Feeding trolley for metal mask TPCD detection

Abstract

The invention relates to the technical field of metal mask plate detection, in particular to a feeding trolley for metal mask plate TPCD detection, which comprises a moving trolley, a lifting platform, a jacking assembly, a tray, a conveying plate, a first driving assembly and a second driving assembly, the lifting platform is arranged on the moving trolley, the jacking assembly is arranged in the moving trolley, and the tray is arranged in the moving trolley. The driving end of the jacking assembly is connected with the bottom end of the lifting table. The tray is arranged above the lifting table, the conveying plate is arranged between the lifting table and the tray, and the first driving assembly is arranged on the face, opposite to the conveying plate, of the lifting table and provides driving force for the conveying plate to move in the first direction; the second driving assembly is arranged on the opposite face of the conveying plate and the tray and provides driving force for the tray to move in the first direction. The feeding trolley for TPCD detection of the metal mask is small in occupied area, high in space utilization rate, high in positioning precision and high in transmission efficiency.

Description

Technical Field

[0001] This invention relates to the field of metal mask inspection technology, and in particular to a loading trolley for TPCD inspection of metal masks. Background Technology

[0002] Metal masks are the "precision molds" of OLED evaporation processes. During the production and processing of metal masks, TPCD (substrate pixel accuracy and mask critical dimension) testing is required. This involves systematically and with high precision measuring the dimensions of thousands of tiny openings on the mask to ensure that all openings are uniform in size and height, thereby guaranteeing that the final OLED display has excellent picture quality, uniform color, and high resolution.

[0003] Currently, when feeding metal photomasks into testing equipment, the main method used is a single-segment long-distance feeding scheme, such as using a gantry or robot. The above schemes have the following shortcomings: (1) The span is too long and the structural rigidity is insufficient. The overall weight of the metal photomask and the tray is large, which makes it easy to generate vibration and deformation during the feeding process, affecting the positioning accuracy during feeding; (2) A single speed mode is generally used, which makes it difficult to balance high-speed transmission and precise positioning, resulting in limited feeding cycle time; (3) There is a lack of flexible calibration capability, which makes it difficult to correct the placement deviation of the tray, resulting in the feeding accuracy not being guaranteed; (4) The equipment occupies a large area and has low space utilization. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a loading trolley for TPCD detection of metal mask plates, which has a small footprint, high space utilization, high positioning accuracy and high transmission efficiency, in order to solve the problems existing in the prior art mentioned above.

[0005] The technical solution adopted by this invention to solve its technical problem is: a loading trolley for testing metal mask TPCDs, comprising a mobile trolley, a lifting platform mounted on the mobile trolley, and a lifting assembly disposed inside the mobile trolley, wherein the driving end of the lifting assembly is connected to the bottom end of the lifting platform; and further comprising:

[0006] The tray is positioned above the lifting platform;

[0007] The conveyor plate is positioned between the lifting platform and the pallet.

[0008] The first drive assembly is located on the opposite side of the lifting platform and the conveyor plate, and provides the driving force for the conveyor plate to move in the first direction;

[0009] And a second drive assembly, disposed on the opposite side of the conveyor plate and the pallet, provides the driving force for the pallet to move in the first direction.

[0010] Furthermore, it also includes a first safety component and a second safety component, wherein the conveyor plate is connected to the lifting platform via the first safety component, and the pallet is connected to the conveyor plate via the second safety component.

[0011] Furthermore, the first drive assembly includes a first stator and a first mover, with a plurality of first stator arrays disposed on the top surface of the lifting platform and a plurality of first mover arrays disposed on the bottom surface of the conveyor plate.

[0012] Furthermore, the second drive assembly includes a second stator and a second mover, with a plurality of second stator arrays disposed on the top surface of the conveyor plate and a plurality of second mover arrays disposed on the bottom surface of the tray.

[0013] Furthermore, the first safety component includes a first guide post and a first guide sleeve. The first guide post is respectively disposed on both sides of the conveyor plate along the second direction. The first guide sleeve is disposed on the lifting platform and is sleeved on the first guide post, and is in clearance fit with the first guide post.

[0014] Furthermore, the second safety component includes a second guide post and a second guide sleeve. The second guide post is located in the middle of the conveyor plate, and the second guide sleeve is located in the middle of the tray. The second guide sleeve is fitted onto the second guide post and is in clearance fit with the second guide post.

