Output efficiency control method, output efficiency control device and radio frequency power supply equipment
By introducing an adjustable impedance module into the RF power amplifier device, the output efficiency can be obtained and the impedance value can be adjusted by using a preset interval, thus solving the problem of output efficiency fluctuation in RF power supply equipment and achieving energy saving.
Patent Information
- Application Number
- CN202610095647.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-23
- Publication Date
- 2026-05-05
AI Technical Summary
When radio frequency power supply equipment outputs radio frequency power, the output efficiency fluctuates greatly, resulting in energy waste.
By introducing an adjustable impedance module into the RF power amplifier device, the output efficiency is obtained using a preset interval, and the efficiency to be adjusted or the target efficiency is determined according to the preset efficiency and the threshold. The adjustable impedance module is controlled to adjust the impedance value within a specific time period to stabilize the output efficiency.
This achieves stable output efficiency when the RF power amplifier outputs RF power, reducing energy waste.
Smart Images
Figure CN121984447A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of radio frequency technology, and in particular to an output efficiency control method, an output efficiency control device, and a radio frequency power supply. Background Technology
[0002] Currently, with the application and popularization of radio frequency (RF) technology, RF power supply equipment is increasingly used in various fields. During the application of RF power supply equipment, the output efficiency of the equipment also changes with variations in RF power output and the application environment of other circuits. Since RF power output often fluctuates significantly, this leads to large fluctuations in the output efficiency of the RF power supply equipment, resulting in energy waste. Therefore, controlling the output efficiency of the RF power amplifier device when RF power output fluctuates to save energy has become a problem that needs to be considered. Summary of the Invention
[0003] This application provides an output efficiency control method, an output efficiency control device, and an RF power supply device, which can control the output efficiency of an RF power amplifier device when outputting RF power, so as to save power.
[0004] Firstly, an output efficiency control method is provided, which is applied to an output efficiency control device for controlling the output efficiency of an RF power amplifier when outputting RF power. The output efficiency control device includes an adjustable impedance module having an adjustable impedance value. The output efficiency control method includes: continuously acquiring the output efficiency of the RF power amplifier when outputting RF power at preset intervals; determining, based on a preset efficiency and a preset threshold, whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency; and, when determining that any acquired output efficiency is the efficiency to be adjusted, controlling the adjustable impedance module to adjust the impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0005] In one possible implementation, determining whether each acquired output efficiency is an efficiency to be adjusted based on a preset efficiency and a preset threshold includes: determining the currently acquired output efficiency as an efficiency to be adjusted when the difference between the currently acquired output efficiency and the preset efficiency is greater than or equal to the preset threshold; and determining the currently acquired output efficiency as the target efficiency when the difference between the currently acquired output efficiency and the preset efficiency is less than the preset threshold.
[0006] In one possible implementation, after determining whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency based on the preset efficiency and the preset threshold, the output efficiency control method further includes: when determining that the output efficiency obtained in any instance is the target efficiency, maintaining the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency as the impedance value at the time of the current acquisition of the output efficiency.
[0007] In one possible implementation, when determining that any obtained output efficiency is the efficiency to be adjusted, controlling the impedance value of the adjustable impedance module during the time period from the current obtained output efficiency to the next obtained output efficiency to be the target impedance value includes: when determining that any obtained output efficiency is the efficiency to be adjusted, determining the target impedance value of the adjustable impedance module at least based on the currently obtained output efficiency. Controlling the impedance value of the adjustable impedance module during the time period from the current obtained output efficiency to the next obtained output efficiency to be the target impedance value.
[0008] In one possible implementation, the RF power amplifier is used to transmit RF power to a load. The adjustable impedance module includes a first capacitor, a first inductor, and a second capacitor. The first capacitor and the first inductor are sequentially connected between the RF power amplifier and the load. The second capacitor is connected at the connection point between the first inductor and the load. The capacitance values of the first capacitor and the second capacitor are adjustable. Specifically, when determining that any obtained output efficiency is the efficiency to be adjusted, determining the target impedance value of the adjustable impedance module based at least on the currently obtained output efficiency includes: when determining that any obtained output efficiency is the efficiency to be adjusted, determining the target capacitance values of the first capacitor and the second capacitor based on the currently obtained output efficiency and a preset efficiency. The impedance value formed by the inductance value of the first inductor, the target capacitance values of the first capacitor, and the second capacitor is the target impedance value of the adjustable impedance module.
