Slow cooling device for isostatic pressing graphite compact for semiconductor single crystal silicon production

Abstract

The application relates to the technical field of single crystal silicon production, and discloses a slow cooling device for isostatic pressing graphite blank for semiconductor single crystal silicon manufacturing, which comprises a base, a back plate connected to one side of the base, a conveying frame fixedly connected to the back plate, a conveying belt connected to the conveying frame, a lifting plate slidingly connected to one side of the back plate, an L-shaped table slidingly connected to the lifting plate, a rotating disc rotatably connected to the L-shaped table, an anti-skid strip connected to the upper end of the rotating disc, a water tank connected to the L-shaped table, a cooling spray frame connected to the water tank through a water pipe, and the cooling spray frame is fixedly connected to the L-shaped table. The graphite blank can stably rotate with the rotating disc during the cooling process, the cooling spray frame can accurately match the rotating rhythm and start, the surface of the blank can be uniformly cooled, the quality problem caused by the local temperature difference can be effectively avoided, and the cooling consistency of the isostatic pressing graphite blank for semiconductor single crystal silicon manufacturing is ensured.

Description

Technical Field

[0001] This invention relates to the field of monocrystalline silicon production technology, and more particularly to a slow cooling device for isostatically pressed graphite preforms used in the manufacture of semiconductor monocrystalline silicon. Background Technology

[0002] Isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing are a key basic component in single-crystal silicon production. They possess characteristics such as high density, high strength, and high purity. After forming, they require cooling treatment to ensure the accuracy of subsequent processing. Existing cooling devices mostly use conveyor belts to transport the blanks, combined with spray or air cooling structures to achieve cooling. The core is to remove heat from the blanks through heat exchange medium to meet basic cooling requirements.

[0003] The existing technology has obvious shortcomings. During the cooling process, the billet is prone to uneven heat dissipation due to fixed placement, which affects the uniformity of product quality. The connection between billet transfer and cooling is not smooth, requiring additional manual or equipment assistance, which reduces the overall processing efficiency. At the same time, the start and stop of cooling rely heavily on manual control, making it difficult to accurately match the billet rotation cooling rhythm, and failing to achieve automated continuous operation. In addition, some devices have complex structures and high maintenance costs.

[0004] Based on this, a slow cooling device for isostatically pressed graphite blanks used in the manufacture of semiconductor single-crystal silicon is proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a slow cooling device for isostatically pressed graphite blanks used in the manufacture of semiconductor single crystal silicon in order to solve the above-mentioned problems.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A slow cooling device for isostatically pressed graphite blanks used in semiconductor single-crystal silicon manufacturing includes a base, a back plate connected to one side of the base, a conveyor frame fixedly connected to the back plate, a conveyor belt connected to the conveyor frame, a lifting plate slidably connected to one side of the back plate, an L-shaped platform slidably connected to the lifting plate, a turntable rotatably connected to the L-shaped platform, an anti-slip strip connected to the upper end of the turntable, a water tank connected to the L-shaped platform, a cooling spray frame connected to the water tank through a water pipe, the cooling spray frame being fixedly connected to the L-shaped platform, and a transmission mechanism connected to the L-shaped platform for driving the turntable to transfer the graphite blanks on the conveyor frame and perform rotational and uniform cooling.

[0007] Preferably, a conveyor wheel is rotatably connected to the conveyor frame, and the conveyor wheel is disposed on one side of the conveyor belt.

[0008] Preferably, one end of the conveyor frame is connected to a limiting post.

[0009] Preferably, a slide rail is connected to the back plate, and the lifting plate is slidably connected to the slide rail.

[0010] Preferably, the lifting plate is provided with a sliding groove, a slider is slidably connected to the sliding groove, a deflection rod is connected to the slider, the L-shaped platform is rotatably connected to the deflection rod, and a torsion spring is connected to the deflection rod.

