Bionic tactile mechanism and robot

Abstract

The invention provides a bionic tactile mechanism and a robot, relates to the field of robots, and aims to solve the problem of poor flexibility caused by the fact that a tactile sensing element of an existing robot is directly mounted on a contact surface of a manipulator by adopting a mode of combining a rear sensor and fluid physical conduction. The bionic skin filled with the fluid medium is attached to the surfaces of the fingers and the palm, when the outward triggering part of the bionic skin makes contact with an external object, the sensed pressure or temperature change can directly act on the fluid medium in the cavity, and then the fluid medium in the cavity can flow into the cavity through the communicated flow guide pipe. The state change of the fluid medium is conducted to the detection assembly outside the bionic skin arrangement area to be detected, electronic detection components which are prone to being damaged and occupy a large volume are moved out of the narrow space of the forefront line of operation, space occupation of the end of the mechanical arm is reduced, the fingers keep good operation flexibility, and the mechanical arm can be used for detecting the state change of the fluid medium. And therefore, the self-adaptability and the operation precision of grabbing can be improved.

Description

Technical Field

[0001] This invention relates to the field of robotics, specifically to a bionic tactile mechanism and robot. Background Technology

[0002] If a robotic arm relies solely on preset mechanical position control or suction cup adhesion when grasping objects, it lacks tactile feedback from the external environment. When faced with soft, fragile, or irregularly shaped objects, it is prone to causing mechanical damage to the grasped object. By installing electronic skin and various tactile sensing components on the robotic arm, it can be endowed with tactile perception capabilities similar to those of humans. This allows it to acquire physical quantities such as pressure and temperature of the contact surface in real time, thereby guiding the robot to make precise adjustments to the grasping force and posture control, achieving intelligent picking and placing.

[0003] Most existing robotic tactile sensing methods directly attach or mount microelectronic sensors, sensing components, or complex flexible circuit arrays onto the direct contact surfaces of robotic fingers and palms. However, the space in the multi-jointed fingers of robotic hands is relatively small, and the dense arrangement and complex wiring of the electronic components corresponding to the tactile sensing elements occupy a lot of space, making the fingers bulky and reducing the dexterity of the robotic hand. Furthermore, exposing the delicate electronic sensors directly to the grasping position makes them susceptible to damage from repeated physical compression, collisions, and friction. When facing harsh working environments such as high temperature, high pressure, explosiveness, or strong electromagnetic interference, the directly exposed electronic components often have poor anti-interference capabilities and are prone to failure. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a bionic tactile mechanism and robot that avoids direct exposure of electronic sensors on the surface of the robotic arm, reduces space occupation, improves the flexibility and operational accuracy of the robotic arm, and enhances the reliability and anti-interference capability of the sensors.

[0005] The first objective of this invention is to provide a biomimetic tactile mechanism, comprising: A robotic hand, consisting of fingers and palm; The bionic skin has a cavity filled with a fluid medium. One side of the bionic skin is attached to the surface of the fingers and the palm, while the other side faces outward as a trigger. The guide tube has one end connected to the cavity and the other end led out to the outside of the bionic skin placement area, and is equipped with a detection component. The detection component measures the pressure and / or temperature changes of the fluid medium in the guide tube, thereby obtaining the pressure and / or temperature changes of the trigger part.

[0006] Furthermore, the bionic skin includes finger skin and palm skin. The finger skin corresponding to each finger is divided into multiple cavities at each knuckle, and the palm skin is divided into multiple cavities, each of which is connected to a corresponding drainage tube.

[0007] Furthermore, the skin of adjacent phalanges of the same finger is connected, and the cavity is distributed one-to-one with the phalanges. The skin of the palm is connected to the skin of the adjacent phalanges, while the cavities are isolated from each other.

[0008] Furthermore, the fingers and palms are provided with reserved channels for the flow tubes to pass through, and the flow tubes pass through or are embedded in the reserved channels and are buried under the bionic skin.

[0009] Furthermore, the outer wall of the guide tube is provided with a protrusion, and the guide tube body and the reserved channel are isolated by the protrusion. The finger joint is provided with an anti-bending and avoidance groove.

