One-to-many automatic film reversing machine

Abstract

The invention relates to the field of wafer production, in particular to a one-to-many automatic film pouring machine which comprises a primary and secondary ring feeding mechanism, a transfer film spacer feeding mechanism, a transfer film pouring mechanism, a multi-time film pouring mechanism, a finished film feeding mechanism, a spacer feeding and discharging mechanism, a conveying mechanism and a discharging mechanism. The mother-son ring feeding mechanism conveys mother-son rings with wafers to the transfer film pouring mechanism, the transfer film and spacer feeding mechanism conveys transfer films and spacers to the transfer film pouring mechanism, and the transfer film pouring mechanism pours the wafers on the mother-son rings to the transfer films. The transfer film carries the wafer and the spacer to carry out n times of film pouring with n different spacers and finished films on the multiple-time film pouring mechanism, the wafer is equally divided into n parts and poured onto n different finished films, release paper is pasted on the finished films on the discharging mechanism for discharging, and splitting and film pouring of the wafer are achieved.

Description

Technical Field

[0001] This invention relates to the field of wafer manufacturing, and more specifically to a multi-stage automatic wafer casting machine. Background Technology

[0002] A wafer is the core foundation of the semiconductor industry, essentially a thin, extremely pure, and structurally precise single-crystal silicon wafer. The manufacturing process begins with silicon dioxide, the most common element in nature, which is reduced at high temperatures to extract polycrystalline silicon. This polycrystalline silicon is then melted into cylindrical single-crystal ingots using the Czochralski or zone melting methods—a step akin to "reorganizing" scattered silicon atoms into a perfect single crystal with a regular crystal structure. The wafer processing mainly includes deoxidation and purification, processing steps, and probing steps. The basic steps of the processing steps involve first cleaning the wafer appropriately, then performing oxidation and chemical vapor deposition on its surface, followed by repeated steps such as coating, exposure, development, etching, ion implantation, and metal sputtering, ultimately completing the fabrication of multiple layers of circuits and components on the wafer. During processing, the wafer needs to be transferred to a specific carrier for subsequent processing. For example, before IPC etching, the wafer needs to be transferred to a specific tray, and the entire tray carrying the wafer is placed in a plasma etching machine for etching.

[0003] Wafer casting is a key process in semiconductor manufacturing for wafer flipping, die transfer, or film layer renewal. Its core lies in the synergistic effect of precision mechanical control and thermoforming technology to completely transfer the wafer or die from the original substrate to a new substrate, while ensuring die integrity, positional accuracy, and film adhesion during processing. However, existing casting equipment can only perform whole-wafer casting on a wafer sheet and cannot perform separate casting of wafers on a wafer sheet. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-stage automatic wafer casting machine, which aims to improve the problem that existing wafer casting equipment can only perform whole-piece wafer casting on a film and cannot perform wafer splitting and casting on a film.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An automatic film-casting machine with multiple layers includes a mother-daughter ring feeding mechanism, a transfer film separator feeding mechanism, a transfer film-casting mechanism, a multi-layer film-casting mechanism, a finished film feeding mechanism, a separator loading and unloading mechanism, a transport mechanism, and a unloading mechanism. The intermediate film-casting mechanism includes a rotating platform, on which a loading station, an intermediate film-casting station, a mother-and-daughter ring unloading station, and a spacer flipping output station are sequentially arranged. The rotating platform is equipped with a first film-casting assembly, a mother-and-daughter ring unloading assembly, and a spacer flipping assembly located at the intermediate film-casting station, the mother-and-daughter ring unloading station, and the spacer flipping output station, respectively. The ends of the intermediate film spacer loading mechanism and the mother-and-daughter ring loading mechanism are respectively opposite to the loading station. The multi-stage film-casting mechanism includes an upper slide rail system, a lower slide rail system, and a film-casting platform disposed between the upper slide rail system and the lower slide rail system. The film-casting platform is provided with a film-casting station, the film-casting station is provided with a film-casting channel, and a spacer transfer assembly is provided between the spacer flipping and output station. A second film-casting assembly and a transfer film feeding assembly are slidably disposed on the upper slide rail system, and a sliding platform is provided on the lower slide rail system. The transport mechanism connects the sliding rail system and the unloading mechanism. The finished film loading mechanism and the separator loading / unloading mechanism are located on both sides of the transport mechanism. The separator loading / unloading mechanism includes a separator lifting rack, a loading / unloading guide rail, and a loading / unloading clamping assembly. n separators are stacked inside the separator lifting rack. The separators have inverted film openings, and the inverted film openings of the n separators correspond to 1 / n of the wafer arrangement range. One end of the loading / unloading guide rail is connected to the outlet of the separator lifting rack, and the other end of the loading / unloading guide rail extends to the bottom of the transport mechanism. The separator grippers of the loading / unloading clamping assembly hold the separators and reciprocate on the loading / unloading guide rail. The end of the finished film loading mechanism corresponds to the end of the loading / unloading guide rail.

[0006] Furthermore, the mother-daughter ring feeding mechanism includes a mother-daughter ring material rack, a mother-daughter ring transport assembly, and a mother-daughter ring feeding assembly. The mother-daughter ring transport assembly includes a mother-daughter ring transport slide rail and a transport suction cup unit slidably disposed on the mother-daughter ring transport slide rail. The mother-daughter ring feeding assembly includes a mother-daughter ring feeding slide rail and a mother-daughter ring carrier slidably disposed on the mother-daughter ring feeding slide rail. One end of the mother-daughter ring transport slide rail extends above the mother-daughter ring material rack, and the other end of the mother-daughter ring transport slide rail extends above one end of the mother-daughter ring feeding slide rail. The transfer membrane septum feeding mechanism includes a transfer membrane feeding assembly and a septum feeding assembly. The transfer membrane feeding assembly and the septum feeding assembly are arranged opposite each other on one side of the mother-daughter ring feeding slide rail. A transfer frame is provided between the transfer membrane feeding assembly and the septum feeding assembly. The transfer membrane feeding assembly outputs the transfer membrane to the transfer frame, and the septum feeding assembly outputs septums to the transfer membrane on the transfer frame. A front-end transport slide rail is provided above the loading station and the transfer frame. The other end of the mother-daughter ring loading slide rail extends to the bottom of the front-end transport slide rail. A lifting transport component is slidably mounted on the front-end transport slide rail.

[0007] Furthermore, the transport suction cup unit includes a first lifting slide rail and a suction cup seat slidably disposed on the first lifting slide rail, wherein the first lifting slide rail is disposed on the slider of the mother-daughter ring transport slide rail; A rotary drive assembly is fixed on the suction cup base. The drive end of the rotary drive assembly passes through the suction cup base and is connected to the first suction cup. The side of the mother-daughter ring transport slide rail is equipped with a flat-edge detection camera.

