Robotic arm

Abstract

The application provides a mechanical arm, which comprises a first arm, a second arm, a first carrier plate and a second carrier plate connected with each other. The first arm comprises a first rotary motor, a first belt gear set, a first speed change module and a first arm part connected in sequence. The second arm comprises a second rotary motor, a second belt gear set, a second speed change module and a second arm part connected in sequence. The first carrier plate comprises a third rotary motor, a third belt gear set, a third speed change module and a first plate body connected in sequence. The second carrier plate comprises a fourth rotary motor, a fourth belt gear set, a fourth speed change module and a second plate body connected with each other. The second rotary motor, the third rotary motor and the fourth rotary motor are arranged in the first arm part respectively.

Description

Technical Field

[0001] This invention relates to a robotic arm. Background Technology

[0002] Whether in semiconductor manufacturing or panel manufacturing, using robotic arms to transport substrates or wafers is a common automation technology.

[0003] However, in the existing robotic arm mechanism, the joints between its multiple arm segments still use belts as the driving components. But joints are mostly areas where the robotic arm is subjected to concentrated forces (or torques generated by forces), and belts are prone to transmission flexurality under heavy loads, thus reducing their service life and affecting the positioning stability after the movement stops.

[0004] Therefore, how to improve the load tolerance of robotic arms is a problem that relevant technical personnel need to consider and solve. Summary of the Invention

[0005] This invention relates to a robotic arm that improves its overall load-bearing capacity through rigid components at the joints.

[0006] According to an embodiment of the present invention, a robotic arm includes a first arm, a second arm, a first carrier plate, and a second carrier plate connected to each other. The first arm includes a first rotary motor, a first belt gear set, a first speed change module, and a first arm portion connected in sequence. The first rotary motor provides power and drives the first arm portion to rotate via the first belt gear set and the first speed change module. The second arm includes a second rotary motor, a second belt gear set, a second speed change module, and a second arm portion connected in sequence. The second rotary motor provides power and drives the second arm portion to rotate via the second belt gear set and the second speed change module. The first carrier plate includes a third rotary motor, a third belt gear set, a third speed change module, and a first plate body connected in sequence. The third rotary motor provides power and drives the first plate body to rotate via the third belt gear set and the third speed change module. The second carrier plate includes a fourth rotary motor, a fourth belt gear set, a fourth speed change module, and a second plate body connected to each other. The fourth rotary motor provides power and drives the second plate body via the fourth belt gear set and the fourth speed change module. The second, third, and fourth rotary motors are respectively disposed within the first arm portion.

[0007] The robotic arm according to an embodiment of the present invention also includes a base, and a first rotary motor drives the first arm to rotate along a first axis via a first belt gear set and a first speed change module.

[0008] In the robotic arm according to an embodiment of the present invention, the second arm is pivotally connected to the first arm along the second axis, and the first carrier plate and the second carrier plate are respectively pivotally connected to the second arm along the third axis, with the second axis being parallel to the third axis.

[0009] In the robotic arm according to an embodiment of the present invention, the first belt gear set includes a first gear, a first belt and a second gear connected in sequence. The first gear is disposed on a first rotary motor, and the second gear, the first speed change module and the first arm are coaxially disposed.

[0010] In the robotic arm according to an embodiment of the present invention, the second belt gear set includes a third gear, a second belt and a fourth gear connected in sequence, the third gear is disposed on a second rotary motor and the fourth gear is coaxially disposed with a second speed change module.

[0011] In the robotic arm according to an embodiment of the present invention, the second speed change module is located at the pivot point between the first arm and the second arm, the second arm is fixed on the second speed change module, and the second rotary motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed change module.

[0012] In the robotic arm according to an embodiment of the present invention, the aforementioned third belt gear set includes a fifth gear, a third belt, and a sixth gear arranged sequentially on the first arm, a first drive shaft passing through the first arm and the second arm along a second axis, and a seventh gear, a fourth belt, and an eighth gear arranged sequentially on the second arm. The fifth gear is mounted on a third rotary motor, the sixth gear, the first drive shaft, and the seventh gear are coaxially arranged, and the eighth gear is coaxially arranged with the third speed change module.

