Method for approaching a microcontact needle towards an object approached and particle beam microscope

Abstract

This invention relates to a method and a particle beam microscope for bringing a microcontact needle toward a target object along a proximity direction. The target object is, in particular, another microcontact needle or a component used in an electrical or electronic circuit. The method utilizes a particle beam microscope. The particle beam microscope includes a positioning device configured to move the microcontact needle relative to the target object along a proximity direction. The method includes recording multiple images from different observation directions using the particle beam microscope, each image representing the target object and the microcontact needle. The method further includes controlling the positioning device based on the recorded images, such that the positioning device moves the microcontact needle relative to the target object along the proximity direction or maintains the positioning of the microcontact needle relative to the target object along the proximity direction.

Description

Technical Field

[0001] The present invention relates to a method for bringing a micro-contact needle toward a target object along a proximity direction, and to a particle beam microscope for performing the method. Background Technology

[0002] In the field of manufacturing miniaturized electrical and electronic circuits (referred to herein as "circuits"), which are fabricated on substrates using photolithography or other methods, the critical dimensions of these circuits total only a few nanometers. To enable the inspection and testing of the electrical characteristics and functionality of such circuits, they possess contact pads that can engage with micro-contact pins, which in turn can be connected to external electrical devices. A micro-contact pin, intended to engage with such a contact pad, is brought close to the contact pad until mechanical contact is made, thus establishing an electrical connection between the micro-contact pin and the contact pad.

[0003] Because of the small size of the circuit and its components, such contact pads and micro-contacts are also small in size. Therefore, such micro-contacts are typically fragile and can easily deform or break due to excessive contact pressure. When such a micro-contact is brought close to the contact pad at a high approach speed, deformation and / or damage to the micro-contact and / or the contact pad may occur upon placement. This also applies to the circuit and its components. When such a micro-contact is brought close to the contact pad at a low approach speed, the approach or contact can take a very long time. Summary of the Invention

[0004] The purpose of this invention is to provide a way to bring a micro-contact pin close to a circuit's contact pads while avoiding damage to the micro-contact pin and the contact pads in the process.

[0005] The above-mentioned objective is achieved by the present invention based on the subject matter described below. Advantageous developments of the invention are also defined below.

[0006] A first aspect of the invention relates to a method for bringing a microcontact needle toward a target object along a proximity direction. The target object is, in particular, another microcontact needle or a component for an electrical or electronic circuit. The method uses a particle beam microscope. The particle beam microscope includes a positioning device configured to move the microcontact needle relative to the target object along the proximity direction. The method includes recording multiple images from different observation directions using the particle beam microscope, each image representing the target object and the microcontact needle. The method further includes controlling the positioning device based on the recorded images, such that the positioning device moves the microcontact needle relative to the target object along the proximity direction or maintains the positioning of the microcontact needle relative to the target object along the proximity direction.

[0007] In some embodiments, controlling the positioning device includes: determining, based on the recorded image, whether to perform an approach of the micro-contact needle toward the target object along the approach direction; if the determination indicates that an approach of the micro-contact needle toward the target object along the approach direction will be performed, controlling the positioning device to move the micro-contact needle relative to the target object along the approach direction; and if the determination indicates that an approach of the micro-contact needle toward the target object will not be performed, controlling the positioning device to maintain the positioning of the micro-contact needle relative to the target object along the approach direction.

[0008] In some embodiments, determining whether to perform an approach of the micro-contact needle toward the target object along the approach direction includes: identifying the micro-contact needle and the target object in the recorded images; wherein the determination of whether to perform an approach of the micro-contact needle toward the target object along the approach direction is performed based on the position of the micro-contact needle identified in the recorded images and the position of the target object identified in the recorded images.

[0009] In some embodiments, determining whether to perform an approach of the micro-contact needle toward the target object along the approach direction further includes: calculating a distance value based on the position of the micro-contact needle identified in the recorded images and the position of the target object identified in the recorded images, the distance value representing the distance between the target object and the micro-contact needle in the approach direction; wherein the determination of whether to perform an approach of the micro-contact needle toward the target object along the approach direction is performed based on the calculated distance value.

[0010] In some implementations, determining whether to perform the approach of the micro-contact needle toward the target object along the approach direction includes: identifying segments in the recorded images, wherein each of the segments represents a structure in one of the recorded images; wherein the determination of whether to perform the approach of the micro-contact needle toward the target object along the approach direction is performed based on the position of the segments identified in the recorded images.

[0011] In some implementations, determining whether to perform an approach of the micro-contact needle toward the target object along the approach direction further includes: calculating a distance value based on the position of the segments identified in the recorded images, the distance value representing the distance between the target object and the micro-contact needle in the approach direction; and performing the determination of whether to perform an approach of the micro-contact needle toward the target object along the approach direction based on the calculated distance value.

