Plasma-resistant valve plate sealing assembly and preparation method and application thereof

Abstract

The invention relates to the technical field of semiconductor equipment manufacturing and sealing, and particularly discloses a plasma-resistant valve plate sealing assembly and a preparation method and application thereof. The assembly comprises a metal base body, an elastic sealing piece, a PFA isolation belt and an infiltration body between the metal base body and the PFA isolation belt, during preparation, the elastic sealing piece in a specific shape is installed in an outer-layer annular groove, then a PFA melt in an inner-layer annular groove is subjected to hot press forming, the PFA melt and the surface layer of the elastic sealing piece are mutually infiltrated and fused through high temperature and high pressure to form a transition layer, namely the infiltration body, and the PFA isolation belt and the metal base body are combined. According to the finished product, plasma erosion is blocked through the PFA isolation belt, the structural stability is improved through the infiltration layer, the dust generation amount and weight loss are remarkably reduced, the service life is prolonged, and the valve plate sealing assembly is suitable for semiconductor plasma process equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment manufacturing and encapsulation technology, and in particular to a plasma-resistant valve plate sealing assembly, its preparation method, and its application. Background Technology

[0002] Currently, in many processes of semiconductor manufacturing, such as etching, deposition, and plasma ashing, highly active plasmas are generated inside the process chambers. While processing the wafers, these plasmas also physically / chemically etch the components inside the chambers, especially dynamic seals such as valves.

[0003] Traditional valve plate seals typically rely on the elastic deformation of rubber (such as perfluoroelastomer or silicone) to achieve sealing. While rubber materials provide good sealing support and fit, their resistance to plasma etching is poor. Prolonged exposure to plasma gradually erodes the contact points between the rubber and the metal substrate, significantly weakening the material's bonding and fixing strength. This can lead to seal failure and even particulate contamination, severely impacting wafer processing yield and equipment operational stability.

[0004] To improve the corrosion resistance of seals, the following methods are typically employed in existing technologies: (1) Coating or bonding fluoroplastics (such as PFA, PTFE) onto a metal substrate as a sacrificial protective device. However, simple coating or bonding methods often have insufficient bonding strength, especially during dynamic valve opening and closing processes. The fluoroplastic layer is easily peeled off or damaged from the rubber or metal substrate, and plasma can still penetrate through tiny gaps and corrode the internal rubber structure. (2) Modification of perfluoroether rubber, but due to the limited weather resistance of the rubber matrix itself, even if it is modified, it is still impossible to significantly improve the overall corrosion resistance of the rubber. (3) Adding inorganic fillers to perfluoroether rubber, but because inorganic fillers have poor compatibility in the rubber matrix and are prone to agglomeration, it will lead to a decrease in the processing performance of the rubber and fail to meet the needs of high-end sealing scenarios.

[0005] Therefore, there is an urgent need for a method to combine the molded protective layer with the rubber sealing body in a high-strength, seamless manner to significantly extend the service life of the components. Summary of the Invention

[0006] To address the technical problems existing in the background art, the present invention proposes a plasma-resistant valve plate sealing assembly, comprising a metal substrate, an elastic seal, and a PFA isolation strip. The sealing mating surface of the metal substrate has an outer annular groove and an inner annular groove. The elastic seal is embedded in the outer annular groove. An annular boss is provided between the outer annular groove and the inner annular groove. The top surface of the annular boss is higher than the bottom of the outer annular groove and lower than the sealing mating surface of the metal substrate. The resilient seal contains PFA. The PFA isolation strip comprises a PFA matrix and a melt infiltrate; The PFA matrix is ​​embedded in the inner annular groove; The infiltrated material extends from the PFA matrix through the surface of the annular boss to the elastic seal and is integrally connected to the elastic seal.

