Fan state monitoring system and method, electronic equipment and medium

Abstract

The invention provides a fan state monitoring system and method, electronic equipment and a medium, and the system comprises a signal collection and conversion module which is used for collecting the total working current flowing through all alternating current fans and converting the total working current into a voltage signal; the input end of the fault judgment module is connected with the output end of the signal acquisition and conversion module, the fault judgment module is used for comparing the voltage signal with a preset fault voltage threshold value so as to output a fault logic signal, and the preset fault voltage threshold value is higher than a corresponding voltage value when one alternating current fan breaks down; the voltage value is lower than the corresponding voltage value when all the alternating current fans are normal; the controlled end of the alarm execution module is connected with the output end of the fault judgment module, and the alarm execution module is used for determining the overall working state of the alternating current fans according to the fault logic signals. According to the invention, reliable and centralized state monitoring and fault alarm can be carried out on a plurality of alternating current fans.

Description

Technical Field

[0001] This application relates to the field of signal detection technology, and more specifically, to a fan status monitoring system, method, electronic device, and medium. Background Technology

[0002] In semiconductor manufacturing equipment, highly integrated control cabinets typically employ a sealed design to suppress EMC interference and rely on fan boxes composed of multiple cooling fans for forced cooling. Stable equipment operation requires real-time monitoring of fan status; failure of any fan can lead to heat dissipation failure, impacting the overall reliability of the equipment.

[0003] Currently, mainstream monitoring solutions rely on the fan's built-in fault output signal (such as a fault output) to determine the fan's status by detecting the signal level. However, such solutions can only detect the status of DC fans and cannot detect abnormal situations in AC-powered fans with no fault output. Summary of the Invention

[0004] In view of the above, the purpose of this application is to provide a fan condition monitoring system, method, electronic device and medium, which aims to overcome at least one of the above-mentioned defects.

[0005] In a first aspect, this application provides a fan status monitoring system, the system comprising: The signal acquisition and conversion module is used to acquire the total operating current flowing through multiple AC fans and convert the total operating current into a voltage signal; The fault judgment module has its input terminal connected to the output terminal of the signal acquisition and conversion module. It is used to compare the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the failure of one AC fan and lower than the voltage value corresponding to the normal operation of all AC fans. An alarm execution module is provided, the controlled end of which is connected to the output end of the fault judgment module, and is used to determine the overall operating status of the plurality of AC fans based on the fault logic signal.

[0006] In one possible implementation, the fault determination module includes: A voltage comparison circuit is provided, the input of which is connected to the output of the signal acquisition and conversion module. The voltage comparison circuit is used to compare the voltage signal with the preset fault voltage threshold and the reference voltage value respectively, so as to output a comparison signal. A logic gate circuit, the input of which is connected to the output of the voltage comparison circuit to receive the comparison signal, and the output of which is connected to the controlled terminal of the alarm execution module.

[0007] In one possible implementation, the voltage comparison circuit includes a first voltage comparator, a second voltage comparator, a threshold voltage setting circuit, and a reference voltage setting circuit. The threshold voltage setting circuit is connected to the first input terminal of the first voltage comparator, the reference voltage setting circuit is connected to the first input terminal of the second voltage comparator, the second input terminal of the first voltage comparator and the second input terminal of the second voltage comparator are connected to the output terminal of the signal acquisition and conversion module, the output terminal of the first voltage comparator outputs a first comparison signal, and the output terminal of the second voltage comparator outputs a second comparison signal.

[0008] In one possible implementation, the signal acquisition and conversion module includes a current transformer and a sampling resistor; The primary winding of the current transformer is connected in series with the power supply circuit of the AC fan, and the two ends of the secondary winding of the current transformer are connected to the two ends of the sampling resistor.

[0009] In one possible implementation, the signal acquisition and conversion module further includes an AC-DC conversion circuit and a filtering and amplification circuit; The AC input terminal of the AC-DC conversion circuit is connected to both ends of the sampling resistor to receive a first AC voltage signal. The AC-DC conversion circuit is used to convert the first AC voltage signal into a DC differential signal. The input terminal of the filter amplifier circuit is connected to the DC output terminal of the AC-DC conversion circuit to output the voltage signal.

