Cross contamination prevention flushing system and method for multi-path water quality sampling and monitoring

Abstract

The invention discloses an anti-cross-contamination flushing system and method for multi-path water quality sampling monitoring, and relates to the technical field of ultrapure water path cleaning. The system comprises a plurality of completely independent sampling branches, each branch adopts a multi-port selector valve, and ports of the branches are respectively connected with a corresponding flushing source, a purging source, a waste liquid discharge port and a corresponding sampling source. According to the method, a four-section type anti-pollution flushing process including an emptying section, a forward flushing section, a reverse oscillation flushing section and a verification section is executed after each time of sampling, and the flushing effect is objectively verified through the water quality detection unit. According to the invention, through physical isolation and closed-loop verification flushing, cross contamination among multi-channel sampling is fundamentally eliminated, and the accuracy and reliability of monitoring data are ensured; meanwhile, the system integrates intelligent scheduling and self-adaptive flushing, efficiency is improved, and resources are saved.

Description

Technical Field

[0001] This invention relates to the field of ultrapure water system cleaning technology, specifically to a flushing system and method for preventing cross-contamination in multi-channel water quality sampling and monitoring. Background Technology

[0002] In semiconductor manufacturing processes, ultrapure water can be used for cleaning or surface treatment of electronic components. Its water quality affects the yield of chip production. Currently, the industry generally uses multi-channel water quality sampling and monitoring systems to control the ultrapure water supply.

[0003] Traditional multi-channel water quality monitoring systems, such as the patented CN120943469A, typically use a time-sharing multiplexing method to guide different water sources to the same analytical instrument. This method has inherent drawbacks: First, after the current sampling is completed, its high concentration of contaminants (such as specific ions, particles, and TOC) may remain in the shared pipeline or valve cavity, thus contaminating the samples from the next sampling channel, leading to serious distortion of monitoring data and cross-contamination problems; Second, to reduce cross-contamination, ultrapure water is usually used for forward flushing, but for contaminants attached to pipe walls or dead corners, simple forward flushing has limited effectiveness. Summary of the Invention

[0004] This invention aims to overcome the shortcomings of the prior art and provide a cross-contamination prevention flushing system and method for multi-channel water quality sampling and monitoring, achieving cross-contamination-free, highly reliable, and verifiable semiconductor-grade multi-channel water quality sampling and monitoring, and ensuring the independent accuracy of each sampling data channel.

[0005] To achieve the above objectives, the present invention employs a cross-contamination prevention flushing system for multi-channel water quality sampling and monitoring, comprising: multiple independent sampling branches, each corresponding to a sampling source, and each sampling branch having multiple input ports and output ports. The multiple input ports are respectively connected to a flushing source, a purging source, a waste liquid discharge port, and a corresponding sampling source. Each sampling branch is equipped with a multi-port selection valve for connecting one of its input ports to its output port; a multi-port common connection valve, which has multiple input ports and at least one output port. The multiple input ports of the common connection valve are respectively connected to the output ports of each sampling branch, and the output port of the common connection valve is connected to a water quality detection unit and a waste liquid discharge port; and an intelligent control unit, which controls the system to execute the sampling monitoring and flushing process.

[0006] Through the above structure, the present invention utilizes independent sampling branches to physically isolate the cross-contamination problem between different sampling sources; at the same time, combined with valve switching control, it realizes efficient time-sharing detection of multiple water samples by a single detection system, reduces equipment costs, and ensures the independence and accuracy of each sampling data.

[0007] Preferably, the rinsing source is an ultrapure water rinsing source, the purging source is a nitrogen purging source, and the multi-port selector valve is a diaphragm valve. Using ultrapure water and high-purity nitrogen as cleaning media can avoid introducing new impurities and meet the high cleanliness requirements of semiconductors; the diaphragm valve structure generally has no sliding friction, which can avoid particulate contamination caused by valve core wear, and the dead zone is small, making it easy to clean.

[0008] Preferably, the water quality testing unit includes at least one of a resistivity meter and a total organic carbon analyzer, providing a quantitative basis for the flushing effect.