[0010] Furthermore, one end of the guide tube is connected to one side of the bionic skin-attaching robotic arm, and the guide tube is filled with gas or a heat-sensitive liquid.

[0011] Furthermore, the bionic skin on the finger surface and palm surface is distributed on the palm side and back side, and the cross-section of the bionic skin on the finger surface and palm surface is annular, with the cavities on the palm side and back side isolated from each other.

[0012] Furthermore, the bionic skin on the palm surface and the bionic skin on the finger surface are connected to form a glove-like structure.

[0013] A second objective of the present invention is to provide a robot that utilizes the biomimetic tactile mechanism of the first objective.

[0014] Furthermore, the bionic tactile mechanism is mounted at the end of the robotic arm, and the detection components are arranged on the robotic arm of the robot.

[0015] Compared with the prior art, the advantages and positive effects of this invention are: To address the issue of poor dexterity caused by directly mounting tactile sensing elements on the contact surface of robotic hands, this invention combines rear-mounted sensors with fluid physical conduction. A bionic skin filled with a fluid medium is attached to the surface of the fingers and palm. When the outward-facing trigger part of the bionic skin comes into contact with an external object, the pressure or temperature change sensed directly affects the fluid medium within the cavity. This fluid change is then transmitted through a connecting tube to a detection component outside the bionic skin area for measurement. This removes fragile and bulky electronic detection components from the confined space at the front line of operation, significantly reducing the space occupied by the robotic hand end, allowing the fingers to maintain good slenderness and operational dexterity, thus improving the adaptability and accuracy of grasping. Replacing directly exposed rigid sensors with a flexible bionic skin cavity effectively buffers mechanical damage caused by physical compression and collisions. Furthermore, it provides reliable physical isolation for core electronic components under complex conditions such as high temperature, high pressure, or strong electromagnetic interference, thereby significantly enhancing the overall stability, anti-interference capability, and lifespan of the tactile sensing system. Attached Figure Description

[0016] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0017] Figure 1 This is a schematic diagram of the structure of the bionic tactile mechanism in one or more embodiments of the present invention.

[0018] Figure 2 This is a schematic diagram of the finger and knuckle distribution cavity in one or more embodiments of the present invention.

[0019] Figure 3 This is a schematic diagram of the cavities distributed on the knuckle in one or more embodiments of the present invention.

[0020] Figure 4 This is a schematic diagram of a finger skin disposed on one side of a knuckle in one or more embodiments of the present invention.

[0021] Figure 5 This is a schematic diagram of a drainage tube connected to the bionic skin in one or more embodiments of the present invention.

[0022] Figure 6 This is a cross-sectional schematic diagram of the guide tube in one or more embodiments of the present invention.

[0023] Figure 7 This is a schematic diagram of anti-bending and avoidance grooves provided between the knuckles of the fingers in one or more embodiments of the present invention.

[0024] Figure 8 This is a schematic diagram of a reserved channel set inside the finger in one or more embodiments of the present invention.

[0025] Among them, 1. finger; 2. palm; 3. finger skin; 4. palm skin; 5. knuckle; 6. cavity; 7. palmar side of finger; 8. drainage tube; 9. dorsal side of finger; 10. protrusion; 11. anti-bending avoidance groove; 12. buckle. Detailed Implementation

[0026] Example 1 In a typical embodiment of the present invention, such as Figure 1 - Figure 7 As shown, a biomimetic tactile mechanism is presented.

[0027] Currently, when robotic hands grasp objects, tactile sensing is mostly achieved by directly attaching or installing microelectronic sensors, sensing components, or complex flexible circuit arrays onto the direct contact surfaces of the robotic finger 1 and the palm 2. This results in space occupation, making the finger 1 bulky overall. Furthermore, the direct exposure of delicate tactile sensing elements leads to poor anti-interference capabilities and easy failure.