[0009] In one possible implementation, controlling the adjustable impedance module to adjust the impedance value of the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value, which includes: simultaneously controlling and adjusting the capacitance values of the first capacitor and the second capacitor to the target capacitance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency, so that the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value.
[0010] In one possible implementation, before the output efficiency control method determines that the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value, the output efficiency control method further includes: when determining that any acquired output efficiency is the efficiency to be adjusted, determining the target impedance value change rate of the adjustable impedance module based at least on the currently acquired output efficiency, the previously acquired output efficiency, and a preset interval. The determination that the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value includes: controlling the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency to be the target impedance value using the target impedance value change rate.
[0011] Secondly, an output efficiency control device is also provided. This device controls the output efficiency of an RF power amplifier when outputting RF power. The output efficiency control device includes an adjustable impedance module and a control module. The adjustable impedance module has an adjustable impedance value. The control module continuously acquires the output efficiency of the RF power amplifier when outputting RF power at preset intervals. Based on a preset efficiency and a preset threshold, it determines whether each acquired output efficiency is the efficiency to be adjusted or the target efficiency. When it is determined that any acquired output efficiency is the efficiency to be adjusted, the control module adjusts the impedance value of the adjustable impedance module during the time interval from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0012] In one possible implementation, the RF power amplifier is used to transmit RF power to a load. The adjustable impedance module includes a first capacitor, a first inductor, and a second capacitor. The first capacitor and the first inductor are connected sequentially between the RF power amplifier and the load. The second capacitor is connected at the connection point between the first inductor and the load. The capacitance values of the first capacitor and the second capacitor are adjustable.
[0013] Thirdly, a radio frequency (RF) power supply device is also provided, comprising an RF power amplifier and an output efficiency control device. The RF power amplifier is used to output RF power. The output efficiency control device is used to control the output efficiency of the RF power amplifier when outputting RF power. The output efficiency control device includes an adjustable impedance module and a control module. The adjustable impedance module has an adjustable impedance value. The control module is used to continuously acquire the output efficiency of the RF power amplifier when outputting RF power at preset intervals, and determine, based on a preset efficiency and a preset threshold, whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency. When it is determined that any acquired output efficiency is the efficiency to be adjusted, the control module adjusts the impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0014] The output efficiency control method, output efficiency control device, and RF power supply equipment of this application continuously acquire the output efficiency of the RF power amplifier device when outputting RF power at preset intervals. Based on the preset efficiency and preset threshold, it can determine whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency. Furthermore, when it is determined that any acquired output efficiency is the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period between the current acquisition of the output efficiency and the next acquisition of the output efficiency is controlled to be the target impedance value. This allows the output efficiency of the RF power amplifier device to be controlled and maintained at the preset efficiency when the output efficiency fluctuates, thereby saving power. Attached Figure Description
[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.
[0016] Figure 1 This is a flowchart of the output efficiency control method in some embodiments of this application.
[0017] Figure 2 for Figure 1 The sub-flowchart of step S200 is shown.
[0018] Figure 3 This is another flowchart of the output efficiency control method in some embodiments of this application.
[0019] Figure 4 for Figure 1 The sub-flowchart of step S300 is shown.
[0020] Figure 5 for Figure 1Another sub-flowchart of step S300 is shown.
[0021] Figure 6 This is yet another flowchart of the output efficiency control method in some embodiments of this application.
[0022] Figure 7 This is a schematic diagram of the output efficiency control device in some embodiments of this application.
[0023] Figure 8 This is a schematic diagram of an adjustable impedance module in some embodiments of this application.
[0024] Figure 9 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.
