Transport vehicle teaching system and transport system

Abstract

The present invention relates to a transport vehicle teaching system and a transport system, the transport vehicle teaching system teaching a transport vehicle, the transport vehicle moving along a track and transporting a transport object to a storage module and including a clamping module, the transport vehicle teaching system including: a sensing object unit; a data acquisition unit that acquires image or position information of the sensing target unit; and a controller that receives data from the data acquisition unit, the sensing target unit is provided on the transport vehicle side without being provided on the storage module, and the data acquisition unit is arranged on the storage module side without being provided on the transport vehicle.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2024-0151811, filed on October 31, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This invention relates to a teaching system for a transport vehicle and a transport system. Background Technology

[0004] To improve semiconductor manufacturing efficiency, technologies have been adopted to enhance various processes performed by semiconductor manufacturing equipment (e.g., exposure, deposition, etching, ion implantation, cleaning, etc.). Furthermore, equipment has been introduced and used to more efficiently move items between semiconductor manufacturing equipment (containers for holding wafers, front-opening unified pods (FOUPs), photomask cassettes (PODs), etc.). For example, a transport system including overhead hoist transport (OHT) is used, which is configured to move and transport items along a transfer path located on the ceiling side of the semiconductor manufacturing plant.

[0005] The transport system may include a transport vehicle and a travel rail that provides the transfer path. The transport vehicle may include a traveling unit that travels along the rail and a lifting unit disposed below the traveling unit. The lifting unit is capable of supporting the items to be transferred and placing them on a temporary storage platform by rotating, moving horizontally, or lifting vertically.

[0006] At this point, in order to place the item in the correct position on the item storage platform, a teaching operation must be performed in advance. That is, the operator confirms the item through a trial run or jog (JOG) and tries to find the correct position of the transport vehicle and place the item for the first time, and stores the coordinates of the placement position, the distance or speed of movement, etc. in the control unit.

[0007] To improve the accuracy and stability of transportation operations, the teaching operation utilizes a vision camera and images provided in the form of QR tags. The vision camera is configured on the transport vehicle at the top, and the images are provided as stickers on the item storage platform at the bottom.

[0008] However, in the manufacturing plant, the equipment is not provided by a single supplier, but by multiple suppliers, such as suppliers of tracks, transport vehicles, and substrate processing devices equipped with temporary storage platforms. Therefore, the image (QR code label) stickers used for transport vehicle teaching operations are not pre-configured, but are additionally set by the supplier providing the transport vehicles for the teaching operations. Furthermore, the configuration of the stickers is done manually on hundreds of devices, and the stickers need to be removed after the teaching operation is completed. Therefore, the teaching operation requires manual operation, and the installation / removal of stickers is cumbersome and needs improvement. Summary of the Invention

[0009] Technical problems to be solved

[0010] The technical problem to be solved by the present invention is to provide a transport vehicle teaching system and a transport system that can facilitate teaching operations and improve the accuracy of teaching operations.

[0011] The technical problems to be solved by the present invention are not limited to those described above. Other technical problems not covered herein will be clearly understood by those skilled in the art from the following description.

[0012] means of solving technical problems

[0013] To address the aforementioned technical problems, one aspect of the present invention provides a transport vehicle teaching system for teaching a transport vehicle that moves along a track and transports goods to a storage module and includes a clamping module. The transport vehicle teaching system includes: a sensing object unit; a data acquisition unit for acquiring image or position information of the sensing object unit; and a controller for receiving data from the data acquisition unit. The sensing object unit is disposed on the side of the transport vehicle and not on the storage module, and the data acquisition unit is disposed on the side of the storage module and not on the transport vehicle.

[0014] To address the aforementioned technical problems, one aspect of the present invention provides a transportation system comprising: a transport vehicle for transporting goods to a storage module and including a clamping module; a track disposed on a ceiling and forming a movement path for the transport vehicle; and a transport vehicle teaching system.

[0015] To address the aforementioned technical problems, another aspect of the present invention provides a transportation system comprising: a transport vehicle for transporting goods to a storage module and including a clamping module; a track disposed on a ceiling and forming a movement path for the transport vehicle; and a transport vehicle teaching system for teaching the transport position for placing the goods on the transport vehicle, the transport vehicle teaching system comprising: a sensing object unit including a first marking module, a second marking module adjacent to the first marking module, and a sensing rod disposed on the clamping module, the first marking module including an image; a data acquisition unit including a visual camera and a touchpad, the visual camera acquiring images or position information of the first marking module and the second marking module, the touchpad sensing contact with the sensing rod and acquiring the coordinates of the sensing rod; and a controller receiving data from the data acquisition unit, the sensing object... The unit is disposed on the transport vehicle, and the data acquisition unit is disposed on the container configured at the storage module. The first marking module includes a first mark and a second mark. The first mark is disposed on one side of the transport vehicle, and the second mark is disposed on the other side of the transport vehicle at the same level as the first mark. The second marking module is located at the center between the first mark and the second mark. The vision camera is located in the container and at a first position forming a reference value. The reference value forms the transport target position of the transport vehicle. The controller is configured to set a first correction coordinate to form a teaching position for the movement of the transport vehicle. The first correction coordinate is set by calculation formula 1 such that the first mark and the second mark form the same distance based on the first position, or the number of pixels of the first mark and the second mark captured by the vision camera is the same.

[0016] Formula 1 is X = K / 2 + (a 2 -b 2 -K 2 ) / 2K

[0017] Where X is the coordinate of the transport vehicle's travel axis in the first correction coordinate system, i.e., the horizontal movement position of the transport vehicle; a is the larger or equal number of the straight-line distance between the first position and the first mark, or between the first position and the second mark, and b is the smaller number; K is the straight-line distance between the first mark and the second mark. The controller sets X when a and b have the same value by calculating the value of a when a and b have the same value. Based on the fact that a and b have the same value, the first correction coordinate system is set using formula 2.

[0018] Formula 2 is

[0019]

[0020] Where Z is the lifting axis coordinate of the vertical distance between the horizontal position of the first mark or the second mark and the first position, that is, the vertical movement position of the clamping module.

