Metal ceramic bonding type cBN ultrathin scribing sheet and preparation method thereof

Abstract

The invention provides a metal ceramic bonding type cBN ultrathin scribing sheet and a preparation method thereof, the cBN ultrathin scribing sheet is prepared from a mixture and a binder, and the volume ratio of the mixture to the binder is (3-4): (4-3); the mixture is composed of the following components in percentage by volume: 10%-25% of cBN single crystal powder, 20%-40% of ceramic powder and the balance of metal powder, and the sum of the volume fractions of the components is 100%; the metal powder comprises one or more of Cu, Sn, Ti, Ni, Fe and Co; the ceramic powder comprises one or more than one of SiC, Al2O3, TiN, TiC and TiB2. The cBN single crystal powder is adopted as a basic grinding material, the metal phase and the ceramic phase are used as a composite binding agent, the metal phase guarantees the strength and the abrasion resistance of the cBN ultrathin scribing piece, the ceramic phase enhances the self-sharpening performance, the service life of the obtained cBN ultrathin scribing piece is prolonged, and the grinding performance is further enhanced.

Description

Technical Field

[0001] This invention belongs to the field of powder metallurgy and additive manufacturing technology, and relates to cBN ultrathin dicing, specifically to a metal-ceramic bonded cBN ultrathin dicing and its preparation method. Background Technology

[0002] With the development of science and technology, cBN (cubic boron carbide) ultrathin scribers have extremely wide application prospects in electronic circuit boards and metal material processing. However, the cBN ultrathin scribers currently on the market cannot meet the increasingly high industry requirements. cBN ultrathin scribers operate at extremely high speeds, often reaching 30,000 rpm or even higher. According to the type of binder, cBN ultrathin scribers can be divided into ceramic type, resin type and metal type. Among them, ceramic type cBN ultrathin scribers have low strength and cannot withstand extremely high speeds, often disintegrating at 15,000 rpm; while metal type cBN ultrathin scribers have poor self-sharpening properties; resin type cBN ultrathin scribers have a short lifespan and are prone to softening at high temperatures.

[0003] Furthermore, current methods for preparing cBN ultrathin dicing wafers still have significant drawbacks: the most common sintering method requires first preparing a relatively thick grinding wheel, and then thinning it to the appropriate thickness through a thinning process. This method results in significant waste of raw materials, low efficiency, and the prepared grinding wheel is prone to uneven material distribution, affecting product quality. On the other hand, the electroplating method for preparing cBN ultrathin dicing wafers does not have strong holding power for cBN single crystal powder abrasives, and the electroplating solution is environmentally polluting. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a metal-ceramic bonded cBN ultrathin dicing sheet and its preparation method, thereby solving the technical problem that the dicing performance of existing cBN ultrathin dicing sheets needs further improvement.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution.

[0006] A metal-ceramic bonded cBN ultrathin dicing, wherein the cBN ultrathin dicing is made of a mixture and a binder, and the volume ratio of the mixture to the binder is (3-4):(4-3).

[0007] The mixture, by volume fraction, consists of the following components: 10%–25% cBN single crystal powder, 20%–40% ceramic powder, and the balance being metal powder, with the sum of the volume fractions of the components being 100%.

[0008] The metal powder includes one or more of Cu, Sn, Ti, Ni, Fe, and Co.

[0009] The ceramic powder includes one or more of SiC, Al2O3, TiN, TiC, and TiB2.

[0010] The present invention also has the following technical features.

[0011] Specifically, the cBN single crystal powder has a particle size of 100-400 mesh, the metal powder has a particle size of 200-800 mesh, and the ceramic powder has a particle size of 400-1600 mesh.

[0012] Specifically, the adhesive is made of the following components by mass: 10-30% polypropylene, 1-3% dioctyl phthalate, 3-5% stearic acid, 2-5% polyethyleneimine, and the balance being styrene-butadiene-styrene block copolymer, with the sum of the mass parts of the components being 100%.