[0007] In this invention, the area where the elastic seal (in this embodiment, a sealing rubber ring) contacts the metal substrate has been infiltrated with a melt-infiltrated material (see...). Figure 3 The area marked 131 in the attached diagram is protected, which can effectively prevent plasma erosion and enable the elastic seal to play a long-term sealing and supporting role. When the elastic seal is embedded in the outer annular groove (see...) Figure 1 In the area marked 11 in the attached figure, the PFA matrix is ​​embedded in the inner annular groove (see...). Figure 1 In the area marked 12 in the attached figure, both the outer and inner annular grooves provide a certain degree of physical anchoring for the insert, without relying on adhesive for fixation; The reason for specifically using PFA insulation tape is that, compared with other fluoroplastics, PFA, as a branched fluoroplastic, has perfluoroalkoxy side chains. The PFA molecular chains are intertwined, and in actual use, PFA will not produce serious dust generation due to plasma erosion, making it well-suited for application in the semiconductor field.

[0008] The present invention also proposes a method for preparing a plasma-resistant valve plate sealing assembly, the method comprising the following steps: The elastic seal is installed in the outer annular groove of the metal substrate, and pressure is applied to the PFA melt in the inner annular groove. After pressure holding and molding, the component blank is cooled to the cooling temperature. After removing the flash from the component blank, the valve plate sealing component is obtained.

[0009] Preferably, the elastic seal is obtained by mixing perfluoroether raw rubber, PFA micro powder and additives to form a compound, extruding the compound to form a rubber strip, and then subjecting the rubber strip to primary and secondary vulcanization treatments to obtain the elastic seal.

[0010] More preferably, the mixing temperature is 40-60℃; More preferably, the extrusion temperature is 60-100℃, and the extrusion pressure is 3-8MPa; More preferably, the primary vulcanization temperature is 150-200℃, and the primary vulcanization time is 5-20 min; More preferably, the secondary vulcanization temperature is 200-270℃, and the secondary vulcanization time is 3-20h.

[0011] More preferably, the additives include vulcanizing agents, release agents, and antioxidants; More preferably, the mass ratio of the perfluoroether raw rubber to the PFA micro powder is 100:5-15.

[0012] More preferably, the mass ratio of the perfluoroether raw rubber to the vulcanizing agent is 100:0.8-2.0; More preferably, the mass ratio of perfluoroether raw rubber to mold release agent is 100:0.5-1.0; More preferably, the mass ratio of perfluoroether raw rubber to antioxidant is 100:0.5-1.0; More preferably, the perfluoroalkoxy resin microparticle size is 5-20 μm; More preferably, the vulcanizing agent is any one of 2,5-dimethyl-2,5-di(tert-butylperoxy)hexane, benzoyl peroxide, or di-tert-butyl perbenzoate; More preferably, the release agent is any one of octadecylamine, octadecylamine polyoxyethylene ether, or N,N-dimethyl-n-octadecylamine; More preferably, the antioxidant is any one of triethylene glycol ether-di(3-tert-butyl-4-hydroxy-5-methylphenyl)propionate (XH-245), 2,6-di-tert-butyl-p-cresol, or 2-chloro-3-fluoro-4-hydroxypyridine (antioxidant 5057); Preferably, the PFA melt temperature is 350-380℃; Preferably, the PFA melt further includes 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, fluorinated unsaturated carboxylates, and peroxides.

[0013] Preferably, the holding pressure is 120-140 MPa and the holding time is 25-40 s.

[0014] Preferably, the cooling time is 10-20 seconds and the cooling temperature is 150-240°C.

[0015] In this invention, a transition layer, or melt-infiltrated body, is formed between the PFA melt and the elastic seal under heating and pressurization. The PFA melt has a high temperature, and when it comes into contact with the elastic seal, the portion of the elastic seal near the surface, especially the PFA micropowder within the elastic seal, also begins to melt. The two penetrate and fuse with each other, forming a melt-infiltrated body. The melting temperature of 350-380℃ is chosen because, firstly, the elastic seal has undergone two vulcanization processes, giving it a certain degree of heat resistance and preventing severe thermal decomposition during the melt-infiltration process. Secondly, the higher melting temperature not only ensures that the PFA has good fluidity, filling the bottom of the inner groove, but also allows the molten PFA to adhere tightly to the surface of the elastic seal, promoting the penetration of the PFA melt into the micropores of the elastic seal surface and increasing the connection strength of the transition layer.