[0009] The present invention also proposes a method for preventing cross-contamination rinsing in the above-mentioned system, comprising the following steps: S1. By controlling the multi-port selection valve of each sampling branch, the water quality detection unit performs time-division detection on samples or flushing water from different sampling branches to determine whether the water quality is abnormal or qualified. The sampling branch being detected is the target sampling branch. S2. When an abnormal water quality is detected, it is determined that there is a risk of pollution in the current target sampling branch. In response to the pollution risk, a sampling branch with qualified water quality is selected as the cleaning source branch and a flushing channel is established. The flushing channel includes the cleaning source branch, the target sampling branch, and the internal channel of the multi-port common connection valve. S3. Perform a four-stage anti-pollution flushing process, which includes: emptying the flushing channel, performing forward flushing and reverse oscillation flushing on the flushing channel, and introducing the final flushing water into the water quality detection unit for testing and verifying the flushing effect based on the test results.

[0010] This method introduces a clean cleaning source branch as a second source of flushing medium and uses a common connection valve to construct a flushing channel, thereby achieving isolated cleaning of the contaminated branch. The four-stage flushing process can not only solve conventional pollutants, but also effectively remove stubborn adsorbents in the dead corners of the pipe wall, and the reliability of the flushing effect is ensured through testing and verification.

[0011] Preferably, the four-stage anti-pollution flushing process in step S3 includes a drain section, a forward flushing section, a reverse oscillating flushing section, and a verification section executed sequentially. In the drain section, the output of the multi-port common connection valve is switched to the waste liquid discharge port, and the multi-port selection valves of the cleaning source branch and the target sampling branch are switched to the purge source. The purge gas is used to discharge the residual liquid in the flushing channel to the waste liquid discharge port. In the forward flushing section, the multi-port selection valves of the cleaning source branch and the target sampling branch are switched to the flushing source, and flushing water is injected into the flushing channel for forward flushing. In the reverse oscillating flushing section, the output of the multi-port common connection valve is closed, and the multi-port selection valves of the cleaning source branch and the target sampling branch are controlled to alternately switch to the flushing source or the waste liquid discharge port, so that the flushing water in the flushing channel generates reciprocating oscillating flow. In the verification section, the output of the multi-port common connection valve is switched to the water quality detection unit, and the residual flushing water in the flushing channel is introduced into the water quality detection unit for detection. The flushing effect is verified based on the comparison result between the detected value and the preset threshold. The sequential process design is scientific and reasonable. The evacuation section can avoid residual liquid diluting the flushing water or reacting with the flushing water; the forward flushing section uses high-flow turbulent flow to efficiently flush away free contaminants; the reverse oscillating flushing section uses the reciprocating oscillation of water flow to powerfully remove dead corners of valves and adsorbed substances from pipe walls; and the verification section provides objective cleanliness judgment standards.

[0012] Preferably, the verification section further includes: if the verification is successful, switching the multi-port selection valves of the cleaning source branch and the target sampling branch to the purge source for purging and drying; if the verification fails, performing a secondary deep cleaning, which includes at least one of the following: extending the rinsing time, increasing the temperature of the rinsing medium, adding a chemical cleaning agent to the rinsing medium, re-establishing the rinsing flow channel, and performing a four-stage anti-contamination rinsing process. The secondary deep cleaning provides an enhanced treatment method for stubborn contamination, ensuring that the system can still recover cleanliness under extreme contamination conditions, thus improving the robustness of the method.

[0013] Preferably, the preset thresholds in the verification section include a resistivity threshold and a total organic carbon threshold. The verification standard is that the resistivity detected by the water quality detection unit is greater than the resistivity threshold and the total organic carbon content is less than the total organic carbon threshold, ensuring that the cleanliness of the pipeline after rinsing fully meets the requirements for ultrapure water applications.

[0014] Preferably, the intelligent control unit is equipped with an intelligent scheduling module. This module establishes a pollution risk prediction model, which predicts and outputs a score based on historical monitoring data and the operating status of upstream equipment. This score measures the likelihood of water quality deterioration in each sampling branch. The historical monitoring data includes the monitoring data output by the water quality monitoring unit corresponding to a single sampling branch. The intelligent scheduling module adjusts the sampling frequency of each sampling branch according to the output of the pollution risk prediction model. By introducing the pollution risk prediction model, the sampling frequency of high-risk branches is increased to enhance monitoring, while the sampling frequency of long-term stable branches is reduced to conserve resources, thus achieving dynamic allocation of sampling resources.