[0013] This invention also protects a method for preparing cBN ultrathin dicings with a metal-ceramic binder as described above, the method specifically comprising the following steps:

[0014] Step 1, Secret Refining: Weigh cBN single crystal powder, metal powder and ceramic powder, and mix them with binder to obtain the internal mixing raw material; adjust the internal mixing temperature of the internal mixer to 170℃~210℃, add the internal mixing raw material when the temperature is raised to the internal mixing temperature and start timing, the internal mixing time is 40min~120min, and then obtain the internally mixed raw material.

[0015] Step 2, Granulation and Fiber Formation: The raw material obtained in step one after intensive mixing is put into a granulator for granulation. The granules are sorted by a sieve, and the fine particles with a particle size of 4 mesh or less are selected for drawing into filaments. The filaments are then added to a filament drawing machine for drawing into filaments to obtain filament-like printing material.

[0016] Step 3, print the green blank: A 3D model of the metal-ceramic bonded cBN ultrathin diced sheet is created in the computer. After setting the printing parameters of the 3D model, it is imported into the 3D printer. The filamentous printing material obtained in step two is used as the printing material of the 3D printer. The 3D printer is started and printing is performed to obtain the green body of the metal-ceramic bonded cBN ultrathin diced sheet.

[0017] Step 4, Remove Adhesive: The green blank obtained in step three is placed in a degreasing mold, and the binder in the green blank obtained in step three is removed by a degreasing furnace through a stepped heating and heat preservation method. Then it is cooled with the furnace to obtain a green blank after debinding.

[0018] Step 5, sintering: After removing the binder obtained in step four, the green body is placed in a sintering mold and sintered in a sintering furnace. After sintering, it is cooled with the furnace to obtain cBN ultrathin sheets with metal-ceramic binder.

[0019] Specifically, in step two, the operating temperature of the wire drawing machine is set to 170℃~210℃.

[0020] In step two, the diameter of the filamentous printing material is 1.7 to 2.0 mm.

[0021] Specifically, in step three, the printing parameters are: printing layer thickness 0.05-0.4mm, nozzle temperature 200-250℃, and platform temperature 80-110℃.

[0022] Specifically, in step four, the adhesive removal process is carried out in a degreasing furnace filled with hydrogen using a stepped heating and heat preservation method.

[0023] In step four, the specific steps of the stepped heating and holding process are as follows: From room temperature, heat to 170℃~230℃ for 20~60 minutes, then hold at 170℃~230℃ for 10~30 minutes; from 170℃~230℃, heat to 260℃~320℃ for 90~150 minutes, then hold at 260℃~320℃ for 15~60 minutes; from 260℃~320℃, heat to 340℃~380℃. At 0℃, the heating time is 50-120 min, and the temperature is held at 340℃-380℃ for 15-60 min; from 340℃-380℃ to 400℃-440℃, the heating time is 30-60 min, and the temperature is held at 400℃-440℃ for 15-60 min; from 400℃-440℃ to 500℃-550℃, the heating time is 70-120 min, and the temperature is held at 500℃-550℃ for 1-2 h.

[0024] Specifically, in step five, the protective atmosphere inside the sintering furnace during sintering is hydrogen.

[0025] In step five, the sintering pressure during sintering is 20 MPa to 60 MPa.

[0026] In step five, the sintering temperature and holding time during sintering are as follows: from room temperature to 480℃~530℃, the heating time is 1~10min, and the temperature is held at 480℃~530℃ for 1~5min; from 480℃~530℃ to 680℃~820℃, the heating time is 1~10min, and the temperature is held at 680℃~820℃ for 1~10min.

[0027] Compared with the prior art, the present invention has the following technical effects.

[0028] (I) This invention uses cBN single crystal powder as the basic abrasive and uses a metallic phase and a ceramic phase as a composite binder for cBN ultrathin scribes. The metallic phase ensures the strength and wear resistance of the cBN ultrathin scribes, while the addition of the ceramic phase enhances the self-sharpening property, thereby extending the service life of the manufactured cBN ultrathin scribes and further enhancing the grinding performance.

