Precision substrate storage container tray and semiconductor wafer storage container

Abstract

Provided are a tray for a precision substrate storage container and a semiconductor wafer storage container, which can reduce the weight of the precision substrate storage container or eliminate the possibility of deformation and damage of the semiconductor wafer storage container, and can be easily taken out and put in. A tray for a precision substrate storage container is provided with: an adapter (31) on which a precision substrate storage container (1) is mounted and which is stored in a body (11); a plurality of fixtures (50) for fixing the flange section (2) of the precision substrate storage container (1); and a pair of fixing pieces capable of being in contact with the support teeth (12) on both sides of the interior of the body (11). The adapter (31) is formed into a frame shape which is embedded with the flange part (2) of the precision substrate storage container (1); a support piece (34) for supporting the lower surface (5) of the precision substrate storage container (1) is formed on the adapter (31), and a retreat groove opposite to the rear of the periphery of the lower surface (5) of the precision substrate storage container (1) is formed on the support piece (34); the mounting pieces are made to protrude from both side portions of the adapter (31), and each mounting piece can be brought into contact with another support tooth (12) other than the support tooth (12) of the body (11) in contact with the fixed piece.

Description

Technical Field

[0001] The present invention relates to a tray for a precision substrate storage container and a semiconductor wafer storage container, which are used to support a precision substrate storage container such as a mask storage container and are stored in a semiconductor wafer storage container. Background Technology

[0002] Semiconductor wafer storage containers, known as FOUPs, are used in semiconductor factories to transport or store φ300mm semiconductor wafers, holding multiple φ300mm semiconductor wafers. However, in recent years, there has been a demand for photomask storage containers and photomask slab storage containers instead of semiconductor wafers. This is because photomasks and photomasks are used in the front-end processes of semiconductor manufacturing. Therefore, it would be highly efficient to store precision substrate storage containers, which are composed of photomask storage containers and photomask slab storage containers, within semiconductor wafer storage containers and transport them simultaneously using automated transport devices such as OHTs (Automated Guided Transporters).

[0003] However, due to the differences in size and shape between semiconductor wafers and precision substrate storage containers made of silicon wafers and the like, it is difficult to safely store precision substrate storage containers within semiconductor wafer storage containers. In view of this, a method for safely and reliably storing precision substrate storage containers within semiconductor wafer storage containers has been researched and proposed (see Patent Documents 1, 2, and 3). For example, the following methods have been researched and proposed: (1) a method for mounting and fixing precision substrate storage containers to an adapter on a circular plate and storing the adapter within the body of the semiconductor wafer storage container via support teeth; (2) a method for housing precision substrate storage containers in a required number in a shelf-shaped storage clamp and storing the storage clamp within the body of the semiconductor wafer storage container.

[0004] Existing technical documents Patent documents Patent Document 1: Japanese Patent No. 5959302 Patent Document 2: Japanese Patent No. 5916508 Patent document 3: Japanese Patent No. 7257418. Summary of the Invention

[0005] The problem that the invention aims to solve However, while the size and flange area of ​​precision substrate storage containers are specified by SEMI standards, the lack of a weight specification presents a problem, thus posing a research challenge in both methods (1) and (2). For example, while excellent results can be expected in both methods (1) and (2), achieving lightweighting is not easy when weight limitations are required from a transport perspective, raising concerns about the possibility of deformation or damage to the support teeth of the adapter supporting the semiconductor wafer storage container. Furthermore, this could also hinder the transport of the automated transport device holding the semiconductor wafer storage container.

[0006] Furthermore, in the case of method (1), it is conceivable that removing and placing the thick-walled adapter relative to the body may not be easy, and the possibility of deformation or damage to the body is also considered. Furthermore, in the case of method (2), due to the large size of the containment clamp, the possibility of it causing obstacles to the handling process is considered.

[0007] The present invention was made in view of the above, and the object is to provide a tray for a precision substrate storage container and a semiconductor wafer storage container that can achieve lightweighting of the precision substrate storage container or eliminate the possibility of deformation or damage to the semiconductor wafer storage container, and are easy to handle by simply taking them out and putting them in.

[0008] Methods used to solve problems In order to solve the above-mentioned problems, the present invention provides a tray for a precision substrate storage container, which supports the precision substrate storage container and is stored in a semiconductor wafer storage container. The tray is characterized by comprising: an adapter, a body with a front opening of which the precision substrate storage container is mounted and stored in the semiconductor wafer storage container; a fixing member, at least one of which is installed on the front and rear parts of the adapter and fixes the flange of the precision substrate storage container; and a plurality of fixing members, which are detachably mounted on both sides of the adapter and can contact support teeth on both sides of the inner side of the body. The adapter is formed into a generally frame-shaped structure that can fit into the flange of the precision substrate storage container. In the adapter, a support piece is formed that supports the lower surface of the flange of the precision substrate storage container, and a recessed groove is formed on the support piece that faces the rear periphery of the lower surface of the flange of the precision substrate storage container. Mounting pieces protrude from both sides of the adapter, and the plurality of mounting pieces can contact support teeth other than those of the body that contact the fixing members.

