Position teaching device and teaching method

The position teaching device, which uses optical modules and light-shielding structures, enables high-precision and automated position and orientation teaching in wafer manufacturing. This solves the problem of relying on human experience in traditional methods and improves production efficiency and consistency.

CN122069979APending Publication Date: 2026-05-19BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING JINGYI AUTOMATION EQUIP CO LTD
Filing Date
2026-01-04
Publication Date
2026-05-19

AI Technical Summary

Technical Problem

In traditional wafer manufacturing, position teaching methods rely on human experience, resulting in cumbersome and time-consuming processes with poor consistency and repeatability of results, making it difficult to achieve standardization and automation.

Method used

The position teaching device, which employs optical modules and light-shielding structures, automatically completes high-precision position teaching through optical non-contact measurement, and simultaneously teaches position and attitude using cross beams and light-shielding protrusions.

Benefits of technology

It improved the automation level and accuracy of teaching, simplified the process, reduced costs, ensured the consistency and repeatability of results, and improved production efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of semiconductor wafer manufacturing, and discloses a position teaching device and method. The position teaching device comprises a conveying structure, an optical module and a shading structure. The conveying structure is used for being installed on the mechanical arm and moves in the first direction. The optical module comprises a first optical structure or a second optical structure; the first optical structure emits a first light beam, and a first optical axis of the first light beam is perpendicular to the first direction; the second optical structure emits a second light beam and a third light beam, a second optical axis of the second light beam intersects with a third optical axis of the third light beam, and the second optical axis and the third optical axis intersect with the first direction; the shading structure comprises a shading boss used for being installed on a target installation face. The shading boss is arranged on one side of the conveying structure in the first direction and used for shading the optical axis. The problems that a traditional teaching method in the prior art is tedious in process and long in consumed time, and the result depends on personnel experience, so that consistency and repeatability are poor are solved.
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Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer manufacturing technology, and in particular to a position teaching device and teaching method. Background Technology

[0002] In the semiconductor wafer manufacturing process, wafer handling robots serve as the transport hub connecting core processes such as photolithography and etching. The positioning accuracy of their target points (i.e., the reference positions for wafer picking and placement) directly affects the final yield of the chip. Therefore, the wafer's position within the carrier container must be precisely located before wafer picking and placement.

[0003] Traditional teaching methods rely on manual operation of a robotic arm, visually observing the contact state between the robotic arm and the wafer to identify positioning points in the horizontal and vertical directions. This method typically requires setting scribe lines at the end of the robotic arm; the operator then relies on experience to judge the degree of overlap between the scribe lines and the wafer edge to complete horizontal positioning, and finally uses contact sensing to determine the vertical position. This approach is cumbersome, time-consuming, and the results are heavily dependent on human experience, resulting in poor consistency and repeatability, making standardization and automation difficult.

[0004] As wafer fab capacity continues to expand, the problems of low efficiency and high cost of traditional teaching methods have become bottlenecks restricting the release of production line capacity. Summary of the Invention

[0005] This invention provides a position teaching device and teaching method to solve the problems of traditional teaching methods in the prior art being cumbersome, time-consuming, and relying on human experience, resulting in poor consistency and repeatability.

[0006] The first aspect of the present invention provides a position teaching device, comprising: A conveying structure for mounting to a robotic arm and moving in a first direction; An optical module includes a first optical structure or a second optical structure; the first optical structure emits a first light beam, the first optical axis of the first light beam being perpendicular to the first direction; the second optical structure emits a second light beam and a third light beam, the second optical axis of the second light beam intersecting the third optical axis of the third light beam, and both the second optical axis and the third optical axis intersecting the first direction; The light-shielding structure includes a light-shielding boss for mounting to a target mounting surface; the light-shielding boss is arranged along the first direction on one side of the conveying structure for blocking the optical axis.

[0007] According to the position teaching device provided by the present invention, the conveying structure includes: The first mounting part has one end for mounting to the robotic arm, and the other end extends away from the robotic arm along the first direction. The second mounting part has one end for mounting to the robotic arm, and the other end extends away from the robotic arm along the first direction, and is spaced apart from the other end of the first mounting part along the second direction.

[0008] According to the position teaching device provided by the present invention, the first optical structure includes a first transmissive light sensor, the first transmissive light sensor comprising: A first light-projecting part and a first light-receiving part, wherein one of the first light-projecting part and the first light-receiving part is installed in the first mounting part, and the other is installed in the second mounting part; the first light-projecting part projects the first light beam onto the first light-receiving part.

[0009] According to the position teaching device provided by the present invention, the second optical structure includes: The second transmissive light sensor includes a second light-projecting part and a second light-receiving part; one of the second light-projecting part and the second light-receiving part is mounted on the first mounting part, and the other is mounted on the second mounting part; the second light-projecting part projects the second light beam onto the second light-receiving part; The third transmissive light sensor includes a third light-projecting part and a third light-receiving part; one of the third light-projecting part and the third light-receiving part is mounted on the second mounting part, and the other is mounted on the first mounting part; the third light-projecting part projects the third light beam onto the third light-receiving part.

[0010] According to the position teaching device provided by the present invention, the outline of the orthographic projection of the light-shielding boss on the target mounting surface is formed by two semi-circular arcs and two straight line segments connected end to end. The radii of the two semicircles are equal, and the circles to which the two semicircles belong are tangent; Each of the aforementioned straight line segments is parallel to the line connecting the centers of the two semicircles, and the two straight line segments are arranged at intervals along a direction perpendicular to the line connecting the centers.

[0011] According to the position teaching device provided by the present invention, the light-shielding structure further includes: A positioning plate is used to mount the light-shielding protrusion onto the target mounting surface. The area of ​​the positioning plate projected onto the target mounting surface is larger than the area of ​​the light-shielding protrusion projected onto the target mounting surface.

[0012] A second aspect of the present invention provides a position teaching method, employing the position teaching device described in any of the preceding claims, the position teaching method comprising: Establish a coordinate system: Establish an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis; Establish an xy coordinate system with the center of one semicircular arc of the light-blocking protrusion as the origin o, the line connecting the centers of the two semicircular arcs as the y-axis, and the straight line passing through the origin o and perpendicular to the y-axis as the x-axis. Based on the XY coordinate system, when the transport structure is in the initial teaching position, determine the initial coordinates of the optical module; During the process of the conveying structure moving towards the light-shielding boss from the initial teaching position along the first direction, the first moving distance of the conveying structure when the light-shielding boss contacts the optical axis is obtained, and the second moving distance of the conveying structure when the light-shielding boss separates from the optical axis is obtained. Based on the relationship between the initial coordinates of the optical module, the first moving distance, and the second moving distance, determine the coordinates of the origin o and the angle β between the y-axis and the Y-axis.

[0013] According to the position teaching method provided by the present invention, determining the initial coordinates of the optical module based on the XY coordinate system when the transport structure is in the initial teaching position includes: Based on the XY coordinate system, when the conveying structure is in the initial teaching position, the initial coordinates of the second light-projecting part, the second light-receiving part, the third light-projecting part, and the third light-receiving part are determined respectively; Alternatively, after swinging the conveying structure by an angle α relative to the positive Y-axis, the initial coordinates of the first light-projecting part and the first light-receiving part are determined according to the XY coordinate system when the conveying structure is in the initial teaching position. Next, after the conveying structure is swung in the opposite direction of the Y-axis by an angle α, the initial coordinates of the first light-projecting part and the first light-receiving part are determined again according to the XY coordinate system when the conveying structure is in the initial teaching position.

