Czochralski crystal growing furnace feeding system

Abstract

The invention discloses a Czochralski single crystal furnace charging system, which comprises a cylinder body, the upper end of the cylinder body is provided with a cylinder cover, the cylinder body is internally provided with a quantitative blanking assembly, the quantitative blanking assembly comprises a blanking hopper fixedly connected in the cylinder body, the inner bottom of the blanking hopper is provided with a blanking port, and the blanking port is connected with the cylinder body. The inner walls of the left side and the right side of the barrel are jointly and rotationally connected with a rotating rod, a disc is fixedly connected to the rotating rod, an arc-shaped groove is formed in the lower end of the discharging hopper, the discharging opening penetrates through the arc-shaped groove, and the side wall of the disc is located in the arc-shaped groove and tightly attached to the inner wall of the arc-shaped groove. Accurate quantitative blanking of raw materials and flexible adjustment of the feeding amount are achieved, dead-corner-free residual material cleaning can be conducted on a blanking plugging component, action switching of quantitative blanking and residual material cleaning is completed through single-power-source linkage, the system structure is simplified, the sealing performance is improved, the feeding stability and operation convenience are guaranteed, and the working efficiency is improved. And the finished product yield and the production efficiency of monocrystalline silicon crystal pulling are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a feeding system for a Czochralski single crystal furnace. Background Technology

[0002] The Czochralski (CZ) crystal pulling furnace is the core equipment for preparing monocrystalline silicon. As a key basic material in the semiconductor field, the precise, continuous, and clean feeding of raw materials during the preparation of monocrystalline silicon directly affects the crystal quality, pulling efficiency, and yield of the finished product. In the CZ crystal pulling process, polycrystalline silicon raw materials need to be quantitatively replenished into the crucible of the single crystal furnace to maintain a stable liquid silicon level and avoid problems such as crystal rod diameter fluctuations and crystal defects caused by uneven raw material supply. Therefore, the feeding system of the single crystal furnace is a key component to ensure the stability of the crystal pulling process.

[0003] Existing feeding systems for Czochralski single crystal furnaces mostly employ hopper gate-type, spiral feeding, or gravity-feeding structures. While these can achieve basic raw material conveying, they still have many technical shortcomings in practical applications, making it difficult to meet the requirements of high-precision crystal pulling processes. Firstly, traditional feeding systems have low quantitative accuracy. Gate-type structures rely on the opening and closing stroke of the gate to control the feeding amount, which is easily affected by the particle size and bulk density of the raw material, leading to deviations in the feeding amount. Spiral feeding structures suffer from the problem of raw material sticking to the screw groove, resulting in a discrepancy between the actual feeding amount and the theoretical value, making it impossible to achieve precise quantitative replenishment of raw materials. Secondly, some feeding systems have a fixed feeding amount, only suitable for a single crystal pulling process. When it is necessary to adjust the crucible feeding amount or change the crystal pulling specification, the quantitative component must be disassembled and replaced, which is cumbersome, reduces the equipment's versatility, and increases production and maintenance costs.

[0004] Therefore, a feeding system for a Czochralski single crystal furnace needs to be designed to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a feeding system for a Czochralski single crystal furnace. This invention achieves precise quantitative feeding of raw materials and flexible adjustment of the feeding amount. It can clean residual material from the feeding and sealing components without dead angles. The switching between quantitative feeding and residual material cleaning is completed through a single power source linkage, which simplifies the system structure, improves sealing performance, ensures feeding stability and ease of operation, and effectively improves the yield and production efficiency of single crystal silicon pulling.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A feeding system for a Czochralski single crystal furnace includes a cylindrical body with a cover at the upper end. A metering feeding assembly is provided inside the cylindrical body. The metering feeding assembly includes a feeding hopper fixedly connected to the cylindrical body, a feeding port at the bottom of the feeding hopper, and rotating rods rotatably connected to the inner walls of the left and right sides of the cylindrical body. A disc is fixedly connected to the rotating rods. An arc-shaped groove is provided at the lower end of the feeding hopper, and the feeding port passes through the arc-shaped groove. The sidewall of the disc is located within the arc-shaped groove and is in close contact with the inner wall of the arc-shaped groove. Two storage cavities are provided inside the disc, and feeding ports are provided on opposite sides of the two storage cavities. The feeding assembly is used to add a fixed amount of raw materials. The feeding assembly includes mushroom blocks disposed inside the cylinder. The mushroom blocks are slidably connected to the inner wall of the cylinder. A second round rod is fixedly connected to the upper end of the mushroom blocks. Two connecting rods are fixedly connected to the second round rod. The two connecting rods pass through the feeding hopper and are fixedly connected to a first round rod. By pressing down the first round rod, the mushroom blocks move down, opening the bottom of the cylinder.

