12 and connects the first gas supply branch 11. Through the automated mechanical action triggered by the pressure difference, seamless switching and continuous gas supply of the backup gas source are achieved.

[0033] Optionally, in some embodiments, the mechanical switching valve assembly 32 employs two symmetrically arranged pistons, each placed in one of two independent cylinders. The two pistons are rigidly connected by a connecting rod, with the middle of the connecting rod fixed to the switching valve core. The first cylinder is connected to the first air supply branch 11, and the second cylinder is connected to the second air supply branch 12. When the pressures of the two branches are balanced, the valve core remains in its original position. When the pressure of one branch decreases, the pressure of the other branch pushes the corresponding piston, which in turn moves the valve core through the connecting rod, thereby achieving the switching of the passage.

[0034] Optionally, in some embodiments, the mechanical switching valve assembly 32 includes a valve body, a main valve core, a lever arm, and two pressure-sensing diaphragms; the two diaphragms are respectively connected to the first air supply branch 11 and the second air supply branch 12, and the output end of the diaphragm acts on both ends of the lever arm; the fulcrum of the lever arm is connected to the main valve core, and when the pressures of the two branches are equal, the lever is balanced and the valve core maintains its current state; when the pressure of one branch decreases, the corresponding diaphragm contracts, the lever becomes unbalanced, and the valve core slides, thereby switching the air supply path.

[0035] Furthermore, as a preferred embodiment of the invention and not a limitation thereof, the mechanical switching valve assembly 32 includes a valve body, a flexible diaphragm disposed within the valve body, a piston fixedly connected to the diaphragm, a valve stem linked to the piston, and a return spring sleeved on the valve stem; the valve body forms two pressure chambers: the first pressure chamber is connected to the first air supply branch 11, and the second pressure chamber is connected to the second air supply branch 12, with the diaphragm separating the two pressure chambers; when the pressures of the two branches are equal, the diaphragm is centered, and the valve stem maintains the initial passage under the action of the return spring (e.g., the first air supply branch 11 is connected); when the pressure of the first air supply branch 11 is significantly lower than that of the second air supply branch 12 and the pressure difference reaches a set value (determined by the preload of the return spring), the diaphragm shifts to the low-pressure side, driving the piston and valve stem to move, cutting off the passage of the first air supply branch 11 and connecting the second air supply branch 12.

[0036] like Figures 1 to 2 The electronic switching valve assembly 31 shown includes a pressure sensor, a solenoid valve, and a controller. Pressure sensors are provided on both the first air supply branch 11 and the second air supply branch 12. The solenoid valve includes a first air inlet for connecting to the first air supply branch 11, a second air inlet for connecting to the second air supply branch 12, and an air outlet for connecting to the output main pipe 2. The controller is electrically connected to the pressure sensor and the solenoid valve respectively to control the switching state of the solenoid valve according to the signal of the pressure sensor. Furthermore, both the first gas supply branch 11 and the second gas supply branch 12 are equipped with pressure sensors, which can collect their respective pressure data in real time and feed it back to the controller. The controller analyzes the signals to accurately determine whether the pressure is lower than the preset threshold, and then controls the switching of the solenoid valve. Compared with the traditional switching method, this setting avoids pressure misjudgment, the switching response is fast and the action is accurate, and it can effectively prevent gas supply interruption caused by pressure fluctuations or false triggering, thereby ensuring that the output main pipe 2 continuously delivers stable pressure electronic special gas to the gas-using terminal.

[0037] Furthermore, the solenoid valve integrates the first air inlet, the second air inlet, and the air outlet, eliminating the need for additional complex pipeline adapters. This allows for efficient connection to the two air supply branches and the main output pipe, making the electronic switching valve assembly 31 more compact and rationally laid out, which helps reduce the risk of pipeline leakage. Secondly, the controller centrally manages the pressure sensor and the solenoid valve, which helps simplify circuit connections and signal transmission paths, effectively improving the integration and operational reliability of the entire switching system, and also facilitating later installation, commissioning, and maintenance.

[0038] Furthermore, the controller adopts a PLC controller, which can receive pressure signals from the two air supply branches transmitted by the pressure sensor, and accurately control the on / off and switching of the solenoid valves based on this. The PLC controller integrates a fully functional control unit and is equipped with an RS485 / Ethernet remote monitoring interface. It can not only display the pressure data and valve group switching status of the first air supply branch 11 and the second air supply branch 12 in real time, but also support the switching between automatic switching and remote manual switching modes. At the same time, it can realize dual visualization of the switching status of local indicator lights and remote monitoring interface. During system maintenance, the operator can isolate the target air supply branch separately through the high-pressure shut-off valve 41 without interrupting the overall air supply, thereby ensuring production continuity.

