Reconstruction type stepping micro-nano device based on heterojunction super-smooth interface and driving method

Abstract

The invention provides a reconstructed stepping micro-nano device based on a heterojunction super-smooth interface and a driving method, and relates to the technical field of micro-nano electromechanical systems (MEMS / NEMS). Comprising a stator assembly, and the stator assembly comprises an insulating substrate, a buried layer electrode group arranged in the insulating substrate, and a two-dimensional material dielectric layer covering the buried layer electrode group; the sliding block assembly comprises a metal sliding block arranged on the surface of the two-dimensional material dielectric layer; the material of the metal sliding block is different from that of the two-dimensional material dielectric layer, and the contact surfaces of the metal sliding block and the two-dimensional material dielectric layer form a heterojunction super-smooth interface; the heterojunction super-smooth interface has a periodic stick-slip characteristic, and the metal sliding block is configured to perform discrete stepping motion along the surface of the two-dimensional material dielectric layer under the action of an electrostatic field generated by the buried layer electrode group; the reconfiguration type stepping micro-nano device has the beneficial effects that the reconfiguration type stepping micro-nano device with zero abrasion, accurate and adjustable step length and power-off passive self-locking capability is provided.

Description

Technical Field

[0001] This invention relates to the field of micro / nano electromechanical systems (MEMS / NEMS) technology, and more specifically, to a reconfigurable stepping micro / nano device and driving method based on a heterojunction superlubricated interface. Background Technology

[0002] In the development of micro- and nano-electro-mechanical systems (MEMS / NEMS), device reconfigurability is a core key to overcoming the limitations of single-function devices and achieving intelligent response and multi-scenario adaptation. Through reconfigurable design, micro- and nano-devices can dynamically adjust their structural form and operating mode according to operational requirements, providing new possibilities for cutting-edge fields such as high-precision sensing, precise positioning, and micro- and nano-manipulation. Structural superlubricity technology, with its near-zero friction at the micro- and nano-scale—where the coefficient of friction can be reduced to 10... -6 With its significant advantage of zero wear, it fundamentally solves the bottleneck problems of shortened lifespan and performance degradation caused by friction and wear in traditional micro and nano devices. It is recognized by the academic and industrial communities as the ideal technical path for building the next generation of long-life, high-performance micro and nano electromechanical devices.

[0003] However, despite the significant potential of structural superlubricity technology, current micro / nano devices developed based on this technology (typically graphite / graphite homojunction structures) still suffer from two major, undeniable drawbacks that severely hinder their transition from laboratory to practical applications: 1. Lack of Reliable Position Holding Capability: The core advantage of super-smooth structures stems from extremely low friction between layers or interfaces, but this characteristic also becomes a natural weakness in position stability. Taking graphite / graphite homojunctions as an example, their interlayer van der Waals forces are weak and lack obvious mechanical locking structures, making the slider prone to uncontrollable position drift even when subjected to weak external disturbances or internal thermal noise in a non-working state. Thermal noise originates from the thermal motion of particles at the micro-nano scale, generating significant driving force on the small slider even at room temperature. Weak vibrations in the environment (such as low-frequency vibrations from equipment operation, air disturbances, etc.), even with amplitudes only at the nanometer level, can easily overcome near-zero frictional resistance, causing the slider to deviate from its preset position. More critically, these devices generally lack an effective "self-locking" mechanism, failing to stably fix the slider in the target position after the drive stops, leading to problems such as loss of positioning accuracy and disordered storage state, greatly affecting the reliability of the device in static or intermittent working scenarios.

[0004] 2. The driving control method is limited to analog quantities, making it difficult to achieve high-precision step control: Traditional devices based on structural superlubricity technology rely on continuously adjustable electrostatic field dragging for driving, i.e., the continuous movement of the slider is controlled by changing the intensity of the electrostatic field. This analog driving mode has inherent limitations: on the one hand, it cannot achieve quantum-based, precisely controllable stepping motion; the motion process is continuous and smooth, making it difficult to accurately position discrete targets. On the other hand, the accuracy of step size adjustment is greatly affected by factors such as fluctuations in electrostatic field intensity and interface charge accumulation, resulting in poor stability and failing to meet the stringent requirements of nanometer- or even sub-nanometer-level step sizes and high repeatability in precision positioning. This deficiency makes it difficult for structural superlubricity devices to fully utilize their advantages of low friction and long lifespan in key fields requiring high-precision positioning and control, such as semiconductor manufacturing, biological cell manipulation, and quantum sensing, significantly limiting their application scenarios. Summary of the Invention