[0015] Furthermore, the lifting assembly includes a lifting member and a magnetic spring, both of which are disposed within the moving trolley. The magnetic spring is disposed on both sides of the lifting member along a first direction. The driving end of the lifting member is connected to the lifting platform, providing a driving force for the lifting platform to move along a third direction. The movable end of the magnetic spring is connected to the lifting platform.

[0016] Furthermore, the lifting assembly also includes a backup power supply, which is located inside the mobile trolley and electrically connected to the magnetic spring.

[0017] Furthermore, the magnetic spring includes a magnetic column and a spring body. The magnetic column is installed inside the moving trolley, and the spring body is sleeved on the magnetic column and connected to the lifting platform.

[0018] Furthermore, the mobile vehicle includes a vehicle body, Mecanum wheels, a support member, and a scanner. The Mecanum wheels are respectively arranged on both sides of the bottom end of the vehicle body along the second direction. The support member is arranged inside the vehicle body, and the scanner is arranged around the periphery of the vehicle body.

[0019] The beneficial effects of this invention are:

[0020] (1) By setting up a first driving component and a second driving component, the first driving component drives the conveyor plate to move along the first direction, and the second driving component drives the pallet to move along the first direction, thereby realizing two-stage short-stroke relay feeding. Compared with single-stage long-distance feeding, it reduces the floor space, improves the space utilization rate, and significantly shortens the span, ensuring structural rigidity, thereby avoiding vibration and deformation during feeding and ensuring the positioning accuracy during feeding.

[0021] (2) In this invention, the conveyor plate and the pallet are configured with different running speeds. The first drive component drives the conveyor plate to move at high speed, which shortens the time spent on the empty stroke. The second drive component drives the pallet to move at low speed, which ensures the precise positioning at the end of the stroke, forming a speed graded optimization mechanism, thereby achieving high-speed transmission and ensuring the positioning accuracy when loading.

[0022] (3) In this invention, both the first drive component and the second drive component adopt a magnetic levitation conveying system to achieve frictionless transmission, eliminate mechanical wear, eliminate the need for regular lubrication and maintenance, reduce the maintenance cost and downtime risk of cleanrooms, and meet the cleanliness requirements of high-level cleanrooms; at the same time, the magnetic levitation conveying system can automatically adjust its position and posture in six degrees of freedom to correct the placement deviation of the metal mask or material tray, thereby ensuring the feeding accuracy. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] Figure 1 This is a schematic diagram of the structure of the present invention;

[0025] Figure 2 This is a schematic diagram of the lifting component in this invention;

[0026] Figure 3 This is a schematic diagram of the second driving component in this invention;

[0027] Figure 4 This is a schematic diagram of the first driving component in this invention;

[0028] Figure 5 This is a schematic diagram of the interior of the mobile vehicle in this invention;

[0029] Figure 6 This is a schematic diagram of the support member in this invention.

[0030] In the diagram: 100, mobile trolley; 110, trolley body; 120, Mecanum wheel; 130, support component; 140, scanner; 200, lifting platform; 300, lifting assembly; 310, lifting component; 320, magnetic spring; 321, magnetic column; 322, spring body; 323, support frame; 330, backup power supply; 340, guide assembly; 350, lifting frame; 400, tray; 500, conveyor plate; 510, groove; 600, first drive assembly; 610, first stator; 620, first mover; 700, second drive assembly; 710, second stator; 720, second mover; 800, first safety assembly; 810, first guide post; 820, first guide sleeve; 900, second safety assembly; 910, second guide post; 920, second guide sleeve; 1000, control system. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0032] like Figures 1-4 As shown, a loading trolley for TPCD (Telematics Photocopy) testing of a metal mask includes a mobile trolley 100, a lifting platform 200, a lifting assembly 300, a tray 400, a conveyor plate 500, a first drive assembly 600, and a second drive assembly 700. The lifting platform 200 is mounted on the mobile trolley 100, and the lifting assembly 300 is located inside the mobile trolley 100, with its drive end connected to the bottom end of the lifting platform 200. The tray 400 is positioned above the lifting platform 200. The conveyor plate 500 is positioned between the lifting platform 200 and the tray 400. The first drive assembly 600 is positioned on the opposite side of the lifting platform 200 and the conveyor plate 500, providing a driving force for the conveyor plate 500 to move in a first direction. The second drive assembly 700 is positioned on the opposite side of the conveyor plate 500 and the tray 400, providing a driving force for the tray 400 to move in the first direction.