[0025] Explanation of reference numerals in the attached figures: 10, output efficiency control device; 100, adjustable impedance module; L1, first inductor; C1, first capacitor; C2, second capacitor; 200, control module; PA, RF power amplifier device; RL, load; 20, RF power supply device. Detailed Implementation
[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0027] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0028] In the description of the embodiments of this application, it should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein.
[0029] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.
[0030] Please see Figure 1 , Figure 1 This is a flowchart illustrating the output efficiency control method in some embodiments of this application. This application provides an output efficiency control method applied to an output efficiency control device. The output efficiency control device controls the output efficiency of an RF power amplifier device when outputting RF power. The output efficiency control device includes an adjustable impedance module with an adjustable impedance value. Wherein, as... Figure 1 As shown, the output efficiency control methods include: Step S100: Continuously acquire the output efficiency of the RF power amplifier device when outputting RF power at preset intervals.
[0031] Step S200: Based on the preset efficiency and preset threshold, determine whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency.
[0032] Step S300: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is controlled to be the target impedance value.
[0033] Therefore, the output efficiency control method described above in this application, by continuously acquiring the output efficiency of the RF power amplifier device when outputting RF power at preset intervals, can determine whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency based on the preset efficiency and preset threshold. Furthermore, when it is determined that any acquired output efficiency is the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period between the current acquisition of the output efficiency and the next acquisition of the output efficiency is controlled to be the target impedance value. This allows the output efficiency of the RF power amplifier device to be controlled when it outputs RF power, so that it remains at the preset efficiency, thereby saving power.
[0034] Please refer to the following: Figure 2 , Figure 2 for Figure 1 The sub-flowchart of step S200 is shown below. Figure 1 , Figure 2 As shown, step S200: Based on the preset efficiency and preset threshold, determine whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency, including: Step S210: When the difference between the current obtained output efficiency and the preset efficiency is greater than or equal to the preset threshold, the current obtained output efficiency is determined as the efficiency to be adjusted.
[0035] Step S220: When the difference between the current obtained output efficiency and the preset efficiency is less than the preset threshold, the current obtained output efficiency is determined as the target efficiency.
[0036] Therefore, the above-mentioned output efficiency control method in this application can determine the degree of deviation of the currently acquired output efficiency from the preset efficiency by the relationship between the difference between the currently acquired output efficiency and the preset efficiency and the preset threshold, and thus determine whether the currently acquired output efficiency is the efficiency to be adjusted or the target frequency.
[0037] In some embodiments, the preset efficiency can be set according to specific needs, and the preset threshold can be related to the error value of the output efficiency of the RF power amplifier device when outputting RF power, and the error value comes from the hardware error of the acquisition device.
[0038] Furthermore, the preset threshold can be equal to the error value of the output efficiency of the RF power amplifier device when it outputs RF power.
[0039] Please see Figure 3 , Figure 3 This is another flowchart of the output efficiency control method in some embodiments of this application. For example... Figure 3 As shown, the output efficiency control method also includes: Step S100: Continuously acquire the output efficiency of the RF power amplifier device when outputting RF power at preset intervals.
[0040] Step S200: Based on the preset efficiency and preset threshold, determine whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency.
[0041] Step S400: When the output efficiency obtained in any given time is determined to be the target efficiency, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is maintained at the impedance value at the time of the current acquisition of the output efficiency.
[0042] Among them, such as Figure 3 Step S400 shown can also be as follows: Figure 1 Following step S100, the output efficiency control method further includes the following steps. That is, as shown... Figure 1 , Figure 3 As shown, in step S200: after determining whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency based on the preset efficiency and preset threshold, the output efficiency control method may further include: Step S400: When the output efficiency obtained in any given time is determined to be the target efficiency, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is maintained at the impedance value at the time of the current acquisition of the output efficiency.
[0043] Among them, such as Figure 3 For details of steps S100 and S200 shown, please refer to the following: Figure 1 The details of step S100 shown will not be repeated here.
