Power and energy synchronous detection method and system for pulse laser

Abstract

The invention relates to the technical field of pulse laser detection, in particular to a power and energy synchronous detection method and system for a pulse laser, and the method comprises the steps: dividing a laser pulse outputted by the pulse laser into a first light beam and a second light beam through an optical beam splitter, and generating light beam data; sampling the first light beam in real time based on a high-speed photoelectric detector to generate time domain waveform data; calculating an instantaneous power value, and generating a power measurement sequence; performing energy integral measurement on the second light beam based on a pyroelectric detector to generate a total energy value of a single laser pulse; performing time synchronization through time-to-digital conversion to generate a time synchronization result; correcting according to the beam splitting ratio to generate a theoretical energy value; difference comparison is carried out, and a measurement error calibration parameter is generated; and performing compensation correction to generate a laser pulse power curve and an accurate energy value. According to the invention, the accuracy and repeatability of pulse laser energy measurement are improved.

Description

Technical Field

[0001] This invention relates to the field of pulsed laser testing technology, and specifically to a method and system for synchronously detecting the power and energy of pulsed lasers. Background Technology

[0002] Pulsed lasers, due to their high peak power, short pulse width, and concentrated energy, are widely used in precision machining, laser ranging, nonlinear optics, medical treatment, and scientific research. In these applications, the instantaneous power distribution and single-pulse energy of the laser pulse are key parameters characterizing the laser's performance and operating status, and their measurement accuracy directly affects system control, process stability, and the reliability of experimental results.

[0003] In existing technologies, the measurement of laser pulse power and energy typically employs a separate detection scheme: on one hand, a high-speed photodetector combined with an oscilloscope is used to sample the laser pulse in the time domain, thereby obtaining the pulse waveform and calculating the instantaneous power change; on the other hand, a pyroelectric detector or energy meter is used to integrate the laser pulse to obtain the energy value of a single pulse or an average pulse. However, this type of separate measurement method generally suffers from the following shortcomings: there is a lack of a strict time synchronization mechanism between power measurement and energy measurement; the numerical integration result of the power waveform and the energy meter measurement result are usually treated as independent data, lacking error analysis and cross-calibration based on their consistency; in beam-splitting measurement scenarios, only the nominal beam splitting ratio is used for power and energy conversion, which easily introduces systematic measurement errors.

[0004] Therefore, it is necessary to design a method and system for synchronous detection of power and energy in pulsed lasers to solve the problems existing in the prior art. Summary of the Invention

[0005] In view of this, the present invention proposes a method and system for synchronous detection of power and energy of pulsed lasers, aiming to solve the problem of systematic measurement errors.

[0006] This invention proposes a method for synchronous detection of power and energy in pulsed lasers, comprising: The laser pulse output from the pulsed laser is split into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, generating beam data after splitting. Based on the split beam data, the first beam is sampled in real time using a high-speed photodetector to generate time-domain waveform data; based on the time-domain waveform data, the instantaneous power value is calculated to generate a power measurement sequence. Based on the beam data after beam splitting, the energy integration measurement of the second beam is performed using a pyroelectric detector to generate the total energy value of a single laser pulse. Based on the power measurement sequence and total energy value, time synchronization is performed through time-to-digital conversion to generate a time synchronization result; based on the time synchronization result and the power measurement sequence, numerical integration is performed, and correction is performed according to the beam splitting ratio to generate a theoretical energy value; Based on the theoretical energy value and the total energy value, a difference comparison is performed to generate measurement error calibration parameters; based on the measurement error calibration parameters, the power measurement sequence and the total energy value are compensated and corrected to generate a laser pulse power curve and a precise energy value.

[0007] Furthermore, when generating the split beam data, the following steps are included: The laser pulses output from the pulsed laser are guided to an optical beamsplitter with a 50:50 splitting ratio. Based on the physical characteristics of the optical beamsplitter, the splitting ratio of the first beam to the second beam is determined. The actual splitting ratio of the optical beamsplitter at the laser's operating wavelength is measured, generating splitting ratio calibration data. Based on the splitting ratio calibration data, the actual energy distribution of the first and second beams is calculated. Based on the actual energy distribution, the split beam data is generated, including the splitting ratio, energy attenuation coefficient, and optical path parameters.

[0008] Furthermore, when generating time-domain waveform data, the following steps are included: Based on the energy distribution in the split beam data, the gain parameter of the high-speed photodetector is adjusted; the first beam is guided to the photosensitive surface of the high-speed photodetector, and the first beam is sampled in real time. Based on the results of real-time sampling, the response delay and signal distortion of the high-speed photodetector are eliminated, and the time-domain waveform data is generated.

[0009] Furthermore, when calculating the instantaneous power value and generating the power measurement sequence, the following steps are included: Based on the voltage amplitude in the time-domain waveform data, a preliminary power value is generated using the voltage-to-power conversion coefficient. Based on the generated initial power value, noise filtering is performed to generate the filtered power value; Based on the beam splitting ratio in the split beam data, the filtered power value is proportionally corrected to generate a corrected power value. Based on the corrected power value, time axis alignment processing is performed to generate a time-aligned power value; Based on the time-aligned power values, a power measurement sequence containing time points and corresponding instantaneous power values ​​is formed.

[0010] Furthermore, when generating the total energy value of a single laser pulse, it includes: Based on the energy distribution in the split beam data, the measurement range of the pyroelectric detector is set; the second beam is guided to the photosensitive area of ​​the pyroelectric detector; the electrical signal output by the pyroelectric detector is amplified and filtered, and integrated to obtain the charge of a single laser pulse; the charge is converted into an energy value according to the calibration coefficient of the pyroelectric detector; and the energy value is converted to the total energy of the original laser pulse according to the split beam ratio in the split beam data to generate the total energy value of a single laser pulse.

[0011] Furthermore, based on the power measurement sequence and total energy value, time synchronization is performed through time-to-digital conversion. When generating the time synchronization result, the process includes: The triggering front of the laser pulse is extracted from the power measurement sequence as a time reference point; the corresponding triggering front is extracted from the energy measurement signal of the pyroelectric detector; the time difference between the two triggering fronts is measured by time-to-digital conversion; the time offset between the power measurement and the energy measurement is calculated based on the time difference; the power measurement sequence is time-axis corrected based on the time offset; and a time synchronization result including time alignment information is generated based on the time-axis corrected power measurement sequence and the total energy value.

[0012] Furthermore, when generating the theoretical energy value by performing numerical integration based on the time synchronization result and power measurement sequence, and correcting according to the beam splitting ratio, the process includes: Based on the time synchronization results, confirm the time correspondence between each data point in the power measurement sequence and the energy measurement. Based on the confirmed time correspondence, the power measurement sequence is resampled at equal intervals to generate a resampled power sequence; Based on the resampled power sequence, the trapezoidal numerical integration method is applied to perform integration to generate the integrated energy value; Based on the beam splitting ratio in the split beam data, the integral energy value is proportionally corrected to generate a corrected energy value. Based on the corrected energy value, perform baseline correction processing to generate a baseline corrected energy value; based on the baseline corrected energy value, generate a theoretical energy value.