[0012] In some implementations, if the calculated distance value is greater than a predetermined distance threshold, the determination indicates that the micro-contact needle will approach the target object along the approach direction; and if the calculated distance value is less than the predetermined distance threshold, the determination indicates that the micro-contact needle will not approach the target object along the approach direction.

[0013] In some implementations, the distance value is also calculated based on these observation directions, and in particular the differences between these observation directions.

[0014] In some implementations, the positioning device is controlled during the recording of the plurality of images such that the distance between the micro-contact needle and the approaching target object remains constant in the approach direction.

[0015] In some embodiments, the method further includes controlling the positioning device such that the positioning device sets a proximity speed relative to the approaching target object along the proximity direction based on the recorded images.

[0016] In some implementations, the approach speed is set to a value that decreases as the distance between the approaching target and the micro-contact needle decreases in the approach direction.

[0017] In some embodiments, the particle beam microscope includes a deflection unit configured to successively guide a particle beam to a plurality of different positions on the focal plane and to variably set the propagation direction of the particle beam at each of these positions.

[0018] The recording of the multiple images includes, for each image: controlling the deflection unit such that the particle beam is successively guided to multiple different positions on the focal plane, and synchronously detecting the interaction products of the particle beam with the approaching target object and the micro-contact needle; wherein the observation direction is the average propagation direction of the particle beam during the recording of the corresponding image.

[0019] In some embodiments, the observation direction deviates from the approach direction by at most 45°, particularly at most 30° or at most 10° or at most 1°; and / or wherein the approach direction deviates from the normal vector of the plane in which the approaching target object is arranged by at most 45°, particularly at most 20° or at most 5°; wherein the observation directions deviate from each other by at most 60°, particularly at most 30° or at most 10° or at most 2°; and / or wherein the observation directions deviate from each other by at least 0.0002°, particularly at least 0.001°.

[0020] In some embodiments, the positioning device includes a sample stage that carries the approaching target object and is configured to move the approaching target object in the approach direction; and / or wherein the positioning device includes a micro-contact needle positioning device that carries the micro-contact needle and is configured to move the micro-contact needle in the approach direction.

[0021] In some implementations, these images are two-dimensional images; and / or the approach direction remains unchanged during the method; and / or the micro-contact needle is spaced apart from the approaching target object in the approach direction during the recording of the plurality of images.

[0022] In some implementations, recording the multiple images and controlling the positioning device are performed repeatedly.

[0023] A second aspect of the invention relates to a particle beam microscope for bringing a micro-contact needle toward a target object along a proximity direction. The target object is, in particular, another micro-contact needle or a component for an electrical or electronic circuit. The particle beam microscope includes: a positioning device configured to move the micro-contact needle relative to the target object along a proximity direction; an image recording device configured to record a plurality of images from different viewing directions, each image representing the target object and the micro-contact needle; and a controller configured to control the positioning device based on the recorded images, such that the positioning device moves the micro-contact needle relative to the target object along the proximity direction or maintains the positioning of the micro-contact needle relative to the target object along the proximity direction.

[0024] Both the micro-contact needle and the approaching target object are represented in the recorded image. The image shows the micro-contact needle and the approaching target object from different viewing directions. As the micro-contact needle approaches the approaching target object along the approach direction, the micro-contact needle and the approaching target object are separated by a certain distance in the approach direction, which decreases during the approach (and disappears upon contact).

[0025] There is a deterministic relationship between the position of the micro-contact needle in the recorded image, the position of the approaching target object in the recorded image, and the distance between the micro-contact needle and the approaching target object along the approach direction, wherein this relationship depends on the observation direction. In other words, the distance between the micro-contact needle and the approaching target object along the approach direction can be calculated based on the position of the micro-contact needle in the recorded image and the position of the approaching target object in the recorded image. Accordingly, the approach of the micro-contact needle toward the approaching target object can be continued or stopped based on the determined distance value.

[0026] By stopping the approach of the micro-contact needle when it falls below a predetermined distance threshold, the high relative velocity between the micro-contact needle and the approaching target object is significantly reduced before contact, thus preventing damage upon contact. Furthermore, as long as the (monitored) distance between the micro-contact needle and the approaching target object in the approach direction is sufficiently large, a high relative velocity can be maintained between them. Attached Figure Description

[0027] Further details and embodiments of the invention are explained more fully below with reference to the accompanying drawings.

[0028] Figure 1 A particle beam microscope according to one embodiment is shown.

[0029] Figure 2 A flowchart illustrating a proximity process, according to one embodiment, is shown, in which a micro-contact needle approaches a target object.

[0030] Figure 3 An exemplary first image is shown, representing multiple micro-contact pins and circuitry.