[0010] In one possible implementation, the filtering amplifier circuit includes a filter, a differential amplifier, and a non-inverting amplifier; The input terminal of the filter is connected to the DC output terminal of the AC-DC conversion circuit; The input terminal of the differential amplifier is connected to the output terminal of the filter to convert the filtered DC differential signal into a single-ended signal. The input terminal of the in-phase amplifier is connected to the output terminal of the differential amplifier to amplify the single-ended signal, and its output terminal outputs the voltage signal.

[0011] In one possible implementation, the alarm execution module includes an optocoupler and a relay; The input terminal of the optocoupler is connected to the output terminal of the fault judgment module, and the output terminal of the optocoupler is connected to and drives the coil of the relay. At least one set of normally open contacts of the relay constitutes an alarm circuit.

[0012] Secondly, this application provides a fan status monitoring method, the method comprising: The signal acquisition and conversion module is connected in series in the power supply circuit of multiple AC fans to acquire the total operating current flowing through all AC fans and convert the total operating current into a voltage signal; The input terminal of the fault judgment module is connected to the output terminal of the signal acquisition and conversion module, and is used to compare the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the failure of one AC fan and lower than the voltage value corresponding to the normal operation of all AC fans. The controlled end of the alarm execution module is connected to the output end of the fault judgment module, and is used to determine the overall working status of the multiple AC fans based on the fault logic signal.

[0013] Thirdly, this application also provides an electronic device, including: a processor, a memory, and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the memory via the bus, and when the machine-readable instructions are executed by the processor, the steps of the method described above are performed.

[0014] Fourthly, this application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, performs the steps of the method described above.

[0015] This application provides a fan status monitoring system, method, electronic device, and medium. The method includes: a signal acquisition and conversion module for acquiring the total operating current flowing through all AC fans and converting it into a voltage signal; a fault judgment module, whose input is connected to the output of the signal acquisition and conversion module, for comparing the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to a fault in one AC fan and lower than the voltage value corresponding to a normal operation of all AC fans; and an alarm execution module, whose controlled end is connected to the output of the fault judgment module, for determining the overall operating status of multiple AC fans based on the fault logic signal. This application achieves reliable and centralized status monitoring and fault alarm for multiple AC fans.

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a fan status monitoring system provided in an embodiment of this application; Figure 2 A schematic diagram of the signal acquisition circuit provided in an embodiment of this application is shown; Figure 3 A schematic diagram of the signal conversion circuit provided in an embodiment of this application is shown; Figure 4 A schematic diagram of the level conversion and amplification circuit provided in an embodiment of this application is shown; Figure 5 This paper shows a schematic diagram of the fault judgment module provided in an embodiment of the present application; Figure 6 This paper shows a schematic diagram of the structure of the alarm execution module provided in an embodiment of this application; Figure 7 This paper shows a schematic diagram of the structure of a multi-channel fan alarm connection provided in an embodiment of this application; Figure 8 A flowchart of the fan status monitoring method provided in the embodiments of this application; Figure 9 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0020] First, the applicable scenarios for this application will be introduced. This application can be applied to the field of signal detection technology.

[0021] With the development of semiconductor technology, the integration level of integrated circuit chips is increasing, and the linewidth of integrated circuit chips is also becoming finer to achieve even higher integration. In integrated circuit manufacturing equipment, many control cabinets are designed with a sealed structure to prevent EMC interference and address heat dissipation issues. This requires a fan box consisting of multiple cooling fans for heat dissipation, with a fan monitoring board housed within the fan box to monitor fan status. For example, some high-precision semiconductor equipment uses multiple control chassis, which are arranged in layers within a dedicated control cabinet for centralized heat dissipation. Each control chassis contains multiple control boards, and these chassis have ventilation holes on the top and bottom. During operation, a large amount of heat is generated, so multiple fan boxes are designed within the cabinet to promptly remove this heat. The fan box is a combination structure containing 8-10 fans. Since the failure of any single fan during operation will affect the overall heat dissipation effect, leading to chassis heat dissipation failure and impacting the stability of the entire machine, monitoring the fan operating status is crucial. If any one of the hundreds of fans fails to rotate during the operation of the machine, the fault status must be detected by the detection board and sent to the whole machine for safe handling.