[0013] Furthermore, when generating measurement error calibration parameters based on the difference comparison between the theoretical energy value and the total energy value, the following steps are included: Based on the theoretical energy value and the total energy value, the absolute difference between the two is calculated to generate an energy difference value; based on the energy difference value and the total energy value, the relative error percentage is calculated to generate an error percentage; based on the error percentage, the error characteristics of the measurement system are judged to generate an error characteristic judgment result; based on the error characteristic judgment result, the error correction coefficient is determined to generate a correction coefficient; based on the correction coefficient, measurement error calibration parameters are generated; the measurement error calibration parameters include a scaling factor and an offset.

[0014] Furthermore, when compensating and correcting the power measurement sequence and total energy value to generate the laser pulse power curve and accurate energy value, the following steps are included: Based on the scaling factor in the measurement error calibration parameters, the power measurement sequence is proportionally calibrated to generate a proportionally calibrated power sequence; based on the offset in the measurement error calibration parameters, the proportionally calibrated power sequence is offset-calibrated to generate an offset-calibrated power sequence; based on the offset-calibrated power sequence, smoothing is performed to generate a smoothed power sequence; based on the smoothed power sequence, a continuous laser pulse power curve is generated. Based on the measurement error calibration parameters, the total energy value is corrected to generate a corrected total energy value; based on the corrected total energy value, the accurate energy value is generated.

[0015] Compared with existing technologies, the advantages of this invention are as follows: By using an optical beamsplitter with a known beam splitter, the laser pulses output from the pulsed laser are simultaneously introduced into a high-speed photodetector and a pyroelectric detector, enabling parallel acquisition of power and energy measurements under the same pulse conditions. This avoids the inconsistency in measurement conditions caused by traditional time-division or independent measurement methods, improving the consistency and comparability of the detection results. The introduction of a time synchronization mechanism based on time-to-digital conversion ensures precise time alignment between the power measurement sequence and the energy measurement results, eliminating time offset issues caused by response delays and trigger differences between different detectors. This establishes a one-to-one correspondence between the power waveform and the energy measurement results on the time axis, providing a reliable foundation for subsequent accurate integration and calibration. By numerically integrating the power measurement sequence and combining it with beam splitter correction, a theoretical energy value is generated. This theoretical energy value is then compared with the total energy value measured by the pyroelectric detector, constructing a power-energy dual-channel cross-validation mechanism. This identifies systematic errors and drift errors in the measurement system, improving overall measurement accuracy. Measurement error calibration parameters are generated based on the difference between the theoretical energy value and the total energy value. These parameters are then used to compensate and correct the power measurement sequence and energy measurement results, achieving self-calibration and dynamic correction of power and energy. This reduces the impact of detector nonlinearity, gain drift, and optical beam splitting errors on the measurement results. During power measurement, compensation is applied to the gain, response delay, and signal distortion of the high-speed photodetector. Combined with noise filtering, time axis alignment, and smoothing, a high-time-resolution, continuous, and stable laser pulse power curve is obtained. During energy measurement, by combining the range setting of the pyroelectric detector, integral measurement, and beam splitting ratio conversion, high-precision single-pulse energy values ​​can be obtained. After error calibration, the accuracy and repeatability of energy measurement are further improved.

[0016] On the other hand, this application also provides a power and energy synchronization detection system for pulsed lasers, applied to the aforementioned power and energy synchronization detection method for pulsed lasers, comprising: The beam acquisition unit is configured to split the laser pulses output by the pulsed laser into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, thereby generating beam data after splitting. The first processing unit is configured to, based on the split beam data, sample the first beam in real time using a high-speed photodetector to generate time-domain waveform data; and, based on the time-domain waveform data, calculate the instantaneous power value and generate a power measurement sequence. The second processing unit is configured to perform energy integration measurement on the second beam based on the pyroelectric detector according to the beam splitting data, and generate the total energy value of a single laser pulse. The third processing unit is configured to perform time synchronization by time-to-digital conversion based on the power measurement sequence and the total energy value, and generate a time synchronization result; perform numerical integration based on the time synchronization result and the power measurement sequence, and perform correction based on the beam splitting ratio to generate a theoretical energy value; The data generation unit is configured to perform a difference comparison based on the theoretical energy value and the total energy value to generate measurement error calibration parameters; and to compensate and correct the power measurement sequence and the total energy value based on the measurement error calibration parameters to generate a laser pulse power curve and a precise energy value.

[0017] It is understandable that the above-mentioned method and system for synchronous detection of power and energy of pulsed lasers have the same beneficial effects, and will not be elaborated further here. Attached Figure Description

[0018] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 A flowchart of a power and energy synchronization detection method for a pulsed laser provided in an embodiment of the present invention; Figure 2 This is a functional block diagram of a power and energy synchronization detection system for pulsed lasers provided in an embodiment of the present invention. Detailed Implementation

[0019] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the disclosure to those skilled in the art. It should be noted that, unless otherwise specified, embodiments and features in the embodiments of the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0020] For this, please refer to Figure 1 As shown, this application proposes a method for synchronous detection of power and energy in a pulsed laser, comprising: S100: The laser pulse output from the pulsed laser is split into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, generating beam data after splitting. S200: Based on the beam data after beam splitting, the first beam is sampled in real time using a high-speed photodetector to generate time-domain waveform data; based on the time-domain waveform data, the instantaneous power value is calculated to generate a power measurement sequence; S300: Based on the beam data after beam splitting, the energy integration measurement of the second beam is performed using a pyroelectric detector to generate the total energy value of a single laser pulse; S400: Based on the power measurement sequence and total energy value, time synchronization is performed through time-to-digital conversion to generate a time synchronization result; based on the time synchronization result and the power measurement sequence, numerical integration is performed, and correction is performed according to the beam splitting ratio to generate a theoretical energy value; S500: Based on the theoretical energy value and the total energy value, a difference comparison is performed to generate measurement error calibration parameters; based on the measurement error calibration parameters, the power measurement sequence and the total energy value are compensated and corrected to generate a laser pulse power curve and a precise energy value.

[0021] The proposed method for synchronous power and energy detection of pulsed lasers solves the problems of asynchronous power and energy measurements and difficult calibration in traditional laser parameter measurement by employing innovative optical beam splitting and dual-detector collaborative measurement technology. It overcomes the limitations of traditional measurement techniques where power meters and energy meters operate independently and are difficult to calibrate, establishing an intrinsic link between power and energy through dual-path measurement of the same laser pulse. This method addresses three key issues in pulsed laser parameter measurement: first, calibration errors caused by asynchronous power and energy measurements; second, measurement distortion caused by the nonlinear response and bandwidth limitations of high-speed photodetectors; and third, the frequent calibrations and complex operations required in traditional methods.