[0039] Optionally, in some embodiments, the controller is a microcontroller (MCU), which integrates a signal acquisition module, a logic processing unit and an output drive circuit. It can receive the detection signal from the pressure sensor, determine the state of the gas supply branch according to preset logic, and output control commands to drive the solenoid valve to complete the switching action.

[0040] Optionally, in some embodiments, the controller is a programmable logic controller (PLC) with an analog input interface, programmable control logic and a communication module, which can not only realize automatic switching control, but also support remote monitoring, status uploading and local / remote operation mode switching.

[0041] like Figures 1 to 2 The mechanical switching valve assembly 32 shown includes a mechanical valve body, a diaphragm disposed within the mechanical valve body, a piston fixedly connected to the diaphragm, a valve stem connected to the piston, and a return spring sleeved on the valve stem. The mechanical valve body is provided with a first pressure chamber communicating with the first air supply branch 11 and a second pressure chamber communicating with the second air supply branch 12. The diaphragm separates the first pressure chamber and the second pressure chamber. The valve stem is movably disposed within the mechanical valve body and is used to switch the communication state between the first air supply branch 11 or the second air supply branch 12 and the output main pipe 2 under the action of the piston. Furthermore, the diaphragm separates the first pressure chamber and the second pressure chamber, enabling direct sensing of the pressure difference between the first gas supply branch 11 and the second gas supply branch 12. No additional sensing components are required, and the pressure sensing is direct and sensitive, accurately capturing the preset pressure difference threshold signal. Through the rigid connection between the diaphragm and the piston and valve stem, the pressure difference is converted into mechanical driving force, which drives the valve stem to move and realize the switching of the gas supply branch. The pure mechanical transmission has no electronic component interference, and the switching trigger logic is stable, effectively avoiding switching failures caused by signal delays and circuit faults, providing a reliable guarantee for the continuity of gas supply.

[0042] Furthermore, the first pressure chamber and the second pressure chamber are respectively located on both sides of the diaphragm. Regardless of whether the pressure of one gas supply branch is lower than that of the other gas supply branch and the pressure difference meets the standard, the valve stem can be switched by the force offset of the diaphragm, realizing the bidirectional adaptive switching function. This perfectly matches the design logic that the first gas supply branch 11 and the second gas supply branch 12 are backups for each other. It complements the electronic switching valve group 31 and automatically starts when the electronic system fails, which helps to ensure the continuous supply of gas under extreme working conditions, thereby comprehensively strengthening the redundancy guarantee capability of the manifold.

[0043] Specifically, within the mechanical valve body of the mechanical switching valve assembly 32, a diaphragm separates the first pressure chamber from the second pressure chamber, and the two pressure chambers are respectively connected to the first air supply branch 11 and the second air supply branch 12. The diaphragm is fixedly connected to the valve stem via a piston, and the valve stem is fitted with a return spring and can move within the valve body. When the pressure of one air supply branch is lower than that of the other air supply branch and the pressure difference reaches a preset value, the diaphragm shifts towards the low-pressure side under the action of the pressure difference on both sides, causing the piston and valve stem to move synchronously, the return spring is compressed, and the valve stem switches the passage state accordingly, cutting off the connection between the low-pressure air supply branch and the output main pipe 2 and connecting the high-pressure air supply branch. When the pressures of the two air supply branches are balanced or the pressure difference is reversed, the return spring pushes the valve stem, piston, and diaphragm to return to their original positions.

[0044] like Figures 1 to 2 The first gas supply branch 11 shown is equipped with a high-pressure shut-off valve 41 and a first pressure reducing valve 42, which are arranged sequentially along the airflow direction. Furthermore, the high-pressure shut-off valve 41 can manually cut off the gas supply in an emergency, quickly isolating the first gas supply branch 11 during gas cylinder replacement, equipment maintenance, or sudden accidents to avoid safety risks caused by high-pressure gas leakage. Secondly, the first pressure reducing valve 42 can reduce the high-pressure gas supply to the working pressure required by the gas user terminal, preventing problems such as pipeline rupture and damage to gas-using equipment caused by direct delivery of high-pressure gas. The two valves work together in stages to form a dual safety guarantee from gas supply on / off control to pressure regulation.

[0045] Furthermore, by first installing the high-pressure shut-off valve 41 along the airflow direction and then installing the first pressure reducing valve 42, the first pressure reducing valve 42 can be prevented from being subjected to reverse pressure impact or impurity interference. This helps ensure that the first pressure reducing valve 42 can stably perform its pressure reducing and stabilizing function, keeping the output gas pressure constant and effectively reducing the impact of pressure fluctuations on the gas-using terminal process.