[0015] Preferably, in step S2, the cleaning source branch is selected based on the output of the pollution risk prediction model. The cleanest branch with the lowest risk is selected as the cleaning source based on the model prediction score, which can avoid introducing new cross-contamination during the cleaning process and improve the safety and effectiveness of the cleaning process.

[0016] Preferably, the intelligent control unit is equipped with an adaptive flushing module. This module adjusts the flushing parameters based on previously detected contaminant information. These parameters include the flushing time of the forward and reverse oscillation flushing sections, the oscillation frequency of the reverse oscillation flushing section, and the flushing water temperature or type. The contaminant information includes one or more of the following: contaminant type, concentration, and adsorption capacity detected by the water quality detection unit. This module enables the flushing process to adjust the cleaning strategy according to specific contaminant characteristics, ensuring cleaning effectiveness while avoiding excessive consumption or insufficient cleaning that may result from fixed-parameter flushing, further improving cleaning efficiency and resource utilization.

[0017] This invention, through a physically isolated sampling branch design, minimizes inter-branch contamination in terms of hardware architecture and rinsing process, ensuring the independence, authenticity, and accuracy of each sample's data.

[0018] This invention features intelligence and high efficiency. It introduces an intelligent scheduling and adaptive rinsing control process based on water quality prediction, which reduces ultrapure water consumption and ineffective rinsing time while ensuring cleanliness, thereby improving the overall operating efficiency of the system. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall architecture of the present invention.

[0020] Figure 2 This is a timing flowchart of the four-stage anti-pollution rinsing method of the present invention.

[0021] Figure 3 This is a logic block diagram of the intelligent control unit of the present invention. Detailed Implementation

[0022] The technical solution of the present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0023] Example 1

[0024] See Figure 1 This embodiment provides a multi-channel water quality cross-contamination prevention sampling and monitoring system, including one or more ultrapure water flushing sources 2, one or more high-purity nitrogen purging sources 3, N multi-port selection valves 4, multi-port common connection valves 5, water quality detection unit 6, waste liquid discharge port 8, and intelligent control unit 9, where N is an integer greater than 1.

[0025] N multi-port selector valves 4 correspond one-to-one with N sampling sources 1 that require water quality sampling and testing. Each multi-port selector valve 4 includes multiple input ports and one output port. One input port is connected to its corresponding sampling source 1 via an independent pipeline. The other input ports of the multi-port selector valve 4 are connected to an ultrapure water flushing source 2, a common high-purity nitrogen purging source 3, and a waste liquid discharge port 8, respectively. The ultrapure water flushing source 2 provides ultrapure water for cleaning the pipeline; the common high-purity nitrogen purging source 3 provides high-purity nitrogen for purging residual liquid in the pipeline and drying, and the purity of the high-purity nitrogen is not less than 99.999%. The output ports of all multi-port selector valves 4 are uniformly connected to a multi-port common connection valve 5. The entire fluid channel from each sampling source 1, through the corresponding multi-port selector valve 4, to the inlet of the multi-port common connection valve 5 is called a sampling branch. There are a total of N sampling branches, each corresponding to one of the N sampling sources 1. There are no physical intersections between the sampling branches to avoid cross-contamination and deviations in the test results.

[0026] The multi-port common connection valve 5 includes N input ports and three output ports. The input ports are connected to their respective sampling branches, and the three output ports are connected to the water quality detection unit 6, the subsequent execution unit 7, and the waste liquid discharge port 8, respectively. The outlet of the water quality detection unit 6 is also connected to the waste liquid discharge port 8. The intelligent control unit 9 communicates with the ultrapure water flushing source 2, the high-purity nitrogen purging source 3, the multi-port selection valve 4, the multi-port common connection valve 5, and the water quality detection unit 6, and is used to control the entire system to perform multi-channel water quality sampling and monitoring to prevent cross-contamination according to a preset program. The intelligent control unit 9 has a built-in pollution risk prediction model established and updated in real time based on historical detection data and the operating status of upstream equipment, used to predict the pollution risk of each sampling branch. The historical detection data includes the detection data output by the water quality detection unit 6 corresponding to a single sampling branch.