[0021] The controller sets the first correction coordinates using formula 3.

[0022] Formula 3 is

[0023]

[0024] Where Y is the coordinate of the sliding axis of the transport vehicle, that is, the forward and backward movement position of the transport vehicle.

[0025] The controller is configured such that when the coordinates of the vehicle's driving axis direction in the image or position information of the second marking module acquired by the vision camera are different from the reference value, the vision camera re-acquires the image or position information of the first marking module and transmits it to the controller, thereby resetting the first correction coordinates through the calculation formula 1, comparing the contact coordinates with the reference value that forms the transport target position of the vehicle, wherein the contact coordinates are the coordinates of the sensing rod acquired when the sensing rod is in contact with the plate module after the clamping module is lowered, and setting the second correction coordinates as the teaching target position of the vehicle, thereby forming the position where the vehicle moves, such that the contact coordinates and the reference value form the same coordinates.

[0026] The details of other embodiments are included in the detailed description and accompanying drawings.

[0027] According to the vehicle teaching system and transportation system of the present invention, since the data acquisition unit is installed in the container rather than on the vehicle, it is not necessary to install the data acquisition unit on tens of thousands of vehicles. Instead, the data acquisition unit is installed in one container and the container is moved to the destination, i.e., the storage module. Therefore, the cost and operational losses of installing the data acquisition unit can be reduced. Attached Figure Description

[0028] Figure 1 This is a diagram illustrating a manufacturing plant equipped with a transportation system according to some embodiments of the present invention.

[0029] Figure 2 It is used for explanation Figure 1 The diagram shows the structure of the transport vehicle.

[0030] Figure 3 This is a block diagram illustrating a transport vehicle teaching system according to some embodiments of the present invention.

[0031] Figure 4 This is a diagram illustrating the teaching system for a transport vehicle according to a first embodiment of the present invention.

[0032] Figures 5 to 7 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the travel axis direction of the transport vehicle.

[0033] Figure 8 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the lifting axis direction of the transport vehicle.

[0034] Figure 9 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the sliding axis direction of the transport vehicle.

[0035] Figure 10 This is a diagram illustrating the teaching system for a transport vehicle according to a second embodiment of the present invention.

[0036] Figure 11 This is a diagram illustrating the teaching system for a transport vehicle according to a third embodiment of the present invention.

[0037] Figure 12 This is a diagram illustrating the calculation of coordinates by the vehicle teaching system according to a third embodiment of the present invention. Detailed Implementation

[0038] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The advantages, features, and methods of implementing the present invention will become more apparent from the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms. These embodiments are provided merely to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the invention, which is defined by the scope of the claims. Throughout this specification, the same reference numerals denote the same constituent elements.

[0039] The terminology used in this specification is for descriptive purposes only and is not intended to limit the invention. In this specification, the singular includes the plural unless explicitly stated otherwise. The terms "comprises" and / or "comprising" as used in this specification mean that the mention of a component, step, operation, and / or component does not exclude the presence or addition of one or more other components, steps, operations, and / or components.

[0040] Figure 1 This is a diagram illustrating a manufacturing plant equipped with a transportation system according to some embodiments of the present invention. Figure 2 It is used for explanation Figure 1The diagram shows the structure of the transport vehicle.

[0041] Reference Figure 1 and Figure 2 According to some embodiments of the present invention, the transport system 10 may be configured in the manufacturing plant 5 and may include a plurality of transport vehicles 20, a track 40, and a transport vehicle teaching system 100 (see reference). Figure 3 ).

[0042] The manufacturing plant 5, equipped with the transport system 10, can be configured as a semiconductor manufacturing plant or a display manufacturing plant, and can be a cleanroom capable of handling substrates (e.g., wafers). To perform semiconductor manufacturing processes, a substrate processing apparatus 50 can be configured to handle various manufacturing processes, such as deposition, lithography, and / or etching processes on the substrate.

[0043] Furthermore, after performing a substrate processing process in one substrate processing apparatus 50, the substrate can be transported to another substrate processing apparatus 50 for the next substrate processing process. The transport of the substrate can be performed by the transport vehicle 20.

[0044] For example, the substrate can be temporarily stored in container 70 (see...) Figure 4 In the context of transporting substrates, the container 70 is capable of accommodating multiple substrates. The container 70, as a transport object, can be a front-opening unified pod (FOUP), but is not limited to this; it can have various embodiments, such as a photomask box and / or a wafer box. It should be noted below that container 70 and transport object 70 have the same meaning.

[0045] The transport operation of container 70 can be completed by loading transport item 70 into or removing transport item 70 from storage module 51 configured in substrate processing apparatus 50. That is, transport vehicle 20 can load container 70 into or remove container 70 from storage module 51 to perform transport operation.

[0046] However, the transport operation of the transport vehicle 20 is not limited to the substrate processing device 50. That is, the storage module 51 can be a port of the substrate processing device 50, but the transport item 70 to be transported in the manufacturing plant 5 can be transported to multiple locations.

[0047] For example, in addition to being a port of the substrate processing device 50, the storage module 51 can also be a stocker, an under track buffer (UTB) disposed below the track 40, a side track buffer (STB) disposed on the side of the track 40, etc. Various modifications can be made as long as they do not conflict with the embodiments of the present invention.

[0048] The transport vehicle 20 in this embodiment moves along the track 40, and may be an overhead crane (OHT), but is not limited thereto. The transport vehicle 20 can receive power in various ways, for example, it can receive power from the track 40 in a non-contact manner to transport, load, and remove the container 70 containing the substrate. The transport vehicle 20 can use the received power to perform loading and unloading operations, driving operations, acceleration operations, and waiting operations, and can charge its internal battery.

[0049] Reference Figure 2 The transport vehicle 20 may include a microcontroller 20MC, a lifting unit 20H, a communication unit 24, a driving unit 25, a power receiving unit 26, and a battery 28, and may utilize known mechanisms. A brief explanation follows.

[0050] The microcontroller 20MC can control the lifting unit 20H, the communication unit 24, the travel unit 25, the power receiving unit 26, and the battery 28, etc.