[0029] (II) This invention combines 3D printing technology with powder metallurgy, and then successfully applies the combined preparation method to the manufacture of cBN ultrathin diced sheets with metal-ceramic binders. Compared with traditional preparation processes, 3D printing technology has the advantages of more uniform raw material distribution, lower cost, higher production efficiency and better performance. It requires less manpower and has a higher degree of automation, which makes up for the uneven material distribution caused by direct powder spreading in traditional preparation processes and the waste of raw materials and low efficiency caused by subsequent thinning processes. At the same time, it also makes the entire preparation process more automated, providing a new direction for the production of cBN ultrathin diced sheets.

[0030] The specific content of the present invention will be further described in detail below with reference to the embodiments. Detailed Implementation

[0031] It should be noted that, unless otherwise specified, all equipment, methods and raw materials in this invention are commonly used in the art and are known in the prior art. For example, the internal mixer is a known internal mixer, the granulator is a known granulator, the wire drawing machine is a known wire drawing machine, the SiC is a known SiC, the ball milled cast iron QT-500 is a known ball milled cast iron QT-500, the TC4 titanium alloy is a known TC4 titanium alloy, and the 45# steel is a known 45# steel.

[0032] In this invention, room temperature refers to the ambient temperature during the production process, which is typically within the range of 20±10℃.

[0033] In this invention, the metal-ceramic binder refers to a composite binder composed of metal powder (metal phase) and ceramic powder (ceramic phase).

[0034] In the metal-ceramic binder-type cBN ultrathin diced sheets of the present invention, the thickness of the cBN ultrathin diced sheets is 0.3 mm to 0.5 mm.

[0035] In this invention, the polypropylene used is a commonly known polypropylene in the art, with a number-average molecular weight of 80,000. The dioctyl phthalate used is a commonly known dioctyl phthalate in the art. The stearic acid used is a commonly known stearic acid in the art, which is a saturated long-chain fatty acid with a straight-chain structure composed of 18 carbon atoms, and has the chemical formula C1. 17 H 35COOH. The polyethyleneimine used is a commonly known polyethyleneimine in the art, with a number-average molecular weight of 10,000. The styrene-butadiene-styrene block copolymer used is a commonly known styrene-butadiene-styrene block copolymer in the art, with a number-average molecular weight of 80,000.

[0036] In this invention, the metal-ceramic binder is composed of metal powder and ceramic powder. Among the metal powders, Cu and Sn are common elements in copper-based binders and are relatively inexpensive. Furthermore, copper has superior thermal conductivity among metals, effectively transferring heat away during the processing of metal materials. The addition of Ti or Ni to the binder further enhances the holding force between the binder and the cBN single-crystal powder. Among the ceramic powders, SiC and Al2O3 improve the self-sharpening properties of the cBN ultrathin dicing and also act as auxiliary cutting agents. TiN, SiC, and TiB2 can alleviate the bonding situation where the coefficients of thermal expansion differ significantly at the joint.

[0037] Following the above technical solution, specific embodiments of the present invention are given below. It should be noted that the present invention is not limited to the following specific embodiments, and all equivalent modifications made on the basis of the technical solution of the present invention fall within the protection scope of the present invention.

[0038] Example 1: This embodiment provides a method for preparing cBN ultrathin dicing sheets with a metal-ceramic binder, which specifically includes the following steps: Step 1, Secret Refining: Weigh cBN single crystal powder, metal powder and ceramic powder, and mix them with binder to obtain the internal mixing raw material; adjust the internal mixing temperature of the internal mixer to 200℃, add the internal mixing raw material when the temperature reaches the internal mixing temperature and start timing, the internal mixing time is 100min, and then obtain the internally mixed raw material.