[0007] Preferably, it further includes a downward moving component, the downward moving component including a first motor mounted on the cylinder cover, a first gear mounted on the output shaft of the first motor, a slide rail fixedly connected to the cylinder cover, a slider slidably connected to the slide rail, a rack fixedly connected to the slider, the rack meshing with the first gear, the rack penetrating the cylinder cover and fixedly connected to the upper end of the first round rod.

[0008] Preferably, two first fixing blocks are fixedly connected to the outer side of the cylinder cover, and two second fixing blocks are fixedly connected to the outer wall of the cylinder. A hydraulic cylinder is installed on the second fixing block, and the telescopic ends of the two hydraulic cylinders are fixedly connected to the lower end of the first fixing block.

[0009] Preferably, each of the two storage cavities is provided with a space adjustment component, the space adjustment component includes an electromagnet embedded in the inner wall of the left and right sides of the storage cavity, and two adjustment plates are provided in the storage cavity. The two electromagnets are elastically connected to the adjacent sides of the corresponding adjustment plates through a second spring, and the two adjustment plates are slidably connected to the inner walls of the front and rear sides of the storage cavity.

[0010] Preferably, each of the adjusting plates has an adjusting groove on the side near the feed inlet, and a fastening block is slidably connected in each adjusting groove. Each fastening block is elastically connected to the inner bottom of the corresponding adjusting groove by a first spring. The inner walls of the opposite sides of the two storage cavities are both inclined surfaces, and the side of each fastening block away from the adjusting groove is also inclined. Under the action of the first spring, during spatial adjustment, the inclined surface of the fastening block is always attached to the inclined surface of the storage cavity.

[0011] Preferably, the device further includes a scraping assembly, which sweeps off any remaining material from the mushroom block after it has completely discharged. The scraping assembly includes a toothed ring rotatably connected to the outside of the cylinder. A plurality of vertical rods are fixedly connected to the lower end of the toothed ring. A U-shaped block is fixedly connected to each of the vertical rods. A rotating shaft is rotatably connected to each U-shaped block. Each rotating shaft is elastically connected to the U-shaped block via a torsion spring. A scraping rod is fixedly connected to each rotating shaft. A retaining ring is fixedly connected to the lower end of the mushroom block. When the mushroom block blocks the lower end of the cylinder, the retaining ring limits the scraping rod.

[0012] Preferably, the system further includes a drive assembly comprising a second motor mounted on the outside of the cylinder. Two mounting blocks are fixedly connected to the outside of the cylinder, and a thin rod is rotatably connected to the adjacent sides of the two mounting blocks. The thin rod is fixedly connected to the output shaft of the second motor. Both the rotating rod and the thin rod are equipped with bevel gears, and a one-way bearing is provided between the rotating rod and the bevel gears. A transmission rod is rotatably connected through the lower mounting block. Both the transmission rod and the thin rod are equipped with meshing second gears, and a second one-way bearing is provided between the transmission rod and the second gears. A third gear is fixedly connected to the transmission rod, and the third gear meshes with a gear ring.

