A diaphragm valve for a semiconductor cmp apparatus and a method of using the same

Abstract

This application relates to a diaphragm valve for semiconductor CMP equipment and its usage method in the field of diaphragm valve technology. The diaphragm valve includes a bottom valve seat, a diaphragm, a top valve seat, and a connecting assembly. The bottom valve seat has an input flow channel, an output flow channel, and a connecting hole between them. The diaphragm is aligned with the connecting hole to control the flow between the input and output channels. The top valve seat abuts against the non-working surface of the diaphragm, thereby forming a tight fit between the working surface of the diaphragm and the connecting hole. The bottom valve seat forms a rotary locking structure on the protruding ring portion of the connecting hole. The connecting assembly is disposed on the top valve seat and is rotatably connected to the rotary locking structure to tightly press the bottom valve seat and the top valve seat, fixing the periphery of the diaphragm. The diaphragm can be quickly replaced in the CMP process by removing the top valve seat with a single rotation.

Description

Technical Field

[0001] This application relates to the technical field of diaphragm valves, and in particular to a diaphragm valve for semiconductor CMP equipment and its usage method. Background Technology

[0002] In semiconductor chemical mechanical polishing (CMP) processes, the precise delivery and control of the polishing slurry directly affects the chip yield. Diaphragm valves are widely used for supplying polishing slurries due to their excellent fluid switching control capabilities and cleanliness performance. A typical diaphragm valve structure mainly includes an upper valve seat, a lower valve seat, a diaphragm, and a drive unit. The lower valve seat has inlet and outlet flow channels, the diaphragm is installed inside the lower valve seat, and the drive unit is installed on the upper valve seat. The flow channels are controlled by driving the deformation of the diaphragm.

[0003] Depending on the installation method, diaphragm valves can be divided into two types: floating and fixed. Floating installation means the valve is directly connected to the pipeline, with the pipeline bearing the valve's weight. In this installation method, the connection between the valve and the pipeline is subjected to bending torque over a long period, which can easily lead to loosening of the joint or cracking of the weld, resulting in leakage. Therefore, it is generally only suitable for small, lightweight valves. Fixed installation, on the other hand, uses bolts to fix the lower valve seat to a load-bearing structure such as a frame or base. The valve's weight is borne by the load-bearing structure, resulting in a stable, reliable, and high-strength connection with the pipeline. Therefore, it is widely used in applications requiring large size, heavy weight, and high precision control of the grinding fluid.

[0004] For diaphragm valves with fixed installation, the arrangement on the load-bearing structure usually needs to take into account both operational convenience and fluid characteristics: on the one hand, the upper valve seat should face the side that is easy for manual operation and observation; on the other hand, the lower valve seat should be arranged downwards so that the diaphragm is in a vertical state or horizontally upwards, so as to avoid the medium from being deposited on the surface of the diaphragm due to gravity, causing premature wear of the diaphragm or control failure.

[0005] In the traditional design of fixed diaphragm valves, in order to facilitate disassembly and assembly on the load-bearing structure and avoid the valve's lateral dimensions being too large and taking up limited equipment space, the common practice is to adopt the following structure: a connecting lug is set on the side wall of the lower valve seat, and the connecting lug is fixed to the load-bearing structure by screws to realize the connection between the lower valve seat and the load-bearing structure; at the same time, threaded holes are directly opened on the solid parts of the upper and lower valve seats, and a stud is screwed into the side of the lower valve seat away from the upper valve seat, and the upper and lower valve seats are fastened by the cooperation of the stud and the threaded hole.

[0006] However, because the polishing slurry is rich in high-hardness abrasive particles (such as silica and cerium oxide), these particles continuously wear down the diaphragm during long-term flow, leading to a reduction in diaphragm life and control accuracy. Therefore, the diaphragm needs to be replaced frequently as a wear part. For the aforementioned traditional diaphragm valves with fixed installation, each time the diaphragm is replaced, the operator must first remove the entire valve from the supporting structure and pipeline, then separate the upper and lower valve seats, and after the diaphragm is replaced, reassemble the upper and lower valve seats and reinstall the valve in its original position. The entire process is cumbersome, time-consuming, and often requires specialized tools. This not only increases the average repair time of the equipment but also introduces potential risks such as joint damage, particle introduction, and leakage due to repeated disassembly and assembly, affecting the production efficiency and process stability of the CMP equipment. Summary of the Invention

[0007] To ensure the control accuracy of the diaphragm, reduce maintenance costs, and improve the production efficiency and process stability of CMP equipment, this application provides a diaphragm valve for semiconductor CMP equipment.

[0008] This application provides a diaphragm valve for semiconductor CMP equipment and its usage method, which adopts the following technical solution: A diaphragm valve for a semiconductor CMP device, comprising: The bottom valve seat has an input flow channel, an output flow channel and a connecting hole between them; the bottom valve seat has a rotary locking structure formed on the convex ring portion of the connecting hole; A diaphragm, aligned with the connecting hole, is used to control the opening and closing of the input flow channel and the output flow channel by deformation; A top valve seat, located on the communicating hole of the bottom valve seat, is used to abut against the non-working surface of the diaphragm to form a tight fit between the working surface of the diaphragm and the communicating hole; the top valve seat is provided with a drive assembly to drive the diaphragm. A connecting component is disposed on the top valve seat and connected to the rotary locking structure of the bottom valve seat. The connecting component can detachably press the bottom valve seat and the top valve seat together and fix the periphery of the diaphragm. The top valve seat, the diaphragm and the connecting component form a replacement module that is detached from the bottom valve seat.

[0009] By adopting the above technical solution, during valve installation, the bottom valve seat is fixed to the supporting structure, and the inlet and outlet flow channels are connected to the external liquid delivery pipeline. When the diaphragm needs to be replaced, the operator does not need to remove the entire valve from the supporting structure and pipeline. They only need to rotate the connecting assembly to separate it from the rotary locking structure, thus releasing the locking state between the bottom and top valve seats. This allows the replacement module to be separated from the bottom valve seat and the diaphragm to be replaced. During this process, the bottom valve seat, which is fixedly connected to the pipeline and supporting structure, remains in its original position. After the diaphragm is replaced, the top and bottom valve seats are aligned, and the connecting assembly is rotated in the opposite direction to engage with the rotary locking structure, completing the valve reassembly. The entire maintenance process does not require disassembling the entire valve; the relative position and connection state between the bottom valve seat, pipeline, and supporting structure remain unchanged, eliminating the cumbersome pipeline positioning, alignment, and calibration operations required for secondary valve installation in traditional solutions. Furthermore, the bottom and top valve seats can be separated without the need for complex tools, simplifying the operation. This shortens the average repair time of the equipment, reduces the risks of joint damage, particle introduction and leakage caused by repeated disassembly and assembly of the entire valve, ensures the control accuracy of the diaphragm, reduces maintenance costs, and improves the production efficiency and process stability of CMP equipment.

[0010] The connecting assembly includes a rotary locking sleeve, which is rotatably engaged with the top valve seat; the inner wall of the rotary locking sleeve has an internal thread that mates with the external thread of the rotary locking structure.

[0011] By employing the above technical solution, a stable, reliable, and easy-to-operate locking and disengagement between the top and bottom valve seats is achieved through the engagement of a rotating locking sleeve with internal threads and an external thread of a rotating locking structure. The threaded connection itself has self-locking properties, providing uniform axial clamping force to ensure the periphery of the diaphragm is firmly fixed. Simultaneously, this rotating engagement method is simple to operate; simply rotating the rotating locking sleeve is sufficient to lock and disengage the top and bottom valve seats, improving the ease of disassembly and assembly of replacement modules.

[0012] Optionally, the connecting component has multiple slots spaced apart on its peripheral wall, and the connecting hole of the bottom valve seat has teeth on its outer side. The teeth are used to engage with the slots and limit the relative rotation of the connecting component and the rotary locking structure with a preset torque.