[0031] Figure 4 An exemplary second image showing a microcontact pin and circuitry is shown.

[0032] Figure 5 A diagram is shown to illustrate the term "direction of observation".

[0033] Figure 6 The first and second images are shown superimposed.

[0034] Figure 7 An exemplary segmentation of the first image is shown. Detailed Implementation

[0035] Particle beam microscopy

[0036] Figure 1 An exemplary particle beam microscope 100 according to an embodiment of the present invention is shown. For example, the particle beam microscope 100 may be an electron beam microscope (scanning electron microscope) or an ion beam microscope (scanning ion microscope).

[0037] The particle beam microscope 100 includes a particle beam column 101. The particle beam column 101 includes a particle source 110 for providing charged particles (e.g., electrons or ions) to a particle beam 102, an accelerating electrode 120 for accelerating the particles in the particle beam 102, a deflection unit 130 for deflecting (i.e., redirecting) the particle beam 102, and an objective lens 140 for focusing the particle beam 102 into a focal plane 141.

[0038] The deflection unit 130 is configured to laterally deflect the particle beam 102 relative to its propagation direction. In the present case, the deflection unit 130 is configured to laterally deflect the particle beam 102 relative to its propagation direction in two different deflection directions. To achieve this function, the deflection unit 130 includes a first deflection stage 131 disposed downstream of the accelerating electrode 120. The first deflection stage 131 may include one or more deflection coils and / or multiple deflection electrodes for each deflection direction, adapted to deflect the particle beam 102. As a result, the particle beam 102 can be successively guided to multiple different positions in the focal plane 141. In other words, the deflection unit 130 is configured to variably set the incident position of the particle beam 102 on the sample 10.

[0039] To enable image recording from different observation directions using the particle beam microscope 100, the deflection unit 130 can also be configured to variably set the propagation direction of the particle beam 102 at each position on the focal plane 141. This means that the deflection unit 130 can not only variably set the position where the particle beam 102 passes through the focal plane 141, but also variably set the propagation direction of the particle beam 102 for each variably set position. In other words, the deflection unit 130 can be configured to variably set the incident angle of the particle beam 102 (relative to the focal plane 141) at each of a plurality of different positions on the sample 10. To achieve this function, the deflection unit 130 also includes a second deflection stage 132 disposed downstream of the first deflection stage 131. The second deflection stage 132 may include one or more deflection coils and / or multiple deflection electrodes adapted to deflect the particle beam 102 for each deflection direction. The possibility of changing the propagation direction of the particle beam 102 at each position on the focal plane 141 allows the observation direction for recording images to be variably set (by means of the deflection unit 130). For this deflection unit 130, the observation direction is defined as the average propagation direction of the particle beam 102 during image recording. This configuration allows multiple images (images of sample 10, images of circuitry 11 on sample 10, images of components of circuitry 11 on sample 10, and images of microcontact needle 20) to be recorded sequentially from different observation directions.

[0040] The particle beam microscope 100 also includes a vacuum chamber 150 arranged on the particle beam column 101, and a vacuum is generated in the vacuum chamber.

[0041] The particle beam microscope 100 also includes a sample stage 160 disposed in a vacuum chamber 150. The sample stage 160 is configured to carry a sample 10. The sample stage 160 can be configured to displace and rotate the sample 10. In the example shown, the sample stage 160 includes a lower section and an upper section. The sample 10 is rigidly mounted on the upper section. The upper section can be displaced and / or rotated relative to the lower section by a controlled actuator (not shown), thereby enabling a controlled change in the position and / or orientation of the sample 10 relative to the particle beam column 101.

[0042] The particle beam microscope 100 also includes a detector 170 for detecting interaction products arising from the interaction between the particle beam 102 and an object. Such objects include, for example, the sample 10, circuit 11, components of circuit 11, and microcontact needle 20. Interaction products can be, for example, particles (especially charged particles, such as secondary electrons, backscattered electrons, secondary ions, and backscattered ions) or radiation (such as light). Figure 1 In the example shown, detector 170 is arranged in vacuum chamber 150; however, detector 170 may also be arranged in particle beam column 101.

[0043] The particle beam microscope 100 also includes a controller 180 for controlling the particle beam microscope 100 and its components. Specifically, the controller 180 controls the particle source 110, accelerating electrode 120, deflection unit 130, and objective lens 140 via one or more communication / control lines 190. The controller 180 controls the sample stage 160 via the communication / control lines 190. The controller 180 receives detection signals from the detector 170 via one or more communication lines 190.

[0044] Although this is in Figure 1 Although not shown, input devices (such as a mouse, keyboard, etc.) and output devices (such as a display device (screen)) can be connected to controller 180. Controller 180 can be controlled by external devices and / or by an operator via input devices. Controller 180 can output information via output devices, particularly by presenting signals on the display device.