[0022] The control cabinet is used to house the control chassis. It adopts a layered structure to place multiple control chassis. The fan boxes are also arranged in layers. There is a fan box between each layer of chassis in the cabinet. Since the multiple cooling fan boxes installed in the cabinet will generate significant vibration during rotation, it will affect the vibration of the whole machine. Therefore, selecting fans with low vibration and appropriate speed is the key to reducing vibration.

[0023] DC fans typically have a built-in fault output signal, and some fans also have a speed pulse count output signal. When the fan stalls or experiences an open circuit, it will output a high-level signal to indicate a fault. The fan's fault status can be determined by acquiring the fault signal level. Existing technology acquires the status level information and writes it into a status register connected to the fan during the sampling period. For signals with output speed pulses, it acquires the number of fan pulse transitions and writes them into a count register. Then, it determines the fan's status based on the register's state, thus detecting whether a fault has occurred in multiple fans. However, this type of patent requires fans with fan status output leads and is only applicable to this type of fan.

[0024] However, DC fans operate at high speeds, resulting in significant vibrations at their rated speeds. The resulting vibration frequencies cannot be suppressed by vibration dampers, failing to meet the cabinet vibration requirements. Low-vibration AC fans are suitable for controlling cabinet cooling. Actual measurements show that, while meeting airflow requirements, the cabinet vibration can be controlled to satisfy the overall vibration damper requirements. However, the fans are powered by 220VAC and do not have fault status output signals. Therefore, a dedicated detection board is needed to detect faults caused by short circuits or open circuits between fan windings and output these fault statuses to the overall system for safety, enabling alarms, shutdowns, and other measures to protect the equipment from damage.

[0025] However, the existing technology has the following limitations: First, it must rely on the fan's own rotation pulse output lead for detection, and cannot monitor fans without this signal lead; second, its detection dimension is limited, and it can only judge abnormal speed, and cannot accurately identify electrical faults such as fan open circuit or burnout.

[0026] Based on this, embodiments of this application provide a fan status monitoring system, method, electronic device, and medium. By designing a dedicated detection circuit, the system collects the fan's operating current in real time and converts it into a voltage signal. By setting a voltage threshold for comparison, it can not only detect whether the fan is running, but also effectively identify electrical abnormalities caused by open circuits, short circuits, etc., without relying on the fan's own signal. Finally, it drives a relay to output an alarm signal in a passive contact manner.

[0027] Please see Figure 1 , Figure 1 This is a schematic diagram of a fan status monitoring system provided in an embodiment of this application. Figure 1 As shown in the figure, the fan status monitoring system 100 provided in this application embodiment includes: a signal acquisition and conversion module 101, a fault judgment module 102, and an alarm execution module 103.

[0028] The signal acquisition and conversion module 101 is used to acquire the total operating current flowing through all AC fans and convert the total operating current into a voltage signal.

[0029] The input terminal of the fault judgment module 102 is connected to the output terminal of the signal acquisition and conversion module 101. It is used to compare the voltage signal with the preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the failure of one AC fan and lower than the voltage value corresponding to the failure of all AC fans.

[0030] The controlled end of the alarm execution module 103 is connected to the output end of the fault judgment module 102, and is used to determine the overall working status of multiple AC fans based on the fault logic signal.

[0031] Specifically, the signal acquisition and conversion module 101 acquires the total operating current flowing through all fans, and then converts the total operating current into a voltage signal. This voltage signal serves as a characteristic quantity representing the overall operating state of the fan group. The fault judgment module 102 receives the voltage signal and compares it in real time with an internally set fault judgment threshold voltage. This threshold is set according to specific logic: its value is higher than the voltage value corresponding to at least one fan in the system experiencing an open circuit or shutdown fault, while being lower than the voltage value corresponding to all fans operating normally. Therefore, when the real-time voltage is higher than this threshold, the module determines that the system is in normal condition; conversely, when the real-time voltage is lower than this threshold, it determines that at least one fan has failed. The module finally outputs this judgment result as a binary fault logic signal.