[0014] According to the position teaching method provided by the present invention, the step of obtaining a first moving distance of the conveying structure when the light-shielding boss contacts the optical axis and obtaining a second moving distance of the conveying structure when the light-shielding boss separates from the optical axis during the process of the conveying structure moving closer to the light-shielding boss along a first direction from the initial teaching position includes: During the process of the conveying structure moving towards the light-shielding protrusion from the initial teaching position along the first direction, the moving distance d0 of the conveying structure when the light-shielding protrusion contacts the second optical axis is obtained, the moving distance d1 of the conveying structure when the light-shielding protrusion contacts the third optical axis is obtained, the moving distance d2 of the conveying structure when the light-shielding protrusion separates from the second optical axis is obtained, and the moving distance d3 of the conveying structure when the light-shielding protrusion separates from the third optical axis is obtained. or; After swinging the conveying structure relative to the positive Y-axis by an angle α, during the process of the conveying structure moving towards the light-shielding boss along the first direction from the initial teaching position, the moving distance d0 of the conveying structure when the light-shielding boss contacts the first optical axis is obtained, and the moving distance d2 of the conveying structure when the light-shielding boss separates from the first optical axis is obtained. Next, after the conveying structure is swung in the opposite direction of the Y-axis by an angle α, as the conveying structure moves towards the light-shielding boss along the first direction from the initial teaching position, the moving distance d1 of the conveying structure when the light-shielding boss comes into contact with the first optical axis is obtained, and the moving distance d3 of the conveying structure when the light-shielding boss separates from the first optical axis is obtained.

[0015] According to the position teaching method provided by the present invention, establishing an XY coordinate system with a first direction as the Y-axis and a direction perpendicular to the first direction as the X-axis includes: The straight line connecting point A and point B is taken as the X-axis, where the intersection of the second optical axis and the first mounting part is point A, and the intersection of the third optical axis and the second mounting part is point B; Establish an XY coordinate system with the first direction as the Y-axis and the midpoint of the line segment between point A and point B as the origin O.

[0016] The position teaching device provided by this invention uses an optical module to replace the traditional contact or visual teaching that relies on human experience with optical non-contact measurement. It can automatically and quickly complete high-precision position teaching, solving the problems of cumbersome process, long time consumption, reliance on human experience, and poor consistency and repeatability of traditional methods, thus improving the automation level, efficiency and accuracy of teaching.

[0017] The position teaching method provided by the present invention uses the position teaching device described above, and therefore has at least the advantages described above, which will not be repeated here. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a front view schematic diagram of the conveying structure and the second optical structure of the position teaching device provided by the present invention.

[0020] Figure 2 This is a front view schematic diagram of the conveying structure and the first optical structure of the position teaching device provided by the present invention.

[0021] Figure 3 This is a three-dimensional structural diagram of the light-shielding structure of the position teaching device provided by the present invention.

[0022] Figure 4 yes Figure 3 The diagram shows a top view of the light-shielding structure.

[0023] Figure 5 (a) in the diagram is a schematic diagram of the XY coordinate system.

[0024] Figure 5 (b) in the diagram is a schematic diagram of the xy coordinate system.

[0025] Figure 6 yes Figure 1 The diagram shows the position of the teaching device at different times.

[0026] Figure 7 (a) in the middle is Figure 2 The diagram shows the position of the position teaching device at different times after it swings forward by an angle α.

[0027] Figure 7 (b) in the middle is Figure 2 The diagram shows the position of the position teaching device at different times after it swings in the opposite direction by an angle α.

[0028] Figure 8 This is a superimposed schematic diagram showing the state of the second and third optical axes in sequential contact with the light-shielding protrusions.

[0029] Figure 9 yes Figure 2 The diagram shows the position of the conveying structure after the position teaching device swings forward by an angle α and backward by an angle α, respectively.

[0030] Figure 10 (a) is a schematic diagram of the position of the second optical axis at the moment of contact and separation from the light-shielding boss.

[0031] Figure 10 (b) is a schematic diagram showing the position of the third optical axis at the moment of contact and separation from the light-shielding boss.

[0032] Figure 11 This is a flowchart illustrating the position teaching method provided by the present invention.

[0033] Figure 12 This is a schematic diagram of the structure of the electronic device provided by the present invention.

[0034] Figure label: 110. Conveying structure; 111. First mounting part; 112. Second mounting part; 120. First optical structure; 121. First light-projecting part; 122. First light-receiving part; 123. First optical axis; 130. Second optical structure; 131. Second light-projecting part; 132. Second light-receiving part; 133. Second optical axis; 134. Third light-projecting part; 135. Third light-receiving part; 136. Third optical axis; 140. Light-shielding structure; 141. Light-shielding boss; 142. Positioning plate; 143. Semicircular arc; 144. Straight line segment. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0036] In the description of this specification, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are used only for the convenience of describing this specification. They do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this specification. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] In the description of this specification, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this invention based on the specific circumstances.

[0038] In this specification, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0039] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this specification. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0040] In the embodiments of this specification, "at least one" means one or more, and "more than one" means two or more. "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0041] The following is combined with Figures 1 to 11 The location teaching device and teaching method provided in specific embodiments of the present invention will be described.

[0042] like Figure 1 and Figure 2 As shown, a specific embodiment of the first aspect of the present invention provides a position teaching device. The position teaching device includes a conveying structure 110, an optical module, and a light-shielding structure 140. This embodiment, by employing an optical module, such as optical non-contact measurement, replaces traditional contact or visual teaching that relies on human experience. This enables automatic and rapid high-precision position teaching, solving the problems of cumbersome processes, long processing times, reliance on human experience, and poor consistency and repeatability in traditional methods. This improves the automation level, efficiency, and accuracy of the teaching process.

[0043] like Figure 2 As shown, in some embodiments, the position teaching device includes a transport structure 110, an optical module, and a light-shielding structure 140.

[0044] The conveying structure 110 is used to mount the robotic arm and moves along a first direction. During the teaching process, the conveying structure 110 is used to transfer the optical module along the first direction to the light-shielding structure 140. After the teaching process, the conveying structure 110 is also used to transport the wafer to the target position (i.e., the wafer placement position) on the target mounting surface. Using the same set of conveying structures 110 to perform both teaching and actual transport tasks ensures the consistency between the teaching coordinate system and the actual working coordinate system. This eliminates the need to switch or replace components between teaching and working, simplifying the equipment structure, reducing costs, and improving production efficiency.

[0045] The optical module includes a first optical structure 120; the first optical structure 120 emits a first light beam, the first optical axis 123 of the first light beam being perpendicular to a first direction. The light-shielding structure 140 includes a light-shielding boss 141 for mounting to a target mounting surface; the light-shielding boss 141 is arranged along the first direction on one side of the transport structure 110 and is used to block the optical axis. In other words, the light-shielding boss 141 is used to block the first optical axis 123. When the light-shielding boss 141 blocks the first optical axis 123, the output signal of the first optical structure 120 changes. By detecting the change in the level signal generated when the light beam is blocked, the precise triggering time is determined, achieving precise position perception. Compared with manual observation, this method has higher objectivity and repeatability, thus ensuring the consistency of the teaching results.