[0051] Reference Figure 4 The lifting unit 20H can be configured in the housing (not shown in the figures) at the lower part of the traveling unit 25, and may include a sliding module 21, a vertical moving module 22, and a clamping module 23. The sliding module 21 is used for sliding, the vertical moving module 22 is used to lift and lower the clamping module 23 using the lifting belt, and the clamping module 23 is used to clamp the container 70.

[0052] The communication unit 24 communicates with the controller 130, and the driving unit 25 is equipped with driving wheels to move the transport vehicle 20 along the track 40. Furthermore, the power receiving unit 26 receives power from the track 40, and the battery 28 is charged using the power supplied by the track 40.

[0053] The transport vehicle 20 in this embodiment has an improved teaching operation, which will be referred to in this regard. Figure 3 and Figure 4 Please provide further explanation.

[0054] A track 40 can be configured on the ceiling of the manufacturing plant 5 to form the movement path of the transport vehicle 20, so that the transport vehicle 20 can move along the track 40 to transport the transported goods 70.

[0055] In the movement path of track 40, for example, multiple storage modules 51 are configured below the movement path, thereby the transport vehicle teaching system 100 performs teaching operations to position the transport vehicle 20 in the multiple storage modules 51 and load or remove the transported item 70.

[0056] That is, in order to accurately load the transported item 70 into or remove it from the storage module 51, the transport vehicle 20 will stop at the location corresponding to the storage module 51 and wait to perform the loading or removal operation. At this time, it is necessary to perform a teaching operation to set the location (e.g., storage module 51) where the transport vehicle 20 performs the transport operation as the target location. This can be accomplished by the transport vehicle teaching system 100.

[0057] The teaching system 100 for the transport vehicle will now be described with reference to the accompanying drawings.

[0058] It should be noted that the teaching operation of the transport vehicle 20 is used to set the destination of the transport vehicle 20, i.e., the transport position (the position of the storage module 51). The coordinates involved in this embodiment can be defined to have the same meaning as the position. For example, the coordinates of the driving axis 1, the sliding axis 2, and the lifting axis 3 are the X-axis, Y-axis, and Z-axis coordinates of the three-dimensional coordinate system, which can represent the horizontal movement position, the forward and backward movement position, and the vertical movement position.

[0059] Figure 3 This is a block diagram illustrating a transport vehicle teaching system according to some embodiments of the present invention. Figure 4 This is a diagram illustrating the teaching system for a transport vehicle according to a first embodiment of the present invention. Figures 5 to 7 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the travel axis direction of the transport vehicle. Figure 8 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the lifting axis direction of the transport vehicle. Figure 9 This is a diagram illustrating how the teaching system according to the first embodiment of the present invention calculates the coordinates of the sliding axis direction of the transport vehicle.

[0060] Reference Figures 3 to 9 The transport vehicle teaching system 100 can teach the transport location so that the transport vehicle 20 can load the transported object 70 into or remove it from the storage module 51, and may include a sensing object unit 110, a data acquisition unit 120, and a controller 130.

[0061] The sensing object unit 110, which is the object sensed by the data acquisition unit 120, is located on the transport vehicle 20, unlike the usual configuration where it is located below the data acquisition unit 120 and in the storage module 51. Therefore, the sensing object unit 110 does not need to be removed after the teaching operation is completed, and the configured state can be maintained during the transportation operation.

[0062] Furthermore, when the transport vehicle 20 needs to be re-taught due to the following problems, such as the transport vehicle 20 being taken out of the manufacturing plant 5 due to malfunctions or other problems, being repaired and then reconfigured in the manufacturing plant 5, or the wear of the travel wheels of the transport vehicle 20 and / or the sagging of the track 40, the sensing object unit 110 used in the previous teaching operation can be used in the same way. Therefore, the transport vehicle teaching system 100 of this embodiment can reduce the trouble caused by setting up / removing the sensing object unit 110 due to the teaching operation.

[0063] Furthermore, the sensing object unit 110 does not need to be mounted on a separate fixture, making it easy to set up / configure.

[0064] For example, the sensing object unit 110 may include a first tagging module 111.

[0065] The first marking module 111 can be configured as a coating and / or sticker, and thus can be disposed on the transport vehicle 20 by coating or attachment. The first marking module 111 can be disposed on the lower ends of both sides of the housing (not shown in the figures). However, it is not limited to this. As long as the sensing object unit 110 is disposed above the storage module 51 together with the transport vehicle 20, various modifications can be made. For example, in addition to the housing, a container 70 temporarily stored in the housing can also be disposed in the transport vehicle 20.

[0066] That is, the sensing object unit 110 installed on the transport vehicle 20 mentioned in this embodiment is a configuration associated with the transport vehicle 20 rather than with the storage module 51, and may mean covering the housing and / or the container 70 inside the housing.

[0067] For example, the first marking module 111 may include images such as barcodes and / or QR tags. The first marking module 111 may include a first mark 111A and a second mark 111B, wherein the first mark 111A is disposed on one side of the housing, and the second mark 111B is disposed on the other side of the housing at the same level / height as the first mark 111A, wherein one side of the housing serves as one side of the transport vehicle 20, and the other side of the housing serves as the other side of the transport vehicle 20.

[0068] The first marking module 111 includes a first marking 111A and a second marking 111B, so that the visual camera 121 can obtain location information by simply taking an image at the storage module 51 where teaching is required, without using a setting port (not shown) and a setting mark (not shown).

[0069] In other words, unlike this embodiment, if a QR code label is configured at the storage module at the location where teaching is required, the visual camera needs to be used as a reference for setting. Therefore, in addition to the storage module at the location where teaching is required, a setting mark for setting is also captured at the setting port, and the pixel count and image coordinate changes of the setting mark and the QR code label of the storage module where teaching is required are compared. The setting port serves as the port for forming the teaching reference.

[0070] However, in this embodiment, the first marking module 111 includes a first marking 111A and a second marking 111B. Therefore, it is only necessary to compare the number of pixels of the first marking 111A and the second marking 111B and use the coordinates, distance, etc. of the first marking 111A and the second marking 111B. Thus, there is no need to configure a setting port / setting marking for capturing comparison images.