[0013] By adopting the above technical solution, the locking process of the locking teeth and grooves is completed synchronously when the connecting components rotate to the predetermined position, requiring no additional steps from the operator, thus achieving an adaptive anti-loosening function. This self-locking structure reduces the risk of accidental loosening of the connecting components due to vibration or other factors during equipment operation, as well as the risk of connection failure due to relative rotation between the connecting components and the rotary locking structure. This ensures a stable and reliable connection between the bottom valve seat and the top valve seat, improving the operational stability and safety of the valve under harsh conditions. Furthermore, since the locking and unlocking of the locking teeth and grooves are fully integrated into the normal rotational movement of the connecting components, operators no longer need to separately install, adjust, or disassemble the anti-loosening structure when assembling or disassembling the bottom and top valve seats, simplifying the operation and further improving maintenance efficiency, making valve maintenance faster and simpler.

[0014] Optionally, a C-shaped retaining ring is also included; an annular groove is provided on the peripheral wall of the top valve seat, and the C-shaped retaining ring is detachably engaged in the annular groove, abutting axially with the annular shoulder of the rotating lock sleeve near the bottom valve seat.

[0015] By adopting the above technical solution, when the operator rotates the rotary locking sleeve to separate it from the rotary locking structure on the bottom valve seat, the rotary locking sleeve will move away from the bottom valve seat during the loosening process. At this time, the C-shaped retaining ring can axially abut against the annular shoulder of the rotary locking sleeve, thereby preventing the rotary locking sleeve from falling off the top valve seat. Thus, when the top valve seat, diaphragm, and connecting assembly are removed from the bottom valve seat as a whole replacement module, the rotary locking sleeve is held on the top valve seat, preventing parts from scattering or being lost, ensuring the integrity of the replacement module and the ease of operation. Furthermore, when installing another replacement module onto the bottom valve seat, the operator does not need to readjust or reinstall the rotary locking sleeve; they can directly perform the tightening operation, shortening the replacement time. In addition, the C-shaped retaining ring adopts a detachable snap-fit ​​method, facilitating assembly and maintenance. When it is necessary to replace the rotary locking sleeve or the C-shaped retaining ring itself, it can be easily disassembled and assembled, reducing maintenance costs.

[0016] Optionally, the bottom valve seat is provided with a plurality of insertion holes spaced apart in the circumferential direction along the axis of the connecting hole, and at least one positioning block is fixedly connected to the top valve seat. The positioning block is inserted and engaged with the insertion holes to restrict the relative rotation between the bottom valve seat and the top valve seat.

[0017] By adopting the above technical solution, during the assembly process, when the top valve seat and the bottom valve seat mate, the positioning block is simultaneously inserted into the insertion hole. This insertion fit restricts the relative rotation between the bottom valve seat and the top valve seat. This provides a circumferential positioning reference for the subsequent engagement of the bottom and top valve seats in the rotating connection assembly, ensuring the accuracy of their relative positions and avoiding engagement difficulties or misalignment caused by relative rotation. This makes the valve assembly process more convenient.

[0018] Optionally, the top valve seat includes a cylinder head, a cylinder seat, and a locking element; the cylinder head and the cylinder seat are threadedly connected; the locking element is detachably connected to the cylinder head and the cylinder seat, and is used to restrict relative rotation between the cylinder head and the cylinder seat.

[0019] By adopting the above technical solution, when maintenance or replacement of the drive assembly is required, operators only need to release the detachable locking mechanism and then manually rotate the cylinder head to quickly separate the cylinder head from the cylinder seat. The entire operation does not require specialized tools and does not require disassembling the valve from the load-bearing structure, thus improving the convenience and efficiency of maintenance operations. Simultaneously, when the valve is operating normally, the locking mechanism reduces the possibility of loosening between the cylinder head and cylinder seat due to long-term equipment vibration or pressure fluctuations, as well as the risk of control failure or media leakage caused by accidental loosening, thereby improving the structural stability and sealing reliability of the drive chamber.

[0020] Optionally, the diaphragm divides the internal space of the bottom valve seat in the convex ring portion of the connecting hole into a first cavity and a second cavity; the first cavity connects the input flow channel and the output flow channel, and the top valve seat portion is inserted into the second cavity.

[0021] By adopting the above technical solution, the diaphragm acts as an isolation element within the connecting hole of the bottom valve seat. The first cavity serves as a fluid channel, directly connecting to the input and output channels, and carrying the flow of the grinding fluid. The second cavity serves as the drive-side space, accommodating the inserted portion of the top valve seat. This spatial separation achieves physical isolation between the fluid medium and the drive components. Simultaneously, the insertion and engagement of the top valve seat with the second cavity provides precise guidance for the coaxial alignment of the top and bottom valve seats, ensuring the alignment accuracy between the diaphragm center and the valve stem and connecting hole, resulting in more uniform deformation stress on the diaphragm and more precise control. Furthermore, the increased sealing interface length between the top and bottom valve seats, combined with the surrounding compression and fixation of the diaphragm, forms multiple sealing barriers, reducing the risk of grinding fluid leakage from the inside of the valve body to the outside.

[0022] Optionally, the drive assembly includes a piston, a valve stem, and an elastic element; a drive chamber is provided in the top valve seat, and the piston is slidably disposed in the drive chamber along the thickness direction of the diaphragm, dividing the drive chamber into a first chamber and a second chamber; one end of the valve stem is fixedly connected to the piston, and the other end of the valve stem is detachably connected to a stud pre-embedded in the center of the diaphragm; the elastic element is used to drive the piston away from the top valve seat.

[0023] By adopting the above technical solution, when the diaphragm needs to be opened, a driving medium can be introduced into the first chamber to push the piston to slide away from the bottom valve seat. This, in turn, moves the center of the diaphragm via the valve stem, connecting the input and output channels. When the diaphragm needs to be closed, a driving medium can be introduced into the second chamber to push the piston away from the top valve seat, resetting the diaphragm to block the input and output channels. The elastic element works in conjunction with the driving medium in the second chamber during normal operation to ensure the reliability and speed of blocking the input and output channels. Furthermore, even if the external driving medium supply fails, the elastic element can still independently drive the piston to slide away from the top valve seat, blocking the input and output channels and automatically restoring the valve to its preset normally closed state, thus improving the valve's fault-tolerant performance under complex operating conditions. In addition, the valve stem and the center of the diaphragm are detachably connected, ensuring reliable drive transmission while facilitating individual diaphragm replacement during maintenance without disassembling the entire drive assembly, further optimizing maintenance convenience.

[0024] Optionally, the drive assembly further includes an adjusting member movably connected to the top valve seat along the sliding direction of the piston, for limiting the travel of the piston and the valve stem.

[0025] By adopting the above technical solution, the maximum stroke of the piston or valve stem moving away from the bottom valve seat can be set by adjusting the axial position of the adjusting component on the top valve seat. This mechanical limiting function can precisely control the maximum opening degree of the diaphragm, thereby achieving the preset and limiting of the valve's maximum flow rate, improving the accuracy and reliability of flow control.

[0026] Optionally, the drive assembly further includes a diaphragm pressure block disposed at one end of the valve stem connected to the diaphragm sheet, for abutting against the non-working surface of the diaphragm sheet; the shape of the side of the diaphragm pressure block used to abut against the diaphragm sheet matches the shape of the non-working surface of the diaphragm sheet in the closed state; the diaphragm pressure block and the valve stem form a non-rotatable connection relationship, and the diaphragm pressure block and the top valve seat form a sliding connection relationship along the sliding direction of the valve stem.

[0027] By adopting the above technical solution, during the cut-off stages of the input and output flow channels, the diaphragm block, with its shape matching the non-working surface of the diaphragm in the state of the cut-off input and output flow channels, abuts against and supports the diaphragm, reducing local fatigue and stress concentration caused by the diaphragm under long-term pressure from the liquid medium. Simultaneously, by setting the diaphragm block and the top valve seat to a connection that allows relative sliding only along the sliding direction of the valve stem, combined with the non-rotatable connection between the diaphragm block and the valve stem, a constraint is formed on the circumferential degree of freedom of the diaphragm block. This constraint prevents the diaphragm block from rotating when the valve stem may rotate under the action of the drive components, thus isolating the torsional torque that may be generated by the valve stem and preventing it from being transmitted to the diaphragm. This reduces the possibility of the diaphragm experiencing torsional stress or circumferential frictional wear due to valve stem rotation, increases the diaphragm's lifespan during long-term reciprocating motion, reduces maintenance costs caused by abnormal diaphragm wear, and improves the control accuracy and reliability of the valve throughout its entire lifespan.