[0044] Therefore, the above-described output efficiency control method in this application, when determining that the output efficiency obtained at any time is the target efficiency, that is, when determining that the output efficiency obtained at the current time does not need to be controlled and adjusted, can keep the output efficiency near the target efficiency by maintaining the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency as the impedance value at the time of the current acquisition of the output efficiency.
[0045] Please refer to the following: Figure 4 , Figure 4 for Figure 1 The sub-flowchart of step S300 is shown below. Figure 1 , Figure 4 As shown, step S300: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is controlled to be the target impedance value, including: Step S310: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the target impedance value of the adjustable impedance module shall be determined at least based on the output efficiency obtained in the current time.
[0046] Step S320: Control the adjustable impedance module to obtain the target impedance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency.
[0047] Therefore, the above-described output efficiency control method in this application can determine the target impedance value of the adjustable impedance module based at least on the output efficiency obtained in the current time, and then, based on the determined target impedance value, control and adjust the impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0048] Please see Figure 5 , Figure 5 for Figure 1Another sub-flowchart of step S300 is shown. The RF power amplifier device is used to transmit RF power to the load. The adjustable impedance module includes a first capacitor, a first inductor, and a second capacitor. The first capacitor and the first inductor are connected sequentially between the RF power amplifier device and the load. The second capacitor is connected at the connection point between the first inductor and the load. The capacitance values of the first capacitor and the second capacitor are adjustable. Wherein, as... Figure 5 As shown, step S300: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is controlled to be the target impedance value, which may also include: Step S311: When the output efficiency obtained at any time is determined to be the efficiency to be adjusted, the target capacitance values of the first capacitor and the second capacitor are determined according to the current output efficiency obtained and the preset efficiency. The impedance value presented by the inductance value of the first inductor, the target capacitance values of the first capacitor and the second capacitor is the target impedance value of the adjustable impedance module.
[0049] Step S321: Simultaneously control the first capacitor and the second capacitor to have the target capacitance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency, so that the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value.
[0050] Among them, such as Figure 5 Step S311 shown can also be as follows: Figure 4 The sub-step of step S310 shown. That is, as... Figure 4 , Figure 5 As shown, step S310: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the target impedance value of the adjustable impedance module is determined at least based on the output efficiency obtained in the current time. Specifically, this may include: Step S311: When the output efficiency obtained at any time is determined to be the efficiency to be adjusted, the target capacitance values of the first capacitor and the second capacitor are determined according to the current output efficiency obtained and the preset efficiency. The impedance value presented by the inductance value of the first inductor, the target capacitance values of the first capacitor and the second capacitor is the target impedance value of the adjustable impedance module.
[0051] Therefore, the above-described output efficiency control method in this application can determine the target capacitance values of the first capacitor and the second capacitor based solely on the output efficiency obtained in the current iteration and the preset efficiency.
[0052] Specifically, the output efficiency is related to the loss resistance value and the actual resistance value. When the loss resistance value increases, the output efficiency decreases and the actual resistance value increases; conversely, when the loss resistance value decreases, the output efficiency increases and the actual resistance value decreases. The loss resistance value is determined by the inductance value of the first inductor and the capacitance value of the first capacitor. Since the inductance value of the first inductor is difficult to adjust, the loss resistance value is generally adjusted by adjusting the capacitance value of the first capacitor. The actual resistance value is determined by the capacitance value of the second capacitor and the resistance value of the load. Since the resistance value of the load is uncontrollable, the actual resistance value can be adjusted by adjusting the capacitance value of the second capacitor.
[0053] Furthermore, the output efficiency, preset efficiency, and capacitance values of the first capacitor and the second capacitor satisfy a preset relationship or correspondence. The target capacitance values of the first capacitor and the second capacitor can be determined by the output efficiency and preset efficiency obtained in the current iteration.
[0054] In some embodiments, step S310: when it is determined that the output efficiency obtained at any time is the efficiency to be adjusted, the target impedance value of the adjustable impedance module is determined at least based on the output efficiency obtained at the current time. It may also include: when it is determined that the output efficiency obtained at any time is the efficiency to be adjusted, the target capacitance values of the first capacitor and the second capacitor are determined based on the correspondence between the output efficiency obtained at the current time and the target capacitance values of the first capacitor and the second capacitor, wherein the impedance value presented by the inductance value of the first inductor, the target capacitance values of the first capacitor and the second capacitor as a whole is the target impedance value of the adjustable impedance module.