[0016] In this invention, when the PFA melt further includes 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane and fluorinated unsaturated carboxylates, chemical bonds will be generated in the melt under the action of free radicals and hot pressing, enhancing the strength of the integrated connection. The free radicals originate from two sources: first, peroxides sprayed onto the rubber surface; and second, peroxides uniformly loaded onto the surface of the plastic granules. When the free radicals originate from the first source, the interface bonding is better, effectively protecting the joint between the sealing rubber ring and the metal matrix. When the free radicals originate from the second source, the chemical bonds occur simultaneously at the interface and inside the PFA melt, resulting in not only high interface bonding strength but also increased corrosion resistance of the PFA matrix, significantly improving the service life of the sealing assembly.

[0017] The present invention also proposes an application of the above-mentioned plasma-resistant valve plate sealing assembly in semiconductors.

[0018] Beneficial effects of this invention: (1) The PFA isolation strip blocked the plasma from etching the elastic seal-metal contact area, protecting the bonding strength and fixing strength of the elastic seal; (2) The melt infiltrate eliminates the gaps between materials, preventing plasma from penetrating into the gaps; (3) The PFA isolation strip does not completely cover all areas of the elastic seal, giving full play to the sealing support performance of the elastic seal and the corrosion resistance of PFA, thus improving the overall lifespan of the component in complex environments. Attached Figure Description

[0019] Figure 1 Cross-sectional views of the metal substrates in Examples 1-3; Figure 2 This is a cross-sectional view of the elastic seal installed on the metal substrate in Examples 1-3; Figure 3This is a cross-sectional view of the finished valve plate sealing assembly in Examples 1-3; The following are the reference numerals: 1-metal matrix; 11-outer annular groove; 13-annular boss; 12-inner annular groove; 111-elastic seal; 131-melting infiltrate; 121-PFA matrix. Detailed Implementation

[0020] To facilitate understanding of the present invention, a more comprehensive description will be provided below with reference to specific embodiments. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of the present invention.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0022] The technical solution of the present invention will now be described more clearly and completely with reference to specific embodiments and comparative examples.

[0023] Example 1 This embodiment proposes a plasma-resistant valve plate sealing assembly, the preparation method of which includes the following steps: (1) Select aluminum alloy material as metal substrate, process two annular grooves on the surface of the metal substrate, degrease and clean the surface of the grooves to remove impurities from the surface of the grooves; (2) Weigh 100 parts of perfluoroether raw rubber, 10 parts of perfluoroalkoxy resin (PFA) micro powder (particle size 10 μm), 2 parts of vulcanizing agent 2,5-dimethyl-2,5-di(tert-butylperoxy)hexane, 1 part of release agent octadecylamine, and 0.5 parts of antioxidant triethylene glycol ether-di(3-tert-butyl-4-hydroxy-5-methylphenyl)propionate (XH-245) according to the mass fraction, place them in a mixer, and mix them evenly to obtain a compound; process the compound into a rubber strip of a specific shape through an extruder, and then perform the first vulcanization of the extruded rubber strip in a press to obtain a sealing rubber ring that matches the shape of the groove; then place the sealing ring in a vacuum oven for a second vulcanization; the processing parameters are as follows: Mixing temperature: 50℃, extrusion temperature: 70℃, extrusion pressure: 5MPa; First vulcanization temperature: 190℃, first vulcanization time: 15min; Secondary vulcanization temperature: 260℃, secondary vulcanization time: 10h; (3) Install the sealing rubber ring in the outer groove of the metal substrate, then heat the perfluoroalkoxy resin (PFA) to the melting temperature. After the resin is completely melted, inject it into the inner groove of the metal substrate. Apply pressure to the molten PFA through the mold pressure structure. After pressure molding, quickly cool the component blank to the cooling temperature, open the mold, and take out the component blank. The processing parameters are: Melting temperature: 360℃; Holding pressure: 130MPa, holding time: 35s; Cooling time: 15s, cooling temperature: 200℃; (4) When the component blank is cooled to room temperature, remove the flash from the edge of the component blank and clean the surface of the component blank. After the size inspection is qualified, the final valve plate sealing component is obtained.

