A method of processing a DLC film

Abstract

The application discloses a processing method of a DLC film, which comprises the following steps: firstly, coating a metal oxide on the surface of the DLC film; and secondly, irradiating the surface of the DLC film by using a laser, so that the diamond structure on the surface of the DLC film is changed into a graphite structure. By forming the graphite network structure on the surface of the DLC film, the residual stress generated in the forming process of the DLC film can be effectively released, so that the problem that the DLC film is easily peeled off due to brittle fracture can be avoided.

Description

Technical Field

[0001] This invention relates to the field of membrane modification technology, and more particularly to a method for processing DLC ​​membranes. Background Technology

[0002] DLC (Diamond-Like Carbon) films are gaining increasing attention and application due to their high coating hardness and low coefficient of friction. However, in the actual DLC film deposition process, as the thickness of the DLC film increases, the accumulated residual stress also increases, which can cause the DLC film to become brittle and prone to peeling. Summary of the Invention

[0003] The purpose of this invention is to provide a method for processing DLC ​​films. By forming a graphite mesh structure on the surface of the DLC film, the residual stress generated during the formation of the DLC film can be effectively released, thereby avoiding the problem of the DLC film becoming brittle and easily peeling off.

[0004] To achieve the above objectives, embodiments of the present invention provide a method for processing DLC ​​films, comprising:

[0005] Metal oxides are coated on the surface of the DLC film;

[0006] The surface of the DLC film is irradiated with a laser to transform the diamond structure on the DLC film surface into a graphite structure.

[0007] Furthermore, the thickness of the DLC film is no greater than 20 μm.

[0008] Furthermore, the metal oxide is at least an oxide of one of the metals selected from iron, nickel, and zinc.

[0009] Furthermore, the method of irradiating the surface of the DLC film with a laser specifically includes:

[0010] In an environment where the protective gas is helium, the surface of the DLC film is heated to 500-800°C by irradiating it with a laser.

[0011] Furthermore, the flow rate of the helium gas is 45 L / min.

[0012] Furthermore, the heating parameters of the laser include: laser power of 5-8kW, spot diameter of 1-1.5mm, defocusing amount of 1-8mm, and heating rate of 10-25mm / s.

[0013] Compared with existing technologies, this invention provides a method for processing DLC ​​films. First, a metal oxide is coated onto the surface of the DLC film; then, a laser is used to irradiate the surface of the DLC film, transforming the diamond structure on the surface into a graphite structure. By forming a graphite mesh structure on the surface of the DLC film, this invention effectively releases the residual stress generated during the film's formation process, thereby preventing the DLC film from becoming brittle and easily peeling off. Attached Figure Description

[0014] Figure 1 This is a flowchart of a preferred embodiment of a DLC film processing method provided by the present invention. Detailed Implementation

[0015] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0016] This invention provides a method for processing DLC ​​films, see [link to relevant documentation]. Figure 1 The diagram shown is a flowchart of a preferred embodiment of a DLC film processing method provided by the present invention, the method comprising steps S11 to S12:

[0017] Step S11: Coat the surface of the DLC film with a metal oxide;

[0018] Step S12: Use a laser to irradiate the surface of the DLC film to transform the diamond structure on the surface of the DLC film into a graphite structure.

[0019] In practice, metal oxides are first coated on the surface of the DLC film to accelerate the graphitization of the DLC film; then, the surface of the DLC film is irradiated with a laser to transform at least a portion of the diamond structure on the surface of the DLC film into a graphite structure.

[0020] It should be noted that laser irradiation will form a three-dimensional graphite mesh structure on the surface of the DLC film. The shape of each mesh in the graphite mesh structure can be various shapes such as circles, triangles or rhombuses, and the spacing between two adjacent meshes is generally greater than the width (or diameter) of a single mesh itself.

[0021] It should be noted that DLC film itself is a diamond structure. After its surface is graphitized by laser irradiation, the graphite structure becomes softer than the diamond structure. Therefore, the DLC film after laser irradiation treatment has toughness, which can effectively alleviate the residual stress generated during the formation of DLC film, thereby effectively preventing DLC ​​film from becoming brittle and easy to peel off.

[0022] In one alternative embodiment, the thickness of the DLC film is no greater than 20 μm.