[0055] Among them, such as Figure 5 Step S331 shown can also be as follows: Figure 4 The sub-step of step S320 shown. That is, as... Figure 4 , Figure 5 As shown, step S320: Controlling the adjustable impedance module to maintain the target impedance value during the time interval between the current acquisition of output efficiency and the next acquisition of output efficiency. Specifically, this may include: Step S321: Simultaneously control the first capacitor and the second capacitor to have the target capacitance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency, so that the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value.
[0056] Therefore, the above-described output efficiency control method of this application, by simultaneously controlling and adjusting the capacitance values of the first capacitor and the second capacitor during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target capacitance value, can maintain the output efficiency at the target efficiency during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency.
[0057] Specifically, when the loss resistance value changes, the actual resistance value will also change passively. If the capacitance value of the second capacitor is not adjusted synchronously, the target efficiency cannot be achieved. Only by simultaneously controlling and adjusting the capacitance values of the first capacitor and the second capacitor during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency can the output efficiency be maintained at the target efficiency during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency.
[0058] Please refer to the following: Figure 6 , Figure 6 This is yet another flowchart illustrating the output efficiency control method in some embodiments of this application. For example... Figure 6 As shown, the output efficiency control method may also include: Step S500: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the target impedance value change rate of the adjustable impedance module is determined based at least on the current output efficiency obtained, the previous output efficiency obtained, and the preset interval.
[0059] Step S322: The impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is controlled by the rate of change of the target impedance value to the target impedance value.
[0060] Among them, such as Figure 6 Step S500 shown can also be as follows: Figure 4 Before step S320 shown, the output efficiency control method also includes the following steps. That is, as shown... Figure 4 , Figure 6 As shown, in step S320: before controlling the impedance value of the adjustable impedance module to be the target impedance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency, the output efficiency control method may further include: Step S500: When the output efficiency obtained in any given time is determined to be the efficiency to be adjusted, the target impedance value change rate of the adjustable impedance module is determined based at least on the current output efficiency obtained, the previous output efficiency obtained, and the preset interval.
[0061] Among them, such as Figure 6 Step S322 shown can also be as follows: Figure 4 The sub-step of step S320 shown. That is, as... Figure 4 , Figure 6 As shown, step S320: controlling the impedance value of the adjustable impedance module from the current acquisition of output efficiency to the next acquisition of output efficiency before the target impedance value is reached, specifically may include: Step S322: The impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is controlled by the rate of change of the target impedance value to the target impedance value.
[0062] Therefore, the above-mentioned output efficiency control method in this application can determine the look-ahead rate of change of output efficiency based at least on the output efficiency obtained in the current time, the output efficiency obtained in the previous time, and the preset interval. Then, based on the look-ahead rate of change of output efficiency, the target impedance value change rate of the adjustable impedance module can be determined. The impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is controlled by the target impedance value change rate, which can further keep the output efficiency near the target efficiency.
[0063] In some embodiments, the preset interval can be a small interval, which is related to the hardware speed at which the acquisition device acquires the output efficiency.
[0064] The output efficiency control method of this application, through the above steps, enables the RF power amplifier device to maintain a relatively constant output efficiency when outputting RF power, thereby saving power.