[0028] Optionally, the drive assembly further includes a rotating seat, a transmission pair, and multiple contoured sleeves; the rotating seat is rotatably connected to the top valve seat; the transmission pair connects the valve stem and the rotating seat, and is used to drive the rotating seat to rotate by sliding the valve stem; the multiple contoured sleeves are radially stacked and sleeved on the outside of the valve stem, and form a sliding connection with the valve stem in a direction parallel to the sliding direction of the valve stem; the first end face of the multiple contoured sleeves forms a contoured surface for abutting against the non-working surface of the diaphragm, and the second end face of the multiple contoured sleeves is provided with a wedge-shaped surface for sliding abutting against the rotating seat; the rotating seat drives the multiple contoured sleeves to slide relative to each other by rotation, so as to change the shape of the contoured surface; the slope of the wedge-shaped surface of the multiple contoured sleeves is configured such that, within the working stroke range of the diaphragm, the shape of the contoured surface matches the shape of the non-working surface of the diaphragm.

[0029] By adopting the above technical solution, when the valve stem slides and causes the diaphragm to deform, the valve stem drives the rotating seat to rotate through the transmission pair. During the rotation, the rotating seat abuts against and presses the wedge-shaped surfaces of multiple contour sleeves, driving each layer of contour sleeves to slide relative to each other along the axial direction. Due to the special configuration of the slope of the wedge-shaped surfaces, the shape of the contour surface formed by the first end faces of multiple contour sleeves can change in real time with the stroke of the valve stem (i.e., different deformation states of the diaphragm), and within the working stroke range of the diaphragm, the shape of the contour surface can match the current shape of the non-working surface of the diaphragm. In this way, on the one hand, during the dynamic process of the diaphragm opening or closing, full-range dynamic contour support for the non-working surface of the diaphragm is achieved, reducing local stress concentration during the movement. On the other hand, when the valve is in a stable open or closed state, the contour surface can form comprehensive structural support for the diaphragm from the non-working surface side of the diaphragm in a way that completely fits the current shape of the diaphragm. At this point, the pressure from the conveying medium acts on the working surface of the diaphragm. This pressure is directly transmitted and distributed by the contoured surface to the rigid structure composed of multiple contoured sleeves, so that the diaphragm itself no longer bears the tensile stress caused by the pressure of the conveying medium alone. This reduces irreversible tensile deformation and permanent damage to the diaphragm under long-term medium pressure, extends the service life of the diaphragm under high-pressure conditions, and enables the valve to maintain precise opening and closing positions and flow control characteristics throughout its entire life cycle, thereby improving the reliability and process stability of key fluid control components in CMP equipment.

[0030] A method of using a diaphragm valve for a semiconductor CMP device as described above, wherein the bottom valve seat of the diaphragm valve for the semiconductor CMP device is fixedly installed on a support structure, and the input flow channel and the output flow channel are respectively connected to a polishing slurry supply pipeline; through the rotational engagement of the connecting assembly and the rotary locking structure, the top valve seat and the bottom valve seat are pressed tightly together axially to fix the periphery of the diaphragm. In the CMP process, this method of use includes the following steps: S10. During the replacement phase of the diaphragm, the locking of the connecting assembly and the rotary locking structure is released, and the replacement module consisting of the top valve seat, the diaphragm, and the connecting assembly is separated and removed from the bottom valve seat; wherein, the bottom valve seat remains fixedly installed on the bearing structure, and the input flow channel and the output flow channel remain connected to the grinding fluid supply pipeline respectively; S20. Align and install another replacement module on the bottom valve seat to replace the new diaphragm. S30. The diaphragm is quickly replaced by rotating and locking the bottom valve seat of the original semiconductor CMP equipment diaphragm valve with the connecting component of another replacement module.

[0031] By adopting the above technical solution, the bottom valve seat remains fixedly installed on the supporting structure throughout the entire diaphragm replacement process, and the inlet and outlet flow channels remain connected to the grinding fluid supply pipeline. Operators do not need to perform any disassembly or assembly operations related to the supporting structure or pipelines, avoiding the cumbersome steps of removing the entire valve from the frame and pipelines required in traditional technologies for diaphragm replacement. Furthermore, by pre-integrating the top valve seat, diaphragm, and connecting assembly into a single replacement module, during replacement, only the locking mechanism of the connecting assembly needs to be released to detach the entire module from the bottom valve seat. Subsequently, another replacement module with a new diaphragm is aligned and installed on the existing, fixed bottom valve seat, and secured by rotation locking. The entire replacement process involves only four simple actions: "unlocking - removing - aligning - locking" of a single replacement module, requiring no tools and making operation extremely convenient. Furthermore, because the bottom valve seat and its connected piping remain undisturbed throughout the replacement process, the risk of damage caused by repeated disassembly and assembly of pipe joints, grinding fluid leakage, and the entry of external particles into the fluid system is reduced, thus improving the process cleanliness and operational reliability of the CMP equipment. This method reduces the average diaphragm replacement time from tens of minutes or even hours to just minutes, lowering the average equipment downtime and thereby improving the production efficiency and process stability of the CMP equipment.

[0032] In summary, this application includes at least one of the following beneficial technical effects: 1. By integrating the top valve seat, diaphragm, and connecting assembly into a single, independently separable replacement module, and engaging with the bottom valve seat fixed to the support structure via a rotary locking mechanism, the replacement module can be easily removed online by simply rotating the connecting assembly when replacing the vulnerable diaphragm. This allows for rapid online replacement of the diaphragm without removing the entire valve from the pipeline and support structure. This reduces the risk of particle introduction, media leakage, and pipeline damage caused by repeated disassembly and reassembly of pipe joints in traditional solutions, thus improving the production efficiency and process stability of the CMP equipment. Previously, replacing the diaphragm in the CMP process required two separate unplugging and replugging operations of the inlet and outlet threaded sleeves; now, only one upward rotation of the top valve seat is needed to replace the diaphragm, significantly reducing downtime due to abnormal CMP process shutdowns. 2. By setting a groove on the connecting component and setting a retaining tooth on the convex ring of the bottom valve seat, the retaining tooth and the groove automatically engage when the connecting component is rotated and locked in place. This achieves an adaptive anti-loosening function, effectively preventing the threads between the connecting component and the bottom valve seat from loosening due to equipment vibration without additional operation. This ensures the long-term stability and reliability of the connection between the bottom valve seat and the top valve seat, and improves the operational safety of the valve under harsh working conditions. 3. By setting a diaphragm pressure block, the shape of its contact surface matches the shape of the non-working surface of the diaphragm in the closed state, and forms a connection with the top valve seat that can only move along the sliding direction of the valve stem. This not only provides effective conformal support for the diaphragm in the closed state, reducing stress concentration and fatigue damage, but also effectively isolates and prevents the torsional torque that may be generated by the valve stem from being transmitted to the diaphragm, avoiding abnormal wear of the diaphragm due to torsional stress, thereby extending the service life of the diaphragm and ensuring the control accuracy of the valve throughout its entire life cycle. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application; Figure 2 This is an exploded view of an embodiment of this application; Figure 3 This is a schematic diagram of the internal structure of an embodiment of this application; Figure 4 yes Figure 3 A magnified view of part A in the image; Figure 5 This mainly demonstrates the mating relationship between the teeth and slots in the embodiments of this application; Figure 6 This mainly demonstrates the mating relationship between the bottom valve seat and the top valve seat in the embodiments of this application.