[0039] The mixture comprises cBN single crystal powder, metal powder, and ceramic powder, with a volume ratio of 4:3 between the mixture and the binder. The mixture, by volume fraction, consists of the following components: 10% cBN single crystal powder, 27% ceramic powder, and the balance being metal powder, with a total volume fraction of 100%. The metal powder comprises Cu, Sn, and Ni, with a volume ratio of Cu:Sn:Ni = 54:15:3. The ceramic powder is Al₂O₃. The particle size of the cBN single crystal powder is 170–200 mesh, the metal powder is 270–325 mesh, and the ceramic powder is 400–500 mesh.

[0040] The adhesive, by weight, is made of the following components: 30% polypropylene, 3% dioctyl phthalate, 4% stearic acid, 3% polyethyleneimine, and the balance being styrene-butadiene-styrene block copolymer, the sum of the weights of the components being 100%.

[0041] In this embodiment, the cBN ultrathin scribing uses a metal-type binder as the main component to ensure the strength of the cBN ultrathin scribing, and adds an appropriate amount of ceramic powder to enhance the self-sharpening property of the cBN ultrathin scribing.

[0042] In this embodiment, the binder is crucial for ensuring the fabrication and quality of the filament printing material. The binder components include: styrene-butadiene-styrene block copolymer, which exhibits good and stable melt flowability, and during intensive mixing, simultaneously possesses excellent tensile strength and elasticity, ensuring the strength and flexibility of the filament printing material; polypropylene, which has good adhesion properties, effectively bonding metal powder, ceramic powder, and cBN single-crystal powder; dioctyl phthalate, which primarily acts as a plasticizer, effectively preventing the filament printing material from breaking during printing; and polyethyleneimine, a surfactant, which effectively improves the adhesion between the binder and the two powders; and stearic acid, a dispersant, preventing the cBN single-crystal powder, metal powder, and ceramic powder from agglomerating, ensuring the uniform distribution of various components in the filament printing material.

[0043] Step 2, Granulation and Fiber Formation: The raw material obtained in step one after mixing is put into a granulator for granulation. The granules are sorted by a sieve, and the fine particles with a particle size of 4 mesh or less are selected for drawing to obtain drawing particles. The obtained drawing particles are added to a drawing machine for drawing. The working temperature of the drawing machine is set to 200℃ to obtain a filament-like printing material with a diameter of 1.85mm.

[0044] Step 3, print the green blank: A 3D model of the metal-ceramic bonded cBN ultrathin diced sheet was created in the computer. After setting the printing parameters of the 3D model, it was imported into the 3D printer. The filamentous printing material obtained in step two was used as the printing material of the 3D printer. The 3D printer was started and printing was performed to obtain the green body of the metal-ceramic bonded cBN ultrathin diced sheet. The specific printing parameters were: printing layer thickness 0.2 mm, nozzle temperature 220℃, and platform temperature 90℃.

[0045] In this embodiment, the platform temperature is the surface temperature of the heated bed of the 3D printer.

[0046] In this embodiment, the method for creating the 3D model in the computer and the method for setting the parameters of the 3D model both adopt methods commonly known in the art. The 3D printer adopts a 3D printer commonly known in the art, and the method for importing the 3D model into the 3D printer adopts a method commonly known in the art.

[0047] Step 4, Remove Adhesive: The green body obtained in step three is placed in a degreasing mold and the binder in the green body is removed by a step-by-step heating and holding process in a degreasing furnace (with a hydrogen protective atmosphere). The green body is then cooled in the furnace to obtain a green body after debinding. The specific steps of the step-by-step heating and holding process are as follows: heating from room temperature to 190°C for 55 minutes and holding at 190°C for 25 minutes; heating from 190°C to 270°C for 140 minutes and holding at 270°C for 50 minutes; heating from 270°C to 350°C for 100 minutes and holding at 350°C for 50 minutes; heating from 350°C to 410°C for 60 minutes and holding at 410°C for 50 minutes; heating from 410°C to 540°C for 100 minutes and holding at 540°C for 2 hours.