[0024] Example 2 This embodiment proposes a plasma-resistant valve plate sealing assembly, the preparation method of which includes the following steps: (1) Select aluminum alloy material as metal substrate, process two annular grooves on the surface of the metal substrate, degrease and clean the surface of the grooves to remove impurities from the surface of the grooves; (2) Weigh 100 parts of perfluoroether raw rubber, 12 parts of perfluoroalkoxy resin (PFA) micro powder (particle size 10 μm), 1.6 parts of vulcanizing agent benzoyl peroxide, 1 part of release agent octadecylamine, and 0.8 parts of antioxidant 2,6-di-tert-butyl-p-cresol according to the mass fraction. Place them in a mixer and mix them evenly to obtain a compound. Process the compound into a rubber strip of a specific shape through an extruder. Then, perform the first vulcanization on the extruded rubber strip in a press to obtain a sealing rubber ring that matches the shape of the groove. Then, place the sealing ring in a vacuum oven for a second vulcanization. The processing parameters are as follows: Mixing temperature: 60℃, extrusion temperature: 90℃, extrusion pressure: 3MPa; First vulcanization temperature: 150℃, first vulcanization time: 20min; Secondary vulcanization temperature: 230℃, secondary vulcanization time: 15h; (3) Install the sealing rubber ring in the outer groove of the metal substrate, then heat the perfluoroalkoxy resin (PFA) to the melting temperature. After the resin is completely melted, inject it into the inner groove of the metal substrate. Apply pressure to the molten PFA through the mold pressure structure. After pressure molding, quickly cool the component blank to the cooling temperature, open the mold, and take out the component blank. The processing parameters are: Melting temperature: 380℃; Holding pressure: 120MPa, holding time: 40s; Cooling time: 20s, cooling temperature: 150℃; (4) When the component blank is cooled to room temperature, the flash on the edge of the component blank is cut off and the surface of the component blank is cleaned. After the size is qualified, the final valve plate sealing component is obtained.

[0025] Example 3 This embodiment proposes a plasma-resistant valve plate sealing assembly, the preparation method of which includes the following steps: (1) Select aluminum alloy material as metal substrate, process two annular grooves on the surface of the metal substrate, degrease and clean the surface of the grooves to remove impurities from the surface of the grooves; (2) Weigh 100 parts of perfluoroether raw rubber, 6 parts of perfluoroalkoxy resin (PFA) micro powder (particle size 8 μm), 0.8 parts of vulcanizing agent 2,5-dimethyl-2,5-di(tert-butylperoxy)hexane, 1 part of release agent N,N-dimethyl-n-octadecylamine, and 0.6 parts of antioxidant 2-chloro-3-fluoro-4-hydroxypyridine (antioxidant 5057) according to the mass fraction. Place them in a mixer and mix them evenly to obtain a compound. Process the compound into a rubber strip of a specific shape through an extruder. Then, perform the first vulcanization on the extruded rubber strip in a press to obtain a sealing rubber ring that matches the shape of the groove. Then, place the sealing ring in a vacuum oven for a second vulcanization. The processing parameters are as follows: Mixing temperature: 40℃, extrusion temperature: 60℃, extrusion pressure: 8MPa; First vulcanization temperature: 180℃, first vulcanization time: 15min; Secondary vulcanization temperature: 270℃, secondary vulcanization time: 5h; (3) Install the sealing rubber ring in the outer groove of the metal substrate, then heat the perfluoroalkoxy resin (PFA) to the melting temperature. After the resin is completely melted, inject it into the inner groove of the metal substrate. Apply pressure to the molten PFA through the mold pressure structure. After pressure molding, quickly cool the component blank to the cooling temperature, open the mold, and take out the component blank. The processing parameters are: Melting temperature: 350℃; Holding pressure: 140MPa, holding time: 30s; Cooling time: 15s, cooling temperature: 160℃; (4) When the component blank is cooled to room temperature, the flash on the edge of the component blank is cut off and the surface of the component blank is cleaned. After the size is qualified, the final valve plate sealing component is obtained.

