Vacuum cavity sealing surface high-temperature helium detection device and helium detection method

Abstract

The invention discloses a vacuum cavity sealing surface high-temperature helium detection device and a helium detection method.The vacuum cavity sealing surface high-temperature helium detection device comprises a helium detection box body, a jig plate and a heating heat transfer rod, and the jig plate is attached to a to-be-detected sealing surface, provided with a sealing window, of a vacuum cavity in a sealed mode; and the heating heat transfer rod is connected to the jig plate, penetrates through the sealing window, extends into the inner cavity of the vacuum cavity and is electrically connected with the helium detection box body. The invention discloses a high-temperature helium detection device for a sealing surface of a vacuum cavity, and aims to solve the problems of low heating efficiency and long overall detection time due to the fact that a heating rod is arranged outside in a traditional high-temperature helium detection device for the sealing surface of the vacuum cavity. The device can efficiently heat the area near the sealing surface of the vacuum cavity, so that the heating rate and the heating efficiency of the vacuum cavity are improved, and high-efficiency detection is realized.

Description

Technical Field

[0001] This invention relates to the field of vacuum cavity testing technology, and in particular to a high-temperature helium testing device and helium testing method for the sealing surface of a vacuum cavity. Background Technology

[0002] As a core component in high-end manufacturing, semiconductors, aerospace and other fields, the sealing performance of vacuum chambers directly determines the operating accuracy, reliability and service life of the entire equipment. Sealing performance is also the core barrier to ensure the smooth progress of processes in high vacuum environments and extreme working conditions. High-temperature helium detection technology is a key line of defense to protect the quality of vacuum chambers.

[0003] Currently, high-temperature helium testing of vacuum chambers involves heating the outside of the chamber, monitoring the temperature with a temperature gun, and then using a helium detector to evacuate and monitor the vacuum level. When the vacuum level and temperature reach the set detection values, helium gas is injected into key areas such as the chamber's sealing surfaces. Due to the small size and strong penetrating power of helium molecules, if there are leakage defects at the sealing surface, helium gas will seep into the chamber, causing a decrease in the vacuum level, and the chamber will be deemed unqualified. If the vacuum level remains stable without fluctuations, it indicates that the chamber's sealing performance meets the standards and is deemed qualified.

[0004] However, external heating of the cavity results in a large amount of heat being transferred to the environment, causing the vacuum cavity to heat up slowly and with low efficiency.

[0005] Existing technologies involving heating functions, such as Chinese patent document CN217444339U, disclose a high-vacuum bonding machine with built-in heaters on both the upper and lower sample stages. This achieves stable and uniform pressure, self-positioning, automatic leveling of the upper and lower sample stages, good bonding effect, and integrates multiple functions. However, it is not suitable for high-temperature helium detection in vacuum chambers.

[0006] Therefore, there is an urgent need to design a high-temperature helium detection device and method for the sealing surface of a vacuum cavity, which can efficiently heat the area near the sealing surface of the vacuum cavity, thereby improving the heating rate and heating efficiency of the vacuum cavity and achieving high-efficiency detection. Summary of the Invention

[0007] This invention aims to overcome the problems of existing vacuum chambers that rely on external heating, resulting in slow temperature rise and insufficient detection efficiency due to the large amount of heat transferred through the air. It provides a high-temperature helium detection device and method for the sealing surface of a vacuum chamber, which can efficiently heat the area near the sealing surface of the vacuum chamber, thereby improving the heating rate and efficiency of the vacuum chamber and achieving high-efficiency detection.

[0008] The technical solution adopted by the present invention to achieve its purpose is: a high-temperature helium detection device for a vacuum cavity sealing surface, comprising a helium detection box body, a fixture plate and a heating heat transfer rod, wherein the fixture plate is sealed and fitted to the sealing surface to be detected of the vacuum cavity having a sealing window, and the heating heat transfer rod is connected to the fixture plate and extends through the sealing window into the internal chamber of the vacuum cavity and is electrically connected to the helium detection box body. This high-temperature helium detection device for vacuum chamber sealing surfaces comprises a helium detection cartridge, a fixture plate, and a heating rod. To test the helium tightness of a vacuum chamber's sealing surface, the helium detection cartridge is placed inside the vacuum chamber. The heating rod is then fixed to the fixture plate and extends through a sealing window into the vacuum chamber, electrically connecting to the cartridge. The fixture plate is then sealed to the vacuum chamber, and the helium detector is connected to the chamber. The detector evacuates and monitors the vacuum level. When the vacuum level and temperature reach the set detection values, the heating rod heats up and injects helium gas into key areas such as the sealing surface. Due to the high vacuum inside the chamber, heat convection is negligible; heat radiation primarily diffuses to the chamber walls, while the majority of heat is transferred via conduction to the sealing surface with the sealing window and the corresponding fixture plate. This fully utilizes the high vacuum environment inside the chamber to accelerate the temperature rise of the fixture plate and the sealing surface with the sealing window, achieving efficient and effective detection. This high-temperature helium detector for a vacuum chamber sealing surface places the heat transfer rod, which generates heat, inside the vacuum chamber, thus reducing unnecessary heat loss. When the heat transfer rod is inside the vacuum chamber, due to the high vacuum inside, heat convection is negligible; heat radiation mainly diffuses to the walls of the vacuum chamber, while the majority of heat is transferred via conduction to the sealing surface with the sealing window and the corresponding fixture plate. This method fully utilizes the high vacuum environment inside the vacuum chamber to accelerate the temperature rise of the fixture plate and the sealing surface with the sealing window, thereby achieving high detection efficiency.