[0048] In this embodiment, the degreasing mold is a commonly used degreasing mold known in the art, and the degreasing oven is a commonly used degreasing oven known in the art.

[0049] Step 5, sintering: The debonded green body obtained in step four was placed in a sintering mold and sintered in a sintering furnace. The protective atmosphere in the sintering furnace was hydrogen, and the sintering pressure was 30 MPa. The sintering temperature and holding time were as follows: from room temperature to 520℃, the heating time was 8 min, and the holding time was 4 min at 520℃; from 520℃ to 800℃, the heating time was 8 min, and the holding time was 8 min at 800℃. After sintering, the green body was cooled in the furnace, and finally, ultrathin cBN sheets with a metal-ceramic bond were obtained.

[0050] In this embodiment, the sintering mold is a commonly used sintering mold known in the art, and the sintering furnace is a commonly used sintering furnace known in the art.

[0051] This embodiment also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 40 mm, an inner diameter of 40 mm, and a thickness of 0.5 mm; the cBN ultrathin scribing is prepared using the cBN ultrathin scribing preparation method of this embodiment.

[0052] The cBN ultrathin dicing blade obtained in this embodiment was used to dicing spherical cast iron QT-500. The dicing depth was 0.4 mm, the dicing feed speed was 3 mm / s, and the rotation speed was 28000 rpm. The dicing force was reflected by the magnitude of the current. The dicing current was between 1.123 and 1.276 A, indicating that the dicing force was small and stable, and the dicing performance of the cBN ultrathin dicing blade was good.

[0053] In this embodiment, the ductile iron QT-500 used is the commonly known ductile iron QT-500 in the art, where "500" indicates a tensile strength ≥ 500MPa.

[0054] Example 2: This embodiment provides a method for preparing cBN ultrathin diced wafers with a metal-ceramic binder. This method is essentially the same as the method in Example 1, except that in step one, the volume ratio of the mixture to the binder is 1:1; the mixture, by volume fraction, consists of the following components: 15% cBN single crystal powder, 25.5% ceramic powder, and the remainder being metal powder, with a total volume fraction of 100%; the metal powder consists of Cu, Co, and Ti, with a volume ratio of Cu:Co:Ti = 45:9:5.5; the ceramic powder... The components are SiC and TiN, with a SiC:TiN ratio of 46:5; the cBN single crystal powder has a particle size of 230–270 mesh, the metal powder has a particle size of 460–540 mesh, and the ceramic powder has a particle size of 800–1000 mesh; the binder, by mass, is composed of the following components: 27% polypropylene, 2% dioctyl phthalate, 4% stearic acid, 2% polyethyleneimine, and the balance is styrene-butadiene-styrene block copolymer, with the sum of the mass parts of the components being 100%; the mixing temperature is 190℃, and the mixing time is 90 min. In step two, the working temperature of the wire drawing machine is set to 190℃, and the diameter of the filamentous printing material is 1.80 mm. In step three, the printing layer thickness is 0.3 mm, the nozzle temperature is 230℃, and the platform temperature is 95℃. In step four, the specific steps for the stepped heating and holding process are as follows: from room temperature to 200℃, the heating time is 40 minutes, and the temperature is held at 200℃ for 20 minutes; from 200℃ to 300℃, the heating time is 120 minutes, and the temperature is held at 300℃ for 30 minutes; from 300℃ to 360℃, the heating time is 60 minutes, and the temperature is held at 360℃ for 30 minutes; from 360℃ to 420℃, the heating time is 45 minutes, and the temperature is held at 420℃ for 40 minutes; from 420℃ to 530℃, the heating time is 90 minutes, and the temperature is held at 530℃ for 1.5 hours. In step five, the sintering pressure is 40 MPa; the sintering temperature and holding time during sintering are as follows: from room temperature to 500℃, the heating time is 6 min, and the holding time is 3 min at 500℃; from 500℃ to 770℃, the heating time is 6 min, and the holding time is 7 min at 770℃.