[0011] Preferably, a rotating column is connected to the lower end of the turntable, and a sleeve is connected to the L-shaped platform, with the rotating column rotatably connected to the sleeve.

[0012] Preferably, the transmission mechanism includes a cylinder, one end of which is rotatably connected to the back plate via a rotating shaft, and a slide rod is connected to the telescopic end of the cylinder. A bending groove is provided on the back plate, and an insertion hole is provided on the L-shaped platform. The slide rod passes through the bending groove and is connected to the insertion hole. A gear is connected to the lower end of the turntable, a limit block is connected to the L-shaped platform, a rack is slidably connected to the limit block, the rack and the gear mesh with each other, a stop block is connected to one side of the L-shaped platform, and a torsion spring is connected between the gear and the L-shaped platform.

[0013] Preferably, a trapezoidal block is connected to the lower end of the gear, and a button for controlling the operation of the cooling spray frame is connected to one side of the L-shaped platform.

[0014] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. This application adopts a core structure that links a turntable, a gear and rack drive, and a cooling spray frame, so that the graphite billet can rotate stably with the turntable during the cooling process. At the same time, the cooling spray frame starts precisely to match the rotation rhythm, so as to achieve uniform cooling of the billet surface, effectively avoid quality problems caused by local temperature differences, and ensure the cooling consistency of isostatic graphite billets used for monocrystalline silicon manufacturing.

[0015] 2. This application adopts a core structure that uses a cylinder to drive a slide bar to move along the bending groove, which simultaneously drives the L-shaped stage to complete the transfer of the billet and the switching of the cooling position. No additional auxiliary equipment or manual intervention is required, which realizes the automated and continuous operation of billet conveying, transfer and cooling, and greatly improves the cooling and processing efficiency of isostatic graphite billets used in semiconductor single crystal silicon manufacturing. Attached Figure Description

[0016] Figure 1 An exploded structural diagram of a graphite preform cooling chamber provided according to an embodiment of the present invention is shown; Figure 2 A schematic diagram of the internal structure of a cooling chamber provided according to an embodiment of the present invention is shown; Figure 3 A schematic diagram of the structure of the cylinder connection provided according to an embodiment of the present invention is shown; Figure 4 A schematic diagram of the structure of the water tank connection provided according to an embodiment of the present invention is shown; Figure 5 A schematic diagram of the structure of the lifting plate connection provided according to an embodiment of the present invention is shown; Figure 6 An exploded structural diagram of the turntable connection provided according to an embodiment of the present invention is shown; Figure 7 A schematic diagram of the slider connection provided according to an embodiment of the present invention is shown.

[0017] Legend: 1. Base; 2. Backplate; 3. Conveyor frame; 4. Conveyor belt; 5. Conveyor wheel; 6. Limiting post; 7. Lifting plate; 8. Slide rail; 9. Bending groove; 10. Stop block; 11. L-shaped platform; 12. Turntable; 13. Cylinder; 14. Rotating shaft; 15. Slide rod; 16. Cooling spray frame; 17. Slider; 18. Water tank; 19. Anti-slip strip; 20. Sleeve; 21. Torsion spring one; 22. Button; 23. Limiting block; 24. Rack; 25. Insertion hole; 26. Gear; 27. Rotating column; 28. Deflection rod; 29. ​​Torsion spring two; 30. Slide groove; 31. Trapezoidal block. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1-7 The present invention provides a technical solution: A slow cooling device for isostatically pressed graphite blanks used in semiconductor single-crystal silicon manufacturing includes a base 1, a back plate 2 connected to one side of the base 1, the back plate 2 and the base 1 being perpendicular to each other, a conveyor frame 3 fixedly connected to the back plate 2, a conveyor belt 4 connected to the conveyor frame 3, the conveyor belt 4 transporting the graphite blank to a conveyor wheel 5, a lifting plate 7 slidably connected to one side of the back plate 2, the lifting plate 7 ensuring the stability of the L-shaped platform 11, the L-shaped platform 11 slidably connected to the lifting plate 7, a turntable 12 rotatably connected to the L-shaped platform 11, and an anti-slip strip 19 connected to the upper end of the turntable 12, the anti-slip strip 19 ensuring the stability of the graphite blank placement. A water tank 18 is connected to the L-shaped platform 11. The water tank 18 is connected to a cooling spray frame 16 through a water pipe. The water pipe is installed inside the L-shaped platform 11. The cooling spray frame 16 is equipped with multiple spray nozzles, which can evenly spray the cooling liquid onto the graphite blank on one side. The number of cooling spray frames 16 needs to be set according to the actual cooling requirements. The cooling spray frame 16 is fixedly connected to the L-shaped platform 11. The cooling spray frame 16 is rod-shaped, and its lower end is vertically connected to the L-shaped platform 11. The L-shaped platform 11 is connected to a transmission mechanism for driving the turntable 12 to transfer the graphite blank on the conveyor frame 3 and perform rotational cooling.