[0034] Explanation of reference numerals in the attached drawings: 10. Bottom valve seat; 11. Inlet flow channel; 12. Outlet flow channel; 13. Connecting hole; 131. First cavity; 132. Second cavity; 14. Clamping tooth; 15. Insertion hole; 16. Protruding structure; 17. Fixing lug; 18. Inlet threaded sleeve; 19. Outlet threaded sleeve; 20. Diaphragm; 21. Stud; 30. Top valve seat; 31. Cylinder head; 311. First orifice; 312. Second orifice; 313. First slot; 32. Cylinder seat; 321. Positioning block; 32 2. Second slot; 33. Locking element; 34. Drive chamber; 341. First chamber; 342. Second chamber; 35. Annular groove; 40. Connecting assembly; 41. Slot; 50. Rotary locking structure; 60. Drive assembly; 61. Piston; 62. Valve stem; 63. Elastic element; 64. Adjusting element; 65. Diaphragm pressure block; 71. First sealing ring; 72. Second sealing ring; 73. Third sealing ring; 74. Fourth sealing ring; 75. Fifth sealing ring; 80. Protective cover; 90. C-shaped retaining ring. Detailed Implementation

[0035] The following combination Figures 1-6 This application will be described in further detail.

[0036] This application discloses a diaphragm valve for semiconductor CMP equipment and its usage method.

[0037] Reference Figure 1 and Figure 2 In this embodiment, the diaphragm valve for semiconductor CMP equipment includes a bottom valve seat 10, a diaphragm sheet 20, a top valve seat 30, a connecting assembly 40, a driving assembly 60, and a C-shaped retaining ring 90.

[0038] The bottom valve seat 10 has a fixed lug 17 fixedly connected to its side wall. The projection of the screw hole on the fixed lug 17 onto the horizontal plane does not overlap with the projections of the bottom valve seat 10 and the top valve seat 30 onto the horizontal plane. The bottom valve seat 10 has an input flow channel 11 and an output flow channel 12 inside, and a connecting hole 13 located between and connecting the input flow channel 11 and the output flow channel 12. The input flow channel 11 and the output flow channel 12 are coaxially arranged in the horizontal direction, and the connecting hole 13 is arranged in a direction perpendicular to the horizontal plane. The connecting hole 13 can be a blind hole with a circular cross-section. The openings of the input flow channel 11 connecting to one end of the connecting hole 13 and the openings of the output flow channel 12 connecting to one end of the connecting hole 13 are spaced apart on the bottom surface of the connecting hole 13.

[0039] An inlet threaded sleeve 18 and an outlet threaded sleeve 19 are rotatably connected to the bottom valve seat 10. The inlet threaded sleeve 18 is located outside the input flow channel 11 and is used to connect to the grinding fluid supply pipe so that the input flow channel 11 is connected to the grinding fluid supply pipe. The outlet threaded sleeve 19 is located outside the output flow channel 12 and is used to connect to the grinding fluid supply pipe so that the output flow channel 12 is connected to the grinding fluid supply pipe.

[0040] The diaphragm 20 is shaped to match the cross-sectional shape of the connecting hole 13. The diaphragm 20 is laid flat on the bottom surface of the connecting hole 13, with the periphery of its working surface sealing against the bottom surface of the connecting hole 13, thus dividing the connecting hole 13 into a first cavity 131 and a second cavity 132. The first cavity 131 is located on one side of the working surface of the diaphragm 20, and the second cavity 132 is located on the non-working surface side of the diaphragm 20. The diaphragm 20 is used to control the flow between the input channel 11 and the output channel 12 through deformation.

[0041] The top valve seat 30 is partially inserted into the second cavity 132 of the connecting hole 13 to abut against the periphery of the non-working surface of the diaphragm 20, so as to cooperate with the bottom valve seat 10 to fix the periphery of the diaphragm 20.

[0042] The bottom valve seat 10 has a rotary locking structure 50 formed on the protruding ring portion of the connecting hole 13; the connecting assembly 40 is disposed on the top valve seat 30 and connected to the rotary locking structure 50 of the bottom valve seat 10. The connecting assembly 40 can detachably press the bottom valve seat 10 and the top valve seat 30 together and fix the periphery of the diaphragm 20. The top valve seat 30, the diaphragm 20 and the connecting assembly 40 form a replacement module and can be completely separated from the bottom valve seat 10.

[0043] The connecting assembly 40 includes a rotary locking sleeve that rotatably engages with the top valve seat 30. The rotary locking sleeve can be an annular component, with its rotation axis coaxial with the central axis of the connecting hole 13. The inner wall of the rotary locking sleeve has internal threads that mate with the external threads of the rotary locking structure 50.

[0044] In this way, when installing the valve, the fixing lug 17 is fixed to the bearing structure by screws, and the bottom valve seat 10 is fixed on the bearing structure; then the inlet threaded sleeve 18 and the outlet threaded sleeve 19 are threadedly connected to the grinding fluid supply pipe, so that the input flow channel 11 and the output flow channel 12 are connected to the grinding fluid supply pipe.

[0045] Specifically, when the diaphragm 20 needs to be replaced, the operator does not need to remove the entire valve from the supporting structure and pipeline. They only need to rotate the rotating locking sleeve to separate it from the rotating locking structure 50, thus releasing the locking state between the bottom valve seat 10 and the top valve seat 30. This allows the replacement module to be separated from the bottom valve seat 10 and the diaphragm 20 to be replaced. During this process, the bottom valve seat 10, which is fixedly connected to the pipeline and supporting structure, remains in its original position. After the diaphragm 20 is replaced, the top valve seat 30 is aligned with the bottom valve seat 10, and the rotating locking sleeve is rotated in the opposite direction to engage with the rotating locking structure 50, thus completing the valve reassembly.

[0046] Previously, replacing the diaphragm 20 in the CMP process required two separate unplugging operations, one from the left and one from the right, of the inlet threaded sleeve 18 and the outlet threaded sleeve 19. Now, it only requires one upward rotation to unplug the top valve seat 30, which is sufficient to replace the diaphragm 20. This reduces maintenance time and shortens the downtime caused by abnormal shutdowns in the CMP process.

[0047] The entire maintenance process does not require disassembling the entire valve. The relative position and connection status between the bottom valve seat 10 and the pipeline and supporting structure remain unchanged, eliminating the cumbersome pipeline positioning, alignment, and calibration operations required for secondary valve installation in traditional solutions. Furthermore, the bottom valve seat 10 and top valve seat 30 can be separated without the need for complex tools, simplifying the operation. This shortens the average repair time of the equipment, reduces the risks of joint damage, particle introduction, and leakage caused by repeated disassembly and reassembly of the entire valve, ensures the control accuracy of the diaphragm 20, reduces maintenance costs, and improves the production efficiency and process stability of the CMP equipment.

[0048] Furthermore, by utilizing the internally threaded rotating sleeve to engage with the external thread of the rotating locking structure 50, a stable, reliable, and easy-to-operate locking and disengagement between the top valve seat 30 and the bottom valve seat 10 is achieved. The threaded connection itself has self-locking properties, providing uniform axial clamping force to ensure that the periphery of the diaphragm 20 is firmly fixed. At the same time, this rotating engagement method is simple to operate; simply rotating the rotating sleeve is sufficient to lock and disengage the top valve seat 30 and the bottom valve seat 10, improving the ease of disassembly and assembly of the replacement module.

[0049] Reference Figure 3 and Figure 4 An annular groove 35 is formed on the peripheral wall of the top valve seat 30. A C-shaped retaining ring 90 is detachably engaged in the annular groove 35 and abuts axially against the annular shoulder of the rotating sleeve near the bottom valve seat 10. The C-shaped retaining ring 90 is made of elastic material. In its free state, the inner diameter of the C-shaped retaining ring 90 matches the outer diameter of the top valve seat 30 located in the annular groove 35, and the outer diameter is larger than the inner diameter of the annular shoulder of the rotating sleeve. When driven by external force, the inner diameter of the C-shaped retaining ring 90 can be larger than the outer diameter of the top valve seat 30 located outside the annular groove 35.

[0050] When the operator rotates the rotary locking sleeve to separate it from the rotary locking structure 50 on the bottom valve seat 10, the rotary locking sleeve will move away from the bottom valve seat 10 during the loosening process. At this time, the C-shaped retaining ring 90 can axially abut against the annular shoulder of the rotary locking sleeve, thereby preventing the rotary locking sleeve from falling off the top valve seat 30.

[0051] In this way, when the replacement module is removed from the bottom valve seat 10, the rotating locking sleeve is held on the top valve seat 30, preventing parts from scattering or being lost, and ensuring the integrity of the replacement module and the ease of operation. The C-shaped retaining ring 90 adopts a detachable snap-fit ​​method, which facilitates assembly and maintenance. When it is necessary to replace the rotating locking sleeve or the C-shaped retaining ring 90 itself, it can be easily disassembled and assembled, reducing maintenance costs.