[0046] like Figure 1 As shown, in some other embodiments, the position teaching device includes a transport structure 110, an optical module, and a light-shielding structure 140.

[0047] The conveying structure 110 is used to mount the robotic arm and moves along a first direction. During the teaching process, the conveying structure 110 is used to transfer the optical module along the first direction to the light-shielding structure 140. After the teaching process, the conveying structure 110 is used to transport the wafer to the target position (i.e., the wafer placement position) on the target mounting surface.

[0048] The optical module includes a second optical structure 130; the second optical structure 130 emits a second beam and a third beam, the second optical axis 133 of the second beam intersects the third optical axis 136 of the third beam, and both the second optical axis 133 and the third optical axis 136 intersect the first direction. By setting two intersecting beams (i.e., the second beam and the third beam), the device can acquire four position trigger points (the moments when the two beams contact and separate from the light-shielding protrusion 141, respectively) during one movement along the first direction. Based on these four data points, not only can the two-dimensional planar coordinates of the target position be calculated, but the angle deviation can also be calculated simultaneously, realizing simultaneous teaching of position and attitude. Compared with the single-beam scheme, which requires at least two scans or rotations to determine the angle, the teaching efficiency is improved.

[0049] The light-shielding structure 140 includes a light-shielding boss 141 for mounting to a target mounting surface. The light-shielding boss 141 is arranged along a first direction on one side of the conveying structure 110 and is used to block the optical axis. In other words, the light-shielding boss 141 is used to block the second optical axis 133 and the third optical axis 136. When the light-shielding boss 141 blocks the second optical axis 133 and the third optical axis 136, the output signal of the second optical structure 130 of the optical module changes. The precise triggering time can be determined by detecting the change in the level signal generated when the beam is blocked, realizing precise position perception. Compared with manual observation, it has higher objectivity and repeatability, thus ensuring the consistency of teaching results.

[0050] Optionally, the conveying structure 110 includes a first mounting portion 111 and a second mounting portion 112. One end of the first mounting portion 111 is used to mount to the robotic arm, and the other end extends away from the robotic arm along a first direction. One end of the second mounting portion 112 is used to mount to the robotic arm, and the other end extends away from the robotic arm along the first direction, and is spaced apart from the other end of the first mounting portion 111 along a second direction. This "U"-shaped, gate-shaped, or "Y"-shaped frame structure formed by the first mounting portion 111 and the second mounting portion 112 provides a stable and separate mounting platform for the transmissive sensor in the optical module.

[0051] Specifically, the light-emitting part and the light-receiving part of the sensor can be mounted on the first mounting part 111 and the second mounting part 112 respectively, thereby ensuring that a stable, accurate optical path with a preset spacing is formed between them. This structural design not only provides a physical basis for the emission and reception of the light beam and ensures the reliability of the measurement, but also creates the necessary space for the subsequent light-shielding protrusion 141 to pass through the optical path for blocking, which is a structural prerequisite for realizing non-contact position detection.

[0052] Optionally, the first optical structure 120 includes a first transmissive light sensor, which comprises a first light-projecting part 121 and a first light-receiving part 122. The transmissive light sensor works by detecting whether the light path is blocked, generating a clear, high-contrast on / off level signal. Compared to complex sensors relying on analog signal analysis or image recognition, this on / off principle-based detection method has higher anti-interference capability, faster response speed, and higher reliability. It can achieve micron-level precise positioning triggering with lower computational cost, providing a reliable technical foundation for automation and high-precision teaching.

[0053] One of the first light-projecting part 121 and the first light-receiving part 122 is mounted on the first mounting part 111, and the other is mounted on the second mounting part 112. The first light-projecting part 121 projects a first light beam onto the first light-receiving part 122, and the first optical axis 123 of the first light beam is perpendicular to the first direction. By fixing the light-projecting part and the light-receiving part to the structurally rigid first and second mounting parts 112 respectively, the alignment accuracy of the optical axes and the constantness of the spacing between them are ensured. This split mounting method provides an unobstructed detection space for the passage of the light-shielding boss 141, while avoiding optical path misalignment caused by minor vibrations or deformations during the movement of the robotic arm, thereby ensuring the stability of the measurement reference and the accuracy of the final result throughout the teaching process.

[0054] like Figure 1 and Figure 5 As shown, optionally, the second optical structure 130 includes a second transmissive light sensor and a third transmissive light sensor.

[0055] The second transmissive light sensor includes a second light-emitting part 131 and a second light-receiving part 132; one of the second light-emitting part 131 and the second light-receiving part 132 is mounted on the first mounting part 111, and the other is mounted on the second mounting part 112; the second light-emitting part 131 projects a second light beam onto the second light-receiving part 132.

[0056] The third transmissive light sensor includes a third light-emitting part 134 and a third light-receiving part 135; one of the third light-emitting part 134 and the third light-receiving part 135 is installed in the second mounting part 112, and the other is installed in the first mounting part 111; the third light-emitting part 134 projects a third light beam onto the third light-receiving part 135.

[0057] This layout allows the second optical axis 133 of the second beam and the third optical axis 136 of the third beam to intersect in space. This provides a physical basis for establishing the planar coordinate system required for subsequent calculations. Through this crossbeam configuration, four independent trigger signals can be sequentially obtained during a single movement of the transport structure 110 along the first direction (i.e., the moments when the light-shielding protrusion 141 contacts and separates from the two beams, respectively). Based on these four recorded movement distance data, the two-dimensional planar coordinates (position) and rotation angle deviation (attitude) of the target position can be calculated simultaneously. This achieves simultaneous teaching of position and attitude in a single movement, improving teaching efficiency and data dimensionality, and avoiding the complex operation required by single-beam schemes that necessitates two movements or additional rotations to determine the angle.

[0058] For example, the second light-projecting part 131 and the third light-receiving part 135 are mounted on the second mounting part 112, and the third light-projecting part 134 and the second light-receiving part 132 are mounted on the first mounting part 111. The second light-projecting part 131 and the third light-receiving part 135 are arranged at intervals along a first direction toward the robotic arm. The third light-projecting part 134 and the second light-receiving part 132 are arranged at intervals along the first direction away from the robotic arm. This arrangement causes the second optical axis 133 of the second beam to intersect with the third optical axis 136 of the third beam, providing a planar basis for the subsequent establishment of a coordinate system.

[0059] like Figure 3 and Figure 4 As shown, optionally, the outline of the orthographic projection of the light-shielding boss 141 onto the target mounting surface is formed by connecting two semicircular arcs 143 and two straight line segments 144 end to end. The two semicircular arcs 143 have equal radii, and the circles to which the two semicircular arcs 143 belong are tangent; each straight line segment 144 is parallel to the line connecting the centers of the two semicircular arcs 143, and the two straight line segments 144 are arranged at intervals along a direction perpendicular to the line connecting the centers. This specific, regular geometry serves as a standardized geometric reference, facilitating subsequent algorithmic calculations.

[0060] Specifically, when the conveying structure 110 drives the optical module to move along the first direction, the optical axis will sequentially contact and separate from the arc-shaped and straight edges of the light-shielding protrusion 141. Using this regular contour and the radius of the semicircular arc 143, a simplified mathematical model is provided for position and orientation calculation. This allows the system to simultaneously obtain multiple trigger points (e.g., the contact and separation points between the beam and the protrusion) with a single movement, thereby enabling the simultaneous calculation of the two-dimensional coordinates and angular deviations of the light-shielding protrusion 141, achieving integrated pose teaching.