[0023] Specifically, in conjunction with the above embodiments, the DLC film being processed in the embodiments of the present invention can be a DLC film coating deposited on a metal surface, and the thickness of the DLC film is not greater than 20 μm.

[0024] In one alternative embodiment, the metal oxide is at least an oxide of one of the metals selected from iron, nickel, and zinc.

[0025] Specifically, in conjunction with the above embodiments, the metal oxide coated on the surface of the DLC film in the embodiments of the present invention can be an oxide of metals such as iron, nickel, or zinc.

[0026] In one optional embodiment, the laser irradiation of the surface of the DLC film specifically involves:

[0027] In an environment where the protective gas is helium, the surface of the DLC film is heated to 500-800°C by irradiating it with a laser.

[0028] Specifically, in conjunction with the above embodiments, when using a laser to irradiate the surface of a DLC film, the present invention can use a laser to irradiate the surface of the DLC film in an environment where the protective gas is helium, so as to heat the temperature of the DLC film surface to 500°C to 800°C, thereby causing at least a portion of the diamond structure on the surface of the DLC film to be transformed into a graphite structure.

[0029] For example, the surface temperature of the DLC film can be 500℃, 510℃, 520℃, 530℃, 540℃, 550℃, 560℃, 570℃, 580℃, 590℃, 600℃, 610℃, 620℃, 630℃, 640℃, 650℃, 660℃, 670℃, 680℃, 690℃, 700℃, 710℃, 720℃, 730℃, 740℃, 750℃, 760℃, 770℃, 780℃, 790℃, or 800℃, and can also be set according to actual needs. This embodiment of the invention does not impose specific limitations.

[0030] In one alternative embodiment, the helium gas flow rate is 45 L / min.

[0031] Specifically, in conjunction with the above embodiments, when the surface of the DLC film is irradiated with a laser, the flow rate of the helium gas used is 45 L / min. That is, in an environment where the protective gas is helium and the flow rate of the helium gas is 45 L / min, the surface of the DLC film is irradiated with a laser to heat the temperature of the DLC film surface to 500°C to 800°C, thereby causing at least a portion of the diamond structure on the surface of the DLC film to be transformed into a graphite structure.

[0032] In one optional embodiment, the heating parameters of the laser include: laser power of 5-8kW, spot diameter of 1-1.5mm, defocusing amount of 1-8mm, and heating rate of 10-25mm / s.

[0033] Specifically, in conjunction with the above embodiments, when using a laser to irradiate the surface of a DLC film, the heating parameters of the laser used in this embodiment include: a laser power of 5kW to 8kW, a spot diameter of 1mm to 1.5mm, a defocusing amount of 1mm to 8mm, and a heating rate of 10mm / s to 25mm / s. That is, under the protective gas of helium and a helium gas flow rate of 45L / min, and under the heating parameters of 5kW to 8kW laser power, 1mm to 1.5mm spot diameter, 1mm to 8mm defocusing amount, and 10mm / s to 25mm / s heating rate, the surface of the DLC film is irradiated with a laser to heat the surface temperature of the DLC film to 500℃ to 800℃, thereby causing at least a portion of the diamond structure on the surface of the DLC film to transform into a graphite structure.

[0034] For example, the laser power can be 5kW, 5.1kW, 5.2kW, 5.3kW, 5.4kW, 5.5kW, 5.6kW, 5.7kW, 5.8kW, 5.9kW, 6kW, 6.1kW, 6.2kW, 6.3kW, 6.4kW, 6.5kW, 6.6kW, 6.7kW, 6.8kW, 6.9kW, 7kW, 7.1kW, 7.2kW, 7.3kW, 7.4kW, 7.5kW, 7.6kW, 7.7kW, 7.8kW, 7.9kW, or 8kW, and can also be set according to actual needs. This embodiment of the invention does not impose specific limitations.

[0035] For example, the value of the spot diameter can be 1mm, 1.1mm, 1.2mm, 1.3mm, 1.4mm or 1.5mm, and can also be set according to actual needs. This embodiment of the invention does not make specific limitations.

[0036] For example, the defocus amount can be 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm or 8mm, and can also be set according to actual needs. This embodiment of the invention does not make specific limitations.

[0037] For example, the heating rate can be 10mm / s, 11mm / s, 12mm / s, 13mm / s, 14mm / s, 15mm / s, 16mm / s, 17mm / s, 18mm / s, 19mm / s, 20mm / s, 21mm / s, 22mm / s, 23mm / s, 24mm / s or 25mm / s, and can also be set according to actual needs. This embodiment of the invention does not impose specific limitations.