[0052] Reference Figure 3 and Figure 4 In this embodiment, the top valve seat 30 includes a cylinder head 31, a cylinder seat 32, and a locking member 33. The cylinder head 31 can be a cylindrical component with an annular cavity inside and an open end; one end of the cylinder seat 32 is inserted into the open end of the cylinder head 31 and threadedly connected to the cylinder head 31 through a sealing thread pair to form a sealed driving cavity 34 coaxial with the connecting hole 13; the other end of the cylinder seat 32 is inserted into the second cavity 132 to abut against the periphery of the non-working surface of the diaphragm 20; a rotary locking sleeve is rotatably connected to the cylinder seat 32. A first sealing ring 71 is provided between the cylinder head 31 and the cylinder seat 32 to ensure the sealing of the driving cavity 34. A second sealing ring 72 is provided between the cylinder seat 32 and the inner wall of the connecting hole 13 to ensure the sealing of the connecting hole 13.

[0053] The locking element 33 is detachably connected to the cylinder head 31 and the cylinder seat 32 to restrict relative rotation between the cylinder head 31 and the cylinder seat 32; the locking element 33 can be a pin. The side wall of the cylinder head 31 is provided with a first slot 313 for engaging with the pin, and the side wall of the cylinder seat 32 is provided with a second slot 322 for engaging with the pin. When the cylinder head 31 and the cylinder seat 32 are assembled, the first slot 313 on the cylinder head 31 and the second slot 322 on the cylinder seat 32 are aligned, and the pin can be simultaneously inserted into the aligned first slot 313 and second slot 322, forming an interference fit with the first slot 313 and / or the second slot 322.

[0054] In other embodiments, the locking element may also be a set screw with a manual tightening part, which fixes the cylinder head 31 and the cylinder seat 32 by threaded connection.

[0055] In this embodiment, the drive assembly 60 includes a piston 61, a valve stem 62, and an elastic element 63. The valve stem 62 and piston 61 can be a separate structure or an integral structure. The piston 61 is slidably disposed in the drive cavity 34 along the thickness direction of the diaphragm 20 to divide the drive cavity 34 into two independent chambers: a first chamber 341 and a second chamber 342. The first chamber 341 is located on the side of the piston 61 closer to the bottom valve seat 10, and the second chamber 342 is located on the side of the piston 61 away from the bottom valve seat 10. A third sealing ring 73 is provided between the piston 61 and the inner wall of the drive cavity 34 to ensure the sealing of the first chamber 341 and the second chamber 342. The outer wall of the cylinder head 31 of the top valve seat 30 is provided with a first orifice 311 communicating with the first chamber 341 and a second orifice 312 communicating with the second chamber 342. The first orifice 311 and the second orifice 312 both face the same direction and are used to connect to an external drive medium supply pipeline.

[0056] The valve stem 62 is coaxially arranged with the drive chamber 34; the first end of the valve stem 62 passes through the piston 61 and is fixedly connected to the piston 61, and the second end of the valve stem 62 slides through the cylinder seat 32 and is threadedly connected to the stud 21 pre-embedded in the center of the diaphragm 20. The valve stem 62 and the piston 61 can be an integral structure or a separate structure with a sealed connection. A fourth sealing ring 74 is provided between the valve stem 62 and the cylinder seat 32 to ensure the sealing of the drive chamber 34; the sliding direction of the valve stem 62 is parallel to the axis of the valve stem 62. The elastic element 63 is used to drive the piston 61 away from the top valve seat 30; the elastic element 63 can be a spring; the spring is located in the second chamber 342, one end of the spring abuts against the inner bottom surface of the cylinder head 31, and the other end of the spring abuts against the piston 61.

[0057] In other embodiments, the elastic element 63 may also be a tension spring, which is disposed in the second chamber 342, with one end of the tension spring connected to the cylinder seat 32 and the other end of the spring connected to the piston 61.

[0058] Thus, the first cavity 131 serves as a fluid channel, directly communicating with the input channel 11 and the output channel 12, accommodating the flow of the grinding fluid. The second cavity 132 serves as a drive-side space, accommodating the portion into which the top valve seat 30 is inserted. This spatial separation achieves physical isolation between the fluid medium and the drive assembly 60.

[0059] Meanwhile, the insertion and engagement of the top valve seat 30 with the second cavity 132 provides precise guidance for the coaxial alignment of the top valve seat 30 and the bottom valve seat 10, ensuring the alignment accuracy between the center of the diaphragm 20 and the valve stem 62 and the connecting hole 13, making the deformation force of the diaphragm 20 more uniform and the control more precise. In addition, the length of the sealing interface between the top valve seat 30 and the bottom valve seat 10 is increased, and combined with the compression and fixation around the diaphragm 20, multiple sealing barriers are formed, reducing the risk of grinding fluid leaking from the inside of the valve body to the outside.

[0060] When it is necessary to deform the diaphragm 20 to connect the input flow channel 11 and the output flow channel 12 to open the valve, a driving medium can be introduced into the first chamber 341 through the first orifice 311. This pushes the piston 61 to slide away from the bottom valve seat 10, which in turn moves the center of the diaphragm 20 through the valve stem 62, connecting the input flow channel 11 and the output flow channel 12. When it is necessary to deform the diaphragm 20 to close the input flow channel 11 and the output flow channel 12, a driving medium can be introduced into the second chamber 342 through the second orifice 312. This pushes the piston 61 to slide away from the top valve seat 30, causing the diaphragm 20 to reset and block the input flow channel 11 and the output flow channel 12.

[0061] The elastic element 63, on the one hand, works in conjunction with the driving medium in the second chamber 342 during normal operation to ensure the reliability and speed of blocking the input flow channel 11 and the output flow channel 12; on the other hand, when the external driving medium supply fails, the elastic element 63 can still independently drive the piston 61 to slide away from the top valve seat 30, causing the diaphragm 20 to block the input flow channel 11 and the output flow channel 12, thereby automatically restoring the valve to the preset normally closed state, improving the valve's fail-safe performance under complex operating conditions. Furthermore, the valve stem 62 and the central part of the diaphragm 20 are detachably connected, ensuring reliable drive transmission while facilitating the individual replacement of the diaphragm 20 during maintenance without disassembling the entire drive assembly 60, further optimizing maintenance convenience.

[0062] The locking element 33 reduces the possibility of loosening between the cylinder head 31 and cylinder seat 32 due to long-term vibration or pressure fluctuations during equipment operation, as well as the risk of control failure or media leakage caused by accidental loosening, thereby improving the structural stability of the top valve seat 30 and the sealing reliability of the drive chamber 34. Furthermore, when maintenance or replacement of components such as the piston 61 and valve stem 62 inside the drive chamber 34 is required, the operator only needs to remove the locking element 33 from the cylinder head 31 and cylinder seat 32, and the cylinder head 31 can be quickly separated from the cylinder seat 32 by manually rotating the cylinder head 31. The entire operation process does not require specialized tools and does not require disassembling the valve from the load-bearing structure, improving the convenience and efficiency of maintenance operations.

[0063] Preferably, the bottom valve seat 10 is provided with a protruding structure 16 protruding from the bottom surface of the first cavity 131 of the connecting hole 13. The bottom surface of the first cavity 131 of the connecting hole 13 is located between the orifice of the input flow channel 11 connecting to one end of the connecting hole 13 and the orifice of the output flow channel 12 connecting to one end of the connecting hole 13. The protruding structure 16 can reduce the contact area between the diaphragm 20 and the bottom surface of the first cavity 131 of the connecting hole 13, increase the pressure per unit area, and thus improve the sealing effect.

[0064] Reference Figure 3 and Figure 4 In this embodiment, the drive assembly 60 further includes an adjusting member 64 and a diaphragm pressure block 65. The first end of the valve stem 62 extends to the side of the cylinder head 31 opposite to the cylinder seat 32 and forms a sliding connection with the cylinder head 31; a fifth sealing ring 75 is provided between the valve stem 62 and the cylinder head 31 to ensure the sealing of the drive chamber 34. The adjusting member 64 is movably connected to the top valve seat 30 along the sliding direction of the piston 61 and is used to abut the first end of the valve stem 62 to limit the movement of the piston 61 and the valve stem 62 away from the bottom valve seat 10.