[0061] like Figure 3 and Figure 4 As shown, optionally, the light-shielding structure 140 also includes a positioning plate 142. The light-shielding boss 141 is mounted at the target position via the positioning plate 142, and the area of ​​the positioning plate 142 projected onto the target mounting surface is larger than the area of ​​the light-shielding boss 141 projected onto the target mounting surface. By adding a positioning plate 142 with a larger area than the light-shielding boss 141, it is equivalent to providing a wider and easier-to-operate mounting base for the light-shielding boss 141. The positioning plate 142 can be used to separate the geometry of the light-shielding boss 141 from the mechanical structures required for installation (such as screw holes, positioning pin holes, etc.). It is much easier to process these connecting structures on the larger positioning plate 142 than on the light-shielding boss 141, thereby reducing the processing difficulty and cost. Adding the positioning plate 142 also simplifies the installation process of the light-shielding boss 141 on the target mounting surface and ensures the stability and reliability of the connection.

[0062] It should be noted that the target mounting surface is the plane where the target location is located. In other words, the wafer needs to be moved to the target location on this target mounting surface.

[0063] like Figure 11 As shown, a specific embodiment of the second aspect of the present invention provides a position teaching method.

[0064] In some embodiments, the location teaching method includes: S100. Establish a coordinate system.

[0065] An XY coordinate system is established with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis. Specifically, the XY coordinate system is located within the cross-section of the conveying structure 110, with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis. This allows the determination of the coordinates of the orthographic projection of the optical module mounted on the conveying structure 110 within this cross-section.

[0066] A coordinate system is established with the center of one semicircular arc 143 of the light-shielding protrusion 141 as the origin o, the line connecting the centers of the two semicircular arcs 143 as the y-axis, and the straight line passing through the origin o and perpendicular to the y-axis as the x-axis.

[0067] In other words, this embodiment establishes two different coordinate systems, which lie in different planes. The XY coordinate system is located within a cross-section of the conveying structure 110, while the XY coordinate system is located within a cross-section of the light-shielding boss 141 parallel to the target mounting surface.

[0068] By establishing independent coordinate systems on the moving conveying structure 110 and the stationary target mounting surface, a theoretical basis is provided for the subsequent precise solution of the relative pose relationship between the two through mathematical calculations, thereby transforming the complex physical alignment problem into a clear geometric calculation problem.

[0069] S200. Based on the XY coordinate system, when the conveying structure 110 is in the initial teaching position, the initial coordinates of the optical module are determined. Knowing the initial coordinates of the optical module provides a reference point for subsequent distance calculations, ensuring the accuracy and effectiveness of all moving distance measurements.

[0070] S300: During the process of the conveying structure 110 moving from the initial teaching position along the first direction to approach the light-shielding boss 141, the first moving distance of the conveying structure 110 when the light-shielding boss 141 contacts the optical axis is obtained, and the second moving distance of the conveying structure 110 when the light-shielding boss 141 separates from the optical axis is obtained.

[0071] By recording the distance moved when the optical axis is blocked and restored through one or two movements, this process can be automated and requires no manual intervention. This non-contact measurement method avoids wear or displacement that may be caused by physical contact, while the fast response and high sensitivity of the optical sensor ensure the accuracy of the triggering time, thus providing reliable raw data for subsequent calculations and shortening the teaching time.

[0072] S400. Based on the relationship between the initial coordinates, the first moving distance, and the second moving distance, determine the coordinates of the origin o and the angle β between the y-axis and the Y-axis.

[0073] By utilizing the collected movement distance data through a built-in geometric algorithm, the two-dimensional coordinates (origin o) and angular deviation (angle β) of the target position can be calculated simultaneously. This algorithm-based calculation method ensures the accuracy, consistency, and repeatability of the results, eliminates errors and uncertainties caused by human judgment, and achieves standardized and automated position teaching.

[0074] In this embodiment, by combining non-contact optical measurement with automated algorithms, rapid, accurate and automated teaching of target position and attitude is achieved, solving the problems of long time consumption, low accuracy, poor repeatability and heavy reliance on operator experience in traditional manual teaching methods, thereby improving production efficiency and standardization.

[0075] Optionally, when the optical module is the second optical structure 130, and the second optical structure 130 includes a second transmissive light sensor and a third transmissive light sensor, S200 includes: Based on the XY coordinate system, when the conveying structure 110 is in the initial teaching position, the initial coordinates of the second light-emitting part 131, the second light-receiving part 132, the third light-emitting part 134, and the third light-receiving part 135 are determined respectively. Since the second optical structure 130 uses two intersecting light beams for measurement, determining the initial coordinates of each light-emitting and light-receiving element is equivalent to defining the accurate paths and geometric relationships of the two light beams (i.e., the second optical axis 133 and the third optical axis 136) at the algorithm level. This provides geometric parameters for subsequent pose calculation based on the movement distance, ensuring the accuracy of the calculation model.

[0076] like Figure 6 As shown, optionally, when the optical module is the second optical structure 130, and the second optical structure 130 includes a second transmissive light sensor and a third transmissive light sensor, S300 includes: During the process of the conveying structure 110 approaching the light-shielding protrusion 141 along the first direction from the initial teaching position, the following are obtained: the moving distance d0 of the conveying structure 110 when the light-shielding protrusion 141 contacts the second optical axis 133; the moving distance d1 of the conveying structure 110 when the light-shielding protrusion 141 contacts the third optical axis 136; the moving distance d2 of the conveying structure 110 when the light-shielding protrusion 141 separates from the second optical axis 133; and the moving distance d3 of the conveying structure 110 when the light-shielding protrusion 141 separates from the third optical axis 136.

[0077] In this embodiment, by recording the four movement distances (d0, d1, d2, and d3) corresponding to the contact and separation of the two beams with the light-shielding protrusion 141 during a single movement, the efficiency of data acquisition is improved. This method requires only a simple linear movement to obtain sufficiently rich data, which can then be used by subsequent algorithms to simultaneously calculate the two-dimensional coordinates and rotation angle of the target position. This avoids the complex process of determining the attitude through multiple movements or rotations required by the traditional single-beam scheme, simplifying the teaching process and shortening the operation time.

[0078] Optionally, when the optical module is a first optical structure 120, and the first optical structure 120 includes a first transmissive light sensor, S200 includes: Based on the XY coordinate system, when the conveying structure 110 is in the initial teaching position, the initial coordinates of the first projection section 121 and the first receiving section 122 are determined respectively. By calibrating the precise spatial position of the first optical axis 123 (i.e., the line connecting the projection section and the receiving section) at the start of teaching, an essential initial reference is provided for all subsequent displacement calculations. This ensures that the subsequent position calculations based on the moving distance can be established on an accurate reference, thereby guaranteeing the reliability of the entire teaching result.

[0079] like Figure 7 As shown, optionally, when the optical module is a first optical structure 120, and the first optical structure 120 includes a first transmissive light sensor, S300 includes: After the conveying structure 110 is swung by an angle α relative to the positive Y-axis, as it moves from the initial teaching position towards the light-shielding boss 141 along the first direction, the following data is obtained: the moving distance d0 of the conveying structure 110 when the light-shielding boss 141 contacts the first optical axis 123, and the moving distance d2 of the conveying structure 110 when the light-shielding boss 141 separates from the first optical axis 123. By performing the first movement at a known deflection angle, the first set of positional data regarding the boundary of the light-shielding boss 141 is obtained. This provides the necessary partial constraint conditions for subsequently solving the complete pose information through geometric relationships.