[0038] In conjunction with all the above embodiments, the implementation process of this solution is described below through the first specific embodiment, including: (1) providing a metal with a DLC film coating on its surface, and the thickness of the DLC film on the surface of the metal is not greater than 20 μm; (2) coating the surface of the DLC film with a metal oxide, wherein the metal oxide is at least an oxide of one of the metals selected from iron, nickel, and zinc, so as to accelerate the graphitization speed of the DLC film; (3) under the environment of helium as the protective gas and the gas flow rate of helium being 45 L / min, under the heating parameters of laser power being 5 kW, spot diameter being 1 mm, defocusing amount being 1 mm, and heating rate being 10 mm / s, irradiating the surface of the DLC film with a laser to heat the temperature of the DLC film surface to 500°C, thereby causing at least a portion of the diamond structure on the surface of the DLC film to be transformed into a graphite structure.

[0039] Based on all the above embodiments, the implementation process of this solution is described below through a second specific embodiment, including: (1) providing a metal with a DLC film coating on its surface, wherein the thickness of the DLC film on the metal surface is not greater than 20 μm; (2) coating the surface of the DLC film with a metal oxide, wherein the metal oxide is at least an oxide of one of the metals selected from iron, nickel, and zinc, so as to accelerate the graphitization speed of the DLC film; (3) under the environment of helium as the protective gas and the helium gas flow rate being 45 L / min, and under the heating parameters of laser power being 6.5 kW, spot diameter being 1.2 mm, defocusing amount being 4 mm, and heating rate being 18 mm / s, irradiating the surface of the DLC film with a laser to heat the surface temperature of the DLC film to 650 °C, thereby causing at least a portion of the diamond structure on the surface of the DLC film to be transformed into a graphite structure.

[0040] In conjunction with all the above embodiments, the implementation process of this solution is described below through a third specific embodiment, including: (1) providing a metal with a DLC film coating on its surface, wherein the thickness of the DLC film on the metal surface is not greater than 20 μm; (2) coating the surface of the DLC film with a metal oxide, wherein the metal oxide is at least an oxide of one of the metals selected from iron, nickel, and zinc, so as to accelerate the graphitization speed of the DLC film; (3) under the environment of helium as the protective gas and the helium gas flow rate being 45 L / min, under the heating parameters of laser power being 8 kW, spot diameter being 1.5 mm, defocusing amount being 8 mm, and heating rate being 25 mm / s, irradiating the surface of the DLC film with a laser to heat the surface temperature of the DLC film to 800 °C, thereby causing at least a portion of the diamond structure on the surface of the DLC film to be transformed into a graphite structure.

[0041] In summary, the DLC film processing method provided by this invention involves first coating the surface of the DLC film with a metal oxide; then irradiating the surface of the DLC film with a laser to transform the diamond structure on the surface of the DLC film into a graphite structure. By forming a graphite mesh structure on the surface of the DLC film, this invention effectively releases the residual stress generated during the formation of the DLC film, thereby avoiding the problem of the DLC film becoming brittle and easily peeling off.

[0042] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for processing a DLC film, characterized in that, include: Metal oxides are coated on the surface of the DLC film; The surface of the DLC film is irradiated with a laser to transform the diamond structure on the DLC film surface into a graphite structure.

2. The method for processing DLC ​​films as described in claim 1, characterized in that, The thickness of the DLC film is no greater than 20 μm.

3. The method for processing DLC ​​films as described in claim 1, characterized in that, The metal oxide is at least an oxide of one of the following metals: iron, nickel, and zinc.

4. The method for processing DLC ​​films as described in claim 1, characterized in that, The method of irradiating the surface of the DLC film with a laser specifically involves: In an environment where the protective gas is helium, the surface of the DLC film is heated to 500-800°C by irradiating it with a laser.

5. The method for processing DLC ​​films as described in claim 4, characterized in that, The flow rate of the helium gas is 45 L / min.

6. The method for processing DLC ​​films as described in claim 4, characterized in that, The heating parameters of the laser include: laser power of 5-8kW, spot diameter of 1-1.5mm, defocusing amount of 1-8mm, and heating rate of 10-25mm / s.

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