[0046] Furthermore, the high-pressure shut-off valve 41 is fully open during normal gas supply, providing stable inlet conditions for the first pressure reducing valve 42. When the system needs to be shut down or the gas source needs to be switched, the high-pressure shut-off valve 41 can be closed first, allowing the first pressure reducing valve 42 to release pressure in a non-flowing state, avoiding impact wear caused by frequent start-stop. In addition, this sequential setting prevents the first pressure reducing valve 42 from being subjected to unnecessary mechanical stress or unexpected back pressure for a long time, which helps to reduce the risk of seal aging and valve core jamming, and helps to extend the service life of the first pressure reducing valve 42, effectively reducing maintenance frequency and cost.

[0047] like Figures 1 to 2 The first gas supply branch 11 shown is also equipped with a one-way valve 43 and a safety valve 44. The one-way valve 43 is located at the inlet end of the high-pressure shut-off valve 41, and the safety valve 44 is located at the outlet end of the first pressure reducing valve 42. Furthermore, the one-way valve 43 is located at the inlet end of the high-pressure shut-off valve 41, which can strictly prevent the gas in the gas supply branch from flowing back to the gas cylinder group, avoiding the mixing and contamination of the gas that has been delivered with the high-purity electronic special gas in the gas cylinder, or the abnormal pressure of the gas cylinder due to backflow. This is conducive to meeting the stringent purity requirements of electronic special gas, ensuring that the gas from the gas source to the gas terminal always maintains high purity, and avoiding process failures or product quality problems caused by backflow.

[0048] Furthermore, the safety valve 44 is located at the outlet of the first pressure reducing valve 42 and can monitor the working pressure after pressure reduction in real time. When the first pressure reducing valve 42 fails or the pressure rises abnormally, the safety valve 44 automatically opens to release pressure and quickly release the overpressure gas, preventing pipelines, valves or gas-using equipment from being damaged due to overpressure, or even causing safety accidents such as gas leakage. Together with the high-pressure shut-off valve 41 and the first pressure reducing valve 42, it forms a multi-level safety protection, thereby comprehensively improving the safety redundancy of the gas supply system.

[0049] Furthermore, the front placement of the check valve 43 prevents backflow gas from impacting or corroding core components such as the high-pressure shut-off valve 41 and the first pressure reducing valve 42, thus extending the service life of these components. The rear placement of the safety valve 44 precisely targets the risk of overpressure on the low-pressure side after pressure reduction, providing more targeted protection. Secondly, the independent placement of the check valve 43 and the safety valve 44 facilitates separate inspection, maintenance, or replacement without affecting the normal operation of other components in the gas supply branch, which helps reduce the complexity of operation and maintenance and downtime losses.

[0050] like Figures 1 to 2The first gas supply branch 11 shown is equipped with a pressure gauge 45, which includes a high pressure gauge 451 and a low pressure gauge 452. The high pressure gauge 451 is located on the side near the air inlet end of the first pressure reducing valve 42, and the low pressure gauge 452 is located on the side near the air outlet end of the first pressure reducing valve 42. Furthermore, the pressure gauge 45 can intuitively display the gas pressure in the first gas supply branch 11, allowing operators to monitor the pressure changes at the gas source in real time, promptly determine the remaining gas volume in the gas cylinder group, and whether the first pressure reducing valve 42 is working properly. Combined with the pressure sensor data of the electronic switching valve group 31, it is beneficial to form dual pressure monitoring, which helps to avoid gas supply failures caused by the failure to detect abnormal pressure in time. It provides an intuitive basis for pressure parameter adjustment and switching logic optimization, effectively ensuring the precise control of the gas supply system.

[0051] Furthermore, by using the pressure value fed back in real time by the pressure gauge 45, users can quickly identify abnormal situations, such as a sudden drop in pressure which may indicate a pipeline leak, or a persistently high pressure which may indicate a failure of the first pressure reducing valve 42. Users can use the pressure data to identify potential problems in advance and avoid the escalation of the fault, which could lead to overpressure, gas supply interruption, or other issues.

[0052] Furthermore, after system installation and commissioning, routine maintenance, or component replacement, pressure gauge 45 can quickly provide feedback on whether the pressure has reached the preset standard, making it convenient for operators to adjust the parameters of components such as the first pressure reducing valve 42 and safety valve 44 in a timely manner, thereby ensuring that the pressure of the gas supply branch meets the needs of the gas user terminal.

[0053] Furthermore, the high-pressure gauge 451 can display the high-pressure gas source pressure at the inlet of the first pressure reducing valve 42 in real time, while the low-pressure gauge 452 synchronously feeds back the working pressure at the outlet. Operators can intuitively compare the two sets of pressure data to determine whether the pressure reduction of the first pressure reducing valve 42 has reached the preset standard and whether the pressure stabilization effect is reliable. This avoids pressure reduction failure or excessive pressure fluctuation due to the failure of the first pressure reducing valve 42, thereby ensuring that the gas pressure delivered to the output main pipe 2 always meets the needs of the gas user.