[0065] Please see Figure 7 , Figure 7 This is a schematic diagram of the output efficiency control device in some embodiments of this application. For example... Figure 7 As shown, this application also provides an output efficiency control device 10, which is used to control the output efficiency of an RF power amplifier device (PA) when outputting RF power. The output efficiency control device includes an adjustable impedance module 100 and a control module 200. The adjustable impedance module 100 has an adjustable impedance value. The control module 200 is used to continuously acquire the output efficiency of the RF power amplifier device (PA) when outputting RF power at preset intervals, and determine whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency based on the preset efficiency and the preset threshold. When it is determined that any acquired output efficiency is the efficiency to be adjusted, the control module 100 is controlled to adjust the impedance value of the adjustable impedance module 100 during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0066] Please refer to the following: Figure 8 , Figure 8 This is a schematic diagram of an adjustable impedance module in some embodiments of this application. For example... Figure 7 , Figure 8As shown, the RF power amplifier device PA is used to transmit RF power to the load RL. The adjustable impedance module 100 includes a first capacitor C1, a first inductor L1 and a second capacitor C2. The first capacitor C1 and the first inductor L1 are connected in sequence between the RF power amplifier device PA and the load RL. The second capacitor C2 is connected at the connection point between the first inductor L1 and the load RL. The capacitance values of the first capacitor C1 and the second capacitor C2 are adjustable.
[0067] The operations performed by the output efficiency control device 10 or the control module 200 correspond to the steps in the output efficiency control method of any of the foregoing embodiments. Further operations that the output efficiency control device 10 or the control module 200 can perform can be found in the relevant content of the wavefront error calibration method in any of the foregoing embodiments, and will not be repeated here.
[0068] The control module 200 is mainly used to execute other specific steps of the above-mentioned output efficiency control method. The control module 200 may include a processor, which may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).
[0069] Furthermore, the control module 200 may also include an efficiency acquirer, which continuously acquires the output efficiency of the RF power amplifier device PA when outputting RF power at preset intervals.
[0070] The output efficiency control method and output efficiency control device 10 of this application, through the above steps and structure, enable the RF power amplifier device PA to maintain a relatively constant output efficiency when outputting RF power, thereby saving power.
[0071] Please see Figure 9 , Figure 9 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 9As shown, this application also provides an RF power supply device 20, which includes an RF power amplifier device PA and an output efficiency control device 10 in any of the foregoing embodiments. The RF power amplifier device PA is used to output RF power. The output efficiency control device 10 is used to control the output efficiency of the RF power amplifier device PA when outputting RF power.
[0072] Please refer to it again. Figure 8 .like Figure 8 As shown, the output efficiency control device includes an adjustable impedance module 100 and a control module 200. The adjustable impedance module 100 has an adjustable impedance value. The control module 200 is used to continuously acquire the output efficiency of the RF power amplifier device PA when outputting RF power at preset intervals, and determine whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency based on the preset efficiency and the preset threshold. When it is determined that any acquired output efficiency is the efficiency to be adjusted, the control module 100 is controlled to adjust the impedance value of the adjustable impedance module 100 during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
[0073] For a more specific description of the structure of the output efficiency control device 10, please refer to the relevant content of the output efficiency control device 10 in any of the foregoing embodiments, which will not be repeated here.
[0074] The output efficiency control method, output efficiency control device 10, and RF power supply device 20 of this application, through the above steps and structure, enable the RF power amplifier device PA to maintain a relatively constant output efficiency when outputting RF power, thereby saving power.
[0075] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. An output efficiency control method, applied to an output efficiency control device, characterized in that, The output efficiency control device is used to control the output efficiency of the RF power amplifier device when outputting RF power. The output efficiency control device includes an adjustable impedance module, which has an adjustable impedance value. The output efficiency control method includes: The output efficiency of the RF power amplifier device when outputting RF power is continuously acquired at preset intervals. Based on the preset efficiency and preset threshold, determine whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency; When the output efficiency obtained at any given time is determined to be the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is the target impedance value.
2. The output efficiency control method according to claim 1, characterized in that, The step of determining whether the output efficiency obtained each time is the efficiency to be adjusted based on the preset efficiency and the preset threshold includes: If the difference between the current obtained output efficiency and the preset efficiency is greater than or equal to the preset threshold, the current obtained output efficiency is determined as the efficiency to be adjusted. If the difference between the current obtained output efficiency and the preset efficiency is less than a preset threshold, the current obtained output efficiency is determined as the target efficiency.