[0013] In the robotic arm according to an embodiment of the present invention, the first plate is fixed on the third speed change module, and the third rotary motor drives the first plate to rotate relative to the second arm through the third belt gear set and the third speed change module.

[0014] In the robotic arm according to an embodiment of the present invention, the aforementioned fourth belt gear set includes a ninth gear, a fifth belt, and a tenth gear arranged sequentially on the first arm, a second drive shaft passing through the first arm and the second arm, and an eleventh gear, a sixth belt, and a twelfth gear arranged sequentially on the second arm. The ninth gear is mounted on a fourth rotary motor, the tenth gear, the second drive shaft, and the eleventh gear are coaxially arranged, and the twelfth gear is coaxially arranged with the fourth speed change module.

[0015] In the robotic arm according to an embodiment of the present invention, the aforementioned fourth belt gear set further includes a third drive shaft, and the second plate is fixed to the fourth transmission module via the third drive shaft.

[0016] The robotic arm according to an embodiment of the present invention further includes a base and a lifting mechanism. The lifting mechanism is disposed on the base and includes a fifth rotary motor, a fifth belt gear set, a screw, a driven part, a lifting platform, a sliding block, and a track connected in sequence. The sliding block is movably coupled to the track. The lifting platform is assembled to the sliding block and the driven part. The fifth rotary motor drives the lifting platform to move up and down relative to the base through the fifth belt gear set, the screw, and the driven part. The first arm is assembled to the lifting platform through a first speed change module.

[0017] In the robotic arm according to an embodiment of the present invention, the third belt gear set includes a first drive shaft, and the fourth belt gear set includes a second drive shaft, wherein the first drive shaft and the second drive shaft are coaxially arranged.

[0018] In the robotic arm according to an embodiment of the present invention, the aforementioned second drive shaft passes through the second transmission module from the first arm and is connected to the second arm, and the first drive shaft passes through the second drive shaft from the first arm and is connected to the second arm.

[0019] In the robotic arm according to an embodiment of the present invention, the aforementioned third speed-changing module, first carrier plate, and second carrier plate are disposed on a first side of the second arm portion, and the fourth speed-changing module is disposed on a second side of the second arm portion. The first side and the second side are opposite sides of the second arm portion.

[0020] In the robotic arm according to an embodiment of the present invention, the aforementioned fourth belt gear set includes a third drive shaft that extends from the fourth speed change module through the second arm and the first carrier plate and is connected to the second carrier plate.

[0021] Based on the above, the robotic arm comprises four main structural components—a first arm, a second arm, a first carrier plate, and a second carrier plate—connected to each other. Each component has its own arm (or plate) and a rotary motor, belt and gear set, and variable assembly module housed within the arm (or plate). Thus, each component is an independently driveable entity, avoiding complex and difficult-to-control drive modes caused by interconnected relationships, thereby simplifying the algorithm complexity of the controller required for the robotic arm. Furthermore, the rotary motors of the second arm, the first carrier plate, and the second carrier plate are all located within the first arm of the first arm, thereby centralizing the drive source of the robotic arm and facilitating assembly, replacement, and maintenance. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a robotic arm according to an embodiment of the present invention;

[0023] Figure 2A yes Figure 1 A schematic diagram of some components of a robotic arm;

[0024] Figure 2B yes Figure 2AAn exploded view of the components;

[0025] Figure 3A Showing a partial side view of the first and second arms;

[0026] Figure 3B This is a schematic diagram of multiple rotating motors within the first arm.

[0027] Figure 4A and Figure 4B These are partial sectional views of the robotic arm at different locations;

[0028] Figure 5 The relevant structural components of the robotic arm and their corresponding relationships are illustrated using simple block diagrams. Detailed Implementation

[0029] Reference will now be made in detail to exemplary embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same component reference numerals are used in the drawings and description to denote the same or similar parts.

