Vibration actuator and contact input device

Abstract

A vibration actuator is provided with: an electromagnet in which a flat annular coil is laminated on a plate surface of a plate-shaped magnetic core; a magnetic member having a lower surface facing the coil from above; a spacer disposed on the lower surface on the outside of the coil and separating the magnetic member from the electromagnet in the vertical direction; and an elastic support part which is disposed outside the coil, connects the magnetic core and the spacer, and vibrates by causing one of the magnetic member and the electromagnet to move so as to approach the other by means of a magnetic force generated by energizing the coil.

Description

Technical Field

[0001] The present invention relates to a vibration actuator and a contact-type input device having the vibration actuator. Background Technology

[0002] Previously, for the fingertips of an operator that come into contact with the display screen shown on the touch panel, which is a sensing panel, a structure that provides vibration by a vibration actuator is known (Patent Document 1).

[0003] Patent Document 1 discloses a portable terminal device in which a vibration actuator is mounted on the back of a touch panel via a vibration transmission section. The vibration actuator of this device is housed within a housing fixed to the vibration transmission section, and its movable element is configured to reciprocate along a guide axis positioned perpendicular to the touch panel. In the vibration actuator, by causing the movable element to collide with the housing in response to operation of the touch panel, although a knocking sound may be generated, vibration is imparted to the fingertip in contact with the touch panel via the vibration transmission section.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2015-070729 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, in the vibration actuator of Patent Document 1, the movable element is moved back and forth along a guide shaft that is arranged perpendicularly to the display surface of the touch panel, so the device itself becomes a structure with a length, i.e. a thickness, that is, perpendicular to the display surface.

[0009] This structure presents the following problems: a predetermined thickness of space is required on the back side of the touch panel, which increases the size of the portable terminal device with the touch panel, making it difficult to achieve miniaturization and thinning. In recent years, with the miniaturization and thinning of devices, there has been a desire to miniaturize and thin the vibration actuator mounted on the device itself.

[0010] The purpose of this invention is to provide a vibration actuator and a contact input device that can achieve both thinness and high output while vibrating appropriately.

[0011] Solution for solving the problem

[0012] The vibration actuator of the present invention has the following structure, which includes:

[0013] An electromagnet is made by stacking flat, circular coils on the surface of a plate-shaped magnetic core.

[0014] A magnetic component having a lower surface that faces the coil from above;

[0015] A spacer, disposed on the lower surface outside the coil, separates the magnetic component from the electromagnet in the vertical direction; and

[0016] An elastic support portion, disposed on the outside of the coil, connects the magnetic core to the spacer.

[0017] The magnetic force generated by energizing the coil causes one of the magnetic components or the electromagnet to vibrate by displacing itself closer to the other.

[0018] The contact input device of the present invention has the following structure:

[0019] The vibration actuator of the above structure is positioned on the back of the operating surface and is driven according to the operation of the operating surface.

[0020] Invention Effects

[0021] According to the present invention, vibration is appropriately performed while achieving both thinness and high output. Attached Figure Description

[0022] Figure 1 This is a perspective view of the vibration actuator according to Embodiment 1 of the present invention.

[0023] Figure 2 Is Figure 1 The image shows the magnetic yoke removed from the vibration actuator.

[0024] Figure 3 This is a sub-assembly diagram of the vibration actuator.

[0025] Figure 4 This is an exploded view of the vibration actuator.

[0026] Figure 5 This is a partial cross-sectional view of the vibration actuator.

[0027] Figure 6 This is a diagram showing the action of making the magnetic body movable in the vibration actuator.

[0028] Figure 7 This is a diagram showing the action when the electromagnet part of the vibration actuator is movable.

[0029] Figure 8 This is a diagram illustrating an example of a drive circuit.

[0030] Figure 9 This is a diagram representing an example of an action signal.

[0031] Figure 10AIt is a partial cross-sectional view showing the flow of internal air under energized conditions.

[0032] Figure 10B It is a diagram showing the flow of internal air in a non-excited state.

[0033] Figure 11A This is a diagram showing the displacement of the movable part in this embodiment.

[0034] Figure 11B It is a diagram showing the displacement of the movable part in a structure without an exhaust section.

[0035] Figure 12 This is a perspective view showing the state of the vibration actuator in Embodiment 2 of the present invention with the magnetic yoke removed.

[0036] Figure 13 This is a sub-assembly diagram of the vibration actuator.

[0037] Figure 14 This is an exploded view of the vibration actuator.

[0038] Figure 15 This is a partial cross-sectional view of the vibration actuator.

[0039] Figure 16 This is a diagram showing the action of making the magnetic body movable in the vibration actuator.

[0040] Figure 17 This is a diagram showing the action when the electromagnet part of the vibration actuator is movable.

[0041] Figure 18 This is a perspective view showing the state in which the magnetic yoke has been removed from the vibration actuator of Embodiment 3 of the present invention.

[0042] Figure 19 This is a sub-assembly diagram of the vibration actuator.

[0043] Figure 20 This is an exploded view of the vibration actuator.

[0044] Figure 21 This is a perspective view showing the state of the vibration actuator in Embodiment 4 of the present invention with the magnetic yoke removed.

[0045] Figure 22 This is a sub-assembly diagram of the vibration actuator.

[0046] Figure 23 This is an exploded view of the vibration actuator.

[0047] Figure 24 This is a perspective view of the vibration actuator according to Embodiment 5 of the present invention.

[0048] Figure 25 This is a sub-assembly diagram of the vibration actuator.

[0049] Figure 26 This is an exploded view of the vibration actuator.

[0050] Figure 27 This is a diagram illustrating a modified example of the vibration actuator according to an embodiment of the present invention.

[0051] Figure 28 This is a perspective view of the vibration actuator according to Embodiment 6 of the present invention.

[0052] Figure 29 This is a sub-assembly diagram of the vibration actuator.

[0053] Figure 30 This is an exploded view of the vibration actuator.

[0054] Figure 31A It is a partial cross-sectional view showing the flow of internal air under energized conditions.

[0055] Figure 31B It is a diagram showing the flow of internal air in a non-excited state.

[0056] Figure 32 This is a sub-assembly diagram of the vibration actuator according to Embodiment 7 of the present invention.

[0057] Figure 33 This is an exploded view of the vibration actuator.

[0058] Figure 34A It is a partial cross-sectional view showing the flow of internal air under energized conditions.

[0059] Figure 34B It is a diagram showing the flow of internal air in a non-excited state.

[0060] Figure 35 This is a perspective view of the vibration actuator according to Embodiment 8 of the present invention.

[0061] Figure 36 yes Figure 35 A partial sectional view along the RR line.

[0062] Figure 37 This is a sub-assembly diagram of the vibration actuator.

[0063] Figure 38 This is an exploded view of the vibration actuator.

[0064] Figure 39A It is a partial cross-sectional view showing the flow of internal air under energized conditions.

[0065] Figure 39BIt is a diagram showing the flow of internal air in a non-excited state.

[0066] Figure 40 This is a diagram illustrating an example of a contact-type input device with a vibration actuator.

[0067] Figure 41 This is a perspective view of the vibration actuator according to Embodiment 9 of the present invention.

[0068] Figure 42 This is an exploded view of the vibration actuator.

[0069] Figure 43 This is a top view of the vibration actuator.

[0070] Figure 44 This is a top view showing the internal structure of the vibration actuator.

[0071] Figure 45 This is a bottom view of the vibration actuator.

[0072] Figure 46 This is an exploded view showing the main parts of the basic structure of the vibration actuator.

[0073] Figure 47 This is a side sectional view showing the wiring of the FPC of the vibration actuator.

[0074] Figure 48 This is a perspective view of a modified example 1 of the vibration actuator according to Embodiment 9 of the present invention.

[0075] Figure 49 This is a perspective view of a modified example 2 of the vibration actuator according to Embodiment 9 of the present invention.

[0076] Figure 50A This is a perspective view of a modified example 1 of the vibration actuator according to Embodiment 10 of the present invention. Figure 50B This is a perspective view of a modified example 2 of the vibration actuator according to Embodiment 10 of the present invention. Figure 50C This is a perspective view of a modified example 3 of the vibration actuator according to Embodiment 10 of the present invention.

[0077] Figure 51A as well as Figure 51B This is a schematic diagram illustrating the flow of internal air during the attraction and release of the vibration actuator according to Embodiment 10 of the present invention.

[0078] Figure 52A as well as Figure 52B This is a schematic diagram illustrating the flow of internal air during and after the attraction of the structure without air holes in the vibration actuator.

[0079] Figure 53This is a perspective view of the vibration actuator according to Embodiment 11 of the present invention.

[0080] Figure 54 This is an exploded view of the vibration actuator.

[0081] Figure 55 This is an exploded view of the vibration actuator according to Embodiment 12 of the present invention.

[0082] Figure 56 This is an exploded view of the vibration actuator according to Embodiment 13 of the present invention.

[0083] Figure 57 This is a perspective view of the vibration actuator according to Embodiment 14 of the present invention.

[0084] Figure 58 This is an exploded view of the vibration actuator.

[0085] Figure 59 This is a side view showing the mounting structure of the vibration actuator.

[0086] Figure 60 This is a perspective view of the vibration actuator according to Embodiment 15 of the present invention.

[0087] Figure 61 This is an exploded view of the vibration actuator.

[0088] Figure 62 This is a side sectional view of the vibration actuator.

[0089] Figure 63 This is an exploded view of the vibration actuator according to Embodiment 16 of the present invention.

[0090] Figure 64 This is a three-dimensional view showing the internal structure of the vibration actuator.

[0091] Figure 65 This is a perspective view of the vibration actuator according to Embodiment 17 of the present invention.

[0092] Figure 66 It is a perspective view showing the installation relationship between the coil and the iron core in the electromagnet section.

[0093] Figure 67 It is a perspective view showing the installation relationship between the coil and the iron core in the electromagnet section.

[0094] Figure 68 This is a top view of the substrate section where the coil is mounted.

[0095] Figure 69 It means Figure 68 The diagram shows an example of the structure of the substrate portion. Detailed Implementation

[0096] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0097] In these embodiments, a Cartesian coordinate system (X, Y, Z) is used for explanation. The figures described later also use a common Cartesian coordinate system (X, Y, Z). Hereinafter, when applying a vibration actuator to a contact-type input device (also called a vibration prompting device or operation input device) where information is input by contact with the operator, the lengths in the X, Y, and Z directions are defined as corresponding to the width, depth, and height of the contact-type input device. Furthermore, the positive Z-direction is the direction from which vibration feedback is given to the operator, and is designated as the "top-view side" (or "upper side"), while the negative Z-direction is the direction from which the operator presses during operation, and is designated as the "bottom-view side" (or "lower side"). Additionally, "radial" is synonymous with the XY direction centered along the central axis in the Z-direction within the vibration actuator, and is also referred to as the direction along the plate surface. Moreover, among the components constituting the vibration actuator, the surface located on the "top-view side" (or "upper side") is designated as the "surface" (or "upper surface"), and the surface located on the "bottom-view side" (or "lower side") is designated as the "back side" (or "lower surface"). When the posture of a vibration actuator or contact input device changes, the interpretation should be based on the change in posture.

[0098] (Implementation Method 1)

[0099] <Overall Structure of Vibration Actuator 10>

[0100] Figure 1 This is a perspective view of the vibration actuator 10 according to Embodiment 1 of the present invention. Figure 2 Is Figure 1 The diagram shows the vibration actuator 10 with the magnetic yoke removed. Figure 3 This is a sub-assembly diagram of the vibration actuator. Figure 4 This is an exploded view of the vibration actuator 10. Figure 5 This is a partial cross-sectional view of the vibration actuator 10.

[0101] Vibration actuator 10, for example, is used in vibration alert device 500 as a contact input device (see reference). Figure 40 The touchpad shown), the vibration alert device 500 has an operating device (refer to in this embodiment) that provides a vibration alert section (operating surface) for the operator to perform contact operation. Figure 40 The main body of the plate shown is 510.

[0102] The vibration actuator 10 can provide the operator who is operating the device with a sense of touch (also known as "touch" or "force") by vibrating the operating device, depending on the purpose and usage of the operating device.

[0103] The vibration actuator 10 is a thin vibration actuator in the shape of a flat plate or a thin plate. If the Z direction and -Z direction are set as the thickness direction, then in the thickness direction, it is configured on the back side of the operating device to make the operating device vibrate.

[0104] The vibration actuator 10 includes: an electromagnet section 20 comprising a magnetic core body 32, a magnetic pole section 34, and a flat, annular (annular plate-shaped) coil 50; a magnetic body 70 comprising a magnetic yoke 80; and an elastic support section 60 connecting the electromagnet section 20 and the magnetic body 70. The electromagnet section 20 and the magnetic body 70 generate magnetic attraction by energizing the coil 50. The elastic support section 60 provides free displacement in the thickness direction between the electromagnet section 20 and the magnetic body 70, with one approaching the other. That is, the vibration actuator 10 vibrates by the magnetic force generated by energizing the coil 50, causing either the magnetic body 70 (magnetic yoke 80) or the electromagnet section 20 to move closer to the other.

[0105] In the vibration actuator 10, the coil 50 of the electromagnet section 20 is disposed on the substrate section 40. Furthermore, the vibration actuator 10 can be connected to a vibration prompt section that receives user pressing operations via either the electromagnet section 20 or the magnetic body 70.

[0106] The vibration actuator 10 causes one of the electromagnet part 20 and the magnetic body 70 to vibrate relative to the other in the Z direction, specifically in the direction of approach or separation, and provides this vibration as an operating sensation to the operating device on which the vibration actuator 10 is installed.

[0107] In this way, the vibration actuator 10 is formed into a flat plate shape, with one of the electromagnet part 20 and the magnetic body 70 as a movable part, moving in one direction of the stacking direction (thickness direction) to approach the fixed part, which is the other. Furthermore, the reaction force of the elastic support part 60 causes the two parts that are approaching to move in the opposite direction to the other and separate, thereby generating vibration in the vibration actuator 10.

[0108] <Electromagnetic section 20>

[0109] The electromagnet section 20 is formed in the shape of a thin plate, and in addition to the iron core section 30 and the coil 50 which are magnetized in the thickness direction (Z direction), it also has a substrate section 40. The iron core section 30 is constructed by distributing magnetic pole sections 34 on the upper surface of the central part of the magnetic core body 32, which is a plate of magnetic material. That is, the electromagnet section 20 is formed by stacking flat, annular coils 50 on the plate surface of the plate-shaped magnetic core body 32. Furthermore, the magnetic core body 32 and the magnetic pole sections 34 constitute the magnetic core.

[0110] The magnetic core body 32 is a flat magnetic body with a cutout 322 that avoids a portion of the substrate 40 and a connecting fixing portion 324 that fixes a portion of the elastic support portion 60 on its outer edge. The outer edge of the magnetic core body 32 is surrounded by the elastic support portion 60 fixed by the connecting fixing portion 324.

[0111] The core body 32 is formed, for example, from a magnetic material such as silicon steel sheet or SECC (electrolytic cold commercial steel sheet).

[0112] The cutout 322 and the connecting fixing part 324 in the rectangular magnetic core body 32 are respectively formed on adjacent sides of the outer periphery. Alternatively, the cutout 322 can also be formed on the opposite side of the outer periphery where the cutout 322 is located. Furthermore, the connecting fixing part 324 is formed on the opposite side of the outer periphery where the connecting fixing part 324 is located, and this pair of connecting fixing parts 324 symmetrically supports the elastic support part 60 with the coil 50 as the center.

[0113] The magnetic core body 32 can also be fixed as a fixing surface for the housing of the object being mounted (e.g., a product). On the other hand, when the magnetic body 70 is fixed and the magnetic core body 32 is movable, the magnetic core body 32 also functions as a counterweight.

[0114] The magnetic pole portion 34 is a flat, disk-shaped magnetic body whose radial length is longer than its thickness. The magnetic pole portion 34 is connected to the magnetic core body 32 and is surrounded by the coil 50. The magnetic pole portion 34 is magnetized together with the magnetic core body 32 by being energized through the coil 50, and the back surface becomes a magnetic pole surface where magnetic flux flows in the vertical direction, i.e., the thickness direction.

[0115] The coil 50 is formed as a flat, annular shape with a radial length longer than its thickness. The coil 50 is disposed on the magnetic core body 32, separated from the substrate portion 40. The coil 50 is arranged to surround the magnetic pole portion 34, with the axis of the coil 50 aligned with the axis of the magnetic pole portion 34. Because the coil 50 is annular and lacks edge portions prone to deviation, it exhibits high manufacturability as a coil with stable characteristics.

[0116] The coil 50 can be formed into a thin (flat) ring shape and can be constructed arbitrarily; for example, it can be formed from UEW (polyurethane ethylene-copper wire). The coil 50 is connected to the wiring of the substrate 40 through the coil windings at both ends. Furthermore, magnetic poles can be arranged on the radially outer side of the coil 50, i.e., on the outer periphery of the coil 50. If the electromagnet part 20 is movable, a counterweight can also be arranged on the outer periphery of the coil 50 within the magnetic core body 32. The coil 50 can be a conventionally wound coil, such as an air-core coil with the coil windings (UEW) extending from the inside of the ring-shaped coil body at both ends, or it can be constructed as a so-called α-wound coil with the coil windings at both ends protruding from the outer periphery of the coil body.

[0117] The substrate portion 40 supplies power to the coil 50. The substrate portion 40 is formed in the form of a film. The substrate portion 40 is, for example, a flexible substrate (FPC), constructed by providing copper as a conductive foil on a polyimide (Pl) film, and employs a low-elasticity design to avoid affecting the characteristics of the spring that serves as the elastic support portion 60. The substrate portion 40 has a substrate body (insulating portion, such as an insulating film) 42 with an opening 43 and an extension portion 44 extending from a portion of the outer periphery of the substrate body 42.

[0118] The substrate portion 40 has a wiring portion connected to the coil 50. The wiring portion is connected to a pad 441 disposed at the front end of the extension portion 44. The coil 50 is electrically connected to an external device via the pad 441. The substrate portion 40 uses an FPC to integrally form the insulating portion and the wiring portion as the conductive portion, thus having the functions of both.

[0119] The substrate body 42 is mounted entirely on the core body 32 with the magnetic pole portion 34 disposed within the opening 43. The coil 50 is disposed on the substrate body 42 such that the opening 51 of the coil 50 is located at a position corresponding to the opening 43. The substrate body 42 is sandwiched between the core body 32 and the coil 50, functioning as an insulating film (insulator) that insulates the core body 32 and the coil 50.

[0120] The extension 44 is disposed within the cutout 322 and extends outward within the thickness of the magnetic core body 32 by bending. By disposing the extension 44 within the cutout 322, the thickness of the extension 44 can be absorbed by the thickness of the magnetic core body 32, which helps to reduce the overall thinness of the vibration actuator 10.