[0008] Furthermore, the partition feeding assembly includes a partition lifting frame and a partition clamping assembly. One end of the transfer frame is connected to the outlet of the partition lifting frame, and the other end of the transfer frame extends to the bottom of the front transport slide rail. The partition clamping assembly includes a partition feeding slide rail and a first sliding seat movably disposed on the partition feeding slide rail. The extension direction of the partition feeding slide rail is the same as the extension direction of the transfer frame. The top end of the first sliding seat extends above the transfer frame and bends towards the middle of the transfer frame. The end of the first sliding seat is provided with a partition clamping claw.

[0009] Furthermore, the partition flipping assembly includes a flipping lifting slide rail and a flipping seat slidably disposed on the flipping lifting slide rail. A flipping motor is disposed on the flipping seat, and a flipping suction cup is driven and connected to the drive end of the flipping motor. The flipping suction cup is located above the partition flipping output station.

[0010] Furthermore, the casting platform is provided with a first positioning cylinder and a second positioning cylinder. The first positioning cylinder and the second positioning cylinder are located on the side of the casting channel. The driving ends of the first positioning cylinder and the second positioning cylinder are both facing the casting channel and are provided with positioning blocks. The positioning blocks have positioning notches, and the positioning notches correspond to the end positions of the spacers.

[0011] Furthermore, the loading and unloading guide rails are provided with clearance notches, which coincide with the movement path of the separator claws.

[0012] Furthermore, the transport mechanism includes a first transport slide rail, a second transport slide rail, and a third transport slide rail arranged sequentially from top to bottom; one end of the first transport slide rail extends above the lower slide rail system, the other end of the first transport slide rail extends above one end of the third transport slide rail, and the other end of the third transport slide rail extends into the unloading mechanism; one end of the second transport slide rail extends to the end of the loading and unloading guide rail, and the other end of the second transport slide rail extends to the side of the loading and unloading guide rail; A transport suction cup assembly is slidably mounted on the first transport slide rail, and a pressing component is mounted on the transport suction cup assembly. The pressing end of the pressing component is offset from the film pouring opening. A displacement suction cup assembly is slidably mounted on the second transport slide rail. A finished film transport assembly is slidably mounted on the third transport slide rail.

[0013] Furthermore, a splitting platform is provided at one end of the third transport slide rail, and a placement position is provided on the splitting platform, with a splitting channel opened on the placement position.

[0014] Furthermore, the transport suction cup assembly includes an upper plate, a middle plate, and a suction transport plate; The upper plate is connected to the slider of the first transport slide rail. The bottom surface of the upper plate is provided with a transport lifting motor and a downwardly extending first guide rod. The drive end of the transport lifting motor is connected to the middle plate, and the first guide rod is inserted into the middle plate. A vertical rod is connected between the middle plate and the suction transport plate. The bottom surface of the suction transport plate is provided with a transport suction nozzle. The pressing assembly includes a pressing motor, the top of which is fixed to the bottom surface of the middle plate. The driving end of the pressing motor is set downward and drives the pressing plate. The bottom surface of the pressing plate is provided with downwardly extending pressing rods around its perimeter. The bottom surface of the middle plate is provided with a downwardly extending second guide rod, which passes through the pressing plate.

[0015] By adopting the above technical solution, the present invention has the following advantages compared with the prior art: The mother-daughter ring loading mechanism transports the mother-daughter rings carrying the wafers to the intermediate film casting mechanism. The intermediate film and spacer loading mechanism transports the intermediate film and spacers to the intermediate film casting mechanism. The intermediate film casting mechanism casts the wafers from the mother-daughter rings onto the intermediate film. The intermediate film, carrying the wafers and spacers, performs n castings with n different spacers and finished films in the multiple casting mechanism, dividing the wafers into n equal parts and casting them onto n different finished films. The finished films are then unloaded by the unloading mechanism with release paper attached, thus realizing the wafer splitting and casting. Attached Figure Description

[0016] Figure 1 This is a top view of the multi-part automatic film casting machine described in this invention; Figure 2 This is a schematic diagram of the first structure of the automatic film casting machine described in this invention; Figure 3 This is a schematic diagram of the second structure of the automatic film casting machine described in this invention; Figure 4 This is a schematic diagram of the main ring feeding mechanism of the multi-part automatic film casting machine of the present invention; Figure 5 This is a schematic diagram of the septum feeding assembly of the multi-part automatic film casting machine described in this invention; Figure 6 This is a schematic diagram of the intermediate film feeding component of the multi-part automatic film casting machine described in this invention; Figure 7 This is a schematic diagram of the septum flipping assembly and septum transfer assembly of the multi-part automatic film casting machine of the present invention; Figure 8 This is a schematic diagram of the upper structure of the multi-stage film-casting mechanism of the multi-stage automatic film-casting machine described in this invention; Figure 9 This is a schematic diagram of the lower end structure of the multi-stage film-casting mechanism of the multi-stage automatic film-casting machine described in this invention; Figure 10 This is a schematic diagram of the separator loading and unloading mechanism of the multi-part automatic film casting machine described in this invention; Figure 11 This is a schematic diagram of the transport mechanism structure of the multi-part automatic film pouring machine described in this invention; Figure 12 This is a schematic diagram of the release paper feeding component of the multi-part automatic film casting machine described in this invention.