3. The output efficiency control method according to claim 1, characterized in that, After determining whether the output efficiency obtained each time is the efficiency to be adjusted or the target efficiency based on a preset efficiency and a preset threshold, the output efficiency control method further includes: When determining the output efficiency obtained in any given time as the target efficiency, the impedance value of the adjustable impedance module during the time period between the current output efficiency acquisition and the next output efficiency acquisition is maintained at the impedance value at the time of the current output efficiency acquisition.
4. The output efficiency control method according to claim 1, characterized in that, When the output efficiency obtained at any given time is determined to be the efficiency to be adjusted, the impedance value of the adjustable impedance module during the time period from the current acquisition of the output efficiency to the next acquisition of the output efficiency is controlled to be the target impedance value, including: When the output efficiency obtained at any time is determined to be the efficiency to be adjusted, the target impedance value of the adjustable impedance module shall be determined at least based on the output efficiency obtained at the current time. The impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value.
5. The output efficiency control method according to claim 4, characterized in that, The radio frequency power amplifier is used to transmit radio frequency power to the load. The adjustable impedance module includes a first capacitor, a first inductor, and a second capacitor. The first capacitor and the first inductor are connected sequentially between the radio frequency power amplifier and the load. The second capacitor is connected to the connection point between the first inductor and the load. The capacitance values of the first capacitor and the second capacitor are adjustable. Wherein, when determining that any output efficiency obtained in any given time is the efficiency to be adjusted, determining the target impedance value of the adjustable impedance module based at least on the output efficiency obtained in the current time includes: When the output efficiency obtained at any time is determined to be the efficiency to be adjusted, the target capacitance values of the first capacitor and the second capacitor are determined based on the output efficiency obtained at the current time and the preset efficiency. The impedance value presented by the inductance value of the first inductor, the target capacitance values of the first capacitor and the second capacitor is the target impedance value of the adjustable impedance module.
6. The output efficiency control method according to claim 4, characterized in that, The impedance value of the control and adjustment adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is the target impedance value, including: Simultaneously, the capacitance values of the first and second capacitors during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency are controlled to the target capacitance value, so that the impedance value of the adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is the target impedance value.
7. The output efficiency control method according to claim 4, characterized in that, Before the impedance value of the adjustable impedance module during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency is the target impedance value, the output efficiency control method further includes: When the output efficiency obtained at any time is determined to be the efficiency to be adjusted, the target impedance value change rate of the adjustable impedance module is determined based at least on the current output efficiency obtained, the previous output efficiency obtained, and the preset interval. The impedance value of the control and adjustment adjustable impedance module during the time period from the current acquisition of output efficiency to the next acquisition of output efficiency is the target impedance value, including: The impedance value of the adjustable impedance module is controlled by the rate of change of the target impedance value, which is the impedance value during the time period between the current acquisition of output efficiency and the next acquisition of output efficiency.
8. An output efficiency control device, characterized in that, The output efficiency control device is used to control the output efficiency of an RF power amplifier when outputting RF power. The output efficiency control device includes an adjustable impedance module and a control module. The adjustable impedance module has an adjustable impedance value; The control module is used to continuously acquire the output efficiency of the RF power amplifier device when outputting RF power at preset intervals, and determine whether the acquired output efficiency is the efficiency to be adjusted or the target efficiency based on the preset efficiency and preset threshold. When the acquired output efficiency is determined to be the efficiency to be adjusted, the control module is used to adjust the impedance value of the adjustable impedance module from the current acquisition of output efficiency to the next acquisition of output efficiency to the target impedance value.
9. The output efficiency control device according to claim 8, characterized in that, The radio frequency power amplifier is used to transmit radio frequency power to the load. The adjustable impedance module includes a first capacitor, a first inductor, and a second capacitor. The first capacitor and the first inductor are connected sequentially between the radio frequency power amplifier and the load. The second capacitor is connected at the connection point between the first inductor and the load. The capacitance values of the first capacitor and the second capacitor are adjustable.
10. A radio frequency power supply device, characterized in that, include: Radio frequency (RF) power amplifiers are used to output RF power. The output efficiency control device as described in any one of claims 8-9 is used to control the output efficiency of the RF power amplifier device when outputting RF power.