[0121] Furthermore, the substrate portion 40 is positioned on the magnetic core body 32 such that the opening portion 43 is located on the outer periphery of the magnetic pole portion 34 already provided on the magnetic core body 32, and the extension portion 44 is positioned to extend downwards from the substrate body 42 via the cut portion 322.

[0122] The substrate 40 is a flexible printed circuit board (FPC) that has both insulation and conduction functions to the coil 50 (based on the wiring section). Therefore, it is possible to prevent insulation damage, improve the winding of the wiring that supplies power to the coil, and suppress coil breakage. In addition, when using connectors or the like for connection, this connection can be easily made.

[0123] <Elastic Support Section 60>

[0124] The elastic support portion 60 connects and elastically supports the electromagnet portion 20 and the magnetic body 70, allowing them to move freely relative to each other. Specifically, the elastic support portion 60 is disposed on the outside of the coil 50, connecting the magnetic core body 32 and the spacer 90.

[0125] The elastic support 60 is formed of SUS or the like and is a flat, frame-like body that can deform elastically, such as a leaf spring.

[0126] The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in layers between the magnetic core body 32 and the magnetic body 70 in the thickness direction (Z direction).

[0127] The elastic support portion 60 has an opening 61 and is formed into a rectangular frame surrounding the magnetic core body 32 and the coil 50. It is disposed on the outside of the magnetic core body 32 and elastically deforms along the thickness direction (Z direction) on the outside. That is, the frame-shaped portion of the elastic support portion 60 formed by the edges 62 and 64 located on the outside of the magnetic core body 32 can elastically deform in the Z direction. Through this deformation, specifically the deformation that brings the two together, the electromagnet portion 20 and the magnetic body 70 approach or move away from each other.

[0128] The elastic support portion 60 has a pair of parallel sides 62 each with a yoke-side connecting portion 622. These yoke-side connecting portions 622 allow the magnetic bodies 70 to be stacked in the Z direction and joined to the magnetic bodies 70. Specifically, the yoke-side connecting portion 622 of the elastic support portion 60 is connected to the spacer joint portion 92 of the spacer 90 of the magnetic body 70. Thus, the elastic support portion 60 provides elastic support to the movable part side using a pair of portions on opposite sides, thereby providing balanced support and enabling stable vibration.

[0129] In addition, the elastic support portion 60 has a core-side connecting portion 642 on another pair of side portions 64 adjacent to a pair of side portions 62 respectively. The core-side connecting portion 642 is engaged with the connecting and fixing portion 324 of the magnetic core body 32 in a stacked state in the Z direction.

[0130] The yoke-side connecting portion 622 and the core-side connecting portion 642 are planar bodies that protrude inward from the edges 62 and 64 of the frame-shaped portion constituting the elastic support portion 60. The yoke-side connecting portion 622 and the core-side connecting portion 642 are connected to the spacer engagement portion 92 and the connecting fixing portion 324 respectively at their respective opposing edges of the elastic support portion 60, such that their surfaces are in contact with each other in the Z direction.

[0131] The yoke-side connecting portion 622 and the core-side connecting portion 642 are arranged in the rectangular frame-shaped elastic support portion 60 at positions rotated 90 degrees relative to each other, and are configured to have the same length and the same width. As a result, it is not necessary to determine the orientation of the elastic support portion 60 during assembly, thereby improving assemblability.

[0132] Furthermore, the elastic support 60 is a frame-like structure, which allows for an extension of the spring length and ensures stable assembly. Additionally, the elastic support 60 is a one-piece structure, thus improving component precision.

[0133] The elastic support portion 60 is disposed on the back side of the magnetic body 70, that is, between the back side of the spacer 90 and the surface of the magnetic core body 32. The thickness of this space, that is, the elastic support portion 60, becomes the movable gap DG that defines the minimum distance between the magnetic body 70 and the electromagnet portion 20 (the gap of the hard limiting portion that restricts the movement of the magnetic body 70, that is, the maximum range of movement of the magnetic body 70).

[0134] Furthermore, the thickness of the elastic support portion 60, along with the thickness of the spacer 90 and the thickness of the magnetic pole portion 34, is set in the vibration actuator 10 to form the distance between the magnetic poles (air gap G) of the electromagnet portion 20 and the magnetic body 70, which determines the vibration characteristics (amplitude). Each thickness refers to the "length in the Z direction". The elastic support portion 60, the spacer 90, and the magnetic pole portion 34 are disposed between the magnetic core body 32, which is a flat plate, and the yoke 80; therefore, the air gap G is set based on the thickness of the spacer 90 + the thickness of the elastic support portion 60 - the thickness of the magnetic pole portion 34.

[0135] The elastic support 60 deforms in the area containing the magnetic core body 32 and the magnetic body 70 (specifically, the spacer 90). The elastic support 60 provides a balanced and good support for one of the magnetic body 70 and the electromagnet part 20 (specifically, the magnetic core body 32) relative to the other in a state perpendicular to the opposing direction (vibration direction), allowing them to move freely from one side to the other.

[0136] In addition, such as Figure 5As shown, the elastic support portion 60 is located in approximately the same layer as the coil 50 and the magnetic pole portion 34. Therefore, compared to a structure in which the elastic support portion 60 is stacked on top of the coil 50 and the magnetic pole portion 34, the thickness can be reduced, achieving an overall thinner profile. The elastic support portion 60 is positioned at a location that does not interfere with the magnetic core body 32 on which the coil 50 and the magnetic pole portion 34 are disposed, and it deforms and displaces in the Z direction.

[0137] Furthermore, the elastic support 60, for example, when the magnetic body 70 is movable relative to the electromagnet part 20, is supported by a spring constant K. sp The settings can determine the displacement and natural vibration frequency of the magnetic body 70, and can also adjust the resonant frequency. In addition, when the magnetic body 70 is driven (when it is movable), that is, when the coil 50 is energized, mechanical tactile sensation is generated by displacement.

[0138] <Magnetic Material 70>

[0139] The magnetic body 70 has a yoke 80 and a spacer 90 disposed on the lower surface of the yoke 80.

[0140] <Magnetic yoke (magnetic component) 80>

[0141] The magnetic yoke 80 and the spacer 90 are arranged opposite to the electromagnet part 20, and are configured to move relative to the electromagnet part 20 in a direction that brings them closer together, so that the vibration actuator generates vibration by moving. The magnetic yoke 80 has a lower surface 82 that faces the coil 50 from above.

[0142] The magnetic yoke 80 is a flat magnetic body facing the magnetic pole portion 34. By energizing the coil 50, it attracts the magnetic pole portion 34 using the magnetic attraction generated between them. The magnetic yoke 80 is also positioned opposite the magnetic core body 32, and they attract each other using the magnetic attraction generated between the magnetic core body 32 and the outer periphery of the magnetic pole portion 34.

[0143] The magnetic yoke 80 is composed of a single plate-shaped magnetic body and has high flatness. The magnetic yoke 80 can also be formed from soft magnetic materials such as silicon steel, permalloy, or ferrite. Alternatively, the magnetic yoke 80 can also be formed from electromagnetic stainless steel, sintered materials, MIM (metal injection molding) materials, laminated steel plates, or SECC (steel electrolytic cold commercial). The magnetic yoke 80 is particularly preferably made of silicon steel or SECC.

[0144] When the magnetic core body 32 is fixed to the fixed surface of the product housing, the magnetic yoke 80 also functions as a counterweight on the movable part side.

[0145] In this way, the magnetic yoke 80 is a flat plate with high flatness, so it can be arranged opposite to the magnetic pole surface of the magnetic pole section 34 with equal intervals of air gap G, which can improve the accuracy of the air gap G surface and effectively exert the magnetic attraction between it and the electromagnet section 20.

[0146] Furthermore, when the magnetic yoke 80 is fixed to the product's housing or the like, its flat surface functions as a mounting surface to the housing, allowing for proper fixation. Additionally, when the magnetic yoke 80 is installed on a movable object or supports the movable object as a freely movable housing, it is preferable to install the vibration indicator via adhesive, fixing components, bonding materials, or other fixing and mounting materials. By changing its shape, the magnetic yoke 80 allows for adjustment of the airflow path within the exhaust section 100, which will be described later.

[0147] The magnetic yoke 80 is rectangular, for example, formed as a plate that is square when viewed from above. The magnetic yoke 80 is joined to the elastic support portion 60 at the center of a pair of opposing sides via a spacer 90 (spacer joint 92).

[0148] <Spacer 90>

[0149] The spacer 90 is used to ensure the air gap G of the movable area of ​​the elastic support 60. The spacer 90 is disposed on the lower surface 82 of the yoke 80 outside the coil 50, separating the yoke 80 from the electromagnet part 20 in the vertical direction. The spacer 90 is, for example, mounted on the lower surface 82 of the yoke 80 and sandwiched between the yoke 80 and the elastic support 60. The spacer 90 protrudes from the lower surface 82 and is provided with a predetermined width in a direction orthogonal to the vertical direction. The spacer 90 is arranged such that it surrounds the coil 50 around its entire circumference.

[0150] The thickness of the spacer 90 separates the yoke 80 from the core body 32. The thickness of the spacer 90, together with the elastic support portion 60 and the magnetic pole portion 34, forms the gap G between the yoke 80 and the coil 50 and the magnetic pole portion 34. As a result, the elastic support portion 60 can move to the same layer as the core body 32, increasing the movable area. Therefore, the movable area of ​​the movable part in the vibration actuator 10 is sufficiently set, enabling it to have appropriate vibration characteristics. Furthermore, this air gap is also formed in the following embodiments (except for embodiment 8).

[0151] The spacer 90 has a shape that avoids the coil 50 when the yoke 80 is displaced due to the deformation of the elastic support portion 60, and is disposed at the part that becomes the magnetic pole surface of the yoke 80 (the central part of the lower surface 82 opposite to the magnetic pole portion 34), the magnetic pole portion 34 and the outer side of the coil 50.

[0152] like Figure 4As shown, the spacer 90 is formed, for example, in a frame shape corresponding to the outer diameter of the vibration actuator 10, or in a rectangular frame shape corresponding to the shape of the magnetic yoke 80. The spacer 90 is a square frame shape corresponding to the shape of the magnetic yoke 80.

[0153] The spacer 90 has a predetermined thickness that forms part of the deformable region of the elastic support 60, separating the elastic support 60 from the yoke 80 in the thickness direction (Z direction). Furthermore, the spacer 90 separates the electromagnet part 20, i.e., the magnetic core body 32, the coil 50, and the magnetic pole part 34, from the yoke 80 in the vibration direction (vertical direction, Z direction).

[0154] The spacer 90 can be a non-magnetic material, but it can also be a magnetic material. The spacer 90 is formed, for example, from a high-precision steel sheet using austenitic stainless steel strip manufactured by cold rolling. The spacer 90 can be formed from either a magnetic or non-magnetic material, and can form the magnetic circuit of the vibration actuator 10.

[0155] The design of the spacer 90 can improve the degree of freedom of elastic components such as leaf springs used in the elastic support 60.

[0156] The spacer 90 is made of sheet metal, allowing the use of sheet metal with a thickness that is easy to set accurately, thereby improving the precision of the air gap G. Furthermore, when the spacer 90 is used as a movable part along with the yoke 80 and the magnetic core body 32 is fixed to the housing, it also functions as a counterweight. By using a high-density material for the spacer 90, the movable weight is increased, which can increase the generated vibration. Additionally, when the spacer 90 is used as a counterweight for the movable part, its weight can be adjusted to set the natural vibration frequency of the movable part.

[0157] <Magnetic circuit of vibration actuator 10>

[0158] Figure 6 and Figure 7 This is a diagram used to illustrate the operation of a vibration actuator, and is respectively compared with... Figure 5 The partial cross-sectional view corresponds to the flow of magnetic flux M. Figure 6 This diagram shows the operation of the magnetic body 70 when it is movable in the vibration actuator, and shows the operation of the magnetic core body 32 as a fixing part mounted on the fixing surface of the housing. Figure 7 This diagram shows the operation of the electromagnet part 20 in the vibration actuator when it is movable, and shows the operation of the magnetic yoke 80 as a fixed part mounted on the fixed surface of the housing.

[0159] In the vibration actuator 10, the magnetic core body 32 is fixed to the fixed surface of the housing, the electromagnet part 20 is a fixed part, and the magnetic body 70 is a movable part. In this non-movable state, i.e., the non-energized state, the vibration actuator 10 (see reference...) Figure 5 In, for example, such as Figure 6 As shown, current flows through coil 50 to energize magnetic pole section 34. As a result, the surface (top surface) of magnetic pole section 34 is the S pole, and the interface with magnetic core body 32 is the N pole, generating a magnetic field (flow of magnetic flux M) through magnetic body 70.

[0160] According to the principle of an electromagnetic solenoid, the magnetic body 70 attracts the surfaces of the magnetic pole portion 34 and the magnetic core body 32, forming the magnetic circuit shown in the figure. Since the magnetic pole portion 34 and the magnetic core body 32 are fixed, the magnetic body 70 is movable in the direction of the arrow, that is, in the direction close to the iron core portion 30.

[0161] Next, when the energization to coil 50 is released, the magnetic field disappears, the magnetic attraction of electromagnet part 20 disappears, and the force of the elastic support part 60 deforming towards the magnetic core body 32 is released. That is, a reaction force is generated as the spring of elastic support part 60, and the magnetic body 70 moves back to its original position by the reaction force of elastic support part 60. At this time, the magnetic body 70 moves to a position that is displaced away from the magnetic pole part 34 from its stationary position, which is in a non-movable state, due to the reaction force, and generates stronger vibration.

[0162] The vibration occurs as the force decreases, with the magnetic body 70 repeatedly reciprocating in the Z direction while simultaneously weakening, thus vibrating freely. Alternatively, the coil 50 can be repeatedly energized and de-energized, causing the magnetic body 70 to reciprocate in the Z direction and generate vibration. In this way, in the vibration actuator 10, the magnetic body 70, which is supported in a state of suspension relative to the electromagnet part 20 by the elastic support part 60, is mechanically displaced by the magnetic attraction generated between it and the opposing electromagnet part 20 when energized, and then vibrates freely.

[0163] Next, the operation of the vibratory actuator 10 when the magnetic yoke 80 is fixed as a fixed surface to the housing will be described.

[0164] like Figure 7 As shown, when the coil 50 is energized, when a magnetic field is generated between the electromagnet part 20 and the magnetic body 70, the electromagnet part 20 is attracted by the magnetic body 70 equipped with the magnetic yoke 80.

[0165] The electromagnet part 20 moves in a manner close to the magnetic body 70.

[0166] Next, by de-energizing the coil 50, the magnetic field disappears, the magnetic attraction of the electromagnet part 20 disappears, and the force of the elastic support part 60 deforming towards the yoke 80 is released. This generates a reaction force from the elastic support part 60, causing the electromagnet part 20 to move back to its original position, away from the magnetic body 70. At this time, due to the reaction force of the elastic support part 60, the electromagnet part 20 moves to a position further away from the magnetic pole part 34 than its rest position, generating a stronger vibration. This vibration is generated by repeatedly decreasing the force of the vibration.

[0167] In this way, the vibration actuator 10 generates a magnetic attraction between the core body 32 and the iron core portion 30 of the magnetic pole portion 34 and the magnetic yoke 80 opposite to the iron core portion 30 by energizing the coil 50. Furthermore, the magnetic attraction is greater at the center of the magnetic pole portion 34, which is disposed between the iron core portion 30 and the magnetic yoke 80, than at the outer periphery.

[0168] Through this magnetic attraction, one of the electromagnet and the magnetic body 70 moves closer to the other, thus displacing itself. This movement generates vibration of the magnetic body 70 through the elastic force (acting force) produced by the elastic support 60, providing a tactile sensation to the user.

[0169] Thus, in the vibration actuator 10, a flat, annular coil 50 and a disc-shaped magnetic pole portion 34 disposed inside the coil 50 are arranged on the flat magnetic core body 32.

[0170] These magnetic core bodies 32, coils 50, and magnetic pole portions 34 are arranged opposite to a plate-shaped magnetic body 70 with spacers 90 and yokes 80 via a plate-shaped elastic support portion 60, and are supported to move freely in the approach and distance directions.

[0171] According to this structure, an elastic support portion 60 is arranged on the thin plate-shaped magnetic core body 32, surrounding the coil 50 and the magnetic pole portion 34. A magnetic yoke 80 is arranged in layers on the elastic support portion 60, separated by spacers 90. That is, the vibration actuator 10 is composed only of the height of the layers stacked in the thickness direction: the magnetic core body 32, the layers containing the coil 50, the magnetic pole portion 34 and the elastic support portion 60, the layers of spacers 90, and the layers of the magnetic yoke 80. In this way, the assembly accuracy is determined by the overlap of components, thus enabling high-precision assembly.

[0172] In addition, the vibration actuator 10 has a thin plate structure (a flat plate that is thinner than the structure of the coil 50, magnetic pole part 34 and elastic support part 60 stacked), which can save space in the configuration space.

[0173] Furthermore, the movable area of ​​the elastic support portion 60 of the vibration actuator 10 is ensured to be a movable gap DG by the thickness of the elastic support portion 60. Additionally, the thickness of the spacer 90, together with the thickness of the elastic support portion 60 and the thickness of the magnetic pole portion 34, sets the air gap G between the magnetic pole surfaces of the electromagnet portion 20 and the magnetic body 70 that attract each other. The air gap G ensures the vibration characteristics of the vibration actuator in the movable area of ​​the elastic support portion 60, which allows the core portion 30 of the electromagnet portion 20 to approach or move away from the yoke 80.

[0174] In this way, without the need for separate components to form each movable gap DG and air gap G, it can have appropriate vibration characteristics, and can achieve further thinning, simplified assembly, and low cost with a simple structure.

[0175] Furthermore, the elastic support portion 60 is a leaf spring with high manufacturing precision in thickness, thus suppressing deviations in the gap between the magnetic core body 32 and the spacer 90, achieving a stable gap and ensuring the movable gap DG. Additionally, the gap G can be set. Furthermore, in the vibration actuator 10, the direction of the current flowing circumferentially through the coil 50 can be either right-handed or left-handed.

[0176] In the vibration actuator 10, the elastic support portion 60 connects and elastically supports the electromagnet portion 20 and the magnetic body 70, allowing them to move freely relative to each other. That is, it can also be used as a structure that fixes one of the magnetic body 70 and the electromagnet portion 20 and allows the other to move relative to that one. For example, the vibration actuator 10 can be configured such that a second planar body (a planar body including an electromagnet and a magnetic core) having the electromagnet portion 20 is disposed opposite to a first planar body corresponding to the magnetic body 70 in a direction perpendicular to both of their surfaces, and can be freely contacted and separated relative to each other via the elastic support portion 60.