[0005] To overcome the shortcomings of existing technologies, a reconfigurable stepping micro / nano device and driving method based on a heterojunction super-lubricated interface is provided. It utilizes the periodic stick-slip characteristics of the heterojunction super-lubricated interface to transform "continuous sliding" into controllable "off-road walking" and has the ability to self-lock without power failure. Thus, a stepping micro / nano device with zero wear, precise adjustable step size, and the ability to self-lock without power failure is provided.

[0006] The technical solution adopted by this invention to solve its technical problem is: a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface, the improvement of which includes: A stator assembly, the stator assembly including an insulating substrate, a buried electrode group disposed in the insulating substrate, and a two-dimensional material dielectric layer covering the buried electrode group; A slider assembly, the slider assembly comprising a metal slider disposed on the surface of the two-dimensional material dielectric layer; The metal slider is made of a different material than the two-dimensional dielectric layer, and their contact surface forms a heterojunction super-slippery interface. The heterojunction super-slippery interface has periodic stick-slip characteristics, and the metal slider is configured to perform discrete step-like movements along the surface of the two-dimensional dielectric layer under the action of the electrostatic field generated by the buried electrode group. The stepping micro / nano device also includes a control unit, which is electrically connected to the buried electrode group and is used to output a control voltage to adjust the single step displacement of the metal slider and control its movement direction.

[0007] In the above structure, the buried electrode group includes at least three coplanarly arranged electrodes, namely a first side electrode, a second side electrode, and an intermediate driving electrode located between the two. The first and second side electrodes are used to form an electrostatic potential well at the metal slider when a bias voltage difference is applied, thereby providing an electro-spring with equivalent lateral stiffness adjustable. The intermediate driving electrode is used to generate an electrostatic driving force on the metal slider when a driving signal is applied.

[0008] In the above structure, the heterojunction superlubricated interface has a non-zero maximum static friction force. and kinetic friction And static friction > Kinetic friction .

[0009] In the above structure, the equivalent lateral stiffness of the electro-spring is: The single-step displacement of the metal slider The maximum static friction force of the heterojunction superlubricated interface With kinetic friction The difference and equivalent lateral stiffness The ratio determines, that is .

[0010] In the above structure, the metal slider is a single-crystal gold micron slider, and the two-dimensional material dielectric layer is one of single-crystal graphite, molybdenum disulfide (MoS2), or hexagonal boron nitride (h-BN).

[0011] In the above structure, a functional electrode layer is also provided on the surface of the stator assembly along the movement path of the metal slider; The functional electrode layer includes several spatially separated functional blocks. A conductive functional probe is fixedly mounted on the metal slider. The probe stops at different functional block positions through stepping motion to reconstruct the electrical function of the stepping micro / nano device.

[0012] In the above structure, the functional block includes any one of the following: radio frequency capacitor plate, logic circuit contact, or optical switch coupling grating.

[0013] In the above structure, when the stepper micro / nano device is configured as a tunable radio frequency device, the functional electrode layer includes multiple radio frequency capacitor plates of different heights or areas, and the coupling capacitance value is changed when the metal slider moves above different radio frequency capacitor plates. When the stepper micro / nano device is configured as a physical logic switch, the functional electrode layer includes disconnected logic circuit contacts, and the metal slider acts as a conductive bridge to connect different logic circuit contacts to change the circuit topology.

[0014] In the above structure, after the voltage of the buried electrode group is removed, the metal slider remains in its current position by relying on the interface pinning effect of the heterojunction super-slippery interface to achieve self-locking without human intervention.