[0028] In response, this embodiment proposes a biomimetic tactile mechanism, comprising: The robotic hand comprises fingers 1 and a palm 2; The bionic skin has a cavity 6 filled with a fluid medium. One side of the bionic skin is attached to the surface of the finger 1 and the surface of the palm 2, while the other side faces outward as a trigger part. The bionic skin has a cavity 6 filled with a fluid medium. One side of the bionic skin is attached to the surface of the finger 1 and the surface of the palm 2, while the other side faces outward as a trigger part. The guide tube 8 is connected to the cavity 6 at one end and leads out to the outside of the bionic skin arrangement area at the other end, and is equipped with a detection component. The detection component measures the pressure and / or temperature change of the fluid medium in the guide tube 8, thereby obtaining the pressure and / or temperature change of the trigger part.

[0029] like Figure 1 As shown, the robotic hand consists of multiple joints and links, capable of simulating the grasping and manipulation functions of a human hand. The robotic hand can include multiple fingers 1 and a palm 2; it can be a five-finger robotic hand with five movable fingers 1 and a fixed palm 2, or a simple robotic hand with two or three grasping fingers. The fingers 1 and palm 2 of the robotic hand can contact and interact with external objects.

[0030] The bionic skin is flexible and elastic, capable of adapting to the complex curves of the robotic hand's fingers 1 and palm 2. The bionic skin contains cavities 6, which can be a single large cavity 6 or multiple interconnected small cavities 6. The cavities 6 are filled with a fluid medium, such as air, water, oil, or other suitable heat-sensitive liquids. One side of the bionic skin is tightly integrated with the robotic hand body, while the other side faces outward, serving as a trigger point that directly contacts the object being grasped or the external environment to sense external physical stimuli.

[0031] One end of the guide tube 8 is connected to the cavity 6 inside the bionic skin, used to draw out the fluid medium inside the cavity 6. The other end of the guide tube 8 extends outside the bionic skin placement area, and can be led to the wrist, arm, or other position of the robot body. A detection component is installed at the outlet end of the guide tube 8, which can measure the pressure or temperature changes of the fluid medium inside the guide tube 8. For example, when the trigger part is subjected to external pressure, the pressure of the fluid medium inside the cavity 6 will change and be transmitted to the detection component through the guide tube 8; when the trigger part comes into contact with objects of different temperatures, the temperature of the fluid medium inside the cavity 6 will change and be transmitted to the detection component through the guide tube 8. Thus, by measuring the pressure and / or temperature changes of the fluid medium through the detection component, the pressure and temperature change information of the trigger part can be indirectly obtained. In this embodiment, the detection component can be a pressure sensor or a temperature sensor, or a combination of a pressure sensor and a temperature sensor, installed at the end of the guide tube 8 for real-time monitoring of the physical state of the fluid medium.

[0032] This embodiment effectively avoids exposing precision electronic components to physical compression, collision, and friction during grasping operations by keeping the sensing components away from the direct contact area, thus improving the reliability and durability of the mechanism in harsh environments. Simultaneously, since the sensing elements do not need to be densely arranged within the narrow space of the fingers 1, the overall structure of the robotic hand's fingers 1 remains compact, thereby enhancing the robotic hand's dexterity and enabling it to grasp soft, fragile, or irregularly shaped objects more accurately, reducing mechanical damage to the grasped object.

[0033] To meet the requirement of recognizing contact positions, the bionic skin is divided into finger skin 3 and palm skin 4, corresponding to the finger 1 and palm 2 regions of the robotic hand, respectively, simulating the anatomical structure and functional divisions of the human hand. The finger skin 3 corresponding to each finger 1 is divided into multiple cavities 6 according to the phalanx 5. The internal division is based on the phalanx 5 of the finger 1, forming multiple independent, sealed cavities corresponding to the proximal phalanx, middle phalanx, and distal phalanx.

[0034] like Figure 2As shown, the index, middle, ring, and little fingers can be divided into fingertip cavities 6, middle cavities 6, and root cavities 6, while the thumb can be divided into fingertip cavities 6 and middle cavities 6. The division of cavities 6 is achieved by setting a flexible diaphragm or structure inside the finger skin 3, ensuring the independence of the fluid medium between each cavity 6, isolating the pressure and temperature of the cavity 6, and reducing the influence of pressure and temperature between adjacent cavities 6.