[0177] <Driving principle of vibration actuator 10>

[0178] The driving principle of the vibration actuator 10 is briefly explained below. The vibration actuator 10 can also be driven using the following motion equations and circuit equations, and by generating resonance through pulses. Furthermore, the action is not driven by resonance, but rather by the touchpad (see reference 500) of the vibration alert device 500. Figure 40 The operation of the actuator 10 can be achieved, for example, by inputting current pulses (single or multiple) via a control unit (not shown). The vibration actuator 10 is energized to the coil 50 via the control unit, or it can be powered from an AC power source to input a sine wave or cosine wave voltage to the coil 50 to cause the movable part to vibrate. Preferably, an AC voltage is applied to the vibration actuator 10, and the vibration actuator 10 vibrates when a sine wave drive signal is input.

[0179] It should be noted that in the vibration actuator 10, when the electromagnet part 20 is fixed to the housing as a fixed surface, and the movable part that freely supports the vibration is the magnetic body 70, the magnetic body 70 performs reciprocating motion based on equations (1) and (2). Furthermore, when the electromagnet part 20 is the movable part and the magnetic body 70 has a fixed surface, and the movable object is also replaced with the fixed surface, the same equations (1) and (2) are satisfied to perform reciprocating motion.

[0180] [Formula 1]

[0181]

[0182] m: mass [kg]

[0183] x(t): Displacement [m]

[0184] K t Thrust constant [N / A]

[0185] i(t): Current [A]

[0186] K sp Spring constant [N / m]

[0187] D: Attenuation coefficient [N / (m / s)]

[0188] [Equation 2]

[0189]

[0190] e(t): Voltage [V]

[0191] R: Resistance [Ω]

[0192] L: Inductance [H]

[0193] K e Back electromotive force constant [V / (rad / s)]

[0194] That is, the mass m [Kg], displacement x (t) [m], and thrust constant K of the vibration actuator 10. f [N / A], current i(t) [A], spring constant K sp The values ​​of [N / m] and attenuation coefficient D [N / (m / s)] can be appropriately varied within the range satisfying equation (1). Additionally, the voltage e(t) [V], resistance R [Ω], inductance L [H], and back electromotive force constant K... e [V / (rad / s)] can be appropriately changed within the range that satisfies equation (2).

[0195] Thus, the vibration in the vibration actuator 10 is caused by the mass m of the magnetic body 70 (or the electromagnet part 20) and the spring constant K of the metal spring (a leaf spring in this embodiment) that serves as the elastic support part 60. sp The vibration generated by the vibration actuator 10 can be set and changed by the input voltage (e.g., a pulse, sine wave, or cosine wave voltage).

[0196] Furthermore, in the vibration actuator 10, the connection between the magnetic core body 32 and the elastic support portion 60, and the connection between the elastic support portion 60 and the magnetic body 70 (or electromagnet portion 20), are secured using adhesives, welding, or other methods as fixing components. Screws may also be used as fixing components.

[0197] <Drive circuit of vibration actuator 10>

[0198] Figure 8 An example of a drive circuit representing the actuator body.

[0199] Figure 8 The drive circuit shown is included, for example, in the control unit. The drive circuit connects a current pulse supply unit (switching element) made of a MOSFET (metal-oxide-semiconductor field-effect transistor) to the actuator 10. In addition, the drive circuit has a port 1 ("Port-1"), a gate resistor RG, and a gate / source resistor RGS, which are connected to the current pulse supply unit.

[0200] In the control unit, port 1 is connected to the gate of the MOSFET via a gate resistor RG. The MOSFET is a discharge switching switch, etc., and is connected to the vibration actuator 10 (in which voltage is supplied from the power supply Vin). Figure 8 (represented by [Actuator] in the text), and connected by the gate / source resistor RGS. As an example of the actuator drive signal input to actuator 10, in... Figure 9 The input voltage is shown in the figure.

[0201] The vibration actuator 10 releases its force by stopping the input of the actuator drive signal, causing the magnetic body 70 (or electromagnet part 20) to move in the opposite direction (positive Z direction). The vibration actuator 10 vibrates the magnetic body 70 (or electromagnet part 20) by the input and stopping of the actuator drive signal. The vibration actuator 10 vibrates the magnetic body 70 (or electromagnet part 20) without using a magnet.

[0202] Furthermore, in this embodiment, the actuator drive signal is equivalent to a drive current pulse (also called a "current pulse") supplied to the coil 50 as a drive current for driving the movable part and the operating device. In the vibration actuator 10, when a current pulse is supplied to the coil 50, the magnetic body 70 moves in one direction toward the electromagnet part 20 due to the magnetic attraction between the electromagnet part 20 and the magnetic body 70, mechanically displacing itself. After the supply stops, it is allowed to vibrate freely. The resulting vibration is then imparted to the operating device. The elastic support part 60 can control the displacement based on the magnetic attraction and the free vibration period.

[0203] Furthermore, the actuator drive signal is generated by inputting a signal from a detection unit that detects the operator's actions. The detection unit may, for example, be a pressure sensor that senses the pressure based on the operator's actions as a pressure signal and converts that pressure signal into an electrical signal for output. Alternatively, the detection unit may be of the electrostatic capacitive type, or a proximity sensor that detects the position of the finger (the pressing object) by detecting the capacitive coupling between the operator's finger and the vibrating indicator.

[0204] In applications such as contact-type input devices, the vibration actuator 10 aims to provide a crisp and clear tactile and force sensation when the operator touches the operating device to perform the operation, generating vibrations to impart a tactile and force sensation. In contrast, the vibration actuator 10 enhances the attenuation of the vibration after actuation by having an exhaust section 100 to improve the tactile and force sensation. As a result, the vibration that produces the so-called after-vibration echo (also called "vibration aftersound") converges, the intensity of the tactile sensation becomes clear, and a crisp and clear tactile sensation is provided.

[0205] <Flow of internal air when driven by exhaust section 100>

[0206] Figure 10A It is a partial cross-sectional view showing the flow of internal air under energized conditions. Figure 10B This is a diagram showing the flow of internal air under no-excitation conditions. Furthermore, Figure 10B The un-excited state shown refers to the state in which the magnetic body 70 operates due to the spring reaction force after excitation, and is the state in which the iron core 30 moves away from the magnetic body 70. Additionally, Figure 5 This indicates the state of coil 50 before it is energized as an unenergized state.

[0207] The vibration actuator has an electromagnet part 20 formed by stacking a flat, annular coil 50 on the plate surface of a plate-shaped magnetic core (the magnetic core body 32) and a magnetic yoke (magnetic component) 80. The magnetic yoke 80 has a lower surface that faces the coil 50 of the electromagnet part 20 from above.

[0208] Additionally, a spacer is provided on the outside of the coil 50, between the magnetic core body 32 and the yoke 80, to separate the yoke 80 from the electromagnet part 20 in the vertical direction. Furthermore, an elastic support part 60 is provided on the outside of the coil 50 to connect the magnetic core body 32 to the spacer 90 or the yoke 80 to the spacer 90.

[0209] The magnetic body 70 (yoke 80) and the electromagnet part 20 (core body 32) enclose the space between them in the vertical direction, and when they are close together, an exhaust section 100 forms an airflow (air movement) within the space along the direction of the plate surface. The exhaust section 100 causes the airflow to flow from the outer periphery of the yoke 80 and the electromagnet part 20 to the outside. In addition, the exhaust section 100 causes the airflow to flow from the outer periphery of the yoke 80 and the electromagnet part 20 to the inside. For example, the exhaust section 100 forms an airflow that discharges internal air to the outside through the spacer 90 between the spacer 90 and the yoke 80 or the electromagnet part 20, or an airflow that introduces air from the outside to the inside.

[0210] The exhaust section 100 is formed between the magnetic core body 32 and the magnetic body 70 in a closed manner, communicating with the outside only through the exhaust adjustment section 110. The exhaust section 100 forms an airflow along the opposing surfaces of the magnetic core body 32 and the magnetic body 70 through the relative movement of the magnetic core body 32 and the magnetic body 70, drawing air from the outside into the vibration actuator, or discharging air from the inside of the vibration actuator (internal space) to the outside.

[0211] When air moves into and out of the vibrating actuator, the exhaust section 100 obstructs the airflow along the surface direction (horizontal direction), and applies a load by generating pressure variation at the location where the electromagnet section 20 and the magnetic body 70 of the exhaust section 100 are opposed. As a result, the vibration of the moving magnetic body 70 (yoke 80) is attenuated, and the reverberation (vibration echo) converges, which can give a crisp and clear tactile sensation of varying strength.

[0212] like Figure 5 As shown, the exhaust portion 100 is disposed between the outer periphery 32a of the magnetic core body 32 and the magnetic body 70. In addition, in the vibration actuator 10, the magnetic body 70 is defined as a first planar body, and the planar body including the electromagnet portion 20 and the iron core portion 30 is defined as a second planar body. It is described in this way that the magnetic body 70 can move freely towards and away from the surface of the first planar body in the vertical direction relative to the surface.

[0213] Exhaust section 100 Figure 5 In the non-excited state, i.e., before the coil is energized to drive the actuator, the magnetic core body 32 and the magnetic body 70 are formed along their respective opposing surfaces. The exhaust portion 100 is formed when the energized state, i.e., when the energized iron core portion 30 attracts the magnetic body 70 (yoke 80) and they approach each other (see reference). Figure 10AThis forms an airflow that flows outward along the opposing surfaces of the magnetic core body 32 and the magnetic body 70.

[0214] Furthermore, when the coil 50 changes from an energized state to a de-energized state, the iron core 30 and the magnetic body 70 are separated from the attraction state by the reaction force of the elastic support 60, such as... Figure 10B As shown, an airflow is formed from the outside to the inside.

[0215] The exhaust section 100 has an exhaust section 112 formed between the outer side of the magnetic core body 32 and the movable part (spacer 90), an exhaust adjustment section 110 separated between the outer peripheral part 32a and the end 922 of the spacer 90, an airflow bend section 114 on its inner side, and an internal passage 116.

[0216] The exhaust adjustment unit 110 adjusts the airflow through the gap between the spacer 90 and the outer periphery of the magnetic core body 32, which is close in the vertical direction. Specifically, the exhaust adjustment unit 110 has a gap between the opposing surfaces of the end 922 of the spacer 90 and the outer periphery 32a of the magnetic core body 32. By adjusting this gap, the exhaust adjustment unit 110 adjusts the amount of air flowing from the inside of the vibration actuator to the outside.

[0217] The spacer 90, together with the outer peripheral portion 32a, constitutes the exhaust adjustment portion 110, and also functions as an obstruction to airflow.

[0218] An airflow bend 114 is disposed on the magnetic core body 32, inside the spacer 90 and on the outer periphery of the coil 50. The airflow bend 114 is an air passage continuous with the internal passage 116. The airflow bend 114 is formed by the side of the spacer 90 and the side of the coil 50, and bends the airflow at the exhaust section 100.

[0219] The internal passage 116 is formed between the upper surface of the coil 50 and the upper surface of the magnetic pole portion 34 and the magnetic yoke 80.

[0220] In the vibration actuator 10, an exhaust section 100, consisting of an exhaust adjustment section 110, an airflow bending section 114, and an internal passage 116 between the magnetic core body 32 and the yoke 80, is formed in a labyrinth shape on the outer periphery 32a of the magnetic core body 32. The gaps in the labyrinth shape are uneven gaps along the plate surface of the magnetic core body 32, and are stepped and curved gaps that cause the airflow from the magnetic core body 32 along the plate surface to bend in the vertical direction midway. The labyrinth-shaped exhaust section 100 is not straight, but is formed by bending in the vertical direction between the magnetic core body 32 and the spacer 90 and extending in a direction orthogonal to the vertical direction.

[0221] Furthermore, the gap between the spacer 90 in the exhaust adjustment section 110 and the magnetic core body 32 is smaller than the gap between the magnetic core body 32 and the magnetic yoke 80. Therefore, when the magnetic yoke 80 approaches the electromagnet 20, air flows appropriately from the center to the outer periphery.

[0222] In the vibration actuator 10, if the default state is the non-excitation state before excitation ( Figure 5 When coil 50 is energized and magnetized in the state shown, a magnetic attraction force is generated in electromagnet section 20. Thus, as... Figure 6 As shown, the magnetic body 70, which is a movable part, approaches the magnetic core body 32 in the vertical direction. At this time, the air in the internal passage 116 is compressed and flows through the airflow bend 114 on the outer periphery 32a of the magnetic core body 32, moving radially outward from the outer periphery 32a. The air on the exhaust adjustment section 110 side is discharged from the outer side of the outer periphery 32a, that is, between the surface where the magnetic core body 32 is fixed (fixed surface) and the spacer 90 (including the space formed by the thickness of the elastic support 60), to the outside of the vibration actuator 10.

[0223] Furthermore, the spacer 90 protrudes from the lower surface 82 of the yoke 80 and is provided with a predetermined width in a direction orthogonal to the vertical direction. The spacer 90 approaches the outer periphery 32a of the core body 32 with a surface having a predetermined width. The spacer 90 is a surface that surrounds the coil 50 around its entire circumference and is included in the exhaust adjustment section 110 together with the outer periphery 32a.

[0224] When air is discharged to the outside from the airflow bend 114, the exhaust adjustment unit 110 can adjust the length (the length in the vertical direction of the vibration direction) between the end 922 of the spacer 90 and the outer periphery 32a when the yoke 80 of the magnetic body 70 is closest to the electromagnet part 20. Through this adjustment, the exhaust adjustment unit 110 obstructs the flow of air from the inside to the outside. As a result, the exhaust adjustment unit 110 applies a load to the end 922 and the outer periphery 32a of the spacer 90, causing the vibration of the magnetic body 70, which is a movable part, to be attenuated.

[0225] The exhaust adjustment section 110 is arranged around the outer periphery 32a of the magnetic core body 32, surrounding the coil 50. That is, the exhaust adjustment section 110 is arranged around the entire periphery of the portion where the magnetic pole portion 34 and the magnetic yoke 80 attract each other.

[0226] Therefore, within the vibratory actuator 10 during operation, air moves approximately evenly from the central portion of the vibratory actuator 10 to the radially outward exterior in a radial direction or the opposite direction. As a result, the vibration of the movable part (magnetic body 70) including the yoke 80, which is a magnetic component, can be effectively attenuated relative to the electromagnet part 20, and the movable part can move well in a balanced vertical direction relative to the electromagnet part 20.

[0227] For example, when the magnetic body 70 is energized and approaches the magnetic core body 32, the narrower the gap between the end 922 and the outer periphery 32a, the more effectively the vibration of the magnetic body 70, or in other words, the force of the spring caused by the magnetic attraction, is attenuated. In the exhaust adjustment section 110, the gap between the spacer 90 and the outer periphery 32a of the magnetic core body 32 is smaller than the gap between the magnetic pole portion 34 of the magnetic core and the yoke 80. This allows for efficient compression, enabling air to be effectively discharged radially outward from the outer periphery 32.

[0228] When compressed in the vertical direction, the air released from the inside to the outside is obstructed by both the spacer 90 and the magnetic core body 32, thus attenuating the vibration of the movable part. As a result, the exhaust adjustment unit 110 can adjust the attenuation of the vibration of the magnetic body 70, appropriately converging the vibration reverberation and giving a clear and appropriate tactile feel.

[0229] The exhaust section 100 causes air to move along the plate surface and circulate inside and outside the vibration actuator 10 via the outer periphery (outer periphery 32a). The exhaust section 100 communicates with the inner and outer regions sandwiched by the space (exhaust adjustment section) between the frame-shaped body (more specifically, each side of the frame-shaped body 91) 91, which is continuous in the radial direction with the spacer joint 92 of the spacer 90, and the outer periphery 32a of the magnetic core body 32.

[0230] The radially inner region is the area between the magnetic core body 32 and the magnetic yoke 80. The radially outer region is formed on the outer side of the outer peripheral portion 32a (the area between the lower surface of the frame-shaped body 91 of the spacer 90 and the fixed surface, or the area of ​​the thickness of the elastic support portion 60 between the fixed surface and the spacer 90 (the magnetic body 70 as a movable part).

[0231] In this state, when the power is stopped, the leaf spring, which acts as an elastic support 60, generates a reaction force, and the movable part (magnetic body 70) moves in the direction of separation from the magnetic core body 32. For example... Figure 10B As shown, the movable part (magnetic body 70) is displaced to a position beyond the default position by the reaction force of the elastic support part 60. At this time, air flows in from the outside to the inside between the spacer between the magnetic core body 32 and the movable part, and air accumulates in the internal passage 116.

[0232] Figure 11A This is a diagram showing the displacement of the movable part in this embodiment. Figure 11B It is a diagram showing the displacement of the movable part in a structure without an exhaust section.

[0233] like Figure 11AAs shown, in the vibration actuator 10, the displacement (curve G1) of the movable part (magnetic body 70) in the structure with exhaust section 100 decreases significantly over time compared to the displacement (curve G2) of the movable part in the structure without exhaust section 100.

[0234] Therefore, compared with the structure without the exhaust section 100, the vibration actuator 10 with the exhaust section 100 in this embodiment can provide the operator with a crisp and clean tactile sensation of the end of vibration without the lingering sound of vibration.

[0235] (Implementation Method 2)

[0236] Figure 12 This is a perspective view showing the state of the vibration actuator in Embodiment 2 of the present invention with the magnetic yoke removed. Figure 13 This is a sub-assembly diagram of the vibration actuator. Figure 14 This is an exploded view of the vibration actuator. Additionally, Figure 15 This is a partial cross-sectional view of the vibration actuator.

[0237] The vibration actuator 10A of Embodiment 2 is formed by modifying or adding a part of the structure of the vibration actuator 10 of Embodiment 1. When it has the same function as the above-described constituent elements, it is labeled with the same name and the same reference numerals and the description is omitted. In addition, constituent elements with substantially the same function are labeled with the same name and labeled with "A" at the end of the same symbol for description.

[0238] like Figures 12-15 As shown in the vibration actuator 10A of Embodiment 2, in the vibration actuator 10 of Embodiment 1, another magnetic pole portion (outer magnetic pole portion 36) may also be provided on the magnetic core body 32 on the outside (radially outside) of the coil 50A.