[0013] The present invention has the following beneficial effects: 1. Compared with existing technologies, by closely fitting the arc groove of the feeding hopper with the disc, and combining the alternating quantitative feeding design of the dual storage cavities, the leakage and accumulation of raw materials are effectively avoided, the precise quantitative delivery of raw materials is achieved, the feeding accuracy is greatly improved, and the stability of the molten silicon level is ensured in the crystal pulling process. 2. Compared with the existing technology, the storage cavity is equipped with a space adjustment component based on electromagnets and elastic elements, which, together with the inclined surface fitting structure of the close-fitting block, can flexibly adjust the volume of the storage cavity to adapt to the feeding requirements of different crystal pulling processes. There is no need to disassemble or replace parts, which improves the versatility of the equipment and the ease of operation, and reduces production and maintenance costs. 3. Compared with the existing technology, the scraping component with torsion spring elastic connection, combined with the limiting effect of the retaining ring, can scrape the surface of the mushroom block without dead angles after the mushroom block is reset, thoroughly remove residual raw materials, avoid the residual material from falling off at high temperature and affecting the purity of molten silicon, and effectively improve the quality of single crystal silicon and the yield of finished products. 4. Compared with existing technologies, the design of a single drive component combined with a one-way bearing and gear transmission enables the linkage and switching of a single power source for quantitative material feeding and residual material cleaning. This simplifies the overall system structure, reduces the number of openings in the cylinder, improves the sealing performance of the vacuum / inert gas environment of the single crystal furnace, avoids interference problems caused by the coordinated actions of multiple power sources, and enhances the operational stability of the feeding system.

[0014] In summary, the present invention features a compact overall structure, excellent transmission linkage, and multiple advantages including precise quantitative measurement, adjustable volume, thorough residual material cleaning, superior sealing performance, and stable operation. It can perfectly adapt to the requirements of modern high-precision and highly automated Czochralski single crystal furnace crystal pulling processes, effectively improving the production efficiency and yield of single crystal silicon preparation, reducing production and maintenance costs, and has significant practical value and promotional significance. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a Czochralski single crystal furnace feeding system proposed in this invention; Figure 2 for Figure 1 A structural diagram from another perspective; Figure 3 for Figure 1 A sectional view; Figure 4 This is a schematic diagram of the material feeding assembly. Figure 5 for Figure 4 A sectional view; Figure 6 for Figure 5 Enlarged structural diagram at point A; Figure 7 This is a schematic diagram of the scraping component.

[0016] In the diagram: 1. Cylinder body, 2. Cylinder cover, 3. First fixing block, 4. Hydraulic cylinder, 5. Slide rail, 6. Slider, 7. Rack, 8. First gear, 9. First motor, 10. Gear ring, 11. Second motor, 12. Transmission rod, 13. Second gear, 14. Third gear, 15. Vertical rod, 16. Rotating rod, 17. Bevel gear, 18. Disc, 19. Feed hopper, 20. Connecting rod, 21. First round rod, 22. Second round rod, 23. Mushroom block, 24. Feed inlet, 25. Electromagnet, 26. Adjusting plate, 27. Storage cavity, 28. Adjusting groove, 29. First spring, 30. Adhesive block, 31. Rotating shaft, 32. U-shaped block, 33. Torsion spring, 34. Scraper rod, 35. Retaining ring. Detailed Implementation