[0022] Specifically, an optical beam splitter with a known splitting ratio is used to split the pulsed laser into two beams: one beam is time-domain sampled by a high-speed photodetector to obtain a high-temporal-resolution power waveform; the other beam is energy-integrated by a pyroelectric detector to obtain a precise total energy value. The key innovation lies in achieving time synchronization of the two measurement signals through time-to-digital conversion technology, and establishing a mathematical relationship between the power waveform and the total energy based on this, enabling precise calibration of the power measurement sequence. The time-domain waveform acquired by the high-speed photodetector is precisely sampled to generate a high-temporal-resolution power measurement sequence; simultaneously, the pyroelectric detector integrates the energy of the other beam to obtain the total energy value of a single pulse. Time-to-digital conversion technology is used to precisely measure the time offset between the two signals, achieving time synchronization between the power waveform and the energy measurement. Based on the synchronized data, the power measurement sequence is numerically integrated to generate a theoretical energy value, which is then compared with the actual energy value measured by the pyroelectric detector to calculate measurement error calibration parameters. These calibration parameters are used to compensate and correct the original power measurement sequence, generating a precise laser pulse power curve and energy value. By simultaneously acquiring the power waveform and total energy, and establishing a precise relationship between the two, self-calibrating measurements can be achieved, improving measurement accuracy and reliability. Furthermore, it is applicable to lasers with various pulse widths (from nanoseconds to femtoseconds) and energy ranges (from microjoules to joules).

[0023] The working process and principle of this application are as follows: A laser pulse output from a pulsed laser is guided to an optical beam splitter. The optical beam splitter splits the incident laser into a first beam and a second beam according to a preset splitting ratio (typically 50:50). The actual splitting ratio of the beam splitter at the laser's operating wavelength is accurately measured, and considering the reflection, transmission characteristics, and wavelength dependence of the optical elements, splitting ratio calibration data is generated. Based on the calibration data, the actual energy distribution of the first and second beams is calculated, providing a reference for subsequent measurements. The first beam is guided to a high-speed photodetector. According to the beam energy distribution, the gain parameters of the photodetector are pre-adjusted to avoid signal saturation or excessively low signal-to-noise ratio. The high-speed photodetector samples the optical signal in real time, with a sampling rate typically 1-10 GSa / s, sufficient to capture pulse details at the nanosecond or even picosecond level. Signal conditioning is performed to eliminate the photodetector's response delay and signal distortion, including eliminating signal tailing caused by circuit parasitic capacitance and compensating for slowed rise times due to bandwidth limitations. The conditioned signal forms high-fidelity time-domain waveform data, reflecting the instantaneous intensity changes of the laser pulse. Based on time-domain waveform data, the instantaneous power value is calculated: the voltage amplitude is converted into a preliminary power value using a voltage-to-power conversion coefficient; then, an adaptive filtering algorithm is applied to eliminate electronic noise and background interference; next, the power value is proportionally corrected according to the beam splitting ratio to restore the power level of the original laser pulse; finally, time axis alignment is performed to ensure the accuracy of the time reference for the power measurement sequence. The final result is a power measurement sequence containing time points and corresponding instantaneous power values, with a time resolution reaching the picosecond level. The second beam is guided to a pyroelectric detector. The measurement range of the pyroelectric detector is set according to the beam energy distribution to avoid overload or insufficient sensitivity. The pyroelectric detector integrates the energy of the light pulse, outputting a charge proportional to the energy. The output signal is amplified and filtered with low noise to eliminate environmental electromagnetic interference and 1 / f noise. Through precise integration calculations, the charge of a single laser pulse is obtained and converted into an energy value according to the calibration coefficient of the pyroelectric detector. Considering the beam splitting ratio, the measured energy is converted to the total energy of the original laser pulse to generate the total energy value of a single laser pulse, with a measurement accuracy of ±1%. Time synchronization between power measurement and energy measurement is achieved through time-to-digital conversion technology. The triggering front of the laser pulse is extracted from the power measurement sequence as a time reference point; the corresponding triggering front is extracted from the energy measurement signal of the pyroelectric detector; the time difference between the two triggering fronts is measured using a high-precision time-to-digital converter (resolution <10ps); the time offset between power measurement and energy measurement is calculated; and the power measurement sequence is time-axis corrected to ensure that the power waveform and energy measurement are precisely aligned in time.Based on the time synchronization results, numerical integration is performed on the power measurement sequence: confirming the time correspondence between each data point in the power measurement sequence and the energy measurement; resampling the power measurement sequence at equal intervals to ensure integration accuracy; applying the trapezoidal numerical integration method to perform integration calculations and generate integrated energy values; proportionally correcting the integrated energy values ​​according to the beam splitting ratio; performing baseline correction processing to eliminate the influence of dark current and background noise, generating theoretical energy values. The theoretical energy values ​​are compared with the actual energy values ​​measured by the pyroelectric detector, and the absolute difference between the two is calculated; the relative error percentage is calculated; error characteristics are analyzed to determine whether it is a fixed or random error; error correction coefficients are determined, including the scaling factor and offset; measurement error calibration parameters are generated. The calibration parameters are used to compensate and correct the original measurement data, performing proportional and offset corrections on the power measurement sequence; smoothing processing is performed to eliminate high-frequency noise; a continuous laser pulse power curve is generated; the total energy value is corrected to generate accurate energy values. The corrected power curve and energy values ​​show high consistency, achieving synchronous and accurate measurement of power and energy.