[0026] Example 4 This embodiment proposes a plasma-resistant valve plate sealing assembly, the preparation method of which includes the following steps: (1) Select aluminum alloy material as metal substrate, process two annular grooves on the surface of the metal substrate, degrease and clean the surface of the grooves to remove impurities from the surface of the grooves; (2) Weigh 100 parts of perfluoroether raw rubber, 10 parts of perfluoroalkoxy resin (PFA) micro powder (particle size 10 μm), 2 parts of vulcanizing agent 2,5-dimethyl-2,5-di(tert-butylperoxy)hexane, 1 part of release agent octadecylamine, and 0.5 parts of antioxidant triethylene glycol ether-di(3-tert-butyl-4-hydroxy-5-methylphenyl)propionate (XH-245) according to the mass fraction, place them in a mixer, and mix them evenly to obtain a compound; process the compound into a rubber strip of a specific shape through an extruder, and then perform the first vulcanization of the extruded rubber strip in a press to obtain a sealing rubber ring that matches the shape of the groove; then place the sealing ring in a vacuum oven for a second vulcanization; the processing parameters are as follows: Mixing temperature: 50℃, extrusion temperature: 70℃, extrusion pressure: 5MPa; First vulcanization temperature: 190℃, first vulcanization time: 15min; Secondary vulcanization temperature: 260℃, secondary vulcanization time: 10h; (3) Install the sealing rubber ring in the outer groove of the metal substrate. Mix 100 parts of perfluoroalkoxy resin (PFA), 3 parts of 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane and 2 parts of sodium 2-fluoroacrylate to granulate and obtain PFA masterbatch. Then, dissolve 2,5-dimethyl-2,5-di(tert-butylperoxy)hexane in hexafluorom-xylene and spray it onto the surface of the PFA masterbatch. After low-temperature drying, obtain modified PFA plastic granules. Place the modified PFA plastic granules in the inner groove of the metal substrate. Apply pressure to the PFA melt through the mold hot pressing structure. After holding the pressure to form, quickly cool the component blank to the cooling temperature, open the mold, and take out the component blank. The processing parameters are: Melting temperature: 360℃; Holding pressure: 130MPa, holding time: 35s; Cooling time: 15s, cooling temperature: 200℃; (4) When the component blank is cooled to room temperature, remove the flash from the edge of the component blank and clean the surface of the component blank. After the size inspection is qualified, the final valve plate sealing component is obtained.

[0027] When the PFA melt comes into contact with the sealing rubber ring, under hot-pressing conditions, the PFA melt permeates the surface of the sealing rubber ring and the PFA micropowder in the surface layer, forming a melt infiltrate. In particular, the fluorinated phases in the PFA melt, such as 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane and sodium 2-fluoroacrylate, migrate to the melt infiltrate. Sodium 2-fluoroacrylate can be polymerized by free radicals generated by the thermal decomposition of peroxides, forming chemical bonds in the melt infiltrate. The free radicals generated by the thermal decomposition of peroxides also exist in part inside the PFA melt, forming chemical bonds inside the PFA melt as well, which enhances the corrosion resistance of the PFA matrix. The final valve plate sealing assembly has high connection strength and is not easily corroded by plasma.

[0028] Comparative Example 1 This comparative example proposes a plasma-resistant valve plate sealing assembly, which is prepared in the same way as in Example 1, except that step (3) is replaced with "applying an adhesive to the inner groove, attaching the already formed PFA plate to the metal substrate with adhesive, and drying to obtain the valve plate sealing assembly blank".

[0029] In this comparative example, the PFA sheet and rubber are molded separately and not connected. The plasma will still erode the joint between the rubber and the metal substrate, resulting in a shorter service life for the valve plate sealing assembly.

[0030] Comparative Example 2 This comparative example proposes a plasma-resistant valve plate sealing assembly, the preparation method of which is the same as that of Example 1, except that step (3) is replaced by "putting the sealing rubber ring into the mold cavity, putting the PFA film coated with adhesive into the positioning cavity, closing the mold and pressing to obtain the sealing rubber ring with the PFA film wrapped around it, and then installing the sealing rubber ring with the PFA film wrapped around it in the outer groove of the metal substrate to obtain the plasma-resistant valve plate sealing assembly blank".