[0030] Figure 1 This is a schematic diagram of a robotic arm according to an embodiment of the present invention. Please refer to... Figure 1 The robotic arm 100 includes a first arm 110, a second arm 120, a first carrier plate 130, and a second carrier plate 140 connected to each other. The first arm 110 is movably disposed on a base 150, the second arm 120 is pivotally connected to the first arm 110, and the first carrier plate 130 and the second carrier plate 140 are respectively pivotally connected to the second arm 120. Here, the first carrier plate 130 and the second carrier plate 140 are each used to carry and fix the wafer 200 for transport.

[0031] Figure 2A yes Figure 1 A schematic diagram of some components of a robotic arm. Figure 2B yes Figure 2A An exploded view of the components. Please also refer to... Figure 1 , Figure 2A and Figure 2BIn this embodiment, the robotic arm 100 also includes a base 150, and the first arm 110 includes a first rotary motor 111, a first belt gear set 112, a first speed change module 113, and a first arm portion 114 connected in sequence. The first rotary motor 111 provides power and drives the first arm portion 114 to rotate along the first axis AX1 through the first belt gear set 112 and the first speed change module 113. Here, the first speed change module 113 is, for example, a reduction bearing, a harmonic reducer module, or a module composed of a harmonic reducer core component plus a bearing and a self-made structure. The first belt gear set 112 includes a first gear 112a, a first belt 112b, and a second gear 112c connected in sequence. The first gear 112a is disposed on the first rotary motor 111, and the second gear 112c, the first speed change module 113, and the first arm portion 114 are coaxial (along the first axis AX1). The first belt 112b is connected between the first gear 112a and the second gear 112c for transmission.

[0032] Furthermore, the robotic arm 100 also includes a lifting mechanism 160, which comprises a fifth rotary motor 161, a transmission assembly 162, a lifting platform 163, a track 164, and a sliding block 165. The transmission assembly 162 includes a fifth belt gear set 162a, a screw 162b, and a driven part 162c. The fifth rotary motor 161 is disposed within the column of the base 150 and is connected at the top of the base 150 to the fifth belt gear set 162a, which is also located at the top. The fifth belt gear set 162a includes two gears and a belt connecting and driving them. One gear is coaxially disposed with the fifth rotary motor 161 to transmit power to the other gear when the fifth rotary motor 161 is actuated. The screw 162b stands on one side of the base 150, and one end of the screw 162b is coaxially connected to the other gear. The driven part 162c is coupled to the screw 162b. Therefore, when the screw 162b is driven to rotate by the fifth rotary motor 161 and the fifth belt gear set 162a, the driven part 162c can be driven to move up and down relative to the base 150.

[0033] Furthermore, track 164 is located on the other side of the column of base 150, sliding block 165 is movably coupled to track 164, lifting platform 163 is assembled to sliding block 165 and driven part 162c, and fifth rotary motor 161 drives lifting platform 163 to rise and fall relative to base 150 through fifth belt gear set 162a, screw 162b, and driven part 162c. First arm 114 of first arm 110 is assembled to lifting platform 163 through first speed change module 113, and at the same time, first rotary motor 111 rests on base 150 (when lifting platform 163 is in the lowest position).

[0034] Figure 3AA partial side view of the first and second arms is shown. Figure 3B This is a schematic diagram of the multiple rotary motors within the first arm, allowing for identification of their arrangement from a three-dimensional perspective. Please also refer to... Figure 3A and Figure 3B In this embodiment, the second arm 120 includes a second rotary motor 121, a second belt gear set 122, a second speed change module 123 and a second arm 124 connected in sequence. The second rotary motor 121 provides power and drives the second arm 124 to rotate relative to the first arm 114 along the second axis AX2 through the second belt gear set 122 and the second speed change module 123.

