Chip and tray handling device

Abstract

The application provides a chip and tray conveying device, comprising a first moving module, a second moving module, a third moving module and a suction nozzle assembly connected in sequence, the first moving module is used for outputting movement in a first direction, the second moving module is used for outputting movement in a second direction, the third moving module is used for outputting movement in a vertical direction, and the suction nozzle assembly is used for picking up and placing chips and / or trays, at least one of the first moving module and the second moving module comprises a linear drive motor capable of outputting linear motion. The chip and tray conveying device provided by the application can directly convert electric energy into linear motion mechanical energy without any intermediate conversion mechanism, so that the hardware structure of the first moving module and the second moving module can be reduced, the maintenance cost is reduced, and the linear motor is stable in motion and has less vibration.

Description

Technical Field

[0001] This invention belongs to the field of chip testing technology, and more specifically, relates to a chip and tray handling device. Background Technology

[0002] Currently, the testing equipment used in the field of CMOS image sensor (CIS chip) testing generally uses lead screw module components to realize the movement of the X and Y axes, and then the movement of the module is used to move the material tray or chip. The lead screw module requires a lot of components, resulting in a lot of hardware in the equipment mechanism, high equipment maintenance costs, and the lead screw module has a lot of noise and vibration, resulting in poor overall positioning accuracy of the equipment. Summary of the Invention

[0003] The purpose of this invention is to provide a chip and tray handling device to solve the technical problems in the prior art that result in more equipment hardware, higher maintenance costs, and greater noise and vibration during operation due to the use of lead screw modules for handling trays or chips.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is: to provide a chip and tray handling device, comprising...

[0005] The first motion module is used to output motion in the first direction;

[0006] The second moving module is connected to the moving end of the first moving module, and the second moving module is used to output movement in the second direction;

[0007] The third moving module is connected to the moving end of the second moving module, and the third moving module is used to output movement in the vertical direction;

[0008] The nozzle assembly is connected to the moving end of the third moving module, and the nozzle assembly is used to pick up and put in chips and / or trays;

[0009] The first direction, the second direction, and the vertical direction are arranged to intersect each other, and at least one of the first moving module and the second moving module includes a linear drive motor capable of outputting linear motion.

[0010] Optionally, the linear drive motor includes a fixed base, a plurality of stators arranged sequentially along the output direction of the linear drive motor, a mover that moves linearly relative to the stators, a first sliding structure, and a first slide rail. The magnetic poles of adjacent stators are opposite in direction. The mover is an energized coil. The stators are fixed to the fixed base. The first sliding structure is fixedly connected to the mover. The first sliding structure is slidably disposed on the first slide rail.

[0011] Optionally, the linear drive motor further includes a photoelectric sensor fixed to the fixed base, a photoelectric baffle fixed to the first sliding structure, a scale grating fixed to the fixed base, and a grating read head fixed to the first sliding structure. The photoelectric baffle is used to trigger the photoelectric sensor, and the grating read head cooperates with the scale grating to obtain the displacement of the first sliding structure.

[0012] Optionally, the linear drive motor further includes buffer components fixed to both ends of the fixed base.

[0013] Optionally, the first moving module includes the linear drive motor and an auxiliary mechanism. The auxiliary mechanism includes an auxiliary fixed base, an auxiliary slide rail parallel to the first slide rail, and an auxiliary slider slidably disposed on the auxiliary slide rail. The second moving module includes the linear drive motor. The first sliding structure of the first moving module and the auxiliary slider are both fixedly connected to the fixed base of the second moving module.

[0014] Optionally, the third moving module includes a fixed plate, a first stroke component and a second stroke component fixed to the fixed plate. Both the first stroke component and the second stroke component are capable of outputting linear motion, and the first stroke component, the second stroke component and the suction nozzle component are sequentially connected in a transmission manner. The second stroke component includes a cylinder and a solenoid valve, and the solenoid valve is connected to the air circuit input end and the air circuit output end of the cylinder, respectively.

[0015] Optionally, the cylinder's air input end is provided with a first adjusting element for adjusting the intake air flow, and the cylinder's air output end is provided with a second adjusting element for adjusting the outlet air flow.

[0016] Optionally, the first stroke assembly includes a first motor capable of outputting rotary motion, a lead screw connected to the first motor, a nut block threadedly connected to the lead screw, a second sliding structure fixedly connected to the nut block, and a second slide rail. The second sliding structure is slidably disposed on the second slide rail, and the cylinder is fixed to the second sliding structure.