[0239] In addition to the core portion 30A (including the magnetic core body 32A and the magnetic pole portion 34A) and the annular plate-shaped coil 50A, the vibration actuator 10A also includes an electromagnet portion 20A (including the outer magnetic pole portion 36), a magnetic body 70 (including the magnetic yoke 80 and the spacer 90), and an elastic support portion 60. The elastic support portion 60 provides a balanced and good support for one of the magnetic body 70 and the electromagnet portion 20A (specifically the magnetic core body 32A) in a state perpendicular to the opposite direction (vibration direction) relative to the other, allowing for free movement from one side to the other.

[0240] The electromagnet 20A and the magnetic body 70 generate a magnetic attraction force by energizing the coil 50A. The elastic support 60 supports the electromagnet 20A and the magnetic body 70 by moving freely in the thickness direction with one side of the electromagnet 20A and the magnetic body 70 close to the other side.

[0241] The magnetic core body 32A, like the magnetic core body 32, is a rectangular flat magnetic body, and has a connecting and fixing part 324A extending outward in the surface direction on a pair of opposite sides. The connecting and fixing part 324A engages with the iron core side connecting part 642 of the frame-shaped elastic support part 60 on the radially outer side of the magnetic core body 32A.

[0242] The elastic support 60 is positioned around the magnetic core body 32A and deforms in the Z direction.

[0243] The outer magnetic pole portion 36 is a flat, ring-shaped magnetic body made of the same material as the magnetic pole portion 34A, and is arranged to surround the outer periphery of the coil 50A. The outer magnetic pole portion 36 is arranged on the magnetic core body 32A in such a way that it sandwiches the coil 50A with the magnetic pole portion 34A, and is similarly connected to the magnetic core body 32A. Alternatively, the outer magnetic pole portion 36 may be integrally formed with the magnetic core body 32A.

[0244] The coil 50A is disposed on the substrate body 42A of the substrate portion 40A, which is configured to expose the magnetic pole portion 34A and the external magnetic pole portion 36 on the magnetic core body 32A.

[0245] The substrate portion 40A has a substrate body 42A formed of an insulating film and an extension portion 44A. The substrate portion 40A is an FPC, and the substrate body 42A is composed of an annular insulating film disposed between the magnetic pole portion 34A and the outer magnetic pole portion 36. The extension portion 44A extends from a portion of the outer periphery of the substrate body 42A.

[0246] The substrate portion 40A has the substrate body 42A disposed on the core body 32A, and the extension portion 44A is inserted through the slit 326 formed in the core body 32A and extends outward along the back side of the core body 32A. With this structure, the extension portion 44A does not interfere with the external magnetic pole portion 36 on the core body 32A. Furthermore, the substrate portion 40A is a flexible printed circuit board (FPC), thus enabling reliable and easy wiring of the insulation function towards the coil.

[0247] According to this structure, such as Figure 15 As shown, in the core section 30A, the magnetic pole section 34A and the external magnetic pole section 36 are arranged opposite to the magnetic body 70 and are located on the magnetic circuit.

[0248] Figure 16 This diagram illustrates the action when the magnetic body (yoke) is movable in the vibration actuator of Embodiment 2. Figure 17 This diagram illustrates the operation of the electromagnet section in the vibration actuator of Embodiment 2 when it is movable. (See diagram for example.) Figure 16 and Figure 17As shown, when the annular plate-shaped coil 50A is energized, the magnetic pole portion 34A and the outer magnetic pole portion 36 in the iron core portion 30A attract each other relative to the magnetic body 70 by magnetic force (magnetic attraction). That is, the air gap G between the magnetic pole portion 34A (with a convex shape) formed in the opening 51 of the annular plate-shaped coil 50A and the outer magnetic pole portion 36 (distributed on the outer periphery of the coil 50A) and the magnetic body 70 is shortened. As a result, the magnetic circuit can be further improved, and the electromagnetic conversion efficiency can be increased.

[0249] (Implementation Method 3)

[0250] Figure 18 This is a perspective view showing the state of the vibration actuator in Embodiment 3 of the present invention with the magnetic yoke removed. Figure 19 This is a sub-assembly diagram of the vibration actuator. Additionally, Figure 20 This is an exploded view of the vibration actuator.

[0251] When the vibration actuator 10B of Embodiment 3 has the same function as the vibration actuator 10 of Embodiment 1, it is labeled with the same name and the same reference numerals, and the description is omitted. The name is basically made of the same material. In addition, the components with substantially the same function are labeled with the same name and the same symbol is marked with "B" at the end for description.

[0252] In the vibration actuator 10 of embodiment 1, the elastic support 60 or the spacer 90 may be formed by multiple components respectively.

[0253] Figures 18-20 The vibration actuator 10B of Embodiment 3 shown consists of multiple components that constitute the elastic support and spacer in the structure of the vibration actuator 10.

[0254] The vibration actuator 10B has an electromagnet part 20, an elastic support part 60B including a plurality of elastic arms 66, 68, a magnetic yoke 80, and a spacer 90B including spacers 96, 98.

[0255] The flexible arms 66 and 68 are deformably configured on the outside of the magnetic core body 32 in a manner that surrounds the magnetic core body 32.

[0256] The elastic arms 66 and 68 are formed in the same shape, which are respectively bent into U-shaped strips. They are joined to the spacers 96 and 98 in the central part 602 and to the connecting and fixing parts 324 of the magnetic core body 32 at both ends 604.

[0257] The elastic arms 66 and 68 are arranged in the thickness direction (Z direction) of the vibration actuator 10B between the magnetic core body 32 and the spacers 96 and 98, and are mounted between the magnetic core body 32 and the spacers 96 and 98.

[0258] The spacers 96 and 98, with their thickness, separate the elastic arms 66 and 68 from the yoke 80. Furthermore, the thickness of the spacers 96 and 98, together with the thickness of the elastic arms 66 and 68 (elastic support 60B) and the thickness of the magnetic pole portion 34, sets the air gap (equivalent to...) between the magnetic pole surfaces of the electromagnet portion 20 and the magnetic body 70B that attract each other. Figure 5 (Air gap G). Spacers 96 and 98 are respectively disposed on a pair of separated sides in the magnetic yoke 80.

[0259] Since the elastic arms 66 and 68 and the spacers 96 and 98 are segmented, the size of the components can be reduced compared to when they are each a single part, thus reducing the manufacturing cost of the elastic support 60B and the spacers 90B. Therefore, the vibration actuator 10B can be implemented as a low-cost device.

[0260] (Implementation Method 4)

[0261] Figure 21 This is a perspective view showing the state of the vibration actuator in Embodiment 4 of the present invention with the magnetic yoke removed. Figure 22 This is a sub-assembly diagram of the vibration actuator. Additionally, Figure 23 This is an exploded view of the vibration actuator.

[0262] When the vibration actuator 10C of Embodiment 4 has the same function as the vibration actuator 10 of Embodiment 1, it is labeled with the same name and the same reference numerals and the description is omitted. The same names are basically made of the same materials. In addition, the components with substantially the same function are labeled with the same name and the same symbol is marked with "C" at the end for description.

[0263] In the vibration actuator 10 of embodiment 1, when the electromagnet part is movable, it can also be configured to further provide a counterweight on the electromagnet part 20.

[0264] Figures 21-23 In the structure of the vibration actuator 10C of embodiment 4 shown, the magnetic core body 32C has an external counterweight 38 surrounding the coil 50C radially outward.

[0265] That is, the vibration actuator 10C has an electromagnet part 20C, a magnetic body 70, and an elastic support part 60.

[0266] The core part 30C of the electromagnet part 20C is on the core body 32C, and the magnetic pole part 34C is convexly arranged in the center. The coil 50C is arranged around the magnetic pole part 34C.

[0267] The coil 50C is disposed via the substrate portion 40C in an insulated state relative to the magnetic core body 32C and the magnetic pole portion 34C. The substrate portion 40C includes a planar substrate body 42C with an opening 43C and an extension portion 44C. The extension portion 44C is inserted through a slit 326 in the magnetic core body 32C and extends out from the back side of the magnetic core body 32C. The substrate body 42C is disposed between the magnetic pole portion 34C and the external counterweight 38, thereby insulating the core portion 30C from the coil 50C.

[0268] The external counterweight 38 is formed in the shape of a circular plate and is positioned on the outside of the coil 50C.

[0269] The external counterweight 38 is made of high-density materials such as phosphor bronze, SUS, and tungsten.

[0270] According to this structure, by using coil 50C and iron core 30C as movable parts, the weight of the movable parts can be increased, the vibration output can be improved, and thus high output can be achieved.

[0271] (Implementation Method 5)

[0272] Figure 24 This is a perspective view of the vibration actuator according to Embodiment 5 of the present invention. Figure 25 This is a sub-assembly diagram of the vibration actuator. Additionally, Figure 26 This is an exploded view of the vibration actuator.

[0273] The vibration actuator 10D in Embodiment 5 is formed by modifying or adding a part of the structure of the vibration actuator 10 in Embodiment 1, and its shape is formed as a disk. Therefore, when it has the same function as the above-described constituent elements, it is labeled with the same name and the same symbol and the description is omitted. In addition, constituent elements with substantially the same function are labeled with the same name and the same symbol is marked with "D" at the end for description.

[0274] Compared to the vibration actuator 10 in Embodiment 1, which is a rectangular plate, Figures 24-26 The vibration actuator 10D of Embodiment 5 shown is formed in the shape of a disc. It has a disc-shaped electromagnet part 20D, an annular elastic support part 60D and a disc-shaped magnetic body 70D. The elastic support part 60D is supported by energizing the coil 50D, so that one of the electromagnet part 20D and the magnetic body 70D moves closer to the other and vibrates.

[0275] In the electromagnet section 20D, the vibration actuator 10D has a disc-shaped magnetic pole section 34 protruding from the surface of the central part of the disc-shaped magnetic core body 32D, and a coil 50D is arranged around the magnetic pole section 34. On the outer periphery of the magnetic core body 32D, a connecting and fixing section 324D is provided at a position opposite to the center, and a cutout 322D is formed at a position 90° from the center of the connecting and fixing section 324D, which forms the extension 44D of the mounting base section 40D. Furthermore, the cutout 322D absorbs the thickness of the extension 44D, contributing to the overall thinning of the vibration actuator 10D.

[0276] The core-side connecting portion 642D is stacked and joined to the connecting and fixing portion 324D, and the frame-shaped elastic support portion 60D is configured to surround the magnetic core body 32D.

[0277] The elastic support portion 60D is an annular housing with an iron core side connecting portion 642D that protrudes inward and is arranged opposite to it, and a magnetic yoke side connecting portion 622D that protrudes inward at equal intervals from the iron core side connecting portion 642D.

[0278] The magnetic body 70D has a disk-shaped magnetic yoke 80D corresponding to the elastic support portion 60D, and a spacer joint portion 92D that is configured in a ring shape and symmetrically arranged around the center point and engages with the magnetic yoke side connection portion 622D.

[0279] The spacer joint 92D is formed protruding outward from the outer edge of the annular shape and is connected to the yoke-side connecting portion 622D. Therefore, when the elastic support portion 60D moves downward, the yoke-side connecting portion 622D also moves downward, and consequently, the spacer joint 92D connected to it also moves downward, and the spacer 90D follows suit. With the displacement of the spacer 90D, the yoke 80D on the spacer 90D also moves downward, and the magnetic body 70D is appropriately displaced.

[0280] The vibration actuator 10D is formed into a disk shape, thus reducing the number of edges in its shape and improving accuracy.

[0281] The magnetic core body 32D and the spacer 90D are alternately joined at equal intervals along the circumferential direction relative to the elastic support 60D in a direction orthogonal to the vibration direction.

[0282] Thus, one of the electromagnet part 20D (more specifically, the magnetic core body 32D) and the magnetic body 70D is well supported in a balanced state relative to the other and perpendicular to the opposing direction (vibration direction), so that it can move freely from one side to the other.

[0283] The electromagnet 20D and the magnetic body 70D generate a magnetic attraction by energizing the annular coil 50D. The elastic support 60D moves and vibrates in the thickness direction as one of the electromagnet 20D and the magnetic body 70D approaches the other.

[0284] In the above embodiments, different constituent elements, such as external magnetic poles, external counterweights, multiple spacers, and multiple elastic support parts (elastic arms), can also be appropriately applied to other embodiments.

[0285] Furthermore, in the vibration actuators 10, 10A, 10B, 10C, and 10D of each embodiment, an electrostatic capacitance detection unit may be provided between the electromagnet parts 20, 20A, 20B, 20C, and 20D and the magnetic bodies 70, 70B, and 70D. Alternatively, a strain detection sensor with a strain gauge may be provided in the elastic support parts 60 and 60D.

[0286] <Variation Example>

[0287] Figure 27 This is a diagram illustrating a modified example of the vibration actuator according to an embodiment of the present invention.

[0288] Figure 27 The vibration actuator 10E shown includes a strain detection unit (strain detection sensor) 14 and an electrostatic capacitance detection unit (proximity sensor) 16 as a proximity detection unit. Alternatively, when detecting operating loads, the vibration actuator may also have a structure that includes either the strain detection unit 14 or the electrostatic capacitance detection unit 16.

[0289] The system includes a strain detection unit 14 equipped with a strain gauge. The strain detection unit 14 detects the strain of the elastic support 60, which deforms when the magnetic body 70, which is a movable part, is pressed into the opening from the bottom view side (pressing operation direction). The detected strain is output to a control unit, etc., and the coil 50 is energized to attract and move the yoke 80, so as to be the amount of movement of the movable part (e.g., the magnetic body 70) corresponding to the strain.

[0290] Furthermore, when the vibration actuator 10E is disposed in the device housing such that the spring serving as the elastic support 60 is strained due to the operating load, the operating load can also be detected.

[0291] Specifically, the strain detection unit 14 is used to detect the operator's contact operation, that is, the amount of indentation of the movable part (e.g., magnetic body 70).

[0292] The vibration period of the movable part (e.g., magnetic body 70) when a drive current pulse is supplied by port 1 (current pulse supply unit) can also be adjusted based on the sensor detection results of strain detection unit 14. That is, the vibration generated by the drive can be adjusted according to the strain detection results.

[0293] An electrostatic capacitance detection unit 16 is provided on the magnetic core body 32 to detect changes in the electrostatic capacitance in the magnetic core body 32 caused by the movement of the magnetic body 70. The electrostatic capacitance detection unit 16 can be arbitrarily set as long as it detects the relative distance, i.e., closeness, between the magnetic body 70 (yoke 80, spacer 90, etc.) and a part of the electromagnet part 20.

[0294] Therefore, the movable part can detect the operator's pressing operation, and the control unit generates a vibration corresponding to the operation via the vibration actuator and applies it to the operator. In this way, the vibration can be adjusted based on the electrostatic capacitance detection result, and the operation load can also be detected when the vibration actuator 10E is configured such that the electrostatic capacitance changes according to the operation load.

[0295] Furthermore, the vibration actuator 10E can also be configured such that, instead of the structure of the vibration actuator 10, a strain detection unit (strain detection sensor) 14 and an electrostatic capacitance detection unit (proximity sensor) 16 as a proximity detection unit are added to the structure of the vibration actuators 10A to 10H. In the vibration actuators 10A to 10H, the same function and effect as the vibration actuator 10E can be obtained.

[0296] In addition, the vibration actuators 10A to 10E all have the same exhaust section as the exhaust section 100 of the vibration actuator 10, and have the same function and effect.

[0297] (Implementation Method 6)

[0298] Figure 28 This is a perspective view of the vibration actuator 10 according to Embodiment 6 of the present invention. Figure 29 This is a sub-assembly diagram of the vibration actuator. Figure 30 This is an exploded view of the vibration actuator.

[0299] The vibration actuator 10F of Embodiment 6 is formed by modifying or adding a part of the structure of the vibration actuator 10 of Embodiment 1. Hereinafter, when describing the vibration actuator 10F, components that are identical to those of the vibration actuator 10 will be labeled with the same names and symbols, and their descriptions will be omitted. Furthermore, components that have substantially the same function will be labeled with the same names and will be described with "F" appended to the same symbols.

[0300] like Figures 28-30As shown in the vibration actuator 10F of embodiment 6, in the structure of the vibration actuator 10, a communication hole 83 that connects the internal passage to the outside may also be provided in the magnetic component (magnetic yoke 80).

[0301] The vibration actuator 10F has: an iron core portion 30 having a magnetic core body 32 and a magnetic pole portion 34; a ring-shaped coil 50 surrounding the magnetic pole portion 34; a magnetic body 70F including a magnetic yoke 80F having a connecting hole 83 and a spacer 90; and an elastic support portion 60.

[0302] A magnetic attraction is generated between the electromagnet section 20, which has an iron core section 30 and a coil 50, and the magnetic body 70F (especially the magnetic yoke 80F, which is a magnetic component), by energizing the coil 50. The elastic support section 60 supports the electromagnet section 20 and the magnetic body 70 in a way that one is close to the other in the thickness direction. Here, the magnetic yoke 80 is supported on the iron core section 30 as a movable part.

[0303] As the vibration actuator 10F is driven, the connecting hole 83 obstructs the force that causes the internal air to flow through the outer periphery of the vibration actuator, thereby moving the magnetic body 70F, and adjusts the amount of movement of the magnetic body 70F.

[0304] Figure 31A It is a partial cross-sectional view showing the flow of internal air under energized conditions. Figure 31B This is a diagram showing the flow of internal air under no-excitation conditions. Furthermore, Figure 31A The excitation state of the vibration actuator shown indicates when thrust is generated. Figure 31B The no-excitation state of the vibration actuator indicates that when the spring reaction force is generated, the magnetic body 70 is maximally separated from the magnetic core body 32 by the reaction force of the elastic support 60. Additionally, in Figure 31A as well as Figure 31B For convenience, the extension 44 of the wiring section is omitted from the illustration.

[0305] If the magnetic body 70F is designated as the first planar body, then the connecting hole 83 is positioned opposite the second planar body. Specifically, the connecting hole 83 is disposed in the magnetic body 70F (yoke 80F and spacer 90) at a position opposite to the magnetic pole portion 34 at the center of the magnetic core body 32.

[0306] The connecting hole 83 functions as part of the exhaust section 100F, which is formed in the same way as the exhaust section 100.

[0307] In the vibration actuator 10F, the connecting hole 83 is provided after the discharge section 112, the exhaust adjustment section 110, the airflow bending section 114, and the internal passage 116, which are sequentially connected from the outside to the inside of the magnetic core body 32. Furthermore, the discharge section 112, the exhaust adjustment section 110, the airflow bending section 114, and the internal passage 116 are included in the exhaust section 100F.

[0308] Thus, the exhaust section 100F is formed within the vibration actuator 10F in such a way that it is connected to the surface side of the outer periphery and the central section.

[0309] The exhaust section 100F is formed between the magnetic core body 32 and the magnetic body 70F in a closed manner (in such a way as to become a closed internal space) by communicating with the outside only through the exhaust adjustment section 110.