[0033] Specifically, the length direction of the mobile trolley 100 is the first direction, i.e., the X direction; the width direction of the mobile trolley 100 is the second direction, i.e., the Y direction; and the height direction of the mobile trolley 100 is the third direction, i.e., the Z direction; the first, second, and third directions are perpendicular to each other. The lower part of the lifting platform 200 extends into the interior of the mobile trolley 100, further improving space utilization. The material tray A supporting the metal mask is positioned on the pallet 400. The mobile trolley 100, the lifting assembly 300, the first drive assembly 600, and the second drive assembly 700 are all controlled by the control system 1000, and the entire loading trolley is powered by a power system (not shown in the figure).

[0034] By configuring the first drive assembly 600 and the second drive assembly 700, the first drive assembly 600 drives the conveyor plate 500 to move along the first direction, and the second drive assembly 700 drives the pallet 400 to move along the first direction, realizing two-stage short-stroke relay feeding. Compared with single-stage long-distance feeding, this reduces the floor space, improves space utilization, and significantly shortens the span, ensuring structural rigidity and thus avoiding vibration and deformation during feeding, ensuring positioning accuracy during feeding. Simultaneously, the conveyor plate 500 and pallet 400 are configured with different operating speeds. The first drive assembly 600 drives the conveyor plate 500 to move at high speed, shortening the idle travel time, while the second drive assembly 700 drives the pallet 400 to move at low speed, ensuring precise positioning at the end of the stroke. This forms a speed-graded optimization mechanism, thereby achieving high-speed transmission while ensuring positioning accuracy during feeding.

[0035] like Figure 3 and Figure 4 As shown, the first drive assembly 600 includes a first stator 610 and a first mover 620. An array of several first stators 610 is disposed on the top surface of the lifting platform 200, and an array of several first movers 620 is disposed on the bottom surface of the conveyor plate 500. The second drive assembly 700 includes a second stator 710 and a second mover 720. An array of several second stators 710 is disposed on the top surface of the conveyor plate 500, and an array of several second movers 720 is disposed on the bottom surface of the tray 400.

[0036] Both the first drive assembly 600 and the second drive assembly 700 adopt a magnetic levitation conveying system to achieve frictionless transmission, eliminate mechanical wear, eliminate the need for regular lubrication and maintenance, reduce cleanroom maintenance costs and downtime risks, and meet the cleanliness requirements of high-level cleanrooms (such as ISO Class 4 and above). At the same time, the magnetic levitation conveying system can automatically adjust its position and posture in six degrees of freedom (X / Y / Z translation and Rx / Ry / Rz rotation) to correct the placement deviation of the material tray A, thereby ensuring the feeding accuracy.

[0037] When the vision inspection system (not shown in the figure) integrated into the inspection equipment detects a deviation in the position of the material tray A, the control system 1000 controls the magnetic levitation conveying system to adjust its posture in six degrees of freedom.

[0038] In some embodiments, both the first drive assembly 600 and the second drive assembly 700 employ a lead screw module and are equipped with a strong sealing structure to ensure the sealing performance of the lead screw module and meet the cleanliness requirements of a high-level cleanroom.

[0039] In some embodiments, the loading trolley further includes a first safety component 800 and a second safety component 900, such as... Figure 2 and Figure 3As shown, the conveyor plate 500 is connected to the lifting platform 200 through the first safety component 800, and the pallet 400 is connected to the conveyor plate 500 through the second safety component 900.

[0040] The first safety component 800 and the second safety component 900 guide the movement of the conveyor plate 500 and the pallet 400, ensuring stability and preventing the conveyor plate 500 and the pallet 400 from falling due to accidental power failure.

[0041] like Figure 2 and Figure 3 As shown, the first safety component 800 includes a first guide post 810 and a first guide sleeve 820. The first guide post 810 is respectively disposed on both sides of the conveyor plate 500 along the second direction. The first guide sleeve 820 is disposed on the lifting platform 200 and is sleeved on the first guide post 810, with a clearance fit between them. Specifically, a radial gap of 5mm is maintained between the first guide post 810 and the first guide sleeve 820.

[0042] like Figure 3 As shown, the second safety component 900 includes a second guide post 910 and a second guide sleeve 920. The second guide post 910 is disposed in the middle of the conveyor plate 500, and the second guide sleeve 920 is disposed in the middle of the tray 400. The second guide sleeve 920 is sleeved on the second guide post 910 and is clearance-fitted with the second guide post 910.

