A vertical spindle for surface dressing of large-diameter polishing pads

Abstract

This invention discloses a vertical spindle for surface dressing of large-diameter polishing pads, comprising a base plate and a housing; the housing and the base plate are rotatably connected about a Y-axis; the Y-axis angle adjustment mechanism includes a first adjustment component and a first fastening component, the first adjustment component driving the housing to rotate about the Y-axis; the first fastening component locking the housing to the base plate; a bearing seat is rotatably connected to the housing about an X-axis; the X-axis angle adjustment mechanism includes a second adjustment component and a second fastening component, the second adjustment component driving the bearing seat to rotate about the X-axis; the second fastening component locking the bearing seat to the housing; the spindle and the bearing seat are rotatably connected along a Z-axis, and a drive motor is connected to the top of the bearing seat. This vertical spindle achieves micron-level verticality adjustment in a two-dimensional direction, meeting the high requirements for spindle verticality during the dressing of large-diameter polishing pads, and the adjustment process does not require repeated assembly and disassembly of components, resulting in high adjustment efficiency.

Description

Technical Field

[0001] This invention relates to the field of surface polishing machine tool technology, and in particular to a vertical spindle for surface finishing of large-diameter polishing pads. Background Technology

[0002] The vertical spindle is a key functional component in many CNC machine tools. For example, in surface polishing machines, high-precision dressing of large-diameter polishing pads is typically achieved by using a vertical spindle to drive various cutting tools. The function of the vertical spindle is to drive the cutting tools at high speed and, in conjunction with the movement of other kinematic pairs, to remove material from the surface of the polishing pad. In actual machining, the perpendicularity error of the vertical spindle directly affects the contact posture between the cutting point of the tool and the polishing pad surface. If the perpendicularity error is too large, it will significantly reduce the dressing accuracy of the polishing pad surface morphology. Therefore, the adjustment strategy and implementation method for its perpendicularity must be fully considered during the design and manufacturing stages of the vertical spindle.

[0003] In existing technologies, the verticality adjustment of the spindle mainly involves adding shims to the connecting reference surfaces of key components. In practice, the fixing bolts of the spindle housing must first be loosened, and the tilt angle of the spindle housing is changed by adding or removing shims of different thicknesses, thereby achieving verticality adjustment. For example, when the deviation in the plane perpendicular to the Y direction is out of tolerance, the thickness of the shim under the spindle body is adjusted; when the deviation in the plane perpendicular to the X direction is out of tolerance, the thickness of the shim at the spindle mounting position is adjusted. This adjustment method lacks a rotating joint as an adjustment reference, making it difficult to quantify the adjustment accuracy. Furthermore, the adjustment process requires repeated disassembly and reassembly, resulting in low efficiency. In addition, limited by the thickness specifications of the shims, it is difficult to achieve micron-level precision adjustment, failing to meet the dressing requirements of high-precision polishing discs.

[0004] It is evident that existing technologies still need improvement and enhancement. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a vertical spindle for surface finishing of large-diameter polishing pads, aiming to solve the technical problems of low efficiency in adjusting the verticality of the spindle and difficulty in achieving micron-level precise adjustment in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A vertical spindle for surface finishing of large-diameter polishing pads includes a base plate, a housing, a Y-axis angle adjustment mechanism, an X-axis angle adjustment mechanism, a bearing, and a spindle. The housing and the base plate are rotatably connected around the Y-axis. The Y-axis angle adjustment mechanism includes a first adjustment component and a first fastening component. The first adjustment component is disposed on the substrate and is used to drive the housing to rotate relative to the substrate around the Y-axis. The first fastening component is disposed between the substrate and the housing and is used to lock the housing to the substrate. The bearing seat is housed within the housing and is rotatably connected to the housing about the X-axis. The X-axis angle adjustment mechanism includes a second adjustment component and a second fastening component. The second adjustment component is disposed on the housing and is used to drive the bearing seat to rotate relative to the housing around the X-axis. The second fastening component is disposed on the housing and is used to lock the bearing seat to the housing. The main shaft and the bearing are rotatably connected along the Z-axis. A drive motor is connected to the top of the bearing, and the drive motor is connected to the upper end of the main shaft for transmission.

[0007] Furthermore, the Y-axis angle adjustment mechanism also includes a first rotating shaft, the axis of which is parallel to the Y-axis; the housing is rotatably connected to the base plate via the first rotating shaft.

[0008] Furthermore, the upper part of the housing is rotatably connected to the base plate, and the first adjustment assembly includes at least one first adjustment screw and at least one second adjustment screw. The first adjustment screw and the second adjustment screw are symmetrically arranged on both sides of the base plate, and their axes are parallel to the X direction. The ends of the first adjustment screw and the second adjustment screw respectively abut against the bottom of both sides of the housing.