[0017] Explanation of reference numerals in the attached figures: 1. Mother-daughter ring feeding mechanism; 11. Mother-daughter ring material rack; 12. Mother-daughter ring transport assembly; 121. Mother-daughter ring transport slide rail; 122. Transport suction cup unit; 1221. First lifting slide rail; 1222. Suction cup seat; 123. Rotary drive assembly; 1231. First suction cup; 1232. Rotary motor; 1233. Transmission turntable; 13. Mother-daughter ring feeding assembly; 131. Mother-daughter ring feeding slide rail; 132. Mother-daughter ring platform; 14. Flat edge detection camera; 2. Transfer film separator feeding mechanism; 21. Transfer film feeding assembly; 211. Transfer film frame; 212. Transfer film slide rail assembly; 2121. Transfer film feeding slide rail; 213. Sliding vertical plate; 2131. Transfer film lifting slide rail; 2132. Transfer film lifting cylinder; 2133. "L" shaped frame; 214. Transfer film feeding suction cup; 215. Film cutting frame; 216. Transfer film roll; 22. Partition feeding assembly; 221. Partition lifting rack; 222. Partition clamping assembly; 2221. Partition feeding slide rail; 2222. First sliding seat; 2223. Partition gripper; 223. Partition; 2231. Notch; 23. Transfer frame; 3. Transfer and film-casting mechanism; 31. Rotary platform; 311. Loading station; 312. Transfer and film-casting station; 313. Mother-daughter ring unloading station; 314. Spacer flipping output station; 315. First film-casting assembly; 3151. First film-casting drive cylinder; 3152. First film-casting block; 316. Mother-daughter ring unloading assembly; 3161. Mother-daughter ring unloading slide rail; 3162. Unloading lifting cylinder; 3163. Unloading gripper; 317. Spacer flipping assembly; 3171. Flipping lifting slide rail; 3172. Flipping seat; 3173. Flipping motor; 3174. Flipping suction cup; 32. Front-end transport slide rail; 321. Lifting transport assembly; 4. Multi-stage film-turning mechanism; 41. Upper slide rail system; 411. Second film-turning assembly; 4111. Second film-turning drive cylinder; 4112. Second film-turning block; 412. Transfer film unloading assembly; 4121. Unloading sliding seat; 4122. Clamping and lifting cylinder; 4123. Film-tearing gripper; 4124. Tooth; 413. First upper slide rail; 414. Second upper slide rail; 42. Lower slide rail system; 421. Sliding platform; 422. First lower slide rail; 423. 43. Second sliding rail; 43. Molding stage; 431. Molding station; 432. Molding channel; 433. First positioning cylinder; 434. Second positioning cylinder; 435. Positioning block; 4351. Positioning notch; 44. Partition transfer assembly; 441. Partition transfer frame; 442. Transfer lifting motor; 443. Transfer rotary motor; 444. Transfer plate; 445. Transfer suction cup; 446. Rotary drive plate; 46. Pressing cylinder; 461. Pressing plate; 5. Finished film feeding mechanism; 6. Separator loading and unloading mechanism; 61. Separator lifting rack; 611. Separator; 6111. Film pouring opening; 6112. Pressing channel; 612. Rack; 613. Lifting base; 62. Loading and unloading guide rail; 621. Clearance notch; 63. Loading and unloading clamp assembly; 631. Separator gripper; 632. Separator loading and unloading slide rail; 633. Second sliding seat; 64. Detection auxiliary table; 65. Separator detection camera; 7. Transport Mechanism; 71. First Transport Rail; 72. Second Transport Rail; 73. Third Transport Rail; 74. Transport Suction Cup Assembly; 741. Upper Plate; 7411. Transport Lifting Motor; 7412. First Guide Rod; 742. Middle Plate; 7421. Second Guide Rod; 743. Suction Transport Plate; 7431. Transport Suction Nozzle; 744. Upright Post; 75. Pressing Assembly; 751. Pressing Motor; 752. Pressing Plate; 753. Pressing Rod; 76. Positioning Suction Cup Assembly; 761. Positioning Plate; 762. Positioning Lifting Motor; 763. Positioning Rail; 764. Positioning Seat; 765. Suction End Face; 766. Positioning Suction Cup; 77. Finished Film Transport Assembly; 771. Transport Seat; 772. Placement Lifting Motor; 773. Placement Plate; 774. Third Guide Rod; 78. Splitting Table; 781. Placement Position; 8. Feeding mechanism; 81. Release paper feeding assembly; 82. Feeding assembly; 821. Film coating transport slide rail; 8211. Film coating top plate; 8212. Film coating lifting cylinder; 8213. Fourth guide rod; 8214. Film coating frame; 8215. Film coating suction cup; 822. Feeding slide rail; 8221. Feeding platform; 823. Material sorting slide rail; 8231. Material sorting frame; 8232. Material sorting lifting cylinder; 8233. Adjusting seat; 8234. Adjusting rotary motor; 8235. Adjusting shaft; 8236. Adjusting suction cup; 8237. Feeding frame. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0019] Additionally, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" are all based on the orientation or positional relationship shown in the accompanying drawings. They are merely for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element of the present invention must have a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0020] When an element is referred to as being "fixed to," "set on," or "contained on" another element, it can be directly on or indirectly on that other element. When an element is referred to as being "connected to," it can be directly connected to or indirectly connected to that other element.

[0021] Unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances. Example

[0022] Please refer to Figure 1-12 As shown, this embodiment provides a multi-stage automatic film casting machine, including a mother-daughter ring feeding mechanism 1, a transfer film separator feeding mechanism 2, a transfer film casting mechanism 3, a multi-stage film casting mechanism 4, a finished film feeding mechanism 5, a separator loading and unloading mechanism 6, a transport mechanism 7, and a unloading mechanism 8. The transfer film casting mechanism 3 includes a rotating platform 31, on which a feeding station 311, a transfer film casting station 312, a mother-daughter ring unloading station 313, and a separator flipping output station 314 are sequentially arranged. The rotating platform 31 is provided with a first film casting assembly 315, a mother-daughter ring unloading assembly 316, and a separator flipping assembly 317 located at the transfer film casting station 312, the mother-daughter ring unloading station 313, and the separator flipping output station 314, respectively. The ends of the transfer film septum feeding mechanism 2 and the mother-daughter ring feeding mechanism 1 are both corresponding to the feeding station 311. That is, the transfer film septum feeding mechanism 2 outputs the septum 223 and the transfer film stacked from top to bottom to the feeding station 311, and the mother-daughter ring feeding mechanism 1 outputs the mother-daughter ring to the septum 223 on the transfer film pouring mechanism 3.

[0023] The multi-stage film-casting mechanism 4 includes an upper slide rail system 41, a lower slide rail system 42, and a film-casting platform 43 disposed between the upper slide rail system 41 and the lower slide rail system 42. The film-casting platform 43 has a film-casting station 431, a film-casting channel 432, and a spacer transfer assembly 44 between it and the spacer flipping output station 314. A second film-casting assembly 411 and a transfer film unloading assembly 412 are slidably mounted on the upper slide rail system 41, and a sliding platform 421 is mounted on the lower slide rail system 42.

[0024] The transport mechanism 7 connects the lower slide rail system 42 and the unloading mechanism 8, with both ends of the transport mechanism 7 extending above the lower slide rail system 42 and below the unloading mechanism 8, respectively. The finished film loading mechanism 5 and the separator loading / unloading mechanism 6 are located on both sides of the transport mechanism 7. The separator loading / unloading mechanism 6 includes a separator lifting rack 221, a loading / unloading guide rail 62, and a loading / unloading clamp assembly 63. n separators 611 are stacked inside the separator lifting rack 221. The separators 611 have a wafer casting opening 6111, and the wafer casting openings 6111 of the n separators 611 correspond to 1 / n of the wafer arrangement range. One end of the loading / unloading guide rail 62 is connected to the outlet of the separator lifting rack 221, and the other end of the loading / unloading guide rail 62 extends to the bottom of the transport mechanism 7. The separator 611 of the loading / unloading clamping assembly 63 grips the separator 611 and reciprocates on the loading / unloading guide rail 62. The end of the finished film loading mechanism 5 corresponds to the end of the loading / unloading guide rail 62. n is an integer greater than 1. In this embodiment, the wafers are arranged in a circle, and n is 4, that is, four separators 611 each have a 1 / 4 circle casting opening 6111, and the casting openings 6111 of the four separators 611 form a complete circle. Similarly, n can also be 2 or more casting times can be set.

[0025] The mother-daughter ring loading mechanism 1 transports the mother-daughter ring carrying the wafer to the intermediate film casting mechanism 3. The intermediate film and spacer loading mechanism 2 transports the intermediate film and spacer 223 to the intermediate film casting mechanism 3. The intermediate film casting mechanism 3 casts the wafer on the mother-daughter ring onto the intermediate film. The intermediate film carrying the wafer and spacer 223 performs n castings with n different spacers 611 and finished films on the multiple casting mechanism 4, dividing the wafer into n equal parts and casting them onto n different finished films. The finished films are unloaded by the unloading mechanism 8 by attaching release paper, realizing the separation and casting of the wafer.