[0310] like Figure 31A As shown, the exhaust section 100F closes the space between the yoke 80F and the electromagnet 20 in the vertical direction, forming an airflow along the direction of the plate surface in the space when they approach each other. The exhaust section 100F causes the airflow to flow from the outer periphery of the yoke 80F and the electromagnet 20 (the outer periphery 32a of the magnetic core body 32) to the outside.

[0311] The exhaust section 100F, like the exhaust section 100, is formed into a labyrinth shape, and air is released to the outside through the connecting hole 83 on the surface side of the central part of the magnetic yoke 80F and the exhaust adjustment section 110 formed by the outer periphery 32a of the magnetic core body 32.

[0312] The exhaust section 100F is in its default state as a no-excitation condition. Figure 31B In the unexcited state where the magnetic yoke 80F is separated from the magnetic core body 32 or separated by the maximum distance, air is drawn in from the outside to the inside.

[0313] The internal air, compressed vertically by the drive, flows through the spacer 90 and the magnetic core body 32 (exhaust adjustment section 110) and the connecting hole 83, creating an airflow. As the air passes through the exhaust adjustment section 110, its flow is obstructed by the spacer 90 and the magnetic core body 32, causing pressure variations between the opposing surfaces of the electromagnet section 20 and the magnetic body 70F, thus attenuating the vibration of the magnetic body 70F. Furthermore, the vibration of the magnetic body 70F is further attenuated as the air passes through the connecting hole 83.

[0314] In this way, the exhaust section 100F causes the vibration to be attenuated by the reciprocating movement of the magnetic core body 32 and the magnetic body 70F relative to the surface of the magnetic core body 32 in the direction perpendicular to the surface towards the contact separation direction.

[0315] Furthermore, the connecting hole 83 is preferably symmetrically arranged on the vibration actuator 10F or the magnetic yoke 80F when viewed from above.

[0316] In addition to attenuating the vibration based on the exhaust adjustment section 110, the connecting hole 83 can also perform more detailed attenuation adjustments. Thus, the vibration actuator 10F can adjust the amount of vibration attenuation of the magnetic body 70F.

[0317] In this way, the vibration actuator 10F attenuates the vibration of the moving magnetic body 70 (yoke 80), and like the other vibration actuators 10, 10A to 10E, it can eliminate the vibration (vibration aftersound) during contact operation, giving a crisp and clear tactile sensation of strength and weakness.

[0318] (Implementation Method 7)

[0319] Figure 32 This is a sub-assembly diagram of the vibration actuator according to Embodiment 7 of the present invention. Figure 33 This is an exploded view of the vibration actuator.

[0320] The vibration actuator 10G of Embodiment 7 is formed by modifying or adding a part of the structure of the vibration actuator 10 of Embodiment 1. Hereinafter, when describing the vibration actuator 10G, the same components as the components of the vibration actuator 10 will be labeled with the same name and the same symbol and the description will be omitted. The same components with the same name and the same symbol will be labeled with "G" at the end and the description will be provided.

[0321] like Figure 32 as well as Figure 33 As shown in the vibration actuator 10G of Embodiment 7, in the structure of the vibration actuator 10 of Embodiment 1, a communication hole 39 that connects the internal passage 116 (see Figure 34) to the outside can also be provided in the iron core 30G.

[0322] The vibration actuator 10G has the same structure as the vibration actuator 10, except that the structure of the electromagnet part 20G is different. In addition to the coil 50 and the substrate part 40, the electromagnet part 20G also has a through hole 39 in the iron core part 30G, which is formed into a thin plate and is magnetized in the thickness direction (Z direction).

[0323] In addition to the iron core portion 30G, the vibration actuator 10G also has an electromagnet portion 20G, similar to the vibration actuator 10. The electromagnet portion 20G includes a ring-shaped coil 50 surrounding the magnetic pole portion 34G and a base plate portion 40. Furthermore, the vibration actuator 10G includes: a magnetic body 70, which includes a magnetic yoke 80 movable relative to the electromagnet portion 20G and a spacer 90; and an elastic support portion 60, which movably connects the magnetic body 70 to the electromagnet portion 20G.

[0324] The connecting hole 39 of the core portion 30G is formed in the central part of the core portion 30G.

[0325] The core portion 30G has a core body 32G that serves as a plate as a magnetic body and a magnetic pole portion 34G disposed on the upper surface of the core body 32G.

[0326] A through hole 320 is provided in the center of the magnetic core body 32G, and a through hole 342 communicating with the through hole 320 is provided in the center of the magnetic pole part 34G. The through holes 320 and 342 constitute the connecting hole 39 of the iron core part 30G, and the connecting hole 39 is connected to the internal passage 116 of the vibration actuator 10G (see reference). Figure 34A , Figure 34B ( ) Connect. In addition, the through holes 320 and 342 are, for example, formed as circles of the same diameter.

[0327] A magnetic attraction is generated between the electromagnet section 20G, which has an iron core section 30G and a coil 50, and the magnetic body 70 (particularly the magnetic yoke 80 as a magnetic component), by energizing the coil 50. The elastic support section 60 supports the electromagnet section 20G and the magnetic body 70 in a way that one is close to the other in the thickness direction. For example, the elastic support section 60 supports the magnetic yoke 80 as a movable part, allowing it to move freely on the iron core section 30G.

[0328] As the vibration actuator 10G drives the connecting hole 39, it adjusts the amount of vibration attenuation that causes the magnetic body 70 to move by allowing the internal air to circulate through the outer periphery of the vibration actuator.

[0329] Figure 34A It is a partial cross-sectional view showing the flow of internal air under energized conditions. Figure 34B This is a diagram showing the flow of internal air under no-excitation conditions. Furthermore, Figure 34A The excitation state indicates when thrust is generated. Figure 34B The unexcited state of a vibration actuator indicates the generation of spring reaction force after the coil has been energized. Figure 34B The image shows the state in which the magnetic body 70 is maximally separated from the magnetic core body 32 by the reaction force of the elastic support 60. Furthermore, in... Figure 34A as well as Figure 34B For convenience, the illustration of the extension 44 of the wiring section has been omitted.

[0330] The connecting hole 39 is provided in the electromagnet part 20G. If the magnetic body 70 is a first planar body, it is disposed in the center of the second planar body opposite to the first planar body. Specifically, in the top-view rectangular vibration actuator 10, the connecting hole 39 is provided in the center of the second planar body and functions as part of the exhaust part 100G, which is formed in the same way as the exhaust part 100.

[0331] In the exhaust section 100G, the magnetic yoke 80 and the electromagnet section 20G substantially block the space between them in the vertical direction (opening at the outer periphery and the connecting hole 39 when separated), and when they approach each other, an airflow is formed in the space along the direction of the plate surface. The exhaust section 100G causes the airflow to flow from the outer periphery 32 of the magnetic yoke 80 and the electromagnet section 20G to the outside.

[0332] In the vibration actuator 10G, the connecting hole 39 is provided in connection with the internal passage 116, which is sequentially connected from the outside of the magnetic core body 32G toward the center, including the discharge section 112, the exhaust adjustment section 110G, the airflow bending section 114, and the internal passage 116. The exhaust section 100G includes the discharge section 112, the exhaust adjustment section 110G, the airflow bending section 114, the internal passage 116, and the connecting hole 39.

[0333] Thus, the exhaust section 100G is formed within the vibration actuator 10G in such a way that it connects to the back side of the outer periphery and the center. When the vibration actuator 10G is fixed to the fixing surface of a product or the like, it is preferable to fix it in such a way that the connecting hole 39 in the center of the magnetic core body 32G is not blocked from the outside.

[0334] When the vibration actuator 10G drives the magnetic yoke 80 to approach the magnetic core body 32G, as Figure 34A As shown, the exhaust section 100G utilizes internal air to dampen the vibrations caused by the relative movement of the yoke 80 relative to the magnetic core body 32G, and releases the internal air to the outside. The exhaust section 100G, like the exhaust section 100, is formed in a labyrinth shape, including labyrinth-shaped gaps.

[0335] The exhaust section 100G releases the internal air between the magnetic core body 32G and the magnetic yoke 80 to the outside through the exhaust adjustment section 110G, which is formed by the connecting hole 39 on the back side of the central part of the magnetic yoke 80 and the outer peripheral part 32a of the magnetic core body 32G.

[0336] In addition to adjusting the flow rate (release amount) of the air released by the exhaust adjustment unit 110G, the connecting hole 39 can also adjust the amount of air discharged.

[0337] 100G exhaust section Figure 34B In the un-excited state where the magnetic yoke 80 is separated from the magnetic core body 32G or separated by the maximum distance, air is drawn in from the outside to the inside. In addition, in the un-excited state (default state) after the exhaust section 100G moves due to the reaction force of the spring before or after coil excitation, it becomes a state in which air is drawn in from the outside.

[0338] In the vibration actuator 10G, internal air compressed in the vertical direction by driving passes between the spacer and the magnetic core body 32G (exhaust adjustment section 110G) and the connecting hole 39. When the air passes through the exhaust adjustment section 110G, its flow is hindered by the spacer 90 and the magnetic core body 32G, causing the vibration of the magnetic body 70 to be attenuated. When it passes through the connecting hole 39, the vibration can be further attenuated.

[0339] The exhaust section 100G draws in and exhausts internal air by reciprocating relative to the magnetic core body 32G and the magnetic body 70G in the contact separation direction in the direction perpendicular to the surface of the magnetic core body 32G, thereby reducing vibration.

[0340] By attenuating the vibration in this way, similar to other vibration actuators 10, 10A to 10F, the vibration of the aftershock during contact operation, in other words, the vibration aftershock converges, which can give a crisp and clear tactile sensation of varying strength.

[0341] In addition to adjusting the vibration attenuation in the exhaust adjustment section 110G, the connecting hole 39 can also perform more detailed attenuation adjustments.

[0342] Therefore, the exhaust adjustment unit 110G can adjust the amount of attenuation of the force that moves the movable part (magnetic body 70).

[0343] The through holes 342 and 320 can be of any shape and size as long as they are connected. Furthermore, the through holes 39 are preferably arranged symmetrically when viewed from below in the vibration actuator 10G or the magnetic core body 32G. Alternatively, multiple through holes 39 may be provided in the electromagnet section 20G.

[0344] (Implementation Method 8)

[0345] Figure 35 This is a perspective view of the vibration actuator 10H according to Embodiment 8 of the present invention. Figure 36 yes Figure 35 A partial sectional view looking towards the RR line. Additionally, Figure 37 This is a sub-assembly diagram of the vibration actuator. Figure 38 This is an exploded view of the vibration actuator.

[0346] The vibration actuator 10H of Embodiment 8 is formed by modifying a portion of the structure of the vibration actuator 10 of Embodiment 1. In the vibration actuator 10H, components having the same function as the aforementioned components are labeled with the same names and reference numerals, and descriptions are omitted. Furthermore, in this embodiment and other embodiments, components with the same names as those in Embodiment 1 are essentially made of the same material. Additionally, components having substantially the same function are labeled with the same names and marked with "H" at the end of the same symbol for explanation.

[0347] like Figures 35-38 The vibration actuator 10H shown in Embodiment 8 is a structure in Embodiment 1 where the order of the elastic support portion 60 and the spacer 90 stacked on the magnetic core body 32H is changed.

[0348] The vibration actuator 10H is constructed by sequentially stacking spacers 90H, elastic supports 60, and a magnetic yoke 80H on a magnetic core body 32H. The vibration actuator 10H has an internal exhaust section 100H (see reference). Figure 36 ).

[0349] Specifically, the vibration actuator 10H includes: an electromagnet part 20H that includes a spacer 90H in addition to an iron core part 30H (magnetic core body 32H and magnetic pole part 34H) and a ring plate-shaped coil 50; a magnetic yoke 80H (magnetic body 70H); and an elastic support part 60.

[0350] The electromagnet part 20H and the yoke 80H (magnetic body 70H) generate magnetic attraction by energizing the coil 50. The elastic support part 60 supports one of the yoke 80H and the electromagnet part 20H in a balanced and vertical state relative to the other relative to the opposing direction (vibration direction and thickness direction), allowing them to move freely from one side to the other.

[0351] For example, the vibration actuator 10H fixes the magnetic yoke 80H to the fixed surface of the product, and a gap a is formed between it and the magnetic core body 32H.

[0352] The magnetic core body 32H is a rectangular plate-shaped magnetic body with essentially the same function as the magnetic core body 32. The magnetic core body 32H is a square plate-shaped body with a different shape from the magnetic core body 32 when viewed from above.

[0353] A magnetic pole portion 34H is disposed in the center and a frame-shaped spacer 90H is disposed on the upper surface of the magnetic core body 32H.

[0354] The spacer 90H has spacer joints 92 extending outward from each side of the frame-shaped body 91, which is formed in the shape of a rectangular frame (square frame).

[0355] The upper surface of the spacer joint 92 is fixed to the core-side connecting portion 642 of the elastic support portion 60. The spacer 90H is sandwiched between the magnetic core body 32H and the elastic support portion 60 in a direction perpendicular to the plate surface of the magnetic core body 32H. The spacer 90H separates the yoke 80H from the electromagnet portion 20H in a manner that allows it to move in the vertical direction.

[0356] The spacer 90H supports the frame-shaped elastic support 60 on its outer side, making it deformable. According to this structure, the spacer 90H has a thickness for ensuring the deformation area of ​​the elastic support 60 and the movement area of ​​the magnetic yoke 80H that moves via the elastic support 60.

[0357] The thickness of the spacer 90H, together with the spacing between the elastic support 60 and the magnetic core body 32H, forms the gap between the yoke 80, the coil 50, and the magnetic pole portion 34, i.e., the air gap. Thus, the movable area of ​​the yoke 80H in the vibration actuator 10H is sufficiently set, enabling it to have appropriate vibration characteristics.

[0358] Spacer 90H has the advantage of being able to use sheet metal with a thickness that can be easily and accurately set, and is a non-magnetic material, but it can also be a magnetic material. Spacer 90H is formed, for example, from a high-precision steel sheet using austenitic stainless steel strip manufactured by cold rolling. Furthermore, like spacer 90, the design of spacer 90H can increase the degree of freedom of elastic components such as leaf springs used in elastic support 60.

[0359] Alternatively, the spacer 90H can also be formed using a high-density material. Furthermore, the spacer 90H is positioned slightly inward from the outer periphery of the magnetic core body 32H. The maximum external dimensions (viewed from above) of the vibration actuator 10H are determined based on the external dimensions of the magnetic core body 32H.

[0360] The elastic support portion 60 connects and elastically supports the electromagnet portion 20H and the yoke 80H, which is a magnetic body 70H, allowing them to move freely relative to each other. Specifically, the elastic support portion 60 is disposed on the outside of the coil 50, connecting the spacer 90H to the yoke 80H.

[0361] The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in layers between the spacer 90H and the magnetic yoke 80H in the thickness direction (Z direction).

[0362] The elastic support 60 is connected to the spacer joint 92 at the iron core side connection 642, and is arranged such that the frame-shaped body 91 of the spacer 90H, the coil 50 and the magnetic pole part 34 are located inside the opening 61.

[0363] The elastic support portion 60 has a pair of yoke-side connecting portions 622 adjacent to a pair of opposing side portions 64. The yoke connecting portion 84 of the yoke 80H is connected to the yoke-side connecting portion 622. The yoke 80H is configured to be opposite the magnetic pole portion 34H and the coil 50 at its central portion.

[0364] The yoke-side connecting part 622 positions the yoke 80H (magnetic body 70H) in a stacked state in the Z direction.

[0365] like Figure 36 As shown, the elastic support 60 provides elastic support to the yoke body 86 located inside the frame-shaped portion of the frame portion using a pair of opposite portions (yoke-side connecting portions 622). Thus, the elastic support 60 can provide balanced and good support to the yoke 80H, enabling it to vibrate stably.

[0366] Furthermore, the yoke-side connecting portion 622 and the core-side connecting portion 642 are planar components that extend inward from the edges 62 and 64 of the frame-shaped portion constituting the elastic support portion 60. The yoke-side connecting portion 622 and the core-side connecting portion 642 are connected to the yoke connecting portion 84 and the spacer engagement portion 92 respectively at their respective opposing edges of the elastic support portion 60, such that their surfaces are in contact with each other in the Z direction.

[0367] The yoke-side connecting portion 622 and the core-side connecting portion 642 are positioned within the rectangular frame-shaped elastic support portion 60, rotated 90 degrees relative to each other, and are configured to have the same length and width. Therefore, during assembly, it is unnecessary to determine the orientation of the elastic support portion 60, improving assemblability. Furthermore, the frame-shaped elastic support portion 60 allows for an extended spring length, ensuring stable assembly. Additionally, the integral structure of the elastic support portion 60 improves component precision.

[0368] The magnetic yoke 80H has the same function as the magnetic yoke 80. By energizing the coil 50, it attracts the magnetic pole 34H in the energized state by utilizing the magnetic attraction generated between the coil and the magnetic pole 34. In the unenergized state, it moves away from the magnetic pole 34H.

[0369] The magnetic yoke 80H is a flat magnetic body arranged opposite to the magnetic pole portion 34H and the coil 50. The magnetic yoke 80H is positioned above the magnetic pole portion 34H and the coil 50 on its lower surface 82.

[0370] The yoke 80H has a yoke body 86 consisting of a rectangular plate disposed within the frame-shaped portion of the elastic support portion 60, and yoke connecting portions 84 extending in the Y direction from a pair of parallel sides separated in the Y direction from the yoke body 86. The yoke 80H engages the pair of yoke connecting portions 84 with a pair of yoke side connecting portions 622, and is fixed in a suspended state within the elastic support portion 60.

[0371] like Figure 36 As shown, the exhaust section 100H is arranged between the electromagnet section 20H and the yoke 80H, which is a magnetic body 70H, in a manner that connects the yoke 80H side to the interior of the vibration actuator 10H. Figure 36In the middle, the vibration actuator 10H installed on the fixed surface is in a non-excited state. The length a represents the length from the fixed surface of the magnetic yoke 80H and the electromagnet part 20H in the initial position to the surface of the magnetic yoke 80H.

[0372] When the exhaust section 100H moves relative to the surfaces of the yoke 80H and the electromagnet section 20H in the direction of contact separation in the perpendicular direction to the magnetic core body 32H, the air generated inside will be discharged to the outside.

[0373] Specifically, the exhaust section 100H includes an exhaust section 112H, an exhaust adjustment section 110H, an airflow bend section 114H on its inner side, and an internal passage 116H. The exhaust section 100H is formed in a closed manner between the magnetic core body 32H and the magnetic yoke 80H, communicating with the outside only through the exhaust adjustment section 110H. In addition, the airflow bend section 114H and the internal passage 116H are the same as the airflow bend section 114 and the internal passage 116 described above, so their description is omitted.