[0009] Furthermore, the middle part of the housing is rotatably connected to the base plate, and the first adjustment component includes at least one fifth adjustment screw and a sixth adjustment screw, both of which are located on the same side of the base plate and their axes are parallel to the X direction. The fifth adjustment screw abuts against the upper part of the side wall of the housing, and the sixth adjustment screw abuts against the lower part of the side wall of the housing.

[0010] Furthermore, the first fastening assembly includes a plurality of fastening screws, and the housing is provided with a plurality of through holes parallel to the Y direction. The inner diameter of the through holes is larger than the outer diameter of the fastening screws, and each fastening screw passes through the corresponding through hole and is threadedly connected to the substrate.

[0011] Furthermore, the X-axis angle adjustment mechanism also includes two second rotating shafts parallel to the X-axis, which are symmetrically arranged on both sides of the housing and are rotatably engaged with the bearing seat respectively; the second adjustment component includes several third and fourth adjusting screws parallel to the Y-axis, the third adjusting screws are screwed to the housing and their ends abut against the upper part of the bearing seat; the fourth adjusting screws are screwed to the housing and their ends abut against the lower part of the bearing seat.

[0012] Furthermore, the second fastening assembly includes a plurality of first abutment screws and second abutment screws parallel to the X direction. The plurality of first abutment screws are symmetrically arranged on both sides of the housing and located above the second rotating shaft, with the end of each first abutment screw abutting against the side wall of the shaft seat. The plurality of second abutment screws are symmetrically arranged on both sides of the housing and located below the second rotating shaft, with the end of each second abutment screw abutting against the side wall of the shaft seat.

[0013] Furthermore, the bearing seat has a second shaft hole extending along the Z direction. The main shaft includes a first shaft segment rotatably connected to the bearing seat and a second shaft segment connected to the bottom of the first shaft segment. The first shaft segment is rotatably connected to the second shaft hole, and the cross-section of the first shaft segment is I-shaped. The bearing seat is provided with two planar throttles and at least one radial throttle. The two planar throttles form a first gas film between themselves and the inner end face of the first shaft segment by introducing compressed gas. The radial throttle forms a second gas film between itself and the peripheral wall of the first shaft segment by introducing compressed gas.

[0014] Furthermore, the bottom of the bearing seat is provided with a water baffle, the bottom of the first shaft section is provided with at least one annular groove, one side of the water baffle is provided with a protrusion, the protrusion is accommodated in the annular groove, and there is a second gap between the outer peripheral surface of the protrusion and the inner wall of the annular groove.

[0015] Beneficial effects: This invention provides a vertical spindle for surface dressing of large-diameter polishing pads. Through a two-dimensional adjustment reference—rotation of the housing and substrate around the Y-axis, and rotation of the bearing and housing around the X-axis—and the adjustment actions of the first and second adjustment components, micron-level perpendicularity adjustment can be achieved, meeting the high perpendicularity requirements of large-diameter polishing pad surface dressing. Furthermore, the entire perpendicularity adjustment process eliminates the need for repeated component disassembly and assembly; perpendicularity calibration in both the X0Z and Y0Z planes can be completed with simple operations, significantly reducing adjustment time and improving efficiency. In addition, the coordinated locking of the first and second fastening components ensures that the spindle maintains stable perpendicularity accuracy during long-term use and high-speed operation, guaranteeing consistent polishing pad dressing quality. Attached Figure Description

[0016] Figure 1 A structural diagram of the vertical spindle for surface finishing of large-diameter polishing pads provided by the present invention; Figure 2 Explosion of the vertical spindle for surface finishing of large-diameter polishing pads provided by the present invention Figure 1 ; Figure 3 Explosion of the vertical spindle for surface finishing of large-diameter polishing pads provided by the present invention Figure 2 , Figure 4A partial sectional view of the vertical spindle for surface finishing of large-diameter polishing pads provided by the present invention; Figure 5 A cross-sectional view of the first fastening assembly in the vertical spindle for surface finishing of a large-diameter polishing pad provided by the present invention; Figure 6 A cross-sectional view of the X-axis angle adjustment mechanism in the vertical spindle for surface finishing of large-diameter polishing pads provided by the present invention; Figure 7 This is a cross-sectional view of the vertical spindle center seat for surface finishing of large-diameter polishing pads provided by the present invention.