[0009] Alternatively, it is preferable to include a spacer sandwiched between the flange of the precision substrate storage container and the support piece of the adapter, wherein a recess is formed on the surface of the spacer that can be opposed to the rear periphery of the lower surface of the flange of the precision substrate storage container.

[0010] Alternatively, a locking hole for a spacer can be provided on the inner periphery of the hollow portion of the adapter, the spacer can be formed into a generally X-shaped form when viewed from above, and a locking protrusion that is embedded in the locking hole of the hollow portion of the adapter can be formed at the end of at least one of the pair of inclined pieces forming the spacer.

[0011] Alternatively, on the back of the adapter, there may be a support piece with a roughly L-shaped cross-section, which is formed on the periphery of the lower surface of the flange portion supporting the precision substrate storage container and one of the spacers.

[0012] Alternatively, a support piece, roughly plate-shaped in cross-section, may be formed on the inner periphery of the hollow portion of the adapter that fits into the flange portion of the precision substrate storage container, supporting the lower surface of the flange portion of the precision substrate storage container.

[0013] Alternatively, the fasteners may include: a first fastener rotatably mounted on the front of the adapter and engaged in front of the flange of the precision substrate storage container; and a generally inverted L-shaped second fastener mounted on the rear of the adapter and engaged behind the flange of the precision substrate storage container; the first and second fasteners are movable up and down by means of a spring member.

[0014] Furthermore, preferably, the first fastener includes: a cylindrical portion rotatably supported on the front of the adapter; and a locking piece formed on the cylindrical portion and capable of locking onto the front of the flange of the precision substrate storage container; the locking piece forms an operating handle, and when the precision substrate storage container mounted on the adapter is fixed, the locking piece points in the front-rear direction of the adapter, and the locking piece contacts a door assembly that fits into the front of the body of the semiconductor wafer storage container.

[0015] Furthermore, in order to solve the above-mentioned problems, a semiconductor wafer storage container is provided in this invention, characterized in that it includes: a front-opening body, a tray for storing the precision substrate storage container described in technical solution 1 or 2; and a door assembly that is detachably fitted into the front of the opening of the body; used in the semiconductor manufacturing process.

[0016] Here, the precision substrate storage container in the claims includes a photomask storage container, a mask plate storage container, etc., with at least the lower part extending as a flange. This precision substrate storage container is not particularly limited to single-POD type, multi-POD type, etc., and preferably houses one or two in the body. Furthermore, the term "generally frame-shaped in top view" for the adapter includes not only the top-view frame shape but also similar shapes that do not produce differences in the effects of the present invention. The adapter's support plate can directly support the precision substrate storage container or indirectly support it via spacers.

[0017] The term "roughly X-shaped in top view" includes not only a top-view X-shape, but also similar shapes that do not produce differences in the effects of the present invention (roughly + shape in top view, roughly × shape in top view, etc.). Furthermore, the term "roughly L-shaped in cross-section" includes not only a cross-section L-shape, but also similar shapes that do not produce differences in the effects of the present invention (roughly J-shaped in cross-section, etc.). The fastener is preferably installed at the front and rear of the adapter, but it may also be installed only at the front of the adapter, or only at the rear of the adapter.

[0018] The first fixing member only needs to be rotated 80° or more, or even 360°. Furthermore, the term "roughly inverted L-shaped" includes not only inverted L-shaped shapes but also similar shapes (roughly inverted J-shaped, etc.) that do not produce different effects in the present invention. The vertical, horizontal, and back-and-forth directions of the precision substrate storage container tray of the present invention are based on the accompanying drawings and can be appropriately changed as needed. Furthermore, while the object of the present invention is the precision substrate storage container tray, structures for other applications that are identical to the structure of the present invention, can be adapted for use in the precision substrate storage container tray, and achieve the effects of the present invention, fall within the technical scope of the present invention.

[0019] According to the present invention, since the adapter is not a typical plate but a hollow, roughly frame-shaped structure, it is expected to be lightweight. This lightweight design reduces the likelihood of obstructing the transport of semiconductor wafers into the storage container. Furthermore, since the mounting plate and fixing components of the adapter respectively contact the multiple support teeth of the body, the load acting on the support teeth can be distributed, preventing damage or breakage of the support teeth. In addition, the adapter can be made thinner, allowing for easy removal and insertion relative to the body.

[0020] Invention Effects According to the present invention, it is possible to achieve lightweighting of the precision substrate storage container or eliminate deformation and damage to the semiconductor wafer storage container. Furthermore, it allows for easy removal and placement of the precision substrate storage container using a tray, and also facilitates convenient handling.