[0026] Specifically, the intermediate film separator feeding mechanism 2 outputs separators 223 and intermediate films stacked from top to bottom to the feeding station 311, and the mother-daughter ring feeding mechanism 1 outputs mother-daughter rings to the separators 223 on the intermediate film casting mechanism 3. At this time, the feeding station 311 has mother-daughter rings with wafers, separators 223 and intermediate films stacked from top to bottom. The rotating stage 31 drives it to move sequentially to the intermediate film casting station 312 to cast the wafers onto the intermediate films. The mother-daughter ring unloading station 313 unloads empty mother-daughter rings. The separator flipping output station 314 flips the separators 223 and intermediate films. At this time, the intermediate films are located above the separators 223. The separator transfer assembly 44 transfers the separators 223 and intermediate films to the casting station 431.

[0027] The finished film loading mechanism 5 outputs the finished film to the area below the transport mechanism 7. The separator plate loading and unloading mechanism 6 outputs a separator plate 611 to the finished film below the transport mechanism 7, at which point the finished film is located below the separator plate 611. The transport mechanism 7 transports the separator plate 611 and the finished film to the sliding platform 421. The lower slide rail system 42 drives the sliding platform 421 to move to the area below the casting station 431. The upper slide rail system 41 drives the second casting assembly 411 to move to the area above the casting station 431, passing 1 / n of the wafers through the casting channel 43 from the transfer film. 2. The wafer is poured onto the finished film through the casting opening 6111. The transport mechanism 7 unloads the finished film to the unloading mechanism 8 and transports the separator 611 to the loading and unloading guide rail 62. The loading and unloading clamping assembly 63 drives the separator 611 to unload. The separator lifting rack 221 moves up or down by one unit height. The loading and unloading clamping assembly 63 clamps the upper or lower separator 611 to perform the next 1 / n casting. After n complete castings on the wafer on the transfer film, the transfer film unloading assembly 412 clamps and unloads the transfer film, realizing the wafer splitting and casting.

[0028] Please refer to Figure 1-4 As shown, the ring feeding mechanism 1 includes a ring feeder 11, a ring transport assembly 12, and a ring loading assembly 13. The ring transport assembly 12 includes a ring transport rail 121 and a transport suction cup unit 122 slidably disposed on the ring transport rail 121. The ring loading assembly 13 includes a ring loading rail 131 and a ring platform 132 slidably disposed on the ring loading rail 131. One end of the ring transport rail 121 extends above the ring feeder 11, and the other end of the ring transport rail 121 extends above one end of the ring loading rail 131.

[0029] The transfer film septum feeding mechanism 2 includes a transfer film feeding assembly 21 and a septum feeding assembly 22. The transfer film feeding assembly 21 and the septum feeding assembly 22 are arranged opposite each other on one side of the mother-daughter ring feeding slide rail 131. A transfer frame 23 is provided between the transfer film feeding assembly 21 and the septum feeding assembly 22. The septum feeding assembly 22 outputs septums 223 to the end of the transfer frame 23, and the transfer film feeding assembly 21 outputs transfer film onto the transfer frame 23 to fit against the bottom surface of the septums 223. A front-end transport slide rail 32 is provided above the feeding station 311 and the transfer frame 23. The other end of the mother-daughter ring feeding slide rail 131 extends to the bottom of the front-end transport slide rail 32. A lifting transport assembly 321 is slidably arranged on the front-end transport slide rail 32.

[0030] The wafer-bearing rings are stacked in the ring rack 11. The transport suction unit 122 clamps the wafer-bearing rings and transports them to the ring carrier 132. The ring carrier 132 transports the wafer-bearing rings to the bottom of the front transport slide rail 32. The lifting transport component 321 of the front transport slide rail 32 transports the bonded transfer film and spacer 223 to the loading station 311, and then moves the wafer-bearing rings on the ring carrier 132 onto the spacer 223, completing the loading of the transfer film, spacer 223, and wafer-bearing rings.

[0031] Please refer to Figure 4 As shown, the transport suction cup unit 122 includes a first lifting slide rail 1221 and a suction cup seat 1222 slidably disposed on the first lifting slide rail 1221. The first lifting slide rail 1221 is disposed on the slider of the mother-daughter ring transport slide rail 121. A rotary drive assembly 123 is fixed on the suction cup seat 1222. The drive end of the rotary drive assembly 123 passes through the suction cup seat 1222 and is driven to connect to the first suction cup 1231. A flat-edge detection camera 14 is provided on the side of the mother-daughter ring transport slide rail 121.

[0032] The first lifting slide rail 1221 drives the suction cup seat 1222 to descend, and the first suction cup 1231 picks up or places the mother and daughter rings with wafers. During the loading of the mother and daughter rings, the wafers pass through the flat edge detection camera 14, which detects the flat edge of the wafers and controls the rotation drive component 123 to drive the first suction cup 1231 to rotate, thereby ensuring that the wafer arrangement on each loading mother and daughter ring is the same, improving the consistency of multiple casting processes.

[0033] In this embodiment, the rotary drive assembly 123 includes a rotary motor 1232 and a transmission turntable 1233. The output end of the rotary drive motor is driven to the transmission turntable 1233 via a belt. A drive shaft is provided on the bottom surface of the transmission turntable 1233 and is fixedly connected to the first suction cup 1231, thereby realizing the rotary drive motor to drive the rotation of the first suction cup 1231, and achieving the purpose of adjusting the position of the wafer on the mother and daughter rings.

[0034] Please refer to Figure 1-3 and Figure 5As shown, the partition feeding assembly 22 includes a partition lifting frame 221 and a partition clamping assembly 222. One end of the transfer frame 23 is connected to the outlet of the partition lifting frame 221, and the other end of the transfer frame 23 extends to the bottom of the front transport slide rail 32. The partition clamping assembly 222 includes a partition feeding slide rail 2221 and a first sliding seat 2222 movably disposed on the partition feeding slide rail 2221. The extending direction of the partition feeding slide rail 2221 is the same as the extending direction of the transfer frame 23. The top end of the first sliding seat 2222 extends above the transfer frame 23 and bends towards the middle of the transfer frame 23. The end of the first sliding seat 2222 is provided with a partition gripper 2223. The partition feeding slide rail 2221 drives the first sliding seat 2222 to reciprocate. The partition gripper 2223 picks up the partition 223 in the partition lifting frame 221 and moves it to the end of the transfer frame 23. After a partition 223 is fed, the partition lifting frame 221 rises by one unit height, so that the partition 223 located in the lower layer moves to be flush with the transfer frame 23 for the next partition 223 to be fed.