[0017] Reference numerals: Base plate 1, Support 11, First threaded hole 12, Housing 2, Through hole 21, Y-axis angle adjustment mechanism 3, First adjustment component 31, First adjustment screw 311, Second adjustment screw 312, First fastening component 32, Fastening screw 321, Spring washer 322, First rotating shaft 33, X-axis angle adjustment mechanism 4, Second adjustment component 41, Third adjustment screw 411, Fourth adjustment screw 412, Second fastening component 42, First abutment Screw 421, second abutting screw 422, second rotating shaft 43, shaft seat 5, second shaft hole 51, planar throttle 52, first annular air groove 521, radial throttle 53, second annular air groove 531, first shaft hole 54, first gap 55, second threaded hole 56, first air inlet 57, second air inlet 58, main shaft 6, first shaft section 61, second shaft section 62, annular groove 63, drive motor 7, water baffle 8, protrusion 81, second gap 82. Detailed Implementation

[0018] This invention provides a vertical spindle for surface finishing of large-diameter polishing pads. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0019] In the description of this invention, it should be understood that the terms "upper," "lower," "left," and "right," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or a specific orientational structure and operation. Therefore, they should not be construed as limitations on the invention. Furthermore, "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0020] In this invention, in the XYZ coordinate system, the Y direction is defined as the direction perpendicular to the substrate 1, the X direction is the direction perpendicular to the Y direction, and the Z direction is the vertical direction. By rotating the housing 2 around the Y direction, the perpendicularity of the spindle 6 in the X0Z plane can be adjusted. By rotating the bearing 5 around the X direction, the perpendicularity of the spindle 6 in the Y0Z plane can be adjusted, thereby achieving precise adjustment of the perpendicularity of the spindle 6 in two dimensions.

[0021] Please see Figures 1 to 7 As shown, the present invention provides a vertical spindle for surface finishing of large-diameter polishing pads, comprising a base plate 1, a housing 2, a Y-axis angle adjustment mechanism 3, an X-axis angle adjustment mechanism 4, a bearing 5, and a spindle 6; the housing 2 is rotatably connected to the base plate 1 about the Y-axis; the Y-axis angle adjustment mechanism 3 includes a first adjustment component 31 and a first fastening component 32, the first adjustment component 31 being disposed on the base plate 1 for driving the housing 2 to rotate relative to the base plate 1 about the Y-axis; the first fastening component 32 being disposed between the base plate 1 and the housing 2 for locking the housing 2 to the base plate 1; The bearing seat 5 is housed within the housing 2 and is rotatably connected to the housing 2 about the X-axis. The X-axis angle adjustment mechanism 4 includes a second adjustment component 41 and a second fastening component 42. The second adjustment component 41 is mounted on the housing 2 and is used to drive the bearing seat 5 to rotate relative to the housing 2 about the X-axis. The second fastening component 42 is mounted on the housing 2 and is used to lock the bearing seat 5 to the housing 2. The main shaft 6 is rotatably connected to the bearing seat 5 along the Z-axis. A drive motor 7 is connected to the top of the bearing seat 5 and is drively connected to the upper end of the main shaft 6. The lower end of the main shaft 6 is used to connect a correction tool, such as a grinding disc.

[0022] When adjusting the perpendicularity of the spindle 6 in the X0Z plane, first loosen the first fastening component 32 to release the locking state between the housing 2 and the base plate 1. Then, by operating the first adjusting component 31 on the base plate 1, drive the housing 2 to rotate around the Y-axis relative to the base plate 1 in the forward or reverse direction. After the adjustment is in place, tighten the first fastening component 32 to firmly lock the housing 2 to the base plate 1, thus completing the perpendicularity adjustment in the X0Z plane direction. When adjusting the perpendicularity of the inner spindle 6 in the Y0Z plane, first loosen the second fastening component 42 to release the locking between the bearing 5 and the housing 2. Then, by operating the second adjusting component 41 on the housing 2, drive the bearing 5 to rotate around the X-axis relative to the housing 2 in the forward or reverse direction. Then, tighten the second fastening component 42 to lock the bearing 5 to the housing 2, thus completing the perpendicularity adjustment in the Y0Z plane direction.

[0023] By using the rotation of housing 2 and substrate 1 around the Y-axis and the rotation of bearing 5 and housing 2 around the X-axis as adjustment references, and in conjunction with the transmission of the adjustment components, micron-level perpendicularity adjustment can be achieved. This solves the problem of insufficient precision in existing shim adjustment methods and meets the high-precision requirements for surface finishing of large-diameter polishing pads. Moreover, the entire process eliminates the cumbersome process of repeated assembly and disassembly, greatly shortening the adjustment time and improving adjustment efficiency. At the same time, the adjustment stability is good. The first fastening component 32 and the second fastening component 42 securely lock housing 2 and substrate 1, and bearing 5 and housing 2, respectively, effectively preventing the perpendicularity deviation rebound caused by loosening of components after adjustment. This ensures that the spindle 6 can maintain stable perpendicularity accuracy during high-speed operation and long-term use, guaranteeing the consistency of polishing pad finishing quality.

[0024] In a preferred embodiment, see [reference] Figure 2 The Y-axis angle adjustment mechanism 3 further includes a first rotating shaft 33, the axis of which is parallel to the Y-axis. The housing 2 is rotatably connected to the substrate 1 via the first rotating shaft 33. The first rotating shaft 33 provides a stable and precise rotation reference for the rotation of the housing 2 relative to the substrate 1, ensuring that the movement trajectory of the housing 2 is regular when it moves around the Y-axis, and laying the structural foundation for adjusting the perpendicularity of the main axis 6 in the X0Z plane.

