Membrane for semiconductor diaphragm type flow control component and semiconductor flow control component

Abstract

The invention discloses a diaphragm for a semiconductor diaphragm type flow control component and the semiconductor flow control component, the diaphragm is arranged between a valve body and a valve cover of the flow control component, is used for isolating and sealing fluid flowing in the valve body from the outside, and comprises a function operation area, a rebound area and a sealing area; the functional operation area is correspondingly arranged below the valve rod, the whole functional operation area is of an arc-shaped structure, and the convex surface of the functional operation area faces the interior of the valve body; the springback area deforms from the edge of the function operation area to the direction far away from the valve body and is of an arc-shaped structure, so that a springback space is provided for the function operation area; the sealing area extends in a horizontal trend from the free end of the springback area to the direction far away from the function operation area. Alternating stress generated by repeated opening and closing of the valve can be effectively dispersed, stress concentration at the transition position of the structure is eliminated, fatigue microcracks and irreversible plastic deformation are reduced, and the service life of the diaphragm is remarkably prolonged.

Description

Technical Field

[0001] This invention relates to the field of valve technology, and more specifically to a diaphragm and a semiconductor flow control component for use in semiconductor diaphragm flow control components. Background Technology

[0002] In existing technologies, the diaphragm is the core component of a diaphragm valve, serving multiple functions including opening and closing control, media isolation, and pressure sealing. It acts as both the actuating component for valve switching and a safety barrier separating the media from the driving components. Its main advantages lie in its specific shape design (such as convex spherical or planar surfaces) and optimized sealing surface, which improves stress distribution and sealing performance. Specifically, the diaphragm uses its elastic deformation to cut off and connect the fluid passage, achieving opening and closing control. It completely isolates the media within the valve body from the upper valve cover, valve stem, and other driving components, preventing corrosion of the driving components and contamination of the media. It also eliminates the risk of media leakage at the valve stem, eliminating the need for additional packing seals. When the valve is closed, the diaphragm and valve seat fit tightly together to form a sealing structure, preventing fluid leakage.

[0003] However, existing diaphragm valves have significant shortcomings in actual operating conditions. Their service life is limited by multiple factors, among which permanent deformation (lack of resilience) is the most critical and irreversible mechanical damage leading to diaphragm failure. Permanent deformation refers to the loss of the diaphragm material's original elastic recovery ability under long-term or extreme stress, making it unable to return to its initial shape when the valve is opened. This is mainly caused by mechanical stress and fatigue damage: repeated valve opening and closing subject the diaphragm to alternating stress, and local stress concentration is prone to occur at structural transitions and clamping areas. When the material's load limit is exceeded, fatigue microcracks will appear, which will then develop into visible cracks leading to failure. In addition, incorrect operations such as over-stroke will instantly apply compressive stress to the diaphragm far exceeding the design value, causing irreversible plastic deformation and completely eliminating its resilience. After permanent deformation of the diaphragm, it will lead to incomplete valve closure and internal leakage, while also compromising the accuracy of flow regulation, causing the operation to lose its correspondence with fluid control. Under harsh operating conditions such as high temperature, high pressure difference, or frequent operation, existing diaphragms cannot resist permanent deformation through their own structure or material properties, cannot effectively extend their service life, and cannot guarantee the reliability of system operation.

[0004] Therefore, a new technological solution is needed. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide a diaphragm for a semiconductor diaphragm flow control component and a semiconductor flow control component, so as to at least solve the problem of low lifespan of existing valve diaphragms.

[0006] The embodiments of the present invention provide the following technical solutions: This invention provides a diaphragm for a semiconductor diaphragm-type flow control component, disposed between the valve body and valve cover of the flow control component, for isolating and sealing the fluid flowing inside the valve body from the outside environment, and the diaphragm can open and close the inlet and outlet channels inside the valve body under external force to achieve on / off control, including: The function operation area is located below the valve stem and is configured as an arc-shaped structure, with the convex surface of the function operation area facing the interior of the valve body. The springback zone is formed by deforming from the edge of the functional operation area away from the valve body in an arc shape to provide springback space to the functional operation area. A sealing area extends horizontally from the free end of the rebound area away from the functional operation area, and the sealing area is used to clamp between the valve body and the valve cover.