[0374] The discharge section 112H is formed on the outside of the magnetic yoke 80H between the inside of the elastic support section 60. When the vibration actuator 10H is mounted on the fixed surface, the discharge section 112H is positioned on the fixed surface side.

[0375] The exhaust adjustment section 110H is formed by the gap between the outer periphery 861 of the yoke 80H (yoke body 86) and the frame-shaped body 91 of the spacer 90H. Specifically, it is formed by the gap between the opposing surfaces of the outer periphery 861 of the yoke 80H and the frame-shaped body 91 of the spacer 90H. By adjusting this gap, the exhaust adjustment section 110H adjusts the amount of air obstructed when flowing from the inside to the outside of the vibration actuator. As a result, the attenuation of the vibration of the movable part can be adjusted.

[0376] In the vibration actuator 10H, the exhaust section 100H is formed by the thickness of the outer periphery 861 of the magnetic yoke 80H, the layer on the outer periphery 861 having an exhaust adjustment section 110H, the airflow bending section 114H, and the internal passage 116H, forming a stepped gap that curves vertically. Furthermore, when the magnetic yoke 80H is mounted on a fixed surface, the exhaust section 100H together with the fixed surface forms a labyrinth-shaped gap.

[0377] Figure 39A It is a partial cross-sectional view showing the flow of internal air under energized conditions. Figure 39B This is a diagram showing the flow of internal air under no-excitation conditions. Furthermore, Figure 39A The excitation state of the vibration actuator shown indicates when thrust is generated. Figure 39B The no-excitation state of the vibration actuator indicates that when the spring reaction force is generated, the magnetic body 70H is in a state where it is maximally separated from the magnetic core body 32H due to the reaction force of the elastic support.

[0378] When the vibration actuator 10H drives the yoke 80H to approach the magnetic pole portion 34H or the magnetic core body 32H, the exhaust portion 100H releases air to the outside (outer exhaust portion 112H) via the exhaust adjustment portion 110H. The exhaust adjustment portion 110H is located between the outer periphery 861 of the yoke 80H and the frame-shaped body 91 of the spacer 90H.

[0379] The exhaust section 100H, configured as a stepped gap with upward and downward curves, forms an airflow along the direction of its surfaces as the electromagnet section 20H and the magnetic body 70H approach each other. Pressure variations are generated between the opposing surfaces of the electromagnet section 20H and the magnetic body 70H, applying a load. This load impedes the airflow and dampens vibrations caused by the relative movement of the electromagnet section 20H and the magnetic body 70H.

[0380] The exhaust section 100H obstructs and discharges the compressed internal air as it moves between the inside and outside of the vibration actuator 10H, thereby suppressing the vibration (vibration echo) of the relatively moving electromagnet section 20H and providing a crisp tactile feedback.

[0381] When the exhaust section 100H is in an energized state, that is, when it is attracted and pulled close to the magnetic body 70H by the energized iron core section 30H, specifically the magnetic yoke 80H, the internal air existing between the magnetic body 70H, which is a movable part, and the surface opposite the fixed part is discharged to the outside.

[0382] Additionally, the exhaust section 100H is in a de-energized state when the yoke 80H moves the maximum distance away from the core body 32H (refer to...). Figure 39B ( ) under, air is drawn in from the outside to the inside.

[0383] In the vibration actuator 10H, Figure 36 The de-energized state shown is the default state, which is a state in which air is drawn into the interior of the vibration actuator 10H. In the vibration actuator 10H, if in the default state ( Figure 36 When coil 50 is energized and excited in the state shown, a magnetic attraction force is generated in electromagnet section 20H. Thus, as... Figure 39A As shown, the yoke 80H, which is a movable part, approaches the magnetic core body 32H or the magnetic pole part 34H. At this time, the air in the internal passage 116H is compressed and flows through the air flow bend 114H to the outer periphery 861 side of the yoke body 86 of the yoke 80H, and moves radially outward from between the outer periphery 861 and the frame-shaped body 91 of the spacer 90H.

[0384] That is, the internal air is discharged through the exhaust adjustment section 110H to the radially outer side of the outer peripheral portion 861, that is, above the spacer 90 and outside the outer peripheral portion 861, to the outside of the vibration actuator 10H (including the space formed by the thickness of the elastic support section 60).

[0385] When air is discharged to the outside from the airflow bend section 114H, the exhaust adjustment section 110H adjusts the length (the length in the vibration direction, i.e., the Z direction) between the frame-shaped body 91 of the spacer 90H and the outer peripheral section 861 when the magnetic yoke 80H is closest to the iron core section 30H.

[0386] For example, when the yoke 80H is energized and approaches the core 30H, the closer the outer periphery 861 and the frame body 91 are, the more the air is obstructed, and pressure changes are generated in the exhaust adjustment section 110H, which greatly reduces the vibration of the electromagnet side containing the core body 32H.

[0387] Thus, in the vibration actuator 10H, the internal air compressed in the vertical direction by the drive passes between the spacer 90H and the yoke 80H (exhaust adjustment section 110H). The internal air is obstructed when passing through the exhaust adjustment section 110H, which can attenuate the vibration of the yoke 80H. By attenuating the vibration in this way, similar to other vibration actuators 10, 10A to 10G, the vibration reverberation during contact operation, in other words, the vibration reverberation converges, which can give a crisp and clear tactile sensation of varying strength.

[0388] <Vibration alert device (contact input device) 500>

[0389] Figure 40 This is a top view showing an example of a vibration alert device with a vibration actuator. Furthermore, in Figure 40 In the middle, for convenience, the perspective illustration shows the surface-shaped main body of the plate that the operator presses with their fingers.

[0390] Vibration alert device 500 is, for example, a touchpad used as an indicator device in a laptop computer or similar device, replacing a mouse.

[0391] The touchpad, which serves as a vibration alert device 500, is disposed in a rectangular opening provided in the casing of a laptop or similar device. The touchpad has a plate-shaped main body 510 that can be drawn with a finger as a touch operation, a vibration actuator 10 disposed on the back of the main body 510, and a frame portion 520 that separates the opening portion surrounding the vibration actuator 10.

[0392] When the touchpad is touched, such as by tracing or tapping the main body 510 with a finger, the vibration actuator 10 is subjected to tactile vibration. In addition, the vibration actuator 10 can be changed to any one of the vibration actuators 10A to 10H.

[0393] The vibration actuator 10 in the touchpad mounts a magnetic body 70 to the back of the touchpad body 510, directly driving the touchpad body 510 to impart vibration to the operator. Specifically, as... Figure 40 As shown, the back side of the magnetic core body 32 is fixed to the bottom 530 of the opening of the housing as a fixing surface, and the magnetic body 70 is fixed to the back side of the plate body 510. The plate body 510 is configured to close the opening at the top.

[0394] Furthermore, the main body 510 is fixedly mounted to the magnetic body 70 using double-sided tape or the like as a mounting material. Additionally, in the structure of the vibration alerting device 500, the vibration actuator 10 can also be mounted to indirectly drive the main body 510 via the magnetic body 70 to impart vibration.

[0395] Alternatively, when a contact operation such as tracing with a finger or tapping the main body 510 is performed, a pressure sensor (not shown) (or a strain detection sensor (strain detection unit 14) or a proximity sensor 16) senses the operation and drives the vibration actuator 10 based on the signal from the pressure sensor.

[0396] For example, suppose we use a vibration actuator 10 with a pressure-sensitive sensor (or Figure 27 The structure shown is that of a vibration actuator 10E with a proximity sensor 16. According to this structure, when an operator operates the plate body 510, the plate body 510 is pressed and displaced, and consequently, the magnetic body 70 displaces, which is detected by the pressure sensor (or proximity sensor 16, etc.). That is, after the operation begins, an input signal (actuator drive signal) is input to the vibration actuator from the pressure sensor, and the magnetic body 70 moves in the pressing direction (Z direction), displacing downwards. When the magnetic body 70 displaces downwards, it moves to a position above the initial operating reference position due to the reaction force of the elastic support 60. The plate body also displaces accordingly.

[0397] In this way, specifically when the vibration prompting device 500 is operated by the contact between the operator's fingertip or other pressing object and the main body 510 of the touchpad, the vibration actuator 10 is driven to vibrate accordingly. Through this vibration, a tactile sensation is provided to the operator. For example, in the case of pressing a switch, the tactile sensation of pressing a switch can be provided.

[0398] Furthermore, since the vibration actuator 10 is disposed on the back of the main body 510, vibration can be directly applied to provide excellent tactile feedback. In addition, the vibration actuator 10 is a thin, flat plate, so it does not occupy a large amount of space in the vibration feedback device (contact input device) 500, thus improving the design of the contact input device.

[0399] Furthermore, in electronic devices equipped with touchpads, such as those with a display section like an LCD screen, the vibration actuator 10 can impart various tactile sensations to the touchpad in correspondence with the displayed image operated by the user. The vibration actuator 10 can also generate vibrations in a manner that imparts a tactile sensation corresponding to the image of a mechanical switch that is being touched and operated. Examples of mechanical switches include tactile switches, alternating switches, momentary switches, toggle switches, slide switches, rotary switches, DIP switches, and rocker switches. Additionally, in push-button switches, different degrees of pressure can be imparted to the switch's tactile sensation.

[0400] Thus, the vibration alerting device 500 of this embodiment achieves a realistic tactile feedback, similar to that of a switch, through a realistic tactile feedback based on load detection. Furthermore, the aforementioned vibration actuators 10A to 10H naturally use the same magnetic circuit as the vibration actuator 10 (see reference...). Figure 8 as well as Figure 9 It is driven by the driving principle.

[0401] Furthermore, in the vibration actuators of various embodiments and modifications, a magnetic body and an electromagnet are included as magnetic components. Additionally, the magnetic bodies 70, 70B, 70D, 70F, 70G, 70H, and the magnetic bodies (magnetic components) described later can be any structure containing a magnetic material. For example, if the magnetic body is a first planar body, then any configuration that drives a second planar body having an electromagnet portion in the direction perpendicular to the surface (the direction orthogonal to both surfaces) is acceptable.

[0402] Furthermore, the following embodiments are formed by modifying or adding parts of the structure of the vibration actuator 10 described above. When they have the same function as the constituent elements described above, they are marked with the same names and reference numerals and the description is omitted.

[0403] In addition, for convenience, other names will sometimes be used to refer to the above-mentioned constituent elements. Furthermore, these different names may also be applied to the above-mentioned constituent elements. Specifically, based on their function, the structure formed by arranging the coil 50 in the magnetic pole section 34 may be called an electromagnet section, and the plate-shaped elastic section (elastic support section) may be called an elastic body. Furthermore, specifically, the plate-shaped magnetic core body 32 of the iron core section (magnetic core) may be called a second planar body, a second magnetic body, or more specifically, a base. The spacer 90 may be formed by the magnetic body as a yoke, or it may be integrated with the yoke as a magnetic component.

[0404] Furthermore, the materials used for each component in the following embodiments include coils with high conductivity, such as copper. The core is made of a material with high magnetic permeability (a strongly magnetic material, simply called a magnetic material), preferably SECC, silicon steel sheet, SUS, etc. The plate-shaped elastic part and the elastic body are preferably non-magnetic materials; SUS, phosphor bronze, resin, rubber, etc., can also be used as non-magnetic materials constituting the plate-shaped elastic part and the elastic body. Additionally, the core part (magnetic core) and the base are preferably made of materials with high magnetic permeability, such as SECC, silicon steel sheet, SUS (strongly magnetic SUS), etc. The spacer hammer, counterweight, and counterweight plate are formed of a high-density material, such as phosphor bronze, SUS, tungsten, etc. Furthermore, each of the above components may also include the components of embodiments 1 to 8.

[0405] The following vibration actuators have the same basic structure as vibration actuator 10. Each vibration actuator basically has a plate-shaped iron core (magnetic core body, second planar body), a coil on the magnetic core, an elastic support connecting the iron core and the magnetic component, and a magnetic component (first planar body, magnetic yoke) having a lower surface facing the iron core from above.

[0406] Furthermore, the magnetic component opposite the coil from above can also be composed of a yoke unit, a yoke, and a spacer (yoke). The magnetic component and the electromagnet part have an exhaust section that closes the space between them in the vertical direction, forming an airflow in the space along the direction of the plate surface when they approach each other.

[0407] That is, each of the vibration actuators 10J-10M and 10P-10S described below basically has a first surface and a second surface arranged opposite each other, and an elastic support portion that freely supports these surface parts in the opposing direction, i.e., in the vertical direction. Furthermore, an exhaust portion having the same function as the exhaust portion described above is provided between the first surface and the second surface. The exhaust portion has an exhaust portion formed on the outside of the second surface (e.g., the magnetic core body) between the second surface and the first surface (e.g., the yoke, the spacer), an exhaust adjustment portion between the outer periphery of the second surface and the end (outer periphery) of the first surface, and an airflow bend and an internal passage on its inner side. Since each vibration actuator 10J-10M and 10P-10S has an exhaust portion, it therefore has the same function as the vibration actuators described above that have exhaust portions 100, 100F, 100G, and 100H.

[0408] Furthermore, the vibration amplitude of the magnetic component or iron core generated by the electromagnet in the space formed between the electromagnet and the magnetic component or iron core (first planar body or second planar body) is determined by the spring constant of the elastic support. The vibration amplitude of the magnetic component or iron core in the space formed between the electromagnet and the magnetic component or iron core is determined by the thickness of the elastic body.

[0409] Furthermore, in each vibration actuator, as shown in the vibration actuator 10 of the embodiment, when the elastic body (plate-shaped elastic part) is a rectangular frame-shaped elastic body (frame), the elastic body may support the iron core part on one opposite side and be connected to the magnetic yoke on the other opposite side. That is, it may also have a structure in which the first planar body and the second planar body are connected at a 90° offset position via the elastic support part.

[0410] Furthermore, the vibration actuators 10J-10M and 10P-10S described below are formed by modifying or adding a portion of the structure of the vibration actuator 10 in Embodiment 1. Hereinafter, when describing the vibration actuators 10J-10M and 10P-10S, components that are identical to those in the vibration actuator 10 will be labeled with the same names and symbols, and their descriptions will be omitted. Additionally, components that have substantially the same function will be described with the same names and the same symbols ending in "J-M, P-S".

[0411] (Implementation Method 9)

[0412] Figure 41 This is a perspective view of the vibration actuator according to Embodiment 9 of the present invention. Figure 42 This is an exploded view of the vibration actuator. Additionally, Figure 43 This is a top view of the vibration actuator. Figure 44 This is a top view showing the internal structure of the vibration actuator. Figure 45 This is a bottom view of the vibration actuator. Figure 46 This is an exploded view showing the main parts of the basic structure of the vibration actuator. Additionally, Figure 47 This is a side sectional view showing the wiring of the FPC of the vibration actuator.

[0413] Figures 41-47 Compared with the vibration actuator 10, the vibration actuator 10J shown has different structures in the magnetic core body 32J, the base plate 40J, the elastic support 60J, the magnetic yoke 80J, and the spacer 90J, but the other structures are the same.

[0414] The magnetic core body 32J, the substrate part 40J, the elastic support part 60J, the magnetic yoke 80J, and the spacer 90J each have the same basic structure as the components with the same names in the vibration actuator 10, and have the same working effect.

[0415] A magnetic attraction (magnetic force) is generated between the electromagnet part 20J, which has an iron core part 30J and a coil 50, and the magnetic body 70J (both the yoke 80J and the spacer 90J are magnetic components, especially the yoke 80J), by energizing the coil 50. Due to the magnetic attraction, one of the magnetic body (magnetic component) 70J and the iron core part 30J with magnetic pole parts 34 is displaced and vibrates in a manner that brings them closer to each other.

[0416] exist Figures 41-47 In the vibration actuator 10J shown, compared with the vibration actuator 10F, the connecting hole 11J is provided not in the center of the magnetic yoke 80J, but near a pair of opposite sides of the outer periphery of the magnetic yoke 80J and outside the electromagnet part (coil 50).

[0417] In the structure of the vibration actuator 10J, a connecting hole 11J is provided in the magnetic body (magnetic component) 70J having a yoke 80J and a spacer 90J, connecting the internal passage of the vibration actuator 10J with the outside.

[0418] The connecting hole 11J is formed by connecting the through hole 830 of the magnetic yoke 80J with the through hole 930 of the spacer 90J, which is a magnetic body.

[0419] like Figure 44 As shown, the connecting hole 11J is positioned at a location that overlaps with the magnetic yoke side connection portion 622 of the elastic support portion 60J when viewed from above.

[0420] Driven by the vibration actuator 10J, the connecting hole 11J discharges internal air to the outside through the outer periphery and draws air in from the outside. At this time, the force that hinders the airflow between the inside and outside of the vibration actuator 10J and causes the magnetic body 70J to move is adjusted.

[0421] In the vibration actuator 10J, in the magnetic core body 32J, a plate-shaped extension 324J extending outward is formed at the center of a pair of opposite sides of the outer periphery of the rectangular plate.

[0422] The plate-shaped extension 324J is provided with a window 350 for inserting the extension 44 of the base plate 40J to avoid interference with the elastic support 60J. The plate-shaped extension 324J is provided with a fixing hole 328 for fixing the vibration actuator 10J to the product housing.

[0423] The elastic support 60J supports the electromagnet 20J and the magnetic body 70J in a way that one is close to the other, allowing them to move freely in the thickness direction. Here, the electromagnet 20J is constructed by mounting the substrate 40J and the magnetic pole 34 onto the magnetic core body 32J. The vibration actuator 10J supports the magnetic body 70J (yoke 80J and spacer 90J) via the elastic support 60J, allowing it to move freely relative to the electromagnet 20J.

[0424] The elastic support part 60J is a rectangular frame, such as... Figures 45-47 As shown, a magnetic yoke-side connecting portion 622 is formed by protruding inward from a pair of opposing side portions 62. A positioning portion (semi-circular portion) 65 is formed in the magnetic yoke-side connecting portion 622.

[0425] The positioning part 65 positions the magnetic core body 32J inside the elastic support part 60J. In each pair of opposite sides of the elastic support part 60J, the magnetic core body 32J and the spacer 90J are positioned in a way that allows them to connect after being rotated 90° relative to each other.

[0426] The positioning part 65 is formed at a position offset from the connecting hole 11J when viewed from above. As a result, there is no through path through the vibration actuator 10J, so the working surface during air compression can be maximized, and the air attenuation of the exhaust part 100J during movement can be achieved by efficiently compressing the air.