[0071] Furthermore, the first marking module 111 includes a first marking 111A and a second marking 111B, thereby enabling the use of, for example... Figures 5 to 9 The calculation formulas 1 and / or 2 mentioned above can easily set the first correction coordinates.

[0072] Unlike the typical configuration where the data acquisition unit 120 is located on the upper part of the transport vehicle 20, in this embodiment, the data acquisition unit 120 can be located in a portable device configured in the storage module 51. The portable device can be a container 70, and more particularly, it can be configured as a front-opening teach-in wafer transfer box 70T.

[0073] For ease of explanation and understanding, the front-opening wafer transfer box 70T for teaching is distinguished from the transport 70. The front-opening wafer transfer box 70T can perform the same functions as the transport 70. However, it is not limited to this; the front-opening wafer transfer box 70T may not contain a substrate, but may only have the same shape as the transport 70. That is, in order to support the vision camera 121 used for teaching operations, the front-opening wafer transfer box 70T can be configured as a container with the same or similar shape as the transport 70, or it can be the transport 70 itself.

[0074] This front-opening wafer transfer box 70T for teaching can utilize discarded containers or structures not configured to accommodate substrates that have problems with substrate housing but not with supporting the data acquisition unit 120 used for coordinate confirmation, thereby enabling teaching operations to be performed at low cost.

[0075] The data acquisition unit 120 may include a visual camera 121.

[0076] The visual camera 121 captures images and enables the controller 130 to calculate / set position coordinates based on the number of pixels in the acquired images. The visual camera 121 can acquire image or position information from the first marker module 111.

[0077] For example, the number of pixels in the image captured by the vision camera 121 can increase or decrease depending on the distance. When the number of pixels at a preset distance is different from the number of pixels in the captured image, for example, when the number of pixels in the captured image is greater than the set number of pixels, it can be determined that the distance between the transport vehicle 20 provided by the vision camera 121 and the storage module 51 is less than the set distance, and the ratio of distance to number of pixels can be calculated through repeated experiments.

[0078] Furthermore, since the QR code label is configured as a quadrilateral image, the visual camera 121 can sense the four endpoints in the QR code label image and obtain the coordinates of the center points of the four sensed endpoints. According to a variation of the embodiment, the coordinates of the lifting shaft 3 can also be obtained by utilizing the size change of the QR code label.

[0079] The vision camera 121 is mounted on the front-opening wafer transfer box 70T for teaching, thus eliminating the need for additional fixtures. Furthermore, the vision camera 121 can be configured in a first position to calculate the position coordinates of the QR code label image at a set location.

[0080] The first position can be located in the front-opening wafer transfer box 70T for teaching purposes, at the reference value SP1 (refer to...). Figure 12 The reference value SP1 can represent the center position of the transport vehicle 20's destination location / coordinates, so that after the transport vehicle 20 is set up in the manufacturing plant 5, the transported item 70 can be accurately and safely transported to the storage module 51.

[0081] This visual camera 121 is configured in the teaching front-opening wafer transfer box 70T, and the data acquisition unit 120 is set in the container 70 (i.e., the teaching front-opening wafer transfer box 70T), rather than in the transport vehicle 20. Therefore, it is not necessary to set up the data acquisition unit 120 in each of the tens of thousands of transport vehicles 20. That is, as long as the data acquisition unit 120, such as the visual camera 121, is set in one teaching front-opening wafer transfer box 70T, the teaching front-opening wafer transfer box 70T can be moved to the target position. Furthermore, only QR code labels, which are cheaper and simpler to set up than the visual camera 121, need to be set up on the transport vehicle 20. Therefore, the cost and operational losses for setting up the data acquisition unit 120 can be reduced.

[0082] The controller 130 may be, for example, an OHT control system (OCS) and include control for the transport operation of the transport vehicle 20, but this is merely an example. Therefore, various modifications are possible; the controller 130 may only perform teaching operations, while the control configuration for controlling the transport vehicle 20 may be configured separately.

[0083] The controller 130 can connect to the transport vehicle 20 via wireless communication (interface). The controller 130 can provide commands to the transport vehicle 20 based on the work process. The controller 130 can search for the shortest path from the starting point to the destination, select the optimal location for the transport vehicle 20 to perform the transport operation, and provide transport commands to efficiently complete the transport operation.

[0084] For example, the microcontroller 20MC of the transport vehicle 20 can provide the current state of the transport vehicle 20 to the controller 130 through the communication unit 24. The current state of the transport vehicle 20 may include loading or unloading status, driving status, acceleration status, and waiting status, etc. That is, the controller 130 can control the transport vehicle 20 using the position information of the transport vehicle 20 relative to the storage module 51 obtained through the teaching operation.

[0085] In order for the transport vehicle 20 to move to its destination transport position according to the control of the movement instruction, the controller 130 can perform a teaching operation. The teaching operation is an operation performed to guide the transport position when the transport vehicle 20 is initially set up in the manufacturing plant 5. That is, its purpose is to set the reference value SP1 of the transport destination position / coordinates of the transport vehicle 20 so that after the transport vehicle 20 is set up in the manufacturing plant 5, the transported item 70 can be transported to the storage module 51 accurately and safely.

[0086] To this end, the controller 130 can receive data from the data acquisition unit 120 and instruct the transport vehicle 20 via the communication unit 24 of the transport vehicle 20 to control the transport vehicle 20. For example, the instructions may include movement instructions and transport instructions. A movement instruction may be an instruction from the controller 130 to instruct the transport vehicle to move to a designated location, and a transport instruction may be an instruction to instruct the transport vehicle to pick up a container at the starting point and move to the destination.

[0087] At this time, the transport vehicle 20 moves along the track 40 configured in the manufacturing plant 5 and transports the transported item 70. Therefore, in order to enable the transport vehicle 20 to be accurately transported to the storage module 51 and to minimize the collision between the transport vehicle 20 and the container 70 during transportation, the loading or unloading position of the transport vehicle 20 can be taught by the controller 130, and the controller 130 can use the position information obtained through the teaching operation to control the transport vehicle 20.