[0021] According to the invention described in technical solution 2, if a spacer is used, the height of the precision substrate storage container relative to the fixing member can be adjusted, so the fixing operation becomes easy regardless of the height of the precision substrate storage container. Furthermore, if the recess of the spacer is used, the flange of the precision substrate storage container can be well clamped between the spacer and the fixing member.

[0022] According to the invention described in technical solution 3, since the spacer is roughly X-shaped when viewed from above, its lightweight, durability, and rigidity can be improved. Furthermore, since the engaging protrusions of the spacer not only serve a positioning and fixing function but also an identification function, it can prevent the spacer from being incorrectly mounted on the adapter's support plate.

[0023] According to the invention described in technical solution 4, since a support piece with an approximately L-shaped cross-section is formed on the back of the adapter, supporting the periphery of the lower surface of the flange portion of the precision substrate storage container and one of the spacers, the precision substrate storage container can be deeply embedded and stably mounted regardless of its height. Furthermore, since the support piece is not formed in multiple parts without being divided into multiple parts, the manufacturing of the adapter can be simplified.

[0024] According to the invention described in technical solution 5, since it is not necessary to provide a locking hole on the inner circumference of the hollow portion of the adapter, structural simplification is expected. Furthermore, since the support piece of the adapter is a generally plate-shaped cross-section that does not protrude downwards, forming becomes easier. Moreover, since the support piece is not formed in multiple parts without being split into multiple parts, the manufacturing of the adapter is expected to be simplified.

[0025] According to the invention described in technical solution 6, since the first and second fixing members move up and down respectively by means of the spring component, the first and second fixing members can be properly hooked onto the flange of the precision substrate storage container, etc., regardless of the height of the precision substrate storage container.

[0026] According to the invention described in technical solution 7, the rotation of the locking piece can be conveniently achieved by operating the handle of the locking piece of the first fixing member. Furthermore, since the free rotation of the locking piece is restricted due to contact with the door assembly, positional deviation or detachment of the precision substrate storage container can be prevented during the transport of the semiconductor wafer storage container.

[0027] According to the invention described in technical solution 8, since a precision substrate storage container composed of a photomask storage container, a mask plate storage container, etc., can be stored in a semiconductor wafer storage container, and the semiconductor wafer storage container can be lifted and transported at the same time by an automatic conveying device, the efficiency of semiconductor manufacturing can be improved. Attached Figure Description

[0028] Figure 1 This is a schematic illustration of a front view of a semiconductor wafer storage container in an embodiment of a precision substrate storage container tray according to the present invention.

[0029] Figure 2 This is a cross-sectional side view schematically showing the state of the tray for storing a precision substrate in a semiconductor wafer storage container in an embodiment of the present invention.

[0030] Figure 3 This is a perspective illustration schematically showing an embodiment of the tray for storing precision substrates according to the present invention.

[0031] Figure 4 This is a perspective illustration showing an embodiment of the precision substrate storage container tray according to the present invention, schematically shown from the bottom side.

[0032] Figure 5 This is a top view illustrating an embodiment of the tray for storing precision substrates according to the present invention.

[0033] Figure 6 This is a top view illustrating the relationship between the adapter and the spacer in an embodiment of the precision substrate storage container tray of the present invention.

[0034] Figure 7 This is a schematic diagram illustrating the main parts, such as the adapter recess and the spacer recess, in an embodiment of the precision substrate storage container tray of the present invention.

[0035] Figure 8 This is a schematic diagram illustrating the relationship between the support teeth of the body, the mounting plate of the adapter, and the fixing plate in an embodiment of the precision substrate storage container tray of the present invention.

[0036] Figure 9 This is a schematic diagram illustrating the relationship between the support teeth of the body and the mounting plate of the adapter in an embodiment of the tray for storing precision substrates according to the present invention.

[0037] Figure 10 This is a top view schematically showing the state in which the adapter is inserted into the body of an embodiment of the precision substrate storage container tray of the present invention.

[0038] Figure 11 This schematically illustrates how the fixing plates slide from the inside to the outside to achieve positioning and fitting. Figure 10 A top view of the state of a pair of mounting slots for the adapter.

[0039] Figure 12 It is a schematic representation of... Figure 11 A top view showing the fixing plate secured by multiple fasteners.

[0040] Figure 13 This schematically illustrates how the periphery of the lower surface of the flange of the precision substrate storage container is supported by... Figure 12 The main part of the adapter's support plate and the locking plate of the pair of first fasteners are rotated in a top view.

[0041] Figure 14 It is a schematic representation of causing the locking plate to lock in place. Figure 13 A top view of the state of the front upper surface of the flange of a precision substrate storage container.

[0042] Figure 15 It schematically represents fitting the door assembly into... Figure 14 A top view of the body's opening from the front.

[0043] Figure 16 This is a schematic front view illustration showing the state of the tray being stored in the semiconductor wafer storage container in the second embodiment of the precision substrate storage container tray of the present invention.