[0427] like Figure 46 As shown, the rectangular frame-shaped elastic support portion 60J of the vibration actuator 10J engages with the spacer joint portion 92J of the spacer 90J on the outside of the magnetic core body 32J via the yoke-side connecting portions 622 of a pair of opposite sides 62 (illustrated by arrow A1). On the other hand, the core-side connecting portions 642 of another pair of opposite sides 64 engage with the plate-shaped extension portion 324J of the magnetic core body 32J at the window portion 350 (in the direction of arrow symbol A2).

[0428] The window portion 350 is connected to the vent portion 100J. An extension portion 44, on which the base plate portion 40J is disposed, is inserted into the window portion 350. Thus, the window portion 350 is configured in such a way that the extension portion 44 does not interfere with the core-side connection portion 642, and the winding path can be ensured with the thickness of the core body 32J.

[0429] In the vibration actuator 10J, the iron core portion 30J, which is a second planar body, is a fixed part, the magnetic body 70J, which is a first planar body, is a movable part, and the coil 50 and the substrate portion 40J are disposed on the iron core portion 30J.

[0430] Here, in order to increase the weight of the movable part, a portion of the core part 30J and the substrate part 40J, or the core part 30J itself and the substrate part 40J, can be disposed on the first planar body, i.e., the magnetic body 70J. Figure 48 and Figure 49 Here is an example illustrating these structures.

[0431] Figure 48 This is a perspective view of a modified example 1 of the vibration actuator according to Embodiment 9 of the present invention. Figure 49 This is a perspective view of a modified example 2 of the vibration actuator according to Embodiment 9 of the present invention. Furthermore, for convenience, Figure 48 as well as Figure 49 The yoke at 80K is shown in perspective views of each diagram. Additionally, in... Figure 48 as well as Figure 49 In the middle, the coil is disposed on the back side of the substrate body 42 of the substrate 40K opposite to the magnetic core body 32K of the iron core part 30K.

[0432] For example, such as Figure 48 As shown in the vibration actuator 10K, in the structure of the vibration actuator 10J, the substrate 40K and the coil 50 (not shown) which are constructed in the same way as the substrate 40J can also be fixed to the magnetic body 70K side, i.e., the magnetic yoke 80K.

[0433] In the vibration actuator 10K, the base plate 40K and the coil (not shown) are fixed to the back of the magnetic yoke 80K in a manner that places them inside the spacer 90K. The magnetic pole portion 34 is mounted inside the magnetic core body 32K in a manner that places it inside the coil (not shown).

[0434] In addition, such as Figure 49 As shown in the vibration actuator 10K, in the structure of the vibration actuator 10J, the base plate 40K and the iron core (not shown), which are configured in the same way as the base plate 40J, can also be fixed to the magnetic body 70K side, i.e., the magnetic yoke 80K. Specifically, in the vibration actuator 10K, the base plate 40K, the coil (not shown), and the magnetic pole part 34 are fixed to the back of the magnetic yoke 80K in a manner that is located inside the spacer 90K. In this way, in the vibration actuator 10K, the weight of the magnetic body 70K, i.e., the magnetic yoke 80K, which is a movable part, can be increased by the weight of the base plate 40K and the iron core part (coil, magnetic pole part 34).

[0435] (Implementation Method 10)

[0436] Figure 50A This is a perspective view of a modified example 1 of the vibration actuator according to Embodiment 10 of the present invention. Figure 50B This is a perspective view of a modified example 2 of the vibration actuator according to Embodiment 10 of the present invention. Additionally, Figure 50CThis is a perspective view of a modified example 3 of the vibration actuator according to Embodiment 10 of the present invention.

[0437] like Figures 50A to 50C As shown in the vibration actuator 10L, in the vibration actuator 10J, the connecting hole (connecting hole 11L) in the magnetic yoke 80L, which is constructed in the same way as the magnetic yoke 80J, can be arbitrarily set.

[0438] exist Figure 50A In the vibration actuator 10L shown, in addition to the through holes 830 formed along a pair of opposite sides of the first surface body (magnetic body 70L), a central through hole 832 is also provided in the central part as a connecting hole 11J provided in the first surface body (magnetic body 70L).

[0439] A central through-hole 832 is positioned above the magnetic pole portion 34 and communicates with the internal passage. Furthermore, the internal passage is the same as that of the vibration actuators 100, 100F, 100G, and 100H in other embodiments, and is formed between the upper surface of the coil 50 and the upper surface of the magnetic pole portion 34 and the yoke 80. Additionally, the vibration actuator 10L has a central through-hole 832, therefore, in addition to communicating with... Figures 28-3 In addition to having the same effect as the vibration actuator 10F shown in Figure 1, it also has the same effect as the vibration actuator 10J with the through hole 830.

[0440] In addition, Figure 50B In the vibration actuator 10L shown, the connecting hole 11L, which includes a through hole 830, has a plurality of slits 835 extending radially (diagonally in this case) from the center in the first planar body (magnetic body 70L). The slits 835 are positioned above the coil 50 and opposite the iron core portion 30L (magnetic core body, magnetic pole portion 34), which is the second planar body, and function as part of the exhaust portion provided in the vibration actuator 10L.

[0441] In addition, Figure 50C In the vibration actuator 10L shown, a connecting hole 11L with a through hole 830, a plurality of slits 835 arranged radially (diagonally in this case), and a central through hole 832 are provided in the first surface body (magnetic body 70L).

[0442] Through hole 830, central through hole 832, and slit 835 constitute a connecting hole 11L, which is respectively positioned above the iron core 30L, coil 50, and magnetic pole 34, which are the second planar bodies. Through hole 830, central through hole 832, and slit 835 communicate with the exhaust section.

[0443] Thus, through holes such as the through hole 830, the central through hole 832, and the slit 835 that constitute the connecting hole 11L are provided in one or more on the first surface body (magnetic body 70L), connecting to the exhaust section and functioning as part of the exhaust section. Moreover, by adjusting the opening size, number, and position of these connecting holes, the amount of air attenuation inside the vibrating actuator 10L when it is movable can be adjusted.

[0444] In addition, the connecting holes (through holes 830, central through holes 832, slits 835) 11L form an air flow path through the through holes, thereby enabling the movable part (e.g., magnetic body 70L) to move accurately in the vertical direction relative to the fixed part (e.g., iron core part 30L).

[0445] Figure 51A as well as Figure 51B This is a schematic diagram illustrating the flow of internal air during drive caused by the repulsion of the elastic support portion when the vibration actuator of Embodiment 10 of the present invention is attracting and when the attraction is released (energized off). Additionally, Figure 52A as well as Figure 52B This is a schematic diagram illustrating the internal airflow during drive caused by the repulsion of the elastic support portion when the structure without air holes in the vibration actuator attracts and when the attraction is released (power off). Furthermore, these... Figure 51A , 51B as well as Figure 52A and Figure 52B Dashed arrows represent the flow of compressed (exhausted) air, solid arrows represent the flow of intake air, and the size and number of arrows represent the volume of air.

[0446] exist Figure 51A as well as Figure 51B The image shows the state of the vibration actuator 10L mounted on the touchpad of the vibration alert device 500L. The touchpad and... Figure 40 The touchpad shown is similarly positioned in a rectangular opening 540 provided in the casing of a laptop or similar device.

[0447] Within the opening 540, the plate-shaped main body 510 is freely movable relative to the bottom 530 in the vertical direction (approaching and separating directions). A vibration actuator 10L is mounted on the back of the main body 510.

[0448] exist Figure 51A In the 500L vibration alert device, Figure 50A The vibration actuator 10L shown is mounted on the touch panel in a so-called suspension manner, in which the magnetic yoke 80L, i.e., the movable part side faces downward, and the iron core 30 is fixed to the plate body 510.

[0449] Figure 51AThe vibration actuator 10L shown has a central through hole 832 in the magnetic yoke 80L. Therefore, when driven (energized), the magnetic yoke 80L is attracted upward and moves, performing [operation / function]. Figure 51A The air intake and exhaust are shown. An airflow is generated internally through the central through-hole 832. For example, an airflow K1 is generated in the opening 540 of the central through-hole 832, the air in the space between the yoke 80L and the iron core 30L is discharged, and the air in the space therebetween is compressed.

[0450] Additionally, if the power is disconnected, then as follows: Figure 51B As shown, the magnetic yoke 80L moves downward due to the reaction force of the elastic support (not shown). At this time, airflow K1 is generated in the opening 540 of each connecting hole including the central connecting hole 832, exhausting to the outside through the central through hole 832 and intake to the inside through the horizontal gap.

[0451] In this way, within the vibration actuator 10L (exhaust section 100), the compression / intake volume is reduced, and the exhaust position is stabilized by utilizing the air passing through the through hole 832. Furthermore, by adjusting the position, shape, and size of the connecting hole (through hole 832) that connects the inside and outside of the vibration actuator 10L, the air can be rectified in a manner that corrects the movement in a straight line relative to the surface.

[0452] In contrast, in a structure without a connecting hole (central through hole 832), Figure 52A as well as Figure 52B During the movement shown, although compression / intake is maximized, the effect is also attenuated on the surface of the bottom 530 within the opening 540. Furthermore, the relatively wide space within the opening 540 causes deviations in attenuation during compression / intake, potentially leading to instability in the exhaust position. For these reasons, compared to structures with connecting holes (through holes), the tactile feedback is sometimes reduced when the attenuation effect is high.

[0453] Alternatively, valve portions may be provided in these connecting holes (including connecting holes other than those in this embodiment) 11L, which have a valve function that adjusts the connecting holes by means of splitting or insert forming.

[0454] By providing valve sections with freely opening and closing valves in the connecting holes 11J and 11L, the valves can function to control the compression and exhaust of air, such as during air compression (when magnetically attracted) or air intake (when the elastic support 60L repels the air after the power is disconnected). For example, when the vibration actuator L is used as a pump, it can function as a pump by performing actions such as opening the valve during magnetic attraction and pushing air upwards when the elastic support 60 repels the air.

[0455] (Implementation Method 11)

[0456] Figure 53 This is a perspective view of the vibration actuator according to Embodiment 11 of the present invention. Figure 54 This is an exploded view of the vibration actuator.

[0457] In the vibration actuators 10F to 10G and 10J to 10L, a connecting hole is provided in at least one of the first planar body (magnetic body such as a yoke) and the second planar body (magnetic core body) to form an air flow path communicating with the internal passage. However, the air flow path can also be formed by other built-in components.

[0458] Figure 53 and Figure 54 In the structure of the vibration actuator 10J in embodiment 9, the vibration actuator 10M shown is modified by changing the spacer 90M to form an air flow path.

[0459] Compared to vibration actuator 10J, vibration actuator 10M differs in the structure of spacer 90M, while other structures are identical. Therefore, identical structures are labeled with the same name and symbols, and descriptions are omitted.

[0460] The vibration actuator 10M divides the spacer 90M in two, and the layer on which the spacer 90M is disposed has an airflow path M5 that communicates with the exhaust section 100M and functions during air compression / intake. The airflow path M5 constitutes part of the exhaust section 100M.

[0461] Inside the elastic support portion 60M, above the plate-shaped magnetic core body 32M of the iron core portion 30M, a spacer 90M composed of two dividing pieces 901 and 902 is arranged, separating the elastic support portion 60M by a distance equal to the thickness of the elastic support portion 60M.

[0462] The internal passage (exhaust section 100M) formed by the magnetic core body 32M and the magnetic yoke 80M sandwiching a spacer 90M in the vertical direction is surrounded on all four sides by the elastic support section 60M. An airflow path M5 is arranged inside the elastic support section 60M, communicating with the space where the coil 50 is arranged in the horizontal direction. Therefore, the airflow path M5 forms an internal passage and an exhaust section communicating with the outside from between the elastic support section 60M and the magnetic core body 32M. Through this exhaust section, the air attenuation effect can be adjusted.

[0463] In the vibration actuator 10M, the airflow path M5 is formed by a spacer 90M consisting of segmented spacers, but it is not limited to this; it can also be formed by double-sided tape connecting the various components and an elastic support portion 60M. In addition, the airflow path 5M, which is equivalent to a through hole, can also be formed by at least one of the cuts and holes that communicate with the internal passage and are formed at multiple locations.

[0464] (Implementation methods 12 and 13)

[0465] Figure 55 This is an exploded view of the vibration actuator according to Embodiment 12 of the present invention. Figure 56 This is an exploded view of a modified example 1 of the vibration actuator according to Embodiment 12 of the present invention.

[0466] In the vibration actuator 10J and the like, a rectangular frame-shaped elastic support 60J is arranged between a plate-shaped iron core 30J, a plate-shaped magnetic yoke 80J, and a spacer 90M (which may also be a magnetic body), which are arranged to face each other in the plane perpendicular direction.

[0467] In the vibration actuator 10J, the elastic support 60J is a leaf spring that connects the iron core 30J (second planar body), the magnetic yoke 80J, and the spacer 90M (magnetic body 70J, first planar body) on adjacent pairs of opposite sides in the vertical direction of the surface, but is not limited to this.

[0468] For example, such as Figure 55 and Figure 56 Like the vibration actuator 10N shown, the elastic support parts 60N and 600N can also be formed as springs, which are components that can contract and deform freely.

[0469] exist Figure 55 In the vibration actuator 10N, the elastic support 60N has multiple elastic deformation parts 661. Figure 56 In the vibration actuator 10N, an elastic support portion 600N is provided. Furthermore, in the vibration actuator 10N, an electromagnet portion 20J is composed of an iron core portion 30J, a substrate portion 40J, and a coil 50. A magnetic body (planar body) 70J is movably mounted in the vertical direction of the surface via the elastic support portions 60N and 600N, relative to the electromagnet portion 20J, that is, relative to the surface of the magnetic core body 32J.

[0470] exist Figure 55 In the vibration actuator 10N, a plurality of elastic deformation parts 661 are provided between the magnetic body 70J (magnetic yoke 80J and spacer 90J) which is a first planar body and the magnetic core body 32J, and at the four corners respectively.

[0471] exist Figure 56 In the vibration actuator 10N, a rectangular frame-shaped elastic deformation part 600N is sandwiched between the magnetic body 70J, which is a first planar body, and the magnetic core body 32J, and is arranged along their respective outer peripheries.

[0472] The elastic deformation section 661 and the elastic support section 600N are each made of a plate-shaped material that can shrink and deform in the thickness direction. For example, an elastomer can be used, specifically, silicone, rubber, foam, etc. In addition, the shapes of the elastic support section 60N (elastic deformation section 661) and 600N can also be shapes that allow air attenuation to function effectively and minimize airflow paths.

[0473] (Implementation Method 14)

[0474] Figure 57 This is a perspective view of the vibration actuator according to Embodiment 14 of the present invention. Figure 58 This is an exploded view of the vibration actuator. Additionally, Figure 59 This is a side view showing the mounting structure of the vibration actuator.

[0475] It can also be like Figure 57 as well as Figure 58 As shown in the vibration actuator 10P, in the structure of the vibration actuator 10J, the magnetic yoke 80 is removed, and the installation object of the vibration actuator 10P is made of a magnetic body, thus forming a structure with the function of a magnetic yoke.

[0476] Figure 57 as well as Figure 58 The core portion 30J of the vibration actuator 10P shown is configured such that a spacer 90J is disposed between the magnetic core body 32J and the elastic support portion 60J, and the upper surface of the coil 50 on the substrate portion 40J is located at a position lower than the upper surface of the elastic support portion 60J.

[0477] The spacer 90J is fixed to the base end of the outer peripheral plate-shaped extension 324J located on the outer periphery of the magnetic core body 32J at the lower surface of the spacer joint 92, which is located on a pair of opposite sides of the outer periphery forming the rectangle. Furthermore, the upper surface of the spacer joint 92 engages with the lower surface of the core-side connecting portion 642 of the outer periphery of the elastic support portion 60J, which is located on a pair of opposite sides (side portion 64). Thus, the elastic support portion 60J is positioned on the outer side in the XY direction, surrounding the spacer 90J, and engages only with the inwardly protruding core-side connecting portion 624.

[0478] That is, the vibration actuator 10P has: an electromagnet part having a flat, annular coil 50 disposed opposite to the magnetic component and a plate-shaped magnetic core body 32J on which the coil 50 is disposed; a spacer disposed on the magnetic core body 32J outside the coil 50, so that the magnetic core body 32J is separated from the magnetic component in the vertical direction; and an elastic support part 60J disposed outside the coil 50 and connected to the magnetic component and the spacer.

[0479] When the vibration actuator 10P is mounted on a product, such as a touchpad, such as Figure 59 As shown, the iron core portion 30J is directed towards the fixing hole 328 (refer to...). Figure 57 as well as Figure 58 The core body 32J is inserted into the fixing component and fixed to the product body 530J on the back.

[0480] The elastic support 60J passes through another pair of opposite sides 62 (see reference). Figure 57 as well as Figure 58 The yoke-side connecting part 622 is fixed to the magnetic body 510P of the object to be installed (see reference). Figure 59 The magnetic body 510P can be, for example, part of the touchpad body, or it can be a component integrally mounted on the touchpad body.

[0481] exist Figure 59 In this structure, under the magnetic attraction generated by energizing the coil 50, the magnetic body 510P is attracted by the coil 50 and the magnetic pole 34. At this point, the elastic support 60J deforms and displaces downwards outwards in the XY direction from the spacer 90J. When the energizing stops, the repulsion of the elastic support 60J causes the magnetic body 510P to move upwards, providing a tactile sensation. When this structure is used with the vibration actuator 10P, if the movable object is a magnetic body, the thickness of the vibration actuator 510P becomes thinner, reducing the vertical placement space required.

[0482] This structure allows for a reduction in the number of parts while ensuring the weight of the movable parts. Furthermore, the spacer 90J can be either magnetic or non-magnetic. Mobility can be adjusted by modifying the shape and thickness of the spacer 90J and by adjusting the spring constant of the elastic support (e.g., a frame-shaped leaf spring) 60J.

[0483] (Implementation Method 15)

[0484] Figure 60 This is a perspective view of the vibration actuator according to Embodiment 15 of the present invention. Figure 61 This is an exploded view of the vibration actuator. Additionally, Figure 62 This is a side sectional view of the vibration actuator.

[0485] Figures 60 to 62 The vibration actuator 10Q shown modifies part of the structure of the vibration actuator 10J, in which the magnetic yoke is formed as a box shape.

[0486] Figures 60 to 62The vibration actuator 10Q shown has a box-shaped magnetic yoke 80Q, which is open toward the electromagnet part 20J and is made of magnetic material. The box-shaped magnetic yoke 80Q is arranged to cover the coil 50, and a spacer joint 92 is joined to the back of the top part 810 of the box-shaped magnetic yoke 80Q. Thus, the box-shaped magnetic yoke 80Q is fixed to the spacer 90J.