[0088] The controller 130 in this embodiment can receive data on the number of pixels in each image of the first marker 111A and the second marker 111B captured by the vision camera 121. If the first marker 111A and the second marker 111B are captured at the same distance from the vision camera 121, then the number of pixels in the images captured by the vision camera 121 is the same. Furthermore, the number of pixels in the image of the first marker module 111 captured by the vision camera 121 will increase or decrease depending on the distance between the vision camera 121 and the first marker module 111.

[0089] Therefore, the controller 130 can compare the number of pixels of the first mark 111A and the number of pixels of the second mark 111B, and set the first correction coordinates to form a teaching position for the movement of the transport vehicle 20, so that the number of pixels of the first mark 111A and the second mark 111B are the same.

[0090] Furthermore, the controller 130 can also set the first correction coordinate using the following formulas 1, 2, and 3. Here, the first correction coordinate can represent the transport position during the first teaching, and the second correction coordinate can represent the transport position where the error range is reduced after the second teaching. However, various modifications are possible; the controller 130 can set only the second correction coordinate without using the first correction coordinate. According to a modification of the embodiment, the second correction coordinate can also be the transport position during the first teaching. The following explanation will use the example where the first correction coordinate is the transport position during the first teaching and the second correction coordinate is the transport position during the second teaching.

[0091] The controller 130 sets a first correction coordinate, which is the coordinate of the teaching / movement of the transport vehicle 20, such that, with the first position as a reference, the first mark 111A and the second mark 111B are configured at the same distance or have the same number of pixels, and the first correction coordinate can be set by formula 1.

[0092] [Calculation Formula 1]

[0093] X = K / 2 + (a 2 -b 2 -K 2 ) / 2K

[0094] Where X is the coordinate of the transport vehicle 20 in the direction of its travel axis 1 in the first correction coordinate system, that is, the horizontal movement position.

[0095] That is, as follows Figure 6 and Figure 7 As shown, if the values ​​of a and b are different, it indicates that the transport vehicle 20 has moved more or less to one side relative to the first position. Therefore, as... Figure 5As shown, the coordinates of the travel axis 1 are represented: it moves along the direction of the travel axis 1 so that the center of the transport vehicle 20 forms the same central axis as the first position.

[0096] The straight-line distance between the first position and the first mark 111A can be one of a and b, and the straight-line distance between the first position and the second mark 111B can be the other of a and b.

[0097] For example, let a be the larger of a and b, and b be the smaller of a. Figure 6 As shown, a can be the straight-line distance between the first position and the first mark 111A, and b can be the straight-line distance between the first position and the second mark 111B.

[0098] On the other hand, refer to Figure 7 'a' can be the straight-line distance between the first position and the second mark 111B, and 'b' can be the straight-line distance between the first position and the first mark 111A. Furthermore, if 'a' and 'b' are the same number, then for ease of explanation and understanding, 'b' can also be defined as 'a'.

[0099] However, since a and b are defined for the convenience of understanding and explaining the straight-line distance of the first mark 111A or the second mark 111B relative to the first position, it can be known that the straight-line distance of the first mark 111A or the second mark 111B relative to the first position can be defined by a variety of identifiers.

[0100] Furthermore, K is the straight-line distance between the first mark 111A and the second mark 111B.

[0101] Among them, such as Figure 5 and Figure 8 As shown, the controller 130 can calculate the value of a when a and b have the same value, and when a and b have the same value, it sets the first correction coordinate through formula 2.

[0102] [Calculation Formula 2]

[0103]

[0104] Where Z can be the coordinate of the lifting axis 2, which is the vertical distance between the horizontal / height of the first mark 111A or the second mark 111B and the first position, i.e., the position moved in the up and down direction.

[0105] In other words, the X value of the travel axis 1 can be calculated / set using formula 1, and the coordinate value, i.e. the Z value, of the lifting axis 3 used to lower the lifting unit 20H can be calculated / set using formula 2.

[0106] And, as Figure 9 As shown, the controller 130 can set the first correction coordinate through calculation formula 3.

[0107] [Calculation Formula 3]

[0108]

[0109] Where Y can be the coordinate of the sliding axis 2 of the transport vehicle 20, i.e., the position moved in the forward or backward direction. C can be the shortest distance (or, the straight-line distance) between the first marking module 111 and the vision camera 121. Calculation formulas 1, 2, and 3 can be the Pythagorean theorem or formulas applying the theorem. However, calculation formulas 1, 2, and 3 are formulas used to calculate three-dimensional coordinates, and therefore are not limited to them. Various transformations can be made, for example, trigonometric functions can be used to calculate three-dimensional coordinates.

[0110] In the transport vehicle teaching system 100 of the above embodiment, since the vertical length of the track-side buffer relative to the lifting shaft 3 is short, while the vertical length of the substrate processing device relative to the lifting shaft 3 is longer than that of the track-side buffer relative to the lifting shaft 3, a large error range may be caused. When calculating the first correction coordinate of the port of the substrate processing device, two markers, namely the first marker 111A and the second marker 111B, can be used for teaching instead of using one marker to calculate the image coordinates. Therefore, there is no need to configure the setting port, and the coordinate accuracy can be improved.

[0111] That is, in traditional teaching operations, even if a single marker is used, the error range may not be large because the track-side buffer is located on the side of the track and the height of the lifting shaft 3 is relatively small relative to the port. However, in teaching operations used to transport the transport object 70 to the port, there is a problem that the error range may be large. However, in this embodiment, two markers (first marker 111A and second marker 111B) can be captured by the vision camera 121, and the position information can be calculated using these two markers. Therefore, the methods for calculating the coordinates are more diverse, and the accuracy of the coordinates can be improved.

[0112] The following will refer to Figures 10 to 12 This embodiment is described in a modified form, and repeated descriptions of the same components that perform the same function are omitted.

[0113] Figure 10 This is a diagram illustrating a transport vehicle teaching system according to a second embodiment of the present invention. (Refer to...) Figure 10 Mainly with Figures 4 to 9 Describe the differences between the described contents.