[0017] Optionally, the fixing plate has a first side and a second side disposed opposite to each other. The number of the first stroke components is two and they are respectively fixed to the first side and the second side of the fixing plate. The number of the second stroke components is two and they are respectively fixed to the first side and the second side of the fixing plate. The suction nozzle assembly includes a first suction nozzle for adsorbing the chip and a second suction nozzle for adsorbing the tray. The second stroke component located on the first side of the fixing plate is connected to the first suction nozzle, and the second stroke component located on the second side of the fixing plate is connected to the second suction nozzle.

[0018] Optionally, the suction nozzle assembly generates negative pressure through a vacuum generator. Both the vacuum generator and the solenoid valve are fixed to the mounting plate, and both the vacuum generator and the solenoid valve are connected to an air source. A safety cover is fixed to the mounting plate, and both the vacuum generator and the solenoid valve are located inside the safety cover. Multiple air pipe connectors are fixed to the bottom of the safety cover. Some of the air pipe connectors are used to connect the vacuum generator and the suction nozzle assembly, and some of the air pipe connectors are used to connect the solenoid valve and the cylinder.

[0019] The beneficial effects of the chip and tray handling device provided by the present invention are as follows: Compared with the prior art, the chip and tray handling device of the present invention includes a first moving module, a second moving module, a third moving module and a suction nozzle assembly connected in sequence. The first moving module and the second moving module are respectively used to drive the suction nozzle assembly to move in a first direction and a second direction. At least one of the first moving module and the second moving module includes a linear drive motor. The linear drive motor can directly convert electrical energy into linear motion mechanical energy without any intermediate conversion mechanism. Therefore, the hardware structure of the first moving module and the second moving module can be reduced, the maintenance cost can be reduced, and the linear motor moves smoothly with less vibration. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A three-dimensional structural diagram of the chip and tray handling device provided in an embodiment of the present invention;

[0022] Figure 2 A three-dimensional structural diagram of the first mobile module provided in an embodiment of the present invention;

[0023] Figure 3 Explosion structure of the first moving module provided in the embodiment of the present invention Figure 1 ;

[0024] Figure 4 for Figure 3 A magnified view of a portion of the moving part;

[0025] Figure 5 Explosion structure of the first moving module provided in the embodiment of the present invention Figure 2 ;

[0026] Figure 6 The three-dimensional structure of the third moving module and the suction nozzle assembly provided in the embodiments of the present invention Figure 1 ;

[0027] Figure 7 The three-dimensional structure of the third moving module and the suction nozzle assembly provided in the embodiments of the present invention Figure 2 .

[0028] The following are the labeling elements in the figure:

[0029] 10-First moving module; 11-Linear drive motor; 111-Fixed base; 1111-Upright plate; 1112-Buffer; 112-First slide rail; 113-First sliding structure; 1131-First slider; 1132-Connecting block; 114-Stator; 115-Motor; 116-Raster reader; 117-Photoelectric sensor; 118-Photoelectric baffle; 119-Dust cover; 12-Auxiliary mechanism; 121-Auxiliary fixing base; 122-Auxiliary... 123-Auxiliary slider; 20-Second moving module; 30-Third moving module; 31-First stroke assembly; 311-First motor; 312-Lead screw; 314-Second sliding structure; 315-Second slide rail; 32-Second stroke assembly; 321-Cylinder; 33-Fixing plate; 34-Safety cover; 341-Air pipe connector; 35-Solenoid valve; 36-Vacuum generator; 40-Nose assembly; 41-First nozzle; 42-Second nozzle. Detailed Implementation

[0030] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0031] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0032] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] Currently, the testing equipment used in the field of CIS chip testing generally uses lead screw module components to realize the movement of the X and Y axes, and then the movement of the module is used to move the material tray or chip. The lead screw module requires a lot of components, resulting in a lot of hardware in the equipment mechanism, high equipment maintenance costs, and the lead screw module has a lot of noise and vibration, resulting in poor overall positioning accuracy of the equipment.

[0035] To alleviate and solve the above technical problems, the present invention proposes a chip and tray handling device, comprising a first moving module 10, a second moving module 20, a third moving module 30, and a suction nozzle assembly 40 connected in sequence. The first moving module 10 is used to drive the suction nozzle assembly 40 to move in a first direction, the second moving module 20 is used to drive the suction nozzle assembly 40 to move in a second direction, and the third moving module 30 is used to drive the suction nozzle assembly 40 to move in a vertical direction. By setting at least one of the first moving module 10 and the second moving module 20 as a linear drive motor 11, the number of parts of the device can be reduced, the cost of the device can be reduced, and the noise and vibration of the device during operation can be reduced.