[0017] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0018] Reference Figures 1-7A feeding system for a Czochralski single crystal furnace includes a cylindrical body 1, with a cover 2 at the upper end of the cylindrical body 1. A high-temperature sealing gasket is provided at the connection between the cover 2 and the cylindrical body 1. A quantitative feeding assembly is provided inside the cylindrical body 1, including a feeding hopper 19 fixedly connected inside the cylindrical body 1. The bottom of the feeding hopper 19 has a feeding port. The feeding hopper 19 is fixed to the inner wall of the cylindrical body 1 by welding. Its inner wall is a smooth arc-shaped surface to avoid raw material accumulation and bridging inside the hopper. The size of the feeding port matches the size of the inlet 24 of the storage cavity 27 to ensure that the raw material can fall accurately into the storage cavity 27. The edges of the feeding port are rounded. To prevent raw materials from getting stuck, rotating rods 16 are rotatably connected to the inner walls of the left and right sides of the cylinder 1. A disc 18 is fixedly connected to the rotating rod 16. The lower end of the discharge hopper 19 is provided with an arc-shaped groove. The arc of the arc-shaped groove is completely consistent with the arc of the disc 18. The inner wall of the arc-shaped groove is a smooth surface to reduce the friction when the disc 18 rotates. At the same time, it achieves a sealed fit between the discharge hopper 19 and the disc 18 to prevent raw materials from leaking out from the gaps. The discharge port passes through the arc-shaped groove. The side wall of the disc 18 is located in the arc-shaped groove and is in close contact with the inner wall of the arc-shaped groove. The disc 18 is provided with two storage chambers 27. The opposite sides of the two storage chambers 27 are provided with inlets 24. The feeding assembly is used to add a fixed amount of raw materials. The feeding assembly includes a mushroom block 23 set inside the cylinder 1. The mushroom block 23 is made of high-purity graphite and is frustoconical. The mushroom block 23 is slidably connected to the inner wall of the cylinder 1. A second round rod 22 is fixedly connected to the upper end of the mushroom block 23. Two connecting rods 20 are fixedly connected to the second round rod 22. The two connecting rods 20 pass through the feed hopper 19 and are fixedly connected to a first round rod 21. By pressing down the first round rod 21, the mushroom block 23 moves down, opening the bottom of the cylinder 1.

[0019] The system also includes a downward movement assembly, which includes a first motor 9 mounted on the cylinder cover 2. The first motor 9 is a servo motor, which can precisely control the rotation angle and speed of the output shaft, thereby precisely controlling the downward movement of the mushroom block 23. The first motor 9 is fixed to the cylinder cover 2 with bolts, making it securely installed and easy to disassemble and maintain. The output shaft of the first motor 9 is equipped with a first gear 8. A slide rail 5 is fixedly connected to the cylinder cover 2, and the slide rail 5 is fixedly connected to the cylinder cover 2 with bolts. A slider 6 is slidably connected to the slide rail 5, and a rack 7 is fixedly connected to the slider 6. The rack 7 meshes with the first gear 8 and passes through the cylinder cover 2 and is fixedly connected to the upper end of the first round rod 21. Two first fixing blocks 3 are fixedly connected to the outer side of the cylinder cover 2, and two second fixing blocks are fixedly connected to the outer wall of the cylinder 1. Hydraulic cylinders 4 are mounted on the second fixing blocks, and the telescopic ends of the two hydraulic cylinders 4 are fixedly connected to the lower ends of the first fixing blocks 3.

[0020] Each of the two storage chambers 27 is equipped with a space adjustment assembly, which includes electromagnets 25 embedded in the inner walls of the left and right sides of the storage chamber 27. The electromagnets 25 are high-temperature resistant and can operate normally in the high-temperature environment of the furnace. The electromagnets 25 are bolted to the inner wall of the storage chamber 27, ensuring a secure installation without occupying the effective volume of the storage chamber 27. The power supply line of the electromagnet 25 is led out through the through hole inside the rotating rod 16 to avoid wire tangling. Two adjustment plates 26 are provided in the storage chamber 27. The adjustment plates 26 are made of high-temperature resistant magnetic material. The two electromagnets 25 are elastically connected to the adjacent sides of the corresponding adjustment plates 26 via a second spring. The two adjustment plates 26 are slidably connected to the front and rear inner walls of the storage chamber 27. Each adjustment plate 26 has an adjustment groove 28 on the side near the feed inlet 24. Each adjusting groove 28 is slidably connected with a pressing block 30. Each pressing block 30 is elastically connected to the inner bottom of the corresponding adjusting groove 28 by a first spring 29. The inner walls of the opposite sides of the two storage cavities 27 are both inclined surfaces. The side of each pressing block 30 away from the adjusting groove 28 is also inclined. The inclined surface of the pressing block 30 has the same inclination angle as the inclined surface of the storage cavity 27. The inclined surface is polished to reduce the friction during the fitting process and ensure that it can always fit tightly during the adjustment process. Under the action of the first spring 29, during spatial adjustment, the inclined surface of the pressing block 30 is always in contact with the inclined surface of the storage cavity 27. Through the inclined surface fitting design, the gap between the adjusting plate 26 and the inner wall of the storage cavity 27 after the adjustment plate 26 moves can be effectively filled, preventing the raw material from remaining in the gap, ensuring the accurate adjustment of the volume of the storage cavity 27, and avoiding the adhesion of raw materials that affect the feeding.