[0007] Preferably, the functional operating area includes at least a central sealing area covering the valve seat, which is located inside the valve body at the fluid inlet.

[0008] Preferably, the rebound zone includes a wave crest protruding in a direction away from the valve body, the wave crest having a first arc located near the functional operation area, a second arc located at the wave crest position, and a third arc located near the sealing area; The difference in the radii of the first arc, the second arc, and the third arc is no greater than 30% of the radius of the largest arc. Preferably, the radius of the first arc, the second arc, and the third arc is 10%-15% of the diameter of the diaphragm.

[0009] Preferably, the rebound zone includes at least two peaks and at least one trough, and the peaks and troughs are connected end to end to form a wave-shaped rebound zone.

[0010] Preferably, the distance between the peak and / or the trough and the plane where the valve seat is located is set based on the flow rate value of the flow control component.

[0011] Preferably, the longitudinal height of the plurality of wave peaks gradually decreases from near the functional operation area to far away from the functional operation area.

[0012] Preferably, the longitudinal distance from the multiple wave peaks to the sealing area gradually decreases from near the functional operating area to far away from the functional operating area.

[0013] Preferably, the central angle of the crest or trough is 75°-95°.

[0014] Preferably, the diaphragm is integrally formed from an elastic metal sheet made of at least the following materials: nickel-based alloy, cobalt-based alloy, and stainless steel; Preferably, the thickness of the diaphragm is 0.06mm-0.2mm.

[0015] This invention also provides a semiconductor flow control component, comprising: Valve body, wherein the valve body forms a medium inlet and outlet channel; The valve cover is fixedly connected to the opening of the valve body; The diaphragm as described above is sandwiched between the valve body and the valve cover to isolate and seal the fluid flowing inside the valve body from the outside. A drive assembly is fixed to the valve body. The valve stem of the drive assembly is located above the diaphragm and is set corresponding to the functional operation area of ​​the diaphragm. It is used to drive the diaphragm to move to open and close the medium inlet and outlet channel.

[0016] Based on common knowledge in the field, the preferred conditions described can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0017] Compared with the prior art, the beneficial effects that the at least one technical solution adopted in the embodiments of the present invention can achieve include at least: This invention discloses a diaphragm for a semiconductor diaphragm-type flow control component. By setting the functional operating area to an arc-shaped structure with its convex surface facing away from the valve stem, it can adapt to the force applied by the valve stem. This ensures that the direction of the diaphragm's deformation under pressure during valve opening and closing is consistent with the direction of the force applied by the valve stem. The functional operating area at the center of the diaphragm is always concave towards the valve body; closing the valve only deepens the concavity, with the deformation direction always in the same direction. Furthermore, by setting the periphery of the functional operating area to an arc-shaped structure that deforms in the opposite direction to the functional operating area, the rebound performance of the functional operating area can be ensured. Based on this structure, for the curved section of the rebound area, the stress state on the inner and outer sides will always remain stable. That is, the inner side is always under pressure, and the outer side is always under tension, without alternating changes in stress direction reversal. This eliminates stress concentration at structural transitions, significantly reduces the accumulation of fatigue damage in the material, reduces fatigue microcracks and irreversible plastic deformation, solves the problem of existing diaphragms failing due to fatigue cracks, and extends the service life of the diaphragm. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of an existing membrane device applied to a diaphragm-type flow control component; Figure 2 This is a schematic diagram of the installation of a diaphragm for a semiconductor diaphragm-type flow control component according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a diaphragm for a semiconductor diaphragm-type flow control component according to an embodiment of the present invention. Figure 1 ; Figure 4 This is a schematic diagram of the structure of a diaphragm for a semiconductor diaphragm-type flow control component according to an embodiment of the present invention. Figure 2 .