[0035] Please refer to Figure 1-3 and Figure 6 As shown, the intermediate film feeding assembly 21 includes an intermediate film frame 211, an intermediate film slide rail assembly 212, an intermediate film feeding suction cup 214, and a film cutting frame 215. The intermediate film slide rail assembly 212 includes two parallel intermediate film feeding slide rails 2121, with the sliding surfaces of the intermediate film feeding slide rails 2121 facing both sides. Each sliding surface of the intermediate film feeding slide rail 2121 is provided with a sliding vertical plate 213. The end face of the sliding vertical plate 213 is provided with an intermediate film lifting slide rail 2131, an intermediate film lifting cylinder 2132, and an "L"-shaped frame 2133. The vertical plate of the "L"-shaped frame 2133 is slidably mounted on the intermediate film lifting slide rail, and the bottom of the vertical plate is drivenly connected to the driving end of the intermediate film lifting cylinder. The intermediate film feeding suction cup 214 is mounted on the horizontal plate of the "L"-shaped frame 2133. One end of the transfer film slide rail assembly 212 extends to the bottom of the transfer frame 23, and the transfer film frame 211 is located at the other end of the transfer film slide rail assembly 212. A transfer film roll 216 is rotatably mounted on the transfer film frame 211. The film cutting frame 215 is located above the transfer film slide rail assembly 212 and on the movement path of the transfer film feeding suction cup 214.

[0036] During the transfer film loading process, two transfer film loading suction cups 214 adsorb and pull out the transfer film extending from the transfer film roll 216, with the adhesive side of the transfer film facing upwards. The film cutting frame 215 cuts the transfer film located between the two transfer film loading suction cups 214. The outer transfer film loading suction cup 214 moves to the bottom of the transfer frame 23 under the drive of the transfer film loading slide rail 2121. The transfer film lifting cylinder drives the transfer film loading suction cup 214 upwards until the transfer film on the transfer film loading suction cup 214 adheres to the spacer 233 on the transfer frame 23, completing the transfer film loading. The loaded transfer film moves towards the transfer film frame 211, while the other transfer film loading suction cup 214 rises and exchanges positions with the retracting transfer film loading suction cup 214, repeating the loading process.

[0037] Please refer to Figure 1-3 As shown, in this embodiment, the first casting assembly 315 includes a first casting drive cylinder 3151, with its end facing downwards and connected to a first casting block 3152. During the casting process on the mother-daughter ring, the first casting drive cylinder 3151 drives the first casting block 3152 downwards to press down the film on the mother-daughter ring, casting the wafer onto the transfer film. The mother-daughter ring unloading assembly 316 includes a mother-daughter ring unloading slide rail 3161 and an unloading lifting cylinder 3162 slidably disposed on the mother-daughter ring unloading slide rail 3161. The driving end of the unloading lifting cylinder 3162 faces downwards and is fixed with an unloading gripper 3163. One end of the male and female ring unloading slide rail 3161 extends above the male and female ring unloading station 313, and the other end extends above the male and female ring unloading box. The unloading lifting cylinder 3162 drives the unloading claw 3163 to descend and clamp the male and female rings on the male and female ring unloading station 313, and transport them into the male and female ring unloading box to realize the unloading of the male and female rings.

[0038] Please refer to Figure 1-3 and Figure 7 As shown, the separator flipping assembly 317 includes a flipping lifting slide rail 3171 and a flipping seat 3172 slidably mounted on the flipping lifting slide rail 3171. A flipping motor 3173 is mounted on the flipping seat 3172, and a flipping suction cup 3174 is driven and connected to the drive end of the flipping motor 3173. The flipping suction cup 3174 is located above the separator flipping output station 314. After the material is fed through the mother and daughter rings, the transfer film and separator 223 move to the separator flipping output station 314 under the drive of the rotating platform 31. At this time, the transfer film is on the bottom and the separator 223 is on the top. The flipping lifting slide rail 3171 drives the flipping seat 3172 to move downward, the flipping suction cup 3174 picks up the top surface of the separator 223, and the flipping motor 3173 drives the flipping seat 3172 to flip 180°, so that the transfer film is on the top and the separator 223 is on the bottom, for the separator transfer assembly 44 to transport and feed them.

[0039] In this embodiment, the spacer transfer assembly 44 includes a spacer transfer frame 441 and a transfer plate 444. A transfer lifting motor 442 is fixed on the spacer transfer frame 441. The drive end of the transfer lifting motor 442 passes through the spacer transfer frame 441 and is connected to a rotation drive plate 446. A transfer rotary motor 443 is provided on the rotation drive plate 446, and the drive end of the transfer rotary motor 443 is connected to the transfer plate 444. The transfer lifting motor 442 drives the rotation drive plate 446, the transfer rotary motor 443, and the transfer plate 444 to move vertically. The rotation rotary motor 443 directly drives the transfer plate 444 to rotate. Both ends of the transfer plate 444 extend above the spacer flipping output station 314 and the film pouring station 431, respectively, and are equipped with transfer suction cups 445. The transfer lifting motor 442 drives the transfer plate 444 to descend, and the transfer suction cup 445 adsorbs the transfer film and the spacer 223 on the spacer flipping output station 314. The transfer rotation motor 443 drives the transfer plate 444 to rotate 180°, transferring the transfer film and the spacer 223 to the molding station 431, and adsorbs and unloads the empty spacer 223 after molding, so as to realize the reuse of the spacer 223.

[0040] Please refer to Figure 1-3 and Figure 8 As shown, the upper slide rail system 41 includes a first upper slide rail 413 and a second upper slide rail 414. The second film-turning assembly 411 includes a second film-turning drive cylinder 4111, with the drive end of the second film-turning drive cylinder 4111 facing downwards and connected to a second film-turning block 4112. The second film-turning drive cylinder 4111 is slidably mounted on the first upper slide rail 413 via a film-turning mounting plate. The first upper slide rail 413 drives the second film-turning cylinder to move above the film-turning station 431, performing multiple film-turning operations between the transfer film and the finished film. The transfer film unloading assembly 412 includes an unloading sliding seat 4121, which is slidably connected to the second upper slide rail 414. A clamping and lifting cylinder 4122 is provided at the bottom end of the unloading sliding seat 4121, with the drive end of the clamping and lifting cylinder 4122 facing downwards and equipped with a film-tearing gripper 4123. The film-tearing gripper 4123 is provided with multiple teeth 4124 spaced apart from each other. The spacer 223 is provided with notches 2231 that correspond one-to-one with the teeth 4124. The teeth 4124 of the film-tearing gripper 4123 clamp the transfer film in the notches 2231. The second upper slide rail 414 drives the film-tearing gripper 4123 to move, thereby realizing the film-tearing of the transfer film after all the film-turning is completed.