[0080] Next, after the conveying structure 110 is swung in the opposite direction relative to the Y-axis by an angle α, as the conveying structure 110 moves towards the light-shielding protrusion 141 along the first direction from the initial teaching position, the moving distance d1 of the conveying structure 110 when the light-shielding protrusion 141 contacts the first optical axis 123 is acquired, and the moving distance d3 of the conveying structure 110 when the light-shielding protrusion 141 separates from the first optical axis 123 is acquired. A second movement is performed through the reverse sway, acquiring a second set of independent boundary position data. This two-step movement strategy utilizes two linear movements at different angles to compensate for the inherent limitation of single-beam sensors in simultaneously determining position and angle in a single scan. By acquiring four sets of independent distance data (d0, d2, d1, and d3), it provides sufficient mathematical conditions for subsequent algorithms to calculate the two-dimensional coordinates of the target position and the precise angular deviation. This allows for the use of a simpler, lower-cost single-beam sensor to achieve pose teaching functionality comparable to complex dual-beam sensors, balancing cost-effectiveness and measurement accuracy.

[0081] like Figure 5 As shown, optionally, regardless of whether the optical module is the first optical structure 120 or the second optical structure 130, an XY coordinate system is established with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis, including: The straight line connecting point A and point B is taken as the X-axis, where the intersection of the second optical axis 133 and the first mounting part 111 is point A, and the intersection of the third optical axis 136 and the second mounting part 112 is point B. Establish an XY coordinate system with the first direction as the Y-axis and the midpoint of the line segment between point A and point B as the origin O.

[0082] In other words, an XY coordinate system is established in the plane containing the intersecting second optical axis 133 and third optical axis 136. The midpoint of the line segment between point A and point B is the origin O, the straight line passing through the origin O and the intersection of the second optical axis 133 and the third optical axis 136 is the Y-axis, and the straight line passing through the origin O and point A is the X-axis.

[0083] In this embodiment, by directly binding the origin O and coordinate axes of the XY coordinate system to key functional points within the optical module (i.e., the intersection of the beam and the mounting part), a coordinate system entirely determined by the device's own structure is established. This coordinate system exhibits high stability and repeatability, ensuring that its internal reference system remains consistent regardless of device movement or startup / shutdown. Simultaneously, setting the origin O at the center of symmetry (midpoint between A and B) simplifies the subsequent mathematical model for pose calculation, reduces computational complexity, and thus provides a reliable mathematical foundation for position and angle calculations.

[0084] like Figure 5 As shown, optionally, S400 includes: With the angle α between the third optical axis 136 and the positive X-axis, the first initial coordinates (-a, -b) of the intersection point C of the second optical axis 133 and the second mounting part 112, and the second initial coordinates (-a, 0) of the intersection point B of the third optical axis 136 and the second mounting part 112 are determined. This allows the physical geometric layout of the optical sensor to be converted into mathematical parameters, providing stable and reliable initial conditions and calculation benchmarks for subsequent pose calculations. It should be noted that both a and b are greater than 0.

[0085] Based on the first initial coordinates, the second initial coordinates, the movement distance d1, and the movement distance d0, the x-coordinate of the origin o is determined. By applying a preset geometric algorithm, one dimension (x-coordinate) of the target position is directly calculated from the collected partial distance data (d0, d1). This calculation process is deterministic and avoids complex iterations or estimations.

[0086] Based on the first initial coordinates, the second initial coordinates, the movement distances d1 and d0, and the radius r of the semicircular arc 143, the ordinate of the origin o is determined. Continuing to utilize geometric relationships and combining the known characteristic dimensions (radius r) of the light-shielding protrusion 141, the other dimension (ordinate) of the target position is further calculated. Through these two steps, the two-dimensional planar coordinates of the target origin o can be completely determined using only the collected data, achieving two-dimensional positioning.

[0087] Based on the first initial coordinates, the second initial coordinates, the movement distances d0, d1, d2, and d3, and the radius r of the semicircular arc 143, the angle β between the y-axis and the orthographic projection of the Y-axis in the xoy plane is determined. By comprehensively utilizing all four collected distance data (d0, d1, d2, and d3), and through a complete geometric model, not only are the position coordinates verified, but the angular deviation β between the target coordinate system (i.e., the xy coordinate system) and the device coordinate system (i.e., the XY coordinate system) can also be calculated simultaneously. This achieves simultaneous teaching of both the target's position (translation) and attitude (rotation), avoiding the complex operations required by traditional methods, such as additional rotational movements or multiple alignments. This simplifies the teaching process, shortens the operation time, and ensures measurement accuracy and repeatability.

[0088] Specifically, based on the characteristics of similar triangles, the coordinates (x, y) of the origin o can be determined using the initial coordinates, the distance d0 moved, and the distance d1 moved. o y o ).

[0089] ; Specifically, the angle β between the y-axis and the Y-axis can be determined by formula (5).

[0090] Formula (5).

[0091] in, ; .

[0092] Example 1 The position teaching device of this embodiment 1 includes a conveying structure 110, a second optical structure 130, and a light-shielding structure 140.

[0093] The conveying structure 110 includes a first mounting portion 111 and a second mounting portion 112. One end of the first mounting portion 111 is used to mount to the robotic arm, and the other end extends away from the robotic arm along a first direction. One end of the second mounting portion 112 is used to mount to the robotic arm, and the other end extends away from the robotic arm along the first direction, and is spaced apart from the other end of the first mounting portion 111 along a second direction.

[0094] The second optical structure 130 includes a second transmissive light sensor and a third transmissive light sensor. The second transmissive light sensor includes a second light-projecting part 131 and a second light-receiving part 132; one of the second light-projecting part 131 and the second light-receiving part 132 is mounted on a first mounting part 111, and the other is mounted on a second mounting part 112; the second light-projecting part 131 projects a second light beam onto the second light-receiving part 132. The third transmissive light sensor includes a third light-projecting part 134 and a third light-receiving part 135; one of the third light-projecting part 134 and the third light-receiving part 135 is mounted on a second mounting part 112, and the other is mounted on a first mounting part 111; the third light-projecting part 134 projects a third light beam onto the third light-receiving part 135.

[0095] The outline of the light-shielding boss 141 projected onto the target mounting surface is formed by two semicircular arcs 143 and two straight line segments 144 connected end to end. The two semicircular arcs 143 have equal radii and the circles to which the two semicircular arcs 143 belong are tangent; each straight line segment 144 is parallel to the line connecting the centers of the two semicircular arcs 143, and the two straight line segments 144 are arranged at intervals along a direction perpendicular to the line connecting the centers.

[0096] The position teaching method provided by the specific embodiment of the present invention will be described below using the position teaching device of Embodiment 1 as an example.

[0097] The teaching methods for this location include: S100. Establish a coordinate system.

[0098] An XY coordinate system is established with the straight line connecting points A and B as the X-axis, where the intersection of the second optical axis 133 and the first mounting part 111 is point A, and the intersection of the third optical axis 136 and the second mounting part 112 is point B; the straight line passing through the origin O and the intersection of the second optical axis 133 and the third optical axis 136 is the Y-axis, and the midpoint of the line segment between points A and B is the origin O.