[0015] This invention also provides a driving method for a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface, characterized in that the driving method is applied to the reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface as described above, and includes the following steps: S10. Initialization steps: Initialize the stepper micro / nano device and determine the initial position of the metal slider on the heterojunction superlubricated interface. S20. Stiffness setting step: By applying a bias voltage difference to the two side electrodes in the buried electrode group, a potential well is formed below the metal slider. This potential well provides an equivalent lateral stiffness for the stepping micro / nano device. ; S30, Driving Sliding Step: By applying a time-varying driving voltage to the intermediate driving electrode in the buried electrode group, the metal slider is subjected to an electrostatic driving force; when the electrostatic driving force is greater than the maximum static friction force of the heterojunction superlubricated interface... At that time, the metal slider slipped; S40, Step-by-step implementation: After the metal slider slides, the interfacial friction force it experiences changes from the maximum static friction force. Converted into kinetic friction The metal slider moves a single step displacement. After stopping, the displacement of a single step. From the maximum static friction force With kinetic friction The difference and equivalent lateral stiffness The ratio determines; S50, Position self-locking step: Remove the driving voltage applied to the intermediate driving electrode. At this time, the electrostatic driving force disappears, and the maximum static friction force of the metal slider at the heterojunction super-lubricated interface is reduced. Under its influence, it is pinned to the current position, achieving a self-locking mechanism.

[0016] Furthermore, in step S20, the equivalent lateral stiffness is changed by adjusting the bias voltage difference applied to the two side electrodes. This achieves a single-step displacement of the metal slider. It is precise and dynamically adjustable.

[0017] Furthermore, in step S30, the driving voltage is a pulse voltage or an asymmetrical AC voltage. By controlling the amplitude, frequency, or duty cycle of the driving voltage, the electrostatic driving force applied to the metal slider can be precisely controlled.

[0018] Furthermore, in step S40, the single-step displacement amount Maximum static friction kinetic friction Equivalent lateral stiffness The following relationship must be satisfied: .

[0019] The beneficial effects of this invention are: by introducing a specific gold / two-dimensional material heterojunction interface and utilizing its inherent stick-slip properties, this invention transforms a continuous drive system into a discrete propulsion system and solves the fundamental problem of its inability to self-lock. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the principle of a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to the present invention.

[0021] Figure 2 A schematic diagram illustrating the motion mechanism of the superlubricated interface in a gold / two-dimensional material heterostructure.

[0022] Figure 3 This is a specific embodiment of a reconfigurable stepper micro / nano device based on a heterojunction superlubricated interface according to the present invention.

[0023] Figure 4 This is a schematic flowchart of a reconfigurable stepper micro / nano device driving method based on a heterojunction superlubricated interface according to the present invention.

[0024] In the figure: stator assembly 10, insulating substrate 101, buried electrode group 102, intermediate drive electrode 1023, first side electrode 1021, second side electrode 1022, two-dimensional material dielectric layer 103, slider assembly 20, metal slider 201, functional probe 202, control unit 30, functional electrode layer 40, functional block 401. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] The following will clearly and completely describe the concept, specific structure, and technical effects of the present invention in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are all within the scope of protection of the present invention. Furthermore, all connections / linkages involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. The various technical features in this invention can be combined interactively without contradicting each other.

[0027] Example 1 Reference Figure 1 As shown, the present invention discloses a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface. The stepping micro / nano device includes a stator assembly 10 and a slider assembly 20. The stator assembly 10 includes an insulating substrate 101, a buried electrode group 102 disposed in the insulating substrate 101, and a two-dimensional material dielectric layer 103 covering the buried electrode group 102. The slider assembly 20 includes a metal slider 201 disposed on the surface of the two-dimensional material dielectric layer 103.