[0032] The alarm execution module 103 receives the logic signal output by the fault judgment module 102. When the fault is judged to be in a normal state, it controls the relay contacts to close; when the fault is judged to be in a fault state, it controls the relay contacts to open. Through the change of the on / off state of the relay contacts, the module finally outputs a passive, isolated switch signal. This signal can be directly used to light up an indicator light or connected to a higher-level safety control system (such as a PLC), thereby completing the complete process from state perception to alarm execution.

[0033] In this embodiment, the input terminal of the signal acquisition and conversion module 101 is connected in series with the power supply live wires of multiple AC fans, and consists of a low-frequency current transformer X5 (model CSE184L), a 0.1% precision sampling resistor R13, a 0.1% precision sampling resistor R14, an AC-DC conversion circuit U5 (model KMB14F), an RC low-pass filter (resistor R15, capacitor C2), and operational amplifiers U6A and U6B.

[0034] Specifically, the signal acquisition and conversion module 101 includes a signal acquisition circuit. Figure 2 A schematic diagram of the signal acquisition circuit provided in an embodiment of this application is shown.

[0035] The total current line of AC fans 1-6 is connected to the PRI_1 pin of low-frequency current transformer X5; the SEC_2 pin of low-frequency current transformer X5 is connected to the first terminal of sampling resistor R13, the first terminal of sampling resistor R14, and the first terminal of AC sampling voltage; the SEC_1 pin of low-frequency current transformer X5 is connected to the second terminal of sampling resistor R13, the second terminal of sampling resistor R14, and the second terminal of AC sampling voltage.

[0036] The signal acquisition and conversion module 101 includes a signal conversion circuit. Figure 3 A schematic diagram of the signal conversion circuit provided in an embodiment of this application is shown.

[0037] The AC signal output terminal is connected to the two AC terminals of the AC-DC conversion circuit U5; the DC+ terminal of the AC-DC conversion circuit U5 is connected to the first terminal of resistor R15; the second terminal of resistor R15 is connected to the first terminal of capacitor C2 and the first terminal of the DC differential signal output terminal; the DC- terminal of the AC-DC conversion circuit U5 is connected to the second terminal of capacitor C2 and the second terminal of the DC differential signal output terminal; resistor R15 and capacitor C2 constitute an RC low-pass filter.

[0038] The signal acquisition and conversion module 101 includes level conversion and amplification circuits. Figure 4 A schematic diagram of the level conversion and amplification circuit provided in an embodiment of this application is shown.

[0039] The first terminal of the DC differential signal input is connected to the first terminal of resistor R8; the second terminal of resistor R8 is connected to the first terminal of resistor R7 and the + input pin of operational amplifier U6A; the second terminal of resistor R7 is connected to power ground; the second terminal of the DC differential signal input is connected to the first terminal of resistor R9; the second terminal of resistor R9 is connected to the first terminal of resistor R11 and the - input pin of operational amplifier U6A; the second terminal of resistor R11 is connected to the output pin of operational amplifier U6A; the positive power supply pin of operational amplifier U6A is connected to the -5V power supply and the first terminal of capacitor C8; the second terminal of capacitor C8 is grounded; the negative power supply pin of operational amplifier U6A is connected to the +5V power supply and the first terminal of capacitor C9; the second terminal of capacitor C9 is grounded; the output pin of operational amplifier U6A is connected to the + input pin of operational amplifier U6B; the - input pin of operational amplifier U6B is connected to the first terminals of resistor R2 and resistor R3; the second terminal of resistor R2 is grounded; the second terminal of resistor R3 is connected to the output pin of operational amplifier U6B (i.e., the DC single-ended signal output terminal).