[0045] The particle beam microscope 100 may also include one or more micro-contact needle positioning devices 195. Each micro-contact needle positioning device 195 is configured to carry a micro-contact needle 20 arranged in the vacuum chamber 150 and to move the micro-contact needle along a proximity direction. Figure 1 In the example, the approach direction is vertical. Controller 180 controls each micro-contact needle positioning device 195 via communication / control line 190.

[0046] The image recording device of the particle beam microscope 100 is realized through the cooperation of the components of the particle beam microscope 100, especially through the cooperation of the particle beam column 101, the detector 170 and the controller 180.

[0047] The positioning device 200 of the particle beam microscope 100 can be implemented by the sample stage 160, or by the micro-contact needle positioning device 195, or by a combination of the sample stage 160 and the micro-contact needle positioning device 195, which is configured to move the micro-contact needle 20 relative to the approaching target object (e.g., sample 10, circuit 11, other micro-contact needles 21, 22) in an approach direction.

[0048] The particle beam microscope 100 also includes one or more current sources and / or one or more voltage sources (not shown in the figure). The current and voltage sources are configured to supply suitable voltage and current to the components of the particle beam microscope 100, particularly the electrodes for generating an electric field and the coils for generating a magnetic field. These current and voltage sources are controlled by a controller 180.

[0049] A method for directing a micro-contact needle toward a target object.

[0050] The following is for reference. Figure 2Describes a method (approach process) for bringing a micro-contact needle 20 toward a target object, the method of which can use Figure 1 The particle beam microscope 100 shown is used to perform this. Orienting the micro-contact needle 20 toward the target object specifically means orienting the tip of the micro-contact needle 20 toward the target object.

[0051] For illustrative purposes, it should be assumed that the proximate target object is the (electrical or electronic) circuit 11 on the sample 10 arranged on the sample stage 160. However, the proximate target object may alternatively be a component of the circuit 11 on the sample 10 or the sample 10 itself. As another alternative, the proximate target object may be another micro-contact needle 21, 22. The proximate target object is arranged in the vacuum chamber 150.

[0052] At the start of the approach process, the micro-contact needle 20 is arranged at a distance D from the approaching target object in the approach direction (see...). Figure 1 ( ), where the distance D is greater than a predetermined distance threshold. For example, the distance threshold is 50 nm. In this exemplary state, the approach process begins at step S1.

[0053] Steps S1 and S2 involve recording multiple images from different viewing directions using a particle beam microscope 100, each image representing the approaching target object and the micro-contact needle 20. The images can be two-dimensional.

[0054] In this example, two images are recorded in steps S1 and S2. Figure 3 An example of a first image 15 is shown, which is recorded from a first observation direction using a particle beam microscope 100 in step S1. Figure 4 An example of a second image 16 is shown, which is recorded in step S2 using a particle beam microscope 100 from a second observation direction different from the first observation direction. The number of images recorded from different observation directions is not limited to two, and can be three or more.

[0055] Recording multiple images using a particle beam microscope 100 is performed as follows: a particle beam 102 is successively guided to multiple different positions on a focal plane 141. This is achieved by deflecting the particle beam 102 to different degrees successively by a deflection unit 130, which is considered here to refer to the overall effect of the deflection unit 130, i.e., the deflection achieved together by the first deflection stage 131 and the second deflection stage 132. In this case, the particle beam 102 (upstream, in, or downstream of the focal plane 141) is incident on an object (e.g., sample 10, circuit 11, or microstructure needle 20). The incident particle beam 102 on the object produces interaction products, which are detected by a detector 170. The detection signal generated by the detector 170 is associated with the deflection of the particle beam 102 and stored by a controller 180, thereby recording the image.

[0056] Because a two-stage deflection unit 130 is used in this example, multiple images 15, 16 can be recorded from different viewing directions. This will be referenced. Figure 5 To explain. Figure 5 A schematic example of recording a first image 15 is shown on the left, and a schematic example of recording a second image 16 is shown on the right. The vertical dotted line indicates the optical axis 142 of the objective lens 140. The horizontal dashed line indicates the focal plane 141.

[0057] exist Figure 5 On the left, multiple dashed arrows indicate multiple different propagation directions 115 of the particle beam 102 during the process of guiding the particle beam 102 to multiple different positions on the focal plane 141 to record the first image 15. The observation direction during image recording is defined, for example, as the average propagation direction of the particle beam 102 during the process of guiding the particle beam 102 to multiple different positions on the focal plane 141 to record the image (i.e., during image recording). Figure 5 In the example shown, the propagation direction 115 is arranged mirror-symmetrically around the optical axis 142 of the objective lens 140 and originates from a point on the optical axis 142. Therefore, the first observation direction (i.e., the observation direction when recording the first image 15) is oriented along the optical axis 142 of the objective lens 140.