[0054] Furthermore, when abnormal pressure occurs, comparing the readings of the high-pressure gauge 451 and the low-pressure gauge 452 can quickly pinpoint the source of the fault. If the reading of the high-pressure gauge 451 is abnormal (e.g., a sudden drop or zero), it may be a problem with the gas cylinder group, the high-pressure shut-off valve 41, or the inlet-side pipeline. If the reading of the low-pressure gauge 452 is abnormal (e.g., overpressure or no pressure), it is highly likely that the first pressure reducing valve 42 or the outlet-side pipeline is faulty. The fault range can be initially identified without disassembling the system, which helps to shorten the troubleshooting time, reduce maintenance costs, and effectively improve the efficiency of system fault handling.

[0055] Furthermore, the high-pressure gauge 451 can monitor the high-pressure status of the gas source in real time. If an extreme situation of excessive high pressure occurs, the user can cut off the gas source in time through the high-pressure shut-off valve 41. The low-pressure gauge 452 accurately monitors the working pressure after pressure reduction. Together with the safety valve 44 at the gas outlet, it forms a dual overpressure protection. The two have a clear division of labor, targeting the pressure risks on the high-pressure side and the low-pressure side respectively, further improving the multi-level safety protection system and comprehensively reducing the safety hazards in the process of electronic special gas transportation.

[0056] like Figures 1 to 2 A second pressure reducing valve 46 is provided between the electronic switching valve group 31 and the output main pipe 2, and a third pressure reducing valve 47 is provided between the mechanical switching valve group 32 and the output main pipe 2. Furthermore, a second pressure reducing valve 46 is provided between the electronic switching valve group 31 and the output main pipe 2, and a third pressure reducing valve 47 is provided between the mechanical switching valve group 32 and the output main pipe 2. This enables secondary pressure reduction and stabilization of the gas after switching between the two gas supply branches, further refining the pressure regulation accuracy. This helps ensure that the gas pressure entering the output main pipe 2 fully meets the process requirements of the gas-using terminal, and helps avoid parameter deviations caused by pressure fluctuations and switching impacts due to single-stage pressure reduction.

[0057] Furthermore, the second pressure reducing valve 46 and the third pressure reducing valve 47 independently serve the electronic switching path and the mechanical switching path, respectively, which can effectively isolate the pressure influence between the two gas supply branches and prevent pressure fluctuations generated when switching one gas supply branch from being transmitted to the other gas supply branch. Even if one of the pressure reducing valves fails, the other can still perform its pressure reducing function normally, ensuring stable gas supply pressure during the switching process. At the same time, it reduces the impact of a single component failure on the overall system, forming a double redundancy guarantee with the dual switching valve group, further improving the continuity and reliability of gas supply.

[0058] Furthermore, the electronic switching valve assembly 31 has a fast response and high precision, and the corresponding second pressure reducing valve 46 can be set with more refined pressure stabilization parameters; the mechanical switching valve assembly 32 serves as an emergency backup, and the third pressure reducing valve 47 can be adapted to its switching characteristics to set an appropriate pressure range. The two can be independently adjusted according to the pressure requirements of different switching scenarios, which not only meets the requirements of intelligent and precise gas supply under normal working conditions, but also adapts to the emergency stable gas supply under abnormal working conditions, so that the system can flexibly adapt to diverse usage scenarios, thereby expanding the application range.