[0044] Figure 17 This is a cross-sectional side view schematically showing the state of the tray for storing a precision substrate in a semiconductor wafer storage container in a second embodiment of the present invention.

[0045] Figure 18 This is a perspective illustration schematically showing a second embodiment of the tray for storing precision substrates according to the present invention.

[0046] Figure 19 This is a perspective view schematically illustrating a second embodiment of the tray for storing precision substrates according to the present invention, taken from the bottom side. Detailed Implementation

[0047] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The precision substrate storage container tray 30 in this embodiment is shown in the accompanying drawings. Figures 1 to 15 As shown, a special tray is a dedicated tray for supporting various precision substrate storage containers 1 and storing them in semiconductor wafer storage containers 10. It includes: an adapter 31, which is mounted on the flange portion 2 of the precision substrate storage container 1 and stored in the body 11 of the semiconductor wafer storage container 10; a spacer 40, which is clamped between the flange portion 2 of the precision substrate storage container 1 and the adapter 31 as needed; a plurality of fasteners 50, which are respectively screwed to the front and rear portions of the adapter 31 and locked to the flange portion 2 of the precision substrate storage container 1; and a pair of fasteners 60, which are detachably screwed to both sides of the adapter 31 and can contact the support teeth 12 of the body 11. This contributes to the achievement of target 9 of the SDGs adopted at the United Nations Summit.

[0048] Precision substrate storage container 1 Figure 2 , Figures 13 to 15As shown, for example, a box weighing approximately 5 kg is constructed by fitting a cover onto the upper part of the opening of the main body containing the precision substrate, with the flange 2 extending outwards in the width direction from the front, back, left, and right sides. Specifically, it is at least one of a photomask storage container for storing a photomask serving as a precision substrate and a photomask storage container for storing a photomask serving as a precision substrate. They can be either taller or shorter types. Generally, a pair of ribs 4 are arranged side by side at intervals on the flat upper surface 3 in front of the flange 2 of the precision substrate storage container 1.

[0049] Semiconductor chip storage container 10 Figure 1 , Figure 2 , Figures 11 to 15 As shown, it originally includes: a body 11 capable of neatly arranging and storing multiple semiconductor wafers; and a door assembly 18 that can be easily installed and removed from the front of the opening of the body 11; configured as a FOUP type for use in a semiconductor factory in a microenvironment. The body 11 is formed into a front-opening box with a front opening using a molding material containing a predetermined resin. On both sides inside, there is a pair of left and right support teeth 12 that originally horizontally support φ300mm semiconductor wafers. The pair of left and right support teeth 12 are arranged at predetermined intervals in the vertical direction.

[0050] Each support tooth 12 is formed as an elongated plate that curves and extends in the front-rear direction of the body 11. Near the center of the surface, a positioning step portion 13 is formed in a generally crescent-shaped recess in top view to position and support the side periphery of the semiconductor wafer. By means of the recess of the positioning step portion 13, the front part of the support tooth 12 is formed as a flyout prevention portion 14 to restrict the semiconductor wafer from flying forward.

[0051] On the lower surface of the base plate of the body 11, a base plate 15, which is roughly Y-shaped, triangular, polygonal, etc., when viewed from above, is horizontally mounted. Multiple positioning members are mounted on this base plate 15, each functioning to engage with positioning pins of a semiconductor processing apparatus (not shown) from above, thereby precisely positioning the semiconductor wafer receiving container 10. Furthermore, at approximately the center of the top of the body 11, a robot flange 16, which is roughly rectangular when viewed from above, is optionally and removably mounted. This robot flange 16 is held by an automated conveying device (not shown) consisting of an OHT (Operating Machine) or similar equipment from a factory. On the outer surfaces of both sides of the body 11, optional operating handles 17 are optionally and removably mounted.

[0052] Gate group 18 Figure 15As shown, the device includes: a door body 19 that is generally rectangular in frontal view, which can be easily pressed into and fitted into the front of the opening of the body 11; and a pair of left and right door covers 20 that cover the front sides of the opening of the door body 19; a locking mechanism 21 for preventing detachment is clamped between the front sides of the opening of the door body 19 and the pair of left and right door covers 20. A front retainer (not shown) is easily attached to the recessed center of the back of the door body 19 opposite to the back of the body 11 to hold the front periphery of the semiconductor wafer horizontally with an elastic sheet, but the front retainer is removed and not used when the precision substrate storage container tray 30 is used.

[0053] The adapter 31 of the tray 30 for the precision substrate storage container is as follows: Figures 1 to 6 , Figures 13 to 15 As shown, from the viewpoint of achieving the positioning and lightweighting of the precision substrate storage container 1, a frame-shaped plate formed from a molding material containing a predetermined resin in a top-view rectangular shape is supported on the left and right sides of the body 11 in place of the semiconductor wafer by a pair of support teeth 12.