[0020] Specifically, such as Figure 2 As shown, a conveyor wheel 5 is rotatably connected to the conveyor frame 3. The conveyor wheel 5 is set on one side of the conveyor belt 4. The conveyor wheel 5 ensures the stability of the graphite billet transportation and does not interfere with the cooling and transfer of the graphite billet.

[0021] Specifically, such as Figure 2 As shown, one end of the conveyor frame 3 is connected to a limiting post 6. The limiting post 6 can intercept the movement of the graphite blank on the conveyor wheel 5, thereby ensuring the uniformity of the transport position of the graphite blank before cooling. When the graphite blank is driven to rise in height by the turntable 12, the graphite blank above the turntable 12 can be displaced to a height higher than the back plate 2, thereby avoiding the back plate 2 or the limiting post 6 from restricting its cooling rotation.

[0022] Specifically, such as Figure 5 As shown, a slide rail 8 is connected to the back plate 2, and the lifting plate 7 is slidably connected to the slide rail 8. By setting the slide rail 8, the stability of the lifting plate 7 in raising and lowering is improved.

[0023] Specifically, such as Figure 4 and Figure 7As shown, a sliding groove 30 is provided on the lifting plate 7, and a slider 17 is slidably connected to the sliding groove 30. By setting the slider 17 and the sliding groove 30 to cooperate, the stability of the movement of the L-shaped platform 11 is improved. A deflection rod 28 is connected to the slider 17, and the L-shaped platform 11 is rotatably connected to the deflection rod 28. A torsion spring 29 is connected to the deflection rod 28. By setting the deflection rod 28, the L-shaped platform 11 can be flipped, thereby avoiding the graphite blank by flipping. The torsion spring 29 can make the L-shaped platform 11 flip and reset.

[0024] Specifically, such as Figure 6 and Figure 7 As shown, a rotating column 27 is connected to the lower end of the turntable 12, and a sleeve 20 is connected to the L-shaped platform 11. The rotating column 27 is rotatably connected to the sleeve 20. By setting the rotating column 27 and the sleeve 20, the stability of the rotation of the turntable 12 is ensured.

[0025] Specifically, such as Figure 3 , Figure 6 and Figure 7 As shown, the transmission mechanism includes a cylinder 13. One end of the cylinder 13 is rotatably connected to the back plate 2 via a rotating shaft 14. The telescopic end of the cylinder 13 is connected to a slide rod 15, which is vertically connected to the telescopic end of the cylinder 13. A bending groove 9 is provided on the back plate 2. The bending groove 9 is L-shaped. An insertion hole 25 is provided on the L-shaped platform 11. The slide rod 15 passes through the bending groove 9 and is connected to the insertion hole 25. The L-shaped platform 11 is rotatably connected to the slide rod 15. When the slide rod 15 moves, it can synchronously drive the L-shaped platform 11 to move. A gear 26 is connected to the lower end of the turntable 12. A limit block 23 is connected to the L-shaped platform 11. A rack 24 is slidably connected to the limit block 23. When the gear 26 rotates, the rack 24 always remains engaged with it. The rack 24 and the gear 26 mesh with each other. A stop block 10 is connected to one side of the L-shaped platform 11. The stop block 10 is a fixed structure. When the rack 24 rises to its maximum height, the rack 24 and the stop block 10 are on the same horizontal plane. A torsion spring 21 is connected between the gear 26 and the L-shaped platform 11. By setting the torsion spring 21, the turntable 12 can be reset after rotation and the deflection angle of the turntable 12 can be stabilized.