[0043] Specifically, a radial gap of 5mm is maintained between the second guide post 910 and the second guide sleeve 920; the second guide post 910 is set in the groove 510 opened in the middle of the conveyor plate 500, which further improves the space utilization rate.

[0044] During normal operation, the magnetic levitation conveyor system can freely adjust its position within a radial gap range of 5mm. In the event of an accidental power failure, the first guide post 810 and the second guide post 910 tilt and are locked in the first guide sleeve 820 and the second guide sleeve 920 respectively, achieving mechanical locking and thus ensuring the safety of the two-stage feeding.

[0045] like Figure 2 and Figure 5 As shown, the lifting assembly 300 includes a lifting member 310 and a magnetic spring 320. Both the lifting member 310 and the magnetic spring 320 are disposed inside the moving trolley 100. The magnetic spring 320 is disposed on both sides of the lifting member 310 along a first direction. The driving end of the lifting member 310 is connected to the lifting platform 200, providing driving force for the lifting platform 200 to move along a third direction. The movable end of the magnetic spring 320 is connected to the lifting platform 200.

[0046] Specifically, the lifting component 310 can be a linear motor, but is not limited to it, as long as it can achieve stable lifting and lowering of the lifting platform 200 in a third direction. The drive end of the lifting component 310 is connected to the lifting platform 200 through the lifting frame 350.

[0047] The magnetic spring 320 provides constant force support that balances the load's gravity in real time with a constant magnetic force, allowing the lifting component 310 to output only net kinetic thrust, significantly reducing its power consumption and heat generation. Simultaneously, utilizing the millisecond-level fast response and frictionless characteristics of the magnetic spring 320, load fluctuations and external vibrations are suppressed, improving the dynamic stability and positioning accuracy of the lifting process. Furthermore, by actively adjusting the magnetic field strength of the magnetic spring 320 with current, the magnitude of the constant force can be adjusted online, adapting to the flexible production needs of workpieces of varying weights.

[0048] like Figure 2 and Figure 3 As shown, the magnetic spring 320 includes a magnetic column 321 and a spring body 322. The magnetic column 321 is disposed inside the moving trolley 100, and the spring body 322 is sleeved on the magnetic column 321 and connected to the lifting platform 200. Specifically, the spring body 322 is connected to the lifting platform 200 through a support frame 323.

[0049] In some embodiments, the lifting assembly 300 further includes a backup power supply 330, such as Figure 2 As shown, the backup power supply 330 is installed inside the mobile trolley 100 and is electrically connected to the magnetic spring 320.

[0050] A backup power supply 330 is configured for power failure protection. When power is lost, the system automatically switches to the backup power supply 330 to maintain the constant force output of the magnetic spring 320, continuously balance the load gravity, and prevent the material tray A from falling, thus achieving intrinsic safety protection.

[0051] In some embodiments, the lifting assembly 300 further includes a guide assembly 340 to guide the movement of the lifting platform 200 and ensure stability. For example... Figure 2 As shown, the guide assembly 340 is arranged on both sides of the lifting member 310 along the first direction. The guide assembly 340 includes a guide post and a guide sleeve. The guide sleeve is arranged inside the moving trolley 100. The guide post slides through the guide sleeve and its top end is connected to the lifting platform 200.

[0052] like Figure 1 , Figure 5 and Figure 6 As shown, the mobile trolley 100 includes a trolley body 110, Mecanum wheels 120, support members 130 and scanner 140. The Mecanum wheels 120 are respectively arranged on both sides of the bottom end of the trolley body 110 along the second direction, the support members 130 are arranged inside the trolley body 110, and the scanner 140 is arranged on the periphery of the trolley body 110.

[0053] Specifically, the Mecanum wheel 120 uses a semiconductor-grade anti-static polyurethane Mecanum wheel. The support component 130 uses a worm gear screw jack in conjunction with a servo motor, which is existing technology and will not be described in detail here.

[0054] The vehicle body 110 is equipped with four sets of Mecanum wheels 120, enabling translation in any direction and rotation in place within a plane. Scanners 140 are arranged around the vehicle body 110 to construct an environmental map. Upon reaching the inspection station, the four sets of support components 130 are simultaneously lifted, causing the entire vehicle body 110 to levitate off the ground, at which point the four sets of Mecanum wheels 120 are unloaded. Compared with traditional AGVs, this achieves zero turning radius, significantly improving positioning flexibility. Furthermore, the lifted structure forms a rigid support platform, ensuring the consistency of the material tray A position during each loading operation. This results in high accuracy for repeated loading and completely eliminates positioning interference caused by minor movements of the wheels or vehicle body.