[0028] In this embodiment, the insulating substrate 101 is made of silicon dioxide (SiO2). Within the insulating substrate 101, a buried electrode group 102 is embedded using semiconductor processes such as photolithography, etching, and metal deposition. The buried electrode group 102 is arranged along a predetermined linear motion path X. Specifically, the buried electrode group 102 includes three coplanarly arranged electrodes: a central driving electrode 1023 and two control electrodes located on either side of it (i.e., a first side electrode 1021 and a second side electrode 1022, respectively). A two-dimensional dielectric layer 103 is covered above the insulating substrate 101 and the buried electrode group 102. In this embodiment, the two-dimensional dielectric layer 103 is single-crystal graphene; in another embodiment, the two-dimensional dielectric layer 103 is hexagonal boron nitride (h-BN). The metal slider 201 is a single-crystal gold micron slider. In this embodiment, it is a micron-scale cuboid, for example, 10µm × 4µm × 0.2µm, made of single-crystal gold. A metal slider 201 is placed on the upper surface of a two-dimensional material dielectric layer 103, with its bottom surface in close contact with the upper surface of the two-dimensional material dielectric layer 103, forming a gold / two-dimensional material heterojunction super-slip interface. This heterojunction super-slip interface exhibits periodic stick-slip characteristics. In this embodiment, gold can be deposited on the two-dimensional material dielectric layer by vapor deposition, and further processed by etching or other processes to shape the deposited gold into the desired shape, forming the metal slider 201; a heterojunction super-slip interface is formed between the bottom surface of the metal slider 201 and the upper surface of the two-dimensional material dielectric layer 103.

[0029] The core physical mechanism of this invention originates from the periodic stick-slip properties of the superlubricated interface of the heterojunction. Specifically, for example... Figure 2 As shown, when the metal slider 201 is dragged at a low speed (e.g., 25 nm / s) using an atomic force microscope (AFM) probe, the measured lateral force exhibits a periodic sawtooth-like variation with displacement. This is defined as periodic stick-slip characteristic in this scheme. This indicates that the motion of the metal slider 201 is an alternating process of "stick" and "slip". During the stick phase, the metal slider 201 is pinned, and the lateral force gradually increases until it reaches the maximum static friction force. Once it exceeds The metal slider 201 suddenly began to slide, and the interfacial friction rapidly decreased to kinetic friction. The heterojunction superlubricity is key to achieving stepping and self-locking. It should also be noted that structural superlubricity refers to a state where friction and wear approach zero when two solid surfaces slide in direct contact, formed by the interaction of van der Waals forces. In the prior art, structural superlubricity already has a clear definition, which will not be described in detail in this embodiment.

[0030] Furthermore, the metal slider 201 is configured to perform discrete step-like movements along the surface of the two-dimensional dielectric layer 103 under the action of the electrostatic field generated by the buried electrode group 102. Additionally, a control unit 30 is included, electrically connected to the buried electrode group 102, for outputting a control voltage to adjust the single-step displacement of the metal slider 201 and control its direction of movement. Specifically, in this embodiment, the first side electrode 1021 and the second side electrode 1022 are located on both sides of the intermediate driving electrode 1023. The first side electrode 1021 and the second side electrode 1022 are used to form an electrostatic potential well at the metal slider 201 when a bias voltage difference is applied, thereby providing an equivalent electro-spring with adjustable lateral stiffness. The intermediate driving electrode 1023 is used to generate an electrostatic driving force on the metal slider 201 when a driving signal is applied. Furthermore, in the above embodiment, the heterojunction super-lubricating interface has a non-zero maximum static friction force. and kinetic friction And static friction > Kinetic friction The equivalent lateral stiffness of the electro-spring is... The single-step displacement of the metal slider 201 The maximum static friction force of the heterojunction superlubricated interface With kinetic friction The difference and equivalent lateral stiffness The ratio determines, that is .

[0031] Based on the above embodiments, the control unit 30 applies voltage to the first side electrode 1021 and the second side electrode 1022, forming a bias voltage difference between them. This creates a parabolic potential well below the metal slider 201, which is equivalent to applying a virtual spring to the metal slider 201. This virtual spring has lateral stiffness: that is, when the metal slider deviates from the equilibrium position, it will be subjected to a restoring force in the lateral (i.e., horizontal direction). This restoring force drives the metal slider to be dragged back to its original position. The restoring force is proportional to the offset position, and its proportionality coefficient is the lateral stiffness. Since its behavior is consistent with the principle of a spring, this "spring" is defined as an electro-induced spring in this invention. The equivalent lateral stiffness of this electro-induced spring is... The equivalent lateral stiffness is directly proportional to the magnitude of the bias voltage difference; by adjusting the magnitude of the bias voltage difference, the equivalent lateral stiffness can be easily changed. .

