Chamber recovery method and semiconductor process equipment
By acquiring and determining the matching status of parameter values for chamber services in semiconductor process equipment, and selecting services to be executed in parallel, the problem of excessively long chamber reset time is solved, and an efficient chamber recovery process is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
- Filing Date
- 2024-11-05
- Publication Date
- 2026-05-08
AI Technical Summary
In the existing technology, during the chamber re-running process of semiconductor process equipment, all services in the service list need to be executed once, resulting in prolonged re-running time and low efficiency.
By obtaining the current parameter values of each service in the preset steady-state model, it is determined whether there are services with mismatched parameter values, and services to be executed are selected. These services are then executed in batches according to their impact to reduce the number of services to be executed. A deep search algorithm is used to execute some services in parallel, and alarms are output and the process continues after the alarms are cleared.
It shortened the reactivation time, improved reactivation efficiency, reduced unnecessary service execution, and optimized the stable recovery process of the chamber.
Smart Images
Figure CN122000262A_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of semiconductor technology, and in particular relates to a chamber reassembly method and semiconductor process equipment. Background Technology
[0002] In the semiconductor manufacturing field, after a period of use, impurities may accumulate in the chambers of semiconductor process equipment (such as etching equipment), or when a series of problems such as fragmentation occur in the chambers, field engineers need to manually open and clean the chambers. After the cleaning operation is completed, the engineers will use Auto Process (AutoPro) software to perform a re-run operation on the chambers so that the chambers can reach a stable state after re-run.
[0003] In related technologies, when AutoPro software performs a chamber restart operation, it executes services A, B, C, and D sequentially according to a user-pre-edited serial service list, such as service A, service B, service C, and service D. However, in real-world scenarios, the current state of the chamber may no longer require a service before it is executed. Therefore, executing all services in the service list once prolongs the restart time and reduces restart efficiency. Summary of the Invention
[0004] The purpose of this application is to provide a chamber re-running method and semiconductor process equipment to solve the problem in related technologies where all services in the service list are executed once, which prolongs the re-running time and reduces the re-running efficiency.
[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions: In a first aspect, embodiments of this application provide a chamber reactivation method, comprising: after initiating the reactivation process, obtaining the current parameter values of each service in a preset steady-state model, wherein the steady-state model includes the ideal parameter values of each service; determining whether there are services whose current parameter values and ideal parameter values do not match; if there are such services, identifying them as services to be executed; determining the target service among the services to be executed based on the influence of each service to be executed; executing the target service; if there are unexecuted services among the services to be executed, obtaining the current parameter values of the unexecuted services, and returning to the step of determining whether there are such services whose current parameter values and ideal parameter values do not match.
[0006] In a second aspect, embodiments of this application provide a semiconductor process apparatus, including: a controller and a plurality of hardware modules connected to the controller, the plurality of hardware modules including a chamber and a gas, the controller including at least one processor and at least one memory, the memory storing a computer program, the computer program being executed by the processor to implement the steps of the chamber reactivation method as described in the first aspect above.