[0031] In this comparative example, the PFA film is fixed to the outer layer of the sealing ring by adhesive bonding. However, the adhesive bonding strength is limited. In actual use, the film is prone to falling off or breaking with the number of uses. The broken film is more likely to generate dust.

[0032] Comparative Example 3 This comparative example presents a plasma-resistant valve plate sealing assembly, the preparation method of which is the same as that of Example 4, except that “2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane” is removed in step (3).

[0033] In this comparative example, since no fluorine-containing unsaturated monomers were mixed into the PFA melt, sodium 2-fluoroacrylate could not play a role in chemical bonding. Similarly, if small molecule fluorine-containing unsaturated monomers were used, the small molecule fluorine-containing unsaturated monomers would vaporize rapidly during the melting process, resulting in a final effect similar to that of Comparative Example 3.

[0034] The performance of the valve plate sealing assemblies obtained in Examples 1-4 and Comparative Examples 1-3 was tested, including: Plasma resistance test: The valve plate sealing assemblies obtained in each embodiment and each comparative example were placed on the reaction table of a plasma etching machine. The heating plate temperature was 250°C, RPS was 6000W, the gas was NF3, and the flow rate was 3000sccm. The etching was carried out for 48 hours. Then the weight loss rate of the assembly was measured. Practical application experiment: The valve plate sealing assemblies obtained in each embodiment and comparative example were subjected to a "turn-on-off-operation-turn-off-operation" cycle. An air particle counter was used to monitor the concentration of particles of different sizes in the air, such as ≥0.1μm, ≥0.2μm, and ≥0.3μm. When the monitored particle concentration exceeded the preset threshold, it was considered that the valve plate sealing assembly had become severely dusty. The number of cycles of the valve plate sealing assembly at this time was recorded. The test results are detailed in Table 1. Table 1 Test results of valve plate sealing assemblies in various embodiments and comparative examples

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A plasma-resistant valve plate sealing assembly, comprising a metal substrate, an elastic seal, and a PFA isolation strip, wherein the sealing mating surface of the metal substrate has an outer annular groove and an inner annular groove, and the elastic seal is embedded in the outer annular groove, characterized in that, An annular boss is provided between the outer annular groove and the inner annular groove. The top surface of the annular boss is higher than the bottom of the outer annular groove and lower than the sealing mating surface of the metal substrate. The resilient seal contains PFA. The PFA isolation strip comprises a PFA matrix and a melt infiltrate; The PFA matrix is ​​embedded in the inner annular groove; The infiltrated material extends from the PFA matrix through the surface of the annular boss to the elastic seal and is integrally connected to the elastic seal.

2. A method for preparing the plasma-resistant valve plate sealing assembly as described in claim 1, characterized in that, The preparation method includes the following steps: The elastic seal is installed in the outer annular groove of the metal substrate, and pressure is applied to the PFA melt in the inner annular groove. After pressure holding and molding, the component blank is cooled to the cooling temperature. After removing the flash from the component blank, the valve plate sealing component is obtained.

3. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 2, characterized in that, The elastic seal is obtained by mixing perfluoroether raw rubber, PFA micro powder and additives to form a compound, extruding the compound to form a rubber strip, and then subjecting the rubber strip to primary and secondary vulcanization treatments.

4. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 3, characterized in that, The mass ratio of the perfluoroether raw rubber to PFA micro powder is 100:5-15.

5. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 2, characterized in that, The PFA melt temperature is 350-380℃.

6. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 2, characterized in that, The PFA melt also includes 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, fluorinated unsaturated carboxylates, and peroxides.

7. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 2, characterized in that, The pressure holding pressure is 120-140 MPa, and the pressure holding time is 25-40 seconds.

8. The method for preparing the plasma-resistant valve plate sealing assembly according to claim 2, characterized in that, The cooling time is 10-20 seconds, and the cooling temperature is 150-240℃.

9. Application of the plasma-resistant valve plate sealing assembly of claim 1 in semiconductors.

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