[0009] Preferably, the heating and heat transfer rod comprises a nested heating rod and a heat transfer rod. One end face of the heat transfer rod is attached to the surface of the fixture plate, and the other end face of the heat transfer rod is recessed to form a heat transfer groove. The heating rod is inserted into the heat transfer groove and transfers heat. The direction of heat transfer is from the heating rod through the heat transfer rod and the fixture plate to the sealing surface of the vacuum cavity. The heating rod is inserted into the interior of the heat transfer rod. When the heating rod generates heat, the heat diffuses outward into the heat transfer rod and is further transferred to the fixture rod and the sidewall of the vacuum cavity via the heat transfer rod as a medium. The nested heating rod and heat transfer rod have a maximum heat transfer area, thereby improving heat transfer efficiency.

[0010] Preferably, the heat transfer method is thermal conduction, and at least part of the outer surface of the heating rod is in contact with the surface of the heat transfer groove. The heating rod and the heat transfer groove mainly transfer heat through the end face and side wall of one end of the heating rod.

[0011] Preferably, aluminum powder is also filled between the heat transfer groove and the heating rod, forming a ring-shaped layer of aluminum powder around the heating rod. By adding aluminum powder, the air gap between the heat transfer groove and the heating rod can be reduced, utilizing the better heat transfer properties of the metal to transfer heat. Aluminum powder has a small coefficient of thermal expansion, which allows it to maintain approximately a constant volume during heating, avoiding damage to the heating rod or heat transfer rod due to deformation.

[0012] Preferably, the heat transfer rod is connected to the fixture plate via fasteners, and thermally conductive silicone grease is applied between the heat transfer rod and the fixture plate to form a thermally conductive silicone grease layer. A countersunk hole is formed on the surface of the fixture plate, and the heat transfer rod is threadedly connected to the countersunk hole via fasteners. The countersunk hole is a non-penetrating hole, which avoids gaps that could affect the sealing performance. The thermally conductive silicone grease layer further improves heat transfer.

[0013] Preferably, a first electrical conductor is embedded in the heat transfer rod, the first electrical conductor passing through the heat transfer groove and the outside of the heat transfer rod, and a second electrical conductor is embedded in the fixture plate, the second electrical conductor passing through the surface of the fixture plate and having an electrode on the outer surface of the fixture plate away from the vacuum cavity.

[0014] Preferably, when the heat transfer rod is mounted on the fixture plate, the first electrical conductor and the second electrical conductor are connected to form an electrical connection, and the heating rod is electrically connected to the first electrical conductor. Two sets of first and second electrical conductors are provided, and the power module forms a closed loop to supply power to the heating rod by connecting the electrodes of the two sets of second electrical conductors. This arrangement is used to supply power to the heating rod. This configuration has good sealing performance and can avoid affecting the testing of the sealing performance of the sealing surface.

[0015] Preferably, the helium detector body has a temperature sensor and a controller on its side wall for detecting the surface temperature of the fixture plate. The temperature sensor and controller are electrically connected to an external receiver to display the temperature signal. The temperature sensor measures the temperature of the vacuum chamber or fixture plate, and the controller transmits the temperature signal to the external receiver based on the sensor signal. The external receiver includes a main unit that controls the vacuum suction cup to adjust the vacuum level.

[0016] Preferably, a wireless module is also included, through which the controller communicates with the receiver. The inclusion of a wireless module makes the deployment of the high-temperature helium detector in the vacuum chamber easier and more flexible, and reduces the requirements for wiring harness connections.

[0017] Preferably, the helium detection kit also includes a power module that supplies power to the controller, temperature sensor, wireless module, and heating rod.

[0018] Preferably, the wireless module uses the Bluetooth protocol. The signal is transmitted wirelessly to a receiver outside the vacuum chamber, enabling real-time temperature monitoring.