[0007] The above-described technical solutions adopted in the embodiments of this application can achieve the following beneficial effects: In this embodiment of the application, when reactivating a chamber, after initiating the reactivation process, the current parameter values of each service in a preset steady-state model are obtained. The steady-state model includes the ideal parameter values of each service. It is determined whether there are services whose current parameter values do not match their ideal parameter values. If there are mismatched services, they are identified as services to be executed. Based on the influence of each service to be executed, the target service among the services to be executed is determined and executed. If there are unexecuted services among the services to be executed, the current parameter values of the unexecuted services are obtained, and the process returns to the step of determining whether there are services whose current parameter values do not match their ideal parameter values. By determining whether the current parameter values and ideal parameter values of each service match, this embodiment of the application can filter out the services that need to be executed (i.e., services to be executed). The services to be executed are executed in batches according to their influence. After each batch of services is executed, the unexecuted services are matched and filtered again. This achieves the goal of selecting some services to be executed based on the status of the machine, reducing the number of services to be executed, shortening the reactivation time, and improving the reactivation efficiency. Attached Figure Description
[0008] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 A schematic diagram of the services and modules involved in chamber re-operation; Figure 2 A schematic flowchart of a chamber re-operation method provided for one embodiment of this application; Figure 3 A schematic flowchart of a chamber re-operation method provided for another embodiment of this application; Figure 4 A schematic diagram of a depth search algorithm provided for one embodiment of this application; Figure 5 A schematic diagram of the overall process of a chamber re-operation method provided for another embodiment of this application; Figure 6 This is a schematic diagram of the structure of a semiconductor process apparatus provided in one embodiment of this application. Detailed Implementation
[0009] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0010] The terms "first," "second," etc., used in this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein. Furthermore, "and / or" in this application indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship. It should be noted that all data involved in this application was obtained with the user's authorization.
[0011] In the semiconductor manufacturing field, after a period of use, impurities may accumulate in the chambers of semiconductor process equipment (such as etching equipment), or when a series of problems such as fragmentation occur in the chambers, field engineers need to manually open and clean the chambers. After the cleaning operation is completed, the engineers will use AutoPro software to perform a reactivation operation on the chambers so that the chambers can reach a stable state after reactivation.
[0012] In related technologies, when AutoPro software performs a reactivation operation on a chamber, it executes services A, B, C, and D sequentially according to a pre-edited serial service list, such as service A, service B, service C, and service D.
[0013] The services included in the service list are mainly divided into the following categories: 1) Testing services: such as leak testing, temperature testing, etching testing, power testing, etc.
[0014] 2) Cleaning services: such as gas purging, recipe purging / cleaning, nitrogen purging, etc.
[0015] 3) Calibration services: such as mass flow controller (MFC) calibration, radio frequency (RF) calibration, radio frequency power amplifier (RFPA) calibration, infrared (IR) calibration, and BioChem Vacuum Center (BVC) calibration.
[0016] 4) Power services: such as power settings for source radio frequency (SRF) or bias radio frequency (BRF), power matching, etc.
[0017] Each service targets a different hardware module, for example... Figure 1 As shown: 1) Leak testing services primarily target hardware modules such as turbochargers, dry pumps, gas systems, and chambers.
[0018] 2) The Recipe Clean service mainly targets hardware modules such as Gas, BRF, SRF, and Chamber.
[0019] 3) The temperature (Temp) service mainly targets hardware modules such as Chamber and Chiller.
[0020] 4) The Chuck / Pin service mainly targets hardware modules such as electrostatic Chuck (ESC).
[0021] 5) The calibration service mainly targets hardware modules such as BRF, SRF, Gas, and ESC.
[0022] 6) The Power service primarily targets hardware modules such as SRF and BRF.
[0023] For example, in a real-world scenario, when AutoPro software performs a chamber restart operation, the services executed sequentially may be: hardware module initialization → leak rate test → temperature setting → pressure setting → process test → cleaning service, etc.
[0024] However, during the sequential execution of services in AutoPro software, the current state of the chamber may no longer require the execution of a certain service before it is performed. Therefore, this method of executing all services in the service list once prolongs the rework time and reduces rework efficiency. To address this issue, this application proposes a chamber rework method, semiconductor process equipment, and storage medium to solve the problem of prolonged rework time and reduced rework efficiency caused by executing all services in the service list once in the related technologies.
[0025] The technical solutions provided by the various embodiments of this application are described in detail below with reference to the accompanying drawings.
[0026] Figure 2 This is a schematic flowchart of a chamber re-operation method provided as an embodiment of this application. Figure 2 As shown, the chamber reactivation method of this application embodiment may specifically include the following steps: S201: After starting the restart process, obtain the current parameter values of each service in the preset steady-state model. The steady-state model includes the ideal parameter values of each service.