[0020] The reference numerals in the drawings of this invention are as follows: 1. Diaphragm; 11. Functional operating area; 12. Rebound area; 121. Crest; 121a. First arc; 121b. Second arc; 121c. Third arc; 122. Trough; 13. Sealing area. Detailed Implementation

[0021] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0022] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0024] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0025] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0026] Chinese patent CN115789292A discloses a pneumatic diaphragm valve, which features a diaphragm with a convex surface facing the valve stem on the air inlet channel of the valve body (its structure can be found in [reference needed]). Figure 1 Furthermore, when the piston rod is pressed down in the valve body, the diaphragm seals the air intake pipe of the valve body. When the piston rod moves up, the diaphragm recovers under its own elasticity to open the air intake pipe.

[0027] like Figure 1 As shown, in existing diaphragm valves, the diaphragm has an arc-shaped structure, with its convex surface facing the valve stem and its concave surface facing the valve body. Its stress state during operation can be divided into three characteristic regions, as follows: 1. Central area—directly pressure-bearing zone The diaphragm center is rigidly connected to the valve stem. When the valve is closed, the valve stem pushes the diaphragm center downwards, and this area bears axial compressive stress; when the valve is opened, the valve stem retracts upwards, and the diaphragm center area rebounds, bearing axial tensile stress. Under this repeated alternating compression and tension load, the central connection area (such as the junction of the valve seat and the diaphragm) becomes a first-class stress concentration area. If there are machining marks, material inhomogeneity, or microscopic defects in this area, fatigue cracks are very likely to initiate here.

[0028] 2. Arched bending section—main deformation zone The arched bend, located on the outer periphery of the central region, is the core area for the diaphragm's elastic deformation and also the most stress-complex part. As the valve stem is pressed down, the arched bend is gradually straightened, with its inner (concave) side bearing compressive stress and its outer (convex) side bearing tensile stress. Due to the relatively thin diaphragm and small bending radius, a significant tensile stress peak forms on the outer surface of the bend. This "inner compression, outer tension" stress distribution pattern makes the outer side of the bend a second type of stress concentration area. As the diaphragm repeatedly flips during valve opening and closing, the arched bend undergoes repeated deformation, causing the material molecular chains in the outer (convex) tensile stress area to be repeatedly stretched and contracted, gradually accumulating fatigue damage.

[0029] 3. Fixed edge region—constrained boundary region The outer circumference of the diaphragm is secured by upper and lower valve covers with bolts, forming a rigid fixed boundary. When the center of the diaphragm moves up and down, the transition area between the curved section and the fixed edge area is subjected to the combined effects of shear stress and bending stress. Since the displacement at the boundary is completely constrained, while the main body of the diaphragm is still moving, this transition area will form the highest stress gradient, becoming a third type of stress concentration area, and also the part most prone to cracking.

[0030] In view of the problems existing in the diaphragm 1, the inventors conducted in-depth research and improvement exploration on the shape of the diaphragm 1, the stress on the diaphragm 1, and the rebound direction of the diaphragm 1. They discovered that by pre-concave the core working area of ​​the diaphragm 1 towards the inlet / outlet of the valve body in an arc-shaped structure, it is ensured that the direction of deformation of the diaphragm under pressure during valve opening and closing is consistent with the direction of the force applied by the valve stem. The functional operating area at the center of the diaphragm is always concave towards the valve body; when the valve is closed, the concavity only deepens, and the deformation direction is always the same. Furthermore, by setting the periphery of the functional operating area as an arc-shaped structure that deforms in the opposite direction to the functional operating area, the rebound performance of the functional operating area can be ensured. Through the improvement of the diaphragm, the stress state on the inner and outer sides of the curved section of the rebound area remains stable. That is, the inner side is always under pressure, and the outer side is always under tension, without alternating changes in stress direction reversal. This significantly reduces the accumulation of fatigue damage in the material and effectively extends the service life of the diaphragm.