[0036] The chip and tray handling device provided in the embodiments of the present invention will now be described.

[0037] Please see Figure 1 The chip and tray handling device includes:

[0038] The first moving module 10 is used to output motion in the first direction;

[0039] The second moving module 20 is connected to the moving end of the first moving module 10, and the second moving module 20 is used to output movement in the second direction;

[0040] The third moving module 30 is connected to the moving end of the second moving module 20, and the third moving module 30 is used to output the movement in the vertical direction;

[0041] The nozzle assembly 40 is connected to the moving end of the third moving module 30, and the nozzle assembly 40 is used to pick up and put in chips and / or trays; wherein, the tray is used to place chips, and when the nozzle assembly 40 picks up the tray, it can pick up an empty tray or a tray full of chips.

[0042] The first direction, the second direction, and the vertical direction are arranged in pairs, and at least one of the first moving module 10 and the second moving module 20 includes a linear drive motor 11 capable of outputting linear motion.

[0043] The first moving module 10 has a motion output end, the motion direction of which is a first direction, and the first moving module 10 is used to drive the nozzle assembly 40 to move in the first direction. When the first moving module 10 is working, it drives the second moving module 20, the third moving module 30 and the nozzle assembly 40 to move simultaneously in the first direction.

[0044] The second moving module 20 has a motion output end, the motion direction of which is the second direction, and the second moving module 20 is used to drive the nozzle assembly 40 to move in the second direction. When the second moving module 20 is working, it drives the third moving module 30 and the nozzle assembly 40 to move simultaneously in the second direction.

[0045] The third moving module 30 has a motion output end, the motion direction of which is vertical, and the second moving module 20 is used to drive the nozzle assembly 40 to move in the vertical direction.

[0046] The first direction, the second direction, and the vertical direction are intersecting in pairs, meaning that neither the first direction nor the second direction is vertical, and the first direction and the second direction are not the same. Through the cooperation of the first moving module 10, the second moving module 20, and the third moving module 30, the suction nozzle assembly 40 can be moved to any position in the preset space.

[0047] The linear drive motor 11 can directly convert electrical energy into linear motion mechanical energy without any intermediate conversion mechanism or transmission device. Also known as a linear motor, linear actuator, or pushrod motor, its working principle is primarily based on the Lorentz force, that is, the force exerted on a current-carrying conductor in a magnetic field, causing it to move. Specifically, when current is passed through the primary winding of the linear drive motor 11 (equivalent to the stator 114 of a rotary motor), a traveling wave magnetic field is generated in the air gap between the primary and secondary windings. The driving force is generated under the action of the traveling wave magnetic field and the secondary permanent magnet, thereby achieving the linear motion of the moving parts. The linear drive motor 11 is relatively stable, has fewer parts, and operates with less noise.

[0048] The chip and tray handling device in the above embodiment includes a first moving module 10, a second moving module 20, a third moving module 30, and a suction nozzle assembly 40 connected in sequence. The first moving module 10 and the second moving module 20 are used to drive the suction nozzle assembly 40 to move in a first direction and a second direction, respectively. At least one of the first moving module 10 and the second moving module 20 includes a linear drive motor 11. The linear drive motor 11 can directly convert electrical energy into linear motion mechanical energy without any intermediate conversion mechanism. Therefore, the hardware structure of the first moving module 10 and the second moving module 20 can be reduced, the maintenance cost can be reduced, and the linear motor moves smoothly with less vibration.

[0049] In some embodiments of the present invention, please refer to Figure 1 The first direction, the second direction, and the vertical direction are arranged perpendicularly to each other. The first direction and the second direction are both horizontal and perpendicular to each other. This makes it easier to calculate the moving distance of the first moving module 10 and the second moving module 20 when handling chips and trays. For ease of explanation, the following embodiments are all described with the first direction, the second direction, and the vertical direction arranged perpendicularly to each other.

[0050] In some embodiments of the present invention, please refer to Figures 2 to 5 The linear drive motor 11 includes a fixed base 111, a plurality of stators 114 arranged sequentially along the output direction of the linear drive motor 11, a mover 115 that moves linearly relative to the stators 114, a first sliding structure 113, and a first slide rail 112. The magnetic poles of adjacent stators 114 are opposite in direction. The mover 115 is an energized coil. The stators 114 are fixed to the fixed base 111. The first sliding structure 113 is fixedly connected to the mover 115 and is slidably disposed on the first slide rail 112.