[0024] As a preferred embodiment, the specific implementation of this application is as follows: This method is implemented in the parameter measurement of a femtosecond laser. The laser output wavelength is 800nm, pulse width is 100fs, repetition frequency is 1kHz, and single pulse energy is 1mJ. A fused silica beam splitter with a beam splitting ratio of 50:50 is used, with an operating wavelength range of 400-1100nm and a beam splitting ratio stability of ±0.5%. First, the actual beam splitting ratio of the beam splitter at 800nm ​​wavelength is measured using a standard power meter and found to be 50.3:49.7, generating beam splitting ratio calibration data. The first beam is guided to a high-speed photodetector (model: New Focus 1811, bandwidth 12GHz, rise time 29ps). Based on the beam energy (approximately 0.5mJ), the detector gain is set to 50dB to avoid signal saturation. A high-speed oscilloscope (sampling rate 50GSa / s) samples the photodetector output in real time to acquire time-domain waveform data. Signal conditioning was implemented, pre-emphasis technology was applied to compensate for high-frequency attenuation, and adaptive filtering was used to eliminate electronic noise, eliminating a delay of approximately 15 ps. Based on the time-domain waveform, the instantaneous power value was calculated, the voltage amplitude was converted into a power value through a calibration coefficient, wavelet threshold filtering was applied to eliminate noise, the power value was corrected according to the beam splitting ratio, and time axis alignment was performed to generate a power measurement sequence containing 10,000 data points with a time resolution of 20 ps. The second beam was guided to a pyroelectric detector (model: Coherent J-25MB-HP, range 10μJ-2J, accuracy ±1%). The measurement range was set to 1 mJ, and the output signal of the pyroelectric detector was amplified with low noise (bandwidth 1MHz) and filtered. The charge of a single pulse was obtained through precise integration and converted into an energy value of 0.498 mJ according to the calibration coefficient. Considering the beam splitting ratio, the total energy of the original laser pulse was 0.992 mJ. Time synchronization was implemented by extracting the 50% rise time point of the pulses from the power measurement sequence as a time reference; the corresponding trigger point was extracted from the pyroelectric detector signal; the time difference was measured to be 12.3 ps using a time-to-digital converter (5 ps resolution); and time correction was performed on the power measurement sequence. Based on the synchronized data, numerical integration was performed on the power measurement sequence to confirm the time correspondence. Equal-interval resampling (5 ps interval) was performed, and the trapezoidal integration method was applied to generate an integrated energy value of 0.985 mJ. Considering the beam splitting ratio and baseline correction, the theoretical energy value was 0.990 mJ. Comparing the theoretical energy value (0.990 mJ) and the actual measured value (0.992 mJ), the relative error was calculated to be -0.202%, and the correction coefficients were determined: a scaling factor of 1.002 and an offset of -0.001 mJ. The correction coefficients were applied to compensate for the power measurement sequence, generating a corrected laser pulse power curve. The peak power was corrected from 10.2 MW to 10.22 MW; after correcting the total energy value, the accurate energy value was 0.994 mJ.Verified by third-party standard equipment, the measurement results obtained by this method deviate from the standard value by less than ±0.3%, which is superior to traditional independent measurement methods (typically with a deviation of ±2-5%). It can operate stably in the repetition frequency range of 10Hz-1MHz and is suitable for various pulsed lasers from nanosecond to femtosecond levels.

[0025] Through the above scheme, this application achieves synchronous and accurate measurement of pulsed laser power and energy, transforming traditional separate measurement into integrated collaborative measurement, and solving the calibration problem caused by asynchronous power-energy measurement; picosecond-level time synchronization is achieved through time-to-digital conversion technology, ensuring accurate correspondence between power waveform and energy measurement; an intrinsic power-energy relationship based on the same laser pulse is established, realizing self-calibration measurement and improving measurement accuracy and reliability; the nonlinear response and bandwidth limitations of high-speed photodetectors are overcome, and the power waveform is calibrated through accurate energy measurement using a pyroelectric detector, generating a high-fidelity power curve; the measurement process is simplified, calibration steps are reduced, and measurement efficiency is improved.

[0026] This application further proposes methods for generating beam data after beam splitting, including: The laser pulses output from the pulsed laser are guided to an optical beam splitter with a 50:50 splitting ratio. Based on the physical characteristics of the optical beam splitter, the splitting ratio of the first beam to the second beam is determined. The actual splitting ratio of the optical beam splitter at the laser operating wavelength is measured, and splitting ratio calibration data is generated. Based on the splitting ratio calibration data, the actual energy distribution of the first beam and the second beam is calculated. Based on the actual energy distribution, the split beam data is generated, which includes the splitting ratio, energy attenuation coefficient, and optical path parameters.

[0027] Specifically, a precise beam splitting ratio calibration process was implemented. A standard power meter was used to measure the transmittance and reflectance of the beam splitter at the actual operating wavelength of the laser. Considering the influence of the incident angle distribution, a multi-point measurement method was employed to obtain the average beam splitting ratio. Insertion losses of optical elements were measured, including surface reflection loss and material absorption loss, to generate an energy attenuation coefficient. Optical path parameters, including the type, thickness, refractive index, and arrangement order of each optical element, were recorded for subsequent optical path difference calculations. During the beam splitting ratio calibration process, a cross-validation method was employed, using two standard devices based on different principles (a thermopile power meter and a photodiode power meter) for comparative measurements to eliminate errors from a single device. Multi-cycle measurements were implemented to eliminate the influence of random fluctuations. A temperature control device was applied to stabilize the temperature of the optical elements and reduce thermal drift. Calibration data was stored in non-volatile memory and automatically loaded before each measurement to ensure the accuracy and consistency of the beam splitting ratio data. Implement dynamic monitoring of the beam splitting ratio. During continuous measurement, periodically verify the stability of the beam splitting ratio using a reference beam. When a change in the beam splitting ratio is detected to exceed a threshold, automatically trigger the recalibration process. Record the trend of the beam splitting ratio over time to predict the impact of optical component aging on the measurement.

[0028] Through the above technical solutions, this application solves the problem of large differences between the actual beam splitting ratio and the nominal value of the optical beam splitter, and realizes accurate measurement and dynamic monitoring of the beam splitting ratio; through multi-factor compensation and cross-validation, it improves the accuracy and stability of the beam splitting ratio measurement; and provides a reliable basis for the accurate correlation between power and energy, reducing measurement errors.

[0029] This application further proposes methods for generating time-domain waveform data, including: Based on the energy distribution in the split beam data, the gain parameters of the high-speed photodetector are adjusted; the first beam is guided to the photosensitive surface of the high-speed photodetector, and the first beam is sampled in real time. Based on the results of real-time sampling, the response delay and signal distortion of the high-speed photodetector are eliminated, and time-domain waveform data is generated.

[0030] Specifically, dynamic gain adjustment and signal conditioning techniques were implemented, automatically calculating the optimal gain setting based on the energy distribution of the split beam. For high-energy pulses, the gain was reduced to prevent saturation; for low-energy pulses, the gain was increased to enhance the signal-to-noise ratio. Gain adjustment considered the nonlinear characteristics of the photodetector, applying pre-distortion technology to compensate for the compression effect in the high-level region. During signal acquisition, a high-sampling-rate oscilloscope (typically 5-100 GSa / s) was used for real-time sampling, with the sampling rate dynamically adjusted according to the pulse width to ensure at least 10 sampling points per pulse. Trigger optimization was implemented, employing adaptive threshold triggering technology to avoid false or missed triggers due to noise. To reduce sampling jitter, multi-cycle averaging was applied, averaging 10-100 pulse waveforms for lasers with stable repetition frequencies to improve the signal-to-noise ratio. The signal conditioning process employs multi-stage distortion correction, measuring the frequency response characteristics of the photodetector and constructing a transfer function model. Frequency-domain deconvolution techniques are applied to compensate for pulse broadening caused by bandwidth limitations. Signal tailing caused by circuit parasitic parameters is eliminated through pre-emphasis and de-emphasis techniques. Response delay is corrected by measuring a standard pulse of known width to determine the delay amount and performing time-axis correction. Real-time quality monitoring is implemented, continuously monitoring indicators such as signal-to-noise ratio, saturation, and distortion during signal acquisition. When anomalies are detected, measurement parameters are automatically adjusted or the user is prompted to check. Signal quality indicators are recorded for subsequent data reliability assessment.