[0027] In this embodiment of the application, the execution subject of the chamber re-machine method is a controller, which can be set in the host computer and / or slave computer of the semiconductor process equipment (such as etching equipment).
[0028] The steady-state model in this embodiment is the Advanced Process Control (APC) steady-state model pre-created by the user. This steady-state model is obtained by the user based on a series of set values given by the chamber steady-state model, as shown in Table 1. When the machine is under ideal (or stable) conditions, different models collect the parameters of each service of the machine, and then create different ideal parameter model groups based on different machines (as shown in the Ideal Value in Table 1). For example, when the machine is under stable conditions, the parameter value of Temp1 is 100 (±5), the parameter value of Power1 is 800 (±5), ... After the machine is reset (i.e., the hardware module is initialized), the parameter value of Temp1 will become room temperature 30, the parameter value of Power1 will become 0 watts, etc. Running the chip directly will have a serious impact on the chip. Therefore, it is necessary to execute a series of services (i.e., the services corresponding to the Service Type in Table 1) to make the various functions of the machine reach a steady state.
[0029]
[0030] It should be noted that because the leak testing of the chamber and gas involves safety standards, the corresponding service must be performed first.
[0031] Taking the use of AutoPro software to perform a chamber reset operation as an example, after starting the AutoPro software, it is necessary to first initialize each hardware module in the semiconductor process equipment (i.e., the corresponding modules in Module in Table 1), and then test the leakage rate of the chamber and gas in the hardware module, that is, to execute the pressure test (Pressure Leak) service and the gas leakage test (Gas Leak) service. After the test is completed, the current parameter values of other services in the steady-state model are obtained (as shown in the Current Value in Table 1).
[0032] The current parameter value, i.e. the parameter value at the current moment, may be different depending on when it is obtained.
[0033] S202, determine if there is a service where the current parameter value and the ideal parameter value do not match.
[0034] In this embodiment, the current parameter values and ideal parameter values of each service in the steady-state model are compared. Taking the temperature setting service in the chamber as an example, assuming the current parameter value is 80 and the ideal parameter value is 75 (±10), it is determined that the current parameter value and the ideal parameter value of the service match.
[0035] S203 If there is no service whose current parameter value does not match the ideal parameter value, the reactivation process ends.
[0036] In this embodiment, if there is no service whose current parameter value and ideal parameter value do not match, that is, if the current parameter value and ideal parameter value of all services match, it means that the machine has reached a stable state and there is no need to execute the service. Therefore, the restart process ends, that is, the AutoPro software process is terminated.
[0037] S204. If there is a service whose current parameter value does not match the ideal parameter value, then the service that does not match will be identified as a service to be executed.
[0038] In this embodiment, if there is a service whose current parameter value and ideal parameter value do not match, the service whose current parameter value and ideal parameter value match will be removed, and the remaining mismatched service will be determined as the service to be executed.
[0039] S205, Based on the impact of each service to be executed, determine the target service among the services to be executed.
[0040] In this application embodiment, the degree of influence refers to whether the execution of the current service will affect the changes of other parameter values besides the parameter value corresponding to the service. For example, the execution of the related service for Flow detection will not affect the changes of parameter values such as Power and Temp.
[0041] The smaller the impact, the higher the priority. Based on the priority of each service to be executed, at least one service is designated as the target service. The target service is the service that is executed first.
[0042] S206, Execute target service.
[0043] S207, If there are unexecuted services among the services to be executed, obtain the current parameter values of the unexecuted services. Return to step S202.
[0044] In this embodiment, the services that have already been executed are removed from the list of services to be executed determined in step S204, and the current parameter values of the remaining unexecuted services are obtained. The process returns to step S202, where the ideal parameter values of the current parameter values of the unexecuted services are matched and determined.