[0025] Specifically, one end of the first rotating shaft 33 is fixed to the housing 2, and the other end is rotatably connected to the base plate 1 through a bearing. This connection method is preferred in this embodiment, as it facilitates the assembly of various components. Alternatively, one end of the first rotating shaft 33 is fixed to the base plate 1, and the other end is rotatably connected to the housing 2 through a bearing. Both connection methods can ensure that the first rotating shaft 33 provides a stable rotation reference for the housing 2, ensuring the reliability of the verticality adjustment of the main shaft 6 in the X0Z plane.

[0026] To achieve the angle adjustment of the housing 2 rotating around the first rotating shaft 33, the installation positions of the first rotating shaft 33 and the first adjustment component 31 can be implemented in the following three ways; The first implementation method, such as Figure 2 , 4As shown, the upper part of the housing 2 is rotatably connected to the base plate 1. The first adjustment assembly 31 includes at least one first adjustment screw 311 and at least one second adjustment screw 312. The first adjustment screw 311 and the second adjustment screw 312 are symmetrically arranged on both sides of the base plate 1, and their axes are parallel to the X-direction. The ends of the first adjustment screw 311 and the second adjustment screw 312 respectively abut against the bottom of both sides of the housing 2. The first adjustment screw 311 is used to push the housing 2 to perform forward adjustment around the first rotating shaft 33, and the second adjustment screw 312 is used to push the housing 2 to perform reverse adjustment around the first rotating shaft 33. During adjustment, by screwing in or out the first adjusting screw 311, the bottom of the housing 2 can be pushed to shift in the corresponding direction. At the same time, the second adjusting screw 312 on the other side can be turned to make a reverse fine adjustment. Through the lever principle, the housing 2 is driven to rotate a small angle around the first rotating shaft 33 in the forward direction. Since one rotation of the first adjusting screw 311 is the straight distance of one screw pitch, combined with the lever arm length of the housing 2, the angle adjustment accuracy can reach the micrometer level. Similarly, by turning out the first adjusting screw 311 and screwing in the second adjusting screw 312, the reverse fine adjustment of the housing 2 around the first rotating shaft 33 can be achieved, thereby realizing the precise adjustment of the perpendicularity of the main shaft 6 in the X0Z plane.

[0027] Specifically, see Figure 2 A horizontally placed U-shaped bracket 11 is fixed at the bottom of the substrate 1. The opening of the bracket 11 faces the housing 2. The two side walls of the bracket 11 are respectively provided with first threaded holes 12 that are adapted to the first adjusting screw 311 and the second adjusting screw 312. The first adjusting screw 311 and the second adjusting screw 312 are screwed to the bracket 11 through the corresponding first threaded holes 12, and the ends of the two screws pass through the first threaded holes 12 and abut against the bottom of the two sides of the housing 2. The U-shaped structure of the bracket 11 provides a stable installation support for the adjusting screws and limits the force direction of the adjusting screws, preventing the screws from shifting during the adjustment process and ensuring the effective transmission of the adjustment force.

[0028] Preferably, there are two of each of the first adjusting screw 311 and the second adjusting screw 312 to improve the stability of the angle adjustment.

[0029] In the second embodiment, the lower part of the housing 2 is rotatably connected to the base plate 1, and the first adjustment component 31 is correspondingly arranged above the first rotating shaft 33. Its structure and adjustment principle are the same as those in the first embodiment. Only the installation position is adapted and adjusted according to the change of the rotation fulcrum. Similarly, the housing 2 can be precisely rotated in the forward and reverse directions around the first rotating shaft 33 by symmetrically arranged adjustment screws, thereby achieving micron-level adjustment of the perpendicularity of the main shaft 6 in the X0Z plane.

[0030] In the third embodiment, the middle part of the housing 2 is rotatably connected to the base plate 1. The first adjustment component 31 includes at least one fifth adjustment screw and one sixth adjustment screw, both located on the same side of the base plate 1 and with their axes parallel to the X-direction. The fifth adjustment screw abuts against the upper part of the side wall of the housing 2, used to push the housing 2 to perform forward adjustment around the first rotating axis 33; the sixth adjustment screw abuts against the lower part of the side wall of the housing 2, used to push the housing 2 to perform reverse adjustment around the first rotating axis 33. During adjustment, by screwing in the fifth adjustment screw, the upper part of the side wall of the housing 2 can be pushed to deflect downward around the first rotating axis 33, while simultaneously unscrewing the sixth adjustment screw to reserve rotation space for the lower part of the housing 2. The force difference between the upper and lower parts of the housing 2 drives the housing 2 to rotate forward around the first rotating axis 33. Conversely, by screwing in the sixth adjustment screw and unscrewing the fifth adjustment screw, the housing 2 can be rotated in the reverse direction around the first rotating axis 33, thereby achieving precise adjustment of the perpendicularity of the main axis 6 in the X0Z plane. The fifth and sixth adjustment screws are not shown in the accompanying drawings.