[0065] Adjusting element 64 can be a screw threaded onto cylinder head 31. By tightening the screw into cylinder head 31, the distance between the screw and valve stem 62 can be adjusted. The screw is also covered by a protective cover 80 to prevent accidental operation of the screw. The protective cover 80 is detachably connected to cylinder head 31 via a snap-fit ​​structure.

[0066] In this way, by adjusting the axial position of the adjusting member 64 on the top valve seat 30, the maximum stroke of the piston 61 or valve stem 62 moving away from the bottom valve seat 10 can be set. This controls the maximum opening degree of the diaphragm 20, realizes the preset and limit of the maximum flow rate of the valve, prevents the piston 61 from overtraveling due to abnormal control signals, and avoids excessive deformation and damage to the diaphragm 20, thus extending the service life of the diaphragm 20 and improving the accuracy and reliability of flow control.

[0067] In addition, when the diaphragm 20 wears down and the actual flow rate when the valve is opened is greater than the preset flow rate, the wear of the diaphragm 20 can be compensated by adjusting the axial position of the adjusting member 64 on the top valve seat 30, thereby extending the service life of a single diaphragm 20 and further reducing maintenance costs.

[0068] In this embodiment, a diaphragm pressure block 65 is disposed at one end of the valve stem 62 where it connects to the diaphragm 20, and is used to abut against the non-working surface of the diaphragm 20. The shape of the side of the diaphragm pressure block 65 that abuts against the diaphragm 20 matches the shape of the non-working surface of the diaphragm 20 when it is in the closed state.

[0069] The diaphragm block 65 and the valve stem 62 form a non-rotatable connection, which can be achieved by applying an axial clamping force to the diaphragm block 65 and the valve stem 62; the diaphragm block 65 and the top valve seat 30 form a sliding connection that slides along the sliding direction of the valve stem 62 but cannot rotate relative to each other, which can be achieved by setting a linear sliding pair between the diaphragm block 65 and the top valve seat 30.

[0070] In this way, during the cut-off phase of the input channel 11 and the output channel 12, the diaphragm block 65, with its shape matching the non-working surface of the diaphragm 20 in the state of the cut-off input channel 11 and the output channel 12, abuts against and supports the diaphragm 20, thereby reducing the local fatigue and stress concentration generated by the diaphragm 20 under the long-term pressure of the liquid of the conveying medium.

[0071] Meanwhile, by setting the diaphragm block 65 and the top valve seat 30 to a connection that allows relative sliding only along the sliding direction of the valve stem 62, and combining this with the non-rotatable connection between the diaphragm block 65 and the valve stem 62, a constraint is formed on the circumferential degree of freedom of the diaphragm block 65. This constraint prevents the diaphragm block 65 from rotating when the valve stem 62 may tend to rotate under the action of the drive assembly 60, thereby isolating the torsional torque that the valve stem 62 may generate and preventing the torsional torque from being transmitted to the diaphragm 20. This reduces the possibility of the diaphragm 20 being subjected to torsional stress or experiencing circumferential frictional wear due to the rotation of the valve stem 62, improves the lifespan of the diaphragm 20 in long-term reciprocating motion, reduces maintenance costs caused by abnormal wear of the diaphragm 20, and improves the control accuracy and reliability of the valve throughout its entire life cycle.

[0072] In a preferred embodiment, the diaphragm pressure block 65 in the drive assembly 60 can also be replaced by a structure consisting of a rotating seat, a transmission pair, and multiple contour sleeves.

[0073] Specifically, the rotating seat includes an annular portion and an abutment portion. The annular portion of the rotating seat is coaxially sleeved on the outside of the valve stem 62 and rotatably connected to the cylinder seat 32 of the top valve seat 30 via a bearing. The rotation axis of the annular portion is coaxial with the axis of the valve stem 62. The abutment portion is located on the side of the annular portion near the diaphragm 20 and extends in an axial direction perpendicular to the valve stem 62. A transmission pair connects the valve stem 62 and the annular portion of the rotating seat, and is used to drive the rotating seat to rotate through the sliding of the valve stem 62.

[0074] Multiple contoured sleeves are radially stacked and fitted onto the outside of the valve stem 62, and each contoured sleeve has a different radial dimension. The adjacent layers of contoured sleeves, as well as the innermost contoured sleeve and the valve stem 62, are slidably connected in a sliding direction parallel to the valve stem 62.

[0075] For the sliding connection between two adjacent contour sleeves, a slider can be provided on the outer wall of the inner contour sleeve, and a groove extending along the sleeve axis can be provided on the inner wall of the outer contour sleeve. The sliding connection is achieved through the sliding engagement of the slider and the groove. For the sliding connection between the innermost contour sleeve and the valve stem 62, a slider can be provided on the outer wall of the valve stem 62, and a groove extending along the sleeve axis can be provided on the inner wall of the innermost contour sleeve. The sliding connection is achieved through the sliding engagement of the slider and the groove.

[0076] The first end faces of multiple contour sleeves form contour surfaces that abut against the non-working surface of the diaphragm 20. The second end face of the contour sleeves is a wedge-shaped surface, and the abutment portion of the rotating seat slides against the wedge-shaped surface. By rotating the rotating seat, the multiple contour sleeves can be driven to slide relative to each other to change the shape of the contour surfaces; the slope of the wedge-shaped surfaces of the multiple contour sleeves is configured such that, within the working stroke range of the diaphragm 20, the shape of the contour surfaces matches the shape of the non-working surface of the diaphragm 20. Specifically, based on the surface shape of the non-working surface of the diaphragm 20 under different strokes, the functional relationship between the required axial displacement of each contour sleeve and the stroke of the valve stem 62 can be determined through geometric relationships or finite element analysis, and then the slope of the wedge-shaped surface can be derived.

[0077] When the valve stem 62 slides and causes the diaphragm 20 to deform, the valve stem 62 drives the rotating seat to rotate through the transmission pair. During the rotation, the rotating seat abuts against and presses the wedge-shaped surfaces of multiple contour sleeves, driving each layer of contour sleeves to slide relative to each other along the axial direction. Due to the special design of the slope of the wedge-shaped surface, the shape of the contour surface formed by the first end faces of multiple contour sleeves can change in real time with the stroke of the valve stem 62; and within the working stroke range of the diaphragm 20, the shape of the contour surface can match the current shape of the non-working surface of the diaphragm 20.

[0078] In this way, on the one hand, during the dynamic process of opening or closing the valve, the diaphragm 20 achieves full-process dynamic conformal support for its non-working surface, reducing local stress concentration during deformation. On the other hand, when the valve is in a stable open or closed state, the conformal surface can form structural support for the diaphragm 20 from the non-working side by fully conforming to its current shape. At this time, the pressure from the conveying medium acts on the working surface of the diaphragm 20, and this pressure is directly transmitted and dispersed by the conformal surface to the rigid structure composed of multiple conformal sleeves, so that the diaphragm 20 itself no longer bears the tensile stress caused by the pressure of the conveying medium alone. This reduces irreversible tensile deformation and permanent damage to the diaphragm 20 under long-term medium pressure, extends the service life of the diaphragm 20 under high-pressure conditions, and enables the valve to maintain precise opening and closing positions and flow control characteristics throughout its entire life cycle, thereby improving the reliability and process stability of key fluid control components in CMP equipment. Especially suitable for CMP operating conditions with high pressure and high frequency, it can maximize the life of the diaphragm 20.

[0079] It should be noted that the contoured surface supports the diaphragm 20 through the shape of its non-working surface, rather than the non-working surface of the diaphragm 20 adapting to the shape of the contoured surface. When designing the slope of the wedge-shaped surface, the shape of the non-working surface of the diaphragm 20 in various states when the valve is unloaded should be used as a reference.