[0021] The system also includes a scraping assembly. After the mushroom block 23 has completely discharged, the scraping assembly sweeps off the remaining raw material on the mushroom block 23. The scraping assembly includes a toothed ring 10 rotatably connected to the outside of the cylinder 1. The lower end of the toothed ring 10 is fixedly connected to multiple vertical rods 15. Each vertical rod 15 is fixedly connected to a U-shaped block 32. Each U-shaped block 32 is rotatably connected to a rotating shaft 31. Each rotating shaft 31 and the U-shaped block 32 are elastically connected by a torsion spring 33. Each rotating shaft 31 is fixedly connected to a scraping rod 34. The lower end of the mushroom block 23 is fixedly connected to a retaining ring 35. When the mushroom block 23 blocks the lower end of the cylinder 1, the retaining ring limits the scraping rod 34.

[0022] The system also includes a drive assembly, which comprises a second motor 11 mounted on the outside of the cylinder 1. Two mounting blocks are fixedly connected to the outside of the cylinder 1, and a thin rod is rotatably connected to the adjacent sides of the two mounting blocks. The thin rod is fixedly connected to the output shaft of the second motor 11. Both the rotating rod 16 and the thin rod are equipped with bevel gears 17. A one-way bearing is provided between the rotating rod 16 and the bevel gear 17. This one-way bearing is of high temperature resistance and only allows the bevel gear 17 to drive the rotating rod 16 to rotate clockwise. When the bevel gear 17 rotates counterclockwise, the one-way bearing rotates freely, and the rotating rod 16 does not rotate, thereby achieving quantitative material feeding. The action is independently controlled. The mounting block located below is rotatably connected to the transmission rod 12. Both the transmission rod 12 and the thin rod are equipped with meshing second gears 13. A second one-way bearing is provided between the transmission rod 12 and the second gear 13. The second one-way bearing is of high temperature resistance and only allows the second gear 13 to drive the transmission rod 12 to rotate counterclockwise. When the second gear 13 rotates clockwise, the second one-way bearing rotates freely and the transmission rod 12 does not rotate, thereby realizing independent control of the residual material cleaning action. A third gear 14 is fixedly connected to the transmission rod 12 and meshes with the gear ring 10.

[0023] The functional principle of this invention can be explained by the following operation: First, the hydraulic cylinder extends and retracts to drive the first fixed block and the cylinder cover to rise and fall, thereby opening and closing the cylinder cover and the cylinder body 1, which facilitates the addition of raw materials into the hopper 19. After the raw materials are added, the hydraulic cylinder is controlled to reset, so that the cylinder cover and the cylinder body 1 are sealed and closed. Then, according to the amount of material required for the actual crystal pulling process, the volume of the storage cavity 27 is adjusted. By energizing the electromagnet 25 to generate magnetic force, the adjusting plate 26 is attracted to slide along the front and rear inner walls of the storage cavity 27. The second spring extends and retracts accordingly. At the same time, under the elastic action of the first spring 29, the inclined surface of the close-fitting block 30 is always in contact with the inclined surface of the storage cavity 27, so as to avoid gaps in the inner wall of the storage cavity 27 after adjustment, which would cause raw material residue or leakage, until the adjusting plate 26 moves to the preset position.