[0041] Please refer to Figure 1-3 and Figure 9As shown, the sliding rail system 42 includes a first sliding rail 422 and a second sliding rail 423. The extending direction of the first sliding rail 422 is the same as the extending direction of the transport mechanism 7. The second sliding rail 423 is slidably disposed on the first sliding rail 422, and the extending direction of the second sliding rail 423 is perpendicular to the extending direction of the first sliding rail 422. The sliding platform 421 is slidably disposed on the second sliding rail 423. During the feeding process of the separator 611 and the finished film, the second sliding rail 423 moves along the first sliding rail 422 to below the end of the transport mechanism 7, allowing the transport mechanism 7 to place the finished film and the separator 611 on the sliding platform 421. After the finished film and separator 611 are loaded, the second sliding rail 423 moves along the first sliding rail 422 to a position below the casting station 431, and the sliding stage 421 moves along the second sliding rail 423 to a position directly below the casting station 431. At this time, the transfer film, separator 223, separator 611, and finished film are stacked sequentially from top to bottom, completing the preparatory steps for multiple castings. The second casting drive cylinder 4111 moves to a position above the casting station 431 and drives the second casting block 4112 downward to perform casting on the wafer between the transfer film and the finished film. The wafer passes through the casting opening 6111 of the separator 611 and is bonded to the finished film, completing 1 / n castings. Subsequently, the second sliding rail 423 moves along the first sliding rail 422 to a position below the end of the transport mechanism 7, and the sliding stage 421 carries the finished film and separator 611 that have completed casting to a position below the end of the transport mechanism 7 for unloading.

[0042] In this embodiment, a first positioning cylinder 433 and a second positioning cylinder 434 are provided on the casting stage 43. The first positioning cylinder 433 and the second positioning cylinder 434 are located on the side of the casting channel 432. The driving ends of the first positioning cylinder 433 and the second positioning cylinder 434 are both facing the casting channel 432 and are provided with a positioning block 435. A positioning notch 4351 is provided on the positioning block 435, and the positioning notch 4351 corresponds to the end position of the partition 223. The first positioning cylinder 433 and the second positioning cylinder 434 drive the positioning block 435 forward to abut against the partition 223 located on the casting station 431. The end of the partition 223 is embedded in the positioning notch 4351 to ensure the accuracy of the position of the partition 223 and the transfer film. A pressing cylinder 46 is provided on the side of the casting stage 43. A pressing plate 461 is provided on the driving end of the pressing cylinder 46. The pressing plate 461 is arranged opposite to the first positioning cylinder 433 and the second positioning cylinder 434. The plate 461 is pressed down on the partition 223 on the other side to limit the partition 223 in multiple directions, thereby further improving the stability of the partition 223 in the casting position.

[0043] Please refer to Figure 1-3 and Figure 10As shown, the separator lifting rack 221 includes a rack 612 and a lifting base 613. n separators 611 are stacked vertically within the rack 612. The lifting base 613 drives the rack 612 to rise or fall by one unit height. In this embodiment, one unit height refers to the vertical distance between the top surfaces of adjacent separators, ensuring that after each lifting operation, one separator is in a clampable state. The loading / unloading clamp assembly 63 includes a separator 611 loading / unloading slide rail 822 and a second sliding seat 633 movably mounted on the separator 611 loading / unloading slide rail 822. The extending direction of the separator 611 loading / unloading slide rail 822 is the same as the extending direction of the loading / unloading guide rail 62. The top end of the second sliding seat 633 extends above the loading / unloading guide rail 62 and bends towards the middle of the loading / unloading guide rail 62. The separator 611 grippers are located at the end of the second sliding seat 633. The separator 611 grippers grasp the separator 611 within the material rack 612, driving the separator 611 to the end of the loading / unloading guide rail 62 for loading by the transport mechanism 7. Simultaneously, after the molding process is completed, the transport mechanism 7 transports the separator 611 to the end of the loading / unloading guide rail 62, where the separator 611 grippers hold it and drive it back to the material rack 612. Furthermore, the loading / unloading guide rail 62 is provided with a clearance notch 621, which coincides with the movement path of the separator 611 grippers. The clearance notch 621 allows the separator 611 grippers to move, ensuring they can conform to the loading / unloading guide rail 62, driving the separator 611 for loading or unloading.

[0044] In this embodiment, a detection auxiliary platform 64 is provided below the loading and unloading guide rail 62, and the detection auxiliary platform 64 is located below the movement path of the casting opening 6111 of the separator 611. A separator detection camera 65 is provided above the loading and unloading guide rail 62, and the separator detection camera 65 is located above the detection auxiliary platform 64 and the movement path of the casting opening 6111 of the separator 611. The detection auxiliary platform 64 and the separator detection camera 65 constitute the detection component of the separator 611. When the separator 611 moves to the area below the separator detection camera 65, the detection auxiliary platform 64 blocks the bottom part of the casting opening 6111 to ensure that the separator detection camera 65 accurately identifies the contour of the casting opening 6111, thereby ensuring that the separator 611 is correctly loaded in each loading process and improving the accuracy of multiple casting processes.

[0045] Please refer to Figure 1-3 and Figure 11As shown, specifically, the transport mechanism 7 includes a first transport slide rail 71, a second transport slide rail 72, and a third transport slide rail 73 arranged sequentially from top to bottom; one end of the first transport slide rail 71 extends above the lower slide rail system 42, the other end of the first transport slide rail 71 extends above one end of the third transport slide rail 73, and the other end of the third transport slide rail 73 extends into the unloading mechanism 8; one end of the second transport slide rail 72 extends to the end of the loading and unloading guide rail 62, and the other end of the second transport slide rail 72 extends to the side of the loading and unloading guide rail 62. A transport suction cup assembly 74 is slidably arranged on the first transport slide rail 71, and a pressing assembly 75 is arranged on the transport suction cup assembly 74, with the pressing end of the pressing assembly 75 offset from the film pouring opening 6111; a displacement suction cup assembly 76 is slidably arranged on the second transport slide rail 72, with the suction end face 765 of the displacement suction cup assembly 76 extending below the first transport slide rail 71; and a finished film transport assembly 77 is slidably arranged on the third transport slide rail 73.

[0046] During the feeding process of the separator 611 and the finished film, the separator 611 is gripped by the gripper and moved to the end of the loading / unloading guide rail 62, that is, below the first transport slide rail 71. The transfer suction cup assembly 76 picks up the separator 611 and moves it to the side of the loading / unloading guide rail 62. After the finished film feeding mechanism 5 outputs the finished film to the end of the loading / unloading guide rail 62, the transfer suction cup assembly 76 sends the separator 611 back to the end of the loading / unloading guide rail 62 to be bonded to the finished film. After the transport suction cup assembly 74 picks up the bonded separator 611 and the finished film, it transports them to the sliding platform 421 of the slide rail system 42 for film transfer between the intermediate film and the finished film. In this embodiment, the structure and method of the finished film feeding mechanism 5 are the same as those of the intermediate film feeding assembly 21, and will not be described in detail here.

[0047] After the finished film is poured, the transport suction cup assembly 74 picks up the separator 611 and the finished film on the sliding platform 421 and transports them to the end of the third transport slide rail 73. The finished film transport assembly 77 moves to the end of the third transport slide rail 73 and is positioned below the transport suction cup assembly 74, ready to receive the finished film. The pressing end of the pressing assembly 75 presses down, applying a pushing force towards the finished film transport assembly 77 to separate it from the separator 611. The finished film transport assembly 77 carries the finished film separated from the separator 611 and transports it to the unloading mechanism 8 for release paper unloading. The separated separator 611 is then transported by the transport suction cup assembly 74 to the end of the loading and unloading guide rail 62, where the separator 611 grippers push it out.