[0031] Through the above technical solutions, this application solves the problems of gain matching, signal distortion and time delay in high-speed photodetectors for pulsed laser measurement; through dynamic gain adjustment and multi-level signal conditioning, the fidelity and time accuracy of time-domain waveform data are improved.

[0032] This application further proposes methods for calculating instantaneous power values ​​and generating power measurement sequences, including: Based on the voltage amplitude in the time-domain waveform data, a preliminary power value is generated using the voltage-to-power conversion coefficient. Based on the generated initial power value, noise filtering is performed to generate the filtered power value; Based on the beam splitting ratio in the split beam data, the filtered power value is proportionally corrected to generate a corrected power value. Based on the corrected power value, time axis alignment processing is performed to generate a time-aligned power value; Based on the time-aligned power values, a power measurement sequence containing time points and corresponding instantaneous power values ​​is formed.

[0033] Specifically, a multi-stage power calculation process was implemented, applying a dynamically calibrated voltage-to-power conversion coefficient that considers the temperature dependence and aging effects of the photodetector, and is compensated in real time through a built-in temperature sensor and usage time recording. Multi-point calibration was performed, using a standard light source of known power to calibrate the conversion coefficient at different power levels, constructing a nonlinear correction curve to eliminate compression effects in the high-power region and nonlinearity in the low-power region. Noise filtering employed an adaptive wavelet threshold algorithm, dynamically adjusting the wavelet threshold according to the local characteristics of the signal; a stricter threshold was used to eliminate noise in the high-frequency region, while a looser threshold was used in the low-frequency region to preserve signal details. The algorithm also considered prior knowledge of the pulse shape, protecting the rapidly changing portions of the pulse's rise and fall edges. For lasers with stable repetition frequencies, multi-cycle averaging filtering was implemented to further improve the signal-to-noise ratio. The proportional correction process considered the wavelength and angle dependence of the beam splitting ratio, accurately converting the power value based on the actual beam splitting ratio in the split beam data. For broadband laser pulses, the variation of the beam splitting ratio with wavelength was considered, and spectral response correction was applied. High-precision time calibration is implemented using time axis alignment, employing a standard pulse generator to measure time delays across the entire measurement link, including photodetector response delay, cable transmission delay, and oscilloscope processing delay. For ultrashort pulses, time-domain reflectometry (TDAR) technology is used to accurately measure the time delays of each component. Time axis calibration considers the effects of temperature variations, with a built-in temperature sensor compensating for thermal drift in real time. The final generated power measurement sequence uses a high-density storage format, with time points in picoseconds to ensure accurate representation of ultrashort pulses; power values ​​are stored in floating-point format, retaining sufficient significant digits; the sequence includes quality markers to indicate the reliability of each data point.

[0034] Through the above technical solutions, this application solves the problems of nonlinearity, noise interference, beam ratio error and time axis offset in voltage-to-power conversion; through multi-stage precise correction, it improves the accuracy and reliability of power measurement sequence.

[0035] This application further proposes that when generating the total energy value of a single laser pulse, the following should be included: Based on the energy distribution in the split beam data, the measurement range of the pyroelectric detector is set; the second beam is guided to the photosensitive area of ​​the pyroelectric detector; the electrical signal output by the pyroelectric detector is amplified and filtered, and integrated to obtain the charge of a single laser pulse; the charge is converted into an energy value according to the calibration coefficient of the pyroelectric detector; and the energy value is converted to the total energy of the original laser pulse according to the split beam ratio in the split beam data to generate the total energy value of a single laser pulse.

[0036] Specifically, a precise energy measurement process was implemented, automatically selecting the optimal measurement range based on the energy distribution of the split beam. Pyroelectric detectors typically have multiple range settings; the range selected to place the signal at approximately 80% of its range is chosen to achieve the best signal-to-noise ratio. For measurements with ultra-wide dynamic ranges, multi-range combination measurements were implemented, using different range settings for individual pulses and fusing the results. The signal processing involved multi-level optimization, employing a low-noise preamplifier with a noise level below 1nV / √Hz to ensure accurate measurement of weak signals; applying a bandpass filter to suppress 1 / f noise and high-frequency interference, with the bandwidth dynamically adjusted according to the laser repetition frequency; implementing baseline correction to eliminate thermal drift and 1 / f noise from the pyroelectric element; and applying a temperature compensation algorithm to adjust the measurement results in real time based on readings from the built-in temperature sensor. For high-repetition-frequency pulses, thermal residual compensation was implemented, predicting and compensating for the impact of the thermal state of the previous pulse on the current pulse. The integration operation employs high-precision digital integration technology, using a 24-bit analog-to-digital converter to sample the pyroelectric detector output, with the sampling rate dynamically adjusted according to the pulse width. An adaptive integration window is applied to automatically detect the pulse start and end points, avoiding interference from background noise. Multi-cycle averaging is implemented; for lasers with stable repetition frequencies, averaging multiple pulses improves the signal-to-noise ratio. Digital lock-in amplification technology is used to further enhance the detection capability of weak signals. The energy conversion process considers multiple correction factors: wavelength correction coefficients are applied to compensate for the wavelength dependence of the pyroelectric detector's responsivity; spatial uniformity correction is applied to account for the influence of beam divergence and incident angles on the measurement; transmittance and reflection losses of the optical window are compensated; and the aging effect of the pyroelectric elements is considered, with calibration coefficients dynamically adjusted according to usage time and environmental conditions. Based on the actual beam splitting ratio in the split beam data, the measured energy is converted to the total energy of the original laser pulse. The conversion process considers the insertion loss and reflection loss of optical elements to ensure the accuracy of the total energy value.

[0037] Through the above technical solutions, this application solves the problems of wavelength dependence, thermal residue and environmental interference in laser energy measurement using pyroelectric detectors; through precise signal processing and multi-factor correction, it improves the accuracy and stability of energy measurement.

[0038] This application further proposes a method for time synchronization based on a power measurement sequence and total energy value, using time-to-digital conversion to generate a time synchronization result, including: The triggering front of the laser pulse is extracted from the power measurement sequence as a time reference point; the corresponding triggering front is extracted from the energy measurement signal of the pyroelectric detector; the time difference between the two triggering fronts is measured by time-to-digital conversion; the time offset between the power measurement and the energy measurement is calculated based on the time difference; the power measurement sequence is time-axis corrected based on the time offset; and a time synchronization result including time alignment information is generated based on the time-axis corrected power measurement sequence and the total energy value.