[0024] During quantitative feeding, the second motor 11 is started, which drives the thin rod to rotate. Since there is a one-way bearing between the rotating rod 16 and the bevel gear 17, the thin rod drives the rotating rod 16 to rotate clockwise through the bevel gear 17. The rotating rod 16 drives the disc 18 to rotate in the arc groove at the lower end of the feeding hopper 19. One of the storage chambers 27 on the disc 18 rotates with the disc 18 to below the feeding port of the feeding hopper 19. The raw material in the feeding hopper 19 falls into the storage chamber 27 through the feeding port and the inlet 24 by gravity. After the storage chamber 27 is full, the disc 18 continues to rotate 180°, so that the storage chamber 27 filled with raw material rotates to the bottom. The raw material falls into the space below the mushroom block 23 in the cylinder 1 under the action of gravity. At the same time, the empty storage chamber 27 rotates to below the feeding port to continue to receive raw material, realizing continuous quantitative feeding.

[0025] When feeding material, the first motor 9 is started, which drives the first gear 8 to rotate. The first gear 8 meshes with the rack 7, causing the rack 7 to slide down along the slide rail 5. The rack 7 drives the first round rod 21 to move down. The first round rod 21 drives the second round rod 22 and the mushroom block 23 to move down synchronously through the connecting rod 20, opening the feeding port at the bottom of the cylinder 1. The raw material stored above the mushroom block 23 falls into the crucible of the single crystal furnace through the feeding port, completing one feeding operation.

[0026] When cleaning the residual material on the surface of mushroom block 23, the output shaft of the second motor 11 rotates in the reverse direction. Since there is a second one-way bearing between the transmission rod 12 and the second gear 13, the thin rod drives the transmission rod 12 to rotate through the second gear 13. The transmission rod 12 drives the third gear 14 to rotate. The third gear 14 meshes with the gear ring 10, driving the gear ring 10 to rotate. The gear ring 10 drives the U-shaped block 32, the rotating shaft 31 and the scraping rod 34 to rotate synchronously through the vertical rod 15. Under the action of the torsion spring 33, the scraping rod 34 always adheres to the surface of the mushroom block 23. During the rotation of the gear ring 10, the residual material on the surface of the mushroom block 23 is completely scraped off. The scraped material falls into the crucible to avoid residue. After the residue is cleaned up, the second motor 11 is turned off. After the material is fed, the first motor 9 is reversed, which drives the rack 7, the first round rod 21, the connecting rod 20, the second round rod 22 and the mushroom block 23 to reset. The mushroom block 23 re-seals the feeding port at the bottom of the cylinder 1. During the upward movement of the mushroom block 23, multiple scraping rods 34 will rotate upward. When the mushroom block 23 is reset, the multiple scraping rods 34 are in close contact with the retaining ring 35.

[0027] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A feeding system for a Czochralski single crystal furnace, characterized in that, include: A cylindrical body (1) is provided with a cover (2) at the upper end of the cylindrical body (1). A quantitative feeding assembly is provided inside the cylindrical body (1). The quantitative feeding assembly includes a feeding hopper (19) fixedly connected inside the cylindrical body (1). A feeding port is provided at the bottom of the feeding hopper (19). A rotating rod (16) is rotatably connected to the inner walls of the left and right sides of the cylindrical body (1). A disc (18) is fixedly connected to the rotating rod (16). An arc groove is provided at the lower end of the feeding hopper (19). The feeding port passes through the arc groove. The side wall of the disc (18) is located in the arc groove and is in close contact with the inner wall of the arc groove. Two storage chambers (27) are provided inside the disc (18). A feeding port (24) is provided on the opposite side of the two storage chambers (27). The feeding assembly is used to add a certain amount of raw materials. The feeding assembly includes mushroom blocks (23) set inside the cylinder (1). The mushroom blocks (23) are slidably connected to the inner wall of the cylinder (1). A second round rod (22) is fixedly connected to the upper end of the mushroom blocks (23). Two connecting rods (20) are fixedly connected to the second round rod (22). The two connecting rods (20) pass through the feed hopper (19) and are fixedly connected to a first round rod (21). By pressing down the first round rod (21), the mushroom blocks (23) move down, opening the bottom of the cylinder (1).