[0054] The resins used as molding materials are not specifically limited, and examples include polycarbonate (PC) resin, cyclic olefin polymer (COP) resin, cyclic olefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyetherketone (PEK) resin, polyetheretherketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, liquid crystal polymers, and other thermoplastic resins and their alloys.

[0055] The hollow portion 32 in the center of the adapter 31 is formed into a rectangular shape when viewed from above, and is made to fit into the flange portion 2 of the precision substrate storage container 1 with a slight gap or without gap, in accordance with SEMI standards. On the front and rear sides of the inner circumferential surface of the hollow portion 32, respectively, there are through-holes 33 for the spacer 40, and each through-hole 33 is formed into a horizontally elongated rectangle.

[0056] On the back of the adapter 31, a cross-sectional L-shaped support piece 34 is provided below the inner peripheral surface of the hollow portion 32 in a top-view frame shape. This support piece 34 functions to support the periphery of the lower surface 5 of the flange portion of the precision substrate storage container 1 and one of the spacers 40. On the rear surface of the support piece 34, a recessed groove (also called a recess allowance) 35 is formed with a 10° angle, which can be opposite to the rear of the periphery of the lower surface 5 of the flange portion of the precision substrate storage container 1. With the use of this recess 35, the rear part of the precision substrate storage container 1 can be smoothly mounted after tilting downward.

[0057] Mounting grooves 36 for fixing pieces 60 are cut into the flat surfaces of the left and right sides of the adapter 31, and fixing pieces 60 are fitted into the mounting grooves 36 respectively. Furthermore, a pair of mounting pieces 37 are formed horizontally protruding from the outer surfaces of the two sides of the adapter 31, which are positioned opposite each other from below and separated from the fixing pieces 60 by a gap. Each mounting piece 37 is formed to be thinner than the wall thickness of the adapter 31. The mounting piece 37 is formed as an elongated plate extending in the front-rear direction of the adapter 31, and is strongly supported by its own weight against the support teeth 12 of the body 11. On the back side of the mounting piece 37, a cut is formed as needed, which contacts the positioning step portion 13 of the support teeth 12 to perform a positioning function.

[0058] Spacer 40 Figure 3 , Figure 4 , Figure 6 , Figure 7 As shown, to improve lightweight and durability, a plate formed into an X-shape from the same molding material as the adapter 31 is omitted when the height of the precision substrate storage container 1 is high. However, when the height of the precision substrate storage container 1 is low, it is fitted into the hollow portion 32 of the adapter 31 and supported on the support plate 34, functioning to adjust the height relative to the multiple fasteners 50 by mounting the precision substrate storage container 1. The thickness of the spacer 40 is determined considering the varying heights of the precision substrate storage container 1.

[0059] On the rear surface of the spacer 40, a recessed groove 41 with a 10° angle is formed, which can oppose the rear periphery of the lower surface 5 of the flange of the precision substrate storage container 1. Furthermore, at the front and rear ends of the pair of inclined pieces 42 forming the spacer 40, engagement protrusions 43 are formed, which are positioned by embedding into a pair of engagement holes 33. Each engagement protrusion 43, in addition to its positioning and fixing function for the spacer 40, also prevents incorrect insertion. Therefore, it prevents the spacer 40 from being misplaced, thus preventing the support piece 34 mounted on the adapter 31 from being supported in such a state.

[0060] Multiple fasteners, 50, etc. Figures 1 to 6 , Figures 11 to 15As shown, the device comprises the following components: a pair of first fixing members 51, which are rotatably (swinging) disposed on the front surface of the adapter 31 and locked onto the upper front surface 3 of the flange portion 2 of the precision substrate storage container 1; and a second fixing member 55, which is shaped like an inverted L in cross-section, is screwed to the center of the rear surface of the adapter 31 and locked onto the upper rear surface 3 of the flange portion 2 of the precision substrate storage container 1 for positioning and fixation. These first and second fixing members 51 and 55 each incorporate a helical spring (not shown) to allow for vertical movement within a range of 1 mm to 5 mm, preferably 1 mm to 3 mm, even if the heights of the flange portions 2 of the precision substrate storage container 1 are different.

[0061] From the viewpoint that a pair of first fasteners 51 are fixed from a pair of ribs 4 that avoid the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1, one side ( Figure 3 The first fixing member 51 (on the left side) rotates 90° counterclockwise, while the other side ( Figure 3 The first fixing member 51 (on the right side of the adapter 31) is rotated 90° clockwise. Each first fixing member 51 is formed in a generally T-shape, the generally T-shape comprising: a cylindrical portion 52 rotatably supported by a shaft near the center of the front surface of the adapter 31; and an elongated plate-shaped locking piece 53, horizontally formed at the upper end of the cylindrical portion 52 and locked onto the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1; a handle 54 for rotation operation is formed at one end of the locking piece 53.