[0031] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0032] like Figure 2-3 As shown, this embodiment of the invention provides a diaphragm 1 for a semiconductor diaphragm-type flow control component, which is disposed between the valve body and the valve cover of the flow control component to isolate and seal the fluid flowing inside the valve body from the outside. The diaphragm can open and close the inlet and outlet channels inside the valve body under the action of external force to achieve cut-off control.

[0033] Specifically, the diaphragm 1 includes a functional operating area 11, a rebound area 12, and a sealing area 13. The functional operating area 11 is located below the valve stem and is generally designed as an arc shape, with the convex surface of the functional operating area 11 facing the interior of the valve body. The rebound area 12 deforms from the edge of the functional operating area 11 in an arc shape (or it can be an inclined or wavy structure) away from the valve stem of the diaphragm valve to provide rebound space to the functional operating area 11. The sealing area 13 extends horizontally from the free end of the rebound area 12 away from the functional operating area 11, and the sealing area 13 is used to clamp between the valve body and the valve cover.

[0034] The functional operation area 11 is the core driving force-bearing area of ​​the diaphragm 1. It is formed using an arc-shaped curved surface structure, with the arc-shaped convex surface of the functional operation area 11 facing inwards towards the valve body. This arc-shaped structure can evenly bear the downward pressure force of the valve stem, ensuring that the diaphragm deformation direction is consistent with the force applied by the valve stem during valve opening and closing, avoiding localized overload, and ensuring stable transmission of driving force to the entire diaphragm 1. Furthermore, it can reset under the rebound force provided by the rebound area 12.

[0035] In this design, the convex surface of the functional operation area 11 faces the inside of the valve body. When the valve stem presses down on the functional operation area 11, the diaphragm 1 directly closes the valve body flow channel along the concave direction of the functional operation area 11, thus avoiding the deformation of changing from an upper convex to a lower convex shape. This avoids the stress caused by such deformation, effectively preventing the diaphragm 1 from forming microcracks due to stress damage, thereby improving the overall lifespan of the diaphragm 1.

[0036] The springback zone 12 is a stress buffer transition area between the functional operation zone 11 and the sealing zone 13. It extends from the outer periphery of the functional operation zone 11 away from the valve body and can be adapted to an arc-shaped or wave-shaped structure according to the actual working conditions to provide springback space for the functional operation zone 11. The free end of the springback zone 12 extends outward, and the alternating stress generated by the repeated opening and closing of the diaphragm 1 is dispersed through the outward extension structure, eliminating stress concentration at the structural transition and preventing irreversible plastic deformation of the diaphragm 1 due to stress overload.

[0037] The springback zone 12 is located on the periphery of the functional operation zone 11 and is formed by deformation in the direction away from the valve body. On the one hand, it is used to limit the reverse deformation of the functional operation zone 11, and on the other hand, it is used to limit the flow rate of the valve body. In other words, the deformation height of the springback zone 12 from the valve body can be set according to the flow rate of the valve body.

[0038] Among them, the sealing area 13 is the sealing and fitting area where the diaphragm 1 and the valve body and valve cover of the diaphragm valve cooperate. It extends horizontally from the free end of the rebound area 12 away from the functional operation area 11. The horizontally extended structure can ensure that the diaphragm 1 is completely fitted with the plane of the valve body and valve cover when closed, forming a stable and reliable sealing pair, effectively blocking the leakage of the medium. At the same time, the horizontally extended shape can improve the structural stability of the diaphragm 1 after assembly.

[0039] Furthermore, the longitudinal section at the junction of the springback zone 12 and the functional operation zone 11 forms an arc-shaped structure with a smooth transition, and its convex surface faces in the opposite direction to the convex surface of the functional operation zone 11, in order to reduce local fatigue damage and the generation of microcracks.