[0026] Specifically, such as Figure 6 and Figure 7 As shown, a trapezoidal block 31 is connected to the lower end of the gear 26, and a button 22 for controlling the operation of the cooling spray frame 16 is connected to one side of the L-shaped platform 11. The trapezoidal block 31 has inclined surfaces at both ends, so that the button 22 can be easily pressed when the turntable 12 rotates, ensuring that the cooling spray frame 16 can be started in time when the turntable 12 drives the graphite blank to rotate.

[0027] In summary, the isostatic pressing graphite blank slow cooling device for semiconductor single crystal silicon manufacturing provided in this embodiment opens the cabinet door of the cooling chamber and sends the graphite blank to be cooled onto the conveyor belt 4 of the cooling chamber, so that the graphite blank can move with the conveyor belt 4 onto the conveyor wheel 5 and be pushed by the other graphite blanks, so that it moves on the conveyor wheel 5. When one side of the graphite blank abuts against the limiting post 6, it stops moving.

[0028] At this time, cylinder 13 is activated, and the extension of cylinder 13 drives slide rod 15 to slide on bending groove 9. Simultaneously, it drives L-shaped platform 11 connected to one end of slide rod 15 to move along the trajectory of bending groove 9. When slide rod 15 moves vertically, L-shaped platform 11, which is driven to rise vertically, simultaneously drives the lifting plate 7 connected below to rise in height. At this time, lifting plate 7 begins to slide on slide rail 8. The graphite blank on conveyor wheel 5 can rise in height with the support of turntable 12 below. At this time, the graphite blank at this location is away from conveyor wheel 5.

[0029] When the slide bar 15 rises to its maximum height, the graphite blank on the turntable 12 also rises to its maximum height. As the cylinder 13 continues to extend, the slide bar 15 begins to drive the L-shaped platform 11 to move horizontally. At this time, the lifting plate 7 stops rising, and the L-shaped platform 11 begins to move horizontally along the lifting plate 7. At this time, the slider 17 slides on the slide groove 30. In this state, the rack 24 and the stop block 10 are on the same horizontal plane. When the rack 24 moves toward the stop block 10, one end of the rack 24 abuts against the stop block 10 and stops moving. The L-shaped platform 11 will continue to move horizontally. At this time, there is a relative displacement between the rack 24 and the L-shaped platform 11, and the rack 24 drives the gear 26 to rotate.

[0030] When gear 26 rotates, torsion spring 21 begins to store power, and turntable 12 drives graphite blank to rotate. At the beginning of rotation, trapezoidal block 31 connected below turntable 12 can press button 22 on one side. At this time, button 22 controls water tank 18 to operate, so that cooling liquid is sprayed from nozzle of cooling spray frame 16 through water pipe, so that cooling liquid can be evenly sprayed onto the surface of rotating graphite blank, thereby achieving cooling of graphite blank.