[0027] In the above system, the multi-port selector valve 4 is preferably a diaphragm valve, which is small in size and generally does not suffer from wear and contamination of the sliding valve core. The high-sensitivity water quality detection unit 6 includes one or more online water quality analysis instruments such as a resistivity meter and a total organic carbon analyzer. The pipes, valves, and joints in the entire system are all made of electropolished 316L stainless steel or perfluoroalkoxy (PFA) polymer, and the surface roughness Ra of the flow channel is controlled below 0.4 μm.

[0028] Example 2

[0029] Based on the above system structure, this embodiment provides a method for preventing cross-contamination during rinsing of the system described in Embodiment 1. The following will combine... Figure 2 The workflow of this method is described in detail, and this process is automatically executed by the intelligent control unit 9. The method includes steps S1 to S3: S1. Sampling and Detection. All multi-port selection valves 4 are switched to the port connected to sampling source 1, and the output of multi-port common connection valve 5 is switched to connect to water quality detection unit 6. A sampling branch is selected as the target sampling branch in sequence. The input of multi-port common connection valve 5 is only connected to the target sampling branch, while the connection with other sampling branches is closed. The water quality detection unit 6 performs time-division detection on the samples from the target sampling branch.

[0030] S2. Establishment of the flushing channel. When the water quality detection unit 6 detects an abnormal water quality, it determines that there is a pollution risk in the current target sampling branch. In response to the pollution risk, according to the pollution risk prediction model, it predicts and dynamically selects a qualified water quality sampling branch as the cleaning source branch and establishes a flushing channel. The selection criteria for the cleaning source branch are that the pollution risk is lower than the threshold and the upstream equipment is operating stably. The flushing channel includes the cleaning source branch, the internal channel of the multi-port common connection valve, and the target sampling branch.

[0031] S3. After the flushing channel is established, perform the following four-stage anti-pollution flushing process.

[0032] Drainage section (T1): After the flushing flow channel is established, the output end of the multi-port common connection valve 5 is switched to connect with the waste liquid discharge port 8. The intelligent control unit 9 controls the multi-port selection valve 4 of the cleaning source branch and the target sampling branch to switch to the port connected to the high-purity nitrogen purging source 3 and controls the high-purity nitrogen purging source 3 to open. High-pressure nitrogen purges all residual liquid samples in the pipeline to the waste liquid discharge port 8 to ensure that there is no liquid residue.

[0033] Forward Flushing Section (T2): The multi-port selection valve 4 of the cleaning source branch and the target sampling branch switches to the port connected to the ultrapure water flushing source 2. The intelligent control unit 9 controls the ultrapure water flushing source 2 to open, injecting ultrapure water into the cleaning source branch and the target sampling branch, performing forward flushing of the inner wall of the pipeline in a turbulent state, and washing away most of the contaminants on the inner wall of the pipeline. During this stage, the water quality detection unit 6 continuously or intermittently monitors the water quality of the flushing water. If abnormal data is detected, such as the resistivity continuously falling below the preset threshold, or the total organic carbon continuously exceeding the preset threshold for a preset time, the system determines that the flushing is illegal and immediately triggers an alarm.

[0034] Reverse oscillating flushing section (T3): The output of the multi-port common connection valve 5 is closed. The intelligent control unit 9 controls the multi-port selection valve 4 of the sampling branch included in the flushing channel, namely the cleaning source branch and the target sampling branch, to alternately switch to connect the ultrapure water flushing source 2 and the waste liquid discharge port 8, so that the flushing water in the pipeline generates a reciprocating oscillating flow. This oscillating flow can effectively flush out valve dead corners, joint gaps, and contaminants adsorbed on the pipe wall that are difficult to reach by unidirectional flow.