[0040] Specifically, by setting the adjacent positions of the springback area 12 and the functional operation area 11 as an arc-shaped smooth transition structure, the stress sharp corners at the adjacent positions of the two areas can be eliminated, the stress transmission path during the deformation of the diaphragm 1 can be optimized, and stress concentration at the connection points can be avoided under the alternating stress of repeated opening and closing of the diaphragm 1.

[0041] The diaphragm 1 of the semiconductor diaphragm flow control component of the present invention has a pre-formed functional operating area 11 that deforms toward the valve seat. This area is aligned with the direction of the force exerted on the diaphragm 1 (functional operating area 11) by the top column or valve stem during the opening and closing of the valve body. This effectively avoids the local stress borne by the diaphragm 1 during repeated opening and closing, prevents the diaphragm 1 from cracking due to fatigue, and extends the service life of the diaphragm 1.

[0042] Furthermore, the junction between the springback area 12 and the sealing area 13 is set as an arc-shaped structure with a smooth transition, and its convex surface faces the direction of the sealing area 13, so as to avoid microcracks at the junction between the springback area 12 and the sealing area 13 and optimize the stress transmission path between the springback area 12 and the sealing area 13.

[0043] Furthermore, the functional operating area 11 includes a central sealing area that at least covers the valve seat, wherein the valve seat is located at the fluid inlet port inside the valve body, so that the functional operating area 11 is subjected to uniform force and the sealing performance at the liquid inlet port is improved. In addition, since the convex surface of the functional operating area 11 faces the inside of the valve body, the valve can be quickly closed to cut off the fluid.

[0044] The central sealing area of ​​the functional operation area 11 is larger than or equal to the cross-sectional area of ​​the inlet / outlet channel of the diaphragm valve, so that the functional operation area 11 can completely cover the inlet / outlet channel of the diaphragm valve.

[0045] For example, the area of ​​the central sealing area of ​​the functional operating area 11 is greater than or equal to the medium inlet channel of the diaphragm valve, and the valve seat at the medium inlet channel fixes the functional operating area at the medium inlet channel.

[0046] In some embodiments, the rebound zone 12 includes a crest 121 protruding away from the valve body. The crest 121 has a first arc 121a near the functional operation zone 11, a second arc 121b at the crest, and a third arc 121c near the sealing zone. The difference in the arc radii among the first arc 121a, the second arc 121b, and the third arc 121c is not greater than 30% of the largest arc radius. And / or, the arc radii of the first arc 121a, the second arc 121b, and the third arc 121c are 10%-15% of the diaphragm diameter.

[0047] Among them, the first arc 121a and the third arc 121c form an arc structure with the center at the top, and the second arc 121b forms an arc structure with the center at the bottom. The adjacent arcs are smoothly transitioned to make the peak deformation more uniform and avoid local stress overload.

[0048] By setting the wave crest 121 as a three-segment arc structure, sufficient elasticity is provided to the functional operating area 11 to ensure rapid rebound and to disperse the stress on the wave crest 121.

[0049] By setting the springback zone 12 to include a first arc 121a, a second arc 121b, and a third arc 121c, the springback speed of the springback zone 12 can be increased, so that the valve can be opened quickly without external force, allowing liquid to flow.

[0050] In some preferred embodiments, the springback zone 12 is configured as a wave-shaped structure, which includes at least two peaks 121 and at least one trough 122. The peaks 121 and troughs 122 are connected end to end to form a wave-shaped springback zone 12, so as to facilitate the processing of the springback zone 12.

[0051] Among them, the convex surfaces of the crests 121 all face the direction of the diaphragm valve stem, and the convex surfaces of the troughs 122 all face the direction away from the diaphragm valve stem.

