A micropore detection assembly and method
By exciting the organic materials on the sidewalls and bottom of the micropores with an excitation light source to generate fluorescence, and using a dichroic mirror and a light converging device to focus the fluorescence signal, a clear image of the micropore is generated. This solves the problems of unclear images and difficulty in identifying residues in the detection of micropores with high aspect ratios, and improves the detection efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUZHOU XINGMU SEMICONDUCTOR CO LTD
- Filing Date
- 2026-02-28
- Publication Date
- 2026-05-29
AI Technical Summary
Existing technologies struggle to obtain clear images when detecting micropores with high aspect ratios, resulting in low detection efficiency and difficulty in identifying residues within the micropores.
An excitation light source is used to excite the organic material on the sidewalls and bottom of the micropores to generate fluorescence. A dichroic mirror and a light converging device are used to focus the fluorescence signal. A clear image of the micropores is generated by an image sensor, and a filter is used to improve the signal-to-noise ratio.
It achieves efficient simultaneous acquisition of clear images of the top and bottom of the micropores, significantly improving detection efficiency and enabling clear identification of residues within the micropores.
Smart Images
Figure CN122108940A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical measurement, and in particular to a micropore detection component and method. Background Technology
[0002] Semiconductor device packaging substrates and circuits on different layers of circuit boards are electrically connected through metallized microvias (with apertures less than 100μm). As semiconductor technology develops, circuits are becoming increasingly fine, and the requirements for microvias are becoming increasingly stringent.
[0003] After the microvias are fabricated, their aperture, bottom condition, and any residue inside need to be precisely inspected to ensure the quality of the subsequent copper filling process and the conductivity reliability of the product. Currently, microvia inspection involves projecting structured light from different angles into the microvia, and using a coaxial lens and photosensitive components to receive the reflected light to obtain an image of the microvia, which is then used for inspection.
[0004] However, when the aspect ratio (depth / diameter) of the micropore is relatively large (greater than or equal to 1.1), the following problems arise during the detection process. First, due to the small diameter and large depth of the micropore, structured light projected from outside the micropore is difficult to reach the bottom at a suitable angle, resulting in extremely weak reflected light from the bottom and thus failing to obtain a clear image, affecting detection. Second, due to the limited depth of field of standard optical lenses, under high aspect ratio conditions, when the focus is on the top opening of the micropore, the bottom of the micropore will inevitably be out of focus and blurred; conversely, the opposite is also true. To obtain clear images of both the top opening and the bottom of the micropore simultaneously, two scans at different focal lengths are usually required, followed by software synthesis, a complex process with low detection efficiency. Third, if there are residual organic materials (such as adhesive residue) on the sidewalls and bottom of the micropore after drilling, they are difficult to identify and detect.
[0005] Therefore, how to solve the above-mentioned technical problems should be a key focus for those skilled in the art. Summary of the Invention
[0006] The purpose of this application is to provide a micropore detection component and method to solve the problems of not being able to obtain clear images, low detection efficiency, and difficulty in identifying residues inside micropores.
[0007] To address the aforementioned technical problems, this application provides a micropore detection component, comprising: A light source that emits excitation light is used to irradiate the micropores of the organic board, causing the organic material on the sidewalls and bottom of the micropores to produce a fluorescent reaction and emit fluorescence; A dichroic mirror positioned opposite the light source is used to reflect the excitation light, causing the excitation light to propagate along the optical axis of the light converging element; and to transmit the fluorescence. The light converging element disposed on the side of the dichroic mirror near the organic substrate is used to converge the excitation light reflected by the dichroic mirror; the converged excitation light is incident perpendicularly onto the micropore; An image sensor located on the side of the dichroic mirror away from the organic substrate is used to receive the fluorescence transmitted through the dichroic mirror and generate an image including the micropores.
[0008] Optionally, it also includes: A first filter is disposed between the light source and the dichroic mirror.
[0009] Optionally, it also includes: A second filter is disposed between the image sensor and the dichroic mirror.
[0010] Optionally, the second filter includes a long-pass filter.
[0011] Optionally, the second filter includes a bandpass filter.
[0012] Optionally, the light source includes an LED light source, a laser light source, or an arc lamp.
[0013] Optionally, it also includes: A display device connected to the image sensor is used to display the image.