[0055] This embodiment also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 58 mm, an inner diameter of 40 mm, and a thickness of 0.4 mm; the cBN ultrathin scribing is prepared using the cBN ultrathin scribing preparation method of this embodiment.

[0056] The cBN ultrathin scriber obtained in this embodiment was used to scribe TC4 titanium alloy. The scribe depth was 0.2 mm, the scribe feed speed was 1 mm / s, and the rotation speed was 30,000 rpm. The scribe force was reflected by the current. The scribe current was between 1.591 and 1.664 A, which indicates that the scribe force was small and stable, and the scribe performance of the cBN ultrathin scriber was good.

[0057] Example 3: This embodiment provides a method for preparing cBN ultrathin diced wafers with a metal-ceramic binder. This method is essentially the same as the method in Example 1, except that in step one, the volume ratio of the mixture to the binder is 3:4; the mixture, by volume fraction, consists of the following components: 25% cBN single crystal powder, 30% ceramic powder, and the remainder being metal powder, with the sum of the volume fractions of the components being 100%; the metal powder consists of Cu, Sn, and Ti, with a volume ratio of Cu: Sn:Ti = 30:8:7; the ceramic powder composition is SiC and TiB2, SiC:TiB2 = 5:1; the cBN single crystal powder particle size is 325-400 mesh, the metal powder particle size is 650-800 mesh, and the ceramic powder particle size is 1100-1300 mesh; the binder, by mass, is composed of the following components: 22% polypropylene, 2% dioctyl phthalate, 2% stearic acid, 4% polyethyleneimine, and the balance is styrene-butadiene-styrene block copolymer, with the sum of the mass parts of the components being 100%; the mixing temperature is 180℃, and the mixing time is 75 min. In step two, the diameter of the filamentous printing material is 1.75 mm. In step three, the printing layer thickness is 0.4 mm, the nozzle temperature is 240℃, and the platform temperature is 100℃. In Step Four, the specific steps for the stepped heating and holding process are as follows: Heating from room temperature to 220℃ for 30 minutes, then holding at 220℃ for 10 minutes; heating from 220℃ to 310℃ for 100 minutes, then holding at 310℃ for 20 minutes; heating from 310℃ to 370℃ for 60 minutes, then holding at 370℃ for 20 minutes; heating from 370℃ to 430℃ for 40 minutes, then holding at 430℃ for 30 minutes; heating from 430℃ to 520℃ for 80 minutes, then holding at 520℃ for 1 hour. In Step Five, the sintering temperature and holding time during sintering are as follows: Heating from room temperature to 490℃ for 4 minutes, then holding at 490℃ for 2 minutes; heating from 490℃ to 730℃ for 4 minutes, then holding at 730℃ for 5 minutes.

[0058] This embodiment also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 56 mm, an inner diameter of 40 mm, and a thickness of 0.3 mm; the cBN ultrathin scribing is prepared using the cBN ultrathin scribing preparation method of this embodiment.

[0059] The cBN ultrathin scriber obtained in this embodiment was used to scribe 45 steel with a scribe depth of 0.6 mm, a scribe feed speed of 1 mm / s, and a rotation speed of 32,000 rpm. The scribe force was reflected by the magnitude of the current. The scribe current was between 1.032 and 1.279 A, ​​indicating that the scribe force was small and stable, and the scriber had good scribe performance.

[0060] Comparative Example 1: This comparative example provides a method for preparing cBN ultrathin dicings with a metal-ceramic binder. This method is basically the same as the method in Example 3, except that in step one, Si3N4 is used instead of SiC in the ceramic powder.

[0061] This comparative example also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 56 mm, an inner diameter of 40 mm, and a thickness of 0.5 mm; the cBN ultrathin scribing is prepared using the same method as described in this comparative example.