[0019] The technical solution adopted by this invention to achieve its second objective is: a high-temperature helium detection method for a vacuum cavity sealing surface, which uses the aforementioned high-temperature helium detection device for a vacuum cavity sealing surface, and includes the following steps: S1: Place the helium detector box inside the vacuum chamber; S2: Connect the heating rod to the fixture plate and extend it through the sealing window into the internal chamber of the vacuum chamber to make an electrical connection with the helium detection box body; at the same time, the fixture plate is sealed to the sealing surface. S3: Connect the helium detector to the vacuum chamber, and use the helium detector to evacuate and monitor the vacuum level; S4: Heat transfer rods are heated to transfer heat. S5: Inject helium gas into key parts of the cavity sealing surface to achieve high-temperature helium detection of the sealing surface.

[0020] The beneficial effects of this invention are as follows: Compared with the prior art, this high-temperature helium detection device and method for the vacuum chamber sealing surface, by embedding the heating heat transfer rod inside the vacuum chamber, allows the heat generated by the heating rod to be directly transferred to the sealing surface of the vacuum chamber, reducing heat waste caused by heat convection, increasing temperature rise, and improving heating efficiency. By setting an aluminum powder layer between the heating rod and the heat transfer rod, the air gap between them is reduced, utilizing the better heat transfer properties of metal to transfer heat. With the inclusion of a wireless module, the controller can communicate with an external receiver wirelessly, eliminating the need for wiring harnesses and improving deployment flexibility. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the high-temperature helium detection device for the vacuum cavity sealing surface of the present invention in use.

[0022] Figure 2 This is a schematic diagram of the structure of the vacuum cavity, fixture plate, and heating heat transfer rod in this invention.

[0023] Figure 3 This is an exploded structural diagram of the high-temperature helium detection device for the vacuum cavity sealing surface and the vacuum cavity of the present invention.

[0024] Figure 4 This is a schematic diagram of an application structure of the high-temperature helium detection device for the vacuum cavity sealing surface of the present invention.

[0025] Figure 5 This is a schematic diagram of the connection between the fixture plate and the sealing surface in Embodiment 1 of the present invention.

[0026] Figure 6 This is a schematic diagram of the connection between the fixture plate and the sealing surface in Embodiment 2 of the present invention.

[0027] Figure 7 This is a schematic diagram of the connection between the fixture plate and the sealing surface in Embodiment 3 of the present invention.

[0028] Figure 8 This is a schematic diagram of the connection between the fixture plate and the sealing surface in Embodiment 4 of the present invention.

[0029] In the diagram: 100, vacuum chamber; 101, vacuum chamber cover; 102, helium detector flange interface; 103, threaded hole. 1. Helium detector box body; 2. Heating heat transfer rod; 3. Sealing window; 4. Sealing surface; 5. Heating rod; 6. Heat transfer rod; 7. Heat transfer groove; 8. Aluminum powder layer; 9. Fixture plate; 10. Countersunk hole; 11. Temperature sensor; 12. Controller; 13. Power module; 14. Wireless module; 15. First electrical conductor; 16. Second electrical conductor; 17. Electrode; 18. Lithium battery; 19. Switching power supply; 20. Relay; 21. Handle; 22. Battery power supply port; 23. Mounting buckle; 24. Dovetail groove; 25. Sealing strip; 26. Fastener; 27. Heat transfer rod threaded hole; 28. Thermal grease layer. Detailed Implementation

[0030] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0031] Components not specifically described in this invention are existing or general components, and the layout, connection, and control methods of pipelines not specifically described all adopt general existing technologies.

[0032] like Figure 1 As shown, the vacuum chamber 100 is a vacuum container with an internal cavity. The vacuum chamber cover 101 on its top is provided with a flange interface 102 for a helium detector. One side wall of the cover is a sealing surface 4, and a sealing window 3 is provided on the sealing surface 4. Multiple threaded holes 103 are provided around the sealing window 3 on the sealing surface 4 for connecting and fixing the fixture plate 9.

[0033] like Figure 2 , Figure 3 As shown, the high-temperature helium detection device with a sealed vacuum chamber according to this application includes a helium detection box body with handles 21 on the outer surfaces of its left and right side walls for easy movement of the helium detection device. A battery is placed on top of the box body. In some embodiments, the battery is a lithium battery 18. A controller 12 and a switching power supply 19 for converting electrical energy are fixedly connected to the outer surface of its front side. The switching power supply 19 is used to convert AC power to DC power, and a battery power supply port 22 is provided on the surface of the box body. External AC power is converted into battery power by the switching power supply 19. The lithium battery 18 and the switching power supply 19 constitute a power module 13. The outer surface of its front side also has a wireless module 14, a temperature sensor 11, a relay 20, and a heating rod 2.