[0045] In summary, the chamber restart method of this application, when restarting a chamber, after initiating the restart process, obtains the current parameter values of each service in a preset steady-state model. The steady-state model includes the ideal parameter values of each service. It determines whether there are services whose current parameter values do not match the ideal parameter values. If there are mismatched services, they are identified as services to be executed. Based on the influence of each service to be executed, the target service among the services to be executed is determined and executed. If there are unexecuted services among the services to be executed, the current parameter values of the unexecuted services are obtained, and the process returns to the step of determining whether there are services whose current parameter values do not match the ideal parameter values. By determining whether the current parameter values and ideal parameter values of each service match, this application embodiment can filter out the services that need to be executed (i.e., services to be executed). The services to be executed are executed in batches according to their influence. After each batch of services is executed, the unexecuted services are matched and filtered again. This achieves the goal of selecting some services to be executed based on the status of the machine, reducing the number of services to be executed, shortening the restart time, and improving the restart efficiency.
[0046] Figure 3 This is a schematic flowchart of a chamber re-operation method provided for another embodiment of this application. Figure 3 As shown, in Figure 2 Based on the illustrated embodiments, the chamber reactivation method of this application may specifically include the following steps: S301: After starting the restart process, obtain the current parameter values of each service in the preset steady-state model. The steady-state model includes the ideal parameter values of each service.
[0047] S302, determine if there is a service where the current parameter value and the ideal parameter value do not match.
[0048] S303 If there is no service whose current parameter value does not match the ideal parameter value, the reactivation process ends.
[0049] S304. If there is a service whose current parameter value does not match the ideal parameter value, then the service that does not match will be identified as a service to be executed.
[0050] In this embodiment, steps S301-S304 are the same as steps S201-S204 in the above embodiment, and will not be repeated here.
[0051] Considering the long execution time of serial services, some services can be executed in parallel. Correspondingly, step S205 in the above embodiment, "determine the target service among the services to be executed according to the influence of each service to be executed," may specifically include the following steps S305-S307.
[0052] S305: Sort the services to be executed in ascending order of their impact.
[0053] In this embodiment of the application, a deep search algorithm can be used to divide each service to be executed into multiple service groups, each service group including at least one service to be executed, and the service in one of the service groups is identified as the target service.
[0054] Specifically, the services to be executed will be sorted in order of their impact from smallest to largest.
[0055] S306: The service that appears first in the order of execution is selected as the baseline service.
[0056] In the embodiments of this application, such as Figure 4 As shown, assuming the services in the steady-state model are arranged in ascending order of influence, they are service A, service B, service C, service D, service E, ..., service Z. After machine initialization, it is determined that the parameter values of services C, E, and M match. Therefore, the remaining mismatched services: service A, service B, service D, service F, ..., service L, service N, ..., service Z, are identified as services to be executed. Service A, which is ranked first, is determined as the baseline service.
[0057] S307, among the services to be executed, the service to be executed and the base service that meet the parallel conditions with the base service are identified as target services. The parallel conditions include that there is no hardware conflict when the service to be executed and the base service are executed.
[0058] In this embodiment of the application, it is determined whether there is a hardware conflict between each service to be executed and the base service. If there is no hardware conflict, both the service to be executed and the base service are determined as the target service.
[0059] For example, when service A is executed, it is necessary to operate hardware module A to reduce power, and when service B is executed, it is necessary to operate hardware module A to increase power. Therefore, if service A and service B are executed at the same time, it will cause abnormalities such as process deadlock, interruption, and interlock.
[0060] Specific examples are as follows: Service A is for detecting Gas Flow, and Service B is for testing Gas Leak. Service A needs to open the Gas valve, and Service B needs to close the Gas valve. Therefore, when Services A and B are executed simultaneously, their execution flows conflict, and they cannot be executed at the same time. Service C requires setting the power supply when it is executed, while Service D requires 0 power, etc.