[0062] The cBN ultrathin scriber obtained in this comparative example was used to cut 45# steel and ductile iron QT-500. The cutting depth of 45# steel was 0.6 mm, the cutting feed rate was 1 mm / s, and the rotation speed was 32000 rpm. The cutting depth of ductile iron QT-500 was 0.4 mm, the cutting feed rate was 3 mm / s, and the rotation speed was 32000 rpm. The cutting force was reflected by the current. When cutting 45# steel, the current was between 1.483 and 1.889 A, and when cutting ductile iron QT-500, the current was between 1.140 and 2.265 A. When cutting both materials, the cBN ultrathin scriber broke when the cutting length was 0.4 m, and the cutting experiment stopped abnormally. This indicates that the cutting force was large and unstable, and the cutting performance of the cBN ultrathin scriber was poor.

[0063] Comparative Example 2: This comparative example provides a method for preparing cBN ultrathin diced sheets with a metal-ceramic binder. This method is basically the same as the method in Example 2, except that in step one, the mixture, by volume fraction, consists of the following components: 15% cBN single crystal powder, 42.5% ceramic powder, and the remainder is metal powder, with the sum of the volume fractions of the components being 100%.

[0064] This comparative example also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 58 mm, an inner diameter of 40 mm, and a thickness of 0.4 mm; the cBN ultrathin scribing is prepared using the same method as described in this comparative example.

[0065] Due to the excessively high content of ceramic powder, the cBN ultrathin dicing sheet prepared in this comparative example with a metal-ceramic binder has weak bonding force and low strength, making it extremely prone to cracking and disintegration, and thus unable to undergo dicing experiments.

[0066] Comparative Example 3: This comparative example provides a method for preparing cBN ultrathin diced sheets with a metal-ceramic binder. This method is basically the same as the method in Example 2, except that in step one, the mixture, by volume fraction, consists of the following components: 15% cBN single crystal powder, 15% ceramic powder, and the remainder is metal powder, and the sum of the volume fractions of the components is 100%.

[0067] This comparative example also provides a metal-ceramic bonded cBN ultrathin scribing; the cBN ultrathin scribing has an outer diameter of 58 mm, an inner diameter of 40 mm, and a thickness of 0.4 mm; the cBN ultrathin scribing is prepared using the same method as described in this comparative example.

[0068] Due to the excessive metal powder content, the self-sharpening property of the metal-ceramic bonded cBN ultrathin scriber prepared in this comparative example was poor. The prepared cBN ultrathin scriber was used to cut 45# steel with a cutting depth of 0.6 mm, a cutting feed speed of 1 mm / s, and a rotation speed of 32000 rpm. The cutting force was reflected by the current. When cutting 45# steel, the current was between 1.473 and 1.872 A. A large number of sparks were emitted during the cutting process, indicating that the cutting force was large and unstable, and the cutting performance of the cBN ultrathin scriber was poor.

Claims

1. A metal-ceramic bonded cBN ultrathin dicing, characterized in that, The cBN ultrathin dicing is made of a mixture and a binder, with a volume ratio of (3-4):(4-3). The mixture, by volume fraction, consists of the following components: 10%–25% cBN single crystal powder, 20%–40% ceramic powder, and the balance being metal powder, with the sum of the volume fractions of the components being 100%. The metal powder includes one or more of Cu, Sn, Ti, Ni, Fe, and Co; The ceramic powder includes one or more of SiC, Al2O3, TiN, TiC, and TiB2.

2. The cBN ultrathin dicing with a metal-ceramic binder as described in claim 1, characterized in that, The cBN single crystal powder has a particle size of 100-400 mesh, the metal powder has a particle size of 200-800 mesh, and the ceramic powder has a particle size of 400-1600 mesh.

3. The cBN ultrathin dicing with a metal-ceramic binder as described in claim 1, characterized in that, The adhesive, by mass, is made of the following components: 10-30% polypropylene, 1-3% dioctyl phthalate, 3-5% stearic acid, 2-5% polyethyleneimine, and the balance being styrene-butadiene-styrene block copolymer, with the sum of the mass parts of the components being 100%.