[0034] The heating heat transfer rod 2 and the fixture plate 9 are separate structures. When in use, it is connected to the fixture plate 9 through a connector. When not in use, the outer surface of the front side of the helium detection device has a mounting buckle 23. The heating heat transfer rod 2 is inserted into the helium detection box body 1 through the mounting buckle for easy storage.

[0035] Two relays 20 are provided for each of the two heating heat transfer rods 2, and are used to control the switching of the two heating heat transfer rods 2.

[0036] The wireless protocol of the wireless module 14 can be short-range wireless communication technology standards such as Bluetooth or Zigbee. Since the amount of temperature signal data transmitted in this application is small and the real-time requirements are not high, the more power-efficient Bluetooth protocol is adopted.

[0037] In use, the surface of the high-temperature helium detector with temperature sensor 11 on the sealing surface of the vacuum chamber is facing the vacuum chamber 100 to achieve remote temperature measurement.

[0038] Example 1: like Figures 1 to 5 As shown, a high-temperature helium detection device for a vacuum chamber sealing surface includes a helium detection cartridge body 1, a fixture plate 9, and a heating rod 2. The fixture plate 9 is fitted to the sealing surface 4 of the vacuum chamber 100, which has a sealing window 3 to be tested. The heating rod 2 is connected to the fixture plate 9 and extends through the sealing window 3 into the internal chamber of the vacuum chamber, and is electrically connected to a battery on the helium detection cartridge body 1. Helium gas is injected into the edge of the fixture plate 9 to perform the helium detection test. Around the sealing window 3, the opposing surfaces of the fixture plate 9 are provided with annular dovetail grooves 24, and a sealing strip 25 is installed inside the dovetail grooves 24.

[0039] The existing vacuum chamber's heating source is located outside the chamber. Heat is transferred from the fixture plate 9 to the surface of the helium detector body 1, heating both the helium detector and the fixture plate 9, thereby accelerating molecular activity between the two plates. Helium gas is then sprayed around the sealing surface 4. If the sealing performance of the sealing window 3 is compromised, helium gas will enter the vacuum chamber. This helium gas will affect the vacuum level. By inspecting the helium gas and / or detecting the vacuum level, if helium gas is detected or the vacuum level decreases, the vacuum chamber is deemed unqualified.

[0040] In this testing process, the most time-consuming and efficiency-affecting step is heating to the set temperature. Analyzing the heating process, the heat generated by the heat transfer rod 2 is transferred to the sidewalls of the vacuum chamber via thermal conduction, a small portion is transferred to the environment via thermal radiation, and another portion is transferred to the environment via thermal convection through the air. Therefore, this application places the heat transfer rod 2, which generates heat, inside the vacuum chamber 100, thereby reducing unnecessary heat loss. With the heat transfer heating rod 5 inserted inside the vacuum chamber 100, due to the high vacuum inside the chamber, thermal convection is negligible, thermal radiation mainly diffuses to the walls of the vacuum chamber, and the majority of the heat is transferred via thermal conduction to the sealing surface 4 with the sealing window 3 and the corresponding fixture plate 9. This method fully utilizes the high vacuum environment inside the vacuum chamber to accelerate the temperature rise of the fixture plate 9 and the sealing surface 4 with the sealing window 3, thus achieving high testing efficiency.

[0041] like Figure 5 As shown, in some embodiments, the heating heat transfer rod 2 includes a nested heating rod 5 and a heat transfer rod 6. One end face of the heat transfer rod 6 is attached to the surface of the fixture plate 9, and the other end face of the heat transfer rod 6 is recessed to form a heat transfer groove 7. The heating rod 5 is inserted into the heat transfer groove 7 and transfers heat. The heat transfer direction is that the heating rod 5 passes through the heat transfer rod 6 and the fixture plate 9 to reach the sealing surface 4 of the vacuum cavity. The heating rod 5 is inserted into the interior of the heat transfer rod 6. When the heating rod 5 generates heat, the heat diffuses outward into the heat transfer rod 6 and is further transferred to the fixture rod and the sidewall of the vacuum cavity through the heat transfer rod 6. The nested heating rod 5 and the heat transfer rod 6 have a maximum heat transfer area, thereby improving the heat transfer efficiency.

[0042] In some embodiments, heat is transferred via thermal conduction, and at least a portion of the outer surface of the heating rod 5 is in contact with the surface of the heat transfer groove 7. The heating rod 5 and the heat transfer groove 7 primarily transfer heat through thermal conduction via the end face and sidewall of one end of the heating rod 5.

[0043] Example 2: like Figure 6 As shown, a high-temperature helium detection device for a vacuum chamber sealing surface includes a helium detection cartridge body 1, a fixture plate 9, and a heating rod 2. The fixture plate 9 is fitted to the sealing surface 4 of the vacuum chamber, which has a sealing window 3 to be tested. The heating rod 2 is connected to the fixture plate 9 and extends through the sealing window 3 into the internal chamber of the vacuum chamber, and is electrically connected to a battery on the helium detection cartridge body 1. Helium gas is injected into the edge of the fixture plate 9 to perform the helium detection test.