[0051] The fixed base 111 is the basic structure of the linear drive motor 11. Functional components of the linear drive motor 11, such as the stator 114, can all be mounted on the fixed base 111. The fixed base 111 can be an integral structure or a structure in which multiple parts are fixedly connected to each other. The specific structure and shape of the fixed base 111 are not limited here.

[0052] The stator 114 is a magnet, and the arrangement direction of the multiple stators 114 is the same as the output direction of the linear drive motor 11. When the first moving module 10 includes the linear drive motor 11, the output direction of the linear drive motor 11 is the first direction, and the multiple stators 114 are arranged sequentially along the first direction. The magnetic pole direction of the stator 114 is parallel to the second direction. For example, one stator 114 has a first end with an N pole and a second end with an S pole along the second direction, and the adjacent stator 114 has a first end with an S pole and a second end with an N pole along the second direction. When the second moving module 20 includes the linear drive motor 11, the output direction of the linear drive motor 11 is the second direction, and the multiple stators 114 are arranged sequentially along the second direction. The magnetic pole direction of the stator 114 is parallel to the first direction. For example, one stator 114 has a first end with an N pole and a second end with an S pole along the first direction, and the adjacent stator 114 has a first end with an S pole and a second end with an N pole along the first direction.

[0053] The mover 115 is an energized coil and is located adjacent to the stator 114. When energized, the mover 115 generates a changing magnetic field, which interacts with the magnetic field of the stator 114 to create a pushing force on the mover 115, causing it to move along a first direction or a second direction. The driving principle of the linear drive motor 11 can be found in the principles of current linear motors, and will not be elaborated upon here.

[0054] When the mover 115 moves, the mover 115 drives the first sliding structure 113 to move on the first slide rail 112, so that the mover 115 is restricted by the first slide rail 112 and maintains linear motion.

[0055] When the first moving module 10 includes a linear drive motor 11, the length direction of the first slide rail 112 is the first direction; when the second moving module 20 includes a linear drive motor 11, the length direction of the first slide rail 112 is the second direction.

[0056] By setting multiple stators 114 with alternating magnetic poles and movers 115 with energized coils, the first sliding structure 113 slides on the first slide rail 112, which can directly convert electrical energy into mechanical energy for linear motion without the need for an intermediate transmission mechanism (to convert rotational motion into linear motion), and thus requires fewer parts.

[0057] In some embodiments, please refer to Figures 3 to 5 The stator 114 has connection holes on both sides. Screws and other fasteners pass through the connection holes and connect to the fixed base 111, thereby fixing the stator 114 to the fixed base 111.

[0058] In some embodiments, please refer to Figures 3 to 5The first sliding structure 113 includes a connecting block 1132 and a first slider 1131. The connecting block 1132 is used to fix the first slider 1131 and the next moving module, and the first slider 1131 is used to slide in cooperation with the first slide rail 112. For example, in the first moving module 10, the connecting block 1132 is used to fix the first slider 1131 and the fixing seat of the second moving module 20; in the second moving module 20, the connecting block 1132 is used to fix the first slider 1131 and the fixing part of the third moving module 30.

[0059] Optionally, the first slider 1131 and the first slide rail 112 can be standard parts, eliminating the need for redesign and reducing design and production costs.

[0060] Optionally, there are two first slide rails 112, and correspondingly, there is an even number of first sliders 1131. The same number of first sliders 1131 can be set on each first slide rail 112, so that the first sliding structure 113 is more stable when sliding relative to the first slide rail 112.

[0061] Optionally, the cross-section of the connecting block 1132 is U-shaped, the bottom of the U-shape of the connecting block 1132 can be fixedly connected to the first slider 1131, and the two tops of the U-shape of the connecting block 1132 are fixedly connected to the next moving module.

[0062] In some embodiments, please refer to Figures 3 to 5 The linear drive motor 11 also includes a dust cover 119, which is placed on the fixed base 111 and can cover the internal structure of the linear drive motor 11 (such as stator 114, mover 115, first slider 1131, first slide rail 112, etc.) to prevent dust.

[0063] Optionally, the fixed base 111 has upright plates 1111 at both ends, so that the interior of the fixed base 111 forms a receiving space to accommodate the stator 114, the mover 115, the first slider 1131, the first slide rail 112 and other structures. The dust cover 119 is fixed to the two upright plates 1111 at both ends, which can reduce dust falling into the interior of the fixed base 111.