[0035] Simultaneously, the palm skin 4 is also divided into multiple cavities 6. Similarly, the bionic skin of the palm 2 region is divided into multiple independent chambers to cover different areas of the palm 2, such as the thenar eminence, hypothenar eminence, and the center of the palm. The division of the cavities 6 in the palm 2 region can be designed according to the actual tactile sensitive areas or functional requirements of the palm 2. To achieve precise sensing of each independent cavity 6, each cavity 6 is connected to a corresponding guide tube 8. Each separated cavity 6, whether on the finger skin 3 or the palm skin 4, has a separate guide tube 8 leading out, connecting the fluid medium inside the cavity 6 to the external detection components.

[0036] This embodiment enables refined and localized perception of tactile information in different areas of the robotic hand. When the trigger part of the robotic hand is subjected to external forces, such as pressure or temperature changes in a certain joint 5 of finger 1 or a specific area of ​​the palm 2, only the fluid medium in the corresponding cavity 6 will experience corresponding pressure or temperature changes. Since each cavity 6 is independently connected to its corresponding guide tube 8 and detection component, the detection component can identify the specific cavity 6 that has changed, thereby locating the position of the tactile action. This improves the spatial resolution and accuracy of tactile perception of the bionic tactile mechanism, enabling the robotic hand to perceive interactions with the external environment and recognize object shapes, textures, or grasping force distributions.

[0037] like Figure 1 , Figure 2 and Figure 5 As shown, the skin between adjacent phalanges 5 and between phalanges 5 and the palm 2 is continuously distributed, while isolating each cavity 6 to avoid crosstalk of the fluid medium, thus achieving precision and independence of tactile perception. Specifically, the finger skin 3 is connected between adjacent phalanges 5 of the same finger 1, and the cavities 6 are distributed one-to-one with the phalanges 5. The palm skin 4 is connected to the finger skin 3 of its adjacent phalanges 5, and the cavities 6 are isolated from each other. The finger skin 3 can be a one-piece molded structure, with a flexible thin-walled area set at the phalanges 5. Alternatively, adjacent finger skin segments 3 can be seamlessly bonded or fused to maintain surface continuity, thereby allowing the skin of the finger 1 to not break or gap when bent.

[0038] The palm skin 4 is connected to the finger skin 3 of its adjacent phalanges 5. The corresponding edges of the palm skin 4 and finger skin 3 can be connected by integral molding or by bonding, welding or other methods to ensure the continuity of tactile perception, so that the robotic hand can obtain coherent tactile feedback from the fingertips to the palm when grasping or manipulating objects.

[0039] The continuous connection between the finger skin 3 and the palm skin 4 ensures the integrity and durability of the bionic tactile mechanism, enabling it to adapt to the complex movements of the robotic hand. The one-to-one correspondence between the cavities 6 and the knuckles 5, combined with the effective isolation between the cavities 6, ensures that the tactile information of each sensing area is independent, avoiding signal confusion. This improves the bionic tactile mechanism's ability to precisely perceive the shape, texture, and temperature of complex objects, allowing the robotic hand to respond to tactile information from the external environment, thereby enhancing the robotic hand's operational precision.

[0040] The guide tube 8 can be configured in terms of its direction and position according to requirements. When the cavity 6 is arranged only on the palmar side of the finger 1 and the palm 2, the guide tube 8 can be positioned on the back side of the finger 1 and the palm 2, thus avoiding the palmar side area where the main work is performed. However, for some robotic hands that need to work in narrow spaces or where both the palmar and back sides of the robotic hand need to be sensed, if the guide tube 8 is directly exposed or simply attached to the surface of the robotic hand, it may be easily damaged, affect the movement of the robotic hand, and be detrimental to the long-term stable operation of the bionic tactile mechanism. Therefore, if Figure 8 As shown in this embodiment, the fingers 1 and the palm 2 are provided with reserved channels for the guide tube 8 to pass through. The guide tube 8 passes through or is embedded in the reserved channels and is buried under the bionic skin.