[0487] The top surface 810 of the box-shaped magnetic yoke 80Q has the same shape as the magnetic yoke 80J, and is fixed inside the box-shaped magnetic yoke 80Q with spacers 90J housed within it. In the box-shaped magnetic yoke 80Q, the peripheral wall portion hanging downwards from the outer periphery of the top surface 810 is positioned outside the elastic support portion 60J in the XY direction, and can move in the vertical direction (in...). Figure 62 (Move downwards from the center).

[0488] The box-shaped magnetic yoke 80Q is larger than the outer periphery of the elastic support portion 60J. The lower end of the peripheral wall of the box-shaped magnetic yoke 80Q is configured to be located on the outer periphery of the elastic support portion 60J and move along the Z direction on the outer periphery of the elastic support portion 60J.

[0489] The box-shaped magnetic yoke 80Q can be arbitrarily configured as long as it covers the elastic support portion 60J, the coil 50, and the magnetic pole portion 34. It can also be configured such that the lower end of the peripheral wall portion of the box-shaped magnetic yoke 80Q is located outside the outer periphery of the elastic support portion 60J, allowing it to move freely in the Z direction. Furthermore, the shape of the box-shaped magnetic yoke 80Q can be the same as the outer periphery of the elastic support portion 60J. In this configuration, it is preferable that the lower end of the peripheral wall portion of the box-shaped magnetic yoke 80J (peripheral wall portion) is positioned at a distance in the Z direction (thickness direction) relative to the elastic support portion 60J, so that it does not abut against the elastic support portion 80J during operation.

[0490] Furthermore, by changing the plate-shaped yoke to a box-shaped yoke 80Q, the air attenuation between the coil 50 and the iron core 30J can be precisely adjusted by surrounding the coil 50 with the peripheral wall portion. Additionally, it prevents foreign objects from entering the vibration actuator 10Q. Furthermore, in the vibration actuator 10Q, the box-shaped yoke 80Q is configured to cover the electromagnet portion 20J, but additional fixed components can be added around the plate-shaped yoke 80J to form a box shape that surrounds the coil 50 from all sides in the XY direction. Alternatively, it can be configured to surround the yoke 80J with separate components while still functioning correctly during operation. Thus, the same effect as the box-shaped yoke 80Q can be obtained.

[0491] (Implementation Method 16)

[0492] Figure 63 This is an exploded view of the vibration actuator according to Embodiment 16 of the present invention. Figure 64 This is a three-dimensional view showing the internal structure of the vibration actuator.

[0493] Figure 63 and Figure 64 The structure of the spacer 90R is different from that of the vibration actuator 10J shown.

[0494] The vibration actuator 10R decomposes the function of the spacer 90J in the vibration actuator 10J and has a spacer 90R composed of a first spacer 901 and a second spacer 902.

[0495] The first spacer 901, acting as a magnetic material, is disposed on the iron core 30J in a manner that surrounds the coil 50, and functions together with the magnetic core body 32J and the coil 50 as part of the magnetic circuit of the electromagnet 20J. At this time, the upper surface of the first spacer 901 and the lower surface of the yoke 80J, which is a first planar body, form a gap that constitutes the movable area of ​​the yoke 80J. The first spacer 901 and the second spacer 902 can be made of either a magnetic material or a non-magnetic material, and the material is not limited.

[0496] Furthermore, the thicknesses of the first spacer 901 and the second spacer 902 can be arbitrary as long as the yoke 80J and the magnetic core 30J of the second planar body can move relative to each other. Alternatively, the first spacer 901 and the second spacer 902 can also be of the same thickness. In this case, the thickness of the elastic support 60J becomes the movable range of the movable part, but to improve its characteristics, the gap between the first spacer 901 and the magnetic part 34 and the yoke 80J is adjusted as the thickness of the second spacer 902 changes. As an example of adjustment, for instance, the spring constant of the elastic support 60J is increased to suppress the displacement of the movable part (otherwise, the shape is adjusted while maintaining the same thickness). Additionally, to increase the magnetic attraction of the magnetic core 30J, the thickness of the second spacer 902 is reduced to decrease the gap (it should be noted that the thickness of the elastic support 60J is reduced to ensure the spring constant).

[0497] As a result, the spring constant increases, and the volume of the second spacer 902, which contributes to the weight of the movable part, decreases. Consequently, the inherent value (natural vibration frequency) increases, and the resonant frequency can be improved. Furthermore, by changing the second spacer 902 to a material with a higher specific gravity, the inherent value can be made consistent.

[0498] The second spacer 902 is sandwiched between the magnetic yoke-side connecting part 622 of the elastic support part 60J and the magnetic yoke 80J, connecting the two.

[0499] Thus, the yoke 80J is positioned on the core body 32J with a gap equal to the thickness of the elastic support portion 60J plus the thickness of the second spacer 902. The first spacer 901 and the second spacer 902 have the same thickness, therefore the yoke 80J is positioned relative to the upper surface of the first spacer 901 on the core body 32J with a gap equal to the thickness of the elastic support portion 60J. Within the range of the thickness of the elastic support portion 60J, displacement of the elastic support portion 60J ensures the movable area of ​​the yoke 80J.

[0500] In the vibration actuator 10R, the function of the spacer 90R is decomposed, and the second spacer 902 ensures the movable area between the elastic support 60J and the magnetic yoke 80J. On the other hand, the first spacer 901 acts as a magnetic body to strengthen the magnetic circuit of the magnetic core body 32J.

[0501] Furthermore, when the first spacer 901 is a non-magnetic material, mounting the first spacer 901 onto the core body 32J can ensure the increased rigidity of the core body 32J and even the core portion.

[0502] Furthermore, in the vibration actuator 10R, the yoke 80J is used as the movable part, thus reducing the weight of the movable part. In this case, by using the connected object on the yoke 80J side as the weight of the movable part or adjusting the spring constant, the tactile sensation imparted by the drive of the vibration actuator 10R can be adjusted.

[0503] (Implementation Method 17)

[0504] Figure 65 This is a perspective view of the vibration actuator according to Embodiment 17 of the present invention.

[0505] In the structure of the vibration actuator 10J, the shape of the coil and the magnetic pole core can be arbitrary.

[0506] Figure 65 Compared with the vibration actuator 10J, the vibration actuator 10S shown has different shapes for the magnetic pole core 34S and the coil 50S.

[0507] The vibration actuator 10S includes a plate-shaped magnetic core (also called an iron core portion 30J, a second planar body, including a magnetic core body 32J), an elastic support portion connecting the magnetic core and the magnetic component, and a magnetic component (a first planar body, a magnetic yoke) having a lower surface facing the iron core from above.

[0508] As shown in the vibration actuator 10S, the magnetic pole core 34S and the coil 50S are rectangular in shape. Because the magnetic pole core 34S and the coil 50S are rectangular, compared to circles, positioning is easier and assembly is easier due to the use of angles, thus improving assemblability. Furthermore, since the coil 50S is rectangular, the area opposite to the magnetic component (yoke) or magnetic core that becomes the object of attraction can be increased, enabling a more suitable magnetic circuit. Additionally, the coil 50S (which is the same in all embodiments) can be a round wire or a flat wire, etc.

[0509] (A variation of the electromagnet section)

[0510] In the electromagnet part 20J of the vibration actuator 10J, such as Figure 66 As shown, after the magnetic pole portion 34 is mounted on the magnetic core body 32J, the coil 50 is attached to the substrate portion 40J, which serves as an FPC, and then the coil 50 is attached to the magnetic core body 32J. At this time, the substrate portion 40J is mounted on the magnetic core body 32J such that the coil 50 is located around the magnetic pole portion 34.

[0511] In addition, such as Figure 67 As shown, the magnetic pole portion 34 can be mounted on the magnetic core body 32J, the substrate portion 40J can be attached to the magnetic core body 32J, and then the coil 50 can be mounted on the substrate body 42 of the substrate portion 40J. Alternatively, the magnetic pole portion 34 can be mounted on the magnetic core body 32J after the substrate portion 40J is mounted on the magnetic core body 32J.

[0512] When assembled in this way, the height of the coil 50 relative to the upper surface of the magnetic pole section 34 can be concave or convex. During reliability tests such as driving the movable part and impact durability tests, the height is set according to the contact points of the opposing magnetic yoke (e.g., magnetic yoke 80J). For example, possible combinations of contact points include: 1) the upper surface of the magnetic pole section 34 and the lower surface of the magnetic yoke 80J; 2) the coil 50 and the opposing surface of the magnetic yoke; and 3) the opposing surface of the spacer or counterweight and the magnetic core body. Furthermore, if there is a gap greater than the necessary movable area between 1) to 3), examples include: 4) the opposing surface of the elastic support and the magnetic yoke; and 5) the opposing surface of the elastic support and the fixed part.

[0513] (Substrate section 40J)

[0514] Figure 68 This is a top view of the substrate section where the coil 50 is mounted. Figure 69 It means Figure 68 The diagram shows an example of the structure of the substrate portion.

[0515] like Figure 68 As shown, the substrate portion (particularly substrate portion 40J) in the vibration actuator of this embodiment has a coil protection function and a coil wiring function relative to the installed coil 50.

[0516] like Figure 69 As shown, the substrate portion 40J has multiple stacked layers 401 to 404. A circular substrate body 42 and an extension portion 44 extending from the substrate body 42 are formed through these layers 401 to 404.

[0517] The substrate portion 40J is formed by overlapping an insulating layer 403 on a wiring layer 401, and attaching adhesive layers 405 and 407 to the front and back sides of the annular substrate body 42 portion within this overlapping layer, respectively. The adhesive layers 405 and 407 are formed correspondingly to the substrate body 42 and have annular shapes. The adhesive layers 405 and 407 are composed, for example, layers of double-sided tape or adhesive, achieving a thin profile. Furthermore, the adhesive layer 406 is used to fix the extension 44 to the magnetic core body or yoke, etc.

[0518] The wiring layer 401 has wiring portions formed on a flexible sheet by electroplating. The wiring portions of the wiring layer 401 are equipped with conductive plate-shaped wiring portions 401a, such as copper foil, for wiring to the terminals 501 of the coil 50, and solder pads 441 for connecting to the connected object.

[0519] In this wiring layer 401, a planar heat dissipation portion 402 is provided on the back side of the coil 50, which is mounted across the insulation layer 403. The heat dissipation portion 402 is formed of a material with high thermal conductivity, such as copper foil.

[0520] The heat dissipation portion 402 is formed in accordance with the shape of the coil, for example, in an arc shape. Because the heat dissipation portion 402 is formed in accordance with the shape of the coil, the rigidity of the wiring layer 401 is strengthened, thereby strengthening the rigidity of the substrate portion 40J itself. Furthermore, the heat dissipation portion 402 is provided on the back side of the wiring layer and exposed on the core body 32 side. Therefore, the heat dissipation portion 402 contacts the core body 32J, enabling more effective heat dissipation.

[0521] (Variation example)

[0522] For example, the movable area when one of the magnetic core body and the magnetic yoke is a movable part can be appropriately provided between the magnetic core body and the magnetic yoke via other components such as spacers, thereby expanding the internal passage that serves as the exhaust part.

[0523] The embodiments of the present invention have been described above. Furthermore, the above description is an example of preferred embodiments of the present invention, and the scope of the present invention is not limited thereto. That is, the description of the structure of the above-described device and the shape of each part is an example, and it is obvious that various modifications and additions can be made to these examples within the scope of the present invention.

[0524] The contents of the descriptions, drawings and abstracts contained in Japanese Patent Application No. 2023-184892 filed on October 27, 2023 and Japanese Patent Application No. 2024-096915 filed on June 14, 2024 are incorporated herein by reference in their entirety.

[0525] Industrial utilization potential

[0526] The vibration actuator and contact input device of the present invention are easy to assemble and have the effect of vibrating appropriately while saving space. For example, they are useful as devices for PCBs, touch panels, operation panels, etc.

[0527] Symbol Explanation

[0528] 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10J, 10K, 10L, 10M, 10N, 10P, 10Q, 10R, 10S—Vibration actuator; 11J, 11L—Connecting hole; 14—Strain detection section (strain detection sensor); 16—Electrostatic capacitance detection section (detection section, proximity sensor); 20, 20A, 20B, 20C, 20D, 20G, 20H, 20J—Electromagnetic section; 30, 30A, 30C, 30D, 30G, 30H, 30J, 30M—Iron core section (magnetic core); 32, 32A, 32C, 32D, 32G, 32H, 32J, 32M—Magnetic core body; 34, 34A, 34 C, 34G, 34H—Magnetic pole section (magnetic protrusion); 34S—Magnetic pole core; 36—Outer magnetic pole section (annular protrusion); 38—Outer counterweight (counterweight); 39, 83—Connecting hole; 40, 40A, 40C, 40D, 40J, 40K—Substrate section; 42, 42A, 42C, 42D—Substrate body (insulating section); 43, 43C—Opening section; 44, 44A, 44C, 44D—Extension section; 50, 50A, 50C, 50D, 50S—Coil; 51, 61—Opening section; 60, 60B, 60D, 60J, 60L, 60M, 60N, 600, 600N—Elastic support section; 62, 64—Side section; 65—Positioning section; 66, 68—Elastic arm section; 7 0, 70B, 70D, 70F, 70G, 70H, 70J, 70K, 70L—Magnetic body; 80, 80D, 80F, 80H, 80J, 80K, 80L, 80M, 80Q—Magnetic yoke (magnetic component); 82—Lower surface; 84—Magnetic yoke connecting part; 86—Magnetic yoke body; 90, 90B, 90D, 90H, 90J, 90K, 90M, 90R—Spacer; 91—Frame-shaped body; 92, 92D, 92J—Spacer joint; 96, 98—Spacer piece; 100, 100F, 100G, 100H, 100J, 100M—Exhaust section; 110, 110G, 110H—Exhaust adjustment section; 112, 112H—Discharge section; 114, 11 4H—Airflow bend; 116, 116H—Internal passage; 320, 342—Through hole; 322, 322D—Slit; 324, 324A, 324D, 324J—Connection and fixing part; 326—Slit; 328—Fixing hole; 350—Window; 401—Wiring layer; 402—Heat dissipation part; 403—Insulation layer; 441—Pad; 500, 500L—Vibration indication device (contact input device); 510, 510P—Board body; 520—Frame; 530, 530J—Bottom; 540—Opening; 602—Central part; 604—Both ends; 622, 622D—Magnetic yoke side connection part; 642, 642D—Core side connection part; 661—Elastic deformation part;810—Top surface area; 830, 930—Through holes; 832—Central through hole; 901—First spacer; 902—Second spacer.

Claims

1. A vibration actuator, characterized by, have: An electromagnet is made by stacking flat, circular coils on the surface of a plate-shaped magnetic core. A magnetic component having a lower surface that faces the coil from above; A spacer is disposed on the lower surface outside the coil, thereby separating the magnetic component from the electromagnet in the vertical direction; as well as An elastic support portion, disposed on the outside of the coil, connects the magnetic core to the spacer. The magnetic force generated by energizing the coil causes one of the magnetic components or the electromagnet to vibrate by displacing itself closer to the other.

2. The vibration actuator according to claim 1, characterized in that, The magnetic core has magnetic protrusions that are surrounded by the coil.

3. The vibration actuator according to claim 1, characterized in that, The magnetic core has an annular protrusion on the outer periphery of the coil, which surrounds the coil with magnetic properties.

4. The vibration actuator according to claim 1, characterized in that, The elastic support is a frame-like body surrounding the magnetic core. Multiple core-side connecting parts protruding inward from equally spaced portions within the frame are connected to the magnetic core, and other portions equally spaced from the core-side connecting parts are connected to the spacers.

5. The vibration actuator according to claim 4, characterized in that, The elastic support is a rectangular frame, with the iron core side connection part provided on one opposite side and connected to the spacer on the other opposite side.

6. The vibration actuator according to claim 1, characterized in that, The electromagnet, the magnetic component, the spacer, and the elastic support are all flat.

7. The vibration actuator according to claim 1, characterized in that, The magnetic core, the elastic support, the spacer, and the magnetic component are stacked and arranged in a rectangular shape.

8. The vibration actuator according to claim 1, characterized in that, The spacer is formed of a high-density material.

9. The vibration actuator according to claim 1, characterized in that, One or both of the elastic support and the spacer are composed of multiple segments.

10. The vibration actuator according to claim 1, characterized in that, A membrane-like insulating portion is provided between the coil and the magnetic core.

11. The vibration actuator according to claim 10, characterized in that, The insulating portion has a wiring portion that is connected to the coil.

12. The vibration actuator according to claim 1, characterized in that, The magnetic core has a counterweight on the outer periphery of the coil.

13. The vibration actuator according to claim 1, characterized in that, A detection section is provided between the magnetic core and the magnetic body or the spacer to detect the length between the two.

14. The vibration actuator according to claim 1, characterized in that, The elastic support is a leaf spring, and it has a strain detection part for detecting the strain of the spring.

15. The vibration actuator according to claim 1, characterized in that, The magnetic component and the electromagnet enclose the space between them in the vertical direction, and when they approach each other, they have an exhaust section in the space that forms an airflow along the direction of the plate surface.

16. The vibration actuator according to claim 15, characterized in that, The exhaust section causes the airflow to flow from the outer periphery of the magnetic component and the electromagnet to the outside.

17. The vibration actuator according to claim 15, characterized in that, A communication hole communicating with the outside is provided at either the central part of the magnetic component or the coil.

18. The vibration actuator according to claim 15, characterized in that, The exhaust section has an exhaust adjustment section that adjusts the airflow through the gap between the spacer and the outer periphery of the magnetic core, which is close in the vertical direction.

19. The vibration actuator according to claim 15, characterized in that, The spacer protrudes from the lower surface of the magnetic component and is provided with a predetermined width in a direction orthogonal to the approach direction.

20. The vibration actuator according to claim 18, characterized in that, The spacer is configured to surround the coil around its entire circumference, and together with the outer periphery, forms the exhaust adjustment section.

21. The vibration actuator according to claim 15, characterized in that, The exhaust section has a shape that causes the airflow along the plate surface to bend in the vertical direction midway.

22. The vibration actuator according to claim 21, characterized in that, The side of the spacer and the side of the coil form an airflow bending section in the exhaust section that bends the airflow.

23. The vibration actuator according to claim 18, characterized in that, The gap between the spacer in the exhaust adjustment section and the magnetic core is smaller than the gap between the magnetic core and the magnetic component.

24. A contact-type input device, characterized in that, The vibration actuator according to any one of claims 1 to 23 is disposed on the back side of the operating surface and is driven according to the operation of the operating surface.

25. The contact input device according to claim 24, characterized in that, The vibration actuator has either the magnetic core or the magnetic component positioned on the back side of the operating surface.

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