[0099] Within the target mounting surface, an xy coordinate system is established with the orthographic projection of the center of one semicircular arc 143 of the light-shielding boss 141 onto the target mounting surface as the origin o, the orthographic projection of the line connecting the centers of the two semicircular arcs 143 onto the target mounting surface as the y-axis, and the orthographic projection of the line connecting the origin o and the point of tangency between the straight line segment 144 and the semicircular arc 143 onto the target mounting surface as the x-axis.

[0100] S200. Based on the XY coordinate system, when the conveying structure 110 is in the initial teaching position, the initial coordinates of the second light-emitting part 131, the second light-receiving part 132, the third light-emitting part 134, and the third light-receiving part 135 are determined respectively.

[0101] Specifically, the second light-projecting part 131 and the third light-receiving part 135 are both mounted on the second mounting part 112, and are arranged alternately along the first direction towards the robotic arm. The second light-receiving part 132 and the third light-projecting part 134 are both mounted on the first mounting part 111, and are arranged alternately along the first direction away from the robotic arm. The angle between the third optical axis 136 and the positive X-axis is α.

[0102] The initial coordinates of the second light-projecting part 131 are the coordinates of point C (-a, -b), the initial coordinates of the third light-receiving part 135 are the coordinates of point B (-a, 0), the initial coordinates of the second light-receiving part 132 are the coordinates of point A (a, 0), and the initial coordinates of the third light-projecting part 134 are the coordinates of point D (a, b).

[0103] S300: During the process of the conveying structure 110 moving forward along the first direction from the initial teaching position towards the light-shielding protrusion 141, the moving distance d0 of the conveying structure 110 when the light-shielding protrusion 141 contacts the second optical axis 133 is obtained, the moving distance d1 of the conveying structure 110 when the light-shielding protrusion 141 contacts the third optical axis 136 is obtained, the moving distance d2 of the conveying structure 110 when the light-shielding protrusion 141 separates from the second optical axis 133 is obtained, and the moving distance d3 of the conveying structure 110 when the light-shielding protrusion 141 separates from the third optical axis 136 is obtained.

[0104] S400. Based on the relationship between the initial coordinates, the first moving distance, and the second moving distance, determine the coordinates of the origin o and the angle β between the y-axis and the Y-axis.

[0105] Specifically, based on the characteristics of similar triangles, the coordinates (x, y) of the origin o can be determined using the initial coordinates, the distance d0 moved, and the distance d1 moved. o y o ).

[0106] ; The positions of the second optical axis at the moment of contact and the moment of separation from the light-shielding boss when the conveying structure moves forward along the first direction from the initial teaching position correspond to... Figure 10 (a) shows the positions of the third optical axis at the moment of contact and the moment of separation from the light-blocking boss. Figure 10 (b) in the middle.

[0107] Combination Figure 10 The auxiliary lines in the equation can be used to determine the perpendicular distance between parallel lines (i.e., the position of the optical axis at different times), thus obtaining formulas (1) and (2).

[0108] Formula (1).

[0109] Formula (2).

[0110] In formulas (1) and (2), r is the radius of the semicircle, and β is the angle between the orthographic projection of the y-axis and the Y-axis onto the xoy plane.

[0111] For ease of calculation, we can let: Formula (3); Formula (4).

[0112] Simplifying formulas (3) and (4) yields: ; 。

[0113] Then, the angle β between the orthographic projections of the y-axis and the Y-axis in the xoy plane can be determined by formula (5).

[0114] Formula (5).

[0115] As can be seen from the position teaching method of Example 1, the position teaching method of this embodiment can record the movement distance of the conveying structure at four moments (i.e., when the light-shielding boss contacts the second optical axis, when the light-shielding boss contacts the third optical axis, when the light-shielding boss separates from the second optical axis, and when the light-shielding boss separates from the third optical axis) in a single movement. Thus, the coordinates of the origin o of the light-shielding boss in the xy coordinate system and the angle β between the y axis and the Y axis can be determined simultaneously.

[0116] Next, considering that the xy coordinate system is located in the plane where the target mounting surface is located, the coordinates of the target position in the target mounting surface can be determined according to the coordinates of the origin o and the included angle β, so as to achieve accurate teaching of the target position.

[0117] Example 2 The position teaching device of this embodiment 2 includes a conveying structure 110, a first optical structure 120, and a light-shielding structure 140.

[0118] The conveying structure 110 includes a first mounting portion 111 and a second mounting portion 112. One end of the first mounting portion 111 is used to mount to the robotic arm, and the other end extends away from the robotic arm along a first direction. One end of the second mounting portion 112 is used to mount to the robotic arm, and the other end extends away from the robotic arm along the first direction, and is spaced apart from the other end of the first mounting portion 111 along a second direction.

[0119] The first optical structure 120 includes a first transmissive light sensor, which includes a first light-emitting part 121 and a first light-receiving part 122. One of the first light-emitting part 121 and the first light-receiving part 122 is mounted on a first mounting part 111, and the other is mounted on a second mounting part 112; the first light-emitting part 121 projects a first light beam onto the first light-receiving part 122.

[0120] The outline of the light-shielding boss 141 projected onto the target mounting surface is formed by two semicircular arcs 143 and two straight line segments 144 connected end to end. The two semicircular arcs 143 have equal radii and the circles to which the two semicircular arcs 143 belong are tangent; each straight line segment 144 is parallel to the line connecting the centers of the two semicircular arcs 143, and the two straight line segments 144 are arranged at intervals along a direction perpendicular to the line connecting the centers.

[0121] The position teaching method provided by the specific embodiment of the present invention will be described below using the position teaching device of Embodiment 2 as an example.

[0122] The teaching methods for this location include: S100. Establish a coordinate system.

[0123] An XY coordinate system is established with the straight line connecting points A and B as the X-axis, where the intersection of the second optical axis 133 and the first mounting part 111 is point A, and the intersection of the third optical axis 136 and the second mounting part 112 is point B; the straight line passing through the origin O and the intersection of the second optical axis 133 and the third optical axis 136 is the Y-axis, and the midpoint of the line segment between points A and B is the origin O.

[0124] Within the target mounting surface, an xy coordinate system is established with the orthographic projection of the center of one semicircular arc 143 of the light-shielding boss 141 onto the target mounting surface as the origin o, the orthographic projection of the line connecting the centers of the two semicircular arcs 143 onto the target mounting surface as the y-axis, and the orthographic projection of the origin o and the line containing the tangent point between the line segment 144 and the semicircular arc 143 onto the target mounting surface as the x-axis.

[0125] In other words, the XY coordinate system of this embodiment 2 is the same as the XY coordinate system of embodiment 1. The xy coordinate system of this embodiment 2 is the same as the xy coordinate system of embodiment 1. This ensures that the coordinates of the origin o and the formulas for calculating the included angle β can be used in both embodiments 1 and 2.

[0126] S200. In the XOY plane, after the conveying structure 110 is swung by an angle α relative to the positive Y-axis, the initial coordinates of the first light-emitting part 121 and the first light-receiving part 122 are determined according to the XY coordinate system when the conveying structure 110 is in the initial teaching position. In the XOY plane, after the conveying structure 110 is swung in the opposite direction of the Y axis by an angle α, the initial coordinates of the first light-emitting part 121 and the first light-receiving part 122 are determined according to the XY coordinate system when the conveying structure 110 is in the initial teaching position.