[0031] In another embodiment, the first adjustment component 31 includes a first angle adjustment driver and a first damper, which are symmetrically arranged on both sides of the substrate 1, and their output ends abut against the side walls of the housing 2, respectively. The first angle adjustment driver can be a miniature electric actuator. When the extension rod of the electric actuator extends, it drives the housing 2 to rotate slightly forward around the first rotating shaft 33. At this time, the extension rod of the first damper is compressed and retracted by the pressure of the housing 2. When the extension rod of the electric actuator retracts, the extension rod of the first damper pushes the housing 2 to rotate in the opposite direction due to its own elastic recovery. The two work together to achieve bidirectional rotation adjustment of the housing 2 around the first rotating shaft 33, thereby achieving high repeatability and high stability fine adjustment of the spindle 6 perpendicularity in the X0Z plane. Preferably, the first rotating shaft 33 fixed on the housing 2 is equipped with an angle sensor to monitor the rotation angle of the housing 2 around the first rotating shaft 33 in real time and feed the data back to the control system of the polishing machine. The control system precisely controls the action of the first angle adjustment driver, and finally realizes the automated adjustment of the spindle 6 perpendicularity, further improving the intelligent level of adjustment efficiency and precision control. The angle adjustment driver and the first damper are not shown in the accompanying drawings.

[0032] In a preferred embodiment, see [reference] Figure 2 , 5The first fastening assembly 32 includes several fastening screws 321. The housing 2 has several through holes 21 parallel to the Y-axis. The inner diameter of the through holes 21 is larger than the outer diameter of the fastening screws 321. Each fastening screw 321 passes through its corresponding through hole 21 and is threadedly connected to the substrate 1. Specifically, several through holes 21 are symmetrically located on both sides of the housing 2. After the fastening screws 321 are inserted, they engage with the first threaded hole 12 on the substrate 1 to lock together, thus fixing the housing 2 to the substrate 1. By setting the inner diameter of the through holes 21 to be larger than the outer diameter of the fastening screws 321, sufficient clearance can be reserved for the slight rotation of the housing 2 around the first rotating shaft 33 during the verticality adjustment of the spindle 6 in the X0Z plane. This avoids interference from the fastening screws 321 on the rotation of the housing 2, ensuring smooth adjustment without affecting the locking and fixing effect after adjustment.

[0033] Preferably, see Figure 5 The first fastening assembly 32 also includes spring washers 322 corresponding to the fastening screws 321. The fastening screws 321 pass through the spring washers 322 and the through holes 21 in sequence and are threaded to the base plate 1. By setting the spring washers 322, the fastening screws 321 are effectively prevented from loosening during equipment vibration or long-term operation, thereby improving the stability and reliability of the structural connection.

[0034] In a preferred embodiment, see [reference] Figure 1 , 3 The X-axis angle adjustment mechanism 4 further includes two second rotating shafts 43 parallel to the X-axis. The two second rotating shafts 43 are symmetrically arranged on both sides of the housing 2, and the two second rotating shafts 43 are rotatably engaged with the bearing seat 5 respectively. The second adjustment component 41 includes several third adjusting screws 411 and fourth adjusting screws 412 parallel to the Y-axis. The third adjusting screws 411 are screwed to the housing 2 and their ends abut against the upper part of the bearing seat 5, for pushing the bearing seat 5 to rotate forward around the second rotating shaft 43. The fourth adjusting screws 412 are screwed to the housing 2 and their ends abut against the lower part of the bearing seat 5, for pushing the bearing seat 5 to rotate in the opposite direction around the second rotating shaft 43. During adjustment, screwing in the third adjusting screw 411 pushes the upper part of the bearing seat 5 towards the substrate 1, while simultaneously unscrewing the fourth adjusting screw 412 to reserve rotation space for the lower part of the bearing seat 5. With the fulcrum of the second rotating shaft 43, the bearing seat 5 is driven to rotate in the positive X-direction. Conversely, screwing in the fourth adjusting screw 412 and unscrewing the third adjusting screw 411 pushes the lower part of the bearing seat 5 towards the substrate 1, achieving reverse rotation of the bearing seat 5 in the X-direction. Similarly, since the pitch of the adjusting screw is fixed, one rotation corresponds to a fixed linear displacement. Combined with the lever arm size of the bearing seat 5, the angle adjustment accuracy can be controlled at the micrometer level, meeting the correction requirements for the perpendicularity of the spindle 6 in the Y0Z plane. The entire adjustment process does not require disassembling the connection structure between the bearing seat 5 and the housing 2, significantly improving adjustment efficiency and ensuring rapid calibration of the spindle 6's perpendicularity during the dressing of large-diameter polishing pads.