[0040] Specifically, the fan detection board is connected to the socket X1 of the fan detection circuit board via an external DB15 connector, and inputs 220VAC power. The L phase of the power supply collects the total operating current through the low-frequency current transformer X5 (model CSE184L) and connects to 6 AC fans through the board connector X3. Connector X2 is interconnected with the socket X1 to connect the next-level fan box in series, laying the foundation for multi-channel expansion.

[0041] The total current of the 6-channel AC fan is 48mA when it is working normally. Figure 2 The total current line at point 1 in the middle), this AC current is converted into a 2.88VAC AC sampling voltage signal through a precision sampling resistor circuit consisting of low-frequency current transformer X5 (isolated current transformer sampling method) and sampling resistors R13 and R14. Figure 2(Two locations in the middle). An isolated mutual inductance sampling design is adopted to avoid interference signals such as power supply noise from coupling to the secondary side. Combined with a sampling resistor with 0.1% accuracy, the purity and accuracy of the sampled signal are ensured.

[0042] The AC sampling voltage signal is connected to the AC terminal of the AC-DC conversion circuit U5 (model KMB14F). Figure 3 At three locations in the middle, after rectification and filtering by the AC-DC conversion circuit U5, a DC differential signal is output; due to the voltage drop in the circuit, a voltage loss of 0.1V will occur, ultimately outputting a 2.8VDC DC differential signal. This signal is then filtered by a 159Hz RC low-pass filter composed of resistor R15 and capacitor C2. Figure 3 Processing at four locations (in the middle) can effectively filter out high-frequency noise and ripple interference above 159Hz, further reduce common-mode interference, and improve signal stability.

[0043] The filtered DC differential signal is input to the operational amplifier U6A, forming a differential-to-single-ended circuit. Figure 4 (At position 5 in the middle), the operational amplifier U6A uses a dual power supply (±5V) to realize the conversion of differential signals to single-ended signals. Figure 4 (At position 6 in the middle); the converted single-ended signal is connected to the amplification circuit composed of operational amplifier U6B, with an amplification factor of 1 + resistor R3 / resistor R2, and finally outputs a DC characteristic voltage signal of 4.2VDC, with an amplitude in the range of 0-5V, which meets the signal processing requirements of the back-end comparator circuit.

[0044] In this embodiment, the fault judgment module 102 is used to compare the DC characteristic voltage signal output by the signal acquisition and conversion module 101 with a preset threshold, and output a precise fault logic signal. Specifically, the fault judgment module 102... Figure 5 A schematic diagram of the fault judgment module 102 provided in an embodiment of this application is shown.

[0045] It includes a first voltage comparator U7A, a second voltage comparator U7B, a threshold setting circuit (resistors R5 and R6), a reference voltage setting circuit (resistors R10 and R12), and an OR NOT gate logic circuit U9.

[0046] The first terminal of resistor R5 is connected to a +5V power supply; the second terminal of resistor R5 is connected to the first terminal of resistor R6; the second terminal of resistor R6 is grounded; the connection point between resistors R5 and R6 is connected to the + input pin of the first voltage comparator U7A; the positive power supply pin of the first voltage comparator U7A is grounded; the negative power supply pin of the first voltage comparator U7A is connected to the first terminal of capacitor C7 and the +5V power supply; the second terminal of capacitor C7 is grounded; the - input pin of the first voltage comparator U7A is connected to the + input pin of the second voltage comparator U7B (to receive a DC characteristic voltage signal); the first terminal of resistor R10... One end is connected to a +5V power supply; the second end of resistor R10 is connected to the first end of resistor R12; the second end of resistor R12 is grounded; the connection point between resistors R10 and R12 is connected to the -input pin of the second voltage comparator U7B; the output pin of the first voltage comparator U7A is the comparison output voltage A; the output pin of the second voltage comparator U7B is the comparison output voltage B; the outputs of the first voltage comparator U7A and the second voltage comparator U7B are respectively connected to the A pin and B pin of the NOR gate logic circuit U9; the Y pin of the NOR gate logic circuit U9 is the fault logic signal output terminal.