[0052] Specifically, the crests 121 and troughs 122 are connected end to end along the radial direction of the diaphragm 1, forming a continuous and smooth wave-shaped extension structure without sharp corners. The convex surfaces of all crests 121 uniformly face the side where the diaphragm valve stem is located, and the convex surfaces of all troughs 122 uniformly face the side away from the diaphragm valve stem and towards the valve body flow channel. This wave-shaped structure allows the diaphragm 1 to undergo elastic deformation during valve stem opening and closing, gradually buffering and dispersing alternating stress through the continuous undulations of the crests 121 and troughs 122, blocking stress concentration paths, and significantly improving the elastic deformation and rebound capability of the rebound zone 12. Structurally, this reduces the probability of permanent deformation and fatigue microcracks in the diaphragm 1, enhancing the structural stability and service life of the diaphragm 1.

[0053] Preferably, the distance between the peak 121 and / or the trough 122 and the plane where the valve seat is located can be flexibly set based on the flow rate of the flow control component.

[0054] More preferably, when there are multiple wave crests 121, the longitudinal height of the multiple wave crests 121 gradually decreases from near the functional operating area 11 to far away from the functional operating area 11. The longitudinal distance from the multiple wave crests 121 to the sealing area 13 gradually decreases from near the functional operating area 11 to far away from the functional operating area 11, so as to disperse stress.

[0055] Specifically, when the wave-shaped structure of the rebound zone 12 is configured with multiple peaks 121, each peak 121 is arranged sequentially along the radial direction of the diaphragm 1 from the functional operation zone 11 towards the sealing zone 13. The longitudinal height of the multiple peaks 121 follows a design rule of gradually decreasing from the inside to the outside, that is, the closer the peak 121 is to the functional operation zone 11, the greater its longitudinal height; the farther away the peak 121 is from the functional operation zone 11 and towards the sealing zone 13, the smaller its longitudinal height. At the same time, the longitudinal distance between the multiple peaks 121 and the sealing zone 13 is also set in a manner that gradually decreases from near to far, with the longitudinal distance between the peaks 121 closer to the functional operation zone 11 and the sealing zone 13 being larger, and the longitudinal distance between the peaks 121 farther away from the functional operation zone 11 and the sealing zone 13 gradually decreasing. This gradient-decreasing structural layout allows the alternating stress to be smoothly and evenly transmitted radially from the functional operating area 11 to the sealing area 13 when the diaphragm 1 undergoes elastic deformation under the drive of the valve stem. This avoids local stress concentration, precisely matches the deformation amplitude and stress requirements of different areas of the diaphragm 1, further enhances the stress buffering and rebound capacity of the rebound area 12, structurally reduces the risk of permanent deformation and fatigue cracks, adapts to harsh working conditions such as high-frequency opening and closing and high pressure differential, and effectively extends the service life of the diaphragm 1.

[0056] The central angle of a single peak 121 or trough 122 ranges from 75° to 95°, so as to optimize the stress transmission path while ensuring the rebound performance of the rebound zone 12.

[0057] The functional operation area 11 and the rebound area 12 are both made of elastic metal sheets, such as nickel-based alloys, cobalt-based alloys or stainless steel, so that the diaphragm 1 can rebound after being compressed.

[0058] In practical applications, the thickness of the diaphragm ranges from 0.06mm to 0.2mm.

[0059] The diaphragm valve diaphragm 1 of this invention features an integrated structure design comprising a functional operating area 11, a rebound area 12, and a sealing area 13. The arc-shaped convex surface of the functional operating area 11 faces the valve body flow channel, eliminating reverse deformation stress during valve stem actuation and preventing micro-cracks from the outset. The rebound area 12 smoothly transitions with adjacent areas, eliminating stress sharp angles. The wavy rebound area 12, combined with a gradient-decreasing multi-peak structure 121, can progressively buffer and evenly distribute alternating stress. The peaks 121 and troughs 122 are at preset angles to avoid sharp stress damage. The horizontally extended sealing area 13 ensures a tight fit with the valve body and valve cover, guaranteeing a reliable seal. The functional operating area 11 and rebound area 12 utilize elastic metal sheets to ensure good rebound, and the area of ​​the functional operating area 11 is appropriately sized to completely cover the fluid inlet channel. Overall, this design effectively alleviates stress concentration, reduces permanent deformation and fatigue cracks, significantly improves the structural durability, sealing stability, and service life of the diaphragm 1, and is suitable for harsh operating conditions such as high-frequency opening and closing and high pressure differentials.