[0035] Verification and Filling Section (T4): The output of the multi-port common connection valve 5 is switched to the water quality detection unit 6, and the input is connected to the target sampling branch and / or the cleaning source branch. The residual flushing water in the flushing channel is introduced into the water quality detection unit 6, and the resistivity and / or total organic carbon (TOC) of this part of the flushing water are detected in real time. The intelligent control unit 9 compares the detection value of the water quality detection unit 6 with the preset threshold and verifies whether the water quality is qualified according to the comparison result: if the verification is qualified, it is considered that the branch is clean, and then the multi-port selection valve 4 of the cleaning source branch and the target sampling branch is switched to the high-purity nitrogen purging source 3. The high-purity nitrogen purging source 3 is started to dry the pipeline and maintain a slight positive pressure, and enter the sampling state; if the verification is unqualified, the system alarms and triggers a secondary deep cleaning, which includes at least one of the following: extending the flushing time, increasing the temperature of the flushing medium, adding chemical cleaning agent to the flushing medium, re-establishing the flushing channel and performing a four-stage anti-pollution flushing process. In this embodiment, the preset threshold for resistivity is 18.0 MΩ·cm, the preset threshold for TOC value is 5 ppb, and the standard for water quality verification is that the resistivity detected by water quality detection unit 6 is greater than 18.0 MΩ·cm and the TOC value is less than 5 ppb.

[0036] The four stages T1 to T4 described above constitute the four-stage anti-pollution flushing process of this invention, and the switching between stages is based on the system's preset duration. During the execution of the entire process, after each sampling, testing, and flushing verification, the newly added detection data from the water quality detection unit 6 is incorporated into the historical detection data, and the pollution risk prediction model determines the pollution risk of each sampling branch based on the historical detection data and the operating status of upstream equipment.

[0037] In addition, such as Figure 3 As shown, the intelligent control unit 9 integrates an intelligent scheduling module and an adaptive flushing module. The intelligent scheduling module analyzes historical water quality data and upstream operating status of each branch through a pollution risk prediction model. The prediction model outputs a prediction score to measure the probability of water quality deterioration in each sampling branch. When the prediction score of a sampling branch exceeds a preset threshold, the sampling frequency of that branch is automatically increased based on the prediction score. For sampling branches that have been stable for a long time, the sampling interval is intelligently extended to achieve on-demand sampling. The adaptive flushing module dynamically adjusts the parameters of the current flushing based on the type, concentration, and adsorption capacity of pollutants detected in the previous sampling. This includes extending the flushing time in stages T2 and T3, increasing the oscillation frequency in stage T3, increasing the temperature of the flushing water to enhance the cleaning effect, and changing the type of flushing water. This intelligent control upgrades passive, fixed-cycle sampling / flushing to proactive optimization control based on data and prediction, improving efficiency and saving ultrapure water consumption while ensuring cleanliness.

[0038] In summary, this invention minimizes cross-contamination between paths through its hardware architecture and rinsing process, ensuring the independence, authenticity, and accuracy of data from each sample. This invention introduces an intelligent scheduling and adaptive rinsing algorithm based on water quality prediction, transforming traditional fixed-cycle passive operation into proactive optimization control. While maintaining cleanliness, it reduces ultrapure water consumption and ineffective rinsing time, improving overall system efficiency. This invention also features high reliability and ease of maintenance. Its modular, independent design ensures that a single-path failure does not affect overall operation, resulting in high system reliability. Furthermore, the rinsing effect has an online verification function, making maintenance objectives clear and enabling rapid location and handling of contamination issues, thus improving system maintainability. This system and method are highly industry-applicable, meeting the extremely stringent requirements of water quality monitoring in the semiconductor manufacturing industry, complying with SEMI standards, and can be extended to other cutting-edge manufacturing fields such as photovoltaics and biopharmaceuticals, which also require multi-path monitoring of high-purity fluids.

[0039] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any brief modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A flushing system for preventing cross-contamination during multi-channel water quality sampling and monitoring, characterized in that... include: Multiple independent sampling branches, each corresponding to a sampling source, and each sampling branch has multiple input ports and output ports. The multiple input ports are respectively connected to a flushing source, a purging source, a waste liquid discharge port and a corresponding sampling source. Each sampling branch is equipped with a multi-port selection valve for connecting one of the input ports and the output port. A multi-port common connection valve has multiple input ports and at least one output port. The multiple input ports of the common connection valve are respectively connected to the output ports of each sampling branch. The output port of the common connection valve is connected to a water quality detection unit and a waste liquid discharge port. An intelligent control unit is used to control the system to perform sampling monitoring and rinsing processes.

2. The anti-cross-contamination flushing system for multi-channel water quality sampling and monitoring according to claim 1, characterized in that: The rinsing source is an ultrapure water rinsing source, the purging source is a nitrogen purging source, and the multi-port selector valve is a diaphragm valve.