[0047] Specifically, the threshold setting circuit uses resistors R5 and R6 to divide the voltage (power supply voltage is 5VDC) and outputs a preset fault voltage threshold of 4VDC. Figure 5 (At 8 locations), this threshold is strictly set between "the voltage when 5 AC fans are working normally" and "the voltage when 6 AC fans are working normally"; the reference voltage setting circuit outputs a reference voltage of 4.95VDC through voltage division by resistors R10 and R12. Figure 5 Nine locations in the middle are used to provide a stable reference benchmark.

[0048] The DC characteristic voltage signal is simultaneously connected to the inverting input of the first voltage comparator U7A and the non-inverting input of the second voltage comparator U7B. Under normal conditions (all 6 AC fans are working): the DC characteristic voltage is 4.2VDC, which is higher than the preset fault threshold of 4VDC, and the first voltage comparator U7A outputs a low level; at the same time, 4.2VDC is lower than the reference voltage of 4.95VDC, and the second voltage comparator U7B outputs a low level.

[0049] Fault status (at least one AC fan failure): The total operating current decreases, the DC characteristic voltage drops to 3.6VDC, which is lower than the 4VDC preset fault threshold, and the first voltage comparator U7A outputs a high level; at the same time, 3.6VDC is still lower than the 4.95VDC reference voltage, and the second voltage comparator U7B maintains a low output level.

[0050] The NOR gate logic circuit U9 performs logical operations on the output signals of the first voltage comparator U7A and the second voltage comparator U7B: Normal state (both inputs are low level): The NOR gate logic circuit U9 outputs a high-level fault logic signal ( Figure 6 (11 locations in the middle); Fault status (one input is high level, one input is low level): The OR gate logic circuit U9 outputs a low level fault logic signal to achieve accurate conversion of analog voltage signal to digital fault signal.

[0051] Figure 6 A schematic diagram of the structure of the alarm execution module 103 provided in an embodiment of this application is shown.

[0052] The alarm execution module 103 is used to receive fault logic signals and execute corresponding alarm and status indication actions, including optocoupler U10 (model TLP3556A) and relay K1 (model G5V-2-DC5).

[0053] The Y pin of the NOR gate logic circuit U9 is connected to the first end of resistor R1; the second end of resistor R1 is connected to the input terminal of optocoupler U10; optocoupler U10 is connected to the cathode of diode D2-1, the anode of diode D2-2, and pin 16 of relay K1; the anode of diode D2-1 is connected to resistor R4; resistor R4 is connected to the +5V power supply; the cathode of diode D2-2 is connected to pin 1 of relay K1 and the +5V power supply; pin 9 of relay K1 is connected to the 220V alarm light signal; pins 8 and 4 of relay K1 are both connected to the alarm signal (To the host safety PLC).

[0054] Specifically, the fault logic signal output by the NOR gate logic circuit U9 drives the optocoupler U10 through the current-limiting resistor R1. In normal state (high-level input): the photodiode at the input terminal of the optocoupler U10 lights up, the output terminal is turned on, and the relay K1 coil is energized; in fault state (low-level input): the optocoupler U10 fails to operate, the output terminal is disconnected, and the relay K1 coil is de-energized and disconnects.

[0055] Relay K1 contains two sets of normally open contacts for local status indication: one set of contacts is connected to the 220V alarm light circuit. Figure 6 (13 locations in the middle), under normal conditions the contacts are engaged and the indicator light is on; under fault conditions the contacts are disengaged and the indicator light is off, realizing local fault visualization indication; host computer signal feedback: another set of contacts serves as a passive dry contact output ( Figure 6 (14 positions in the middle) Under normal conditions, the contacts are engaged and output a normal operation signal to the upper safety PLC; under fault conditions, the contacts are disengaged, the PLC does not receive the passive signal, triggering alarm, shutdown and other protection measures, realizing a complete closed loop from state perception to safety handling.

[0056] For scenarios involving monitoring six or more AC fans, a "relay contact series connection" solution is adopted for expansion. Figure 7 A schematic diagram of the structure of the multi-channel fan alarm connection provided in an embodiment of this application is shown.