[0080] Preferably, to prevent the diaphragm 20 from deforming under the long-term weight of the contour sleeve due to gravity, materials that balance lightweight and high strength can be selected to reduce the self-weight of the contour sleeve, such as titanium alloys, aluminum alloys, and composite materials. Alternatively, while ensuring the structural strength of the contour sleeve, a perforated structure can be incorporated to reduce its self-weight, but the perforated structure should not penetrate the sleeve wall area used to form the contour and wedge surfaces.

[0081] The transmission pair includes a helical groove structure and a guide post. The helical groove structure is located on the peripheral wall of the valve stem 62 and extends helically along the sliding direction of the valve stem 62. One end of the guide post is fixed to the inner wall of the annular portion of the rotating seat, and the other end of the guide post is in sliding engagement with the helical groove structure.

[0082] In this way, the linear motion of the valve stem 62 can be effectively converted into the rotational motion of the rotating seat. Moreover, this transmission method has a simple and compact structure, and the motion conversion is smooth and reliable. The sliding fit between the guide post and the spiral groove can accurately control the correspondence between the stroke of the valve stem 62 and the rotation angle of the rotating seat, thereby accurately controlling the axial displacement of the contour sleeve, providing a reliable guarantee for achieving a precise match between the shape of the contour surface and the stroke of the valve stem 62.

[0083] Reference Figure 2 and Figure 5 In this embodiment, a plurality of slots 41 are spaced apart on the inner circumferential wall of the rotary lock sleeve, and the plurality of slots 41 are equally spaced along the circumferential direction of the rotation axis of the rotary lock sleeve. The convex ring portion of the connecting hole 13 of the bottom valve seat 10 is provided with a retaining tooth 14, which is used to engage with at least one slot 41 and to limit the relative rotation of the internal thread and the external thread with a preset torque.

[0084] In other embodiments, the positions of the slot 41 and the tooth 14 can be interchanged. The slot 41 is provided on the protruding ring portion of the connecting hole 13 of the bottom valve seat 10, and the tooth 14 is provided on the rotating lock sleeve.

[0085] In this way, the locking process of the locking teeth 14 and the locking groove 41 is completed synchronously when the rotating locking sleeve rotates to the predetermined position, without requiring any additional steps from the operator, thus achieving an adaptive anti-loosening function. This self-locking structure reduces the risk of accidental loosening of the rotating locking sleeve due to vibration or other factors during equipment operation, as well as connection failure caused by relative rotation between the internal and external threads. It ensures a stable and reliable connection between the bottom valve seat 10 and the top valve seat 30, improving the valve's operational stability and safety under harsh conditions. Furthermore, since the locking and unlocking of the locking teeth 14 and the locking groove 41 are fully integrated into the normal rotation of the rotating locking sleeve, operators no longer need to separately install, adjust, or disassemble the anti-loosening structure when assembling or disassembling the bottom valve seat 10 and the top valve seat 30, simplifying the operation and further improving maintenance efficiency, making valve maintenance faster and easier.

[0086] Reference Figure 2 and Figure 6 In this embodiment, four insertion holes 15 are equally spaced along the circumferential direction of the axis of the connecting hole 13 on the bottom valve seat 10, and the axis of the insertion holes 15 is parallel to the axis of the connecting hole 13. Four positioning blocks 321 are equally spaced along the circumferential direction of the cylinder seat 32 of the top valve seat 30 around the central axis of the valve stem 62. The positioning blocks 321 are used to engage with the insertion holes 15 to restrict relative rotation between the bottom valve seat 10 and the top valve seat 30.

[0087] In other embodiments, the number and spacing of the sockets 15 and the positioning blocks 321 can be adjusted according to actual needs to ensure that the number of sockets 15 is greater than or equal to two and the number of positioning blocks 321 is at least one; and the number of positioning blocks 321 can be less than the number of sockets 15, but the number of sockets 15 cannot be less than the number of positioning blocks 321.

[0088] Thus, during assembly, when the top valve seat 30 is inserted into the connecting hole 13 and engages with the bottom valve seat 10, the positioning block 321 is simultaneously inserted into the insertion hole 15. This insertion engagement restricts the relative rotation between the bottom valve seat 10 and the top valve seat 30. This provides a circumferential positioning reference for the subsequent rotational locking sleeve to achieve the rotational engagement of the bottom valve seat 10 and the top valve seat 30, ensuring the accuracy of the relative positions of the bottom valve seat 10 and the top valve seat 30. It avoids engagement difficulties or misalignment problems caused by their relative rotation, making the valve assembly process more convenient.

[0089] Furthermore, since multiple insertion holes 15 are spaced apart circumferentially, the positioning block 321 can be selectively inserted into insertion holes 15 at different positions. When the positioning block 321 is inserted into insertion holes 15 at different circumferential positions, the circumferential installation angle of the top valve seat 30 relative to the bottom valve seat 10 changes accordingly, thereby causing the spatial orientation of the first orifice 311 and the second orifice 312 on the outer wall of the top valve seat 30 to change accordingly. This design allows operators to flexibly select the insertion position of the positioning block 321 into the insertion hole 15 according to the actual routing of the external driving medium supply pipeline and the site pipeline layout when the valve is installed in CMP equipment. This adjusts the first orifice 311 and the second orifice 312 to the orientation that is most convenient for connecting the external driving medium supply pipeline, avoiding problems such as pipeline bending, interference, or connection difficulties caused by fixed orientation, and improving the installation adaptability and operation convenience of the valve in confined equipment spaces.

[0090] The implementation principle of this embodiment is as follows: The bottom valve seat 10 is independently and fixedly installed on the bearing structure through the fixing lug 17, and the input flow channel 11 and the output flow channel 12 are respectively firmly connected to the grinding fluid supply pipeline. The top valve seat 30 is threadedly locked to the rotary locking structure 50 on the bottom valve seat 10 through the connecting assembly 40, pressing and fixing the periphery of the diaphragm 20 to the connecting hole 13 to form a reliable seal. During normal operation, the external driving medium enters and exits the driving chamber 34 through the first orifice 311 or the second orifice 312, driving the piston 61 and the valve stem 62 to cause deformation of the central part of the diaphragm 20, thereby controlling the opening and closing of the connecting hole 13 and realizing the on / off control between the input flow channel 11 and the output flow channel 12.

[0091] When the diaphragm 20 needs to be replaced due to long-term wear from grinding fluid particles, the operator does not need to perform any disassembly operations involving the bottom valve seat 10, the supporting structure, or the pipeline. Simply rotate the rotating locking sleeve in the reverse direction to disengage the threaded connection between the rotating locking sleeve and the rotating locking structure 50. The top valve seat 30, diaphragm 20, and connecting assembly 40 can then be directly separated from the bottom valve seat 10, which remains stationary, along the axis of the connecting hole 13, as a single replacement module. Subsequently, another replacement module carrying the new diaphragm 20 is inserted into the connecting hole 13 of the bottom valve seat 10, and the rotating locking sleeve is rotated in the forward direction to re-lock the rotating locking sleeve and the rotating locking structure 50, thus completing the replacement of the diaphragm 20. During this process, the automatic engagement of the locking teeth 14 and the locking groove 41 provides anti-loosening protection, and the cooperation between the positioning block 321 and the insertion hole 15 ensures the circumferential positioning accuracy of the top valve seat 30 during installation. This principle fundamentally changes the traditional maintenance mode of diaphragm valves, simplifying the tedious multi-step disassembly and assembly operation into a single module rotation replacement operation, minimizing intervention in the fluid piping system of CMP equipment, thereby ensuring the continuity and cleanliness of the process.

[0092] This application also discloses a method for using a diaphragm valve for semiconductor CMP equipment as described in the embodiments of this application. The bottom valve seat 10 of the diaphragm valve for semiconductor CMP equipment is fixedly installed on a support structure. The input flow channel 11 and the output flow channel 12 are respectively connected to the polishing slurry supply pipeline. Through the rotational engagement of the connecting component 40 and the rotary locking structure 50, the top valve seat 30 and the bottom valve seat 10 are pressed tightly along the axial direction to fix the periphery of the diaphragm 20.