[0064] In some embodiments of the present invention, please refer to Figure 4 and Figure 5 The linear drive motor 11 also includes a photoelectric sensor 117 fixed to the fixed base 111, a photoelectric baffle 118 fixed to the first sliding structure 113, a scale grating fixed to the fixed base 111, and a grating reading head 116 fixed to the first sliding structure 113. The photoelectric baffle 118 is used to trigger the photoelectric sensor 117, and the grating reading head 116 cooperates with the scale grating to obtain the displacement of the first sliding structure 113.

[0065] The photoelectric sensor 117 is fixedly installed, and the photoelectric baffle 118 moves synchronously with the first sliding structure 113. The photoelectric sensor 117 can convert light signals into electrical signals. When the photoelectric sensor 117 is blocked by the photoelectric baffle 118, the photoelectric sensor 117 is triggered. The trigger signal can be transmitted to the controller, and the controller sends a control signal to control the start and stop of the linear drive motor 11.

[0066] The scale grating is fixedly installed, and the grating read head 116 moves synchronously with the first sliding structure 113. The scale grating and the grating read head 116 are collectively referred to as a grating ruler, also known as a grating ruler displacement sensor (grating ruler sensor), which is a measurement feedback device that works using the optical principle of a grating. Through the cooperation of the scale grating and the grating read head 116, the position of the first sliding structure 113 can be measured in real time.

[0067] By setting the photoelectric sensor 117 and the grating ruler, the start and stop of the linear drive motor 11 can be controlled to prevent the linear drive motor 11 from malfunctioning and exceeding the preset stroke during operation. By setting the scale grating and the grating reading head 116, the position of the first sliding structure 113 can be detected, realizing automatic control of the position of the suction nozzle assembly 40.

[0068] In some embodiments, photoelectric sensors 117 are provided at both ends of the fixed base 111. When the photoelectric baffle 118 moves to block the photoelectric sensor 117, that is, when the first sliding structure 113 has moved to the limit position, the photoelectric sensor 117 is triggered. After the trigger signal is transmitted to the controller, the controller controls the linear drive motor 11 to stop moving so as to prevent the first sliding structure 113 from colliding with the fixed base 111.

[0069] Optionally, the first sliding structure 113 has an initial position, and a photoelectric sensor 117 is provided at the initial position to detect whether the first sliding structure 113 has returned to the initial position.

[0070] In some embodiments of the present invention, please refer to Figure 3 and Figure 5 The linear drive motor 11 also includes buffer members 1112 fixed to both ends of the fixed base 111. The buffer members 1112 are deformable structures under stress, used to reduce the impact on the first sliding structure 113. If a malfunction occurs after the first sliding structure 113 has moved to its limit position, the first sliding structure 113 will continue to move and collide with the buffer members 1112.

[0071] The buffer 1112 can buffer the impact force when the first sliding structure 113 collides with the fixed base 111, so as to avoid damaging the first sliding structure 113 and the fixed base 111.

[0072] In some embodiments, the buffer 1112 is made of sponge, rubber, silicone, etc.

[0073] In some embodiments of the present invention, please refer to Figure 2 The first moving module 10 includes a linear drive motor 11 and an auxiliary mechanism 12. The auxiliary mechanism 12 includes an auxiliary fixed base 121, an auxiliary slide rail 122 parallel to the first slide rail 112, and an auxiliary slider 123 slidably disposed on the auxiliary slide rail 122. The second moving module 20 includes a linear drive motor 11. The first sliding structure 113 and the auxiliary slider 123 of the first moving module 10 are both fixedly connected to the fixed base 111 of the second moving module 20.

[0074] The auxiliary mechanism 12 is used to assist the motion output of the first moving module 10, making the transport output of the first moving module 10 in the first direction more stable. The auxiliary mechanism 12 includes an auxiliary fixed base 121, an auxiliary slide rail 122, and an auxiliary slider 123. The auxiliary fixed base 121 is a fixed structure, the auxiliary slide rail 122 is fixed on the auxiliary fixed base 121, and the auxiliary slider 123 is slidably disposed on the auxiliary slide rail 122.

[0075] By fixing the first sliding structure 113 of the first moving module 10 and the auxiliary slider 123 of the auxiliary mechanism 12 to the fixed base 111 of the second moving module 20, the first sliding structure 113 and the auxiliary slider 123 of the first moving module 10 move synchronously. Even if the length of the second moving module 20 in the second direction is long, it can be stably connected to the second moving module 20, making the motion output of the first moving module 10 in the first direction more stable.