[0044] The existing vacuum chamber's heating source is located outside the chamber. Heat is transferred from the fixture plate 9 to the surface of the helium detector body 1, heating both the helium detector and the fixture plate 9, thereby accelerating molecular activity between the two plates. Helium gas is then sprayed around the sealing surface 4. If the sealing performance of the sealing window 3 is compromised, helium gas will enter the vacuum chamber. This helium gas will affect the vacuum level. By inspecting the helium gas and / or detecting the vacuum level, if helium gas is detected or the vacuum level decreases, the vacuum chamber is deemed unqualified.

[0045] In this testing process, the most time-consuming and efficiency-affecting step is heating to the set temperature. Analyzing the heating process, the heat generated by the heat transfer rod 2 is transferred to the sidewalls of the vacuum chamber via thermal conduction, a small portion is transferred to the environment via thermal radiation, and another portion is transferred to the environment via thermal convection through the air. Therefore, this application places the heat transfer rod 2, which generates heat, inside the vacuum chamber, thereby reducing unnecessary heat loss. When the heat transfer heating rod 5 is inside the vacuum chamber, due to the high vacuum inside the chamber, thermal convection is negligible. Thermal radiation mainly diffuses to the walls of the vacuum chamber, while the majority is transferred via thermal conduction to the sealing surface 4 with the sealing window 3 and the corresponding fixture plate 9. This method fully utilizes the high vacuum environment inside the vacuum chamber to accelerate the temperature rise of the fixture plate 9 and the sealing surface 4 with the sealing window 3, thus achieving high testing efficiency.

[0046] In some embodiments, the heating heat transfer rod 2 includes a nested heating rod 5 and a heat transfer rod 6. One end face of the heat transfer rod 6 is attached to the surface of the fixture plate 9, and the other end face of the heat transfer rod 6 is recessed to form a heat transfer groove 7. The heating rod 5 is inserted into the heat transfer groove 7 and transfers heat. The heat transfer direction is that the heating rod 5 passes through the heat transfer rod 6 and the fixture plate 9 to reach the sealing surface 4 of the vacuum cavity. The heating rod 5 is inserted into the interior of the heat transfer rod 6. When the heating rod 5 generates heat, the heat diffuses outward into the heat transfer rod 6 and is further transferred to the fixture rod and the sidewall of the vacuum cavity through the heat transfer rod 6. The nested heating rod 5 and the heat transfer rod 6 have a maximum heat transfer area, thereby improving the heat transfer efficiency.

[0047] like Figure 4 As shown, in some embodiments, aluminum powder is also filled between the heat transfer groove 7 and the heating rod 5, forming an annular aluminum powder layer 8 around the heating rod 5. By adding aluminum powder, the air gap between the heat transfer groove 7 and the heating rod 5 can be reduced, utilizing the better heat transfer performance of the metal to transfer heat. Aluminum powder has a small coefficient of thermal expansion, which allows it to maintain approximately a constant volume during heating, avoiding damage to the heating rod 5 or the heat transfer rod 6 due to deformation.

[0048] Example 3: like Figure 7As shown, a high-temperature helium detection device for a vacuum chamber sealing surface includes a helium detection cartridge body 1, a fixture plate 9, and a heating rod 2. The fixture plate 9 is fitted to the sealing surface 4 of the vacuum chamber, which has a sealing window 3 to be tested. The heating rod 2 is connected to the fixture plate 9 and extends through the sealing window 3 into the internal chamber of the vacuum chamber, and is electrically connected to a battery on the helium detection cartridge body 1. Helium gas is injected into the edge of the fixture plate 9 to perform the helium detection test.

[0049] The existing vacuum chamber's heating source is located outside the chamber. Heat is transferred from the fixture plate 9 to the surface of the helium detector body 1, heating both the helium detector and the fixture plate 9, thereby accelerating molecular activity between the two plates. Helium gas is then sprayed around the sealing surface 4. If the sealing performance of the sealing window 3 is compromised, helium gas will enter the vacuum chamber. This helium gas will affect the vacuum level. By inspecting the helium gas and / or detecting the vacuum level, if helium gas is detected or the vacuum level decreases, the vacuum chamber is deemed unqualified.