[0048] Furthermore, a splitting platform 78 is provided at one end of the third transport slide rail 73. The splitting platform 78 has a placement position 781 with a splitting channel. The splitting platform 78 supports the separator 611 and the transfer film, maintaining the stability of the separator 611 during the separation process from the finished film, and ensuring that the finished film can be accurately split onto the finished film transport assembly 77.

[0049] Specifically, the transport suction cup assembly 74 includes an upper plate 741, a middle plate 742, and a suction transport plate 743. The upper plate 741 is connected to the slider of the first transport slide rail 71. The bottom surface of the upper plate 741 is provided with a transport lifting motor 7411 and a downwardly extending first guide rod 7412. The drive end of the transport lifting motor 7411 is connected to the middle plate 742, and the first guide rod 7412 is inserted into the middle plate 742. A vertical rod 744 is connected between the middle plate 742 and the suction transport plate 743. The bottom surface of the suction transport plate 743 is provided with a transport suction nozzle 7431. The pressing assembly 75 includes a pressing motor 751. The top end of the pressing motor 751 is fixed to the bottom surface of the middle plate 742. The drive end of the pressing motor 751 is set downward and drives the pressing plate 752. The bottom surface of the pressing plate 752 is provided with downwardly extending pressing rods 753 around its perimeter. Furthermore, a pressing channel 6112 is provided on the separator 611, and the pressing channel 6112 is located around the film pouring opening 6111. The pressing rod 753 corresponds one-to-one with the pressing channel 6112. A second guide rod 7421 extending downward is provided on the bottom surface of the middle plate 742, and the second guide rod 7421 passes through the pressing plate 752. The transport lifting motor 7411 drives the middle plate 742 and the suction transport plate 743 to descend and pick up and place the separator 223. Meanwhile, the pressing assembly 75 located between the middle plate 742 and the suction transport plate 743 drives the pressing plate 752 to descend through the pressing motor 751, thereby causing the end of the pressing rod 753 to pass through the pressing channel 6112 and press down on the edge of the finished film, separating it from the separator 611.

[0050] Specifically, the transfer suction cup assembly 76 includes a vertically arranged transfer plate 761, which is slidably mounted on a second transport rail 72, located below the first transport rail 71. A transfer lifting motor 762 and a vertically arranged transfer rail 763 are arranged on the outer surface of the transfer plate 761. A transfer seat 764 is slidably mounted on the transfer rail 763, and the drive end of the transfer lifting motor 762 is connected to the top of the transfer seat 764. A suction end face 765 is located at the bottom of the transfer seat 764 and extends below the first transport rail 71. A transfer suction cup 766 is arranged on the suction end face 765. The transfer plate 761 drives the transfer seat 764 to switch positions at the end and one side of the loading / unloading guide rail 62. The transfer lifting motor 762 drives the transfer end face downwards to suction, transfer, and place the separator 611.

[0051] Specifically, the finished film transport assembly 77 includes a transport seat 771 slidably mounted on a third transport slide rail 73. A placement lifting motor 772 is mounted on the transport seat 771, with its drive end passing through the transport seat 771 and connected to a placement plate 773. A third guide rod 774 is provided on the bottom surface of the placement plate 773, passing through the transport seat 771. The placement lifting motor 772 drives the placement plate 773 upwards, reducing the height difference between the placement plate 773 and the splitting table 78, ensuring the finished film can accurately fall onto the placement plate 773. The third transport slide rail 73 then drives the transport seat 771 to the unloading mechanism 8 for release paper unloading.

[0052] Please refer to Figure 1-3 As shown, specifically, the feeding mechanism 8 includes a release paper feeding assembly 81 and a feeding assembly 82 arranged opposite to each other, with the other end of the third transport slide rail 73 located between the release paper feeding assembly 81 and the feeding assembly 82. The feeding mechanism 8 includes a film-applying transport slide rail 821, a feeding slide rail 822, and a distributing slide rail 823. One end of the film-applying transport slide rail 821 extends above the end of the release paper feeding assembly 81, the other end of the film-applying transport slide rail 821 extends to one end of the feeding slide rail 822, and the other end of the feeding slide rail 822 extends below one end of the distributing slide rail 823. In this embodiment, the structure of the release paper feeding assembly 81 is the same as that of the intermediate film feeding assembly 21, and will not be described in detail here.

[0053] A film-applying top plate 8211 is slidably mounted on a film-applying transport slide rail 821. A film-applying lifting cylinder 8212 and a downwardly extending fourth guide rod 8213 are fixed on the bottom surface of the film-applying top plate 8211. The driving end of the film-applying lifting cylinder 8212 is downwardly positioned and drives a film-applying frame 8214. A film-applying suction cup 8215 is mounted on the bottom surface of the film-applying frame 8214. The fourth guide rod 8213 passes through the film-applying frame 8214. A material unloading platform 8221 is slidably mounted on a material unloading slide rail 822. A material distribution frame 8231 is slidably mounted on a material distribution slide rail 823. A material distribution lifting cylinder 8232 is fixed on the material distribution frame 8231. The driving end of the material distribution lifting cylinder 8232 faces downward and drives an adjusting seat 8233. An adjustment rotary motor 8234 and an adjustment shaft 8235 are fixed on the adjustment base 8233. The adjustment rotary motor 8234 and the adjustment shaft 8235 are connected by a belt. The end of the adjustment shaft 8235 passes through the adjustment frame and is connected to an adjustment suction cup 8236. A feeding rack 8237 is arranged below the feeding slide rail 823.

[0054] The film-coating transport slide rail 821 drives the film-coating top plate 8211 to move above the end of the release paper feeding assembly 81. The film-coating lifting cylinder 8212 drives the film-coating frame 8214 to descend and pick up the release paper at the end of the release paper feeding assembly 81, and transport it above the placement plate 773 to be bonded to the finished film. The bonded finished film and release paper are transported to the unloading platform 8221 via the film-coating transport slide rail 821. The unloading platform 8221 moves the finished film and release paper, and a vision camera is set on the path of the unloading slide rail 822 to count the release paper and finished film, and to acquire the wafer alignment direction. The unloading platform 8221 moves the release paper and finished film to one end of the distribution slide rail 823. The adjusting suction cup 8236 picks up the finished film and release paper. According to the wafer arrangement direction, the adjusting suction cup 8236 is driven to rotate by the adjusting rotary motor 8234 and the adjusting shaft 8235 to ensure that the wafer arrangement direction is the same for each unloaded finished film and release paper. The distribution slide rail 823 drives the adjusting suction cup 8236 to move above the unloading rack 8237 to unload the finished film and release paper.