[0058] exist Figure 5 On the right, multiple dashed arrows indicate multiple different propagation directions 116 of the particle beam 102 during the process of guiding the particle beam 102 to multiple different positions on the focal plane 141 to record the second image 16. Figure 5 In the example shown, the propagation direction 116 originates from a point at a certain distance from the optical axis 142. Therefore, the second observation direction (i.e., the observation direction when recording the second image 16) is tilted relative to the optical axis 142 of the objective lens 140.

[0059] Figure 3 A first image 15, recorded from a first observation direction, is shown. Image 15 shows a microstructural needle 20, which is centered at the upper edge of the first image 15 and has a downwardly tapering needle shape. Image 15 shows two additional microstructural needles 21 and 22, respectively, at the lower and left edges of the first image 15. Image 15 also shows a circuit 11 on the sample 10, which includes multiple fields, each with a checkerboard pattern.

[0060] Figure 4 A second image 16, recorded from a second observation direction, is shown. Image 16 also shows the microstructure needles 20, 21, and 22, as well as the circuit 11. Images 15 and 16 each show the same situation. This means that during the recording of the two images 15 and 16, the microstructure needles 20, 21, and 22, as well as the sample 10, each had the same position and orientation relative to each other in their respective situations.

[0061] Figure 6 A first image 15 and a second image 16 are shown superimposed, wherein the superposition is implemented such that the circuit 11 is as identical as possible in both images 15 and 16. Figure 6 In this circuit, the circuit 11 from the first image 15 and the circuit 11 from the second image 16 are almost identical because the first image 15 and the second image 16 are recorded from only slightly different viewing directions and focused onto the circuit 11. In this case, the deflection ratio between the first deflection stage 131 and the second deflection stage 132 of the two-stage deflection unit 130 is set such that the tilt point is located in the focal plane 141.

[0062] In contrast, in the comparison of images 15 and 16, the microstructure needle 20 (relative to circuit 11) is located in a different position. For example, in... Figure 6 As can be discerned in the images, the microstructural needles 20 in the first image 15 and the second image 16 are offset relative to each other in a direction extending laterally from the lower left to the upper right. The offset is relatively large. Compared to the absence or near absence of offset in circuit 11, this offset is primarily due to the distance between the microstructural needles 20 and circuit 11 along the viewing direction, and secondly due to focusing on circuit 11.

[0063] In the comparison of images 15 and 16, the microstructure needle 21 (relative to circuit 11) is also located at different positions. The direction of the offset of microstructure needle 21 basically corresponds to the direction of the offset of microstructure needle 20. The offset of microstructure needle 21 is smaller than the offset of microstructure needle 20 because the distance between microstructure needle 21 and circuit 11 along the observation direction is smaller than the distance between microstructure needle 20 and circuit 11 along the observation direction.

[0064] Refer again Figure 2The controller 180 of the particle beam microscope 100 determines whether to perform an approach of the microstructure needle 20 toward the target object based on the images recorded in steps S1 and S2. This determination may be part of the control of the positioning device 200. Details regarding the determination in step S3 are explained below.

[0065] According to the first example, the controller 180 first identifies the micro-contact needle 20 and the approaching target object in each of the recorded images 15 and 16. This means that the controller 180 determines the position of the micro-contact needle 20 and the position of the approaching target object in each of the recorded images 15 and 16. To identify the micro-contact needle 20 and the approaching target object, the controller 180 can use, for example, a shape recognition algorithm capable of distinguishing known shapes in the image. Models of the shapes of the micro-contact needle 20 and the approaching target object can be pre-stored in the data memory of the particle beam microscope 100. By comparing the shapes of the micro-contact needle 20 and the approaching target object stored in the data memory with images 15, 16, the controller 180 can identify the micro-contact needle 20 and the approaching target object in the recorded images 15, 16.

[0066] Subsequently, the controller 180 determines whether to perform a proximity maneuver of the micro-contact needle 20 toward the target object along the proximity direction based on the position of the micro-contact needle 20 identified in the recorded images 15 and 16 and the position of the approaching target object identified in the recorded images 15 and 16. For example, the controller calculates the difference between the positions of the micro-contact needle 20 identified in the recorded images 15 and 16 and the difference between the positions of the approaching target object identified in the recorded images 15 and 16, and determines whether to perform a proximity maneuver of the micro-contact needle 20 toward the target object along the proximity direction based on the calculated difference.