[0059] like Figures 1 to 2 The bus control method shown includes the following steps: S1: Initialize the gas supply system so that both the first gas supply branch 11 and the second gas supply branch 12 are in a standby state, and set the branch pressure monitoring threshold and the branch switching pressure difference threshold. S2: Use pressure sensors to collect real-time pressure data of the first gas supply branch 11 and the second gas supply branch 12 respectively; S3: If the pressure of the first gas supply branch 11 is lower than the branch pressure monitoring threshold and the pressure of the second gas supply branch 12 is not lower than the branch pressure monitoring threshold, then the electronic switching valve group 31 cuts off the first gas supply branch 11 and connects the second gas supply branch 12, so that the gas in the second gas supply branch 12 is delivered to the output main pipe 2; if the pressure of the second gas supply branch 12 is lower than the branch pressure monitoring threshold and the pressure of the first gas supply branch 11 is not lower than the branch pressure monitoring threshold, then the electronic switching valve group 31 cuts off the second gas supply branch 12 and connects the first gas supply branch 11, so that the gas in the first gas supply branch 11 is delivered to the output main pipe 2. S4: If the electronic switching valve assembly 31 fails, when the pressure of the first gas supply branch 11 is lower than the pressure of the second gas supply branch 12 and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve assembly 32 cuts off the first gas supply branch 11 and opens the second gas supply branch 12, so that the gas in the second gas supply branch 12 is delivered to the output main pipe 2; when the pressure of the second gas supply branch 12 is lower than the pressure of the first gas supply branch 11 and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve assembly 32 cuts off the second gas supply branch 12 and opens the first gas supply branch 11, so that the gas in the first gas supply branch 11 is delivered to the output main pipe 2. Furthermore, in step S1, the following steps are also included: S11: System initialization includes gas circuit preparation; opening the high-pressure shut-off valve 41 on the first gas supply branch 11 and the second gas supply branch 12 to connect the external gas cylinder group with the gas supply unit 1; adjusting the first pressure reducing valve 42 on the two gas supply branches to adjust their outlet pressure to the same system working pressure, so that the first gas supply branch 11 and the second gas supply branch 12 are both in a standby state that can supply gas at any time. S12: Start the controller and pressure sensor, and the system performs an initialization self-test; confirm through the high pressure gauge 451 and the low pressure gauge 452 that the inlet and outlet pressures of the first gas supply branch 11 and the second gas supply branch 12 are within the normal range and there is no obvious leakage or abnormal fluctuation; at the same time, complete the zero point and range calibration of the pressure sensor to ensure the accuracy of subsequent pressure data acquisition. S13: Set the branch pressure monitoring threshold for judging the action of the electronic switching valve group 31 through the human-machine interface or remote monitoring terminal of the controller; the branch pressure monitoring threshold is an adjustable parameter, which is determined according to the process requirements of the gas-using terminal, and serves as the basis for judging whether to trigger electronic switching in step S3. S14: The branch switching pressure difference threshold of the mechanical switching valve group 32 is determined by its internal structure and is specifically configured by adjusting the preload of the reset spring. This configuration is completed at the factory or during maintenance and is not part of the initialization setting steps during operation. During the system initialization phase, the user only needs to confirm that the mechanical switching valve group 32 is in normal working condition, that its diaphragm, piston and valve stem are not stuck, and that it can act autonomously when the pressure difference reaches the structural setting value. S15: Set the controller's operating mode to automatic switching mode and confirm that the remote communication interface (RS485 / Ethernet) is connected normally; the local indicator light and the remote monitoring interface simultaneously display the pressure status of the first gas supply branch 11 and the second gas supply branch 12, and the passage status of the electronic switching valve group 31 and the mechanical switching valve group 32. When the system is fault-free and in a stable standby state, the initialization is determined to be complete, and the normal monitoring and switching preparation stage is entered.

[0060] Furthermore, in step S2, the following steps are also included: S21: The controller synchronously monitors the pressure status of the first gas supply branch 11 and the second gas supply branch 12 with a fixed sampling period; the sampling period can be set according to the system response requirements, preferably 0.1 seconds, to ensure real-time perception and rapid response to pressure changes in the two gas supply branches; S22: Pressure sensors installed on the first gas supply branch 11 and the second gas supply branch 12 detect the gas pressure on their respective gas supply branches in real time and output analog or digital signals representing the pressure values ​​to the corresponding input channels of the controller; the controller receives and analyzes the signals through its signal acquisition module to obtain the real-time pressure data of the first gas supply branch 11 and the second gas supply branch 12. S23: The controller performs preliminary processing on the received pressure data, including analog-to-digital conversion and digital filtering, to suppress instantaneous fluctuations caused by airflow disturbances, electromagnetic interference or pressure sensor noise, thereby obtaining stable and reliable pressure trend data for subsequent switching logic judgment. S24: The real-time pressure data of the first gas supply branch 11 and the second gas supply branch 12 after processing are synchronously stored in the local memory by the controller and uploaded to the remote monitoring platform through its integrated remote communication interface (RS485 / Ethernet); the operator can view the pressure value, switching status and historical trend in real time on the local human-machine interface or remote terminal, so as to realize the full visualization, recording and traceability of the gas supply process.

[0061] Furthermore, in step S3, the following steps are also included: S31: The controller compares the pressure data of the first gas supply branch 11 and the second gas supply branch 12 collected in real time with the preset branch pressure monitoring threshold respectively; when the pressure of the first gas supply branch 11 is continuously lower than the threshold and the pressure of the second gas supply branch 12 is not lower than the threshold, it is determined that the electronic switching condition of "switching from the first branch 11 to the second branch 12" is met. S32: The term "continuously below" refers to the time during which the pressure is below the threshold for more than a preset delay time (e.g., 1-3 seconds) to avoid erroneous switching due to instantaneous fluctuations in airflow or noise from the pressure sensor; this delay time can be configured by the controller according to process stability requirements to ensure the reliability of the switching action; S33: After the switching conditions are met, the controller outputs a control signal to drive the electronic switching valve group 31 to operate; the electronic switching valve group 31 is a three-way solenoid valve, the valve core switches to the second air supply branch 12 conduction position, cuts off the connection between the first air supply branch 11 and the output main pipe 2, and establishes an airflow channel between the second air supply branch 12 and the output main pipe 2. S34: After the switching is completed, the gas output from the second gas supply branch 12 is regulated twice by its corresponding second pressure reducing valve 46 and then flows into the output main pipe 2. S35: While performing the switch, the controller updates the status of local indicator lights (such as the "first gas supply branch → second gas supply branch" switch indication) and sends the switch event log to the monitoring platform through the remote communication interface (RS485 / Ethernet), including the switch time, the trigger branch, and the pressure values ​​before / after the switch, so as to realize the traceability and auditability of the switch process.