[0035] In another embodiment, the second adjustment component 41 further includes a second angle adjustment driver and a second damper. These two components work together to achieve bidirectional rotation of the bearing seat 5 around the second rotating shaft 43. When the extension rod of the second angle adjustment driver extends outward, it directly drives the bearing seat 5 to rotate forward around the second rotating shaft 43. When the extension rod of the second angle adjustment driver retracts, the telescopic rod of the second damper pushes the bearing seat 5 in the opposite direction due to its own rebound force. Together, they drive the bearing seat 5 to rotate in the opposite direction around the second rotating shaft 43, thereby achieving dynamic fine-tuning of the perpendicularity of the spindle 6 in the Y0Z plane. Simultaneously, an tilt sensor coaxially arranged with the second rotating shaft 43 is fixed on the bearing seat 5. This sensor can monitor the rotation angle of the bearing seat 5 around the second rotating shaft 43 in real time and feed the monitoring data back to the control system of the polishing machine tool in real time. The control system precisely controls the action of the second angle adjustment driver, thereby achieving automated adjustment of the perpendicularity of the spindle 6 and further improving the intelligence and accuracy of the adjustment process. The second angle adjustment driver and the second damper are not shown in the accompanying drawings.

[0036] In a preferred embodiment, see [reference] Figure 4 , 6 The second fastening assembly 42 includes several first abutment screws 421 and several second abutment screws 422 parallel to the X-direction. The first abutment screws 421 are symmetrically arranged on both sides of the housing 2, above the second rotating shaft 43, with the ends of each first abutment screw 421 abutting against the side wall of the shaft seat 5. The second abutment screws 422 are symmetrically arranged on both sides of the housing 2, below the second rotating shaft 43, with the ends of each second abutment screw 422 abutting against the side wall of the shaft seat 5. When the perpendicularity in the Y0Z plane is adjusted to the correct position, by simultaneously tightening the first abutment screws 421 and second abutment screws 422 on both sides of the housing 2, a balanced clamping force can be formed on the shaft seat 5 from both the upper and lower sides of the second rotating shaft 43, firmly locking the shaft seat 5 in a preset position, effectively offsetting the vibration generated during the high-speed operation of the main shaft 6 and resisting external impacts. Meanwhile, the axes of the first abutting screw 421 and the second abutting screw 422 are parallel to the second rotating shaft 43, which ensures that the direction of the abutting force is perpendicular to the rotating plane of the shaft seat 5. This not only does not affect the angular accuracy after adjustment, but also further improves the rigidity of the connection between the shaft seat 5 and the housing 2, ensuring the stability of the perpendicularity in the Y0Z plane during long-term use of the spindle 6.

[0037] Preferably, there are six of each of the first abutting screws 421 and the second abutting screws 422, that is, three first abutting screws 421 and three second abutting screws 422 are symmetrically arranged on each side of the housing 2. This arrangement can ensure that the force on both sides of the bearing seat 5 is uniform, and at the same time further enhance the stability of the positioning of the bearing seat 5, providing a reliable guarantee for the long-term accurate maintenance of the perpendicularity of the spindle 6 in the Y0Z plane.

[0038] Preferably, the third adjusting screw 411 and the first abutting screw 421 are on the same mounting plane, and their axes are arranged perpendicularly to each other; the fourth adjusting screw 412 and the second abutting screw 422 are also on the same mounting plane, and their axes are also arranged perpendicularly to each other; this orthogonal layout simplifies the structural design and processing technology of the housing 2.

[0039] Further, see Figure 6 It also includes pre-installed screws. The bearing seat 5 has a first shaft hole 54 coaxially arranged with the second rotating shaft 43. The first shaft hole 54 is rotatably engaged with the second rotating shaft 43, and a first gap 55 is provided between the inner bottom of the first shaft hole 54 and the end of the second rotating shaft 43. The first gap 55 allows for adjustment of the translational distance of the bearing seat 5 along the X direction, ensuring that the axis of the bearing seat 5 remains coplanar with the center plane of the housing 2. The bearing seat 5 is provided with several second threaded holes 56, which are respectively set with a third adjusting screw 411, a fourth adjusting screw 412, a first abutting screw 421, and a second abutting screw 422. During assembly, the pre-installed screws are first passed through the side wall of the housing 2 and connected to the corresponding first threaded holes 12 on the bearing seat 5 to complete the pre-installation positioning of the bearing seat 5. Then, the adjusting screws and abutting screws are screwed in to initially fix the position of the bearing seat 5. Then, the pre-installed screws are unscrewed and the corresponding adjusting screws and abutting screws are screwed in at the same position to perform the perpendicularity adjustment operation in the Y0Z plane. After adjustment, the abutting screws are locked to achieve the final fixation of the bearing seat 5. The pre-installed screws are not shown in the attached drawings.