[0050] In this testing process, the most time-consuming and efficiency-affecting step is heating to the set temperature. Analyzing the heating process, the heat generated by the heat transfer rod 2 is transferred to the sidewalls of the vacuum chamber via thermal conduction, a small portion is transferred to the environment via thermal radiation, and another portion is transferred to the environment via thermal convection through the air. Therefore, this application places the heat transfer rod 2, which generates heat, inside the vacuum chamber, thereby reducing unnecessary heat loss. When the heat transfer heating rod 5 is inside the vacuum chamber, due to the high vacuum inside the chamber, thermal convection is negligible. Thermal radiation mainly diffuses to the walls of the vacuum chamber, while the majority is transferred via thermal conduction to the sealing surface 4 with the sealing window 3 and the corresponding fixture plate 9. This method fully utilizes the high vacuum environment inside the vacuum chamber to accelerate the temperature rise of the fixture plate 9 and the sealing surface 4 with the sealing window 3, thus achieving high testing efficiency.

[0051] In some embodiments, the heating heat transfer rod 2 includes a nested heating rod 5 and a heat transfer rod 6. One end face of the heat transfer rod 6 is attached to the surface of the fixture plate 9, and the other end face of the heat transfer rod 6 is recessed to form a heat transfer groove 7. The heating rod 5 is inserted into the heat transfer groove 7 and transfers heat. The heat transfer direction is that the heating rod 5 passes through the heat transfer rod 6 and the fixture plate 9 to reach the sealing surface 4 of the vacuum cavity. The heating rod 5 is inserted into the interior of the heat transfer rod 6. When the heating rod 5 generates heat, the heat diffuses outward into the heat transfer rod 6 and is further transferred to the fixture rod and the sidewall of the vacuum cavity through the heat transfer rod 6. The nested heating rod 5 and the heat transfer rod 6 have a maximum heat transfer area, thereby improving the heat transfer efficiency.

[0052] like Figure 5As shown, in some embodiments, a countersunk hole 10 is formed on the surface of the fixture plate 9, and the heat transfer rod 6 is threadedly connected to the countersunk hole 10 by a fastener 26. The countersunk hole 10 is a non-penetrating hole, and setting the countersunk hole 10 can avoid the formation of gaps that affect the sealing performance. In some embodiments, the cross-sectional profile of the heat transfer rod 6 is circular. The tail of the heat transfer rod 6 (the end of the heat transfer rod 6 that is attached to the fixture plate 9 is defined as the tail) is frustum-shaped. Along the axial direction of the heat transfer rod 6, a plurality of heat transfer rod threaded holes 27 arranged in a circumferential array are formed at its tail. The fastener passes through the threaded holes and is threadedly connected to the countersunk hole 10. It should be understood by those skilled in the art that the tail end face of the heat transfer rod 6 is a plane that can be attached to the fixture plate 9, which can better increase the heat transfer area and thus accelerate the efficiency of heat transfer. Based on this spirit, thermally conductive silicone grease is applied between the tail end face of the heat transfer rod 6 and the fixture plate 9 to eliminate the gap between the two, forming a thermally conductive silicone grease layer 28, thereby better transferring heat. As for the composition of the thermal grease, since it can be obtained unrestricted from the market and is irrelevant to the purpose of this invention, this embodiment is not obligated to disclose its composition.

[0053] Example 4: like Figure 8 As shown, a high-temperature helium detection device for a vacuum chamber sealing surface includes a helium detection cartridge body 1, a fixture plate 9, and a heating rod 2. The fixture plate 9 is fitted to the sealing surface 4 of the vacuum chamber, which has a sealing window 3 to be tested. The heating rod 2 is connected to the fixture plate 9 and extends through the sealing window 3 into the internal chamber of the vacuum chamber, and is electrically connected to a battery on the helium detection cartridge body 1. Helium gas is injected into the edge of the fixture plate 9 to perform the helium detection test.

[0054] The existing vacuum chamber's heating source is located outside the chamber. Heat is transferred from the fixture plate 9 to the surface of the helium detector body 1, heating both the helium detector and the fixture plate 9, thereby accelerating molecular activity between the two plates. Helium gas is then sprayed around the sealing surface 4. If the sealing performance of the sealing window 3 is compromised, helium gas will enter the vacuum chamber. The helium gas entering the vacuum chamber will affect its vacuum level. By inspecting the helium gas and / or detecting the vacuum level, if helium gas is detected or the vacuum level decreases, the vacuum chamber is deemed unqualified.

[0055] In this testing process, the most time-consuming and efficiency-affecting step is heating to the set temperature. Analyzing the heating process, the heat generated by the heat transfer rod 2 is transferred to the sidewalls of the vacuum chamber via thermal conduction, a small portion is transferred to the environment via thermal radiation, and another portion is transferred to the environment via thermal convection through the air. Therefore, this application places the heat transfer rod 2, which generates heat, inside the vacuum chamber, thereby reducing unnecessary heat loss. When the heat transfer heating rod 5 is inside the vacuum chamber, due to the high vacuum inside the chamber, thermal convection is negligible. Thermal radiation mainly diffuses to the walls of the vacuum chamber, while the majority is transferred via thermal conduction to the sealing surface 4 with the sealing window 3 and the corresponding fixture plate 9. This method fully utilizes the high vacuum environment inside the vacuum chamber to accelerate the temperature rise of the fixture plate 9 and the sealing surface 4 with the sealing window 3, thus achieving high testing efficiency.