[0062] Furthermore, in step S4, the following steps are also included: S41: The “failure of electronic switching valve group 31” includes, but is not limited to, the following situations: power failure of controller, loss of control signal, failure of solenoid valve drive circuit, abnormal pressure sensor signal, or the controller fails to execute the switching command successfully multiple times in a row; when the system detects that any of the above abnormal states continue to exceed the safety tolerance, it determines that the electronic switching function is unavailable and automatically enters the mechanical switching protection mode. S42: The mechanical switching valve assembly 32 does not require external energy or control signals. Its switching action is driven entirely by the pressure difference between the first gas supply branch 11 and the second gas supply branch 12. When the pressures of the two branches are unequal, the pressurized gas acts on both sides of the diaphragm in the mechanical valve body to form a pressure difference force. S43: The branch switching pressure difference threshold is determined by the internal structure of the mechanical switching valve group 32, specifically by the preload force of the return spring; when the force generated by the actual pressure difference between the first air supply branch 11 and the second air supply branch 12 is greater than the reaction force of the return spring, the diaphragm is displaced, which drives the piston and valve stem fixedly connected to it to move. S44: The movement of the valve stem changes the flow channel on / off state: If the pressure of the first gas supply branch 11 is lower than that of the second gas supply branch 12 and the pressure difference reaches the branch switching pressure difference threshold, the valve stem cuts off the connection between the first gas supply branch 11 and the output main pipe 2, and opens the passage between the second gas supply branch 12 and the output main pipe 2; the opposite is also true, realizing the gas supply switching without self-sustaining operation. S45: After the switching is completed, the gas in the conducting branch is finely regulated by its corresponding secondary pressure reducing valve (second pressure reducing valve 46 or third pressure reducing valve 47) and then flows into the output main pipe 2 to ensure stable output pressure, thereby meeting the process requirements of the gas-using terminal. S46: The entire switching process of the mechanical switching valve group 32 is completed within 3 seconds, and the switching action is irreversible until the pressure relationship between the two gas supply branches reverses again to a point where it is sufficient to overcome the spring force; this mechanism ensures that the system can still automatically and reliably maintain continuous gas supply even under extreme conditions where the electronic system completely fails.

[0063] Furthermore, when the electronic switching valve assembly 31 is working normally, the first pressure reducing valves 42 on the first gas supply branch 11 and the second gas supply branch 12 are both in an effective regulating state, stabilizing the outlet pressure of each gas supply branch at the same system working pressure (e.g., 0.8 MPa). Therefore, although there may be differences in the upstream gas source pressure of the two gas supply branches (e.g., the inlet pressure of the first gas supply branch 11 drops due to gas cylinder consumption), the pressure sensed on both sides of the diaphragm of the mechanical switching valve assembly 32 is the stable pressure after pressure reduction, and the actual pressure difference ΔP is close to zero, far below its mechanical trigger threshold (e.g., 0.1-0.3 MPa), so no false switching will occur. Only when the electronic system fails and the pressure of a certain gas supply branch drops to the point where the first pressure reducing valve 42 cannot maintain the set outlet pressure will there be a significant difference in the outlet pressure of the two gas supply branches, and the mechanical switching valve assembly 32 will be activated, thereby achieving emergency gas supply guarantee.

[0064] The judgment logic is as follows: Under normal operating conditions, the system collects pressure data in real time through pressure sensors on the first gas supply branch 11 and the second gas supply branch 12 with a sampling period of 0.1s. The preset branch pressure monitoring threshold is 0.5MPa. If the initial pressure of the first gas supply branch 11 is P1=1 MPa (higher than the branch pressure monitoring threshold of 0.5MPa) and the pressure of the second gas supply branch is P2=1 MPa (pressure difference ΔP on both sides of the diaphragm=0), the system prioritizes the first gas supply branch 11 to supply gas. When the pressure of the first gas supply branch 11 continues to drop from 1MPa, for example, after dropping to 0.6MPa, it does not rise again and further drops below the 0.5MPa threshold. If the low pressure state is maintained for more than 0.3s, the controller immediately completes the pressure determination and outputs a switching command within ≤1s. The controller controls the electronic switching valve group 31 to cut off the first gas supply branch 11 and open the second gas supply branch 12. After the switching is completed, the gas is secondarily stabilized by the second pressure reducing valve 46 and then flows into the output main pipe 2, thereby ensuring continuous gas supply and stable pressure. Under abnormal operating conditions, assuming the electronic system fails at the initial moment; at this time, although the pressure of the first gas supply branch 11 also decreases from 1MPa, the electronic switching valve group cannot respond; when the pressure of the first gas supply branch 11 drops to 0.5MPa, while the pressure of the second gas supply branch 12 remains at 1MPa, the pressure difference ΔP between the two reaches 0.5MPa, which exceeds the preset trigger threshold (such as 0.3MPa) of the mechanical switching valve group 32; the pressure difference directly drives the diaphragm and piston mechanism in the mechanical valve group 32 to move, and cuts off the first gas supply branch 11 and connects the second gas supply branch 12 through pure mechanical linkage within about 3 seconds, so that uninterrupted emergency gas supply is still achieved even when the electronic system completely fails.