[0032] During driving, in addition to applying voltages to the first side electrode 1021 and the second side electrode 1022, a driving voltage, such as a positive voltage pulse, is applied to the central driving electrode via the control unit 30. This voltage generates a lateral electrostatic driving force on the metal slider 201. When the energy accumulated by the electrostatic driving force is sufficient to overcome the pinning barrier of the heterojunction superlubricating interface (i.e., the electrostatic driving force is greater than the maximum static friction force), the driving force can be applied to the metal slider 201. When the metal slider 201 slides once, the step size of this single slide is the displacement of the single step. ,and For example, when the maximum static friction force With kinetic friction The difference is 0.5µN, equivalent lateral stiffness Setting it to 0.05 N / m allows for a single step size of up to 10 nm. The equivalent lateral stiffness can be changed by adjusting the bias voltage difference. This allows for on-demand programming of word sliding step size.

[0033] Finally, when the control unit 30 removes the driving voltage of the central driving electrode, the electrostatic driving force disappears, and the metal slider 201 is immediately subjected to the static friction force of the heterojunction super-lubricating interface at its new position. "Locking" enables passive, zero-power position holding. It should be noted that the control unit 30 can be a mature controller from the existing technology, such as an FPGA controller.

[0034] In traditional thinking, stick-slip is generally considered a harmful and unstable source of vibration in precision machinery, which needs to be suppressed and eliminated. However, this invention takes the opposite approach, cleverly utilizing and precisely controlling the stick-slip effect at the nanoscale, transforming it from an "instability" into a "controllable discrete propagating unit," which represents a breakthrough in the inventive concept.

[0035] This invention creatively transforms a continuous drive system into a discrete stepper system by introducing a specific gold / two-dimensional material heterojunction interface and utilizing its inherent stick-slip properties, thus solving the fundamental problem of its inability to self-lock. Compared to traditional piezoelectric ceramic steppers, this invention, based on the super-slip principle, exhibits no mechanical wear, has an extremely long lifespan, and is smaller and more integrated. Compared to graphite / graphite homojunction super-slip devices, this invention possesses non-zero static friction, enabling stable position locking and solving the problem of parameter drift in noisy environments.

[0036] Example 2 Based on Example 1, the present invention also provides a driving method for reconfigurable stepping micro / nano devices based on a heterojunction superlubricated interface, referring to... Figure 3As shown, the driving method includes steps S10-S50, the specific contents of which are as follows: S10. Initialization steps: Initialize the stepper micro / nano device and determine the initial position of the metal slider 201 on the heterojunction superlubricated interface. It should be noted that this embodiment is based on Embodiment 1. Therefore, the structure of the stepper micro / nano device is the same as in Embodiment 1, and will not be described in detail in this embodiment. S20, Stiffness Setting Step: By applying a bias voltage to the two side electrodes in the buried electrode group 102, a potential well is formed below the metal slider 201. This potential well provides an equivalent lateral stiffness for the stepping micro / nano device. ; In step S20, the equivalent lateral stiffness is changed by adjusting the bias voltage difference applied to the two side electrodes. This achieves a single-step displacement of the metal slider 201. Precise and dynamically adjustable; S30, Driving Sliding Step: By applying a time-varying driving voltage to the intermediate driving electrode 1023 in the buried electrode group 102, the metal slider 201 is subjected to an electrostatic driving force; when the electrostatic driving force is greater than the maximum static friction force of the heterojunction superlubricated interface... At that time, the metal slider 201 slipped; In step S30, the driving voltage is a pulse voltage or an asymmetrical AC voltage. By controlling the amplitude, frequency or duty cycle of the driving voltage, the electrostatic driving force applied to the metal slider 201 can be precisely controlled. S40, Step-by-step implementation: After the metal slider 201 slides, the interfacial friction force it experiences changes from the maximum static friction force. Converted into kinetic friction The metal slider 201 moves by a single step displacement. After stopping, the displacement of a single step. From the maximum static friction force With kinetic friction The difference and equivalent lateral stiffness The ratio determines; In step S40, the single step displacement amount Maximum static friction kinetic friction Equivalent lateral stiffness The following relationship must be satisfied: ; S50, Position self-locking step: Remove the driving voltage applied to the intermediate driving electrode 1023. At this time, the electrostatic driving force disappears, and the maximum static friction force of the metal slider 201 at the heterojunction super-lubricated interface is reduced. Under its influence, it is pinned to the current position, achieving a self-locking mechanism.