[0039] Specifically, high-precision time synchronization technology was implemented, employing a unified trigger source and using the same laser pulse to trigger both measurements, eliminating time offsets caused by differences in trigger sources. The trigger signal is transmitted via a low-jitter cable, ensuring the time difference between the two received trigger signals is less than 10 ps. High-precision algorithms are used for trigger front extraction. For power measurement sequences, a high-order interpolation algorithm is used to accurately locate the pulse front between sampling points, achieving a positioning accuracy of 1 / 100th of the sampling interval. Adaptive threshold technology is applied, dynamically adjusting the front detection threshold based on the pulse shape. Considering the nonlinearity of the pulse rise edge, curve fitting is used to improve positioning accuracy. For pyroelectric detector signals, the energy integration start point is identified as the corresponding trigger point. Considering the delay caused by the pyroelectric effect, a model is used to predict the actual arrival time of the optical pulse. Time difference measurement employs time-to-digital conversion technology, using a high-precision time-to-digital converter (TDC) with a resolution of up to 5 ps to measure the time difference between the two trigger fronts. The TDC uses dual vernier technology to eliminate quantization errors; multiple measurements are averaged to reduce random errors; and temperature compensation is applied to eliminate the effects of thermal drift. Time axis calibration implements precise time offset compensation by shifting the power measurement sequence along the time axis based on the measured time difference. For nonlinear time offsets, polynomial correction is applied. Considering oscilloscope sampling clock jitter, time-domain resampling technology is used. The calibration process preserves the high time resolution of the original data without introducing additional interpolation errors. Synchronization quality assessment is performed by calculating the relative error between the synchronized power integral value and the pyroelectric measurement value to evaluate time synchronization quality. When the error exceeds a threshold, a resynchronization process is automatically triggered. Synchronization quality indicators are recorded for subsequent data reliability assessment. Synchronization stability monitoring is also implemented to track long-term trends in time offset and predict potential synchronization failures.

[0040] Through the above technical solutions, this application solves the problem of time synchronization in power and energy measurement, achieving picosecond-level time synchronization accuracy; by using high-precision trigger front extraction and time-to-digital conversion, the accuracy and stability of time synchronization are improved.

[0041] This application further proposes a method for generating theoretical energy values ​​by performing numerical integration based on time synchronization results and power measurement sequences, and correcting according to the beam splitting ratio, including: Based on the time synchronization results, confirm the time correspondence between each data point in the power measurement sequence and the energy measurement. Based on the confirmed time correspondence, the power measurement sequence is resampled at equal intervals to generate a resampled power sequence; Based on the resampled power sequence, the trapezoidal numerical integration method is applied to perform integration to generate the integrated energy value; Based on the beam splitting ratio in the split beam data, the integral energy value is proportionally corrected to generate a corrected energy value. Based on the corrected energy value, perform baseline correction processing to generate a baseline corrected energy value; based on the baseline corrected energy value, generate a theoretical energy value.

[0042] Specifically, a precise numerical integration process was implemented, accurately aligning the time bases of the power measurement sequence and energy measurement based on the time synchronization results. The correspondence between each data point in the power measurement sequence and the energy measurement was confirmed, considering the relative time offset and sampling clock differences between the two paths. For ultra-short pulses, particular attention was paid to the precise alignment of the pulse start and end points to ensure accurate integration intervals. High-precision interpolation techniques were employed for equally spaced resampling. Based on the timestamps and amplitudes of the original sampling points, cubic spline interpolation or sinc interpolation was applied to resample, generating equally spaced resampled power sequences. The interpolation process considered the physical characteristics of the pulse, protecting the rapidly changing portions of the rising and falling edges to avoid over-smoothing. An improved trapezoidal integration method was applied to the resampled power sequences to calculate the pulse energy. To reduce boundary effects, an adaptive integration interval was used to automatically detect the pulse start and end points, avoiding interference from background noise. For ultra-short pulses, higher-order integration methods (such as Simpson's method) were applied to improve integration accuracy. Proportional correction considers the precise value of the beam splitting ratio and proportionally corrects the integrated energy value based on the actual beam splitting ratio in the split beam data. The correction process considers the wavelength and angle dependence of the optical elements, applying spectral response correction. Baseline correction involves multi-stage processing: identifying the baseline region (signal without laser pulses) in the power measurement sequence, calculating the average baseline value; applying trend analysis to eliminate slowly changing baseline drift; and subtracting the baseline contribution from the integration result to generate the baseline-corrected energy value. Integration quality monitoring is implemented, calculating the relative standard deviation of the integration result to assess integration stability; comparing energy values ​​in different integration intervals to detect abnormal pulses; and recording integration quality indicators for subsequent data reliability assessment.

[0043] Through the above technical solutions, this application solves the problems of sampling non-uniformity, noise interference, beam splitting ratio error and baseline drift in the numerical integration of power measurement sequences; and improves the accuracy and reliability of theoretical energy values ​​through high-precision resampling and improved integration methods.

[0044] This application further proposes that, when generating measurement error calibration parameters based on a difference comparison between the theoretical energy value and the total energy value, the following should be included: Based on the theoretical energy value and the total energy value, the absolute difference between the two is calculated to generate the energy difference value; based on the energy difference value and the total energy value, the relative error percentage is calculated to generate the error percentage value; based on the error percentage value, the measurement error characteristics are determined to generate the error characteristic judgment result; based on the error characteristic judgment result, the error correction coefficient is determined to generate the correction coefficient; based on the correction coefficient, the measurement error calibration parameter is generated; the measurement error calibration parameter includes a scaling factor and an offset.

[0045] Specifically, an intelligent difference analysis process was implemented to calculate the absolute difference and relative error percentage between the theoretical energy value and the total energy value. The relative error percentage considers the influence of energy levels and uses a weighted calculation, assigning higher weights to low-energy regions because the relative error is typically larger in low-energy regions. Error characteristic judgment employs multi-dimensional analysis: analyzing the temporal characteristics of the error to determine whether it is random fluctuation or a trend; analyzing the relationship between the error and energy levels to determine if nonlinear errors exist; and analyzing the correlation between the error and environmental conditions (temperature, humidity) to identify environmental sensitivity. Correction coefficient determination employs adaptive learning, determining the optimal correction strategy based on the error characteristic judgment results. For linear errors, proportional factor correction is mainly applied; for fixed offset errors, offset correction is applied; and for nonlinear errors, piecewise correction or polynomial correction is applied. Measurement error calibration parameter generation uses a dynamic weighting mechanism, dynamically adjusting weights based on the quality and reliability of the error data, assigning higher weights to high-quality data; considering historical error trends, an exponential smoothing algorithm is used to generate smooth calibration parameters; and calibration parameter stability monitoring is implemented, triggering a verification process when parameter changes exceed a threshold. Perform calibration parameter verification, using a verification dataset to test the effectiveness of the calibration parameters; calculate the error distribution before and after calibration to evaluate the calibration effect; automatically adjust the calibration strategy when the calibration effect does not meet the requirements. Perform error source analysis to identify the main factors causing the error, such as inaccurate beam splitting ratio, changes in photodetector responsivity, and time synchronization errors; generate an error contribution rate analysis report to guide maintenance and improvement.

[0046] Through the above technical solutions, this application solves the problems of error source identification, dynamic characteristics, and calibration strategies in the analysis of differences between theoretical energy values ​​and measured values; through intelligent difference analysis and adaptive correction, it improves the accuracy and adaptability of measurement error calibration.