[0065] The workflow is as follows: After system startup, the first gas supply branch 11 and the second gas supply branch 12 are connected to external gas cylinder groups respectively. Both gas supply branches pass through a one-way valve 43, a high-pressure shut-off valve 41, and a first pressure reducing valve 42 in sequence. A safety valve 44 is installed at the outlet of the first pressure reducing valve 42. A high-pressure gauge 451 is installed on the inlet side of the first pressure reducing valve 42, and a low-pressure gauge 452 is installed on the outlet side of the first pressure reducing valve 42 to ensure unidirectional flow, achieve safe isolation, stabilize output pressure, and provide local monitoring. During normal operation, the electronic switching valve group 31 collects the pressure of the first gas supply branch 11 and the second gas supply branch 12 in real time through pressure sensors, and the PLC controller determines the current gas supply status. When the pressure of either gas supply branch drops below a preset threshold, the controller automatically drives the three-way solenoid valve to cut off the low-pressure gas supply branch and connect the other gas supply branch, realizing intelligent and fast electronic automatic switching. At the same time, the switching status and pressure data are uploaded through a remote interface to support remote monitoring. Control, mode switching, and status visualization; in case of power outage, sensor failure, or control circuit failure, the electronic switching function fails. At this time, the mechanical switching valve group 32 drives the internal diaphragm, piston, and valve stem to move by relying on the natural pressure difference between the two gas supply branches. It automatically cuts off the lower pressure gas supply branch and connects the higher pressure gas supply branch without any external energy, thereby ensuring continuous and uninterrupted gas supply. Regardless of whether the gas is supplied through electronic or mechanical paths, the gas passes through the independently set secondary pressure reducing valves (second pressure reducing valve 46 and third pressure reducing valve 47) in their respective paths for fine pressure stabilization before entering the output main pipe 2, ensuring that the output pressure is highly consistent and has minimal fluctuations. During maintenance, the user can isolate the gas supply branch for repair by closing the high-pressure shut-off valve 41 of a single line. The other gas supply branch can still supply gas normally. The entire system always maintains at least one effective gas supply path, thereby achieving high reliability, high safety, monitorability, and maintainability dual redundancy gas supply guarantee.

[0066] The above examples are merely illustrative of the technical content of the present invention to facilitate reader understanding, but do not imply that the implementation of the present invention is limited thereto. Any technical extensions or re-creations made based on the present invention are protected by the present invention. The scope of protection of the present invention is defined by the claims.

Claims

1. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases, comprising a gas supply unit (1), an output main pipe (2), and a switching mechanism (3), characterized in that: The gas supply unit (1) is used to connect to an external gas cylinder group, the output main pipe (2) is used to connect to a gas terminal, the switching mechanism (3) includes an electronic switching valve group (31) and a mechanical switching valve group (32), the electronic switching valve group (31) and the mechanical switching valve group (32) are arranged in parallel, the gas supply unit (1) is connected to the output main pipe (2) through the electronic switching valve group (31) and the mechanical switching valve group (32) respectively; the output main pipe (2) is provided with a filter (48) for purifying the output gas.

2. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 1, characterized in that: The gas supply unit (1) includes a first gas supply branch (11) and a second gas supply branch (12) corresponding to the first gas supply branch (11). The first gas supply branch (11) and the second gas supply branch (12) are respectively connected to the output main pipe (2) through the electronic switching valve group (31). The electronic switching valve group (31) is used to cut off the connection between the first gas supply branch (11) and the output main pipe (2) and connect the second gas supply branch (12) to the output main pipe (2) when the pressure of the first gas supply branch (11) is detected to be lower than a preset threshold; or to cut off the connection between the second gas supply branch (12) and the output main pipe (2) and connect the first gas supply branch (11) to the output main pipe (2) when the pressure of the second gas supply branch (12) is detected to be lower than a preset threshold.

3. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 2, characterized in that: The first gas supply branch (11) and the second gas supply branch (12) are respectively connected to the output main pipe (2) through the mechanical switching valve group (32). The mechanical switching valve group (32) is used to cut off the connection between the first gas supply branch (11) and the output main pipe (2) and connect the second gas supply branch (12) to the output main pipe (1) when the pressure of the first gas supply branch (11) is lower than the pressure of the second gas supply branch (12) and the pressure difference reaches a preset value; or cut off the connection between the second gas supply branch (12) and the output main pipe (2) and connect the first gas supply branch (11) to the output main pipe (2) when the pressure of the second gas supply branch (12) is lower than the pressure of the first gas supply branch (11) and the pressure difference reaches a preset value.

4. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 2, characterized in that: The electronic switching valve assembly (31) includes a pressure sensor, a solenoid valve, and a controller. Pressure sensors are provided on both the first air supply branch (11) and the second air supply branch (12). The solenoid valve includes a first air inlet for connecting to the first air supply branch (11), a second air inlet for connecting to the second air supply branch (12), and an air outlet for connecting to the output main pipe (2). The controller is electrically connected to the pressure sensor and the solenoid valve respectively to control the switching state of the solenoid valve according to the signal of the pressure sensor.

5. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 3, characterized in that: The mechanical switching valve assembly (32) includes a mechanical valve body, a diaphragm disposed in the mechanical valve body, a piston fixedly connected to the diaphragm, a valve stem connected to the piston, and a return spring sleeved on the valve stem. The mechanical valve body is provided with a first pressure chamber connected to the first air supply branch (11) and a second pressure chamber connected to the second air supply branch (12). The diaphragm separates the first pressure chamber and the second pressure chamber. The valve stem is movably disposed in the mechanical valve body and is used to switch the connection state between the first air supply branch (11) or the second air supply branch (12) and the output main pipe (2) under the drive of the piston.

6. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 2, characterized in that: The first gas supply branch (11) is equipped with a high pressure shut-off valve (41) and a first pressure reducing valve (42), which are arranged sequentially along the airflow direction.

7. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 6, characterized in that: The first gas supply branch (11) is also provided with a one-way valve (43) and a safety valve (44). The one-way valve (43) is located at the inlet end of the high pressure shut-off valve (41), and the safety valve (44) is located at the outlet end of the first pressure reducing valve (42).

8. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 6, characterized in that: The first gas supply branch (11) is equipped with a pressure gauge (45), which includes a high pressure gauge (451) and a low pressure gauge (452). The high pressure gauge (451) is located on the side near the inlet end of the first pressure reducing valve (42), and the low pressure gauge (452) is located on the side near the outlet end of the first pressure reducing valve (42).

9. A busbar with a dual electronic and mechanical switching mechanism for electronic specialty gases according to claim 1, characterized in that: A second pressure reducing valve (46) is provided between the electronic switching valve group (31) and the output main pipe (2), and a third pressure reducing valve (47) is provided between the mechanical switching valve group (32) and the output main pipe (2).

10. A bus control method, characterized in that: Includes the following steps: S1: Initialize the gas supply system so that the first gas supply branch (11) and the second gas supply branch (12) are both in the gas supply standby state, and set the branch pressure monitoring threshold and the branch switching pressure difference threshold. S2: Use pressure sensors to collect real-time pressure data of the first gas supply branch (11) and the second gas supply branch (12) respectively; S3: If the pressure of the first gas supply branch (11) is lower than the branch pressure monitoring threshold and the pressure of the second gas supply branch (12) is not lower than the branch pressure monitoring threshold, then the electronic switching valve group (31) cuts off the first gas supply branch (11) and opens the second gas supply branch (12), so that the gas in the second gas supply branch (12) is delivered to the output main pipe (2); if the pressure of the second gas supply branch (12) is lower than the branch pressure monitoring threshold and the pressure of the first gas supply branch (11) is not lower than the branch pressure monitoring threshold, then the electronic switching valve group (31) cuts off the second gas supply branch (12) and opens the first gas supply branch (11), so that the gas in the first gas supply branch (11) is delivered to the output main pipe (2). S4: If the electronic switching valve group (31) fails, when the pressure of the first gas supply branch (11) is lower than the pressure of the second gas supply branch (12) and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve group (32) cuts off the first gas supply branch (11) and opens the second gas supply branch (12), so that the gas in the second gas supply branch (12) is delivered to the output main pipe (2); when the pressure of the second gas supply branch (12) is lower than the pressure of the first gas supply branch (11) and the pressure difference between the two reaches the branch switching pressure difference threshold, the mechanical switching valve group (32) cuts off the second gas supply branch (12) and opens the first gas supply branch (11), so that the gas in the first gas supply branch (11) is delivered to the output main pipe (2).

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