[0041] The reserved channel is pre-designed, manufactured or formed inside or on the surface of the robotic hand's finger 1 and palm 2 structure, serving as a dedicated path for the guide tube 8 to pass through. The reserved channel can be a hole, an open snap 12, a groove or channel, providing wiring space to meet distribution requirements and reducing the pressure, pulling or wear on the guide tube 8 when the robotic hand moves or comes into contact with the outside.

[0042] The guide tube 8 passes through or is embedded in the reserved channel. When the reserved channel is an open-end, circumferentially closed channel structure, the guide tube 8 passes through the reserved channel to achieve circumferential overall protection. The guide tube 8 is pushed into or pulled into the reserved channel and extends to the detection component position. When the reserved channel is an open groove or channel, the guide tube 8 is embedded in the reserved channel. Alternatively, after embedding, a cover plate, adhesive, or bionic skin itself can be used for covering and fixing. Whether passing through or embedding, the guide tube 8 can be firmly fixed inside the robot arm structure, preventing damage or excessive deformation due to displacement or loosening during robot arm operation, and improving the stability of fluid medium transmission.

[0043] The flow guide tube 8 is embedded beneath the bionic skin. The bionic skin, acting as the outermost trigger layer, covers the flow guide tube 8 and the reserved channel, protecting it from direct environmental influences. This reduces the risk of wear, breakage, or deformation during robotic arm movement or external contact, thus improving the durability and reliability of the bionic haptic mechanism. It also makes the overall appearance of the bionic haptic mechanism simpler and enhances its overall integration.

[0044] The flow guide tube 8 passes through or is embedded in the reserved channel and is buried under the bionic skin. However, when the robotic arm performs complex actions such as grasping and bending, especially at the joints of the fingers 1, the flow guide tube 8 may be damaged by compression, friction or excessive bending, affecting the normal flow of the fluid medium and the accuracy of the detection components, thereby reducing the reliability and service life of the bionic tactile mechanism.

[0045] In this regard, such as Figure 6 and Figure 7 As shown, in this embodiment, a protrusion 10 is provided on the outer wall of the guide tube 8. The main body of the guide tube 8 is isolated from the reserved channel by the protrusion 10, and an anti-bending avoidance groove 11 is provided at the joint of the finger 1. The protrusion 10 on the outer wall of the guide tube 8 maintains a gap between the main body of the guide tube 8 and the inner wall of the reserved channel, thereby avoiding direct contact between the main body of the guide tube 8 and the inner wall of the reserved channel. The protrusion 10 can take various forms, such as annular protrusion 10, spiral protrusion 10, dot protrusion 10, or strip protrusion 10, and can be formed on the outer wall of the guide tube 8 by integral molding, bonding, or sleeve connection.

[0046] like Figure 6 As shown, the protrusion 10 effectively reduces friction of the guide tube 8 within the reserved channel, lowers wear, and provides a buffer space for the guide tube 8 within the channel, enabling it to adapt to small-range micro-movements and absorb deformation during the robot's movement. It should be noted that by having the protrusion 10 contact the reserved channel, the contact area between the guide tube 8 and the inner wall of the reserved channel is reduced, thereby reducing the heat exchange area, minimizing heat loss from the fluid medium to the reserved channel, and improving the accuracy of temperature sensing.

[0047] At the same time, such as Figure 7 As shown, a bend-resistant relief groove 11 is provided at the joint of finger 1. This groove provides additional space for the guide tube 8 when the finger 1 joint is bent, preventing excessive compression or bending force on the guide tube 8 due to joint bending, thus preventing deformation, blockage, or breakage of the guide tube 8. The bend-resistant relief groove 11 can be U-shaped, V-shaped, or other arc-shaped grooves, and its depth and width should be selected according to the diameter and material of the guide tube 8 and the maximum bending angle of the finger 1 joint. The groove can extend along the bending direction of the joint or adopt a partially recessed structure distributed around the joint axis.