[0093] In the CMP process, this method of use includes the following steps: S10. During the replacement phase of the diaphragm 20, the locking of the connecting assembly 40 and the rotary locking structure 50 is released, and the replacement module consisting of the top valve seat 30, the diaphragm 20 and the connecting assembly 40 is separated and removed from the bottom valve seat 10. The bottom valve seat 10 remains fixedly installed on the bearing structure, and the input flow channel 11 and the output flow channel 12 remain connected to the grinding fluid supply pipeline respectively.

[0094] S20. Align and install another replacement module on the bottom valve seat 10 to replace the new diaphragm 20.

[0095] S30, the diaphragm 20 is quickly replaced by rotating and locking the bottom valve seat 10 of the original semiconductor CMP equipment diaphragm valve with the connecting component 40 of another replacement module.

[0096] The implementation principle of this method embodiment is as follows: throughout the entire process of replacing the diaphragm 20, the bottom valve seat 10 remains fixedly installed on the support structure, and the inlet flow channel 11 and outlet flow channel 12 remain connected to the grinding fluid supply pipeline. Operators do not need to perform any disassembly or assembly operations related to the support structure or pipeline, avoiding the cumbersome steps required in traditional technologies where the entire valve must be removed from the frame and pipeline to replace the diaphragm 20.

[0097] Furthermore, by pre-integrating the top valve seat 30, diaphragm 20, and connecting assembly 40 into a single replacement module, during replacement, simply release the locking mechanism 50 from the connecting assembly 40 to detach the entire module from the bottom valve seat 10. Subsequently, another replacement module with a new diaphragm 20 is aligned and installed onto the existing, fixed bottom valve seat 10, and secured by rotation locking. The entire replacement process involves only four simple actions: "unlocking, removal, alignment, and locking" of a single replacement module, requiring no tools and making operation extremely convenient.

[0098] Furthermore, since the bottom valve seat 10 and its connected piping remain undisturbed throughout the replacement process, the risk of damage caused by repeated disassembly and assembly of pipe joints, leakage of grinding fluid, and entry of external particles into the fluid system is reduced, thus improving the process cleanliness and operational reliability of the CMP equipment. This method reduces the average replacement time of the diaphragm 20 from tens of minutes or even hours to just minutes, lowering the average repair time of the equipment and thereby improving the production efficiency and process stability of the CMP equipment.

[0099] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A diaphragm valve for a semiconductor CMP apparatus, characterized by, include: Bottom valve seat (10), the bottom valve seat (10) is provided with an input flow channel (11), an output flow channel (12) and a connecting hole (13) between the two; the bottom valve seat (10) has a rotating locking structure (50) formed on the protruding ring portion of the connecting hole (13). A diaphragm (20) is aligned with the connecting hole (13) and is used to control the opening and closing of the input channel (11) and the output channel (12) by deformation; A top valve seat (30) is located on the communicating hole (13) of the bottom valve seat (10) and is used to abut against the non-working surface of the diaphragm (20) to form a tight fit between the working surface of the diaphragm (20) and the communicating hole (13); a drive assembly (60) is provided inside the top valve seat (30) to drive and connect the diaphragm (20); the top valve seat (30) includes a cylinder head (31), a cylinder seat (32), and a locking member (33); the cylinder head (31) and the cylinder seat (32) are threadedly connected; the locking member (33) 3) It is detachably connected to the cylinder head (31) and the cylinder seat (32) to restrict the relative rotation between the cylinder head (31) and the cylinder seat (32); the drive assembly (60) includes a piston (61) and a valve stem (62); the top valve seat (30) has a drive cavity (34) for the piston (61) to slide inside; one end of the valve stem (62) is fixed to the piston (61), and the other end of the valve stem (62) is detachably connected to a stud (21) pre-embedded in the center of the diaphragm (20); A connecting assembly (40) is disposed on the top valve seat (30) and connected to the rotary locking structure (50) of the bottom valve seat (10). The connecting assembly (40) can detachably press the bottom valve seat (10) and the top valve seat (30) together and fix the periphery of the diaphragm (20). The connecting assembly (40) includes a rotating sleeve that is rotatably connected to the top valve seat (30); the rotating sleeve has a plurality of slots (41) spaced apart on its peripheral wall; the bottom valve seat (10) has a tooth (14) on the outside of the protruding ring of the communicating hole (13) for engaging with the slots (41) and limiting the relative rotation of the rotating sleeve and the rotating locking structure (50) with a preset torque; C-shaped retaining ring (90), an annular groove (35) is provided on the peripheral wall of the top valve seat (30), the C-shaped retaining ring (90) is detachably engaged in the annular groove (35), and abuts axially against the annular shoulder of the rotating lock sleeve near the bottom valve seat (10). The bottom valve seat (10) is provided with a plurality of insertion holes (15) spaced apart in the circumferential direction along the axis of the connecting hole (13). At least one positioning block (321) is fixedly connected to the top valve seat (30). The positioning block (321) is inserted into the insertion hole (15) to restrict the relative rotation between the bottom valve seat (10) and the top valve seat (30). The top valve seat (30), the diaphragm (20) and the connecting assembly (40) form a replacement module, which is separated from the bottom valve seat (10); the bottom valve seat (10) is fixedly installed on the bearing structure, and the input flow channel (11) and the output flow channel (12) are respectively connected to the grinding fluid supply pipeline.

2. The diaphragm valve for semiconductor CMP equipment according to claim 1, characterized by: The diaphragm (20) divides the space inside the convex ring of the connecting hole (13) of the bottom valve seat (10) into a first cavity (131) and a second cavity (132); the first cavity (131) connects the input flow channel (11) and the output flow channel (12), and the top valve seat (30) is partially inserted into the second cavity (132).

3. The diaphragm valve for semiconductor CMP equipment according to claim 1, characterized by: The drive assembly (60) further includes an adjusting member (64) which is movably connected to the top valve seat (30) along the sliding direction of the piston (61) to limit the travel of the piston (61) and the valve stem (62).

4. The diaphragm valve for semiconductor CMP equipment according to claim 1, characterized by: The drive assembly (60) includes a rotating seat, a transmission pair, and multiple contour sleeves; the rotating seat is rotatably connected to the top valve seat (30); the transmission pair connects the valve stem (62) and the rotating seat, and is used to drive the rotating seat to rotate by sliding the valve stem (62); the multiple contour sleeves are stacked radially on the outside of the valve stem (62) and form a sliding connection with the valve stem (62) in a direction parallel to the sliding direction of the valve stem (62); the first end face of the multiple contour sleeves forms a contour surface for abutting against the non-working surface of the diaphragm (20), and the second end face of the multiple contour sleeves is provided with a wedge-shaped surface for sliding abutting against the rotating seat; the rotating seat drives the multiple contour sleeves to slide relative to each other by rotation, so as to change the shape of the contour surface; the slope of the wedge-shaped surface of the multiple contour sleeves is configured such that the shape of the contour surface matches the shape of the non-working surface of the diaphragm (20) within the working stroke range.

5. A method of using the diaphragm valve for semiconductor CMP equipment according to claim 1, characterized in that, The bottom valve seat (10) of the diaphragm valve for the semiconductor CMP equipment is fixedly installed on the support structure. The input flow channel (11) and the output flow channel (12) are respectively connected to the polishing slurry supply pipeline. Through the rotational engagement of the connecting assembly (40) and the rotary locking structure (50), the top valve seat (30) and the bottom valve seat (10) are pressed tightly along the axial direction to fix the periphery of the diaphragm (20). In the CMP process, this method of use includes the following steps: S10. During the replacement phase of the diaphragm (20), the locking of the connecting assembly (40) and the rotary locking structure (50) is released, and the replacement module consisting of the top valve seat (30), the diaphragm (20) and the connecting assembly (40) is separated and removed from the bottom valve seat (10); wherein, the bottom valve seat (10) remains fixedly installed on the bearing structure, and the input flow channel (11) and the output flow channel (12) remain connected to the grinding fluid supply pipe respectively; S20, aligning and installing another replacement module on the bottom valve seat (10) to replace a new diaphragm (20); S30, through the rotation locking of the connecting assembly (40) of another replacement module and the rotation locking structure (50) of the bottom valve seat (10) of the original semiconductor CMP equipment diaphragm valve, to complete the quick replacement of the diaphragm (20).

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