[0055] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A multi-part automatic film casting machine, characterized in that, This includes a mother-daughter ring feeding mechanism, a transfer film separator feeding mechanism, a transfer film pouring mechanism, a multiple film pouring mechanism, a finished film feeding mechanism, a separator loading and unloading mechanism, a transportation mechanism, and a feeding mechanism; The intermediate film-casting mechanism includes a rotating platform, on which a loading station, an intermediate film-casting station, a mother-and-daughter ring unloading station, and a spacer flipping output station are sequentially arranged. The rotating platform is equipped with a first film-casting assembly, a mother-and-daughter ring unloading assembly, and a spacer flipping assembly located at the intermediate film-casting station, the mother-and-daughter ring unloading station, and the spacer flipping output station, respectively. The ends of the intermediate film spacer loading mechanism and the mother-and-daughter ring loading mechanism are respectively opposite to the loading station. The multi-stage film-casting mechanism includes an upper slide rail system, a lower slide rail system, and a film-casting platform disposed between the upper slide rail system and the lower slide rail system. The film-casting platform is provided with a film-casting station, the film-casting station is provided with a film-casting channel, and a spacer transfer assembly is provided between the spacer flipping and output station. A second film-casting assembly and a transfer film feeding assembly are slidably disposed on the upper slide rail system, and a sliding platform is provided on the lower slide rail system. The transport mechanism connects the sliding rail system and the unloading mechanism. The finished film loading mechanism and the separator loading / unloading mechanism are located on both sides of the transport mechanism. The separator loading / unloading mechanism includes a separator lifting rack, a loading / unloading guide rail, and a loading / unloading clamping assembly. n separators are stacked inside the separator lifting rack. The separators have inverted film openings, and the inverted film openings of the n separators correspond to 1 / n of the wafer arrangement range. One end of the loading / unloading guide rail is connected to the outlet of the separator lifting rack, and the other end of the loading / unloading guide rail extends to the bottom of the transport mechanism. The separator grippers of the loading / unloading clamping assembly hold the separators and reciprocate on the loading / unloading guide rail. The end of the finished film loading mechanism corresponds to the end of the loading / unloading guide rail.

2. The multi-part automatic film casting machine according to claim 1, characterized in that: The mother-daughter ring feeding mechanism includes a mother-daughter ring material rack, a mother-daughter ring transport assembly, and a mother-daughter ring feeding assembly. The mother-daughter ring transport assembly includes a mother-daughter ring transport slide rail and a transport suction cup unit slidably disposed on the mother-daughter ring transport slide rail. The mother-daughter ring feeding assembly includes a mother-daughter ring feeding slide rail and a mother-daughter ring carrier slidably disposed on the mother-daughter ring feeding slide rail. One end of the mother-daughter ring transport slide rail extends above the mother-daughter ring material rack, and the other end of the mother-daughter ring transport slide rail extends above one end of the mother-daughter ring feeding slide rail. The transfer membrane septum feeding mechanism includes a transfer membrane feeding assembly and a septum feeding assembly. The transfer membrane feeding assembly and the septum feeding assembly are arranged opposite each other on one side of the mother-daughter ring feeding slide rail. A transfer frame is provided between the transfer membrane feeding assembly and the septum feeding assembly. The transfer membrane feeding assembly outputs the transfer membrane to the transfer frame, and the septum feeding assembly outputs septums to the transfer membrane on the transfer frame. A front-end transport slide rail is provided above the loading station and the transfer frame. The other end of the mother-daughter ring loading slide rail extends to the bottom of the front-end transport slide rail. A lifting transport component is slidably mounted on the front-end transport slide rail.

3. The one-to-many automatic film casting machine according to claim 2, characterized in that: The transport suction cup unit includes a first lifting slide rail and a suction cup seat slidably disposed on the first lifting slide rail. The first lifting slide rail is disposed on the slider of the mother-daughter ring transport slide rail. A rotary drive assembly is fixed on the suction cup base. The drive end of the rotary drive assembly passes through the suction cup base and is connected to the first suction cup. The side of the mother-daughter ring transport slide rail is equipped with a flat-edge detection camera.

4. The one-to-many automatic film casting machine according to claim 2, characterized in that: The partition feeding assembly includes a partition lifting frame and a partition clamping assembly. One end of the transfer frame is connected to the outlet of the partition lifting frame, and the other end of the transfer frame extends to the bottom of the front transport slide rail. The partition clamping assembly includes a partition feeding slide rail and a first sliding seat movably disposed on the partition feeding slide rail. The extension direction of the partition feeding slide rail is the same as the extension direction of the transfer frame. The top end of the first sliding seat extends above the transfer frame and bends towards the middle of the transfer frame. The end of the first sliding seat is provided with a partition clamping claw.

5. The multi-part automatic film casting machine according to claim 1, characterized in that: The partition flipping assembly includes a flipping lifting slide rail and a flipping seat slidably disposed on the flipping lifting slide rail. A flipping motor is disposed on the flipping seat, and a flipping suction cup is driven and connected to the drive end of the flipping motor. The flipping suction cup is located above the partition flipping output station.

6. The multi-part automatic film casting machine according to claim 1, characterized in that: The casting platform is equipped with a first positioning cylinder and a second positioning cylinder. The first positioning cylinder and the second positioning cylinder are located on the side of the casting channel. The driving ends of the first positioning cylinder and the second positioning cylinder are both facing the casting channel and are equipped with positioning blocks. The positioning blocks have positioning notches, which correspond to the end positions of the spacers.

7. The multi-part automatic film casting machine according to claim 1, characterized in that: The loading and unloading guide rails are provided with clearance notches, which coincide with the movement path of the separator gripper.

8. The multi-part automatic film casting machine according to claim 1, characterized in that: The transport mechanism includes a first transport slide rail, a second transport slide rail, and a third transport slide rail arranged sequentially from top to bottom; one end of the first transport slide rail extends above the lower slide rail system, the other end of the first transport slide rail extends above one end of the third transport slide rail, and the other end of the third transport slide rail extends into the unloading mechanism; one end of the second transport slide rail extends to the end of the loading and unloading guide rail, and the other end of the second transport slide rail extends to the side of the loading and unloading guide rail; A transport suction cup assembly is slidably mounted on the first transport slide rail, and a pressing component is mounted on the transport suction cup assembly. The pressing end of the pressing component is offset from the film pouring opening. A displacement suction cup assembly is slidably mounted on the second transport slide rail. A finished film transport assembly is slidably mounted on the third transport slide rail.

9. The one-to-many automatic film casting machine according to claim 8, characterized in that: A splitting platform is provided at one end of the third transport slide rail, and a placement position is provided on the splitting platform, with a splitting channel opened on the placement position.

10. The one-to-many automatic film casting machine according to claim 8, characterized in that: The transport suction cup assembly includes an upper plate, a middle plate, and a suction transport plate; The upper plate is connected to the slider of the first transport slide rail. The bottom surface of the upper plate is provided with a transport lifting motor and a downwardly extending first guide rod. The drive end of the transport lifting motor is connected to the middle plate, and the first guide rod is inserted into the middle plate. A vertical rod is connected between the middle plate and the suction transport plate. The bottom surface of the suction transport plate is provided with a transport suction nozzle. The pressing assembly includes a pressing motor, the top of which is fixed to the bottom surface of the middle plate. The driving end of the pressing motor is set downward and drives the pressing plate. The bottom surface of the pressing plate is provided with downwardly extending pressing rods around its perimeter. The bottom surface of the middle plate is provided with a downwardly extending second guide rod, which passes through the pressing plate.

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