[0035] Furthermore, the second arm 120 is essentially pivotally connected to the first arm 110 along the second axis AX2, where the first axis AX1 is parallel to the second axis AX2. The second belt gear set 122 includes a third gear 122a, a second belt 122b, and a fourth gear 122c connected in sequence. The third gear 122a is disposed on the second rotary motor 121, and the fourth gear 122c is coaxially (along the second axis AX2) with the second transmission module 123. The second transmission module 123 is located at the pivot point between the first arm 110 and the second arm 120. The second arm 124 is fixed to the second transmission module 123. The second rotary motor 121 drives the second arm 124 to rotate relative to the first arm 114 along the second axis AX2 through the second belt gear set 122 and the second transmission module 123. Here, the component composition of the second transmission module 123 is the same as that of the first transmission module 113 described above, only the form and specifications are adjusted according to the compatible components.

[0036] Figure 4A and Figure 4B These are partial sectional views of the robotic arm at different locations. Figure 5 The relevant structural components of the robotic arm and their corresponding relationships are illustrated using a simple block diagram. Figure 5 The arm and corresponding structural components of this embodiment can be viewed in summary using the simple accompanying drawings. Please also refer to... Figure 4A , Figure 4B and Figure 5In this embodiment, the first carrier plate 130 includes a third rotary motor 131, a third belt gear set 132, a third speed change module 133, and a first plate body 134 connected in sequence. The third rotary motor 131 provides power and drives the first plate body 134 to rotate along the third axis AX3 through the third belt gear set 132 and the third speed change module 133. The first axis AX1, the second axis AX2, and the third axis AX3 are parallel to each other. Furthermore, the second carrier plate 140 includes a fourth rotary motor 141, a fourth belt gear set 142, a fourth speed change module 143, and a second plate body 144 connected in sequence. The fourth rotary motor 141 provides power and drives the second plate body 144 to rotate through the fourth belt gear set 142 and the fourth speed change module 143.

[0037] Furthermore, regarding the first carrier plate 130, the third rotary motor 131 is disposed within the first arm 114, and the third belt gear set 132 includes a fifth gear 132a, a third belt 132b, and a sixth gear 132c disposed in the first arm 114 and connected in sequence, a first drive shaft 132d passing through the first arm 114 and the second arm 124 along the second axis AX2, and a seventh gear 132e, a fourth belt 132f, and an eighth gear 132g disposed in the second arm 124 and connected in sequence. The fifth gear 132a is disposed on the third rotary motor 131, the sixth gear 132c, the first drive shaft 132d, and the seventh gear 132e are coaxial (along the second axis AX2), and the eighth gear 132g is coaxial with the third transmission module 133 (along the third axis AX3). The first plate 134 is fixed on the third speed change module 133. The third rotary motor 131 drives the first plate 134 to rotate relative to the second arm 124 through the third belt gear set 132 and the third speed change module 133.

[0038] The fourth belt gear set 142 includes a ninth gear 142a, a fifth belt 142b, and a tenth gear 142c, which are sequentially connected to the first arm 114; a second drive shaft 142d passing through the first arm 114 and the second arm 124; and an eleventh gear 142e, a sixth belt 142f, and a twelfth gear 142g, which are sequentially connected to the second arm 124. The ninth gear 142a is mounted on the fourth rotary motor 141. The tenth gear 142c, the second drive shaft 142d, and the eleventh gear 142e are coaxial (along the second axis AX2). The twelfth gear 142g is coaxial (along the third axis AX3) with the fourth speed change module 143. The fourth belt gear set 142 also includes a third drive shaft 142h. The second plate 144 is fixed to the fourth transmission module 143 via the third drive shaft 142h, so that the fourth rotary motor 141 drives the second plate 144 to rotate relative to the second arm 124 along the third axis AX3 via the fourth belt gear set 142 and the fourth transmission module 143. Here, the component composition of the third transmission module 133 and the fourth transmission module 143 is the same as that of the first transmission module 113 or the second transmission module 123 described above, only the form and specifications are adjusted according to the compatible components.