4. A method for preparing cBN ultrathin diced wafers with a metal-ceramic binder as described in any one of claims 1 to 3, characterized in that, The method specifically includes the following steps: Step 1, Secret Refining: Weigh cBN single crystal powder, metal powder and ceramic powder, and mix them with binder to obtain the internal mixing raw material; adjust the internal mixing temperature of the internal mixer to 170℃~210℃, add the internal mixing raw material when the temperature is raised to the internal mixing temperature and start timing, the internal mixing time is 40min~120min, and then obtain the internally mixed raw material. Step 2, Granulation and Fiber Formation: The mixed raw material obtained in step one is put into a granulator for granulation. The granules are sorted by a sieve, and the fine particles with a particle size of 4 mesh or less are selected for drawing into filaments to obtain filament granules. The obtained filament granules are added to a filament drawing machine for drawing into filaments to obtain filament-shaped printing material. Step 3, print the green blank: A 3D model of the metal-ceramic bonded cBN ultrathin diced sheet is created in the computer. After setting the printing parameters of the 3D model, it is imported into the 3D printer. The filamentous printing material obtained in step two is used as the printing material of the 3D printer. The 3D printer is started and printing is performed to obtain the green body of the metal-ceramic bonded cBN ultrathin diced sheet. Step 4, Remove Adhesive: The green blank obtained in step 3 is placed in a degreasing mold, and the binder in the green blank obtained in step 3 is removed by a degreasing furnace through a stepped heating and heat preservation method. Then it is cooled with the furnace to obtain a green blank after debinding. Step 5, sintering: After removing the binder obtained in step four, the green body is placed in a sintering mold and sintered in a sintering furnace. After sintering, it is cooled with the furnace to obtain cBN ultrathin sheets with metal-ceramic binder.

5. The method for preparing cBN ultrathin dicings with a metal-ceramic binder as described in claim 4, characterized in that, In step two, the operating temperature of the wire drawing machine is set to 170℃~210℃; In step two, the diameter of the filamentous printing material is 1.7 to 2.0 mm.

6. The method for preparing cBN ultrathin dicings with a metal-ceramic binder as described in claim 4, characterized in that, In step three, the printing parameters are as follows: printing layer thickness 0.05-0.4mm, nozzle temperature 200-250℃, and platform temperature 80-110℃.

7. The method for preparing cBN ultrathin dicings with a metal-ceramic binder as described in claim 4, characterized in that, In step four, the adhesive removal process is carried out in a degreasing furnace filled with hydrogen using a stepped heating and heat preservation method. In step four, the specific steps of the stepped heating and holding process are as follows: From room temperature, heat to 170℃~230℃ for 20~60 minutes, then hold at 170℃~230℃ for 10~30 minutes; from 170℃~230℃, heat to 260℃~320℃ for 90~150 minutes, then hold at 260℃~320℃ for 15~60 minutes; from 260℃~320℃, heat to 340℃~380℃. At 0℃, the heating time is 50-120 min, and the temperature is held at 340℃-380℃ for 15-60 min; from 340℃-380℃ to 400℃-440℃, the heating time is 30-60 min, and the temperature is held at 400℃-440℃ for 15-60 min; from 400℃-440℃ to 500℃-550℃, the heating time is 70-120 min, and the temperature is held at 500℃-550℃ for 1-2 h.

8. The method for preparing cBN ultrathin dicings with a metal-ceramic binder as described in claim 4, characterized in that, In step five, the protective atmosphere inside the sintering furnace during sintering is hydrogen. In step five, the sintering pressure during sintering is 20 MPa to 60 MPa; In step five, the sintering temperature and holding time during sintering are as follows: from room temperature to 480℃~530℃, the heating time is 1~10min, and the temperature is held at 480℃~530℃ for 1~5min; from 480℃~530℃ to 680℃~820℃, the heating time is 1~10min, and the temperature is held at 680℃~820℃ for 1~10min.