[0014] Optionally, it also includes: A control terminal connected to the display device is used to determine the aperture of the micropore based on the image.
[0015] This application also provides a micropore detection method based on the micropore detection component described above, comprising: An excitation light is emitted using a light source, and the excitation light is irradiated onto a dichroic mirror. The dichroic mirror reflects the excitation light, changes the direction of the excitation light, and the reflected excitation light propagates to the light converging element. The light converging element focuses the excitation light, which then irradiates the organic substrate. The focused excitation light is also perpendicularly incident into the micropores of the organic substrate, causing the organic material on the sidewalls and bottom of the micropores to fluoresce and emit fluorescence. The fluorescence passes through the light converging element, then through the dichroic mirror, and enters the image sensor. The image sensor receives fluorescence and generates an image including the micropores based on the fluorescence.
[0016] Optionally, it also includes: The image is displayed using a display device.
[0017] The micropore detection component provided in this application includes a light source, a dichroic mirror, a light converging element, and an image sensor. The excitation light emitted by the light source changes its propagation direction after passing through the dichroic mirror and illuminates the light converging element. The light converging element focuses the excitation light, which then vertically illuminates the micropores of the organic substrate. The organic substrate is made of organic material. The organic material on the sidewalls and bottom of the micropores undergoes a fluorescence reaction under the irradiation of the excitation light, emitting fluorescence. The fluorescence is then received by the image sensor after passing through the light converging element and the dichroic mirror. The image sensor generates an image including the micropores based on the fluorescence signal. In this application, the excitation light excites the material of the organic substrate, causing it to emit fluorescence. This makes the top opening, bottom, and sidewall contours of the micropores clearly visible in the image due to the material's own fluorescence, avoiding the problem of external light sources being unable to illuminate the bottom of the micropores due to obstruction. In the image, the top opening of the micropore is a bright ring, and the bottom is a circle. Clear images of the top and bottom of the micropore can be obtained simultaneously without repeating diagonal views, improving detection efficiency. In addition, when there is residual glue residue inside the micropores, the glue residue will also fluoresce, appearing as irregular bright spots against the dark background of the pores, making it easy to identify.
[0018] In addition, this application also provides a micropore detection method with the above advantages. Attached Figure Description
[0019] To more clearly illustrate the technical solutions of the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the structure of a micropore detection component provided in an embodiment of this application; Figure 2 An image of a micropore provided in an embodiment of this application; Figure 3 Image 2 of a micropore provided in an embodiment of this application; Figure 4 Image 3 of a micropore provided in an embodiment of this application; Figure 5 This is an image of a micropore obtained using a microscope in the prior art; Figure 6 Image four of a micropore provided as an embodiment of this application; Figure 7 Image 5 of a micropore provided in an embodiment of this application; Figure 8Image six of a micropore provided as an embodiment of this application; Figure 9 Image seven of a micropore provided in an embodiment of this application.
[0021] In the diagram: 1. Light source, 2. First filter, 3. Dichroic mirror, 4. Light converging element, 5. Second filter, 6. Image sensor, 7. Organic board, 71. Micropore. Detailed Implementation
[0022] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are merely some embodiments of the present application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0023] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.
[0024] As described in the background section, when detecting micropores, there are problems such as the inability to obtain clear images, low detection efficiency, and difficulty in identifying residues in the micropores when the aspect ratio of the micropores is large.
[0025] In view of this, this application provides a micropore detection component, please refer to... Figure 1 The component may include: The light source 1, which emits excitation light, is used to irradiate the micropores 71 of the organic plate 7, causing the organic material on the sidewalls and bottom of the micropores 71 to produce a fluorescent reaction and emit fluorescence. A dichroic mirror 3, positioned opposite to the light source 1, is used to reflect the excitation light, causing the excitation light to propagate along the optical axis of the light converging element 4; and to transmit the fluorescence. The light converging element 4, located on the side of the dichroic mirror 3 near the organic substrate 7, is used to converge the excitation light reflected by the dichroic mirror 3; the converged excitation light is incident perpendicularly onto the micropore 71; An image sensor 6 is disposed on the side of the dichroic mirror 3 away from the organic substrate 7, for receiving the fluorescence transmitted through the dichroic mirror 3 and generating an image including the micropore 71.