[0062] When the first fastener 51 is not securing the precision substrate storage container 1, the locking tab 53 points to the left-right direction of the adapter 31. When the precision substrate storage container 1, which is mounted on the adapter 31, is secured, the locking tab 53 rotates 90° to point to the front-back direction of the adapter 31. When the locking tab 53 rotates 90° to point to the front-back direction of the adapter 31, it contacts the center of the back side of the door body 19 that constitutes the door assembly 18. This contact restricts the rotation of the first fastener 51, preventing the precision substrate storage container 1 from deviating from its position or falling off.

[0063] A pair of fixing plates 60 Figure 1 , Figures 3 to 6 , Figure 8 , Figures 11 to 15As shown, from the viewpoint of facilitating the removal and insertion of the precision substrate storage container tray 30, after being positioned and fitted into a pair of mounting slots 36 of the adapter 31 by sliding from the inside to the outside, they are easily screwed in and out using multiple fasteners. The pair of retaining pieces 60 are designed and shaped differently from each other to prevent incorrect fitting or screwing. Therefore, the retaining piece 60 on one side is properly fitted or screwed into the mounting slot 36 on one side of the adapter 31, preventing the retaining piece 60 on the other side from being incorrectly fitted or screwed into the mounting slot 36 on the other side.

[0064] Each fixing plate 60 is formed from the same molding material as the adapter 31 into a polygonal plate extending in the front-rear direction of the adapter 31. It is thinner than the wall thickness of the adapter 31 and functions to press against the back of the support teeth 12 of the body 11 from below. The fixing plate 60 presses against the back of the support teeth 12 of the body 11 from below, but these support teeth 12 are not the same as the support teeth 12 of the mounting plate 37 supporting the adapter 31, and are located above the support teeth 12 of the mounting plate 37 supporting the adapter 31. For example, when the fixing plate 60 is pressed against the back of the fifth support tooth 12 from below on the body 11, the mounting plate 37 of the adapter 31 is supported on the third support tooth 12 from below.

[0065] The pressing force of the fixing plate 60 can be obtained by clamping a spacer plate with excellent spacer function between the mounting plate 37 of the adapter 31 and the fixing plate 60, or by forming an inclined portion in the fixing plate 60, or by changing the thickness of the fixing plate 60.

[0066] In the above structure, when the high-precision substrate storage container 1 is housed in the semiconductor wafer storage container 10 for transport, firstly, the adapter 31 is horizontally inserted between the multiple support teeth 12 below the interior of the empty body 11 (see reference). Figure 10 The adapter 31 has a pair of mounting plates 37 horizontally supported on the left and right support teeth 12 of the body 11 (see reference). Figure 9 The fixing pieces 60 slide horizontally from the inside to the outside and are positioned and fitted into a pair of mounting slots 36 of the adapter 31 (see reference). Figure 11 Then, each fixing piece 60 is screwed and fixed to the back of the upper support tooth 12 by means of multiple fasteners such as bolts (see reference). Figure 8 , Figure 12 ).

[0067] At this time, when the mounting plate 37 of the adapter 31 is supported on, for example, the first support tooth 12 from the bottom, the fixing plate 60 is pressed against the back of the third support tooth 12 from the bottom of the body 11.

[0068] Next, the precision substrate storage container 1 is inserted into the body 11 and its rear part is tilted downwards, so that the rear of the flange 2 of the precision substrate storage container 1 is clamped between the rear of the support piece 34 of the adapter 31 and the second fixing member 55 via the recess 35. Then, the front part of the precision substrate storage container 1 is tilted downwards, so that the periphery of the lower surface 5 of the flange of the precision substrate storage container 1 is directly supported on the support piece 34 of the adapter 31 (see reference). Figure 13 ).

[0069] At this time, no large gap is generated between the flange portion 2 of the precision substrate storage container 1 and the multiple fixing members 50, so it will not hinder the fixing of the precision substrate storage container 1, and the spacer 40 is omitted. In addition, since there is a recessed groove 35 at the rear of the support piece 34, if the recessed groove 35 is used effectively, the rear of the flange portion 2 of the precision substrate storage container 1 can be properly clamped between the rear of the support piece 34 of the adapter 31 and the second fixing member 55. In addition, since the second fixing member 55 moves up and down by means of a coil spring, the short piece protruding forward of the second fixing member 55 can be reliably locked onto the upper surface 3 at the rear of the flange portion 2 of the precision substrate storage container 1.

[0070] Next, by operating the handle 54 of the locking tab 53 of each of the first fixing members 51 to rotate the locking tab 53 by 90°, each locking tab 53 is locked onto the upper surface 3 in front of the flange portion 2 of the precision substrate storage container 1 for positioning and fixation (see reference). Figure 13 , Figure 14 By fitting the door assembly 18 into the front of the opening of the body 11, the high-precision substrate storage container 1 can be stored in the semiconductor wafer storage container 10 for transport (see reference). Figure 15 ).