[0048] like Figure 3 As shown, one end of the guide tube 8 is connected to one side of the bionic skin attachment robot, concealing and protecting the connection part of the guide tube 8 from exposure to the external environment. The guide tube 8 can be pre-embedded or molded into the inner layer structure of the bionic skin, forming an integrated sealed connection with the cavity 6; alternatively, the inner side of the bionic skin can be provided with a special interface or groove for the guide tube 8 to be inserted and sealed, ensuring the connection's strength and airtightness. The interface or groove can connect with the reserved channel, allowing the docked guide tube 8 to smoothly enter the reserved channel.

[0049] The flow guide tube 8 is filled with either gas or a thermosensitive liquid. When filled with gas, gases with low viscosity and high compressibility, such as air or nitrogen, can be selected to ensure rapid response to pressure changes and low energy loss. This can be achieved by first evacuating the system and then filling it with gas at a predetermined pressure. When filled with a thermosensitive liquid, a liquid that is sensitive to temperature changes and has a specific coefficient of thermal expansion or thermal conductivity is selected, such as certain silicone oils, fluorocarbon compounds, or special dielectric liquids, to achieve accurate temperature sensing. When filling with a thermosensitive liquid, it is necessary to ensure that there are no air bubbles in the cavity 6 and the flow guide tube 8 to avoid affecting measurement accuracy. Filling and sealing are usually performed under vacuum or controlled pressure.

[0050] As mentioned above, different robotic arms have different requirements for the distribution of their sensing areas, such as... Figure 4 As shown, some robotic arms only require skin 3 on the palm side to focus tactile recognition on the main working area of ​​the palm side; such as Figure 5 As shown, other robotic arms may need to be equipped with cavities 6 on both the palm side and the back side to perform tactile recognition on the palm side and the back side respectively, so as to achieve grasping on demand and collision recognition using the back side area.

[0051] In this embodiment, as Figure 3 As shown, the bionic skin on the surface of finger 1 is distributed on the palm side 7 and the back side 9, and the bionic skin on the surface of palm 2 is distributed on the palm side and the back side of palm 2. The cross-section of the bionic skin on the surfaces of finger 1 and palm 2 is annular, and the cavities 6 on the palm side and the back side are isolated from each other. This allows the robotic hand to sense tactile stimuli from all directions, providing corresponding tactile feedback whether it is grasping objects, rubbing against the environment, or being subjected to external impact. Similarly, the bionic skin on the palm side and the back side can be integrally molded to wrap around finger 1 and palm 2, or it can be obtained by splicing together multiple prefabricated parts.

[0052] like Figure 3 As shown, the cross-section of the bionic skin on the surface of finger 1 and palm 2 is the cross-section formed when a transverse cut is made along the axial direction of finger 1 or palm 2.

[0053] like Figure 1 , Figure 5 As shown, the bionic skin on the surface of the palm 2 and the bionic skin on the surface of the fingers 1 are connected to form a glove-like structure, so that the bionic skin can serve as an integral shell structure that fits the outer contour of the robotic hand.

[0054] Example 2 In another typical embodiment of the present invention, such as Figure 1 - Figure 7 As shown, a robot is provided that utilizes a bionic tactile mechanism as described in Embodiment 1.

[0055] A robot consists of a mechanical structure, a control system, and a sensing system. Robots can take various forms, such as industrial robots, service robots, and collaborative robots. In this embodiment, the robot serves as the carrier of a bionic tactile mechanism, providing it with motion, manipulation, and decision-making capabilities. It acquires and processes the tactile sensory data from the bionic tactile mechanism and can send control commands to the mechanism for execution, enabling intelligent interaction with the environment. The robot can include various forms such as a robotic arm, a mobile platform, or a humanoid robot. Its control system can adjust the robot's movements, force, or posture based on pressure or temperature change data fed back by the bionic tactile mechanism.

[0056] In this embodiment, the bionic tactile mechanism is installed at the end of the robotic arm, serving as the robot's end effector. The detection component is arranged on the robot's robotic arm and fixed to the end interface of the robotic arm via a mechanical connection. The robot can directly use the robotic hand of the bionic tactile mechanism to grasp, manipulate, or probe, thereby obtaining accurate tactile feedback information in real time when physically interacting with the external environment.