[0114] Reference Figure 10Similar to the first embodiment, the transport vehicle teaching system 100 of the second embodiment can teach the transport vehicle 20 the placement position of the transported object 70, i.e. the transport position, and may include a sensing object unit 110, a data acquisition unit 120 and a controller 130.

[0115] Additionally, the sensing object unit 110 in the second embodiment may further include a second marking module 113, thereby including a first marking module 111 and a second marking module 113. Furthermore, the transport vehicle teaching system 100 in the second embodiment may further include an auxiliary sensor unit 140.

[0116] First, similar to the first marking module 111, the second marking module 113 may include barcode and / or QR code label images that are easily identifiable by the visual camera 121.

[0117] Similar to the first marking module 111, the second marking module 113 may be configured as a coating and / or sticker to be applied or attached to the transport vehicle 20, and may be configured at the center of the housing, for example, at the lower center of the clamping module 23 or at the lower center of the transport item 70 in the housing.

[0118] The second marking module 113 is used to correct and / or confirm the travel axis 1 coordinate of the first corrected coordinate by calculation formula 1. If the travel axis 1 coordinate of the first corrected coordinate according to calculation formula 1 is 0, then the movement along the travel axis 1 coordinate direction is 0, thereby confirming that the center of the second marking module 113 is set at the same position as the first position.

[0119] Alternatively, if the coordinate of the first correction coordinate according to Formula 1 is not 0, it can be used to confirm whether the center of the second marking module 113 is configured in the same position as the first position after moving along the coordinate direction of the first coordinate.

[0120] Similar to the first marking module 111, the second marking module 113 is configured to capture images, such that a visual camera 121 can capture images of the first marking module 111 and the second marking module 113.

[0121] The visual camera 121 in this embodiment can acquire images or image location information, thereby acquiring images or location information of the first marking module 111 and the second marking module 113. As described above, the second embodiment may further include a second marking module 113 located at a different position than the first marking module 111. The visual camera 121 can simultaneously acquire images or location information of the first marking module 111 and the second marking module 113, and can confirm / compensate for errors in the first correction coordinates.

[0122] In addition, the first calibration coordinate can be used to calibrate the lifting shaft 3, for which an auxiliary sensor unit 140 can be installed.

[0123] The auxiliary sensor unit 140 calculates the position or coordinates of the storage module 51. After obtaining the position or coordinates of the storage module 51 through the auxiliary sensor unit 140, the coordinates of the lifting shaft 3, which serves as the height coordinate, are calculated based on the first correction coordinates, thereby enabling the confirmation / compensation of errors.

[0124] However, the auxiliary sensor unit 140 is not limited to only confirming / correcting the error of the crane axis 3 coordinates, but can also be configured not to use calculation formula 2.

[0125] That is, the auxiliary sensor unit 140 can be used to compare with the calculation formula 2 and correct the error, or the coordinates of the lifting shaft 3 calculated by the auxiliary sensor unit 140 can be set as the first correction coordinates without using the calculation formula 2.

[0126] According to a variation of the embodiment, when the lifting axis 3 coordinate of the first correction coordinate is used as the teaching value by using calculation formula 2 during the teaching operation, if the collision sensing sensor (not shown, such as an accelerometer and a gyroscope sensor) disposed on the transport object 70 senses the shaking of the transport object 70 during the transport operation, the lifting axis 3 coordinate calculated by the auxiliary sensor unit 140 can be set as the first correction coordinate, or the average value of the lifting axis 3 coordinate calculated by calculation formula 2 and the auxiliary sensor unit 140 can be set as the lifting axis 3 coordinate. As above, various variations can be performed.

[0127] For example, the auxiliary sensor unit 140 can be configured as a gyroscope sensor installed in the storage module 51 and / or the teaching front-opening wafer transport box 70T (which can be reused as a collision sensing sensor or can be configured separately). As is well known, a gyroscope sensor, as an angular velocity sensor, can be used to measure position and set orientation. Furthermore, various modifications are possible; the gyroscope sensor can be installed in the teaching front-opening wafer transport box 70T to sense the swaying / impact of the transported object 70 during transport operations based on the first calibration coordinates. When the swaying exceeds a set value, the teaching operation can be repeated.

[0128] Figure 11 This is a diagram illustrating the teaching system for a transport vehicle according to a third embodiment of the present invention. Figure 12 This is a diagram illustrating the calculation of coordinates in a transport vehicle teaching system according to a third embodiment of the present invention. (Refer to...) Figure 11 and Figure 12 Mainly with Figures 4 to 10 Describe the differences between the described contents.

[0129] Reference Figure 11 and Figure 12Similar to the first and second embodiments, the transport vehicle teaching system 100 of the third embodiment teaches the transport vehicle 20 and may include a sensing object unit 110, a data acquisition unit 120 and a controller 130.

[0130] Additionally, the sensing object unit 110 in the third embodiment may further include a sensing rod 115, thereby including a first marking module 111 and a sensing rod 115. Furthermore, similar to the first and second embodiments, the data acquisition unit 120 in this embodiment may include a visual camera 121 and a board module 122.

[0131] First, the sensing rod 115, as the sensing object of the board module 122, can be configured in the form of a pin, but is not limited thereto. The sensing rod 115 can be disposed on the clamping module 23 and its height can be changed in conjunction with the lifting and lowering of the clamping module 23, thereby contacting the board module 122.

[0132] For example, the sensing rod 115 can be located at the center of the lower end of the clamping module 23, and can be located at a position corresponding to the reference value SP1.

[0133] Therefore, when the teaching operation is performed accurately, the sensing rod 115 can contact the board module 122 at the same coordinates as the reference value SP1. Conversely, when there is an error in the first calibration coordinate, the coordinates at which the sensing rod 115 contacts the board module 122 may be different from the reference value SP1.

[0134] That is, the sensing rod 115 and the board module 122 are configured to confirm / correct the error of the first calibration coordinate. In this embodiment, the sensing rod 115 and the board module 122 are used to set the second calibration coordinate to confirm / correct the error of the first calibration coordinate, but this is not limited to this. Various variations are possible. The first calibration coordinate may be set by the sensing rod 115 and the board module 122, instead of by the first marker module 111 and the vision camera 121.