[0071] At this time, since the first fixing member 51 moves up and down by means of a helical spring to correspond to the height of the flange portion 2 of the precision substrate storage container 1, the locking piece 53 can be reliably locked onto the upper surface 3 in front of the flange portion 2 of the precision substrate storage container 1. In addition, since the locking piece 53 is restricted from free rotation due to contact with the center of the back of the door assembly 18, even when the semiconductor wafer storage container 10 is being transported, positional deviation or detachment of the precision substrate storage container 1 can be prevented.

[0072] According to the above structure, since the adapter 31 is not a circular plate or the like, but a hollow frame that has been hollowed out, it is possible to achieve weight reduction and eliminate the possibility of breakage or damage to the support teeth 12 of the body 11. Furthermore, thanks to the weight reduction, there is no possibility of obstructing the transport of the automated transport device that holds the semiconductor wafer storage container 10. In addition, by using the spacer 40, the height of the precision substrate storage container 1 during fixing can be adjusted, thus making the fixing operation of the precision substrate storage container 1 much easier.

[0073] Furthermore, since the mounting plate 37 and fixing plate 60 of the adapter 31 respectively contact the multiple support teeth 12 of the body 11, the load acting on the support teeth 12 is distributed. Therefore, in addition to preventing deformation and damage to the support teeth 12, the adapter 31 can be easily removed and placed relative to the body 11. In addition, since the adapter 31 is not a large shelf, it will not lead to large size, thus eliminating the possibility of obstructing handling. Furthermore, since the support plate 34 of the adapter 31 is L-shaped in cross-section and extends in the vertical direction, the precision substrate storage container 1 can be stably mounted regardless of its height.

[0074] then, Figures 16 to 19 The figure shows the second embodiment of the present invention. In this case, the precision substrate storage container 1 is configured to be of a lower height type, so that the flange portion 2 of the precision substrate storage container 1 is directly supported on the support piece 34A of the adapter 31.

[0075] As a precision substrate storage container 1, examples include a photomask storage container with a lower height for storing photomasks and a photomask storage container with a lower height for storing photomasks.

[0076] The adapter 31 has a cross-sectional support plate 34A in the lower part of the inner peripheral surface of the hollow portion 32, which is frame-shaped in plan view and supports the periphery of the lower surface 5 of the flange portion of the precision substrate storage container 1. On the rear surface of the support plate 34A, a recessed groove 35 is formed with an inclination of about 10°, which can be opposed to the rear of the periphery of the lower surface 5 of the flange portion of the precision substrate storage container 1. With the use of the recessed groove 35, the rear part of the precision substrate storage container 1 can be tilted downward and smoothly mounted. As for other parts, since they are the same as those in the above embodiment, the description is omitted.

[0077] In this embodiment, the same effects as in the above-described embodiments can be expected. Furthermore, since it is not necessary to provide multiple engaging holes 33 on the inner circumferential surface of the hollow portion 32 of the adapter 31, structural simplification is expected. Additionally, since the support plate 34A of the adapter 31 is a non-protruding cross-sectional shape, molding becomes easier. Moreover, if the deep-bottomed precision substrate storage container tray 30 with spacers 40 of the first embodiment is inserted into the lower interior of the body 11, and the shallow-bottomed precision substrate storage container tray 30 of the second embodiment is inserted into the upper interior of the body 11, two lower-height precision substrate storage containers 1 can be efficiently stored and transported within the semiconductor wafer storage container 10, significantly improving production efficiency.

[0078] Furthermore, the body 11 and gate assembly 18 of the semiconductor wafer receiving container 10 in the above embodiment can be formed from the same molding material as the adapter 31. The semiconductor wafer receiving container 10 is preferably FOUP type, but it can also be an unused FOSB type used for transport if no problems occur. In addition, in the above embodiment, the adapter 31 is made into a frame shape that is approximately square when viewed from above, but it can also be a frame shape that is approximately polygonal when viewed from above. The outer peripheral surface of the adapter 31 can also have multiple corners, step differences, or be bent.

[0079] Furthermore, in addition to the predetermined resin, conductive materials such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers, as well as various antistatic agents such as anionic, cationic, and nonionic agents, can be added to the molding material of the adapter 31 as needed. Additionally, engaging holes 33 for the spacer 40 can be provided on the other side of the front portion and the other side of the rear portion of the inner circumferential surface of the hollow portion 32 of the adapter 31. Furthermore, the support pieces 34 / 34A of the adapter 31 can be endless frames or multiple pieces can be formed. For example, support pieces 34 / 34A can be formed only protruding below the front portion and below the rear portion of the inner circumferential surface of the hollow portion 32 of the adapter 31.