[0067] Alternatively, controller 180 calculates a distance value based on the position of the micro-contact needle 20 identified in the recorded images 15, 16 and the position of the approaching target object identified in the recorded images 15, 16. This distance value represents the distance D between the approaching target object and the micro-contact needle 20 in the approach direction. The relationship between the distance D and the position between the images is a deterministic geometric relationship based essentially on the mathematical intercept theorem. The viewing direction can be taken into account when calculating the distance value. In particular, differences in the viewing direction can be considered. Controller 180 can obtain information indicating the viewing direction or enabling the calculation of the viewing direction through its function of controlling deflection unit 130. The calculation of the distance value may include applying deterministic geometric relationships or approximate forms of deterministic geometric relationships, such as by means of neural networks or some other machine learning technique.

[0068] Subsequently, based on the calculated distance value, the controller 180 determines whether to execute the approach of the micro-contact needle 20 towards the target object along the approach direction. For example, if the calculated distance value is greater than a predetermined distance threshold, the controller 180 determines that the approach of the micro-contact needle 20 towards the target object along the approach direction will be executed. For example, if the calculated distance value is less than the predetermined distance threshold, the controller 180 determines that the approach of the micro-contact needle 20 towards the target object will not be executed.

[0069] According to the second example, controller 180 identifies segments in each of the recorded images 15 and 16. This means that controller 180 determines the location of a segment in each of the recorded images 15 and 16. Each segment represents a structure in one of the recorded images. Segmentation can be performed using known algorithms. Figure 7 An example of this segmentation result for the first image 15 is shown. The boundaries of the segments are... Figure 7 The middle part is displayed as a dashed line.

[0070] Subsequently, the controller 180 determines whether to perform the approach of the micro-contact needle 20 toward the target object along the approach direction based on the positions of the segments identified in the recorded images 15 and 16. For example, the controller calculates the differences between the positions of the corresponding segments in the recorded images 15 and 16 under each of the multiple identified segments, and determines whether to perform the approach of the micro-contact needle 20 toward the target object along the approach direction based on the differences calculated for the multiple segments.

[0071] Alternatively, controller 180 calculates a distance value based on the position of the segment in the recorded images 15, 16, which represents the distance D between the approaching target object and the micro-contact needle 20 in the approach direction. As in the first example above, the relationship between distance D and the segment position between the images is a deterministic geometric relationship.

[0072] Subsequently, based on the calculated distance value, the controller 180 determines whether to perform an approach maneuver of the micro-contact needle 20 toward the approaching target object along the approach direction. For details of this determination, refer to the description of the first example.

[0073] If the determination in step S3 indicates that the micro-contact needle 20 will be moved toward the target object along the approach direction (yes in step S3), the method continues to step S4. If the determination in step S3 indicates that the micro-contact needle 20 will not be moved toward the target object along the approach direction (no in step S3), the method continues to step S5.

[0074] In step S4, controller 180 controls positioning device 200 such that positioning device 200 moves micro-contact needle 20 relative to the approaching target object along the approach direction. Specifically, positioning device 200 moves micro-contact needle 20 relative to the approaching target object along the approach direction, thereby reducing the distance D between micro-contact needle 20 and the approaching target object. In other words, controller 180 causes positioning device 200 to move micro-contact needle 20 along the approach direction in the direction of approaching the target object. After step S4, the method is repeated starting from step S1.

[0075] The movement of the micro-contact needle 20 relative to the approaching target object in step S4 can be performed by means of the positioning device 200, resulting in a relative movement of a predetermined distance or duration along the approach direction, and the obtained positioning is subsequently maintained. Accordingly, when steps S1 and S2 are subsequently performed, a new image can be recorded while the distance D between the micro-contact needle 20 and the approaching target object remains constant. This is particularly advantageous if the relative movement is faster than the recording of multiple images. The distance D during the recording of a new image is thus less than the distance D during the previous recording of multiple images.

[0076] In contrast, if the relative movement is slow compared to recording multiple images, the relative movement need not be interrupted during the duration of image recording. Accordingly, the relative movement in step S4 can be performed such that the micro-contact needle 20 moves continuously relative to the approaching target object along the approach direction, and in step S4 only the approach speed of the relative movement along the approach direction is set (and optionally changed). Accordingly, the relative movement is also performed subsequently during the execution of steps S1 to S3. The relative movement does not stop until step S5 is executed.

[0077] In step S4, the positioning device 200 may be controlled by the controller 180 to set (and optionally change) the approach speed at which the positioning device 200 moves the micro-contact needle 20 relative to the approaching target object in the approach direction, based on the recorded images 15 and 16 (specifically, the calculated distance values). For example, the positioning device 200 may be controlled by the controller 180 such that the approach speed is set to a value that decreases as the distance D between the approaching target object and the micro-contact needle 20 in the approach direction decreases. This prevents the micro-contact needle 20 from impacting the approaching target object.