[0057] A single relay K represents one 6-channel AC fan detection unit. Relays K1, K2, ..., Kn represent multiple 6-channel relay detection boards. The output contacts of relay K in the alarm execution module 103 of each board are connected in series. Figure 7 (The 15 positions in the middle are serial positions), and the signals after serial connection are uniformly connected to the upper-level safety PLC system.

[0058] Specifically, a failure in any AC fan will cause the relay on the corresponding detection board to disconnect, thus breaking the entire series circuit. The host PLC can monitor the circuit status change in real time and trigger a global alarm. The number of fans in series depends on the line impedance: when the host computer's I / O port signal voltage is 24V and the high-level threshold is 15V, as long as the voltage drop caused by the series line impedance is less than 9V, the monitoring requirements can be met. The number of AC fans to be detected can be flexibly expanded according to the actual application scenario.

[0059] Compared with the prior art, this application has the following advantages: 1. The fan current sampling and signal conversion circuit design uses an isolated mutual inductance sampling method with a precision sampling resistor to isolate power supply noise and interference, ensuring sampling accuracy. Then, through AC-DC conversion and RC low-pass filtering, the AC signal is converted into a low-ripple differential DC voltage, reducing common-mode interference and solving the problem that traditional detection circuits cannot adapt to the fault-free signal output of AC fans.

[0060] 2. The voltage comparison circuit adopts a precision resistor voltage divider design, with the set voltage between the single fan fault voltage and the normal operating voltage. It can accurately convert the analog voltage signal into a digital fault signal, ensuring that a fault will be alarmed and normal operation will not be falsely alarmed. The reference voltage circuit provides a stable reference. Compared with the traditional detection method that only relies on the fault output signal of the fan, it can comprehensively identify faults such as open circuit and burnout.

[0061] 3. The signal judgment adopts NOR gate logic, combined with the alarm structure of optocoupler driven relay. Through dual feedback of local indicator light and host computer passive signal, it ensures accurate fault judgment and reliable alarm response. It is suitable for AC fan detection scenarios with no fault output, and makes up for the applicability limitations of traditional detection circuits.

[0062] 4. Multi-channel fan alarms are expanded by connecting relay contacts in series. The alarm signals of multiple detection boards are connected in series to the upper PLC. Any fan failure will trigger a global alarm. The number of fans connected in series can be flexibly adjusted according to the line impedance, which can meet the monitoring needs of multiple fans for centralized heat dissipation in semiconductor equipment and has strong expandability.

[0063] Please see Figure 8 , Figure 8 A flowchart illustrating the fan status monitoring method provided in this application embodiment. Figure 8 As shown in the figure, the fan status monitoring method provided in this application embodiment includes: S201, the signal acquisition and conversion module is connected in series in the power supply circuit of multiple AC fans, and is used to acquire the total operating current flowing through all AC fans and convert the total operating current into a voltage signal.

[0064] S202. The input terminal of the fault judgment module is connected to the output terminal of the signal acquisition and conversion module, and is used to compare the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the fault of one AC fan and lower than the voltage value corresponding to the normal operation of all AC fans.

[0065] S203. The controlled end of the alarm execution module is connected to the output end of the fault judgment module, and is used to determine the overall working status of the multiple AC fans according to the fault logic signal.

[0066] Since the principle of the method in this application embodiment is similar to that of the fan status monitoring system described above in this application embodiment, the implementation of the method can refer to the implementation of the system, and the repeated parts will not be described again.

[0067] Please see Figure 9 , Figure 9 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 9 As shown, the electronic device 300 includes a processor 310, a memory 320, and a bus 330.

[0068] The memory 320 stores machine-readable instructions that can be executed by the processor 310. When the electronic device 300 is running, the processor 310 and the memory 320 communicate via the bus 330. When the machine-readable instructions are executed by the processor 310, the steps of the method described above can be performed. For specific implementation details, please refer to the method embodiment, which will not be repeated here.

[0069] This application also provides a computer-readable storage medium storing a computer program. When the computer program is run by a processor, it can execute the steps of the method described above. For specific implementation details, please refer to the method embodiments, which will not be repeated here.