[0127] like Figure 9 As shown, specifically, in the XOY plane, after the conveying structure 110 is swung by an angle α relative to the positive Y-axis, the intersection of the first optical axis 123 and the first mounting part 111 is point A, and the intersection of the first optical axis 123 and the second mounting part 112 is point C. After the conveying structure 110 is swung by an angle α in the opposite direction relative to the Y-axis, the intersection of the first optical axis 123 and the second mounting part 112 is point B, and the intersection of the first optical axis 123 and the first mounting part 111 is point D.

[0128] The coordinates of point A are (a, 0), the coordinates of point B are (-a, 0), the coordinates of point C are (-a, -b), and the coordinates of point D are (a, b).

[0129] S300. In the XOY plane, after the conveying structure 110 is swung by an angle α relative to the positive Y-axis, during the process of the conveying structure 110 moving towards the light-shielding boss 141 from the initial teaching position along the first direction, the moving distance d0 of the conveying structure 110 when the light-shielding boss 141 contacts the first optical axis 123 is obtained, and the moving distance d2 of the conveying structure 110 when the light-shielding boss 141 separates from the first optical axis 123 is obtained. Next, after the conveying structure 110 is swung in the opposite direction relative to the Y-axis by an angle α, as the conveying structure 110 moves towards the light-shielding boss 141 along the first direction from the initial teaching position, the moving distance d1 of the conveying structure 110 when the light-shielding boss 141 contacts the first optical axis 123 is obtained, and the moving distance d3 of the conveying structure 110 when the light-shielding boss 141 separates from the first optical axis 123 is obtained.

[0130] S400. Based on the relationship between the initial coordinates, the first moving distance, and the second moving distance, determine the coordinates of the origin o and the angle β between the y-axis and the Y-axis.

[0131] Specifically, based on the characteristics of similar triangles, the coordinates (x, y) of the origin o can be determined using the initial coordinates, the distance d0 moved, and the distance d1 moved. o y o ).

[0132] ; In the XOY plane, after the conveying structure swings by an angle α relative to the positive Y-axis, when the conveying structure moves forward along the first direction from the initial teaching position, the positions of the first optical axis at the moment of contact and the moment of separation from the light-shielding boss correspond to... Figure 10 (a) In the XOY plane, after the conveying structure is swung backward by an angle α relative to the Y-axis, the positions of the first optical axis at the moment of contact and separation from the light-shielding boss when the conveying structure moves forward along the first direction from the initial teaching position correspond to... Figure 10 (b) in the middle.

[0133] Combination Figure 10 The auxiliary lines in the diagram can be used to determine the perpendicular distance between parallel lines (i.e., the positions of the optical axis at different times), and the following formulas (1) and (2) can be obtained.

[0134] Formula (1).

[0135] Formula (2).

[0136] In formulas (1) and (2), r is the radius of the semicircle, and β is the angle between the orthographic projection of the y-axis and the Y-axis onto the xoy plane.

[0137] For ease of calculation, we can let: Formula (3); Formula (4).

[0138] Simplifying formulas (3) and (4) yields: ; 。

[0139] Then, the angle β between the orthographic projections of the y-axis and the Y-axis in the xoy plane can be determined by formula (5).

[0140] Formula (5).

[0141] As can be seen from the position teaching method of Embodiment 2, the position teaching method of this embodiment records the movement distance of the conveying structure at four moments (i.e., when the light-shielding protrusion contacts the first optical axis and when the light-shielding protrusion separates from the first optical axis when the forward deflection angle α is 1; when the light-shielding protrusion contacts the first optical axis and when the light-shielding protrusion separates from the first optical axis when the reverse deflection angle α is 1) by two movements. In this way, the coordinates of the origin o of the light-shielding protrusion in the xy coordinate system and the angle β between the y axis and the Y axis can be determined simultaneously.

[0142] Next, considering that the xy coordinate system is located in the plane where the target mounting surface is located, the coordinates of the target position in the target mounting surface can be determined according to the coordinates of the origin o and the included angle β, so as to achieve accurate teaching of the target position.

[0143] Figure 12 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 12 As shown, the electronic device may include: a processor 810, a communications interface 820, a memory 830, and a communication bus 840, wherein the processor 810, the communications interface 820, and the memory 830 communicate with each other via the communication bus 840. The processor 810 can call logical instructions in the memory 830 to execute a position teaching method, which includes: Establish a coordinate system: Establish an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis; Establish an xy coordinate system with the center of one semicircular arc of the light-blocking protrusion as the origin o, the line connecting the centers of the two semicircular arcs as the y-axis, and the origin o and the line containing the point of tangency between the line segment and the semicircular arc as the x-axis. Based on the XY coordinate system, when the transport structure is in the initial teaching position, determine the initial coordinates of the optical module; During the process of the conveying structure moving towards the light-shielding boss from the initial teaching position along the first direction, the first moving distance of the conveying structure when the light-shielding boss contacts the optical axis is obtained, and the second moving distance of the conveying structure when the light-shielding boss separates from the optical axis is obtained. Based on the relationship between the initial coordinates of the optical module, the first moving distance, and the second moving distance, determine the coordinates of the origin o, and the angle β between the orthographic projections of the y-axis and the Y-axis in the xoy plane.

[0144] Furthermore, the logical instructions in the aforementioned memory 830 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0145] On the other hand, the present invention also provides a computer program product, the computer program product comprising a computer program that can be stored on a non-transitory computer-readable storage medium, wherein when the computer program is executed by a processor, the computer is able to execute the position teaching method provided by the above methods, the method comprising: Establish a coordinate system: Establish an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis; Establish an xy coordinate system with the center of one semicircular arc of the light-blocking protrusion as the origin o, the line connecting the centers of the two semicircular arcs as the y-axis, and the origin o and the line containing the point of tangency between the line segment and the semicircular arc as the x-axis. Based on the XY coordinate system, when the transport structure is in the initial teaching position, determine the initial coordinates of the optical module; During the process of the conveying structure moving towards the light-shielding boss from the initial teaching position along the first direction, the first moving distance of the conveying structure when the light-shielding boss contacts the optical axis is obtained, and the second moving distance of the conveying structure when the light-shielding boss separates from the optical axis is obtained. Based on the relationship between the initial coordinates of the optical module, the first moving distance, and the second moving distance, determine the coordinates of the origin o, and the angle β between the orthographic projections of the y-axis and the Y-axis in the xoy plane.

[0146] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to perform the position teaching methods provided by the methods described above, the method comprising: Establish a coordinate system: Establish an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis; Establish an xy coordinate system with the center of one semicircular arc of the light-blocking protrusion as the origin o, the line connecting the centers of the two semicircular arcs as the y-axis, and the origin o and the line containing the point of tangency between the line segment and the semicircular arc as the x-axis. Based on the XY coordinate system, when the transport structure is in the initial teaching position, determine the initial coordinates of the optical module; During the process of the conveying structure moving towards the light-shielding boss from the initial teaching position along the first direction, the first moving distance of the conveying structure when the light-shielding boss contacts the optical axis is obtained, and the second moving distance of the conveying structure when the light-shielding boss separates from the optical axis is obtained. Based on the relationship between the initial coordinates of the optical module, the first moving distance, and the second moving distance, determine the coordinates of the origin o, and the angle β between the orthographic projections of the y-axis and the Y-axis in the xoy plane.