[0056] In some embodiments, the heating heat transfer rod 2 includes a nested heating rod 5 and a heat transfer rod 6. One end face of the heat transfer rod 6 is attached to the surface of the fixture plate 9, and the other end face of the heat transfer rod 6 is recessed to form a heat transfer groove 7. The heating rod 5 is inserted into the heat transfer groove 7 and transfers heat. The heat transfer direction is that the heating rod 5 passes through the heat transfer rod 6 and the fixture plate 9 to reach the sealing surface 4 of the vacuum cavity. The heating rod 5 is inserted into the interior of the heat transfer rod 6. When the heating rod 5 generates heat, the heat diffuses outward into the heat transfer rod 6 and is further transferred to the fixture rod and the sidewall of the vacuum cavity through the heat transfer rod 6. The nested heating rod 5 and the heat transfer rod 6 have a maximum heat transfer area, thereby improving the heat transfer efficiency.

[0057] In some embodiments, a first electrical conductor 15 is embedded in the heat transfer rod 6, the first electrical conductor 15 passing through the heat transfer groove 7 and the outside of the heat transfer rod 6. A second electrical conductor 16 is embedded in the fixture plate 9, the second electrical conductor 16 passing through the surface of the fixture plate 9 and having an electrode 17 on the outer surface of the fixture plate 9 away from the vacuum cavity. When the heat transfer rod 6 is mounted on the fixture plate 9, the first electrical conductor 15 and the second electrical conductor 16 are connected to form an electrical connection. The heating rod 5 is electrically connected to the first electrical conductor 15. Two sets of first electrical conductors 15 and second electrical conductors 16 are provided. The power module 13 forms a closed loop to supply power to the heating rod 5 by connecting the electrodes 17 of the two sets of second electrical conductors 16. This configuration has good sealing performance and can avoid affecting the detection of the sealing performance of the sealing surface 4.

[0058] Example 5: like Figure 4 As shown, a method for high-temperature helium testing of a vacuum cavity sealing surface using any one of the sealing surfaces in Examples 1 to 4 is described, to perform helium sealing testing on the vacuum cavity. Specifically, a method for high-temperature helium testing of a vacuum cavity sealing surface includes the following steps: S1: Place the helium detector body 1 inside the vacuum chamber 100; S2: Connect the heating heat transfer rod 2 to the fixture plate 9 and extend it through the sealing window 3 into the internal chamber of the vacuum chamber 100 to be electrically connected to the helium detection box body 1; at the same time, the fixture plate 9 is sealed to the sealing surface 4. S3: Connect the helium detector to the vacuum chamber and use the helium detector to evacuate and monitor the vacuum level; the helium detector is an existing general-purpose device.

[0059] S4: Heat transfer rods are heated to transfer heat. S5: Inject helium gas into key areas of the cavity sealing surface to achieve high-temperature helium detection of the sealing surface. General-purpose helium equipment is used for helium injection.

[0060] This high-temperature helium detection device and method for the vacuum chamber sealing surface achieves higher heat transfer efficiency, more intelligent temperature monitoring, and convenient loading and unloading of the heating rod by heating inside the vacuum chamber, wireless temperature sensing, and a heating heat transfer rod structure.

[0061] The heating rod structure is designed to be easily installed and disassembled by screws onto the helium detector fixture plate 9. An internal heating method is employed. The vacuum chamber is evacuated and its vacuum level is monitored by a helium detector, ensuring a vacuum state within the chamber. The very low thermal conductivity of a vacuum state allows the heat generated by the heating rod to be primarily transferred to the vacuum chamber and the helium detector fixture plate, significantly improving heating efficiency. Wireless temperature sensing is used. The device consists of a lithium battery, a switching power supply, a signal processor, a temperature sensor, a Bluetooth module, a relay, the heating rod, and the heat transfer structure. The lithium battery serves as the power source. The switching power supply regulates and stably outputs the lithium battery's energy to the temperature sensor, signal processor, Bluetooth module, relay, and heating rod. The signal processor receives the signal from the temperature sensor and transmits it to a receiver outside the chamber via the Bluetooth module, enabling real-time temperature monitoring. This method is more stable and intelligent than traditional temperature gun monitoring.