[0080] Furthermore, when the mounting piece 37 of the adapter 31 is supported on the support tooth 12, the fixing piece 60 can also be supported on the support tooth 12 directly above and adjacent to it. Additionally, the spacer 40 can be X-shaped in plan view, but is not limited thereto; for example, it can be made into a plate with multiple lines extending radially asterisks, or a roughly H-shaped plate in plan view. At the end of at least one of the plurality of forming pieces forming the roughly H-shaped spacer 40 in plan view, an engaging protrusion 43 can be formed that is embedded in the engaging hole 33 of the support piece 34.

[0081] Furthermore, a helical spring, leaf spring, or similar spring for vertical movement can be clamped between the front of the adapter 31 and the first fixing member 51. Similarly, a helical spring, leaf spring, or similar spring for vertical movement can be clamped between the rear of the adapter 31 and the second fixing member 55. Additionally, the number of the left and right pairs of first fixing members 51 can be increased or decreased as needed. Furthermore, all the technology described in this specification can be acquired through modifications or divisional applications.

[0082] Industrial availability The precision substrate storage container tray and semiconductor wafer storage container of the present invention are used in the fields of semiconductor manufacturing and the like.

[0083] Explanation of reference numerals in the attached figures 1. Precision substrate storage container 2. Flange portion 3. Top surface 4 ribs 5. Lower surface 10 Semiconductor wafer storage container 11. Body 12 Support teeth 18-door group 19 main doors 30 Precision substrate storage container tray 31 Adapter 32 Hollow section 33 locking holes 34 Support plates 34A support plate 35 Retreat Slot 37 equipped with chips 40 spacers 41 Retreat Slot 42 Inclined plate 43. Engagement protrusion 50 Fasteners 51 First fastener 52. Cylinder section 53 locking clips 54 handles 55 Second fastener 60 Fixing plate (fixing component).

Claims

1. A tray for a precision substrate storage container, supporting the precision substrate storage container and being stored within a semiconductor wafer storage container. Its features are, Includes: an adapter, a body housing a precision substrate storage container and housed in the front opening of a semiconductor wafer storage container; a fastener, at least one of which is installed on the front and rear of the adapter and secures the flange of the precision substrate storage container; and multiple fastening components, which are detachably installed on both sides of the adapter and can contact the support teeth on the inner sides of the body. The adapter is formed into a generally frame-shaped top view that can fit into the flange of the precision substrate storage container. In this adapter, a support piece is formed that can support the lower surface of the flange of the precision substrate storage container, and a recessed groove is formed on the support piece that can be opposed to the rear periphery of the lower surface of the flange of the precision substrate storage container. The mounting pieces protrude from both sides of the adapter, and the plurality of mounting pieces can contact other support teeth besides the support teeth of the body that contact the fixing member.

2. The tray for storing precision substrates as described in claim 1, characterized in that, The device includes a spacer sandwiched between the flange of the precision substrate storage container and the support piece of the adapter. On the surface of the spacer, a recess is formed that can be opposed to the rear periphery of the lower surface of the flange of the precision substrate storage container.

3. The tray for storing precision substrates as described in claim 2, characterized in that, A locking hole for a spacer is provided on the inner periphery of the hollow portion of the adapter. The spacer is formed into an approximately X-shaped form when viewed from above. At the end of at least one of the pair of inclined pieces forming the spacer, a locking protrusion is formed that is embedded in the locking hole of the hollow portion of the adapter.

4. The tray for storing precision substrates as described in claim 2, characterized in that, On the back of the adapter, there is a roughly L-shaped support piece formed in cross-section of the periphery of the flange portion supporting the precision substrate storage container and a spacer.

5. The tray for storing precision substrates as described in claim 1, characterized in that, On the inner periphery of the hollow portion of the adapter that fits into the flange portion of the precision substrate storage container, there is a support piece that is formed in an endless shape with a roughly plate-like cross-sectional shape on the periphery of the lower surface of the flange portion supporting the precision substrate storage container.

6. The tray for storing precision substrates as described in claim 1 or 2, characterized in that, The fasteners include: a first fastener rotatably mounted on the front of the adapter and engaged in front of the flange of the precision substrate storage container; and a generally inverted L-shaped second fastener mounted on the rear of the adapter and engaged behind the flange of the precision substrate storage container; the first and second fasteners are movable up and down by means of a spring component.

7. The tray for storing precision substrates as described in claim 6, characterized in that, The first fastener includes: a cylindrical portion rotatably supported on the front of the adapter; and a locking piece formed on the cylindrical portion and capable of locking onto the front of the flange of the precision substrate storage container; the locking piece forms an operating handle, and when the precision substrate storage container mounted on the adapter is fixed, the locking piece points in the front-rear direction of the adapter, and the locking piece contacts a door assembly that fits into the front of the body of the semiconductor wafer storage container.

8. A semiconductor wafer storage container, characterized in that, include: The front-opening body houses the tray for storing the precision substrate storage container as described in claim 1 or 2; and the door assembly is detachably fitted onto the front of the opening of the body; used in a semiconductor manufacturing process.

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