[0047] This application further proposes methods for compensating and correcting the power measurement sequence and total energy value to generate laser pulse power curves and accurate energy values, including: Based on the scaling factor in the measurement error calibration parameters, the power measurement sequence is proportionally calibrated to generate a proportionally calibrated power sequence; based on the offset in the measurement error calibration parameters, the proportionally calibrated power sequence is offset-calibrated to generate an offset-calibrated power sequence; based on the offset-calibrated power sequence, smoothing is performed to generate a smoothed power sequence; based on the smoothed power sequence, a continuous laser pulse power curve is generated. Based on the measurement error calibration parameters, the total energy value is corrected to generate a corrected total energy value; based on the corrected total energy value, the accurate energy value is generated.

[0048] Specifically, a multi-stage calibration process was implemented, applying a scaling factor to proportionally calibrate the power measurement sequence. The scaling calibration takes into account the nonlinear characteristics of the photodetector, employing piecewise or polynomial calibration to ensure accuracy. Offset calibration performs precise baseline adjustment, correcting the proportionally calibrated power sequence based on the offset to ensure zero output at zero input. Offset calibration considers the effects of temperature drift and 1 / f noise, applying dynamic baseline tracking technology. Smoothing employs adaptive filtering, dynamically adjusting smoothing parameters based on the local characteristics of the power curve; looser smoothing is used in high-frequency regions (e.g., pulse rise time), while tighter smoothing is used in low-frequency regions. Wavelet threshold filtering is applied to preserve key pulse features while eliminating noise; the physical characteristics of the pulse are considered to protect the rapidly changing portions of the rise and fall times. High-precision interpolation is implemented for laser pulse power curve generation, performing high-order interpolation on the smoothed power sequence to generate a continuous power curve with a time resolution reaching picosecond levels. Physical constraints are applied to ensure the power curve conforms to energy conservation and physical laws; curve quality assessment is performed, calculating smoothness and fidelity indices. Total energy value calibration considers multiple factors. Based on measurement error calibration parameters, the total energy value is calibrated, taking into account the wavelength dependence and nonlinear characteristics of the pyroelectric detector. Temperature compensation is applied to eliminate the influence of ambient temperature changes. Confidence assessment of the calibrated energy value is performed, generating confidence intervals. Consistency verification of the calibrated data is conducted by numerically integrating the calibrated power curve to verify the consistency between the integration result and the calibrated energy value. Relative error is calculated to evaluate the calibration effect. When inconsistency exceeds a threshold, calibration parameters are automatically adjusted. The calibration process is made traceable by recording the parameters and effects of each calibration, generating a calibration log. Historical calibration analysis is performed to track the long-term trends of calibration parameters. A calibration report is generated, including comparative data before and after calibration and a quality assessment.

[0049] Through the above technical solutions, this application solves the problems of noise introduction, detail preservation, and consistency maintenance in power measurement sequence compensation and correction; through multi-stage precise correction and smoothing processing, it improves the quality of laser pulse power curves and accurate energy values; and ensures the consistency of power and energy measurements.

[0050] In another preferred embodiment based on the above embodiments, see [reference] Figure 2 As shown, this invention also proposes a power and energy synchronization detection system for pulsed lasers, applied to a power and energy synchronization detection method for pulsed lasers, comprising: The beam acquisition unit is configured to split the laser pulses output by the pulsed laser into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, thereby generating beam data after splitting. The first processing unit is configured to sample the first beam in real time based on the beam data after beam splitting using a high-speed photodetector, generate time-domain waveform data, calculate the instantaneous power value based on the time-domain waveform data, and generate a power measurement sequence. The second processing unit is configured to perform energy integration measurement on the second beam based on the pyroelectric detector according to the beam data after beam splitting, and generate the total energy value of a single laser pulse. The third processing unit is configured to perform time synchronization by time-to-digital conversion based on the power measurement sequence and the total energy value, and generate a time synchronization result; perform numerical integration based on the time synchronization result and the power measurement sequence, and perform correction based on the beam splitting ratio to generate a theoretical energy value; The data generation unit is configured to compare the theoretical energy value and the total energy value to generate measurement error calibration parameters; based on the measurement error calibration parameters, it compensates and corrects the power measurement sequence and the total energy value to generate a laser pulse power curve and a precise energy value.

[0051] In summary, by using an optical beamsplitter with a known beam splitter to simultaneously introduce the laser pulses output from the pulsed laser into both a high-speed photodetector and a pyroelectric detector, parallel acquisition of power and energy measurements is achieved under the same pulse condition. This avoids the inconsistency in measurement conditions caused by traditional time-division or independent measurement methods, improving the consistency and comparability of the detection results. The introduction of a time synchronization mechanism based on time-to-digital conversion precisely aligns the power measurement sequence with the energy measurement results, eliminating time offset issues caused by response delays and trigger differences between different detectors. This establishes a one-to-one correspondence between the power waveform and the energy measurement results on the time axis, providing a reliable foundation for subsequent accurate integration and calibration. By numerically integrating the power measurement sequence and combining it with beam splitter ratio correction, a theoretical energy value is generated. This theoretical energy value is then compared with the total energy value measured by the pyroelectric detector, constructing a power-energy dual-channel cross-validation mechanism. This identifies systematic and drift errors in the measurement system, improving overall measurement accuracy. Measurement error calibration parameters are generated based on the difference between the theoretical energy value and the total energy value. These parameters are then used to compensate and correct the power measurement sequence and energy measurement results, achieving self-calibration and dynamic correction of power and energy. This reduces the impact of detector nonlinearity, gain drift, and optical beam splitting errors on the measurement results. During power measurement, compensation is applied to the gain, response delay, and signal distortion of the high-speed photodetector. Combined with noise filtering, time axis alignment, and smoothing, a high-time-resolution, continuous, and stable laser pulse power curve is obtained. During energy measurement, by combining the range setting of the pyroelectric detector, integral measurement, and beam splitting ratio conversion, high-precision single-pulse energy values ​​can be obtained. After error calibration, the accuracy and repeatability of energy measurement are further improved.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of the present invention. Any modifications or equivalent substitutions that do not depart from the spirit and scope of the present invention should be covered within the protection scope of the claims of the present invention.

Claims

1. A method for synchronously detecting the power and energy of a pulsed laser, characterized in that, include: The laser pulse output from the pulsed laser is split into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, generating beam data after splitting. Based on the split beam data, the first beam is sampled in real time using a high-speed photodetector to generate time-domain waveform data; based on the time-domain waveform data, the instantaneous power value is calculated to generate a power measurement sequence. Based on the beam data after beam splitting, the energy integration measurement of the second beam is performed using a pyroelectric detector to generate the total energy value of a single laser pulse. Based on the power measurement sequence and total energy value, time synchronization is performed through time-to-digital conversion to generate a time synchronization result; Numerical integration is performed based on the time synchronization results and power measurement sequence, and correction is performed according to the beam splitting ratio to generate a theoretical energy value; Based on the theoretical energy value and the total energy value, a difference comparison is performed to generate measurement error calibration parameters; based on the measurement error calibration parameters, the power measurement sequence and the total energy value are compensated and corrected to generate a laser pulse power curve and a precise energy value.