[0061] It should be noted here that the parallel conditions may also include: the difference between the average completion time of the service to be executed and the baseline service is less than a preset difference threshold (e.g., 5 minutes), so as to ensure that the overall completion time of the service group is not affected by a very small number of services.
[0062] Still with Figure 4 For example, for the baseline service A, assuming that service B does not meet the parallel condition with service A, service D and service F both meet the parallel condition with service A, ..., service N+ (service N, ..., service Z) does not meet the parallel condition with service A, then service A, service D, service F, ... are determined as service group 1, and each service in service group 1 is determined as the target service.
[0063] For the remaining services to be executed, service group 2, ..., service group n can also be determined in the same way as described above.
[0064] Correspondingly, step S206 "execute target service" in the above embodiment may specifically include the following step S308.
[0065] S308 executes each target service in parallel.
[0066] In this embodiment of the application, each target service is executed simultaneously, and after all target services have been executed, it is determined whether there are any unexecuted services among the services to be executed.
[0067] S309, If there are unexecuted services among the services to be executed, obtain the current parameter values of the unexecuted services. Return to step S202.
[0068] In this embodiment, step S309 is the same as step S207 in the above embodiment, and will not be described again here.
[0069] Furthermore, the chamber reactivation method in this application embodiment may also include the following steps: if the target service fails to execute, output a first alarm message; based on the first alarm message, continue to execute the target service; based on the first alarm message, execute an associated service corresponding to the target service, wherein the associated service is a service other than the target service among the services to be executed and affects the target service; if the target service still fails to execute after executing the associated service, output a notification message for manual troubleshooting of the hardware module.
[0070] Specifically, during the execution of each target service, if a target service fails, a first alarm message indicating the failure is output. After the first alarm message is output, the target service continues to execute. If, after the first alarm message is output, there are services in other service groups that affect the target service (i.e., related services), the related service is executed to clear the alarm. If, after executing the related service, the target service still fails and the first alarm message is still output, a notification message is output to instruct manual inspection of the hardware module to clear the alarm.
[0071] If the number of times the first alarm message is output exceeds the preset threshold, such as 10 times, the restart process ends, that is, the AutoPro software process is terminated.
[0072] Furthermore, the chamber reactivation method of this application embodiment may also include the following steps: if the hardware module initialization fails, output a second alarm message and output a notification message for manual troubleshooting of the hardware module.
[0073] Specifically, during the initialization process of each hardware module, if the initialization of a certain hardware module fails, a second alarm message indicating the initialization failure is output, along with a notification message to instruct manual inspection of the hardware module to clear the alarm. After the second alarm message is output, the initialization of that hardware module continues.
[0074] If the number of times the second alarm message is output exceeds the preset threshold, such as 10 times, the restart process ends, that is, the AutoPro software process is terminated.
[0075] Furthermore, the chamber reactivation method in this application embodiment may also include the following steps: if the leak rate test fails, output a third alarm message and output a notification message for manual inspection of the hardware module.
[0076] Specifically, during the leak rate test of the chamber and gas, if the leak rate test fails, a third alarm message indicating the failure is output, along with a notification message to manually check the hardware module to clear the alarm. After the third alarm message is output, the leak rate test continues for that chamber or gas.
[0077] If the number of times the third alarm message is output exceeds the preset threshold, such as 10 times, the reactivation process ends, that is, the AutoPro software process is terminated.
[0078] In summary, the chamber restart method of this application can filter out the services to be executed (i.e., services to be executed) by judging whether the current parameter values and ideal parameter values of each service match. The services to be executed are then executed in batches according to their impact. After each batch of services is completed, the unexecuted services are matched and filtered again. This achieves the goal of selecting some services to be executed based on the machine's status, reducing the number of services executed, shortening restart time, and improving restart efficiency. When there are multiple services in each batch, they can be executed in parallel, further shortening restart time. Alarms are output during hardware module initialization, leak rate testing, and target service failure, and the restart process continues after the alarms are cleared. Compared to related technologies where the entire restart process restarts after an alarm, this further shortens restart time and improves restart efficiency.