[0037] Based on this, the present invention provides a reconfigurable stepping micro / nano device driving method based on a heterojunction superslippery interface. By introducing a specific gold / two-dimensional material heterojunction interface and utilizing its inherent stick-slip properties, a continuous driving system is creatively transformed into an discrete stepping system, and the fundamental problem of its inability to self-lock is solved.

[0038] Example 3 Based on Example 1, this invention also provides specific application examples for a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface, as described in Example 1. Figure 4 As shown, a functional electrode layer 40 is also provided on the surface of the stator assembly 10 along the movement path of the metal slider 201; the functional electrode layer 40 includes a plurality of spatially separated functional blocks 401, in Figure 4 In this design, the functional block 401 is represented by multiple elongated rectangles. Conductive functional probes 202 are fixedly mounted on the metal slider 201, and by stepping, they stop at different positions within the functional block 401 to reconstruct the electrical function of the stepping micro / nano device. Furthermore, after the voltage of the buried electrode group 102 is removed, the metal slider 201 remains in its current position due to the interface pinning effect of the heterojunction super-slippery interface, achieving self-locking without human intervention.

[0039] In this embodiment, "reconstructing the electrical function of the stepper micro / nano device" refers to the ability of the core device, after manufacturing, to adjust its electrical parameters, electrical topology, or operating mode simply by controlling the stepping motion of the metal slider 201, without requiring physical disassembly, modification, or additional processing of the hardware structure. This enables functional reconstruction and flexible adaptation. Essentially, it utilizes the precise displacement of the metal slider 201 to alter the coupling relationship between the metal slider 201 and different functional blocks 401 in the functional electrode layer 40. This allows the same device to exhibit differentiated electrical performance in different scenarios, meeting diverse application requirements without requiring device replacement.

[0040] In this embodiment, when the stepper micro / nano device is configured as a tunable RF device, the functional electrode layer 40 includes multiple RF capacitor plates of varying heights or areas, i.e., the functional block 401 consists of multiple RF capacitor plates. The metal slider 201 changes its coupling capacitance value when it moves above different RF capacitor plates. Specifically, stepper drive is used to make the slider cover different RF capacitor plates, achieving discrete and precise adjustment of the capacitance value, thereby reconstructing the resonant frequency of the RF filter. Thanks to the self-locking effect of the heterojunction super-slippery interface, this state is maintained passively due to static friction pinning, achieving zero-power storage. It should be noted that the position of the metal slider 201 can be monitored in real time by utilizing the capacitance change between the metal slider 201 and the underlying RF capacitor plate, and this position information is fed back to the control unit 30 (such as an FPGA or microcontroller). The control unit 30 then accurately issues the next drive pulse, thereby achieving higher precision positioning.

[0041] When the stepper micro / nano device is configured as a physical logic switch, the functional electrode layer 40 includes disconnected logic circuit contacts, that is, the functional block 401 consists of multiple logic circuit contacts; the metal slider 201 acts as a conductive bridge to connect different logic circuit contacts to change the circuit topology; thereby realizing the conversion of logic functions (such as refactoring an AND gate into an OR gate) at the hardware level.

[0042] Based on the above description, we will now explain in detail the reconfigurability of the stepping micro / nano device of the present invention. On the physical basis of reconfigurability, the functional electrode layer 40 pre-defines several spatially separated functional blocks 401 (such as RF capacitor plates, logic circuit contacts, etc.), while the conductive functional probe 202 on the metal slider 201 can be considered a "movable electrical connection / coupling unit." By outputting commands from the control unit, the metal slider 201 is driven to step along a preset path to the target functional block 401, thus establishing an electrical connection between the functional probe 202 and the functional block 401, replacing the traditional "fixed connection" hardware design. The reconfigurability of the stepping micro / nano device of the present invention overcomes the limitation that the function of traditional micro / nano devices is determined upon completion of fabrication, enabling the same product to have multiple functions simultaneously. For example, the same stepping micro / nano device can be reconfigured to switch between a "tunable RF device" and a "physical logic switch," eliminating the need to design and manufacture devices separately for different functions, thereby significantly reducing R&D costs.