[0039] As Figure 5 As shown, the third belt gear set 132 of this embodiment includes a first drive shaft 132d, and the fourth belt gear set 142 includes a second drive shaft 142d. The first drive shaft 132d and the second drive shaft 142d are coaxial (along the second axis AX2). The second drive shaft 142d passes through the second transmission module 123 from the first arm 114 and connects to the second arm 124. The first drive shaft 132d passes through the second drive shaft 142d from the first arm 114 and connects to the second arm 124. The third transmission module 133, the first carrier plate 130, and the second carrier plate 140 are disposed on the first side of the second arm 124, and the fourth transmission module 143 is disposed on the second side of the second arm 124. The first side and the second side are opposite sides of the second arm 124. The fourth belt gear set 142 includes a third drive shaft 142h, which passes through the second arm 124 and the first plate 134 from the fourth transmission module 143 and connects to the second plate 144.

[0040] from Figure 5 As can be clearly seen, in this embodiment, the robotic arm 100 has the second rotary motor 121, the third rotary motor 131, and the fourth rotary motor 141 respectively housed within the first arm portion 114. Therefore, each structural component of the robotic arm 100 (i.e., the first arm portion 114, the second arm portion 124, the first plate 134, and the second plate 144) is capable of being independently driven and disassembled. This avoids design and structural complexity caused by structural connections, and also facilitates the assembly, maintenance, and replacement of structural components.

[0041] Furthermore, the two pivotally connected structural components are connected by a transmission module (second transmission module 123, third transmission module 133, and fourth transmission module 143). This effectively overcomes the negative impact of the belt crossing the joint in the prior art. In other words, using the transmission module (second transmission module 123, third transmission module 133, and fourth transmission module 143) as the joint structure of the robotic arm 100 increases its rigidity and improves its support capacity at the joint. In addition, compared with the prior art that uses a belt for transmission at the joint, the use of the transmission module (second transmission module 123, third transmission module 133, and fourth transmission module 143) instead of the belt in this invention can effectively resist low-frequency vibrations generated during operation due to its rigidity. Therefore, overall, the robotic arm 100 of this invention, due to the aforementioned component arrangement, helps to improve its overall load capacity, stability, and durability.

[0042] In summary, in the above embodiments of the present invention, the robotic arm includes four main structural components—a first arm, a second arm, a first carrier plate, and a second carrier plate—connected to each other. Each structural component has its own arm portion (or plate) and a rotary motor, a belt and gear set, and a variable assembly module disposed within the arm portion (or plate). Accordingly, each structural component is an independently driveable unit, avoiding complex and difficult-to-control drive modes caused by interconnected relationships, thereby simplifying the algorithm complexity of the controller required for the robotic arm. Furthermore, the rotary motors of the second arm, the first carrier plate, and the second carrier plate are all disposed within the first arm portion of the first arm, thereby centralizing the drive source of the robotic arm, which facilitates assembly, replacement, and maintenance.

[0043] Meanwhile, the belt and gear sets belonging to each structural component are all located inside the arm (plate) rather than at or across the joints, thus avoiding the situation in the prior art where drive components such as belts span at least two structural components. Furthermore, replacing the belts at the joints with speed change modules in the prior art effectively resists low-frequency vibrations during operation due to the rigidity of the speed change modules, thereby helping to improve the overall load capacity, stability, and durability of the robotic arm.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A robotic arm, characterized in that, include: The first arm, the second arm, the first carrier plate, and the second carrier plate are interconnected. The first arm includes a first rotary motor, a first belt and gear set, a first speed change module, and a first arm section connected in sequence. The first rotary motor provides power and drives the first arm section to rotate through the first belt and gear set and the first speed change module. The second arm includes a second rotary motor, a second belt gear set, a second speed transmission module, and a second arm section connected in sequence. The second rotary motor provides power and drives the second arm section to rotate through the second belt gear set and the second speed transmission module. The first carrier plate includes a third rotary motor, a third belt gear set, a third speed change module, and a first plate body connected in sequence. The third rotary motor provides power and drives the first plate body to rotate through the third belt gear set and the third speed change module. The second carrier plate includes a fourth rotary motor, a fourth belt gear set, a fourth speed change module, and a second plate body that are interconnected. The fourth rotary motor provides power and drives the second plate body to rotate through the fourth belt gear set and the fourth speed change module. The second rotary motor, the third rotary motor, and the fourth rotary motor are respectively disposed in the first arm.