[0076] In some embodiments of the present invention, please refer to Figure 6 and Figure 7 The third moving module 30 includes a fixed plate 33, a first stroke component 31 and a second stroke component 32 fixed to the fixed plate 33. Both the first stroke component 31 and the second stroke component 32 can output linear motion, and the first stroke component 31, the second stroke component 32 and the suction nozzle component 40 are sequentially connected by transmission. The second stroke component 32 includes a cylinder 321 and a solenoid valve 35. The solenoid valve 35 is connected to the air input end and the air output end of the cylinder 321 respectively.

[0077] The fixed plate 33 serves as the fixing and mounting structure for the third moving module 30. The first stroke assembly 31 and the second stroke assembly 32 are both mounted on the fixed plate 33. The fixed plate 33 is fixedly connected to the motion output structure of the second moving module 20 (such as the first sliding structure 113 of the second moving module 20). The first stroke assembly 31, the second stroke assembly 32, and the nozzle assembly 40 are sequentially connected, meaning that when the first stroke assembly 31 is working, the second stroke assembly 32 and the nozzle assembly 40 move up and down simultaneously; when the second stroke assembly 32 is working, the nozzle assembly 40 moves up and down. When adjusting the height of the nozzle assembly 40, the first stroke assembly 31 is used for initial adjustment, and then the second stroke assembly 32 is used for fine adjustment. In the second stroke assembly 32, the cylinder 321 is the mechanism for driving the nozzle assembly 40 to move up and down, and the solenoid valve 35 is an air circuit switch. When the solenoid valve 35 is open, it provides airflow to the cylinder 321, driving the nozzle assembly 40 to move up and down. Specifically, when the nozzle assembly 40 descends, air is input into the cylinder 321 from the air input end through the solenoid valve 35 to generate positive pressure; when the nozzle assembly 40 rises, air is output from the cylinder 321 to the solenoid valve 35 from the air output end.

[0078] The height of the nozzle assembly 40 is initially adjusted by the first stroke component 31, and then precisely adjusted by the second stroke component 32, making the height adjustment of the nozzle assembly 40 more accurate. Furthermore, the second stroke component 32 is controlled by the cylinder 321, which minimizes the impact on the tray or chip when the nozzle assembly 40 moves downwards to pick up the material, thus preventing damage to the tray or chip.

[0079] In some embodiments of the present invention, please refer to Figure 6 and Figure 7 The cylinder 321 has a first regulating element at its air inlet for adjusting the intake air flow and a second regulating element at its air outlet for adjusting the outlet air flow. When the nozzle assembly 40 descends, gas is input into the cylinder 321 from the air inlet through the solenoid valve 35. Adjusting the first regulating element adjusts the intake air flow at the air inlet; a higher intake air flow results in a faster descent of the nozzle assembly 40, while a lower intake air flow results in a slower descent. When the nozzle assembly 40 ascends, air from inside the cylinder 321 is output to the solenoid valve 35 through the air outlet. Adjusting the second regulating element adjusts the outlet air flow; a higher outlet air flow results in a faster ascent of the nozzle assembly 40, while a lower outlet air flow results in a slower ascent. In essence, the first regulating element adjusts the descent speed of the nozzle assembly 40, and the second regulating element adjusts the ascent speed.

[0080] The descent speed and ascent speed of the nozzle assembly 40 can be adjusted by setting the first and second adjustment components, respectively.

[0081] In some embodiments, the first adjusting element is an adjusting screw, and the intake airflow can be adjusted by rotating the first adjusting element.

[0082] In some embodiments, the second adjusting member is an adjusting screw, and the air flow rate can be adjusted by rotating the second adjusting member.

[0083] In some embodiments of the present invention, please refer to Figure 6 and Figure 7 The first stroke assembly 31 includes a first motor 311 capable of outputting rotational motion, a lead screw 312 connected to the first motor 311, a nut block threadedly connected to the lead screw 312, a second sliding structure 314 fixedly connected to the nut block, and a second slide rail 315. The second sliding structure 314 is slidably disposed on the second slide rail 315, and the cylinder 321 is fixed to the second sliding structure 314.

[0084] The first motor 311 is the power mechanism. The rotational motion of the first motor 311 drives the lead screw 312 to rotate, and the rotational motion of the lead screw 312 is converted into linear motion of the nut block along the length direction of the second slide rail 315. The nut block is fixedly connected to the second sliding structure 314. Therefore, the second sliding structure 314 also moves along the length direction of the second slide rail 315, thereby driving the cylinder 321 and the suction nozzle assembly 40 to move. It should be noted that the length direction of the second slide rail 315 is vertical, and the movement of the second sliding structure 314 and the nut block is also vertical.