[0135] The board module 122 of the data acquisition unit 120 can sense the contact of the sensing rod 115 and acquire the coordinates of the sensing rod 115. For example, the board module 122, as a touchpad for sensing whether there is contact, can be configured to connect to the controller 130 via wireless communication, such as a tablet computer and / or a smartphone.

[0136] The board module 122 of this embodiment can be configured with an interface for confirming / setting coordinates and is configured as a resistive film or capacitive touch panel. After the sensing rod 115 contacts the interface of the touch panel, the transport position can be corrected by comparing the coordinates of the sensing rod 115 (i.e., contact coordinates DP1) obtained from the touch panel with the reference value SP1.

[0137] In other words, in this embodiment, the transport vehicle 20 moves along the track 40 configured in the manufacturing plant 5 and transports the transported item 70. Therefore, when the loading or unloading position of the transport vehicle 20 is taught so that the transport vehicle 20 can be accurately transported to the storage module 51, the sensor rod 115 and the board module 122 are installed so that when the controller 130 uses the position information obtained through the teaching operation to control the transport vehicle 20, the transport position is set to a more accurate position.

[0138] Furthermore, in this embodiment, the controller 130 controls the position of the transport vehicle 20 by corresponding to the first correction coordinate. After the lowering clamping module 23 makes the sensing rod 115 contact the board module 122, it compares the coordinates of the sensing rod 115 obtained from the touch panel (i.e., the contact coordinate DP1) with the reference value SP1. Thus, the second correction coordinate, which has the same coordinates as the contact coordinate DP1 and the reference value SP1, can be set as the teaching target position of the transport vehicle 20.

[0139] In other words, the controller 130 can set the first correction coordinates obtained by the first marking module 111 and the vision camera 121, and in order to set more accurate coordinates, it can set the second correction coordinates obtained by the sensing rod 115 and the board module 122.

[0140] As described above, the controller 130 sets the first correction coordinate for the first time, and sets the second correction coordinate for the second time based on the first correction coordinate, thereby improving the accuracy of the transport position of the transported item 70 and reducing the shaking of the transported item 70 caused by position error during transport operations, thus minimizing damage to the substrate.

[0141] In addition, by combining one or more of the first to third embodiments and known technologies, another embodiment can be formed, thus allowing for various modifications. The sensing object unit 110 may include a first marking module 111, a second marking module 113, and a sensing rod 115.

[0142] In the transport system 10 according to an embodiment of the present invention, the data acquisition unit 120 is disposed on the teaching front-opening wafer transfer box 70T instead of the transport vehicle 20. Therefore, it is not necessary to install the data acquisition unit 120 in tens of thousands of transport vehicles 20 respectively. The data acquisition unit 120 can be installed on one teaching front-opening wafer transfer box 70T and the teaching front-opening wafer transfer box 70T can be moved to the storage module 51 as the destination. Therefore, the cost and operation losses for installing the data acquisition unit 120 can be reduced, teaching operations can be performed more easily and the accuracy of teaching operations can be improved, and shaking when loading or removing the transport object 70 can be minimized, thereby minimizing damage to the substrate.

[0143] Furthermore, since the transportation system 10 according to the embodiment of the present invention uses two markers (first marker 111A and second marker 111B) for teaching, the visual camera 121 can capture images at the storage module 51 that needs to be taught to obtain location information, without the need to use a setting port (not shown) and a setting marker (not shown), thereby simplifying the teaching operation.

[0144] Although exemplary embodiments of the present disclosure have been described with reference to the accompanying drawings, those skilled in the art to which this disclosure pertains will understand that the present disclosure may be implemented in other specific forms without altering its technical concept or essential characteristics. Therefore, it should be understood that the exemplary embodiments described above are illustrative in all respects and not restrictive.

Claims

1. A vehicle teaching system, wherein the vehicle teaching system teaches a vehicle that moves along a track and transports goods to a storage module and includes a clamping module, the vehicle teaching system comprising: Sensing object unit; The data acquisition unit acquires the image or location information of the sensing object unit; as well as The controller receives data from the data acquisition unit. The sensing object unit is located on the side of the transport vehicle, not in the storage module. The data acquisition unit is configured on the storage module side and not on the transport vehicle.

2. The transport vehicle teaching system according to claim 1, wherein, The sensing object unit is installed in the housing below the traveling unit that travels along the track in the transport vehicle. The data acquisition unit is configured in a portable device located at the storage module. The portable body is configured as a container.

3. The vehicle teaching system according to claim 1, wherein, The sensing object unit includes a first marking module, and the first marking module includes an image; The data acquisition unit includes a visual camera, which acquires images or location information from the first marking module.

4. The transport vehicle teaching system according to claim 3, wherein, The first marking module includes a first mark and a second mark, the first mark being disposed on one side of the transport vehicle and the second mark being disposed on the other side of the transport vehicle. The visual camera is configured at a first position, which is located at the container of the storage module. The controller receives data on the number of pixels in each image of the first mark and the second mark captured by the vision camera.

5. The transport vehicle teaching system according to claim 4, wherein, The first marker and the second marker are at the same distance from the visual camera, and the images captured by the visual camera have the same number of pixels. Furthermore, the number of pixels in the images captured by the visual camera increases or decreases depending on the distance between the marker and the visual camera. The controller compares the number of pixels of the first marker with the number of pixels of the second marker, and sets a first correction coordinate to form a teaching position for the movement of the transport vehicle, such that the number of pixels of the first marker and the second marker are the same.

6. The transport vehicle teaching system according to claim 5, wherein, The first marker and the second marker are at the same level. The controller sets the first correction coordinate using formula 1. Formula 1 is X=K / 2+(a 2 -b 2 -K 2 ) / 2K Where X is the coordinate of the transport vehicle's travel axis in the first correction coordinate system, and this coordinate represents the horizontal movement position. The larger or equal number of the straight-line distances between the first position and the first mark, or between the first position and the second mark, is denoted as 'a', and the smaller number is denoted as 'b'. K is the straight-line distance between the first marker and the second marker. The controller sets X by calculating the value of a, where a and b have the same value, such that the first marker and the second marker are configured at the same distance or have the same number of pixels based on the first position.