[0079] To clearly illustrate the chamber reactivation method of this application embodiment, the following is combined with... Figure 5 The overall process of the chamber reactivation method according to the embodiments of this application is described in detail. For example... Figure 5 As shown, the chamber reactivation method of this application embodiment may specifically include the following steps: S501, AutoPro software restart process initiated.
[0080] S502 initializes the hardware module.
[0081] S503, determine whether the initialization was successful. If not, proceed to step S504. If yes, proceed to step S506.
[0082] S504 outputs the second alarm message.
[0083] S505, determine if the number of outputs exceeds 10. If yes, proceed to step S518. If no, return to step S502.
[0084] S506 tests the leakage rate of chambers and gases.
[0085] S507, determine whether the test is qualified. If not, proceed to step S508. If yes, proceed to step S510.
[0086] S508 outputs the third alarm message.
[0087] S509, determine if the number of outputs exceeds 10. If yes, proceed to step S518. If no, return to step S506.
[0088] S510, callback to the current parameter values of services that have not yet been executed.
[0089] S511, determine if there is a mismatched service. If not, proceed to step S518. If yes, proceed to step S512.
[0090] S512 uses a deep search algorithm to determine the target service among the services to be executed.
[0091] S513 executes target services in parallel.
[0092] S514, determine whether the target service was executed successfully. If yes, return to step S510. If no, proceed to step S515.
[0093] S515 outputs the first alarm message.
[0094] S516, determine if the number of outputs exceeds 10. If yes, proceed to step S518. If no, return to step S513 and proceed to step S517.
[0095] S517, Execute the associated service corresponding to the target service.
[0096] S518, end the AutoPro software reactivation process.
[0097] This application also provides a semiconductor process apparatus. For example... Figure 6 As shown, the semiconductor process equipment 600 may specifically include: a controller 601 and a plurality of hardware modules connected to the controller 601. The plurality of hardware modules include a chamber 602 and a gas 603. The controller 601 includes at least one processor and at least one memory. The memory stores a computer program. When the computer program is executed by the processor, it implements the steps of any of the chamber reactivation method embodiments described above.
[0098] The semiconductor process equipment in this application can filter out the services to be executed (i.e., services to be executed) by determining whether the current parameter values and ideal parameter values of each service match. The services to be executed are then executed in batches according to their impact. After each batch of services is completed, the unexecuted services are matched and filtered again. This achieves partial service execution based on the machine's status, reducing the number of services executed, shortening the rework time, and improving rework efficiency. When there are multiple services in each batch, they can be executed in parallel, further shortening the rework time. Alarms are output during hardware module initialization, leak rate testing, and target service failure. The rework process continues after the alarms are cleared. Compared to related technologies where the entire rework process restarts after an alarm, this further shortens the rework time and improves rework efficiency.
[0099] This application also proposes a readable storage medium storing one or more computer programs, the one or more computer programs including instructions. When the program or instructions are executed by a processor in a semiconductor process apparatus including multiple applications, the processor in the semiconductor process apparatus is able to execute the various processes of the above-described chamber resetting method embodiments, and is specifically used to execute the steps of any of the above-described chamber resetting method embodiments.
[0100] The readable storage medium of this application embodiment can filter out the services to be executed (i.e., services to be executed) by judging whether the current parameter values and ideal parameter values of each service match. The services to be executed are then executed in batches according to their impact. After each batch of services is completed, the unexecuted services are matched and filtered again. This achieves the goal of selecting some services for execution based on the machine's status, reducing the number of services executed, shortening the recovery time, and improving recovery efficiency. When there are multiple services in each batch, they can be executed in parallel, further shortening the recovery time. Alarms are output during hardware module initialization, leak rate testing, and target service failure. After the alarms are cleared, the recovery process continues. Compared to related technologies where the entire recovery process restarts after an alarm, this further shortens the recovery time and improves recovery efficiency.