2. The robotic arm according to claim 1, characterized in that, It also includes a base, and the first rotary motor drives the first arm to rotate along the first axis through the first belt gear set and the first speed change module.

3. The robotic arm according to claim 1, characterized in that, The second arm is pivotally connected to the first arm along the second axis, and the first carrier plate and the second carrier plate are respectively pivotally connected to the second arm along the third axis, with the second axis being parallel to the third axis.

4. The robotic arm according to claim 1, characterized in that, The first belt gear set includes a first gear, a first belt and a second gear connected in sequence. The first gear is disposed on the first rotary motor, and the second gear, the first speed change module and the first arm are coaxially disposed.

5. The robotic arm according to claim 1, characterized in that, The second belt gear set includes a third gear, a second belt and a fourth gear arranged in sequence within the first arm. The third gear is arranged on the second rotary motor and the fourth gear is coaxially arranged with the second speed change module.

6. The robotic arm according to claim 1, characterized in that, The second speed change module is located at the pivot point between the first arm and the second arm. The second arm is fixed on the second speed change module. The second rotary motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed change module.

7. The robotic arm according to claim 1, characterized in that, The third belt gear set includes a fifth gear, a third belt, and a sixth gear arranged in sequence within the first arm, a first transmission shaft passing through the first arm and the second arm along the second axis, and a seventh gear, a fourth belt, and an eighth gear arranged in sequence within the second arm. The fifth gear is arranged on the third rotary motor, the sixth gear, the first transmission shaft, and the seventh gear are arranged coaxially, and the eighth gear is arranged coaxially with the third speed change module.

8. The robotic arm according to claim 1, characterized in that, The third speed change module is located at the pivot point between the second arm and the first plate. The first plate is fixed on the third speed change module. The third rotary motor drives the first plate to rotate relative to the second arm through the third belt gear set and the third speed change module.

9. The robotic arm according to claim 1, characterized in that, The fourth belt gear set includes a ninth gear, a fifth belt, and a tenth gear arranged in sequence within the first arm, a second drive shaft passing through the first arm and the second arm, an eleventh gear, a sixth belt, and a twelfth gear arranged in sequence within the second arm, the ninth gear being mounted on the fourth rotary motor, the tenth gear, the second drive shaft, and the eleventh gear being coaxially mounted, and the twelfth gear being coaxially mounted with the fourth speed change module.

10. The robotic arm according to claim 9, characterized in that, The fourth belt gear set also includes a third drive shaft, and the second plate is fixed to the fourth transmission module through the third drive shaft.

11. The robotic arm according to claim 1, characterized in that, It also includes a base and a lifting mechanism. The lifting mechanism is disposed on the base and includes a fifth rotary motor, a fifth belt gear set, a screw, a driven part, a lifting platform, a sliding block, and a track connected in sequence. The sliding block is movably coupled to the track. The lifting platform is assembled to the sliding block and the driven part. The fifth rotary motor drives the lifting platform to move up and down relative to the base through the fifth belt gear set, the screw, and the driven part. The first arm is assembled to the lifting platform through the first speed change module.

12. The robotic arm according to claim 1, characterized in that, The third belt gear set includes a first drive shaft, and the fourth belt gear set includes a second drive shaft, with the first drive shaft and the second drive shaft being coaxially arranged.

13. The robotic arm according to claim 12, characterized in that, The second drive shaft passes through the second transmission module from the first arm and is connected to the second arm, and the first drive shaft passes through the second drive shaft from the first arm and is connected to the second arm.

14. The robotic arm according to claim 1, characterized in that, The third transmission module, the first carrier plate, and the second carrier plate are disposed on the first side of the second arm, and the fourth transmission module is disposed on the second side of the second arm. The first side and the second side are opposite sides of the second arm.

15. The robotic arm according to claim 14, characterized in that, The fourth belt gear set includes a third drive shaft that extends from the fourth transmission module through the second arm and the first plate to the second plate.

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