2. The method for synchronous detection of power and energy in a pulsed laser according to claim 1, characterized in that, When generating the split beam data, the following are included: The laser pulses output from the pulsed laser are guided to an optical beamsplitter with a 50:50 splitting ratio. Based on the physical characteristics of the optical beamsplitter, the splitting ratio of the first beam to the second beam is determined. The actual splitting ratio of the optical beamsplitter at the laser's operating wavelength is measured, generating splitting ratio calibration data. Based on the splitting ratio calibration data, the actual energy distribution of the first and second beams is calculated. Based on the actual energy distribution, the split beam data is generated, including the splitting ratio, energy attenuation coefficient, and optical path parameters.

3. The method for synchronous detection of power and energy in a pulsed laser according to claim 2, characterized in that, When generating time-domain waveform data, the following are included: Based on the energy distribution in the split beam data, the gain parameter of the high-speed photodetector is adjusted; the first beam is guided to the photosensitive surface of the high-speed photodetector, and the first beam is sampled in real time. Based on the results of real-time sampling, the response delay and signal distortion of the high-speed photodetector are eliminated, and the time-domain waveform data is generated.

4. The method for synchronous detection of power and energy in a pulsed laser according to claim 3, characterized in that, When calculating instantaneous power values ​​and generating power measurement sequences, the following steps are included: Based on the voltage amplitude in the time-domain waveform data, a preliminary power value is generated using the voltage-to-power conversion coefficient. Based on the generated initial power value, noise filtering is performed to generate the filtered power value; Based on the beam splitting ratio in the split beam data, the filtered power value is proportionally corrected to generate a corrected power value. Based on the corrected power value, time axis alignment processing is performed to generate a time-aligned power value; Based on the time-aligned power values, a power measurement sequence containing time points and corresponding instantaneous power values ​​is formed.

5. The method for synchronous detection of power and energy in a pulsed laser according to claim 4, characterized in that, The total energy value for generating a single laser pulse includes: Based on the energy distribution in the split beam data, the measurement range of the pyroelectric detector is set; the second beam is guided to the photosensitive area of ​​the pyroelectric detector; the electrical signal output by the pyroelectric detector is amplified and filtered, and integrated to obtain the charge of a single laser pulse; the charge is converted into an energy value according to the calibration coefficient of the pyroelectric detector; and the energy value is converted to the total energy of the original laser pulse according to the split beam ratio in the split beam data to generate the total energy value of a single laser pulse.

6. The method for synchronous detection of power and energy in a pulsed laser according to claim 5, characterized in that, Based on the power measurement sequence and total energy value, time synchronization is performed through time-to-digital conversion. The time synchronization result is generated by including: The triggering front of the laser pulse is extracted from the power measurement sequence as a time reference point; the corresponding triggering front is extracted from the energy measurement signal of the pyroelectric detector; the time difference between the two triggering fronts is measured by time-to-digital conversion; the time offset between the power measurement and the energy measurement is calculated based on the time difference; the power measurement sequence is time-axis corrected based on the time offset; and a time synchronization result including time alignment information is generated based on the time-axis corrected power measurement sequence and the total energy value.

7. The method for synchronous detection of power and energy in a pulsed laser according to claim 6, characterized in that, When generating the theoretical energy value by performing numerical integration based on the time synchronization result and power measurement sequence, and correcting according to the beam splitting ratio, the process includes: Based on the time synchronization results, confirm the time correspondence between each data point in the power measurement sequence and the energy measurement. Based on the confirmed time correspondence, the power measurement sequence is resampled at equal intervals to generate a resampled power sequence; Based on the resampled power sequence, the trapezoidal numerical integration method is applied to perform integration to generate the integrated energy value; Based on the beam splitting ratio in the split beam data, the integral energy value is proportionally corrected to generate a corrected energy value. Based on the corrected energy value, perform baseline correction processing to generate a baseline corrected energy value; based on the baseline corrected energy value, generate a theoretical energy value.

8. The method for synchronous detection of power and energy in a pulsed laser according to claim 7, characterized in that, When generating measurement error calibration parameters based on the theoretical energy value and the total energy value, a difference comparison is performed, including: Based on the theoretical energy value and the total energy value, the absolute difference between the two is calculated to generate an energy difference value; based on the energy difference value and the total energy value, the relative error percentage is calculated to generate an error percentage; based on the error percentage, the error characteristics of the measurement system are judged to generate an error characteristic judgment result; based on the error characteristic judgment result, the error correction coefficient is determined to generate a correction coefficient; based on the correction coefficient, measurement error calibration parameters are generated; the measurement error calibration parameters include a scaling factor and an offset.

9. The method for synchronous detection of power and energy in a pulsed laser according to claim 8, characterized in that, When compensating and correcting the power measurement sequence and total energy value to generate the laser pulse power curve and accurate energy value, the following steps are included: Based on the scaling factor in the measurement error calibration parameters, the power measurement sequence is proportionally calibrated to generate a proportionally calibrated power sequence; based on the offset in the measurement error calibration parameters, the proportionally calibrated power sequence is offset-calibrated to generate an offset-calibrated power sequence; based on the offset-calibrated power sequence, smoothing is performed to generate a smoothed power sequence; based on the smoothed power sequence, a continuous laser pulse power curve is generated. Based on the measurement error calibration parameters, the total energy value is corrected to generate a corrected total energy value; based on the corrected total energy value, the accurate energy value is generated.

10. A power and energy synchronization detection system for a pulsed laser, used in applying the power and energy synchronization detection method for a pulsed laser as described in any one of claims 1-9, characterized in that, include: The beam acquisition unit is configured to split the laser pulses output by the pulsed laser into a first beam and a second beam using an optical beam splitter with a known beam splitting ratio, thereby generating beam data after splitting. The first processing unit is configured to sample the first beam in real time based on a high-speed photodetector according to the beam splitting data, and generate time-domain waveform data. Based on the time-domain waveform data, calculate the instantaneous power value and generate a power measurement sequence; The second processing unit is configured to perform energy integration measurement on the second beam based on the pyroelectric detector according to the beam splitting data, and generate the total energy value of a single laser pulse. The third processing unit is configured to perform time synchronization based on the power measurement sequence and the total energy value through time-to-digital conversion, and generate a time synchronization result. Numerical integration is performed based on the time synchronization results and power measurement sequence, and correction is performed according to the beam splitting ratio to generate a theoretical energy value; The data generation unit is configured to perform a difference comparison based on the theoretical energy value and the total energy value to generate measurement error calibration parameters; and to compensate and correct the power measurement sequence and the total energy value based on the measurement error calibration parameters to generate a laser pulse power curve and a precise energy value.

Images