Impedance matched dual drive push-pull electro-optic modulator

CN122151387BActive Publication Date: 2026-07-21TIANJIN GUANGXI INFORMATION TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TIANJIN GUANGXI INFORMATION TECHNOLOGY CO LTD
Filing Date
2026-04-15
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Traditional silicon-based electro-optic modulators are prone to phase errors and amplitude imbalances at high frequencies, resulting in signal distortion. Furthermore, impedance mismatch leads to signal reflection and deterioration of high-frequency transmission performance, making it difficult to meet the low-cost, high-density, and large-scale manufacturing requirements of data centers.

Method used

An impedance-matched dual-drive push-pull electro-optic modulator is adopted. Through the coplanar waveguide traveling wave electrode of the GGSSG structure and the multilayer interconnect structure, the coordinated management of DC bias and RF modulation is realized, reducing signal cross-coupling and optimizing device integration and electro-optic bandwidth.

Benefits of technology

The modulation's termination impedance was improved, signal reflection and RF loss were reduced, high-frequency signal transmission performance was improved, half-wave voltage and device power consumption were reduced, and high integration and CMOS process compatibility were achieved.

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Abstract

The application discloses a kind of impedance-matched double-drive push-pull electro-optical modulators, belong to silicon-based photonics technical field.It includes optical waveguide phase shifter and electrode, electrode is the structure of GSGSG structure coplanar waveguide traveling wave electrode and direct current electrode cooperation, optical waveguide phase shifter includes two groups of parallel phase shifter groups, direct current electrode is arranged between the two waveguide arms of each phase shifter group, electrode ground electrode G1, G2, G3 are electrically connected by Contect_G, electrode adopts multilayer interconnection structure and waveguide arm of optical waveguide phase shifter to realize electric connection.The above-mentioned kind of impedance-matched double-drive push-pull electro-optical modulator effectively restricts radio frequency electric field, greatly reduces the electric field leakage and microwave loss caused by waveguide layout asymmetry, ensures the stability of direct current bias point and the quality of radio frequency modulation signal, while also help to optimize layout, chip overall structure is more compact, more suitable for large-scale, high-density optoelectronic integration.
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