[0060] This invention also provides a semiconductor flow control component, including a valve body, a valve cover, a diaphragm 1 as described above, and a drive assembly. The valve body forms a medium inlet / outlet channel; the valve cover is fixedly connected to the opening of the valve body; the diaphragm 1 is sandwiched between the valve body and the valve cover to isolate and seal the fluid flowing inside the valve body from the outside environment; the drive assembly is fixed to the valve body, and the valve stem of the drive assembly is located above the diaphragm and corresponding to the functional operating area of ​​the diaphragm, used to drive the diaphragm to move and open / close the medium inlet / outlet channel.

[0061] In this specification, the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions in the system embodiments.

[0062] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A diaphragm for a semiconductor diaphragm-type flow control component, disposed between the valve body and valve cover of the flow control component, for isolating and sealing the fluid flowing inside the valve body from the outside environment, and wherein the diaphragm can open and close the inlet and outlet channels inside the valve body under external force to achieve on / off control, characterized in that, include: The functional operation area is located below the valve stem and is designed as an arc-shaped structure. The convex surface of the functional operation area faces the inside of the valve body to ensure that the direction of deformation of the diaphragm under pressure during the opening and closing of the valve body is consistent with the direction of the force applied by the valve stem. The springback zone is formed by deforming from the edge of the functional operation area away from the valve body in an arc shape to provide springback space to the functional operation area. A sealing area extends horizontally from the free end of the rebound area away from the functional operation area, and the sealing area is used to clamp between the valve body and the valve cover.

2. The diaphragm according to claim 1, characterized in that, The functional operating area includes at least a central sealing area covering the valve seat, which is located at the fluid inlet port inside the valve body.

3. The diaphragm according to claim 1, characterized in that, The rebound zone includes a wave crest protruding in a direction away from the valve body, the wave crest having a first arc near the functional operation area, a second arc at the wave crest position, and a third arc near the sealing area; The difference in the radii of the first arc, the second arc, and the third arc is no greater than 30% of the radius of the largest arc. And / or, the radius of the first arc, the second arc, and the third arc is 10%-15% of the diameter of the diaphragm.

4. The diaphragm according to claim 3, characterized in that, The rebound zone includes at least two peaks and at least one trough, with the peaks and troughs connected end to end to form a wave-shaped rebound zone.

5. The diaphragm according to claim 4, characterized in that, The distance between the peak and / or the trough of the wave and the plane where the valve seat is located is set based on the flow rate value of the flow control component.

6. The diaphragm according to claim 4, characterized in that, The longitudinal height of the multiple wave peaks gradually decreases from near the functional operation area to far away from the functional operation area.

7. The diaphragm according to claim 4, characterized in that, The longitudinal distance from the multiple wave peaks to the sealing area gradually decreases from the vicinity of the functional operating area to the distance from the functional operating area.

8. The diaphragm according to claim 4, characterized in that, The central angle of the crest or trough is 75°-95°.

9. The diaphragm according to claim 1, characterized in that, The diaphragm is integrally formed from an elastic metal sheet made of at least the following materials: nickel-based alloy, cobalt-based alloy, and stainless steel; And / or, the thickness of the diaphragm is 0.06mm-0.2mm.

10. A semiconductor flow control component, characterized in that, include: Valve body, wherein the valve body forms a medium inlet and outlet channel; The valve cover is fixedly connected to the opening of the valve body; The diaphragm as described in any one of claims 1-9 is sandwiched between the valve body and the valve cover to isolate and seal the fluid flowing inside the valve body from the outside. A drive assembly is fixed to the valve body. The valve stem of the drive assembly is located above the diaphragm and is set corresponding to the functional operation area of ​​the diaphragm. It is used to drive the diaphragm to move to open and close the medium inlet and outlet channel.

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