[0026] The light source 1 and the dichroic mirror 3 are set coaxially, and the light converging element 4 and the image sensor 6 are set coaxially.
[0027] In one embodiment of this application, the detection component may further include a motion platform for placing and adjusting the position of the organic substrate 7. The positions of the light source 1, dichroic mirror 3, light converging element 4, and image sensor 6 are fixed. The position of the organic substrate 7 is adjusted by the motion platform so that the excitation light accurately enters the micropore 71 and the fluorescence enters the image sensor 6.
[0028] Micropore 71 refers to pores with a diameter of less than 100μm, and the aspect ratio of micropore 71 can be greater than or equal to 1.1.
[0029] Organic board 7 refers to a board made of organic materials. For example, organic board 7 can be a PI (Polyimide) substrate, an ABF (Ajinomoto Build-up Film) substrate, etc.
[0030] It should be noted that this application does not limit the type of light source 1, but depends on the specific circumstances.
[0031] As one possible implementation, the light source 1 includes an LED (light emitting diode) light source 1, a laser light source 1, or an arc lamp.
[0032] This application does not limit the energy of the excitation light, as long as it can excite the organic substrate 7 to fluoresce. For example, the excitation light can be ultraviolet light with a center wavelength of 365nm.
[0033] The dichroic mirror 3 is characterized by reflecting short-wavelength light and transmitting long-wavelength light. The light converging element 4 can be a high-magnification objective lens used to focus the excitation light. The image sensor 6 can be a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor) sensor, etc., and is not specifically limited in this application.
[0034] When the excitation light emitted from light source 1 reaches dichroic mirror 3, it is reflected, changing its propagation path. It then propagates along the optical axis of light converging element 4, illuminating it. After being converged by light converging element 4, the light is focused onto the surface of the organic substrate 7 and perpendicularly enters the micropore 71. The organic material on the sidewalls and bottom of the micropore 71 is excited to emit longer-wavelength fluorescence (e.g., blue-green fluorescence). The fluorescence, along with the excitation light reflected from the surface of the organic substrate 7 (considered noise), forms a mixed light. This mixed light returns along its original path, passing through light converging element 4 to reach dichroic mirror 3. At this point, the longer-wavelength fluorescence can pass through dichroic mirror 3, while most of the excitation light reflected from the surface of the organic substrate 7 is reflected back to the direction of light source 1, achieving initial separation of signal and noise. Image sensor 6 can then receive and image the fluorescence signal.
[0035] Since the fluorescence is emitted from the inside of the micropore 71, the sidewalls, bottom of the micropore 71, and any residual adhesive residue will appear as bright spots or bright areas in the image, while the pore areas without material will appear as dark areas, forming a high-contrast image.
[0036] like Figure 2 and Figure 3 As shown, the micropores contain adhesive residue, which is clearly visible (the area indicated by the arrow in the figure). Furthermore, the top opening and bottom of the micropores are also clearly visible.
[0037] In this application, the image can also be used to determine whether the micropore is misaligned. The distance between the center of the top opening and the center of the bottom of the micropore is determined from the image, thus determining whether the micropore is skewed. For example... Figure 4 As shown, the micropores are misaligned because the distance between the rings in the dark and bright areas is uneven. If judged using a microscope, as... Figure 5 As shown, the parts indicated by the arrows do not have obvious differences, making it difficult to accurately determine whether the micropores are skewed.
[0038] The micropore 71 detection component provided in this embodiment includes a light source 1, a dichroic mirror 3, a light converging element 4, and an image sensor 6. The excitation light emitted by the light source 1 changes its propagation direction after passing through the dichroic mirror 3 and illuminates the light converging element 4. The light converging element 4 focuses the excitation light, and the focused excitation light vertically illuminates the micropore 71 of the organic substrate 7. The organic substrate 7 is made of organic material. The organic material on the sidewalls and bottom of the micropore 71 undergoes a fluorescence reaction under the irradiation of the excitation light, thereby emitting fluorescence. The fluorescence is then received by the image sensor 6 after passing through the light converging element 4 and the dichroic mirror 3. The image sensor 6 generates an image including the micropore 71 based on the fluorescence signal. In this embodiment, the excitation light excites the material of the organic substrate 7, causing it to emit fluorescence. This makes the top opening, bottom, and sidewall contours of the micropore 71 clearly visible in the image due to the fluorescence of the material itself, avoiding the problem that the external light source 1 cannot illuminate the bottom of the micropore 71 due to obstruction. In the image, the top opening of the micropore 71 is a bright ring, and the bottom is a circle. Clear images of both the top and bottom of the micropore 71 can be obtained simultaneously without repeating diagonal views, improving detection efficiency. In addition, when there is residual adhesive residue inside the micropore 71, the residue will also fluoresce, appearing as irregular bright spots against the dark background of the hole, making it easy to identify.