[0070] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0071] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0072] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0073] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0074] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0075] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A fan status monitoring system, characterized in that, The system includes: The signal acquisition and conversion module is used to acquire the total operating current flowing through multiple AC fans and convert the total operating current into a voltage signal; The fault judgment module has its input terminal connected to the output terminal of the signal acquisition and conversion module. It is used to compare the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the failure of one AC fan and lower than the voltage value corresponding to the normal operation of all AC fans. An alarm execution module is provided, the controlled end of which is connected to the output end of the fault judgment module, and is used to determine the overall operating status of the plurality of AC fans based on the fault logic signal.

2. The system according to claim 1, characterized in that, The fault diagnosis module includes: A voltage comparison circuit is provided, the input of which is connected to the output of the signal acquisition and conversion module. The voltage comparison circuit is used to compare the voltage signal with the preset fault voltage threshold and the reference voltage value respectively, so as to output a comparison signal. A logic gate circuit, the input of which is connected to the output of the voltage comparison circuit to receive the comparison signal, and the output of which is connected to the controlled terminal of the alarm execution module.

3. The system according to claim 2, characterized in that, The voltage comparison circuit includes a first voltage comparator, a second voltage comparator, a threshold voltage setting circuit, and a reference voltage setting circuit; The threshold voltage setting circuit is connected to the first input terminal of the first voltage comparator, the reference voltage setting circuit is connected to the first input terminal of the second voltage comparator, the second input terminal of the first voltage comparator and the second input terminal of the second voltage comparator are connected to the output terminal of the signal acquisition and conversion module, the output terminal of the first voltage comparator outputs a first comparison signal, and the output terminal of the second voltage comparator outputs a second comparison signal.

4. The system according to claim 1, characterized in that, The signal acquisition and conversion module includes a current transformer and a sampling resistor; The primary winding of the current transformer is connected in series with the power supply circuit of the AC fan, and the two ends of the secondary winding of the current transformer are connected to the two ends of the sampling resistor.

5. The system according to claim 4, characterized in that, The signal acquisition and conversion module also includes an AC-DC conversion circuit and a filtering and amplification circuit; The AC input terminal of the AC-DC conversion circuit is connected to both ends of the sampling resistor to receive a first AC voltage signal. The AC-DC conversion circuit is used to convert the first AC voltage signal into a DC differential signal. The input terminal of the filter amplifier circuit is connected to the DC output terminal of the AC-DC conversion circuit to output the voltage signal.

6. The system according to claim 5, characterized in that, The filtering and amplification circuit includes a filter, a differential amplifier, and a non-inverting amplifier; The input terminal of the filter is connected to the DC output terminal of the AC-DC conversion circuit; The input terminal of the differential amplifier is connected to the output terminal of the filter to convert the filtered DC differential signal into a single-ended signal. The input terminal of the in-phase amplifier is connected to the output terminal of the differential amplifier to amplify the single-ended signal, and its output terminal outputs the voltage signal.

7. The system according to claim 1, characterized in that, The alarm execution module includes an optocoupler and a relay; The input terminal of the optocoupler is connected to the output terminal of the fault judgment module, and the output terminal of the optocoupler is connected to and drives the coil of the relay. At least one set of normally open contacts of the relay constitutes an alarm circuit.

8. A fan status monitoring method, characterized in that, The method includes: The signal acquisition and conversion module is connected in series in the power supply circuit of multiple AC fans to acquire the total operating current flowing through all AC fans and convert the total operating current into a voltage signal; The input terminal of the fault judgment module is connected to the output terminal of the signal acquisition and conversion module, and is used to compare the voltage signal with a preset fault voltage threshold to output a fault logic signal. The preset fault voltage threshold is higher than the voltage value corresponding to the failure of one AC fan and lower than the voltage value corresponding to the normal operation of all AC fans. The controlled end of the alarm execution module is connected to the output end of the fault judgment module, and is used to determine the overall working status of the multiple AC fans based on the fault logic signal.

9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus, and the processor executes the machine-readable instructions to perform the steps of the method as described in claim 8.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the method as described in claim 8.

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