[0078] In step S5, the controller 180 controls the positioning device 200 to maintain the positioning of the micro-contact needle 20 relative to the approaching target object along the approach direction. In other words, the controller 180 causes the positioning device 200 to maintain the obtained positioning of the micro-contact needle 20. This means that the approach of the micro-contact needle 20 towards the approaching target object along the approach direction is first terminated, and the movement of the micro-contact needle 20 relative to the approach direction for this purpose is stopped. To further ensure the obtained approach, the method can be repeated from step S1 after step S5.

[0079] Further details

[0080] During this method, the approach direction can remain unchanged. This means that the approach direction remains the same until the approach process ends.

[0081] The observation direction may deviate from the approach direction by up to 45°, particularly up to 30°, 10°, or 1°. Accordingly, the multiple images used for determination in step S3 and control of the positioning device 200 in steps S4 and S5 are recorded from an observation direction that deviates from the approach direction by only a relatively small amount.

[0082] The approach direction can deviate from the normal vector of the plane in which the target object is arranged by up to 45°, and more specifically up to 20° or up to 5°. Accordingly, from the perspective of the target object, the approach of the micro-contact needle 20 to the target object occurs essentially "from above".

[0083] The observation directions can be offset from each other by up to 60°, particularly by up to 30°, 10°, or 2°. This is a typical configuration for stereomicroscopes. On the other hand, the observation directions can be offset from each other by at least 0.0002°, particularly at least 0.001°. This ensures sufficient offset of the object in images recorded from different observation directions.

[0084] The above has already given the answer to Figure 2 The description of one example of the method shown illustrates how circuitry 11 on sample 10 has been used to approach a target object. However, the method described herein is not limited to this application. For example, another microcontact needle (e.g.) could be used... Figure 3 , Figure 4 and Figure 6 One of the micro-contact needles 21 and 22 shown is used to approach the target object.

[0085] List of reference numerals

[0086] 10 samples

[0087] 11 Circuits

[0088] Images recorded in 15 and 16

[0089] 20, 21, 22 microcontact needles

[0090] 100 Particle Beam Microscope

[0091] 101 particle beam column

[0092] 102 particle beam

[0093] 110 particle source

[0094] Propagation direction of 115 and 116 particle beams

[0095] 120 Accelerating Electrode

[0096] 130 deflection unit

[0097] 131 First Deflection Stage

[0098] 132 Second Deflection Stage

[0099] 140 objective lens

[0100] 141 focal plane

[0101] The optical axis of the 142 objective lens

[0102] 150 vacuum chamber

[0103] 160 sample stage

[0104] 170 detectors

[0105] 180 controller

[0106] 190 communication lines and control lines

[0107] 195 Micro-contact needle positioning device

[0108] 200 positioning device

[0109] D Distance

Claims

1. A method for using a particle beam microscope (100) to bring a micro-contact needle (20) toward a target object along an approach direction, the target object being, in particular, another micro-contact needle or a component for an electrical or electronic circuit, wherein, The particle beam microscope (100) includes a positioning device (200) configured to move the micro-contact needle (20) relative to the approaching target object along the approach direction, wherein the method includes: Multiple images (15, 16) were recorded from different viewing directions using a particle beam microscope (100), each image representing the approaching target object and the microcontact needle (20); and The positioning device (200) is controlled based on the recorded images (15, 16), such that the positioning device (200) is: The micro-contact needle (20) is moved relative to the approaching target object along the approach direction. Alternatively, the micro-contact needle (20) can be positioned relative to the approaching target object along the approach direction.

2. The method according to claim 1, wherein, Controlling the positioning device (200) includes: Based on the recorded images (15, 16), determine whether to perform the micro-contact needle (20) approaching the target object along the approach direction; If the determination reveals that the micro-contact needle (20) is to be moved toward the target object along the approach direction, then the positioning device (200) is controlled to move the micro-contact needle (20) relative to the target object along the approach direction; and If the determination reveals that the micro-contact needle (20) is not approaching the target object along the approach direction, the positioning device (200) is controlled to maintain the positioning of the micro-contact needle (20) relative to the target object along the approach direction.

3. The method according to claim 2, wherein, Determining whether to perform the micro-contact needle (20) approaching the target object along the approach direction includes: Identify the micro-contact needle (20) and the approaching target object in these recorded images (15, 16); The determination of whether to perform the micro-contact needle (20) approaching the target object along the approach direction is performed based on the position of the micro-contact needle (20) identified in the recorded images (15, 16) and the position of the approaching target object identified in the recorded images (15, 16).

4. The method according to claim 3, wherein, Determining whether to perform the approach of the micro-contact needle (20) toward the target object along the approach direction also includes: A distance value is calculated based on the position of the micro-contact needle (20) identified in these recorded images (15, 16) and the position of the approaching target object identified in these recorded images (15, 16), the distance value representing the distance (D) between the approaching target object and the micro-contact needle (20) in the approaching direction. The determination of whether to perform the micro-contact needle (20) approaching the target object along the approach direction is based on the calculated distance value.