[0101] The systems, devices, modules, or units described in the above embodiments can be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, a computer can be, for example, a personal computer, laptop computer, cellular phone, camera phone, smartphone, personal digital assistant, media player, navigation device, email device, game console, tablet computer, wearable device, or any combination of these devices.
[0102] For ease of description, the above devices are described separately by function as various units. Of course, in implementing this application, the functions of each unit can be implemented in one or more software and / or hardware.
[0103] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.
[0104] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.
[0105] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.
[0106] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.
[0107] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.
[0108] Memory may include non-persistent storage in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.
[0109] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.
[0110] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.
[0111] This application can be described in the general context of computer-executable instructions, such as program modules, that are executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc., that perform a specific task or implement a specific abstract data type. This application can also be practiced in distributed computing environments where tasks are performed by remote processing devices connected via a communication network. In distributed computing environments, program modules can reside in local and remote computer storage media, including storage devices.
[0112] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.
[0113] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.
Claims
1. A method for chamber re-operation, characterized in that, include: After initiating the restart process, the current parameter values of each service in the preset steady-state model are obtained, and the steady-state model includes the ideal parameter values of each service. Determine whether there is a service where the current parameter value and the ideal parameter value do not match; If there is a mismatched service, then the mismatched service will be identified as a service to be executed. Based on the impact of each of the services to be executed, the target service among the services to be executed is determined; Execute the target service; If there are unexecuted services among the services to be executed, then obtain the current parameter value of the unexecuted service and return the step of determining whether there is a service whose current parameter value and ideal parameter value do not match.
2. The method according to claim 1, characterized in that, The step of determining the target service among the services to be executed based on the impact of each of the services to be executed includes: The services to be executed are sorted in ascending order of their impact. The service to be executed that appears first in the sorted list is designated as the baseline service. The service to be executed and the benchmark service that satisfy the parallel conditions with the benchmark service are identified as the target service. The parallel conditions include that there is no hardware conflict when the service to be executed and the benchmark service are executed. The execution of the target service includes: Each of the target services is executed in parallel.
3. The method according to claim 2, characterized in that, The parallel conditions also include: The difference between the average completion time of the service to be executed and the benchmark service is less than a preset difference threshold.
4. The method according to claim 1, characterized in that, Also includes: If the target service fails to execute, the first alarm message will be output. Based on the first alarm information, continue to execute the target service; Based on the first alarm information, execute the associated service corresponding to the target service. The associated service is a service other than the target service among the services to be executed, and that affects the target service. If the target service still fails to execute after the associated service is executed, a notification message for manual troubleshooting of the hardware module will be output.
5. The method according to claim 1, characterized in that, Before obtaining the current parameter values of each service in the preset steady-state model, the method further includes: Initialize each hardware module in the semiconductor process equipment; The leakage rate of the chambers and gas in the hardware module was tested.
6. The method according to claim 5, characterized in that, Also includes: If the hardware module fails to initialize, a second alarm message will be output, along with a notification message for manual inspection of the hardware module.
7. The method according to claim 5, characterized in that, Also includes: If the leak rate test fails, a third alarm message will be output, along with a notification message for manual inspection of the hardware module.
8. The method according to any one of claims 4, 6 and 7, characterized in that, Also includes If the number of times the alarm message is output exceeds a preset threshold, the reactivation process will end.
9. The method according to claim 1, characterized in that, Also includes: If there is no service whose current parameter value and ideal parameter value do not match, then the reactivation process ends.
10. A semiconductor process apparatus, characterized in that, include: A controller and a plurality of hardware modules connected to the controller, the plurality of hardware modules including a chamber and a gas, the controller including at least one processor and at least one memory, the memory storing a computer program, the computer program being executed by the processor to implement the steps of the method as described in any one of claims 1-9.