[0085] The first stroke component 31 is a lead screw assembly, which has high motion accuracy and runs smoothly.

[0086] In some embodiments, the second sliding structure 314 includes a second slider and a mounting plate that are fixedly connected. The second slider is slidably connected to the second slide rail 315, and the mounting plate is used to connect the second slider and the second stroke assembly 32.

[0087] Optionally, there are two second slide rails 315 and two or more second sliders, with at least one second slider on each second slide rail 315. By setting two second slide rails 315, the vertical movement of the second sliding structure 314 and the nut block is made more stable.

[0088] In some embodiments of the present invention, please refer to Figure 6 and Figure 7The nozzle assembly 40 includes a first nozzle 41 disposed on a first side of the fixing plate 33 and a second nozzle 42 disposed on a second side of the fixing plate 33. The first nozzle 41 is used to pick up chips, and the second nozzle 42 is used to pick up trays. Thus, the conveying device can pick up both chips and trays.

[0089] In some embodiments of the present invention, please refer to Figure 6 and Figure 7 The fixing plate 33 has a first side and a second side arranged opposite to each other. There are two first stroke components 31, which are fixed to the first side and the second side of the fixing plate 33 respectively. There are two second stroke components 32, which are fixed to the first side and the second side of the fixing plate 33 respectively. The suction nozzle assembly 40 includes a first suction nozzle 41 for adsorbing chips and a second suction nozzle 42 for adsorbing material trays. The second stroke component 32 located on the first side of the fixing plate 33 is connected to the first suction nozzle 41, and the second stroke component 32 located on the second side of the fixing plate 33 is connected to the second suction nozzle 42.

[0090] On the first side of the fixed plate 33, the first first stroke assembly 31, the first second stroke assembly 32, and the first suction nozzle 41 are sequentially connected by a transmission mechanism. The cooperation of the various components on the first side of the fixed plate 33 enables control over the lifting and lowering movement of the first suction nozzle 41. On the second side of the fixed plate 33, the second first stroke assembly 31, the second second stroke assembly 32, and the second suction nozzle 42 are sequentially connected by a transmission mechanism. The cooperation of the various components on the second side of the fixed plate 33 enables control over the lifting and lowering movement of the second suction nozzle 42.

[0091] In this embodiment, the first suction nozzle 41 and the second suction nozzle 42 are controlled separately by different first stroke components 31 and second stroke components 32, so the adsorption of the chip and the adsorption of the tray are independent of each other and do not affect each other.

[0092] In some embodiments, there are multiple first suction nozzles 41 and multiple second suction nozzles 42.

[0093] In some embodiments of the present invention, please refer to Figure 6 and Figure 7 The suction nozzle assembly 40 generates negative pressure through the vacuum generator 36. The vacuum generator 36 and the solenoid valve 35 are both fixed to the fixing plate 33, and both the vacuum generator 36 and the solenoid valve 35 are connected to the air source. A safety cover 34 is fixed on the fixing plate 33. The vacuum generator 36 and the solenoid valve 35 are both set inside the safety cover 34. Multiple air pipe joints 341 are fixed at the bottom of the safety cover 34. Some air pipe joints 341 are used to connect the vacuum generator 36 and the suction nozzle assembly 40, and some air pipe joints 341 are used to connect the solenoid valve 35 and the cylinder 321.

[0094] The air source simultaneously provides air pressure to both the solenoid valve 35 and the vacuum generator 36. Specifically, the air source provides positive pressure to the solenoid valve 35 and negative pressure to the vacuum generator 36. The vacuum generator 36 is a device that generates negative pressure. The vacuum generator 36 is connected to the nozzle assembly 40, causing the nozzle assembly 40 to generate negative pressure, thereby adsorbing the material tray or chip. The air pipe connector 341 used to connect the vacuum generator 36 and the nozzle assembly 40 is a first air pipe connector 341. The two ends of the first air pipe structure are respectively connected to air pipes, and the two air pipes are respectively connected to the vacuum generator 36 and the nozzle assembly 40. The air pipe connector 341 used to connect the solenoid valve 35 and the cylinder 321 is a second air pipe connector 341. The two ends of the second air pipe structure are respectively connected to air pipes, and the two air pipes are respectively connected to the solenoid valve 35 and the cylinder 321.