[0040] In a preferred embodiment, see [reference] Figure 4 , 7 The bearing seat 5 has a second shaft hole 51 extending along the Z direction. The main shaft 6 includes a first shaft section 61 rotatably connected to the bearing seat 5 and a second shaft section 62 connected to the bottom of the first shaft section 61. The first shaft section 61 is rotatably connected to the second shaft hole 51, and the cross-section of the first shaft section 61 is I-shaped. The bearing seat 5 is provided with two planar throttles 52 and at least one radial throttle 53. The two planar throttles 52 form a first gas film between themselves and the inner end face of the first shaft section 61 by introducing compressed gas. The radial throttle 53 forms a second gas film between itself and the peripheral wall of the first shaft section 61 by introducing compressed gas. The dual air film structure, through the principle of gas static pressure support, completely eliminates mechanical contact between the spindle 6 and the bearing 5. On the one hand, it reduces rotational friction, wear and heat generation, and ensures the stability of the spindle 6 when it operates at high speed. On the other hand, the uniform air film can form radial and axial limits on the spindle 6, preventing radial and axial movement of the spindle 6 and further improving the rotational accuracy and perpendicularity retention of the spindle 6.

[0041] Specifically, see Figure 7Two planar throttles 52 are respectively embedded in the end faces of the bearing seat 5 near the two ends of the second shaft hole 51. The side of the planar throttle 52 near the second shaft hole 51 is provided with a first annular air groove 521. The bearing seat 5 is provided with a first air inlet 57 communicating with the first annular air groove 521. The first air inlet 57 is connected to a high-pressure air source. During operation, the high-pressure airflow enters the first annular air groove 521 through the first air inlet 57, and then overflows evenly through the throttling orifice of the planar throttle 52. A first air film with uniform thickness and stable pressure is formed between the end face of the planar throttle 52 and the inner end face of the first shaft section 61, thereby achieving axial limiting of the main shaft 6. The two planar throttles 52 cooperate to achieve bidirectional axial constraint of the main shaft 6 in the Z direction, effectively suppressing the axial movement of the main shaft 6 in the Z direction.

[0042] Specifically, see Figure 7 Two radial throttles 53 are provided, one near the upper and one below the other of the second shaft hole 51 and installed on the inner wall of the second shaft hole 51. The outer wall of the second shaft hole 53 has several interconnected second annular air grooves 531. A second air inlet 58, communicating with one of the second annular air grooves 531, is provided on the shaft seat 5. The second air inlet 58 is also connected to a high-pressure air source. After the high-pressure airflow enters the second annular air groove 531 through the second air inlet 58, it flows evenly to the peripheral wall of the first shaft section 61 through the radial throttles 53, forming a uniform, surrounding air film (the second air film) on the upper and lower peripheral walls of the first shaft section 61. This achieves reliable radial limiting of the main shaft 6, suppresses radial oscillation of the main shaft 6, and ensures the stability of the rotation center of the main shaft 6.

[0043] Preferably, both the planar throttle 52 and the radial throttle 53 are made of graphite material. The graphite has dense pores, which can form a uniform flow distribution effect on the high-pressure airflow to achieve the formation of a uniformly distributed air film.

[0044] Further, see Figure 4The bottom of the bearing seat 5 is provided with a water-retaining cover 8, and the bottom of the first shaft segment 61 is provided with at least one annular groove 63. A protrusion 81 is provided on one side of the water-retaining cover 8, which is accommodated within the annular groove 63. A second gap 82 exists between the outer circumferential surface of the protrusion 81 and the inner wall of the annular groove 63. By setting the second gap 82, on the one hand, the reserved space allows the first shaft segment 61 to undergo a slight angular deflection with the bearing seat 5 when the spindle 6 is adjusted vertically in the Y0Z plane, avoiding interference between the water-retaining cover 8 and the spindle 6, ensuring smooth adjustment and not affecting the flexibility of vertical adjustment; on the other hand, the nested fit between the protrusion 81 and the annular groove 63 naturally forms a labyrinthine serpentine channel in the second gap 82. When cutting fluid splashes into the area of ​​the water-retaining cover 8 during polishing, the serpentine channel can extend the flow path of the cutting fluid, preventing it from seeping into the gas film area and rotating mating surface between the spindle 6 and the bearing seat 5, preventing damage to the gas film stability, and thus ensuring the rotational accuracy and service life of the spindle 6.

[0045] It is understood that those skilled in the art can make equivalent substitutions or modifications to the technical solution and inventive concept of the present invention, and all such substitutions or modifications should fall within the protection scope of the appended claims.