[0039] Based on the above embodiments, in one embodiment of this application, the micropore 71 detection component may further include: a first filter 2 disposed between the light source 1 and the dichroic mirror 3.
[0040] The first filter 2 is used to select only a specific wavelength of light from the broadband light emitted from the light source 1 to excite the organic board 7 to emit fluorescence.
[0041] Light source 1, first filter 2, and dichroic mirror 3 are arranged coaxially. In this embodiment, by setting the first filter 2, the wavelength of the excitation light can be precisely controlled, which can excite the target fluorescence with maximum efficiency, while minimizing non-specific irradiation of the organic plate 7 (such as heating or excitation of other substances), thereby reducing background noise, improving the signal-to-noise ratio, and enhancing the contrast of the image.
[0042] In one embodiment of this application, the micropore 71 detection component may further include a second filter 5 disposed between the image sensor 6 and the dichroic mirror 3.
[0043] The light converging element 4, the second filter 5, and the image sensor 6 are arranged coaxially.
[0044] The function of the second filter 5 is to filter out the excitation light with a shorter wavelength reflected from the surface of the organic board 7, that is, to filter out noise, and only allow the fluorescence with a longer wavelength to pass through, thereby improving the clarity of the image.
[0045] It should be noted that this application does not limit the type of the second filter 5, and it can be selected at will.
[0046] As one possible implementation, the second filter 5 includes a long-pass filter.
[0047] Long-pass filters have the advantages of high light collection capacity, which can make the image brighter, while also being relatively inexpensive.
[0048] For example, when the excitation light is 365nm ultraviolet light, a long-pass filter with a cutoff wavelength of 420nm can be selected to utilize visible fluorescence imaging above 420nm.
[0049] As another possible implementation, the second filter 5 includes a bandpass filter.
[0050] Bandpass filters allow fluorescence to pass through within a small wavelength range (e.g., 470nm~490nm). By more precisely selecting fluorescence signals in specific wavelength ranges, the signal-to-noise ratio can be further improved, thus enhancing image clarity.
[0051] Based on any of the above embodiments, in one embodiment of this application, the micropore 71 detection component may further include: a display device connected to the image sensor 6 for displaying the image.
[0052] The display device can show the image so that the inspector can observe the imaging of the micro-hole 71.
[0053] In one embodiment of this application, the micro-hole 71 detection component may further include: a control terminal connected to the display device, used to determine the aperture of the micro-hole 71 based on the image.
[0054] The control terminal can be a host computer or other control components.
[0055] In this embodiment, by setting a control terminal, the micro-hole 71 can be automatically identified based on the image, and the aperture of the micro-hole 71 can be determined.
[0056] like Figure 6 and Figure 7 As shown, the ring containing the bright area represents the top opening of the microvia. By determining the diameter of the ring containing the bright area, the aperture of the top opening of the microvia can be obtained. Figure 6 and Figure 7 The diameter of the opening at the top of the micropore is 47.04 μm.
[0057] like Figure 8 and Figure 9 As shown, the circle containing the dark area represents the bottom region of the micropore. Figure 8 The pore size at the bottom of the micropores is 35.04 μm. Figure 9 The pore size at the bottom of the micropore is 34.08 μm.
[0058] This application also provides a micropore detection method based on the micropore detection component of the above embodiments, the method including: Step S101: Use a light source to emit excitation light, which is then directed onto a dichroic mirror.
[0059] As one possible implementation, after the light source emits excitation light, it can first pass through a first filter to select light of a specific wavelength. After being filtered by the first filter, the light is then irradiated onto the dichroic mirror.
[0060] By passing the excitation light through the first filter, the wavelength of the excitation light can be precisely controlled, which can excite the target fluorescence with maximum efficiency, while minimizing non-specific irradiation of the organic substrate (such as heating or excitation of other substances), thereby reducing background noise, improving the signal-to-noise ratio, and enhancing image contrast.