[0095] The safety cover 34 serves two purposes: first, it protects the vacuum generator 36 and the solenoid valve 35; second, the safety cover 34 is equipped with multiple air pipe connectors 341, and the pipes connecting the solenoid valve 35 and the vacuum generator 36 extend to the air pipe connectors 341. The pipes of the cylinder 321 and the suction assembly can be directly connected to the air pipe connectors 341, thereby making the distribution of the air pipes neater and easier to install and maintain.

[0096] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A chip and tray handling device, characterized in that, include The first motion module is used to output motion in the first direction; The second moving module is connected to the moving end of the first moving module, and the second moving module is used to output movement in the second direction; The third moving module is connected to the moving end of the second moving module, and the third moving module is used to output movement in the vertical direction; The nozzle assembly is connected to the moving end of the third moving module, and the nozzle assembly is used to pick up and put in chips and / or trays; The first direction, the second direction, and the vertical direction are arranged to intersect each other, and at least one of the first moving module and the second moving module includes a linear drive motor capable of outputting linear motion.

2. The chip and tray handling device as described in claim 1, characterized in that, The linear drive motor includes a fixed base, a plurality of stators arranged sequentially along the output direction of the linear drive motor, a mover that moves linearly relative to the stators, a first sliding structure, and a first slide rail. The magnetic poles of adjacent stators are opposite in direction. The mover is an energized coil. The stators are fixed to the fixed base. The first sliding structure is fixedly connected to the mover and is slidably disposed on the first slide rail.

3. The chip and tray handling device as described in claim 2, characterized in that, The linear drive motor further includes a photoelectric sensor fixed to the fixed base, a photoelectric baffle fixed to the first sliding structure, a scale grating fixed to the fixed base, and a grating read head fixed to the first sliding structure. The photoelectric baffle is used to trigger the photoelectric sensor, and the grating read head cooperates with the scale grating to obtain the displacement of the first sliding structure.

4. The chip and tray handling device as described in claim 2, characterized in that, The linear drive motor also includes buffer components fixed to both ends of the fixed base.

5. The chip and tray handling device as described in claim 2, characterized in that, The first moving module includes the linear drive motor and an auxiliary mechanism. The auxiliary mechanism includes an auxiliary fixed base, an auxiliary slide rail parallel to the first slide rail, and an auxiliary slider slidably disposed on the auxiliary slide rail. The second moving module includes the linear drive motor. The first sliding structure of the first moving module and the auxiliary slider are both fixedly connected to the fixed base of the second moving module.

6. The chip and tray handling device as described in any one of claims 1-5, characterized in that, The third moving module includes a fixed plate, a first stroke component and a second stroke component fixed to the fixed plate. Both the first stroke component and the second stroke component are capable of outputting linear motion. The first stroke component, the second stroke component and the suction nozzle component are sequentially connected in a transmission manner. The second stroke component includes a cylinder and a solenoid valve. The solenoid valve is connected to the air input end and the air output end of the cylinder, respectively.

7. The chip and tray handling device as described in claim 6, characterized in that, The cylinder has a first regulating element at the air inlet for adjusting the air intake flow rate, and a second regulating element at the air outlet for adjusting the air outlet flow rate.

8. The chip and tray handling device as described in claim 6, characterized in that, The first stroke assembly includes a first motor capable of outputting rotary motion, a lead screw connected to the first motor, a nut block threadedly connected to the lead screw, a second sliding structure fixedly connected to the nut block, and a second slide rail. The second sliding structure is slidably disposed on the second slide rail, and the cylinder is fixed to the second sliding structure.

9. The chip and tray handling device as described in claim 6, characterized in that, The fixing plate has a first side and a second side arranged opposite to each other. There are two first stroke components, which are respectively fixed to the first side and the second side of the fixing plate. There are two second stroke components, which are respectively fixed to the first side and the second side of the fixing plate. The suction nozzle assembly includes a first suction nozzle for adsorbing the chip and a second suction nozzle for adsorbing the tray. The second stroke component located on the first side of the fixing plate is connected to the first suction nozzle, and the second stroke component located on the second side of the fixing plate is connected to the second suction nozzle.

10. The chip and tray handling device as described in claim 6, characterized in that, The suction nozzle assembly generates negative pressure through a vacuum generator. Both the vacuum generator and the solenoid valve are fixed to the mounting plate and are connected to an air source. A safety cover is fixed to the mounting plate. The vacuum generator and the solenoid valve are both located inside the safety cover. Multiple air pipe connectors are fixed to the bottom of the safety cover. Some of the air pipe connectors are used to connect the vacuum generator and the suction nozzle assembly, and some of the air pipe connectors are used to connect the solenoid valve and the cylinder.

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