Claims

1. A vertical spindle for surface finishing of large-diameter polishing pads, characterized in that, It includes a base plate (1), a housing (2), a Y-axis angle adjustment mechanism (3), an X-axis angle adjustment mechanism (4), a bearing seat (5), and a spindle (6); The housing (2) and the base plate (1) are rotatably connected around the Y-axis; The Y-axis angle adjustment mechanism (3) includes a first adjustment component (31) and a first fastening component (32). The first adjustment component (31) is disposed on the substrate (1) and is used to drive the housing (2) to rotate relative to the substrate (1) around the Y-axis. The first fastening component (32) is disposed between the substrate (1) and the housing (2) and is used to lock the housing (2) to the substrate (1). The bearing seat (5) is housed inside the housing (2) and is rotatably connected to the housing (2) about the X-axis. The X-axis angle adjustment mechanism (4) includes a second adjustment component (41) and a second fastening component (42). The second adjustment component (41) is located on the housing (2) and is used to drive the shaft seat (5) to rotate relative to the housing (2) around the X-axis. The second fastening component (42) is located on the housing (2) and is used to lock the shaft seat (5) to the housing (2). The main shaft (6) and the bearing seat (5) are rotatably connected along the Z-axis. The top of the bearing seat (5) is connected to a drive motor (7), which is connected to the upper end of the main shaft (6) for transmission.

2. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The Y-axis angle adjustment mechanism (3) further includes a first rotating shaft (33), the axis of which is parallel to the Y-axis; the housing (2) is rotatably connected to the base plate (1) through the first rotating shaft (33).

3. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The upper part of the housing (2) is rotatably connected to the base plate (1). The first adjustment component (31) includes at least one first adjustment screw (311) and at least one second adjustment screw (312). The first adjustment screw (311) and the second adjustment screw (312) are symmetrically arranged on both sides of the base plate (1) and their axes are parallel to the X direction. The ends of the first adjustment screw (311) and the second adjustment screw (312) abut against the bottom of both sides of the housing (2).

4. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The middle part of the housing (2) is rotatably connected to the base plate (1). The first adjustment component (31) includes at least one fifth adjustment screw and a sixth adjustment screw, both of which are located on the same side of the base plate (1) and their axes are parallel to the X direction. The fifth adjustment screw abuts against the upper part of the side wall of the housing (2), and the sixth adjustment screw abuts against the lower part of the side wall of the housing (2).

5. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The first fastening assembly (32) includes a plurality of fastening screws (321). The housing (2) is provided with a plurality of through holes (21) parallel to the Y direction. The inner diameter of the through hole (21) is larger than the outer diameter of the fastening screw (321). Each fastening screw (321) passes through the corresponding through hole (21) and is threaded to the substrate (1).

6. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The X-axis angle adjustment mechanism (4) further includes two second rotating shafts (43) parallel to the X-axis. The two second rotating shafts (43) are symmetrically arranged on both sides of the housing (2). The two second rotating shafts (43) are respectively rotatably engaged with the bearing seat (5). The second adjustment component (41) includes several third adjusting screws (411) and fourth adjusting screws (412) parallel to the Y-axis. The third adjusting screws (411) are screwed to the housing (2) and their ends abut against the upper part of the bearing seat (5). The fourth adjusting screws (412) are screwed to the housing (2) and their ends abut against the lower part of the bearing seat (5).

7. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The second fastening assembly (42) includes a plurality of first abutment screws (421) and second abutment screws (422) parallel to the X direction. The plurality of first abutment screws (421) are symmetrically arranged on both sides of the housing (2) and located above the second rotating shaft (43). The end of each first abutment screw (421) abuts against the side wall of the shaft seat (5). The plurality of second abutment screws (422) are symmetrically arranged on both sides of the housing (2) and located below the second rotating shaft (43). The end of each second abutment screw (422) abuts against the side wall of the shaft seat (5).

8. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 1, characterized in that, The bearing seat (5) is provided with a second shaft hole (51) extending along the Z direction. The main shaft (6) includes a first shaft section (61) rotatably connected to the bearing seat (5) and a second shaft section (62) connected to the bottom of the first shaft section (61). The first shaft section (61) is rotatably connected to the second shaft hole (51), and the cross section of the first shaft section (61) is I-shaped. The bearing seat (5) is provided with two planar throttles (52) and at least one radial throttle (53). The two planar throttles (52) form a first gas film between themselves and the inner end face of the first shaft section (61) by introducing compressed gas. The radial throttle (53) forms a second gas film between itself and the peripheral wall of the first shaft section (61) by introducing compressed gas.

9. The vertical spindle for surface finishing of large-diameter polishing pads according to claim 8, characterized in that, The bottom of the bearing seat (5) is provided with a water baffle (8), and the bottom of the first shaft section (61) is provided with at least one annular groove (63). A protrusion (81) is provided on one side of the water baffle (8), the protrusion (81) is accommodated in the annular groove (63), and there is a second gap (82) between the outer peripheral surface of the protrusion (81) and the inner wall of the annular groove (63).

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