[0062] The high-temperature helium detector for the vacuum chamber sealing surface described in the above embodiments, by embedding a heating heat transfer rod inside the vacuum chamber, allows the heat generated by the heating rod to be directly transferred to the sealing surface of the vacuum chamber, reducing heat waste caused by heat convection, increasing temperature rise, and improving heating efficiency. By placing an aluminum powder layer between the heating rod and the heat transfer rod, the air gap between them is reduced, utilizing the better heat transfer properties of metal to transfer heat. With the inclusion of a wireless module, the controller can communicate wirelessly with an external receiver, eliminating the need for wiring harnesses and improving deployment flexibility.

[0063] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Other variations and modifications may be made without departing from the technical solutions described in the claims.

Claims

1. A high-temperature helium detection device for a vacuum cavity sealing surface, characterized in that: The device includes a helium detection box body (1), a fixture plate (9), and a heating heat transfer rod (2). The fixture plate (9) is sealed and fitted to the test sealing surface of the vacuum cavity with a sealing window. The heating heat transfer rod (2) is connected to the fixture plate (9) and extends through the sealing window into the internal chamber of the vacuum cavity, where it is electrically connected to the helium detection box body (1).

2. The high-temperature helium detection device for the vacuum cavity sealing surface according to claim 1, characterized in that: The heating heat transfer rod (2) includes a heating rod (5) and a heat transfer rod (6) nested together. One end face of the heat transfer rod (6) is attached to the surface of the fixture plate (9), and the other end face of the heat transfer rod (6) is recessed to form a heat transfer groove (7). The heating rod (5) is inserted into the heat transfer groove (7) and transfers heat. The direction of heat transfer is that the heating rod (5) passes through the heat transfer rod (6) and the fixture plate (9) to reach the sealing surface of the vacuum cavity.

3. The high-temperature helium detection device for the vacuum cavity sealing surface according to claim 2, characterized in that: The heat is transferred by thermal conduction, and at least part of the outer surface of the heating rod (5) is in contact with the surface of the heat transfer groove (7).

4. The high-temperature helium detection device for the vacuum cavity sealing surface according to claim 3, characterized in that: Aluminum powder is also filled between the heat transfer groove (7) and the heating rod (5), and an annular aluminum powder layer (8) is formed around the heating rod (5).

5. The high-temperature helium detection device for the vacuum cavity sealing surface according to claim 2, characterized in that: The heat transfer rod (6) is connected to the fixture plate (9) by fasteners, and thermal grease is applied between the heat transfer rod (6) and the fixture plate (9) to form a thermal grease layer (28).

6. The high-temperature helium detection device for the sealing surface of a vacuum cavity according to claim 2, characterized in that: A first electrical conductor (15) is embedded in the heat transfer rod (6), and the first electrical conductor (15) extends to the outside of the heat transfer groove (7) and the heat transfer rod (6); a second electrical conductor (16) is embedded in the fixture plate (9), and the second electrical conductor (16) extends through the surface of the fixture plate (9) and has an electrode (17) on the outer surface of the fixture plate away from the vacuum cavity.

7. The high-temperature helium detection device for the sealing surface of a vacuum cavity according to claim 6, characterized in that: When the heat transfer rod (6) is installed on the fixture plate (9), the first electrical conductor (15) is connected to and electrically connected to the second electrical conductor (16). The heating rod (5) is electrically connected to the first electrical conductor (15). There are two sets of first electrical conductors (15) and second electrical conductors (16). The electrodes (17) of the two sets of second electrical conductors (16) are connected to the power source to form a closed loop that supplies power to the heating rod.

8. The high-temperature helium detection device for the sealing surface of a vacuum cavity according to any one of claims 1 to 7, characterized in that: The helium detection box body is provided with a temperature sensor (11) and a controller (12) on its side wall for detecting the surface temperature of the fixture plate. The temperature sensor (11) and the controller (12) are electrically connected to an external receiver to display the temperature signal.

9. The high-temperature helium detection device for the sealing surface of a vacuum cavity according to claim 8, characterized in that: It also includes a wireless module (14), through which the controller (12) communicates with the receiver; the wireless module (14) adopts the Bluetooth protocol.

10. A method for high-temperature helium detection of a vacuum cavity sealing surface, characterized in that: The device employs the high-temperature helium detector for the vacuum cavity sealing surface as described in any one of claims 1 to 9, and includes the following steps: S1: Place the helium detector box inside the vacuum chamber; S2: Connect the heating rod to the fixture plate and extend it through the sealing window into the internal chamber of the vacuum chamber to make an electrical connection with the helium detection box body; at the same time, the fixture plate is sealed to the sealing surface. S3: Connect the helium detector to the vacuum chamber, and use the helium detector to evacuate and monitor the vacuum level; S4: Heat transfer rods are heated to transfer heat. S5: Inject helium gas into key parts of the cavity sealing surface to achieve high-temperature helium detection of the sealing surface.

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