Micromirror array light source module and method for manufacturing the same

Abstract

This invention discloses a micron array light source module and its fabrication method, relating to the field of optoelectronic semiconductor technology. It includes a chip assembly with a housing at its top, the chip assembly being fixedly connected to the housing. A connector is located on the side of the housing away from the chip assembly, and a microlens assembly is located on the side of the connector away from the housing. The chip assembly includes a driver chip, a light source chip, multiple metal bumps, and a microlens array layer. The driver chip provides control signals, and the light source chip provides a light source. The light source chip includes an active layer, multiple microstructures, and an epitaxial buffer layer arranged sequentially along the direction away from the driver chip. Multiple metal bumps are uniformly distributed between the driver chip and the active layer. The active layer is configured as a pixel unit array, with the pixel spacing in the pixel unit array set to 3.5 to 20 µm. The microlens array layer includes multiple micro-adhesive structures, multiple multilayer microstructures, and a light-transmitting cover plate. This invention effectively reduces the occurrence rate of optical crosstalk.

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