2. The feeding system for a Czochralski single crystal furnace according to claim 1, characterized in that: It also includes a downward moving component, which includes a first motor (9) mounted on the cylinder cover (2), a first gear (8) mounted on the output shaft of the first motor (9), a slide rail (5) fixedly connected to the cylinder cover (2), a slider (6) slidably connected to the slide rail (5), a rack (7) fixedly connected to the slider (6), the rack (7) meshing with the first gear (8), the rack (7) penetrating the cylinder cover (2) and fixedly connected to the upper end of the first round rod (21).

3. The feeding system for a Czochralski single crystal furnace according to claim 2, characterized in that: Two first fixing blocks (3) are fixedly connected to the outer side of the cylinder cover (2), and two second fixing blocks are fixedly connected to the outer wall of the cylinder (1). A hydraulic cylinder (4) is installed on the second fixing block, and the telescopic ends of the two hydraulic cylinders (4) are fixedly connected to the lower end of the first fixing block (3).

4. The feeding system for a Czochralski single crystal furnace according to claim 1, characterized in that: Both storage cavities (27) are provided with space adjustment components. The space adjustment components include electromagnets (25) embedded in the inner walls of the left and right sides of the storage cavity (27). The storage cavity (27) is provided with two adjustment plates (26). The two electromagnets (25) and the adjacent sides of the corresponding adjustment plates (26) are elastically connected by a second spring. The two adjustment plates (26) are slidably connected to the inner walls of the front and rear sides of the storage cavity (27).

5. The feeding system for a Czochralski single crystal furnace according to claim 4, characterized in that: Each of the adjustment plates (26) has an adjustment groove (28) on the side near the feed inlet (24). Each adjustment groove (28) has a slidingly connected fastening block (30). Each fastening block (30) is elastically connected to the inner bottom of the corresponding adjustment groove (28) by a first spring (29). The inner walls of the opposite sides of the two storage cavities (27) are all inclined surfaces. The side of each fastening block (30) away from the adjustment groove (28) is an inclined surface. Under the action of the first spring (29), during spatial adjustment, the inclined surface of the fastening block (30) is always attached to the inclined surface of the storage cavity (27).

6. The feeding system for a Czochralski single crystal furnace according to claim 1, characterized in that: It also includes a scraping component, which sweeps off the residual raw material on the mushroom block (23) after the mushroom block (23) has completely discharged. The scraping component includes a toothed ring (10) rotatably connected to the outside of the cylinder (1). The lower end of the toothed ring (10) is fixedly connected to a plurality of vertical rods (15). Each of the plurality of vertical rods (15) is fixedly connected to a U-shaped block (32). Each U-shaped block (32) is rotatably connected to a rotating shaft (31). Each rotating shaft (31) is elastically connected to the U-shaped block (32) through a torsion spring (33). Each rotating shaft (31) is fixedly connected to a scraping rod (34). The lower end of the mushroom block (23) is fixedly connected to a retaining ring (35). When the mushroom block (23) blocks the lower end of the cylinder (1), the retaining ring limits the scraping rod (34).

7. The feeding system for a Czochralski single crystal furnace according to claim 6, characterized in that: It also includes a drive assembly, which includes a second motor (11) installed on the outside of the cylinder (1). Two mounting blocks are fixedly connected to the outside of the cylinder (1). A thin rod is rotatably connected to the adjacent sides of the two mounting blocks. The thin rod is fixedly connected to the output shaft of the second motor (11). A bevel gear (17) is installed on both the rotating rod (16) and the thin rod. A one-way bearing is provided between the rotating rod (16) and the bevel gear (17). A transmission rod (12) is rotatably connected through the mounting block located below. A second gear (13) meshes with each other on both the transmission rod (12) and the thin rod. A second one-way bearing is provided between the transmission rod (12) and the second gear (13). A third gear (14) is fixedly connected to the transmission rod (12). The third gear (14) meshes with the gear ring (10).

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