[0043] For specific application scenarios of reconfigurable stepper micro / nano devices, this invention further explains, for example: when functional block 401 is a "RF capacitor plate": different plates have different heights and areas. When the metal slider 201 moves above different plates, the coupling area and spacing between the functional probe 202 and the plate change, thereby precisely adjusting the equivalent capacitance value of the device. This reconfiguration can achieve discrete adjustment of the resonant frequency of the RF filter, adapting to the signal processing requirements of different frequency bands. When functional block 401 is a "logic circuit contact": the contact is in an open state, and the functional probe 202 of the metal slider 201 can act as a "temporary conductive bridge" to connect different contact combinations, thereby changing the circuit topology. This reconfiguration can achieve dynamic switching of logic functions at the hardware level without rewiring, and is suitable for scenarios such as adaptive control and programmable logic arrays. Furthermore, when functional block 401 is "optical switch coupling grating": the metal slider 201 moves to different grating positions, which can change the coupling path, intensity or polarization state of the optical signal, realize the reconstruction of the optical switch function, and adapt to the multi-path switching requirements in optical communication and optical sensing.

[0044] It should be noted that after the metal slider 201 stops at the target functional block 401, it achieves self-locking without human intervention by relying on the interface pinning effect of the heterojunction super-slippery interface. This ensures that the reconstructed electrical state is maintained stably without the need for continuous application of driving voltage, thus reducing power consumption and avoiding functional drift caused by external disturbances. Therefore, the "reconstruction of the electrical function of stepper micro / nano devices" in this invention is an innovative design that "replaces hardware replacement with displacement control." Through the precise stepping motion of the metal slider 201, stepper micro / nano devices are able to adapt to different working requirements, providing core support for high-precision, highly integrated intelligent micro / nano systems.

[0045] The technical solution described above in this invention has the following beneficial effects: First, the transformation from "continuous sliding" to "discrete stepping": For the first time, the "stick-slip effect," which is usually considered unstable in superslippery systems, is utilized and transformed as the physical basis for realizing discrete stepping, giving superslippery devices a completely new motion mode. Second, zero-wear stepping and self-locking: Although the motion process is "stick-slip," because it occurs at the superslippery interface, the entire process maintains the zero-wear characteristics of the superslippery structure, overcoming the fatal flaw of short lifespan in traditional contact steppers (such as piezoelectric ceramic drives). Simultaneously, self-locking is achieved using the inherent static friction of the interface, requiring no external power consumption, thus solving the core problem of unstable position in superslippery devices. Third, precisely adjustable step size: By adjusting the equivalent lateral stiffness of the system, the step size of each step can be conveniently and precisely controlled, providing the possibility for precise positioning and parameter fine-tuning. Fourth, easy integration and miniaturization: The entire device structure is compatible with standard two-dimensional semiconductor planar processes, making it easy to miniaturize and integrate with other functional circuits on a large scale.

[0046] The above is a detailed description of the preferred embodiments of the present invention. However, the present invention is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A reconfigurable stepping micro / nano device based on a heterojunction supersmooth interface, characterized in that, include: A stator assembly, the stator assembly including an insulating substrate, a buried electrode group disposed in the insulating substrate, and a two-dimensional material dielectric layer covering the buried electrode group; A slider assembly, the slider assembly comprising a metal slider disposed on the surface of the two-dimensional material dielectric layer; The metal slider is made of a different material than the two-dimensional dielectric layer, and their contact surface forms a heterojunction super-slippery interface. The heterojunction super-slippery interface has periodic stick-slip characteristics, and the metal slider is configured to perform discrete step-like movements along the surface of the two-dimensional dielectric layer under the action of the electrostatic field generated by the buried electrode group. The stepping micro / nano device also includes a control unit, which is electrically connected to the buried electrode group and is used to output a control voltage to adjust the single step displacement of the metal slider and control its movement direction.

2. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 1, characterized in that, The buried electrode group includes at least three coplanarly arranged electrodes, namely a first side electrode, a second side electrode, and an intermediate driving electrode located between the two. The first and second side electrodes are used to form an electrostatic potential well at the metal slider when a bias voltage difference is applied, thereby providing an electro-spring with equivalent lateral stiffness adjustable. The intermediate driving electrode is used to generate an electrostatic driving force on the metal slider when a driving signal is applied.

3. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 2, characterized in that, The heterojunction superlubricated interface has a non-zero maximum static friction force. and kinetic friction And static friction > Kinetic friction ; The equivalent lateral stiffness of the electro-spring is The single-step displacement of the metal slider The maximum static friction force of the heterojunction superlubricated interface With kinetic friction The difference and equivalent lateral stiffness The ratio determines, that is .

4. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 1, characterized in that, The metal slider is a single-crystal gold micron slider, and the two-dimensional material dielectric layer is one of single-crystal graphite, molybdenum disulfide (MoS2), or hexagonal boron nitride (h-BN).

5. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 1, characterized in that, The surface of the stator assembly is also provided with a functional electrode layer along the movement path of the metal slider. The functional electrode layer includes several spatially separated functional blocks. A conductive functional probe is fixedly mounted on the metal slider. The probe stops at different functional block positions through stepping motion to reconstruct the electrical function of the stepping micro / nano device.

6. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 5, characterized in that, The functional block includes any one of the following: radio frequency capacitor plate, logic circuit contact or optical switch coupling grating; When the stepper micro / nano device is configured as a tunable radio frequency device, the functional electrode layer includes multiple radio frequency capacitor plates of different heights or areas, and the coupling capacitance value is changed when the metal slider moves above different radio frequency capacitor plates. When the stepper micro / nano device is configured as a physical logic switch, the functional electrode layer includes disconnected logic circuit contacts, and the metal slider acts as a conductive bridge to connect different logic circuit contacts to change the circuit topology.

7. The reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 1, characterized in that, After the voltage of the buried electrode group is removed, the metal slider remains in its current position by relying on the interface pinning effect of the heterojunction super-slippery interface, so as to achieve self-locking without human intervention.

8. A driving method for reconfigurable stepping micro / nano devices based on heterojunction superlubricated interfaces, characterized in that, This driving method is applied to the stepping micro / nano device based on a heterojunction superlubricated interface as described in any one of claims 1-7, and includes the following steps: S10. Initialization steps: Initialize the stepper micro / nano device and determine the initial position of the metal slider on the heterojunction superlubricated interface. S20. Stiffness setting step: By applying a bias voltage difference to the two side electrodes in the buried electrode group, a potential well is formed below the metal slider. This potential well provides an equivalent lateral stiffness for the stepping micro / nano device. ; S30, Driving Sliding Step: By applying a time-varying driving voltage to the intermediate driving electrode in the buried electrode group, the metal slider is subjected to an electrostatic driving force; when the electrostatic driving force is greater than the maximum static friction force of the heterojunction superlubricated interface... At that time, the metal slider slipped; S40, Step-by-step implementation: After the metal slider slides, the interfacial friction force it experiences changes from the maximum static friction force. Converted into kinetic friction The metal slider moves a single step displacement. After stopping, the displacement of a single step. From the maximum static friction force With kinetic friction The difference and equivalent lateral stiffness The ratio determines; S50, Position self-locking step: Remove the driving voltage applied to the intermediate driving electrode. At this time, the electrostatic driving force disappears, and the maximum static friction force of the metal slider at the heterojunction super-lubricated interface is reduced. Under its influence, it is pinned to the current position, achieving a self-locking mechanism.

9. The driving method for a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 8, characterized in that, In step S20, the equivalent lateral stiffness is changed by adjusting the bias voltage difference applied to the two side electrodes. This achieves a single-step displacement of the metal slider. Precise and dynamically adjustable; In step S30, the driving voltage is a pulse voltage or an asymmetrical AC voltage. By controlling the amplitude, frequency, or duty cycle of the driving voltage, the electrostatic driving force applied to the metal slider can be precisely controlled.

10. The driving method for a reconfigurable stepping micro / nano device based on a heterojunction superlubricated interface according to claim 8, characterized in that, In step S40, the single step displacement amount Maximum static friction kinetic friction Equivalent lateral stiffness The following relationship must be satisfied: .

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