5. The method according to claim 2, wherein, Determining whether to perform the micro-contact needle (20) approaching the target object along the approach direction includes: Identify segments in the images (15, 16) of these records, wherein each of these segments represents a structure in one of the images (15, 16) of these records; The determination of whether to perform the micro-contact needle (20) approaching the target object along the approach direction is based on the position of these fragments identified in the recorded images (15, 16).

6. The method according to claim 5, wherein, Determining whether to perform the approach of the micro-contact needle (20) toward the target object along the approach direction also includes: The distance value is calculated based on the position of these segments identified in the recorded images (15, 16), which represents the distance (D) between the approaching target object and the micro-contact needle (20) in the approach direction. Based on the calculated distance value, determine whether to perform the micro-contact needle (20) approaching the target object along the approach direction.

7. The method according to claim 4 or 6, in, If the calculated distance value is greater than a predetermined distance threshold, then the determination indicates that the micro-contact needle (20) will be moved toward the target object along the approach direction; and If the calculated distance value is less than a predetermined distance threshold, then the determination indicates that the micro-contact needle (20) is not to approach the target object along the approach direction.

8. The method according to any one of claims 4, 6 or 7, in, The calculation of this distance value is also based on these observation directions, and in particular the differences between these observation directions.

9. The method according to any one of claims 1 to 8, in, During the recording of the multiple images (15, 16), the positioning device (200) is controlled such that the distance (D) between the micro-contact needle (20) and the approaching target object in the approach direction remains constant.

10. The method according to any one of claims 1 to 9, wherein, The method further includes controlling the positioning device (200) such that the positioning device (200) sets the approach speed of the micro-contact needle (20) relative to the approaching target object along the approach direction based on the recorded images (15, 16).

11. The method according to claim 10, wherein, The approach speed is set to a value that decreases as the distance (D) between the approaching target and the micro-contact needle (20) in the approach direction decreases.

12. The method according to any one of claims 1 to 11, in, The particle beam microscope (100) includes a deflection unit (130) configured to successively guide a particle beam (102) to multiple different positions on a focal plane (141) and to variably set the propagation direction of the particle beam (102) at each of these positions; The recording of the multiple images (15, 16) includes, for each image: controlling the deflection unit (130) such that the particle beam (102) is successively guided to multiple different positions on the focal plane (141), and detecting the interaction products of the particle beam (102) with the approaching target object and the micro-contact needle (20) in sync with the guidance; The observation direction is the average propagation direction of the particle beam (102) during the recording of the corresponding image.

13. The method according to any one of claims 1 to 12, in, The observation direction deviates from the approach direction by at most 45°, specifically at most 30°, 10°, or 1°; and / or Wherein, the approach direction deviates from the normal vector of the plane in which the approach target object is arranged by at most 45°, and in particular at most 20° or at most 5°; Wherein, the observation directions are offset from each other by a maximum of 60°, specifically by a maximum of 30°, a maximum of 10°, or a maximum of 2°; and / or The observation directions are deviated from each other by at least 0.0002°, and in particular by at least 0.001°.

14. The method according to any one of claims 1 to 13, in, The positioning device (200) includes a sample stage (160) that carries the approaching target object and is configured to move the approaching target object in the approach direction; and / or The positioning device (200) includes a micro-contact needle positioning device (195) which carries the micro-contact needle (20) and is configured to move the micro-contact needle (20) in the approach direction.

15. The method according to any one of claims 1 to 14, in, These images (15, 16) are two-dimensional images; and / or Wherein, the approach direction remains unchanged during the method; and / or During the recording of the multiple images (15, 16), the micro-contact needle (20) is spaced apart from the approaching target object in the approach direction.

16. The method according to any one of claims 1 to 15, wherein, Repeatedly perform the recording of the multiple images and control the positioning device (200).

17. A particle beam microscope (100) for bringing a micro-contact needle (20) toward a target object along an approach direction, the target object being, in particular, another micro-contact needle or a component for an electrical or electronic circuit, wherein, The particle beam microscope (100) includes: A positioning device (200) is configured to move the micro-contact needle (20) relative to the approaching target object along the approach direction; Image recording devices (101, 170, 180) configured to record multiple images (15, 16) from different viewing directions, each image representing the approaching target object and the micro-contact needle (20); and A controller (180) is configured to control the positioning device (200) based on the recorded images (15, 16), such that the positioning device (200) moves the micro-contact needle (20) relative to the approaching target object along the approach direction or maintains the positioning of the micro-contact needle (20) relative to the approaching target object along the approach direction.

Images