3. The anti-cross-contamination flushing system for multi-channel water quality sampling and monitoring according to claim 1, characterized in that: The water quality testing unit includes at least one of a resistivity meter and a total organic carbon analyzer.

4. A method for preventing cross-contamination during rinsing in the system of claim 1, characterized in that... Includes the following steps: S1. By controlling the multi-port selection valve of each sampling branch, the water quality detection unit performs time-division detection on samples or flushing water from different sampling branches to determine whether the water quality is abnormal or qualified. The sampling branch being detected is the target sampling branch. S2. When an abnormal water quality is detected, it is determined that there is a risk of pollution in the current target sampling branch. In response to the pollution risk, a sampling branch with qualified water quality is selected as the cleaning source branch and a flushing channel is established. The flushing channel includes the cleaning source branch, the target sampling branch, and the internal channel of the multi-port common connection valve. S3. Perform a four-stage anti-pollution flushing process, which includes emptying the flushing channel, performing forward flushing and reverse oscillation flushing on the flushing channel, and introducing the final flushing water into the water quality detection unit for testing and verifying the flushing effect based on the test results.

5. The anti-cross-contamination rinsing method according to claim 4, characterized in that: The four-stage anti-contamination flushing process described in step S3 includes the following sequentially executed stages: an emptying stage, a forward flushing stage, a reverse oscillating flushing stage, and a verification stage. In the emptying stage, the output of the multi-port common connection valve is switched to the waste liquid discharge port, and the multi-port selection valves of the cleaning source branch and the target sampling branch are switched to the purge source. The purge gas is used to discharge the residual liquid in the flushing channel to the waste liquid discharge port. In the forward flushing stage, the multi-port selection valves of the cleaning source branch and the target sampling branch are switched to the flushing source, and flushing water is injected into the flushing channel for forward flushing. In the reverse oscillating flushing stage, the output of the multi-port common connection valve is closed, and the multi-port selection valves of the cleaning source branch and the target sampling branch are controlled to alternately switch to the flushing source or the waste liquid discharge port, so that the flushing water in the flushing channel generates a reciprocating oscillating flow. In the verification section, the output of the multi-port common connection valve is switched to the water quality detection unit, and the residual flushing water in the flushing channel is introduced into the water quality detection unit for detection. The flushing effect is verified based on the comparison between the detected value and the preset threshold.

6. The anti-cross-contamination rinsing method according to claim 5, characterized in that... The verification section also includes: if the verification is qualified, the multi-port selection valve of the cleaning source branch and the target sampling branch is switched to the purge source for purging and drying; if the verification is unqualified, a second deep cleaning is performed, which includes at least one of the following: extending the rinsing time, increasing the temperature of the rinsing medium, adding chemical cleaning agent to the rinsing medium, re-establishing the rinsing flow channel and performing a four-stage anti-contamination rinsing process.

7. The anti-cross-contamination rinsing method according to claim 6, characterized in that: The preset thresholds in the verification section include resistivity threshold and total organic carbon threshold. The verification standard is that the resistivity detected by the water quality detection unit is greater than the resistivity threshold and the total organic carbon content is less than the total organic carbon threshold.

8. The anti-cross-contamination rinsing method according to claim 4, characterized in that: The intelligent control unit is equipped with an intelligent scheduling module, which establishes a pollution risk prediction model. The pollution risk prediction model predicts and outputs a prediction score to measure the possibility of water quality deterioration in each sampling branch based on historical detection data and the operating status of upstream equipment. The historical detection data includes the detection data output by the water quality detection unit corresponding to a single sampling branch. The intelligent scheduling module adjusts the sampling frequency of each sampling branch according to the output of the pollution risk prediction model.

9. The anti-cross-contamination rinsing method according to claim 8, characterized in that: In step S2, the cleaning source branch is selected based on the output of the pollution risk prediction model.

10. The anti-cross-contamination rinsing method according to claim 4, characterized in that: The intelligent control unit is equipped with an adaptive flushing module, which adjusts the flushing parameters based on the previously detected contaminant information. The flushing parameters include the flushing time of the forward flushing section and the reverse oscillation flushing section, the oscillation frequency of the reverse oscillation flushing section, and the flushing water temperature or flushing water type.

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