[0061] Step S102: The dichroic mirror reflects the excitation light, changes the direction of the excitation light, and the reflected excitation light propagates to the light converging element.
[0062] Step S103: The light converging element converges the excitation light, and the converged excitation light irradiates the organic substrate. The converged excitation light is also perpendicularly incident into the micropores of the organic substrate, so that the organic material on the sidewalls and bottom of the micropores produces a fluorescence reaction and emits fluorescence. The fluorescence passes through the light converging element, then through the dichroic mirror, and enters the image sensor.
[0063] In one embodiment of this application, before the fluorescence enters the image sensor, it can also pass through a second filter to filter out the excitation light with a shorter wavelength reflected from the surface of the organic substrate, that is, to filter out noise and allow only the fluorescence with a longer wavelength to pass through, thereby improving the clarity of the image.
[0064] Step S104: The image sensor receives fluorescence and generates an image including the micropores based on the fluorescence.
[0065] The detection method in this embodiment utilizes excitation light to excite the material of the organic board, causing it to emit fluorescence. This allows the top opening, bottom, and sidewall contours of the micropores to be clearly displayed in the image due to the material's own fluorescence, avoiding the problem of external light sources being unable to illuminate the bottom of the micropores due to obstruction. In the image, the top opening of the micropore appears as a bright ring, and the bottom as a circle. Clear images of the top and bottom of the micropore can be obtained simultaneously without repeating diagonal views, improving detection efficiency. In addition, when residual adhesive residue exists within the micropores, the residue also emits fluorescence, appearing as irregular bright spots against the dark background of the pores, making them easily identifiable.
[0066] In one embodiment of this application, the micropore detection method may further include: The image is displayed using a display device so that the inspector can observe the imaging of the micropores.
[0067] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0068] The micropore detection components and methods provided in this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the solution and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of this application.
Claims
1. A micropore detection component, characterized in that, include: A light source that emits excitation light is used to irradiate the micropores of the organic board, causing the organic material on the sidewalls and bottom of the micropores to produce a fluorescent reaction and emit fluorescence; A dichroic mirror positioned opposite the light source is used to reflect the excitation light, causing the excitation light to propagate along the optical axis of the light converging element; and to transmit the fluorescence. The light converging element disposed on the side of the dichroic mirror near the organic substrate is used to converge the excitation light reflected by the dichroic mirror; the converged excitation light is incident perpendicularly onto the micropore; An image sensor located on the side of the dichroic mirror away from the organic substrate is used to receive the fluorescence transmitted through the dichroic mirror and generate an image including the micropores.
2. The micropore detection component as described in claim 1, characterized in that, Also includes: A first filter is disposed between the light source and the dichroic mirror.
3. The micropore detection component as described in claim 1, characterized in that, Also includes: A second filter is disposed between the image sensor and the dichroic mirror.
4. The micropore detection component as described in claim 3, characterized in that, The second filter includes a long-pass filter.
5. The micropore detection component as described in claim 3, characterized in that, The second filter includes a bandpass filter.
6. The micropore detection component as described in claim 1, characterized in that, The light source includes LED light source, laser light source or arc lamp.
7. The micropore detection component according to any one of claims 1 to 6, characterized in that, Also includes: A display device connected to the image sensor is used to display the image.
8. The micropore detection component as described in claim 7, characterized in that, Also includes: A control terminal connected to the display device is used to determine the aperture of the micropore based on the image.
9. A micropore detection method based on the micropore detection component of claim 1, characterized in that, include: An excitation light is emitted using a light source, and the excitation light is irradiated onto a dichroic mirror; The dichroic mirror reflects the excitation light, changes the direction of the excitation light, and the reflected excitation light propagates to the light converging element. The light converging element focuses the excitation light, which then irradiates the organic substrate. The focused excitation light is also perpendicularly incident into the micropores of the organic substrate, causing the organic material on the sidewalls and bottom of the micropores to fluoresce and emit fluorescence. The fluorescence passes through the light converging element, then through the dichroic mirror, and enters the image sensor. The image sensor receives fluorescence and generates an image including the micropores based on the fluorescence.
10. The micropore detection method as described in claim 9, characterized in that, Also includes: The image is displayed using a display device.