[0031] As cylinder 13 continues to extend, turntable 12 continues to rotate, but it does not cause trapezoidal block 31 to press button 22 again. After cooling the graphite blank with a single cooling liquid, the graphite blank is transferred to the next processing step by the clamping mechanism set above it. At this time, cylinder 13 begins to retract, and turntable 12 rotates in the opposite direction under the action of torsion spring 21. When turntable 12 is about to return to the initial position, trapezoidal block 31 can press button 22 once. At this time, water tank 18 and cooling spray frame 16 stop operating. When L-shaped platform 11 moves vertically to the next graphite blank to be cooled on conveyor wheel 5, L-shaped platform 11 will be blocked by graphite blank and flip over. At this time, torsion spring 29 begins to store force, and L-shaped platform 11 begins to flip over to avoid graphite blank until L-shaped platform 11 moves to the bottom of conveyor frame 3. At this time, L-shaped platform 11 can return to its original position under the action of torsion spring 29.

[0032] This cooling device ensures that the graphite blanks are cooled uniformly, ensuring that each graphite blank undergoes a consistent cooling process, thus improving the uniformity of graphite blank processing. At the same time, the cylinder 13 ensures that the transportation and cooling of the graphite blanks are carried out in an orderly manner, achieving an efficient cooling process.

[0033] The above description of the embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A slow cooling device for isostatically pressed graphite blanks used in semiconductor single-crystal silicon manufacturing, comprising a base (1), characterized in that, The base (1) is connected to a back plate (2) on one side. A conveyor frame (3) is fixedly connected to the back plate (2). A conveyor belt (4) is connected to the conveyor frame (3). A lifting plate (7) is slidably connected to one side of the back plate (2). An L-shaped platform (11) is slidably connected to the lifting plate (7). A turntable (12) is rotatably connected to the L-shaped platform (11). An anti-slip strip (19) is connected to the upper end of the turntable (12). A water tank (18) is connected to the L-shaped platform (11). A cooling spray frame (16) is connected to the water tank (18) through a water pipe. The cooling spray frame (16) is fixedly connected to the L-shaped platform (11). A transmission mechanism is connected to the L-shaped platform (11) to drive the turntable (12) to transfer the graphite blank on the conveyor frame (3) and to rotate and cool it evenly. The transmission mechanism includes a cylinder (13), one end of which is rotatably connected to the back plate (2) via a rotating shaft (14). The telescopic end of the cylinder (13) is connected to a slide rod (15). A bending groove (9) is provided on the back plate (2), and an insertion hole (25) is provided on the L-shaped platform (11). The slide rod (15) passes through the bending groove (9) and is connected to the insertion hole (25). The turntable (12) is connected to a gear (26) at its lower end. A limit block (23) is connected to the L-shaped platform (11). A rack (24) is slidably connected to the limit block (23). The rack (24) meshes with the gear (26). A stop block (10) is connected to one side of the L-shaped platform (11). A torsion spring (21) is connected between the gear (26) and the L-shaped platform (11).

2. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 1, characterized in that, The conveyor frame (3) is rotatably connected to a conveyor wheel (5), which is located on one side of the conveyor belt (4).

3. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 2, characterized in that, One end of the conveyor frame (3) is connected to a limiting post (6).

4. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 1, characterized in that, The back plate (2) is connected to a slide rail (8), and the lifting plate (7) is slidably connected to the slide rail (8).

5. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 1, characterized in that, The lifting plate (7) is provided with a sliding groove (30), a slider (17) is slidably connected to the sliding groove (30), a deflection rod (28) is connected to the slider (17), the L-shaped platform (11) is rotatably connected to the deflection rod (28), and a torsion spring (29) is connected to the deflection rod (28).

6. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 1, characterized in that, The turntable (12) is connected to a rotating column (27) at its lower end, and a sleeve (20) is connected to the L-shaped platform (11). The rotating column (27) is rotatably connected to the sleeve (20).

7. The slow cooling device for isostatically pressed graphite blanks for semiconductor single-crystal silicon manufacturing according to claim 1, characterized in that, The lower end of the gear (26) is connected to a trapezoidal block (31), and a button (22) for controlling the operation of the cooling spray frame (16) is connected to one side of the L-shaped platform (11).

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