[0055] During loading, the mobile trolley 100 moves to the inspection station and is lifted as a whole. The first drive component 600 drives the conveyor plate 500 to move at high speed, and then the second drive component 700 drives the pallet 400 to move at low speed. When the end of the stroke is reached, the fixture (not shown in the figure) in the inspection equipment receives the material.

[0056] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A loading trolley for testing a metal mask TPCD, comprising a mobile trolley (100), a lifting platform (200) mounted on the mobile trolley (100), and a lifting assembly (300) disposed inside the mobile trolley (100), wherein the driving end of the lifting assembly (300) is connected to the bottom end of the lifting platform (200); characterized in that, Also includes: The tray (400) is positioned above the lifting platform (200); A conveyor plate (500) is positioned between the lifting platform (200) and the pallet (400); The first drive assembly (600) is disposed on the opposite side of the lifting platform (200) and the conveyor plate (500) and provides the driving force for the conveyor plate (500) to move in the first direction; And a second drive assembly (700), disposed on the opposite side of the conveyor plate (500) and the pallet (400), provides a driving force for the pallet (400) to move in a first direction.

2. The loading trolley for TPCD inspection of metal mask plates according to claim 1, characterized in that, It also includes a first safety component (800) and a second safety component (900), wherein the conveyor plate (500) is connected to the lifting platform (200) via the first safety component (800), and the pallet (400) is connected to the conveyor plate (500) via the second safety component (900).

3. The loading trolley for TPCD inspection of metal mask plates according to claim 1, characterized in that, The first drive assembly (600) includes a first stator (610) and a first mover (620), with an array of the first stators (610) disposed on the top surface of the lifting platform (200) and an array of the first movers (620) disposed on the bottom surface of the conveyor plate (500).

4. The loading trolley for TPCD inspection of metal mask plates according to claim 1, characterized in that, The second drive assembly (700) includes a second stator (710) and a second mover (720), with an array of the second stators (710) disposed on the top surface of the conveyor plate (500) and an array of the second movers (720) disposed on the bottom surface of the tray (400).

5. The loading trolley for TPCD inspection of metal mask plates according to claim 2, characterized in that, The first safety component (800) includes a first guide post (810) and a first guide sleeve (820). The first guide post (810) is respectively disposed on both sides of the conveyor plate (500) along the second direction. The first guide sleeve (820) is disposed on the lifting platform (200). The first guide sleeve (820) is sleeved on the first guide post (810) and has a clearance fit with the first guide post (810).

6. The loading trolley for TPCD inspection of metal mask plates according to claim 2, characterized in that, The second safety component (900) includes a second guide post (910) and a second guide sleeve (920). The second guide post (910) is located in the middle of the conveyor plate (500), and the second guide sleeve (920) is located in the middle of the tray (400). The second guide sleeve (920) is fitted onto the second guide post (910) and is in clearance fit with the second guide post (910).

7. The loading trolley for TPCD inspection of metal mask plates according to claim 1, characterized in that, The lifting assembly (300) includes a lifting member (310) and a magnetic spring (320). Both the lifting member (310) and the magnetic spring (320) are disposed inside the moving trolley (100). The magnetic spring (320) is disposed on both sides of the lifting member (310) along a first direction. The driving end of the lifting member (310) is connected to the lifting platform (200) to provide driving force for the lifting platform (200) to move along a third direction. The movable end of the magnetic spring (320) is connected to the lifting platform (200).

8. The loading trolley for TPCD inspection of metal mask plates according to claim 7, characterized in that, The lifting assembly (300) also includes a backup power supply (330), which is located inside the moving trolley (100) and electrically connected to the magnetic spring (320).

9. The loading trolley for TPCD inspection of metal mask plates according to claim 7, characterized in that, The magnetic spring (320) includes a magnetic column (321) and a spring body (322). The magnetic column (321) is installed inside the moving trolley (100), and the spring body (322) is sleeved on the magnetic column (321) and connected to the lifting platform (200).

10. The loading trolley for TPCD inspection of metal mask plates according to claim 1, characterized in that, The mobile trolley (100) includes a trolley body (110), Mecanum wheels (120), a support member (130), and a scanner (140). The Mecanum wheels (120) are respectively arranged on both sides of the bottom end of the trolley body (110) along a second direction. The support member (130) is arranged inside the trolley body (110), and the scanner (140) is arranged on the periphery of the trolley body (110).

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