[0147] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0148] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0149] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A position teaching device, characterized in that, include: A conveying structure (110) is used to be mounted to a robotic arm and moves in a first direction; An optical module includes a first optical structure (120) or a second optical structure (130); the first optical structure (120) emits a first light beam, the first optical axis (123) of the first light beam being perpendicular to the first direction; the second optical structure (130) emits a second light beam and a third light beam, the second optical axis (133) of the second light beam intersecting the third optical axis (136) of the third light beam, both the second optical axis (133) and the third optical axis (136) intersecting the first direction; The light-shielding structure (140) includes a light-shielding boss (141) for mounting to a target mounting surface; the light-shielding boss (141) is arranged along the first direction on one side of the conveying structure (110) for blocking the optical axis.

2. The position teaching device according to claim 1, characterized in that, The conveying structure (110) includes: The first mounting part (111) has one end for mounting to the robotic arm and the other end for extending away from the robotic arm along the first direction. The second mounting part (112) has one end for mounting to the robotic arm and the other end for extending away from the robotic arm along the first direction, and is arranged at a distance from the other end of the first mounting part (111) along the second direction.

3. The position teaching device according to claim 2, characterized in that, The first optical structure (120) includes a first transmissive light sensor, which comprises: A first light-projecting part (121) and a first light-receiving part (122), wherein one of the first light-projecting part (121) and the first light-receiving part (122) is installed in the first mounting part (111) and the other is installed in the second mounting part (112); the first light-projecting part (121) projects the first light beam onto the first light-receiving part (122).

4. The position teaching device according to claim 2, characterized in that, The second optical structure (130) includes: The second transmissive light sensor includes a second light-projecting part (131) and a second light-receiving part (132); one of the second light-projecting part (131) and the second light-receiving part (132) is mounted on the first mounting part (111), and the other is mounted on the second mounting part (112); the second light-projecting part (131) projects the second light beam onto the second light-receiving part (132); The third transmissive light sensor includes a third light-projecting part (134) and a third light-receiving part (135); one of the third light-projecting part (134) and the third light-receiving part (135) is mounted on the second mounting part (112), and the other is mounted on the first mounting part (111); the third light-projecting part (134) projects the third light beam onto the third light-receiving part (135).

5. The position teaching device according to any one of claims 1 to 4, characterized in that, The outline of the light-shielding boss (141) projected onto the target mounting surface is formed by two semicircular arcs (143) and two straight line segments (144) connected end to end; The two semicircular arcs (143) have the same radius, and the circles to which the two semicircular arcs (143) belong are tangent; Each of the straight line segments (144) is parallel to the line connecting the centers of the two semicircular arcs (143), and the two straight line segments (144) are arranged at intervals along a direction perpendicular to the line connecting the centers.

6. The position teaching device according to any one of claims 1 to 4, characterized in that, The light-shielding structure (140) also includes: Positioning plate (142), the light-shielding boss (141) is installed on the target mounting surface through the positioning plate (142), the area of ​​the positioning plate (142) projected onto the target mounting surface is greater than the area of ​​the light-shielding boss (141) projected onto the target mounting surface.

7. A method for teaching position, characterized in that, The position teaching device according to any one of claims 1 to 6, wherein the position teaching method comprises: Establish a coordinate system: Establish an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis; With the center of one semicircular arc (143) of the light-shielding boss (141) as the origin o, the line connecting the centers of the two semicircular arcs (143) as the y-axis, and the straight line passing through the origin o and perpendicular to the y-axis as the x-axis, establish the xy coordinate system. Based on the XY coordinate system, when the transport structure (110) is in the initial teaching position, the initial coordinates of the optical module are determined; During the process of the conveying structure (110) moving closer to the light-shielding boss (141) in the first direction from the initial teaching position, the first moving distance of the conveying structure (110) when the light-shielding boss (141) contacts the optical axis is obtained, and the second moving distance of the conveying structure (110) when the light-shielding boss (141) separates from the optical axis is obtained. Based on the relationship between the initial coordinates of the optical module, the first moving distance, and the second moving distance, determine the coordinates of the origin o and the angle β between the y-axis and the Y-axis.

8. The position teaching method according to claim 7, characterized in that, Determining the initial coordinates of the optical module based on the XY coordinate system when the transport structure (110) is in the initial teaching position includes: According to the XY coordinate system, when the conveying structure (110) is in the initial teaching position, the initial coordinates of the second light-emitting part (131), the second light-receiving part (132), the third light-emitting part (134) and the third light-receiving part (135) are determined respectively; Alternatively, after swinging the conveying structure (110) by an angle α relative to the positive Y-axis, the initial coordinates of the first projection part (121) and the first receiving part (122) are determined according to the XY coordinate system when the conveying structure (110) is in the initial teaching position. Next, after the conveying structure (110) is swung in the opposite direction of the Y-axis by an angle α, the initial coordinates of the first light-emitting part (121) and the first light-receiving part (122) are determined again according to the XY coordinate system when the conveying structure (110) is in the initial teaching position.

9. The position teaching method according to claim 8, characterized in that, The process of the conveying structure (110) moving closer to the light-shielding boss (141) along the first direction from the initial teaching position, including obtaining the first moving distance of the conveying structure (110) when the light-shielding boss (141) contacts the optical axis, and obtaining the second moving distance of the conveying structure (110) when the light-shielding boss (141) separates from the optical axis, includes: During the process of the conveying structure (110) moving towards the light-shielding boss (141) from the initial teaching position along the first direction, the moving distance d0 of the conveying structure (110) when the light-shielding boss (141) contacts the second optical axis (133) is obtained, the moving distance d1 of the conveying structure (110) when the light-shielding boss (141) contacts the third optical axis (136) is obtained, the moving distance d2 of the conveying structure (110) when the light-shielding boss (141) separates from the second optical axis (133) is obtained, and the moving distance d3 of the conveying structure (110) when the light-shielding boss (141) separates from the third optical axis (136) is obtained. Alternatively, after swinging the conveying structure (110) by an angle α relative to the positive Y-axis, during the process of the conveying structure (110) moving towards the light-shielding boss (141) along the first direction from the initial teaching position, the moving distance d0 of the conveying structure (110) when the light-shielding boss (141) contacts the first optical axis (123) is obtained, and the moving distance d2 of the conveying structure (110) when the light-shielding boss (141) separates from the first optical axis (123) is obtained; Next, after the conveying structure (110) is swung in the opposite direction relative to the Y-axis by an angle α, as the conveying structure (110) moves towards the light-shielding boss (141) along the first direction from the initial teaching position, the moving distance d1 of the conveying structure (110) when the light-shielding boss (141) contacts the first optical axis (123) is obtained, and the moving distance d3 of the conveying structure (110) when the light-shielding boss (141) separates from the first optical axis (123) is obtained.

10. The position teaching method according to any one of claims 7 to 9, characterized in that, The establishment of an XY coordinate system with the first direction as the Y-axis and the direction perpendicular to the first direction as the X-axis includes: The straight line connecting point A and point B is taken as the X-axis, where the intersection of the second optical axis (133) and the first mounting part (111) is point A, and the intersection of the third optical axis (136) and the second mounting part (112) is point B; Establish an XY coordinate system with the first direction as the Y-axis and the midpoint of the line segment between point A and point B as the origin O.