7. The vehicle teaching system according to claim 6, wherein, The controller sets the first correction coordinates using formula 2, where a and b have the same value. Formula 2 is Wherein, Z is the lifting axis coordinate of the vertical distance between the horizontal position of the first mark or the second mark and the first position, and the lifting axis coordinate is the vertical movement position of the clamping module.

8. The vehicle teaching system according to claim 7, wherein, The controller sets the first correction coordinates using formula 3. Formula 3 is Where Y is the coordinate of the sliding axis of the transport vehicle, which represents the forward and backward movement position of the transport vehicle.

9. The vehicle teaching system according to claim 6, wherein, The controller is configured to, The coordinates of the driving axis direction are set in the first correction coordinate system using the calculation formula 1. The position or coordinates of the storage module are obtained from the auxiliary sensor unit that calculates the position or coordinates of the storage module, and the lifting axis coordinates of the first correction coordinates are set.

10. The vehicle teaching system according to claim 9, wherein, The auxiliary sensor unit is configured as a gyroscope sensor located in the storage module.

11. The vehicle teaching system according to claim 6, wherein, The sensing object unit further includes a second marker module, which is located at the center between the first marker and the second marker in the transport vehicle. The visual camera acquires images or location information from the second marking module.

12. The vehicle teaching system according to claim 11, wherein, The first position is located at a reference value that forms the transportation target position of the transport vehicle. When the coordinates of the transport vehicle's driving axis direction in the image or location information acquired by the visual camera from the second marking module differ from the reference value... The visual camera reacquires the image or location information from the first marking module and transmits it to the controller. The controller resets the first correction coordinates using the calculation formula 1 to re-set the first correction coordinates.

13. The vehicle teaching system according to claim 1, wherein, The sensing object unit includes a sensing rod disposed in the clamping module. The data acquisition unit includes a board module, which senses the contact of the sensing rod and acquires the coordinates of the sensing rod.

14. The vehicle teaching system according to claim 13, wherein, The controller is configured to, The contact coordinates are compared with the reference value that forms the transportation target position of the transport vehicle. The contact coordinates are the coordinates of the sensing rod obtained after the clamping module has descended and the sensing rod is in contact with the plate module. The second correction coordinate is set as the teaching target position of the transport vehicle to form the position where the transport vehicle moves, such that the contact coordinate and the reference value form the same coordinate.

15. The vehicle teaching system according to claim 13, wherein, The board module is configured as a touch panel, which senses whether the sensing rod is in contact and obtains the coordinates of the sensing rod.

16. A transportation system comprising: The transport vehicle transports the goods to the storage module and includes a clamping module; The track is set on the ceiling and forms the movement path of the transport vehicle; as well as The teaching system for transport vehicles according to claim 1.

17. The transportation system according to claim 16, wherein, The storage module is configured as a port of a substrate processing device for processing substrates, the port being located below the track.

18. A transportation system comprising: The transport vehicle transports the goods to the storage module and includes a clamping module; The track is set on the ceiling and forms the movement path of the transport vehicle; as well as The transport vehicle teaching system teaches the transport position for placing the transported goods on the transport vehicle. The transport vehicle teaching system includes: The sensing object unit includes a first marking module, a second marking module adjacent to the first marking module, and a sensing rod disposed on the clamping module. The first marking module includes an image. The data acquisition unit includes a visual camera and a touchpad. The visual camera acquires images or position information of the first marking module and the second marking module. The touchpad senses the contact of the sensing rod and acquires the coordinates of the sensing rod. The controller receives data from the data acquisition unit. The sensing object unit is installed on the transport vehicle. The data acquisition unit is located in the container configured in the storage module. The first marking module includes a first mark and a second mark. The first mark is disposed on one side of the transport vehicle, and the second mark is disposed on the other side of the transport vehicle at the same level as the first mark. The second marking module is located at the center of the first and second markings. The visual camera is located on the container and at a first position that forms a reference value, which determines the transport target position of the transport vehicle. The controller is configured to, A first calibration coordinate is set to form a teaching position for the movement of the transport vehicle, wherein the first calibration coordinate is set by calculation formula 1 such that the first mark and the second mark are at the same distance based on the first position, or the number of pixels of the first mark and the second mark captured by the vision camera is the same. Formula 1 is X=K / 2+(a 2 -b 2 -K 2 ) / 2K Where X is the coordinate of the transport vehicle's travel axis in the first correction coordinate system, which represents the horizontal movement position of the transport vehicle. The larger or equal number of the straight-line distances between the first position and the first mark, or between the first position and the second mark, is denoted as 'a', and the smaller number is denoted as 'b'. K is the straight-line distance between the first marker and the second marker. The controller sets the value of X, where a and b have the same value, by calculating the value of a when a and b have the same value. Based on the premise that a and b have the same value, the first correction coordinate is set using calculation formula 2. Formula 2 is Where Z is the lifting axis coordinate of the vertical distance between the horizontal position of the first mark or the second mark and the first position, and this lifting axis coordinate represents the vertical movement position of the clamping module. The controller sets the first correction coordinates using formula 3. Formula 3 is Where Y is the coordinate of the sliding axis of the transport vehicle, which represents the forward and backward movement position of the transport vehicle. The controller is configured to, When the coordinates of the transport vehicle's driving axis direction in the image or position information of the second marking module acquired by the vision camera differ from the reference value, the vision camera re-acquires the image or position information of the first marking module and transmits it to the controller, thereby resetting the first correction coordinates using the calculation formula 1. The contact coordinates are compared with the reference value that forms the transport target position of the transport vehicle. The contact coordinates are the coordinates of the sensing rod obtained when the sensing rod is in contact with the plate module after the clamping module is lowered. The second correction coordinate is set as the teaching target position of the transport vehicle to form the position of the transport vehicle movement, so that the contact coordinates and the reference value form the same coordinates.

Images