[0057] Mechanical connection methods can include flange connection, quick-connect coupling, etc., to install the bionic tactile mechanism's robotic hand at the end of the robotic arm, ensuring its stability during movement and force application.

[0058] Meanwhile, the detection component is mounted on a part of the robotic arm, rather than being placed directly inside the bionic tactile mechanism's hand. For example, the detection component can be integrated into the protective shell of the wrist, elbow, or upper arm segment of the robotic arm. The guide tube 8 extends from the bionic skin along internal or external channels of the robotic hand and arm, ultimately connecting to the detection component positioned on the robotic arm. This keeps sensitive electronic components away from direct impacts and wear that the end effector might suffer, while shortening the signal transmission path and reducing signal attenuation and delay.

[0059] In practical applications, when the robotic arm grasps the wafer, the wafer applies pressure or causes a temperature change to the trigger portion of the bionic skin, thereby altering the pressure or temperature of the fluid medium within the corresponding cavity 6. Since cavity 6 is connected to the guide tube 8, the pressure or temperature change of the fluid medium is transmitted to a remote detection component via the guide tube 8. The detection component, positioned on the robot's robotic arm away from the grasping area, can measure the pressure or temperature changes of the fluid medium within the guide tube 8, thus obtaining data on the pressure or temperature changes experienced by the trigger portion and providing real-time tactile feedback from the wafer.

[0060] When the detection component detects excessive pressure in a certain cavity 6, the robot control system can adjust the gripping force to avoid damaging the wafer. The robot can also respond promptly if an abnormal wafer temperature is detected.

[0061] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A biomimetic tactile mechanism, characterized in that, include: A robotic hand, consisting of fingers and palm; The bionic skin has a cavity filled with a fluid medium. One side of the bionic skin is attached to the surface of the fingers and the palm, while the other side faces outward as a trigger. The guide tube has one end connected to the cavity and the other end led out to the outside of the bionic skin placement area, and is equipped with a detection component. The detection component measures the pressure and / or temperature changes of the fluid medium in the guide tube, thereby obtaining the pressure and / or temperature changes of the trigger part.

2. The bionic tactile mechanism as described in claim 1, characterized in that, The bionic skin includes finger skin and palm skin. The finger skin of each finger is divided into multiple cavities corresponding to the knuckles, and the palm skin is divided into multiple cavities. Each cavity is connected to a corresponding drainage tube.

3. The bionic tactile mechanism as described in claim 2, characterized in that, The skin of adjacent phalanges of the same finger is connected, and the cavity is distributed one-to-one with the phalanges. The skin of the palm is connected to the skin of the adjacent phalanges, while the cavity is isolated from each other.

4. The bionic tactile mechanism as described in claim 1, characterized in that, The fingers and palms are provided with reserved channels for the guide tubes to pass through, and the guide tubes pass through or are embedded in the reserved channels and are buried under the bionic skin.

5. The bionic tactile mechanism as described in claim 4, characterized in that, The outer wall of the guide tube is provided with a protrusion, and the main body of the guide tube and the reserved channel are isolated by the protrusion. The finger joint is provided with an anti-bending and avoidance groove.

6. The bionic tactile mechanism as described in claim 4 or 5, characterized in that, One end of the guide tube is connected to one side of the bionic skin-attaching robotic arm, and the guide tube is filled with gas or thermosensitive liquid.

7. The bionic tactile mechanism as described in claim 1, characterized in that, The bionic skin on the finger and palm surfaces is distributed on the palm and back sides. The cross-section of the bionic skin on the finger and palm surfaces is annular, and the cavities on the palm and back sides are isolated from each other.

8. The bionic tactile mechanism as described in claim 7, characterized in that, The bionic skin on the palm surface and the bionic skin on the finger surface are connected to form a glove-like structure.

9. A robot, characterized in that, The biomimetic tactile mechanism is used as described in any one of claims 1-8.

10. The robot as described in claim 9, characterized in that, The bionic tactile mechanism is installed at the end of the robotic arm, and the detection components are arranged on the robotic arm of the robot.

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